TW201703844A - Adsorbing device - Google Patents

Adsorbing device Download PDF

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TW201703844A
TW201703844A TW105116558A TW105116558A TW201703844A TW 201703844 A TW201703844 A TW 201703844A TW 105116558 A TW105116558 A TW 105116558A TW 105116558 A TW105116558 A TW 105116558A TW 201703844 A TW201703844 A TW 201703844A
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cylindrical
peripheral side
flow path
path forming
forming member
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TW105116558A
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Chinese (zh)
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TWI708632B (en
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Kazuyuki Kawata
Tatsuya Kagata
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Toyo Boseki
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/06Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/38Removing components of undefined structure
    • B01D53/44Organic components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/81Solid phase processes
    • B01D53/83Solid phase processes with moving reactants
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/28Treatment of water, waste water, or sewage by sorption

Abstract

An adsorbing device (100) is provided with a cylindrical rotor (90) wherein a plurality of adsorbing bodies (30) are disposed in a cylindrical shape having a cylindrical hole (90a), and a first region (R1) and a second region (R2) that are divided from each other and through which the plurality of adsorbing bodies (30) alternately pass by means of rotation of the cylindrical rotor (90). The first region (R1) is a region wherein some of the plurality of adsorbing bodies (30) communicate air tightly or water tightly with an inner peripheral side flow path forming member (4) and an outer peripheral flow path forming member (5). The second region (R2) is a region wherein a fluid is introduced into the adsorbing bodies (30) toward the inner peripheral side from the outer peripheral side of the cylindrical rotor (90) such that the same flows out of both openings of the cylindrical hole (90a), or is a region wherein the fluid that has flowed in from both openings of the cylindrical hole (90a) is introduced into the adsorbing bodies (30) toward the outer peripheral side from the inner peripheral side of the cylindrical rotor (90).

Description

吸附處理裝置 Adsorption treatment device

本發明係關於處理大流量流體的吸附處理裝置。 The present invention relates to an adsorption treatment apparatus for treating large flow fluids.

傳統上,處理包含有低濃度被處理物質的大流量被處理流體的方法,有吸附濃縮處理方法。該處理方法係將大風量的被處理流體流入至連續旋轉的吸附體吸附室,使包含於被處理流體的被處理物質吸附去除。另一方面,從流入被處理流體的吸附室將少量的加熱流體流入另外獨立的脫除室,使大風量的被處理流體所含的被處理物質移動到小風量的加熱流體中。依此方式,就可生成包含高濃度被處理物質的小風量濃縮流體,並藉由將該濃縮流體作另行2次處理,而得以使總處理成本降低。 Conventionally, a method of treating a large-flow treated fluid containing a low concentration of a substance to be treated has an adsorption concentration treatment method. In this treatment method, a large amount of the fluid to be treated flows into the continuously adsorbed adsorption body adsorption chamber, and the material to be treated contained in the fluid to be treated is adsorbed and removed. On the other hand, a small amount of heating fluid flows into the separate separation chamber from the adsorption chamber flowing into the fluid to be treated, and the large amount of the material to be treated contained in the fluid to be treated is moved to the heating fluid having a small air volume. In this way, a small air volume concentrated fluid containing a high concentration of the substance to be treated can be produced, and the total processing cost can be reduced by treating the concentrated fluid twice.

在被處理流體為氣體,包含在被處理流體的被處理物質為有機溶劑(VOC)時,係使用運用上述處理方法的VOC廢氣處理裝置。該VOC廢氣處理裝置則使用蜂巢狀吸附材。 When the fluid to be treated is a gas and the substance to be treated contained in the fluid to be treated is an organic solvent (VOC), a VOC exhaust gas treatment device using the above treatment method is used. The VOC exhaust gas treatment device uses a honeycomb adsorbent.

再者,被處理流體為氣體,包含在被處理流體的被處理物質為水分時,則使用運用上述處理方法的 除濕裝置。該除濕裝置也使用蜂巢狀的吸附材。 Further, when the fluid to be treated is a gas and the substance to be treated contained in the fluid to be treated is moisture, the above-described treatment method is used. Dehumidification device. The dehumidifying device also uses a honeycomb-shaped adsorbing material.

在上述VOC排氣處理裝置及除濕裝置中,具備蜂巢狀吸附材的吸附處理裝置,一般而言,係利用特殊一體成形的圓盤狀吸附體的圓盤型(disk type)吸附處理裝置,或如特開昭63-84616號公報(專利文獻1)、實公昭60-34991號公報(專利文獻2)所揭示的由複數個定型吸附材嵌裝於圓筒狀轉動體的圓筒狀轉動體型(cylinder type)吸附處理裝置已為眾所周知。 In the VOC exhaust gas treatment device and the dehumidification device, the adsorption treatment device including the honeycomb-shaped adsorption material is generally a disk type adsorption treatment device using a disk-shaped adsorption body that is integrally molded integrally, or A cylindrical rotator type in which a plurality of shaped adsorbing materials are embedded in a cylindrical rotor, as disclosed in Japanese Laid-Open Patent Publication No. SHO-60-34-196 (Patent Document 1) (cylinder type) adsorption processing devices are well known.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

專利文獻1:日本特開昭63-84616號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 63-84616

專利文獻2:日本實公昭60-34991號公報 Patent Document 2: Japanese Patent Publication No. 60-34991

例如,藉吸附濃縮處理含有VOC的工廠廢氣時,該廢氣中,除VOC以外,還會有包含令吸附性能低下的氣體狀物質的情形。吸附性能降低的吸附體就必須更換。 For example, when the VOC-containing factory exhaust gas is treated by adsorption and concentration, the exhaust gas may contain a gaseous substance having a low adsorption performance in addition to the VOC. The adsorbent with reduced adsorption properties must be replaced.

圓盤型吸附處理裝置中所具備的吸附體由於是經特殊一體成形,故製造成本相對高昂。此外,更換該吸附體之際,必須整體性更換,使更換作業耗費勞力。 Since the adsorbent provided in the disc-type adsorption processing apparatus is specially formed integrally, the manufacturing cost is relatively high. In addition, when the adsorbent is replaced, it must be replaced as a whole, and the replacement work is labor-intensive.

一方面,圓筒型吸附處理裝置中所具備的複數個吸附體,由於分別具有固定型態,故其製造成本可以降低。而且,更換該吸附體之際,因可局部更換,故 更換作業也較容易進行。 On the other hand, since the plurality of adsorbing bodies provided in the cylindrical adsorption processing apparatus have a fixed type, respectively, the manufacturing cost can be reduced. Moreover, when the adsorbent is replaced, it can be partially replaced, so Replacement work is also easier.

氣體狀物質以外的重要因素中,會有吸附性能降低的情形。其重要因素之一有例如霧粒或粉塵等。被處理流體中含有霧粒或粉塵時,會因這些物質而發生吸附體的堵塞。 Among the important factors other than the gaseous substance, there is a case where the adsorption performance is lowered. One of the important factors is, for example, fog or dust. When mist or dust is contained in the fluid to be treated, clogging of the adsorbent occurs due to these substances.

圓盤型吸附處理裝置中,吸附體會在用以區隔吸附室與脫除室的密封材料直接接觸吸附體的狀態下進行旋轉。因此,被處理流體所含的霧粒或粉塵會因密封材料而向吸附體推壓,而發生助長吸附體堵塞的情形。 In the disc type adsorption treatment device, the adsorbent is rotated in a state in which the sealing material for separating the adsorption chamber and the removal chamber is in direct contact with the adsorbent. Therefore, the mist or dust contained in the fluid to be treated is pressed against the adsorbent by the sealing material, and the clogging of the adsorbent is promoted.

另一方面,圓筒型吸附處理裝置中,區隔吸附室與脫除室的密封材料並未直接接觸,所以不會有霧粒或粉塵助長吸附體堵塞的情形。 On the other hand, in the cylindrical adsorption processing apparatus, since the sealing material which separates the adsorption chamber and the removal chamber is not in direct contact, there is no possibility that fog particles or dust contribute to clogging of the adsorption body.

如以上所述,若考慮到吸附性能,要對包含有會對吸附體造成影響之物質的被處理流體施以處理的情形中,圓筒型吸附處理裝置可說比圓盤型吸附處理裝置適合。 As described above, in consideration of the adsorption performance, in the case where the fluid to be treated containing the substance which affects the adsorbent is treated, the cylindrical adsorption treatment apparatus can be said to be more suitable than the disc type adsorption treatment apparatus. .

近年來,吸附處理裝置逐漸有增加處理流量的需求。在圓筒型吸附處理裝置方面,由於處理流量會受流經圓筒狀轉動體之筒孔的被處理流體量所影響,所以可透過加大圓筒狀轉動體的內徑,或增加筒軸方向的高度來使處理流量增加。 In recent years, adsorption processing devices have gradually increased the demand for processing flow. In the cylindrical adsorption treatment device, since the treatment flow rate is affected by the amount of the fluid to be treated flowing through the cylindrical hole of the cylindrical rotor, the inner diameter of the cylindrical rotor can be increased or the direction of the cylinder axis can be increased. The height to increase the processing traffic.

然而,如專利文獻1及專利文獻2所揭示者,在以筒軸朝向鉛直方向的形式將圓筒狀轉動體以可繞筒軸旋轉方式設置在機架上的樣態中構成圓筒型吸附處理裝置時,會因內徑加大或筒軸方向高度增加,而導致受 到高度限制或寬度規限等,而在輸送上發生問題。因此,以上述方式加大內徑或高度的圓筒狀轉動體並不具實用性。 However, as disclosed in Patent Document 1 and Patent Document 2, the cylindrical rotating body is formed in a state in which the cylindrical shaft is oriented in the vertical direction so as to be rotatable around the drum shaft to form a cylindrical type of adsorption. When the device is processed, it may be affected by an increase in the inner diameter or an increase in the height of the cylinder axis. Go to height limit or width limit, etc., and there is a problem with the delivery. Therefore, it is not practical to increase the inner diameter or the height of the cylindrical rotor in the above manner.

而且,如專利文獻1及專利文獻2所揭示者,以只從圓筒狀轉動體的筒軸方向的一側流出被處理流體的方式構成的情況中,在靠近流出口的一側,流體的流動阻力較小,而在距離流出口較遠的圓筒狀轉動體的筒軸方向另一側,流體的流動阻力就較大。在增加圓筒狀轉動體的高度時,因這種流動阻力的差所造成的影響會較大,流體通過圓筒狀轉動體之際,容易在圓筒狀轉動體的高度方向上產生流量分布。結果,吸附於吸附體的被處理物質量也會在高度方向上產生分布,而在處理上發生參差不均的情形。再者,由於圓筒狀轉動體的高度增加,也會有筒軸偏離鉛直方向的情形,而有圓筒狀轉動體無法穩定旋轉的現象。 Further, as disclosed in Patent Document 1 and Patent Document 2, in the case where the fluid to be treated flows out only from one side in the cylinder axis direction of the cylindrical rotor, the fluid is on the side close to the outlet. The flow resistance is small, and the flow resistance of the fluid is large on the other side in the cylinder axis direction of the cylindrical rotating body far from the outflow port. When the height of the cylindrical rotating body is increased, the influence of the difference in the flow resistance is large, and when the fluid passes through the cylindrical rotating body, the flow distribution is easily generated in the height direction of the cylindrical rotating body. . As a result, the mass of the object to be treated adsorbed to the adsorbent also produces a distribution in the height direction, and unevenness occurs in the treatment. Further, since the height of the cylindrical rotor increases, there is a case where the cylinder shaft is displaced from the vertical direction, and the cylindrical rotor cannot be stably rotated.

本發明係有鑑於上述問題而研創者,本發明的目的在於提供具有實用性的大小,且可使被處理流體的處理流量增加的吸附處理裝置。 The present invention has been made in view of the above problems, and an object of the present invention is to provide an adsorption treatment apparatus which is practical in size and which can increase the processing flow rate of a fluid to be treated.

根據本發明第1態樣的吸附處理裝置係具備:筒狀轉動體,由複數個吸附體配置成具有筒孔的筒狀,且屬於可繞筒軸旋轉的中空轉動體,並以其內周界定上述筒孔;及第1區域與第2區域,彼此區隔,且藉由上述筒狀轉動體進行旋轉,使上述複數個吸附體交替通過;上述筒孔的兩端係形成開口;上述第1區域係為伴隨上 述筒狀轉動體的旋轉而移動的上述複數個吸附體的一部分以氣密或液密連通於以彼此相對向方式配設在上述筒狀轉動體之內周側及外周側的內周側流路形成構件及外周側流路形成構件的區域;上述第2區域係為流體以通過位於上述內周側流路形成構件周圍的上述筒狀轉動體的上述筒孔,而從上述筒孔兩端的開口流出的方式,從上述筒狀轉動體的外周側向內周側導入上述吸附體的區域,或者是,從上述筒孔兩端的開口流入並通過位於上述內周側流路形成構件周圍的上述筒孔的流體,從上述筒狀轉動體內周側向外周側導入上述吸附體的區域。 According to a first aspect of the present invention, an adsorption processing apparatus includes a cylindrical rotating body, a cylindrical body having a cylindrical hole formed by a plurality of adsorbing bodies, and a hollow rotating body rotatable about a cylindrical axis, and having an inner circumference thereof Defining the cylindrical hole; and the first region and the second region are spaced apart from each other, and rotating the cylindrical rotating body to alternately pass the plurality of adsorbing bodies; and forming an opening at both ends of the tubular hole; 1 area is accompanied by A part of the plurality of adsorbing bodies that are moved by the rotation of the cylindrical rotating body are disposed in an airtight or liquid-tight manner, and are disposed on the inner peripheral side and the outer peripheral side of the inner peripheral side of the cylindrical rotating body so as to face each other in an airtight or liquid-tight manner. a region of the road forming member and the outer peripheral side flow path forming member; wherein the second region is a fluid that passes through the cylindrical hole of the cylindrical rotating body located around the inner peripheral side flow path forming member, and is formed from both ends of the cylindrical hole The opening of the cylindrical rotating body is introduced into the region of the adsorbing body from the outer peripheral side to the inner peripheral side of the tubular rotating body, or flows from the opening at both ends of the tubular hole and passes through the periphery of the inner peripheral side flow path forming member. The fluid of the cylindrical hole is introduced into the region of the adsorbent from the peripheral side of the cylindrical body to the outer peripheral side.

根據上述本發明第1態樣的吸附處理裝置中,上述內周側流路形成構件較佳為包含在上述筒孔兩端的上述開口之間沿著上述筒軸方向從一方的上述開口延伸到另一方的上述開口的部分,且從上述筒孔兩端的上述開口的至少一方向外部延伸。再者,上述第1區域較佳為通過上述內周側流路形成構件內部的流體從上述筒狀轉動體的內周側向外周側導入上述吸附體的區域,或者是,流體從上述筒狀轉動體的外周側向內周側導入上述吸附體,俾導入上述內周側流路形成構件的區域。 In the adsorption processing apparatus according to the first aspect of the present invention, it is preferable that the inner circumferential side flow path forming member extends between the openings at both ends of the cylindrical hole from one of the openings to the other along the cylindrical axis direction. A portion of the one of the openings extends outward from at least one of the openings at both ends of the tubular hole. Furthermore, it is preferable that the first region is a region in which the fluid inside the inner circumferential side flow path forming member is introduced into the adsorption body from the inner circumferential side to the outer circumferential side of the cylindrical rotor, or the fluid is from the cylindrical shape. The outer peripheral side of the rotor is introduced into the adsorbent body toward the inner peripheral side, and the crucible is introduced into a region of the inner peripheral side flow path forming member.

根據上述本發明第1態樣的吸附處理裝置中,上述筒狀轉動體的上述筒軸較佳為延伸於水平方向。 In the adsorption processing apparatus according to the first aspect of the invention, it is preferable that the cylindrical shaft of the cylindrical rotor extends in a horizontal direction.

根據上述本發明第1態樣的吸附處理裝置中,較佳為筒狀轉動體進一步包含分別配置在彼此相鄰的吸附體之間的複數個隔開體;藉由上述複數個隔開體形成供配置上述複數個吸附體之各者的複數個空間部;上 述內周側流路形成構件包含和上述筒狀轉動體的內周側彼此面對的內周側開口端部。在此情況中,較佳為,位於上述筒狀轉動體的旋轉方向前方側的上述內周側開口端部的旋轉方向前方側緣部及位於上述筒狀轉動體的上述旋轉方向後方側的上述內周側開口端部的旋轉方向後方側緣部,分別設有沿著上述旋轉方向彎曲的內周側彎曲面。而且,上述外周側流路形成構件較佳為包含和上述筒狀轉動體的外周側彼此面對的外周側開口端部。在此情況中,較佳為,位於上述筒狀轉動體的上述旋轉方向前方側的上述外周側開口端部的旋轉方向前方側緣部及位於上述筒狀轉動體的上述旋轉方向後方側的上述外周側開口端部的旋轉方向後方側緣部,分別設置有沿著上述旋轉方向彎曲的外周側彎曲面。再者,較佳為,位於上述筒狀轉動體內周側之部分的上述隔開體,設有從上述筒孔的一端側延伸到另一端側且從上述隔開體向上述筒狀轉動體的徑向內側突出的內側密封構件。而且,較佳為,位於上述筒狀轉動體外周側之部分的上述隔開體,設有從上述筒孔的一端側延伸到另一端側且從上述隔開體向上述徑向外側突出的外側密封構件。還有,在此情況中,較佳為,藉由伴隨著上述筒狀轉動體的旋轉,使上述內側密封構件相對於上述內周側彎曲面滑動,且上述外側密封構件相對於上述外周側彎曲面滑動,而使上述複數個空間部之一部份以氣密或液密連通於上述內周側流路形成構件及上述外周側流路形成構件。 In the above-described adsorption processing apparatus according to the first aspect of the present invention, preferably, the cylindrical rotating body further includes a plurality of partitions respectively disposed between the adsorbing bodies adjacent to each other; formed by the plurality of partitions a plurality of space portions for arranging each of the plurality of adsorbing bodies; The inner peripheral side flow path forming member includes an inner peripheral side open end portion that faces the inner peripheral side of the cylindrical rotating body. In this case, it is preferable that the front side edge portion in the rotation direction of the inner peripheral side opening end portion on the front side in the rotation direction of the cylindrical rotor body and the rear side in the rotation direction of the cylindrical rotor body are An inner peripheral side curved surface that is curved in the rotation direction is provided in each of the rear side edge portions in the rotation direction of the inner peripheral side opening end portion. Further, it is preferable that the outer peripheral side flow path forming member includes an outer peripheral side open end portion that faces the outer peripheral side of the cylindrical rotating body. In this case, it is preferable that the front side edge portion of the outer peripheral side opening end portion on the front side in the rotation direction of the cylindrical rotating body on the front side in the rotation direction and the rear side in the rotation direction of the cylindrical rotor body are An outer peripheral side curved surface that is curved in the rotation direction is provided in each of the rear side edge portions in the rotation direction of the outer peripheral side opening end portion. Furthermore, it is preferable that the partitioning body located at a portion on the circumferential side of the cylindrical rotating body is provided to extend from one end side to the other end side of the cylindrical hole and to pass from the partitioning body to the cylindrical rotating body. An inner sealing member that protrudes radially inward. Further, it is preferable that the partitioning body located at a portion on the outer peripheral side of the cylindrical rotating body is provided with an outer side extending from one end side to the other end side of the cylindrical hole and protruding outward from the partitioning body toward the radial direction. Sealing member. Further, in this case, it is preferable that the inner seal member slides with respect to the inner peripheral side curved surface by the rotation of the cylindrical rotor, and the outer seal member is bent with respect to the outer peripheral side. The curved surface is slid, and one of the plurality of space portions is communicated to the inner circumferential side flow path forming member and the outer circumferential side flow path forming member in an airtight or liquid-tight manner.

