TW201709227A - Cable guidance device and cable unit capable of using cables to wire up moveable parts such as transport machinery of an assembly line without using a cable towing chain - Google Patents

Abstract

The cable guidance device and the cable unit of the present invention provide a technique capable of using cables to wire up moveable parts such as transport machinery of an assembly line without using a cable towing chain, and a technique capable of neutralizing static electricity even when static charges are generated. The cable guidance device includes: a plurality of metal pipes which are formed to have through-holes for the insertion of cables, and formed in flexible pipe components, and disposed in parallel; and insulation layers which are set in the manner of surrounding the outer periphery of each of the metal pipes, in which the adjacent insulation layers abut together while semiconducting layers of semiconducting characteristics are set between metal pipes and insulation layers to cover the outer periphery of each of the metal pipes.

Description

Cable guide and cable unit

The present invention relates to a cable guide and cable unit.

Conventionally, in a cable (wiring in a manufacturing apparatus) used in a production line such as a semiconductor or a liquid crystal panel, wiring is applied to a movable portion (a portion that repeatedly receives a U-shaped curve) in order to provide a countermeasure against a disconnection or a twisting problem. The cable is housed in a cable drag chain (椿本链股份有限公司, registered trademark) and wired (for example, Patent Document 1). In other words, a cable that moves on a fixed rail such as a cable such as a transport machine on a production line is housed in a cable drag chain and wired to be housed in the cable. Move in the state of the drag chain.

Prior art literature

Patent literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2015-5498

However, since the cable has flexibility, the straight portion (portion other than the curved portion) which is generated when the cable is bent in a U shape may sag. If such a cable is moved in a state of being housed in the cable drag chain, the cable hangs down in the cable drag chain, and the cable and the cable drag chain sometimes come into contact with each other to rub. As a result, the cable is worn and sometimes dust is generated. As a result, when the cable housed in the cable drag chain is wired to a transport machine on a production line in a clean room, for example, if dust is generated, the quality of the manufactured product may be lowered, for example.

In addition, with the spread of smart phones and tablet terminals in recent years, it is required to further increase the operating rate of production lines such as semiconductors and liquid crystal displays. For example, on the production line The transportation machine and the like are further increased in speed. Therefore, the cable wired to the movable portion such as the conveying machine moves faster and more frequently, and sometimes repeatedly receives U-shaped bending over a long distance. At this time, if the cable drag chain in which the cable is accommodated is repeatedly moved frequently and frequently, static electricity is generated in the cable or the cable drag chain, and it is sometimes difficult to maintain the quality of the cable and the safety of the production line.

An object of the present invention is to solve the above problems and to provide a cable that can be disposed in a movable portion such as a transporting machine on a production line without using a cable tow, and that can remove static electricity even in the case where static electricity is generated. Technology.

According to an aspect of the invention, there is provided a cable guide comprising: a plurality of metal tubes formed with insertion holes for inserting the cables and formed by a flexible tubular member and juxtaposed And an insulating layer disposed to surround an outer circumference of each of the plurality of metal tubes, wherein the adjacent insulating layers are bonded to each other, and the metal tube and the insulating layer are A semiconductive layer having a semiconducting outer periphery of each of the plurality of metal pipes is provided between the layers.

According to another aspect of the present invention, there is provided a cable unit including a cable guide and a cable inserted through an insertion hole of the metal pipe, the cable guide having: a plurality of a metal tube formed with the insertion hole through which the cable is inserted and formed of a tubular member having flexibility and arranged in parallel; and an insulating layer to surround each of the plurality of metal tubes Provided in a peripheral manner of the root, wherein adjacent insulating layers are joined to each other, and a periphery of each of the plurality of metal pipes covered with the plurality of metal pipes is disposed between the metal pipe and the insulating layer And a semiconducting layer having a semiconductivity.

According to the present invention, it is possible to dispose a cable line in a movable portion such as a conveying machine on a production line without using a cable drag chain, and it is possible to remove static electricity even when static electricity is generated.

