TW201807794A - Manufacturing method of fan-out fingerprint identification module and fingerprint identification module - Google Patents

Manufacturing method of fan-out fingerprint identification module and fingerprint identification module Download PDF

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TW201807794A
TW201807794A TW105127762A TW105127762A TW201807794A TW 201807794 A TW201807794 A TW 201807794A TW 105127762 A TW105127762 A TW 105127762A TW 105127762 A TW105127762 A TW 105127762A TW 201807794 A TW201807794 A TW 201807794A
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fingerprint identification
base layer
insulating base
fingerprint
fingerprint recognition
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TW105127762A
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TWI596726B (en
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何毓民
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技鼎股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto

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Abstract

A manufacturing method of fan-out fingerprint identification module provided in the present invention comprises an inverting step, a filling step, a inverting and removing step, an electrical contact setting step, an inverting and drilling step, a rewiring step, a panel bonding step, and a cutting step. The method not only saves the packaging process manufacturing costs, but also significantly reduces the distance between the fingerprint identification of the front to the panel so that the detection of fingerprint identification more accurate. And the specifications of the fingerprint identification module manufactured by the method proposed by the invention can be easily and uniformly controlled to a certain standard without individual difference, and the yield can be greatly improved. A fingerprint identification module manufactured by the aforementioned method is also provided in the present invention.

Description

扇出式指紋辨識模組製造方法及指紋辨識模組Fan-out type fingerprint recognition module manufacturing method and fingerprint recognition module

本發明相關於一種指紋辨識模組製造方法及指紋辨識模組,特別是相關於一種扇出式指紋辨識模組製造方法以及由該方法所製造的指紋辨識模組。The invention relates to a method for manufacturing a fingerprint recognition module and a fingerprint recognition module, and more particularly to a method for manufacturing a fan-out fingerprint recognition module and a fingerprint recognition module manufactured by the method.

傳統的指紋辨識模組的製造方法係將一片指紋辨識晶片對應固定於一基板,透過打線接合等方式使指紋辨識晶片電性連接於基板的電路。接著,在指紋辨識晶片的外側佈上絕緣層,並在絕緣層上方透過一黏合膠黏合一面板,使指紋辨識晶片可隔著面板辨識另一側的手指指紋。The traditional manufacturing method of a fingerprint recognition module is to fix a fingerprint recognition chip to a substrate correspondingly, and electrically connect the fingerprint recognition chip to a circuit of the substrate through wire bonding or the like. Next, an insulating layer is laid on the outside of the fingerprint identification chip, and a panel is bonded through an adhesive above the insulation layer, so that the fingerprint identification chip can recognize the finger fingerprint on the other side through the panel.

然而,每製造一個指紋辨識模組就要重覆上述的封裝作業,不僅效率低落,並且指紋辨識正面至面板的距離過厚而容易導致指紋辨識不成功,更重要的是,難以維持每次封裝所塗佈的絕緣層及黏合膠的厚度,因此每一個指紋辨識模組的指紋辨識正面至面板之間的距離都不盡相同,難以控制產品良率。However, the above-mentioned packaging operation must be repeated every time a fingerprint recognition module is manufactured. Not only is the efficiency low, but the distance from the front of the fingerprint recognition to the panel is too thick, which easily leads to unsuccessful fingerprint recognition. More importantly, it is difficult to maintain each packaging. The thickness of the coated insulating layer and adhesive, so the distance between the fingerprint recognition front and the panel of each fingerprint recognition module is different, and it is difficult to control the product yield.

因此,為解決上述問題,本發明的目的即在提供一種扇出式指紋辨識模組製造方法及指紋辨識模組。Therefore, in order to solve the above problems, an object of the present invention is to provide a method for manufacturing a fan-out fingerprint recognition module and a fingerprint recognition module.

