TW201638656A - Photosensitive resin composition and application thereof - Google Patents
Photosensitive resin composition and application thereof Download PDFInfo
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- TW201638656A TW201638656A TW104112433A TW104112433A TW201638656A TW 201638656 A TW201638656 A TW 201638656A TW 104112433 A TW104112433 A TW 104112433A TW 104112433 A TW104112433 A TW 104112433A TW 201638656 A TW201638656 A TW 201638656A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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Abstract
Description
本發明係有關一種感光性樹脂組成物及其所形成之間隙體及保護膜,特別是提供一種具有良好解析度且較少殘渣之感光性樹脂組成物。 The present invention relates to a photosensitive resin composition, a spacer formed therefor, and a protective film, and more particularly to a photosensitive resin composition having good resolution and less residue.
一般而言,印刷於彩色濾光層表面上之畫素與黑色矩陣會產生凹凸不平之處。一般係於彩色濾光層之表面形成保護膜,以隱藏不平之處,進而達到平坦化之要求。 In general, pixels and black matrices printed on the surface of the color filter layer are uneven. Generally, a protective film is formed on the surface of the color filter layer to hide the unevenness, thereby achieving the requirement of planarization.
其次,製造液晶顯示元件或固態成像裝置等光學元件包含具有嚴苛條件之處理程序,例如以浸泡酸性溶劑或鹼性溶液之處理方式或以濺鍍(Sputtering)之處理方式形成配線電極層時,基板表面會造成局部腐蝕或產生高溫。 Secondly, manufacturing an optical element such as a liquid crystal display element or a solid-state imaging device includes a processing procedure having severe conditions, for example, when a wiring electrode layer is formed by a treatment method of soaking an acidic solvent or an alkaline solution or by a sputtering method. The surface of the substrate can cause localized corrosion or high temperatures.
因此,為了防止元件表面之元件受損,元件之表面須鋪設保護膜。保護膜須與基板具有優異之附著力,且須具有高透明度、高表面硬度與平滑的表面。具有高耐熱性與耐光性之保護膜於長期使用下亦不會有變色、黃化或白化等變質情況發生。此外,該保護膜還需具有良好的耐水性、耐化性、耐溶劑性、耐酸性及耐鹼性等特性。 Therefore, in order to prevent damage to the components on the surface of the component, a protective film must be laid on the surface of the component. The protective film must have excellent adhesion to the substrate and must have high transparency, high surface hardness and a smooth surface. The protective film with high heat resistance and light resistance will not cause discoloration, yellowing or whitening deterioration under long-term use. In addition, the protective film also needs to have good water resistance, chemical resistance, solvent resistance, acid resistance and alkali resistance.
另一方面,在習知之彩色液晶顯示元件中,為 了維持兩個基板間固定之層間距離(細胞間隙),習知之彩色液晶顯示元件係於整個基板上隨機噴灑如聚苯乙烯珠或矽珠,其中該聚苯乙烯珠或矽珠之直徑係為兩基板間之間距。 然而,此習知方式因噴珠之位置及密度分佈並不均勻,造成背光源之光線受噴珠影響而散射,進一步使得顯示元件的對比度降低。因此,以光微影製程(photolithography)方式所開發出之間隙體用感光性組成物逐漸成為業界之主流。 On the other hand, in the conventional color liquid crystal display element, The interlayer distance (cell gap) fixed between the two substrates is maintained. The conventional color liquid crystal display element is randomly sprayed on the entire substrate such as polystyrene beads or bead beads, wherein the diameter of the polystyrene beads or the bead beads is The distance between the two substrates. However, this conventional method causes the light of the backlight to be scattered by the beading due to the uneven distribution of the position and density of the bead, further reducing the contrast of the display element. Therefore, the photosensitive composition for the interstitial body developed by the photolithography method has gradually become the mainstream in the industry.
該間隙體之形成方式係將該間隙體用之感光性 組成物先塗佈至基板,並於基板與曝光源間放入具有指定圖案之光罩,而經曝光顯影形成間隙體。依據此方法,可於R、G、B畫素外的指定位置上形成間隙體,以解決習知技術之問題。其中,細胞間隙也可利用感光性成分形成之塗膜厚度來控制,使細胞間隙的距離變得容易控制,而具有精度高之優點。 The formation of the spacer is the sensitivity of the spacer The composition is first applied to the substrate, and a mask having a prescribed pattern is placed between the substrate and the exposure source, and a gap body is formed by exposure and development. According to this method, a gap body can be formed at a specified position other than the R, G, and B pixels to solve the problems of the prior art. Among them, the cell gap can also be controlled by the thickness of the coating film formed by the photosensitive component, and the distance between the cell gaps can be easily controlled, and the precision is high.
由於該保護膜或間隙體係形成於彩色濾光片或 是基板上,對透明度之要求極高。當應用於液晶顯示元件時,透明度不佳之保護膜或間隙體將造成液晶顯示元件之亮度不足,而影響液晶顯示元件之顯示品質。 Since the protective film or gap system is formed in a color filter or On the substrate, the transparency is extremely high. When applied to a liquid crystal display element, a protective film or a spacer having poor transparency causes an insufficient brightness of the liquid crystal display element to affect the display quality of the liquid crystal display element.
為提高保護膜或間隙體之透明度,日本專利特 開第2010-054561號專利揭示一種保護膜用之感光性樹脂組成物,其包含鹼可溶性黏結樹脂、乙烯性不飽和基之化合物、光起始劑及溶劑,其中乙烯性不飽和基之化合物中不飽和鍵之結合當量為90g/ep至450g/eq,且乙烯性不飽和基之 化合物中的單一化合物之不飽和雙鍵為2個至4個,且鹼可溶性黏結樹脂之重量平均分子量為10,000至20,000。 In order to improve the transparency of the protective film or the gap body, the Japanese patent Japanese Patent Publication No. 2010-054561 discloses a photosensitive resin composition for a protective film comprising an alkali-soluble binder resin, a compound of an ethylenically unsaturated group, a photoinitiator and a solvent, wherein the ethylenically unsaturated group is a compound The bonding equivalent of the unsaturated bond is from 90 g/ep to 450 g/eq, and the ethylenically unsaturated group The single compound in the compound has 2 to 4 unsaturated double bonds, and the alkali-soluble binder resin has a weight average molecular weight of 10,000 to 20,000.
其次,日本專利特開第2004-240241號專利揭 示一種感光性樹脂組成物,其包含共聚合物、具有乙烯性不飽合基之聚合物及光起始劑,其中,該共聚物係由乙烯性不飽合羧酸(酐)、具環氧基之乙烯性不飽合基之化合物及其他乙烯性不飽合基之化合物所共聚合而得,且光起始劑可為2-丁二酮-[4-甲硫基苯]-2-(O-肟醋酸鹽)、1,2-丁二酮-1-(4-嗎啉基苯基)-2-(O-苯甲醯肟)、1,2-辛二酮-1-[4-苯硫基苯]-2-[O-(4-甲基苯甲醯)肟]或其類似物。然而,此感光性樹脂組成物雖可製得高透明性之保護膜或間隙體,但卻具具有較低之解析度及較多殘渣之缺點。 Secondly, Japanese Patent Laid-Open No. 2004-240241 discloses A photosensitive resin composition comprising a copolymer, a polymer having an ethylenic unsaturated group, and a photoinitiator, wherein the copolymer is an ethylenically unsaturated carboxylic acid (anhydride), having a ring A compound obtained by copolymerizing a compound of an ethylenic unsaturated group of an oxy group and another ethylenically unsaturated group, and the photoinitiator may be 2-butanedione-[4-methylthiobenzene]-2 -(O-肟acetate), 1,2-butanedione-1-(4-morpholinylphenyl)-2-(O-benzamide), 1,2-octanedione-1- [4-Benzylbenzene]-2-[O-(4-methylbenzhydrazinium) oxime] or an analog thereof. However, this photosensitive resin composition can produce a highly transparent protective film or a spacer, but has a disadvantage of having a low resolution and a large amount of residue.
有鑑於此,目前亟需發展一種解析度較高且殘 渣較少的間隙體或保護膜用感光性樹脂組成物,以克服習知保護膜或間隙體之上述種種問題。 In view of this, there is an urgent need to develop a high resolution and residual A photosensitive resin composition having a small amount of slag or a protective film is used to overcome the above problems of the conventional protective film or the spacer.
因此,本發明之一態樣是在提供一種感光性樹脂組成物,此感光性樹脂組成物包含鹼可溶性樹脂(A)、具有乙烯性不飽和基之化合物(B)、光起始劑(C)、鄰萘醌二疊氮磺酸酯(D)及溶劑(E),且此感光性樹脂組成物具有良好之解析度及較少之殘渣。 Therefore, an aspect of the present invention provides a photosensitive resin composition comprising an alkali-soluble resin (A), a compound having an ethylenically unsaturated group (B), and a photoinitiator (C). ), o-naphthoquinone diazide sulfonate (D) and solvent (E), and the photosensitive resin composition has good resolution and less residue.
本發明之另一態樣是在提供一種間隙體或保護膜,其均係利用上述之感光性樹脂組成物所形成。 Another aspect of the present invention provides a spacer or a protective film which is formed by using the above-mentioned photosensitive resin composition.
本發明之又一態樣是在提供一種液晶顯示元件,其包含前述之間隙體或保護膜。 Still another aspect of the present invention provides a liquid crystal display element comprising the aforementioned spacer or protective film.
根據本發明之上述態樣,提出一種感光性樹脂組成物。此感光性樹脂組成物包含鹼可溶性樹脂(A)、具有乙烯性不飽和基之化合物(B)、光起始劑(C)、鄰萘醌二疊氮磺酸酯(D)及溶劑(E),以下析述之。 According to the above aspect of the invention, a photosensitive resin composition is proposed. The photosensitive resin composition contains an alkali-soluble resin (A), a compound (B) having an ethylenically unsaturated group, a photoinitiator (C), an o-naphthoquinonediazide sulfonate (D), and a solvent (E). ), the following analysis.
本發明之鹼可溶性樹脂(A)係指可溶於鹼性水溶液中的樹脂,其構造並無特別限制。較佳地,鹼可溶性樹脂(A)可為具有羧酸基之樹脂或苯酚-酚醛清漆(phenol-novolac)樹脂等。更佳地,鹼可溶性樹脂(A)可由一混合物於適當之聚合起始劑存在下所共聚合而得。 The alkali-soluble resin (A) of the present invention means a resin which is soluble in an aqueous alkaline solution, and the structure thereof is not particularly limited. Preferably, the alkali-soluble resin (A) may be a resin having a carboxylic acid group or a phenol-novolac resin or the like. More preferably, the alkali-soluble resin (A) can be obtained by copolymerization of a mixture in the presence of a suitable polymerization initiator.
該混合物可包含不飽和羧酸或不飽和羧酸酐化合物(a1)、具有環氧基之不飽和化合物(a2)及/或其他不飽和化合物(a3)。 The mixture may comprise an unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1), an epoxy group-containing unsaturated compound (a2) and/or other unsaturated compound (a3).
該不飽和羧酸或不飽和羧酸酐化合物(a1)可為包含羧酸基或羧酸酐結構,以及用以聚合鍵結之不飽和鍵的化合物。該不飽和羧酸或不飽和羧酸酐化合物(a1)之結構並無特別限制,且該不飽和羧酸或不飽和羧酸酐化合物(a1)可包含但不限於不飽和單羧酸化合物、不飽和二羧酸化合物、不飽和酸酐化合物、多環型不飽和羧酸化合物、多環型不飽和二羧酸化合物或多環型不飽和酸酐化合物等。 The unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) may be a compound containing a carboxylic acid group or a carboxylic acid anhydride structure, and an unsaturated bond for polymerizing the bond. The structure of the unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) is not particularly limited, and the unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) may include, but is not limited to, an unsaturated monocarboxylic acid compound, and is unsaturated. a dicarboxylic acid compound, an unsaturated acid anhydride compound, a polycyclic unsaturated carboxylic acid compound, a polycyclic unsaturated dicarboxylic acid compound or a polycyclic unsaturated acid anhydride compound.
前述不飽和單羧酸化合物之具體例可包含但不限於(甲基)丙烯酸、丁烯酸、α-氯丙烯酸、乙基丙烯酸、肉桂酸、2-(甲基)丙烯醯乙氧基丁二酸酯[2-(meth)acryloyloxyethyl succinate monoester]、2-(甲基)丙烯醯乙氧基六氫化苯二甲酸酯、2-(甲基)丙烯醯乙氧基苯二甲酸酯或omega-羧基聚己內酯多元醇單丙烯酸酯(其可為東亞合成製造之商品,且其型號為ARONIX M-5300)等。 Specific examples of the aforementioned unsaturated monocarboxylic acid compound may include, but are not limited to, (meth)acrylic acid, crotonic acid, α-chloroacrylic acid, ethacrylic acid, cinnamic acid, 2-(methyl)acrylic acid ethoxylated butyl Acid ester [2-(meth)acryloyloxyethyl succinate monoester], 2-(meth)acryloyl ethoxyethoxy hexahydrophthalate, 2-(methyl) propylene ethoxylate or omega a carboxypolycaprolactone polyol monoacrylate (which may be a product manufactured by East Asia Synthetic Co., Ltd., model number ARONIX M-5300) or the like.
前述不飽和二羧酸化合物之具體例可包含但不限於馬來酸、富馬酸、甲基富馬酸、衣康酸或檸康酸等。 Specific examples of the aforementioned unsaturated dicarboxylic acid compound may include, but are not limited to, maleic acid, fumaric acid, methyl fumaric acid, itaconic acid or citraconic acid, and the like.
前述之不飽和酸酐化合物可為該不飽和二羧酸化合物之酸酐化合物。 The aforementioned unsaturated acid anhydride compound may be an acid anhydride compound of the unsaturated dicarboxylic acid compound.
前述多環型不飽和羧酸化合物之具體例可包含但不限於5-羧基雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環[2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧基-6-甲基雙環[2.2.1]庚-2-烯或5-羧基-6-乙基雙環[2.2.1]庚-2-烯。 Specific examples of the polycyclic unsaturated carboxylic acid compound may include, but are not limited to, 5-carboxybicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methylbicyclo[2.2.1]hept-2- Alkene, 5-carboxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methylbicyclo[2.2.1]hept-2-ene or 5-carboxy-6-ethyl Bicyclo [2.2.1] hept-2-ene.
前述多環型不飽和二羧酸化合物之具體例可包含但不限於5,6-二羧酸二環[2.2.1]庚-2-烯。 Specific examples of the above polycyclic unsaturated dicarboxylic acid compound may include, but are not limited to, 5,6-dicarboxylic acid bicyclo[2.2.1]hept-2-ene.
