TW201738567A - An integrated multifunctional detector module - Google Patents

Abstract

Disclosed is an integrated multifunctional detector module, comprising an accelerometer, a resonant magnetic field sensor and a calculation circuit, all formed in a substrate. The mass block of the accelerometer and the mass block of the resonant magnetic field sensor form an integrated structure, suspended in the substrate. The calculation circuit is connected to outputs of the accelerometer and the resonant magnetic field sensor and use their output signals to calculate displacement of the mass block in two or more directions, magnetic forces applied to the mass block in particular directions, angular velocity of the mass block, ambient temperature, surface temperature and pressure.

Description

Accumulative multi-sensor module

The present invention relates to an integrated multi-sensor module, and more particularly to a multi-sensor module that utilizes a limited number of sensor elements to provide a variety of sensing applications.

In recent years, various detectors manufactured using MEMS (microelectromechanical system) technology have been widely used in industrial, commercial, and daily life applications to provide applications for performing monitoring and/or control functions. These detectors provide various electrical parameters such as voltage, current, frequency, etc. in wired or wireless manner, and input various measurement or application circuits to represent equivalent physical, chemical, biological and other measurement parameters. Measurement results or further applications. These detectors are small, consume less power, and often provide wireless communication capabilities. The combination of different detection parameters and provides complex monitoring and control functions.

However, although the existing detectors are reduced in size, most of them can only provide a small number of detection functions. If a particular monitoring or control function requires the use of multiple detection parameters, it is common practice to combine detectors with different sensing capabilities in one large circuit or on a single PCB. This results in an increased sensor volume, higher power consumption, and higher complexity. The result is increased design and manufacturing costs.

In order to further reduce the size of the detection device and improve the manufacturing efficiency, the operator attempts to combine different types, that is, detectors for measuring different parameters, on a single substrate, for example, a multi-detection element of a single wafer.

EP 2 759 802 A2 discloses an integrated multi-axis MEMS inertial sensing device in a single chip package. The MEMS device includes a three-axis accelerometer and a plurality of gyroscopes that are stacked on a substrate. The sensing device can be used to provide a variety of sensing functions. However, this patent does not describe the circuit configuration that achieves these measurement functions.

US Patent No. 20140300490 A1 discloses a wearable electronic device having a memory attached processor coupled to a body area network (BAN) and connectable to a wide area network. The device has a firmware that can be connected to a wide area network to download applications and settings, as well as upload data to the server.

WO 2014143812 A2 discloses a multimodal fluid condition detector platform and system for simultaneously measuring various parameters in a liquid circulation system in a plurality of modalities. Suitable circulation systems include automotive reciprocating engines and vehicle transmissions. The following various measurement modes are disclosed in the embodiments: temperature differential comparison; magnetic differential comparison; pole differential comparison; resistance differential comparison and absorption differential comparison.

US2014264657 provides a design for accumulating multiple detectors on a single semiconductor substrate. The invention discloses a single crystal integrated composite detector. In the embodiment of the patent, a plurality of detectors can be formed on a single substrate, and include, for example, a magnetometer, an infrared detector, an accelerometer and a hygrometer.

The Republic of China Patent Application No. 103132220 discloses a dual-purpose resonance type magnetometer which can be used to measure the magnetic field applied to its mass in a resonant mode, and can be used to measure in a non-resonant mode. The amount of movement of the mass or the acceleration of the movement. In the description of the invention, the embodiment discloses that a filter can be used to simultaneously measure magnetic force and acceleration in a resonant mode.

As can be seen from the discussion of the prior art above, there is a strong demand in the industry for technologies that simultaneously provide various parameter measurement functions on a single substrate, particularly a semiconductor substrate. However, prior art multi-element sensing elements typically employ multiple sensing elements on a single substrate. A few components that use a combination of sensing parameters to obtain more sensing functions can only provide limited sensing or detection functions.

It is an object of the present invention to provide an integrated multi-sensor module that can utilize a limited variety of sensors to achieve a variety of sensing functions.

It is also an object of the present invention to provide an integrated multi-sensor module that achieves a variety of sensing functions with a minimum number of sensors.

