TWI612309B - Integrated Multifunctional Detector - Google Patents

Abstract

An integrated multi-sensor element comprising an accelerometer and a resonance type magnetometer formed on a single substrate; wherein the accelerometer comprises a mass and two sets of detecting electrodes, the resonant magnetometer comprising a mass And two sets of detecting electrodes, and a vibration driving circuit, wherein the mass of the accelerometer is integrated with the mass of the resonant type magnetometer and suspended on the substrate. The output signal of the multi-sensor element may include: a displacement amount of the mass in a specific direction; a magnetic quantity received by the mass in a specific direction; a representative signal of a physical quantity such as a vibration frequency of the mass.

Description

Integrated multi-sensor element

This invention relates to an integrated multi-sensor element, and more particularly to a multi-element sensing element that provides a variety of sensing applications using a limited sensor element architecture.

In recent years, various detectors manufactured using MEMS (microelectromechanical system) technology have been widely used in industrial, commercial, and daily life applications to provide applications for performing monitoring and/or control functions. These detectors provide various electrical parameters such as voltage, current, frequency, etc. in wired or wireless manner, and input various measurement or application circuits to represent equivalent physical, chemical, biological and other measurement parameters. Measurement results or further applications. These detectors are small, consume less power, and often provide wireless communication capabilities. The combination of different detection parameters and provides complex monitoring and control functions.

However, although the existing detectors are reduced in size, most of them can only provide a small number of detection functions. If a particular monitoring or control function requires the use of multiple detection parameters, it is common practice to combine detectors with different sensing capabilities in one large circuit or on a single PCB. This results in an increased sensor volume, higher power consumption, and higher complexity. The result is increased design and manufacturing costs.

In order to further reduce the size of the detection device and improve the manufacturing efficiency, the operator attempts to combine different types of detectors that measure different parameters on a single substrate, for example, a multi-detection element of a single wafer.

EP 2 759 802 A2 discloses an integrated multi-axis MEMS inertial sensing device in a single chip package. The MEMS device includes a three-axis accelerometer and a plurality of gyroscopes that are stacked on a substrate. The sensing device can be used to provide a variety of sensing functions. However, this patent does not describe the circuit configuration that achieves these measurement functions.

US Patent No. 20140300490 A1 discloses a wearable electronic device having a memory attached processor coupled to a body area network (BAN) and connectable to a wide area network. The device has a firmware that can be connected to a wide area network to download applications and settings, as well as upload data to the server.

WO 2014143812 A2 discloses a multimodal fluid condition detector platform and system for simultaneously measuring various parameters in a liquid circulation system in a plurality of modalities. Suitable circulation systems include automotive reciprocating engines and vehicle transmissions. The following various measurement modes are disclosed in the embodiments: temperature differential comparison; magnetic differential comparison; pole differential comparison; resistance differential comparison and absorption differential comparison.

US2014264657 provides a design for accumulating multiple detectors on a single semiconductor substrate. The invention discloses a single crystal integrated composite detector. In the embodiment of the patent, a plurality of detectors can be formed on a single substrate, and include, for example, a magnetometer, an infrared detector, an accelerometer, a hygrometer, and the like.

The Republic of China Patent Application No. 103132220 discloses a dual-purpose resonance type magnetometer which can be used to measure the magnetic field applied to its mass in a resonant mode, and can be used to measure in a non-resonant mode. The amount of movement of the mass or the acceleration of the movement. In the description of the invention, the embodiment discloses that a filter can be used to simultaneously measure magnetic force and acceleration in a resonant mode.

As can be seen from the discussion of the prior art above, there is a strong demand in the industry for technologies that simultaneously provide various parameter measurement functions on a single substrate, particularly a semiconductor substrate. However, prior art multi-element sensing elements typically employ multiple sensing elements on a single substrate. A few use the combination of sensing parameters to obtain components with more sensing functions than the number of sensors, but only provide limited sensing or detection functions.