1‧‧‧Cable unit

10‧‧‧ Cable guide

11‧‧‧Metal tube

11a‧‧‧ inserted through hole

11b‧‧‧ fixture

12‧‧‧Insulation

13‧‧‧ semi-conductive layer

20‧‧‧ cable

Fig. 1 is a schematic view showing a cable unit formed by using a cable guide according to an embodiment of the present invention.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

<An embodiment of the present invention>

(1) Composition of cable guide and cable unit

Hereinafter, the configuration of the cable guide and the cable unit according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2 .

As shown in FIGS. 1 and 2, the cable guide 10 includes a plurality of (for example, five) metal pipes 11 arranged in parallel.

Each of the metal pipes 11 is formed with an insertion hole (through hole) 11a through which the cable 20 is inserted, and each of the metal pipes 11 is formed of a tubular member having flexibility (flexibility). The metal pipe 11 also functions to protect the cable 20 inserted through the insertion hole 11a. The metal pipe 11 is formed of, for example, stainless steel (SUS). Specifically, the metal pipe 11 is preferably formed of, for example, SUS304 which is excellent in corrosion resistance. Further, the metal pipe 11 may be formed of a metal material other than SUS.

The outer circumferential surface of the metal pipe 11 has irregularities that impart flexibility to the metal pipe 11. Moreover, it is preferable that the metal pipe 11 is configured such that the inner diameter of the curved portion when the metal pipe 11 is bent is equal to the inner diameter of the portion (non-bending portion) that is not bent. That is, the metal pipe 11 is preferably configured such that the inner diameter of the bent portion does not become small. For example, the metal pipe 11 is preferably a pipe that can be contracted in the tube axis direction but cannot be elongated. That is, the metal pipe 11 is preferably a pipe which does not elongate even when bent, whereby the cable 20 inserted in the insertion hole 11a is not stretched, and the cable can be suppressed. 20 withstand the tension. Thereby, when the cable unit 1 to be described later is moved, the outer peripheral surface of the cable 20 inserted into the insertion hole 11a of the metal pipe 11 and the insertion hole 11a of the metal pipe 11 can be suppressed at the bent portion. The inner peripheral surface is in contact with each other and rubs. As a result, dust generation can be suppressed.

As the metal pipe 11 as described above, for example, an interlocking hose (Interlock Gooseneck Tube) can be used. Among them, since the detailed structure of the interlocking hose is conventional, detailed description thereof is omitted in the present specification.

Further, by arranging a plurality of metal pipes 11 in parallel, the bending direction of the metal pipe 11 can be controlled, and as a result, the bending direction of the cable guide 10 can be controlled. That is, even if each of the metal pipes 11 is configured to be bent in each direction, the cable guide 10 is configured by arranging a plurality of metal pipes 11 in parallel, and the cable guide 10 is also directed It is curved in a direction orthogonal to the parallel direction of the metal pipe 11 and is not bent in the parallel direction.

At both ends of the metal pipe 11, a jig (for example, a copper jig) for preventing contact between the cable 20 inserted in the insertion hole 11a of the metal pipe 11 and the end surface (cross section) of the metal pipe 11 is preferably provided. 11b. Thereby, it is possible to suppress the occurrence of dust by the cable 20 rubbing against the end surface of the metal pipe 11 when the cable unit 1 to be described later moves.

The insulating layer 12 is provided to surround the outer circumference of each of the plurality of metal pipes 11. The insulating layer 12 is preferably provided in such a manner that both ends of the metal pipe 11 are exposed. Adjacent insulating layers 12 are bonded to each other. For example, adjacent insulating layers 12 are thermally welded to each other. In addition, it can also be bonded by an adhesive. The insulating layer 12 also functions as a protective layer that suppresses damage of the semiconductive layer 13 to be described later due to a load from the outside.

The insulating layer 12 is preferably formed of, for example, an insulating material containing a fluororesin and a fluororubber. Specifically, the insulating layer 12 is preferably formed of, for example, an insulating material containing a fluororubber and a fluororesin (fluororubber: fluororesin = 95:5 to 20:80) in a mass ratio of 95:5 to 20:80. Further, the fluororesin preferably contains polytetrafluoroethylene and a molten fluororesin (polytetrafluoroethylene: molten fluororesin = 99.5: 0.5 to 75: 25) in a mass ratio of, for example, 99.5:0.5 to 75:25. As such an insulating material, for example, DAI-EL (registered trademark) Fluoro TPV manufactured by Daikin Industries Co., Ltd. can be used.

