TW201733797A - Copper foil, copper-clad laminate, flexible printed circuit board and electronic machine which are hard to generate wrinkles at the time of lamination with a resin layer even though the thickness itself is thin - Google Patents

Copper foil, copper-clad laminate, flexible printed circuit board and electronic machine which are hard to generate wrinkles at the time of lamination with a resin layer even though the thickness itself is thin Download PDF

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TW201733797A
TW201733797A TW106104689A TW106104689A TW201733797A TW 201733797 A TW201733797 A TW 201733797A TW 106104689 A TW106104689 A TW 106104689A TW 106104689 A TW106104689 A TW 106104689A TW 201733797 A TW201733797 A TW 201733797A
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copper foil
curve
copper
clad laminate
roughness
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TW106104689A
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TWI660838B (en
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Tatsuya Yamaji
Kazuki Kammuri
Kazutaka AOSHIMA
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Jx Nippon Mining & Metals Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0277Bendability or stretchability details
    • H05K1/0283Stretchable printed circuits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298Multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/12Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06Lamination

Abstract

The present invention provides a copper foil, a copper-clad laminate, a flexible printed circuit board and an electronic machine, which are hard to generate wrinkles at the time of lamination with a resin layer even though the thickness itself is thin. A copper foil having a thickness of 3 to 8[mu]m and containing copper of 99.90 mass% or more is provided, whose average length Wsm of the waviness curve element is 2.5 to 20.0 mm, where the waviness curve is obtained by cutting off the short wavelength and the long wavelength components from a cross-sectional curve S of a surface having a length L of 50 mm along the TD (transverse direction) direction in accordance with JIS-B 0601 (2013) under conditions that contour curve filter [lambda]c=2 mm and contour curve filter [lambda]f=25 mm.

Description

銅箔、覆銅積層板、以及可撓性印刷基板及電子機器 Copper foil, copper clad laminate, and flexible printed circuit board and electronic equipment

本發明係關於一種適用於藉由層壓方式及澆鑄(cast)方式製造之覆銅積層板之銅箔、使用其之覆銅積層板以及可撓性印刷基板及電子機器。 The present invention relates to a copper foil suitable for use in a copper clad laminate manufactured by a lamination method and a cast method, a copper clad laminate using the same, a flexible printed circuit board, and an electronic device.

用於電子機器之可撓性配線板(FPC)係將銅箔與樹脂積層而製造覆銅積層板(CCL)並於該CCL之銅箔部分形成電路而成。作為CCL之製法,有將具有熱塑性樹脂之樹脂膜與銅箔熱熔接之層壓法(專利文獻1)、將樹脂清漆塗佈於銅箔使樹脂硬化之澆鑄法(專利文獻2)、雙帶式壓製法(專利文獻3)等。 A flexible wiring board (FPC) for an electronic device is formed by laminating a copper foil and a resin to produce a copper clad laminate (CCL) and forming a circuit on the copper foil portion of the CCL. A method of producing a CCL is a lamination method in which a resin film having a thermoplastic resin and a copper foil are thermally welded (Patent Document 1), a casting method in which a resin varnish is applied to a copper foil to cure a resin (Patent Document 2), and a double belt. Press method (Patent Document 3) and the like.

雙帶式壓製法係使用圖1所示之雙帶式壓製裝置100。雙帶式壓製裝置100係準備2個無接縫之鋼帶102a、102b,將各帶102a、102b分別架設於入口輥120及出口輥122間。 The double belt pressing method uses the double belt pressing device 100 shown in Fig. 1. The double belt press apparatus 100 is provided with two seamless steel strips 102a and 102b, and each of the belts 102a and 102b is placed between the inlet roll 120 and the exit roll 122.

而且,若使各帶102a、102b密接使之運轉,則入口輥120側之銅箔2及樹脂膜4會被拉入至各帶102a、102b間,於各帶102a、102b被積層及熱壓後自出口輥122側而出。 When the belts 102a and 102b are brought into close contact with each other, the copper foil 2 and the resin film 4 on the side of the inlet roller 120 are drawn between the belts 102a and 102b, and laminated and heat-pressed in the belts 102a and 102b. The rear exits from the side of the exit roller 122.

藉由於各帶102a、102b間配置加熱加壓裝置110、冷卻加壓裝置112, 能夠將銅箔2及樹脂膜4熱壓接而製造CCL。 By arranging the heating and pressing device 110 and the cooling and pressing device 112 between the respective belts 102a and 102b, The copper foil 2 and the resin film 4 can be thermocompression bonded to manufacture CCL.

近年來,逐漸要求可撓性配線板之微距化、薄型化。即,對於作為基板而用於該用途之覆銅積層板(CCL)基板或用於覆銅積層板之銅箔,亦較先前更高程度地追求薄壁化。 In recent years, the flexible wiring board has been required to be reduced in size and thickness. In other words, the copper clad laminate (CCL) substrate or the copper foil for the copper clad laminate used for the substrate as the substrate is also thinner than ever before.

[專利文獻1]日本專利特開2005-305729號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-305729

[專利文獻2]日本專利特開2009-286095號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-286095

[專利文獻3]日本專利特開2011-230308號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2011-230308

且說,覆銅積層板若銅箔之厚度變薄,則於銅箔與樹脂積層時容易產生褶皺,從而導致生產性或產率降低。 In addition, if the thickness of the copper foil of the copper clad laminate is thin, wrinkles are likely to occur when the copper foil and the resin are laminated, resulting in a decrease in productivity or yield.

尤其於在銅箔上塗佈樹脂清漆而形成之澆鑄法,若於銅箔產生褶皺,則製造變得困難。又,於層壓法中係使用加熱輥進行熱熔接,若對輥間之銅箔施加張力,則容易與張力方向平行地產生褶皺。 In particular, a casting method in which a resin varnish is applied to a copper foil, and if wrinkles are formed in the copper foil, manufacturing becomes difficult. Further, in the lamination method, heat welding is performed using a heating roll, and when tension is applied to the copper foil between the rolls, wrinkles are likely to occur in parallel with the tension direction.