It is an object of the present invention to provide a novel architecture of an integrated multi-element sensing element for providing a variety of sensing functions.

It is an object of the present invention to provide an integrated multi-element sensing element that can utilize a limited variety of sensor element architectures to achieve a variety of sensing functions.

It is also an object of the present invention to provide an integrated multi-sensor element that achieves a variety of sensing functions with a minimum variety of sensor element architectures.

The present invention provides an integrated multi-sensor element comprising an accelerometer and a resonance type magnetometer formed on a single substrate. The accelerometer includes a mass and two sets of detecting electrodes, the resonant magnetometer includes a mass, two sets of detecting electrodes, and a vibration driving circuit, and the mass of the accelerometer and the resonant magnetic force The mass is integrated and suspended from the substrate. In a preferred embodiment of the invention, the mass of the accelerometer is suspended from the mass of the resonance type magnetometer, and the mass of the resonance type magnetometer is suspended from the substrate. Each group of detecting electrodes of the accelerometer is formed on the substrate and includes a plurality of finger electrodes. The accumulators are formed with interdigitated protrusions on both sides of the mass and are staggered with the finger electrodes of the accelerometer. Each group of detecting electrodes of the resonance type magnetometer is formed on the substrate, and includes a plurality of finger electrodes, and the mass of the resonance type magnetometer forms a fork-like protrusion on both sides, and is a finger of the resonance type magnetometer The electrodes are staggered. In a preferred embodiment of the present invention, the finger electrodes of the accelerometer are located on opposite first and second sides of the mass, and the finger electrodes of the resonance type magnetometer are located in the other third relative of the mass The fourth side.

The mass is suspended from the substrate to form an electrode plate, and the electrode plate is connected to the vibration driving circuit for the current of the vibration driving circuit to flow through the mass. The vibration driving circuit includes a converter circuit connected to the finger electrodes of the resonance type magnetometer for converting the detection result output by the finger electrodes into a voltage signal. The converter circuit can include an amplifier for amplifying the voltage signal output by the capacitor voltage converter and outputting the amplified detection signal. The output signal of the converter circuit can provide a calculation circuit of the magnetic field to calculate a magnetic field value or an acceleration value according to the displacement detected by the displacement detecting electrode. The vibration drive circuit is coupled to the output of the converter circuit, and the output is supplied to the mass in a current mode for driving the mass to generate vibration. The current supplied by the vibration drive circuit flows through the mass in a direction substantially orthogonal to the line connecting the first side and the second side.

The vibration driving circuit may include a comparator circuit having an input of an output of the converter circuit and a reference potential for outputting a comparison result of the converter circuit output signal and the reference potential as a vibration driving of the mass signal. The vibration frequency of the mass is the resonant frequency of the mass. The amplitude of the mass increases with time and is stabilized after a short period of time. In a preferred embodiment of the invention, the reference potential is a ground potential.

The sensing component can further include a selection circuit coupled to the vibration drive circuit to selectively stop the vibration drive circuit from supplying the drive current to the mass. The resonance type magnetometer may further include a band pass filter coupled to the selection circuit for selecting a frequency band of the output signal. The selection circuit may select the resonance type magnetometer to provide a magnetic detection result, an acceleration detection result, or both a magnetic detection result and an acceleration detection result.

The resonance type magnetometer and the output signal of the accelerometer at least include: a displacement amount of the mass in a specific direction, a displacement direction and a variation thereof, the direction being up to a three-axis direction; a magnetic quantity of the mass received in a specific direction A representative signal of a physical quantity such as a vibration frequency of the mass. Provided to a calculation circuit for calculating various physical quantities, chemical quantities, and biomass according to the resonance type magnetometer and the output of the accelerometer. The integrated multi-sensor element of the present invention may further include a surface pressure sensor for providing a sensing plane and detecting a pressure value received at each point on the plane. The integrated multi-sensor element can also include other sensors, such as hygrometers, image sensors, etc., to provide a combination of more types of applications.

