TW201738097A - Imprinting apparatus and imprinting method - Google Patents
Imprinting apparatus and imprinting method Download PDFInfo
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- TW201738097A TW201738097A TW105124686A TW105124686A TW201738097A TW 201738097 A TW201738097 A TW 201738097A TW 105124686 A TW105124686 A TW 105124686A TW 105124686 A TW105124686 A TW 105124686A TW 201738097 A TW201738097 A TW 201738097A
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本發明是有關於一種壓印設備及壓印方法,且特別是有關於一種利用可撓性壓印模型膜進行壓印的壓印設備及壓印方法。The present invention relates to an imprint apparatus and an imprint method, and more particularly to an imprint apparatus and an imprint method for imprinting using a flexible imprint model film.
一種常見之壓印技術係先將壓印材料均勻地塗佈於基板,再將壓印模具下壓於基板上的壓印材料層,以將壓印模具表面之壓印圖案轉移到壓印材料層上。舉例來說,壓印技術可用於製作具有光柵的光學元件,其利用壓印模具上的壓印微結構對透光基板上的光學層進行壓印,並接著固化壓印後的光學層,以在透光基板上形成光柵。A common imprinting technique is to uniformly apply an imprinting material to a substrate, and then press the imprinting mold onto the imprinting material layer on the substrate to transfer the imprinting pattern on the surface of the imprinting mold to the imprinting material. On the floor. For example, imprint techniques can be used to fabricate an optical component having a grating that embosses an optical layer on a light transmissive substrate using an imprinted microstructure on an imprinting mold, and then cures the embossed optical layer to A grating is formed on the light transmissive substrate.
一般來說,所述壓印模具的壓印微結構進行多次壓印後會逐漸損耗而需進行替換,此時使用者必須從壓印設備移除原壓印模具,並安裝新的壓印模具至壓印設備,然此替換過程較為費工費時而使壓印設備在使用上較為不便且產率較低。Generally, the imprinting microstructure of the imprinting mold is gradually lost after multiple imprinting and needs to be replaced. At this time, the user must remove the original imprinting mold from the imprinting apparatus and install a new imprinting. From the mold to the imprinting equipment, the replacement process is labor-intensive and time-consuming, making the imprinting apparatus inconvenient to use and having a low yield.
本發明提供一種壓印設備及壓印方法,可增加壓印設備使用上的便利性。The invention provides an imprinting device and an imprinting method, which can increase the convenience in use of the imprinting device.
本發明的壓印設備包括一第一輸送單元、一可撓性壓印模型膜及一驅動滾輪組。第一輸送單元適於輸送至少一工件至壓印設備的一工作區域。可撓性壓印模型膜具有多個壓印區段,其中至少一壓印區段位於工作區域,工件適於在工作區域藉由對應的壓印區段而進行壓印。可撓性壓印模型膜部分地捲收於驅動滾輪組,位於工作區域的壓印區段展開於驅動滾輪組,驅動滾輪組適於驅動可撓性壓印模型膜,以使捲收於驅動滾輪組的至少另一壓印區段展開於驅動滾輪組並移至工作區域。The imprint apparatus of the present invention includes a first transport unit, a flexible imprinted model film, and a drive roller set. The first transport unit is adapted to transport at least one workpiece to a working area of the imprint apparatus. The flexible embossed model film has a plurality of embossed sections, wherein at least one embossed section is located in the work area, and the workpiece is adapted to be embossed in the work area by a corresponding embossed section. The flexible embossed model film is partially retracted in the driving roller set, the embossing section located in the working area is unfolded in the driving roller set, and the driving roller set is adapted to drive the flexible embossing model film to be retracted by the driving At least another embossed section of the roller set is deployed to drive the roller set and moved to the work area.
在本發明的一實施例中,上述的壓印設備,更包括一塗佈單元,其中塗佈單元適於在工件到達工作區域之前塗佈一光學層至工件上,位於工作區域的可撓性壓印模型膜的一壓印微結構適於壓印光學層以在工件上形成一光學微結構。In an embodiment of the invention, the imprint apparatus further includes a coating unit, wherein the coating unit is adapted to apply an optical layer to the workpiece before the workpiece reaches the working area, and the flexibility in the working area An embossed microstructure of the embossed model film is adapted to emboss the optical layer to form an optical microstructure on the workpiece.
在本發明的一實施例中,上述的壓印設備更包括一第一檢測單元,其中塗佈單元配置於第一檢測單元及工作區域之間,第一檢測單元適於檢測尚未塗佈光學層的工件的表面狀態。In an embodiment of the invention, the embossing apparatus further includes a first detecting unit, wherein the coating unit is disposed between the first detecting unit and the working area, and the first detecting unit is adapted to detect the uncoated optical layer The surface state of the workpiece.
在本發明的一實施例中,上述的壓印設備更包括一能量源,其中能量源配置於工作區域,壓印後的光學層適於藉由能量源提供的能量而固化。In an embodiment of the invention, the imprint apparatus further includes an energy source, wherein the energy source is disposed in the working area, and the embossed optical layer is adapted to be solidified by the energy provided by the energy source.
在本發明的一實施例中,上述的壓印設備更包括一第一能量源及一第二能量源,其中第一能量源配置於塗佈單元與工作區域之間,第二能量源配置於工作區域,壓印前的光學層適於藉由第一能量源提供的能量而半固化,壓印後的光學層適於藉由第二能量源提供的能量而完全固化。In an embodiment of the invention, the embossing device further includes a first energy source and a second energy source, wherein the first energy source is disposed between the coating unit and the working area, and the second energy source is disposed at The working area, the optical layer before imprinting is adapted to be semi-cured by the energy provided by the first energy source, and the embossed optical layer is adapted to be fully cured by the energy provided by the second energy source.
在本發明的一實施例中,上述的壓印設備更包括一壓印模型滾輪,其中壓印模型滾輪配置於工作區域,且適於將對應的壓印區段往工件壓合。In an embodiment of the invention, the embossing apparatus further includes an embossing model roller, wherein the embossing model roller is disposed in the working area and is adapted to press the corresponding embossing section toward the workpiece.
在本發明的一實施例中,上述的壓印設備更包括一升降單元,其中升降單元配置於工作區域,且適於帶動工件相對於可撓性壓印模型膜升降。In an embodiment of the invention, the embossing apparatus further includes a lifting unit, wherein the lifting unit is disposed in the working area and is adapted to drive the workpiece up and down relative to the flexible embossing model film.
在本發明的一實施例中,上述的驅動滾輪組包括兩驅動滾輪,工作區域位於兩驅動滾輪之間,可撓性壓印模型膜部分地捲收於一驅動滾輪且部分地捲收於另一驅動滾輪。In an embodiment of the invention, the driving roller set comprises two driving rollers, the working area is located between the two driving rollers, and the flexible embossing model film is partially wound around a driving roller and partially retracted in another A drive roller.
在本發明的一實施例中,上述的工作區域包括一壓印位置及至少一離模位置,至少兩壓印區段分別位於壓印位置及離模位置,工件適於在壓印位置進行壓印,壓印後的工件適於附著於對應的壓印區段並被驅動滾輪組驅動至離模位置,工件適於在離模位置進行離模。In an embodiment of the invention, the working area includes an embossing position and at least one detaching position, at least two embossing sections are respectively located at the embossing position and the detaching position, and the workpiece is adapted to be pressed at the embossing position. The embossed workpiece is adapted to be attached to a corresponding embossed section and driven by the drive roller set to a release position, the workpiece being adapted to be released from the die position.