因此,本發明之目的在於提供一種即便本身之厚度薄,於使之與樹脂層積層時亦不易產生褶皺之銅箔、覆銅積層板、以及可撓性印刷基板及電子機器。 Accordingly, an object of the present invention is to provide a copper foil, a copper-clad laminate, a flexible printed circuit board, and an electronic device which are less likely to wrinkle when laminated with a resin layer even if the thickness thereof is thin.

本發明人等發現於將厚度薄之銅箔與樹脂層積層而製造CCL時產生褶皺之原因與銅箔之表面性狀有關。 The present inventors have found that the reason why wrinkles are formed when a thin copper foil and a resin layer are laminated to produce CCL is related to the surface properties of the copper foil.

作為銅箔之表面性狀,可舉藉由粗糙度計測得之表面的高度輪廓(剖面曲線),但於銅箔,一般求出0.1~5mm左右之長度之表面的剖面曲線,從剖面曲線求出表面粗糙度等指標。 The surface profile of the copper foil is a height profile (cross-sectional curve) of the surface measured by a roughness meter. However, in the copper foil, a profile of a surface having a length of about 0.1 to 5 mm is generally obtained, and the profile curve is obtained from the profile curve. Indicators such as surface roughness.

然而,本發明人等進行研究之結果明確:從長距離之銅箔表面之剖面曲線求出之表面性狀(波紋曲線)與在和樹脂貼合時產生之褶皺有很大的關係。 However, the results of studies conducted by the present inventors have clarified that the surface property (corrugation curve) obtained from the profile curve of the long-distance copper foil surface has a great relationship with the wrinkles generated when it is bonded to the resin.

即,本發明之壓延銅箔係含有以質量率計為99.90%以上之銅且厚度為3~8μm的銅箔,其特徵在於:於依照JIS-B0601(2013),自沿著TD方向之50mm之長度之表面的剖面曲線以輪廓曲線濾波器λ c=2mm,輪廓曲線濾波器λ f=25mm之條件將短波長及長波長成分截止而求得波紋曲線時,波紋曲線要素之平均長度Wsm為2.5~20.0mm。 That is, the rolled copper foil of the present invention contains a copper foil having a mass ratio of 99.90% or more and a thickness of 3 to 8 μm, which is characterized by 50 mm in the TD direction in accordance with JIS-B0601 (2013). When the profile curve of the surface of the length is cut off by the contour curve filter λ c=2 mm and the contour curve filter λ f=25 mm to obtain the ripple curve, the average length Wsm of the ripple curve element is 2.5~20.0mm.

較佳為,該波紋曲線之最大高度波紋Wz為0.00010~0.00200mm。 Preferably, the maximum height ripple Wz of the ripple curve is 0.00010 to 0.00200 mm.

本發明之銅箔較佳為壓延銅箔,合計含有10~2000質量ppm之選自Ag、Zn、Sn及P之群中之1種以上的添加元素。 The copper foil of the present invention is preferably a rolled copper foil containing a total of one or more additive elements selected from the group consisting of Ag, Zn, Sn, and P in an amount of 10 to 2000 ppm by mass.

較佳為,於單面或兩面,形成有由選自Cu、Ni、Zn及Co之群中之1種以上的元素構成之鍍覆層。 Preferably, a plating layer composed of one or more elements selected from the group consisting of Cu, Ni, Zn, and Co is formed on one surface or both surfaces.

較佳為,於自該剖面曲線以λ c=0.25mm將長波長成分截止而求得粗糙度曲線時,自該粗糙度曲線計算之算術平均粗糙度Ra為0.01~0.1μm;最大高度粗糙度Rz為0.1~0.8μm。 Preferably, when the long-wavelength component is cut off from the profile curve by λ c=0.25 mm to obtain a roughness curve, the arithmetic mean roughness Ra calculated from the roughness curve is 0.01 to 0.1 μm; the maximum height roughness is obtained. Rz is 0.1 to 0.8 μm.

本發明之覆銅積層板由上述銅箔與樹脂層構成。 The copper clad laminate of the present invention comprises the above copper foil and a resin layer.

本發明之可撓性印刷基板係使用上述覆銅積層板於上述銅 箔形成電路而成。 In the flexible printed circuit board of the present invention, the copper-clad laminate is used for the copper The foil is formed into a circuit.

本發明之電子機器係使用上述可撓性印刷基板而成。 The electronic device of the present invention is obtained by using the above-described flexible printed circuit board.

根據本發明,能夠獲得一種即便本身之厚度薄,於與樹脂層層壓時亦不易產生褶皺之銅箔。 According to the present invention, it is possible to obtain a copper foil which is less likely to wrinkle when laminated with a resin layer even if its thickness is thin.

2‧‧‧銅箔之表面 2‧‧‧The surface of copper foil

L‧‧‧沿著TD方向之50mm之長度 L‧‧‧ Length of 50mm along the TD direction

S‧‧‧剖面曲線 S‧‧‧ section curve

圖1係表示雙帶式壓製裝置100之構成之圖。 Fig. 1 is a view showing the configuration of a double belt pressing device 100.

圖2係表示沿著銅箔表面之TD方向測量剖面曲線之方法的圖。 Fig. 2 is a view showing a method of measuring a profile curve in the TD direction of the surface of the copper foil.

以下,對本發明之實施形態之壓延銅箔進行說明。再者,於本發明,所謂%,只要無特別說明,則表示質量%。本發明之實施形態之壓延銅箔對與樹脂膜等樹脂層被層壓處理而製造之覆銅積層板有用,亦可應用於上述澆鑄法、雙帶法。 Hereinafter, the rolled copper foil according to the embodiment of the present invention will be described. In the present invention, the term "%" means mass% unless otherwise specified. The rolled copper foil according to the embodiment of the present invention is useful for a copper clad laminate produced by laminating a resin layer such as a resin film, and can be applied to the above-described casting method or double belt method.

<組成> <composition>

壓延銅箔含有以質量率計為99.90%以上之銅。作為此種組成,可列舉由JIS-H3100(C1100)標準化之精銅或由JIS-H3100(C1020)標準化之無氧銅。壓延銅箔較佳含有以質量率計為99.90~99.999%之銅,且於0~500質量ppm之範圍含有氧。 The rolled copper foil contains copper in a mass ratio of 99.90% or more. Examples of such a composition include refined copper standardized by JIS-H3100 (C1100) or oxygen-free copper standardized by JIS-H3100 (C1020). The rolled copper foil preferably contains copper in a mass ratio of 99.90 to 99.999%, and contains oxygen in a range of 0 to 500 ppm by mass.