The above and other objects and advantages of the present invention will become more apparent from the description and appended claims.

The invention discloses an integrated multi-dimensional sensing element, which comprises an accelerometer and a resonance type magnetometer formed on a single substrate. Fig. 1 is a plan view showing an embodiment of the integrated multi-sensor element of the present invention, and Fig. 2 is a side view thereof. In the illustrated embodiment, the integrated multi-element sensing element includes a first mass 10 that includes a body 11 and mass segments 12 and 13 disposed on opposite sides of the body 11. The mass 10 is suspended by the springs 14, 15 on the second mass 20 and the third mass 30. The outer sides (the first side and the second side) of the first and second mass segments 12, 13 each form the interdigitated projections 16, 16 and 17, 17.

The second mass 20 and the third mass 30 are respectively located on both sides (the third side and the fourth side) of the first mass 10 where the interdigitated protrusions 16, 16 and 17, 17 are not formed, and are spring 21 , 22, 31, 32 are suspended on the substrate 40. Electrodes 23, 24, 33, 34 are formed at the junction of the springs 21, 22, 31, 32 and the substrate 40, respectively. The second mass 20 and the third mass 30 respectively form the interdigitated protrusions 25, 25 and 35, 35 on their outer sides (the third side and the fourth side).

The first detecting electrode 26 and the second detecting electrode 36 are formed on the substrate 40 opposite to the second mass 20 and the third mass 30. The first detecting electrode 26 and the second detecting electrode 36 also form the interdigitated protrusions 27, 27 and 37, 37 on the side facing the second mass 20 and the third mass 30, and are respectively opposite to the first The interdigitated protrusions 25, 25 and 35, 35 of the second mass 20 and the third mass 30 are arranged in a staggered arrangement.

The third detecting electrode 18 and the fourth detecting electrode 19 are formed on the substrate 40 at a position relative to the first mass block 12 and the second mass block 13. The third detecting electrode 18 and the fourth detecting electrode 19 also form the interdigitated protrusions 18A, 18A and 19A, 19A on the sides facing the first mass sub-block 12 and the second mass sub-block 13, respectively The first mass sub-blocks 12 and the interdigitated protrusions 16, 16 and 17, 17 of the second mass sub-block 13 are arranged in a staggered arrangement.

In this embodiment, the first mass 10 and the third detecting electrode 18 and the fourth detecting electrode 19 form a detector body of the accelerometer, and the second mass 20 and the third mass 30 The detector body of the accelerometer is also formed with the first detecting electrode 26 and the second detecting electrode 36, respectively. In addition, the second mass 20 is selectively powered by the electrodes 23, 24, 33, 34 to oscillate the second mass 20 and the third mass 30, and after reaching the resonant frequency of the mass, the second mass 20 The third mass 30 and the first detecting electrode 26 and the second detecting electrode 36 form a resonance type magnetometer. The structure shown in FIG. 1 can be referred to as an integrated multi-element sensing element.

The integrated multi-element sensing element having the above configuration can be fabricated by any known technique. Suitable fabrication techniques include various MEMS fabrication techniques and MEMS fabrication techniques using CMOS processes. Among them, the MEMS manufacturing MEMS manufacturing technology is suitable because the process can simultaneously form the sensor component and related circuits and be housed on a single substrate.

Each mass and displacement detecting electrode shall be provided with an electrical conductor for detecting the displacement and displacement direction of the mass. In a preferred embodiment of the invention, the mass and displacement detecting electrodes are fabricated using standard CMOS processes. In this example, each mass and displacement detecting electrode may include one or more metal layers, and a dielectric layer covering the metal layer or the two metal layers. In addition, the suspension structure of the mass and the fabrication of springs, electrodes, etc. can be fabricated using standard CMOS processes. Detailed techniques are not required to be repeated here.

