TW201808925A - Oxime ester derivative compounds, photopolymerization initiator, and photosensitive composition containing the same - Google Patents

Oxime ester derivative compounds, photopolymerization initiator, and photosensitive composition containing the same Download PDF

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TW201808925A
TW201808925A TW106116746A TW106116746A TW201808925A TW 201808925 A TW201808925 A TW 201808925A TW 106116746 A TW106116746 A TW 106116746A TW 106116746 A TW106116746 A TW 106116746A TW 201808925 A TW201808925 A TW 201808925A
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photosensitive composition
hydroxy
oxime ester
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compound
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TWI644903B (en
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李元重
吳泉林
李得洛
李栽訓
趙鏞一
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三養股份有限公司
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    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
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    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images

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  • Nitrogen- Or Sulfur-Containing Heterocyclic Ring Compounds With Rings Of Six Or More Members (AREA)
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Abstract

Disclosed is an oxime ester derivative compound of Formula 1, and a photopolymerization initiator and a photosensitive composition comprising the same: wherein each of R1 to R3 is the same as defined in the detailed description.

Description

肟酯衍生化合物、光聚合起始劑、以及包含其之感光性組成物 Oxime ester-derived compound, photopolymerization initiator, and photosensitive composition containing the same

本揭露係關於一種肟酯衍生化合物、以及一種包含其之光聚合起始劑和感光性組成物。更特定而言,係關於一種具有優越的敏感度、耐熱性、耐光性、耐化學性、和固化性能之肟酯衍生化合物,以及一種包含其之光聚合起始劑和感光性組成物。 This disclosure relates to an oxime ester-derived compound, and a photopolymerization initiator and a photosensitive composition containing the same. More specifically, it relates to an oxime ester-derived compound having superior sensitivity, heat resistance, light resistance, chemical resistance, and curing properties, and a photopolymerization initiator and a photosensitive composition containing the same.

已經知道許多類型可作為感光性組成物中使用的光聚合起始劑之典型例子,例如苯乙酮(acetophenone)衍生物、二苯基酮(benzophenone)衍生物、三嗪(triazine)衍生物、聯咪唑(biimidazole)衍生物、醯基膦氧化物(acylphosphine oxide)衍生物、和肟酯(oxime ester)衍生化合物,其中,肟酯衍生化合物的優點為它們幾乎無色但可吸收紫外線、並具有高自由基發生效率、與感光性組成物材料優良的相容性、以及傑出的穩定性。然而,早期發展的肟酯衍生化合物具有低的光起始效率,特別是由於在圖案曝光過程中因低敏感度而需要增加曝光劑量,造成產量減少。 Many types are known as typical examples of photopolymerization initiators used in photosensitive compositions, such as acetophenone derivatives, benzophenone derivatives, triazine derivatives, Biimidazole derivatives, acylphosphine oxide derivatives, and oxime ester-derived compounds, among which oxime ester-derived compounds have the advantage that they are almost colorless but absorb ultraviolet rays and have high Free radical generation efficiency, excellent compatibility with photosensitive composition materials, and outstanding stability. However, early-developed oxime ester-derived compounds have low light initiation efficiency, especially due to the need to increase the exposure dose due to low sensitivity during pattern exposure, resulting in reduced yield.

因此,開發具有高光敏感度的光聚合起始劑導致在少量中可實現足夠的敏感度,產生節省成本的效果,以及由於高敏感度減少曝光劑量,而增加產量。 Therefore, the development of a photopolymerization initiator having a high light sensitivity results in that sufficient sensitivity can be achieved in a small amount, resulting in a cost-saving effect, and an increase in yield due to a reduction in the exposure dose due to the high sensitivity.

然而,當使用常規的光聚合起始劑形成圖案時,由於在圖案形成的曝光過程中的低敏感度,需要增加光聚合起始劑的量或增加曝光劑量,並且其所產生的缺點為在曝光過程中模具汙染,以及在高溫下交聯期間光聚合起始劑分解後副產物生成降低產率,並且由於曝光處理時間隨曝光劑量增加而而產量減少,因此正在致力於解決此問題。 However, when a conventional photopolymerization initiator is used to form a pattern, it is necessary to increase the amount of the photopolymerization initiator or increase the exposure dose due to the low sensitivity in the exposure process of the pattern formation, and the disadvantages are Mold contamination during exposure, and by-product formation after photopolymerization initiator decomposition during cross-linking at high temperatures reduces yield, and because exposure time decreases with increasing exposure dose, yields are being addressed.

本揭露係針對提供一種具有優越的敏感度、耐熱性、耐化學性、和固化性能之肟酯衍生化合物,以及包含其之光聚合起始劑和感光性組成物。 The present disclosure is directed to provide an oxime ester-derived compound having superior sensitivity, heat resistance, chemical resistance, and curing properties, and a photopolymerization initiator and a photosensitive composition containing the same.

本揭露進一步提供一種包含該感光性組成物之固化產物之模製品。 The present disclosure further provides a molded article comprising the cured product of the photosensitive composition.

本揭露進一步提供一種包含該模製品之顯示裝置。 The disclosure further provides a display device including the molded article.

為了達成上述目的,根據本揭露之一態樣,提供以下實施例之肟酯衍生化合物。 In order to achieve the above object, according to one aspect of the present disclosure, oxime ester-derived compounds of the following examples are provided.

第一實施例涉及式1之肟酯衍生化合物: The first embodiment relates to an oxime ester-derived compound of Formula 1:

其中,R1和R2各自獨立為氫、(C1-C20)烷基、(C6-C20)芳基、(C1-C20)烷氧基、(C6-C20)芳基(C1-C20)烷基、羥基(C1-C20)烷基、羥基(C1-C20)烷氧基(C1-C20)烷基、或(C3-C20)環烷基;以及R3為(C1-C20)烷基、(C6-C20)芳基、(C6-C20)芳基(C1-C20)烷基、或(C3-C20)環烷基。 Among them, R 1 and R 2 are each independently hydrogen, (C1-C20) alkyl, (C6-C20) aryl, (C1-C20) alkoxy, (C6-C20) aryl (C1-C20) alkane Hydroxy (C1-C20) alkyl, hydroxy (C1-C20) alkoxy (C1-C20) alkyl, or (C3-C20) cycloalkyl; and R 3 is (C1-C20) alkyl, (C6-C20) aryl, (C6-C20) aryl (C1-C20) alkyl, or (C3-C20) cycloalkyl.

第二實施例涉及第一實施例中之肟酯衍生化合物,其中,R1和R2各自獨立為氫、甲基、乙基、正丙基、異丙基、正丁基、異丁基、叔丁基、正戊基、異戊基、正己基、異己基、正辛基、正癸基、異癸基、正十二烷基、環戊基、環己基、苯基、苄基、萘基、聯苯基、聯三苯基、蒽基、茚基(indenyl)、菲基(phenanthryl)、甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、叔丁氧基、羥基甲基、羥基乙基、羥基正丙基、羥基正丁基、羥基異丁基、羥基正戊基、羥基異戊基、羥基正己基、羥基異己基、羥基甲氧基甲基、羥基甲氧基乙基、羥基甲氧基丙基、羥基甲氧基丁基、羥基乙氧基甲基、羥基乙氧基乙基、羥基乙氧基丙基、羥基乙氧基丁基、羥基乙氧基戊基、或羥基乙氧基己基;以及R3為甲基、乙基、正丙基、異丙基、正丁基、異丁基、叔丁基、正戊基、異戊基、正己基、異己基、環戊基、環己基、或苯基。 The second embodiment relates to the oxime ester-derived compound in the first embodiment, wherein R 1 and R 2 are each independently hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, Tert-butyl, n-pentyl, isopentyl, n-hexyl, isohexyl, n-octyl, n-decyl, isodecyl, n-dodecyl, cyclopentyl, cyclohexyl, phenyl, benzyl, naphthalene Group, biphenyl, bitriphenyl, anthryl, indenyl, phenanthryl, methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, iso Butoxy, tert-butoxy, hydroxymethyl, hydroxyethyl, hydroxy-n-propyl, hydroxy-n-butyl, hydroxy-isobutyl, hydroxy-n-pentyl, hydroxy-isoamyl, hydroxy-n-hexyl, hydroxy-isohexyl, Hydroxymethoxymethyl, hydroxymethoxyethyl, hydroxymethoxypropyl, hydroxymethoxybutyl, hydroxyethoxymethyl, hydroxyethoxyethyl, hydroxyethoxypropyl, hydroxy Ethoxybutyl, hydroxyethoxypentyl, or hydroxyethoxyhexyl; and R 3 is methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, N-pentyl, isopentyl, n-hexyl, isohexyl, cyclopentyl, cyclohexyl, or phenyl.

第三實施例涉及第一或第二實施例中之肟酯衍生化合物,其中,該肟酯衍生化合物選自以下式2-1至2-19之化合物:<式2-1至2-19> The third embodiment relates to the oxime ester-derived compound in the first or second embodiment, wherein the oxime ester-derived compound is selected from the compounds of the following formulae 2-1 to 2-19: <Formulas 2-1 to 2-19>

根據本揭露之一態樣,提供以下實施例之光聚合起始劑。 According to one aspect of the present disclosure, the photopolymerization initiators of the following examples are provided.

第四實施例涉及一種光聚合起始劑,包含第一至第三實施例中之一者之肟酯衍生化合物。 The fourth embodiment relates to a photopolymerization initiator including the oxime ester-derived compound of one of the first to third embodiments.

根據本揭露之一態樣,提供以下實施例之感光性組成物。 According to one aspect of the present disclosure, the photosensitive compositions of the following examples are provided.

第五實施例涉及一感光性組成物,包含:(a)一鹼性可溶性樹脂;(b)一具有烯性不飽和鍵(ethylenically unsaturated bond)之聚合性化合物;以及(c)一光聚合起始劑,包含第一至第三實施例中之一者之肟酯衍生化合物。 The fifth embodiment relates to a photosensitive composition including: (a) an alkaline soluble resin; (b) a polymerizable compound having an ethylenically unsaturated bond; and (c) a photopolymerization process The initiator includes the oxime ester-derived compound of one of the first to third embodiments.

第六實施例涉及第五實施例中之感光性組成物,其中,相對於該感光性組成物總量為100重量百分比,該肟酯衍生化合物存在量為0.01至10重量百分比。 The sixth embodiment relates to the photosensitive composition in the fifth embodiment, wherein the oxime ester-derived compound is present in an amount of 0.01 to 10% by weight relative to the total amount of the photosensitive composition.

第七實施例涉及第五或第六實施例中之感光性組成物,其中,該光聚合起始劑進一步包含至少一選自由噻噸酮(thioxanthone)系化合物、苯乙酮(acetophenone)系化合物、聯咪唑(biimidazole)系化合物、三嗪(triazine)系化合物、O-醯基肟酯系化合物、以及硫醇(thiol)系化合物所組成之群組。 The seventh embodiment relates to the photosensitive composition of the fifth or sixth embodiment, wherein the photopolymerization initiator further comprises at least one selected from the group consisting of a thioxanthone compound and an acetophenone compound A group of biimidazole compounds, triazine compounds, O-fluorenyl oxime ester compounds, and thiol compounds.