本發明為解決習知技術之問題所採用之技術手段係提供一種扇出式指紋辨識模組製造方法,包含下列步驟:一倒置步驟,將複數個指紋辨識晶片的指紋辨識正面朝下貼合於一暫時性基底,該複數個指紋辨識晶片之間相隔預定的距離;一灌膠步驟,形成一絕緣基層於該複數個指紋辨識晶片的指紋辨識背面及該暫時性基底之上,該暫時性基底、該複數個指紋辨識晶片及該絕緣基層形成一暫時結構體;一翻轉去除步驟,上下翻轉該暫時結構體而使該指紋辨識正面朝上,並移除該暫時性基底以顯露該指紋辨識正面;一電接點設置步驟,將複數個電接點元件分別設置該複數個指紋辨識正面,該複數個電接點元件、該複數個指紋辨識晶片及該絕緣基層形成一待佈線結構體;一翻轉鑽孔步驟,上下翻轉該待佈線結構體,於該絕緣基層鑽孔以形成複數個分別連接該複數個電接點元件的連接通道;一重佈線步驟,於該複數個連接通道分別形成複數個電連接該電接點元件的導線而使該待佈線結構體成為一積體電路結構體,該導線自該連接通道而沿該絕緣基層的相反於該指紋辨識晶片的表面延伸;一面板接合步驟,上下翻轉該積體電路結構體以使該指紋辨識正面朝上,並黏著一面板於該指紋辨識正面及該絕緣基層的上表面;以及一切割步驟,以該指紋辨識晶片為裁切範圍中心而以預定的範圍及形狀裁切該積體電路結構體,以形成複數個指紋辨識模組。The technical method adopted by the present invention to solve the problems of the conventional technology is to provide a method for manufacturing a fan-out type fingerprint recognition module, which includes the following steps: an inversion step, and the fingerprint identification of a plurality of fingerprint identification chips is attached face down on A temporary substrate separated by a predetermined distance from the plurality of fingerprint identification chips; a glue filling step to form an insulating base layer on the fingerprint identification back surface of the plurality of fingerprint identification chips and the temporary substrate; the temporary substrate The plurality of fingerprint identification chips and the insulating base layer form a temporary structure; a flipping removal step, flipping the temporary structure upside down to make the fingerprint identification face up, and removing the temporary substrate to reveal the fingerprint identification front face An electric contact setting step, each of the plurality of electric contact elements is provided with the plurality of fingerprint identification front sides, the plurality of electric contact elements, the plurality of fingerprint identification chips and the insulating base layer form a structure to be wired; The flip drilling step, flips the structure to be routed up and down, and drills holes in the insulating base layer to form a plurality of connections to the Connection channels of several electrical contact elements; a re-routing step, forming a plurality of wires electrically connecting the electrical contact elements on the plurality of connection channels to make the structure to be wired a integrated circuit structure, the wires Extending from the connection channel along the surface of the insulating base layer opposite to the fingerprint identification chip; a panel bonding step, flipping the integrated circuit structure up and down to make the fingerprint identification face up, and adhering a panel to the fingerprint identification A front surface and an upper surface of the insulating base layer; and a cutting step, using the fingerprint identification chip as a center of a cutting range, and cutting the integrated circuit structure with a predetermined range and shape to form a plurality of fingerprint identification modules.

在本發明的一實施例中係提供一種扇出式指紋辨識模組製造方法,於該翻轉鑽孔步驟,以雷射鑽孔的方式以形成該複數個連接通道。According to an embodiment of the present invention, a method for manufacturing a fan-out fingerprint recognition module is provided. In the turning drilling step, a plurality of connection channels are formed by laser drilling.

在本發明的一實施例中係提供一種扇出式指紋辨識模組製造方法,於該重佈線步驟,以化學製程方法形成該導線於該連接通道中。In one embodiment of the present invention, a method for manufacturing a fan-out fingerprint recognition module is provided. In the rewiring step, the conductive wire is formed in the connection channel by a chemical process method.

在本發明的一實施例中係提供一種扇出式指紋辨識模組製造方法,該暫時性基底係為雷射感光膠材,而於該翻轉去除步驟中以雷射感光自動剝離的方式移除該暫時性基底。In one embodiment of the present invention, a method for manufacturing a fan-out fingerprint recognition module is provided. The temporary substrate is a laser-sensitive plastic material, and the laser-sensitive automatic peeling method is used to remove it in the reversing and removing step. The temporary substrate.

本發明為解決習知技術之問題所採用之另一技術手段係提供一種由前述所述之扇出式指紋辨識模組製造方法所製造的指紋辨識模組。Another technical means adopted by the present invention to solve the problems of the conventional technology is to provide a fingerprint recognition module manufactured by the aforementioned fan-out fingerprint recognition module manufacturing method.