在本發明的一實施例中,上述的壓印設備更包括至少一夾持件,其中夾持件配置於工作區域,夾持件適於夾持可撓性壓印模型膜並將位於離模位置的可撓性壓印模型膜掀離於工件。In an embodiment of the invention, the embossing apparatus further includes at least one clamping member, wherein the clamping member is disposed in the working area, and the clamping member is adapted to clamp the flexible embossed model film and is located in the die-off The position of the flexible embossed model film is separated from the workpiece.
在本發明的一實施例中,上述的壓印設備更包括至少一緩衝件,其中緩衝件配置於壓印位置與離模位置之間,可撓性壓印模型膜適於被緩衝件抵壓而撓曲,以在位於離模位置的壓印區段的邊界形成至少一緩衝區段。In an embodiment of the invention, the imprint apparatus further includes at least one buffer member, wherein the buffer member is disposed between the imprinting position and the off-die position, and the flexible imprinting model film is adapted to be pressed by the buffer member. And deflecting to form at least one buffer segment at the boundary of the embossed segment at the off-die position.
在本發明的一實施例中,當壓印後的工件被驅動滾輪組驅動至離模位置時,第一輸送單元適於輸送另一工件至壓印位置,且在工件於離模位置進行離模的同時,另一工件在壓印位置進行壓印。In an embodiment of the invention, when the embossed workpiece is driven to the off-mold position by the driving roller set, the first conveying unit is adapted to convey the other workpiece to the embossing position, and is separated from the workpiece at the detachment position. At the same time as the mold, another workpiece is embossed at the imprinting position.
在本發明的一實施例中,上述的至少一離模位置的數量為兩個,壓印位置位於兩離模位置之間。In an embodiment of the invention, the number of the at least one off-die position is two, and the imprint position is between the two off-die positions.
在本發明的一實施例中,上述的這些壓印區段包括相鄰的一第一壓印區段及一第二壓印區段,兩離模位置包括一第一離模位置及一第二離模位置,當第一壓印區段及第二壓印區段位於工作區域內時,驅動滾輪組適於驅動可撓性壓印模型膜進行一往復移動而移動於一第一狀態與一第二狀態之間,當可撓性壓印模型膜處於第一狀態時,第一壓印區段位於第一離模位置且第二壓印區段位於壓印位置,當可撓性壓印模型膜處於第二狀態時,第一壓印區段位於壓印位置且第二壓印區段位於第二離模位置。In an embodiment of the invention, the embossed segments include a first embossed segment and a second embossed segment, and the two die positions include a first die position and a first a two-mold position, when the first embossed section and the second embossed section are located in the working area, the driving roller set is adapted to drive the flexible embossed model film to perform a reciprocating movement and move in a first state Between a second state, when the flexible embossed model film is in the first state, the first embossed section is at the first detachment position and the second embossed section is at the embossing position, when the flexible pressure is When the printing mold film is in the second state, the first embossing section is at the embossing position and the second embossing section is at the second staking position.
在本發明的一實施例中,上述的這些壓印區段更包括相鄰的一第三壓印區段及一第四壓印區段,驅動滾輪組適於驅動可撓性壓印模型膜而使第三壓印區段及第四壓印區段位於工作區域內,當第三壓印區段及第四壓印區段位於工作區域內時,驅動滾輪組適於驅動可撓性壓印模型膜進行往復移動。In an embodiment of the invention, the embossed segments further include an adjacent third embossed segment and a fourth embossed segment, and the drive roller set is adapted to drive the flexible embossed film. And the third embossed section and the fourth embossed section are located in the working area, and when the third embossed section and the fourth embossed section are located in the working area, the driving roller set is adapted to drive the flexible pressing The printed model film is reciprocated.
在本發明的一實施例中,上述的壓印設備更包括至少一第二檢測單元,其中第二檢測單元適於檢測壓印後的工件,以判斷對應的壓印區段的損耗狀況。In an embodiment of the invention, the embossing apparatus further includes at least one second detecting unit, wherein the second detecting unit is adapted to detect the embossed workpiece to determine a loss condition of the corresponding embossed section.
在本發明的一實施例中,上述的壓印設備更包括至少一第二輸送單元,其中第二輸送單元適於輸送壓印後的工件通過第二檢測單元。In an embodiment of the invention, the embossing apparatus further includes at least one second conveying unit, wherein the second conveying unit is adapted to convey the embossed workpiece through the second detecting unit.
本發明的壓印方法,包括以下步驟。藉由一第一輸送單元輸送至少一工件至一工作區域。在工作區域藉由一可撓性壓印模型膜的一壓印區段壓印工件。藉由一驅動滾輪組驅動可撓性壓印模型膜,以使可撓性壓印模型膜的捲收於驅動滾輪組的至少另一壓印區段展開於驅動滾輪組並移至工作區域。The imprint method of the present invention comprises the following steps. At least one workpiece is transported to a work area by a first transport unit. The workpiece is embossed in the work area by an embossed section of a flexible embossed mold film. The flexible embossed model film is driven by a drive roller set such that at least one other embossed section of the flexible embossed mold film that is wound around the drive roller set is deployed to the drive roller set and moved to the work area.
在本發明的一實施例中,上述的壓印方法更包括在工件到達工作區域之前藉由一塗佈單元塗佈一光學層至工件上,其中藉由壓印區段壓印工件的步驟包括藉由壓印區段的一壓印微結構壓印光學層以在工件上形成一光學微結構。In an embodiment of the invention, the embossing method further includes coating an optical layer onto the workpiece by a coating unit before the workpiece reaches the working area, wherein the step of embossing the workpiece by the embossing section comprises An optical layer is embossed by an embossed microstructure of the embossed section to form an optical microstructure on the workpiece.
在本發明的一實施例中,上述的壓印方法更包括藉由一第一檢測單元檢測尚未塗佈光學層的工件的表面狀態。In an embodiment of the invention, the embossing method further includes detecting, by a first detecting unit, a surface state of the workpiece that has not been coated with the optical layer.
在本發明的一實施例中,上述的壓印方法更包括藉由一能量源提供的能量而固化壓印後的光學層。In an embodiment of the invention, the embossing method further includes curing the embossed optical layer by energy provided by an energy source.
在本發明的一實施例中,上述的壓印方法更包括以下步驟。藉由一第一能量源提供的能量而半固化壓印前的光學層。藉由一第二能量源提供的能量而完全固化壓印後的光學層。In an embodiment of the invention, the above imprint method further comprises the following steps. The optical layer before imprinting is semi-cured by the energy provided by a first energy source. The embossed optical layer is fully cured by the energy provided by a second source of energy.
在本發明的一實施例中,上述的壓印方法更包括藉由一壓印模型滾輪將對應的壓印區段往工件壓合。In an embodiment of the invention, the embossing method further comprises pressing the corresponding embossed section toward the workpiece by an embossing model roller.
