KR20190096714A - Apparatus for processing gas containing volatile organic compounds - Google Patents

Abstract

The present invention provides an apparatus for treating mixed gas containing volatile organic compounds, which comprises: a housing having an inner space; a suction fan installed in the housing to pump the mixed gas mixed with the organic compounds into the inner space; a cylindrical filter unit disposed in the inner space and generating purified gas by adsorbing the organic compounds from the mixed gas fed by the suction fan; a flow rate reduction unit installed between the suction fan and the filter unit to reduce a flow rate of the mixed gas flowing into the filter unit; and a desorption unit having a branching port branched from the filter unit, a heater for heating the purified gas generated by the mixed gas flowing through the branching port through the filter unit, an inner duct forming a closed loop with the heater and supplying hot gas generated by the heater toward an inner circumferential surface of the filter unit, and an outer duct for discharging the organic compounds which is desorbed from the filter unit by the hot gas in the inner duct.

Description

Volatile Organic Compound Mixed Gas Treatment System {APPARATUS FOR PROCESSING GAS CONTAINING VOLATILE ORGANIC COMPOUNDS}

The present invention relates to an apparatus for treating a gas mixed with volatile organic compounds.

In general, a plant using volatile organic compounds (VOCs) such as semiconductors, LCDs, and paint shops is provided with a purification device for purifying them.

The purification device is usually composed of a suction fan and an adsorption filter. Specifically, the suction fan is configured to pressurize the VOCs mixed gas containing the volatile organic compounds toward the adsorption filter, and the adsorption filter is configured to purify the mixed gas by adsorbing the volatile organic compounds from the VOCs mixed gas.

The purification apparatus includes a desorption unit for desorbing a volatile organic compound from the adsorption filter in order to regenerate the adsorption filter to increase the adsorption efficiency of the adsorption filter. The desorption unit is usually configured to desorb volatile organic compounds from the adsorption filter by heating the outside air and forcing the heated high temperature external air toward the adsorption filter. To this end, the detachable part is provided with a separate heater fan for pumping external air. According to this configuration, the power consumption is increased due to the heater fan, and there is a disadvantage in that the detachable part is complicated. In addition, according to such a configuration, since the external air which is relatively low temperature is directly heated to the set temperature, there is a problem that the amount of heat required is increased.

There may be a limit in increasing the adsorption efficiency by regeneration of the adsorption filter. In order to achieve higher adsorption efficiency beyond the limit, in addition to the configuration (detachable portion) that directly acts on the adsorption filter, a configuration that indirectly acts on it should be considered.

One object of the present invention is to provide a volatile organic compound mixed gas treatment apparatus capable of reducing the amount of heat required while being able to desorb volatile organic compounds from the adsorption filter with a simple configuration.

Another object of the present invention is to provide an apparatus for treating volatile organic compound mixed gas, which can increase the efficiency of a reaction in which the adsorption filter adsorbs volatile organic compounds while indirectly acting with the adsorption filter.

According to one aspect of the present invention, there is provided a volatile organic compound mixed gas treating apparatus comprising: a housing having an inner space; A suction fan installed in the housing to pump the mixed gas mixed with the organic compound into the internal space; A cylindrical filter unit disposed in the inner space and configured to generate a purge gas by adsorbing the organic compound from the mixed gas fed by the suction fan; A flow rate reduction unit installed between the suction fan and the filter unit to reduce a flow rate of the mixed gas flowing into the filter unit; And a branching branch formed in the filter unit, a heater for heating the purge gas generated by the mixed gas flowing through the branching hole, passing through the filter unit, and forming the heater and a closed loop. A desorption unit having an inner duct for supplying hot gas heated by a heater toward the inner circumferential surface of the filter unit, and an outer duct for discharging the organic compound desorbed from the filter unit by the hot gas in the inner duct; It may include.

The outer duct may include a mixed gas supply duct communicating with the branch port and supplying the mixed gas toward an outer circumferential surface of the filter unit, wherein the inner duct forms a closed loop with the heater. The inner circumferential surface of the unit may be disposed to face the mixed gas supply duct, and may include a purge gas supply duct supplied from the mixed gas supply duct to the heater through the filter unit.