第八實施例涉及第五至第七實施例中之一者之感光性組成物,其中,該感光性組成物進一步包含一著色劑。 The eighth embodiment relates to the photosensitive composition of one of the fifth to seventh embodiments, wherein the photosensitive composition further includes a colorant.

根據本揭露之一態樣,提供以下實施例之模製品、以及包含其之顯示裝置。 According to one aspect of the present disclosure, a molded article of the following embodiments and a display device including the same are provided.

第九實施例涉及一種模製品,包含第五至第八實施例中之一者之感光性組成物之固化產物。 The ninth embodiment relates to a molded article including a cured product of the photosensitive composition of one of the fifth to eighth embodiments.

第十實施例涉及第九實施例中之模製品,其中,該模製品為陣列平面化膜(array planarization film)、絕緣膜(insulating film)、彩色濾光器(color filter)、柱間隔物(column spacer)、黑色柱間隔物(black column spacer)、或黑色矩陣(black matrix)。 The tenth embodiment relates to the molded article in the ninth embodiment, wherein the molded article is an array planarization film, an insulating film, a color filter, and a column spacer ( column spacers), black column spacers, or black matrices.

第11實施例涉及包括第十或第九實施例中之膜製品之顯示裝置。 An eleventh embodiment relates to a display device including the film product in the tenth or ninth embodiment.

根據本揭露之一實施例之肟酯衍生化合物之優點為當其作為感光性組成物之光聚合起始劑時具有優良的敏感度,並具有突出的特性,例如殘留膜厚度、圖案穩定性、耐熱性、耐化學性和延展性,以及在薄膜電晶體液晶顯示器(TFT-LCD)製造中的曝光和後烘(post-baking)過程期間從光聚合起始劑產生的排氣量最小化,從而減少污染和最小化從此產生的缺陷。 The advantage of the oxime ester-derived compound according to one embodiment of the present disclosure is that it has excellent sensitivity when used as a photopolymerization initiator of a photosensitive composition, and has outstanding characteristics such as residual film thickness, pattern stability, Heat resistance, chemical resistance, and ductility, and minimizing the amount of outgassed from photopolymerization initiators during exposure and post-baking processes in the manufacture of thin film transistor liquid crystal displays (TFT-LCD), Thereby reducing contamination and minimizing the resulting defects.

在此,將進一步詳細描述本揭露。在描述之前,應當理解在本說明書和所附申請專利範圍中使用的術語和文字不應被解釋為限制於一般和辭典之意義,而是對應於本揭露之技術方面的意義和概念,基於允許發明人適當地定義術語以獲得最佳解釋的原則來解釋。 Here, the present disclosure will be described in further detail. Before describing, it should be understood that the terms and words used in this specification and the scope of the attached patent application should not be interpreted as being limited to general and dictionary meanings, but rather to correspond to the technical meanings and concepts of this disclosure, based on permission The inventors appropriately define terms to explain the principles of best interpretation.

因此,本文所述的實施例和附圖中所示的示例僅為最優選地例子,並不代表本揭露的所有技術態樣,因此應當理解,在提交申請時可以以各種其他等同和修飾進行取代。 Therefore, the embodiments described herein and the examples shown in the drawings are only the most preferred examples, and do not represent all the technical aspects of this disclosure. Therefore, it should be understood that various other equivalents and modifications can be used when submitting an application. To replace.

根據本揭露之一態樣之肟酯衍生化合物由以下式1所表示: An oxime ester-derived compound according to one aspect of the present disclosure is represented by the following Formula 1:

在式1中,R1和R2各自獨立為氫、(C1-C20)烷基、(C6-C20)芳基、(C1-C20)烷氧基、(C6-C20)芳基(C1-C20)烷基、羥基(C1-C20)烷基、羥基(C1-C20)烷氧基(C1-C20)烷基、或(C3-C20)環烷基;以及R3為(C1-C20)烷基、(C6-C20)芳基、(C6-C20)芳基(C1-C20)烷基、或(C3-C20)環烷基。 In Formula 1, R 1 and R 2 are each independently hydrogen, (C1-C20) alkyl, (C6-C20) aryl, (C1-C20) alkoxy, (C6-C20) aryl (C1- C20) alkyl, hydroxy (C1-C20) alkyl, hydroxy (C1-C20) alkoxy (C1-C20) alkyl, or (C3-C20) cycloalkyl; and R 3 is (C1-C20) Alkyl, (C6-C20) aryl, (C6-C20) aryl (C1-C20) alkyl, or (C3-C20) cycloalkyl.

本文中,「烷基」、「烷氧基」及其他包含「烷基」部分之取代基包含直鏈或支鏈類型,以及「環烷基」包含單環和多環烴。 As used herein, "alkyl", "alkoxy" and other substituents containing an "alkyl" moiety include straight or branched chain types, and "cycloalkyl" includes monocyclic and polycyclic hydrocarbons.

此外,本文中術語「芳基」是指從芳香族烴藉由除去一個氫誘發的自由基,以及包含單一或稠和環系統,甚至包含藉由單鍵連接的多個芳基。 Furthermore, the term "aryl" as used herein refers to free radicals induced by the removal of one hydrogen from an aromatic hydrocarbon, and includes a single or thick and cyclic system, and even multiple aryl groups connected by a single bond.

此外,本文中術語「羥基烷基」是指羥基與上述定義之烷基鍵結之OH-烷基,術語「羥基烷氧基烷基」是指烷氧基與羥基烷基鍵結之羥基烷基-O-烷基,以及烯基是指包含與其鍵結之烷基或芳基之酮的結構。 In addition, the term "hydroxyalkyl" herein refers to an OH-alkyl group in which a hydroxyl group is bonded to an alkyl group as defined above, and the term "hydroxyalkoxyalkyl" refers to a hydroxyalkyl group in which an alkoxy group is bonded to a hydroxyalkyl group The group -O-alkyl, and alkenyl refers to a structure containing a ketone of an alkyl group or an aryl group bonded thereto.

此外,本為術語「(C1-C20)烷基」是指具有1至20個碳原子之烷基,且該烷基可以優選為(C1-C12)烷基。 In addition, the term “(C1-C20) alkyl” refers to an alkyl group having 1 to 20 carbon atoms, and the alkyl group may preferably be a (C1-C12) alkyl group.

「(C6-C20)芳基」是指具有6至20個碳原子之芳基,且該芳基可以優選為(C6-C18)芳基。「(C1-C20)烷氧基」是指具有1至20個碳原子之烷氧基,且該烷氧基可以優選為(C1-C10)烷氧基,且更優選為(C1-C4)烷氧基。 The "(C6-C20) aryl group" means an aryl group having 6 to 20 carbon atoms, and the aryl group may be preferably a (C6-C18) aryl group. "(C1-C20) alkoxy" means an alkoxy group having 1 to 20 carbon atoms, and the alkoxy group may be preferably (C1-C10) alkoxy, and more preferably (C1-C4) Alkoxy.

「(C6-C20)芳基(C1-C20)烷基」是指一個氫被具有6至20個碳原子之芳基取代之具有1至20個碳原子之烷基,且可以優選為(C6-C18)芳基(C1-C10)烷基,且更優選為(C6-C18)芳基(C1-C6)烷基。 "(C6-C20) aryl (C1-C20) alkyl" means an alkyl group having 1 to 20 carbon atoms in which one hydrogen is replaced with an aryl group having 6 to 20 carbon atoms, and may be preferably (C6 -C18) aryl (C1-C10) alkyl, and more preferably (C6-C18) aryl (C1-C6) alkyl.

「羥基(C1-C20)烷基」是指一個氫被羥基取代之具有1至20個碳原子之烷基,且可以優選為羥基(C1-C10)烷基,且更優選為羥基(C1-C6)烷基。 "Hydroxy (C1-C20) alkyl" means an alkyl group having 1 to 20 carbon atoms in which one hydrogen is replaced by a hydroxyl group, and may be preferably a hydroxy (C1-C10) alkyl group, and more preferably a hydroxy (C1- C6) alkyl.

「羥基(C1-C20)烷氧基(C1-C20)烷基」是指一個氫被具有1至20個碳原子之烷氧基取代,且另一個氫被羥基取代之具有1至20個碳原子之烷基,且可以優選為羥基(C1-C10)烷氧基(C1-C10)烷基,且更優選為羥基(C1-C4)烷氧基(C1-C6)烷基。 "Hydroxy (C1-C20) alkoxy (C1-C20) alkyl" means that one hydrogen is substituted with an alkoxy group having 1 to 20 carbon atoms, and the other hydrogen is substituted with a hydroxy group having 1 to 20 carbons An atomic alkyl group, and may be preferably a hydroxy (C1-C10) alkoxy (C1-C10) alkyl group, and more preferably a hydroxy (C1-C4) alkoxy (C1-C6) alkyl group.

「(C3-C20)環烷基」是指具有3至20個碳原子之環烷基,且可以優選為(C3-C10)環烷基。 "(C3-C20) cycloalkyl" means a cycloalkyl group having 3 to 20 carbon atoms, and may be preferably a (C3-C10) cycloalkyl group.

根據本揭露之一實施例,R1和R2可以各自獨立為氫、甲基、乙基、正丙基、異丙基、正丁基、異丁基、叔丁基、正戊基、異戊基、正己基、異己基、正辛基、正癸基、異癸基、正十二烷基、環戊基、環己基、苯基、苄基、萘基、聯苯基、聯三苯基、蒽基、茚基(indenyl)、菲基(phenanthryl)、甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、叔丁氧基、羥基甲基、羥基乙基、羥基正丙基、羥基正丁基、羥基異丁基、羥基正戊基、羥基異戊基、羥基正己基、羥基異己基、羥基甲氧基甲基、羥基甲氧基乙基、羥基甲氧基丙基、羥基甲氧基丁基、羥基乙氧基甲基、羥基乙氧基乙基、羥基乙氧基丙基、羥基乙氧基丁基、羥基乙氧基戊基、或羥基乙氧基己基。 According to an embodiment of the present disclosure, R 1 and R 2 may be each independently hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, t-butyl, n-pentyl, iso Amyl, n-hexyl, isohexyl, n-octyl, n-decyl, isodecyl, n-dodecyl, cyclopentyl, cyclohexyl, phenyl, benzyl, naphthyl, biphenyl, bitriphenyl Group, anthryl, indenyl, phenanthryl, methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, tert-butoxy, Hydroxymethyl, hydroxyethyl, hydroxy-n-propyl, hydroxy-n-butyl, hydroxy-isobutyl, hydroxy-n-pentyl, hydroxy-isopentyl, hydroxy-n-hexyl, hydroxy-isohexyl, hydroxymethoxymethyl, hydroxymethyl Oxyethyl, hydroxymethoxypropyl, hydroxymethoxybutyl, hydroxyethoxymethyl, hydroxyethoxyethyl, hydroxyethoxypropyl, hydroxyethoxybutyl, hydroxyethoxy Pentyl, or hydroxyethoxyhexyl.