並且,,亦可對上述精銅或無氧銅,合計含有10~2000質 量ppm之選自Ag、Zn、Sn及P之群中之1種以上的添加元素。藉由添加此等添加元素,使彎折性或彎曲性提高之{100}方位的比率增加。 Moreover, the above-mentioned refined copper or oxygen-free copper may also contain 10 to 2000 masses in total. One or more additive elements selected from the group consisting of Ag, Zn, Sn, and P in an amount of ppm. By adding these additional elements, the ratio of the {100} orientation in which the bending property or the bendability is improved is increased.

若上述元素之合計量未達10質量ppm,則存在銅箔之彎曲性降低之情況;若上述元素之合計量超過2000質量ppm,則存在導電率之降低變得顯著之情況。 When the total amount of the above elements is less than 10 ppm by mass, the bendability of the copper foil may be lowered. When the total amount of the above elements exceeds 2000 ppm by mass, the decrease in electrical conductivity may be remarkable.

尤其若使之含有10~500質量ppm之此等添加元素,則能夠進一步提高彎折性或彎曲性。又,若使之含有500~2000質量ppm之此等添加元素,則會變硬,從而於製造CCL時更不易產生褶皺。 In particular, if these additive elements are contained in an amount of 10 to 500 ppm by mass, the bending property or the bendability can be further improved. Further, when these additive elements are contained in an amount of 500 to 2,000 ppm by mass, they become hard, and wrinkles are less likely to occur in the production of CCL.

<厚度> <thickness>

將銅箔之厚度設為3~8μm。厚度未達3μm之銅箔難以製造。又,銅箔之厚度超過8μm者由於不易產生於本發明中成為課題之褶皺,故為對象之外。 The thickness of the copper foil was set to 3 to 8 μm. Copper foil having a thickness of less than 3 μm is difficult to manufacture. Further, since the thickness of the copper foil exceeds 8 μm, it is less likely to cause wrinkles which are a problem in the present invention, and therefore it is outside the target.

<鍍覆層> <plating layer>

亦可於銅箔之單面或兩面,形成有由選自Cu、Ni、Zn及Co之群中之1種以上的元素構成之鍍覆層。 A plating layer made of one or more elements selected from the group consisting of Cu, Ni, Zn, and Co may be formed on one surface or both surfaces of the copper foil.

此等鍍覆層於與樹脂積層而製造CCL時會提升與樹脂之密接性,通常設為粗化鍍覆層。 When such a plating layer is laminated with a resin to produce CCL, the adhesion to the resin is improved, and it is usually a roughened plating layer.

<銅箔之表面性狀> <surface properties of copper foil>

於依照JIS-B0601(2013),自沿著TD方向之50mm之長度之表面的剖面曲線以輪廓曲線濾波器λ c=2mm,輪廓曲線濾波器λ f=25mm之條件將短波長及長波長成分截止而求得波紋曲線時,波紋曲線要素之平均長度Wsm為2.5~20.0mm。 According to JIS-B0601 (2013), the profile curve of the surface from the length of 50 mm in the TD direction is a short-wavelength and long-wavelength component under the condition of a contour curve filter λ c = 2 mm and a profile curve filter λ f = 25 mm. When the ripple curve is obtained by the cutoff, the average length Wsm of the ripple curve element is 2.5 to 20.0 mm.

此處,TD(Transverse Direction,橫向)方向係與MD方向(Machine Direction,縱向)成直角之方向。於壓延銅箔之情形時,TD方向係壓延直角方向。 Here, the TD (Transverse Direction) direction is a direction at right angles to the MD direction (machine direction). In the case of rolling a copper foil, the TD direction is rolled in a right angle direction.

而且,如圖2所示,沿著銅箔2之表面之沿循TD方向之50mm的長度L,測量表示高度輪廓之剖面曲線S。再者,於在銅箔之單面形成有上述鍍覆層之情形時,測量未被鍍覆之銅箔表面的剖面曲線S。於在銅箔之兩面形成有上述鍍覆層之情形時,首先,對兩個鍍覆層表面藉由下述方法測量算術平均粗糙度Ra,測量Ra較小之面的剖面曲線S。 Further, as shown in Fig. 2, a profile curve S indicating a height profile was measured along the length L of the surface of the copper foil 2 which was 50 mm in the TD direction. Further, in the case where the plating layer is formed on one surface of the copper foil, the profile curve S of the surface of the copper foil which is not plated is measured. In the case where the plating layer is formed on both surfaces of the copper foil, first, the arithmetic mean roughness Ra is measured on the surfaces of the two plating layers by the following method, and the profile S of the surface having a small Ra is measured.

剖面曲線係於JIS-B0601-2013「3.1.5」記載之「剖面曲線(primary profile)」。 The profile curve is based on the "primary profile" described in "3.1.5" of JIS-B0601-2013.

繼而,「波紋曲線」係以如下方式求得。首先,自剖面曲線藉由低通濾波器去除波長較輪廓曲線濾波器λ c:2mm(其中,λ c係於JIS-B0601-2013「3.1.1.2」記載之「定義粗糙度成分與波紋成分之邊界的濾波器」)短之表面粗糙度之成分。進而,自此曲線藉由高通濾波器去除波長較輪廓曲線濾波器λ f:25mm(其中,λ f係於JIS-B0601-2013「3.1.1.3」記載之「定義波紋成分與較其長之波長成分之邊界的濾波器」)長之表面粗糙度之成分,而獲得波紋曲線。 Then, the "corrugation curve" is obtained in the following manner. First, the self-section curve is removed by a low-pass filter to remove the wavelength profile curve filter λ c: 2 mm (where λ c is defined in JIS-B0601-2013 "3.1.1.2" "Defining the roughness component and the ripple component. The filter of the boundary") is the composition of the short surface roughness. Further, since the curve is removed by the high-pass filter from the contour curve filter λ f: 25 mm (where λ f is defined in JIS-B0601-2013 "3.1.1.3", "Defining the ripple component and the longer wavelength The filter of the boundary of the component") has a long surface roughness component and a ripple curve is obtained.