根據上述本發明第2態樣的吸附處理裝置,具 備:複數個筒狀轉動體,由複數個吸附體配置成具有筒孔的筒狀,且屬於可繞筒軸旋轉的中空轉動體,並以其內周界定上述筒孔;及第1區域與第2區域,彼此區隔,且藉由上述複數個筒狀轉動體旋轉,使上述複數個吸附體交替通過;上述筒孔的兩端係形成開口;上述複數個筒狀轉動體係以上述複數個筒狀轉動體之各者所具有的上述筒孔互相連通的方式並排配置於水平方向。上述第1區域係為伴隨著上述複數個筒狀轉動體的旋轉而移動的上述複數個筒狀轉動體所包含的上述複數個吸附體之一部分以氣密或液密連通於以包含跨過上述複數個筒狀轉動體的部分的方式設置在相連通的複數個上述筒孔內的內周側流路形成構件、及以和上述內周側流路形成構件相對向的方式配置在上述複數個筒狀轉動體外周側的外周側流路形成構件的區域。上述第2區域係為流體以通過相連通的複數個上述筒孔中位於上述內周側流路形成構件周圍的部分,而從水平方向並排的上述複數個筒狀轉動體中位於一端的上述筒狀轉動體處沒有鄰接的上述筒狀轉動體之側的上述筒孔開口及水平方向並排的上述複數個筒狀轉動體中位於另一端的上述筒狀轉動體處沒有鄰接的上述筒狀轉動體之側的上述筒孔開口流出的方式,從上述複數個筒狀轉動體的外周側向內周側導入上述吸附體的區域,或者是,從水平方向並排的上述複數個筒狀轉動體中位於一端的上述筒狀轉動體處沒有鄰接的上述筒狀轉動體之側的上述筒孔開口及水平方向並排的上述複數個筒狀轉動體中位於另一端的上述筒狀轉動體 處沒有鄰接的上述筒狀轉動體之側的上述筒孔開口流入,且通過相連通的複數個上述筒孔中位於上述內周側流路形成構件周圍的部分的流體係從上述複數個筒狀轉動體的內周側向外周側導入上述吸附體的區域。 According to the second aspect of the present invention, the adsorption processing apparatus has a plurality of cylindrical rotating bodies, which are arranged in a cylindrical shape having a cylindrical hole by a plurality of adsorbing bodies, and belong to a hollow rotating body rotatable around the cylindrical axis, and define the cylindrical hole with an inner circumference thereof; and the first region and The second region is spaced apart from each other, and the plurality of the plurality of cylindrical rotating bodies are rotated to alternately pass the plurality of adsorbing bodies; the two ends of the cylindrical holes are formed with openings; and the plurality of cylindrical rotating systems are plural The cylindrical holes of the respective cylindrical rotors are arranged side by side in a horizontal direction. The first region is a portion of the plurality of adsorbing bodies included in the plurality of cylindrical rotating bodies that move in association with the rotation of the plurality of cylindrical rotating bodies, and is connected in an airtight or liquid-tight manner to include The inner circumferential side flow path forming member provided in a plurality of the cylindrical holes that are in communication with each other is disposed in the plurality of the cylindrical rotating bodies, and is disposed in the plurality of the inner circumferential side flow path forming members so as to face the inner circumferential side flow path forming member The region of the outer peripheral side flow path forming member on the outer peripheral side of the outer circumference of the cylindrical body is rotated. The second region is a portion of the plurality of cylindrical holes that communicate with each other around the inner peripheral side flow path forming member, and the plurality of cylindrical rotating bodies that are arranged side by side in the horizontal direction are located at one end of the plurality of cylindrical rotating bodies The cylindrical opening in the side of the cylindrical rotating body which is not adjacent to the cylindrical rotating body and the cylindrical rotating body which is not adjacent to the cylindrical rotating body at the other end among the plurality of cylindrical rotating bodies which are arranged side by side in the horizontal direction The side of the plurality of cylindrical rotating bodies is introduced into the inner peripheral side from the outer peripheral side of the plurality of cylindrical rotating bodies, or the plurality of cylindrical rotating bodies are arranged in the horizontal direction. The cylindrical rotating body at one end does not have the cylindrical opening on the side of the adjacent cylindrical rotating body, and the cylindrical rotating body at the other end among the plurality of cylindrical rotating bodies arranged side by side in the horizontal direction The cylindrical hole opening on the side of the cylindrical rotating body that is not adjacent to the inlet flows, and the flow system of the portion located around the inner circumferential side flow path forming member among the plurality of cylindrical holes that communicate with each other is from the plurality of cylindrical shapes The inner peripheral side of the rotor is introduced into the region of the adsorbent on the outer peripheral side.

根據上述本發明第2態樣的吸附處理裝置中,上述外周側流路形成構件也可包含複數個流路形成構件,而上述複數個流路形成構件之各者則和上述複數個筒狀轉動體分別對應配置。 In the adsorption processing apparatus according to the second aspect of the present invention, the outer peripheral side flow path forming member may include a plurality of flow path forming members, and each of the plurality of flow path forming members may be rotated in the plurality of cylindrical shapes. The body corresponds to the configuration.

根據上述本發明第2態樣的吸附處理裝置中,上述內周側流路形成構件較佳為從水平方向並排的上述複數個筒狀轉動體中位於一端的上述筒狀轉動體處沒有鄰接的上述筒狀轉動體之側的上述筒孔的上述開口及水平方向並排的上述複數個筒狀轉動體中位於另一端的上述筒狀轉動體處沒有鄰接的上述筒狀轉動體之側的上述筒孔的上述開口之至少一方朝外部延伸。再者,上述第1區域較佳為流體通過上述內周側流路形成構件內部後從上述複數個筒狀轉動體的內周側向外周側導入上述吸附體的區域,或者是,流體從上述複數個筒狀轉動體的外周側向內周側導入上述吸附體,俾導入上述內周側流路形成構件的區域。 In the adsorption processing apparatus according to the second aspect of the present invention, the inner circumferential side flow path forming member is preferably not adjacent to the cylindrical rotating body at one end of the plurality of cylindrical rotating bodies arranged in the horizontal direction. The above-mentioned opening of the cylindrical hole on the side of the cylindrical rotating body and the cylindrical rotating body at the other end of the plurality of cylindrical rotating bodies arranged in the horizontal direction are not adjacent to the cylinder on the side of the cylindrical rotating body At least one of the openings of the holes extends toward the outside. Furthermore, it is preferable that the first region is a region in which the fluid is introduced into the inside of the inner circumferential side flow path forming member, and the adsorbent is introduced from the inner circumferential side to the outer circumferential side of the plurality of cylindrical rotating bodies, or the fluid is from the above. The outer peripheral side of the plurality of cylindrical rotors is introduced into the adsorbent body toward the inner peripheral side, and the crucible is introduced into a region of the inner peripheral side passage forming member.

根據上述本發明第2態樣的吸附處理裝置中,筒狀轉動體可進一步包含分別配置在彼此相鄰的吸附體之間的複數個隔開體。在此情況中,較佳為,藉由上述複數個隔開體形成供配置上述複數個吸附體之各者的複數個空間部。再者,較佳為,上述內周側流路形成構 件包含和上述複數個筒狀轉動體內周側彼此面對的內周側開口端部;位於上述筒狀轉動體的旋轉方向前方側的上述內周側開口端部的旋轉方向前方側緣部及位於上述筒狀轉動體的上述旋轉方向後方側的上述內周側開口端部的旋轉方向後方側緣部,分別設有沿著上述旋轉方向彎曲的內周側彎曲面;上述外周側流路形成構件包含和上述複數個筒狀轉動體之外周側彼此面對的外周側開口端部。在此情況中,位於上述筒狀轉動體的上述旋轉方向前方側的上述外周側開口端部的旋轉方向前方側緣部及位於上述筒狀轉動體的上述旋轉方向後方側的上述外周側開口端部的旋轉方向後方側緣部,分別設有沿著上述旋轉方向彎曲的外周側彎曲面。此外,較佳為,上述複數個筒狀轉動體的各者中,位於上述筒狀轉動體內周側之部分的上述隔開體,設有從上述筒孔的一端側延伸到另一端側,且從上述隔開體向上述筒狀轉動體的徑向內側突出的內側密封構件。較佳為,上述複數個筒狀轉動體之各者中,位於上述筒狀轉動體外周側之部分的上述隔開體,設有從上述筒孔一端側延伸到另一端側,且從上述隔開體向上述徑向外側突出的外側密封構件。而且,較佳為,藉由伴隨著上述複數個筒狀轉動體的旋轉,使上述內側密封構件相對於上述內周側彎曲面滑動,且上述外側密封構件相對於上述外周側彎曲面滑動,而使上述複數個空間部之一部分以氣密或液密連通於上述內周側流路形成構件及上述外周側流路形成構件。 According to the adsorption processing apparatus of the second aspect of the present invention, the cylindrical rotor may further include a plurality of partitions disposed between the adsorbing bodies adjacent to each other. In this case, it is preferable that a plurality of space portions for arranging each of the plurality of adsorbing bodies are formed by the plurality of partition bodies. Furthermore, it is preferable that the inner peripheral side flow path is formed The inner circumferential side opening end portion facing the inner circumferential side of the plurality of cylindrical rotating bodies; the front side edge portion in the rotation direction of the inner circumferential side opening end portion on the front side in the rotation direction of the cylindrical rotating body; The rear side edge portion in the rotation direction of the inner circumferential side opening end portion on the rear side in the rotation direction of the cylindrical rotor is provided with an inner circumferential side curved surface that is curved along the rotation direction, and the outer circumferential side flow path is formed. The member includes an outer peripheral side open end portion that faces the outer peripheral side of the plurality of cylindrical rotating bodies. In this case, the front side edge portion in the rotation direction of the outer peripheral side opening end portion on the front side in the rotation direction of the cylindrical rotor, and the outer peripheral side open end on the rear side in the rotation direction of the cylindrical rotor body Each of the rear side edge portions in the rotation direction of the portion is provided with an outer peripheral side curved surface that is curved along the rotation direction. Further, in each of the plurality of cylindrical rotating bodies, the partitioning body located at a portion on the circumferential side of the cylindrical rotating body is provided to extend from one end side to the other end side of the cylindrical hole, and An inner seal member that protrudes inward in the radial direction of the cylindrical rotor from the partition body. Preferably, in each of the plurality of cylindrical rotating bodies, the partitioning body located at a portion on the outer peripheral side of the cylindrical rotating body is provided to extend from one end side to the other end side of the cylindrical hole, and from the partition The outer side sealing member that protrudes outward in the radial direction. Furthermore, it is preferable that the inner seal member slides with respect to the inner peripheral side curved surface by the rotation of the plurality of cylindrical rotors, and the outer seal member slides with respect to the outer peripheral side curved surface. One of the plurality of space portions is communicated to the inner circumferential side flow path forming member and the outer circumferential side flow path forming member in an airtight or liquid-tight manner.

根據上述本發明第1及第2態樣的吸附處理裝 置中,導入上述第1區域的流體宜為加熱流體;導入上述第2區域的流體宜為包含被處理物質的被處理流體。在此情況中,上述被處理流體較佳為從上述筒狀轉動體外周側導入內周側。 Adsorption treatment device according to the first and second aspects of the present invention described above Preferably, the fluid introduced into the first region is preferably a heating fluid; and the fluid introduced into the second region is preferably a fluid to be treated containing the material to be treated. In this case, it is preferable that the fluid to be treated is introduced into the inner peripheral side from the outer peripheral side of the cylindrical rotating body.

根據上述本發明第3態樣的吸附處理裝置,具備:圓筒狀轉動體,藉由在中央部設有開口部且配置成彼此相對的一對中空圓盤、將上述一對中空圓盤間的空間分隔成在圓周方向上互相獨立的複數個空間部的複數個隔開體、及藉由分別配設在上述複數個空間部的複數個吸附體,而構成為筒狀,且可繞著筒軸旋轉;及第1區域與第2區域,互相區隔,且藉由上述圓筒狀轉動體進行旋轉,使上述複數個吸附體交替通過;而上述第1區域係為伴隨著上述圓筒狀轉動體的旋轉而旋轉的上述複數個空間部之一部分以氣密或液密連通於以彼此相對向的方式配設在上述圓筒狀轉動體內周側及外周側的內周側流路形成構件及外周側流路形成構件的區域;而上述第2區域係為流體以通過位於上述內周側流路形成構件周圍的上述圓筒狀轉動體的筒孔並從上述一對中空圓盤雙方的上述開口部流出的方式,從上述圓筒狀轉動體的外周側向內周側導入的區域,或者是,流體從上述一對中空圓盤雙方的上述開口部流入,且在通過位於上述內周側流路形成構件周圍的上述圓筒狀轉動體的上述筒孔後,從上述圓筒狀轉動體的內周側向外周側導入的區域。 According to the third aspect of the present invention, in the adsorption processing apparatus, the cylindrical rotating body includes a pair of hollow disks that are disposed to face each other with an opening at the center, and the pair of hollow disks The space is divided into a plurality of partitions of a plurality of spatial portions independent of each other in the circumferential direction, and a plurality of adsorbing bodies respectively disposed in the plurality of spatial portions, thereby forming a cylindrical shape and being rotatable The cylindrical shaft rotates; and the first region and the second region are separated from each other, and the plurality of adsorbing bodies are alternately passed by the rotation of the cylindrical rotating body; and the first region is accompanied by the cylinder One of the plurality of space portions that are rotated by the rotation of the rotor is disposed in an airtight or liquid-tight manner, and is disposed on the inner circumferential side flow path on the circumferential side and the outer circumference side of the cylindrical rotor body so as to face each other. a member and a region of the outer peripheral side flow path forming member; and the second region is a fluid that passes through the cylindrical hole of the cylindrical rotating body located around the inner peripheral side flow path forming member and from both of the pair of hollow disks of A region in which the opening portion flows out, a region introduced from the outer peripheral side of the cylindrical rotor to the inner peripheral side, or a fluid flowing in from the opening portion of both the pair of hollow disks, and passing through the inner periphery After the cylindrical hole of the cylindrical rotor around the side flow path forming member, the region is introduced from the inner peripheral side to the outer peripheral side of the cylindrical rotor.

根據上述本發明第3態樣的吸附處理裝置中 ,較佳為,上述內周側流路形成構件包含在上述一對中空圓盤雙方的上述開口部間沿著上述筒軸方向從一方的上述開口部延伸至另一方的上述開口部的部分;而上述第1區域係為流體流經穿過上述一對中空圓盤雙方的上述開口部的至少一方的上述內周側流路形成構件的內部後,從上述圓筒狀轉動體的內周側向外周側導入的區域,或者是,流體以從上述圓筒狀轉動體外周側朝向內周側通過上述圓筒狀轉動體後,流經穿過上述一對中空圓盤雙方的上述開口部的至少一方的上述內周側流路形成構件內部的方式導入的區域。 According to the third aspect of the present invention, in the adsorption processing apparatus Preferably, the inner circumferential side flow path forming member includes a portion extending from the one opening portion to the other opening portion along the cylindrical axis direction between the openings of the pair of hollow disks; In the first region, the fluid flows through the inner peripheral side flow path forming member that passes through at least one of the openings of the pair of hollow disks, and the inner peripheral side of the cylindrical rotor In the region introduced to the outer peripheral side, the fluid passes through the cylindrical rotating body from the outer peripheral side toward the inner peripheral side of the cylindrical rotating body, and then flows through the openings passing through both of the pair of hollow disks. At least one of the inner peripheral side flow path forming members is introduced into the region inside the member.

根據上述本發明第3態樣的吸附處理裝置中,上述圓筒狀轉動體的上述筒軸較佳為延伸於水平方向。 According to the adsorption processing apparatus of the third aspect of the present invention, the cylindrical shaft of the cylindrical rotor preferably extends in the horizontal direction.

根據上述本發明第3態樣的吸附處理裝置中,上述內周側流路形成構件較佳為包含面對上述圓筒狀轉動體內周側的內周側開口端部。在此情況中,較佳為,位於上述圓筒狀轉動體的旋轉方向前方側的上述內周側開口端部的旋轉方向前方側緣部及位於上述圓筒狀轉動體的上述旋轉方向後方側的上述內周側開口端部的旋轉方向後方側緣部,分別設有沿著上述旋轉方向彎曲的內周側彎曲面。再者,上述外周側流路形成構件較佳為包含和上述圓筒狀轉動體外周側彼此面對的外周側開口端部。在此情況中,較佳為,位於上述圓筒狀轉動體的上述旋轉方向前方側的上述外周側開口端部的旋轉方向前方側緣部及位於上述圓筒狀轉動體的上述旋轉方向後方側的上述外周側開口端部的旋轉方向後方側緣部,分 別設有沿著上述旋轉方向彎曲的外周側彎曲面。而且,較佳為,位於上述圓筒狀轉動體內周側之部分的上述隔開體,設有在上述一對中空圓盤間從一方中空圓盤延伸至另一方中空圓盤,且從上述隔開體朝上述圓筒狀轉動體的徑向內側突出的內側密封構件。同時,較佳為,位於上述圓筒狀轉動體外周側之部分的上述隔開體,設有在上述一對中空圓盤間從上述一方中空圓盤延伸至上述另一方中空圓盤,且從上述隔開體朝上述徑向外側突出的外側密封構件。而且,在此情況中,較佳為,藉由伴隨上述圓筒狀轉動體的旋轉,使上述內側密封構件相對於上述內周側彎曲面滑動,且上述外側密封構件相對於上述外周側彎曲面滑動,而使上述複數個空間部之一部分以氣密或液密連通於上述內周側流路形成構件及上述外周側流路形成構件。 In the adsorption processing apparatus according to the third aspect of the present invention, it is preferable that the inner circumferential side flow path forming member includes an inner circumferential side opening end portion facing the inner peripheral side of the cylindrical rotating body. In this case, it is preferable that a front side edge portion in the rotation direction of the inner circumferential side opening end portion on the front side in the rotation direction of the cylindrical rotor is located on the rear side in the rotation direction of the cylindrical rotor The rear side edge portion in the rotation direction of the inner circumferential side opening end portion is provided with an inner circumferential side curved surface that is curved along the rotation direction. Further, it is preferable that the outer peripheral side flow path forming member includes an outer peripheral side open end portion that faces the outer peripheral side of the cylindrical rotating body. In this case, it is preferable that a front side edge portion in the rotation direction of the outer peripheral side opening end portion on the front side in the rotation direction of the cylindrical rotor is located on the rear side in the rotation direction of the cylindrical rotor The rear side edge portion of the outer peripheral side opening end portion in the rotation direction A peripheral curved surface that is curved along the above-described rotational direction is not provided. Further, preferably, the partitioning body located at a portion on the circumferential side of the cylindrical rotating body is provided to extend from one hollow disk to the other hollow disk between the pair of hollow disks, and is separated from the space The inner sealing member that protrudes toward the radially inner side of the cylindrical rotor is opened. Further, preferably, the partitioning body located at a portion on the outer peripheral side of the cylindrical rotating body is provided to extend from the one hollow disk to the other hollow disk between the pair of hollow disks, and The partitioning member has an outer sealing member that protrudes outward in the radial direction. Further, in this case, it is preferable that the inner seal member slides with respect to the inner peripheral side curved surface by the rotation of the cylindrical rotor, and the outer seal member is curved with respect to the outer peripheral side. The inner peripheral side flow path forming member and the outer peripheral side flow path forming member are connected to one or more of the plurality of space portions in an airtight or liquid-tight manner.

根據本發明第4態樣的吸附處理裝置,具備:複數個圓筒狀轉動體,係藉由在中央部設有開口部且配置成彼此相對的一對中空圓盤、將上述一對中空圓盤間的空間分隔成在圓周方向上互相獨立的複數個空間部的複數個隔開體、及配設在上述複數個空間部之各者的複數個吸附體,而構成為具有筒孔的筒狀,且可繞著筒軸旋轉;及第1區域與第2區域,係互相區隔,且藉由上述複數個圓筒狀轉動體進行旋轉,使上述複數個吸附體交替通過;上述複數個圓筒狀轉動體係以上述複數個圓筒狀轉動體之各者所具有的上述筒孔互相連通的方式並排配置在水平方向;上述第1區域係為包含於上述複數個圓 筒狀轉動體之上述複數個空間部的一部分以氣密或液密連通於在相連通的複數個上述筒孔內設置成包含跨過上述複數個圓筒狀轉動體之部分的內周側流路形成構件、及以和上述內周側流路形成構件相對向的方式配置在上述複數個圓筒狀轉動體外周側並且和上述複數個圓筒狀轉動體對應設置的複數個外周側流路形成構件的區域;上述第2區域係為流體以通過相連通的複數個上述筒孔中位於上述內周側流路形成構件周圍的部分,再從並排於水平方向的上述複數個圓筒狀轉動體中位於一側的上述圓筒狀轉動體處的上述一對中空圓盤的上述一側的上述開口部、及位於另一側的上述圓筒狀轉動體處的上述一對中空圓盤的上述另一側的上述開口部流出之方式,而從上述複數個圓筒狀轉動體外周側向內周側導入的區域,或者是,流體從並排於水平方向的上述複數個圓筒狀轉動體中位於一側的上述圓筒狀轉動體處的上述一對中空圓盤的上述一側的上述開口部、及位於另一側的上述圓筒狀轉動體處的上述一對中空圓盤的上述另一側的上述開口部流入,而在通過相連通的複數個上述筒孔中位於上述內周側流路形成構件周圍的部分後,從上述複數個圓筒狀轉動體內周側向外周側導入的區域。 An adsorption treatment apparatus according to a fourth aspect of the present invention includes: a plurality of cylindrical rotors, wherein the pair of hollow circles are provided by a pair of hollow disks provided with openings at the center portion and disposed to face each other The space between the disks is divided into a plurality of partitions of a plurality of spatial portions independent of each other in the circumferential direction, and a plurality of adsorbing bodies disposed in each of the plurality of spatial portions, and is configured as a cylinder having a cylindrical hole And rotating around the cylindrical axis; and the first region and the second region are separated from each other, and the plurality of cylindrical rotating bodies are rotated to alternately pass the plurality of adsorbing bodies; The cylindrical rotating system is arranged side by side in a horizontal direction such that the cylindrical holes of each of the plurality of cylindrical rotating bodies communicate with each other; and the first region is included in the plurality of circles a part of the plurality of space portions of the cylindrical rotor is disposed in an airtight or liquid-tight manner in an inner circumferential flow including a portion spanning the plurality of cylindrical rotors in a plurality of the plurality of cylindrical bores communicating with each other The road forming member and the plurality of outer peripheral side flow paths provided on the outer peripheral side of the plurality of cylindrical rotating bodies and corresponding to the plurality of cylindrical rotating bodies are disposed to face the inner peripheral side flow path forming member a region in which the member is formed; the second region is a portion of the plurality of the cylindrical holes that are in fluid communication, and is located around the inner circumferential side flow path forming member, and is further rotated from the plurality of cylindrical rotations arranged in the horizontal direction. The opening portion on the one side of the pair of hollow disks at the one side of the cylindrical rotating body and the pair of hollow disks at the cylindrical rotating body on the other side The region in which the opening on the other side flows out from the outer peripheral side of the plurality of cylindrical rotating bodies toward the inner peripheral side, or the plurality of fluids are arranged in the horizontal direction The pair of the one opening of the pair of hollow disks at the one side of the cylindrical rotor in the cylindrical rotor, and the pair of the cylindrical rotor at the other side The opening of the other side of the hollow disk flows in, and the portion of the plurality of cylindrical holes that are in communication with each other is located around the inner circumferential side flow path forming member, and then rotates from the plurality of cylindrical inner circumferences The area where the side is introduced to the outer peripheral side.