The invention provides an integrated multi-sensor module comprising an accelerometer, a resonance type magnetometer and a calculation circuit formed on a single substrate. The accelerometer includes a mass and two sets of detecting electrodes, the resonant magnetometer includes a mass, two sets of detecting electrodes, and a vibration driving circuit, and the mass of the accelerometer and the resonant magnetic force The mass is integrated and suspended from the substrate. In a preferred embodiment of the invention, the mass of the accelerometer is suspended from the mass of the resonance type magnetometer, and the mass of the resonance type magnetometer is suspended from the substrate. The calculation circuit connects the accelerometer and the output of the resonance type magnetometer for calculating various physical quantities, chemical quantities, and biomass according to the resonance type magnetometer and the output value of the accelerometer.

Each group of detecting electrodes of the accelerometer is formed on the substrate and includes a plurality of finger electrodes. The accumulators are formed with interdigitated protrusions on both sides of the mass and are staggered with the finger electrodes of the accelerometer. Each group of detecting electrodes of the resonance type magnetometer is formed on the substrate, and includes a plurality of finger electrodes, and the mass of the resonance type magnetometer forms a fork-like protrusion on both sides, and is a finger of the resonance type magnetometer The electrodes are staggered. In a preferred embodiment of the present invention, the finger electrodes of the accelerometer are located on opposite first and second sides of the mass, and the finger electrodes of the resonance type magnetometer are located in the other third relative of the mass The fourth side.

The mass is suspended from the substrate to form an electrode plate, and the electrode plate is connected to a vibration driving circuit for the current of the vibration driving circuit to flow through the mass. The vibration drive circuit is coupled to the output of the converter circuit, and the output is supplied to the mass in a current mode for driving the mass to generate vibration. The vibration driving circuit includes a converter circuit connected to the finger electrodes of the resonance type magnetometer for converting the detection result output by the finger electrodes into a voltage signal. The output signal of the converter circuit can provide a calculation circuit of the magnetic field to calculate a magnetic field value or an acceleration value according to the displacement detected by the displacement detecting electrode. The current supplied by the vibration drive circuit flows through the mass in a direction substantially orthogonal to the line connecting the first side and the second side.

The vibration driving circuit may include a comparator circuit having an input connected to the output of the converter circuit and a reference potential for outputting a comparison result of the converter circuit output signal and the reference potential as a vibration driving of the mass signal. The vibration frequency of the mass is the resonant frequency of the mass. The amplitude of the mass increases with time and is stabilized after a short period of time. In a preferred embodiment of the invention, the reference potential is a ground potential.

The resonance type magnetometer may further include a selection circuit coupled to the vibration drive circuit to selectively stop the vibration drive circuit from supplying the drive current to the mass. The resonance type magnetometer may further include a band pass filter coupled to the selection circuit for selecting a frequency band of the output signal. The selection circuit may select the resonance type magnetometer to provide a magnetic detection result, an acceleration detection result, or both a magnetic detection result and an acceleration detection result.

In one example of the present invention, the calculation circuit calculates the amount of magnetic force that the mass is subjected to in one direction from the output signal of the resonance type magnetometer. In another example of the present invention, the calculation circuit calculates an amount of displacement, displacement direction, and/or displacement acceleration of the mass in one direction from an output signal of the resonance type magnetometer. In another example of the present invention, the calculation circuit calculates the displacement of the mass in one direction, the direction of displacement, and/or the acceleration of the displacement from the output signal of the accelerometer. In another example of the present invention, the calculation circuit calculates an amount of displacement, a displacement direction, and/or a displacement acceleration of the mass in two or more directions by an output signal of the resonance type magnetometer and an output signal of the accelerometer. . In another example of the present invention, the calculation circuit draws an oscillation frequency parameter from an output signal of the resonance type magnetometer, and calculates an angular velocity of the mass displacement from an output signal of the accelerometer. In another example of the present invention, the calculation circuit draws a resonance frequency offset from an output signal of the resonance type magnetometer for calculating an ambient temperature or a contact surface temperature. In another example of the present invention, the calculation circuit draws its Q value from the output signal of the resonance type magnetometer to calculate the ambient air pressure.

The integrated multi-sensor element of the present invention may further include a surface pressure sensor for providing a sensing plane and detecting a pressure value received at each point on the plane. The integrated multi-sensor element can also include other sensors, such as hygrometers, image sensors, etc., to provide a combination of more types of applications.

The sensing result or the combined result of the integrated multi-sensor element can be further provided by an external application module by using, for example, time division multiple access (TDMA) or frequency division multiplexing (FDMA).