Here, the filter unit, the cylindrical frame; An adsorption filter installed in the frame along its circumferential direction; And a driving unit connected to the frame to rotate the adsorption filter in the circumferential direction.

Here, the flow rate reduction unit may include a medium filter for physically filtering the mixed gas.

Here, the medium filter, the flow rate of the mixed gas passing through the filter unit is 0.88 ~ 1.7 m / s when the frequency of the motor of the suction fan is 40 Hz and the suction amount of the mixed gas by the suction fan is 300 CCM. It can have a mesh size to be.

The flow rate reduction unit may further include a frame having a vertical bar extending in a vertical direction and a horizontal bar connected to the vertical bar and extending in a horizontal direction, wherein the medium filter is in an area defined by the frame. And a left filter and a right filter disposed on and spaced apart from each other on both end sides of the horizontal bar.

Here, each of the left filter and the right filter may include a pair of filter members arranged in a multilayer structure.

According to the volatile organic compound mixed gas treatment apparatus according to the present invention configured as described above, the volatile organic compound can be desorbed from the adsorption filter only by the wind pressure of the suction fan through the configuration of the branch port, thereby simplifying the construction and reducing the maintenance cost. Can be.

In addition, since the purification gas supply duct is disposed adjacent to the front of the filter unit in the rotational direction with respect to the hot gas supply duct, the purification gas supply duct can supply a relatively high temperature purification gas toward the heater, thereby heating the purification gas through the heater. It can reduce the amount of heat required to

Also, by arranging the flow rate reduction unit indirectly acting on the adsorption filter in front of the adsorption filter, the flow rate of the mixed gas flowing into the adsorption filter is lowered, so that the adsorption filter absorbs volatile organic compounds from the mixed gas. To increase.

1 is a perspective view of a volatile organic compound mixed gas processing apparatus 100 according to an embodiment of the present invention.
2 is a perspective view of the filter unit 140 and the desorption unit 160 of the volatile organic compound mixed gas processing apparatus 100 of FIG. 1.
3 is a plan view of the filter unit 140 and the desorption unit 160 of the volatile organic compound mixed gas processing apparatus 100 of FIG. 1.
4 is a front view of the flow rate reduction unit 130 of FIG. 1.
5 is a gas flow rate simulation result image when the flow rate reducing unit 130 is not installed in the volatile organic compound mixed gas processing apparatus 100 of FIG. 1.
FIG. 6 is a graph showing the mixed gas treatment efficiency of the filter unit 140 when the flow rate reducing unit 130 is excluded in FIG. 1.
7 is a graph showing the mixed gas treatment efficiency of the filter unit 140 according to the treatment apparatus 100 of FIG. 1.

Hereinafter, a volatile organic compound mixed gas purification apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present specification, the same or similar reference numerals are assigned to the same or similar configurations in different embodiments, and the description thereof is replaced with the first description.

1 is a perspective view of a volatile organic compound mixed gas purification apparatus 100 according to an embodiment of the present invention.

Referring to the figure, the volatile organic compound mixed gas purification apparatus 100, the housing 110, the suction fan 120, the flow rate reduction unit 130, the filter unit 140, the purification gas exhaust port 150, desorption The unit 160 and the concentrated gas exhaust port 190 may be included.

The housing 110 forms an outer wall of the volatile organic compound mixed gas purification apparatus 100, and has an inner space for accommodating the thorough fan 120 and the like. The inner space of the housing 110 may be partitioned by an inner partition 111 configured to surround the filter unit 140 to be described later.

The suction fan 120 is configured to pump mixed gas mixed with volatile organic compounds (VOCs). The suction fan 120 is configured to pump the mixed gas introduced through the inlet damper 112 into a space defined by the inner partition 111.