根據上述本發明第4態樣的吸附處理裝置中,上述第1區域較佳為流體流經穿過位於上述一側的上述圓筒狀轉動體的上述一對中空圓盤的上述一側的上述開口部及位於上述另一側的上述圓筒狀轉動體的上述一對中空圓盤的上述另一側的上述開口部之至少一方的上述 內周側流路形成構件內部後,從上述圓筒狀轉動體的內周側向外周側導入的區域,或者是,流體以從上述圓筒狀轉動體外周側向內周側通過上述複數個圓筒狀轉動體後,流經穿過位於上述一側的上述圓筒狀轉動體中的上述一對中空圓盤的上述一側的上述開口部及位於上述另一側的上述圓筒狀轉動體中的上述一對中空圓盤的上述另一側的上述開口部之至少一方的上述內周側流路形成構件內部的方式導入的區域。 According to the fourth aspect of the present invention, in the first aspect, the first region preferably has a fluid flowing through the one side of the pair of hollow disks passing through the cylindrical rotor located on the one side. The opening portion and the at least one of the openings of the other side of the pair of hollow disks of the cylindrical rotating body located on the other side After the inner peripheral side flow path is formed inside the member, the region introduced from the inner peripheral side to the outer peripheral side of the cylindrical rotor is passed through the plurality of the fluid from the outer peripheral side to the inner peripheral side of the outer peripheral side of the cylindrical rotor. After the cylindrical rotor, the opening portion on the one side of the pair of hollow disks that passes through the cylindrical rotating body located on the one side and the cylindrical rotation on the other side A region into which the inside of the inner peripheral side flow path forming member of at least one of the openings on the other side of the pair of hollow disks in the body is introduced.

根據上述本發明第3及第4態樣的吸附處理裝置中,導入上述第1區域的流體宜為加熱流體;導入上述第2區域的流體宜為含有被處理物質的被處理流體。在此情況中,上述被處理流體較佳為從上述圓筒狀轉動體的外周側導入內周側。 In the adsorption treatment apparatus according to the third and fourth aspects of the present invention, the fluid introduced into the first region is preferably a heating fluid, and the fluid introduced into the second region is preferably a fluid to be treated containing the material to be treated. In this case, it is preferable that the fluid to be treated is introduced into the inner peripheral side from the outer peripheral side of the cylindrical rotor.

根據上述本發明第1至第4態樣的吸附處理裝置中,導入上述第1區域的流體宜為加熱流體;導入上述第2區域的流體宜為含有被處理物質的被處理流體。在此情況中,較佳為,藉由上述被處理流體導入上述第2區域,使上述被處理物質透過位於上述第2區域的上述吸附體從上述被處理流體被吸附去除;而且,較佳為藉由上述加熱流體導入上述第1區域,使上述吸附體所吸附的上述被處理物質從位於上述第1區域的上述吸附體被脫除。 In the adsorption treatment apparatus according to the first to fourth aspects of the present invention, the fluid introduced into the first region is preferably a heating fluid, and the fluid introduced into the second region is preferably a fluid to be treated containing the material to be treated. In this case, it is preferable that the material to be treated is introduced into the second region, and the material to be treated is transmitted through the adsorbent located in the second region from the fluid to be treated; The heated material is introduced into the first region, and the material to be treated adsorbed by the adsorbent is removed from the adsorbent located in the first region.

根據上述本發明第1至第4態樣的吸附處理裝置,通過上述第2區域的上述被處理流體的流動方向、與通過上述第1區域的上述加熱流體的流動方向,在徑向的朝向上較佳為反方向。 According to the adsorption processing apparatus of the first to fourth aspects of the present invention, the flow direction of the fluid to be treated in the second region and the flow direction of the heating fluid passing through the first region are in the radial direction. It is preferably in the opposite direction.

根據上述本發明第1至第4態樣的吸附處理裝置,上述被處理流體以廢氣為宜,上述加熱流體以加熱空氣為宜。 According to the adsorption processing apparatus of the first to fourth aspects of the invention described above, it is preferable that the fluid to be treated is exhaust gas, and the heating fluid is preferably heated air.

根據上述本發明第1至第4態樣的吸附處理裝置,上述被處理物質以有機溶劑為宜。 According to the adsorption treatment apparatus of the first to fourth aspects of the invention described above, the substance to be treated is preferably an organic solvent.

根據上述本發明第1至第4態樣的吸附處理裝置,上述吸附體較佳為具有蜂巢構造。 According to the adsorption treatment apparatus of the first to fourth aspects of the invention described above, it is preferable that the adsorbent has a honeycomb structure.

若依本發明,可提供大小具有實用性,且可使被處理流體的處理流量增加的吸附處理裝置。 According to the present invention, it is possible to provide an adsorption treatment apparatus which is practical in size and which can increase the treatment flow rate of the fluid to be treated.

1‧‧‧處理室 1‧‧‧Processing room

2‧‧‧第1流路形成構件 2‧‧‧1st flow path forming member

2a‧‧‧開口部 2a‧‧‧ openings

3‧‧‧第2流路形成構件 3‧‧‧Second flow path forming member

3a‧‧‧開口部 3a‧‧‧ openings

4、4B‧‧‧內周側流路形成構件 4, 4B‧‧‧ inner peripheral side flow path forming member

4a‧‧‧內周側開口端部 4a‧‧‧Opening end on the inner circumference side

4b、4c‧‧‧內周側彎曲面 4b, 4c‧‧‧ inner peripheral side curved surface

5‧‧‧外周側流路形成構件 5‧‧‧ peripheral side flow path forming member

5a‧‧‧外周側開口端部 5a‧‧‧Open side of the outer peripheral side

5b、5c‧‧‧外周側彎曲面 5b, 5c‧‧‧ peripheral curved surface

6‧‧‧支撐構件 6‧‧‧Support members

7‧‧‧支撐輪 7‧‧‧Support wheel

8‧‧‧密封構件 8‧‧‧ Sealing members

10‧‧‧一對中空圓盤 10‧‧‧A pair of hollow discs

11‧‧‧第1中空圓盤 11‧‧‧1st hollow disc

11a‧‧‧開口部 11a‧‧‧ Opening

12‧‧‧第2中空圓盤 12‧‧‧2nd hollow disc

12a‧‧‧開口部 12a‧‧‧ openings

20‧‧‧隔開體 20‧‧‧ partition

21‧‧‧本體部 21‧‧‧ Body Department

22‧‧‧設置部 22‧‧‧Setting Department

23‧‧‧內周側設置部 23‧‧‧ Inner peripheral side setting department

23a‧‧‧內周側設置面 23a‧‧‧ inner peripheral side setting surface

24‧‧‧外周側設置部 24‧‧‧Outer side setting department

24a‧‧‧外周側設置面 24a‧‧‧outside side setting surface

30‧‧‧吸附體 30‧‧‧Adsorbed body

40‧‧‧密封構件 40‧‧‧ Sealing members

41‧‧‧內側密封構件 41‧‧‧Inside sealing member

42‧‧‧外側密封構件 42‧‧‧Outer sealing member

90‧‧‧圓筒狀轉動體 90‧‧‧Cylinder rotating body

90a‧‧‧筒孔 90a‧‧‧Cylinder hole

100、100A、100B、100C、100D‧‧‧吸附處理裝置 100, 100A, 100B, 100C, 100D‧‧‧ adsorption treatment device

圖1為實施形態1的吸附處理裝置的縱剖面圖。 Fig. 1 is a longitudinal sectional view showing an adsorption processing apparatus according to a first embodiment.

圖2為沿圖1所示II-II線的剖面圖。 Figure 2 is a cross-sectional view taken along line II-II of Figure 1.

圖3為圖1所示圓筒狀轉動體的要點之部分放大剖面圖。 Fig. 3 is a partially enlarged cross-sectional view showing the outline of the cylindrical rotor shown in Fig. 1;

圖4為實施形態2的吸附處理裝置的縱剖面圖。 Fig. 4 is a longitudinal sectional view showing an adsorption processing apparatus according to a second embodiment;

圖5為實施形態3的吸附處理裝置的縱剖面圖。 Fig. 5 is a longitudinal sectional view showing an adsorption processing apparatus according to a third embodiment.

圖6為實施形態4的吸附處理裝置的縱剖面圖。 Fig. 6 is a longitudinal sectional view showing the adsorption processing apparatus of the fourth embodiment.

圖7為實施形態5的吸附處理裝置的縱剖面圖。 Fig. 7 is a longitudinal sectional view showing an adsorption processing apparatus according to a fifth embodiment.

[實施發明之形態] [Formation of the Invention]

以下,參佐附圖就本發明的實施形態加以詳細說明。此外,以下所揭示的實施形態中,針對相同或共通的部分,在圖中係標註相同的符號,其重複說明則 從略。再者,下文中,存在有複數個實施形態時,除非有特別記載,自始就預定將各個實施形態的特徵部分適當加以組合。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the embodiments disclosed below, the same or common parts are denoted by the same reference numerals in the drawings, and the description thereof is repeated. be omitted. Further, in the following, when there are a plurality of embodiments, unless otherwise specified, the characteristic portions of the respective embodiments are appropriately combined from the beginning.

(實施形態1) (Embodiment 1)

圖1為本實施形態的吸附處理裝置的縱剖面圖。圖2為沿圖1所示II-II線的剖面圖。圖3為圖1所示圓筒狀轉動體的要點部分之放大剖面圖。茲參佐圖1至圖3,就本實施形態的吸附處理裝置100加以說明。 Fig. 1 is a longitudinal sectional view showing an adsorption treatment apparatus of the present embodiment. Figure 2 is a cross-sectional view taken along line II-II of Figure 1. Fig. 3 is an enlarged cross-sectional view showing the essential part of the cylindrical rotor shown in Fig. 1. The adsorption treatment apparatus 100 of the present embodiment will be described with reference to Figs. 1 to 3 .

如圖1所示,本實施形態的吸附處理裝置100係使用後述的吸附體30將供給到處理室1內的大風量被處理流體F1內所包含的被處理物質吸附去除,並將已淨化的乾淨空氣F2排出。再者,吸附處理裝置100係藉由將少量的加熱流體F3噴吹到含有已被吸附去除的被處理物質的吸附體30,將被處理物質自該吸附體30脫除,並以濃縮流體F4的形態排出。 As shown in FIG. 1 , the adsorption treatment apparatus 100 of the present embodiment adsorbs and removes the substance to be treated contained in the large-volume fluid to be treated F1 supplied into the processing chamber 1 by using the adsorbent 30 to be described later, and purifies the purified material. Clean air F2 is discharged. Further, the adsorption treatment apparatus 100 removes the substance to be treated from the adsorption body 30 by blowing a small amount of the heating fluid F3 to the adsorption body 30 containing the substance to be adsorbed and removed, and concentrates the fluid F4. The form is discharged.

被處理物質的吸附處理係在後述的第2區域R2(參佐圖2)中進行。被處理物質的脫除處理則在後述的第1區域R1(參佐圖2)中進行。藉著圓筒狀轉動體90繞著筒軸C旋轉,而對通過第1區域R1並位於第2區域R2的吸附體30進行吸附處理;並且,在吸附處理後對通過第2區域R2並位於第1區域R1的吸附體30進行脫除處理。依此方式,吸附處理裝置100中,即得以持續方式實施吸附處理及脫除處理。 The adsorption treatment of the substance to be treated is carried out in a second region R2 (see Fig. 2) to be described later. The treatment for removing the substance to be treated is carried out in the first region R1 (see FIG. 2) to be described later. The cylindrical rotating body 90 is rotated around the cylindrical axis C, and the adsorption body 30 that has passed through the first region R1 and located in the second region R2 is subjected to adsorption treatment; and after the adsorption treatment, the second region R2 is located and is located. The adsorbent 30 of the first region R1 is subjected to a removal treatment. In this manner, in the adsorption treatment device 100, the adsorption treatment and the removal treatment are carried out in a continuous manner.

如圖1至圖3所示,吸附處理裝置100具備:圓筒狀轉動體90、第1流路形成構件2、第2流路形成構件3 、內周側流路形成構件4、及外周側流路形成構件5。 As shown in FIGS. 1 to 3 , the adsorption processing device 100 includes a cylindrical rotor 90 , a first flow path forming member 2 , and a second flow path forming member 3 . The inner peripheral side flow path forming member 4 and the outer peripheral side flow path forming member 5.

圓筒狀轉動體90係設置於處理室1內。圓筒狀轉動體90為中空的轉動體。圓筒狀轉動體90具有兩端呈開口狀的筒孔90a。圓筒狀轉動體90係設成流體可徑向流動的方式,且圓筒狀轉動體90設成可繞筒軸C旋轉。圓筒狀轉動體90係設成筒軸C方向為朝向鉛直方向,並以可旋轉方式支撐在支柱等複數個支撐構件6上。 The cylindrical rotor 90 is disposed in the processing chamber 1. The cylindrical rotor 90 is a hollow rotor. The cylindrical rotor 90 has a cylindrical hole 90a having an open end. The cylindrical rotor 90 is configured such that fluid can flow in a radial direction, and the cylindrical rotor 90 is provided to be rotatable about the cylinder axis C. The cylindrical rotor 90 is oriented such that the cylinder axis C direction faces the vertical direction and is rotatably supported by a plurality of support members 6 such as pillars.

圓筒狀轉動體90係藉一對中空圓盤10、複數個隔開體20及複數個吸附體30所構成。圓筒狀轉動體90的形狀主要是由複數個吸附體30界定。圓筒狀轉動體90主要是由複數個吸附體30配置成具有筒孔90a的圓筒狀所構成。 The cylindrical rotor 90 is composed of a pair of hollow disks 10, a plurality of partitions 20, and a plurality of adsorbing bodies 30. The shape of the cylindrical rotor 90 is mainly defined by a plurality of adsorbing bodies 30. The cylindrical rotor 90 is mainly constituted by a cylindrical shape in which a plurality of adsorbing bodies 30 are arranged to have a cylindrical hole 90a.

一對中空圓盤10係配置成彼此相對的形態。一對中空圓盤10包括第1中空圓盤11及第2中空圓盤12。在第1中空圓盤11及第2中空圓盤12的中央部分別設有開口部11a及開口部12a。第1中空圓盤11及第2中空圓盤12係保持距離設置,俾可在兩者間配置隔開體20及吸附體30。 The pair of hollow discs 10 are arranged to face each other. The pair of hollow disks 10 includes a first hollow disk 11 and a second hollow disk 12. An opening 11a and an opening 12a are provided in the central portions of the first hollow disk 11 and the second hollow disk 12, respectively. The first hollow disk 11 and the second hollow disk 12 are disposed at a distance therebetween, and the partition body 20 and the adsorbing body 30 can be disposed between the two.

複數個隔開體20係將一對中空圓盤10之間的空間沿著圓周方向分隔成互相獨立的複數個空間部S(參佐圖3)。亦即,藉由複數個隔開體20形成供配置複數個吸附體30之各者的複數個空間部S。複數個隔開體20係配置成各者的中心O(參佐圖3)以預定的間距排列於圓周方向。複數個隔開體20的各者係配置於圓周方向上的彼此相鄰吸附體之間。複數個隔開體20係以筒軸C方向形成以 氣密及/或液密的方式安裝於一對中空圓盤10間。 The plurality of partitioning bodies 20 divide the space between the pair of hollow disks 10 into a plurality of spatial portions S independent of each other in the circumferential direction (see FIG. 3). That is, a plurality of space portions S for arranging each of the plurality of adsorbing bodies 30 are formed by a plurality of partition bodies 20. A plurality of partitioning bodies 20 are arranged such that the centers O (see FIG. 3) of the respective ones are arranged in the circumferential direction at a predetermined pitch. Each of the plurality of partitioning bodies 20 is disposed between adjacent adsorbing bodies in the circumferential direction. A plurality of partitions 20 are formed in the direction of the cylinder axis C It is installed between a pair of hollow discs 10 in an airtight and/or liquid-tight manner.

複數個吸附體30之各者係收容在互相獨立的複數個空間部S。複數個吸附體30係配置成例如圓筒狀。複數個吸附體30係以預定的間距排列於圓周方向。吸附體30具有例如方塊形狀。複數個吸附體30係形成可個別更換的方式。例如,即使經再生其吸附性能逐漸降低時,就更換成新品。透過更換,裝置的壽命就可延長。 Each of the plurality of adsorbing bodies 30 is housed in a plurality of spatial portions S that are independent of each other. The plurality of adsorbing bodies 30 are arranged, for example, in a cylindrical shape. The plurality of adsorbing bodies 30 are arranged in a circumferential direction at a predetermined pitch. The sorbent body 30 has, for example, a square shape. A plurality of adsorbent bodies 30 are formed in a form that can be individually replaced. For example, even if the adsorption performance is gradually reduced by regeneration, it is replaced with a new one. By replacing, the life of the device can be extended.

吸附體30係以包含活性氧化鋁、矽膠、活性碳、沸石等之任一者的吸附材所構成。吸附體30以使用粒狀、粉體狀、蜂巢狀等的活性碳或沸石為宜。活性碳或沸石在吸附及脫除低濃度有機化合物方面很優異。再者,藉由吸附體形成蜂巢狀,可以降低流體的壓力損失,並增大處理能力。此外,也可抑制因垃圾等固形物所造成的堵塞。 The adsorbent 30 is composed of an adsorbent comprising any one of activated alumina, tannin, activated carbon, and zeolite. The adsorbent 30 is preferably activated carbon or zeolite in the form of a pellet, a powder or a honeycomb. Activated carbon or zeolite is excellent in adsorbing and removing low concentrations of organic compounds. Further, by forming the honeycomb body in the form of a honeycomb, the pressure loss of the fluid can be reduced and the processing ability can be increased. In addition, clogging due to solid matter such as garbage can also be suppressed.

在一對中空圓盤10間,藉由將複數個隔開體20及複數個吸附體30交替排列於圓周方向呈圓筒狀所構成的圓筒狀轉動體90中,以連結第1中空圓盤11的開口部11a與第2中空圓盤12的開口部12a的方式形成有筒孔90a(中央空間部)。筒孔90a的一端開口係連通於開口部11a,筒孔90a的另一端開口則連通於開口部12a。 Between the pair of hollow disks 10, a plurality of partition bodies 20 and a plurality of adsorbing bodies 30 are alternately arranged in a cylindrical rotor 90 having a cylindrical shape in the circumferential direction to connect the first hollow circle. A cylindrical hole 90a (a central space portion) is formed in the opening portion 11a of the disk 11 and the opening portion 12a of the second hollow disk 12. One end of the cylindrical hole 90a is open to communicate with the opening 11a, and the other end of the cylindrical hole 90a is open to communicate with the opening 12a.

第1流路形成構件2的一端側係構成為一面維持第1流路形成構件2的內部與圓筒狀轉動體90之筒孔90a的氣密,一面容許圓筒狀轉動體90繞著筒軸C旋轉。具體而言,例如在第1流路形成構件2的一端側設有突緣部,且藉位於該突緣部與開口部11a周緣部位的第1中空 圓盤11挾持環狀的密封構件。第1流路形成構件2的另一端側則導出處理室1外。 The one end side of the first flow path forming member 2 is configured to maintain the airtightness of the inside of the first flow path forming member 2 and the cylindrical hole 90a of the cylindrical rotor 90 while allowing the cylindrical rotating body 90 to be wound around the cylinder. The axis C rotates. Specifically, for example, a flange portion is provided on one end side of the first channel forming member 2, and the first hollow portion is located at a peripheral portion of the flange portion and the opening portion 11a. The disc 11 holds an annular sealing member. The other end side of the first flow path forming member 2 is led out of the processing chamber 1.

第2流路形成構件3的一端側則構成為一面維持第2流路形成構件3內部與圓筒狀轉動體90的筒孔90a的氣密,一面容許圓筒狀轉動體90繞筒軸C旋轉。具體而言,例如在第2流路形成構件3的一端側設有突緣部,且藉位於該突緣部與開口部12a周緣之部分的第2中空圓盤12挾持環狀的密封構件。第2流路形成構件3係設置成不會對複數個的支撐構件6造成干擾。第2流路形成構件3的另一端側則導出處理室1外。 One end side of the second flow path forming member 3 is configured to maintain the airtightness of the inside of the second flow path forming member 3 and the cylindrical hole 90a of the cylindrical rotor 90 while allowing the cylindrical rotor 90 to wrap around the cylinder axis C. Rotate. Specifically, for example, a flange portion is provided on one end side of the second channel forming member 3, and an annular sealing member is held by the second hollow disk 12 located at a portion of the flange portion and the peripheral edge of the opening portion 12a. The second flow path forming member 3 is provided so as not to interfere with the plurality of support members 6. The other end side of the second flow path forming member 3 is led out of the processing chamber 1.

位在圓筒狀轉動體90內周側的筒孔90a配置有內周側流路形成構件4。在圓筒狀轉動體90的外周側則配置有外周側流路形成構件5。內周側流路形成構件4及外周側流路形成構件5係彼此相對配設在圓筒狀轉動體90的內周側及外周側,俾在圓周方向包夾一部分的圓筒狀轉動體90。 The inner peripheral side flow path forming member 4 is disposed in the cylindrical hole 90a positioned on the inner peripheral side of the cylindrical rotor 90. The outer peripheral side flow path forming member 5 is disposed on the outer peripheral side of the cylindrical rotor 90. The inner circumferential side flow path forming member 4 and the outer circumferential side flow path forming member 5 are disposed to face each other on the inner circumferential side and the outer circumferential side of the cylindrical rotating body 90, and a part of the cylindrical rotating body 90 is sandwiched in the circumferential direction. .