The above and other objects and advantages of the present invention will become more apparent from the description and appended claims.

The invention discloses an integrated multi-sensor module. 4 is a block diagram of an embodiment of an integrated multi-sensor element module of the present invention. As shown, the sensor module includes a sensor structure 100 and a computing circuit 200. The sensor structure 100 mainly includes an accelerometer and a resonance type magnetometer formed on a single substrate. The computing circuit 200 and the sensor structure 100 are preferably formed on a single substrate, but may be formed on different boards and then connected by conventional methods.

The sensor structure 100 provides the sensing functionality required by the computing circuit 200 of the present invention. 1 shows a plan view of a sensor structure 100 of an integrated multi-sensor module of the present invention, and FIG. 2 is a side view thereof. In the illustrated embodiment, the sensor structure 100 includes a first mass 10 that includes a body 11 and mass segments 12 and 13 disposed on opposite sides of the body 11. The mass 10 is suspended by the springs 14, 15 on the second mass 20 and the third mass 30. The outer sides (the first side and the second side) of the first and second mass segments 12, 13 each form the interdigitated projections 16, 16 and 17, 17.

The second mass 20 and the third mass 30 are respectively located on both sides (the third side and the fourth side) of the first mass 10 where the interdigitated protrusions 16, 16 and 17, 17 are not formed, and are spring 21 , 22, 31, 32 are suspended on the substrate 40. Electrodes 23, 24, 33, 34 are formed at the junction of the springs 21, 22, 31, 32 and the substrate 40, respectively. The second mass 20 and the third mass 30 respectively form the interdigitated protrusions 25, 25 and 35, 35 on their outer sides (the third side and the fourth side).

The first detecting electrode 26 and the second detecting electrode 36 are formed on the substrate 40 opposite to the second mass 20 and the third mass 30. The first detecting electrode 26 and the second detecting electrode 36 also form the interdigitated protrusions 27, 27 and 37, 37 on the side facing the second mass 20 and the third mass 30, and are respectively opposite to the first The interdigitated protrusions 25, 25 and 35, 35 of the second mass 20 and the third mass 30 are arranged in a staggered arrangement.

The third detecting electrode 18 and the fourth detecting electrode 19 are formed on the substrate 40 at a position relative to the first mass block 12 and the second mass block 13. The third detecting electrode 18 and the fourth detecting electrode 19 also form the interdigitated protrusions 18A, 18A and 19A, 19A on the sides facing the first mass sub-block 12 and the second mass sub-block 13, respectively The first mass sub-block 12 and the second mass-divided interdigitated protrusions 16, 16 and 17, 17 form a staggered arrangement.

In this embodiment, the first mass 10 and the third detecting electrode 18 and the fourth detecting electrode 19 form a detector body of the accelerometer, and the second mass 20 and the third mass 30 The detector body of the accelerometer is also formed with the first detecting electrode 26 and the second detecting electrode 36, respectively. In addition, the second mass 20 is selectively powered by the electrodes 23, 24, 33, 34 to oscillate the second mass 20 and the third mass 30, and after reaching the resonant frequency of the mass, the second mass 20 The third mass 30 and the first detecting electrode 26 and the second detecting electrode 36 form a resonance type magnetometer. The structure shown in FIG. 1 can be referred to as an integrated multi-element sensing element. However, those skilled in the art know that an accelerometer and a resonance type magnetometer suitable for the sensor module of the present invention can be provided by using other configurations. For example, a separate accelerometer and a separate resonant magnetometer can also be combined into a sensor structure 100 and provide the detection functions required by the computing circuit 200.

The sensor structure 100 having the above configuration can be fabricated using any known technique. Suitable fabrication techniques include various MEMS fabrication techniques and MEMS fabrication techniques using CMOS processes. Among them, the micro-electromechanical fabrication technology using the CMOS process is suitable because the process can simultaneously form the sensor structure 100 and the calculation circuit 200 and be housed on a single substrate.

Each mass and displacement detecting electrode shall be provided with an electrical conductor for detecting the displacement and displacement direction of the mass. In a preferred embodiment of the invention, the mass and displacement detecting electrodes are fabricated using standard CMOS processes. In this example, each mass and displacement detecting electrode may include one or more metal layers, and a dielectric layer covering the metal layer or the two metal layers. In addition, the suspension structure of the mass and the fabrication of springs, electrodes, etc. can be fabricated using standard CMOS processes. Detailed techniques are not required to be repeated here.