在本發明的一實施例中,上述的壓印方法更包括藉由一升降單元帶動工件相對於該可撓性壓印模型膜升降。In an embodiment of the invention, the embossing method further includes moving the workpiece up and down relative to the flexible embossing model film by a lifting unit.
在本發明的一實施例中,上述的工作區域包括一壓印位置及至少一離模位置,壓印方法更包括以下步驟。使至少兩壓印區段分別位於壓印位置及離模位置。在壓印位置對工件進行壓印。使壓印後的工件附著於對應的壓印區段並被驅動滾輪組驅動至離模位置。在離模位置對工件進行離模。In an embodiment of the invention, the working area includes an imprinting position and at least one off-die position, and the imprinting method further comprises the following steps. The at least two embossed sections are respectively located at the embossing position and the off-die position. The workpiece is embossed at the imprint position. The embossed workpiece is attached to the corresponding embossed section and driven by the drive roller set to the off-die position. The workpiece is demolded at the off-die position.
在本發明的一實施例中,上述的壓印方法更包括藉由一夾持件夾持可撓性壓印模型膜並將位於離模位置的可撓性壓印模型膜掀離於工件。In an embodiment of the invention, the embossing method further comprises clamping the flexible embossed model film by a clamping member and detaching the flexible embossing film located at the off-die position away from the workpiece.
在本發明的一實施例中,上述的壓印方法更包括藉由至少一緩衝件抵壓可撓性壓印模型膜而使可撓性壓印模型膜撓曲,以在位於離模位置的壓印區段的邊界形成至少一緩衝區段。In an embodiment of the invention, the embossing method further comprises flexing the flexible embossed model film by at least one cushioning member against the flexible embossed model film to be located at a position away from the mold. The boundary of the embossed section forms at least one buffer segment.
在本發明的一實施例中,上述的壓印方法更包括以下步驟。當壓印後的工件被驅動滾輪組驅動至離模位置時,藉由第一輸送單元輸送另一工件至壓印位置。在工件於離模位置進行離模的同時,在壓印位置對另一工件進行壓印。In an embodiment of the invention, the above imprint method further comprises the following steps. When the embossed workpiece is driven to the off-die position by the drive roller set, another workpiece is transported to the embossed position by the first transport unit. While the workpiece is being released from the mold release position, the other workpiece is embossed at the imprint position.
在本發明的一實施例中,上述的至少一離模位置的數量為兩個,壓印位置位於兩離模位置之間,這些壓印區段包括相鄰的一第一壓印區段及一第二壓印區段,兩離模位置包括一第一離模位置及一第二離模位置,壓印方法更包括以下步驟。當第一壓印區段及第二壓印區段位於工作區域內時,藉由驅動滾輪組驅動可撓性壓印模型膜進行一往復移動而移動於一第一狀態與一第二狀態之間,其中當可撓性壓印模型膜處於第一狀態時,第一壓印區段位於第一離模位置且第二壓印區段位於壓印位置,當可撓性壓印模型膜處於第二狀態時,第一壓印區段位於壓印位置且第二壓印區段位於第二離模位置。In an embodiment of the invention, the number of the at least one off-die position is two, and the stamping position is between the two off-die positions, and the stamping sections include an adjacent first stamping section and A second embossing section, the two detaching mold positions include a first releasing position and a second releasing position, and the embossing method further comprises the following steps. When the first embossed section and the second embossed section are located in the working area, the flexible embossed model film is driven by the driving roller set to perform a reciprocating movement to move in a first state and a second state. And wherein when the flexible embossed model film is in the first state, the first embossed section is at the first detachment position and the second embossed section is at the embossed position when the flexible embossed model film is at In the second state, the first embossed section is in the embossed position and the second embossed section is in the second detachment position.
在本發明的一實施例中,上述的這些壓印區段更包括相鄰的一第三壓印區段及一第四壓印區段,壓印方法更包括以下步驟。藉由驅動滾輪組驅動可撓性壓印模型膜而使第三壓印區段及第四壓印區段位於工作區域內。當第三壓印區段及第四壓印區段位於工作區域內時,藉由驅動滾輪組驅動可撓性壓印模型膜進行往復移動。In an embodiment of the invention, the embossing segments further include an adjacent third embossing segment and a fourth embossing segment, and the embossing method further comprises the following steps. The third embossed section and the fourth embossed section are positioned within the work area by driving the roller set to drive the flexible embossed mold film. When the third embossed section and the fourth embossed section are located in the working area, the flexible embossed model film is driven to reciprocate by driving the roller set.
在本發明的一實施例中,上述的壓印方法更包括藉由一第二檢測單元檢測壓印後的工件,以判斷對應的壓印區段的損耗狀況。In an embodiment of the invention, the embossing method further includes detecting, by a second detecting unit, the embossed workpiece to determine a loss condition of the corresponding embossed section.
在本發明的一實施例中,上述的壓印方法更包括藉由一第二輸送單元輸送壓印後的工件通過第二檢測單元。In an embodiment of the invention, the embossing method further includes conveying the embossed workpiece through the second detecting unit by using a second conveying unit.
基於上述,在本發明的壓印設備中,以具有多個壓印區段的可撓性壓印模型膜作為壓印模具,當部分壓印區段用於在工作區域壓印工件時,另一部分壓印區段捲收於驅動滾輪組而為備用。一旦使用中的壓印區段耗損而需替換,可利用驅動滾輪組驅動捲收於其的壓印區段進入工作區域以替代原本的壓印區段。在此配置方式之下,使用者不須從壓印設備移除原壓印模具並安裝新的壓印模具至壓印設備,而是藉由驅動滾輪組自動地替換可撓性壓印模型膜的壓印區段,以使壓印設備在使用上較為便利。Based on the above, in the imprint apparatus of the present invention, a flexible imprinted model film having a plurality of embossed sections is used as an imprinting mold, and when a part of the embossed section is used for imprinting a workpiece in a work area, A portion of the embossed section is retracted into the drive roller set for standby. Once the embossed section in use is worn out and needs to be replaced, the driving roller set can be used to drive the embossed section retracted thereto into the working area to replace the original embossed section. In this configuration, the user does not have to remove the original imprinting mold from the imprinting apparatus and install a new imprinting mold to the imprinting apparatus, but automatically replaces the flexible imprinted model film by driving the roller set. The embossed section is convenient for the imprinting apparatus to be used.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.
圖1是本發明一實施例的壓印設備的部分構件立體圖。請參考圖1,本實施例的壓印設備100包括一第一輸送單元110a、一可撓性壓印模型膜120及一驅動滾輪組130。第一輸送單元110a適於依序將多個工件50輸送至壓印設備100的一工作區域100a。可撓性壓印模型膜120具有多個壓印區段(標示出第一壓印區段120a、第二壓印區段120b、第三壓印區段120c),第一壓印區段120a、第二壓印區段120b、第三壓印區段120c位於工作區域100a。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view showing a part of a member of an imprint apparatus according to an embodiment of the present invention. Referring to FIG. 1 , the imprint apparatus 100 of the present embodiment includes a first transport unit 110 a , a flexible imprint model film 120 , and a drive roller set 130 . The first transport unit 110a is adapted to sequentially transport a plurality of workpieces 50 to a work area 100a of the imprint apparatus 100. The flexible embossed mold film 120 has a plurality of embossed sections (labeling the first embossed section 120a, the second embossed section 120b, and the third embossed section 120c), and the first embossed section 120a The second embossed section 120b and the third embossed section 120c are located in the working area 100a.