此外,R3可以為甲基、乙基、正丙基、異丙基、正丁基、異丁基、叔丁基、正戊基、異戊基、正己基、異己基、環戊基、環己基、或苯基。 In addition, R 3 may be methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, n-pentyl, isopentyl, n-hexyl, isohexyl, cyclopentyl, Cyclohexyl, or phenyl.

更具體地,R1和R2可以各自獨立為甲基、乙基、正丙基、異丙基、正丁基、正戊基、正辛基、正癸基、異癸基、正十二烷基、環己基、苯基、或苄基;以及R3可以為甲基、乙基、正丙基;或苯基。 More specifically, R 1 and R 2 may each independently be methyl, ethyl, n-propyl, isopropyl, n-butyl, n-pentyl, n-octyl, n-decyl, isodecyl, n-dodecyl Alkyl, cyclohexyl, phenyl, or benzyl; and R 3 may be methyl, ethyl, n-propyl; or phenyl.

根據本揭露之一實施例,肟酯衍生化合物包含但不限於以下式2-1至2-19之化合物。 According to one embodiment of the present disclosure, the oxime ester-derived compound includes, but is not limited to, compounds of the following formulae 2-1 to 2-19.

根據本揭露式1之肟酯衍生化合物可以由如以下反應式1來製備。 The oxime ester-derived compound according to Formula 1 according to the present disclosure can be prepared from the following Reaction Formula 1.

在反應式1中,R1至R3與式1中所定義相同,且X為鹵素。 In Reaction Formula 1, R 1 to R 3 are the same as defined in Formula 1, and X is a halogen.

此外,根據本揭露之一態樣之光聚合起始劑包含至少一類型式1之肟酯衍生化合物。 In addition, a photopolymerization initiator according to one aspect of the present disclosure includes at least one type 1 oxime ester-derived compound.

此外,根據本揭露之一態樣之感光性組成物包含:(a)一鹼性可溶性樹脂;(b)一具有烯性不飽和鍵之聚合性化合物;以及(c)一光聚合起始劑,包含式1之肟酯衍生化合物。 In addition, a photosensitive composition according to one aspect of the present disclosure includes: (a) an alkaline soluble resin; (b) a polymerizable compound having an ethylenically unsaturated bond; and (c) a photopolymerization initiator , Comprising an oxime ester-derived compound of formula 1.

在此,該肟酯衍生化合物可以做為光聚合起始劑。 Here, the oxime ester-derived compound can be used as a photopolymerization initiator.

根據本揭露之一態樣之感光性組成物之圖案特性的調節性優越,且具有突出的薄膜特性,例如耐熱性和耐化學性。以下提供詳細的描述。 According to one aspect of the present disclosure, the patterning characteristics of the photosensitive composition are excellent in adjustability, and have outstanding film characteristics such as heat resistance and chemical resistance. A detailed description is provided below.

(a)鹼性可溶性樹脂 (a) Alkali soluble resin

鹼性可溶性樹脂包含丙烯酸聚合物或在側鏈上具有丙烯酸不飽和鍵之丙烯酸聚合物。 The alkaline soluble resin contains an acrylic polymer or an acrylic polymer having an acrylic unsaturated bond on a side chain.

丙烯酸聚合物是指丙烯酸單體(包含同元聚合物(homopolymer)和共聚物)的聚合物,丙烯酸單體的例子包含甲基丙烯酸甲酯、甲基丙烯酸乙酯、 甲基丙烯酸丙酯、甲基丙烯酸丁酯、甲基丙烯酸戊酯、甲基丙烯酸己酯、甲基丙烯酸環己酯、甲基丙烯酸庚酯、甲基丙烯酸辛酯、甲基丙烯酸壬酯、甲基丙烯酸癸酯、甲基丙烯酸十二烷酯(dodecylmethacrylate,laurylmethacrylate)、甲基丙烯酸十四烷酯(tetradecylmethacrylate)、甲基丙烯酸十六烷酯(hexadecylmethacrylate)、甲基丙烯酸異茨酯(isobornylmethacrylate)、甲基丙烯酸金剛烷酯(adamantylmethacrylate)、甲基丙烯酸二環戊酯、甲基丙烯酸二環戊烯酯、甲基丙烯酸芐酯、甲基丙烯酸2-甲氧基乙基酯、甲基丙烯酸2-乙氧基乙酯、丙烯酸、甲基丙烯酸、伊康酸(itaconic acid)、馬來酸(maleic acid)、馬來酸酐(maleic anhydride)、馬來酸單烷基酯(maleic acid monoalkyl ester)、伊康酸單烷基酯(monoalkyl itaconate)、延胡索酸單烷基酯(monoalkyl fumarate)、丙烯酸環氧丙酯(glycidylacrylate)、甲基丙烯酸環氧丙酯(glycidyl methacrylate)、甲基丙烯酸3,4-環氧丁酯、甲基丙烯酸2,3-環氧環己酯、甲基丙烯酸3,4-環氧環己基甲基酯(3,4-epoxycyclohexylmethylmethacrylate)、3-甲基氧雜環丁烷-3-甲基甲基丙烯酸酯(3-methyloxetane-3-methylmethacrylate)、3-乙基氧雜環丁烷-3-甲基甲基丙烯酸酯、苯乙烯、α-甲基苯乙烯、乙醯氧基苯乙烯(acetoxystyrene)、N-甲基馬來醯亞胺(N-methylmaleimide)、N-乙基馬來醯亞胺、N-丙基馬來醯亞胺、N-丁基馬來醯亞胺、N-環己基馬來醯亞胺、甲基丙烯醯胺(methacrylamide)、和N-甲基甲基丙烯醯胺單獨或組合使用。 An acrylic polymer refers to a polymer of acrylic monomers (including homopolymers and copolymers). Examples of acrylic monomers include methyl methacrylate, ethyl methacrylate, Propyl methacrylate, butyl methacrylate, pentyl methacrylate, hexyl methacrylate, cyclohexyl methacrylate, heptyl methacrylate, octyl methacrylate, nonyl methacrylate, formic acid Decyl acrylate, dodecylmethacrylate (laurylmethacrylate), tetradecylmethacrylate, hexatradecylmethacrylate, hexadecylmethacrylate, isobornylmethacrylate, Adamantylmethacrylate, dicyclopentyl methacrylate, dicyclopentenyl methacrylate, benzyl methacrylate, 2-methoxyethyl methacrylate, 2-methacrylic acid 2- Ethoxyethyl, acrylic, methacrylic, itaconic acid, maleic acid, maleic anhydride, maleic acid monoalkyl ester, Monoalkyl itaconate, monoalkyl fumarate, glycidyl acrylate, glycidyl methacrylate thacrylate), 3,4-epoxybutyl methacrylate, 2,3-epoxycyclohexyl methacrylate, 3,4-epoxycyclohexylmethylmethacrylate, 3-methyloxetane-3-methylmethacrylate, 3-ethyloxetane-3-methylmethacrylate, styrene, α-methylstyrene, acetoxystyrene, N-methylmaleimide, N-ethylmaleimide, N-propylmaleimide Amine, N-butylmaleimide, N-cyclohexylmaleimide, methacrylamide, and N-methylmethacrylamide are used alone or in combination.

此外,在側鏈具有丙烯酸不飽和鍵之丙烯酸聚合物是由環氧樹脂與包含羧酸之丙烯酸共聚物的加成反應所形成之共聚物,並且包含通過環氧樹脂的加成反應在40至180℃下獲得的黏合劑樹脂,例如丙烯酸縮水甘油酯(glycidylacrylate)、甲基丙烯酸縮水甘油酯(glycidylmethacrylate)、甲基丙烯酸3,4- 環氧丁酯、甲基丙烯酸2,3-環氧環己酯、和甲基丙烯酸3,4-環氧環己基甲酯(3,4-epoxycyclohexylmethylmethacrylate)加成至藉由包含羧酸的丙烯酸單體共聚化所獲得之包含羧酸的丙烯酸共聚物,前述羧酸丙烯酸、甲基丙烯酸、伊康酸(itaconic acid)、馬來酸(maleic acid)、和馬來酸單烷基酯(maleic acid monoalkyl ester),以及至少兩種甲基丙烯酸烷酯單體,前述甲基丙烯酸烷酯例如甲基丙烯酸甲酯、和甲基丙烯酸己酯、甲基丙烯酸環己酯、甲基丙烯酸異茨酯(isobornylmethacrylate)、甲基丙烯酸金剛烷酯(adamantylmethacrylate)、甲基丙烯酸二環戊酯、甲基丙烯酸二環戊烯酯、甲基丙烯酸芐酯、甲基丙烯酸2-甲氧基乙基酯、甲基丙烯酸2-乙氧基乙酯、苯乙烯、α-甲基苯乙烯、乙醯氧基苯乙烯(acetoxystyrene)、N-甲基馬來醯亞胺(N-methylmaleimide)、N-乙基馬來醯亞胺、N-丙基馬來醯亞胺、N-丁基馬來醯亞胺、N-環己基馬來醯亞胺、甲基丙烯醯胺(methacrylamide)、和N-甲基甲基丙烯醯胺。 In addition, an acrylic polymer having an acrylic unsaturated bond in a side chain is a copolymer formed by an addition reaction of an epoxy resin and an acrylic copolymer containing a carboxylic acid, and includes an addition reaction of 40 to 50% by an addition reaction of an epoxy resin. Adhesive resins obtained at 180 ° C, such as glycidylacrylate, glycidylmethacrylate, 3,4-methacrylic acid The addition of butyl oxide, 2,3-epoxycyclohexyl methacrylate, and 3,4-epoxycyclohexylmethylmethacrylate to methacrylic acid Carboxylic acid-containing acrylic copolymer obtained by bulk copolymerization, the aforementioned carboxylic acid acrylic acid, methacrylic acid, itaconic acid, maleic acid, and maleic acid monoalkyl ester monoalkyl ester), and at least two alkyl methacrylate monomers, such as the aforementioned alkyl methacrylates such as methyl methacrylate, and hexyl methacrylate, cyclohexyl methacrylate, isotyl methacrylate ( isobornylmethacrylate), adamantylmethacrylate, dicyclopentyl methacrylate, dicyclopentenyl methacrylate, benzyl methacrylate, 2-methoxyethyl methacrylate, methyl 2-ethoxyethyl acrylate, styrene, α-methylstyrene, acetoxystyrene, N-methylmaleimide, N-ethylmaleimide Arsenimine, N-propylmaleimide, N-butylmaleimide , N- cyclohexylmaleimide (PEI) methyl acrylamide (methacrylamide), and N- methyl acrylamide.

