TW201728726A - Adhesive sheet for fixing polishing pad having a substrate, a polishing pad side adhesive layer and a fixed plate side adhesive layer - Google Patents

Abstract

The present invention provides an adhesive sheet having a substrate, a first adhesive layer disposed on the first side of the aforementioned substrate (polishing pad side adhesive layer) and a second adhesive layer disposed on the second side of the aforementioned substrate (fixed plate side adhesive layer) for fixing polishing pad. The adhesive agent forming both of the aforementioned first and second adhesive layers is an acrylic acid-based adhesive agent, wherein, at least the acrylic acid-based adhesive agent forming the aforementioned second adhesive layer is an adhesive agent S, and the adhesive agent S contains 3 parts or more by weight and 40 parts or less by weight of polymerized rosin-based tackifying resin relative to 100 parts by weight of acrylic polymer.

Description

Adhesive sheet for polishing pad fixing

The present invention relates to an adhesive sheet for fixing a polishing pad. The present application claims priority based on Japanese Patent Application No. 2015-234111, filed on Nov. 30, 2015, the entire disclosure of Into this specification.

The high surface smoothness of glass or tantalum wafers for liquid crystals, hard disks, etc. is generally achieved by grinding. The polishing pad used in the above polishing is usually mounted on a fixing plate of a polishing apparatus using a double-sided adhesive tape. Patent Literatures 1 and 2 are listed as documents of the prior art which disclose the use of an adhesive sheet as a polishing pad fixing method. [Prior Art Document] [Patent Document 1] Japanese Patent Application Publication No. 2012-57135 (Patent Document 2) Japanese Patent Application Publication No. 2012-102165

[Problems to be Solved by the Invention] An adhesive sheet (adhesive sheet for fixing a polishing pad) for mounting and fixing a polishing pad on a polishing apparatus fixing plate (hereinafter sometimes simply referred to as "fixing plate") is required to have a pair Both the polishing pad and the platen have good performance. Further, in order to peel off the polishing pad which is deteriorated by use and replace it with a new one, the adhesive sheet for polishing pad fixing is required to have a property of easily peeling the polishing pad after use. However, from the viewpoints of improving the productivity and reducing the cost, it is difficult to fix the polishing pad by the prior art in the case where the use time (durable time) of the polishing pad is further extended to reduce the replacement frequency of the polishing pad. Adhesive sheets are used to meet the above requirements. For example, in order to fix the polishing pad with good reliability for a longer period of time, it is required to adhere the sheet to the polishing pad more firmly by using the fixing plate without significantly impairing the ease of peeling. The present invention has been made in view of the above-described conventional matters, and an object thereof is to provide an adhesive sheet for fixing a polishing pad capable of firmly fixing a polishing pad to a fixed plate. [Technical means for solving the problem] According to the present invention, an adhesive sheet for fixing a polishing pad is provided. The adhesive sheet is configured to have a base material, a first adhesive layer provided on the first surface of the base material, and a double-sided adhesive sheet provided on the second adhesive layer on the second surface of the base material. The adhesive surface of the first adhesive layer is a surface to be adhered to the polishing pad. The adhesive surface of the second adhesive layer is to be adhered to the surface of the polishing device. The adhesive constituting the first adhesive layer (hereinafter also referred to as "polishing pad side adhesive") is an acrylic adhesive. The adhesive constituting the second adhesive layer (hereinafter also referred to as "fixing side adhesive") is also an acrylic adhesive. Further, at least the acrylic adhesive constituting the second adhesive layer (fixing side adhesive) is the adhesive S. In one aspect, the adhesive S is an acrylic adhesive containing 3 parts by weight or more and 40 parts by weight or less of the polymerized rosin-based tackifying resin based on 100 parts by weight of the acrylic polymer. The adhesive sheet thus constituted can have good adhesion to the fixing plate and workability in replacing the polishing pad by having the second adhesive layer (fixing side adhesive layer) composed of the above-mentioned adhesive S. Further, by forming the first adhesive layer (the pad side adhesive layer) with an acrylic adhesive, the first adhesive layer can be satisfactorily adhered to the polishing pad. Therefore, according to the present invention, there is provided an adhesive sheet for fixing a polishing pad which is suitable for use in fixing a polishing pad to a fixing plate and which is also suitable for extending the use time of the polishing pad. In a preferred aspect of the technology disclosed herein, the monomer component constituting the acrylic polymer in the adhesive S contains n-butyl (meth)acrylate and has a carbon number of 6 to 9 at the ester terminal. Alkyl alkyl (meth)acrylate. With the adhesive S of such a composition, the adhesive force and the holding force can be appropriately balanced. Further, since the adhesive S of the above composition is also suitable for the low-temperature adhesive force and the holding force, it is preferable to carry out the first adhesive surface and the second adhesive surface which are each composed of the adhesive S. In another preferred embodiment of the technique disclosed herein, the monomer component constituting the acrylic polymer in the adhesive S contains 40% by weight or more and 95% by weight or less of n-butyl (meth)acrylate. With the adhesive S of such a composition, the adhesive force and the holding force can be appropriately balanced. Further, since the adhesive S of the above composition is also suitable for the low-temperature adhesive force and the holding force, it is preferable to carry out the first adhesive surface and the second adhesive surface which are each composed of the adhesive S. In another preferred embodiment of the technique disclosed herein, the monomer component constituting the acrylic polymer in the adhesive S contains 1% by weight or more and 5% by weight or less of a carboxyl group-containing monomer. The adhesive S of such a composition is suitable for both low-temperature adhesion and retention. Therefore, it is preferable to carry out the aspect in which the first adhesive surface and the second adhesive surface are each composed of the adhesive S. In another preferred embodiment of the technology disclosed herein, the monomer component constituting the acrylic polymer in the adhesive S contains a hydroxyl group-containing monomer. The adhesive S of such a composition is suitable for both low-temperature adhesion and retention. Therefore, it is preferable to carry out the aspect in which the first adhesive surface and the second adhesive surface are each composed of the adhesive S. The technique disclosed herein can be preferably carried out in such a manner that the above-mentioned adhesive S is crosslinked by an isocyanate crosslinking agent. With the adhesive S of such a composition, the adhesive force and the holding force can be appropriately balanced. Further, the adhesive layer composed of the above-mentioned adhesive S tends to exhibit good anchoring property to the substrate. This method is preferable from the viewpoint of preventing the residual of the paste when the adhesive sheet is separated from the polishing pad after use. In the adhesive sheet disclosed herein, preferably, the low-temperature adhesive force F1 of the adhesive surface (pad side adhesive surface) of the first adhesive layer is the adhesive surface of the second adhesive layer (fixing side adhesive surface) The adhesion force F2 is 0.7 times or more (for example, more than 1.0 times). It is preferable in view of the workability in the case where the adhesive sheet is peeled off from the fixed disk together with the polishing pad after use. This method is particularly meaningful when the polishing pad fixed by the above adhesive sheet is a hard (for example, a hard amine based) polishing pad, or a large-area polishing pad or the like. In the technique disclosed herein, it is preferable that the acrylic adhesive (the fixing side adhesive) constituting the second adhesive layer and the acrylic adhesive (the pad side adhesive) constituting the first adhesive layer are both The embodiment of the adhesive S is implemented. According to the aspect in which the fixing side adhesive and the pad side adhesive are all the adhesive S, the adhesive sheet having the use of the polishing pad tends to be deformed substantially uniformly on both surfaces of the adhesive sheet. This method is preferable from the viewpoint of workability when the adhesive sheet is peeled off from the fixed disk together with the used polishing pad. In the aspect in which the fixing side adhesive and the side adhesive are all the adhesive S, the fixing side adhesive and the side adhesive may be the same composition of the adhesive S, or may be an adhesive S of different compositions. The technique disclosed herein can be preferably carried out in such a manner that the acrylic adhesive constituting the first adhesive layer and the acrylic adhesive constituting the second adhesive layer are the same composition of the adhesive S. The adhesive sheet of the above configuration tends to be deformed in the same manner on both surfaces of the adhesive sheet due to the deterioration of the adhesive sheet used with the polishing pad. This method is preferable from the viewpoint of workability when the adhesive sheet is peeled off from the fixed disk together with the used polishing pad. According to the present specification, there is provided an abrasive member comprising a polishing pad and any of the adhesive sheets disclosed herein, and an adhesive surface (pad side adhesive surface) of the first adhesive layer of the adhesive sheet is adhered to the polishing pad. According to the polishing member having the above configuration, the polishing pad can be firmly fixed to the fixing plate by adhering the bonding surface (fixing side adhesive surface) of the second adhesive layer of the adhesive sheet to the polishing device fixing plate. . The above-mentioned polishing member (the polishing pad to which the adhesive sheet is attached) can be obtained by crimping the first adhesive surface of any of the adhesive sheets disclosed herein to the polishing pad. Therefore, according to the present specification, as another aspect of the present invention, a method of manufacturing a polishing pad with an adhesive sheet comprising a first adhesive surface pressure of any of the adhesive sheets disclosed herein is provided. It is connected to a polishing pad (typically crimped at a temperature of, for example, less than 40 ° C at normal temperature).