可撓性壓印模型膜120例如是厚度為0.07 ~0.2 mm的超薄玻璃(ultra-thin glass)或塑膠膜,其部分地捲收於驅動滾輪組130。位於工作區域100a的第一壓印區段120a、第二壓印區段120b、第三壓印區段120c展開於驅動滾輪組130。工件50適於在工作區域100a藉由對應的壓印區段(圖1繪示為第二壓印區段120b)而進行壓印。當工作區域100a內的壓印區段經使用損耗而需替換時,驅動滾輪組130可驅動可撓性壓印模型膜120,以使捲收於驅動滾輪組130的其他壓印區段展開於驅動滾輪組130並移至工作區域。The flexible imprinting model film 120 is, for example, an ultra-thin glass or a plastic film having a thickness of 0.07 to 0.2 mm, which is partially wound around the driving roller group 130. The first embossed section 120a, the second embossed section 120b, and the third embossed section 120c located in the work area 100a are developed to drive the roller set 130. The workpiece 50 is adapted to be embossed in the work area 100a by a corresponding embossed section (shown as a second embossed section 120b in FIG. 1). When the embossed segments in the work area 100a need to be replaced by the use loss, the drive roller set 130 can drive the flexible embossed mold film 120 so that the other embossed sections retracted on the drive roller set 130 are unfolded. The roller set 130 is driven and moved to the work area.
亦即,當可撓性壓印模型膜120的部分壓印區段用於在工作區域100a壓印工件50時,另一部分壓印區段捲收於驅動滾輪組130而為備用。一旦使用中的壓印區段耗損而需替換,可利用驅動滾輪組130驅動捲收於其的壓印區段進入工作區域100a以替代原本的壓印區段。在此配置方式之下,使用者不須從壓印設備100移除原壓印模具並安裝新的壓印模具至壓印設備100,而是藉由驅動滾輪組130自動地替換可撓性壓印模型膜120的壓印區段,以使壓印設備100在使用上較為便利。此外,選用超薄玻璃作為可撓性壓印模型膜120,可避免可撓性壓印模型膜120及其上的工件50在作業過程中產生非預期的變形。以下藉由圖式說明本實施例的壓印設備100的壓印方法之流程。That is, when a portion of the embossed section of the flexible embossed mold film 120 is used to emboss the workpiece 50 in the work area 100a, another portion of the embossed section is taken up in the drive roller set 130 for standby. Once the embossed section in use is worn out and needs to be replaced, the drive roller set 130 can be used to drive the embossed section retracted therein into the work area 100a to replace the original embossed section. Under this configuration, the user does not have to remove the original imprint mold from the imprint apparatus 100 and install a new imprint mold to the imprint apparatus 100, but automatically replaces the flexible pressure by the drive roller set 130. The embossed section of the mold film 120 is printed to facilitate the use of the imprint apparatus 100. In addition, the use of ultra-thin glass as the flexible imprinting model film 120 can prevent the undesired deformation of the flexible imprinted molding film 120 and the workpiece 50 thereon during operation. The flow of the imprint method of the imprint apparatus 100 of the present embodiment will be described below by way of drawings.
圖2是本發明一實施例的壓印方法流程圖。請參考圖1及圖2,首先,藉由一第一輸送單元110a輸送至少一工件50至一工作區域100a(步驟S602)。接著,在工作區域100a藉由一可撓性壓印模型膜120的一壓印區段(圖1繪示為第二壓印區段120b)壓印工件50(步驟S604)。藉由一驅動滾輪組130驅動可撓性壓印模型膜120,以使可撓性壓印模型膜120的捲收於驅動滾輪組130的至少另一壓印區段展開於驅動滾輪組130並移至工作區域(步驟S606)。2 is a flow chart of an imprint method according to an embodiment of the present invention. Referring to FIG. 1 and FIG. 2, first, at least one workpiece 50 to a work area 100a is transported by a first transport unit 110a (step S602). Next, the workpiece 50 is embossed in the work area 100a by an embossed section of the flexible embossed mold film 120 (the second embossed section 120b is illustrated in FIG. 1) (step S604). The flexible embossed mold film 120 is driven by a driving roller set 130 such that at least another embossed portion of the flexible embossing film 120 that is wound around the driving roller set 130 is unfolded on the driving roller set 130 and Move to the work area (step S606).
本實施例的壓印設備100例如是用於製作具有光柵的光學元件,壓印設備100的相關構件詳述如下。如圖1所示,壓印設備100更包括一第一檢測單元140a、一膠塗佈單元150、一能量源160、一壓印模型滾輪170、至少一第二檢測單元140b(繪示為兩個)及至少一第二輸送單元110b(繪示為兩個)。第一檢測單元140a例如是自動光學檢測(automated optical inspection,AOI)裝置且配置於第一輸送單元110a的輸送路徑上,膠塗佈單元150配置於第一檢測單元140a及工作區域100a之間,能量源160及壓印模型滾輪170配置於工作區域100a,第二檢測單元140b例如是自動光學檢測裝置且配置於第二輸送單元110b的輸送路徑上。The imprint apparatus 100 of the present embodiment is, for example, for fabricating an optical element having a grating, and the relevant components of the imprint apparatus 100 are described in detail below. As shown in FIG. 1 , the imprint apparatus 100 further includes a first detecting unit 140a, a glue coating unit 150, an energy source 160, an imprint model roller 170, and at least a second detecting unit 140b (shown as two And at least one second transport unit 110b (shown as two). The first detecting unit 140a is, for example, an automated optical inspection (AOI) device and disposed on the transport path of the first transport unit 110a, and the glue coating unit 150 is disposed between the first detecting unit 140a and the working area 100a. The energy source 160 and the imprint model roller 170 are disposed in the work area 100a, and the second detection unit 140b is, for example, an automatic optical detection device and disposed on the transport path of the second transport unit 110b.
各工件50例如是玻璃基板或塑膠基板,膠塗佈單元150適於在工件50到達工作區域100a之前塗佈一光學層(未示出)至工件50上。膠塗佈單元150例如是噴墨印刷(inkjet printing)裝置,以節省塗膠作業之材料用量。可撓性壓印模型膜120的各壓印區段具有一壓印微結構122,壓印模型滾輪170適於將對應的壓印區段(圖1繪示為位於工作區域100a的第二壓印區段120b)往工件50壓合,使第二壓印區段120b的壓印微結構122壓印所述光學層以在工件50上形成一光學微結構(如光柵)。第一檢測單元140a則適於檢測尚未塗佈所述光學層的工件50的表面狀態,以確保工件50的表面在無髒汙微粒的情況下進行所述光學層之塗佈。Each workpiece 50 is, for example, a glass substrate or a plastic substrate, and the glue coating unit 150 is adapted to apply an optical layer (not shown) to the workpiece 50 before the workpiece 50 reaches the working area 100a. The glue coating unit 150 is, for example, an inkjet printing device to save the amount of material used in the gumming operation. Each of the embossed sections of the flexible embossed mold film 120 has an embossed microstructure 122, and the embossed model roll 170 is adapted to correspond to a corresponding embossed section (FIG. 1 is shown as a second pressure at the working area 100a). The print segment 120b) is pressed toward the workpiece 50 such that the embossed microstructure 122 of the second embossed segment 120b embosses the optical layer to form an optical microstructure (e.g., a grating) on the workpiece 50. The first detecting unit 140a is then adapted to detect the surface state of the workpiece 50 to which the optical layer has not been applied to ensure that the surface of the workpiece 50 is coated with the optical layer without dirt particles.