本發明為解決習知技術之問題所採用之另一技術手段係提供一種指紋辨識模組,包含:一絕緣基層,具有一上下貫穿的連接通道;一指紋辨識晶片,埋設於該絕緣基層,該指紋辨識晶片的指紋辨識正面與該絕緣基層的上表面齊平;一電接點元件,設置於該指紋辨識正面並沿該指紋辨識正面延伸至該絕緣基層的上表面;一導線,設置於該連接通道中且該導線的一端電連接該電接點元件,該導線的另一端沿該絕緣基層的下表面延伸;以及一面板,黏著於該指紋辨識正面及絕緣基層的上表面,以使該指紋辨識晶片透過該面板進行一指紋辨識之偵測。Another technical means adopted by the present invention to solve the problems of the conventional technology is to provide a fingerprint identification module, which includes: an insulating base layer with a connection channel penetrating up and down; a fingerprint identification chip buried in the insulating base layer, the The fingerprint recognition front of the fingerprint recognition chip is flush with the upper surface of the insulating base layer; an electrical contact element is disposed on the fingerprint recognition front and extends along the fingerprint recognition front to the upper surface of the insulation base layer; a wire is disposed on the A connecting channel and one end of the wire is electrically connected to the electrical contact element, and the other end of the wire extends along the lower surface of the insulating base layer; and a panel is adhered to the front surface of the fingerprint identification and the upper surface of the insulating base layer so that the The fingerprint recognition chip performs a fingerprint recognition detection through the panel.

在本發明的一實施例中係提供一種指紋辨識模組,該面板係透過一絕緣黏著層黏著於該指紋辨識正面及該絕緣基層的上表面。In one embodiment of the present invention, a fingerprint identification module is provided. The panel is adhered to the front surface of the fingerprint identification and the upper surface of the insulating base layer through an insulating adhesive layer.

在本發明的一實施例中係提供一種指紋辨識模組,該絕緣黏著層的厚度係小於20微米。According to an embodiment of the present invention, a fingerprint identification module is provided, and the thickness of the insulating adhesive layer is less than 20 microns.

在本發明的一實施例中係提供一種指紋辨識模組,該絕緣基層係為絕緣膠層。According to an embodiment of the present invention, a fingerprint identification module is provided, and the insulating base layer is an insulating glue layer.

經由本發明所採用之技術手段,可節省封裝製程的製造成本,並且能大幅降低指紋辨識正面至面板之間的距離,使指紋辨識之偵測更加精準。並且於大量生產時能夠穩定控制指紋辨識晶片與指紋之間的距離,可以使各個指紋辨識正面至面板之間的距離的差異降到最低,以提高產品良率。Through the technical means adopted by the present invention, the manufacturing cost of the packaging process can be saved, and the distance from the front face of the fingerprint identification to the panel can be greatly reduced, so that the fingerprint identification detection can be more accurate. In addition, the distance between the fingerprint recognition chip and the fingerprint can be stably controlled during mass production, and the difference between the distance from the front of the fingerprint recognition to the panel can be minimized to improve the product yield.

本發明所採用的具體實施例,將藉由以下之實施例及附呈圖式作進一步之說明。The specific embodiments used in the present invention will be further explained by the following embodiments and accompanying drawings.

以下根據第1圖至第2h圖,而說明本發明的實施方式。該說明並非為限制本發明的實施方式,而為本發明之實施例的一種。Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 2h. This description is not intended to limit the embodiment of the present invention, but is an example of the embodiment of the present invention.

參閱第1圖所示,並配合參閱第2a圖至第2h圖,本實施例之說明如下。扇出式指紋辨識模組製造方法包括倒置步驟S101、灌膠步驟S102、翻轉去除步驟S103、電接點設置步驟S104、翻轉鑽孔步驟S105、重佈線步驟S106、面板接合步驟S107及切割步驟S108。Referring to FIG. 1 and referring to FIGS. 2a to 2h, the description of this embodiment is as follows. The method for manufacturing a fan-out fingerprint recognition module includes an inversion step S101, a glue filling step S102, an inversion removal step S103, an electric contact setting step S104, an inversion drilling step S105, a rewiring step S106, a panel bonding step S107, and a cutting step S108 .

參考第2a圖,於倒置步驟S101,將複數個指紋辨識晶片2的指紋辨識正面21朝下貼合於一暫時性基底1,複數個指紋辨識晶片2之間相隔預定的距離。所謂的指紋辨識正面21係指指紋辨識晶片2的經蝕刻、電鍍等半導體製程而具有指紋辨識電路的表面。一個暫時性基底1的表面可貼合大量的指紋辨識晶片2。Referring to FIG. 2a, in the inversion step S101, the fingerprint recognition front surface 21 of the plurality of fingerprint recognition chips 2 is attached to a temporary substrate 1 facing downward, and the plurality of fingerprint recognition chips 2 are separated by a predetermined distance. The so-called fingerprint identification front surface 21 refers to a surface of the fingerprint identification chip 2 having a fingerprint identification circuit after being etched, plated, or other semiconductor processes. A large number of fingerprint identification chips 2 can be attached to the surface of a temporary substrate 1.