波紋曲線要素之平均長度Wsm係於JIS-B0601-2013「4.3.1」記載之「輪廓曲線要素之平均長度(mean width of the profile elements)」。 The average length Wsm of the corrugated curve elements is based on "mean width of the profile elements" described in JIS-B0601-2013 "4.3.1".

波紋曲線要素之最大高度波紋Wz係於JIS-B0601-2013「4.1.3」記載之「輪廓曲線之最大高度(maximum height of profile)」。 The maximum height ripple Wz of the corrugated curve element is the "maximum height of profile" described in JIS-B0601-2013 "4.1.3".

粗糙度曲線係於JIS-B0601-2013「3.1.6」記載之「粗糙度曲線(roughness profile)」。 The roughness curve is the "roughness profile" described in JIS-B0601-2013 "3.1.6".

算術平均粗糙度Ra係於JIS-B0601-2013「3.1.6」記載之「輪廓曲線之算術平均高度(arithmetical mean deviation of the assessed profile)」。 The arithmetic mean roughness Ra is based on the "arithmetical mean deviation of the assessed profile" described in JIS-B0601-2013 "3.1.6".

最大高度粗糙度Rz係於JIS-B0601-2013「4.1.3」記載之「輪廓曲線之最大高度(maximum height of profile)」。 The maximum height roughness Rz is the "maximum height of profile" described in JIS-B0601-2013 "4.1.3".

藉由根據沿著TD方向之50mm之長度L之表面求得剖面曲線S,能夠檢測出成為褶皺之原因之銅箔的形狀。 By obtaining the profile curve S from the surface of the length L of 50 mm in the TD direction, the shape of the copper foil which is the cause of the wrinkles can be detected.

設為輪廓曲線濾波器λ c=2mm之原因在於:波長未達2mm之表面凹凸與褶皺不存在關聯。又,設為輪廓曲線濾波器λ f=25mm之原因在於:波長超過25mm之類的表面凹凸可被視為並非因銅箔之表面形狀引起之測量上之凹凸。又,波長超過25mm之類的表面凹凸與褶皺不存在關聯。 The reason why the contour curve filter λ c = 2 mm is set is that surface irregularities having a wavelength of less than 2 mm are not associated with wrinkles. Further, the reason why the contour curve filter λ f = 25 mm is that the surface unevenness such as a wavelength exceeding 25 mm can be regarded as a measurement unevenness which is not caused by the surface shape of the copper foil. Further, surface irregularities such as wavelengths exceeding 25 mm are not associated with wrinkles.

而且,藉由將波紋曲線要素之平均長度Wsm管理為2.5~20.0mm,於與樹脂貼合時變得不易於銅箔產生褶皺,從而提高生產性或良率。 Further, by managing the average length Wsm of the corrugated curve elements to 2.5 to 20.0 mm, it becomes less likely to wrinkle the copper foil when it is bonded to the resin, thereby improving productivity or yield.

此係於使用薄銅箔製造CCL時,於層壓法銅箔被夾於1對加熱輥,於雙帶式壓製法銅箔2被夾於各帶102a、102b間(參照圖1)而被熱壓接。此時銅箔若具有適度之波紋,則於加熱輥或各帶102a、102b與銅箔之間會出現間隙,此間隙成為空氣之通道。因此,認為於在進行熱壓接時於銅箔產生褶皺之力發揮作用時,銅箔自此間隙移動而將力分散,從而難以成為褶皺。 When the CCL is produced using a thin copper foil, the laminated copper foil is sandwiched between a pair of heating rolls, and the double-belt pressed copper foil 2 is sandwiched between the respective belts 102a and 102b (see FIG. 1). Hot crimping. At this time, if the copper foil has a moderate corrugation, a gap will occur between the heating roller or each of the belts 102a, 102b and the copper foil, and this gap becomes a passage of air. Therefore, it is considered that when the force of wrinkles in the copper foil acts during thermocompression bonding, the copper foil moves from the gap and disperses the force, so that it is difficult to become wrinkles.

如此,若為具有適度之長度之波紋的銅箔則抑制褶皺,但認 為波紋之週期不論小或大,均不會產生褶皺之抑制效果。 Thus, if it is a copper foil having a corrugation of a moderate length, wrinkles are suppressed, but it is recognized. Whether the period of the corrugation is small or large, no wrinkle suppression effect is produced.

即,Wsm未達2.5mm之類的小波紋,褶皺之抑制效果小,而Wsm超過20.0mm亦變得容易產生褶皺。 That is, the Wsm does not have a small corrugation such as 2.5 mm, and the wrinkle suppressing effect is small, and the Wsm is more likely to cause wrinkles when it exceeds 20.0 mm.

較佳為,波紋曲線之最大高度波紋Wz為0.00010~0.00200mm。 Preferably, the maximum height ripple Wz of the ripple curve is 0.00010 to 0.00200 mm.

認為若Wz為該範圍內適度之高度,則因與上述同樣之理由於加熱輥或各帶102a、102b與銅箔之間會出現間隙,而於在進行熱壓接時於銅箔產生褶皺之力發揮作用時,銅箔自此間隙移動而將力分散,從而難以成為褶皺。 It is considered that if Wz is a moderate height within the range, a gap may occur between the heating roller or each of the belts 102a and 102b and the copper foil for the same reason as described above, and wrinkles may occur in the copper foil during thermocompression bonding. When the force acts, the copper foil moves from this gap to disperse the force, making it difficult to become wrinkles.

如此,若為具有適度之高度之波紋的銅箔則會抑制褶皺,但認為波紋之高度不論小或大,均不會產生褶皺之抑制效果。 As described above, in the case of a copper foil having a corrugation of a moderate height, wrinkles are suppressed, but it is considered that the height of the corrugations is not small or large, and wrinkles are not suppressed.

即,Wz未達0.00010mm之類的小波紋,褶皺之抑制效果小,而Wz超過0.00200mm亦變得容易產生褶皺。 That is, Wz does not have a small corrugation such as 0.00010 mm, and the wrinkle suppressing effect is small, and when Wz exceeds 0.00200 mm, wrinkles are likely to occur.