Thereby, the insulating layer 12 can be made into a layer which has both the abrasion resistance by the fluororesin and the softness and elasticity by the fluororubber. Since the insulating layer 12 is wear-resistant, even when the insulating layer 12 is subjected to an external load (for example, the insulating layer 12 is in contact with the floor to rub, or the insulating layer 12 is rubbed against the mechanical contact on the production line), The dust generated by the insulating layer 12 can be suppressed. Therefore, dust generation from the cable guide 10 can be more suppressed. Since the insulating layer 12 has flexibility, it is possible to suppress the deflection resistance of the metal pipe 11 described above. Further, since the insulating layer 12 has flexibility, it is possible to improve the U-shaped flexibility and to repeatedly bend the U-shape. Further, since the insulating layer 12 has elasticity, when the cable guide 10 is bent in a U shape, the straight portion (straight portion) of the cable guide 10 can be prevented from sagging.

As shown in Fig. 2, for each metal tube 11, it is attached to the metal tube 11 and the insulating layer. A semiconductive layer 13 having semiconductivity is disposed between 12. That is, the semiconductive layer 13 is provided in such a manner as to cover the outer circumference of each of the plurality of metal pipes 11.

Here, in the present specification, the phrase "having semiconductivity" means having both (conductivity) conductivity and flexibility. For example, the semiconductive layer 13 having semiconductivity refers to a layer having both conductivity and flexibility, and the conductivity is conductivity capable of obtaining the effect of absorbing the cable unit 1 described later by the semiconductive layer 13 The electrical conductivity generated during the release of static electricity to the outside of the cable guide 10 (electrostatic absorption removal effect), and the flexibility is a deflection that does not break even if the semiconductive layer 13 is elastically deformed Sex. Since the semiconductive layer 13 has semiconductivity, the flexibility of the metal pipe 11 described above is not hindered, and an electrostatic absorption removal effect can be obtained.

The static electricity absorbed by the semiconductive layer 13 is converted into heat in the semiconductive layer 13 and released to the outside of the cable guide 10, or the semiconductive layer 13 and the metal tube 11 are electrically connected to be released to the cable guide. The exterior of the device 10. Further, the static electricity absorbed by the semiconductive layer 13 is converted into heat in the semiconductive layer 13 because the semiconductive layer 13 is less conductive than the conductive layer.

The semiconductive layer 13 is formed of a material in which a conductive material (conductive particles) having conductivity is mixed in a resin material having flexibility to impart semiconductivity. As the resin material having flexibility, for example, a polyvinyl chloride (PVC) resin, a polyurethane (PU) resin, a polyolefin (PO) resin, or the like can be used. As the conductive material, for example, carbon black can be used.

The semiconductive layer 13 is preferably subjected to, for example, solid molding. Thereby, the static electricity generated in the cable guide 10 and the cable 20 can be absorbed and removed regardless of how the cable unit 1 described later operates.

Specifically, the semiconductive layer 13 is preferably formed by coating the outer circumference of the metal pipe 11 in a state of being filled in the concave portion of the outer peripheral surface of the metal pipe 11 . For example, when the metal pipe 11 is an interlocking hose, the semiconductive layer 13 is preferably formed by filling a gap in the interlocking portion of the outer peripheral surface of the interlocking hose and covering the outer circumference of the metal pipe 11.

When a gap is formed in the cable guide 10, static electricity is likely to occur in a potential difference generated in the gap when the cable unit 1 described later is moved. Therefore, by filling the concave and convex recesses provided in the outer peripheral surface of the metal pipe 11 with the semiconductive layer 13, the gap existing in the cable guide 10 can be reduced, and the cable unit 1 to be described later can be moved. The location of the potential difference is close to zero. As a result, it is possible to more suppress generation of static electricity in the cable guide 10.