在側鏈具有丙烯酸不飽和鍵之丙烯酸聚合物之另一例子是由羧酸與包含環氧基之丙烯酸共聚物的加成反應所形成之共聚物,並且包含通過包含羧酸之丙烯酸單體的加成反應在40至180℃下獲得的黏合劑樹脂,前述羧酸例如丙烯酸、甲基丙烯酸、伊康酸(itaconic acid)、馬來酸(maleic acid)、和馬來酸單烷基酯(maleic acid monoalkyl ester),加成至藉由包含環氧基的丙烯酸單體共聚化所獲得之包含環氧基的丙烯酸共聚物,前述丙烯酸單體例如丙烯酸縮水甘油酯(glycidylacrylate)、甲基丙烯酸縮水甘油酯(glycidylmethacrylate)、甲基丙烯酸3,4-環氧丁酯、甲基丙烯酸2,3-環氧環己酯、和甲基丙烯酸3,4-環氧環己基甲酯(3,4-epoxycyclohexylmethylmethacrylate),以及至少兩種甲基丙烯酸烷酯單體,例如甲基丙烯酸甲酯、甲基丙烯酸己酯、甲基丙烯酸環己酯、甲基丙烯酸異茨 酯(isobornylmethacrylate)、甲基丙烯酸金剛烷酯(adamantylmethacrylate)、甲基丙烯酸二環戊酯、甲基丙烯酸二環戊烯酯、甲基丙烯酸芐酯、甲基丙烯酸2-甲氧基乙基酯、甲基丙烯酸2-乙氧基乙酯、苯乙烯、α-甲基苯乙烯、乙醯氧基苯乙烯(acetoxystyrene)、N-甲基馬來醯亞胺(N-methylmaleimide)、N-乙基馬來醯亞胺、N-丙基馬來醯亞胺、N-丁基馬來醯亞胺、N-環己基馬來醯亞胺、甲基丙烯醯胺(methacrylamide)、和N-甲基甲基丙烯醯胺。 Another example of an acrylic polymer having an acrylic unsaturated bond in a side chain is a copolymer formed by addition reaction of a carboxylic acid and an acrylic copolymer containing an epoxy group, and Binder resin obtained at an addition reaction at 40 to 180 ° C, the aforementioned carboxylic acids such as acrylic acid, methacrylic acid, itaconic acid, maleic acid, and maleic acid monoalkyl ester ( maleic acid monoalkyl ester), added to an acrylic copolymer containing epoxy groups obtained by copolymerization of acrylic monomers containing epoxy groups, the aforementioned acrylic monomers such as glycidyl acrylate, methacrylic acid shrink Glycidylmethacrylate, 3,4-epoxybutyl methacrylate, 2,3-epoxycyclohexyl methacrylate, and 3,4-epoxycyclohexyl methyl methacrylate (3,4- epoxycyclohexylmethylmethacrylate), and at least two alkyl methacrylate monomers, such as methyl methacrylate, hexyl methacrylate, cyclohexyl methacrylate, isocyanate methacrylate Ester (isobornylmethacrylate), adamantylmethacrylate, dicyclopentyl methacrylate, dicyclopentenyl methacrylate, benzyl methacrylate, 2-methoxyethyl methacrylate, 2-ethoxyethyl methacrylate, styrene, α-methylstyrene, acetoxystyrene, N-methylmaleimide, N-ethyl Maleimide, N-propylmaleimide, N-butylmaleimide, N-cyclohexylmaleimide, methacrylamide, and N-methyl Methacrylamide.

根據本揭露之一實施例,為了調整圖案特性並賦予例如耐熱性和耐化學性薄膜性能,相對於該感光性組成物總量為100重量百分比,該鹼性可溶性樹脂可以3至50重量百分比存在,具體為5至45重量百分比,且更具體為8至40重量百分比。 According to an embodiment of the present disclosure, in order to adjust pattern characteristics and impart properties such as heat resistance and chemical resistance, the alkaline soluble resin may be present in an amount of 3 to 50% by weight relative to the total amount of the photosensitive composition. , Specifically 5 to 45 weight percent, and more specifically 8 to 40 weight percent.

鹼性可溶性樹脂可以具有重量平均分子量2,000至300,000,具體為4,000至100,000,且分散度為1至10.0。 The alkaline soluble resin may have a weight average molecular weight of 2,000 to 300,000, specifically 4,000 to 100,000, and a degree of dispersion of 1 to 10.0.

(b)具有烯性不飽和鍵之聚合性化合物 (b) Polymerizable compounds having ethylenically unsaturated bonds

具有烯性不飽和鍵之聚和性化合物在形成圖案時通過光反應而交聯,並有助於圖案形成,且當在高溫下交加熱時,交聯以賦予耐化學性及耐熱性。 The polyalkaline compound having an ethylenically unsaturated bond is cross-linked by a photoreaction when forming a pattern, and contributes to the formation of the pattern. When cross-heated at a high temperature, the cross-linking imparts chemical resistance and heat resistance.

相對於該感光性組成物總量為100重量百分比,具有烯性不飽和鍵之聚合性化合物可以0.001至40重量百分比存在,具體為0.1至30重量百分比,且更具體為1至20重量百分比。 The polymerizable compound having an ethylenically unsaturated bond may be present in an amount of 0.001 to 40 weight percent, specifically 0.1 to 30 weight percent, and more specifically 1 to 20 weight percent with respect to the total amount of the photosensitive composition.

當具有烯性不飽和鍵之聚合性化合物存在過量時,缺點為交聯的程度過量增加,且圖案的延展性降低。 When there is an excessive amount of a polymerizable compound having an ethylenically unsaturated bond, the disadvantage is that the degree of crosslinking is excessively increased, and the ductility of the pattern is decreased.

具有烯性不飽和鍵之聚合性化合物具體包含甲基丙烯酸的烷基酯,例如甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸丁酯、甲基丙烯酸2-乙基己酯、甲基丙烯酸十二烷酯、甲基丙烯酸縮水甘油酯、具有2至14個環氧乙烷基團之聚乙二醇單甲基丙烯酸酯(polyethylene glycolmonomethacrylate)、乙二醇二甲基丙烯酸酯(ethyleneglycoldimethacrylate)、具有2至14個環氧乙烷基團之聚乙二醇二甲基丙烯酸酯(polyethylene glycoldimethacrylate)、具有2至14個環氧丙烷基團之丙二醇二甲基丙烯酸酯(propylene glycol dimethacrylate)、三羥甲基丙烷二甲基丙烯酸酯(trimethylolpropanedimethacrylate)、雙酚A二縮水甘油醚丙烯酸(bisphenol A diglycidyletheracrylic acid)之加成物、β-羥基乙基甲基丙烯酸酯之鄰苯二甲酸二酯(phthalic acid diester of β-hydroxyethylmethacrylate)、β-羥基乙基甲基丙烯酸酯之甲苯二異氰酸酯加成物(toluene diisocyannate adduct of β-hydroxyethylmethacrylate)、由多元醇和β-不飽和羧酸經酯化而得的化合物,例如三羥甲基丙烷三甲基丙烯酸酯(trimethylolpropanetrimethacrylate)、季戊四醇三甲基丙烯酸酯(pentaerythritoltrimethacrylate)、季戊四醇四甲基丙烯酸酯(pentaerythritoltetramethacrylate)、二季戊四醇五甲基丙烯酸酯(dipentaerythritolpentamethacrylate)、二季戊四醇六甲基丙烯酸酯(dipentaerythritolhexamethacrylate)、和二季戊四醇三甲基丙烯酸酯(dipentaerythritol trimethacrylate)、和聚縮水甘油化合物之丙烯酸加成物(acrylic acid adducts of poly glycidyl compounds)例如三羥甲基丙烷三縮水甘油醚丙烯酸(trimethylolpropanetriglycidyletheracrylic acid)之加成物,其單獨或合併使用。 The polymerizable compound having an ethylenically unsaturated bond specifically includes an alkyl ester of methacrylic acid, such as methyl methacrylate, ethyl methacrylate, butyl methacrylate, 2-ethylhexyl methacrylate, a Dodecyl acrylate, glycidyl methacrylate, polyethylene glycol monomethacrylate with 2 to 14 ethylene oxide groups, ethylene glycol dimethacrylate ), Polyethylene glycol dimethacrylate with 2 to 14 ethylene oxide groups, propylene glycol dimethacrylate with 2 to 14 propylene oxide groups , Trimethylolpropanedimethacrylate, adduct of bisphenol A diglycidyletheracrylic acid, phthalate diester of β-hydroxyethylmethacrylate (phthalic acid diester of β-hydroxyethylmethacrylate), toluene diisocyanate adduct of β-hydroxyethyl methacrylate (toluene diis ocyannate adduct of β-hydroxyethylmethacrylate), compounds obtained by esterification of polyhydric alcohols and β-unsaturated carboxylic acids, such as trimethylolpropanetrimethacrylate, pentaerythritoltrimethacrylate, Pentaerythritoltetramethacrylate, dipentaerythritolpentamethacrylate, dipentaerythritolhexamethacrylate, and dipentaerythritol trimethacrylate, and polyglycidyl compound Acrylic acid adducts of poly glycidyl compounds, such as trimethylolpropanetriglycidyletheracrylic acid, are used alone or in combination.

(c)光聚合起始劑 (c) Photopolymerization initiator

在本揭露之感光性組成物中,作為光聚合起始劑,可使用式1之肟酯衍生化合物。相對於該感光性組成物總量為100重量百分比,光聚合起始劑以0.01至10重量百分比存在是更有效的,且優選為0.1至5重量百分比,從而提高透明度,同時最小化曝光劑量。 In the photosensitive composition of the present disclosure, as a photopolymerization initiator, an oxime ester-derived compound of Formula 1 can be used. Relative to the total amount of the photosensitive composition being 100% by weight, it is more effective that the photopolymerization initiator is present at 0.01 to 10% by weight, and preferably 0.1 to 5% by weight, so as to improve transparency while minimizing the exposure dose.

(d)輔助黏合劑(auxiliary adhesive) (d) Auxiliary adhesive

此外,如果需要,本揭露之感光性組成物可以進一步包含具有環氧基或胺基之矽氧烷基(silicone-based)化合物,作為輔助黏合劑。 In addition, if necessary, the photosensitive composition of the present disclosure may further include a silicone-based compound having an epoxy group or an amine group as an auxiliary adhesive.