較佳於自上述剖面曲線S以λ c=0.25mm將長波長成分截止而求得粗糙度曲線時,自該粗糙度曲線計算之算術平均粗糙度Ra為0.01~0.1μm,最大高度粗糙度Rz為0.1~0.8μm。 Preferably, when the long-wavelength component is cut off from the above-mentioned cross-sectional curve S by λ c=0.25 mm to obtain a roughness curve, the arithmetic mean roughness Ra calculated from the roughness curve is 0.01 to 0.1 μm, and the maximum height roughness Rz It is 0.1~0.8μm.

若Ra或Rz未達上述範圍,則存在銅箔表面過於平滑而與樹脂層之密接性降低之情形。若Ra或Rz超過上述範圍,則相對於銅箔之厚度(3~8μm)而言,Ra或Rz超過10%而變大,故而有銅箔之厚度之精度降低從而不適於CCL或FPC用途之情況。 When Ra or Rz does not reach the above range, the surface of the copper foil may be too smooth and the adhesion to the resin layer may be lowered. When Ra or Rz exceeds the above range, Ra or Rz exceeds 10% with respect to the thickness of the copper foil (3 to 8 μm), so that the thickness of the copper foil is lowered, and it is not suitable for CCL or FPC use. Happening.

再者,由於Ra及Rz亦根據上述剖面曲線S算出,故而Ra及Rz係沿著TD方向之值。 Further, since Ra and Rz are also calculated based on the above-described cross-sectional curve S, Ra and Rz are values along the TD direction.

本發明之壓延銅箔通常可於熱軋及表面研磨後反覆進行數 次(通常2次左右)冷軋及退火,繼而進行最後再結晶退火,然後,進行最後冷軋而製造成所需箔厚。進而,可於將銅箔除脂後,為確保與樹脂層之密接性,而於單面(與樹脂層之積層面)進行粗化鍍覆,進一步進行防銹處理,從而用於覆銅積層板。 The rolled copper foil of the present invention can usually be repeatedly subjected to hot rolling and surface grinding. The second (usually about 2 times) cold rolling and annealing, followed by the final recrystallization annealing, and then the final cold rolling to produce the desired foil thickness. Further, after the copper foil is degreased, in order to ensure adhesion to the resin layer, rough plating is performed on one side (the layer of the resin layer), and further rustproof treatment is performed to coat the copper layer. board.

再者,最後冷軋步驟之加工度越高,弛力退火可越輕,但各再結晶粒越容易變大。就此觀點而言,最後冷軋步驟之加工度,通常為95%以上99.9%以下,較佳為96%以上99%以下。 Furthermore, the higher the degree of processing in the final cold rolling step, the lighter the relaxation annealing, but the more easily the recrystallized grains become larger. From this point of view, the degree of processing of the final cold rolling step is usually 95% or more and 99.9% or less, preferably 96% or more and 99% or less.

又,亦可設為電解銅箔。 Further, it may be an electrolytic copper foil.

本發明之覆銅積層板係於樹脂層之兩面或單面積層具有上述特性之銅箔而成。樹脂層只要為具有可應用於印刷配線板等之特性者,則不受特別限制,例如可使用聚酯膜或聚醯亞胺膜、液晶聚合物(LCP)膜、鐵氟龍(註冊商標)膜、聚對酞酸乙二酯膜、聚萘二甲酸乙二酯(polyethylene naphthalate)膜等,用於FPC用途。 The copper clad laminate of the present invention is formed of a copper foil having the above characteristics on both sides of a resin layer or a single-layer layer. The resin layer is not particularly limited as long as it has characteristics applicable to a printed wiring board or the like, and for example, a polyester film or a polyimide film, a liquid crystal polymer (LCP) film, or Teflon (registered trademark) can be used. A film, a polyethylene terephthalate film, a polyethylene naphthalate film, or the like is used for FPC use.

樹脂層本身亦可為多層。又,可使用紙基材酚樹脂、紙基材環氧樹脂、合成纖維布基材環氧樹脂、玻璃布-紙複合基材環氧樹脂、玻璃布-玻璃不織布複合基材環氧樹脂及玻璃布基材環氧樹脂等,用於剛性PWB用途。 The resin layer itself may also be a plurality of layers. Further, a paper substrate phenol resin, a paper substrate epoxy resin, a synthetic fiber cloth substrate epoxy resin, a glass cloth-paper composite substrate epoxy resin, a glass cloth-glass non-woven composite substrate epoxy resin, and a glass can be used. Cloth substrate epoxy resin, etc., used for rigid PWB applications.

銅箔與樹脂之積層方法於用於剛性PWB用途之情形時可列舉如下方法:準備使樹脂含浸於玻璃布等基材並使樹脂硬化至半硬化狀態而成之預浸體,將銅箔重疊於預浸體並加熱加壓。於FPC之情形時,可將銅箔經由接著劑接著於聚醯亞胺膜等樹脂層,或者,在不使用接著劑下於高溫高壓下將銅箔積層接著而,製造覆銅積層板。 When a method of laminating a copper foil and a resin is used for a rigid PWB application, a method of preparing a prepreg in which a resin is impregnated into a substrate such as a glass cloth and hardening the resin to a semi-hardened state is prepared, and the copper foil is overlapped. In the prepreg and heat and pressure. In the case of FPC, a copper clad laminate can be produced by laminating a copper foil via an adhesive followed by a resin layer such as a polyimide film or by laminating a copper foil under high temperature and high pressure without using an adhesive.

例如,作為層壓處理之條件,如於日本專利特開2011-148192號公報 所記載般,可藉由以下述方法來製造:將預先塗佈有具有接著力之熱塑性聚醯亞胺之聚醯亞胺膜與銅箔重疊,將使之通過加熱輥等進行壓接之被稱為層壓法的方法,或將液體狀之樹脂塗佈於銅箔,於銅箔上使之乾燥之被稱為澆鑄法的方法。藉由此等方法獲得之可撓性覆銅積層板被稱為雙層可撓性覆銅積層板。又,亦可設為以環氧系等之接著劑將銅箔與聚醯亞胺膜接著而成之三層可撓性覆銅積層板。 For example, as a condition for lamination processing, as disclosed in Japanese Patent Laid-Open No. 2011-148192 As described above, it can be produced by a method in which a polyimide film having a thermoplastic polyimide having an adhesive force applied in advance is superposed on a copper foil, and is pressed by a heating roll or the like. A method called a lamination method, or a method in which a liquid resin is applied to a copper foil and dried on a copper foil is called a casting method. The flexible copper clad laminate obtained by such a method is called a double-layer flexible copper clad laminate. Further, a three-layer flexible copper clad laminate obtained by bonding a copper foil and a polyimide film to an adhesive such as an epoxy resin may be used.