In the embodiment of FIG. 1, the first mass 10 includes a body 11, a first mass segment 12 and a second mass segment 13. But this design is not a technical limitation. For example, the first mass 10 may include only one mass, or more than two mass segments. The design of the interdigitated protrusions of the mass and the detecting electrode is a well-known design in the industry, but it is not limited by any technical means. As long as the quality block and the detection electrode design that can achieve the correct detection result can be applied to the present invention.

Furthermore, in the embodiment of Figure 1, the resonant magnetometer uses two masses 20 and 30. However, this design is not a technical limitation. The resonant magnetometer can use less than or more than two masses. Any mass that can be driven by current to oscillate can be applied to the present invention.

3 is a block diagram of a resonant type magnetometer circuit of an embodiment of the integrated multi-sensor element of the present invention. As shown, the resonance type magnetometer of the present embodiment includes a detector structure 50, a capacitor voltage converter 51, an amplifier 52 and a vibration driver 53. The detector structure 50 can be a miniature magnetometer structure fabricated by any suitable process for providing a detection signal representative of the magnetic and magnetic directions of the structure. In this embodiment, the detector structure 50 is the structure shown in FIG. 1 , and particularly includes the second mass 20 , the third mass 30 , and the first detecting electrode 26 , A resonance type magnetometer formed by the detecting electrode 36.

The capacitor voltage converter 51 is connected to the first detecting electrode 26 and the second detecting electrode 36 of the detector structure 50 for detecting signals V of the first detecting electrode 26 and the second detecting electrode 36. - Converted to a voltage type with V+. The amplifier 52 amplifies the detection signal to become an output detection signal Vout. The vibration driver 53 is used to drive the mass vibration in the detector structure 50 and lock its vibration frequency at its resonance frequency. The capacitor voltage converter 51, the amplifier 52, and the vibration driver 53 constitute a vibration drive circuit of the resonance type magnetometer. After the output signal of the capacitor voltage converter 51 is amplified, the post-stage calculation circuit can be configured to calculate a magnetic field magnetic value or an acceleration value according to the displacement amount detected by the detecting electrodes 26 and 36. The principles on which it is based include the Lorentz force law. According to the Lorentz force principle, the output signal Vout is proportional to the magnetic force received by the second mass 20 and the third mass 30 in a direction perpendicular to the plane of the electrode, that is, in the Z direction in the drawing. Related computing circuits are well known in the art and need not be described here.

The vibration driver 53 supplies current to the second mass 20 and the third mass 30. In the present embodiment, the current supplied by the vibration driver 53 flows through the second mass 20 and the third mass 30 in a direction substantially orthogonal to the line connecting the first side and the second side. That is, the electrodes 23, 24 flow through the second mass 20, the first mass body 11 and the third mass 30, reaching the electrodes 33, 34. Or flowing through the second mass 20, the first mass body 11 and the third mass 30, reaching the electrode 34, or flowing through the second mass 20, the first mass body 11 and the third by the electrode 24. The mass 30 reaches the electrode 33.

In a preferred embodiment of the present invention, the vibration driver 53 includes a comparator circuit having an input of the output Vout of the converter 51 or the amplifier 52 and another input being a reference potential Vref for outputting the converter 51 or The result of comparing the output signal Vout of the amplifier 52 with the reference potential Vref is supplied to the second mass 20 and the third mass 30 via the electrodes 23, 24, 33, 34 as a resonant drive signal Vdrive in the form of a current Idrive. The output of the vibration driver 53 is coupled to the drive signal input Vdrive/Idrive on the detector structure 50 for driving the mass in the detector structure 50 to generate vibration. The frequency of the vibration is the resonant frequency of the mass. After a short period of time, the mass can be stably vibrated at its resonant frequency. In a preferred embodiment of the invention, the reference potential Vref can be a ground potential.