前述多環型不飽和酸酐化合物可為該多環型不飽和二羧酸化合物之酸酐化合物。 The polycyclic unsaturated acid anhydride compound may be an acid anhydride compound of the polycyclic unsaturated dicarboxylic acid compound.
前述不飽和羧酸或不飽和羧酸酐化合物(a1)可單獨一種使用或混合複數種使用。 The above unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) may be used singly or in combination of plural kinds.
較佳地,該不飽和羧酸或不飽和羧酸酐化合物 (a1)之具體例可為丙烯酸、甲基丙烯酸、馬來酸酐、2-甲基丙烯醯乙氧基丁二酸酯或2-甲基丙烯醯基乙氧基六氫化苯二甲酸。 Preferably, the unsaturated carboxylic acid or unsaturated carboxylic anhydride compound Specific examples of (a1) may be acrylic acid, methacrylic acid, maleic anhydride, 2-methylpropenyl ethoxy succinate or 2-methylpropenyl ethoxy hexahydrophthalic acid.
基於不飽和羧酸或不飽和羧酸酐化合物(a1), 以及後述具有環氧基之不飽和化合物(a2)與其他不飽和化合物(a3)之總使用量為100重量份,該不飽和羧酸或不飽和羧酸酐化合物(a1)之使用量可為5重量份至50重量份,較佳為5重量份至35重量份,且更佳可為15重量份至35重量份。 Based on an unsaturated carboxylic acid or an unsaturated carboxylic anhydride compound (a1), And the total amount of the epoxy group-containing unsaturated compound (a2) and the other unsaturated compound (a3) to be described later is 100 parts by weight, and the unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) may be used in an amount of 5 parts by weight. The parts by weight to 50 parts by weight, preferably 5 parts by weight to 35 parts by weight, and more preferably 15 parts by weight to 35 parts by weight.
該具有環氧基之不飽和化合物(a2)可包含具有環氧基之(甲基)丙烯酸酯化合物、具有環氧基之α-烷基丙烯酸酯化合物或環氧丙醚化合物等。 The epoxy group-containing unsaturated compound (a2) may include a (meth) acrylate compound having an epoxy group, an α-alkyl acrylate compound having an epoxy group, or a glycidyl ether compound.
前述具有環氧基之(甲基)丙烯酸酯化合物的具體可包含但不限於(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸2-甲基環氧丙酯、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸6,7-環氧庚酯、(甲基)丙烯酸3,4-環氧環己酯或(甲基)丙烯酸3,4-環氧環己基甲酯等。 Specifically, the epoxy group-containing (meth) acrylate compound may include, but is not limited to, glycidyl (meth) acrylate, 2-methyl propyl propyl (meth) acrylate, and (meth) acrylate 3 , 4-epoxybutyl acrylate, 6,7-epoxyheptyl (meth)acrylate, 3,4-epoxycyclohexyl (meth)acrylate or 3,4-epoxycyclohexyl (meth)acrylate Methyl ester, etc.
前述具有環氧基之α-烷基丙烯酸酯化合物的具體例可包含但不限於α-乙基丙烯酸環氧丙酯、α-正丙基丙烯酸環氧丙酯、α-正丁基丙烯酸環氧丙酯或α-乙基丙烯酸6,7-環氧庚酯等。 Specific examples of the above-mentioned epoxy group-containing α-alkyl acrylate compound may include, but are not limited to, α-ethyl acrylate propyl acrylate, α-n-propyl propylene acrylate, and α-n-butyl acrylate epoxy. Propyl ester or α-ethyl acrylate 6,7-epoxyheptyl ester and the like.
前述環氧丙醚化合物之具體例可包含但不限於鄰-乙烯基苯甲基環氧丙醚 (o-vinylbenzylglycidylether)、間-乙烯基苯甲基環氧丙醚(m-vinylbenzylglycidylether)或對-乙烯基苯甲基環氧丙醚(p-vinylbenzylglycidylether)等。 Specific examples of the aforementioned glycidyl ether compound may include, but are not limited to, o-vinylbenzyl glycidyl ether (o-vinylbenzylglycidylether), m-vinylbenzylglycidylether or p-vinylbenzylglycidylether.
前述具有環氧基之不飽和化合物(a2)可單獨一種使用或混合複數種使用。 The above epoxy group-containing unsaturated compound (a2) may be used singly or in combination of plural kinds.
較佳地,該具有環氧基之不飽和化合物(a2)的具體例可為甲基丙烯酸環氧丙酯、(甲基)丙烯酸3,4-環氧環己基甲酯、甲基丙烯酸6,7-環氧庚酯、鄰-乙烯基苯甲基環氧丙醚、間-乙烯基苯甲基環氧丙醚或對-乙烯基苯甲基環氧丙醚。 Preferably, the specific example of the epoxy group-containing unsaturated compound (a2) may be glycidyl methacrylate, 3,4-epoxycyclohexylmethyl (meth)acrylate, or methacrylic acid 6, 7-epoxyheptyl ester, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether or p-vinylbenzyl glycidyl ether.
基於前述不飽和羧酸或不飽和羧酸酐化合物(a1)與該具有環氧基之不飽和化合物(a2),以及其他不飽和化合物(a3)之總使用量為100重量份,具有環氧基之不飽和化合物(a2)之使用量可為5重量份至30重量份,較佳為5重量份至20重量份,且更佳可為10重量份至20重量份。 Based on the above-mentioned unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) and the epoxy group-containing unsaturated compound (a2), and other unsaturated compound (a3), the total amount used is 100 parts by weight, and has an epoxy group. The unsaturated compound (a2) may be used in an amount of 5 parts by weight to 30 parts by weight, preferably 5 parts by weight to 20 parts by weight, and more preferably 10 parts by weight to 20 parts by weight.
該其他不飽和化合物(a3)可為(甲基)丙烯酸烷基酯、(甲基)丙烯酸脂環族酯、(甲基)丙烯酸芳基酯、不飽和二羧酸二酯、(甲基)丙烯酸羥烷酯、(甲基)丙烯酸酯之聚醚、芳香乙烯化合物,或者前述化合物以外之其他不飽和化合物。 The other unsaturated compound (a3) may be an alkyl (meth)acrylate, an alicyclic (meth)acrylate, an aryl (meth)acrylate, an unsaturated dicarboxylic acid diester, (methyl) a hydroxyalkyl acrylate, a polyether of (meth) acrylate, an aromatic vinyl compound, or other unsaturated compound other than the foregoing compounds.
前述(甲基)丙烯酸烷基酯之具體例可包含但不限於(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸正丁酯、(甲 基)丙烯酸異丁酯、(甲基)丙烯酸二級丁酯或(甲基)丙烯酸三級丁酯等。 Specific examples of the aforementioned alkyl (meth)acrylate may include, but are not limited to, methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, and isopropyl (meth)acrylate. , n-butyl (meth) acrylate, (a Base) isobutyl acrylate, secondary butyl (meth) acrylate or tertiary butyl (meth) acrylate.
前述(甲基)丙烯酸脂環族酯之具體例可包含但不限於(甲基)丙烯酸環己酯、(甲基)丙烯酸-2-甲基環己酯、三環[5.2.1.02,6]癸-8-基(甲基)丙烯酸酯[亦可稱之為(甲基)丙烯酸雙環戊酯]、(甲基)丙烯酸二環戊氧基乙酯、(甲基)丙烯酸異冰片酯或(甲基)丙烯酸四氫呋喃酯等。 Specific examples of the aforementioned (meth)acrylic alicyclic ester may include, but are not limited to, cyclohexyl (meth)acrylate, 2-methylcyclohexyl (meth)acrylate, and tricyclo [5.2.1.0 2,6癸-8-yl (meth) acrylate [may also be referred to as dicyclopentyl (meth) acrylate], dicyclopentyloxy (meth) acrylate, isobornyl (meth) acrylate or Tetrahydrofuranyl (meth)acrylate or the like.
前述(甲基)丙烯酸芳基酯之具體例可包含但不限於(甲基)丙烯酸苯基酯或甲基丙烯酸苯甲酯等。 Specific examples of the aryl (meth)acrylate may include, but are not limited to, phenyl (meth)acrylate or benzyl methacrylate.
前述不飽和二羧酸二酯之具體例可包含但不限於馬來酸二乙酯、富馬酸二乙酯或衣康酸二乙酯等。 Specific examples of the unsaturated dicarboxylic acid diester may include, but are not limited to, diethyl maleate, diethyl fumarate or diethyl itaconate.
前述(甲基)丙烯酸羥烷酯之具體例可包含但不限於(甲基)丙烯酸-2-羥基乙酯或(甲基)丙烯酸-2-羥基丙酯等。 Specific examples of the aforementioned hydroxyalkyl (meth)acrylate may include, but are not limited to, 2-hydroxyethyl (meth)acrylate or 2-hydroxypropyl (meth)acrylate.
前述(甲基)丙烯酸酯之聚醚的具體例可包含但不限於聚乙二醇單(甲基)丙烯酸酯或聚丙二醇單(甲基)丙烯酸酯等。 Specific examples of the polyether of the (meth) acrylate may include, but are not limited to, polyethylene glycol mono(meth)acrylate or polypropylene glycol mono(meth)acrylate.
前述芳香乙烯化合物之具體例可包含但不限於苯乙烯、α-甲基苯乙烯、間-甲基苯乙烯,對-甲基苯乙烯或對-甲氧基苯乙烯等。 Specific examples of the above aromatic vinyl compound may include, but are not limited to, styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene or p-methoxystyrene.
前述化合物以外之其他不飽和化合物的具體例可包含但不限於丙烯腈、甲基丙烯腈、氯乙烯、偏二氯乙烯、丙烯醯胺、甲基丙烯醯胺、乙烯乙酯、1,3-丁二烯、異戊二烯、2,3-二甲基1,3-丁二烯、N-環己基馬來醯亞胺、N-苯 基馬來醯亞胺、N-芐基馬來醯亞胺、N-丁二醯亞胺基-3-馬來醯亞胺苯甲酸酯、N-丁二醯亞胺基-4-馬來醯亞胺丁酸酯、N-丁二醯亞胺基-6-馬來醯亞胺己酸酯、N-丁二醯亞胺基-3-馬來醯亞胺丙酸酯或N-(9-吖啶基)馬來醯亞胺等。 Specific examples of the unsaturated compound other than the above compound may include, but are not limited to, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, vinyl ethyl ester, 1,3- Butadiene, isoprene, 2,3-dimethyl1,3-butadiene, N-cyclohexylmaleimide, N-benzene Kimalyimide, N-benzylmaleimide, N-butylenediamine-3-maleimide benzoate, N-butanediamine-4-mer醯iminobutyrate, N-butanediamine-6-maleimide caproate, N-butylenediamine-3-maleimide propionate or N- (9-Acridine) Maleimide and the like.
該其他不飽和化合物可單獨一種使用或混合複數種使用。 The other unsaturated compound may be used alone or in combination of plural kinds.
前述其他不飽和化合物(a3)之具體例較佳可為(甲基)丙烯酸甲酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸三級丁酯、(甲基)丙烯酸苯甲酯、(甲基)丙烯酸雙環戊酯、(甲基)丙烯酸二環戊氧基乙酯、苯乙烯或對-甲氧基苯乙烯。 Specific examples of the other unsaturated compound (a3) may preferably be methyl (meth)acrylate, butyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, or tertiary (meth)acrylate. Ester, benzyl (meth)acrylate, dicyclopentanyl (meth)acrylate, dicyclopentyloxyethyl (meth)acrylate, styrene or p-methoxystyrene.
基於前述不飽和羧酸或不飽和羧酸酐化合物(a1)與具有環氧基之不飽和化合物(a2),以及該其他不飽和化合物(a3)之總使用量為100重量份,其他不飽和化合物(a3)之使用量可為20重量份至90重量份,較佳為45重量份至90重量份,且更佳為45重量份至75重量份。 Based on the aforementioned unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (a1) and the epoxy group-containing unsaturated compound (a2), and the other unsaturated compound (a3) are used in an amount of 100 parts by weight, other unsaturated compounds The amount of (a3) used may be from 20 parts by weight to 90 parts by weight, preferably from 45 parts by weight to 90 parts by weight, and more preferably from 45 parts by weight to 75 parts by weight.
本發明之鹼可溶性樹脂(A)在製造時所使用的溶劑可為醇類、醚類、二醇醚、乙二醇烷基醚乙酸醋酸酯、二乙二醇、二丙二醇、丙二醇單烷基醚、丙二醇烷基醚乙酸醋酸酯、丙二醇烷基醚丙酸酯、芳香烴、酮類或酯類等。 The solvent used in the production of the alkali-soluble resin (A) of the present invention may be an alcohol, an ether, a glycol ether, an ethylene glycol alkyl ether acetate acetate, a diethylene glycol, a dipropylene glycol, or a propylene glycol monoalkyl group. Ether, propylene glycol alkyl ether acetate acetate, propylene glycol alkyl ether propionate, aromatic hydrocarbons, ketones or esters, and the like.
前述醇類溶劑之具體例可包含甲醇、乙醇、苯甲醇、2-苯乙醇或3-苯基-1-丙醇等。 Specific examples of the alcohol solvent may include methanol, ethanol, benzyl alcohol, 2-phenylethyl alcohol or 3-phenyl-1-propanol.
前述醚類溶劑之具體例可包含四氫呋喃等。 Specific examples of the ether solvent may include tetrahydrofuran or the like.
前述二醇醚之具體例可包含乙二醇單丙醚、乙二醇單甲醚或乙二醇單乙醚等。 Specific examples of the aforementioned glycol ether may include ethylene glycol monopropyl ether, ethylene glycol monomethyl ether or ethylene glycol monoethyl ether.
前述乙二醇烷基醚醋酸酯之具體例可包含乙二醇丁醚醋酸酯、乙二醇乙醚醋酸酯或乙二醇甲醚醋酸酯等。 Specific examples of the ethylene glycol alkyl ether acetate may include ethylene glycol butyl ether acetate, ethylene glycol ethyl ether acetate or ethylene glycol methyl ether acetate.
前述二乙二醇之具體例可包含二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單丁醚、二乙二醇二甲醚、二乙二醇二乙醚或二乙二醇甲乙醚等。 Specific examples of the diethylene glycol may include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether or diethyl Glycol methyl ether and the like.