樹脂(層)之厚度不受特別限制,一般使用9~50μm左右者。又,有時亦會使用樹脂之厚度為50μm以上之較厚者。樹脂之厚度之上限並無特別限制,但例如為150μm。 The thickness of the resin (layer) is not particularly limited, and generally about 9 to 50 μm is used. Further, a thicker resin having a thickness of 50 μm or more may be used. The upper limit of the thickness of the resin is not particularly limited, but is, for example, 150 μm.

本發明之覆銅積層板可用於各種可撓性印刷基板(印刷配線板(PWB))。作為印刷配線板,並無特別限制,例如就導體圖案之層數之觀點而言,可應用於單面PWB、雙面PWB、多層PWB(3層以上);就絕緣基板材料之種類之觀點而言,可應用於剛性PWB、可撓性PWB(FPC)、剛-撓性PWB。 The copper clad laminate of the present invention can be used for various flexible printed substrates (printed wiring boards (PWB)). The printed wiring board is not particularly limited. For example, from the viewpoint of the number of layers of the conductor pattern, it can be applied to a single-sided PWB, a double-sided PWB, or a multilayer PWB (three or more layers); and from the viewpoint of the type of the insulating substrate material. In other words, it can be applied to rigid PWB, flexible PWB (FPC), and rigid-flexible PWB.

[實施例1] [Example 1]

<壓延銅箔之製造> <Manufacture of rolled copper foil>

將添加有表1所示之組成之元素的精銅或無氧銅作為原料鑄造厚度100mm之鑄錠,於800℃以上進行熱軋至厚度10mm,並對表面之氧化皮進行表面研磨。然後,反覆進行冷軋與退火,獲得0.5mm之厚度之壓延板圈。 An ingot having a thickness of 100 mm was cast as a raw material by using copper or oxygen-free copper to which an element having the composition shown in Table 1 was added, and hot rolling was performed at 800 ° C or higher to a thickness of 10 mm, and the surface scale was surface-polished. Then, cold rolling and annealing were repeatedly performed to obtain a rolled plate ring having a thickness of 0.5 mm.

然後,於變為厚度20μm後之冷軋,藉由陶瓷燒結體之輥,且其軸向之表面之Wsm於2.5~20mm之間不同之壓延輥進行壓延。將此壓延輥之上述方向之表面的Ra設為0.04~0.1μm。 Then, cold rolling was carried out to a thickness of 20 μm, and rolling was performed by a calender roll having a Wsm of a ceramic sintered body and having a Wsm of an axial surface of 2.5 to 20 mm. The Ra of the surface of the rolling roll in the above direction was set to 0.04 to 0.1 μm.

再者,比較例1、3係於變為厚度20μm後之冷軋,將超硬輥用於壓延輥,最後加工成最後厚度。將比較例3之超硬輥之該方向之Ra設為0.03μm。 Further, Comparative Examples 1 and 3 were subjected to cold rolling to a thickness of 20 μm, and a super-hard roll was used for the calender roll, and finally processed into a final thickness. The Ra of the super-hard roll of Comparative Example 3 was set to 0.03 μm.

比較例2係於成為厚度20μm後之冷軋中,使用陶瓷燒結體之輥且其上述方向之表面之Wsm超過20mm的壓延輥。將此壓延輥之上述方向的Ra設為0.04~0.1μm。 In Comparative Example 2, a calender roll having a Wsm of a surface of the ceramic sintered body and having a Wsm of more than 20 mm in the above-described direction was used for the cold rolling after the thickness of 20 μm. The Ra in the above direction of the calender roll was set to 0.04 to 0.1 μm.

再者,表1之組成之欄之「OFC-100ppmAg」係指於JIS-H3100(C1020)之無氧銅OFC添加100質量ppm之Ag。又,「TPC-200ppmAg」係指於JIS-H3100(C1100)之精銅(TPC)添加200質量ppm之Ag。於其他添加量之情形時亦相同。 In addition, "OFC-100 ppmAg" in the column of the composition of Table 1 means that 100 mass ppm of Ag is added to the oxygen-free copper OFC of JIS-H3100 (C1020). In addition, "TPC-200 ppm Ag" means that 200 mass ppm of Ag is added to refined copper (TPC) of JIS-H3100 (C1100). The same is true for other additions.

<銅箔之表面性狀> <surface properties of copper foil>

對於所獲得之銅箔(無鍍覆)之表面,如於圖2所示般,使用三維形狀測量機(其恩斯公司製造,製品名:單觸發3D形狀測量機VR-3200)測量剖面曲線S。繼而,藉由測量機內置之軟體,獲取Wsm、Wz。 For the obtained copper foil (unplated) surface, as shown in Fig. 2, a profile curve was measured using a three-dimensional shape measuring machine (manufactured by Ens, product name: single trigger 3D shape measuring machine VR-3200) S. Then, Wsm and Wz are obtained by the software built in the measuring machine.

剖面曲線S、波紋曲線、粗糙度曲線係依照JIS-B0601(2013)以上述方式求得。Wsm、Wz亦依照JIS-B0601(2013)以上述方式求得。 The profile curve S, the ripple curve, and the roughness curve were obtained in the above manner in accordance with JIS-B0601 (2013). Wsm and Wz are also obtained in the above manner in accordance with JIS-B0601 (2013).

Ra、Rz係使用接觸式表面粗糙度計(小坂研究所製造,製品名:SE-3400)進行測量。Ra、Rz係依照JIS-B0601(2013)以上述方式計算。 Ra and Rz were measured using a contact surface roughness meter (manufactured by Otaru Research Institute, product name: SE-3400). Ra and Rz were calculated in the above manner in accordance with JIS-B0601 (2013).

<銅箔之厚度> <thickness of copper foil>

藉由重量法,以IPC-TM-650為準則測量。 It is measured by the gravimetric method using IPC-TM-650 as a guideline.