The volume resistivity of the semiconductive layer 13 is, for example, 0.1 Ω. Above cm ^{3 3} Ω. Below cm, preferably for example 1 Ω. Cm. If the volume resistivity of the semiconductive layer 13 is within this range, the semiconductivity (conductivity) desired in the present application is satisfied. Further, the adjustment of the volume resistivity of the semiconductive layer 13 can be performed by adjusting the content (addition amount) of the conductive material.

If the volume resistivity of the semiconductive layer 13 is less than 0.1 Ω. In the case of cm, the semiconducting layer 13 has low conductivity and sometimes does not have a desired semiconductivity. As a result, the electrostatic absorption removal effect may not be obtained.

By setting the volume resistivity of the semiconductive layer 13 to 0.1 Ω. Above cm, can solve this problem. Thereby, the semiconductive layer 13 can be made into a layer having semiconductivity, that is, a layer having both desired conductivity and desired flexibility. As a result, the semiconductive layer 13 can be made into a layer having an electrostatic absorption removing effect and not obstructing the flexibility of the metal pipe 11.

However, if the volume resistivity of the semiconductive layer 13 exceeds 10 ³ Ω. The cm, the flexibility of the semiconductive layer 13 is impaired, and sometimes the semiconductive layer 13 does not have the desired semiconductivity. This is because, in order to form a volume resistivity of more than 10 ³ Ω. The semi-conductive layer 13 of cm needs to increase the content of the conductive material in the semi-conductive layer 13, but if the content of the conductive material in the semi-conductive layer 13 is increased, the flexibility of the semi-conductive layer 13 is impaired, sometimes hindering the above The flexibility of the metal pipe 11.

By setting the volume resistivity of the semiconductive layer 13 to 10 ³ Ω. Below cm, this problem can be solved. Thereby, the semiconductive layer 13 can be made into a layer having semiconductivity, that is, a layer having both conductivity and flexibility. As a result, the semiconductive layer 13 can be made into a layer having an electrostatic absorption removing effect and not obstructing the flexibility of the metal pipe 11.

Further, the thickness of the semiconductive layer 13 may be any thickness that can obtain the above-described electrostatic absorption and removal effect. For example, the thickness of the semiconductive layer 13 is such that it can absorb static electricity (noise) generated when the cable unit 1 described later moves, and can uniformly absorb the absorbed static electricity (including static electricity converted into heat) to the semiconductive layer. The thickness direction of 13 (that is, the tube axis direction of the metal pipe 11) may be removed.

The thickness of the semiconductive layer 13 is, for example, 0.1 mm or more and 0.3 mm or less, preferably 0.2 mm or less.

If the thickness of the semiconductive layer 13 is less than 0.1 mm, the above-described electrostatic absorption removal effect may not be obtained.

By setting the thickness of the semiconductive layer 13 to 0.1 mm or more, this problem can be solved, and the above-described electrostatic absorption removal effect can be obtained.

However, the thicker the semiconductive layer 13 is, the more the weight of the semiconductive layer 13 is increased. If the thickness of the semiconductive layer 13 exceeds 0.3 mm, the weight of the semiconductive layer 13 increases, and when the cable guide 10 is disposed in a movable portion such as a conveying machine on a production line such as a semiconductor, a U-shaped bent cable guide The straight portion of the introducer 10 sometimes hangs down.

This problem can be solved by setting the thickness of the semiconductive layer 13 to 0.3 mm or less, and it is possible to suppress the sagging of the straight portion of the U-shaped curved cable guide 10.

Further, in the cable guide 10, a layer in which the semiconductive layer 13 and the insulating layer 12 are laminated (hereinafter also referred to as a laminate) is preferably provided with an elongation of 200%. Thereby, the obstruction of the flexibility of the metal pipe 11 can be suppressed more reliably. Further, the elongation of 200% means that the elongation is 200%. For example, when a laminate having a length of 10 cm in a state where no load is applied, having 100% elongation means that the length of the laminate can be extended to 20 cm, and having 200% elongation means that the length of the laminate can be extended. Up to 30cm.