具有環氧基或胺基之矽氧烷基化合物可以改善ITO電極和感光性組成物之間的黏著性,並在固化後提高耐熱特性。具有環氧基或胺基之矽氧烷基化合物包含(3-環氧丙氧基丙基)三甲氧基矽烷((3-glycidoxypropyl)trimethoxysilane)、(3-環氧丙氧基丙基)三乙氧基矽烷((3-glycidoxypropyl)triethoxysilane)、(3-環氧丙氧基丙基)甲基二甲氧基矽烷((3-glycidoxypropyl)methyldimethoxysilane)、(3-環氧丙氧基丙基)甲基二乙氧基矽烷((3-glycidoxypropyl)methyldiethoxysilane)、(3-環氧丙氧基丙基)二甲基甲氧基矽烷((3-glycidoxypropyl)dimethylmethoxysilane)、(3-環氧丙氧基丙基)二甲基乙氧基矽烷((3-glycidoxypropyl)dimethylethoxysilane)、3,4-環氧基丁基三甲氧基矽烷(3,4-epoxybutyltrimethoxysilane)、3,4-環氧基丁基三乙氧基矽烷(3,4-epoxybutyltriethoxysilane)、2-(3,4-環氧基環己基)乙基三甲氧基矽烷(2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane、2-(3,4-環氧基環己基)乙基三乙氧基矽烷(2-(3,4-epoxycyclohexyl)ethyltriethoxysilane)、以及胺基丙基三甲氧基矽烷(3-aminopropyltrimethoxysilane),其單獨或合併使用。 A siloxane-based compound having an epoxy group or an amine group can improve adhesion between an ITO electrode and a photosensitive composition, and improve heat resistance characteristics after curing. Siloxyalkyl compounds having epoxy or amine groups include (3-glycidoxypropyl) trimethoxysilane, (3-glycidoxypropyl) trimethoxysilane, and (3-glycidoxypropyl) trimethoxysilane. (3-glycidoxypropyl) triethoxysilane, (3-glycidoxypropyl) methyldimethoxysilane, (3-glycidoxypropyl) methyldimethoxysilane ) (3-glycidoxypropyl) methyldiethoxysilane, (3-glycidoxypropyl) dimethylmethoxysilane, (3-glycidoxypropyl) dimethylmethoxysilane, (3-epoxypropyl) ((3-glycidoxypropyl) dimethylethoxysilane), 3,4-epoxybutyltrimethoxysilane, 3,4-epoxybutyl Triethoxysilane (3,4-epoxybutyltriethoxysilane), 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane (2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 2- (3, 4- (epoxycyclohexyl) ethyltriethoxysilane and 3-aminopropyltrimethoxysilane Alone or in combination.

相對於該感光性組成物總量為100重量百分比,具有環氧基或胺基之矽氧烷基化合物可以0.0001至3重量百分比存在。當含量小於該範圍時,沒有發現附加的效果,以及當含量超過該範圍時,未曝光區域的特性劣化、浮渣(scum)和殘餘物會留在下基板、ITO或玻璃基板上。 The siloxane-based compound having an epoxy group or an amine group may be present in an amount of 0.0001 to 3% by weight based on the total weight of the photosensitive composition. When the content is less than the range, no additional effects are found, and when the content exceeds the range, the characteristics of the unexposed area deteriorate, scum, and residues remain on the lower substrate, ITO, or glass substrate.

(e)其他添加劑 (e) Other additives

如果有需要,本揭露之感光性組成物可進一步包含具有相容性之添加劑,例如光敏劑;熱聚合抑制劑;消泡劑;和調平劑(leveling agent)。 If necessary, the photosensitive composition of the present disclosure may further include compatible additives, such as a photosensitizer; a thermal polymerization inhibitor; a defoaming agent; and a leveling agent.

相對於該感光性組成物總量為100重量百分比,其他添加劑可以0.1至10重量百分比存在,且當含量小於該範圍時,沒有發現附加的效果,以及當含量超過該範圍時,可能形成過量的浮渣。 Relative to the total amount of the photosensitive composition is 100% by weight, other additives may be present at 0.1 to 10% by weight, and when the content is less than the range, no additional effect is found, and when the content exceeds the range, an excessive amount may be formed. scum.

(f)溶劑 (f) Solvent

本揭露之感光性組成物用於通過添加溶劑、在基板上進行塗布、使用光罩輻射紫外線、以及使用鹼性顯影劑溶液顯影的方法來形成圖案。 The photosensitive composition of the present disclosure is used to form a pattern by adding a solvent, coating on a substrate, radiating ultraviolet rays using a photomask, and developing using an alkaline developer solution.

據此,可以調節溶劑的含量使溶劑的含量和感光性組成物之其他成分的含量的總和為100重量百分比,因此,溶劑的含量可以根據感光性組成物之其他成分的含量而改變。例如優選調節溶劑含量,相對於該感光性組成物總量為100重量百分比,加入的溶劑的量為10至95重量百分比,以使黏度範圍為1至50厘泊(cps)。 Accordingly, the content of the solvent can be adjusted so that the sum of the content of the solvent and the content of the other components of the photosensitive composition is 100% by weight. Therefore, the content of the solvent can be changed according to the content of the other components of the photosensitive composition. For example, it is preferable to adjust the content of the solvent to 100% by weight based on the total amount of the photosensitive composition, and the amount of the solvent to be added is 10 to 95% by weight, so that the viscosity ranges from 1 to 50 centipoise (cps).

考量到與鹼性可溶性樹脂、光起始劑、以及其他化合物之相容性,溶劑包含乙酸乙酯、乙酸丁酯、二乙二醇二甲醚、二乙二醇二甲基乙基醚(diethyleneglycol dimethylethylether)、甲氧基丙酸甲酯(methylmethoxy propionate)、乙氧基丙酸乙酯(ethylethoxy propionate,EEP)、乳酸乙酯、丙二醇 單甲基醚乙酸酯(PGMEA)、丙二醇甲基醚丙酸酯(PGMEP)、丙二醇甲基醚、丙二醇丙基醚、甲基賽珞蘇乙酸酯(methyl cellosolve acetate)、乙基賽珞蘇乙酸酯、二乙二醇甲基乙酸酯、二乙二醇乙基乙酸酯、丙酮、甲基異丁基酮、環己酮、二甲基甲醯胺(DMF)、N,N-二甲基乙醯胺(DMAc)、N-甲基-2-吡咯酮(NMP)、γ-丁內酯、二乙醚、乙二醇二甲醚、二甘二甲醚(diglyme)、四氫呋喃(THF)、甲醇、乙醇、丙醇、異丙醇、甲基賽珞蘇、乙基賽珞蘇、二乙二醇甲基醚、二乙二醇乙基醚、二丙二醇甲基醚、甲苯、二甲苯、己烷、庚烷、和辛烷,其單獨或合併使用。 Considering compatibility with basic soluble resins, photoinitiators, and other compounds, the solvents include ethyl acetate, butyl acetate, diethylene glycol dimethyl ether, and diethylene glycol dimethyl ethyl ether ( diethyleneglycol dimethylethylether), methylmethoxy propionate, ethylethoxy propionate (EEP), ethyl lactate, propylene glycol Monomethyl ether acetate (PGMEA), propylene glycol methyl ether propionate (PGMEP), propylene glycol methyl ether, propylene glycol propyl ether, methyl cellosolve acetate, ethylcellulose Threoacetate, diethylene glycol methyl acetate, diethylene glycol ethyl acetate, acetone, methyl isobutyl ketone, cyclohexanone, dimethylformamide (DMF), N, N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone (NMP), γ-butyrolactone, diethyl ether, ethylene glycol dimethyl ether, diglyme, Tetrahydrofuran (THF), methanol, ethanol, propanol, isopropanol, methyl cyperidine, ethyl cyperidine, diethylene glycol methyl ether, diethylene glycol ethyl ether, dipropylene glycol methyl ether, Toluene, xylene, hexane, heptane, and octane, which are used alone or in combination.

(g)其他光聚合起始劑 (g) Other photopolymerization initiators

對於光聚合起始劑,本揭露之感光性組成物可以單獨使用肟酯衍生化合物,並且可將肟酯衍生化合物與至少一種選自由噻噸酮(thioxanthone)系化合物、苯乙酮(acetophenone)系化合物、聯咪唑(biimidazole)系化合物、三嗪(triazine)系化合物、O-醯基肟酯系化合物、以及硫醇(thiol)系化合物所組成之群組之化合物合併使用。 As for the photopolymerization initiator, the photosensitive composition of the present disclosure may use an oxime ester-derived compound alone, and the oxime ester-derived compound and at least one selected from the group consisting of a thioxanthone-based compound and an acetophenone-based compound may be used. Compounds of the group consisting of compound, biimidazole-based compound, triazine-based compound, O-fluorenyl oxime ester-based compound, and thiol-based compound are used in combination.

相對於該感光性組成物總量為100重量百分比,添加的光聚合起始劑可以0.01至5重量百分比存在。 The photopolymerization initiator may be added in an amount of 0.01 to 5 weight percent with respect to the total amount of the photosensitive composition.

噻噸酮系化合物包含例如噻噸酮、2-氯噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二氯噻噸酮、2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、以及2,4-二異丙基噻噸酮。 The thioxanthone-based compound includes, for example, thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-dichloro Thiothanone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, and 2,4-diisopropylthioxanthone.

苯乙酮系化合物包含例如2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)丁-1-酮、以及2-(4-甲基苄基)-2-(二甲基胺基)-1-(4-嗎啉基苯基)丁-1-酮。 Acetophenone-based compounds include, for example, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinylpropan-1-one, 2-benzyl-2-dimethylamino- 1- (4-morpholinylphenyl) butan-1-one, and 2- (4-methylbenzyl) -2- (dimethylamino) -1- (4-morpholinylphenyl) Butan-1-one.

聯咪唑系化合物包含例如2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、以及2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑。 The biimidazole-based compound includes, for example, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2 , 4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, and 2,2'-bis (2,4,6-trichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole.

三嗪系化合物包含例如2,4,6-參(三氯甲基)-s-三嗪、2-甲基-4,6-雙(三氯甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三嗪、以及2-(4-n-丁氧基苯基)-4,6-雙(三氯甲基)-s-三嗪。 Triazine-based compounds include, for example, 2,4,6-ginseno (trichloromethyl) -s-triazine, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2- [ 2- (5-methylfuran-2-yl) vinyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) vinyl]- 4,6-bis (trichloromethyl) -s-triazine, 2- [2- (4-diethylamino-2-methylphenyl) vinyl] -4,6-bis (trichloro (Methyl) -s-triazine, 2- [2- (3,4-dimethoxyphenyl) vinyl] -4,6-bis (trichloromethyl) -s-triazine, 2- ( 4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, and 2- (4-n-butoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine.

O-醯基肟酯系化合物包含例如1,2-辛二酮-1-[4-(苯硫基)苯基]-2-(O-苯甲醯基肟)、乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基甲氧基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、以及乙酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜戊環基(dioxolanyl)甲氧基苯甲醯基}-9H-咔唑-3-基]-1-(O-乙醯基肟)。 The O-fluorenyl oxime ester compound includes, for example, 1,2-octanedione-1- [4- (phenylthio) phenyl] -2- (O-benzylidene oxime), and ethyl ketone-1- [ 9-ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl] -1- (O-ethylamidoxime), ethyl ketone-1- [9-ethyl- 6- (2-methyl-4-tetrahydrofurylmethoxybenzylidene) -9H-carbazol-3-yl] -1- (O-acetamidooxime), and ethyl ketone-1- [9 -Ethyl-6- {2-methyl-4- (2,2-dimethyl-1,3-dioxolanylmethoxymethoxybenzyl)}-9H-carbazole- 3-yl] -1- (O-acetamidooxime).

硫醇系化合物包含季戊四醇肆(3-巰基丙酸酯)(pentaerythritol tetrakis(3-mercaptopropionate))。 The thiol-based compound includes pentaerythritol tetrakis (3-mercaptopropionate).

(h)著色劑 (h) Colorants

根據本揭露之一實施例之感光性組成物可以進一步包含著色劑,用於形成彩色濾光器或黑色矩陣之抗侵蝕應用。 The photosensitive composition according to an embodiment of the present disclosure may further include a colorant for anti-corrosion applications forming a color filter or a black matrix.