內周側流路形成構件4係沿著筒孔90a延伸,且設成從開口部11a向圓筒狀轉動體90外側延伸。內周側流路形成構件4係包含在一對中空圓盤10的雙方開口部11a、12a間從一方開口部11a至另一方開口部12a沿著筒軸C方向延伸的部分。亦即,內周側流路形成構件4係包含在筒孔90a的雙方開口間從一方開口至另一方開口沿著筒軸C方向延伸的部分,且從筒孔90a的雙方開口中的一方開口延伸到外部。 The inner circumferential side flow path forming member 4 extends along the cylindrical hole 90a and is provided to extend outward from the opening 11a toward the cylindrical rotating body 90. The inner circumferential side flow path forming member 4 includes a portion extending from the one opening portion 11a to the other opening portion 12a in the direction of the cylinder axis C between the both opening portions 11a and 12a of the pair of hollow disks 10. In other words, the inner circumferential side flow path forming member 4 includes a portion extending from one opening to the other opening in the direction of the cylinder axis C between the openings of the cylindrical hole 90a, and opening from one of the openings of the cylindrical hole 90a. Extend to the outside.

內周側流路形成構件4的一端側設置有和圓 筒狀轉動體90的內周側彼此面對的內周側開口端部4a。內周側開口端部4a中的開口面係設置成在圓周方向上和圓筒狀轉動體90的內周側之一部分區域相對。再者,該開口面係在內周側流路形成構件4的第1中空圓盤11及第2中空圓盤12之間設置成在筒軸C方向上相對於圓筒狀轉動體90的內周側。內周側流路形成構件4的另一端側則從設於第1流路形成構件2的開口部2a向第1流路形成構件2的外側突出。 One end side of the inner peripheral side flow path forming member 4 is provided with a circle The inner peripheral side open end portion 4a of the inner peripheral side of the cylindrical rotor 90 faces each other. The opening surface in the inner peripheral side open end portion 4a is provided to face a partial region on the inner peripheral side of the cylindrical rotor 90 in the circumferential direction. Further, the opening surface is provided between the first hollow disk 11 and the second hollow disk 12 of the inner circumferential side flow path forming member 4 in the direction of the cylindrical axis C with respect to the inside of the cylindrical rotor 90. Week side. The other end side of the inner peripheral side flow path forming member 4 protrudes outward from the first flow path forming member 2 from the opening 2a provided in the first flow path forming member 2.

外周側流路形成構件5的一端側設有和圓筒狀轉動體90的外周側彼此面對的外周側開口端部5a。外周側開口端部5a的開口面係設成在圓周方向上和圓筒狀轉動體外周側的一部分區域相對。該開口面則設置成在第1中空圓盤11及第2中空圓盤12之間在筒軸C方向上和圓筒狀轉動體90的外周側相對。 One end side of the outer peripheral side flow path forming member 5 is provided with an outer peripheral side open end portion 5a that faces the outer peripheral side of the cylindrical rotor 90. The opening surface of the outer peripheral side open end portion 5a is opposed to a partial region of the outer peripheral side of the cylindrical rotating body in the circumferential direction. The opening surface is provided to face the outer peripheral side of the cylindrical rotor 90 in the direction of the cylinder axis C between the first hollow disk 11 and the second hollow disk 12.

如圖2所示,吸附處理裝置100具備朝圓周方向區隔的第1區域R1(參照圖2)及第2區域R2(參照圖2)。複數個吸附體30係藉由圓筒狀轉動體90繞筒軸C旋轉,使第1區域R1和第2區域R2交替移動。 As shown in FIG. 2, the adsorption processing apparatus 100 is provided with the first region R1 (see FIG. 2) and the second region R2 (see FIG. 2) which are partitioned in the circumferential direction. The plurality of adsorbing bodies 30 are rotated around the cylinder axis C by the cylindrical rotor 90, and the first region R1 and the second region R2 are alternately moved.

如圖3所示,第1區域R1係為伴隨著筒狀轉動體90的旋轉而移動的複數個吸著體30的一部分以氣密或液密連通於內周側流路形成構件4及外周側流路形成構件5的區域。亦即,第1區域R1係為伴隨著圓筒狀轉動體90的旋轉而旋轉(移動)的複數個空間部S的一部分以氣密連通於內周側流路形成構件4及外周側流路形成構件5的區域。 As shown in FIG. 3, the first region R1 is a part of a plurality of absorbing bodies 30 that move in association with the rotation of the cylindrical rotor 90, and communicates with the inner peripheral side flow path forming member 4 and the outer periphery in an airtight or liquid-tight manner. The side flow path forms a region of the member 5. In other words, the first region R1 is partially connected to the inner circumferential side flow path forming member 4 and the outer peripheral side flow path in a part of the plurality of space portions S that are rotated (moved) with the rotation of the cylindrical rotor 90. The area of the member 5 is formed.

再者,第1區域R1也是流體導入吸附體30的區域。具體而言,如後所述,第1區域R1也是通過內周側流路形成構件4內部的流體從筒狀轉動體90的內周側向外周側導入吸附體30的區域。 Further, the first region R1 is also a region where the fluid is introduced into the adsorbent 30. Specifically, as will be described later, the first region R1 is also a region in which the fluid inside the inner peripheral side flow path forming member 4 is introduced into the adsorbent 30 from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90.

另外,流體的流動也可設成反方向,第1區域R1也可為使流體從筒狀轉動體90外周側向內周側導入吸附體30,俾導入內周側流路形成構件4的區域。 In addition, the flow of the fluid may be reversed, and the first region R1 may be a region in which the fluid is introduced into the adsorbent 30 from the outer peripheral side to the inner peripheral side of the cylindrical rotor 90, and the crucible is introduced into the inner peripheral side passage forming member 4. .

如後所述,第2區域R2係為使流體從筒狀轉動體90的外周側向內周側導入吸附體30,俾通過位於內周側流路形成構件4周圍的筒孔90a,並從筒孔90a的兩端開口流出的區域。 As will be described later, the second region R2 is such that the fluid is introduced into the adsorbent 30 from the outer peripheral side to the inner peripheral side of the cylindrical rotor 90, and passes through the cylindrical hole 90a located around the inner peripheral side flow path forming member 4, and An area in which both ends of the cylindrical hole 90a are opened.

另外,第2區域也可為使從筒孔90a的兩端開口流入並通過位於內周側流路形成構件4周圍的筒孔90a的流體從筒狀轉動體90的內周側向外周側導入吸附體30的區域。 In addition, the second region may be introduced from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90 by the fluid that flows in from the both end openings of the cylindrical hole 90a and passes through the cylindrical hole 90a located around the inner peripheral side flow path forming member 4. The area of the adsorbent 30.

圓筒狀轉動體90包含設於複數個隔開體20之各者的密封構件40。複數個隔開體20之各者包含用以設置本體部21及密封構件40的設置部22。本體部21具有例如三角筒狀。設置部22具有內周側設置部23及外周側設置部24。 The cylindrical rotor 90 includes a sealing member 40 provided in each of the plurality of partitions 20. Each of the plurality of partitions 20 includes a mounting portion 22 for arranging the body portion 21 and the sealing member 40. The body portion 21 has, for example, a triangular cylinder shape. The installation portion 22 has an inner circumferential side installation portion 23 and an outer circumferential side installation portion 24 .

內周側設置部23具有板狀形狀。內周側設置部23係設成延伸於筒軸C方向。內周側設置部23係設置成從位於圓筒狀轉動體90內周側的本體部21的頂邊部向圓筒狀轉動體90的徑向內側突出。內周側設置部23可以和本體部21一體構成,也可和本體部21以另件構成。內周 側設置部23具有用以設置後述的內側密封構件41的設置面23a。設置面23a係和圓筒狀轉動體90的旋轉方向交叉。 The inner peripheral side installation portion 23 has a plate shape. The inner peripheral side installation portion 23 is provided to extend in the cylinder axis C direction. The inner circumferential side installation portion 23 is provided so as to protrude from the top side portion of the main body portion 21 located on the inner circumferential side of the cylindrical rotor 90 toward the radially inner side of the cylindrical rotor 90. The inner circumferential side installation portion 23 may be integrally formed with the main body portion 21 or may be formed of a separate member from the main body portion 21. Inner week The side installation portion 23 has an installation surface 23a for providing an inner seal member 41 to be described later. The installation surface 23a intersects with the rotation direction of the cylindrical rotor 90.

外周側設置部24具有板狀形狀。外周側設置部24係設成延伸於筒軸C方向。外周側設置部24係設置成從位於圓筒狀轉動體90外周側的本體部21側面向圓筒狀轉動體90的徑向外側突出。外周側設置部24可和本體部21一體構成,也可和本體部21以另件構成。另外,在外周側設置部24和本體部21以另件構成的情況中,外周側設置部24具有例如L字形等可安裝於本體部21的形狀。外周側設置部24具有用以設置後述的外側密封構件42的設置面24a。設置面24a係和圓筒狀轉動體90的旋轉方向交叉。 The outer peripheral side installation portion 24 has a plate shape. The outer peripheral side installation portion 24 is provided to extend in the cylinder axis C direction. The outer peripheral side installation portion 24 is provided to protrude outward in the radial direction of the cylindrical rotor 90 from the side surface of the main body portion 21 located on the outer peripheral side of the cylindrical rotor 90. The outer peripheral side installation portion 24 may be integrally formed with the main body portion 21 or may be formed of a separate member from the main body portion 21. In the case where the outer circumferential side installation portion 24 and the main body portion 21 are formed of a separate member, the outer circumferential side installation portion 24 has a shape that can be attached to the main body portion 21, for example, an L shape. The outer peripheral side installation portion 24 has an installation surface 24a for providing an outer seal member 42 to be described later. The installation surface 24a intersects with the rotation direction of the cylindrical rotor 90.

密封構件40係由例如具有彈性的橡膠構件所構成。密封構件40包含:位於圓筒狀轉動體90內周側的內側密封構件41、及位於圓筒狀轉動體90外周側的外側密封構件42。 The sealing member 40 is composed of, for example, a rubber member having elasticity. The seal member 40 includes an inner seal member 41 located on the inner peripheral side of the cylindrical rotor 90 and an outer seal member 42 located on the outer peripheral side of the cylindrical rotor 90.

在隔開體20所具有的設置面中,內側密封構件41係設置於位在圓筒狀轉動體90內周側的內周側設置面23a。內側密封構件41係在一對中空圓盤10間從一方中空圓盤(第1中空圓盤11)延伸到另一方中空圓盤(第2中空圓盤12)。亦即,內側密封構件41係從筒孔90a一端側延伸到另一端側。內側密封構件41係從隔開體20朝圓筒狀轉動體90的徑向內側突出。 In the installation surface of the partition body 20, the inner side seal member 41 is provided in the inner peripheral side installation surface 23a in the inner peripheral side of the cylindrical rotor 90. The inner seal member 41 extends from one hollow disk (first hollow disk 11) to the other hollow disk (second hollow disk 12) between the pair of hollow disks 10. That is, the inner seal member 41 extends from one end side to the other end side of the cylindrical hole 90a. The inner seal member 41 protrudes from the partition body 20 toward the radially inner side of the cylindrical rotor 90.

在具有隔開體20的設置面中,外側密封構件42係設置在位於圓筒狀轉動體90外周側的外周側設置面 24a。外側密封構件42則在一對中空圓盤10間從一方中空圓盤(第1中空圓盤11)延伸到另一方中空圓盤(第2中空圓盤12)。亦即,外側密封構件42係從筒孔90a一端側延伸到另一端側。外側密封構件42係從隔開體20朝圓筒狀轉動體90的徑向外側突出。 In the installation surface having the partition body 20, the outer seal member 42 is provided on the outer peripheral side installation surface on the outer peripheral side of the cylindrical rotor 90. 24a. The outer seal member 42 extends from one hollow disk (first hollow disk 11) to the other hollow disk (second hollow disk 12) between the pair of hollow disks 10. That is, the outer seal member 42 extends from one end side to the other end side of the cylindrical hole 90a. The outer seal member 42 protrudes outward in the radial direction of the cylindrical rotor 90 from the partition body 20 .

內周側流路形成構件4中,位於圓筒狀轉動體90的旋轉方向前方側的內周側開口端部4a的旋轉方向前方側緣部、及位於圓筒狀轉動體90的旋轉方向後方側的內周側開口端部4a的旋轉方向後方側緣部,分別設有沿著旋轉方向彎曲的內周側彎曲面4b、4c。 In the inner circumferential side flow path forming member 4, the front side edge portion in the rotation direction of the inner circumferential side opening end portion 4a on the front side in the rotation direction of the cylindrical rotor 90 is located behind the rotation direction of the cylindrical rotor 90 The inner peripheral side curved surfaces 4b and 4c which are curved in the rotational direction are respectively provided at the rear side edge portions in the rotational direction of the inner peripheral side open end portion 4a.

外周側流路形成構件5中,位於圓筒狀轉動體90的旋轉方向前方側的外周側開口端部5a的旋轉方向前方側緣部、及位於圓筒狀轉動體90的旋轉方向後方側的外周側開口端部5a的旋轉方向後方側緣部,分別設有沿旋轉方向彎曲的外周側彎曲面5b、5c。 In the outer peripheral side flow path forming member 5, the front side edge portion in the rotation direction of the outer peripheral side opening end portion 5a on the front side in the rotation direction of the cylindrical rotor 90 is located on the rear side in the rotation direction of the cylindrical rotor 90. The outer peripheral side curved surfaces 5b and 5c which are curved in the rotational direction are respectively provided in the rear side edge portion in the rotation direction of the outer peripheral side opening end portion 5a.

藉由伴隨著圓筒狀轉動體90的旋轉,使內側密封構件41相對於內周側彎曲面4b、4c滑動,外側密封構件42相對於外周側彎曲面5b、5c滑動,複數個空間部S的一部分即以氣密連通於內周側流路形成構件4及外周側流路形成構件5。 The inner seal member 41 slides with respect to the inner peripheral side curved surfaces 4b and 4c by the rotation of the cylindrical rotor 90, and the outer seal member 42 slides with respect to the outer peripheral side curved surfaces 5b and 5c, and a plurality of space portions S A part of the inner peripheral side flow path forming member 4 and the outer peripheral side flow path forming member 5 are communicated in an airtight manner.

具體而言,位於在內周側彎曲面4b及外周側彎曲面5b間所設置的隔開體20、與在內周側彎曲面4c及外周側彎曲面5c間所設置的隔開體20之間的空間部S會以氣密連通於內周側流路形成構件4及外周側流路形成構件5。 Specifically, the partition body 20 provided between the inner peripheral side curved surface 4b and the outer peripheral side curved surface 5b and the partition body 20 provided between the inner peripheral side curved surface 4c and the outer peripheral side curved surface 5c are provided. The space portion S is in airtight communication with the inner circumferential side flow path forming member 4 and the outer circumferential side flow path forming member 5.

依此方式,圓筒狀轉動體90就被區隔成:以氣密連通於內周側流路形成構件4及外周側流路形成構件5的第1區域R1、及不連通於內周側流路形成構件4及外周側流路形成構件5,且構成和第1區域R1不同流路的第2區域R2。 In this manner, the cylindrical rotor 90 is partitioned into a first region R1 that communicates with the inner circumferential side flow path forming member 4 and the outer circumferential side flow path forming member 5 in an airtight manner, and does not communicate with the inner peripheral side. The flow path forming member 4 and the outer peripheral side flow path forming member 5 constitute a second region R2 that is different from the first region R1 in the flow path.

如圖1及圖3所示,第1區域R1及第2區域R2中分別導入有流體。通過第2區域R2的流體的流動方向和通過第1區域R1的流體的流動方向,在圓筒狀轉動體90的徑向朝向上以反方向為佳。 As shown in FIGS. 1 and 3, fluid is introduced into each of the first region R1 and the second region R2. The flow direction of the fluid passing through the second region R2 and the flow direction of the fluid passing through the first region R1 are preferably reversed in the radial direction of the cylindrical rotor 90.

在第2區域R2中,流體係從圓筒狀轉動體90的外周側向內周側導入,使其通過位於內周側流路形成構件4周圍的部分的圓筒狀轉動體90的筒孔90a,再從一對中空圓盤10的雙方開口部11a、12a流出。亦即,在第2區域R2中,流體係以通過位於內周側流路形成構件4周圍的筒狀轉動體90的筒孔90a,再從筒孔的兩端開口流出的方式,從筒狀轉動體90的外周側向內周側導入吸附體30。 In the second region R2, the flow system is introduced from the outer peripheral side of the cylindrical rotor 90 toward the inner peripheral side, and passes through the cylindrical hole of the cylindrical rotor 90 located at the portion around the inner peripheral side flow path forming member 4. 90a flows out from both opening portions 11a and 12a of the pair of hollow disks 10. In other words, in the second region R2, the flow system passes through the cylindrical hole 90a of the cylindrical rotor 90 located around the inner peripheral side flow path forming member 4, and flows out from both ends of the cylindrical hole from the cylindrical shape. The outer peripheral side of the rotor 90 is introduced into the adsorbent 30 toward the inner peripheral side.

另一方面,在第1區域R1中,流體係以經由穿通一對中空圓盤10的一方開口部11a的內周側流路形成構件4內部後,從圓筒狀轉動體90內周側向外周側的方式導入。亦即,在第1區域R1,通過內周側流路形成構件4內部的流體係從筒狀轉動體90內周側向外周側導入吸附體30。 On the other hand, in the first region R1, the flow system is formed inside the inner circumferential side flow path forming member 4 through one opening portion 11a of the pair of hollow disks 10, and then from the inner circumferential side of the cylindrical rotor 90. Introduced on the outer peripheral side. In other words, in the first region R1, the flow system in the inner peripheral side flow path forming member 4 is introduced into the adsorbent 30 from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90.

被導入第2區域R2的流體為廢氣等被處理流體。該被處理流體包含當作被處理物質的有機溶劑。在第2區域R2中則進行被處理流體的淨化。 The fluid introduced into the second region R2 is a fluid to be treated such as an exhaust gas. The fluid to be treated contains an organic solvent as a substance to be treated. Purification of the fluid to be treated is performed in the second region R2.

在淨化時,首先,以從圓筒狀轉動體90外周側向內周側的方式將廢氣導入吸附裝置100的第2區域R2。導入第2區域R2的廢氣則在沿徑向通過圓筒狀轉動體90時,藉由利用位於第2區域R2的複數個吸附體30吸附除去有機溶劑,而獲得淨化。圓筒狀轉動體90內周側端部側的廢氣風速係以例如20m/秒以下為佳,10m/秒以下更佳。透過使廢氣的風速設在20m/秒以下,可將有機溶劑有效地吸附去除,透過設在10m/秒以下,可將有機溶劑更有效地吸附去除。 At the time of purification, first, the exhaust gas is introduced into the second region R2 of the adsorption device 100 from the outer peripheral side to the inner peripheral side of the cylindrical rotor 90. When the exhaust gas introduced into the second region R2 passes through the cylindrical rotor 90 in the radial direction, the organic solvent is adsorbed and removed by the plurality of adsorbents 30 located in the second region R2 to obtain purification. The exhaust gas wind speed on the inner circumferential side end side of the cylindrical rotor 90 is preferably, for example, 20 m/sec or less, more preferably 10 m/sec or less. By setting the wind speed of the exhaust gas to 20 m/sec or less, the organic solvent can be efficiently adsorbed and removed, and the organic solvent can be more efficiently adsorbed and removed by being disposed at 10 m/sec or less.

已淨化的廢氣係當作乾淨空氣從第2區域R2排出到圓筒狀轉動體90的筒孔90a。排出到圓筒狀轉動體90的筒孔90a的乾淨空氣則通過位於內周側流路形成構件4周圍的部分的筒孔90a,並從筒孔的兩端開口流出。亦即,排出到圓筒狀轉動體90的筒孔90a的乾淨空氣係通過上述筒孔90a內,再從一對中空圓盤10的雙方開口部11a、12a流出。雖以從雙方開口部11a、12a流出相同流量的乾淨空氣為佳,也可流出不同流量的乾淨空氣。從雙方開口部11a、12a流出的乾淨空氣係分別通過第1流路形成構件2及第2流路形成構件3排出處理室1外。 The purified exhaust gas is discharged as clean air from the second region R2 to the cylindrical hole 90a of the cylindrical rotor 90. The clean air discharged to the cylindrical hole 90a of the cylindrical rotor 90 passes through the cylindrical hole 90a at a portion around the inner peripheral side flow path forming member 4, and flows out from both end openings of the cylindrical hole. In other words, the clean air discharged to the cylindrical hole 90a of the cylindrical rotor 90 passes through the cylindrical hole 90a, and flows out from both the opening portions 11a and 12a of the pair of hollow disks 10. It is preferable that clean air of the same flow rate flows out from both opening portions 11a and 12a, and clean air of different flow rates can be discharged. The clean air flowing out from the both opening portions 11a and 12a is discharged outside the processing chamber 1 by the first flow path forming member 2 and the second flow path forming member 3, respectively.

導入第1區域R1的流體為加熱空氣等加熱流體。在第1區域R1,藉由將吸附體30所吸附的有機溶劑脫除,以進行吸附體30的再生,並且產生有機溶劑濃度升高的濃縮流體。 The fluid introduced into the first region R1 is a heating fluid such as heated air. In the first region R1, the organic solvent adsorbed by the adsorbent 30 is removed to regenerate the adsorbent 30, and a concentrated fluid having an increased concentration of the organic solvent is generated.