The flow rate reduction unit 130 is disposed between the filter unit 140 and the suction fan 120 to reduce the flow rate of the mixed gas before it flows into the filter unit 140. The flow rate reduction unit 130 may be a medium filter for physically filtering the mixed gas. The medium filter, the flow rate of the mixed gas passing through the filter unit 140 is 0.88 ~ 1.7 m when the frequency of the motor of the suction fan 120 is 40 Hz and the suction amount of the mixed gas by the suction fan 120 is 300 CCM. You can have a mesh size that is / s.

The filter unit 140 is configured to adsorb VOCs in the VOCs mixed gas to purify the mixed value. The filter unit 140 is configured to discharge the purge gas through the hollow part 141 so that the purge gas flows to the purge gas exhaust pipe 150. The filter unit 140 will be described later in detail with reference to FIGS. 2 to 3.

The purge gas exhaust port 150 is configured to discharge the purge gas purified by the filter unit 140. The purge gas exhaust port 150 may be provided with a hepa filter or the like to purify the purge gas once more.

The desorption unit 160 is a configuration for desorption of volatile organic compounds adsorbed on the filter unit 140. To this end, the desorption unit 160 may be provided with a branch port 161, air volume control damper 163, heater 165, and the channel 167. The branch opening 161 may be branched in a space defined by the inner partition wall 111 so as to receive the wind pressure by the suction fan 120. The air volume control damper 163 is configured to adjust the air volume of the mixed gas introduced through the branch port 161. The heater 165 is configured to heat the converted purge gas when the mixed gas introduced through the branch port 161 is converted into the purge gas through the filter unit 140. The channel 167 is configured in a closed loop type to connect the branch 161, the air volume control damper 163, and the heater 165 to each other. Desorption unit 160 will be described later in detail with reference to FIGS.

The concentrated gas exhaust port 190 is configured to discharge the high concentration of VOCs gas desorbed from the filter unit 140. The concentrated gas exhaust port 190 may communicate with an exhaust duct 173 described later.

Hereinafter, the configuration and operation of the volatile organic compound mixed gas purification apparatus 100 will be described in detail with reference to FIGS. 2 and 3.

2 and 3 are a perspective view and a plan view of the filter unit 140 and the desorption unit 160 of the volatile organic compound mixed gas purification apparatus 100 of FIG. 1, respectively.

Referring to the drawings, the volatile organic compound mixed gas purification apparatus 100 may include a filter unit 140, a desorption unit 160, and a sealing unit 180.

The filter unit 140 may include a frame 143 and an adsorption filter 145.

The frame 143 may have a cylindrical shape as a whole and may be divided into a plurality of blocks. The frame 143 may have a plurality of openings penetrating from the outer circumferential surface thereof toward the inner circumferential surface thereof.

The adsorption filter 145 is configured to adsorb volatile organic compounds from the mixed gas. A plurality of adsorption filters 145 may be provided, and each may be configured in the form of a block, and may be detachably installed in the frame 143 along its circumferential direction. The adsorption filter 145 may be made of zeolite or the like, and may be formed of a honeycomb structure having a fine shape.

The filter unit 140 may be configured to be rotatable along its circumferential direction by a driving unit such as a rotor.

The desorption unit 160 may further include an outer duct 169 and an inner duct 175 in addition to the aforementioned branch outlet 161, the air volume control damper 163, the heater 165, and the channel 167. .

The outer duct 169 may be disposed on the outer circumferential surface of the filter unit 140. The outer duct 169 may include a mixed gas supply duct 171 and an exhaust duct 173.

The mixed gas supply duct 171 is formed in communication with the branch 161 and is configured to supply the mixed gas introduced through the branch 161 toward the outer circumferential surface of the filter unit 140. The mixed gas supply duct 171 is disposed forward in the rotational direction R of the filter unit 140 with respect to the exhaust duct 173.

The exhaust duct 173 is configured to discharge the concentrated gas of the volatile organic compound desorbed from the adsorption filter 145 by the hot gas supplied from the hot gas supply duct 179 which will be described later. To this end, the exhaust duct 173 may be formed in communication with the above-described concentrated gas exhaust port 190. The exhaust duct 173 may be configured to be adjacent to the mixed gas supply duct 171 to be integrated.