前述二丙二醇之具體例可包含二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇二甲醚、二丙二醇二乙醚或二丙二醇甲乙醚等。 Specific examples of the dipropylene glycol may include dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether or dipropylene glycol methyl ethyl ether.
前述丙二醇單烷基醚之具體例可包含丙二醇單甲醚、丙二醇單乙醚、丙二醇單丙醚或丙二醇單丁醚等。 Specific examples of the propylene glycol monoalkyl ether may include propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether or propylene glycol monobutyl ether.
前述丙二醇烷基醚醋酸酯之具體例可包含丙二醇甲醚醋酸酯、丙二醇乙醚醋酸酯、丙二醇丙醚醋酸酯或丙二醇丁醚醋酸酯等。 Specific examples of the propylene glycol alkyl ether acetate may include propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, or propylene glycol butyl ether acetate.
前述丙二醇烷基醚丙酸酯之具體例可包含丙二醇甲醚丙酸酯、丙二醇乙醚丙酸酯、丙二醇丙醚丙酸酯或丙二醇丁醚丙酸酯等。 Specific examples of the propylene glycol alkyl ether propionate may include propylene glycol methyl ether propionate, propylene glycol diethyl ether propionate, propylene glycol propyl ether propionate or propylene glycol butyl ether propionate.
前述芳香烴之具體例可包含甲苯或二甲苯等。 Specific examples of the above aromatic hydrocarbons may include toluene or xylene.
前述酮類之具體例可包含甲乙酮、環己酮或二丙酮醇等。 Specific examples of the ketones may include methyl ethyl ketone, cyclohexanone or diacetone alcohol.
前述酯類之具體例可包含乙酸甲酯、乙酸乙酯、乙酸丙酯、乙酸丁酯、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸甲酯、2-羥基-2-甲基丙酸乙酯、羥乙酸甲酯、羥乙 酸乙酯、羥乙酸丁酯、乳酸甲酯、乳酸丙酯、乳酸丁酯、3-羥基丙酸甲酯、3-羥基丙酸乙酯、3-羥基丙酸丙酯、3-羥基丙酸丁酯、2-羥基-3-甲基丁酸甲酯、甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯、乙氧基乙酸丙酯、乙氧基乙酸丁酯、丙氧基乙酸甲酯、丙氧基乙酸乙酯、丙氧基乙酸丙酯、丙氧基乙酸丁酯、丁氧基乙酸甲酯、丁氧基乙酸乙酯、丁氧基乙酸丙酯、丁氧基乙酸丁酯、3-甲氧基丁基乙酸酯、2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-甲氧基丙酸丁酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-乙氧基丙酸丙酯、2-乙氧基丙酸丁酯、2-丁氧基丙酸甲酯、2-丁氧基丙酸甲酯、2-丁氧基丙酸乙酯、2-丁氧基丙酸丙酯、2-丁氧基丙酸丁酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-甲氧基丙酸丙酯、3-甲氧基丙酸丁酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸丙酯、3-乙氧基丙酸丁酯、3-丙氧基丙酸甲酯、3-丙氧基丙酸乙酯、3-丙氧基丙酸丙酯、3-丙氧基丙酸丁酯、3-丁氧基丙酸甲酯、3-丁氧基丙酸乙酯、3-丁氧基丙酸丙酯或3-丁氧基丙酸丁酯等。 Specific examples of the above esters may include methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, 2-hydroxy-2. -ethyl methacrylate, methyl glycolate, hydroxyethyl Ethyl acetate, butyl glycolate, methyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, 3-hydroxypropionic acid Butyl ester, methyl 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate , propyl ethoxyacetate, butyl ethoxyacetate, methyl propoxyacetate, ethyl propoxyacetate, propyl propoxyacetate, butyl propoxyacetate, methyl butoxyacetate, Ethyl butoxyacetate, propyl butoxyacetate, butyl butoxyacetate, 3-methoxybutyl acetate, methyl 2-methoxypropionate, and 2-methoxypropionic acid Ester, propyl 2-methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, 2-ethoxypropionate Ester, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, methyl 2-butoxypropionate, ethyl 2-butoxypropionate, 2-butoxypropionic acid Ester, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, 3-methoxypropionic acid , 3-methoxypropionic acid butyl ester, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, propyl 3-ethoxypropionate, butyl 3-ethoxypropionate , methyl 3-propoxypropionate, ethyl 3-propoxypropionate, propyl 3-propoxypropionate, butyl 3-propoxypropionate, methyl 3-butoxypropionate Ethyl 3-butoxypropionate, propyl 3-butoxypropionate or butyl 3-butoxypropionate.
該溶劑可單獨一種使用或混合複數種使用。 The solvent may be used alone or in combination of plural kinds.
較佳地,前述溶劑之具體例可為二乙二醇二甲醚或丙二醇甲醚醋酸酯。 Preferably, a specific example of the solvent may be diethylene glycol dimethyl ether or propylene glycol methyl ether acetate.
前述聚合起始劑之具體例可為偶氮化合物或過氧化物等。 Specific examples of the polymerization initiator may be an azo compound, a peroxide or the like.
該偶氮化合物之具體例可包含但不限於2,2’- 偶氮二異丁腈、2,2’-偶氮二(2,4-二甲基戊腈)、2,2’-偶氮二(4-甲氧基-2,4-二甲基戊腈)、2,2’-偶氮二(2-甲基丁腈)、4,4’-偶氮二(4-氰基戊酸)或2,2’-偶氮二(二甲基-2-甲基丙酸酯)等。 Specific examples of the azo compound may include, but are not limited to, 2, 2'- Azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-azobis(4-methoxy-2,4-dimethylpentyl) Nitrile), 2,2'-azobis(2-methylbutyronitrile), 4,4'-azobis(4-cyanovaleric acid) or 2,2'-azobis(dimethyl- 2-methylpropionate) and the like.
該過氧化物之具體例可包含但不限於過氧化二 苯甲醯、過氧化二月桂醯(dilauroyl peroxide)、第三丁基過氧化新戊酸酯(tert-butyl peroxypivalate)、1,1-二(第三丁基過氧化)環己烷[1,1-di(tert-butylperoxy)cyclohexane]或過氧化氫等。 Specific examples of the peroxide may include, but are not limited to, peroxide 2 Benzoquinone, dilauroyl peroxide, tert-butyl peroxypivalate, 1,1-di(t-butylperoxy)cyclohexane [1, 1-di(tert-butylperoxy)cyclohexane] or hydrogen peroxide.
該聚合起始劑可單獨一種使用或混合複數種使 用。 The polymerization initiator may be used alone or in combination of plural kinds. use.
本案具有乙烯性不飽和基之化合物(B)可包含具有如下式(II)所示之結構的第一化合物(B-1)及其他具有乙烯性不飽和基之化合物(B-2)。 The compound (B) having an ethylenically unsaturated group in the present invention may include the first compound (B-1) having a structure represented by the following formula (II) and another compound (B-2) having an ethylenically unsaturated group.
前述之第一化合物(B-1)可具有如下式(II)所示之結構:
於式(II)中,R3分別可獨立地代表氫原子或甲基。R4分別可獨立地代表氫原子、丙烯醯基或甲基丙烯醯基。n代表2至4之整數。 In the formula (II), R 3 each independently represents a hydrogen atom or a methyl group. R 4 each independently represents a hydrogen atom, an acryloyl group or a methacryl group. n represents an integer from 2 to 4.
該具有如式(II)所示之結構的第一化合物 (B-1)之具體例可包含但不限於三季戊四醇七(甲基)丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、四季戊四醇九(甲基)丙烯酸酯、四季戊四醇十(甲基)丙烯酸酯、五季戊四醇十一(甲基)丙烯酸酯、五季戊四醇十二(甲基)丙烯酸酯或上述化合物之任意組合。 The first compound having a structure as shown in formula (II) Specific examples of (B-1) may include, but are not limited to, tripentaerythritol hepta (meth) acrylate, tripentaerythritol octa (meth) acrylate, pentaerythritol pentoxide (meth) acrylate, and pentaerythritol decene (methyl) Acrylate, pentaerythritol eleven (meth) acrylate, pentaerythritol dodeca (meth) acrylate or any combination of the above.
基於鹼可溶性樹脂(A)之總使用量為100重量 份,該具有如式(II)所示之結構的第一化合物(B-1)之使用量為30重量份至300重量份,較佳為40重量份至250重量份,且更佳為50重量份至200重量份。 The total amount used based on the alkali-soluble resin (A) is 100% by weight. The first compound (B-1) having a structure represented by the formula (II) is used in an amount of 30 parts by weight to 300 parts by weight, preferably 40 parts by weight to 250 parts by weight, and more preferably 50 parts by weight. Parts by weight to 200 parts by weight.
當本發明具有乙烯性不飽和基之化合物(B)包 含具有如式(II)所示之結構的第一化合物(B-1)時,所製得之感光性樹脂組成物可具有更佳之解析度。 When the present invention has an ethylenically unsaturated group (B) package When the first compound (B-1) having a structure represented by the formula (II) is contained, the photosensitive resin composition obtained can have a better resolution.
該其他具有乙烯性不飽和基之化合物(B-2)可包含具有一個乙烯性不飽和基的化合物或具有至少兩個乙烯性不飽和基的化合物。 The other ethylenically unsaturated group-containing compound (B-2) may contain a compound having one ethylenically unsaturated group or a compound having at least two ethylenically unsaturated groups.
該具有一個乙烯性不飽和基的化合物之具體例可包含但不限於(甲基)丙烯醯胺[(meth)acrylamide]、(甲基)丙烯醯嗎啉、(甲基)丙烯酸-7-胺基-3,7-二甲基辛酯、異丁氧基甲基(甲基)丙烯醯胺、(甲基)丙烯酸異冰片基氧乙 酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸-2-乙基己酯、乙基二乙二醇(甲基)丙烯酸酯、第三辛基(甲基)丙烯醯胺、二丙酮(甲基)丙烯醯胺、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸二環戊烯氧基乙酯、(甲基)丙烯酸二環戊烯酯、氮,氮-二甲基(甲基)丙烯醯胺、(甲基)丙烯酸四氯苯酯、(甲基)丙烯酸-2-四氯苯氧基乙酯、(甲基)丙烯酸四氫糠酯[tetrahydrofurfuryl(meth)acrylate]、(甲基)丙烯酸四溴苯酯、(甲基)丙烯酸-2-四溴苯氧基乙酯、(甲基)丙烯酸-2-三氯苯氧基乙酯、(甲基)丙烯酸三溴苯酯、(甲基)丙烯酸-2-三溴苯氧基乙酯、2-羥基-(甲基)丙烯酸乙酯、2-羥基-(甲基)丙烯酸丙酯、乙烯基己內醯胺、氮-乙烯基吡咯烷酮、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸五氯苯酯、(甲基)丙烯酸五溴苯酯、聚單(甲基)丙烯酸乙二酯、聚單(甲基)丙烯酸丙二酯或(甲基)丙烯酸冰片酯等。 Specific examples of the compound having one ethylenically unsaturated group may include, but are not limited to, (meth)acrylamide, (meth)acryloylmorpholine, (meth)acrylic acid-7-amine Base-3,7-dimethyloctyl ester, isobutoxymethyl (meth) acrylamide, isobornyloxy (meth)acrylate Ester, isobornyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, ethyl diethylene glycol (meth) acrylate, third octyl (meth) acrylamide, two Acetone (meth) acrylamide, dimethylaminoethyl (meth) acrylate, dodecyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, (methyl) Dicyclopentyl acrylate, nitrogen, nitrogen-dimethyl (meth) acrylamide, tetrachlorophenyl (meth) acrylate, 2-tetrachlorophenoxyethyl (meth) acrylate, ( Tetrahydrofurfuryl (meth)acrylate, tetrabromophenyl (meth)acrylate, 2-tetrabromophenoxyethyl (meth)acrylate, (meth)acrylic acid-2- Trichlorophenoxyethyl ester, tribromophenyl (meth)acrylate, 2-tribromophenoxyethyl (meth)acrylate, ethyl 2-hydroxy-(meth)acrylate, 2-hydroxy- Propyl (meth)acrylate, vinyl caprolactam, nitrogen-vinylpyrrolidone, phenoxyethyl (meth)acrylate, pentachlorophenyl (meth)acrylate, pentabromobenzene (meth)acrylate Ester, poly (mono) (meth) acrylate, poly (mono) (meth) acrylate Or (meth) acrylate, isobornyl acrylate and the like.
該具有一個乙烯性不飽和基的化合物可單獨一種使用或混合複數種使用。 The compound having one ethylenically unsaturated group may be used singly or in combination of plural kinds.
前述具有至少兩個乙烯性不飽和基之化合物的具體例可包含但不限於乙二醇二(甲基)丙烯酸酯、二(甲基)丙烯酸二環戊烯酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、三(2-羥基乙基)異氰酸二(甲基)丙烯酸酯、三(2-羥基乙基)異氰酸三(甲基)丙烯酸酯、己內酯改質的三(2-羥基乙基)異氰酸三(甲基)丙烯酸酯、三(甲基)丙烯酸三羥甲基丙酯、環氧乙烷(ethylene oxide;以下簡稱為 EO)改質的三(甲基)丙烯酸三羥甲基丙酯、環氧丙烷(propylene oxide;以下簡稱為PO)改質的三(甲基)丙烯酸三羥甲基丙酯、三丙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、聚酯二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、己內酯改質的二季戊四醇六(甲基)丙烯酸酯、己內酯改質的二季戊四醇五(甲基)丙烯酸酯、四(甲基)丙烯酸二三羥甲基丙酯[di(trimethylolpropane)tetra(meth)acrylate]、EO改質的雙酚A二(甲基)丙烯酸酯、PO改質的雙酚A二(甲基)丙烯酸酯、EO改質的氫化雙酚A二(甲基)丙烯酸酯、PO改質的氫化雙酚A二(甲基)丙烯酸酯、PO改質的甘油三(甲基)丙烯酸酯、EO改質的雙酚F二(甲基)丙烯酸酯或酚醛清漆聚縮水甘油醚(甲基)丙烯酸酯等。 Specific examples of the aforementioned compound having at least two ethylenically unsaturated groups may include, but are not limited to, ethylene glycol di(meth)acrylate, dicyclopentenyl di(meth)acrylate, and triethylene glycol di(a) Acrylate, tetraethylene glycol di(meth)acrylate, tris(2-hydroxyethyl)isocyanate di(meth)acrylate, tris(2-hydroxyethyl)isocyanate Acrylate, caprolactone modified tris(2-hydroxyethyl)isocyanate tri(meth)acrylate, tris(meth)acrylic acid trimethylolpropyl ester, ethylene oxide ;hereinafter referred to as EO) modified trimethylolpropyl tris(meth)acrylate, propylene oxide (hereinafter referred to as PO) modified trimethylolpropyl tris(meth)acrylate, tripropylene glycol di Methyl) acrylate, neopentyl glycol di(meth) acrylate, 1,4-butanediol di(meth) acrylate, 1,6-hexanediol di(meth) acrylate, pentaerythritol III (meth) acrylate, pentaerythritol tetra (meth) acrylate, polyester di (meth) acrylate, polyethylene glycol di (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol Penta(meth)acrylate, dipentaerythritol tetra(meth)acrylate, caprolactone-modified dipentaerythritol hexa(meth)acrylate, caprolactone-modified dipentaerythritol penta(meth)acrylate, Di(trimethylolpropane)tetra(meth)acrylate, EO-modified bisphenol A di(meth)acrylate, PO-modified bisphenol A II Acrylate, EO modified hydrogenated bisphenol A di(meth)acrylate, PO modified hydrogenated bisphenol A di(meth)acrylate, PO modified tris(meth)propyl Esters, EO-modified bisphenol F di (meth) acrylate or novolak polyglycidyl ether (meth) acrylate.