為了進行有機溶劑的脫除,係從內周側流路形成構件4的另一端側導入加熱空氣。從內周側流路形成 構件4的另一端側導入的加熱空氣係經由穿通第1中空圓盤11開口部11a的內周側流路形成構件4的內部,從該內周側流路形成構件4的一端側導入第1區域R1。 In order to remove the organic solvent, heated air is introduced from the other end side of the inner peripheral side flow path forming member 4. Forming from the inner peripheral side flow path The heated air introduced into the other end side of the member 4 is introduced into the inner peripheral side flow path forming member 4 of the opening portion 11a of the first hollow disk 11, and is introduced into the first end from the one end side of the inner peripheral side flow path forming member 4. Area R1.

導入第1區域R1的加熱空氣係在從圓筒狀轉動體90內周側向外周側通過圓筒狀轉動體90時,藉由熱能從位於第1區域R1的複數個吸附體30將所吸附的有機溶劑脫除。包含有機溶劑的加熱空氣係以濃縮流體的形態從第1區域R1排出到外周側流路形成構件5。排出到外周側流路形成構件5的濃縮流體則導入至施行回收或燃燒等後處理的後處理裝置。 The heated air introduced into the first region R1 passes through the cylindrical rotor 90 from the inner circumferential side to the outer circumferential side of the cylindrical rotor 90, and is adsorbed by a plurality of adsorbing bodies 30 located in the first region R1 by thermal energy. The organic solvent is removed. The heated air containing the organic solvent is discharged from the first region R1 to the outer peripheral side flow path forming member 5 in the form of a concentrated fluid. The concentrated fluid discharged to the outer peripheral side flow path forming member 5 is introduced to an aftertreatment device that performs post-treatment such as recovery or combustion.

透過以上述方式構成吸附處理裝置100,使乾淨空氣可從圓筒狀轉動體90的筒孔90a(中央空間部)的筒軸C方向兩端側排出,相較於只從筒軸方向一側排出乾淨空氣的結構,可降低流動阻力,且可使從圓筒狀轉動體90排出的流量增多。藉此方式,即可不用將圓筒狀轉動體90的大小擴大到會在輸送上受限制的程度,且可依實用上的大小增加被處理流體的處理流量。 By configuring the adsorption processing apparatus 100 as described above, clean air can be discharged from both end sides of the cylindrical hole 90a (central space portion) of the cylindrical rotor 90 in the cylinder axis C direction, compared to the side only from the cylinder axis direction. The structure in which the clean air is discharged can reduce the flow resistance and increase the flow rate discharged from the cylindrical rotor 90. In this way, the size of the cylindrical rotor 90 can be expanded to such an extent that it is restricted in transportation, and the processing flow rate of the fluid to be treated can be increased in accordance with the practical size.

另外,本實施形態中,雖舉例說明了導入到第2區域R2的流體為包含有機溶劑的廢氣,且導入第1區域R1的流體為加熱空氣的情況,但並不限定於此。導入至第2區域R2的流體也可為包含有機溶劑的排水,導入至第1區域R1的流體也可為水蒸氣。依此方式,在使液體流動時,內周側流路形成構件4及外周側流路形成構件5和第1區域R1係構成為以液密方式連通。 In the present embodiment, the fluid introduced into the second region R2 is an exhaust gas containing an organic solvent, and the fluid introduced into the first region R1 is heated air. However, the present invention is not limited thereto. The fluid introduced into the second region R2 may be a drain containing an organic solvent, and the fluid introduced into the first region R1 may be water vapor. In this manner, when the liquid is caused to flow, the inner peripheral side flow path forming member 4, the outer peripheral side flow path forming member 5, and the first region R1 are configured to communicate in a liquid-tight manner.

再者,在本實施形態,第2區域R2中,也可 將被處理流體從圓筒狀轉動體90的內周側向外周側導入。在該情況中,第2區域R2係為流體從一對中空圓盤10的雙方開口部11a、12a流入,並通過位於內周側流路形成構件4周圍的圓筒狀轉動體90的筒孔90a後,從圓筒狀轉動體90內周側向外周側導入的區域。 Furthermore, in the second embodiment, in the second region R2, The fluid to be treated is introduced from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90. In this case, the second region R2 is a fluid that flows in from the both opening portions 11a and 12a of the pair of hollow disks 10 and passes through the cylindrical hole of the cylindrical rotor 90 located around the inner peripheral side flow path forming member 4. After 90a, the region is introduced from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90.

再者,第1區域R1中,也可以將加熱流體從圓筒狀轉動體90外周側向內周側導入。 Further, in the first region R1, the heating fluid may be introduced from the outer circumferential side to the inner circumferential side of the cylindrical rotor 90.

再者,也可將被處理流體導入第2區域R2,而加熱流體則導入第1區域R1,俾使通過第2區域R2的流體的流動方向和通過第1區域R1的流體的流動方向,在圓筒狀轉動體90的徑向朝向上形成相同方向。 Further, the fluid to be treated may be introduced into the second region R2, and the heating fluid may be introduced into the first region R1, and the flow direction of the fluid passing through the second region R2 and the flow direction of the fluid passing through the first region R1 may be The cylindrical rotor 90 has the same direction in the radial direction.

另外,吸附處理裝置100具備用以使圓筒狀轉動體90旋轉的旋轉機構(未圖示)、及驅動裝置(未圖示)。旋轉機構包含:移動體,一面支持圓筒狀轉動體90,一面可繞著圓筒狀轉動體90的筒軸C移動;移動引導部,引導圓筒狀轉動體90的旋轉移動,俾使筒軸C穩定;及從動構件,藉由本身進行動作來使圓筒狀轉動體90旋轉。 Further, the adsorption treatment device 100 includes a rotation mechanism (not shown) for rotating the cylindrical rotor 90, and a drive device (not shown). The rotating mechanism includes a moving body that supports the cylindrical rotating body 90 while moving around the cylindrical axis C of the cylindrical rotating body 90, and moves the guiding portion to guide the rotational movement of the cylindrical rotating body 90 to cause the cylinder The shaft C is stabilized; and the driven member is operated by itself to rotate the cylindrical rotor 90.

移動體可例舉如車輪等。移動引導部,可以卡合在圓筒狀轉動體90的一部分,以引導圓筒狀轉動體90的移動,也可引導車輪的移動。移動引導部可例舉如導軌。從動構件則藉由例如繞掛在圓筒狀轉動體90周圍的皮帶或鍊條所構成。 The moving body can be exemplified by a wheel or the like. The movement guide portion can be engaged with a part of the cylindrical rotor 90 to guide the movement of the cylindrical rotor 90 or to guide the movement of the wheel. The moving guide can be exemplified as a guide rail. The driven member is constituted by, for example, a belt or a chain wound around the cylindrical rotating body 90.

藉馬達等驅動裝置所產生的驅動力,係透過軸及齒輪等動力傳遞機構傳送到驅動上述從動構件的齒輪等驅動構件,使驅動構件進行驅動。藉此方式,圓筒 狀轉動體90就會和從動構件一起繞筒軸C旋轉。另外,也可將從動構件省略,而藉驅動裝置令車輪等旋轉,使圓筒狀轉動體90繞筒軸C旋轉。 The driving force generated by the driving device such as a motor is transmitted to a driving member such as a gear that drives the driven member through a power transmission mechanism such as a shaft or a gear, and the driving member is driven. In this way, the cylinder The rotor 90 is rotated about the cylinder axis C together with the driven member. Further, the driven member may be omitted, and the driving device may rotate the wheel or the like to rotate the cylindrical rotor 90 around the cylinder axis C.

圓筒狀轉動體90係連續旋轉。例如,圓筒狀轉動體90以每一小時繞筒軸C旋轉1至10次的程度動作。 The cylindrical rotor 90 is continuously rotated. For example, the cylindrical rotor 90 operates to rotate about 1 to 10 times around the cylinder axis C every hour.

(實施形態2) (Embodiment 2)

圖4為本實施形態的吸附處理裝置的縱剖面圖。茲參照圖4就本實施形態的吸附處理裝置100A加以說明。 Fig. 4 is a longitudinal sectional view showing the adsorption processing apparatus of the embodiment. The adsorption treatment apparatus 100A of the present embodiment will be described with reference to Fig. 4 .

如圖4所示,相較於實施形態1的吸附處理裝置100,本實施形態的吸附處理裝置100A的不同點在於使圓筒狀轉動體90的筒軸C朝向大致水平方向,並支撐成可繞筒軸C旋轉。至於其他的構成則大致同樣。 As shown in FIG. 4, the adsorption treatment apparatus 100A of the first embodiment differs from the adsorption treatment apparatus 100 of the first embodiment in that the cylindrical axis C of the cylindrical rotor 90 is oriented in a substantially horizontal direction and supported. Rotate around the cylinder axis C. The other components are roughly the same.

圓筒狀轉動體90係藉由抵接於一對中空圓盤10周端面的複數個支撐輪7,以可旋轉的方式支持。複數個支撐輪7係設置於支撐構件6上。支撐輪7可例舉如單側設有突緣部的車輪、兩側設有突緣部的車輪等。藉由以水平方向作為軸向使支撐輪7繞軸旋轉驅動,即可使圓筒狀轉動體90繞筒軸C轉動。支撐輪7的旋轉係藉馬達等驅動裝置(未圖示)以及軸與齒輪等的動力傳達機構(未圖示)執行。 The cylindrical rotor 90 is rotatably supported by a plurality of support wheels 7 abutting against the circumferential end faces of the pair of hollow disks 10. A plurality of support wheels 7 are disposed on the support member 6. The support wheel 7 may be, for example, a wheel having a flange portion on one side, a wheel having a flange portion on both sides, and the like. By rotating the support wheel 7 about the axis in the horizontal direction as the axial direction, the cylindrical rotor 90 can be rotated about the cylinder axis C. The rotation of the support wheel 7 is performed by a driving device (not shown) such as a motor and a power transmission mechanism (not shown) such as a shaft and a gear.

另外,也可不使支撐輪7直接轉動,而是藉由上述的驅動裝置及動力傳達機構使繞掛在圓筒狀轉動體90的皮帶或鍊條等旋轉,令圓筒狀轉動體90旋轉。 Further, the support roller 7 may be rotated, and the belt or the chain wound around the cylindrical rotor 90 may be rotated by the above-described driving device and power transmission mechanism to rotate the cylindrical rotor 90.

即使在以上述方式構成的情況中,也可從圓筒狀轉動體90的筒孔90a(中央空間部)的筒軸方向兩端 側排出乾淨空氣,且可降低流體通過筒孔90a內的流動阻力。藉此方式,即使是本實施形態的吸附處理裝置100A,亦可提高從圓筒狀轉動體90排出的流量,而獲得和實施形態1的吸附處理裝置100大致相同的效果。再者,藉由使筒軸C朝向大致水平方向,可使圓筒狀轉動體90的旋轉穩定。 Even in the case of the above configuration, the cylindrical shaft 90a (the central space portion) of the cylindrical rotor 90 can be bent from both ends in the cylinder axis direction. The side discharges clean air and reduces the flow resistance of the fluid through the bore 90a. In this way, even in the adsorption treatment apparatus 100A of the present embodiment, the flow rate discharged from the cylindrical rotor 90 can be increased, and substantially the same effects as those of the adsorption treatment apparatus 100 of the first embodiment can be obtained. Further, by rotating the cylinder axis C in a substantially horizontal direction, the rotation of the cylindrical rotor 90 can be stabilized.

(實施形態3) (Embodiment 3)

圖5為本實施形態的吸附處理裝置的縱剖面圖。茲參照圖5就本實施形態的吸附處理裝置100B加以說明。 Fig. 5 is a longitudinal sectional view showing the adsorption processing apparatus of the embodiment. The adsorption treatment apparatus 100B of the present embodiment will be described with reference to Fig. 5 .

如圖5所示,相較於實施形態1的吸附處理裝置100,本實施形態的吸附處理裝置100B的不同點係在內周側流路形成構件4B的構成上。其他構成則大致相同。 As shown in FIG. 5, the adsorption processing apparatus 100 of the first embodiment differs from the adsorption processing apparatus 100 of the first embodiment in the configuration of the inner circumferential side flow path forming member 4B. The other components are roughly the same.

內周側流路形成構件4B係沿著筒孔90a延伸,並設成從一對中空圓盤10的雙方開口部11a、12a向圓筒狀轉動體90的外側延伸。亦即,內周側流路形成構件4B係包含在筒孔90a的兩端開口間沿著筒軸C方向從一方開口延伸至另一方開口的部分,且在筒孔90a的兩端開口中從雙方開口延伸到外部。而內周側流路形成構件4B的中途區域設有和圓筒狀轉動體90內周側彼此面對的內周側開口端部4a。 The inner circumferential side flow path forming member 4B extends along the cylindrical hole 90a, and is provided to extend from the both opening portions 11a and 12a of the pair of hollow disks 10 to the outer side of the cylindrical rotor 90. In other words, the inner peripheral side flow path forming member 4B includes a portion extending from one opening to the other in the direction of the cylinder axis C between the both end openings of the cylindrical hole 90a, and is in the opening at both ends of the cylindrical hole 90a. Both sides of the opening extend to the outside. The intermediate portion of the inner circumferential side flow path forming member 4B is provided with an inner circumferential side opening end portion 4a that faces the inner circumferential side of the cylindrical rotor 90.

位於第1流路形成構件2側的部分的內周側流路形成構件4B係從設於第1流路形成構件2的開口部2a向第1流路形成構件2的外側突出。位於第2流路形成構件3側枝部分的內周側流路形成構件4B則從設於第2流路形成構件3的開口部3a向外側突出。 The inner peripheral side flow path forming member 4B that is located on the first flow path forming member 2 side protrudes outward from the first flow path forming member 2 from the opening 2a provided in the first flow path forming member 2 . The inner circumferential side flow path forming member 4B located in the side branch portion of the second flow path forming member 3 protrudes outward from the opening 3a provided in the second flow path forming member 3.

在此情況下,於第1區域R1中,加熱流體係在經由穿通一對中空圓盤10的雙方開口部11a、12a的內周側流路形成構件4B的內部後,從圓筒狀轉動體90內周側導向外周側。亦即,在第1區域R1中,通過內周側流路形成構件4內部的加熱流體係從筒狀轉動體90內周側向外周側導入到吸附體30。 In this case, in the first region R1, the heating flow system passes through the inside of the inner circumferential side flow path forming member 4B of the both opening portions 11a and 12a of the pair of hollow disks 10, and then the cylindrical rotating body The inner peripheral side of 90 is guided to the outer peripheral side. In other words, in the first region R1, the heating flow system inside the inner circumferential side flow path forming member 4 is introduced into the adsorption body 30 from the inner circumferential side to the outer circumferential side of the cylindrical rotor 90.

另外,在第1區域R1中,加熱流體也可從圓筒狀轉動體90外周側向內周側通過圓筒狀轉動體90後,以經由穿通一對中空圓盤10的雙方開口部11a、12a的部分的內周側流路形成構件4B內部的方式導入。亦即,加熱流體也可以導入內周側流路形成構件4B的方式,從筒狀轉動體90外周側向內周側導入至吸附體30。 In addition, in the first region R1, the heating fluid may pass through the cylindrical rotor 90 from the outer circumferential side to the inner circumferential side of the cylindrical rotor 90, and then pass through both opening portions 11a through which the pair of hollow disks 10 are passed. The inside of the inner peripheral side flow path forming member 4B of the part 12a is introduced. In other words, the heating fluid can be introduced into the adsorption body 30 from the outer circumferential side to the inner circumferential side of the cylindrical rotor 90 so as to be introduced into the inner circumferential side flow path forming member 4B.

即使在以上述方式構成的情況中,也可從圓筒狀轉動體90的筒孔90a(中央空間部)的筒軸方向兩端側排出乾淨空氣,並降低通過筒孔90a內的流體的流動阻力。藉此方式,即使是本實施形態的吸附處理裝置100B,從圓筒狀轉動體90排出的流量也可增加,而得到和實施形態1的吸附處理裝置100大致相同的效果。再者,由於可使導入第1區域R1的加熱流體量增加,故有機溶劑可以更有效地從吸附體30脫除。 Even in the case of the above-described configuration, clean air can be discharged from both end sides of the cylindrical hole 90a (central space portion) of the cylindrical rotor 90 in the cylinder axis direction, and the flow of the fluid passing through the cylindrical hole 90a can be reduced. resistance. In this way, even in the adsorption treatment apparatus 100B of the present embodiment, the flow rate discharged from the cylindrical rotor 90 can be increased, and substantially the same effects as those of the adsorption treatment apparatus 100 of the first embodiment can be obtained. Further, since the amount of the heating fluid introduced into the first region R1 can be increased, the organic solvent can be more effectively removed from the adsorbent 30.

(實施形態4) (Embodiment 4)

圖6為本實施形態的吸附處理裝置的縱剖面圖。茲參照圖6就本實施形態的吸附處理裝置100C加以說明。 Fig. 6 is a longitudinal sectional view showing the adsorption processing apparatus of the embodiment. The adsorption treatment apparatus 100C of the present embodiment will be described with reference to Fig. 6 .

如圖6所示,相較於實施形態2的吸附處理裝置100A,本實施形態的吸附處理裝置100C的不同點在於 有複數個圓筒狀轉動體90平行並排配置。 As shown in Fig. 6, the adsorption processing apparatus 100A of the second embodiment differs from the adsorption processing apparatus 100A of the second embodiment in that A plurality of cylindrical rotors 90 are arranged side by side in parallel.

複數個圓筒狀轉動體90係並排配置於水平方向。複數個圓筒狀轉動體90之每一者的筒孔90a兩端係呈開口狀。複數個筒狀轉動體90各者所具有的筒孔90a係相連通。 A plurality of cylindrical rotors 90 are arranged side by side in the horizontal direction. The cylindrical hole 90a of each of the plurality of cylindrical rotors 90 has an opening shape at both ends. The cylindrical holes 90a of each of the plurality of cylindrical rotors 90 are in communication with each other.

複數個圓筒狀轉動體90中,彼此相鄰的圓筒狀轉動體90的筒孔90a彼此間係以維持氣密方式並排配置。例如,複數對的成對中空圓盤10中,在彼此相鄰的中空圓盤之間,設有用以維持相鄰筒孔90a彼此間之氣密的密封構件8。 In the plurality of cylindrical rotors 90, the cylindrical holes 90a of the cylindrical rotors 90 adjacent to each other are arranged side by side in a gas-tight manner. For example, in the pair of hollow disks 10 of a plurality of pairs, between the hollow disks adjacent to each other, a sealing member 8 for maintaining the airtightness between the adjacent cylindrical holes 90a is provided.

第1流路形成構件2的一端側係構成為:使在複數個圓筒狀轉動體90的並排方向上位於兩側的2個圓筒狀轉動體90中位在一側的圓筒狀轉動體90的筒孔90a、與第1流路形成構件2內部維持氣密,並容許圓筒狀轉動體90繞筒軸C旋轉。具體而言,例如,在第1流路形成構件2的一端側設有突緣部,且藉由該突緣部與位於上述一側的圓筒狀轉動體90的開口部11a周緣所在位置之部分的第1中空圓盤11挾持環狀的密封構件。第1流路形成構件2的另一端側則導出處理室1外。 One end side of the first flow path forming member 2 is configured such that a cylindrical rotation of one of the two cylindrical rotors 90 located on both sides in the direction in which the plurality of cylindrical rotors 90 are arranged in the side is configured The cylindrical hole 90a of the body 90 and the inside of the first flow path forming member 2 are kept airtight, and the cylindrical rotating body 90 is allowed to rotate about the cylindrical axis C. Specifically, for example, a flange portion is provided on one end side of the first channel forming member 2, and the flange portion and the peripheral edge of the opening portion 11a of the cylindrical rotor 90 located on the one side are located. A part of the first hollow disk 11 holds an annular sealing member. The other end side of the first flow path forming member 2 is led out of the processing chamber 1.

第2流路形成構件3的一端側則構成為:使在複數個圓筒狀轉動體90的並排方向上位於兩側的2個圓筒狀轉動體90中位於另一側的圓筒狀轉動體90的筒孔90a、與第2流路形成構件3內部係維持氣密,並容許圓筒狀轉動體90繞筒軸C旋轉。具體而言,例如,在第2流路形成構件3的一端側設有突緣部,且藉由該突緣部與位於 上述另一側的圓筒狀轉動體90的開口部12a周緣所在位置的第2中空圓盤12挾持環狀的密封構件。第2流路形成構件3的另一端側則導出處理室1外。 One end side of the second flow path forming member 3 is configured to have a cylindrical rotation on the other side of the two cylindrical rotors 90 located on both sides in the direction in which the plurality of cylindrical rotors 90 are arranged in the same direction The cylindrical hole 90a of the body 90 and the inside of the second flow path forming member 3 are kept airtight, and the cylindrical rotating body 90 is allowed to rotate about the cylindrical axis C. Specifically, for example, a flange portion is provided on one end side of the second flow path forming member 3, and the flange portion is located The second hollow disk 12 at the position where the peripheral edge of the opening portion 12a of the cylindrical rotor 90 on the other side is located is held by an annular sealing member. The other end side of the second flow path forming member 3 is led out of the processing chamber 1.