參考第2b圖,接著於灌膠步驟S102,將一絕緣膠灌膠(molding)於複數個指紋辨識晶片2及暫時性基底1之上,並控制其厚度使表面平整均勻。待絕緣膠硬化後,即形成一絕緣基層3於複數個指紋辨識晶片2的指紋辨識背面22及暫時性基底1之上,暫時性基底1、複數個指紋辨識晶片2及絕緣基層3形成一暫時結構體。Referring to FIG. 2b, then in a glue filling step S102, an insulating glue is glued on the plurality of fingerprint identification chips 2 and the temporary substrate 1, and the thickness is controlled to make the surface even and uniform. After the insulating glue is hardened, an insulating base layer 3 is formed on the fingerprint identification back surface 22 and the temporary substrate 1 of the plurality of fingerprint identification chips 2, and the temporary substrate 1, the plurality of fingerprint identification chips 2 and the insulating base layer 3 form a temporary Structure.

參考第2c圖,接著於翻轉去除步驟S103,上下翻轉該暫時結構體而使指紋辨識正面21朝上,並移除暫時性基底1以顯露指紋辨識正面21。如此一來,指紋辨識晶片2即埋設於絕緣基層3,指紋辨識晶片2的指紋辨識正面21與絕緣基層3的上表面齊平。在本實施例中,暫時性基底1係為雷射感光膠材,而在本步驟中以雷射感光自動剝離的方式移除暫時性基底1,但本發明不限於此。Referring to FIG. 2c, then in the flip removal step S103, the temporary structure is flipped up and down so that the fingerprint recognition front surface 21 faces upward, and the temporary substrate 1 is removed to expose the fingerprint recognition front surface 21. In this way, the fingerprint identification chip 2 is buried in the insulating base layer 3, and the fingerprint identification front surface 21 of the fingerprint identification chip 2 is flush with the upper surface of the insulating base layer 3. In this embodiment, the temporary substrate 1 is a laser-sensitive plastic material, and in this step, the temporary substrate 1 is removed in a manner of automatic peeling of the laser light, but the present invention is not limited thereto.

參考第2d圖,接著於電接點設置步驟S104,將複數個電接點元件4分別設置複數個指紋辨識正面21並沿指紋辨識正面21延伸至絕緣基層3的上表面。電接點元件4係為導電材料,可藉由拉線或電鍍等方式設置。複數個電接點元件4、複數個指紋辨識晶片2及絕緣基層3形成一待佈線結構體。Referring to FIG. 2D, the electrical contact setting step S104 is followed by setting a plurality of electrical contact elements 4 with a plurality of fingerprint identification front surfaces 21 and extending along the fingerprint identification front surface 21 to the upper surface of the insulating base layer 3. The electrical contact element 4 is a conductive material and can be provided by means of wire drawing or plating. The plurality of electrical contact elements 4, the plurality of fingerprint identification chips 2 and the insulating base layer 3 form a structure to be wired.

參考第2e圖,接著於翻轉鑽孔步驟S105,上下翻轉該待佈線結構體,並於絕緣基層3鑽孔以形成複數個分別連接複數個電接點元件4的上下貫穿的連接通道31。在本實施例中,係以雷射鑽孔的方式形成複數個連接通道31,但本發明不限於此。這些連接通道31係形成於指紋辨識晶片2的外圍,並對應複數個電接點元件4。Referring to FIG. 2e, in the flip drilling step S105, the structure to be routed is flipped up and down, and a hole is drilled in the insulating base layer 3 to form a plurality of upper and lower connection channels 31 respectively connected to the plurality of electrical contact elements 4. In this embodiment, a plurality of connection channels 31 are formed by means of laser drilling, but the present invention is not limited thereto. These connection channels 31 are formed on the periphery of the fingerprint identification chip 2 and correspond to a plurality of electrical contact elements 4.