The amplifier 52 can include a filter 54 for filtering out the output signal of the capacitor voltage converter 51, representing the component of the displacement and displacement direction of the mass under the influence of the Lorentz force. In a preferred embodiment of the invention, the filter 54 can be a bandpass filter.

The resonance type magnetometer may further include a selection circuit (not shown) connected to the vibration drive circuit to selectively stop the vibration drive circuit from supplying the drive current to the mass. The resonance type magnetometer may further include a band pass filter coupled to the selection circuit for selecting a frequency band of the output signal. The selection circuit may select the resonance type magnetometer to provide a magnetic detection result, an acceleration detection result, or both a magnetic detection result and an acceleration detection result.

For a more detailed description of the resonance type magnetometer circuit, please refer to the description and drawing of "Resonance Magnetometer" No. 103132218 and "Double Resonance Magnetometer" in Japanese Patent Application No. 103132218.

Although not shown in FIG. 3, each of the detecting electrodes of the detector structure 50, that is, the first detecting electrode 26, the second detecting electrode 36, the third detecting electrode 18, and the fourth detecting electrode 19 are Provide contacts for external computing circuit connections. In the simplest design, the first detecting electrode 26 and the second detecting electrode 36 can provide a displacement detecting function to generate the second mass 20 and the third mass 30 in one direction. For example, the amount of displacement in the direction in which the first side and the second side are connected. The third detecting electrode 18 and the fourth detecting electrode 19 are provided to represent the first mass block 12 and the second mass block 13 in a direction, for example, the third side and the fourth side connecting lines. The amount of displacement. In addition, if the first mass block 12 and the second mass block 13 or the second mass 20 and the third mass 30 form a multilayer structure, and a metal conductor is buried therein, and the third detecting electrode is 18 and the fourth detecting electrode 19, or the first detecting electrode 26 and the second detecting electrode 36, also form a multi-layer structure in which the metal conductor is buried, but the first mass block 12 and the second mass block 13 are Or a metal conductor in the second mass 20 and the third mass 30 is located at the third detecting electrode 18 and the fourth detecting electrode 19, or the first detecting electrode 26 and the second detecting electrode The third detecting electrode 18 and the fourth detecting electrode 19 are used between the two metal conductors in the 36, or the first detecting electrode 26 and the second detecting electrode 36 jointly provide a displacement measuring signal, which is representative The amount of displacement of the second mass 20 and the third mass 30, or the first mass 10 in a direction (Z direction) perpendicular to the plane of the substrate 40. A multi-layer structure capable of providing a measurement function of the Z-direction displacement amount, and a feasible design is disclosed in the "Three-Axis Accelerometer" of the Patent Application No. 103132221 of the Republic of China. The disclosure of the case can be used as a reference for this case. Other mass and detection electrode designs having similar structures or the same functions can also be applied to the present invention.

The above design can provide a two-axis or three-axis displacement detector component. However, in another application of the present invention, the output signal of the resonant type magnetometer, that is, the output signal of the capacitor voltage converter 51 or the amplifier 52 (FIG. 3) is additionally provided to represent the first mass block 12 And a signal of the magnetic force received by the second mass block 13. Therefore, the detector component can provide multi-axis displacement detection and magnetic/magnetic field detection.

In one example of the present invention, the calculation circuit calculates the amount of magnetic force that the mass is subjected to in one direction from the output signal of the resonance type magnetometer. In another example of the present invention, the calculation circuit calculates an amount of displacement, displacement direction, and/or displacement acceleration of the mass in one direction from an output signal of the resonance type magnetometer. In another example of the present invention, the calculation circuit calculates the displacement of the mass in one direction, the direction of displacement, and/or the acceleration of the displacement from the output signal of the accelerometer. In another example of the present invention, the calculation circuit calculates an amount of displacement, a displacement direction, and/or a displacement acceleration of the mass in two or more directions by an output signal of the resonance type magnetometer and an output signal of the accelerometer. .