以氣密連通的複數個筒孔90a配設有內周側流路形成構件4C。在複數個圓筒狀轉動體90的外周側則配設有分別當作流路形成構件的外周側流路形成構件5。複數個外周側流路形成構件5之各者與內周側流路形成構件4C係以包夾各圓筒狀轉動體90圓周方向的一部分的方式彼此相對配設。 The inner peripheral side flow path forming member 4C is disposed in a plurality of cylindrical holes 90a that communicate with each other in an airtight manner. An outer peripheral side flow path forming member 5 serving as a flow path forming member is disposed on the outer peripheral side of the plurality of cylindrical rotors 90. Each of the plurality of outer peripheral side flow path forming members 5 and the inner peripheral side flow path forming member 4C are disposed to face each other so as to sandwich a part of the circumferential direction of each of the cylindrical rotors 90.

內周側流路形成構件4C係設成在以氣密連通的複數個圓筒90a內沿著筒軸C方向延伸,且從位於上述一側的圓筒狀轉動體90的開口部11a向位於上述一側的圓筒狀轉動體90的外側延伸。亦即,內周側流路形成構件4C係設成包含跨過複數個圓筒狀轉動體90的部分。 The inner circumferential side flow path forming member 4C is formed to extend in the direction of the cylinder axis C in a plurality of cylinders 90a that communicate with each other in an airtight manner, and is located from the opening portion 11a of the cylindrical rotor 90 located on the one side. The outer side of the cylindrical rotor 90 on the one side extends. In other words, the inner peripheral side flow path forming member 4C is provided to include a portion that spans the plurality of cylindrical rotors 90.

在內周側流路形成構件4C的一端側(具體而言,係在複數個筒孔90a內沿筒軸C方向延伸的部分的內周側流路形成構件4C),以和複數個圓筒狀轉動體90的內周側相面對的方式設有內周側開口端部4a。內周側開口端部4a的開口面係設成和複數個圓筒狀轉動體90的內周側圓周方向的一部分區域相對向。內周側流路形成構件4C的另一端側則從設在第1流路形成構件2的開口部2a突出於第1流路形成構件2的外側。 One end side of the inner peripheral side flow path forming member 4C (specifically, an inner peripheral side flow path forming member 4C which is a portion extending in the direction of the cylinder axis C in the plurality of cylindrical holes 90a), and a plurality of cylinders The inner peripheral side opening end portion 4a is provided so that the inner peripheral sides of the rotors 90 face each other. The opening surface of the inner peripheral side opening end portion 4a is opposed to a partial region in the circumferential direction of the inner circumferential side of the plurality of cylindrical rotors 90. The other end side of the inner circumferential side flow path forming member 4C protrudes outside the first flow path forming member 2 from the opening 2a provided in the first flow path forming member 2.

在複數個外周側流路形成構件5各者的一端側,設有和對應的圓筒狀轉動體90外周側彼此面對的外周側開口端部5a。外周側開口端部5a的開口面係設成在 圓周方向上和圓筒狀轉動體90外周側的一部分區域相對向。該開口面係設成在對應的圓筒狀轉動體90的第1中空圓盤11及第2中空圓盤12間朝筒軸C方向和圓筒狀轉動體90外周側相對向。 One end side of each of the plurality of outer peripheral side flow path forming members 5 is provided with an outer peripheral side open end portion 5a that faces the outer peripheral side of the corresponding cylindrical rotor 90. The opening surface of the outer peripheral side open end portion 5a is designed to be A part of the outer peripheral side of the cylindrical rotor 90 is opposed to each other in the circumferential direction. The opening surface is formed to face the outer peripheral side of the cylindrical rotor 90 in the direction of the cylinder axis C between the first hollow disk 11 and the second hollow disk 12 of the corresponding cylindrical rotor 90.

複數個圓筒狀轉動體90係區隔成:以氣密連通於內周側流路形成構件4C及外周側流路形成構件5的第1區域R1;及不和內周側流路形成構件4C及外周側流路形成構件5連通,且構成和第1區域R1不同流路的第2區域R2。 The plurality of cylindrical rotors 90 are partitioned into a first region R1 that communicates with the inner circumferential side flow path forming member 4C and the outer circumferential side flow path forming member 5 in an airtight manner; and an inner circumferential side flow path forming member The 4C and the outer peripheral side flow path forming member 5 communicate with each other, and constitute a second region R2 that is different from the first region R1 in the flow path.

第1區域R1係為伴隨著複數個圓筒狀轉動體90的旋轉而移動的複數個圓筒狀轉動體90中所包含的複數個吸附體30的一部分以氣密或液密連通於內周側流路形成構件4C及外周側流路形成構件5的區域;而內周側流路形成構件4C係在連通的複數個筒孔90a內設成包含跨過複數個圓筒狀轉動體90的部分;外周側流路形成構件5則以和內周側流路形成構件4C相對向的方式配置在複數個圓筒狀轉動體90的外周側。 The first region R1 is a part of the plurality of adsorbing bodies 30 included in the plurality of cylindrical rotors 90 that are moved by the rotation of the plurality of cylindrical rotors 90, and is connected to the inner circumference in an airtight or liquid-tight manner. The side flow path forming member 4C and the outer peripheral side flow path forming member 5; and the inner peripheral side flow path forming member 4C is provided in the plurality of communicating cylindrical holes 90a so as to include the plurality of cylindrical rotating bodies 90. The outer peripheral side flow path forming member 5 is disposed on the outer peripheral side of the plurality of cylindrical rotors 90 so as to face the inner peripheral side flow path forming member 4C.

亦即,第1區域R1為複數個圓筒狀轉動體90所包含的複數個空間部S的一部分係以氣密或液密連通於內周側流路形成構件4C及外周側流路形成構件5的區域;而內周側流路形成構件4C係在連通的複數個筒孔90a內設成包含跨過複數個圓筒狀轉動體90的部分;外周側流路形成構件5則以和內周側流路形成構件4C相對向的方式配置於複數個圓筒狀轉動體90的外周側。 In other words, the first region R1 is a part of the plurality of space portions S included in the plurality of cylindrical rotors 90, and is connected to the inner circumferential side flow path forming member 4C and the outer circumferential side flow path forming member in an airtight or liquid-tight manner. The inner peripheral side flow path forming member 4C is provided in a plurality of communicating cylindrical holes 90a so as to include a portion spanning the plurality of cylindrical rotating bodies 90; and the outer peripheral side flow path forming member 5 is inside and outside The circumferential side flow path forming members 4C are disposed on the outer peripheral side of the plurality of cylindrical rotors 90 so as to face each other.

本實施形態中,廢氣係從圓筒狀轉動體90的 外周側向內周側導入於吸附處理裝置100C的第2區域R2。 In the present embodiment, the exhaust gas is from the cylindrical rotor 90 The outer peripheral side is introduced into the second region R2 of the adsorption treatment device 100C toward the inner peripheral side.

第2區域係為如下所述的區域:從複數個圓筒狀轉動體90外周側向內周側導入流體,以使流體通過連通的複數個筒孔90a中位於內周側流路形成構件4C周圍的部分,再從水平方向並排的複數個圓筒狀轉動體90中位於一側的圓筒狀轉動體90的一對板狀構件10的一側開口部11a、及位於另一側的圓筒狀轉動體90的一對板狀構件10的另一側開口部12a流出。 The second region is a region in which the fluid is introduced from the outer peripheral side of the plurality of cylindrical rotors 90 toward the inner peripheral side so that the fluid passes through the plurality of cylindrical bores 90a and is located in the inner peripheral side flow path forming member 4C. The surrounding portion is a side opening portion 11a of the pair of plate-like members 10 of the cylindrical rotor 90 located on one side of the plurality of cylindrical rotors 90 arranged in the horizontal direction, and a circle on the other side The other side opening portion 12a of the pair of plate-like members 10 of the cylindrical rotor 90 flows out.

亦即,如後所述,第2區域R2係為流體以通過相連通的複數個筒孔90a中位於內周側流路形成構件4C周圍的部分,再從水平方向並排的複數個筒狀轉動體90中位於一端的筒狀轉動體90中沒有相鄰的筒狀轉動體之側的筒孔90a的開口及水平方向並排的複數個筒狀轉動體90中位於另一端的筒狀轉動體90中沒有相鄰的筒狀轉動體之側的筒孔的開口流出的方式,從複數個筒狀轉動體90外周側向內周側導入吸附體30的區域。 In other words, as will be described later, the second region R2 is a portion in the plurality of cylindrical holes 90a through which the fluid passes, and is located around the inner peripheral side flow path forming member 4C, and is further rotated from the horizontal direction by a plurality of cylindrical rotations. The cylindrical rotating body 90 at one end of the body 90 has no opening of the cylindrical hole 90a on the side of the adjacent cylindrical rotating body and the cylindrical rotating body 90 at the other end among the plurality of cylindrical rotating bodies 90 arranged side by side in the horizontal direction. A region in which the opening of the cylindrical hole on the side of the adjacent cylindrical rotating body does not flow out is introduced into the region of the adsorbing body 30 from the outer peripheral side to the inner peripheral side of the plurality of cylindrical rotating bodies 90.

另外,第2區域R2也可為流體從水平方向並排的複數個筒狀轉動體90中位於一端的筒狀轉動體90中沒有相鄰的筒狀轉動體之側的筒孔90a的開口及水平方向並排的複數個筒狀轉動體90中位於另一端的筒狀轉動體90處中沒有相鄰的筒狀轉動體之側的筒孔90a的開口流入,再通過相連通的複數個筒孔90a中位於內周側流路形成構件周圍的部分後,從複數個筒狀轉動體的內周側向外周側導入的區域。 Further, the second region R2 may be an opening and a horizontal portion of the cylindrical hole 90a on the side of the cylindrical rotating body 90 located at one end of the plurality of cylindrical rotating bodies 90 in which the fluid is arranged in the horizontal direction without the adjacent cylindrical rotating body. The cylindrical rotating body 90 at the other end of the plurality of cylindrical rotating bodies 90 arranged in the direction is not in the opening of the cylindrical hole 90a on the side of the adjacent cylindrical rotating body, and is passed through a plurality of cylindrical holes 90a communicating with each other. After the portion located around the inner peripheral side flow path forming member, the region is introduced from the inner peripheral side to the outer peripheral side of the plurality of cylindrical rotating bodies.

導入第2區域R2的廢氣沿著徑向分別通過對 應的圓筒狀轉動體90時,係藉由位於第2區域R2的複數個吸附體30將有機溶劑吸附去除而獲得淨化。 The exhaust gas introduced into the second region R2 passes through the pair in the radial direction In the case of the cylindrical rotating body 90, the organic solvent is adsorbed and removed by a plurality of adsorbing bodies 30 located in the second region R2 to obtain purification.

已淨化的廢氣係當作乾淨空氣從第2區域R2排出到各圓筒狀轉動體90的筒孔90a。排出到各圓筒狀轉動體90的筒孔90a之各者的乾淨空氣係通過在位於內周側流路形成構件4C周圍的部分以氣密連通的複數個圓筒90a內,再從位於上述一側的圓筒狀轉動體90的開口部11a及位於上述另一側的圓筒狀轉動體90的開口部12a流出。 The purified exhaust gas is discharged as clean air from the second region R2 to the cylindrical hole 90a of each cylindrical rotor 90. The clean air that has been discharged to each of the cylindrical holes 90a of the cylindrical rotors 90 passes through a plurality of cylinders 90a that are in airtight communication at a portion located around the inner peripheral side flow path forming member 4C, and is located above The opening 11a of the cylindrical rotor 90 on one side and the opening 12a of the cylindrical rotor 90 located on the other side flow out.

從位於上述一側的圓筒狀轉動體90的開口部11a及位於上述另一側的圓筒狀轉動體90的開口部12a雙方流出的乾淨空氣,係分別通過第1流路形成構件2及第2流路形成構件3而排出處理室外1。 The clean air flowing out from both the opening 11a of the cylindrical rotor 90 located on the one side and the opening 12a of the cylindrical rotor 90 located on the other side passes through the first flow path forming member 2 and The second flow path forming member 3 is discharged to the processing chamber 1 .

另一方面,加熱空氣係經由穿通上述一側的圓筒狀轉動體90的開口部11a的內周側流路形成構件4C的內部後,從圓筒狀轉動體90內周側朝向外周側導入吸附處理裝置100C的第1區域R1。 On the other hand, the heated air is introduced into the inner peripheral side flow path forming member 4C of the opening portion 11a of the cylindrical rotor 90 on the one side, and then introduced from the inner peripheral side toward the outer peripheral side of the cylindrical rotor 90. The first region R1 of the adsorption processing device 100C.

導入第1區域R1的加熱空氣從圓筒狀轉動體90的內周側向外周側通過圓筒狀轉動體90之各者時,係藉由熱能從位於第1區域R1的複數個吸附體30脫除其中所吸附的有機溶劑。包含有機溶劑的加熱空氣係當作濃縮流體從第1區域R1排出到外周側流路形成構件5之各者。排出到外周側流路形成構件5之各者的濃縮流體則導入到實施回收或燃燒等後處理的後處理裝置。 When the heated air introduced into the first region R1 passes through each of the cylindrical rotors 90 from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90, heat is applied from the plurality of adsorbing bodies 30 located in the first region R1. The organic solvent adsorbed therein is removed. The heated air containing the organic solvent is discharged as a concentrated fluid from the first region R1 to each of the outer peripheral side flow path forming members 5. The concentrated fluid discharged to each of the outer peripheral side flow path forming members 5 is introduced into a post-treatment apparatus that performs post-treatment such as recovery or combustion.

即使在具有上述構成的本實施形態的吸附處 理裝置100C中,相較於只從筒軸方向一側排出乾淨空氣的構成,藉由可從圓筒狀轉動體90的筒孔90a的筒軸方向兩端側排出乾淨空氣,可以減低流動阻力,且可使從圓筒狀轉動體90排出的流量增加。再者,藉由筒軸C朝向大致水平方向,可使圓筒狀轉動體90的旋轉穩定。藉此構成,本實施形態的吸附處理裝置100C可獲得和實施形態2大致相同的效果。 Even in the adsorption site of the embodiment having the above configuration In the configuration of the apparatus 100C, the clean air can be discharged from the both ends of the cylindrical hole 90a of the cylindrical rotor 90 by the clean air, so that the flow resistance can be reduced. And the flow rate discharged from the cylindrical rotor 90 can be increased. Further, the rotation of the cylindrical rotor 90 can be stabilized by the cylinder axis C being oriented in a substantially horizontal direction. With this configuration, the adsorption treatment device 100C of the present embodiment can obtain substantially the same effects as those of the second embodiment.

再者,藉由作成使複數個圓筒狀轉動體90並排的構成,和實施形態2的吸附處理裝置100A相比較,可以大幅增加處理量。 In addition, by making the configuration in which a plurality of cylindrical rotors 90 are arranged side by side, the amount of processing can be greatly increased as compared with the adsorption treatment apparatus 100A of the second embodiment.

另外,在本實施形態中,和實施形態2的吸附處理裝置100A比較,雖然吸附處理裝置100C的尺寸會增大,但其構成係為將複數個圓筒狀轉動體90並排設置。因此,若著眼於各個圓筒狀轉動體90,其大小並非會受到輸送上的限制的大小,其實用上的大小可獲得維持。 Further, in the present embodiment, the size of the adsorption treatment device 100C is increased as compared with the adsorption treatment device 100A of the second embodiment, but the configuration is such that a plurality of cylindrical rotors 90 are arranged side by side. Therefore, if attention is paid to each of the cylindrical rotors 90, the size thereof is not limited by the size of the conveyance, and the practical size can be maintained.

另外,上述的本實施形態中,雖例示說明設置複數個外周側流路形成構件5的情況,但並不限定於此,外周側流路形成構件5也可為單數。在該情況中,外周側流路形成構件5係設成在複數個圓筒狀轉動體90的並排方向上從一側延伸到另一側。而且,在該情況中,外周側流路形成構件5的另一端側也可分岐成複數個。 In the above-described embodiment, the plurality of outer peripheral side flow path forming members 5 are exemplified. However, the present invention is not limited thereto, and the outer peripheral side flow path forming members 5 may be singular. In this case, the outer peripheral side flow path forming member 5 is formed to extend from one side to the other side in the side-by-side direction of the plurality of cylindrical rotors 90. Further, in this case, the other end side of the outer peripheral side flow path forming member 5 may be divided into a plurality of pieces.

再者,在上述情況中,內周側流路形成構件4C及單數個外周側流路形成構件具有和實施形態1的內周側流路形成構件4及外周側流路形成構件5大致相同的構成。 In the above case, the inner circumferential side flow path forming member 4C and the single outer circumferential side flow path forming member are substantially the same as the inner circumferential side flow path forming member 4 and the outer peripheral side flow path forming member 5 of the first embodiment. Composition.

內周側流路形成構件4C包含和複數個筒狀轉動體90內周側彼此面對的內周側開口端部4a,而位於筒狀轉動體90的轉動體旋轉方向之前方側的內周側開口端部4a之旋轉方向前方側緣部以及位於筒狀轉動體90之旋轉方向後方側的內周側開口端部之旋轉方向後方側緣部,係分別設置有沿著旋轉方向彎曲的內周側彎曲面。而且,外周側流路形成構件包含和複數個筒狀轉動體90外周側彼此面對的外周側開口端部,而位於筒狀轉動體90旋轉方向前方側的外周側開口端部之旋轉方向前方側緣部以及位於筒狀轉動體90旋轉方向後方側的外周側開口端部之旋轉方向後方側緣部,係分別設有沿著旋轉方向彎曲的外周側彎曲面。複數個筒狀轉動體90A、90B、90C之各者中,位於筒狀轉動體90內周側部位的隔開體20,設有從筒孔90a一端側延伸到另一端側且朝筒狀轉動體90的徑向內側從隔開體20突出的內側密封構件。此外,複數個筒狀轉動體90之各者中,位於筒狀轉動體90外周側部位的隔開體20,設有從筒孔90a一端側延伸到另一端側且朝筒狀轉動體90的徑向外側從隔開體20突出的外側密封構件。藉由隨著複數個筒狀轉動體90A、90B、90C的旋轉,內側密封構件會相對於內周側彎曲面滑動,外側密封構件會相對於外周側彎曲面滑動,使複數個空間部S的一部分以氣密或液密連通於內周側流路形成構件4A及外周側流路形成構件。 The inner circumferential side flow path forming member 4C includes an inner circumferential side opening end portion 4a that faces the inner circumferential side of the plurality of cylindrical rotating bodies 90, and is located on the inner side of the front side of the cylindrical rotating body 90 in the rotational direction of the rotating body. The front side edge portion in the rotation direction of the side opening end portion 4a and the rear side edge portion in the rotation direction of the inner circumferential side opening end portion on the rear side in the rotation direction of the cylindrical rotor body 90 are provided to be curved in the rotation direction. The side of the circumference is curved. Further, the outer peripheral side flow path forming member includes an outer peripheral side open end portion that faces the outer peripheral side of the plurality of cylindrical rotor bodies 90, and is located in front of the outer peripheral side open end portion of the front side of the cylindrical rotor 90 in the rotational direction. The side edge portion and the rear side edge portion in the rotation direction of the outer peripheral side opening end portion on the rear side in the rotation direction of the cylindrical rotor 90 are provided with outer peripheral side curved faces that are curved in the rotational direction. Among the plurality of cylindrical rotors 90A, 90B, and 90C, the partition body 20 located on the inner peripheral side of the cylindrical rotor 90 is provided to extend from one end side to the other end side of the cylinder hole 90a and to rotate in a cylindrical shape. An inner side sealing member that protrudes from the partition body 20 on the radially inner side of the body 90. Further, among the plurality of cylindrical rotors 90, the partition body 20 located on the outer peripheral side portion of the cylindrical rotor 90 is provided to extend from one end side to the other end side of the cylinder hole 90a and to the cylindrical rotor 90. An outer sealing member that protrudes radially outward from the partition body 20. By the rotation of the plurality of cylindrical rotors 90A, 90B, and 90C, the inner seal member slides with respect to the inner peripheral side curved surface, and the outer seal member slides with respect to the outer peripheral side curved surface to make the plurality of space portions S A part of the inner peripheral side flow path forming member 4A and the outer peripheral side flow path forming member are communicated in an airtight or liquid-tight manner.

再者,廢氣也可從圓筒狀轉動體90的內周側向外周側導入複數個圓筒狀轉動體90的第2區域R2。在此 情況中,第2區域R2係為流體從水平方向並排的複數個圓筒狀轉動體90中位於一端的圓筒狀轉動體90中的一對板狀構件10的一側開口部11a以及位於另一端的圓筒狀轉動體90中的一對板狀構件10的另一側開口部12a流入,再經由連通的複數個筒孔90a中位於內周側流路形成構件4C周圍的部分後,從複數個圓筒狀轉動體90的內周側向外周側導入的區域。 Further, the exhaust gas may be introduced into the second region R2 of the plurality of cylindrical rotors 90 from the inner peripheral side to the outer peripheral side of the cylindrical rotor 90. here In the case of the second region R2, the one opening portion 11a of the pair of plate-like members 10 in the cylindrical rotor 90 at one end among the plurality of cylindrical rotors 90 in which the fluid is arranged in the horizontal direction is located at the other side. The other side opening portion 12a of the pair of plate-like members 10 in one of the cylindrical rotors 90 at one end flows in, and then passes through a portion of the plurality of cylindrical holes 90a that communicates around the inner peripheral side flow path forming member 4C. A region where the inner peripheral side of the plurality of cylindrical rotors 90 is introduced to the outer peripheral side.

(實施形態5) (Embodiment 5)

圖7為本實施形態的吸附處理裝置的縱剖面圖。茲參佐圖7就本實施形態的吸附處理裝置100D加以說明。 Fig. 7 is a longitudinal sectional view showing the adsorption processing apparatus of the embodiment. The adsorption treatment apparatus 100D of this embodiment will be described with reference to Fig. 7 .