Hereinafter, preferred embodiments of the present invention will be described. Further, those matters necessary for the implementation of the present invention other than those specifically mentioned in the present specification can be understood by those skilled in the art based on the teachings of the invention and the technical common sense at the time of application. The present invention can be implemented based on the contents disclosed in the present specification and common technical knowledge in the art. In the following drawings, members and portions that perform the same functions are denoted by the same reference numerals, and overlapping descriptions may be omitted or simplified. Further, the embodiments described in the drawings are modeled to clearly illustrate the present invention, and do not accurately represent the size or scale of the adhesive sheet actually provided as a product. In the present specification, "adhesive" means a state of being a soft solid (viscose elastomer) in a temperature range around room temperature, and having a property of simply adhering to the properties of the adherend by pressure. The so-called adhesives, as defined in "CA Dahlquist, "Adhesion: Fundamental and Practice", McLaren & Sons, (1966), p. 143", in general, can have a complex tensile modulus E *(1Hz)<10 ⁷ Dyne/cm ² A material of a nature (typically a material having the above properties at 25 ° C). The adhesive in the art disclosed herein can be understood as a constituent of a solid component (nonvolatile component) or an adhesive layer of the adhesive composition. In the present specification, the "base polymer" of the adhesive means the main component of the rubbery polymer contained in the adhesive. The above rubbery polymer means a polymer exhibiting rubber elasticity in a temperature range around room temperature. In the present specification, the term "main component" means a component having a content of more than 50% by weight, unless otherwise specified. In the present specification, the "acrylic polymer" refers to a monomer containing a monomer unit derived from a monomer having at least one (meth)acryl fluorenyl group in one molecule as a monomer unit constituting the polymer. Hereinafter, a monomer having at least one (meth) acrylonitrile group in one molecule is also referred to as an "acrylic monomer". Therefore, the acrylic polymer in the present specification is defined as a polymer containing a monomer unit derived from an acrylic monomer. A typical example of the acrylic polymer is an acrylic polymer in which the ratio of the acrylic monomer in all the monomer components used in the synthesis of the acrylic polymer is more than 50% by weight. In addition, in the present specification, "(meth)acryl fluorenyl group" generally refers to an acryloyl group and a methacryl fluorenyl group. Similarly, "(meth)acrylate" generally refers to acrylate and methacrylate, and "(meth)acrylic" generally refers to acrylic acid and methacrylic acid. <Application of Adhesive Sheet> The adhesive sheet disclosed herein has a double-sided adhesive layer on which the first adhesive layer and the second adhesive layer are respectively disposed on both sides (the first side and the second side) of the substrate. a form of a sheet which is formed by adhering an adhesive surface of the first adhesive layer to a polishing pad to form an abrasive member (a polishing pad to which an adhesive sheet is attached) or for fixing the polishing pad to another member (typically Adhesive sheet for the grinding device. Here, the polishing pad refers to a member used for polishing the object to be polished, and is a polishing pad including a polishing force applied to the object to be polished by relative movement while pressing the object to be polished (sometimes also called It is the concept of both a polishing cloth and a polishing pad (sometimes called a back pad) that supports the object to be polished. The adhesive sheet disclosed herein can be used for fixing the polishing cloth or for fixing the back pad. The material of the polishing pad as the object to be adhered to the adhesive sheet disclosed herein is not particularly limited, and may be, for example, a urethane foam (foamed polyurethane) system or a polyolefin foam. Foamed polyolefin) and other foamed resin-based polishing pads, non-foamed resin-based polishing pads, non-woven fabric-based polishing pads, and the like. It may be a polishing pad having a laminate structure comprising at least one layer of the above polishing pad. The adhesive sheet disclosed herein can be preferably used for the fixing of a urethane foam-based polishing pad. There is no particular limitation, and the adhesive sheet disclosed herein can be preferably applied to, for example, a density of 0.3 g/cm. ³ ~1.2 g/cm ³ (typically 0.4 g/cm ³ ~1.0 g/cm ³ The urethane foam is a polishing pad. The hardness of the above polishing pad (JIS K6400-2 (2004) A method) is not particularly limited. The adhesive sheet disclosed herein can be preferably used, for example, in the case of the above-mentioned polishing pad having a hardness of 60 to 120 N (typically 70 to 100 N) (in the case of a urethane foam-based polishing pad). Also known as the fixation of a hard amine based polishing pad. Furthermore, the polishing pad may be a polishing pad in which abrasive grains are fixed in the pad. A preferred application of the adhesive sheet disclosed herein is shown in FIG. The adhesive sheet 1 includes a substrate 15 , a first adhesive layer 11 disposed on one surface (first surface) of the substrate 15 , and a second adhesive disposed on the other surface (second surface) of the substrate 15 . Agent layer 12. The adhesive surface (first adhesive surface) 11A of the first adhesive layer 11 is adhered to the back surface 30B of the polishing pad 30. Thereby, the polishing member (the polishing pad with the adhesive sheet) 90 including the polishing pad 30 and the adhesive sheet 1 adhered to the polishing pad 30 is formed. The adhesive surface (second adhesive surface) 12A of the second adhesive layer 12 is adhered to the surface 50A of the polishing apparatus fixing plate 50 provided in the polishing apparatus 40. In this manner, the polishing pad 30 is fixed to the polishing apparatus fixing plate 50 via the adhesive sheet 1. That is, the polishing member 90 is fixed to the polishing apparatus fixing plate 50. The polishing using the polishing pad 30 as described above can be performed, for example, by squeezing the object to be polished (not shown) to the fixed state while rotating the rotating shaft A and supplying the polishing liquid (not shown). The polishing surface 30A of the polishing pad 30 on the polishing apparatus fixing plate 50. Further, for example, it is possible to hold one surface of an object to be polished (not shown) on the polishing pad 30 by suction or the like, and press a polishing pad (abrasive cloth) (not shown) to the polishing. The other side of the object. After a particular period of use, the polishing pad 30 is removed from the polishing apparatus plate 50 (typically removed between the polishing device plate 50 and the second bonding surface 12A) and replaced with a new one. <Example of Structure of Adhesive Sheet> The adhesive sheet (which may be in the form of a strip-like dimension) disclosed herein may be, for example, a form of a double-sided adhesive sheet having a cross-sectional structure as shown in Fig. 2 . The double-sided adhesive sheet 1 includes a base material 15 and a first adhesive layer 11 and a second adhesive layer 12 which are respectively supported on both surfaces of the base material 15. More specifically, the first adhesive layer 11 and the second adhesive layer 12 are provided on the first surface 15A and the second surface 15B of the substrate 15 (both non-releasable). As shown in FIG. 2, the double-sided adhesive sheet 1 before use (before being adhered to the adherend) may be a form in which the release liner 21 which is a peeling surface on both the front surface 21A and the back surface 21B overlaps and is wound into a spiral shape. . In the double-sided adhesive sheet 1 of the above form, the surface (second adhesive surface 12A) of the second adhesive layer 12 is protected by the front surface 21A of the release liner 21, and the surface of the first adhesive layer 11 (first adhesive surface) 11A) is protected by the back surface 21B of the release liner 21. Alternatively, the first adhesive surface 11A and the second adhesive surface 12A may be separately protected by two separate release liners. From the viewpoint of improving productivity, the adhesive sheet disclosed herein is preferably an adhesive sheet having a size suitable for a size of a polishing pad or a polishing device having a large size. Examples of such an adhesive sheet include an adhesive sheet having a width of 600 mm or more (typically 1050 mm or more) and an adhesive sheet adhered to a polishing pad having the above width. With the increase in the size (width) of the polishing pad, the requirement to reduce the frequency of replacement of the polishing pad tends to become stronger, so that the significance of the technique disclosed herein becomes large. The upper limit of the width of the adhesive sheet or the polishing pad to which the adhesive sheet is adhered is not particularly limited, and is usually 3,000 mm or less, and typically 2,500 mm or less. <Substrate> The substrate constituting the adhesive sheet disclosed herein is not particularly limited, and for example, a polyolefin such as a polyethylene (PE) film, a polypropylene (PP) film or an ethylene-propylene copolymer film can be appropriately selected and used. A plastic film such as a polyester film such as a film or a polyethylene terephthalate (PET) film or a polyvinyl chloride film; and foaming such as polyurethane foam, polyethylene foam, and polychloroprene foam. a foam sheet obtained from a variety of fibrous materials (may be natural fibers such as hemp, cotton, polyester, synthetic fibers such as vinylon, semi-synthetic fibers such as acetate fibers, etc.) obtained separately or blended. Cloth and non-woven fabric (for the meaning of paper such as Japanese paper, Daolin paper (upper paper)); metal foil such as aluminum foil and copper foil; As the plastic film (generally, a non-porous plastic film which is different from the concept of woven or non-woven fabric), any of an unstretched film and an extended (uniaxially stretched or biaxially stretched) film can be used. The substrate may be subjected to a surface treatment such as coating of a primer, corona discharge treatment or the like (typically for improving the anchoring property of the adhesive to the substrate). A plastic film can be preferably used as the substrate from the viewpoints of the workability of the polishing pad or the operability of the polishing pad to which the adhesive sheet is adhered (the polishing pad to which the sheet is attached), that is, the polishing member. Among them, as a preferred plastic film, a polyester film (typically a PET film) can be cited. Here, the operability of the polishing member includes, for example, workability of adhering the polishing member to the fixing plate, or peeling workability when the polishing pad after use is removed from the fixing plate together with the adhesive sheet. The thickness of the substrate may be appropriately selected depending on the purpose, and is generally about 10 mm or more (typically about 25 mm or more, for example, about 50 mm or more) and about 300 mm or less (typically about 250 mm or less, for example, About 200 mm or less). In a preferred embodiment, a substrate having a thickness of about 50 mm or more and about 100 mm or less (for example, a plastic film, typically a PET film) can be preferably used. The adhesive sheet using the substrate of such a thickness can be an adhesive sheet which is easily adhered to a larger polishing pad by utilizing the rigidity of the substrate. Further, the polishing pad (abrasive member) to which such an adhesive sheet is adhered can be an abrasive member which has good handleability even when it is larger. <Acrylic Adhesive> In the adhesive sheet disclosed herein, the adhesive constituting the first adhesive layer (the pad side adhesive) and the adhesive constituting the second adhesive layer (the fixing side adhesive) are both Acrylic adhesive. Here, the "acrylic adhesive" means an adhesive containing an acrylic polymer as a base polymer. The composition of the pad side adhesive may be the same as or different from the composition of the fixing side adhesive. In a typical aspect of the adhesive sheet disclosed herein, at least the second adhesive layer (the fixing side adhesive layer) is made of an acrylic adhesive which satisfies specific conditions in the first adhesive layer and the second adhesive layer. Composition S. The adhesive constituting the first adhesive layer (the pad side adhesive layer) and the adhesive constituting the fixing side adhesive layer may all be the adhesive S. In this case, the fixing side adhesive and the pad side adhesive may be the same adhesive S, or may be different adhesives selected from the adhesives satisfying the conditions of the adhesive S. (Acrylic polymer) The acrylic polymer preferably contains, for example, an alkyl (meth)acrylate as a main monomer, and further contains a monomer raw material of a sub-monomer having copolymerization property with the main monomer ( Polymer of monomer component). Here, the main single system means a component which accounts for more than 50% by weight of the monomer composition in the above monomer raw material. As the alkyl (meth)acrylate, for example, a compound represented by the following formula (1) can be preferably used. CH ₂ =C(R ¹ )COOR ² (1) Here, R in the above formula (1) ¹ It is a hydrogen atom or a methyl group. In addition, R ² It is an alkyl group having 1 to 20 carbon atoms. Hereinafter, the range of such a carbon number is sometimes expressed as "C" _1-20 "." From the viewpoint of the storage elastic modulus of the adhesive, etc., it is preferably R ² For C _1-14 (eg C _2-10 , typically C _4-9 An alkyl (meth) acrylate, more preferably R ¹ Is a hydrogen atom and R ² For C _4-9 Alkyl acrylate (hereinafter also referred to as acrylic acid C) _4-9 Alkyl ester). As R ² For C _1-14 