The inner duct 175 may be disposed on the inner circumferential surface of the filter unit 140. The inner duct 175 may include a purge gas supply duct 177 and a hot gas supply duct 179.

The purge gas supply duct 177 may be disposed to face the mixed gas supply duct 171 around the adsorption filter 145. Since the mixed gas supplied from the mixed gas supply duct 171 is purified while passing through the adsorption filter 145, the purified gas supply duct 177 may be provided with a purified gas. In addition, since the purification gas supply duct 177 communicates with the heater 165 through the channel 167 described above, the purification gas supply duct 177 may supply the purification gas toward the heater 165. The purge gas supply duct 177 is disposed forward in the rotational direction R of the filter unit 140 with respect to the hot gas supply duct 179.

The hot gas supply duct 179 may be disposed to face the exhaust duct 173 around the adsorption filter 145. In addition, the hot gas supply duct 179 may be in communication with the heater 165 through the channel 167 described above. Accordingly, the hot gas supply duct 179 may supply the hot gas heated by the heater 165 toward the inner circumferential surface of the adsorption filter 145. The hot gas supply duct 179 may be configured to be adjacent to the purification gas supply duct 177 to be integrally formed.

Sealing unit 180 is a configuration for sealing between the filter unit 140 and the desorption unit 160. The sealing unit 180 may include a side flange composed of the first side flange 181 and the second side flange 183.

The first side flange 181 may extend from the side of the outer duct 169. Specifically, the first side flange 181 may be formed to have a curvature corresponding to the outer circumferential surface of the filter unit 140 may be configured to be in close contact with the outer circumferential surface of the filter unit 140.

The second side flange 183 may extend from the side of the inner duct 175. Specifically, the second side flange 183 may be formed to have a curvature corresponding to the inner circumferential surface of the filter unit 140 may be configured to be in close contact with the inner circumferential surface of the filter unit 140.

Hereinafter, an operation method of the volatile organic compound mixed gas treatment device 100 will be described.

As described above with reference to FIG. 1, the mixed gas supplied by the suction fan 120 passes through the adsorption filter 145 to adsorb volatile organic compounds. Such volatile organic compounds deteriorate the purification ability of the adsorption filter 145, and desorption of the volatile organic compounds is required for regeneration of the adsorption filter 145.

According to the present embodiment, the desorption process of the volatile organic compound is started while the mixed gas is introduced through the branch port 161. Specifically, the mixed gas is supplied to the mixed gas supply duct 171 through the branch opening 161 disposed in the inner partition 111. Thereafter, the mixed gas is purified while passing through the adsorption filter 145, and the purified gas thus purified is provided to the purified gas supply duct 177.

The purge gas is then supplied to the heater 165 through the channel 167, heated in the heater 165 to increase the temperature. The hot gas is again supplied toward the hot gas supply duct 179 of the inner duct 175, and the hot gas supply duct 179 supplies the hot gas toward the inner circumferential surface of the adsorption filter 145. When the hot gas passes through the adsorption filter 145, the volatile organic compound is desorbed from the adsorption filter 145 due to the heat of the hot gas, and the thus desorbed volatile organic compound may be discharged through the exhaust duct 173. .

The adsorption filter 145 is sealed with the outer duct 169 and the inner duct 175 by the first side flange 181 and the second side flange 183 described above, so that the suction filter 145 flows in through the branch 161. The mixed gas moves only through the above-described path. Since the mixed gas is introduced through the branch port 161 by the wind pressure of the suction fan 120 as described above, according to the present embodiment, the volatile organic compounds are removed from the adsorption filter 145 only by the wind pressure by the suction fan 120. Can be removed. This eliminates the need for a separate configuration for supplying the hot gas, thereby simplifying its configuration.

In addition, according to the present embodiment, since the purge gas supply duct 177 is disposed forward in the rotation direction R of the filter unit 140 with respect to the hot gas supply duct 179 as described above, the mixed gas supply duct The mixed gas introduced into the purification gas supply duct 177 through 171 passes through the region of the high temperature adsorption filter 145 heated by the hot gas supply duct 179. According to this configuration, since the purge gas supply duct 177 supplies the purge gas having a relatively high temperature toward the heater 165, the amount of heat required to heat the purge gas through the heater 165 can be reduced.