參考第2f圖,接著於重佈線步驟S106,於複數個連接通道31分別形成複數個電連接電接點元件4的導線5而使該待佈線結構體成為一積體電路結構體。在本實施例中,係以化學製程方法形成導線5於連接通道31中。導線5的一端電連接電接點元件4,導線5的另一端自連接通道31而沿絕緣基層3的相反於指紋辨識晶片2的表面(絕緣基層3的沒有設置指紋辨識晶片2的下表面,但在本圖中朝上)延伸。Referring to FIG. 2f, following the rewiring step S106, a plurality of wires 5 electrically connected to the electrical contact element 4 are formed on the plurality of connection channels 31 respectively, so that the structure to be wired becomes a integrated circuit structure. In this embodiment, the conductive wire 5 is formed in the connection channel 31 by a chemical process method. One end of the lead 5 is electrically connected to the electric contact element 4, and the other end of the lead 5 is along the surface of the insulating base layer 3 opposite to the fingerprint identification chip 2 from the connection channel 31 (the lower surface of the insulating base layer 3 is not provided with the fingerprint identification chip 2, But in this figure).

參考第2g圖,接著於面板接合步驟S107,上下翻轉該積體電路結構體以使指紋辨識正面21朝上,並黏著一面板6於指紋辨識正面21及絕緣基層3的上表面。在本實施例中,係以一絕緣黏著膠形成的絕緣黏著層7將面板6黏著於指紋辨識正面21及絕緣基層3的上表面。絕緣黏著層7兼具將面板6黏著於指紋辨識晶片2的上方的黏著功用以及將指紋辨識正面21絕緣保護的功用,僅需要一層結構及一次封裝,不僅節省封裝製程的製造成本,並且能大幅縮短指紋辨識正面21至面板6之間的距離,使指紋辨識之偵測更加精準。更重要的是,在僅有一層封裝的結構下,可以使各個指紋辨識正面21至面板6之間的距離的差異降到最低(多次封裝會導致各個指紋辨識正面21至面板6之間的距離的差異更難以控制,因而品質不穩定,良率下降)。Referring to FIG. 2g, then at the panel bonding step S107, flip the integrated circuit structure up and down so that the fingerprint recognition front surface 21 faces upward, and adhere a panel 6 to the fingerprint recognition front surface 21 and the upper surface of the insulating base layer 3. In this embodiment, the panel 6 is adhered to the fingerprint recognition front surface 21 and the upper surface of the insulating base layer 3 with an insulating adhesive layer 7 formed by an insulating adhesive. The insulating adhesive layer 7 has both the function of adhering the panel 6 to the top of the fingerprint recognition chip 2 and the function of insulating and protecting the fingerprint recognition front surface 21. Only one layer structure and one package are needed, which not only saves the manufacturing cost of the packaging process, but also greatly Shorten the distance between the fingerprint recognition front 21 and the panel 6 to make the fingerprint recognition detection more accurate. More importantly, in the structure with only one layer of packaging, the difference in distance between each fingerprint identification front 21 and panel 6 can be minimized (multiple packaging will cause each fingerprint identification front 21 to panel 6 The difference in distance is more difficult to control, so the quality is unstable and the yield is reduced).

參考第2h圖,接著於切割步驟S108,以指紋辨識晶片2為裁切範圍中心而以預定的範圍及形狀裁切該積體電路結構體及之上的面板6、絕緣黏著層7,以形成複數個指紋辨識模組100。由於絕緣基層3上佈置複數個指紋辨識晶片2,故可裁切出複數個指紋辨識模組100。這樣生產出來的指紋辨識模組100的規格可以容易地統一控制在一定的標準而無個體差異,大幅提高良率。而本發明的扇出式指紋辨識模組製造方法所製造的指紋辨識模組100可以為圓形、橢圓形等具有平滑曲線的輪廓,可應用、配合各種不同的裝置,例如手機上的home按件。Referring to FIG. 2h, then in the cutting step S108, the fingerprint recognition chip 2 is used as the center of the cutting range, and the integrated circuit structure and the panel 6 and the insulating adhesive layer 7 thereon are cut to a predetermined range and shape to form A plurality of fingerprint identification modules 100. Since the plurality of fingerprint identification chips 2 are arranged on the insulating base layer 3, the plurality of fingerprint identification modules 100 can be cut out. The specifications of the fingerprint identification module 100 produced in this way can be easily uniformly controlled at a certain standard without individual differences, which greatly improves the yield. The fingerprint recognition module 100 manufactured by the fan-out fingerprint recognition module manufacturing method of the present invention can be a contour with a smooth curve, such as a circle or an ellipse, and can be applied to cooperate with various devices, such as the home button on a mobile phone. Pieces.

因此,本發明提出一種由前述所述之扇出式指紋辨識模組製造方法(步驟S101至S108)所製造的指紋辨識模組100,其結構即如第2h圖所示。Therefore, the present invention proposes a fingerprint recognition module 100 manufactured by the aforementioned fan-out fingerprint recognition module manufacturing method (steps S101 to S108), and its structure is as shown in FIG. 2h.