該具有至少兩個乙烯性不飽和基的化合物可單獨一種使用或混合複數種使用。 The compound having at least two ethylenically unsaturated groups may be used singly or in combination of plural kinds.
基於前述鹼可溶性樹脂(A)之總使用量為100重量份,該具有乙烯性不飽和基之化合物(B)的使用量為30重量份至350重量份,較佳為40重量份至300重量份,且更佳為50重量份至250重量份。 The compound (B) having an ethylenically unsaturated group is used in an amount of 30 parts by weight to 350 parts by weight, preferably 40 parts by weight to 300 parts by weight based on 100 parts by weight of the total amount of the alkali-soluble resin (A). Parts, and more preferably 50 parts by weight to 250 parts by weight.
本發明之光起始劑(C)無特別之限制。該光起始 劑(C)可包含O-醯基肟系光起始劑、三氮雜苯系光起始劑、苯乙烷酮類化合物、二咪唑類化合物、二苯甲酮類化合物、α-二酮類化合物、酮醇類化合物、酮醇醚類化合物、醯膦氧化物類化合物、醌類化合物、含鹵素類化合物或過氧化物等。 The photoinitiator (C) of the present invention is not particularly limited. The light starts The agent (C) may include an O-fluorenyl quinone photoinitiator, a triazabenzene photoinitiator, an acetophenone compound, a diimidazole compound, a benzophenone compound, and an α-diketone. a compound, a keto alcohol compound, a keto alcohol ether compound, a phosphonium oxide compound, an anthraquinone compound, a halogen-containing compound, or a peroxide.
前述O-醯基肟系光起始劑之具體例可包含但 不限於1-[4-(苯基硫代)苯基]-庚烷-1,2-二酮2-(O-苯醯基肟)、1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮2-(O-苯醯基肟)、1-[4-(苯醯基)苯基]-庚烷-1,2-二酮2-(O-苯醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(3-甲基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-苯醯基-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫吡喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫呋喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫吡喃基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫吡喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮 -1-[9-乙基-6-(2-甲基-5-四氫呋喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-5-四氫吡喃基甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜戊環基)苯醯基}-9H-咔唑-3-取代基]-1-(O-乙醯基肟)或乙烷酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜戊環基)甲氧基苯醯基}-9H-咔唑-3-取代基]-1-(O-乙醯基肟)等。該O-醯基肟系光起始劑可單獨一種使用或混合複數種使用。 Specific examples of the aforementioned O-fluorenyl quinone photoinitiator may include Not limited to 1-[4-(phenylthio)phenyl]-heptane-1,2-dione 2-(O-phenylhydrazinyl), 1-[4-(phenylthio)phenyl ]-octane-1,2-dione 2-(O-phenylhydrazinium), 1-[4-(phenylhydrazino)phenyl]-heptane-1,2-dione 2-(O- Phenylhydrazine 肟), ethane ketone-1-[9-ethyl-6-(2-methylphenylhydrazino)-9H-carbazole-3-substituted]-1-(O-ethyl fluorenyl) Ethyl ketone-1-[9-ethyl-6-(3-methylphenylindenyl)-9H-indazole-3-substituted]-1-(O-acetylindenyl), ethane Keto-1-[9-ethyl-6-phenylhydrazin-9H-indazole-3-substituted]-1-(O-acetylindenyl), ethane ketone-1-[9-ethyl- 6-(2-methyl-4-tetrahydrofurylbenzoyl)-9H-indazole-3-substituted]-1-(O-acetamidoxime), ethane ketone-1-[9-ethyl -6-(2-methyl-4-tetrahydropyranylphenyl)]-9H-indazole-3-substituted]-1-(O-ethylindenyl), ethane ketone-1-[ 9-Ethyl-6-(2-methyl-5-tetrahydrofuranylphenyl)-9H-indazole-3-substituted]-1-(O-ethylindenyl), ethane ketone-1- [9-Ethyl-6-(2-methyl-5-tetrahydropyranylphenyl)]-9H-indazole-3-substituted]-1-(O-ethylindenyl), ethane Keto-1-[9-ethyl-6-(2-methyl-4-tetrahydrofurylmethoxyphenyl)-9H-indazole-3-substituted]-1-(O-ethylindenyl) ), ethane Keto-1-[9-ethyl-6-(2-methyl-4-tetrahydropyranylmethoxyphenyl)-9H-indazole-3-substituted]-1-(O-B Ethyl ketone 1-[9-ethyl-6-(2-methyl-5-tetrahydrofuranylmethoxyphenyl)-9H-indazole-3-substituted]-1-(O-ethylindenyl) Ethyl ketone-1-[9-ethyl-6-(2-methyl-5-tetrahydropyranylmethoxyphenyl)-9H-indazole-3-substituted]-1-( O-acetyl hydrazine), ketone-1-[9-ethyl-6-{2-methyl-4-(2,2-dimethyl-1,3-dioxolanyl) Phenylhydrazinyl}-9H-carbazole-3-substituted]-1-(O-acetamidopurine) or eththone-1-[9-ethyl-6-{2-methyl-4-( 2,2-Dimethyl-1,3-dioxolanyl)methoxybenzoquinone}-9H-indazole-3-substituted]-1-(O-ethylindenyl) and the like. The O-fluorenyl fluorene photoinitiator may be used singly or in combination of plural kinds.
較佳地,該O-醯基肟系光起始劑之具體例可為 1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮2-(O-苯醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)、乙烷酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃甲氧基苯醯基)-9H-咔唑-3-取代基]-1-(O-乙醯基肟)或乙烷酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜戊環基)甲氧基苯醯基}-9H-咔唑-3-取代基]-1-(O-乙醯基肟)等。 Preferably, the specific example of the O-fluorenyl quinone photoinitiator can be 1-[4-(phenylthio)phenyl]-octane-1,2-dione 2-(O-phenylhydrazinyl), ethane ketone-1-[9-ethyl-6-( 2-methylphenylhydrazino)-9H-carbazole-3-substituent]-1-(O-acetylindenyl), ethane ketone-1-[9-ethyl-6-(2-methyl -4-tetrahydrofuranmethoxyphenyl hydrazino)-9H-carbazole-3-substituted]-1-(O-acetamidoxime) or ethane ketone-1-[9-ethyl-6-{2 -methyl-4-(2,2-dimethyl-1,3-dioxolanyl)methoxyphenylhydrazinyl}-9H-indazole-3-substituted]-1-(O-乙醯基肟) and so on.
前述三氮雜苯系光起始劑之具體例可包含但不 限於乙烯基-鹵代甲基-s-三氮雜苯化合物、2-(萘并-1-取代基)-4,6-雙-鹵代甲基-s-三氮雜苯化合物或4-(對-胺基苯基)-2,6-二-鹵代甲基-s-三氮雜苯化合物等。 Specific examples of the aforementioned triazabenzene photoinitiator may include but not Restricted to vinyl-halomethyl-s-triazabenzene compounds, 2-(naphtho-1-substituted)-4,6-bis-halomethyl-s-triazabenzene compounds or 4- (p-Aminophenyl)-2,6-di-halomethyl-s-triazabenzene compound.
該乙烯基-鹵代甲基-s-三氮雜苯化合物之具體 例可包含2,4-雙(三氯甲基)-6-對-甲氧基苯乙烯基-s-三氮雜苯、2,4-雙(三氯甲基)-3-(1-對-二甲基胺基苯基-1,3-丁 二烯基)-s-三氮雜苯或2-三氯甲基-3-胺基-6-對-甲氧基苯乙烯基-s-三氮雜苯等。 Specific of the vinyl-halomethyl-s-triazabenzene compound Examples may include 2,4-bis(trichloromethyl)-6-p-methoxystyryl-s-triazabenzene, 2,4-bis(trichloromethyl)-3-(1- p-Dimethylaminophenyl-1,3-butyl Dienyl)-s-triazabenzene or 2-trichloromethyl-3-amino-6-p-methoxystyryl-s-triazabenzene and the like.
該2-(萘并-1-取代基)-4,6-雙-鹵代甲基-s-三 氮雜苯化合物之具體例可包含2-(萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(4-甲氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(4-乙氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(4-丁氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-[4-(2-甲氧基乙基)-萘并-1-取代基]-4,6-雙-三氯甲基-s-三氮雜苯、2-[4-(2-乙氧基乙基)-萘并-1-取代基]-4,6-雙-三氯甲基-s-三氮雜苯、2-[4-(2-丁氧基乙基)-萘并-1-取代基]-4,6-雙-三氯甲基-s-三氮雜苯、2-(2-甲氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(6-甲氧基-5-甲基-萘并-2-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(6-甲氧基-萘并-2-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(5-甲氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(4,7-二甲氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯、2-(6-乙氧基-萘并-2-取代基)-4,6-雙-三氯甲基-s-三氮雜苯或2-(4,5-二甲氧基-萘并-1-取代基)-4,6-雙-三氯甲基-s-三氮雜苯等。 The 2-(naphtho-1-substituted)-4,6-bis-halomethyl-s-three Specific examples of the azabenzene compound may include 2-(naphtho-1-substituted)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(4-methoxy-naphtho -1-substituted)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(4-ethoxy-naphtho-1-substituted)-4,6-bis-three Chloromethyl-s-triazabenzene, 2-(4-butoxy-naphtho-1-substituted)-4,6-bis-trichloromethyl-s-triazabenzene, 2-[ 4-(2-methoxyethyl)-naphtho-1-substituted]-4,6-bis-trichloromethyl-s-triazabenzene, 2-[4-(2-ethoxyl) Ethyl)-naphtho-1-substituted]-4,6-bis-trichloromethyl-s-triazabenzene, 2-[4-(2-butoxyethyl)-naphtho-1 -Substituent]-4,6-bis-trichloromethyl-s-triazabenzene, 2-(2-methoxy-naphthyl-1-substituted)-4,6-bis-trichloromethyl Base-s-triazabenzene, 2-(6-methoxy-5-methyl-naphtho-2-substituted)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(6-methoxy-naphtho-2-substituted)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(5-methoxy-naphtho-1- Substituent)-4,6-bis-trichloromethyl-s-triazabenzene, 2-(4,7-dimethoxy-naphtho-1-substituted)-4,6-bis-three Chloromethyl-s-triazabenzene, 2-(6-ethoxy-naphtho-2-substituted)-4,6-bis-trichloromethyl -s- triazine or 2- (4,5-Dimethoxy - -1- substituent naphtho) -4,6-bis - trichloromethyl -s- triazine and the like.
該4-(對-胺基苯基)-2,6-二-鹵代甲基-s-三氮 雜苯化合物之具體例可包含4-[對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-甲基-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲 基)-s-三氮雜苯、4-[對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-甲基-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-(對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-[對-N,N-二(苯基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-(對-N-氯乙基羰基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-[對-N-(對-甲氧基苯基)羰基胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-溴-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氯-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氟-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-溴-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氯-對-N,N-二(乙氧基羰基甲基)胺基苯基-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氟-對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-溴-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氯-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[鄰-氟-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-溴-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氯-對 -N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-[間-氟-對-N,N-二(氯乙基)胺基苯基]-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-溴-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氯-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氟-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-溴-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氯-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氟-對-N-乙氧基羰基甲基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-溴-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氯-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(間-氟-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-溴-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氯-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯、4-(鄰-氟-對-N-氯乙基胺基苯基)-2,6-二(三氯甲基)-s-三氮雜苯或2,4-雙(三氯甲基)-6-{3-溴-4-[N,N-雙(乙氧基羰基甲基)胺基]苯基}-1,3,5-三氮雜苯等。 The 4-(p-aminophenyl)-2,6-di-halomethyl-s-triazole Specific examples of the heterobenzene compound may include 4-[p-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazabenzene. 4-[o-methyl-p-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-di(trichloromethane) -s-triazabenzene, 4-[p-N,N-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazabenzene, 4-[o-methyl-p-N,N-bis(chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(p- N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(p-N-ethoxycarbonylmethylaminophenyl)-2 ,6-bis(trichloromethyl)-s-triazabenzene, 4-[p-N,N-di(phenyl)aminophenyl]-2,6-di(trichloromethyl)- S-triazabenzene, 4-(p-N-chloroethylcarbonylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[p-N- (p-methoxyphenyl)carbonylaminophenyl]-2,6-di(trichloromethyl)-s-triazabenzene, 4-[m-N,N-di(ethoxycarbonyl) Methyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-bromo-p-N,N-di(ethoxycarbonylmethyl) Aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-chloro-p-N,N-bis(ethoxycarbonylmethyl)aminobenzene -2,6-bis(trichloromethyl)-s-triazabenzene, 4-[m-fluoro-p-N,N-di(ethoxycarbonylmethyl)aminophenyl]- 2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-bromo-p-N,N-di(ethoxy) Carbonylmethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-chloro-p-N,N-di(ethoxycarbonylmethyl) Aminophenyl-2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-fluoro-p-N,N-di(ethoxycarbonylmethyl)aminobenzene -2,6-bis(trichloromethyl)-s-triazabenzene, 4-[o-bromo-p-N,N-bis(chloroethyl)aminophenyl]-2,6 -bis(trichloromethyl)-s-triazabenzene, 4-[o-chloro-p-N,N-di(chloroethyl)aminophenyl]-2,6-di(trichloromethane) -s-triazabenzene, 4-[o-fluoro-p-N,N-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-three Azabenzene, 4-[m-bromo-p-N,N-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazabenzene, 4- [inter-chloro-pair -N,N-bis(chloroethyl)aminophenyl]-2,6-di(trichloromethyl)-s-triazabenzene, 4-[m-fluoro-p-N,N-di (chloroethyl)aminophenyl]-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-bromo-p-N-ethoxycarbonylmethylaminobenzene) -2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-chloro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-di (trichloromethyl)-s-triazabenzene, 4-(m-fluoro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-di(trichloromethyl)-s -Triazabenzene, 4-(o-bromo-p-N-ethoxycarbonylmethylaminophenyl)-2,6-di(trichloromethyl)-s-triazabenzene, 4- (o-chloro-p-N-ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(o-fluoro-p-N -ethoxycarbonylmethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-bromo-p-N-chloroethylaminophenyl) -2,6-bis(trichloromethyl)-s-triazabenzene, 4-(m-chloro-p-N-chloroethylaminophenyl)-2,6-di(trichloromethane) -s-triazabenzene, 4-(m-fluoro-p-N-chloroethylaminophenyl)-2,6-di(trichloromethyl)-s-triazabenzene, 4 -(o-bromo-p-N-chloroethylaminophenyl)-2,6-di(trichloromethane) )-s-triazabenzene, 4-(o-chloro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene, 4- (o-fluoro-p-N-chloroethylaminophenyl)-2,6-bis(trichloromethyl)-s-triazabenzene or 2,4-bis(trichloromethyl)-6 -{3-Bromo-4-[N,N-bis(ethoxycarbonylmethyl)amino]phenyl}-1,3,5-triazabenzene and the like.
