TW201742206A - Method of fixing IHS and heat sink and electronic device applying thereof - Google Patents
Method of fixing IHS and heat sink and electronic device applying thereof Download PDFInfo
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- TW201742206A TW201742206A TW106113750A TW106113750A TW201742206A TW 201742206 A TW201742206 A TW 201742206A TW 106113750 A TW106113750 A TW 106113750A TW 106113750 A TW106113750 A TW 106113750A TW 201742206 A TW201742206 A TW 201742206A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
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- H01L2224/73253—Bump and layer connectors
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Abstract
Description
本發明係有關於一種集成散熱件與散熱器之固定方法以及應用此固定方法之電子元件或裝置。 The present invention relates to a method of fixing an integrated heat sink and a heat sink, and an electronic component or device using the same.
集成散熱件(Integrated heat spreader),簡稱IHS,是一種貼合或覆蓋中央處理器(CPU)或圖形處理器(GPU)等晶片外側的元件,用以將晶片高溫運作時所產生的熱,向外傳遞至其他散熱器例如Heat sink而發揮輔助散熱的功能。 Integrated heat spreader (IHS) is a component that fits or covers the outside of a wafer such as a central processing unit (CPU) or a graphics processing unit (GPU) to heat the wafer when it is operated at high temperature. It is transmitted to other heat sinks such as the Heat sink to provide auxiliary heat dissipation.
第一圖係顯示一種習知用來固定集成散熱件與散熱器的方式以及應用此方法的電子裝置。電子裝置10包括一晶片11、一基板12、一集成散熱件13以及一散熱器14,其中,晶片11設置於基板12上,並且藉由陣列錫球15或打線接合等方式與基板12做電性的連接。而晶片11的外側,則藉由集成散熱件13予以覆蓋,並且在兩者之間塗佈一層導熱介質16來幫助熱的傳遞。而在集成散熱件13的外側或頂面,則連接散熱器14。 The first figure shows a conventional method for fixing an integrated heat sink and a heat sink and an electronic device to which the method is applied. The electronic device 10 includes a wafer 11, a substrate 12, an integrated heat sink 13 and a heat sink 14. The wafer 11 is disposed on the substrate 12 and electrically connected to the substrate 12 by means of an array of solder balls 15 or wire bonding. Sexual connection. The outer side of the wafer 11 is covered by an integrated heat sink 13 and a layer of thermally conductive medium 16 is applied between the two to aid in the transfer of heat. On the outer side or the top surface of the integrated heat sink 13, the heat sink 14 is connected.
為了讓散熱器14能夠貼合集成散熱件13,並且將兩者予以固定而防止脫離,習知的做法之一係如第一圖所示藉由螺絲17a來將散熱器14與基板12(或是散熱器14與集成散熱件13)鎖固在一起。但隨著電子產品與元 件在追求輕薄短小的趨勢下,此種需要在散熱器14以及基板12或是集成散熱件13周圍保留螺絲鎖固空間的做法,因為無法縮小整體的尺寸,因此已漸漸地不符合業界的需求。 In order to enable the heat sink 14 to fit the integrated heat sink 13 and to fix the two to prevent detachment, one of the conventional methods is to fix the heat sink 14 and the substrate 12 by screws 17a as shown in the first figure (or It is the heat sink 14 and the integrated heat sink 13) are locked together. But with electronics and yuan In the pursuit of thinness and shortness, this kind of need to retain the screw locking space around the heat sink 14 and the substrate 12 or the integrated heat sink 13 is gradually failing to meet the needs of the industry because the overall size cannot be reduced. .