Not only that, the detection result of the displacement detector, combined with the time parameter, can be used to represent the acceleration. In the resonance type magnetometer, the oscillation frequency of the mass is substantially stable. After measuring with a conventional frequency detector, a frequency signal is obtained, representing the oscillation frequency of the mass. The oscillating frequency parameter, together with the output signal of the accelerometer, can be used to calculate the angular velocity of the mass displacement. Furthermore, it is known from the prior art that the resonance frequency offset of the output signal of the resonance type magnetometer can be used to calculate the ambient temperature or a contact surface temperature. Furthermore, since the oscillation frequency of the object is related to the ambient air pressure, the output signal of the resonance type magnetometer can also take its Q value to calculate the ambient air pressure.

The sensor components described above have only a relatively simple architecture, but can provide multi-axis displacement detection, multi-axis acceleration detection, magnetic field/magnetic detection, angular velocity detection, temperature detection, and air pressure detection. Multiple detection functions. It is indeed a novel integrated multi-sensor element.

<TABLE border="1" borderColor="#000000" width="85%"><TBODY><tr><td> 10 </td><td> first quality block</td></tr>< Tr><td> 11 </td><td> ontology</td></tr><tr><td> 12 </td><td> first quality partition</td></tr>< Tr><td> 13 </td><td> second mass segment</td></tr><tr><td> 14,15 </td><td> spring</td></tr ><tr><td> 16,16 and 17,17 </td><td> Finger-shaped protrusions</td></tr><tr><td> 18 </td><td> Measuring electrode</td></tr><tr><td> 19 </td><td> fourth detecting electrode</td></tr><tr><td> 18A, 18A and 19A, 19A </td><td> fork-shaped protrusion</td></tr><tr><td> 20 </td><td> second mass </td></tr><tr><td > 21,22,31,32 </td><td> spring</td></tr><tr><td> 23, 24, 33, 34 </td><td> electrode </td>< /tr><tr><td> 25, 25 and 35, 35 </td><td> Finger-shaped protrusions</td></tr><tr><td> 26 </td><td> A detection electrode </td></tr><tr><td> 27, 27 and 37, 37 </td><td> a forked protrusion</td></tr><tr><td> 30 </td><td> third mass </td></tr><tr><td> 36 </td><td> second detecting electrode </td></tr><tr> <td> 40 </td><td> Substrate</td></tr><tr>< Td> 50 </td><td> Detector Structure </td></tr><tr><td> 51 </td><td> Capacitor Voltage Converter</td></tr>< Tr><td> 52 </td><td> Amplifier</td></tr><tr><td> 53 </td><td> Vibration Driver </td></tr><tr>< Td> 54 </td><td> Filter</td></tr></TBODY></TABLE>

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a plan view showing an embodiment of an integrated multi-sensor element of the present invention. Figure 2 is a side elevational view of the integrated multi-sensor element of Figure 1 of the present invention. 3 is a block diagram of a resonant type magnetometer circuit of an embodiment of the integrated multi-sensor element of the present invention.

<TABLE border="1" borderColor="#000000" width="85%"><TBODY><tr><td> 10 </td><td> first quality block</td></tr>< Tr><td> 11 </td><td> ontology</td></tr><tr><td> 12 </td><td> first quality partition</td></tr>< Tr><td> 13 </td><td> second mass segment</td></tr><tr><td> 14,15 </td><td> spring</td></tr ><tr><td> 16,16 and 17,17 </td><td> Finger-shaped protrusions</td></tr><tr><td> 18 </td><td> Measuring electrode</td></tr><tr><td> 19 </td><td> fourth detecting electrode</td></tr><tr><td> 18A, 18A and 19A, 19A </td><td> fork-shaped protrusion</td></tr><tr><td> 20 </td><td> second mass </td></tr><tr><td > 21,22,31,32 </td><td> spring</td></tr><tr><td> 23, 24, 33, 34 </td><td> electrode </td>< /tr><tr><td> 25, 25 and 35, 35 </td><td> Finger-shaped protrusions</td></tr><tr><td> 26 </td><td> A detection electrode </td></tr><tr><td> 27, 27 and 37, 37 </td><td> a forked protrusion</td></tr><tr><td> 30 </td><td> third mass </td></tr><tr><td> 36 </td><td> second detecting electrode </td></tr><tr> <td> 40 </td><td> Substrate</td></tr></TBO DY></TABLE>