Examples of the alkyl (meth) acrylate having an alkyl group include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, and isopropyl (meth)acrylate. N-butyl (meth)acrylate, amyl (meth)acrylate, hexyl (meth)acrylate, heptyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, (meth)acrylic acid Octyl ester, isooctyl (meth)acrylate, decyl (meth)acrylate, isodecyl (meth)acrylate, decyl (meth)acrylate, isodecyl (meth)acrylate, (methyl) Lauryl acrylate, tetradecyl (meth) acrylate, and the like. These alkyl (meth)acrylates may be used alone or in combination of two or more. Preferred examples of the alkyl (meth)acrylate include n-butyl acrylate (BA) and 2-ethylhexyl acrylate (2EHA). The ratio of the alkyl (meth)acrylate to all the monomer components used for the synthesis of the acrylic polymer is preferably about 70% by weight or more, more preferably about 85% by weight or more, still more preferably about 90%. More than weight%. The upper limit of the ratio of the alkyl (meth)acrylate is not particularly limited, but is usually preferably set to be about 99.5% by weight or less (for example, about 99% by weight or less). Alternatively, the acrylic polymer may be an acrylic polymer obtained by substantially polymerizing only an alkyl (meth)acrylate. In addition, in the use of acrylic acid C _4-8 In the case where an alkyl ester is used as a monomer component, acrylic acid C in an alkyl (meth)acrylate contained in the monomer component _4-8 The ratio of the alkyl ester is usually set to about 50% by weight or more, preferably about 70% by weight or more, more preferably about 90% by weight or more, still more preferably about 95% by weight or more (typically about 99%). Weight% to about 100% by weight). A preferred example of the acrylic polymer is an acrylic polymer having at least BA copolymerized therein (that is, an acrylic polymer having a BA content of more than 0% by weight in all monomer components). An adhesive containing such a BA copolymer acrylic polymer as a base polymer can be suitably used as an adhesive for polishing pad adhesion in combination with adhesion and cohesiveness. The technique disclosed herein can be preferably carried out in such a manner that at least the base polymer constituting the adhesive of the fixing side adhesive layer (adhesive S) is a BA copolymer acrylic polymer. The copolymerization ratio of BA in the above-mentioned BA copolymer acrylic polymer can be set to, for example, about 30% by weight or more of all the monomer components, and is preferably set to about 40% by weight or more. In view of the adhesion and cohesiveness of the adhesive for fixing the polishing pad, the copolymerization ratio of BA in the BA copolymer acrylic polymer can be set to all the monomer components. About 50% by weight or more (typically about 50% by weight, for example, about 60% by weight or more) may be set to about 65% by weight or more. Further, the copolymerization ratio of BA in the BA copolymer acrylic polymer may be 100% by weight of the total monomer component, usually about 99.5% by weight or less, preferably about 99% by weight or less (typically about 98%). Weight% or less, for example, 95% by weight or less). As a preferred aspect of the technology disclosed herein, the monomer component of at least the base polymer constituting the fixing side adhesive (adhesive S) is contained in an amount of about 40% by weight or more and about 95% by weight or less (for example, A state of BA of about 60% by weight or more and about 95% by weight or less. Further, the copolymerization ratio of the above BA may be, for example, about 60% by weight or more and about 90% by weight or less. As another preferred aspect of the technology disclosed herein, the monomer component of at least the base polymer constituting the fixing side adhesive (adhesive S) contains BA and R in the above formula (1). ² For C _6-9 Alkyl alkyl (meth)acrylate (ie, (meth)acrylic acid C _6-9 The aspect of the alkyl ester). As (meth)acrylic acid C _6-9 As the alkyl ester, it is preferred to use a (meth)acrylic acid C having a glass transition temperature (Tg) lower than that of BA described later. _6-9 Alkyl ester. As such (meth)acrylic acid C _6-9 Specific examples of the alkyl esters include 2EHA and isodecyl acrylate. For example, an acrylic polymer containing a composition of BA and 2EHA as the monomer component is preferred. In the acrylic polymer of the composition, the amount of 2EHA used is usually set to be less than the amount of BA. For example, the total amount of BA and 2EHA is set to 100% by weight, and the ratio of 2EHA is preferably set to It is about 45% by weight or less, typically about 40% by weight or less, for example, about 35% by weight or less, and more preferably about 5% by weight or more, and typically about 10% by weight or more, for example, about 20% by weight. %the above. Contains BA and (meth)acrylic acid C _6-9 In the aspect of the alkyl ester, the ratio of the total amount of the monomer components may be, for example, 70% by weight or more, and typically 80% by weight or more, preferably 85% by weight or more. It can be 90% by weight or more. Further, the ratio of the total amount to the total monomer components may be 100% by weight, typically 99.5% by weight or less, preferably 99% by weight or less, and for example, 98% by weight or less. The monomer (other monomer) other than the above may be copolymerized in the acrylic polymer in the technology disclosed herein without significantly impairing the effects of the present invention. The above other monomer can be used, for example, for the purpose of adjusting the glass transition temperature (Tg) of the acrylic polymer, adjusting the adhesion property, and the like. For example, examples of the monomer capable of improving the cohesive force or heat resistance of the adhesive include a sulfonic acid group-containing monomer, a phosphate group-containing monomer, a cyano group-containing monomer, a vinyl ester, and an aromatic vinyl group. Compounds, etc. Preferred examples of these include vinyl esters. Specific examples of the vinyl esters include vinyl acetate (VAc), vinyl propionate, and vinyl laurate. Among them, VAc is preferred. Further, as a functional group capable of introducing a functional group capable of forming a crosslinking group into an acrylic polymer or capable of contributing to an increase in adhesion, a monomer having a hydroxyl group (OH group) and a monomer having a carboxyl group may be mentioned. , an acid anhydride group-containing monomer, a guanamine group-containing monomer, an amine group-containing monomer, a ruthenium group-containing monomer, an epoxy group-containing monomer, (meth) propylene morpholine, ethylene Ethers and the like. As a preferable example of one of the acrylic polymers in the technology disclosed herein, an acrylic polymer in which a carboxyl group-containing monomer is copolymerized as the other monomer may be mentioned. As the carboxyl group-containing monomer, acrylic acid (AA), methacrylic acid (MAA), carboxyethyl (meth)acrylate, carboxypentyl (meth)acrylate, itaconic acid, maleic acid, and fumar can be exemplified. Acid, crotonic acid, isocrotonic acid, etc. Among them, preferred examples of the carboxyl group-containing monomer include AA and MAA. These may be used alone or in combination of two or more. As another preferable example of the acrylic polymer in the technology disclosed herein, an acrylic polymer in which a hydroxyl group-containing monomer is copolymerized as the other monomer may be mentioned. Examples of the hydroxyl group-containing monomer include 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 3-hydroxypropyl (meth)acrylate, and (meth)acrylic acid. Hydroxyalkyl (meth)acrylate such as 2-hydroxybutyl ester or 4-hydroxybutyl (meth)acrylate; polypropylene glycol mono(meth)acrylate; N-hydroxyethyl(meth)acrylamide . Among them, a preferred hydroxyl group-containing monomer is a linear hydroxyalkyl (meth)acrylate having an alkyl group of 2 to 4 carbon atoms. Preferable specific examples include 2-hydroxyethyl acrylate and 4-hydroxybutyl acrylate. The acrylic polymer to which the hydroxyl group-containing polymer is copolymerized in this manner is preferably used in combination with an isocyanate crosslinking agent to be described later. The above "other monomers" may be used alone or in combination of two or more. The total content of the other monomers is not particularly limited. For example, it may be set to about 40% by weight or less (typically about 0.001% by weight or more and about 40% by weight or less) of all the monomer components, and more preferably set to about 30% by weight or less (typically about 0.01% by weight or more and about 30% by weight or less) may be, for example, about 10% by weight or less (typically about 0.1% by weight or more and about 10% by weight or less). When a monomer having a carboxyl group is used as the other monomer, the content thereof is not particularly limited, and is usually set to be about 0.1% by weight or more based on the entire monomer component (for example, about 0.2% by weight or more, and typically about 0.5% by weight or more, preferably about 1% by weight or more, more preferably, it is set to about 10% by weight or less (for example, about 8% by weight or less, typically about 5% by weight or less, preferably about 4% by weight). % below) is more appropriate. The technique disclosed herein can be preferably carried out in such a manner that at least the monomer component of the base polymer constituting the fixing side adhesive (adhesive S) contains about 0.5% by weight or more and about 5% by weight or less (more preferably It is a carboxyl group-containing monomer of about 1% by weight or more and about 4% by weight or less. In the case where a hydroxyl group-containing monomer is used as the other monomer, the content thereof is not particularly limited, and is usually set to about 0.001% by weight or more based on the entire monomer component (for example, about 0.01% by weight or more, and typically about 0.02). More preferably, it is more than 10% by weight or less (preferably about 5% by weight or less, typically about 2% by weight or less, for example, about 1% by weight or less). The content of the hydroxyl group-containing monomer can be set to about 0.5% by weight or less of the total monomer component (for example, about 0.2% by weight or less, and further about 0.1% by weight or less). The technique disclosed herein can be preferably carried out in such a manner that at least the monomer component of the base polymer constituting the fixing side adhesive (adhesive S) contains about 0.01% by weight or more and about 1% by weight or less (more preferably It is a hydroxyl group-containing monomer of about 0.02% by weight or more and about 0.2% by weight or less. The copolymerization composition of the acrylic polymer is suitably designed such that the glass transition temperature (Tg) of the polymer is about -15 ° C or less (typically about -70 ° C or more and about -15 ° C or less). It is preferably about -25 ° C or less (for example, about -65 ° C or more and about -25 ° C or less), more preferably about -40 ° C or less (for example, about -65 ° C or more and about -40 ° C or less). From the viewpoint of improving the adhesiveness at low temperature of the adhesive or the adhesion to the polishing pad, it is preferred to adjust the Tg of the acrylic polymer to be equal to or less than the above upper limit. The Tg of the acrylic polymer can be adjusted by appropriately changing the monomer composition (i.e., the kind of the monomer used for the synthesis of the polymer, or the amount ratio used). Here, the Tg of the acrylic polymer refers to the Tg obtained by the Fox equation based on the composition of the monomer component used in the synthesis of the polymer. The Fox formula is as follows, and is a relationship between the Tg of the copolymer and the glass transition temperature Tgi of the homopolymer obtained by separately polymerizing the monomers constituting the copolymer. 1/Tg=Σ(Wi/Tgi) Further, in the above Fox formula, Tg represents the glass transition temperature (unit: K) of the copolymer, and Wi represents the weight fraction of the monomer i in the copolymer (weight basis) Copolymerization ratio), Tgi represents the glass transition temperature (unit: K) of the homopolymer of monomer i. As the glass transition temperature of the homopolymer used in the calculation of Tg, the values described in the publicly known materials are used. For example, regarding the monomers listed below, the following values are used as the glass transition temperature of the homopolymer of the monomer. 