另一種習知固定集成散熱件與散熱器的方式則是在兩者之間設置一導電黏著層。請參照第二圖,電子裝置10的晶片11同樣設置於基板12上,並藉由陣列錫球15或打線接合等方式與基板12做電性的連接。而晶片11的外側,同樣藉由集成散熱件13予以覆蓋,並且在兩者之間塗佈導熱介質16。而與前述習知技術不同的是,在將集成散熱件13與散熱器14貼合前,會預先在集成散熱件13外側,或是散熱器14的底面,塗佈或貼附一層導熱黏著層17b,例如導熱雙面膠,如此一來,就可直接將散熱器14與集成散熱件13藉由此導熱黏著層17b而固定在一起,並且也因為散熱器14不需再預留鎖固區而能讓整體的尺寸得以縮小。 Another conventional method of fixing the heat sink and the heat sink is to provide a conductive adhesive layer between the two. Referring to the second figure, the wafer 11 of the electronic device 10 is also disposed on the substrate 12, and electrically connected to the substrate 12 by means of array solder balls 15 or wire bonding. The outer side of the wafer 11 is also covered by the integrated heat sink 13, and a heat transfer medium 16 is applied between the two. The difference from the prior art is that before the integrated heat sink 13 and the heat sink 14 are attached, a thermal conductive adhesive layer is applied or attached on the outer side of the integrated heat sink 13 or the bottom surface of the heat sink 14 in advance. 17b, for example, a heat-conductive double-sided tape, so that the heat sink 14 and the integrated heat sink 13 can be directly fixed by the heat-conductive adhesive layer 17b, and also because the heat sink 14 does not need to reserve a locking area. And the overall size can be reduced.
不過,當集成散熱件13與尺寸或重量上相對而言較大的散熱器14配合時,若兩者僅由導熱黏著層17b來固定,容易因為震動或轉動等位移後發生脫離的情況,因此,這種習知的固定方式在可靠度上仍有很大的改善空間。 However, when the integrated heat sink 13 is mated with the relatively large size or weight of the heat sink 14, if the two are only fixed by the heat conductive adhesive layer 17b, it is easy to be detached due to vibration or rotation, etc. This conventional method of fixing still has a lot of room for improvement in reliability.
為了改善上述習知技術所發生的缺失,本發明提供一種集成散熱件與散熱器之固定方式以及應用此固定方法的電子裝置,讓裝設有集成散熱件與散熱器的電子裝置,得以將運轉時產生的熱,可靠地藉由集成散熱件與散熱器的幫助而順利排出。 In order to improve the above-mentioned defects caused by the prior art, the present invention provides an integrated device for fixing a heat sink and a heat sink, and an electronic device using the same, so that an electronic device equipped with an integrated heat sink and a heat sink can be operated. The heat generated at the time is reliably discharged by the aid of the integrated heat sink and the heat sink.
本發明所提出用來固定集成散熱件與散熱器的方法,係在 集成散熱件的外側(面向散熱器的頂面),或是在散熱器面向集成散熱件的底面,預先形成預鍍層,並藉由可局部加熱的設備例如紅外線或雷射進行加熱,讓集成散熱件與散熱器之間有更穩固的接合後,幫助將電子裝置內晶片所產生的熱排出。 The method for fixing the integrated heat sink and the heat sink proposed by the present invention is The outer side of the integrated heat sink (top surface facing the heat sink), or the bottom surface of the heat sink facing the integrated heat sink, pre-formed with pre-plated layer and heated by locally heated equipment such as infrared or laser to allow integrated heat dissipation After a more secure bond between the piece and the heat sink, it helps to dissipate the heat generated by the wafer within the electronic device.
為達上述目的,於一實施例中,本發明提供一種集成散熱件與散熱器之固定方法,包括提供一散熱器;提供一集成散熱件(Integrated heat spreader),並於集成散熱件面向散熱器之外側形成一預鍍層;對齊散熱器與集成散熱件;以及藉由一局部加熱設備加熱預鍍層,使散熱器與集成散熱件結合在一起。 In order to achieve the above object, in one embodiment, the present invention provides a method for fixing an integrated heat sink and a heat sink, comprising providing a heat sink; providing an integrated heat spreader, and integrating the heat sink facing the heat sink A pre-plated layer is formed on the outside; the heat sink and the integrated heat sink are aligned; and the pre-plated layer is heated by a local heating device to combine the heat sink with the integrated heat sink.