該三氮雜苯系光起始劑可單獨一種使用或混合 複數種使用。 The triazabenzene photoinitiator can be used alone or in combination A variety of uses.
較佳地,該三氮雜苯系光起始劑可為4-[間-溴- 對-N,N-二(乙氧基羰基甲基)胺基苯基]-2,6-二(三氯甲 基)-s-三氮雜苯或2,4-雙(三氯甲基)-6-對-甲氧基苯乙烯基-s-三氮雜苯等。 Preferably, the triazabenzene photoinitiator can be 4-[m-bromo- p-N,N-bis(ethoxycarbonylmethyl)aminophenyl]-2,6-di(trichloromethane) Base)-s-triazabenzene or 2,4-bis(trichloromethyl)-6-p-methoxystyryl-s-triazabenzene and the like.
前述苯乙烷酮類化合物之具體例可包含但不限 於對二甲胺苯乙烷酮、α,α’-二甲氧基氧化偶氮苯乙烷酮、2,2’-二甲基-2-苯基苯乙烷酮、對-甲氧基苯乙烷酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎福啉代-1-丙酮或2-苄基-2-N,N-二甲胺-1-(4-嗎啉代苯基)-1-丁酮等。該苯乙烷酮類化合物可單獨一種使用或混合複數種使用。 Specific examples of the aforementioned acetophenone compound may include, but are not limited to To p-dimethylaminophenone, α,α'-dimethoxyoxyazopropenone, 2,2'-dimethyl-2-phenylacetophenone, p-methoxy Phenyl ketone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholine-1-propanone or 2-benzyl-2-N,N-dimethylamine- 1-(4-morpholinophenyl)-1-butanone and the like. The acetophenone compounds may be used singly or in combination of plural kinds.
較佳地,該苯乙烷酮類化合物可包含2-甲基 -1-[4-(甲硫基)苯基]-2-嗎福啉代-1-丙酮或2-苄基-2-N,N-二甲胺-1-(4-嗎啉代苯基)-1-丁酮。 Preferably, the acetophenone compound may comprise 2-methyl 1-[4-(methylthio)phenyl]-2-morpholine-1-propanone or 2-benzyl-2-N,N-dimethylamine-1-(4-morpholinobenzene Base)-1-butanone.
前述二咪唑類化合物之具體例可包含但不限於 2,2’-雙(鄰-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-氟苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-甲基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(鄰-乙基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(對-甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2,2’,4,4’-四甲氧基苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基二咪唑或2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑等。該二咪唑類化合物可單獨一種使用或混合複數種使用。 Specific examples of the aforementioned diimidazole compound may include, but are not limited to 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-fluorophenyl)-4,4',5 , 5'-tetraphenyldiimidazole, 2,2'-bis(o-methylphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o- Methoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(o-ethylphenyl)-4,4',5,5'-tetraphenyl Diimidazole, 2,2'-bis(p-methoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(2,2',4, 4'-tetramethoxyphenyl)-4,4',5,5'-tetraphenyldiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5' - Tetraphenyldiimidazole or 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenyldiimidazole or the like. The diimidazole compound may be used singly or in combination of plural kinds.
較佳地,該二咪唑類化合物可包含2,2’-雙 (2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑。 Preferably, the diimidazole compound may comprise 2,2'-double (2,4-Dichlorophenyl)-4,4',5,5'-tetraphenyldiimidazole.
前述二苯甲酮類化合物之具體例可包含但不限於噻噸酮、2,4-二乙基噻噸酮、噻噸酮-4-碸、二苯甲酮、4,4’-雙(二甲胺)二苯甲酮或4,4’-雙(二乙胺)二苯甲酮等。該二苯甲酮類化合物可單獨一種使用或混合複數種使用。 Specific examples of the aforementioned benzophenone compound may include, but are not limited to, thioxanthone, 2,4-diethylthioxanthone, thioxanthone-4-oxime, benzophenone, 4,4'-bis ( Dimethylamine) benzophenone or 4,4'-bis(diethylamine) benzophenone. The benzophenone compound may be used singly or in combination of plural kinds.
較佳地,該二苯甲酮類化合物可包含4,4’-雙(二乙胺)二苯甲酮。 Preferably, the benzophenone compound may comprise 4,4'-bis(diethylamine)benzophenone.
前述α-二酮類化合物之具體例可包含但不限於苯偶醯或乙醯基等。 Specific examples of the aforementioned α-diketone compound may include, but are not limited to, benzoin or ethenyl.
前述酮醇類化合物之具體例可包含但不限於二苯乙醇酮等。 Specific examples of the ketol compound may include, but are not limited to, benzoin or the like.
前述酮醇醚類化合物之具體例可包含但不限於二苯乙醇酮甲醚、二苯乙醇酮乙醚或二苯乙醇酮異丙醚等。 Specific examples of the ketol ether compound may include, but are not limited to, benzhydrin methyl ether, benzophenone ethyl ether or diphenylethanol ketone isopropyl ether.
前述醯膦氧化物類化合物之具體例可包含但不限於2,4,6-三甲基苯醯二苯基膦氧化物或雙-(2,6-二甲氧基苯醯)-2,4,4-三甲基苯基膦氧化物等。 Specific examples of the above phosphonium oxide compound may include, but are not limited to, 2,4,6-trimethylphenylhydrazine diphenylphosphine oxide or bis-(2,6-dimethoxybenzoquinone)-2. 4,4-trimethylphenylphosphine oxide and the like.
前述醌類化合物之具體例可包含但不限於蒽醌或1,4-萘醌等。 Specific examples of the aforementioned quinone compound may include, but are not limited to, hydrazine or 1,4-naphthoquinone or the like.
前述含鹵素類化合物之具體例可包含但不限於苯醯甲基氯、三溴甲基苯碸或三(三氯甲基)-s-三氮雜苯等。 Specific examples of the halogen-containing compound may include, but are not limited to, benzoquinone methyl chloride, tribromomethylphenylhydrazine or tris(trichloromethyl)-s-triazabenzene.
前述過氧化物之具體例可包含但不限於二-第三丁基過氧化物。 Specific examples of the aforementioned peroxide may include, but are not limited to, di-tert-butyl peroxide.
前述之光起始劑(C)可單獨一種使用或混合複數種使用。 The aforementioned photoinitiator (C) may be used singly or in combination of plural kinds.
基於鹼可溶性樹脂(A)之總使用量為100重量 份,光起始劑(C)之使用量為15重量份至100重量份,較佳為17重量份至90重量份,且更佳為20重量份至80重量份。 The total amount used based on the alkali-soluble resin (A) is 100% by weight. The photoinitiator (C) is used in an amount of 15 parts by weight to 100 parts by weight, preferably 17 parts by weight to 90 parts by weight, and more preferably 20 parts by weight to 80 parts by weight.
本發明之鄰萘醌二疊氮磺酸酯(D)可包含具有如下式(I)所示之結構的鄰萘醌二疊氮磺酸酯(D-1)。其次,該鄰萘醌二疊氮磺酸酯(D)可選擇性地包含其他鄰萘醌二疊氮磺酸酯(D-2): The o-naphthoquinonediazide sulfonate (D) of the present invention may comprise o-naphthoquinonediazide sulfonate (D-1) having the structure represented by the following formula (I). Secondly, the o-naphthoquinonediazide sulfonate (D) may optionally comprise other o-naphthoquinonediazide sulfonate (D-2):
該鄰萘醌二疊氮磺酸酯(D-1)具有如下式(I)所示之結構:
於式(I)中,R1分別獨立地代表氫原子、經取代或未取代之烷基、芳香基或烯基。R2分別獨立地代表氫原子或具有醌二疊氮結構之官能基。a、b、d及e分別代表大於或等於0之整數,且f及g之總和為大於或等於1之整數。當a、b、d及e之總和大於1時,複數個R1分別可為相同或不同;當f及g之總和大於1時,複數個R2之至少一者具有醌二疊氮結構之官能基。 In the formula (I), R 1 each independently represents a hydrogen atom, a substituted or unsubstituted alkyl group, an aromatic group or an alkenyl group. R 2 each independently represents a hydrogen atom or a functional group having a quinonediazide structure. a, b, d, and e represent integers greater than or equal to 0, respectively, and the sum of f and g is an integer greater than or equal to one. When the sum of a, b, d and e is greater than 1, the plurality of R 1 may be the same or different respectively; when the sum of f and g is greater than 1, at least one of the plurality of R 2 has a quinonediazide structure. Functional group.
具有如式(I)所示之結構的鄰萘醌二疊氮磺酸 酯(D-1)可利用具有羥基之茀化合物來合成,或者藉由芴酮與苯酚、鄰苯二酚或鄰苯三酚於硫代乙酸及酸性觸煤之存在下進行反應製得。 O-naphthoquinonediazidesulfonic acid having the structure shown in formula (I) The ester (D-1) can be synthesized by using a hydrazine compound having a hydroxyl group, or by reacting an anthrone with phenol, catechol or pyrogallol in the presence of thioacetic acid and an acid contact coal.
具有如式(I)所示之結構的鄰萘醌二疊氮磺酸 酯(D-1)是可為完全酯化或部份酯化的酯化物,較佳係由鄰萘醌二疊氮磺酸或其鹽類與具有羥基之茀化合物反應所製得,更佳係由鄰萘醌二疊氮磺酸或其鹽類與具有多元羥基之茀化合物反應所製得。 O-naphthoquinonediazidesulfonic acid having the structure shown in formula (I) The ester (D-1) is an esterified product which may be fully esterified or partially esterified, preferably obtained by reacting o-naphthoquinonediazidesulfonic acid or a salt thereof with a hydrazine compound having a hydroxyl group, more preferably It is prepared by reacting o-naphthoquinonediazidesulfonic acid or a salt thereof with a hydrazine compound having a polyhydric hydroxyl group.
前述具有羥基之茀化合物的具體例可包含JFE
化學株式會社製造之產品,且其型號為BPF[如下式(I-1)所示]或BCF[如下式(I-2)所示];本州化學株式會社製造之產品,且其型號為BisP-FL[如下式(I-1)所示];或者如下式(I-3)至式(I-5)所示之化合物:
該鄰萘醌二疊氮磺酸可包含但不限於鄰萘醌二疊氮-4-磺酸、鄰萘醌二疊氮-5-磺酸或鄰萘醌二疊氮-6-磺酸等。該鄰萘醌二疊氮磺酸的鹽類可包含但不限於鄰萘醌二疊氮磺酸鹵鹽,具體例可包含鄰萘醌二疊氮-4-磺酸氯或鄰萘醌二疊氮-5-磺酸氯。 The o-naphthoquinonediazidesulfonic acid may include, but is not limited to, o-naphthoquinonediazide-4-sulfonic acid, o-naphthoquinonediazide-5-sulfonic acid or o-naphthoquinonediazide-6-sulfonic acid, etc. . The salt of the o-naphthoquinonediazidesulfonic acid may include, but is not limited to, an o-naphthoquinonediazidesulfonic acid halide salt, and specific examples may include an o-naphthoquinone diazide-4-sulfonic acid chloride or an o-naphthoquinone Nitrogen-5-sulfonic acid chloride.
該鄰萘醌二疊氮磺酸酯(D-1)之使用量沒有特別之限制,基於鹼可溶性樹脂(A)之總使用量為100重量份,該具有如式(I)所示之結構的鄰萘醌二疊氮磺酸酯(D-1)之使用量為1重量份至15重量份,較佳為1.5重量份至13重量份,且更佳為2重量份至10重量份。 The amount of the o-naphthoquinone diazide sulfonate (D-1) to be used is not particularly limited, and the total amount of the alkali-soluble resin (A) used is 100 parts by weight, and the structure has the structure shown in the formula (I). The o-naphthoquinonediazide sulfonate (D-1) is used in an amount of from 1 part by weight to 15 parts by weight, preferably from 1.5 parts by weight to 13 parts by weight, and more preferably from 2 parts by weight to 10 parts by weight.
此外,當本案之鄰萘醌二疊氮磺酸酯(D)不包含具有如式(I)所示之結構的鄰萘醌二疊氮磺酸酯(D-1)時,所製得之感光性樹脂組成物之解析度不佳及具有很多殘渣。 Further, when the o-naphthoquinonediazide sulfonate (D) of the present invention does not contain o-naphthoquinonediazide sulfonate (D-1) having a structure represented by the formula (I), The photosensitive resin composition has poor resolution and has many residues.
當本案之如式(I)所示之結構的鄰萘醌二疊氮磺酸酯(D-1)之使用量介於1重量份至15重量份,則所製得之感光性樹脂組成物之解析度最佳,且殘渣現象最少。 When the o-naphthoquinonediazide sulfonate (D-1) of the structure represented by the formula (I) is used in an amount of from 1 part by weight to 15 parts by weight, the photosensitive resin composition obtained is obtained. The resolution is the best and the residue is the least.
該鄰萘醌二疊氮磺酸酯(D)可選擇性地具有其他鄰萘醌二疊氮磺酸酯(D-2)。 The o-naphthoquinonediazide sulfonate (D) may optionally have other o-naphthoquinonediazide sulfonate (D-2).