著色劑包含各種顏料,例如紅色、綠色、藍色、以及棕色之混色系統,及青藍色(cyan)、洋紅色(magenta)、黃色、以及黑色顏料,且更具體地,可的顏料包含C.I.顏料黃色12、13、14、17、20、24、55、83、86、93、109、 110、117、125、137、139、147、148、153、154、166、168,C.I.顏料橘色36、43、51、55、59、61,C.I.顏料紅色9、97、122、123、149、168、177、180、192、215、216、217、220、223、224、226、227、228、240,C.I.顏料紫羅蘭色19、23、29、30、37、40、50,C.I顏料藍色15、15:1、15:4、15:6、22、60、64,C.I.顏料綠色7、36,C.I.顏料棕色23、25、26,C.I.顏料黑色7,以及鈦黑(titan black)。 The colorant contains various pigments, such as a mixed system of red, green, blue, and brown, and cyan, magenta, yellow, and black pigments, and more specifically, the pigments include CI Pigment yellow 12, 13, 14, 17, 20, 24, 55, 83, 86, 93, 109, 110, 117, 125, 137, 139, 147, 148, 153, 154, 166, 168, CI pigment orange 36, 43, 51, 55, 59, 61, CI pigment red 9, 97, 122, 123, 149 , 168, 177, 180, 192, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, CI pigment violet 19, 23, 29, 30, 37, 40, 50, CI pigment blue Colors 15, 15: 1, 15: 4, 15: 6, 22, 60, 64, CI Pigment Green 7, 36, CI Pigment Brown 23, 25, 26, CI Pigment Black 7, and Titan Black.

相對於該感光性組成物總量為100重量百分比,著色劑可以5至50重量百分比存在。當含量小於該範圍時,遮光性能下降,且當含量超過該範圍時,可能發生故障(faulty)曝光或固化。 The colorant may be present in an amount of 5 to 50% by weight based on the total amount of the photosensitive composition. When the content is less than the range, the light-shielding performance is reduced, and when the content exceeds the range, faulty exposure or curing may occur.

根據本揭露之一態樣,提供一種包含該感光性組成物之固化產物的模製品。 According to an aspect of the present disclosure, a molded article including a cured product of the photosensitive composition is provided.

模製品包含但不限於陣列平面化膜(array planarization film)、絕緣膜(insulating film)、彩色濾光器(color filter)、柱間隔物(column spacer)、黑色柱間隔物(black column spacer)、或黑色矩陣(black matrix)。 Molded products include, but are not limited to, array planarization film, insulating film, color filter, column spacer, black column spacer, Or black matrix.

此外,根據本揭露之一態樣,提供包含該模製品之各種形式之顯示器,例如液晶顯示器和OLED。 In addition, according to one aspect of the present disclosure, various forms of displays including the molded article, such as a liquid crystal display and an OLED, are provided.

根據本揭露之一實施例之感光性組成物可以通過旋轉塗佈機(spin coater)、輥塗怖機法(roll coater)、塗佈棒(bar coater)、狹縫塗佈機(die coater)、簾幕式塗布機(curtain coater)、和各種已知的印刷及沉積方法應用於鈉鈣玻璃(soda-lime glass)、石英玻璃(quartz glass)、半導體基板、金屬、紙張、以及塑料的支撐基板。此外,可以在支撐基板上形成膜,再轉移至另一支撐基板,且對其應用方法並沒有限制。 The photosensitive composition according to an embodiment of the present disclosure can be passed through a spin coater, a roll coater, a bar coater, and a slit coater. , Curtain coater, and various known printing and deposition methods for soda-lime glass, quartz glass, semiconductor substrate, metal, paper, and plastic support Substrate. In addition, a film can be formed on a support substrate and then transferred to another support substrate, and there are no restrictions on its application method.

在下文中,為了充分理解本揭露之目的,將透過實施例和比較例詳細描述本揭露代表性的化合物,且根據本揭露之實施例可以以許多不同形式修飾,本揭露之範圍不應被解釋為限制於以下所提之實施例。提供本揭露之實施例以更完全地對習知技術者進行描述。 In the following, in order to fully understand the purpose of this disclosure, the representative compounds of this disclosure will be described in detail through examples and comparative examples, and the examples according to this disclosure may be modified in many different forms. The scope of this disclosure should not be interpreted as It is limited to the examples mentioned below. The embodiments of this disclosure are provided to more fully describe the skilled artisan.

<肟酯衍生化合物之製備> <Preparation of oxime ester-derived compound>

實施例1 Example 1

步驟1:10-丁基-10H-酚噻嗪(phenothiazine)之合成於反應器內以二甲基亞碸(90ml)溶解10H-酚噻嗪(30g),加入四丁基溴化銨(2g)和50%氫氧化鈉溶液(120ml),攪拌30分鐘後,逐滴加入1-溴丁烷(32.6ml)並於室溫下攪拌24小時。待反應完全後,以乙酸乙酯和水萃取3次,有機層以無水硫酸鎂乾燥並在減壓下濃縮,以己烷作為展開溶劑(developing solvent)藉由管柱層析法純化,產生目標化合物(27.0g,70.5%)。 Step 1: Synthesis of 10-butyl-10H-phenothiazine. Dissolve 10H-phenolthiazine (30g) in the reactor with dimethylsulfine (90ml), and add tetrabutylammonium bromide (2g). ) And 50% sodium hydroxide solution (120 ml), and after stirring for 30 minutes, 1-bromobutane (32.6 ml) was added dropwise and stirred at room temperature for 24 hours. After the reaction was completed, it was extracted three times with ethyl acetate and water. The organic layer was dried over anhydrous magnesium sulfate and concentrated under reduced pressure. The column was purified with hexane as a developing solvent to produce the target. Compound (27.0 g, 70.5%).

1H NMR(δ ppm;CDCl3):0.93(3H,t),1.40-1.50(4H,m),1.74-1.82(2H,q),6.71-7.05(2H,m),7.11-7.14(2H,m) 1 H NMR (δ ppm; CDCl 3 ): 0.93 (3H, t), 1.40-1.50 (4H, m), 1.74-1.82 (2H, q), 6.71-7.05 (2H, m), 7.11-7.14 (2H , m)

MS(m/e):255 MS (m / e): 255

步驟2:1,1'-(10-丁基-10H-酚噻嗪-3,7-二基)二丁-1-酮之合成 Step 2: Synthesis of 1,1 '-(10-butyl-10H-phenolthiazine-3,7-diyl) dibutan-1-one

於反應器內以二氯甲烷(135ml)溶解步驟1之產物(27g)後,在0℃或更低溫下加入氯化鋁(42.0g)和丁醯氯(33.6g),並在室溫下攪拌8小。待反應完全後,將反應溶液加入至冰水中,攪拌並靜置以移除水層,將有機層以水洗2次後,以無水硫酸鎂乾燥並在減壓下濃縮,以乙酸乙酯:己烷(1:10)作為展開溶劑藉由管柱層析法純化,產生目標產物(17.0g,41%)。 After dissolving the product of Step 1 (27 g) in the reactor with dichloromethane (135 ml), aluminum chloride (42.0 g) and butanyl chloride (33.6 g) were added at 0 ° C or lower, and at room temperature Stir for 8 hours. After the reaction is completed, the reaction solution is added to ice water, stirred and left to remove the water layer. The organic layer is washed twice with water, dried over anhydrous magnesium sulfate and concentrated under reduced pressure. The alkane (1:10) was purified by column chromatography as a developing solvent to give the target product (17.0 g, 41%).

1H NMR(δ ppm;CDCl3):0.96(3H,t),1.23(6H,t),1.35-1.70(6H,m),1.82-2.01(2H,m),2.45-2.76(4H,m),4.10-4.14(2H,m),7.46-7.50(2H,m),8.29-8.33(2H,m),8.75(2H,s) 1 H NMR (δ ppm; CDCl 3 ): 0.96 (3H, t), 1.23 (6H, t), 1.35-1.70 (6H, m), 1.82-2.01 (2H, m), 2.45-2.76 (4H, m ), 4.10-4.14 (2H, m), 7.46-7.50 (2H, m), 8.29-8.33 (2H, m), 8.75 (2H, s)

MS(m/e):395 MS (m / e): 395

步驟3:1,1'-(10-丁基-10H-酚噻嗪-3,7-二基)雙(2-(羥基亞胺基)丁-1-酮)之合成 Step 3: Synthesis of 1,1 '-(10-butyl-10H-phenolthiazine-3,7-diyl) bis (2- (hydroxyimino) butan-1-one)

於反應器內將步驟2之產物(17.0g)加入至四氫呋喃(85ml)後,緩慢逐滴加入強鹽酸(10.8mL)和亞硝酸異丁酯(13.3g),接著在室溫下攪拌1小時30分鐘,以乙酸乙酯和水萃取3次,有機層以無水硫酸鎂乾燥,並以乙酸乙酯結晶,產生目標化合物(10.7g,55.0%)。 After the product of step 2 (17.0 g) was added to tetrahydrofuran (85 ml) in the reactor, strong hydrochloric acid (10.8 mL) and isobutyl nitrite (13.3 g) were slowly added dropwise, followed by stirring at room temperature for 1 hour After 30 minutes of extraction with ethyl acetate and water 3 times, the organic layer was dried over anhydrous magnesium sulfate and crystallized from ethyl acetate to give the target compound (10.7 g, 55.0%).

1H NMR(δ ppm;CDCl3):1.08(3H,t),1.24-1.28(6H,m),1.51-1.70(2H,m),1.82-2.01(2H,m),2.70-2.76(4H,q),4.10-4.14(2H,m),7.48-7.51(2H,m),8.30-8.34(2H,m),8.76(2H,s) 1 H NMR (δ ppm; CDCl 3 ): 1.08 (3H, t), 1.24-1.28 (6H, m), 1.51-1.70 (2H, m), 1.82-2.01 (2H, m), 2.70-2.76 (4H , q), 4.10-4.14 (2H, m), 7.48-7.51 (2H, m), 8.30-8.34 (2H, m), 8.76 (2H, s)

MS(m/e):453 MS (m / e): 453

步驟4:1,1'-(10-丁基-10H-酚噻嗪-3,7-二基)雙(2-(乙醯氧基亞胺基)丁-1-酮)之合成 Step 4: Synthesis of 1,1 '-(10-butyl-10H-phenolthiazin-3,7-diyl) bis (2- (ethoxyimino) butan-1-one)

於反應器內將步驟3之產物(10.7g)加入乙酸乙酯(107ml)後,在室溫下依序逐滴加入三甲基胺(7.3g)和乙醯氯(5.65g),在室溫下攪拌1小時後加入蒸餾水,有機層以蒸餾水洗2次,並以無水硫酸鎂乾燥,接著在減壓下濃縮,所得產物以乙酸乙酯和己烷(1:1)的溶劑結晶,產生目標化合物(8.7g,67.4%)。 After adding the product of step 3 (10.7 g) to ethyl acetate (107 ml) in the reactor, trimethylamine (7.3 g) and acetamidine chloride (5.65 g) were sequentially added dropwise at room temperature. After stirring at room temperature for 1 hour, distilled water was added, and the organic layer was washed twice with distilled water, dried over anhydrous magnesium sulfate, and then concentrated under reduced pressure. The obtained product was crystallized with ethyl acetate and hexane (1: 1) solvents to give the target Compound (8.7 g, 67.4%).