In the cable guide 10 configured as described above, at least one end is fixed to a movable portion of a conveying machine or the like, and the conveying machines are conveyed on a production line that can move in a direction orthogonal to the direction in which the metal pipes 11 are aligned. Machinery, etc. For example, one end of the cable guide 10 bent in a U shape is fixed as a fixed end, and the other end is fixed to a movable portion of a conveying machine or the like as a moving end, and the conveying machine can be in the metal pipe 11 The conveying machinery on the production line that moves in the direction orthogonal to the side by side direction. Then, the moving end repeatedly reciprocates in a predetermined direction (a direction orthogonal to the side-by-side direction of the metal pipe 11).

The cable unit 20 including the cable guide 10 and the cable 20 is configured by inserting the cable 20 into the insertion hole 11a of the metal pipe 11. As the cable 20, for example, an electric wire having a conductor and an insulator provided to surround the outer circumference of the conductor, a power supply line, a signal line, or the like can be used. As the conductor, for example, a twisted and flexible stranded conductor can be used. Further, as a material for forming the insulator, a fluororesin (for example, ETFE, FEP, PFA, PTFE, or the like) which has abrasion resistance (resistance to abrasion) and is less likely to generate dust can be used. Further, as the cable 20, an electric wire provided with a mask can be used. Further, for example, a fluororesin tape having high abrasion resistance and being less likely to generate dust may be wound around the outer periphery of the mask, or the outer periphery of the mask may be coated with, for example, a fluororesin to provide a sheath layer.

(2) Effects related to the present embodiment

According to the present embodiment, one or more effects described below are exerted.

(a) By using the cable unit 1, the cable line 20 can be provided in a movable portion such as a transporting machine on a production line such as a semiconductor without using a cable drag chain, which is guided by a cable guide The leader 10 is formed by inserting the cable 20 into the insertion hole 11a provided in the metal pipe 11, and the cable guide 10 uses the insertion hole 11a formed with the cable 20 inserted therein and A metal tube 11 formed of a flexible tubular member is formed. By using the cable guide 10 according to the present embodiment, it is possible to suppress the generation of dust as compared with the case of using the cable drag chain. The cable guide 10 according to the present embodiment is particularly effective when, for example, a movable portion such as a transport machine such as a clean room is provided.

(b) The cable guide 10 is formed by providing the semiconductive layer 13 between the metal pipe 11 and the insulating layer 12, so that the electrostatic absorption removal effect can be obtained without impairing the flexibility of the metal pipe 11, half The conductive layer 13 covers the outer periphery of each of the metal pipes 11 and has both conductivity and flexibility and has semiconductivity.

That is, by providing the cable guide 10 with the semiconductive layer 13 having semiconductivity, thereby bending the cable unit 1 into a U shape and moving it, the cable guide 10 can be caused The movement of the cable 20 is moved, and the semi-conductive layer 13 can be utilized to absorb static electricity generated in the cable 20 and the cable guide 10 by moving the cable unit 1, and is released to the cable guide. The outside of the device 10 (cable unit 1) in which the cable unit 1 is formed by inserting the cable 20 in the insertion hole 11a of the cable guide 10.

Further, in the case where only the cable guide 10 is turned on, it is preferable to provide a conductive layer instead of the semiconductive layer 13 as long as the electrostatic absorption by the movement of the cable unit 1 can be removed. The conductive layer is usually formed of a metal layer containing a metal such as copper (Cu). However, the metal layer does not have flexibility (softness, flexibility). Therefore, if a conductive layer is provided instead of the semiconductive layer 13, the flexibility of the metal tube 11 in the cable unit 1 may be impaired by the conductive layer, and the cable guide 10 cannot be made with the cable 20 Move while moving. On the other hand, in the present embodiment, the semiconductive layer 13 having semiconductivity having both conductivity and flexibility is provided. Thereby, the electrostatic absorption removal effect can be obtained without impairing the flexibility of the metal pipe 11.

(c) When the outer peripheral surface of the metal pipe 11 has irregularities, the semiconductive layer 13 is formed so as to cover the outer periphery of the metal pipe 11 in a state of being filled in the concave portion of the metal pipe 11, so that the semiconductive layer 13 can be suppressed. The static electricity generated in the cable 20 and the cable guide 10 when the cable unit 1 moves.