在本發明之一實施例中,該鄰萘醌二疊氮磺酸酯(D-2)是可為完全酯化或部份酯化的酯化物。該鄰萘醌二疊氮磺酸酯(D-2)較佳係由鄰萘醌二疊氮磺酸或其鹽類與 羥基化合物反應所製得,更佳係由鄰萘醌二疊氮磺酸或其鹽類與多元羥基化合物反應所製得。 In one embodiment of the invention, the o-naphthoquinonediazide sulfonate (D-2) is an esterified ester which may be fully esterified or partially esterified. The o-naphthoquinonediazide sulfonate (D-2) is preferably derived from o-naphthoquinonediazidesulfonic acid or a salt thereof The hydroxy compound is obtained by a reaction, and more preferably is prepared by reacting o-naphthoquinonediazidesulfonic acid or a salt thereof with a polyvalent hydroxy compound.
該鄰萘醌二疊氮磺酸可包含但不限於鄰萘醌二 疊氮-4-磺酸、鄰萘醌二疊氮-5-磺酸或鄰萘醌二疊氮-6-磺酸等。該鄰萘醌二疊氮磺酸的鹽類可包含但不限於鄰萘醌二疊氮磺酸鹵鹽。 The o-naphthoquinonediazide sulfonic acid may include, but is not limited to, o-naphthoquinone Azide-4-sulfonic acid, o-naphthoquinonediazide-5-sulfonic acid or o-naphthoquinonediazide-6-sulfonic acid, and the like. The salt of o-naphthoquinonediazidesulfonic acid may include, but is not limited to, an o-naphthoquinonediazidesulfonic acid halide salt.
該羥基化合物可包含但不限於羥基二苯甲酮類 化合物、羥基芳基類化合物、(羥基苯基)烴類化合物或其他芳香族羥基類化合物。該羥基化合物可單獨一種或混合複數種使用。 The hydroxy compound may include, but is not limited to, hydroxybenzophenones a compound, a hydroxyaryl compound, a (hydroxyphenyl) hydrocarbon compound or other aromatic hydroxy compound. The hydroxy compound may be used singly or in combination of plural kinds.
前述之羥基二苯甲酮類化合物可包含但不限於 2,3,4-三羥基二苯甲酮、2,4,4’-三羥基二苯甲酮、2,4,6-三羥基二苯甲酮、2,3,4,4’-四羥基二苯甲酮、2,4,2’,4’-四羥基二苯甲酮、2,4,6,3’,4’-五羥基二苯甲酮、2,3,4,2’,4’-五羥基二苯甲酮、2,3,4,2’,5’-五羥基二苯甲酮、2,4,5,3’,5’-五羥基二苯甲酮或2,3,4,3’,4’,5’-六羥基二苯甲酮等。 The aforementioned hydroxybenzophenone compound may include, but is not limited to 2,3,4-trihydroxybenzophenone, 2,4,4'-trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone, 2,3,4,4'-four Hydroxybenzophenone, 2,4,2',4'-tetrahydroxybenzophenone, 2,4,6,3',4'-pentahydroxybenzophenone, 2,3,4,2' , 4'-pentahydroxybenzophenone, 2,3,4,2',5'-pentahydroxybenzophenone, 2,4,5,3',5'-pentahydroxybenzophenone or 2 , 3, 4, 3', 4', 5'-hexahydroxybenzophenone and the like.
前述之羥基芳基類化合物可具有如下式
(III-1)所示之結構:
於式(III-1)中,Z1至Z3表示氫原子或碳數為1至6之烷基;Z4至Z9表示氫原子、鹵素原子、碳數為1至6之烷基、碳數為1至6之烷氧基(alkoxy)、碳數為1至6之脂烯基(alkenyl),或者環烷基(cycloalkyl);Z10及Z11表示氫原子、鹵素原子及碳數為1至6之烷基;j、k及m表示1至3的整數;h表示0或1。 In the formula (III-1), Z 1 to Z 3 represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms; and Z 4 to Z 9 represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 6 carbon atoms, An alkoxy having 1 to 6 carbon atoms, an alkenyl group having 1 to 6 carbon atoms, or a cycloalkyl group; Z 10 and Z 11 representing a hydrogen atom, a halogen atom and a carbon number An alkyl group of 1 to 6; j, k and m represent an integer of 1 to 3; h represents 0 or 1.
如式(III-1)所示的羥基芳基類化合物可包含 但不限於三(4-羥基苯基)甲烷、雙(4-羥基-3,5-二甲基苯基)-4-羥基苯基甲烷、雙(4-羥基-3,5-二甲基苯基)-3-羥基苯基甲烷、雙(4-羥基-3,5-二甲基苯基)-2-羥基苯基甲烷、雙(4-羥基-2,5-二甲基苯基)-4-羥基苯基甲烷、雙(4-羥基-2,5-二甲基苯基)-3-羥基苯基甲烷、雙(4-羥基-2,5-二甲基苯基)-2-羥基苯基甲烷、雙(4-羥基-3,5-二甲基苯基)-3,4-二羥基苯基甲烷、雙(4-羥基-2,5-二甲基苯基)-3,4-二羥基苯基甲烷、雙(4-羥基-3,5-二甲基苯基)-2,4-二羥基苯基甲烷、雙(4-羥基-2,5-二甲基苯基)-2,4-二羥基苯基甲烷、雙(4-羥基苯基)-3-甲氧基-4-羥基苯基甲烷、雙(3-環己基-4-羥基苯基)-3-羥基苯基甲烷、雙(3-環己基-4-羥基苯基)-2-羥基苯基甲烷、雙(3-環己基-4-羥基苯基)-4-羥基苯基甲烷、雙(3-環己基-4-羥基-6-甲基苯基)-2-羥基苯基甲烷、雙(3-環己基-4-羥基-6-甲基苯基)-3-羥基苯基甲烷、雙(3-環己基-4-羥基-6-甲基苯基)-4-羥基苯基甲烷、雙(3-環己基-4-羥基-6-甲基苯基)-3,4-二羥基苯基甲烷、雙(3-環己基-6-羥基苯基)-3-羥 基苯基甲烷、雙(3-環己基-6-羥基苯基)-4-羥基苯基甲烷、雙(3-環己基-6-羥基苯基)-2-羥基苯基甲烷、雙(3-環己基-6-羥基-4-甲基苯基)-2-羥基苯基甲烷、雙(3-環己基-6-羥基-4-甲基苯基)-4-羥基苯基甲烷、雙(3-環己基-6-羥基-4-甲基苯基)-3,4-二羥基苯基甲烷、1-[1-(4-羥基苯基)異丙基]-4-[1,1-雙(4-羥基苯基)乙基]苯、1-[1-(3-甲基-4-羥基苯基)異丙基]-4-[1,1-雙(3-甲基-4-羥基苯基)乙基]苯或4,4’-[1-[4[-1-(4-羥基苯基)-1-甲基乙基]苯基]亞乙基]雙酚等。 The hydroxyaryl compound represented by the formula (III-1) may contain But not limited to tris(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dimethylphenyl)-4-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethyl Phenyl)-3-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-2-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl) )-4-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)-3-hydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl)- 2-hydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-3,4-dihydroxyphenylmethane, bis(4-hydroxy-2,5-dimethylphenyl) -3,4-dihydroxyphenylmethane, bis(4-hydroxy-3,5-dimethylphenyl)-2,4-dihydroxyphenylmethane, bis(4-hydroxy-2,5-dimethyl Phenyl)-2,4-dihydroxyphenylmethane, bis(4-hydroxyphenyl)-3-methoxy-4-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxyphenyl) 3-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxyphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxyphenyl)-4-hydroxyphenylmethane, Bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-3-hydroxyphenyl Methane, bis(3-cyclohexyl-4-hydroxyl -6-methylphenyl)-4-hydroxyphenylmethane, bis(3-cyclohexyl-4-hydroxy-6-methylphenyl)-3,4-dihydroxyphenylmethane, bis(3-ring Hexyl-6-hydroxyphenyl)-3-hydroxy Phenyl phenyl methane, bis(3-cyclohexyl-6-hydroxyphenyl)-4-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxyphenyl)-2-hydroxyphenylmethane, bis (3) -cyclohexyl-6-hydroxy-4-methylphenyl)-2-hydroxyphenylmethane, bis(3-cyclohexyl-6-hydroxy-4-methylphenyl)-4-hydroxyphenylmethane, double (3-cyclohexyl-6-hydroxy-4-methylphenyl)-3,4-dihydroxyphenylmethane, 1-[1-(4-hydroxyphenyl)isopropyl]-4-[1, 1-bis(4-hydroxyphenyl)ethyl]benzene, 1-[1-(3-methyl-4-hydroxyphenyl)isopropyl]-4-[1,1-bis(3-methyl) -4-hydroxyphenyl)ethyl]benzene or 4,4'-[1-[4[-1-(4-hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphenol Wait.
前述之(羥基苯基)烴類化合物可具有如下式
(III-2)所示之結構:
於式(III-2)中,Z12及Z13表示氫原子或碳數為1至6之烷基,且p及q表示1至3的整數。 In the formula (III-2), Z 12 and Z 13 represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and p and q represent an integer of 1 to 3.
如式(III-2)所示的(羥基苯基)烴類化合物可包含但不限於2-(2,3,4-三羥基苯基)-2-(2’,3’,4’-三羥基苯基)丙烷、2-(2,4-二羥基苯基)-2-(2’,4’-二羥基苯基)丙烷、2-(4-羥基苯基)-2-(4’-羥基苯基)丙烷、雙(2,3,4-三羥基苯基)甲烷或雙(2,4-二羥基苯基)甲烷等。 The (hydroxyphenyl) hydrocarbon compound represented by the formula (III-2) may include, but is not limited to, 2-(2,3,4-trihydroxyphenyl)-2-(2',3',4'- Trihydroxyphenyl)propane, 2-(2,4-dihydroxyphenyl)-2-(2',4'-dihydroxyphenyl)propane, 2-(4-hydroxyphenyl)-2-(4) '-Hydroxyphenyl)propane, bis(2,3,4-trihydroxyphenyl)methane or bis(2,4-dihydroxyphenyl)methane.
前述之其他芳香族羥基類化合物可包含但不限於苯酚、對-甲氧基苯酚、二甲基苯酚、對苯二酚、雙酚A、萘酚、鄰苯二酚、1,2,3-苯三酚甲醚、1,2,3-苯三酚-1,3- 二甲基醚、3,4,5-三羥基苯甲酸,或者部份酯化或部份醚化的3,4,5-三羥基苯甲酸等。 The other aromatic hydroxy compounds described above may include, but are not limited to, phenol, p-methoxyphenol, dimethyl phenol, hydroquinone, bisphenol A, naphthol, catechol, 1,2,3- Pyrogallol methyl ether, 1,2,3-benzenetriol-1,3- Dimethyl ether, 3,4,5-trihydroxybenzoic acid, or partially esterified or partially etherified 3,4,5-trihydroxybenzoic acid, and the like.
上述之羥基化合物較佳係選自於1-[1-(4-羥基 苯基)異丙基]-4-[1,1-雙(4-羥基苯基)乙基]苯、2,3,4-三羥基二苯甲酮、2,3,4,4’-四羥基二苯甲酮或上述材料之任意組合。 The above hydroxy compound is preferably selected from 1-[1-(4-hydroxyl) Phenyl)isopropyl]-4-[1,1-bis(4-hydroxyphenyl)ethyl]benzene, 2,3,4-trihydroxybenzophenone, 2,3,4,4'- Tetrahydroxybenzophenone or any combination of the above.
該鄰萘醌二疊氮磺酸或其鹽類與羥基化合物的 反應通常在二氧雜環己烷(dioxane)、N-吡咯烷酮(N-pyrrolidone)或乙醯胺(acetamide)等有機溶媒中進行。前述之反應更佳係添加三乙醇胺、鹼金屬碳酸鹽或鹼金屬碳酸氫鹽等鹼性縮合劑。 The o-naphthoquinonediazidesulfonic acid or a salt thereof and a hydroxy compound The reaction is usually carried out in an organic solvent such as dioxane, N-pyrrolidone or acetamide. More preferably, the above reaction is carried out by adding an alkali condensing agent such as triethanolamine, an alkali metal carbonate or an alkali metal hydrogencarbonate.
該鄰萘醌二疊氮磺酸酯(D)的酯化度較佳在 50%以上,亦即以該羥基化合物中的羥基總量為100莫耳百分比計,該羥基化合物中有50莫耳百分比以上的羥基與鄰萘醌二疊氮磺酸或其鹽類進行酯化反應。該鄰萘醌二疊氮磺酸酯(D)的酯化度更佳在60%以上。 The degree of esterification of the o-naphthoquinone diazide sulfonate (D) is preferably 50% or more, that is, the total amount of hydroxyl groups in the hydroxy compound is 100 mole percent, and the hydroxyl group has more than 50 mole percent of the hydroxyl group esterified with o-naphthoquinonediazidesulfonic acid or a salt thereof reaction. The degree of esterification of the o-naphthoquinonediazide sulfonate (D) is more preferably 60% or more.
基於該鹼可溶性樹脂(A)之總使用量為100重 量份,該鄰萘醌二疊氮磺酸酯(D)之使用量可為1重量份至16重量份,較佳為1.5重量份至14重量份,且更佳為2重量份至12重量份。 The total amount of the alkali-soluble resin (A) used is 100 The o-naphthoquinonediazide sulfonate (D) may be used in an amount of 1 part by weight to 16 parts by weight, preferably 1.5 parts by weight to 14 parts by weight, and more preferably 2 parts by weight to 12 parts by weight. Share.
本發明之溶劑(E)以可與其他有機成分完全溶解,且其揮發性必須高到在常壓下只需少許熱量便可使其從 分散液中蒸發者為宜。因此,常壓下沸點低於150℃之溶劑最常被使用。 The solvent (E) of the present invention is completely soluble in other organic components, and its volatility must be high enough to require only a small amount of heat at normal pressure. Evaporation in the dispersion is preferred. Therefore, a solvent having a boiling point of less than 150 ° C at normal pressure is most often used.