如第2h圖所示,經由本發明提出的扇出式指紋辨識模組製造方法所製造的指紋辨識模組100包含:一絕緣基層3、一指紋辨識晶片2、一電接點元件4、一導線5及一面板6。As shown in FIG. 2h, the fingerprint identification module 100 manufactured by the method for manufacturing a fan-out fingerprint identification module according to the present invention includes: an insulating base layer 3, a fingerprint identification chip 2, an electrical contact element 4, an Lead 5 and a panel 6.

絕緣基層3具有一上下貫穿的連接通道31,在本實施例中,連接通道31係經雷射鑽孔的方式形成。絕緣基層3係為絕緣膠層硬化而成,具有絕緣保護指紋辨識晶片2的效果。The insulating base layer 3 has a connection channel 31 penetrating vertically. In this embodiment, the connection channel 31 is formed by laser drilling. The insulating base layer 3 is hardened by an insulating rubber layer, and has the effect of insulating and protecting the fingerprint identification chip 2.

指紋辨識晶片2埋設於絕緣基層3,指紋辨識晶片2的指紋辨識正面21與絕緣基層3的上表面齊平。意即,絕緣基層3絕緣包覆指紋辨識晶片2的指紋辨識背面22及外周緣。The fingerprint identification chip 2 is embedded in the insulating base layer 3. The fingerprint identification front surface 21 of the fingerprint identification chip 2 is flush with the upper surface of the insulating base layer 3. In other words, the insulating base layer 3 covers the fingerprint recognition back surface 22 and the outer periphery of the fingerprint recognition chip 2 with insulation.

電接點元件4設置於指紋辨識正面21並沿指紋辨識正面21延伸至絕緣基層3的上表面。The electrical contact element 4 is disposed on the fingerprint recognition front surface 21 and extends along the fingerprint recognition front surface 21 to the upper surface of the insulating base layer 3.

導線5設置於連接通道31中且導線5的一端電連接電接點元件4,導線5的另一端沿絕緣基層3的下表面延伸。在本實施例中,導線5係為電鍍導線,以化學製程方法形成於連接通道31中。The lead 5 is disposed in the connection channel 31 and one end of the lead 5 is electrically connected to the electric contact element 4. The other end of the lead 5 extends along the lower surface of the insulating base layer 3. In this embodiment, the conductive line 5 is a plated conductive line, and is formed in the connection channel 31 by a chemical process method.

面板6係透過一絕緣黏著層7黏著於指紋辨識正面21及絕緣基層3的上表面,以使指紋辨識晶片2透過面板6進行一指紋辨識之偵測。在本實施例中,絕緣黏著層7的厚度係小於20微米。The panel 6 is adhered to the upper surface of the fingerprint identification front surface 21 and the insulating base layer 3 through an insulating adhesive layer 7, so that the fingerprint identification chip 2 performs a fingerprint identification detection through the panel 6. In this embodiment, the thickness of the insulating adhesive layer 7 is less than 20 microns.

綜上所述,本發明提供的扇出式指紋辨識模組製造方法以及利用該方法所製造的指紋辨識模組,具有節省封裝製程的製造成本、提高指紋辨識之偵測精準度與成功率、並且可以使各個指紋辨識正面至面板之間的距離的差異降到最低以消除個體化差異等眾多優點。In summary, the method for manufacturing a fan-out fingerprint recognition module provided by the present invention and the fingerprint recognition module manufactured by the method have the advantages of saving the manufacturing cost of the packaging process, improving the detection accuracy and success rate of fingerprint recognition, And it can minimize the difference between the distance from the front of the fingerprint identification to the panel to eliminate many advantages such as individual differences.

以上之敘述以及說明僅為本發明之較佳實施例之說明,對於此項技術具有通常知識者當可依據以下所界定申請專利範圍以及上述之說明而作其他之修改,惟此些修改仍應是為本發明之發明精神而在本發明之權利範圍中。The above descriptions and descriptions are merely illustrations of the preferred embodiments of the present invention. Those with ordinary knowledge of this technology may make other modifications based on the scope of the patent application defined below and the above description, but these modifications should still be made. It is the spirit of the present invention and is within the scope of the present invention.