Since the purification gas supply duct 177 is disposed adjacent to the hot gas supply duct 179, the adsorption filter 145 heated by the hot gas supply duct 179 may be immediately desorbed by a relatively low temperature mixed gas. Can be cooled. Accordingly, the area of the adsorption filter 145 for adsorbing volatile organic compounds along the circumferential direction of the filter unit 140 can be maximized, thereby increasing the adsorption efficiency.

Since the outer duct 169 and the inner duct 175 are integrally formed as described above, their manufacture and installation are easy.

4 to 7, the flow rate reduction unit 130 will be described in detail.

First, FIG. 4 is a front view of the flow rate reduction unit 130 of FIG. 1.

Referring to this figure, the flow rate reduction unit 130 may include a frame and a medium filter.

The frame may have a vertical bar 131 and a horizontal bar 133. The vertical bar 131 is a bar extending in the vertical direction and may be disposed one each at the left and right sides. The horizontal bar 133 is a bar extending along the horizontal direction, and may be disposed one each up and down. The horizontal bar 133 and the vertical bar 131 may be connected to each other to define a rectangular area as a whole.

The medium filter is located in a rectangular region defined by the frame. Specifically, the media filter may have a left filter 135 and a right filter 137. The left filter 135 and the right filter 137 are located at both end sides of the horizontal bar 133 and are spaced apart from each other. As a result, there is an open area between the left filter 135 and the right filter 137 that does not block the flow of the mixed gas at all. The left filter 135 and the right filter 137 may each have a pair of filter members arranged as a multilayer structure.

Next, the effect of the left filter 135 and the right filter 137 is disposed apart will be described with reference to FIG.

5 is a gas flow rate simulation result image when the flow rate reducing unit 130 is not installed in the volatile organic compound mixed gas processing apparatus 100 of FIG. 1. In this figure, the flow rate reduction unit 130 is shown only to explain its position, and is not installed in this simulation.

Referring to the figure, with respect to the image of the processing apparatus 100 from the top down, the flow rate is larger than the center portion of the left and right edge portion of the housing 110. Therefore, the flow rate reduction unit 130 is preferably present at the left and right edge portions having a relatively high flow rate, rather than being present in all regions such as the left and right sides and the center. To this end, the left filter 135 and the right filter 137 are located at the left and right edge portions, and the center portion is kept open.

By such a configuration, the flow rate reduction unit 130 reduces the flow velocity of the left and right edge portions where the flow velocity is relatively high, so as to make the flow rates of the left and right edge portions and the center portion as a whole. Furthermore, it may have the effect of lowering the overall flow rate of the mixed gas.

Next, with reference to FIGS. 6 and 7, the experimental results for the treatment efficiency according to the flow rate of the mixed gas flowing into the filter unit 140 in accordance with the introduction of the flow rate reduction unit 130 will be described.

FIG. 6 is a graph showing the mixed gas treatment efficiency of the filter unit 140 when the flow rate reduction unit 130 is excluded in FIG. 1, and FIG. 7 is a filter unit 140 according to the processing apparatus 100 of FIG. 1. Is a graph showing the efficiency of mixed gas treatment in

First, referring to FIG. 6, when there is no flow rate reduction unit 130, when the frequency of the motor of the suction fan 120 is 30 Hz, the air flow amount is about 210 CCM and the mixed gas passing through the filter unit 140. The flow rate (wind speed) is 1.7 m / s, and the VOCs adsorption efficiency (treatment efficiency) of the filter unit 140 is 95.22%.

When the frequency of the motor of the suction fan 120 rises to 40 Hz, the air flow rate is about 320 CCM, the flow rate is 2.6 m / s, and the VOCs adsorption efficiency (processing efficiency) of the filter unit 140 becomes 94.74%. That is, the throughput for the mixed gas increases as the frequency and air volume increase, but the processing efficiency in the filter unit 140 decreases as the flow rate (wind speed) of the mixed gas passing through the filter unit 140 increases.