<層壓時有無產生褶皺> <Whether or not wrinkles are formed when laminating>

使用熱輥層壓機,分別將銅箔重疊於聚醯亞胺膜之兩面並輸送至1對 加熱輥間,進行熱壓接並層壓,製作雙層雙面覆銅積層板。將輥之加熱溫度設為350℃,將輥之壓接壓力、銅箔與聚醯亞胺膜之輸送速度及張力值設為相同。 Using a hot roll laminator, the copper foil was superposed on both sides of the polyimide film and transported to 1 pair. The heating rolls were thermocompression bonded and laminated to form a double-sided double-sided copper clad laminate. The heating temperature of the rolls was set to 350 ° C, and the pressure of the rolls and the conveying speeds and tension values of the copper foil and the polyimide film were set to be the same.

目視熱壓接後之雙層雙面覆銅積層板中之正面及背面之銅箔有無褶皺,以如下基準評價。只要評價為◎、○,則能夠有效地抑制於層壓時產生褶皺。 The front and back copper foils in the double-sided double-sided copper clad laminate after thermocompression bonding were visually observed for wrinkles, and were evaluated on the following basis. When the evaluation is ◎ or ○, it is possible to effectively suppress wrinkles during lamination.

◎:於正面及背面之任一者之銅箔均未產生褶皺 ◎: no wrinkles were formed on the copper foil on either the front side or the back side

○:根據光之照射方法,於正面及背面之任一者產生能夠以目視確認之淺的褶皺 ○: According to the light irradiation method, a shallow wrinkle that can be visually confirmed is produced on either the front side or the back side.

×:無論光之照射方法如何,於正面及背面之至少任一者產生明顯能夠以目視確認之褶皺 ×: Regardless of the method of irradiating light, at least one of the front side and the back side is made to have a wrinkle that can be visually confirmed

<彎曲性> <bending>

首先,於銅箔之單面,進行以下之粗化處理鍍覆(國際專利公開2013108414)。 First, the following roughening treatment is performed on one side of the copper foil (International Patent Publication 2013108414).

粗化處理鍍覆:三元系銅-鈷-鎳合金鍍覆 Roughening plating: ternary copper-cobalt-nickel alloy plating

鍍浴組成:Cu10~20g/L、Co1~10g/L、Ni1~10g/L Composition of plating bath: Cu10~20g/L, Co1~10g/L, Ni1~10g/L

鍍浴pH:1~4 Plating bath pH: 1~4

鍍覆溫度:40~50℃ Plating temperature: 40~50°C

鍍覆電流密度:20~30A/dm2 Plating current density: 20~30A/dm 2

鍍覆電解時間:1~5秒 Plating electrolysis time: 1~5 seconds

繼而,分別使上述銅箔之粗化處理面與市售之厚度12.5μm之聚醯亞胺膜(宇部興產公司製造之UPILEX-VT)之兩面重合而積層後, 進行熱壓接而製作雙面CCL。對於此CCL,於將單面之銅箔全部以蝕刻去除後,於相反面之銅箔藉由蝕刻形成電路寬度0.3mm、間隔寬度0.3mm之電路圖案。然後,將厚度25μm之覆蓋層膜被覆於此電路,加工成FPC。 Then, the roughened surface of the copper foil was superposed on both sides of a commercially available polyimide film of 12.5 μm (UPILEX-VT manufactured by Ube Industries, Ltd.), and then laminated. A double-sided CCL is produced by thermocompression bonding. In this CCL, after all the copper foils of one side were removed by etching, a circuit pattern having a circuit width of 0.3 mm and a space width of 0.3 mm was formed by etching on the copper foil on the opposite side. Then, a cover film having a thickness of 25 μm was coated on the circuit to be processed into an FPC.

對於此FPC,進行滑動彎曲試驗而評價彎曲性。具體而言,使用滑動試驗機(應用技研產業股份有限公司製造之TK-107型),將滑動半徑r(mm)於實施例9設為r=4mm,於其他實施例及比較例設為r=0.72mm,於任一情形時均以滑動速度均為120次/分鐘使FPC彎曲。 For this FPC, a sliding bending test was performed to evaluate the bendability. Specifically, the sliding radius r (mm) was set to r = 4 mm in Example 9 using a slide tester (TK-107 model manufactured by Applied Technology Co., Ltd.), and r was set in other examples and comparative examples. = 0.72 mm, in either case, the FPC was bent at a sliding speed of 120 times/min.

以如下基準評價。只要為評價為◎、○,則彎曲性優異。 The evaluation was based on the following criteria. When the evaluation is ◎ or ○, the flexibility is excellent.

◎:與試驗前相比,銅箔之電路之電阻增加5%時之彎曲次數為10萬次以上 ◎: Compared with before the test, the bending resistance of the circuit of the copper foil increased by 5% when the number of bending times was 100,000 times or more.

○:與試驗前相比,銅箔之電路之電阻增加10%時之彎曲次數為10萬次以上 ○: The number of bends when the resistance of the circuit of the copper foil is increased by 10% is 100,000 times or more as compared with that before the test.

×:與試驗前相比,銅箔之電路之電阻增加10%時之彎曲次數未達10萬次 ×: The number of bends when the resistance of the circuit of the copper foil is increased by 10% is less than 100,000 times compared with before the test.

<密接性> <Adhesiveness>

與用於上述彎曲性之評價之方法相同地,製作雙面CCL。對於此CCL,於將單面之銅箔全部以蝕刻去除後,於相反面之銅箔形成下述電路圖案。然後,根據於JIS-C6471(1995)規定之「銅箔之剝離強度」之方法A測量,評價密接性。再者,雙面CCL之尺寸及形成於銅箔之電路圖案,係依照JIS-C6471(1995)之附圖4。 A double-sided CCL was produced in the same manner as the method for evaluating the above bendability. For this CCL, after all the copper foils of one side were removed by etching, the following circuit pattern was formed on the copper foil of the opposite side. Then, the adhesion was evaluated according to the method A of "peeling strength of copper foil" prescribed in JIS-C6471 (1995). Further, the size of the double-sided CCL and the circuit pattern formed on the copper foil are in accordance with Fig. 4 of JIS-C6471 (1995).

以如下基準評價。只要評價為○,則彎曲性優異。 The evaluation was based on the following criteria. When the evaluation is ○, the flexibility is excellent.