如圖7所示,和實施形態2的吸附處理裝置100A比較時,本實施形態的吸附處理裝置100D在藉由複數個分割板9將一對中空圓盤10間朝筒軸C方向加以分割方面、及伴隨此設計而增加用以支撐圓筒狀轉動體90的支撐輪7方面有所不同。其他的構成大致相同。 As shown in Fig. 7, when compared with the adsorption processing apparatus 100A of the second embodiment, the adsorption processing apparatus 100D of the present embodiment divides the pair of hollow disks 10 in the direction of the cylinder axis C by a plurality of dividing plates 9. There is a difference in the addition of the support wheel 7 for supporting the cylindrical rotor 90 with this design. The other components are roughly the same.

分割板9具有對應中空圓盤11、12的形狀。分割板9係配置於一對中空圓盤10間。複數塊分割板9係將空間部S朝筒軸C方向分割。朝筒軸C方向被分割的空間部S之各者,係供收容其尺寸和被分割的空間部S對應的吸附體30。 The dividing plate 9 has a shape corresponding to the hollow disks 11, 12. The split plate 9 is disposed between the pair of hollow disks 10. The plurality of partition plates 9 divide the space portion S in the direction of the cylinder axis C. Each of the space portions S divided in the direction of the cylinder axis C is for accommodating the absorbing body 30 having a size corresponding to the divided space portion S.

圓筒狀轉動體90則藉由抵接於一對中空圓盤10的周端面的複數個支撐輪7、及抵接於複數塊分割板9的周端面的複數個支撐輪7,以可旋轉的方式支持。 The cylindrical rotor 90 is rotatable by a plurality of support wheels 7 that abut against the circumferential end faces of the pair of hollow disks 10, and a plurality of support wheels 7 that abut against the circumferential end faces of the plurality of split plates 9. Way to support.

在以上述方式構成的情況中,乾淨空氣可從圓筒狀轉動體90的筒孔90a(中央空間部)的筒軸方向兩 端側排出,通過筒孔90a內的流體的流動阻力得以降低。再者,藉由將筒軸C設成朝向大致水平方向,圓筒狀轉動體90的旋轉得以穩定,並且從圓筒狀轉動體90排出的流量得以增加,而獲得和實施形態2的吸附處理裝置100A大致相同的效果。 In the case of the above configuration, the clean air can be two from the cylindrical direction of the cylindrical hole 90a (central space portion) of the cylindrical rotor 90. The end side is discharged, and the flow resistance of the fluid passing through the cylindrical hole 90a is lowered. Further, by setting the cylinder axis C in a substantially horizontal direction, the rotation of the cylindrical rotor 90 is stabilized, and the flow rate discharged from the cylindrical rotor 90 is increased, and the adsorption treatment of the embodiment 2 is obtained. The device 100A has substantially the same effect.

此外,藉由設置複數塊分割板9,加上一對中空圓盤10,再以複數個支撐輪7以可旋轉方式支撐這些複數塊分割板9,比起實施形態2,可以使圓筒狀轉動體90的旋轉更加穩定。 Further, by providing a plurality of split plates 9, a pair of hollow disks 10 are added, and the plurality of support wheels 7 are rotatably supported by the plurality of support plates 9, which can be made cylindrical like the second embodiment. The rotation of the rotating body 90 is more stable.

另外,本實施形態中,雖係例示說明藉複數塊分割板9將一對中空圓盤10間朝筒軸C方向分割的情況,但並不受此限定,也可藉單塊分割板9將一對中空圓盤10間朝筒軸C方向分割。 In the present embodiment, the case where the pair of hollow disks 10 are divided by the plurality of partition plates 9 in the direction of the cylinder axis C is exemplified, but the present invention is not limited thereto, and the single plate dividing plate 9 may be used. The pair of hollow discs 10 are divided in the direction of the cylinder axis C.

另外,在上述實施形態1至5中,雖係例示說明隔開體20具有大致三角筒形狀的情況,但並不受此限定,只要具有可支持一對中空圓盤10的強度且可設置密封構件40,其形狀也可為板狀等,而能適當加以變更。 Further, in the above-described first to fifth embodiments, the case where the partition body 20 has a substantially triangular shape is exemplified, but the present invention is not limited thereto, and may have a strength capable of supporting the pair of hollow disks 10 and may be provided with a seal. The member 40 may have a shape of a plate or the like and can be appropriately changed.

此外,在上述的實施形態1至5中,雖係例示說明圓筒狀轉動體90的形狀為圓筒形的情況,但並不受此限定,只要是四角筒狀等多角筒狀及橢圓筒狀等筒體形狀即可。在此情況中,一對中空圓盤10的形狀並不限定於圓形,只要因應上述的筒體形狀,而構成為多角形及橢圓形等的板狀即可。另外,筒體形狀的轉動體主要藉由複數個吸附體30配置成具有筒孔的筒狀所構成。 In the above-described first to fifth embodiments, the cylindrical rotor 90 has a cylindrical shape. However, the shape of the cylindrical rotor 90 is not limited thereto, and it is a polygonal cylinder such as a rectangular cylinder and an elliptical cylinder. The shape of the cylinder is just the same. In this case, the shape of the pair of hollow disks 10 is not limited to a circular shape, and may be formed into a plate shape such as a polygonal shape or an elliptical shape in accordance with the shape of the cylindrical body described above. Further, the cylindrical body-shaped rotor is mainly constituted by a plurality of adsorbing bodies 30 arranged in a tubular shape having a cylindrical hole.

再者,在不逸離本發明趣旨的範圍內,上述 的實施形態1至5中說明的特徵性構成也可加以適當組合。例如,實施形態4的內周側流路形成構件4C,也可像實施形態3的內周側流路形成構件4B那樣設成從複數個圓筒狀轉動體90中位於一側的圓筒狀轉動體90的開口部11a及位於另一側的圓筒狀轉動體90的開口部12a向外側延伸。 Furthermore, the above is not within the scope of the present invention. The characteristic configurations described in the first to fifth embodiments can also be combined as appropriate. For example, the inner circumferential side flow path forming member 4C of the fourth embodiment may be provided in a cylindrical shape from one of the plurality of cylindrical rotors 90 as in the inner circumferential side flow path forming member 4B of the third embodiment. The opening portion 11a of the rotor 90 and the opening portion 12a of the cylindrical rotor 90 located on the other side extend outward.

以上,雖然已針對本發明的實施形態加以說明,但本次所揭示的實施形態,在所有的點上皆為例示性,並非限制性。本發明的專利範圍係以申請專利範圍為依據,和申請專利範圍具有均等意義及範圍內的所有變更均應包含在本發明專利範圍內。 The embodiments of the present invention have been described above, but the embodiments disclosed herein are illustrative and not restrictive. The scope of the invention is based on the scope of the patent application, and all modifications within the scope and scope of the invention are intended to be included within the scope of the invention.

1‧‧‧處理室 1‧‧‧Processing room

2‧‧‧第1流路形成構件 2‧‧‧1st flow path forming member

2a‧‧‧開口部 2a‧‧‧ openings

3‧‧‧第2流路形成構件 3‧‧‧Second flow path forming member

4‧‧‧內周側流路形成構件 4‧‧‧ Inner peripheral side flow path forming member

4a‧‧‧內周側開口端部 4a‧‧‧Opening end on the inner circumference side

5‧‧‧外周側流路形成構件 5‧‧‧ peripheral side flow path forming member

5a‧‧‧外周側開口端部 5a‧‧‧Open side of the outer peripheral side

6‧‧‧支撐構件 6‧‧‧Support members

10‧‧‧一對中空圓盤 10‧‧‧A pair of hollow discs

11‧‧‧第1中空圓盤 11‧‧‧1st hollow disc

11a‧‧‧開口部 11a‧‧‧ Opening

12‧‧‧第2中空圓盤 12‧‧‧2nd hollow disc

12a‧‧‧開口部 12a‧‧‧ openings

30‧‧‧吸附體 30‧‧‧Adsorbed body

90‧‧‧圓筒狀轉動體 90‧‧‧Cylinder rotating body

90a‧‧‧筒孔 90a‧‧‧Cylinder hole

100‧‧‧吸附處理裝置 100‧‧‧Adsorption treatment device

Claims (22)