2-ethylhexyl acrylate-70°C butyl acrylate-55°C 2-hydroxyethyl acrylate-15°C 4-hydroxybutyl acrylate-40°C Vinyl acetate 32°C Acrylic acid 106°C Methacrylic acid 228°C About the above example The glass transition temperature of the homopolymer of the monomer other than the monomer is the value described in "Polymer Handbook" (3rd edition, John Wiley & Sons, Inc, 1989). When a plurality of types of values are described in this document, the highest value is employed. In the above-mentioned Polymer Handbook, the monomer having a glass transition temperature of the homopolymer is not described, and the value obtained by the following measurement method is used (refer to Japanese Patent Laid-Open Publication No. 2007-51271). Specifically, 100 parts by weight of a monomer, 0.2 part by weight of azobisisobutyronitrile, and 200 parts by weight of ethyl acetate as a polymerization solvent are charged into a reactor equipped with a thermometer, a stirrer, a nitrogen gas introduction tube, and a reflux condenser. While stirring the nitrogen gas, it was stirred for 1 hour. The oxygen in the polymerization system was removed in this manner, and then the temperature was raised to 63 ° C and reacted for 10 hours. Then, the mixture was cooled to room temperature to obtain a homopolymer solution having a solid content concentration of 33% by weight. Then, the homopolymer solution was cast-coated on a release liner and dried to prepare a test sample (a sheet-like homopolymer) having a thickness of about 2 mm. The test sample was punched out into a disk shape of 7.9 mm in diameter, sandwiched by a parallel plate, and subjected to a shear strain of 1 Hz on one side using a viscoelasticity tester (ARES, manufactured by Rheometrics Co., Ltd.), and 5 ° C / minute on one side. The heating rate was measured in a shearing mode in a temperature range of -70 ° C to 150 ° C, and the peak top temperature of tan δ was taken as the Tg of the homopolymer. The method for obtaining the acrylic polymer is not particularly limited, and various polymerization methods known as a method for synthesizing an acrylic polymer can be suitably employed, such as a solution polymerization method, an emulsion polymerization method, a bulk polymerization method, a suspension polymerization method, or a photopolymerization method. For example, a solution polymerization method can be preferably used. As a monomer supply method at the time of solution polymerization, a batch method, a continuous supply (drop) method, a stepwise supply (drop) method, and the like for supplying all of the monomer raw materials at one time can be suitably employed. The polymerization temperature can be appropriately selected depending on the type of the monomer and solvent to be used, the type of the polymerization initiator, and the like, and can be, for example, about 20 ° C or higher (typically about 40 ° C or higher), and can be set to about 170. Below °C (typically below about 140 °C). The solvent (polymerization solvent) used in the solution polymerization can be appropriately selected from previously known organic solvents. For example, an aromatic compound selected from toluene and xylene (typically an aromatic hydrocarbon); an acetate such as ethyl acetate or butyl acetate; hexane, cyclohexane, methylcyclohexane or the like can be used. Aliphatic or alicyclic hydrocarbons; halogenated alkanes such as 1,2-dichloroethane; lower alcohols such as isopropyl alcohol (for example, one-carbon alcohols having 1 to 4 carbon atoms); third butyl methyl ether, etc. An ether; a ketone such as methyl ethyl ketone or acetone; or a solvent of any one or more, or a mixed solvent of two or more. The initiator to be used in the polymerization can be appropriately selected from previously known polymerization initiators depending on the kind of the polymerization method. For example, one type or two or more types of azo polymerization initiators such as 2,2'-azobisisobutyronitrile (AIBN) can be preferably used. Examples of other examples of the polymerization initiator include persulfate such as potassium persulfate; peroxide initiators such as benzamidine peroxide and hydrogen peroxide; and substituted ethane starting groups such as phenyl-substituted ethane. Agent; aromatic carbonyl compound; As another example of the polymerization initiator, a redox initiator which is a combination of a peroxide and a reducing agent can be mentioned. These polymerization initiators may be used alone or in combination of two or more. The polymerization initiator may be used in an amount conventionally used, for example, from about 0.005 parts by weight to about 1 part by weight (typically from about 0.01 part by weight to about 1%) per 100 parts by weight of the total monomer component. Select within the range of parts by weight. In the technique disclosed herein, the weight average molecular weight (Mw) of the acrylic polymer is not particularly limited and may be, for example, about 10×10. ⁴ Above and about 500×10 ⁴ the following. The Mw of the acrylic polymer is preferably about 20×10 from the viewpoint of appropriately adjusting the adhesion and cohesiveness suitable for the fixing use of the polishing pad. ⁴ Above (typically about 35×10 ⁴ The above), in addition, from the viewpoint of coating properties, etc., usually about 150 × 10 ⁴ The following (typically about 100×10 ⁴ The following, preferably less than about 70×10 ⁴ More preferably about 65×10 ⁴ Below, for example about 60×10 ⁴ The following) is more appropriate. Here, Mw means a value in terms of standard polystyrene obtained by GPC (gel permeation chromatography). As the GPC device, for example, the model name "HLC-8320GPC" (column: TSKgel GMH-H (S), manufactured by Tosoh Corporation) can be used. The above Mw can be preferably applied to an acrylic polymer having at least a fixing side adhesive (adhesive S). The base polymer of the disk side adhesive and the acrylic polymer of the pad side adhesive may each have the above Mw. (Tackifying Resin) The acrylic adhesive in the technique disclosed herein may contain a tackifying resin as needed in addition to the above acrylic polymer (base polymer). It is preferred that at least the fixing side adhesive (adhesive S) contains a tackifying resin. The fixing side adhesive and the pad side adhesive may each contain a tackifying resin. In this case, the type and amount of the tackifying resin contained in the fixing side adhesive may be the same as or different from the type and amount of the tackifying resin contained in the mat side adhesive. The content of the tackifying resin (the total content of the tackifying resin in the case of containing a plurality of tackifying resins) is not particularly limited. For example, it may be set to about 3 parts by weight or more, preferably about 5 parts by weight or more, more preferably about 9.5 parts by weight or more, and typically about 10 parts by weight or more, for example, based on 100 parts by weight of the acrylic polymer. About 15 parts by weight or more). Further, the content of the tackifier resin is usually usually about 50 parts by weight or less (typically about 45 parts by weight or less, for example, about 43 parts by weight or less), preferably about 100 parts by weight of the acrylic polymer. To be set to about 40 parts by weight or less (for example, about 40 parts by weight or less), it may be set to about 35 parts by weight or less. As the tackifier resin, a known variety selected from the group consisting of a rosin-based resin, a terpene resin, a modified terpene resin, a phenol resin, a petroleum resin, a styrene resin, a coumarone-indene resin, and a ketone resin can be used. One or more of the adhesive resins. The concept of the so-called rosin-based resin includes both rosin and rosin derivative resins. Examples of the rosin-based resin include unmodified rosin (raw rosin) such as gum rosin, wood rosin, and tall oil rosin; and modified rosin obtained by modification of the unmodified rosin by hydrogenation, disproportionation, polymerization, or the like. (Hydrogenated rosin, disproportionated rosin, polymerized rosin, other chemically modified rosin, etc.). The rosin derivative resin is typically a rosin derivative as described above. The concept of the so-called rosin-based resin includes derivatives of unmodified rosin and derivatives of modified rosin (including hydrogenated rosin, disproportionated rosin, and polymerized rosin). Examples of the rosin derivative resin include an unmodified rosin ester which is an ester of unmodified rosin and an alcohol, and an ester of modified rosin (hydrogenated rosin, disproportionated rosin, polymerized rosin, etc.) and an alcohol. a rosin ester such as a rosin ester; for example, an unsaturated fatty acid-modified rosin obtained by modifying a rosin with an unsaturated fatty acid; for example, an unsaturated fatty acid-modified rosin obtained by modifying a rosin ester with an unsaturated fatty acid. An ester; for example, a rosin alcohol obtained by reducing a carboxyl group of a rosin or the above various rosin derivatives (including rosin esters, unsaturated fatty acid-modified rosins, and unsaturated fatty acid-modified rosin esters); for example : a rosin or a metal salt of the above various rosin derivatives; a rosin phenol resin obtained by adding phenol and rosin (unmodified rosin, modified rosin, various rosin derivatives, etc.) under an acid catalyst and thermally polymerizing ;Wait. Examples of the terpene resin include polymers of terpenes (typically monoterpenes) such as a-pinene, b-pinene, d-limonene, l-limonene, and dipentene. It may be a homopolymer of a terpene or a copolymer of two or more terpenes. Examples of the homopolymer of a terpene include an a-pinene polymer, a b-pinene polymer, a pine oil polymer, and the like. Examples of the modified terpene resin include a modified terpene resin obtained by modifying the above terpene resin. Specifically, a styrene-modified terpene resin, a hydrogenated terpene resin, or the like can be exemplified. Examples of the phenol resin include a terpene phenol resin, a hydrogenated terpene phenol resin, and an alkyl phenol resin. The terpene phenol resin includes a copolymer of a terpene and a phenol compound (terpene-phenol copolymer resin), and a resin obtained by phenol-modifying a homopolymer or a copolymer of a terpene (phenol-modified oxime) Alkenyl resin) The concept of both. The hydrogenated terpene phenol resin refers to a resin having a structure obtained by hydrogenating such a terpene phenol resin. The alkylphenol resin is a resin obtained from an alkylphenol and formaldehyde, and examples thereof include a novolak type and a resol type. With regard to the adhesive sheet disclosed herein, at least the fixing side adhesive (adhesive S) contains a polymerized rosin-based tackifying resin. The fixing side adhesive and the pad side adhesive may each contain a polymeric rosin-based tackifying resin. The concept of the polymerized rosin-based tackifying resin herein includes a polymerized rosin and a polymerized rosin derivative as a polymerization modified product of unmodified rosin. Non-limiting examples of the above polymerized rosin derivative include: a polymerized rosin ester which is an ester of a polymerized rosin and an alcohol, an unsaturated fatty acid-modified polymerized rosin obtained by modifying a polymerized rosin with an unsaturated fatty acid, and a polymerized rosin. An unsaturated fatty acid modified polymeric rosin ester obtained by modifying an ester with an unsaturated fatty acid, and a polymeric rosin (including a polymerized rosin, a polymerized rosin ester, an unsaturated fatty acid modified polymeric rosin, and an unsaturated fatty acid modified polymeric rosin ester) a polymerized rosin alcohol obtained by subjecting a carboxyl group to a reduction treatment. In one aspect, as the polymerized rosin-based tackifying resin, a polymerized rosin ester which is an ester of a polymerized rosin and an alcohol can be preferably used. Examples of the alcohols include monohydric alcohols such as methanol and ethanol; glycols such as ethylene glycol, diethylene glycol, and propylene glycol; and trihydric alcohols such as glycerin, trimethylolethane, and trimethylolpropane; a tetrahydric alcohol such as pentaerythritol or diglycerin; a hexahydric alcohol such as dipentaerythritol; and the like. A preferred example of one of the polymerized rosin esters used in the technology disclosed herein is a pentaerythritol ester of a polymerized rosin. As a tackifier resin in the technique disclosed herein, the softening point is about 60 ° C or higher (typically about 80 ° C or higher, from the viewpoint of being suitable for adhesion and cohesiveness of a polishing pad fixing application). Preferably, the tackifying resin is preferably about 100 ° C or higher, more preferably about 110 ° C or higher, for example, about 120 ° C or higher, and the softening point is about 180 ° C or lower (preferably about 160 ° C or lower, more preferably A tackifying resin of about 150 ° C, for example, less than about 140 ° C, is suitable. In a preferred embodiment, a tackifying resin having a softening point of less than about 130 ° C (typically about 100 ° C or more and about less than 130 ° C, for example, about 120 ° C or more and about less than 130 ° C) may be employed. The adhesive sheet disclosed herein preferably contains at least a fixed side adhesive (preferably both a fixed side adhesive and a side adhesive) a polymerized rosin-based tackifying resin having the above softening point (for example, polymerization). The aspect of the rosin ester) was implemented. Further, the softening point of the tackifying resin can be measured based on the softening point test method (ring and ball method) prescribed in JIS K2207. The adhesive S in the technique disclosed herein (i.e., the adhesive constituting at least the fixing side adhesive layer, preferably the fixing side adhesive layer and the pad side adhesive layer) is relative to the acrylic polymer 100. It is preferred to contain about 3 parts by weight or more of the polymerized rosin-based tackifying resin in parts by weight. The amount of the polymerized rosin-based tackifying resin relative to 100 parts by weight of the acrylic polymer is preferably about 5 parts by weight or more (for example, 7) from the viewpoint of obtaining higher adhesion (for example, adhesion to the fixing plate). More preferably, it is about 9.5 parts by weight or more (typically about 10 parts by weight or more, for example, about 15 parts by weight or more). In addition, the amount of the polymerized rosin-based tackifying resin relative to 100 parts by weight of the acrylic polymer is usually set to be less than about 50 parts by weight, from the viewpoint of workability in peeling off the self-aligned polishing pad after use. It is preferably about 45 parts by weight or less, more preferably about 40 parts by weight or less (for example, about 40 parts by weight or less), and may be set to about 38 parts by weight or less, and may be further set to about 35 parts by weight or less. The adhesive sheet disclosed herein can be preferably subjected to an aspect in which the adhesive S contains about 5 parts by weight or more and about 40 parts by weight or less (more preferably about 9.5 parts by weight) based on 100 parts by weight of the acrylic polymer. The above-mentioned and less than 40 parts by weight, for example, about 15 parts by weight or more and about 38 parts by weight or less of the polymerized rosin-based tackifying resin. When the content of the polymerized rosin-based tackifying resin is set to the above range, it may be advantageous from the viewpoint of the adhesion of the polishing pad. Therefore, the technique disclosed herein can be preferably carried out in such a manner that the fixing side adhesive and the pad side adhesive are both adhesives S, and the above-mentioned adhesive S contains the above amount with respect to 100 parts by weight of the acrylic