(d) By forming the insulating layer 12 from an insulating material containing a fluororesin and a fluororubber, the insulating layer 12 can be made to have both abrasion resistance by fluororesin and flexibility and elasticity by fluororubber. Layer.

(e) Further, by forming the insulating layer 12 from the above-described insulating material, in particular, the insulating layer 12 is formed of a material containing a fluororesin, the insulating layer 12 is rubbed against the floor or the insulating layer 12 is caused by the movement of the cable unit 1. It is easy to generate static electricity when rubbed against the conveying machine. In the cable guide 10 according to the present embodiment, the static electricity generated on the side of the insulating layer 12 can be absorbed and released to the outside of the cable guide 10 by the semiconductive layer 13.

(f) Since the cable unit 1 formed by using the cable guide 10 according to the present embodiment has excellent flexibility, even when the cable unit 1 is repeatedly bent in a U shape, damage can be suppressed. For example, even if the cable unit 1 is placed on a movable portion such as a transport machine on a production line, the moving end of the disposed cable guide 10 (cable unit 1) is repeatedly reciprocated in a predetermined direction, and suppression can be suppressed. damaged.

<Other Embodiments>

The embodiment of the present invention has been specifically described above, but the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the spirit and scope of the invention.

In the above-described embodiment, the case where the unevenness of the outer peripheral surface of the metal pipe 11 is the unevenness of the interlocking pipe has been described, but the invention is not limited thereto.

For example, irregularities may be formed on the outer circumferential surface of the metal pipe 11 by providing a groove portion which is a concave portion on the outer circumferential surface of the metal pipe 11.

Example

Next, an embodiment of the present invention will be described, but the present invention is not limited thereto.

An interlocking hose having an inner diameter of 4 mm and an outer diameter of 6 mm was used as the metal pipe formed with the insertion hole through which the cable was inserted and which was made of a flexible tubular member. A semiconductive layer having a semiconductivity of 0.2 mm in thickness was placed on the outer circumference of the metal pipe so as to fill the concave portion of the outer surface of the metal pipe and to cover the outer circumference of the metal pipe. Further, as a material for forming the semiconductive layer, a semiconductive vinyl resin formed by adding a predetermined amount of carbon black to a polyvinyl chloride resin is used. Further, as an insulating material, a DAI-EL (registered trademark) Fluoro TPV was used, and an insulating layer having a thickness of 0.2 mm was formed on the outer circumference of the semiconductive layer to form a three-layered tube having an outer diameter of 6.8 mm. Arranging 8 three-layer tubes side by side, and bonding adjacent insulating layers to each other by hot air welding Engage to form a cable guide. Then, a cable such as a power supply line, a signal line, or an optical fiber is inserted into the insertion hole of the metal pipe as needed to form a cable unit.

The formed cable unit is bent into a U shape, and one end of the cable guide is fixed as a fixed end, and the other end is fixed to a movable portion of a conveying machine on the production line as a moving end, and the cable unit is connected A movable portion such as a conveying machine on a production line such as a semiconductor is laid (disposed), and a conveying machine or the like on the production line can be moved in a direction orthogonal to the direction in which the metal pipes are aligned.

It was confirmed that, due to the high elasticity of the insulating layer of the cable guide (the fluororubber contained in the insulating layer), even if the cable drag chain is not used, the cable unit has a moving distance of at most L = 1.5 m (straight line In the case of the ministry, there is no sagging.

In the predetermined direction (the direction orthogonal to the side-by-side direction of the metal pipe), the moving end is made to have a bending radius of 40.8 mm (6 times the outer diameter of the three-layer pipe), a folding speed of 30 times/min, and a moving distance of 1.5 m. Move in a reciprocating motion under conditions. Further, it was confirmed that even if the moving end of the cable unit was reciprocated 10 million times or more, that is, even if the cable unit was bent in a U-shape of 10 million times or more, the cable unit was not damaged. Further, it was confirmed that the cable guide has excellent wear resistance by forming the insulating layer of the cable guide with the material containing the fluororesin, even in the case where the insulating layer is subjected to an external load. It is also possible to suppress the generation of dust due to abrasion. It has also been confirmed that static electricity generated by moving the cable unit (reciprocating the moving end of the cable unit in a predetermined direction) is converted into heat in the semiconductive layer and released to the cable guide. Externally, or, the semiconducting genus and the metal tube are turned on and released to the outside of the cable guide.

