TW201741077A - 陶瓷超磨粒砂輪 - Google Patents
陶瓷超磨粒砂輪 Download PDFInfo
- Publication number
- TW201741077A TW201741077A TW106111414A TW106111414A TW201741077A TW 201741077 A TW201741077 A TW 201741077A TW 106111414 A TW106111414 A TW 106111414A TW 106111414 A TW106111414 A TW 106111414A TW 201741077 A TW201741077 A TW 201741077A
- Authority
- TW
- Taiwan
- Prior art keywords
- grinding wheel
- abrasive
- pore
- diameter
- super
- Prior art date
Links
- 238000000227 grinding Methods 0.000 title claims abstract description 121
- 239000011148 porous material Substances 0.000 title claims abstract description 108
- 239000000919 ceramic Substances 0.000 title claims abstract description 57
- 235000012431 wafers Nutrition 0.000 claims abstract description 17
- 150000001875 compounds Chemical class 0.000 claims abstract description 5
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 5
- 239000010980 sapphire Substances 0.000 claims abstract description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 239000011230 binding agent Substances 0.000 claims description 42
- 239000002245 particle Substances 0.000 claims description 29
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 20
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 10
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims 1
- 239000006061 abrasive grain Substances 0.000 abstract description 48
- 238000005520 cutting process Methods 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 46
- 230000000052 comparative effect Effects 0.000 description 31
- 238000012360 testing method Methods 0.000 description 19
- 230000000694 effects Effects 0.000 description 17
- 230000003746 surface roughness Effects 0.000 description 11
- 238000010304 firing Methods 0.000 description 10
- 239000003082 abrasive agent Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000003825 pressing Methods 0.000 description 7
- 239000007767 bonding agent Substances 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 230000014759 maintenance of location Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 230000006872 improvement Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 3
- 229910052863 mullite Inorganic materials 0.000 description 3
- 238000005191 phase separation Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- WXANAQMHYPHTGY-UHFFFAOYSA-N cerium;ethyne Chemical compound [Ce].[C-]#[C] WXANAQMHYPHTGY-UHFFFAOYSA-N 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016075435A JP2017185575A (ja) | 2016-04-04 | 2016-04-04 | ビトリファイド超砥粒ホイール |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201741077A true TW201741077A (zh) | 2017-12-01 |
Family
ID=60044462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106111414A TW201741077A (zh) | 2016-04-04 | 2017-04-05 | 陶瓷超磨粒砂輪 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2017185575A (enExample) |
| TW (1) | TW201741077A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112296889A (zh) * | 2020-11-06 | 2021-02-02 | 河南科恩超硬材料技术有限公司 | 用于sic晶片的减薄多孔陶瓷复合结合剂、金刚石刀头、砂轮及其制造方法 |
| CN113329846A (zh) * | 2019-02-01 | 2021-08-31 | 株式会社则武 | 高硬质脆性材料用金属结合剂磨石 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7049848B2 (ja) * | 2018-02-08 | 2022-04-07 | 株式会社ディスコ | 保持面の研削方法 |
| CN110587498B (zh) * | 2019-08-23 | 2021-05-14 | 河南富莱格超硬材料有限公司 | 一种制备超硬小磨头的方法 |
| KR102848445B1 (ko) | 2020-07-10 | 2025-08-21 | 세인트-고바인 아브라시브즈 인크. | 접합된 연마 물품 및 이의 제조 방법 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6025659A (ja) * | 1983-07-22 | 1985-02-08 | ボリス，アントノウイツチ，ブリアンツエフ | 研摩工具製造用のセラミツク結合剤 |
| US5037452A (en) * | 1990-12-20 | 1991-08-06 | Cincinnati Milacron Inc. | Method of making vitreous bonded grinding wheels and grinding wheels obtained by the method |
| US8216326B2 (en) * | 2008-06-23 | 2012-07-10 | Saint-Gobain Abrasives, Inc. | High porosity vitrified superabrasive products and method of preparation |
| JP5419173B2 (ja) * | 2011-03-28 | 2014-02-19 | 株式会社アライドマテリアル | 超砥粒ホイールおよびそれを用いた研削加工法 |
-
2016
- 2016-04-04 JP JP2016075435A patent/JP2017185575A/ja active Pending
-
2017
- 2017-04-05 TW TW106111414A patent/TW201741077A/zh unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113329846A (zh) * | 2019-02-01 | 2021-08-31 | 株式会社则武 | 高硬质脆性材料用金属结合剂磨石 |
| CN113329846B (zh) * | 2019-02-01 | 2024-01-02 | 株式会社则武 | 高硬质脆性材料用金属结合剂磨石 |
| CN112296889A (zh) * | 2020-11-06 | 2021-02-02 | 河南科恩超硬材料技术有限公司 | 用于sic晶片的减薄多孔陶瓷复合结合剂、金刚石刀头、砂轮及其制造方法 |
| CN112296889B (zh) * | 2020-11-06 | 2021-11-09 | 河南科恩超硬材料技术有限公司 | 用于sic晶片的减薄多孔陶瓷复合结合剂、金刚石刀头、砂轮及其制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017185575A (ja) | 2017-10-12 |
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