polymer. The polymerized rosin is a tackifying resin. The above-mentioned adhesive S may contain other tackifying resins in addition to the polymerized rosin-based tackifying resin. In this case, about 30% by weight or more (preferably about 50% by weight or more, more preferably about 70% by weight or more) of all the tackifying resins contained in the adhesive S is set as a polymerized rosin-based tackifying resin. More appropriate. The technique disclosed herein can be preferably carried out in such a manner that the adhesive S contains only one or two or more (typically one) polymeric rosin-based tackifying resins as the tackifying resin. (Crosslinking Agent) In the technique disclosed herein, the adhesive composition for forming an adhesive layer may contain a crosslinking agent as needed. That is, the adhesive constituting the adhesive layer may have a structure obtained by crosslinking with the above-mentioned crosslinking agent. The type of the crosslinking agent is not particularly limited, and a conventionally known crosslinking agent can be appropriately selected and used. Examples of such a crosslinking agent include an isocyanate crosslinking agent, an epoxy crosslinking agent, an oxazoline crosslinking agent, an aziridine crosslinking agent, a melamine crosslinking agent, and a peroxide system. Crosslinking agent, urea-based crosslinking agent, metal alkoxide crosslinking agent, metal chelate crosslinking agent, metal salt crosslinking agent, carbodiimide crosslinking agent, amine crosslinking agent, etc. . The crosslinking agent may be used alone or in combination of two or more. The amount of the crosslinking agent used is not particularly limited. For example, it may be set to be about 10 parts by weight or less, preferably about 0.001 part by weight or more (for example, about 0.01 part by weight or more) or about 10 parts by weight or less (for example, with respect to 100 parts by weight of the acrylic polymer). Within a range of about 5 parts by weight or less. An isocyanate crosslinking agent is preferably used in view of the viewpoint of the adhesion and cohesiveness suitable for the fixing use of the polishing pad or the anchoring property of the substrate (especially a plastic film substrate such as a PET film). . For example, it is preferred that at least the fixing side adhesive (adhesive S) is an adhesive obtained by crosslinking with an isocyanate crosslinking agent. As the isocyanate crosslinking agent, various polyfunctional isocyanates (referred to as compounds having an average of two or more isocyanate groups per molecule, including compounds having an isocyanurate structure) can be preferably used. As the polyfunctional isocyanate, one or two or more kinds selected from various isocyanate compounds (polyisocyanates) having two or more isocyanate groups in one molecule can be used. Examples of the polyfunctional isocyanate include aliphatic polyisocyanates, alicyclic polyisocyanates, and aromatic polyisocyanates. Specific examples of the aliphatic polyisocyanate include 1,2-ethylidene diisocyanate, 1,2-tetramethylene diisocyanate, 1,3-tetramethylene diisocyanate, and 1,4-four. Tetramethylene diisocyanate such as methylene diisocyanate; 1,2-hexamethylene diisocyanate, 1,3-hexamethylene diisocyanate, 1,4-hexamethylene diisocyanate, 1,5- Hexamethylene diisocyanate, hexamethylene diisocyanate such as hexamethylene diisocyanate, 1,6-hexamethylene diisocyanate or 2,5-hexamethylene diisocyanate; 2-methyl-1,5-pentane diisocyanate, 3 -Methyl-1,5-pentane diisocyanate, lysine diisocyanate, and the like. Specific examples of the alicyclic polyisocyanate include isophorone diisocyanate; cyclohexyl group such as 1,2-cyclohexyl diisocyanate, 1,3-cyclohexyl diisocyanate, and 1,4-cyclohexyl diisocyanate; Diisocyanate; 1,2-cyclopentyl diisocyanate, cyclopentyl diisocyanate such as 1,3-cyclopentyl diisocyanate; hydrogenated benzene dimethylene diisocyanate, hydrogenated toluene diisocyanate, hydrogenated diphenylmethane diisocyanate Hydrogenated tetramethylxylene diisocyanate, 4,4'-dicyclohexylmethane diisocyanate, and the like. Specific examples of the aromatic polyisocyanate include 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, 4,4'-diphenylmethane diisocyanate, and 2,4'-diphenylmethane. Diisocyanate, 2,2'-diphenylmethane diisocyanate, 4,4'-diphenyl ether diisocyanate, 2-nitrobiphenyl-4,4'-diisocyanate, 2,2'-diphenylpropane -4,4'-diisocyanate, 3,3'-dimethyldiphenylmethane-4,4'-diisocyanate, 4,4'-diphenylpropane diisocyanate, isophthalic diisocyanate, p-phenylene Isocyanate, naphthyl-1,4-diisocyanate, naphthalene-1,5-diisocyanate, 3,3'-dimethoxybiphenyl-4,4'-diisocyanate, benzenedimylene-1, 4-diisocyanate, benzene dimethylene-1,3-diisocyanate, and the like. As a preferable isocyanate type crosslinking agent, polyfunctional isocyanate which has an average of three or more isocyanate groups per molecule is illustrated. The trifunctional or higher isocyanate may be a difunctional or trifunctional or higher isocyanate polymer (typically a dimer or a trimer), a derivative (for example, a polyhydric alcohol and two or more polyfunctional isocyanates). Addition reaction product), polymer, and the like. For example, a dimer or a trimer of diphenylmethane diisocyanate, an isocyanurate form of hexamethylene diisocyanate (a trimer adduct of an isocyanurate structure), and a trihydroxy group are mentioned. A reaction product of methyl propane and toluene diisocyanate, a reaction product of trimethylolpropane and hexamethylene diisocyanate, a polyfunctional isocyanate such as polymethylene polyphenyl isocyanate, polyether polyisocyanate or polyester polyisocyanate. As a commercial item of the polyfunctional isocyanate, the product name "DURANATE TPA-100" manufactured by Asahi Kasei Chemical Co., Ltd., the product name "CORONATE L" manufactured by Tosoh Corporation, and the product name "CORONATE HL" manufactured by Tosoh Corporation are listed. The product name "CORONATE HK" manufactured by Tosoh Corporation, the trade name "CORONATE HX" manufactured by Tosoh Corporation, and the trade name "CORONATE 2096" manufactured by Tosoh Corporation. In the case of using an isocyanate crosslinking agent, the amount thereof to be used is not particularly limited, and for example, it may be set to about 10 parts by weight or less (preferably about 5 parts by weight or less, for example, about 3) based on 100 parts by weight of the acrylic polymer. In addition, it is usually about 0.01 part by weight or more (typically about 0.1 part by weight or more, preferably about 0.5 part by weight or more, more preferably about 1) per 100 parts by weight of the acrylic polymer. More preferably, the weight is more than, for example, about 1.5 parts by weight or more. By using an isocyanate-based crosslinking agent in the above range, it is possible to achieve an adhesive sheet for polishing pad fixing which is excellent in balance of special properties. (Other Ingredients) The adhesive disclosed herein may contain a leveling agent, a crosslinking agent, a crosslinking assistant, a plasticizer, a softener, a filler, a colorant (pigment, dye, etc.), an antistatic agent, as needed. Various additives in the field of adhesives such as anti-aging agents, ultraviolet absorbers, antioxidants, and light stabilizers. Regarding such various additives, previously known additives can be used by a conventional method. In one preferred embodiment, the adhesive may be a total amount of the acrylic polymer and the tackifying resin of about 90% by weight of the total weight of the adhesive (ie, the weight of the adhesive layer composed of the adhesive). A composition of % or more (typically about 90% by weight or more and 100% by weight or less). The total amount of the acrylic polymer and the tackifying resin in the above adhesive may be about 95% by weight or more based on the total weight of the adhesive (typically about 95% by weight and 100% by weight or less, for example, about 97.5 % by weight). Above and 100% by weight or less). In a preferred embodiment, the adhesive S may be a combination of an acrylic polymer and a polymeric rosin-based tackifying resin in an amount of about 90% by weight or more based on the total weight of the adhesive S (typically about 90% by weight). The composition of % or more and 100% by weight or less. The total amount of the acrylic polymer and the polymeric rosin-based tackifying resin in the adhesive S may be about 95% or more of the total weight of the adhesive S (typically about 95% by weight and 100% by weight or less, for example, About 97.5% by weight or more and 100% by weight or less). The adhesive sheet disclosed herein can be preferably embodied in the form of a fixing side adhesive layer and a pad side adhesive layer composed of the adhesive S of such a composition. (Formation of Adhesive Layer) In the technique disclosed herein, the form of the adhesive composition for forming the adhesive layer is not particularly limited, and for example, it may be an adhesive (adhesive component) containing the above composition in an organic solvent. The adhesive composition of the form (solvent type), the adhesive composition in which the adhesive is dispersed in an aqueous solvent (water-dispersible type, typically aqueous emulsion type), a hot-melt adhesive composition, and the like. From the viewpoints of coatability and freedom of selection of the substrate, a solvent-based or water-dispersible adhesive composition can be preferably used. A solvent-based adhesive composition is particularly preferred from the viewpoint of achieving higher adhesive properties. The solvent-based adhesive composition is typically prepared in the form of a solution containing the above components in an organic solvent. The above organic solvent can be appropriately selected from known or customary organic solvents (for example, the above-exemplified organic solvents as a solvent used in solution polymerization). The solvent-based adhesive composition is usually prepared to have a solid content (NV) of about 30% by weight or more (for example, about 40% by weight or more) and about 65% by weight or less (for example, about 55% by weight or less). More appropriate. When the NV is too low, the manufacturing cost is likely to be improved, and when the NV is too high, the workability such as coatability may be lowered. As a method of obtaining an adhesive sheet from an adhesive composition, various methods previously known can be applied. For example, a method of directly applying (typically coating) an adhesive composition to a substrate and drying it to form an adhesive layer (direct method) can be preferably employed. Further, the above-mentioned adhesive composition may be applied to a surface having good releasability (for example, a surface of a release liner, a back surface of a release substrate, etc.), and dried to form an adhesive on the surface. A method of transferring a layer of the adhesive onto a substrate (transfer method). For the application of the adhesive composition, for example, a gravure roll coater, a reverse roll coater, a roll coater, a dip roll coater, a bar coater, a knife coater, and a spray can be used. It is carried out by a known or conventional coating machine. From the viewpoint of promoting the crosslinking reaction and improving the production efficiency, it is preferred to dry the adhesive composition under heating. The adhesive layer is typically formed continuously, but may be formed into a regular or irregular pattern such as a dot or a stripe depending on the purpose and use. The thickness of the adhesive layer is not particularly limited, and is preferably about 10 mm or more (more preferably about 20 mm or more, and typically about 30 mm or more, for example, about 40 mm or more) from the viewpoint of exerting good adhesion. ). Further, when the thickness of the pressure-sensitive adhesive layer is too large, the holding force tends to decrease. In consideration of such a case, it is appropriate to set the thickness of the adhesive layer to about 300 mm or less (preferably about 150 mm or less, typically about 100 mm or less, for example, about 80 mm or less). The thickness of the first adhesive layer (the pad side adhesive layer) and the thickness of the second adhesive layer (the fixing side adhesive layer) may be the same or different. In a preferred aspect, the thickness of the first adhesive layer can be set to be at least 0.6 times the thickness of the second adhesive layer in order to provide a stronger adhesion to the polishing pad. That is, the ratio (T1/T2) of the thickness (T1) of the first adhesive layer to the thickness (T2) of the second adhesive layer can be made greater than 0.6. The thickness ratio (T1/T2) may be set to, for example, 1.0 or more (typically more than 1.0), preferably 1.2 or more. The thickness ratio (T1/T2) is usually set to 5.0 or less, and is preferably set to 4.0 or less, from the viewpoint that the pad and the platen are well adhered to each other and the thickness of the adhesive sheet is prevented from becoming excessive. (for example, 3.0 or less). The gel fraction of the adhesive layer is not particularly limited and may be, for example, about 1% by weight or more and about 60% by weight or less. The gel fraction is usually preferably about 3% by weight or more (more preferably about 5% by weight or more, and most preferably, from the viewpoint of adhesion and cohesiveness as an adhesive for fixing a polishing pad. It is about 10% by weight or more, for example, about 20% by weight or more, and preferably about 60% by weight or less (more preferably about 55% by weight or less, for example, about 50% by weight or less). The gel fraction of the adhesive can be adjusted depending on, for example, the composition or molecular weight of the acrylic polymer, whether or not a crosslinking agent is used, and the type and amount of use thereof. Furthermore, the upper limit of the gel fraction is in principle 100% by weight. Here, the gel fraction of the adhesive is obtained by wrapping a measurement sample of the weight W1 in a porous sheet made of tetrafluoroethylene resin and immersing it in ethyl acetate for one week at room temperature, and then drying the measurement sample. The weight W2 of the ethyl acetate insoluble component was measured, and W1 and W2 were substituted into the following