本發明適用之溶劑(E)可包含苯、甲苯或二甲苯等之芳香族溶劑;甲醇或乙醇等之醇類溶劑;乙二醇單丙醚、二乙二醇二甲醚、四氫呋喃、乙二醇單甲醚、乙二醇單乙醚、二乙二醇甲醚、二乙二醇乙醚或二乙二醇丁醚等之醚類溶劑;乙二醇甲醚醋酸酯、乙二醇乙醚醋酸酯、丙二醇甲醚醋酸酯、丙二醇乙醚醋酸酯、丙二醇丙醚醋酸酯或3-乙氧基丙酸乙酯等之酯類溶劑;甲乙酮或丙酮等之酮類溶劑。 The solvent (E) to which the present invention is applicable may include an aromatic solvent such as benzene, toluene or xylene; an alcohol solvent such as methanol or ethanol; ethylene glycol monopropyl ether, diethylene glycol dimethyl ether, tetrahydrofuran, and ethylene. An ether solvent such as alcohol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol methyl ether, diethylene glycol diethyl ether or diethylene glycol butyl ether; ethylene glycol methyl ether acetate, ethylene glycol ethyl ether acetate An ester solvent such as propylene glycol methyl ether acetate, propylene glycol diethyl ether acetate, propylene glycol propyl ether acetate or ethyl 3-ethoxypropionate; a ketone solvent such as methyl ethyl ketone or acetone.
較佳地,該溶劑(E)可為二乙二醇二甲醚、丙二醇甲醚醋酸酯或3-乙氧基丙酸乙酯之單獨一種或併用兩者。 Preferably, the solvent (E) may be a single one of diethylene glycol dimethyl ether, propylene glycol methyl ether acetate or ethyl 3-ethoxypropionate or both.
基於鹼可溶性樹脂(A)之總使用量為100重量份,溶劑(E)之使用量為200重量份至1500重量份,較佳為250重量份至1200重量份,且更佳可為300重量份至1000重量份。 The solvent (E) is used in an amount of from 200 parts by weight to 1,500 parts by weight, based on the total amount of the alkali-soluble resin (A), and is preferably from 250 parts by weight to 1200 parts by weight, and more preferably 300 parts by weight. Parts to 1000 parts by weight.
本發明之感光性樹脂組成物可選擇性地包含酚醛清漆樹脂(F),該酚醛清漆樹脂(F)可藉由甲酚類芳香族羥基化合物及醛類化合物進行聚縮合而得。 The photosensitive resin composition of the present invention may optionally contain a novolak resin (F) which can be obtained by polycondensation of a cresol-based aromatic hydroxy compound and an aldehyde compound.
前述甲酚類芳香族羥基化合物之具體例可包含但不限於間-甲酚(m-cresol)、對-甲酚(p-cresol)或鄰-甲酚(o-cresol)等之甲酚類化合物;2,3-二甲苯酚、2,5-二甲苯酚、3,5-二甲苯酚或3,4-二甲苯酚等之二甲酚類化合物。 該甲酚類芳香族羥基化合物可單獨一種使用或混合複數種使用。 Specific examples of the cresol-based aromatic hydroxy compound may include, but are not limited to, cresols such as m-cresol, p-cresol or o-cresol. a compound; a xylenol compound such as 2,3-xylenol, 2,5-xylenol, 3,5-xylenol or 3,4-xylenol. The cresol aromatic hydroxy compound may be used singly or in combination of plural kinds.
前述醛類化合物之具體例可包含但不限於甲 醛、多聚甲醛(paraformaldehyde)、三聚甲醛(trioxane)、乙醛、丙醛、丁醛、三甲基乙醛、丙烯醛(acrolein)、丁烯醛(crotonaldehyde)、環己醛(cyclo hexanealdehyde)、呋喃甲醛(furfural)、呋喃基丙烯醛(furylacrolein)、苯甲醛、對苯二甲醛(terephthal aldehyde)、苯乙醛、α-苯基丙醛、β-苯基丙醛、鄰-羥基苯甲醛、間-羥基苯甲醛、對-羥基苯甲醛、鄰-甲基苯甲醛、間-甲基苯甲醛、對-甲基苯甲醛、鄰-氯苯甲醛、間-氯苯甲醛、對-氯苯甲醛或肉桂醛等。該醛類化合物可單獨一種或混合複數種使用。 Specific examples of the aldehyde compound may include, but are not limited to, A Aldehyde, paraformaldehyde, trioxane, acetaldehyde, propionaldehyde, butyraldehyde, trimethylacetaldehyde, acrolein, crotonaldehyde, cyclohexane ), furfural, furyllacrolein, benzaldehyde, terephthalaldehyde, phenylacetaldehyde, α-phenylpropanal, β-phenylpropanal, o-hydroxybenzene Formaldehyde, m-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde, p-methylbenzaldehyde, o-chlorobenzaldehyde, m-chlorobenzaldehyde, p-chloro Benzaldehyde or cinnamaldehyde. The aldehyde compound may be used singly or in combination of plural kinds.
較佳地,前述之醛類化合物可為甲醛。 Preferably, the aforementioned aldehyde compound may be formaldehyde.
在不影響本發明之感光性樹脂組成物的物性下,該酚醛清漆樹脂(F)亦可由其他種類的芳香族羥基化合物與醛類化合物進行聚縮合而得。 The novolak resin (F) may be obtained by polycondensation of another type of aromatic hydroxy compound and an aldehyde compound without affecting the physical properties of the photosensitive resin composition of the present invention.
前述其他種類之芳香族羥基化合物的具體例可包含但不限於苯酚(phenol);間-乙基苯酚、對-乙基苯酚、鄰-乙基苯酚、2,3,5-三甲基苯酚、2,3,5-三乙基苯酚、4-第三丁基苯酚、3-第三丁基苯酚、2-第三丁基苯酚、2-第三丁基-4-甲基苯酚、2-第三丁基-5-甲基苯酚或6-第三丁基-3-甲基苯酚等之烷基苯酚(alkyl phenol)化合物;對-甲氧基苯酚、間-甲氧基苯酚、對-乙氧基苯酚、間-乙氧基苯酚、對丙氧基苯酚或間-丙氧基苯酚等之烷氧基苯酚(alkoxy phenol)化合物;鄰-異丙烯基苯酚、對-異丙烯基苯酚、2-甲基-4-異丙烯基苯酚或2-乙基-4-異丙烯基苯酚等之異丙烯基苯酚(isopropenyl phenol)化合物;苯基苯酚(phenyl phenol)等之芳基苯酚(aryl phenol)化合物;4,4’-二羥基聯苯、雙酚A、間-苯二酚(resorcinol)、對-苯二酚(hydroquinone)或1,2,3-苯三酚(pyrogallol)等之多羥基苯酚(polyhydroxyphenol)化合物。 Specific examples of the other kinds of the above aromatic hydroxy compound may include, but are not limited to, phenol; m-ethylphenol, p-ethylphenol, o-ethylphenol, 2,3,5-trimethylphenol, 2,3,5-triethylphenol, 4-tert-butylphenol, 3-tert-butylphenol, 2-tert-butylphenol, 2-tert-butyl-4-methylphenol, 2- An alkyl phenol compound such as a third butyl-5-methylphenol or a 6-t-butyl-3-methylphenol; p-methoxyphenol, m-methoxyphenol, p- Alkoxyphenol such as ethoxyphenol, m-ethoxyphenol, p-propoxyphenol or m-propoxyphenol (alkoxy) Phenol compound (isopropenyl phenol), isopropenyl phenol, p-isopropenyl phenol, 2-methyl-4-isopropenyl phenol or 2-ethyl-4-isopropenyl phenol a compound; an aryl phenol compound such as phenyl phenol; 4,4'-dihydroxybiphenyl, bisphenol A, resorcinol, and hydroquinone ( Hydroquinone) or a polyhydroxyphenol compound such as pyrogallol.
更佳地,該酚醛清漆樹脂(F)亦可藉由下述之方 法製得:在觸媒存在且常壓下,進行縮合反應,並藉由脫水處理去除未反應的單體。其中,該觸媒可包含鹽酸、硫酸、甲酸、醋酸、草酸或對甲苯磺酸等之有機酸或無機酸。 More preferably, the novolac resin (F) can also be obtained by the following According to the method, a condensation reaction is carried out in the presence of a catalyst and under normal pressure, and unreacted monomers are removed by a dehydration treatment. Wherein, the catalyst may comprise an organic acid or an inorganic acid such as hydrochloric acid, sulfuric acid, formic acid, acetic acid, oxalic acid or p-toluenesulfonic acid.
基於鹼可溶性樹脂(A)之總使用量為100重量 份,酚醛清漆樹脂(F)之使用量可為2重量份至12重量份,較佳為2.5重量份至11重量份,且更佳為3重量份至10重量份。 The total amount used based on the alkali-soluble resin (A) is 100% by weight. The novolak resin (F) may be used in an amount of 2 parts by weight to 12 parts by weight, preferably 2.5 parts by parts to 11 parts by weight, and more preferably 3 parts by weight to 10 parts by weight.
當本發明之感光性樹脂組成物包含酚醛清漆樹脂(F)時,所製得之感光性樹脂組成物可具有較少之殘渣。 When the photosensitive resin composition of the present invention contains a novolac resin (F), the resulting photosensitive resin composition may have less residue.
前述酚醛清漆樹脂(F)之重量平均分子量可為500至3000。 The aforementioned novolak resin (F) may have a weight average molecular weight of 500 to 3,000.
當本發明包含酚醛清漆樹脂(F),且其重量平均分子量為前述之範圍時,所製得之感光性樹脂組成物可進一步改善殘渣現象。 When the present invention contains a novolak resin (F) and the weight average molecular weight thereof is in the above range, the resulting photosensitive resin composition can further improve the residue phenomenon.
根據所需之物性及化性,感光性樹脂組成物可 進一步包含添加劑。該添加劑之選擇為本發明所屬技術領域中具通常知識者所熟知。 According to the required physical properties and chemical properties, the photosensitive resin composition can be Further comprising an additive. The selection of such additives is well known to those of ordinary skill in the art to which the invention pertains.
本發明之添加劑(G)的具體例可包含填充劑、 鹼可溶性樹脂(A)以外之高分子化合物、紫外線吸收劑、防凝集劑、界面活性劑、密著促進劑、保存安定劑或耐熱性促進劑等。 Specific examples of the additive (G) of the present invention may include a filler, A polymer compound other than the alkali-soluble resin (A), an ultraviolet absorber, an anti-aggregation agent, a surfactant, an adhesion promoter, a storage stabilizer, a heat resistance promoter, and the like.
前述填充劑之具體例可包含但不限於玻璃或鋁 等。 Specific examples of the aforementioned filler may include, but are not limited to, glass or aluminum Wait.
前述鹼可溶性樹脂(A)以外之高分子化合物的 具體例可包含但不限於聚乙烯醇、聚乙二醇單烷基醚或聚氟丙烯酸烷酯等。 a polymer compound other than the alkali-soluble resin (A) Specific examples may include, but are not limited to, polyvinyl alcohol, polyethylene glycol monoalkyl ether or polyfluoroalkyl acrylate.
前述紫外線吸收劑之具體例可包含但不限於 2-(3-第三丁基-5-甲基-2-羥基苯基)-5-氯苯基疊氮或烷氧基苯酮等。 Specific examples of the aforementioned ultraviolet absorber may include, but are not limited to 2-(3-Terbutyl-5-methyl-2-hydroxyphenyl)-5-chlorophenyl azide or alkoxybenzophenone.
前述防凝集劑之具體例可包含但不限於聚丙烯 酸鈉等。 Specific examples of the aforementioned anti-agglomerating agent may include, but are not limited to, polypropylene Sodium and so on.
前述之界面活性劑可促進感光性樹脂組成物的 塗佈性,且其具體例可包含但不限於含氟界面活性劑或有機矽界面活性劑等。 The aforementioned surfactant can promote the composition of the photosensitive resin The coating property, and specific examples thereof may include, but are not limited to, a fluorine-containing surfactant or an organic barium surfactant.
該含氟界面活性劑可為於末端、主鏈或側鏈至 少包含氟烷基或氟烯基,且其具體例可包含1,1,2,2-四氟辛基(1,1,2,2-四氟丙基)醚、1,1,2,2-四氟辛基己基醚、八乙二醇二(1,1,2,2-四氟丁基)醚、六乙二醇(1,1,2,2,3,3-六 氟戊基)醚、八丙二醇二(1,1,2,2-四氟丁基)醚、六丙二醇(1,1,2,2,3,3-六氟戊基)醚、全氟十二烷基硫酸鈉、1,1,2,2,8,8,9,9,10,10-十氟十二烷、1,1,2,2,3,3-六氟癸烷、氟烷苯磺酸鈉、氟烷磷酸鈉、氟烷羧酸鈉、氟烷聚氧乙烯醚、二丙三醇四(氟烷聚氧乙烯醚)、氟烷銨碘、氟烷甜菜鹼、氟烷聚氧乙烯醚、全氟烷聚氧乙烯醚或全氟烷基烷醇等。 The fluorosurfactant can be at the end, main chain or side chain to Containing less fluoroalkyl or fluoroalkenyl, and specific examples thereof may include 1,1,2,2-tetrafluorooctyl (1,1,2,2-tetrafluoropropyl)ether, 1,1,2, 2-tetrafluorooctylhexyl ether, octaethylene glycol bis(1,1,2,2-tetrafluorobutyl)ether, hexaethylene glycol (1,1,2,2,3,3-hexa Fluoropentyl)ether, octapropylene glycol bis(1,1,2,2-tetrafluorobutyl)ether, hexapropylene glycol (1,1,2,2,3,3-hexafluoropentyl)ether, perfluorinated ten Sodium dialkyl sulfate, 1,1,2,2,8,8,9,9,10,10-decafluorododecane, 1,1,2,2,3,3-hexafluorodecane, fluorine Sodium alkane sulfonate, sodium fluorocarbonate, sodium fluorocarbonate, fluoroalkane polyoxyethylene ether, diglycerol tetrakis(fluoroalkane polyoxyethylene ether), fluoroalkylammonium iodine, halothane betaine, halothane Polyoxyethylene ether, perfluoroalkane polyoxyethylene ether or perfluoroalkyl alkanol.