於另一實施例中,本發明提供一種集成散熱件與散熱器之固定方法,包括提供一集成散熱件(Integrated heat spreader);提供一散熱器,並於散熱器面向集成散熱件之底面形成一預鍍層;對齊集成散熱件與散熱器;以及藉由一局部加熱設備加熱預鍍層,使集成散熱件與散熱器結合在一起。 In another embodiment, the present invention provides a method for fixing an integrated heat sink and a heat sink, comprising: providing an integrated heat spreader; providing a heat sink and forming a heat sink on the bottom surface of the heat sink facing the integrated heat sink Pre-plated; aligns the integrated heat sink with the heat sink; and heats the pre-plated layer with a local heating device to bond the integrated heat sink to the heat sink.
於上述兩實施例中,局部加熱設備可選自下列之一:紅外線加熱設備以及雷射加熱設備。 In the above two embodiments, the local heating device may be selected from one of the following: an infrared heating device and a laser heating device.
於上述兩實施例中,預鍍層之材料可選自至少下列之一金屬:金(Au)、銅(Cu)、鎳(Ni)、銦(In)、錫(Sn)、鉛(Pb)、銀(Ag)、銻(Sb)、鉍(Bi)、鋅(Zn)、鎘(Cd)、釕(Ru)、鈷(Co)、鉻(Cr)、鐵(Fe)、錳(Mn)、鈦(Ti)、鋁(Al)、鉿(Hf)、鉭(Ta)、鎢(W)、釩(V)、鉬(Mo)、鈀(Pd)與鉑(Pt)。 In the above two embodiments, the material of the pre-plating layer may be selected from at least one of the following metals: gold (Au), copper (Cu), nickel (Ni), indium (In), tin (Sn), lead (Pb), Silver (Ag), bismuth (Sb), bismuth (Bi), zinc (Zn), cadmium (Cd), ruthenium (Ru), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), Titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd) and platinum (Pt).
於再一實施例中,本發明提供一種電子裝置,包括一基板;一晶片,設置於基板上;一集成散熱件,覆蓋晶片並與基板連接在一起; 一散熱器,連接集成散熱件;以及一預鍍層,設置於集成散熱件與散熱器之間,用以被加熱後連接集成散熱件與散熱器。 In still another embodiment, the present invention provides an electronic device including a substrate; a wafer disposed on the substrate; and an integrated heat sink covering the wafer and connected to the substrate; A heat sink is connected to the integrated heat sink; and a pre-plated layer is disposed between the integrated heat sink and the heat sink to be heated to connect the integrated heat sink and the heat sink.
於上述實施例中,更包括一導熱介質連接晶片以及集成散熱件。 In the above embodiments, a heat transfer medium connecting chip and an integrated heat sink are further included.
於上述實施例中,更包括一定位結構對應設置在集成散熱件與散熱器上,用以幫助集成散熱件對齊散熱器。 In the above embodiment, a positioning structure is further disposed on the integrated heat sink and the heat sink to help integrate the heat sink to align the heat sink.
於上述實施例中,定位結構包括一凹陷部與一突出部,可對應形成於集成散熱件與散熱器上,或是對應形成於散熱器與集成散熱件上。 In the above embodiment, the positioning structure includes a recessed portion and a protruding portion, which may be formed on the integrated heat sink and the heat sink, or formed on the heat sink and the integrated heat sink.