formula: gel fraction [%] = W2 / W1 × 100. As the porous sheet made of the tetrafluoroethylene resin, a product name "NITOFLON (registered trademark) NTF1122" manufactured by Nitto Denko Corporation or its equivalent can be used. In a preferred aspect, the gel fraction G2 of the adhesive (the fixing side adhesive) constituting the second adhesive layer can be adjusted to be the adhesive (the pad side adhesive) constituting the first adhesive layer. The gel fraction G1 is approximately equal or higher. For example, the ratio (G2/G1) of the gel fraction G2 of the fixing side adhesive to the gel fraction G1 of the pad side adhesive can be set to 0.8 or more (for example, 0.9 or more), preferably 1.0 or more (typical). In the case of more than 1.0), it may be 1.1 or more (further than 1.2 or more). The upper limit of the ratio (G2/G1) is not particularly limited, and is usually set to 5.0 or less, and is preferably set to 4.0 or less (typically 3.0 or less). <Total Thickness of Adhesive Sheet> The total thickness of the adhesive sheet in the technique disclosed herein (the thickness of the adhesive sheet excluding the release liner) is not particularly limited. The thickness of the adhesive sheet can be set, for example, to about 50 μm or more (typically about 75 μm or more, preferably about 100 μm or more, more preferably about 120 μm or more), and can be set to, for example, about 500 μm or less. (Typically, it is about 450 μm or less, preferably about 400 μm or less, for example, about 350 μm or less). The adhesive sheet having the above total thickness can be, for example, an adhesive sheet which is easily adhered to a larger polishing pad. In addition, in the aspect of being applied to a larger polishing pad, it is possible to form a good workability when the polishing pad is adhered to the fixing plate, or when the polishing pad after use is peeled off from the fixing plate together with the adhesive sheet. Sheet. <Release liner> As the release liner disclosed herein, a conventional release paper or the like can be used without particular limitation. For example, as the substrate for the support (the object to be peeled off) constituting the release liner, various resin films, papers, cloths, rubber sheets, foam sheets, metal foils, and the like can be appropriately selected and used. A composite such as a sheet having a laminated structure of an olefin resin in a two-area layer of paper, or the like. The release treatment can be carried out by a conventional method using a known or conventional release treatment agent (for example, a release treatment agent such as a polyfluorene-based, fluorine-containing or long-chain alkyl group). For example, a release liner obtained by treating a forest paper having a PE resin in two areas with a polyfluorene-based release agent can be preferably used. Further, an olefin-based resin (for example, PE, PP, ethylene-propylene copolymer, PE/PP mixture) or a fluorine-containing polymer (for example, polytetrafluoroethylene, may be used without performing a release treatment on the surface of the substrate). A low adhesion substrate such as polyvinylidene fluoride is used as a release liner. Alternatively, a substrate after the release treatment of the low adhesion substrate may be used. The thickness of the release liner is set to be about 10 mm or more (for example, about 50 mm or more, typically about 60 mm or more) and about 300 mm or less (for example, about 200 mm or less, typically about 100 mm) from the viewpoint of workability and the like. More than 160 mm) is more appropriate. <Characteristics of Adhesive Sheet> The adhesive force F2 of the adhesive surface (fixing side adhesive surface) of the second adhesive layer of the adhesive sheet disclosed herein preferably exceeds 10 N/20 mm. The adhesion force F2 is preferably 11 N/20 mm or more, more preferably 12 N/20 mm or more (for example, 13 N/20 mm or more) from the viewpoint of more firmly fixing the polishing pad to the fixing plate. In addition, the adhesive force F2 is usually 30 N/20 mm or less, preferably 25 N/20 mm or less, from the viewpoint of workability when the polishing pad after use is separated from the adhesive sheet. . For the adhesive force F2, a 2 kg roller was reciprocated once in a 23 ° C, 50% RH environment, and the adhesive surface was pressure-bonded to the surface of a stainless steel (SUS) plate as a member to be placed, and left for 30 minutes. Then, the measurement was carried out under the conditions of a peeling angle of 180 degrees and a stretching speed of 300 mm/min in accordance with JIS Z0237. More specifically, the measurement was carried out in accordance with the method described in the examples below. The low-temperature adhesion force F1 of the adhesive surface (pad side adhesive surface) of the first adhesive layer of the adhesive sheet disclosed herein is preferably 8 N/20 mm or more. The adhesive having a higher low-temperature adhesion force F1 is excellent in adhesion to the surface of the adherend, and therefore tends to be a polishing pad (for example, a urethane foam such as a hard polyurethane-based polishing pad). The polishing pad) shows better adhesion. From the viewpoint of the above, the low-temperature adhesion force F1 is preferably 10 N/20 mm or more, more preferably 12 N/20 mm or more (for example, 14 N/20 mm or more). The upper limit of the low-temperature adhesion F1 is not particularly limited, and it is usually 30 N/20 mm or less, preferably 25 N/20 mm or less, in consideration of balance with other adhesive properties (for example, holding force). The low-temperature adhesion force F1 was measured in the same manner as the measurement of the adhesion force F2 except that the measurement environment was set to -10 °C. More specifically, the measurement can be carried out in accordance with the method described in the examples below. The adhesive sheet disclosed herein can be configured such that the low-temperature adhesive force F1 [N/20 mm] is 0.6 times or more (for example, 0.7 times or more) of the above-described adhesive force F2 [N/20 mm]. According to this configuration, it is possible to form an adhesive sheet which is excellent in workability when the adhesive sheet is peeled off from the polishing pad together with the polishing pad. For example, if the adhesion of the second adhesive surface to the fixing plate is too high compared to the adhesion of the first adhesive surface to the polishing pad, the first adhesive surface and the adhesive sheet are separated from the polishing pad by the self-aligning disk. Local warping occurs between the polishing pads, and in this portion, the peeling becomes unstable, and the paste residue may easily occur on the fixing plate. Alternatively, even if the polishing pad is peeled off from the fixing plate together with the adhesive sheet from one end of the polishing pad, the adhesive sheet may be detached from the polishing pad during the peeling operation, and the peeling workability may be lowered. It is configured such that the low-temperature adhesion force F1 is larger than the above-mentioned adhesion force F2, whereby it tends to be easy to customize the adhesive sheet together with the polishing pad while the first adhesive surface of the adhesive sheet is adhered to the polishing pad. Disc peeling. This is particularly useful when the polishing pad to be fixed is a hard urethane-based polishing pad or a large-area polishing pad. In a preferred aspect of the technology disclosed herein, the ratio of the low-temperature adhesion force F1 [N/20 mm] to the adhesion force F2 [N/20 mm] (F1/F2) can be set to 0.8 or more, more preferably It is 1.0 or more (typically more than 1.0, for example, 1.1 or more), and may be 1.2 or more. Further, the value obtained by subtracting the adhesive force F2 from the low-temperature adhesion force F1 (F1-F2) is preferably -5.0 N/20 mm or more, more preferably -3.0 N/20 mm or more, and typically more than 1.0 N/20. Mm, for example, 3.0 N/20 mm or more. The low-temperature adhesion force F1 and the adhesion force F2 may be, for example, the thickness of the adhesive layer, the copolymerization composition of the acrylic polymer (composition or composition ratio of the monomer component), the weight average molecular weight (Mw) of the acrylic polymer, and the tackifying resin. The type or amount of use, whether or not a crosslinking agent is used, the type or amount of the crosslinking agent used in the case of using a crosslinking agent, the gel fraction of the adhesive layer, and the like are adjusted. The adhesive sheet disclosed herein can be preferably embodied in such a manner that the fixing side adhesive and the side adhesive are all the adhesive S. If the polishing pad is fixed to the polishing device fixing plate by using such an adhesive sheet, the polishing liquid can be ground in an abrasive environment (for example, according to the composition of the polishing liquid used, acidic, alkaline, metal salt-containing, oxidizing agent, etc.) In the case where the adhesive sheet for pad fixation is in contact with the adhesive sheet, the adhesive sheet is deteriorated on both sides of the adhesive sheet in substantially the same manner. Therefore, for example, in the adhesive sheet designed such that the low-temperature adhesive force F1 and the adhesive force F2 satisfy a specific relationship as described above, even if the adhesive sheet is deteriorated in the polishing environment, it is difficult to make the relative relationship between the above F1 and F2. destroyed. It is easy to achieve a good workability in the case where the various types of polishing liquids are used to separate the adhesive sheet from the polishing pad after use, and this is preferable. The technique disclosed herein can be preferably carried out in the following manner. For example, the fixing side adhesive and the side adhesive are all adhesives S, and the side adhesive is thicker than the fixing side adhesive layer. (For example, the above thickness ratio (T1/T2) is more than 1.0 and 5.0 or less). In the adhesive sheet disclosed herein, the fixing side adhesive and the side adhesive may be the same composition of the adhesive S, or may be an adhesive S of a different composition. In a preferred embodiment, the same composition of the adhesive S can be used as the fixing side adhesive and the side adhesive. The adhesive sheet of such a configuration is preferable from the viewpoint of workability when the adhesive sheet is separated from the polishing pad after use. Here, the same composition of the fixing side adhesive and the mat side adhesive typically means that the copolymer composition of at least the acrylic polymer constituting the two adhesives is the same as the type and amount of the tackifying resin. In a preferred embodiment, the composition may be set such that both adhesives contain a crosslinking agent, and the types of the crosslinking agent are the same (more preferably, the crosslinking agent is used in the same amount). The adhesive sheet having the fixing side adhesive and the side adhesive formed on the both sides of the substrate by the same adhesive composition is the same as the adhesive S of the fixing side adhesive and the side adhesive. A typical example. The technique disclosed herein can be preferably carried out, for example, in such a manner that the fixing side adhesive and the pad side adhesive are the same composition of the adhesive S, and the pad side adhesive is more than the fixing side adhesive layer. Thick (for example, the above thickness ratio (T1/T2) is more than 1.0 and 5.0 or less). In a preferred embodiment of the adhesive sheet, at least the fixed side adhesive side (preferably both the fixed side adhesive side and the mat side adhesive side) has a holding force of 1 hour or more. According to the adhesive sheet having the above-described holding force, it tends to be able to withstand the stress caused by the grinding to better maintain the good fixing state of the polishing pad on the fixing plate. Here, the above-described holding force can be evaluated by the following holding force test: the adhesive surface of the evaluation target of the adhesive sheet is pressure-bonded to the phenol resin sheet as the adherend with a bonding area of 10 mm in width and 20 mm in length. It was allowed to stand under an environment of 40 ° C for 30 minutes, and then a load of 500 g was applied and left in the same environment for 1 hour. More specifically, the above-described holding force test can be carried out in accordance with the method described in the examples below. In the above-described holding force test, it is more preferable that the offset sheet (mm) of the adhesive sheet after the application of the load for 1 hour is 6 mm or less (for example, 5 mm or less, typically 4 mm or less). <Abrading Member> The polishing member (the polishing pad with an adhesive sheet) disclosed herein can be generally obtained by crimping the first adhesive face of any of the adhesive sheets disclosed herein to the polishing. The back of the mat. The adhesive sheet disclosed herein can be suitably adhered to the polishing pad by being subjected to the above-mentioned pressure bonding at normal temperature (for example, a temperature not heated to about 40 ° C or higher), thereby constituting the disclosed one. Grinding member. This is of particular interest in adhesive sheets of wide width (for example, widths of 600 mm or more and furthermore of 1050 mm or more) or abrasive members using correspondingly sized abrasive pads. EXAMPLES Hereinafter, some examples of the invention are described, but the invention is not intended to be limited to the examples shown in the examples. In addition, the "part" and "%" in the following description are weight basis unless otherwise specified. <Experimental Example 1> (Example 1) 70 parts of n-butyl acrylate (BA), 30 parts of 2-ethylhexyl acrylate (2EHA), 3 parts of acrylic acid (AA), and 4-hydroxybutyl acrylate were used as a monomer component. 