○:0.7kN/m以上 ○: 0.7kN/m or more

×:未達0.7kN/m ×: not up to 0.7kN/m

將所獲得之結果示於表1。 The results obtained are shown in Table 1.

如根據表1可知,於Wsm為2.5~20.0mm之各實施例之情形時,即便厚度薄,仍能抑制製造CCL時於層壓處理中銅箔產生褶皺。又,CCL之彎曲性、密接性亦優異。 As can be seen from Table 1, in the case of each of the examples in which Wsm is 2.5 to 20.0 mm, wrinkles of the copper foil in the lamination process during the production of CCL can be suppressed even when the thickness is thin. Moreover, CCL is also excellent in flexibility and adhesion.

尤其於Wz為0.00010~0.00200mm之實施例1~16之情形時,相較於其他實施例,能夠進一步有效地抑制於層壓處理中銅箔產生褶皺。 In particular, in the case of Examples 1 to 16 in which Wz was 0.00010 to 0.00200 mm, it was possible to further effectively suppress wrinkles of the copper foil in the lamination process as compared with the other examples.

另一方面,於Wsm未達2.5mm之比較例1、3、及Wsm超過20.0mm之比較例2之情形時,於CCL製造時之層壓處理中在在銅箔顯著地產生褶皺。 On the other hand, in the case of Comparative Examples 1 and 3 in which Wsm was less than 2.5 mm and Comparative Example 2 in which Wsm exceeded 20.0 mm, wrinkles were remarkably generated in the copper foil in the lamination process at the time of CCL production.

又,於比較例3之情形時,Ra及Rz未達規定範圍,銅箔表面過於平坦從而密接性亦降低。 Further, in the case of Comparative Example 3, Ra and Rz did not reach the predetermined range, and the surface of the copper foil was too flat, and the adhesion was also lowered.

2‧‧‧銅箔之表面 2‧‧‧The surface of copper foil

L‧‧‧沿著TD方向之50mm之長度 L‧‧‧ Length of 50mm along the TD direction

S‧‧‧剖面曲線 S‧‧‧ section curve

TD‧‧‧橫向 TD‧‧ transverse

MD‧‧‧縱向 MD‧‧‧ portrait

Claims (10)

一種銅箔,係含有以質量率計為99.90%以上之銅且厚度為3~8μm的銅箔,其特徵在於:於依照JIS-B0601(2013),自沿著TD方向之50mm之長度之表面的剖面曲線以輪廓曲線濾波器λ c=2mm,輪廓曲線濾波器λ f=25mm之條件將短波長及長波長成分截止而求得波紋曲線時,波紋曲線要素之平均長度Wsm為2.5~20.0mm。 A copper foil comprising a copper foil having a mass ratio of 99.90% or more and a thickness of 3 to 8 μm, which is characterized by a surface having a length of 50 mm from the TD direction in accordance with JIS-B0601 (2013). When the profile curve is λ c=2 mm and the profile curve filter λ f=25 mm, the short-wavelength and long-wavelength components are cut off to obtain a ripple curve. The average length Wsm of the ripple curve element is 2.5 to 20.0 mm. . 如申請專利範圍第1項之銅箔,其中,該波紋曲線之最大高度波紋Wz為0.00010~0.00200mm。 The copper foil of claim 1, wherein the maximum height ripple Wz of the corrugation curve is 0.00010 to 0.00200 mm. 如申請專利範圍第1項之銅箔,其係壓延銅箔,合計含有10~2000質量ppm之選自Ag、Zn、Sn及P之群中之1種以上的添加元素。 The copper foil of the first aspect of the invention is a rolled copper foil containing a total of one or more additive elements selected from the group consisting of Ag, Zn, Sn, and P in an amount of 10 to 2000 ppm by mass. 如申請專利範圍第2項之銅箔,其係壓延銅箔,合計含有10~2000質量ppm之選自Ag、Zn、Sn及P之群中之1種以上的添加元素。 The copper foil of the second aspect of the invention is a rolled copper foil, which contains a total of one or more additive elements selected from the group consisting of Ag, Zn, Sn, and P in an amount of 10 to 2000 ppm by mass. 如申請專利範圍第1至4項中任一項之銅箔,其於單面或兩面,形成有由選自Cu、Ni、Zn及Co之群中之1種以上的元素構成之鍍覆層。 The copper foil according to any one of claims 1 to 4, wherein a plating layer composed of one or more elements selected from the group consisting of Cu, Ni, Zn, and Co is formed on one or both sides. . 如申請專利範圍第1至4項中任一項之銅箔,其中,於自該剖面曲線以λ c=0.25mm將長波長成分截止而求得粗糙度曲線時,自該粗糙度曲線計算之算術平均粗糙度Ra為0.01~0.1μm,最大高度粗糙度Rz為0.1~0.8μm。 The copper foil according to any one of claims 1 to 4, wherein, when the long-wavelength component is cut off from the profile curve by λ c = 0.25 mm, a roughness curve is obtained, and the roughness curve is calculated. The arithmetic mean roughness Ra is 0.01 to 0.1 μm, and the maximum height roughness Rz is 0.1 to 0.8 μm. 如申請專利範圍第5項之銅箔,其中,於自該剖面曲線以λ c=0.25mm將長波長成分截止而求得粗糙度曲線時,自該粗糙度曲線計算之算術平均粗糙度Ra為0.01~0.1μm;最大高度粗糙度Rz為0.1~0.8μm。 The copper foil according to claim 5, wherein the arithmetic mean roughness Ra calculated from the roughness curve is obtained by cutting off the long wavelength component from the profile curve by λ c = 0.25 mm 0.01~0.1μm; the maximum height roughness Rz is 0.1~0.8μm. 一種覆銅積層板,係將申請專利範圍第1至7項中任一項之銅箔與樹脂層積層而成。 A copper clad laminate obtained by laminating a copper foil and a resin layer according to any one of claims 1 to 7. 一種可撓性印刷基板,係使用申請專利範圍第8項之覆銅積層板於該銅箔形成電路而成。 A flexible printed circuit board formed by forming a circuit using the copper clad laminate of claim 8 in the copper foil. 一種電子機器,其使用有申請專利範圍第9項之可撓性印刷基板。 An electronic machine using the flexible printed circuit board of claim 9 of the patent application.
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