In contrast, referring to FIG. 7, when the flow rate reduction unit 130 is employed, when the frequency of the motor of the suction fan 120 is 40 Hz, the air flow rate is about 320 CCM and the wind speed (flow rate) is 1.7 m / s and the VOCs adsorption efficiency (treatment efficiency) of the filter unit 140 is 95.22%. Depending on the mesh size of the flow rate reduction unit 130, the flow rate is 0.88 m / s and the VOCs adsorption efficiency (treatment efficiency) is 95.95% at the same frequency and air volume. In the above case, the flow rate and processing efficiency are the same or higher than the case of the frequency of 30 Hz, but in the present experimental example, the frequency is 40 Hz and the air flow is about 320 CCM.

From the above experimental results, it can be seen that, if the flow rate reduction unit 130 is provided, it is possible to prevent the decrease in adsorption efficiency while increasing the air volume and the wind speed. Thereby, by introducing the flow rate reduction unit 130, it is possible to prevent the decrease in the adsorption efficiency while increasing the throughput and processing speed for the mixed gas.

The volatile organic compound mixed gas treatment device as described above is not limited to the configuration and operation of the embodiments described above. The above embodiments may be configured such that various modifications may be made by selectively combining all or part of the embodiments.

100: volatile organic compound mixed gas treatment device
110: housing 120: suction fan
130: flow rate reduction unit 140: filter unit
150: purge gas exhaust 160: desorption unit
180: sealing unit 190: concentrated gas exhaust port

Claims (7)

A housing having an inner space;
A suction fan installed in the housing to pump the mixed gas mixed with the organic compound into the internal space;
A cylindrical filter unit disposed in the inner space and configured to generate a purge gas by adsorbing the organic compound from the mixed gas fed by the suction fan;
A flow rate reduction unit installed between the suction fan and the filter unit to reduce a flow rate of the mixed gas flowing into the filter unit; And
A branch formed in the filter unit, a heater for heating the purge gas generated through the filter unit, the mixed gas flowing through the branch, and the heater and a closed loop forming the heater And a desorption unit having an inner duct for supplying hot gas heated by the gas toward the inner circumferential surface of the filter unit, and an outer duct for discharging the organic compound desorbed from the filter unit by the hot gas in the inner duct. Volatile organic compound mixed gas processing apparatus.
The method of claim 1,
The outer duct,
It is formed in communication with the branch port and includes a mixed gas supply duct for supplying the mixed gas toward the outer peripheral surface of the filter unit,
The inner duct,
A purge gas that forms a closed loop with the heater and is disposed to face the mixed gas supply duct on an inner circumferential surface of the filter unit and receives the purge gas from the mixed gas supply duct through the filter unit and provides the purified gas toward the heater. A volatile organic compound mixed gas treating apparatus comprising a supply duct.
The method of claim 1,
The filter unit,
Cylindrical frame;
An adsorption filter installed in the frame along its circumferential direction; And
And a drive unit connected to the frame to rotate the adsorption filter along the circumferential direction.
The method of claim 1,
The flow rate reduction unit,
A volatile organic compound mixed gas processing apparatus comprising a medium filter for physically filtering the mixed gas.
The method of claim 4, wherein
The medium filter,
When the frequency of the motor of the suction fan is 40 Hz and the suction amount of the mixed gas by the suction fan is 300 CCM has a mesh size such that the flow rate of the mixed gas passing through the filter unit is 0.88 ~ 1.7 m / s , Volatile organic compound mixed gas treatment device.
The method of claim 4, wherein
The flow rate reduction unit,
And a frame having a vertical bar extending in a vertical direction, the horizontal bar being connected to the vertical bar and extending in a horizontal direction.
The medium filter,
And a left filter and a right filter disposed in an area defined by the frame and spaced apart from each other on both end sides of the horizontal bar.
The method of claim 6,
Each of the left filter and the right filter,
A volatile organic compound mixed gas processing apparatus comprising a pair of filter members arranged in a multilayer structure.

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