於上述實施例中,預鍍層之材料可選自至少下列之一金屬:金(Au)、銅(Cu)、鎳(Ni)、銦(In)、錫(Sn)、鉛(Pb)、銀(Ag)、銻(Sb)、鉍(Bi)、鋅(Zn)、鎘(Cd)、釕(Ru)、鈷(Co)、鉻(Cr)、鐵(Fe)、錳(Mn)、鈦(Ti)、鋁(Al)、鉿(Hf)、鉭(Ta)、鎢(W)、釩(V)、鉬(Mo)、鈀(Pd)與鉑(Pt)。 In the above embodiments, the material of the pre-plating layer may be selected from at least one of the following metals: gold (Au), copper (Cu), nickel (Ni), indium (In), tin (Sn), lead (Pb), silver. (Ag), bismuth (Sb), bismuth (Bi), zinc (Zn), cadmium (Cd), ruthenium (Ru), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd), and platinum (Pt).
於又一實施例中,本發明提供一種具有散熱器的集成散熱件,包括一集成散熱件;一散熱器,連接集成散熱件;以及一預鍍層,設置於集成散熱件與散熱器之間,用以被加熱後連接集成散熱件與散熱器。 In another embodiment, the present invention provides an integrated heat sink having a heat sink, including an integrated heat sink, a heat sink connected to the integrated heat sink, and a pre-plated layer disposed between the integrated heat sink and the heat sink. Used to be heated to connect the integrated heat sink to the heat sink.
於上述實施例中,更包括一定位結構對應設置在集成散熱件與散熱器上,用以幫助集成散熱件對齊散熱器。 In the above embodiment, a positioning structure is further disposed on the integrated heat sink and the heat sink to help integrate the heat sink to align the heat sink.
於上述實施例中,定位結構包括一凹陷部與一突出部,可對應形成於集成散熱件與散熱器上,或是對應形成於散熱器與集成散熱件上。 In the above embodiment, the positioning structure includes a recessed portion and a protruding portion, which may be formed on the integrated heat sink and the heat sink, or formed on the heat sink and the integrated heat sink.
於上述實施例中,預鍍層之材料可選自至少下列之一金屬: 金(Au)、銅(Cu)、鎳(Ni)、銦(In)、錫(Sn)、鉛(Pb)、銀(Ag)、銻(Sb)、鉍(Bi)、鋅(Zn)、鎘(Cd)、釕(Ru)、鈷(Co)、鉻(Cr)、鐵(Fe)、錳(Mn)、鈦(Ti)、鋁(Al)、鉿(Hf)、鉭(Ta)、鎢(W)、釩(V)、鉬(Mo)、鈀(Pd)與鉑(Pt)。 In the above embodiments, the material of the pre-plating layer may be selected from at least one of the following metals: Gold (Au), copper (Cu), nickel (Ni), indium (In), tin (Sn), lead (Pb), silver (Ag), antimony (Sb), antimony (Bi), zinc (Zn), Cadmium (Cd), ruthenium (Ru), cobalt (Co), chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), Tungsten (W), vanadium (V), molybdenum (Mo), palladium (Pd) and platinum (Pt).
10‧‧‧電子裝置 10‧‧‧Electronic devices
11‧‧‧晶片 11‧‧‧ wafer
12‧‧‧基板 12‧‧‧Substrate
13‧‧‧集成散熱件 13‧‧‧Integrated heat sink
13a‧‧‧凹陷部 13a‧‧‧Depression
14‧‧‧散熱器 14‧‧‧ radiator
14a‧‧‧突出部 14a‧‧‧Protruding
15‧‧‧陣列錫球 15‧‧‧Array of solder balls
16‧‧‧導熱介質 16‧‧‧ Thermal medium
17a‧‧‧螺絲 17a‧‧‧screw
17b‧‧‧導熱黏著層 17b‧‧‧ Thermal adhesive layer
17c‧‧‧預鍍層 17c‧‧‧Pre-plated
18‧‧‧加熱設備 18‧‧‧heating equipment
圖1係習知固定集成散熱件與散熱器的方法與結構。 FIG. 1 is a conventional method and structure for fixing an integrated heat sink and a heat sink.
圖2係習知固定集成散熱件與散熱器的方法與結構。 FIG. 2 is a conventional method and structure for fixing an integrated heat sink and a heat sink.