0.05 parts of ester (4HBA), 0.08 parts of 2,2'-azobisisobutyronitrile (AIBN) as a polymerization initiator, and 150 parts of toluene as a polymerization solvent were charged with a stirrer, a thermometer, a nitrogen introduction tube, and reflux condensation. The reaction vessel of the apparatus and the dropping funnel was subjected to solution polymerization at 65 ° C for 8 hours to obtain a toluene solution of the acrylic polymer P1. The Mw of the above acrylic polymer P1 is 44×10 ⁴ . In the toluene solution of the acrylic polymer P1, 2 parts of an isocyanate crosslinking agent (product of Tosoh Corporation, trade name "CORONATE L") was added to 100 parts of the solid content component to prepare an acrylic adhesive composition. A1. A PET film having a thickness of 50 μm was prepared as a substrate. The adhesive composition A1 was applied to the first side of the substrate and dried to form a first adhesive layer having a thickness of 50 mm. A release liner (first release liner) which was subjected to a release treatment using a polyoxynitride-based release agent was bonded to the first adhesive layer. Then, a release liner (second release liner) having the same configuration as the first release liner is separately prepared, and the adhesive composition A1 is applied onto the surface of the second release liner, and dried to form a thickness. A second adhesive layer of 50 mm is used to transfer (transfer) the second adhesive layer side surface layer to the second surface (surface opposite to the first surface) of the PET film substrate. In this manner, the double-sided adhesive sheet of Example 1 (adhesive sheet having a first adhesive layer having a thickness of 50 μm and a second adhesive layer having a thickness of 50 μm on both sides of the PET film as a substrate) was produced. The gel fraction of the adhesive layer (measured by the above method, the same below) was 52.5%. (Examples 2 to 7) In the toluene solution of the acrylic polymer P1, a tackifier resin R1 (a polymerized rosin pentaerythritol manufactured by Arakawa Chemical Co., Ltd.) was added to 100 parts of the solid content component. The esters were sold under the trade name "Pensel D125" (softening point: 125 ° C) and two parts of isocyanate-based crosslinking agent (product of Tosoh Corporation, trade name "CORONATE L") to prepare acrylic adhesive compositions A2 to A7, respectively. The double-sided adhesive sheets of Examples 2 to 7 were produced in the same manner as in Example 1 except that the adhesive compositions A2 to A7 were used instead of the adhesive composition A1. The gel fraction of the adhesive layer was as follows: Example 2 was 46.9%, Case 3 was 39.6%, Case 4 was 25.0%, and Case 7 was 0.9%. (Example 8) 100 parts of BA as a monomer component, 5 parts of AA, 0.2 parts of benzoyl peroxide as a polymerization initiator, and 120 parts of toluene as a polymerization solvent were placed in a stirrer, a thermometer, a nitrogen introduction tube, and In a reaction vessel of a reflux condenser and a dropping funnel, solution polymerization was carried out at 60 ° C for 7 hours to obtain a toluene solution of the acrylic polymer P2. The Mw of the above acrylic polymer P2 is 55 × 10 ⁴ . In the toluene solution of the acrylic polymer P2, 30 parts of a tackifier resin R1 and 2 parts of an isocyanate crosslinking agent (product of Tosoh Corporation, trade name "CORONATE L") are added to 100 parts of the solid content component. Thus, an acrylic adhesive composition A8 was prepared. A double-sided adhesive sheet of Example 8 was produced in the same manner as in Example 1 except that the adhesive composition A8 was used instead of the adhesive composition A1. The gel fraction of the adhesive layer was 1.6%. (Example 9) In the toluene solution of the acrylic polymer P1, 30 parts of a tackifying resin R2 (a terpene phenol resin manufactured by Anwar Chemical Co., Ltd., trade name "YS Polyster 145") and 30 parts of the solid content component were added. Two parts of an isocyanate type crosslinking agent (product of Toray Industries, trade name "CORONATE L") was used to prepare an acrylic pressure-sensitive adhesive composition A9, except that the adhesive composition A9 was used instead of the adhesive composition A1. The double-sided adhesive sheet of Example 9 was produced in the same manner. The adhesive layer had a gel fraction of 40.0%. (Example 10) 100 parts of natural rubber (Mooney viscosity 75) as a base polymer and styrene-different Pentadiene-styrene block copolymer (manufactured by Nippon Co., Ltd., trade name "Quintac 3460C") 30 parts, tackifying resin R3 (manufactured by Nippon Co., Ltd., maleic anhydride modified C5, C9 resin, trade name 40 parts of "Quintone D-200", 40 parts of tackifying resin R4 (manufactured by Sumitomo Bakelite, phenol-modified rosin, trade name "Sumilite PR12603N"), phenolic anti-aging agent (manufactured by Ouchi Shinko Chemical Industry Co., Ltd.) The product name "Noctec NS-6") is dissolved in toluene, but Thereafter, 3 parts of an isocyanate-based crosslinking agent (product of Tosoh Corporation, trade name "CORONATE L") was added to prepare a rubber-based pressure-sensitive adhesive composition A10, except that the adhesive composition A10 was used instead of the adhesive composition A1. The double-sided adhesive sheet of Example 10 was produced in the same manner as in Example 1. (Evaluation) [Adhesion] A PET film having a thickness of 25 mm was attached to the first adhesive surface of the double-sided adhesive sheet of each example (first adhesive) The adhesive surface of the layer is cut into a size of 20 mm in width and 100 mm in length to prepare a measurement sample. The second adhesive surface of the above-mentioned measurement sample (second adhesive) is prepared under a standard environment of 23 ° C and 50% RH. The adhesive surface of the layer is exposed, and the 2 kg roller is reciprocated once and the second adhesive surface is crimped onto the surface of the object to be bonded. It is placed in the same environment for 30 minutes, and then the universal tensile compression tester (device) is used. The "stretch compression tester TCM-1kNB", manufactured by Meiya Company), was measured for peel strength at a peeling angle of 180 degrees and a tensile speed of 300 mm/min according to JIS Z0237. Stainless steel plate (SUS304 plate) was used. As the adherend, the measurement was performed three times and recorded. The results are shown in Table 1. [Low Temperature Adhesive Force] In the above adhesive force measurement, the adhesive sheet was pressure-bonded to the environment of the adherend, and the environment in which the adhesive was held and the peel strength were measured. The above standard environment was changed to an environment of -10 ° C. The low-temperature adhesion was measured in the same manner as the above-mentioned adhesion measurement. The results are shown in Table 1. [Shear adhesion force] The double-sided adhesive sheets of the respective examples were used. A measurement sample was prepared by cutting to a size of 20 mm × 20 mm. The first adhesive surface (adhesive surface of the first adhesive layer) and the second adhesive surface (adhesive surface of the second adhesive layer) of the above-mentioned measurement sample are laminated on a stainless steel plate at 23 ° C and 50% RH. (SUS304BA plate, 30 mm × 100 mm × 0.4 mm thick), the 5 kg roller was reciprocated once and for all. It was allowed to stand in a standard environment of 23 ° C and 50% RH for 1 hour, and then a universal tensile compression tester (device name "Tensile Compression Tester TCM-1kNB", manufactured by Meiya Company) was used at the stretching speed. Peeling was performed under conditions of 50 mm/min and a peeling angle of 0 degrees, and the maximum strength at this time was recorded as the shearing force (N). Specifically, as shown in FIG. 3, the first adhesive surface 100A and the second adhesive surface 100B of the measurement sample 100 are bonded to the stainless steel sheets 201 and 202, and pressure-bonded under the above conditions. It was allowed to stand under the above temperature atmosphere for 1 hour, and then the stainless steel sheets 201, 202 were stretched in the direction of the arrow in Fig. 3 (i.e., the shearing direction) at the above speed, and measured to be 20 mm × 20 mm (400 mm). ² Peel strength (N) under the adhesive area. The assay was performed three times and the average was recorded. The results are shown in Table 1. [Retention] A PET film having a thickness of 25 mm was attached to the first adhesive face of the double-sided adhesive sheet of each example (adhesive side of the first adhesive layer), and then cut into a width of 10 mm, thereby For example, three test pieces were prepared for the adhesive sheets. The 2 kg rolls were reciprocated once, and the second adhesive faces of the test pieces were crimped to the phenol resin plate as the adherends with a backing area of 10 mm in width and 20 mm in length. The phenol resin sheet was suspended at 40 ° C for 30 minutes, and then a load of 500 g was applied to the free end of the sample piece. According to JIS Z0237, it was allowed to stand in an environment of 40 ° C for 1 hour while the load was applied. After one hour, even if one of the three test pieces fell, it was judged that the holding time was less than one hour (indicated as "drop" in Table 1). In other cases, the offset distance (mm) of each test piece from the initial pasting position was measured for each of the three test pieces, and the arithmetic mean of these was obtained. The results are shown in Table 1. [Table 1] Table 1 As shown in Table 1, in Examples 1 to 9 in which the fixing side adhesive and the pad side adhesive were acrylic adhesives, an adhesive layer containing a suitable amount of a polymerized rosin-based tackifying resin was used on both sides. The adhesive sheets of Examples 2 to 5 and Example 8 obtained appropriate adhesion as a fixing side adhesive. These adhesive sheets exhibited higher low-temperature adhesion of the adhesive sheets of the ratios 6, 7, 9, and 10, and thus were considered to exhibit a better adhesion to the polishing pad. <Experimental Example 2> (Example 11) A PET film having a thickness of 50 μm was prepared as a substrate. The adhesive composition A4 was applied to the first surface of the substrate and dried to form a first adhesive layer (pad side adhesive layer) having a thickness of 60 μm. A release liner (first release liner) which was subjected to a release treatment using a polyoxynitride-based release agent was bonded to the first adhesive layer. Then, a release liner (second release liner) having the same configuration as that of the first release liner is separately prepared, and the adhesive composition A4 is applied onto the surface of the second release liner, and dried to form a thickness. a 40 μm second adhesive layer (fixing side adhesive layer), the second adhesive layer side surface layer (transferred) on the second side of the PET film substrate (the opposite side to the first surface) ). The double-sided adhesive sheet of Example 11 was produced in this manner. (Examples 12 to 18) As the adhesive composition for forming the pad side adhesive layer and the fixing side adhesive layer, the adhesive compositions shown in Table 2 were used, respectively. The double-sided adhesive sheets of Examples 12 to 18 were produced in the same manner as in Example 11 except for other aspects. (Evaluation) [Low Temperature Adhesion (F1)] A PET film having a thickness of 25 μm was attached to the second adhesive surface of the double-sided adhesive sheet of each example, and cut into a size of 20 mm in width and 100 mm in length to prepare a measurement. sample. The first adhesive surface (the surface of the pad side adhesive layer) of the above-mentioned measurement sample is exposed in an environment of -10 ° C, and the 2 kg roller is reciprocated once to press the first adhesive surface to the surface of the adherend. . The mixture was allowed to stand in the same environment for 30 minutes, and then a universal tensile compression tester (device name "Tensile Compression Tester, TCM-1kNB", manufactured by Meiya Company) was used, and according to JIS Z0237, the peeling angle was 180 degrees. The peel strength was measured under the conditions of a tensile speed of 300 mm/min. A stainless steel plate (SUS304 plate) was used as the adherend. The measurement was performed three times, and the average value thereof was recorded. The results are shown in Table 2. [Adhesion (F2)] A PET film having a thickness of 25 μm was attached to the first adhesive face of the double-sided adhesive sheet of each example, and cut into a size of 20 mm in width and 100 mm in length to prepare a measurement sample. The second adhesive surface (the surface of the fixing side adhesive layer) of the above-mentioned measurement sample was exposed in a standard environment of 23 ° C and 50% RH, and the 2 kg roller was reciprocated once and the second adhesive surface was crimped to The surface of the body being pressed. Place it in the same environment for 30 minutes, and then use a universal tensile compression tester (device name "Tensile Compression Tester TCM-1kNB", manufactured by Meiya Company), according to JIS Z0237, at a peeling angle of 180 degrees, pull The peel strength was measured at a stretching speed of 300 mm/min. A stainless steel plate (SUS304 plate) was used as the adherend. The measurement was performed three times, and the average value thereof was recorded. The results are shown in Table 2. [Table 2] Table 2 As shown in Table 2, the adhesive sheets of Examples 11 to 14 showed an adhesive force F2 suitable as a fixing side adhesive, and the low-temperature adhesive force F1 was also good. Further, since the low-temperature adhesive force F1 of the adhesive sheet is 0.7 times or more the adhesive force F2, it is considered that the polishing pad fixed by the adhesive sheet exhibits good workability when it is peeled off from the fixed disk together with the above-mentioned adhesive sheet. On the other hand, the adhesive sheets of Examples 15 to 18 are adhesive sheets in which the adhesion force on the fixing plate side or the polishing pad side is low, or the adhesion between the fixing plate side and the polishing pad side is insufficient. The specific examples of the present invention have been described in detail above, but these are merely illustrative and are not intended to limit the scope of the application. The technology described in the scope of the patent application includes various modifications and changes to the specific examples described above.