1H NMR(δ ppm;CDCl3):1.09(3H,t),1.18-1.26(6H,m),1.59-1.67(2H,m),1.85-2.01(2H,m),2.31(6H,s),2.80-2.87(4H,m),4.29-4.34(2H,m),7.54(2H,d),8.48(2H,d),8.81(2H,s) 1 H NMR (δ ppm; CDCl 3 ): 1.09 (3H, t), 1.18-1.26 (6H, m), 1.59-1.67 (2H, m), 1.85-2.01 (2H, m), 2.31 (6H, s ), 2.80-2.87 (4H, m), 4.29-4.34 (2H, m), 7.54 (2H, d), 8.48 (2H, d), 8.81 (2H, s)

MS(m/e):537 MS (m / e): 537

分解點:200.8℃ Decomposition point: 200.8 ℃

實施例2至19 Examples 2 to 19

在與實施例1相同的條件下,根據以下表1及表2中的組成來合成肟酯衍生化合物。 Under the same conditions as in Example 1, an oxime ester-derived compound was synthesized based on the compositions in Tables 1 and 2 below.

<鹼性可溶性樹脂之製備> <Preparation of alkaline soluble resin>

實施例1之合成 Synthesis of Example 1

將丙二醇單甲基醚乙酸酯(PGMEA,200mL)和偶氮雙異丁腈(AIBN,1.5g)加入至500mL之聚合容器中,分別以20:20:40:20之摩爾比加入甲基丙烯酸酯、甲基丙烯酸縮水甘油酯、甲基丙烯酸甲酯、和丙烯酸二環戊酯(dicyclopentanylacrylate)與40重量%固體的丙烯酸單體,接著在氮氣氣氛及70℃下攪拌5小時進行聚合,以製備丙烯酸聚合物(a-1)。所得聚合物之重量平均分子量為25,000,且分散度為1.9。 Propylene glycol monomethyl ether acetate (PGMEA, 200 mL) and azobisisobutyronitrile (AIBN, 1.5 g) were added to a 500 mL polymerization vessel, and methyl was added at a molar ratio of 20: 20: 40: 20, respectively. Acrylic acid ester, glycidyl methacrylate, methyl methacrylate, and dicyclopentanyl acrylate and 40% by weight of solid acrylic monomers were then polymerized by stirring in a nitrogen atmosphere at 70 ° C. for 5 hours to An acrylic polymer (a-1) was prepared. The weight average molecular weight of the obtained polymer was 25,000, and the degree of dispersion was 1.9.

實施例2之合成 Synthesis of Example 2

將丙二醇單甲基醚乙酸酯(200mL)和AIBN(1.0g)加入至500mL之聚合容器中,分別以40:20:20:20之摩爾比加入甲基丙烯酸酯、苯乙烯、甲基丙烯酸甲酯、和甲基丙烯酸環己酯與40重量%固體的丙烯酸單體,接著在氮氣氣氛及70℃下攪拌5小時進行聚合,以合成一共聚物。將N,N-二甲苯胺(0.3g)和以每100摩爾固體之總單體的20摩爾比例之甲基丙烯酸縮水甘油酯放入反應瓶中,並在100℃下攪拌10小時,以製備在側鏈具有丙烯酸不飽和鍵的丙烯酸聚合物(a-2)。所得聚合物之重量平均分子量為20,000,且分散度為2.0。 Propylene glycol monomethyl ether acetate (200 mL) and AIBN (1.0 g) were added to a 500 mL polymerization container, and methacrylate, styrene, and methacrylic acid were added at a molar ratio of 40: 20: 20: 20, respectively. Methyl ester, cyclohexyl methacrylate, and a 40% by weight solid acrylic monomer were polymerized by stirring in a nitrogen atmosphere at 70 ° C. for 5 hours to synthesize a copolymer. N, N-xylylamine (0.3 g) and glycidyl methacrylate in a 20 mole ratio per 100 moles of total monomers were put into a reaction flask, and stirred at 100 ° C for 10 hours to prepare An acrylic polymer (a-2) having an acrylic unsaturated bond in a side chain. The weight average molecular weight of the obtained polymer was 20,000, and the degree of dispersion was 2.0.

實施例3之合成 Synthesis of Example 3

將丙二醇單甲基醚乙酸酯(200mL)和AIBN(1.0g)加入至500mL之聚合容器中,分別以40:20:20:20之摩爾比加入甲基丙烯酸縮水甘油酯、苯乙烯、甲基丙烯酸甲酯、和甲基丙烯酸環己酯與40重量百分比固體的丙烯酸單體,接著在氮氣氣氛及70℃下攪拌5小時進行聚合,以合成聚合物。將N,N-二甲苯胺(0.3g)和以每100摩爾固體之總單體的20摩爾比例之丙烯酸放入反應瓶中,並在100℃下攪拌10小時,以製備在側鏈具有丙烯酸不飽和鍵的丙烯酸聚合物(a-3)。所得聚合物之重量平均分子量為18,000,且分散度為1.8。 Propylene glycol monomethyl ether acetate (200 mL) and AIBN (1.0 g) were added to a 500 mL polymerization container, and glycidyl methacrylate, styrene, and formazan were added at a molar ratio of 40: 20: 20: 20, respectively. Methyl acrylate, and cyclohexyl methacrylate and 40 weight percent solid acrylic monomer were polymerized by stirring in a nitrogen atmosphere at 70 ° C. for 5 hours to synthesize a polymer. N, N-xylylamine (0.3 g) and acrylic acid in a molar ratio of 20 moles per 100 moles of total monomers were put into a reaction flask, and stirred at 100 ° C for 10 hours to prepare acrylic acid having a side chain Unsaturated acrylic polymer (a-3). The weight average molecular weight of the obtained polymer was 18,000, and the degree of dispersion was 1.8.

實施例20至35:感光性組成物之製備 Examples 20 to 35: Preparation of photosensitive composition

在實施例20至35中,將鹼性可溶性樹脂a-1至a-3;具有烯性不飽和鍵(ethylenically unsaturated bond)之聚合性化合物;本揭露之光聚合起始劑;以及FC-430(3M調平劑(leveling agent))按照下表3所列的成分及其含量依序放入具有UV遮蔽和攪拌器的反應混合槽中,接著在室溫下攪拌,加入PGMEA溶劑平衡,使總成物之總重量百分比為100,以製備感光性組成物。 In Examples 20 to 35, basic soluble resins a-1 to a-3; polymerizable compounds having ethylenically unsaturated bonds; photopolymerization initiators of the present disclosure; and FC-430 (3M leveling agent) According to the ingredients listed in Table 3 below and their contents, they are sequentially placed in a reaction mixing tank with a UV shield and a stirrer, followed by stirring at room temperature, adding PGMEA solvent to equilibrate, so that The total weight percentage of the assembly is 100 to prepare a photosensitive composition.

實施例36至37:著色感光性組成物之製備 Examples 36 to 37: Preparation of colored photosensitive composition

藉由與實施例17相同的方法來製備著色感光性組成物,除了在實施例36中,在具有25重量百分比固體的PGMEA中加入50重量百分比的碳黑分散體,以及在實施例37中,在具有25重量百分比固體的PGMEA中加入50重量百分比的顏料紅色177(P.R.177)分散體,如下表3所述。 A colored photosensitive composition was prepared by the same method as in Example 17, except that in Example 36, 50% by weight of a carbon black dispersion was added to PGMEA having 25% by weight of solids, and in Example 37, To PGMEA with 25 weight percent solids was added 50 weight percent pigment red 177 (PR177) dispersion, as described in Table 3 below.

實施例38 Example 38

藉由與實施例17相同的方法來製備感光性組成物,除了將實施例1之化合物與下式3之混合物作為光聚合起始劑,如下表3所述。 A photosensitive composition was prepared by the same method as in Example 17, except that a mixture of the compound of Example 1 and the following formula 3 was used as a photopolymerization initiator, as described in Table 3 below.

<成分> <Ingredients>

(a)鹼性可溶性樹脂 (a) Alkali soluble resin

(b)具有烯性不飽和鍵之聚合性化合物 (b) Polymerizable compounds having ethylenically unsaturated bonds

b-1:二季戊四醇六丙烯酸酯(dipentaerythritol hexaacrylate) b-1: dipentaerythritol hexaacrylate

b-2:二季戊四醇五丙烯酸酯(dipentaerythritol pentaacrylate) b-2: dipentaerythritol pentaacrylate

b-3:季戊四醇三丙烯酸酯(pentaerythritoltriacrylate) b-3: pentaerythritoltriacrylate

b-4:季戊四醇三甲基丙烯酸酯(pentaerythritoltrimethacrylate) b-4: pentaerythritoltrimethacrylate

b-5:三羥甲基丙烷三丙烯酸酯(trimethylolpropantriacrylate) b-5: trimethylolpropantriacrylate

b-6:乙二醇二丙烯酸酯(ethyleneglycoldiacrylate) b-6: ethyleneglycoldiacrylate

b-7:雙酚-A雙環氧丙醚丙酸酯(bisphenol-A diglycidyletheracrylate)加成物 b-7: bisphenol-A diglycidyletheracrylate adduct

b-8:三羥甲基丙烷三環氧丙醚丙烯酸酯(trimethylolpropantriglycidyletheracrylate)加成物 b-8: trimethylolpropantriglycidyletheracrylate adduct

(c)光聚合起始劑 (c) Photopolymerization initiator

(e)調平劑:FC-430(3M調平劑) (e) Leveling agent: FC-430 (3M leveling agent)

(h)著色劑 (h) Colorants

h-1:碳黑(25重量百分比之固體) h-1: carbon black (25 weight percent solids)

h-2:顏料紅色177(P.R.177)(25重量百分比之固體) h-2: Pigment Red 177 (P.R.177) (25 weight percent solids)

比較例1 Comparative Example 1

藉由與實施例17相同的方法來製備光聚合組成物,除了光聚合起始劑外,使用下式4代替實施例1之化合物。 A photopolymerizable composition was prepared by the same method as in Example 17, except that the photopolymerization initiator was used, instead of the compound of Example 1, the following formula 4 was used.

比較例2 Comparative Example 2

藉由與實施例17相同的方法來製備光聚合組成物,除了光聚合起始劑外,使用式5代替實施例1。 A photopolymerizable composition was prepared by the same method as in Example 17, except that a photopolymerization initiator was used, instead of Example 1, Formula 5 was used.

<評價> <Evaluation>

在玻璃基板上進行實施例20至38以及比較例1至2所製備的感光性組成物的評價,測定感光性組成物的性能例如敏感度、殘膜厚度(residual film thickness)、圖案穩定性、耐化學性、以及延展性,評價結果顯示於下表4。 The evaluation of the photosensitive compositions prepared in Examples 20 to 38 and Comparative Examples 1 to 2 was performed on a glass substrate, and the properties of the photosensitive composition such as sensitivity, residual film thickness, pattern stability, The evaluation results of chemical resistance and ductility are shown in Table 4 below.