壓印後的所述光學層適於藉由能量源160提供的能量而固化。舉例來說,所述光學層例如是UV膠,能量源160例如是UV光源以利用UV光來固化所述光學層。在其他實施例中,所述光學層可為其他種類的膠層(如具有兩階特性的膠層),並以配置於膠塗佈單元150與工作區域100a之間的一第一能量源及配置於工作區域100a的第二能量源來取代圖1的能量源160,壓印前的所述光學層可先藉由所述第一能量源提供的能量而半固化,壓印後的所述光學層可藉由所述第二能量源提供的能量而完全固化。The embossed optical layer is adapted to be cured by the energy provided by the energy source 160. For example, the optical layer is, for example, a UV glue, and the energy source 160 is, for example, a UV light source to cure the optical layer with UV light. In other embodiments, the optical layer may be another type of glue layer (such as a glue layer having two-stage characteristics), and is disposed as a first energy source disposed between the glue coating unit 150 and the work area 100a. a second energy source disposed in the working area 100a in place of the energy source 160 of FIG. 1. The optical layer before imprinting may be semi-cured by the energy provided by the first energy source, as described in the embossed The optical layer can be fully cured by the energy provided by the second energy source.
第二輸送單元110b適於輸送壓印後的工件50通過第二檢測單元140b。第二檢測單元140b適於檢測壓印後的工件50,以判斷對應的壓印區段的損耗狀況。若經第二檢測單元140b對工件50的檢測而得知對應的壓印區段已損耗至需更換的程度,則如上述般藉由驅動滾輪組130自動地替換可撓性壓印模型膜120的壓印區段。The second conveying unit 110b is adapted to convey the embossed workpiece 50 through the second detecting unit 140b. The second detecting unit 140b is adapted to detect the embossed workpiece 50 to determine the loss condition of the corresponding embossed section. If the corresponding embossed section has been lost to the extent that it needs to be replaced by the detection of the workpiece 50 by the second detecting unit 140b, the flexible embossed model film 120 is automatically replaced by the driving roller set 130 as described above. Imprinted section.
在本實施例中,驅動滾輪組130包括兩驅動滾輪132、134,工作區域100a位於驅動滾輪132與驅動滾輪134之間,可撓性壓印模型膜120部分地捲收於驅動滾輪132且部分地捲收於驅動滾輪134。驅動滾輪132、134適於轉動以驅動可撓性壓印模型膜120連動。此外,在本實施例中,例如是藉由承載件60來承載工件50,承載件60在第一輸送單元110a或第二輸送單元110b上被輸送,使工件50隨之移動。此外,承載件60例如可提供吸附力來將工件50吸附於其上,避免工件50在輸送或壓印過程中脫離於承載件60。In this embodiment, the driving roller set 130 includes two driving rollers 132, 134. The working area 100a is located between the driving roller 132 and the driving roller 134, and the flexible embossing model film 120 is partially wound around the driving roller 132 and partially The ground roll is received by the drive roller 134. The drive rollers 132, 134 are adapted to rotate to drive the flexible imprinted mold film 120 to interlock. Further, in the present embodiment, for example, the workpiece 50 is carried by the carrier 60, and the carrier 60 is conveyed on the first conveying unit 110a or the second conveying unit 110b to move the workpiece 50 with it. In addition, the carrier 60 can provide, for example, an absorbing force to attract the workpiece 50 thereto, preventing the workpiece 50 from escaping from the carrier 60 during transport or embossing.
以下具體說明本實施例的工作區域100a的配置方式。請參考圖1,本實施例的工作區域100a包括一壓印位置IP及至少一離模位置(繪示為第一離模位置DP1及第二離模位置DP2),壓印位置IP位於第一離模位置DP1及第二離模位置DP2之間,壓印模型滾輪170及能量源160配置於壓印位置IP處,第一壓印區段120a、第二壓印區段120b、第三壓印區段120c在圖1所示狀態分別位於第一離模位置DP1、壓印位置IP及第二離模位置DP2。工件50適於在壓印位置IP進行壓印,壓印後的工件50適於附著於對應的壓印區段並被驅動滾輪組130驅動至第一離模位置DP1或第二離模位置DP2,且工件50適於在第一離模位置DP1或第二離模位置DP2進行離模。The arrangement of the work area 100a of the present embodiment will be specifically described below. Referring to FIG. 1, the working area 100a of the embodiment includes an imprinting position IP and at least one off-die position (shown as a first off-die position DP1 and a second off-die position DP2), and the imprint position IP is located first. Between the mold release position DP1 and the second mold release position DP2, the impression model roller 170 and the energy source 160 are disposed at the imprint position IP, the first imprint section 120a, the second imprint section 120b, and the third pressure. The printing segments 120c are located at the first release position DP1, the imprint position IP, and the second release position DP2, respectively, in the state shown in FIG. The workpiece 50 is adapted to be embossed at an embossing position IP, the embossed workpiece 50 being adapted to be attached to a corresponding embossed section and driven by the drive roller set 130 to a first release position DP1 or a second release position DP2 And the workpiece 50 is adapted to be demolded at the first off-die position DP1 or the second off-die position DP2.
更詳細而言,當壓印後的工件50被驅動滾輪組130從壓印位置IP驅動至第一離模位置DP1或第二離模位置DP2時,第一輸送單元110a會輸送另一工件50至壓印位置IP,且在所述壓印後的工件50於第一離模位置DP1或第二離模位置DP2進行離模的同時,所述另一工件50在壓印位置IP進行壓印,藉以提升壓印設備100的作業效率。In more detail, when the embossed workpiece 50 is driven by the driving roller set 130 from the embossing position IP to the first releasing position DP1 or the second releasing position DP2, the first conveying unit 110a conveys another workpiece 50. To the imprinting position IP, and while the imprinted workpiece 50 is released from the mold at the first off-die position DP1 or the second off-die position DP2, the other workpiece 50 is imprinted at the imprint position IP. Thereby, the work efficiency of the imprint apparatus 100 is improved.