In the embodiment of FIG. 1, the first mass 10 includes a body 11, a first mass segment 12 and a second mass segment 13. But this design is not a technical limitation. For example, the first mass 10 may include only one mass, or more than two mass segments. The design of the interdigitated protrusions of the mass and the detecting electrode is a well-known design in the industry, but it is not limited by any technical means. As long as the quality block and the detection electrode design that can achieve the correct detection result can be applied to the present invention.

Furthermore, in the embodiment of Figure 1, the resonant magnetometer uses two masses 20 and 30. But the design is not a technical limitation. The resonant magnetometer can use less than or more than two masses. Any mass that can be driven by current to oscillate can be applied to the present invention.

3 is a block diagram of a resonant type magnetometer circuit suitable for use in the integrated multi-sensor module of the present invention. As shown, the resonance type magnetometer of the present embodiment includes a detector structure 50, a capacitor voltage converter 51, an amplifier 52 and a vibration driver 53. The detector structure 50 can be a miniature magnetometer structure fabricated by any suitable process for providing a detection signal representative of the magnetic and magnetic directions of the structure. In this embodiment, the detector structure 50 is the structure shown in FIG. 1 , and particularly includes the second mass 20 , the third mass 30 , and the first detecting electrode 26 , A resonance type magnetometer formed by the detecting electrode 36.

Hereinafter, the resonance type magnetometer circuit will be described by taking a resonance type magnetometer of Fig. 1 as an example. The capacitor voltage converter 51 is connected to the first detecting electrode 26 and the second detecting electrode 36 of the detector structure 50 for detecting signals V of the first detecting electrode 26 and the second detecting electrode 36. - Converted to a voltage type with V+. The amplifier 52 amplifies the detection signal to become an output detection signal Vout. The vibration driver 53 is used to drive the mass vibration in the detector structure 50 and lock its vibration frequency at its resonance frequency. The capacitor voltage converter 51, the amplifier 52, and the vibration driver 53 constitute a vibration drive circuit of the resonance type magnetometer. After the output signal of the capacitor voltage converter 51 is amplified, the post-stage calculation circuit can be configured to calculate a magnetic field magnetic value or an acceleration value according to the displacement amount detected by the detecting electrodes 26 and 36. The principles on which it is based include the Lorentz force law. According to the Lorentz force principle, the output signal Vout is proportional to the magnetic force received by the second mass 20 and the third mass 30 in a direction perpendicular to the plane of the electrode, that is, in the Z direction in the drawing. Related computing circuits are well known in the art and need not be described here.

The vibration driver 53 supplies current to the second mass 20 and the third mass 30. In the present embodiment, the current supplied by the vibration driver 53 flows through the second mass 20 and the third mass 30 in a direction substantially orthogonal to the line connecting the first side and the second side. That is, the electrodes 23, 24 flow through the second mass 20, the first mass body 11 and the third mass 30, reaching the electrodes 33, 34. Or flowing through the second mass 20, the first mass body 11 and the third mass 30, reaching the electrode 34, or flowing through the second mass 20, the first mass body 11 and the third by the electrode 24. The mass 30 reaches the electrode 33.

In a preferred embodiment of the present invention, the vibration driver 53 includes a comparator circuit having an input of the output Vout of the converter 51 or the amplifier 52 and another input being a reference potential Vref for outputting the converter 51 or The result of comparing the output signal Vout of the amplifier 52 with the reference potential Vref is supplied to the second mass 20 and the third mass 30 via the electrodes 23, 24, 33, 34 as a resonant drive signal Vdrive in the form of a current Idrive. The output of the vibration driver 53 is coupled to the drive signal input Vdrive/Idrive on the detector structure 50 for driving the mass in the detector structure 50 to generate vibration. The frequency of the vibration is the resonant frequency of the mass. After a short period of time, the mass can be stably vibrated at its resonant frequency. In a preferred embodiment of the invention, the reference potential Vref can be a ground potential.

The amplifier 52 can include a filter 54 for filtering out the output signal of the capacitor voltage converter 51, representing the component of the displacement and displacement direction of the mass under the influence of the Lorentz force. In a preferred embodiment of the invention, the filter 54 can be a bandpass filter.