1)敏感度 1) Sensitivity

將光阻劑(photoresist)旋塗在玻璃基板上,並在100℃加熱板上乾燥1分鐘,接著使用步進光罩(step mask)曝光,並在0.04%氫氧化鉀水溶液中顯影。基於步進光罩圖案的厚度維持在初始厚度的80%的曝光劑量來評價敏感度。 A photoresist was spin-coated on a glass substrate, dried on a hot plate at 100 ° C. for 1 minute, then exposed using a step mask, and developed in a 0.04% potassium hydroxide aqueous solution. Sensitivity was evaluated based on an exposure dose where the thickness of the step mask pattern was maintained at 80% of the initial thickness.

2)殘膜厚度 2) Residual film thickness

使用旋塗機(spin coater)將感光性組成物塗佈於基板後,於100℃下進行預烘烤(pre-baking)1分鐘,接著以365奈米(nm)曝光,再於230℃下進行後烘烤(post-baking)20分鐘,測量後烘烤前後的抗蝕膜(resist film)的厚度比(%)。 After applying the photosensitive composition to the substrate using a spin coater, pre-baking was performed at 100 ° C for 1 minute, followed by exposure at 365 nanometers (nm), and then at 230 ° C. Post-baking was performed for 20 minutes, and the thickness ratio (%) of the resist film before and after the post-baking was measured.

3)圖案穩定性 3) Pattern stability

將具有光阻圖案的矽晶片沿著垂直於孔圖案的方向切割,並且使用顯微鏡顯示出在圖案的橫截面方向的觀察結果。圖案的側壁相對於基板以55度或以上的角度直立,並且沒有膜減少定義為「優良」,以及觀察到膜的減少定義為「膜減少」。 A silicon wafer having a photoresist pattern was cut in a direction perpendicular to the hole pattern, and observation results in a cross-sectional direction of the pattern were displayed using a microscope. The sidewall of the pattern stood up to an angle of 55 degrees or more with respect to the substrate, and no film reduction was defined as "excellent", and a decrease in film observed was defined as "film reduction".

4)耐化學性 4) Chemical resistance

使用旋塗機將感光性組成物塗佈於基板後,將透過預烘烤處理及後烘烤處理形成的抗蝕膜於40℃下浸漬在剝離溶液中10分鐘,以及是否觀察到抗蝕膜的透射率和厚度有任何變化。2%或以下的透射率和厚度的變化定義為「優良」,以及2%以上的透射率和厚度的變化定義為「不良」。 After the photosensitive composition was applied to the substrate using a spin coater, the resist film formed through the pre-baking process and the post-baking process was immersed in a peeling solution at 40 ° C for 10 minutes, and whether a resist film was observed Any change in transmittance and thickness. Changes in transmittance and thickness of 2% or less are defined as "good", and changes in transmittance and thickness of 2% or less are defined as "bad".

5)延展性 5) ductility

將感光性組成物旋塗在基板上,接著在100℃下預烘烤1分鐘,曝光在敏感度的光阻,並在氫氧化鉀水溶液下顯影,以形成20微米(μm)x 20μm的圖案。將形成的圖案通過在230℃下後烘烤20分裝進行交聯,並使用奈米壓痕器(nano indentor)測量圖案以判斷延展性。在5重力單位(g)負載下進行奈米壓痕器的量測,總變異量為500nm或以上定義為「優良」,以及總變異量為500nm以下定義為「不良」。 The photosensitive composition was spin-coated on the substrate, and then pre-baked at 100 ° C for 1 minute, exposed to a sensitive photoresist, and developed under a potassium hydroxide aqueous solution to form a pattern of 20 microns (μm) x 20μm . The formed pattern was crosslinked by post-baking at 230 ° C for 20 aliquots, and the pattern was measured using a nano indentor to judge ductility. The measurement of the nanoindenter was performed under a load of 5 gravity units (g). A total variation of 500 nm or more was defined as "good", and a total variation of 500 nm or less was defined as "bad".

從表4可以發現,本揭露之肟酯衍生化合物具有顯著優良的敏感度,以及具有傑出的性能,例如殘膜後度、圖案穩定性、耐化學性、以及延展性,甚至當使用作為感光性組成物的光聚合起始劑時是少量的。 It can be found from Table 4 that the oxime ester-derived compound of the present disclosure has remarkably excellent sensitivity, and has outstanding properties such as post-residue degree, pattern stability, chemical resistance, and ductility, even when used as photosensitivity The composition has a small amount of a photopolymerization initiator.

Claims (12)

一種式1之肟酯衍生化合物: 其中,R1和R2各自獨立為氫、(C1-C20)烷基、(C6-C20)芳基、(C1-C20)烷氧基、(C6-C20)芳基(C1-C20)烷基、羥基(C1-C20)烷基、羥基(C1-C20)烷氧基(C1-C20)烷基、或(C3-C20)環烷基;以及R3為(C1-C20)烷基、(C6-C20)芳基、(C6-C20)芳基(C1-C20)烷基、或(C3-C20)環烷基。 An oxime ester derivative compound of formula 1: Among them, R 1 and R 2 are each independently hydrogen, (C1-C20) alkyl, (C6-C20) aryl, (C1-C20) alkoxy, (C6-C20) aryl (C1-C20) alkane Hydroxy (C1-C20) alkyl, hydroxy (C1-C20) alkoxy (C1-C20) alkyl, or (C3-C20) cycloalkyl; and R 3 is (C1-C20) alkyl, (C6-C20) aryl, (C6-C20) aryl (C1-C20) alkyl, or (C3-C20) cycloalkyl. 如申請專利範圍第1項所述之肟酯衍生化合物,其中,R1和R2各自獨立為氫、甲基、乙基、正丙基、異丙基、正丁基、異丁基、叔丁基、正戊基、異戊基、正己基、異己基、正辛基、正癸基、異癸基、正十二烷基、環戊基、環己基、苯基、苄基、萘基、聯苯基、聯三苯基、蒽基、茚基、菲基、甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、叔丁氧基、羥基甲基、羥基乙基、羥基正丙基、羥基正丁基、羥基異丁基、羥基正戊基、羥基異戊基、羥基正己基、羥基異己基、羥基甲氧基甲基、羥基甲氧基乙基、羥基甲氧基丙基、羥基甲氧基丁基、羥基乙氧基甲基、羥基乙氧基乙基、羥基乙氧基丙基、羥基乙氧基丁基、羥基乙氧基戊基、或羥基乙氧基己基;以及R3為甲基、乙基、正丙基、異丙基、正丁基、異丁基、叔丁基、正戊基、異戊基、正己基、異己基、環戊基、環己基、或苯基。 The oxime ester-derived compound according to item 1 in the scope of the patent application, wherein R 1 and R 2 are each independently hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert- Butyl, n-pentyl, isopentyl, n-hexyl, isohexyl, n-octyl, n-decyl, isodecyl, n-dodecyl, cyclopentyl, cyclohexyl, phenyl, benzyl, naphthyl , Biphenyl, bitriphenyl, anthryl, indenyl, phenanthryl, methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, tert-butoxy Group, hydroxymethyl, hydroxyethyl, hydroxy-n-propyl, hydroxy-n-butyl, hydroxy-isobutyl, hydroxy-n-pentyl, hydroxy-isopentyl, hydroxy-n-hexyl, hydroxy-isohexyl, hydroxymethoxymethyl, Hydroxymethoxyethyl, hydroxymethoxypropyl, hydroxymethoxybutyl, hydroxyethoxymethyl, hydroxyethoxyethyl, hydroxyethoxypropyl, hydroxyethoxybutyl, hydroxy Ethoxypentyl, or hydroxyethoxyhexyl; and R 3 is methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, n-pentyl, isopentyl ,positive Hexyl, isohexyl, cyclopentyl, cyclohexyl, or phenyl. 如申請專利範圍第1項所述之肟酯衍生化合物,其中,該肟酯衍生化合物選自以下式2-1至2-19所構成的群組: The oxime ester-derived compound according to item 1 of the scope of the patent application, wherein the oxime ester-derived compound is selected from the group consisting of the following formulas 2-1 to 2-19: 一種光聚合起始劑,包含申請專利範圍第1至3項任一者所述之肟酯衍生化合物。 A photopolymerization initiator includes the oxime ester-derived compound described in any one of claims 1 to 3. 一種感光性組成物,包含:(a)一鹼性可溶性樹脂;(b)一具有烯性不飽和鍵之聚合性化合物;以及(c)一光聚合起始劑,包含申請專利範圍第1至3項任一者所述之肟酯衍生化合物。 A photosensitive composition comprising: (a) an alkali-soluble resin; (b) a polymerizable compound having an ethylenically unsaturated bond; and (c) a photopolymerization initiator, including patent applications ranging from 1 to The oxime ester-derived compound according to any one of 3 items. 如申請專利範圍第5項所述之感光性組成物,其中,相對於該感光性組成物總量為100重量百分比,該肟酯衍生化合物存在量為0.01至10重量百分比。 The photosensitive composition according to item 5 of the scope of patent application, wherein the oxime ester-derived compound is present in an amount of 0.01 to 10% by weight relative to the total amount of the photosensitive composition. 如申請專利範圍第5項所述之感光性組成物,其中,該光聚合起始劑更包含選自由噻噸酮系化合物、苯乙酮系化合物、聯咪唑系化合物、三嗪系化合物、O-醯基肟酯系化合物、以及硫醇系化合物所組成之群組中至少一者。 The photosensitive composition according to item 5 of the scope of application for a patent, wherein the photopolymerization initiator further comprises a compound selected from the group consisting of thioxanthone-based compounds, acetophenone-based compounds, biimidazole-based compounds, triazine-based compounds, O -At least one of the group consisting of a fluorenyl oxime ester compound and a thiol compound. 如申請專利範圍第5項所述之感光性組成物,其中,該感光性組成物更包含一著色劑。 The photosensitive composition according to item 5 of the scope of patent application, wherein the photosensitive composition further comprises a colorant. 如申請專利範圍第7項所述之感光性組成物,其中,該感光性組成物更包含一著色劑。 The photosensitive composition according to item 7 of the scope of the patent application, wherein the photosensitive composition further comprises a colorant. 一種模製品,包含申請專利範圍第5項所述之感光性組成物之固化產物。 A molded product comprising the cured product of the photosensitive composition described in item 5 of the scope of patent application. 如申請專利範圍第10項所述之模製品,其中,該模製品為陣列平面化膜、絕緣膜、彩色濾光器、柱間隔物、黑色柱間隔物、或黑色矩陣。 The molded article according to item 10 of the patent application scope, wherein the molded article is an array planarization film, an insulating film, a color filter, a column spacer, a black column spacer, or a black matrix. 一種顯示裝置,包含申請專利範圍第10項所述之模製品。 A display device includes the molded product described in item 10 of the scope of patent application.
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