圖3繪示圖1的可撓性壓印模型膜從第一狀態作動至第二狀態。在本實施例中,當第一壓印區段120a及第二壓印區段120b位於工作區域100a內時,驅動滾輪組130適於驅動可撓性壓印模型膜120進行一往復移動而移動於圖1所示的一第一狀態與圖3所示的一第二狀態之間。當可撓性壓印模型膜120如圖1所示處於所述第一狀態時,第一壓印區段120a位於第一離模位置DP1且第二壓印區段120b位於壓印位置IP,此時第一壓印區段120a所對應的工件50可在第一離模位置DP1進行離模,且第二壓印區段120b所對應的工件50可在壓印位置IP進行壓印。當可撓性壓印模型膜120如圖3所示處於所述第二狀態時,第一壓印區段120a位於壓印位置IP且第二壓印區段120b位於第二離模位置DP2,此時第一壓印區段120a所對應的工件50可在壓印位置IP進行壓印,且第二壓印區段120b所對應的工件50可在第二離模位置DP2進行離模。藉由可撓性壓印模型膜120所進行的上述往復運動,可反覆利用可撓性壓印模型膜120的第一壓印區段120a及第二壓印區段120b來進行壓印作業。3 illustrates the flexible imprinting model film of FIG. 1 being actuated from a first state to a second state. In this embodiment, when the first embossed section 120a and the second embossed section 120b are located in the working area 100a, the driving roller set 130 is adapted to drive the flexible embossing model film 120 to perform a reciprocating movement. Between a first state shown in FIG. 1 and a second state shown in FIG. When the flexible imprinting model film 120 is in the first state as shown in FIG. 1, the first imprinting section 120a is located at the first releasing position DP1 and the second imprinting section 120b is located at the imprinting position IP, At this time, the workpiece 50 corresponding to the first embossed section 120a can be demolded at the first detachment position DP1, and the workpiece 50 corresponding to the second embossed section 120b can be embossed at the embossed position IP. When the flexible imprinting model film 120 is in the second state as shown in FIG. 3, the first imprinting section 120a is located at the imprinting position IP and the second imprinting section 120b is located at the second releasing position DP2. At this time, the workpiece 50 corresponding to the first embossed section 120a can be embossed at the embossing position IP, and the workpiece 50 corresponding to the second embossed section 120b can be detached at the second releasing position DP2. By the above-described reciprocating motion by the flexible imprinting model film 120, the first imprinting section 120a and the second imprinting section 120b of the flexible imprinting model film 120 can be repeatedly used for the imprinting operation.
圖4繪示圖1的可撓性壓印模型膜的壓印區段被替換。當可撓性壓印模型膜120的第一壓印區段120a及第二壓印區段120b逐漸損耗而需替換時,可藉由驅動滾輪組130驅動可撓性壓印模型膜120而如圖4所示使第三壓印區段120c、第四壓印區段120d、第五壓印區段120e位於工作區域100a內,當第三壓印區段120c、第四壓印區段120d、第五壓印區段120e位於工作區域100a內時,驅動滾輪組130適於驅動可撓性壓印模型膜120進行所述往復移動,以反覆利用可撓性壓印模型膜120的第三壓印區段120c及第四壓印區段120d來進行壓印作業。依此方式,可持續利用驅動滾輪組130驅動可撓性壓印模型膜120以自動地進行壓印區段之替換。4 illustrates the replacement of the embossed section of the flexible embossed model film of FIG. 1. When the first embossed section 120a and the second embossed section 120b of the flexible embossed mold film 120 are gradually worn out and need to be replaced, the flexible embossed model film 120 can be driven by the driving roller set 130. 4 shows the third embossed section 120c, the fourth embossed section 120d, and the fifth embossed section 120e in the working area 100a, when the third embossed section 120c and the fourth embossed section 120d When the fifth embossed section 120e is located in the working area 100a, the driving roller set 130 is adapted to drive the flexible embossing model film 120 to perform the reciprocating movement to repeatedly utilize the third of the flexible embossed model film 120. The embossing section 120c and the fourth embossing section 120d perform an embossing operation. In this manner, the sustainable drive roller set 130 drives the flexible embossed mold film 120 to automatically replace the embossed segments.
本實施例的壓印設備100更包括至少一升降單元180(繪示為三個)。升降單元180配置於工作區域100a且分別對位於第一離模位置DP1、壓印位置IP及第二離模位置DP2,各升降單元180適於帶動對應的承載件60及工件50相對於可撓性壓印模型膜120升降,使工件50能夠順利地進行壓印或離模。The imprint apparatus 100 of this embodiment further includes at least one lifting unit 180 (shown as three). The lifting unit 180 is disposed in the working area 100a and is respectively located at the first releasing position DP1, the pressing position IP and the second releasing position DP2, and each lifting unit 180 is adapted to drive the corresponding carrier 60 and the workpiece 50 relative to the flexible The embossed mold film 120 is lifted and lowered to enable the workpiece 50 to be smoothly embossed or released.
此外,本實施例的壓印設備100更包括至少一夾持件190a(繪示為多個)及至少一緩衝件190b(繪示為多個),夾持件190a配置於工作區域100,緩衝件190b配置於壓印位置IP與第一離模位置DP1之間及壓印位置IP與第二離模位置DP2之間。夾持件190a適於如圖1所示在第一離模位置DP1、壓印位置IP及第二離模位置DP2的邊界夾持可撓性壓印模型膜120。從而,當緩衝件190b抵壓可撓性壓印模型膜120而使可撓性壓印模型膜120撓曲時,可在位於第一離模位置DP1的第一壓印區段120a的邊界形成緩衝區段B1、B3,且可在位於第二離模位置DP2的第三壓印區段120c的邊界形成緩衝區段B2、B4。部分夾持件190a可將位於第一離模位置DP1與第二離模位置DP2的可撓性壓印模型膜120掀離於工件50,使完成壓印的工件50能夠被第二輸送單元110b往第二檢測單元140b輸送。在上述將可撓性壓印模型膜120掀離於工件50的過程中,藉由緩衝區段B1、B2、B3、B4所提供之緩衝效果,可避免可撓性壓印模型膜120於第一離模位置DP1及第二離模位置DP2處之區段的離模作業擾動到可撓性壓印模型膜120之其他區段,使壓印作業能順利進行。In addition, the imprint apparatus 100 of the present embodiment further includes at least one clamping member 190a (shown as a plurality) and at least one buffering member 190b (shown as a plurality). The clamping member 190a is disposed in the working area 100 and buffered. The piece 190b is disposed between the imprint position IP and the first off-die position DP1 and between the imprint position IP and the second off-die position DP2. The holding member 190a is adapted to sandwich the flexible embossed model film 120 at the boundary of the first release position DP1, the embossed position IP, and the second release position DP2 as shown in FIG. Thus, when the cushioning member 190b is pressed against the flexible imprinting model film 120 to deflect the flexible imprinting model film 120, it may be formed at the boundary of the first imprinting section 120a at the first releasing position DP1. Buffer segments B1, B3, and buffer segments B2, B4 may be formed at the boundary of the third imprint segment 120c at the second off-die position DP2. The partial clamping member 190a can separate the flexible embossing model film 120 at the first releasing position DP1 and the second releasing position DP2 from the workpiece 50, so that the embossed workpiece 50 can be detached by the second conveying unit 110b. It is delivered to the second detecting unit 140b. In the process of separating the flexible imprinting model film 120 from the workpiece 50, the flexible imprinting model film 120 can be avoided by the buffering effect provided by the buffer segments B1, B2, B3, and B4. The detachment work of the sections at the die exit position DP1 and the second die position DP2 is disturbed to other sections of the flexible embossed mold film 120, so that the embossing operation can be smoothly performed.