100‧‧‧指紋辨識模組
1‧‧‧暫時性基底
2‧‧‧指紋辨識晶片
21‧‧‧指紋辨識正面
22‧‧‧指紋辨識背面
3‧‧‧絕緣基層
31‧‧‧連接通道
4‧‧‧電接點元件
5‧‧‧導線
6‧‧‧面板
7‧‧‧絕緣黏著層
S101‧‧‧倒置步驟
S102‧‧‧灌膠步驟
S103‧‧‧翻轉去除步驟
S104‧‧‧電接點設置步驟
S105‧‧‧翻轉鑽孔步驟
S106‧‧‧重佈線步驟
S107‧‧‧面板接合步驟
S108‧‧‧切割步驟
100‧‧‧Fingerprint recognition module
1‧‧‧ temporary base
2‧‧‧Fingerprint identification chip
21‧‧‧Fingerprint identification front
22‧‧‧ Fingerprint Identification Back
3‧‧‧ insulating base
31‧‧‧connection channel
4‧‧‧ Electric contact components
5‧‧‧ lead
6‧‧‧ Panel
7‧‧‧ Insulation Adhesive Layer
S101‧‧‧ Inverted steps
S102‧‧‧Gelling process
S103‧‧‧ Flip removal step
S104‧‧‧ Electric contact setting steps
S105‧‧‧Flip drilling steps
S106‧‧‧Re-wiring steps
S107‧‧‧Panel bonding steps
S108‧‧‧Cutting steps

第1圖為顯示根據本發明一實施例的扇出式指紋辨識模組製造方法之流程圖。 第2a圖至第2h圖為顯示根據本發明的實施例的指紋辨識模組之製作步驟示意圖。FIG. 1 is a flowchart illustrating a method for manufacturing a fan-out fingerprint recognition module according to an embodiment of the present invention. FIG. 2a to FIG. 2h are schematic diagrams showing manufacturing steps of a fingerprint recognition module according to an embodiment of the present invention.

S101‧‧‧倒置步驟 S101‧‧‧ Inverted steps

S102‧‧‧灌膠步驟 S102‧‧‧Gelling process

S103‧‧‧翻轉去除步驟 S103‧‧‧ Flip removal step

S104‧‧‧電接點設置步驟 S104‧‧‧ Electric contact setting steps

S105‧‧‧翻轉鑽孔步驟 S105‧‧‧Flip drilling steps

S106‧‧‧重佈線步驟 S106‧‧‧Re-wiring steps

S107‧‧‧面板接合步驟 S107‧‧‧Panel bonding steps

S108‧‧‧切割步驟 S108‧‧‧Cutting steps

Claims (9)