Claims (2)

An accumulative multi-element sensing element formed on a single substrate, comprising an accelerometer on a single substrate, comprising: one mass of the accelerometer; and two sets of detecting electrodes, wherein the two sets of detectors of the accelerometer The measuring electrodes are formed on the single substrate, and the two sets of detecting electrodes of the accelerometer comprise a plurality of finger electrodes, and the two sides of the mass of the accelerometer form an interdigitated protrusion, and the plurality of fingers of the accelerometer The electrodes are staggered, the plurality of finger electrodes of the accelerometer are located on opposite first and second sides of the mass of the accelerometer; and a resonance type magnetometer comprises: one mass of the resonance type magnetometer; a detecting circuit; a vibration driving circuit comprising: a comparator circuit, one of the comparator circuits is an output of the converter circuit; and a reference potential for outputting an output signal of the converter circuit, Comparing the output signal with one of the reference potentials as a vibration drive signal of the mass of the resonance type magnetometer, the reference potential being a ground potential; a converter circuit connected to the plurality of finger electrodes of the resonance type magnetometer for converting a detection result of the output of the plurality of finger electrodes into a voltage signal as one of the resonance type magnetometers Outputting, the converter circuit outputs a current supplied to the mass of the resonance type magnetometer for driving the mass of the resonance type magnetometer to generate a vibration, wherein the two types of detection of the resonance type magnetometer The measuring electrode is formed on the single substrate, and the two sets of detecting electrodes of the resonance type magnetometer comprise a plurality of finger electrodes, and the two sides of the mass of the resonance type magnetometer form a fork-like protrusion, and the resonance type magnetic force The plurality of finger electrodes are staggered, and the resonance type magnetometer a plurality of finger electrodes are located on the other opposite third and fourth sides of the mass of the resonance type magnetometer, and the mass of the accelerometer is integrated with the mass of the resonance type magnetometer and suspended on the substrate The mass of the accelerometer is suspended on the mass of the resonance type magnetometer, wherein the mass of the resonance type magnetometer is suspended from the single substrate to form an electrode plate. Connecting a vibration driving circuit for a current of the vibration driving circuit to flow through the mass of the resonance type magnetometer, the vibration driving circuit providing a current to be substantially positively connected with one of the first side and the second side a quality direction of the resonance type magnetometer; a selection circuit, the selection circuit is coupled to the vibration drive circuit, selectively stopping the vibration drive circuit to supply the vibration drive circuit to the mass of the resonance type magnetometer a band pass filter connected to the selection circuit for selecting a frequency band of the output signal; a calculation circuit, the calculation circuit is outputted by one of the resonance type magnetometers And the output signal of one of the accelerometers, calculating at least two kinds of detection values of the following, including: a displacement amount of the mass in two or more directions; an angular connection of the mass displacement; an ambient temperature; a surface temperature; and an ambient pressure; and a surface pressure sensor for providing a sensing plane and detecting a pressure value at each point on the sensing plane. The multi-sensor element of claim 1, wherein the output signal of the multi-sensor element comprises: displacement information of the mass in a specific direction, including a vibration frequency of the mass in the specific direction. And an amplitude information; The magnetic quantity that the mass is subjected to in a particular direction; and one of the physical quantities such as the vibration frequency of the mass represents a signal.