The resonance type magnetometer may further include a selection circuit (not shown) connected to the vibration drive circuit to selectively stop the vibration drive circuit from supplying the drive current to the mass. The resonance type magnetometer may further include a band pass filter coupled to the selection circuit for selecting a frequency band of the output signal. The selection circuit may select the resonance type magnetometer to provide a magnetic detection result, an acceleration detection result, or both a magnetic detection result and an acceleration detection result.

For a more detailed description of the resonance type magnetometer circuit, please refer to the description and drawing of "Resonance Magnetometer" No. 103132218 and "Double Resonance Magnetometer" in Japanese Patent Application No. 103132218.

The sensor structure 100 can further provide a surface pressure sensor not shown in the figure for providing a sensing plane and detecting the pressure value received at each point on the plane. The sensor structure 100 can also include other sensors, such as hygrometers, image sensors, etc., to provide a combination of more types of applications.

Although not shown in FIG. 3, each of the detecting electrodes of the detector structure 50, that is, the first detecting electrode 26, the second detecting electrode 36, the third detecting electrode 18, and the fourth detecting electrode 19 are Contacts are provided for the computing circuit 200 to connect and capture signals to perform the necessary operations. FIG. 4 shows a block diagram of the calculation circuit 200. As shown, the computing circuit 200 includes a frequency detecting module 61, a displacement detecting module 62, a magnetic detecting module 63, a resistance detecting module 64, a computing module 65, and a memory. Device 66. Additionally, the computing circuit 200 can include a communication module 67. The inputs of the frequency detecting module 61, the displacement detecting module 62, the magnetic detecting module 63, and the resistance detecting module 64 are respectively connected to the sensor structure 100, corresponding to the detecting electrodes. The mass vibration frequency, the displacement amount measured by each of the needle electrodes, or the resistance value sensed by the surface pressure sensor, and its change with time are calculated.

In the simplest design of the sensor module of the present invention, the first detecting electrode 26 and the second detecting electrode 36 can provide a displacement detecting function to generate the second mass 20 and the third mass 30. In one direction, for example, the amount of displacement in the direction in which the first side and the second side are wired. The third detecting electrode 18 and the fourth detecting electrode 19 are provided to represent the first mass block 12 and the second mass block 13 in a direction, for example, the third side and the fourth side connecting lines. The amount of displacement. In addition, if the first mass block 12 and the second mass block 13 or the second mass 20 and the third mass 30 form a multilayer structure, and a metal conductor is buried therein, and the third detecting electrode is 18 and the fourth detecting electrode 19, or the first detecting electrode 26 and the second detecting electrode 36, also form a multi-layer structure in which the metal conductor is buried, but the first mass block 12 and the second mass block 13 are Or a metal conductor in the second mass 20 and the third mass 30 is located at the third detecting electrode 18 and the fourth detecting electrode 19, or the first detecting electrode 26 and the second detecting electrode The third detecting electrode 18 and the fourth detecting electrode 19 are used between the two metal conductors in the 36, or the first detecting electrode 26 and the second detecting electrode 36 jointly provide a displacement measuring signal, which is representative The amount of displacement of the second mass 20 and the third mass 30, or the first mass 10 in a direction (Z direction) perpendicular to the plane of the substrate 40. A multi-layer structure capable of providing a measurement function of the Z-direction displacement amount, and a feasible design is disclosed in the "Three-Axis Accelerometer" of the Patent Application No. 103132221 of the Republic of China. The disclosure of the case can be used as a reference for this case. Other mass and detection electrode designs having similar structures or the same functions can also be applied to the present invention.

The input of the frequency detecting module 61 and the displacement detecting module 62 can be respectively connected to the first detecting electrode 26, the second detecting electrode 36, the third detecting electrode 18 and the fourth detecting electrode 19, that is, The displacement, the displacement amount and the variation of the mass of the sensor structure 100 in a specific direction are detected, and the vibration frequency of the mass is detected according to the displacement of the mass in a specific direction. Such a technique of calculating a displacement direction and a displacement amount by using a displacement of a mass relative to a detecting electrode, for example, a capacitance change, is a mature technique. The details are not to be repeated here.