以下藉由圖式更詳細說明本實施例的壓印設備100的各構件的具體作動方式與流程。圖5A至圖5G繪示圖1的壓印設備的作動流程。首先,如圖5A所示,升降單元180在壓印位置IP抬升對應的承載件60及工件50,且壓印模型滾輪170在第二壓印區段120b上滾壓,以壓印對應的工件50,且能量源160提供能量以固化工件50上的壓印後的光學層。接著,如圖5B所示,升降單元180在壓印位置IP下移對應的承載件60,此時工件50附著於對應的壓印微結構122上。在圖5A及圖5B中,可撓性壓印模型膜120是處於所述第一狀態,即第一壓印區段120a位於第一離模位置DP1,且第二壓印區段120b位於壓印位置IP。The specific operation mode and flow of each component of the imprint apparatus 100 of the present embodiment will be described in more detail below with reference to the drawings. 5A to 5G illustrate an operation flow of the imprint apparatus of FIG. 1. First, as shown in FIG. 5A, the lifting unit 180 raises the corresponding carrier 60 and the workpiece 50 at the embossing position IP, and the embossing model roller 170 is rolled on the second embossing section 120b to emboss the corresponding workpiece. 50, and energy source 160 provides energy to cure the embossed optical layer on workpiece 50. Next, as shown in FIG. 5B, the lifting unit 180 moves the corresponding carrier 60 down at the embossing position IP, at which time the workpiece 50 is attached to the corresponding embossed microstructure 122. In FIGS. 5A and 5B, the flexible embossed model film 120 is in the first state, that is, the first embossed section 120a is located at the first release position DP1, and the second embossed section 120b is at the pressure Print position IP.
如圖5C所示,夾持件190a及緩衝件190b釋放可撓性壓印模型膜120,且驅動滾輪132、134順時針轉動,以使第一壓印區段120a及第二壓印區段120b右移。As shown in FIG. 5C, the clamping member 190a and the cushioning member 190b release the flexible imprinting model film 120, and the driving rollers 132, 134 are rotated clockwise to make the first imprinting section 120a and the second imprinting section. 120b moves to the right.
如圖5D所示,夾持件190a夾持可撓性壓印模型膜120,緩衝件190b抵壓可撓性壓印模型膜120,且驅動滾輪134順時針旋轉,使第一壓印區段120a對位於壓印位置IP,且使第二壓印區段120b及附著於其上的工件50對位於第二離模位置DP2。此時,升降單元180在第二離模位置DP2抬升對應的承載件60以承接對應的工件50。如圖5E所示,升降單元180在壓印位置IP抬升對應的另一承載件60及另一工件50,且壓印模型滾輪170在第二壓印區段120a上滾壓,以壓印對應的工件50。同時,夾持件190a將第二離模位置DP2處的可撓性壓印模型膜120掀離於對應的工件50。如圖5F所示,能量源160提供能量以固化工件50上的壓印後的光學層,且升降單元180在第二離模位置DP2下移對應的承載件60及工件50。在圖5D、圖5E及圖5F中,可撓性壓印模型膜120是處於所述第二狀態,即第一壓印區段120a位於壓印位置IP,且第二壓印區段120b位於第二離模位置DP2。As shown in FIG. 5D, the holding member 190a holds the flexible embossed mold film 120, the cushioning member 190b presses the flexible embossed mold film 120, and the driving roller 134 rotates clockwise to make the first embossed portion. The pair 120a is located at the imprinting position IP, and the second imprinted section 120b and the workpiece 50 attached thereto are located at the second off-die position DP2. At this time, the lifting unit 180 raises the corresponding carrier 60 at the second releasing position DP2 to receive the corresponding workpiece 50. As shown in FIG. 5E, the lifting unit 180 lifts the corresponding other carrier 60 and the other workpiece 50 at the embossing position IP, and the embossing model roller 170 is rolled on the second embossing section 120a to emboss the corresponding Workpiece 50. At the same time, the clamping member 190a detaches the flexible embossing model film 120 at the second release position DP2 from the corresponding workpiece 50. As shown in FIG. 5F, energy source 160 provides energy to cure the embossed optical layer on workpiece 50, and lift unit 180 moves the corresponding carrier 60 and workpiece 50 down at the second release position DP2. In FIGS. 5D, 5E, and 5F, the flexible imprinting model film 120 is in the second state, that is, the first imprinting section 120a is located at the imprinting position IP, and the second imprinting section 120b is located. The second off-mode position DP2.
如圖5G所示,將第二離模位置DP2處的工件50移離承載件60,並接著將此工件50輸送至圖1所示的第二檢測單元140b進行檢測。此外,夾持件190a及緩衝件190b如圖5G所示釋放可撓性壓印模型膜120,且驅動滾輪132、134逆時針轉動,以使第一壓印區段120a及第二壓印區段120b左移,以便於再次驅動可撓性壓印模型膜120至所述第一狀態,從而繼續在第一離模位置DP1及壓印位置IP進行類似的壓印及離模程序。As shown in Fig. 5G, the workpiece 50 at the second release position DP2 is moved away from the carrier 60, and then the workpiece 50 is conveyed to the second detecting unit 140b shown in Fig. 1 for detection. In addition, the clamping member 190a and the buffering member 190b release the flexible imprinting model film 120 as shown in FIG. 5G, and the driving rollers 132, 134 are rotated counterclockwise to make the first imprinting section 120a and the second imprinting area. The segment 120b is shifted to the left to facilitate driving the flexible embossed mold film 120 to the first state again, thereby continuing the similar embossing and ejection procedures at the first die position DP1 and the nip position IP.
綜上所述,在本發明的壓印設備中,以具有多個壓印區段的可撓性壓印模型膜作為壓印模具,當部分壓印區段用於在工作區域壓印工件時,另一部分壓印區段捲收於驅動滾輪組而為備用。一旦使用中的壓印區段耗損而需替換,可利用驅動滾輪組驅動捲收於其的壓印區段進入工作區域以替代原本的壓印區段。在此配置方式之下,使用者不須從壓印設備移除原壓印模具並安裝新的壓印模具至壓印設備,而是藉由驅動滾輪組自動地替換可撓性壓印模型膜的壓印區段,以使壓印設備在使用上較為便利。此外,選用超薄玻璃作為可撓性壓印模型膜,可避免可撓性壓印模型膜及其上的工件在作業過程中產生非預期的變形。另外,當壓印後的工件於離模位置進行離模時,另一工件可同時在壓印位置進行壓印,藉以提升壓印設備的作業效率。再者,藉由緩衝件在可撓性壓印模型膜所形成的緩衝區段,可避免可撓性壓印模型膜於離模位置處之區段的離模作業擾動到可撓性壓印模型膜之其他區段,使壓印作業能順利進行。In summary, in the embossing apparatus of the present invention, a flexible embossed model film having a plurality of embossed sections is used as an embossing mold, and when a partial embossed section is used for embossing a workpiece in a work area Another part of the embossed section is wound up in the drive roller set for standby. Once the embossed section in use is worn out and needs to be replaced, the driving roller set can be used to drive the embossed section retracted thereto into the working area to replace the original embossed section. In this configuration, the user does not have to remove the original imprinting mold from the imprinting apparatus and install a new imprinting mold to the imprinting apparatus, but automatically replaces the flexible imprinted model film by driving the roller set. The embossed section is convenient for the imprinting apparatus to be used. In addition, the use of ultra-thin glass as a flexible imprinting model film can avoid undesired deformation of the flexible imprinted model film and the workpiece thereon during operation. In addition, when the embossed workpiece is released from the mold release position, the other workpiece can be embossed at the embossed position at the same time, thereby improving the working efficiency of the embossing apparatus. Moreover, by means of the buffer member in the buffer section formed by the flexible imprinting model film, the mold release operation of the segment of the flexible imprinted model film at the mold release position can be avoided to the flexible imprint The other sections of the model film allow the embossing to proceed smoothly.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.