圖3A至圖3C係本發明第一實施例所提供固定集成散熱件與散熱器之設計。 3A to 3C show the design of a fixed integrated heat sink and a heat sink provided by the first embodiment of the present invention.
圖4A至圖4C圖係本發明第二實施例所提供固定集成散熱件與散熱器之設計。 4A to 4C illustrate a design of a fixed integrated heat sink and a heat sink provided by a second embodiment of the present invention.
圖5係本發明所提供形成於集成散熱件與散熱器上的定位機制。 FIG. 5 is a positioning mechanism formed on the integrated heat sink and the heat sink provided by the present invention.
圖3A至圖3C係顯示本發明所提供之第一實施例。電子裝置10包括一晶片11、一基板12、一集成散熱件(Integrated heat spreader)13以及一散熱器(Heat sink)14,其中,晶片11設置於一基板上,並且藉由陣列錫球15或打線接合等方式與基板12做電性的連接。而集成散熱件13則覆蓋於晶片11的外側並與基板12連接在一起,用以將晶片11運轉時所產生的熱傳遞至散熱器14。本實施例所提出用來固定集成散熱件13與散熱器14的方法,如第3A圖所示,係先將集成散熱件13與晶片11組裝連接完成後,在集成散熱件13面向散熱器14的外側(或頂面),形成一預鍍層17c,之後則如圖3B與圖3C圖所示,藉由治具或其他輔助手段(圖中未示)的定位將集成散熱件13與散熱器 14對齊,並利用紅外線或雷射等可進行局部範圍加熱的加熱設備18來加熱預鍍層17c後,使得集成散熱件13可與散熱器14穩固地結合在一起,避免兩者產生脫離。 3A to 3C show a first embodiment of the present invention. The electronic device 10 includes a wafer 11 , a substrate 12 , an integrated heat spreader 13 , and a heat sink 14 . The wafer 11 is disposed on a substrate and is supported by an array of solder balls 15 or Electrical connection is made to the substrate 12 by wire bonding or the like. The integrated heat sink 13 covers the outside of the wafer 11 and is coupled to the substrate 12 for transferring heat generated by the operation of the wafer 11 to the heat sink 14. The method for fixing the integrated heat sink 13 and the heat sink 14 is as shown in FIG. 3A. After the integrated heat sink 13 and the wafer 11 are assembled and connected, the integrated heat sink 13 faces the heat sink 14 . The outer side (or top surface) forms a pre-plated layer 17c, and then, as shown in FIG. 3B and FIG. 3C, the heat sink 13 and the heat sink are integrated by positioning of a jig or other auxiliary means (not shown). 14 is aligned, and the pre-plated layer 17c is heated by a heating device 18 capable of localized heating such as infrared rays or laser light, so that the integrated heat sink 13 can be firmly bonded to the heat sink 14 to prevent the two from being detached.
本實施例所提供的電子裝置10,其中固定集成散熱件13與散熱器14的方法,係預先在集成散熱件13外側(或頂面)形成一預鍍層17c,但並不以此為限,本發明也可在其他實施例中,預先在散熱器14底面,也就是面向集成散熱件13並且預計與其連接的該面,形成預鍍層17c。 The electronic device 10 provided in this embodiment, wherein the method of fixing the heat sink 13 and the heat sink 14 is fixed, a pre-plating layer 17c is formed on the outer side (or the top surface) of the integrated heat sink 13 in advance, but not limited thereto. In other embodiments, the pre-plated layer 17c may be formed in advance on the bottom surface of the heat sink 14, that is, the surface facing the integrated heat sink 13 and intended to be connected thereto.