The above design can provide a two-axis or three-axis displacement detector component. However, in another application of the present invention, the output signal of the resonant type magnetometer, that is, the output signal of the capacitor voltage converter 51 or the amplifier 52 (FIG. 3) is additionally provided to represent the first mass block 12 And a signal of the magnetic force received by the second mass block 13. In this application example, the input of the magnetic detecting module 63 can be connected to the output of the capacitor voltage converter 51 or the amplifier 52, and the magnetic force received by the mass in a specific direction is calculated according to the output signal. The calculation method of the magnetic detecting module 63 includes the above-mentioned Lorentz force law. Circuits or software for calculating magnetic fields based on the Lorentz force principle are known in the art. There should be no need to repeat them here. Accordingly, the detector module can provide multi-axis displacement detection and magnetic/magnetic field detection.

In addition, the input of the resistance detecting module 64 can also be connected to the output of a surface pressure detector (not shown) to detect the resistance change of the surface pressure detector due to the pressure received, thereby calculating The pressure value. The resistance detecting module 64 can be used to detect the pressure received by a plane, and can also be used to detect the pressure received by each of the multiple points, and to determine the pressure position.

The result of the detection by the detection module is representative of the material information detected by the sensor module, and is corresponding to the frequency detection module 61, the displacement detection module 62, and the magnetic detection module 63. The resistance detecting module 64 is sent to the computing module 65 to calculate the required detection result according to the corresponding calculation formula. For example, the detection result of the displacement detecting module 62, combined with the time parameter, can be used to represent the acceleration. In the resonance type magnetometer, the oscillation frequency of the mass is substantially stable. After being measured by the frequency detecting module 61, a frequency signal is obtained, which represents the oscillation frequency of the mass. The oscillating frequency parameter, together with the output signal of the accelerometer, can be used to calculate the angular velocity of the mass displacement. Furthermore, it is known from the prior art that the resonance frequency offset of the output signal of the resonance type magnetometer can be used to calculate the ambient temperature or a contact surface temperature. Furthermore, since the oscillation frequency of the object is related to the ambient air pressure, the output signal of the resonance type magnetometer can also take its Q value to calculate the ambient air pressure.

The above methods for calculating angular velocity, detecting temperature, magnetic field, air pressure, and acceleration are also within the scope of conventional techniques. Various computing circuits or software are also found in various commercially available products. The details are not to be described here. In short, the present invention only needs to provide an accelerometer and a resonance type magnetometer to provide various measurement effects other than acceleration and magnetic force (magnetic field). A single sensor module can provide multiple detection functions such as temperature detection, air pressure detection, magnetic field detection, gyroscope, gravity detection and so on. And in a preferred embodiment of the invention, the accelerometer and resonant magnetometer can be built into the same sensor structure 100.

To provide the functionality of the computing module 65, the computing module 65 can include a conventional microprocessor or microcontroller. The memory device 66 is provided with various calculation formulas, calculation data, and storage functions of calculation results. Microprocessors, microcontrollers, and memory devices that provide this capability are mature technologies. The corresponding circuit can be fabricated on the same substrate as the sensor structure 100, or can be carried on a separate substrate to form the necessary connection with the sensor structure 100. If formed on the same substrate, the computing circuit 200 and the sensor structure 100 can be completed simultaneously using a standard CMOS process.

In a preferred embodiment of the invention, the computing circuit 200 further includes a communication module 67. The communication module 67 can provide the detection result of each detection module, or the calculation result of the operation module 65, or a combination thereof, to an external circuit or device. The communication module 67 can also include a wireless communication chip to provide detection results of the sensor module through the wireless channel. The wireless communication chip can be provided to an external application module for further utilization by, for example, time division multiple access (TDMA) or frequency division multiplexing (FDMA).

As described above, the present invention provides an integrated multi-sensor module that can provide a plurality of sensing functions far more than the type and quantity of its sensors using only a limited variety of sensors. It is indeed an innovative invention.