一種扇出式指紋辨識模組製造方法,包含下列步驟: 一倒置步驟,將複數個指紋辨識晶片的指紋辨識正面朝下貼合於一暫時性基底,該複數個指紋辨識晶片之間相隔預定的距離; 一灌膠步驟,形成一絕緣基層於該複數個指紋辨識晶片的指紋辨識背面及該暫時性基底之上,該暫時性基底、該複數個指紋辨識晶片及該絕緣基層形成一暫時結構體; 一翻轉去除步驟,上下翻轉該暫時結構體而使該指紋辨識正面朝上,並移除該暫時性基底以顯露該指紋辨識正面; 一電接點設置步驟,將複數個電接點元件分別設置該複數個指紋辨識正面,該複數個電接點元件、該複數個指紋辨識晶片及該絕緣基層形成一待佈線結構體; 一翻轉鑽孔步驟,上下翻轉該待佈線結構體,於該絕緣基層鑽孔以形成複數個分別連接該複數個電接點元件的連接通道; 一重佈線步驟,於該複數個連接通道分別形成複數個電連接該電接點元件的導線而使該待佈線結構體成為一積體電路結構體,該導線自該連接通道而沿該絕緣基層的相反於該指紋辨識晶片的表面延伸; 一面板接合步驟,上下翻轉該積體電路結構體以使該指紋辨識正面朝上,並黏著一面板於該指紋辨識正面及該絕緣基層的上表面;以及 一切割步驟,以該指紋辨識晶片為裁切範圍中心而以預定的範圍及形狀裁切該積體電路結構體,以形成複數個指紋辨識模組。A method for manufacturing a fan-out type fingerprint recognition module includes the following steps: An inversion step, the fingerprint recognition of a plurality of fingerprint recognition chips is face-down bonded to a temporary substrate, and the plurality of fingerprint recognition chips are separated by a predetermined interval. Distance; a glue filling step, forming an insulating base layer on the fingerprint identification back surface of the plurality of fingerprint identification chips and the temporary substrate, the temporary substrate, the plurality of fingerprint identification chips and the insulating base layer forming a temporary structure A flipping removal step, flipping the temporary structure upside down to make the fingerprint identification face up, and removing the temporary substrate to reveal the fingerprint identification front; an electrical contact setting step, each of the plurality of electrical contact components The plurality of fingerprint identification front surfaces are arranged, the plurality of electrical contact elements, the plurality of fingerprint identification chips, and the insulating base layer form a structure to be wired; a turning drilling step, the structure to be wired is flipped up and down, and the insulation is The base layer is drilled to form a plurality of connection channels that are respectively connected to the plurality of electrical contact components; The plurality of connection channels respectively form a plurality of wires electrically connected to the electrical contact element, so that the structure to be wired becomes an integrated circuit structure, and the wires from the connection channel along the insulating base layer are opposite to the fingerprint recognition chip. A surface joining step; a panel bonding step, flipping the integrated circuit structure up and down so that the fingerprint identification front faces upward, and adhering a panel to the fingerprint identification front and the upper surface of the insulating base layer; and a cutting step using the The fingerprint recognition chip is the center of the cutting range and cuts the integrated circuit structure in a predetermined range and shape to form a plurality of fingerprint recognition modules. 如請求項1所述之扇出式指紋辨識模組製造方法,其中於該翻轉鑽孔步驟,以雷射鑽孔的方式以形成該複數個連接通道。The method for manufacturing a fan-out fingerprint recognition module according to claim 1, wherein in the turning drilling step, the plurality of connection channels are formed by laser drilling. 如請求項1所述之扇出式指紋辨識模組製造方法,其中於該重佈線步驟,以化學製程方法形成該導線於該連接通道中。The method for manufacturing a fan-out fingerprint identification module according to claim 1, wherein in the rewiring step, the conductive wire is formed in the connection channel by a chemical process method. 如請求項1所述之扇出式指紋辨識模組製造方法,其中該暫時性基底係為雷射感光膠材,而於該翻轉去除步驟中以雷射感光自動剝離的方式移除該暫時性基底。The method for manufacturing a fan-out fingerprint recognition module as described in claim 1, wherein the temporary substrate is a laser-sensitive plastic material, and the temporary is removed by a laser-sensitive automatic peeling method in the reversing and removing step. Substrate. 一種由請求項1所述之扇出式指紋辨識模組製造方法所製造的指紋辨識模組。A fingerprint recognition module manufactured by the method for manufacturing a fan-out fingerprint recognition module according to claim 1. 一種指紋辨識模組,包含: 一絕緣基層,具有一上下貫穿的連接通道; 一指紋辨識晶片,埋設於該絕緣基層,該指紋辨識晶片的指紋辨識正面與該絕緣基層的上表面齊平; 一電接點元件,設置於該指紋辨識正面並沿該指紋辨識正面延伸至該絕緣基層的上表面; 一導線,設置於該連接通道中且該導線的一端電連接該電接點元件,該導線的另一端沿該絕緣基層的下表面延伸;以及 一面板,黏著於該指紋辨識正面及該絕緣基層的上表面,以使該指紋辨識晶片透過該面板進行一指紋辨識之偵測。A fingerprint identification module includes: an insulating base layer having a connection channel penetrating up and down; a fingerprint identification chip embedded in the insulating base layer; a fingerprint identification front face of the fingerprint identification chip being flush with an upper surface of the insulating base layer; An electric contact element is disposed on the front surface of the fingerprint recognition and extends along the front surface of the fingerprint identification to the upper surface of the insulating base layer; a wire is disposed in the connection channel and one end of the wire is electrically connected to the electric contact element, the wire The other end extends along the lower surface of the insulating base layer; and a panel is adhered to the front surface of the fingerprint identification and the upper surface of the insulating base layer, so that the fingerprint identification chip can perform a fingerprint identification detection through the panel. 如請求項6所述之指紋辨識模組,其中該面板係透過一絕緣黏著層黏著於該指紋辨識正面及該絕緣基層的上表面。The fingerprint identification module according to claim 6, wherein the panel is adhered to the front surface of the fingerprint identification and the upper surface of the insulating base layer through an insulating adhesive layer. 如請求項7所述之指紋辨識模組,其中該絕緣黏著層的厚度係小於20微米。The fingerprint identification module according to claim 7, wherein the thickness of the insulating adhesive layer is less than 20 microns. 如請求項6所述之指紋辨識模組,其中該絕緣基層係為絕緣膠層。The fingerprint identification module according to claim 6, wherein the insulating base layer is an insulating adhesive layer.
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