<Preferred Mode of the Invention>

Hereinafter, preferred embodiments of the present invention are attached.

[Note 1]

According to an aspect of the present invention, there is provided a cable guide comprising: a plurality of metal pipes formed with insertion holes for inserting cables into the inside and formed of a flexible tubular member and arranged side by side And an insulating layer disposed to surround an outer circumference of each of the plurality of metal tubes, wherein the adjacent insulating layers are bonded to each other, and the metal tube and the insulating layer are Between each of the metal tubes covered with a plurality of layers A semiconducting layer having a periphery and having a semiconductivity.

[Note 2]

In the cable guide of the first aspect, it is preferable that the semiconductive layer is made of a material which imparts semiconductivity by incorporating a conductive material (conductive particles) having conductivity in a resin material having flexibility. Formed.

[Note 3]

In the cable guide of the first or second aspect, it is preferable that the semiconductive layer is filled in a concave portion of the outer peripheral surface of the metal tube to cover the metal. The outer circumference of the tube is formed.

[Note 4]

In the cable guide of any one of the above items 1 to 3, preferably, the insulating layer is formed of an insulating material containing a fluororesin and a fluororubber.

[Note 5]

In the cable guide of any one of the above items 1 to 4, preferably, the semiconductive layer has a volume resistivity of 0.1 Ω. Above cm ^{3 3} Ω. Below cm.

[Note 6]

In the cable guide of any one of the items 1 to 5, preferably, the semiconductive layer has a thickness of 0.1 mm or more and 0.3 mm or less (preferably 0.2 mm).

[Note 7]

In the cable guide of any one of the items 1 to 6, preferably, at least one end is fixed to a movable portion movable in a direction orthogonal to the direction in which the metal tubes are aligned.

[Note 8]

According to another aspect of the present invention, a cable unit is provided, comprising: a cable guide, and a cable inserted through an insertion hole of the metal pipe, wherein the cable guide has: a plurality of The metal tube is formed with the insertion hole through which the cable is inserted and formed of a flexible tubular member and arranged side by side, and an insulating layer to surround each of the plurality of metal tubes a peripheral manner of the root, wherein the adjacent insulating layers are joined to each other, A semiconducting layer having a semiconducting layer covering the outer periphery of each of the plurality of metal pipes is provided between the metal pipe and the insulating layer.

1‧‧‧Cable unit

10‧‧‧ Cable guide

11‧‧‧Metal tube

11a‧‧‧ inserted through hole

11b‧‧‧ fixture

12‧‧‧Insulation

20‧‧‧ cable

Claims (4)

A cable guide comprising: a plurality of metal tubes formed with insertion holes for inserting the cables, and formed of a flexible tubular member and arranged in parallel; and an insulating layer Provided to surround an outer circumference of each of the plurality of metal pipes, wherein adjacent ones of the insulating layers are joined to each other, and a coating is provided between the metal pipe and the insulating layer A plurality of the outer circumferences of the metal tubes each have a semiconductive layer of semiconductivity. The cable guide according to the first aspect of the invention, wherein the semiconductive layer is filled in a concave portion of the outer peripheral surface of the metal pipe to be covered with a concave portion. The outer circumference of the metal tube is formed in a manner. The cable guide of claim 1 or 2, wherein the insulating layer is formed of an insulating material containing a fluororesin and a fluororubber. A cable unit, comprising: a cable guide and a cable inserted through an insertion hole of the metal pipe, wherein the cable guide has: a plurality of the metal pipes, It is formed with the insertion hole through which the cable is inserted and is composed of a flexible tubular member and arranged in parallel; and an insulating layer to surround the outer periphery of each of the plurality of metal pipes Provided in such a manner that adjacent insulating layers are joined to each other, and an outer circumference of each of the plurality of metal pipes covered with the plurality of metal pipes is provided between the metal pipe and the insulating layer and has Semi-conductive semiconductive layer.