10‧‧‧first mass
11‧‧‧Ontology
12‧‧‧First quality block
13‧‧‧Second mass block
16, 16 and 17, 17‧‧"
18‧‧‧ Third detection electrode
19‧‧‧ Fourth detection electrode
18A, 18A and 19A, 19A‧‧‧
20‧‧‧Second mass
21, 22, 31, 32‧ ‧ springs
23, 24, 33, 34‧‧‧ electrodes
25, 25 and 35, 35‧‧‧
26‧‧‧First detection electrode
27, 27 and 37, 37‧‧‧
30‧‧‧ third mass
36‧‧‧Second detection electrode
40‧‧‧Substrate
50‧‧‧Detector structure
51‧‧‧Capacitor voltage converter
52‧‧‧Amplifier
53‧‧‧Vibration drive
54‧‧‧ filter
61‧‧‧Frequency detection module
62‧‧‧Displacement Detection Module
63‧‧‧Magnetic detection module
64‧‧‧Resistance detection module
65‧‧‧ Computing Module
66‧‧‧ memory device
67‧‧‧Communication module
100‧‧‧sensor structure
200‧‧‧ Calculation Circuit

1 is a plan view showing an embodiment of a sensor structure of an integrated multi-sensor module of the present invention. Figure 2 is a side elevational view of the sensor structure of Figure 1. 3 is a block diagram of an embodiment of a resonant magnetometer circuit suitable for use in the integrated multi-sensor module of the present invention. 4 is a block diagram of an embodiment of an integrated multi-sensor element module of the present invention.

61‧‧‧Frequency detection module

62‧‧‧Displacement Detection Module

63‧‧‧Magnetic detection module

64‧‧‧Resistance detection module

65‧‧‧ Computing Module

66‧‧‧ memory device

67‧‧‧Communication module

100‧‧‧sensor structure

200‧‧‧ Calculation Circuit

Claims (12)

An integrated multi-sensor module includes an accelerometer and a resonance type magnetometer formed on a substrate, and a calculation circuit; wherein the accelerometer comprises a mass and two sets of detection electrodes, the resonance The magnetometer includes a mass, two sets of detecting electrodes, and a vibration driving circuit, and the mass of the accelerometer is integrated with the mass of the resonant magnetometer and suspended on the substrate; and the calculation The circuit connects the accelerometer and the output of the resonance type magnetometer for calculating a plurality of measurement results according to the resonance type magnetometer and the output value of the accelerometer. The sensor module of claim 1, wherein the mass of the accelerometer is suspended on the mass of the resonance type magnetometer, and the mass of the resonance type magnetometer is suspended on the substrate . The sensor module of claim 1, wherein the calculation circuit is formed on the substrate together with the accelerometer and the resonance type magnetometer. The sensor module of claim 1, 2 or 3, wherein the calculation circuit calculates an amount of magnetic force received by the mass in one direction from an output signal of the resonance type magnetometer, and the resonance The output signal of the magnetometer calculates the amount of displacement of the mass in the other direction. The sensor module of claim 1, 2 or 3, wherein the calculation circuit is configured by the output signal of the resonance type magnetometer and the output signal of the accelerometer, and the quality block is calculated in two or more directions. The amount of displacement. The sensor module of claim 1, 2 or 3, wherein the calculation circuit captures an oscillation frequency parameter from an output signal of the resonance type magnetometer, and calculates the mass block from an output signal of the accelerometer The angular velocity of the displacement. The sensor module of claim 1, 2 or 3, wherein the calculation circuit extracts a resonance frequency offset from an output signal of the resonance type magnetometer for calculating a temperature. The sensor module of claim 1, 2 or 3, wherein the calculation circuit extracts a Q value from an output signal of the resonance type magnetometer for calculating an ambient air pressure. The sensor module of claim 1, wherein the detector electrodes of the accelerometer are formed on the substrate and include a plurality of finger electrodes, and the mass of the accelerometer is on both sides. Forming a fork-like protrusion and staggering with the finger electrodes of the accelerometer; and each group of detecting electrodes of the resonance type magnetometer is formed on the substrate, and includes a plurality of finger electrodes, the quality of the resonance type magnetometer An interdigitated protrusion is formed on both sides of the block, and is staggered with the finger electrodes of the resonance type magnetometer. The sensor module of claim 9, wherein the finger electrodes of the accelerometer are located on opposite first and second sides of the mass, and the finger electrodes of the resonance type magnetometer are located in the mass Other opposite third and fourth sides. The sensor module of claim 1, 2 or 3, further comprising a surface pressure sensor for providing a sensing plane and detecting a pressure value at each point on the plane. The sensor module of claim 1, 2 or 3, wherein the calculation circuit calculates at least two of the following various detection values from an output signal of the resonance type magnetometer and an output signal of the accelerometer; : the displacement of the mass in two or more directions, the angular velocity of the mass displacement, an ambient temperature, a surface temperature, and an ambient air pressure.