此外,本實施例所提供在集成散熱件13或散熱器14上形成預鍍層17c的設計,可選在集成散熱件13或散熱器14生產製造時,即先在特定位置例如集成散熱件13的頂面(預計與散熱器接合的該面),或是散熱器14的底面(預計與集成散熱件接合的該面)上,預先形成預鍍層17c後就直接以成品出貨。之後晶片組裝廠商就可直接利用設置有預鍍層17c的集成散熱件13來與散熱器14固定,或是將設置有預鍍層17c的散熱器14固定至集成散熱件13上,因而能夠省去形成預鍍層17c的製程及對應的設備。 In addition, the present embodiment provides a design for forming a pre-plated layer 17c on the integrated heat sink 13 or the heat sink 14, optionally when the integrated heat sink 13 or the heat sink 14 is manufactured, that is, in a specific position, for example, the heat sink 13 is integrated. The top surface (which is expected to be bonded to the heat sink) or the bottom surface of the heat sink 14 (which is expected to be bonded to the integrated heat sink) is preliminarily formed with the pre-plated layer 17c and then shipped directly to the finished product. Thereafter, the wafer assembler can directly fix the heat sink 14 by using the integrated heat sink 13 provided with the pre-plated layer 17c, or fix the heat sink 14 provided with the pre-plated layer 17c to the integrated heat sink 13, thereby eliminating the formation of the heat sink 13. The process of pre-plating 17c and the corresponding equipment.
本發明所採用的預鍍層17c,可視集成散熱件13與散熱器14的材質而選擇適當的金屬合金材料,金屬合金的材料組成可選自金(Au)、銅(Cu)、鎳(Ni)、銦(In)、錫(Sn)、鉛(Pb)、銀(Ag)、銻(Sb)、鉍(Bi)、鋅(Zn)、鎘(Cd)、釕(Ru)、鈷(Co)、鉻(Cr)、鐵(Fe)、錳(Mn)、鈦(Ti)、鋁(Al)、鉿(Hf)、鉭(Ta)、鎢(W)、釩(V)、鉬(Mo)、鈀(Pd)、鉑(Pt)或其組合。 The pre-plated layer 17c used in the present invention can select an appropriate metal alloy material by integrating the materials of the heat sink 13 and the heat sink 14. The material composition of the metal alloy can be selected from gold (Au), copper (Cu), and nickel (Ni). , indium (In), tin (Sn), lead (Pb), silver (Ag), antimony (Sb), antimony (Bi), zinc (Zn), cadmium (Cd), antimony (Ru), cobalt (Co) , chromium (Cr), iron (Fe), manganese (Mn), titanium (Ti), aluminum (Al), hafnium (Hf), tantalum (Ta), tungsten (W), vanadium (V), molybdenum (Mo) , palladium (Pd), platinum (Pt) or a combination thereof.
圖4A至圖4C圖係本案所提供之第二實施例。電子裝置10包括一晶11片、一基板12、一集成散熱件13以及一散熱器14,與第一實施例不同的是,本實施例可如圖4A所示,預先在集成散熱件13面向散熱器14的外 側(或頂面)形成一預鍍層17c後,藉由治具或其他輔助手段(圖中未示)的定位將集成散熱件13與散熱器14對齊,並如圖4B圖所示,利用紅外線或雷射等可進行局部加熱的加熱設備18來加熱預鍍層17c,使得集成散熱件13與散熱器14先穩固地結合在一起。之後,再如圖4C所示,將集成散熱件13覆蓋於晶片11上並與基板12結合在一起而形成電子裝置。 4A to 4C illustrate a second embodiment provided by the present invention. The electronic device 10 includes a crystal 11 chip, a substrate 12, an integrated heat sink 13 and a heat sink 14. Unlike the first embodiment, the embodiment can be previously faced with the integrated heat sink 13 as shown in FIG. 4A. Outside the radiator 14 After forming a pre-plated layer 17c on the side (or top surface), the integrated heat sink 13 is aligned with the heat sink 14 by positioning of a fixture or other auxiliary means (not shown), and as shown in FIG. 4B, infrared rays are used. The preheating layer 17c is heated by a heating device 18 such as a laser that can perform local heating, so that the integrated heat sink 13 and the heat sink 14 are firmly bonded together first. Thereafter, as shown in FIG. 4C, the integrated heat sink 13 is overlaid on the wafer 11 and bonded to the substrate 12 to form an electronic device.