一種吸附處理裝置,具備:筒狀轉動體,由複數個吸附體配置成具有筒孔的筒狀,且屬於可繞筒軸旋轉的中空轉動體,並以其內周界定前述筒孔;及第1區域與第2區域,彼此區隔,且藉由前述筒狀轉動體進行旋轉,使前述複數個吸附體交替通過;前述筒孔的兩端係形成開口;前述第1區域係為伴隨前述筒狀轉動體的旋轉而移動的前述複數個吸附體的一部分以氣密或液密的方式連通於內周側流路形成構件及外周側流路形成構件的區域,前述內周側流路形成構件及前述外周側流路形成構件係在前述筒狀轉動體之內周側及外周側以彼此相對向方式配設;前述第2區域係為流體以通過位於前述內周側流路形成構件周圍的前述筒狀轉動體的前述筒孔,而從前述筒孔兩端的開口流出的方式,從前述筒狀轉動體的外周側向內周側導入前述吸附體的區域,或者是,從前述筒孔兩端的開口流入並通過位於前述內周側流路形成構件周圍的前述筒孔的流體,從前述筒狀轉動體內周側向外周側導入前述吸附體的區域。 An adsorption processing apparatus comprising: a cylindrical rotating body, wherein a plurality of adsorbing bodies are arranged in a cylindrical shape having a cylindrical hole, and belongs to a hollow rotating body rotatable about a cylindrical axis, and the cylindrical hole is defined by an inner circumference thereof; The first region and the second region are separated from each other, and the plurality of adsorbing bodies are alternately passed by the rotation of the cylindrical rotating body; the ends of the cylindrical holes are formed with openings; and the first region is accompanied by the tube A part of the plurality of adsorbing bodies that are moved by the rotation of the rotating body communicates with the inner peripheral side flow path forming member and the outer peripheral side flow path forming member in an airtight or liquid-tight manner, and the inner peripheral side flow path forming member The outer circumferential side flow path forming member is disposed to face each other on the inner circumferential side and the outer circumferential side of the cylindrical rotating body, and the second region is a fluid that passes through the inner circumferential side flow path forming member. The cylindrical hole of the cylindrical rotor is introduced into the region of the adsorbing body from the outer peripheral side to the inner peripheral side of the tubular rotating body so as to flow out from the opening at both ends of the cylindrical rotating body. The opening at both ends of the cylindrical hole flows into and passes through the fluid of the cylindrical hole located around the inner circumferential side flow path forming member, and the region of the adsorbing body is introduced from the inner peripheral side and the outer peripheral side of the cylindrical rotating body. 如請求項1之吸附處理裝置,其中,前述內周側流路形成構件包含在前述筒孔兩端的前述開口之間沿著前述筒軸方向從一方的前述開口延伸到另一方的前述開口的部分,且從前述筒孔兩端的前述開口的至少一方向外部延伸; 前述第1區域係為通過前述內周側流路形成構件內部的流體從前述筒狀轉動體的內周側向外周側導入前述吸附體的區域,或者是,流體從前述筒狀轉動體的外周側向內周側導入前述吸附體,俾導入前述內周側流路形成構件的區域。 The adsorption processing apparatus according to claim 1, wherein the inner circumferential side flow path forming member includes a portion extending from one of the openings to the other opening along the cylindrical axis direction between the openings at both ends of the cylindrical hole And extending outward from at least one direction of the aforementioned opening at both ends of the cylindrical hole; The first region is a region in which the fluid in the inner peripheral side flow path forming member is introduced into the adsorbent from the inner peripheral side to the outer peripheral side of the cylindrical rotor, or the fluid is from the outer periphery of the cylindrical rotor. The adsorbent is introduced into the lateral inner peripheral side, and the crucible is introduced into the region of the inner peripheral side flow path forming member. 如請求項1或2之吸附處理裝置,其中,前述筒狀轉動體的前述筒軸係延伸於水平方向。 The adsorption processing apparatus according to claim 1 or 2, wherein the cylindrical shaft of the cylindrical rotor extends in a horizontal direction. 如請求項1至3中任一項之吸附處理裝置,其中,前述筒狀轉動體進一步包含分別配置在彼此相鄰的前述吸附體之間的複數個隔開體;藉由前述複數個隔開體形成供配置前述複數個吸附體之各者的複數個空間部;前述內周側流路形成構件包含和前述筒狀轉動體的內周側彼此面對的內周側開口端部;位於前述筒狀轉動體的旋轉方向前方側的前述內周側開口端部的旋轉方向前方側緣部及位於前述筒狀轉動體的前述旋轉方向後方側的前述內周側開口端部的旋轉方向後方側緣部,分別設有沿著前述旋轉方向彎曲的內周側彎曲面;前述外周側流路形成構件包含和前述筒狀轉動體的外周側彼此面對的外周側開口端部;位於前述筒狀轉動體的前述旋轉方向前方側的前述外周側開口端部的旋轉方向前方側緣部及位於前述筒狀轉動體的前述旋轉方向後方側的前述外周側開口端部的旋轉方向後方側緣部,分別設置有沿著前述旋 轉方向彎曲的外周側彎曲面;位於前述筒狀轉動體內周側之部分的前述隔開體,設有從前述筒孔的一端側延伸到另一端側且從前述隔開體向前述筒狀轉動體的徑向內側突出的內側密封構件;位於前述筒狀轉動體外周側之部分的前述隔開體,設有從前述筒孔的一端側延伸到另一端側且從前述隔開體向前述徑向外側突出的外側密封構件;藉由伴隨著前述筒狀轉動體的旋轉,使前述內側密封構件相對於前述內周側彎曲面滑動,且前述外側密封構件相對於前述外周側彎曲面滑動,而使前述複數個空間部之一部份以氣密或液密的方式連通於前述內周側流路形成構件及前述外周側流路形成構件。 The adsorption processing apparatus according to any one of claims 1 to 3, wherein the cylindrical rotating body further comprises a plurality of partitions respectively disposed between the adsorbing bodies adjacent to each other; separated by the plurality of a plurality of space portions for arranging each of the plurality of adsorbing bodies; the inner peripheral side flow path forming member includes an inner peripheral side open end portion facing the inner peripheral side of the cylindrical rotating body; a front side edge portion in the rotation direction of the inner circumferential side opening end portion on the front side in the rotation direction of the cylindrical rotor, and a rear side in the rotation direction of the inner circumferential side opening end portion on the rear side in the rotation direction of the cylindrical rotor The edge portion is provided with an inner peripheral side curved surface that is curved along the rotation direction, and the outer circumferential side flow path forming member includes an outer peripheral side open end portion that faces the outer peripheral side of the cylindrical rotating body; a front side edge portion in the rotation direction of the outer peripheral side opening end portion on the front side in the rotation direction of the rotor, and the outer peripheral side on the rear side in the rotation direction of the cylindrical rotor body Rotational direction of outlet end portion of the rear side edge portions, are provided along the rotation The outer peripheral side curved surface that is curved in the direction of rotation; the partitioning body located at a portion on the circumferential side of the cylindrical rotating body is provided to extend from one end side to the other end side of the cylindrical hole and to rotate from the partitioning body to the cylindrical shape An inner sealing member projecting radially inward of the body; the partitioning body located at a portion on the outer peripheral side of the cylindrical rotating body is provided to extend from one end side to the other end side of the cylindrical hole and to extend from the partitioning body to the aforementioned diameter The outer seal member that protrudes outward; the inner seal member slides with respect to the inner peripheral side curved surface by the rotation of the cylindrical rotor, and the outer seal member slides with respect to the outer peripheral side curved surface. One of the plurality of space portions is communicated to the inner circumferential side flow path forming member and the outer circumferential side flow path forming member in an airtight or liquid-tight manner. 一種吸附處理裝置,具備:複數個筒狀轉動體,由複數個吸附體配置成具有筒孔的筒狀,且屬於可繞筒軸旋轉的中空轉動體,並以其內周界定前述筒孔;及第1區域與第2區域,彼此區隔,且藉由上述複數個筒狀轉動體旋轉,使前述複數個吸附體交替通過;前述筒孔的兩端係形成開口;前述複數個筒狀轉動體係以前述複數個筒狀轉動體之各者所具有的前述筒孔互相連通的方式並排配置於水平方向;前述第1區域係為伴隨著前述複數個筒狀轉動體的旋轉而移動的前述複數個筒狀轉動體所包含的前述複數個吸附體之一部分以氣密或液密的方式連通於內 周側流路形成構件及外周側流路形成構件的區域,前述內周側流路形成構件係以包含跨過前述複數個筒狀轉動體的部分的方式設置在相連通的複數個前述筒孔內,前述外周側流路形成構件係以和前述內周側流路形成構件相對向的方式配置在前述複數個筒狀轉動體的外周側;前述第2區域係為流體以通過相連通的複數個前述筒孔中位於前述內周側流路形成構件周圍的部分,而從水平方向並排的前述複數個筒狀轉動體中位於一端的前述筒狀轉動體處沒有鄰接的前述筒狀轉動體之側的前述筒孔開口及水平方向並排的前述複數個筒狀轉動體中位於另一端的前述筒狀轉動體處沒有鄰接的前述筒狀轉動體之側的前述筒孔開口流出的方式,從前述複數個筒狀轉動體的外周側向內周側導入前述吸附體的區域,或者是,從水平方向並排的前述複數個筒狀轉動體中位於一端的前述筒狀轉動體處沒有鄰接的前述筒狀轉動體之側的前述筒孔開口及水平方向並排的前述複數個筒狀轉動體中位於另一端的前述筒狀轉動體處沒有鄰接的前述筒狀轉動體之側的前述筒孔開口流入,且通過相連通的複數個前述筒孔中位於前述內周側流路形成構件周圍的部分的流體係從前述複數個筒狀轉動體的內周側向外周側導入前述吸附體的區域。 An adsorption treatment device comprising: a plurality of cylindrical rotating bodies arranged in a cylindrical shape having a cylindrical hole by a plurality of adsorbing bodies, and belonging to a hollow rotating body rotatable about a cylindrical axis, and defining the cylindrical hole by an inner circumference thereof; And the first region and the second region are separated from each other, and the plurality of the absorbing bodies are alternately passed by the rotation of the plurality of cylindrical rotating bodies; the two ends of the cylindrical hole are formed with openings; the plurality of cylindrical rotating The system is arranged side by side in a horizontal direction so that the cylindrical holes of the plurality of cylindrical rotating bodies communicate with each other, and the first region is the plural number that moves in accordance with the rotation of the plurality of cylindrical rotating bodies One of the plurality of adsorbing bodies included in the cylindrical rotating body communicates with the inside in an airtight or liquid-tight manner a region of the circumferential side flow path forming member and the outer circumferential side flow path forming member, wherein the inner circumferential side flow path forming member is provided in a plurality of the plurality of cylindrical holes that are connected to each other so as to include a portion that spans the plurality of cylindrical rotating bodies The outer peripheral side flow path forming member is disposed on the outer peripheral side of the plurality of cylindrical rotating bodies so as to face the inner peripheral side flow path forming member, and the second region is a plurality of fluids connected to each other One of the plurality of cylindrical holes is located around the inner peripheral side flow path forming member, and the cylindrical rotating body at one end of the plurality of cylindrical rotating bodies side by side arranged in the horizontal direction is not adjacent to the cylindrical rotating body. The cylindrical opening on the side and the cylindrical rotating body at the other end of the plurality of cylindrical rotating bodies arranged in the horizontal direction are not in the same manner as the cylindrical opening on the side of the cylindrical rotating body The outer peripheral side of the plurality of cylindrical rotors is introduced into the region of the adsorbent body toward the inner peripheral side, or is located in the plurality of cylindrical rotors arranged side by side in the horizontal direction. The cylindrical opening of the cylindrical rotating body at the end is not adjacent to the cylindrical opening of the cylindrical rotating body, and the cylindrical rotating body at the other end of the plurality of cylindrical rotating bodies arranged side by side in the horizontal direction is not adjacent to the cylindrical body The cylindrical hole opening on the side of the rotor is inflow, and a flow system of a portion of the plurality of the cylindrical holes that are in communication with each other around the inner circumferential side flow path forming member is from the inner peripheral side of the plurality of cylindrical rotating bodies The region of the adsorbent is introduced to the outer peripheral side. 如請求項5之吸附處理裝置,其中,前述外周側流路形成構件包含複數個流路形成構 件;前述複數個流路形成構件之各者係和前述複數個筒狀轉動體之各者分別對應配置。 The adsorption processing apparatus according to claim 5, wherein the outer peripheral side flow path forming member includes a plurality of flow path formation structures Each of the plurality of flow path forming members and each of the plurality of cylindrical rotating bodies are disposed corresponding to each other. 如請求項5或6之吸附處理裝置,其中,前述內周側流路形成構件係從水平方向並排的前述複數個筒狀轉動體中位於一端的前述筒狀轉動體處沒有鄰接的前述筒狀轉動體之側的前述筒孔的前述開口及水平方向並排的前述複數個筒狀轉動體中位於另一端的前述筒狀轉動體處沒有鄰接的前述筒狀轉動體之側的前述筒孔的前述開口之至少一方朝外部延伸;前述第1區域係為流體通過前述內周側流路形成構件內部後從前述複數個筒狀轉動體的內周側向外周側導入前述吸附體的區域,或者是,流體從前述複數個筒狀轉動體的外周側向內周側導入前述吸附體,俾導入前述內周側流路形成構件的區域。 The adsorption processing apparatus according to claim 5, wherein the inner circumferential side flow path forming member is not adjacent to the tubular rotating body located at one end of the plurality of cylindrical rotating bodies arranged in the horizontal direction. The opening of the cylindrical hole on the side of the rotor and the aforementioned cylindrical hole of the other of the plurality of cylindrical rotating bodies arranged in the horizontal direction are not adjacent to the cylindrical hole on the side of the cylindrical rotating body At least one of the openings extends toward the outside, and the first region is a region in which the fluid is introduced into the inside of the inner circumferential side flow path forming member, and the adsorbent is introduced from the inner circumferential side to the outer circumferential side of the plurality of cylindrical rotating bodies, or The fluid is introduced into the adsorbent from the outer peripheral side to the inner peripheral side of the plurality of cylindrical rotors, and the crucible is introduced into a region of the inner peripheral side passage forming member. 如請求項5至7中任一項之吸附處理裝置,其中,前述複數個筒狀轉動體之各者進一步包含分別配置在彼此相鄰的前述吸附體之間的複數個隔開體;藉由前述複數個隔開體形成供配置前述複數個吸附體之各者的複數個空間部;前述內周側流路形成構件包含和前述複數個筒狀轉動體內周側彼此面對的內周側開口端部;位於前述筒狀轉動體的旋轉方向前方側的前述內周側開口端部的旋轉方向前方側緣部及位於前述筒狀轉動體的前述旋轉方向後方側的前述內周側開口端部 的旋轉方向後方側緣部,分別設有沿著前述旋轉方向彎曲的內周側彎曲面;前述外周側流路形成構件包含和前述複數個筒狀轉動體之外周側彼此面對的外周側開口端部;位於前述筒狀轉動體的前述旋轉方向前方側的前述外周側開口端部的旋轉方向前方側緣部及位於前述筒狀轉動體的前述旋轉方向後方側的前述外周側開口端部的旋轉方向後方側緣部,分別設有沿著前述旋轉方向彎曲的外周側彎曲面;前述複數個筒狀轉動體的各者中,位於前述筒狀轉動體內周側之部分的前述隔開體,設有從前述筒孔的一端側延伸到另一端側,且從前述隔開體向前述筒狀轉動體的徑向內側突出的內側密封構件;前述複數個筒狀轉動體之各者中,位於前述筒狀轉動體外周側之部分的前述隔開體,設有從前述筒孔一端側延伸到另一端側,且從前述隔開體向前述徑向外側突出的外側密封構件;藉由伴隨著前述複數個筒狀轉動體的旋轉,使前述內側密封構件相對於前述內周側彎曲面滑動,且前述外側密封構件相對於前述外周側彎曲面滑動,而使前述複數個空間部之一部分以氣密或液密的方式連通於前述內周側流路形成構件及前述外周側流路形成構件。 The adsorption processing apparatus according to any one of claims 5 to 7, wherein each of the plurality of cylindrical rotating bodies further comprises a plurality of partitions respectively disposed between the adsorbing bodies adjacent to each other; The plurality of partitions form a plurality of space portions for arranging each of the plurality of adsorbing bodies; and the inner peripheral side flow path forming member includes an inner peripheral side opening facing the plurality of cylindrical rotating body inner peripheral sides An end portion; a front side edge portion in a rotation direction of the inner circumferential side opening end portion on a front side in a rotation direction of the cylindrical rotor; and an inner circumferential side opening end portion on a rear side in the rotation direction of the cylindrical rotor The rear side edge portion in the rotation direction is provided with an inner peripheral side curved surface that is curved along the rotation direction, and the outer circumferential side flow path forming member includes an outer peripheral side opening that faces the outer peripheral side of the plurality of cylindrical rotating bodies An end portion; a front side edge portion in a rotation direction of the outer peripheral side opening end portion on the front side in the rotation direction of the cylindrical rotor; and an outer peripheral side opening end portion on the rear side in the rotation direction of the cylindrical rotor body Each of the plurality of cylindrical rotors is located on a portion of the plurality of cylindrical rotors in a portion of the plurality of cylindrical rotors, and the partition body is located at a portion of the plurality of cylindrical rotors. An inner sealing member extending from one end side to the other end side of the cylindrical hole and projecting radially inward from the partition body; wherein each of the plurality of cylindrical rotating bodies is located The partitioning body at a portion on the outer peripheral side of the cylindrical rotating body is provided to extend from one end side to the other end side of the cylindrical hole, and protrudes outward from the partitioning body toward the radial direction The outer seal member is slid with respect to the inner peripheral side curved surface by the rotation of the plurality of cylindrical rotors, and the outer seal member slides with respect to the outer peripheral side curved surface to cause the aforementioned One of the plurality of space portions communicates with the inner circumferential side flow path forming member and the outer circumferential side flow path forming member in an airtight or liquid-tight manner. 如請求項1至8中任一項之吸附處理裝置,其中,導入前述第1區域的流體為加熱流體; 導入前述第2區域的流體為包含被處理物質的被處理流體;且前述被處理流體係從前述筒狀轉動體外周側導入內周側。 The adsorption treatment device according to any one of claims 1 to 8, wherein the fluid introduced into the first region is a heating fluid; The fluid introduced into the second region is a fluid to be treated containing a substance to be treated, and the fluid system to be treated is introduced into the inner peripheral side from the outer peripheral side of the cylindrical rotor. 一種吸附處理裝置,具備:圓筒狀轉動體,係藉由在中央部設有開口部且配置成彼此相對的一對中空圓盤、將前述一對中空圓盤間的空間分隔成在圓周方向上互相獨立的複數個空間部的複數個隔開體、及藉由分別配設在前述複數個空間部的複數個吸附體,而構成為筒狀,且可繞著筒軸旋轉;及第1區域與第2區域,係互相區隔,且藉由前述圓筒狀轉動體進行旋轉,使前述複數個吸附體交替通過;前述第1區域係為伴隨著前述圓筒狀轉動體的旋轉而旋轉的前述複數個空間部之一部分以氣密或液密的方式連通於內周側流路形成構件及外周側流路形成構件的區域,前述內周側流路形成構件及前述外周側流路係在前述圓筒狀轉動體的內周側及外周側以彼此相對向的方式配設;前述第2區域係為流體以通過位於前述內周側流路形成構件周圍的前述圓筒狀轉動體的筒孔並從前述一對中空圓盤雙方的前述開口部流出的方式,從前述圓筒狀轉動體的外周側向內周側導入的區域,或者是,流體從前述一對中空圓盤雙方的前述開口部流入,且在通過位於前述內周側流路形成構件周圍的前述圓 筒狀轉動體的前述筒孔後,從前述圓筒狀轉動體的內周側向外周側導入的區域。 An adsorption processing apparatus comprising: a cylindrical rotating body, wherein a space between the pair of hollow disks is divided into a circumferential direction by a pair of hollow disks provided with openings at a central portion and disposed to face each other a plurality of spaced apart bodies in a plurality of spatial portions independent of each other, and a plurality of adsorbing bodies respectively disposed in the plurality of spatial portions, and configured to have a cylindrical shape and rotatable about the cylindrical axis; and the first The region and the second region are spaced apart from each other, and the plurality of adsorbing bodies alternately pass by the rotation of the cylindrical rotating body; and the first region is rotated in accordance with the rotation of the cylindrical rotating body One of the plurality of space portions communicates with the inner circumferential side flow path forming member and the outer circumferential side flow path forming member in an airtight or liquid-tight manner, and the inner circumferential side flow path forming member and the outer circumferential side flow path system The inner circumferential side and the outer circumferential side of the cylindrical rotor are disposed to face each other, and the second region is a fluid that passes through the cylindrical rotor located around the inner circumferential side flow path forming member. cylinder The hole is introduced from the outer peripheral side of the cylindrical rotor to the inner peripheral side from the opening of the pair of hollow disks, or the fluid is supplied from both of the pair of hollow disks. The opening portion flows in, and passes through the aforementioned circle around the inner circumferential side flow path forming member. After the cylindrical hole of the cylindrical rotor, the region is introduced from the inner peripheral side to the outer peripheral side of the cylindrical rotor. 如請求項10之吸附處理裝置,其中,前述內周側流路形成構件包含在前述一對中空圓盤雙方的前述開口部間沿著前述筒軸方向從一方的前述開口部延伸至另一方的前述開口部的部分;前述第1區域係為流體流經通過前述一對中空圓盤雙方的前述開口部的至少一方的前述內周側流路形成構件的內部後,從前述圓筒狀轉動體的內周側向外周側導入的區域,或者是,流體以從前述圓筒狀轉動體的外周側朝向內周側通過前述圓筒狀轉動體後,流經通過前述一對中空圓盤雙方的前述開口部的至少一方的前述內周側流路形成構件內部的方式導入的區域。 The adsorption processing device according to claim 10, wherein the inner circumferential side flow path forming member includes one of the pair of hollow disks extending from the one opening portion to the other along the cylindrical axis direction a portion of the opening portion, wherein the first region is a fluid flowing through the inside of the inner circumferential side flow path forming member that passes through at least one of the openings of the pair of hollow disks, and the cylindrical rotating body a region in which the inner peripheral side is introduced to the outer peripheral side, or the fluid passes through the cylindrical rotating body from the outer peripheral side toward the inner peripheral side of the cylindrical rotating body, and then flows through both of the pair of hollow disks. At least one of the openings is formed in a region in which the inside of the inner peripheral side flow path forming member is introduced. 如請求項10或11之吸附處理裝置,其中,前述圓筒狀轉動體的前述筒軸係延伸於水平方向。 The adsorption processing apparatus according to claim 10 or 11, wherein the cylindrical shaft of the cylindrical rotor extends in a horizontal direction. 如請求項10至12中任一項之吸附處理裝置,其中,前述內周側流路形成構件包含和前述圓筒狀轉動體內周側彼此面對的內周側開口端部,位於前述圓筒狀轉動體的旋轉方向前方側的前述內周側開口端部的旋轉方向前方側緣部及位於前述圓筒狀轉動體的前述旋轉方向後方側的前述內周側開口端部的旋轉方向後方側緣部,分別設有沿著前述旋轉方向彎曲的內周側彎曲面;前述外周側流路形成構件包含和前述圓筒狀轉動體外周側彼此面對的外周側開口端部; 位於前述圓筒狀轉動體的前述旋轉方向前方側的前述外周側開口端部的旋轉方向前方側緣部及位於前述圓筒狀轉動體的前述旋轉方向後方側的前述外周側開口端部的旋轉方向後方側緣部,分別設有沿著前述旋轉方向彎曲的外周側彎曲面;位於前述圓筒狀轉動體內周側之部分的前述隔開體,設有在前述一對中空圓盤間從一方中空圓盤延伸至另一方中空圓盤,且從前述隔開體朝前述圓筒狀轉動體的徑向內側突出的內側密封構件;位於前述圓筒狀轉動體外周側之部分的前述隔開體,設有在前述一對中空圓盤間從前述一方中空圓盤延伸至前述另一方中空圓盤,且從前述隔開體朝前述徑向外側突出的外側密封構件;藉由伴隨前述圓筒狀轉動體的旋轉,使前述內側密封構件相對於前述內周側彎曲面滑動,且前述外側密封構件相對於前述外周側彎曲面滑動,而使前述複數個空間部之一部分以氣密或液密的方式連通於前述內周側流路形成構件及前述外周側流路形成構件。 The adsorption processing apparatus according to any one of claims 10 to 12, wherein the inner peripheral side flow path forming member includes an inner peripheral side open end portion facing the cylindrical inner circumference side of the cylindrical body, and is located in the cylinder a front side edge portion in the rotation direction of the inner peripheral side opening end portion on the front side in the rotation direction of the rotating body, and a rear side in the rotation direction of the inner peripheral side opening end portion on the rear side in the rotation direction of the cylindrical rotor The edge portion is provided with an inner peripheral side curved surface that is curved along the rotation direction, and the outer circumferential side flow path forming member includes an outer peripheral side open end portion that faces the outer surface side of the cylindrical rotating body; a rotation direction front side edge portion of the outer circumferential side opening end portion of the cylindrical rotor on the front side in the rotation direction, and a rotation of the outer circumferential side opening end portion of the cylindrical rotor body on the rear side in the rotation direction rear side Each of the rear side edge portions is provided with an outer peripheral side curved surface that is curved along the rotation direction, and the partitioning body that is located at a portion of the cylindrical rotating body inner side is provided between the pair of hollow disks. The hollow disk extends to the other hollow disk, and the inner sealing member protrudes from the partition body toward the radially inner side of the cylindrical rotor; the partition body located at a portion of the outer peripheral side of the cylindrical rotor Providing an outer sealing member that extends from the one hollow disk to the other hollow disk between the pair of hollow disks and protrudes outward from the partition body in the radial direction; Rotation of the rotor causes the inner seal member to slide relative to the inner peripheral side curved surface, and the outer seal member slides relative to the outer peripheral side curved surface to Said portion of the space portion of the plurality of airtight or liquid-tight manner forming member and the outer peripheral side of the flow path forming member communicating with the inner peripheral side flow passage. 一種吸附處理裝置,具備:複數個圓筒狀轉動體,係藉由在中央部設有開口部且配置成彼此相對的一對中空圓盤、將前述一對中空圓盤間的空間分隔成在圓周方向上互相獨立的複數個空間部的複數個隔開體、及配設在前述複數個空間部之各者的複數個吸附體,而構成為具有筒孔的筒狀,且可繞著筒軸旋轉;及 第1區域與第2區域,係互相區隔,且藉由前述複數個圓筒狀轉動體進行旋轉,使前述複數個吸附體交替通過;前述複數個圓筒狀轉動體係以前述複數個圓筒狀轉動體之各者所具有的前述筒孔互相連通的方式並排配置在水平方向;前述第1區域係為前述複數個圓筒狀轉動體所包含的前述複數個空間部的一部分以氣密或液密的方式連通於內周側流路形成構件及外周側流路形成構件的區域,前述內周側流路形成構件係在相連通的複數個前述筒孔內設置成包含跨過前述複數個圓筒狀轉動體之部分,前述外周側流路形成構件係以和前述內周側流路形成構件相對向的方式配置在前述複數個圓筒狀轉動體的外周側;前述第2區域係為流體以通過相連通的複數個前述筒孔中位於前述內周側流路形成構件周圍的部分,再從並排於水平方向的前述複數個圓筒狀轉動體中位於一側的前述圓筒狀轉動體處的前述一對中空圓盤的前述一側的前述開口部、及位於另一側的前述圓筒狀轉動體處的前述一對中空圓盤的前述另一側的前述開口部流出之方式,而從前述複數個圓筒狀轉動體的外周側向內周側導入的區域,或者是,流體從並排於水平方向的前述複數個圓筒狀轉動體中位於一側的前述圓筒狀轉動體處的前述一對中空圓盤的前述一側的前述開口部、及位於另一側的前述圓筒狀轉動體處的前 述一對中空圓盤的前述另一側的前述開口部流入,而在通過相連通的複數個前述筒孔中位於前述內周側流路形成構件周圍的部分後,從前述複數個圓筒狀轉動體的內周側向外周側導入的區域。 An adsorption treatment apparatus comprising: a plurality of cylindrical rotors, wherein a space between the pair of hollow disks is partitioned by a pair of hollow disks provided with openings at a central portion and disposed to face each other a plurality of partitions of a plurality of space portions independent of each other in the circumferential direction, and a plurality of adsorbing bodies disposed in each of the plurality of space portions, and configured to have a cylindrical shape and have a cylindrical shape Axis rotation; and The first region and the second region are separated from each other, and the plurality of cylindrical bodies are alternately passed by rotating the plurality of cylindrical rotating bodies; the plurality of cylindrical rotating systems are the plurality of cylinders Each of the plurality of spatial portions included in the plurality of cylindrical rotors is airtight or partially arranged in parallel with each other in a manner in which the cylindrical bores of the respective rotors communicate with each other. a liquid-tight manner is communicated between the inner circumferential side flow path forming member and the outer circumferential side flow path forming member, and the inner circumferential side flow path forming member is disposed in a plurality of the plurality of cylindrical holes that are connected to each other so as to include the plurality of In the cylindrical rotor, the outer peripheral side flow path forming member is disposed on the outer peripheral side of the plurality of cylindrical rotors so as to face the inner peripheral side flow path forming member; the second region is The fluid is located at a portion around the inner circumferential side flow path forming member among a plurality of the plurality of cylindrical holes that are in communication with each other, and is located in the plurality of cylindrical rotating bodies arranged side by side in the horizontal direction. The other one of the pair of hollow disks on the one side of the cylindrical rotating body and the other of the pair of hollow disks at the other side of the cylindrical rotating body The side of the opening of the plurality of cylindrical rotors is introduced into the inner peripheral side from the outer peripheral side of the plurality of cylindrical rotors, or the fluid is located in the plurality of cylindrical rotors arranged in the horizontal direction. The opening of the one side of the pair of hollow disks at the one side of the cylindrical rotating body and the front of the cylindrical rotating body located at the other side The opening portion on the other side of the pair of hollow disks flows in, and the plurality of cylindrical holes that are in communication with each other are located at a portion around the inner circumferential side flow path forming member, and are formed from the plurality of cylindrical shapes. A region where the inner peripheral side of the rotor is introduced to the outer peripheral side. 如請求項14之吸附處理裝置,其中,前述外周側流路形成構件包含複數個流路形成構件;前述複數個流路形成構件之各者係分別和前述複數個圓筒狀轉動體之各者對應配置。 The adsorption processing apparatus according to claim 14, wherein the outer peripheral side flow path forming member includes a plurality of flow path forming members; each of the plurality of flow path forming members and each of the plurality of cylindrical rotating bodies Corresponding configuration. 如請求項14或15之吸附處理裝置,其中,前述第1區域係為流體流經通過位於前述一側的前述圓筒狀轉動體的前述一對中空圓盤的前述一側的前述開口部及位於前述另一側的前述圓筒狀轉動體的前述一對中空圓盤的前述另一側的前述開口部之至少一方的前述內周側流路形成構件內部後,從前述圓筒狀轉動體的內周側向外周側導入的區域,或者是,流體以從前述圓筒狀轉動體外周側向內周側通過前述複數個圓筒狀轉動體後,流經通過位於前述一側的前述圓筒狀轉動體中的前述一對中空圓盤的前述一側的前述開口部及位於前述另一側的前述圓筒狀轉動體中的前述一對中空圓盤的前述另一側的前述開口部之至少一方的前述內周側流路形成構件內部的方式導入的區域。 The adsorption processing apparatus according to claim 14 or 15, wherein the first region is a fluid flowing through the opening of the one side of the pair of hollow disks passing through the cylindrical rotating body located on the one side and The inside of the inner peripheral side flow path forming member of at least one of the openings on the other side of the pair of hollow disks of the cylindrical rotating body on the other side, and the cylindrical rotating body a region in which the inner peripheral side is introduced to the outer peripheral side, or the fluid passes through the plurality of cylindrical rotating bodies from the outer peripheral side toward the inner peripheral side of the cylindrical outer rotating body, and then flows through the aforementioned circle located on the one side. The opening of the one side of the pair of hollow disks in the cylindrical rotor and the opening of the other side of the pair of hollow disks of the other of the cylindrical rotors At least one of the inner circumferential side flow path forming members is introduced into a region inside the member. 如請求項10至16中任一項之吸附處理裝置,其中,導入前述第1區域的流體為加熱流體; 導入前述第2區域的流體為含有被處理物質的被處理流體;前述被處理流體係從前述圓筒狀轉動體的外周側導入內周側。 The adsorption treatment device according to any one of claims 10 to 16, wherein the fluid introduced into the first region is a heating fluid; The fluid introduced into the second region is a fluid to be treated containing a substance to be treated, and the fluid system to be treated is introduced into the inner peripheral side from the outer peripheral side of the cylindrical rotor. 如請求項1至17中任一項之吸附處理裝置,其中,導入前述第1區域的流體為加熱流體;導入前述第2區域的流體為含有被處理物質的被處理流體;藉由前述被處理流體導入前述第2區域,使前述被處理物質透過位於前述第2區域的前述吸附體從前述被處理流體被吸附去除;藉由前述加熱流體導入前述第1區域,使前述吸附體所吸附的前述被處理物質從位於前述第1區域的前述吸附體被脫除。 The adsorption processing apparatus according to any one of claims 1 to 17, wherein the fluid introduced into the first region is a heating fluid; and the fluid introduced into the second region is a fluid to be treated containing the substance to be treated; The fluid is introduced into the second region, and the material to be treated is passed through the adsorbent located in the second region, and is adsorbed and removed from the fluid to be treated; and the heated fluid is introduced into the first region to adsorb the adsorbed body. The substance to be treated is removed from the adsorbent located in the first region. 如請求項18之吸附處理裝置,其中,通過前述第2區域的前述被處理流體的流動方向、與通過前述第1區域的前述加熱流體的流動方向,在徑向的朝向上為反方向。 The adsorption processing apparatus according to claim 18, wherein a flow direction of the fluid to be treated passing through the second region and a flow direction of the heating fluid passing through the first region are opposite to each other in a radial direction. 如請求項17至19中任一項之吸附處理裝置,其中,前述被處理流體為廢氣,前述加熱流體為加熱空氣。 The adsorption treatment apparatus according to any one of claims 17 to 19, wherein the fluid to be treated is an exhaust gas, and the heating fluid is heated air. 如請求項17至20中任一項之吸附處理裝置,其中,前述被處理物質為有機溶劑。 The adsorption treatment apparatus according to any one of claims 17 to 20, wherein the substance to be treated is an organic solvent. 如請求項1至21中任一項之吸附處理裝置,其中,前述吸附體具有蜂巢構造。 The adsorption treatment apparatus according to any one of claims 1 to 21, wherein the adsorbent has a honeycomb structure.
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