1, 2, 3 ‧ ‧ adhesive sheets
11‧‧‧First adhesive layer
11A‧‧‧First adhesive surface
12‧‧‧Second Adhesive Layer
12A‧‧‧Second Adhesive Surface
15‧‧‧Substrate
15A‧‧‧The first side of the substrate
15B‧‧‧ second side of the substrate
21, 22‧‧‧ peeling liner
21A‧‧‧ positive
21B‧‧‧Back
30‧‧‧ polishing pad
30A‧‧‧Grinding surface
30B‧‧‧Back
40‧‧‧ grinding device
50‧‧‧ grinding device fixing
50A‧‧‧ Surface of the grinding device
90‧‧‧Abrased components (polishing pads with adhesive sheets)
100‧‧‧Measurement sample
100A‧‧‧first adhesive surface
100B‧‧‧Second Adhesive Surface
201, 202‧‧‧ stainless steel plate
A‧‧‧Rotary axis

Fig. 1 is a schematic side view showing an application example of an adhesive sheet for polishing pad and a polishing member according to an embodiment. Fig. 2 is a schematic cross-sectional view showing the structure of an adhesive sheet according to an embodiment. Fig. 3 is an explanatory view schematically showing a method of measuring the shearing force.

1‧‧‧Adhesive sheet

11‧‧‧First adhesive layer

11A‧‧‧First adhesive surface

12‧‧‧Second Adhesive Layer

12A‧‧‧Second Adhesive Surface

15‧‧‧Substrate

30‧‧‧ polishing pad

30A‧‧‧Grinding surface

30B‧‧‧Back

40‧‧‧ grinding device

50‧‧‧ grinding device fixing

50A‧‧‧ Surface of the grinding device

90‧‧‧Abrased components (polishing pads with adhesive sheets)

A‧‧‧Rotary axis

Claims (10)

An adhesive sheet which is an adhesive sheet for fixing a polishing pad, comprising: a substrate, a first adhesive layer provided on the first surface of the substrate, and a second surface provided on the substrate a second adhesive layer, wherein the adhesive surface of the first adhesive layer is to be adhered to the surface of the polishing pad, and the adhesive surface of the second adhesive layer is to be adhered to the surface of the polishing device to form the first adhesive layer The adhesive of the second adhesive layer is an acrylic adhesive, and at least the acrylic adhesive constituting the second adhesive layer is an adhesive S, and the adhesive S contains 3 parts by weight based on 100 parts by weight of the acrylic polymer. A polymerized rosin-based tackifying resin in an amount of not less than 40 parts by weight. The adhesive sheet according to claim 1, wherein the monomer component constituting the acrylic polymer in the adhesive S contains n-butyl (meth)acrylate and an alkyl group having 6 to 9 carbon atoms at the ester terminal ( Alkyl methacrylate. The adhesive sheet according to claim 1 or 2, wherein the monomer component constituting the acrylic polymer in the adhesive S contains 40% by weight or more and 95% by weight or less of n-butyl (meth)acrylate. The adhesive sheet according to any one of claims 1 to 3, wherein the monomer component constituting the acrylic polymer in the adhesive S contains 1% by weight or more and 5% by weight or less of a carboxyl group-containing monomer. The adhesive sheet according to any one of claims 1 to 4, wherein the monomer component constituting the acrylic polymer in the adhesive S contains a hydroxyl group-containing monomer. The adhesive sheet according to any one of claims 1 to 5, wherein the above-mentioned adhesive S is crosslinked by an isocyanate crosslinking agent. The adhesive sheet according to any one of claims 1 to 6, wherein the low-temperature adhesion force F1 of the adhesive surface of the first adhesive layer is higher than the adhesive force F2 of the adhesive surface of the second adhesive layer. The adhesive sheet according to any one of claims 1 to 7, wherein the acrylic adhesive constituting the second adhesive layer and the acrylic adhesive constituting the first adhesive layer are all the adhesive S. The adhesive sheet according to any one of claims 1 to 8, wherein the acrylic adhesive constituting the first adhesive layer and the acrylic adhesive constituting the second adhesive layer have the same composition. An abrasive member comprising: a polishing pad, and the adhesive sheet according to any one of claims 1 to 9, wherein the adhesive surface of the first adhesive layer is adhered to the polishing pad.