在本實施例所提供的電子裝置10中,固定集成散熱件13與散熱器14的方法,係以預先在集成散熱件13外側(或頂面)形成一預鍍層17c,但並不以此為限,本發明也可在其他實施例中,預先在散熱器14底面,也就是面向集成散熱件13並且預計與其接合的該面,形成預鍍層17c。 In the electronic device 10 provided in this embodiment, the method of fixing the heat dissipating component 13 and the heat sink 14 is such that a pre-plating layer 17c is formed on the outer side (or the top surface) of the integrated heat sink 13 in advance, but this is not Alternatively, in other embodiments, the pre-plated layer 17c may be formed in advance on the bottom surface of the heat sink 14, that is, the surface facing the integrated heat sink 13 and intended to be bonded thereto.
此外,本實施例所提供預先將集成散熱件13與散熱器14藉由預鍍層17c與局部加熱手段固定在一起的設計,並不限定要在組裝至晶片11前才進行固定的程序。本發明也可在集成散熱件13與散熱器14生產製造時,就預先將兩者予以固定並組裝在一起後以成品出貨,讓晶片組裝廠商直接拿來與晶片11結合在一起而省去形成預鍍層的製程及對應的設備。 In addition, the design of the embodiment in which the integrated heat sink 13 and the heat sink 14 are fixed together by the pre-plating layer 17c and the local heating means in advance does not limit the procedure to be fixed before being assembled to the wafer 11. The invention can also be used to fix and assemble the integrated heat sink 13 and the heat sink 14 in advance, and then ship the product in a finished product, so that the wafer assembler can directly take it together with the wafer 11 and save it. The process of forming the pre-plated layer and the corresponding equipment.
圖5係顯示本發明所提供形成於集成散熱件13與散熱器14上的定位機制。在前述第一與第二實施例中有提及,集成散熱件13與散熱器14可藉由治具或其他輔助手段的定位來將集成散熱件13與散熱器14對齊,其目的是要確保兩者不會在進行局部加熱時發生錯位或位移的情況。而在集成散熱件13或散熱器14本身,也可如圖5所示,在互相接合的區域,對應形成有包括突出部14a與凹陷部13a的定位結構,或是反之在集成散熱件13或散熱器14形成有凹陷部與突出部,如此一來,就可靠定位結構來幫助集成散熱件13與散熱器的14對齊,讓固定接合的過程更加順利。 FIG. 5 shows a positioning mechanism formed on the integrated heat sink 13 and the heat sink 14 provided by the present invention. As mentioned in the foregoing first and second embodiments, the integrated heat sink 13 and the heat sink 14 can be aligned with the heat sink 14 by positioning of a jig or other auxiliary means for the purpose of ensuring Both do not cause misalignment or displacement when performing local heating. In the integrated heat sink 13 or the heat sink 14 itself, as shown in FIG. 5, in the mutually joined regions, a positioning structure including the protruding portion 14a and the recessed portion 13a is formed correspondingly, or vice versa in the integrated heat sink 13 or The heat sink 14 is formed with recesses and protrusions, so that the structure is reliably positioned to help the integrated heat sink 13 align with the heat sink 14 to make the process of the fixed joint smoother.
10‧‧‧電子裝置 10‧‧‧Electronic devices
11‧‧‧晶片 11‧‧‧ wafer
12‧‧‧基板 12‧‧‧Substrate
13‧‧‧集成散熱件 13‧‧‧Integrated heat sink
14‧‧‧散熱器 14‧‧‧ radiator
15‧‧‧陣列錫球 15‧‧‧Array of solder balls
16‧‧‧導熱介質 16‧‧‧ Thermal medium
17c‧‧‧預鍍層 17c‧‧‧Pre-plated
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