50‧‧‧工件
60‧‧‧承載件
100‧‧‧壓印設備
100a‧‧‧工作區域
110a‧‧‧第一輸送單元
110b‧‧‧第二輸送單元
120‧‧‧可撓性壓印模型膜
120a‧‧‧第一壓印區段
120b‧‧‧第二壓印區段
120c‧‧‧第三壓印區段
120d‧‧‧第四壓印區段
120e‧‧‧第五壓印區段
122‧‧‧壓印微結構
130‧‧‧驅動滾輪組
132、134‧‧‧驅動滾輪
140a‧‧‧第一檢測單元
140b‧‧‧第二檢測單元
150‧‧‧塗佈單元
160‧‧‧能量源
170‧‧‧壓印模型滾輪
180‧‧‧升降單元
190a‧‧‧夾持件
190b‧‧‧緩衝件
B1、B2、B3、B4‧‧‧緩衝區段
IP‧‧‧壓印位置
DP1‧‧‧第一離模位置
DP2‧‧‧第二離模位置50‧‧‧Workpiece
60‧‧‧carriers
100‧‧‧imprint equipment
100a‧‧‧Working area
110a‧‧‧First transport unit
110b‧‧‧Second transport unit
120‧‧‧Flexible imprinted model film
120a‧‧‧First embossed section
120b‧‧‧second embossed section
120c‧‧‧ third embossed section
120d‧‧‧4nd embossed section
120e‧‧‧5th embossed section
122‧‧‧embossed microstructure
130‧‧‧Drive roller set
132, 134‧‧‧ drive roller
140a‧‧‧First detection unit
140b‧‧‧Second detection unit
150‧‧‧ Coating unit
160‧‧‧Energy source
170‧‧‧ Imprinted model wheel
180‧‧‧ Lifting unit
190a‧‧‧Clamping parts
190b‧‧‧ cushioning parts
B1, B2, B3, B4‧‧‧ Buffer segments
IP‧‧‧ Imprint position
DP1‧‧‧first release position
DP2‧‧‧Second release position
圖1是本發明一實施例的壓印設備的部分構件立體圖。 圖2是本發明一實施例的壓印方法流程圖。 圖3繪示圖1的可撓性壓印模型膜從第一狀態作動至第二狀態。 圖4繪示圖1的可撓性壓印模型膜的壓印區段被替換。 圖5A至圖5G繪示圖1的壓印設備的作動流程。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view showing a part of a member of an imprint apparatus according to an embodiment of the present invention. 2 is a flow chart of an imprint method according to an embodiment of the present invention. 3 illustrates the flexible imprinting model film of FIG. 1 being actuated from a first state to a second state. 4 illustrates the replacement of the embossed section of the flexible embossed model film of FIG. 1. 5A to 5G illustrate an operation flow of the imprint apparatus of FIG. 1.
50‧‧‧工件 50‧‧‧Workpiece
60‧‧‧承載件 60‧‧‧carriers
100‧‧‧壓印設備 100‧‧‧imprint equipment
100a‧‧‧工作區域 100a‧‧‧Working area
110a‧‧‧第一輸送單元 110a‧‧‧First transport unit
110b‧‧‧第二輸送單元 110b‧‧‧Second transport unit
120‧‧‧可撓性壓印模型膜 120‧‧‧Flexible imprinted model film
120a‧‧‧第一壓印區段 120a‧‧‧First embossed section
120b‧‧‧第二壓印區段 120b‧‧‧second embossed section
120c‧‧‧第三壓印區段 120c‧‧‧ third embossed section
122‧‧‧壓印微結構 122‧‧‧embossed microstructure
130‧‧‧驅動滾輪組 130‧‧‧Drive roller set
132、134‧‧‧驅動滾輪 132, 134‧‧‧ drive roller
140a‧‧‧第一檢測單元 140a‧‧‧First detection unit
140b‧‧‧第二檢測單元 140b‧‧‧Second detection unit
150‧‧‧塗佈單元 150‧‧‧ Coating unit
160‧‧‧能量源 160‧‧‧Energy source
170‧‧‧壓印模型滾輪 170‧‧‧ Imprinted model wheel
180‧‧‧升降單元 180‧‧‧ Lifting unit
190a‧‧‧夾持件 190a‧‧‧Clamping parts
190b‧‧‧緩衝件 190b‧‧‧ cushioning parts
B1、B2、B3、B4‧‧‧緩衝區段 B1, B2, B3, B4‧‧‧ Buffer segments
IP‧‧‧壓印位置 IP‧‧‧ Imprint position
DP1‧‧‧第一離模位置 DP1‧‧‧first release position
DP2‧‧‧第二離模位置 DP2‧‧‧Second release position
Claims (32)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US201662324885P | 2016-04-20 | 2016-04-20 | |
US62/324,885 | 2016-04-20 |
Publications (2)
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TW201738097A true TW201738097A (en) | 2017-11-01 |
TWI656965B TWI656965B (en) | 2019-04-21 |
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Cited By (3)
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CN108749376A (en) * | 2018-03-02 | 2018-11-06 | 盐城工业职业技术学院 | A kind of straight printing apparatus of terminal of two-dimensional anime deisgn product |
TWI717647B (en) * | 2017-10-25 | 2021-02-01 | 日商東芝機械股份有限公司 | Transfer apparatus and transfer method |
TWI836452B (en) * | 2021-08-29 | 2024-03-21 | 奇景光電股份有限公司 | Imprinting apparatus |
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JP5597420B2 (en) * | 2010-03-16 | 2014-10-01 | 東芝機械株式会社 | Sheet mold transfer positioning device |
JP5584241B2 (en) * | 2012-02-27 | 2014-09-03 | 株式会社東芝 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method |
IN2014MN02313A (en) * | 2012-05-08 | 2015-08-07 | Asahi Kasei E Materials Corp | |
JP6203253B2 (en) * | 2012-06-14 | 2017-09-27 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | Security element and hologram manufacturing method |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI717647B (en) * | 2017-10-25 | 2021-02-01 | 日商東芝機械股份有限公司 | Transfer apparatus and transfer method |
US11179876B2 (en) | 2017-10-25 | 2021-11-23 | Shibaura Machine Co., Ltd. | Transfer apparatus and transfer method |
CN108749376A (en) * | 2018-03-02 | 2018-11-06 | 盐城工业职业技术学院 | A kind of straight printing apparatus of terminal of two-dimensional anime deisgn product |
TWI836452B (en) * | 2021-08-29 | 2024-03-21 | 奇景光電股份有限公司 | Imprinting apparatus |
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