該含氟界面活性劑亦可為市售商品,例如:BM CHEMIE製造之產品,且其型號可為BM-1000或BM-1100等;大日本墨水及化學工業製造之產品,且其型號可為Megafac F142D、Megafac F172、Megafac F173、Megafac F183、Megafac F178、Megafac F191、Megafac F471或Megafac F476等;住友化學製造之產品,且其型號可為Fluorad FC 170C、Fluorad FC-171、Fluorad FC-430或Fluorad FC-431等;旭硝子製造之產品,且其型號可為氯氟碳S-112、氯氟碳S-113、氯氟碳S-131、氯氟碳S-141、氯氟碳S-145、氯氟碳S-382、氯氟碳SC-101、氯氟碳SC-102、氯氟碳SC-103、氯氟碳SC-104、氯氟碳SC-105或氯氟碳SC-106等;新秋田化成製造之產品,且其型號可為F Top EF301、F Top 303或F Top 352等;NEOSU製造之產品,且其型號可為Ftergent FT-100、Ftergent FT-110、Ftergent FT-140A、Ftergent FT-150、Ftergent FT-250、Ftergent FT-251、Ftergent FTX-251、Ftergent FTX-218、Ftergent FT-300、Ftergent FT-310或Ftergent FT-400S等。 The fluorosurfactant may also be a commercially available product, for example: BM Products manufactured by CHEMIE and available in models such as BM-1000 or BM-1100; products manufactured by Dainippon Ink and Chemical Industries, and can be modeled as Megafac F142D, Megafac F172, Megafac F173, Megafac F183, Megafac F178, Megafac F191, Megafac F471 or Megafac F476; etc.; Sumitomo Chemical's products, and its model can be Fluorad FC 170C, Fluorad FC-171, Fluorad FC-430 or Fluorad FC-431, etc.; Asahi Glass products, and its model can be Chlorofluorocarbon S-112, chlorofluorocarbon S-113, chlorofluorocarbon S-131, chlorofluorocarbon S-141, chlorofluorocarbon S-145, chlorofluorocarbon S-382, chlorofluorocarbon SC-101, chlorine Fluorocarbon SC-102, chlorofluorocarbon SC-103, chlorofluorocarbon SC-104, chlorofluorocarbon SC-105 or chlorofluorocarbon SC-106; new products manufactured by Akita Chemicals, and its model can be F Top EF301 , F Top 303 or F Top 352, etc.; products manufactured by NEOSU, and the models can be Ftergent FT-100, Ftergent FT-110, Ftergent FT-140A, Ftergent FT-150, Ftergent FT-250, Ftergent FT-251, Ftergent FTX-251, Ftergent FTX-218, Ftergent FT-300, Ftergent FT-310 or Ftergent FT-400S.
該有機矽界面活性劑之具體例可包含Dow Corning Toray Silicone製造之有機矽,且其型號可為DC 3 Paint Additive(DC 3 PA)、DC 7 PA、SH 11 PA、SH 21 PA、SH 28 PA、SH 29 PA、SH 30 PA、SH 190、SH 193、SZ 6032、SF-8427、SF-8428、DC57或DC 190等;Momentive Performance Materials Inc.製造之產品,且其型號可為TSF-4440、TSF-4300、TSF-4445、TSF-4446、TSF-4460或TSF-4452等。 Specific examples of the organic cerium surfactant may include Dow An organic crucible made by Corning Toray Silicone and available in DC 3 Paint Additive (DC 3 PA), DC 7 PA, SH 11 PA, SH 21 PA, SH 28 PA, SH 29 PA, SH 30 PA, SH 190, SH 193, SZ 6032, SF-8427, SF-8428, DC57 or DC 190; etc.; products manufactured by Momentive Performance Materials Inc., and their models can be TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460 or TSF-4452, etc.
該界面活性劑亦可使用前述含氟界面活性劑或 有機矽界面活性劑以外之界面活性劑。 The surfactant may also use the aforementioned fluorosurfactant or A surfactant other than an organic quinone surfactant.
該含氟界面活性劑或有機矽界面活性劑以外之 界面活性劑可包含但不限於月桂醇聚氧乙烯醚、聚氧乙烯硬脂酸醚或聚氧乙烯油基醚等之聚氧乙烯烷基醚;聚氧乙烯正辛基苯醚或聚氧乙烯正壬基苯酚醚等之聚氧乙烯芳基醚;聚氧乙烯二月桂酸或聚氧乙烯二硬脂酸等之聚氧乙烯二烷基酯;信越化學製造之非離子界面活性劑,且其型號可為KP341等;共榮社油脂化學工業製造之非離子界面活性劑,且其型號可為poly flow No.57或poly flow No.95等。 Other than the fluorine-containing surfactant or organic barium surfactant The surfactant may include, but is not limited to, a polyoxyethylene alkyl ether such as lauryl polyoxyethylene ether, polyoxyethylene stearate or polyoxyethylene oleyl ether; polyoxyethylene n-octyl phenyl ether or polyoxyethylene a polyoxyethylene aryl ether such as n-decyl phenol ether; a polyoxyethylene dialkyl ester such as polyoxyethylene dilauric acid or polyoxyethylene distearic acid; a nonionic surfactant produced by Shin-Etsu Chemical Co., Ltd. The model may be KP341 or the like; a nonionic surfactant manufactured by Kyoeisha Oil Chemical Industry Co., Ltd., and its model may be poly flow No. 57 or poly flow No. 95.
該界面活性劑可單獨一種使用或混合複數種使 用。 The surfactant can be used alone or in combination with a plurality of use.
前述之密著促進劑可用以提升基材之黏著力, 且其較佳可為具有羧基、烯基、異氰酸酯基、環氧基、胺基、巰基或鹵素等之官能性矽烷交聯劑。 The aforementioned adhesion promoter can be used to enhance the adhesion of the substrate. Further, it may preferably be a functional decane crosslinking agent having a carboxyl group, an alkenyl group, an isocyanate group, an epoxy group, an amine group, a fluorenyl group or a halogen.
該密著促進劑之具體例可包含對-羥基苯基三 甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、乙烯三乙醯氧基矽烷、乙烯三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧乙氧基)矽烷、γ-異氰酸酯丙基三乙氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、2-(3,4-環氧環己烷基)乙基三甲氧基矽烷、3-環氧丙氧基二甲基甲氧基矽烷、3-胺丙基三甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、3-巰丙基三甲氧基矽烷、3-氯丙基三甲氧基矽烷或3-氯丙基甲基二甲氧基矽烷等。該密著促進劑可單獨一種使用或混合複數種使用。 Specific examples of the adhesion promoter may include p-hydroxyphenyl three Methoxy decane, 3-methacryloxypropyltrimethoxydecane, ethylene triethoxy decane, ethylene trimethoxy decane, vinyl triethoxy decane, vinyl tris (2-methoxy) Ethoxy)decane, γ-isocyanatepropyltriethoxydecane, 3-glycidoxypropyltrimethoxydecane, 2-(3,4-epoxycyclohexane)ethyltrimethoxy Decane, 3-glycidoxydimethylmethoxydecane, 3-aminopropyltrimethoxydecane, N-(2-aminoethyl)-3-aminopropyltrimethoxydecane, N -(2-Aminoethyl)-3-aminopropylmethyldimethoxydecane, 3-mercaptopropyltrimethoxydecane, 3-chloropropyltrimethoxydecane or 3-chloropropylmethyl Dimethoxy decane and the like. The adhesion promoter may be used alone or in combination of plural kinds.
前述之保存安定劑可具有硫基、醌基、氫醌基、 胺基、亞硝基或硝基等之官能基,且該保存安定劑可包含但不限於聚氧化物。該保存安定劑之具體例可包含4-甲氧基苯酚、(N-亞硝基-N-苯基)羥胺鋁、2,2-硫代雙(4-甲基-6-第三丁基苯酚)或2,6-二-第三丁基苯酚等。 The aforementioned preservative stabilizer may have a sulfur group, a mercapto group, a hydroquinone group, A functional group such as an amine group, a nitroso group or a nitro group, and the preservation stabilizer may include, but is not limited to, a polyoxide. Specific examples of the preservative stabilizer may include 4-methoxyphenol, (N-nitroso-N-phenyl)hydroxylamine aluminum, and 2,2-thiobis(4-methyl-6-t-butyl group). Phenol) or 2,6-di-tert-butylphenol.
前述耐熱性促進劑之具體例可包含但不限於 N-(烷氧基甲基)甘脲化合物或N-(烷氧基甲基)三聚氰胺等。 Specific examples of the heat resistance promoter may include, but are not limited to N-(alkoxymethyl)glycolide compound or N-(alkoxymethyl)melamine or the like.
該N-(烷氧基甲基)甘脲化合物之具體例可包含 N,N,N’,N’-四(甲氧基甲基)甘脲、N,N,N’,N’-四(乙氧基甲基)甘脲、N,N,N’,N’-四(正丙氧基甲基)甘脲、N,N,N’,N’-四(異丙氧基甲基)甘脲、N,N,N’,N’-四(正丁氧基甲基)甘脲或N,N,N’,N’-四(第三丁氧基甲基)甘脲 等。該N-(烷氧基甲基)甘脲化合物較佳可為N,N,N’,N’-四(甲氧基甲基)甘脲。 Specific examples of the N-(alkoxymethyl)glycoluric compound may include N,N,N',N'-tetrakis(methoxymethyl)glycoluril, N,N,N',N'-tetrakis(ethoxymethyl)glycoluril, N,N,N',N '-tetrakis (n-propoxymethyl) glycoluril, N, N, N', N'-tetrakis(isopropoxymethyl) glycoluril, N, N, N', N'-tetra (n-butyl) Oxymethyl)glycolide or N,N,N',N'-tetrakis(t-butoxymethyl)glycoluril Wait. The N-(alkoxymethyl)glycolide compound is preferably N,N,N',N'-tetrakis(methoxymethyl)glycoluril.
該N-(烷氧基甲基)三聚氰胺之具體例可包含 N,N,N’,N’,N”,N”-六(甲氧基甲基)三聚氰胺、N,N,N’,N’,N”,N”-六(乙氧基甲基)三聚氰胺、N,N,N’,N’,N”,N”-六(正丙氧基甲基)三聚氰胺、N,N,N’,N’,N”,N”-六(異丙氧基甲基)三聚氰胺、N,N,N’,N’,N”,N”-六(正丁氧基甲基)三聚氰胺或N,N,N’,N’,N”,N”-六(第三丁氧基甲基)三聚氰胺等。該N-(烷氧基甲基)三聚氰胺較佳可為N,N,N’,N’,N”,N”-六(甲氧基甲基)三聚氰胺。 Specific examples of the N-(alkoxymethyl)melamine may include N,N,N',N',N",N"-hexa(methoxymethyl)melamine, N,N,N',N',N",N"-hexa(ethoxymethyl) Melamine, N, N, N', N', N", N"-hexa(n-propoxymethyl) melamine, N, N, N', N', N", N"-hexa (isopropoxy Methyl) melamine, N, N, N', N', N", N"-hexa(n-butoxymethyl) melamine or N, N, N', N', N", N"-six (Third butoxymethyl) melamine or the like. The N-(alkoxymethyl)melamine may preferably be N,N,N',N',N",N"-hexa(methoxymethyl)melamine.
該N-(烷氧基甲基)三聚氰胺亦可為三和化學製 造之產品,且其型號可為NIKARAKKU N-2702或NIKARAKKU MW-30M等。 The N-(alkoxymethyl)melamine can also be made from tri-chemical The product can be made by NIKARAKKU N-2702 or NIKARAKKU MW-30M.
基於鹼可性樹脂(A)之總使用量為100重量 份,該添加劑(G)之使用量可為0重量份至10重量份,較佳為0重量份至6重量份,且更佳為0重量份至3重量份。 The total amount used based on the alkali resin (A) is 100 weight The additive (G) may be used in an amount of from 0 part by weight to 10 parts by weight, preferably from 0 part by weight to 6 parts by weight, and more preferably from 0 part by weight to 3 parts by weight.
本發明之感光性樹脂組成物的製備方法係將上述鹼可溶性樹脂(A)、具有乙烯性不飽和基的化合物(B)、光起始劑(C)、鄰萘醌二疊氮磺酸酯(D)及溶劑(E)放置於攪拌器中攪拌,使其均勻混合成溶液狀態,必要時可添加酚醛清漆樹脂(F),或者填充劑、鹼可溶性樹脂(A)以外之高分 子化合物、紫外線吸收劑、防凝集劑、界面活性劑、密著促進劑、保存安定劑或耐熱性促進劑等之添加劑(G)。 The method for producing a photosensitive resin composition of the present invention comprises the above alkali-soluble resin (A), a compound having an ethylenically unsaturated group (B), a photoinitiator (C), and an o-naphthoquinonediazide sulfonate. (D) and the solvent (E) are placed in a stirrer and stirred to uniformly mix into a solution state, and if necessary, a novolak resin (F) or a high score other than the filler or the alkali-soluble resin (A) may be added. An additive (G) such as a sub-compound, an ultraviolet absorber, an anti-agglomerating agent, a surfactant, an adhesion promoter, a storage stabilizer, or a heat resistance promoter.
於本發明之一具體例中,間隙體或保護膜之製造方法至少包含下列步驟:(a)將本發明之感光性樹脂組成物塗佈於一基板上,而形成薄膜;(b)以放射線照射膜之至少一部份;(c)於放射線照射後進行顯影;以及(d)於顯影後進行加熱,以下析述之。 In a specific embodiment of the present invention, the method for producing a spacer or a protective film includes at least the following steps: (a) applying the photosensitive resin composition of the present invention onto a substrate to form a film; (b) emitting radiation At least a portion of the film is irradiated; (c) developed after radiation irradiation; and (d) heated after development, as described below.
步驟(a)係將本發明之感光性樹脂組成物於基板上形成薄膜。於形成保護膜時,先將由紅色、綠色及藍色著色層組成之畫素層形成於透明基板上,再將本發明之感光性樹脂組成物形成於該畫素層上。於形成間隙體時,在已形成有保護膜及畫素層之透明基板上,形成透明導電膜,並於該透明導電膜上形成利用本發明之感光性樹脂組成物製得之薄膜。 In the step (a), the photosensitive resin composition of the present invention is formed into a film on a substrate. When the protective film is formed, a pixel layer composed of a red, green, and blue colored layer is first formed on a transparent substrate, and the photosensitive resin composition of the present invention is formed on the pixel layer. When a spacer is formed, a transparent conductive film is formed on a transparent substrate on which a protective film and a pixel layer have been formed, and a film obtained by using the photosensitive resin composition of the present invention is formed on the transparent conductive film.
於本發明之具體例中,前述之透明基板可為玻璃基板或樹脂基板等,且較佳為玻璃基板,例如:鈉鈣玻璃或無鹼玻璃。該樹脂基板之具體例可為聚對苯二甲酸乙二酯、聚丁烯對苯二甲酸酯、聚醚碸、聚碳酸酯或聚醯亞胺。 In a specific example of the present invention, the transparent substrate may be a glass substrate, a resin substrate or the like, and is preferably a glass substrate such as soda lime glass or alkali-free glass. Specific examples of the resin substrate may be polyethylene terephthalate, polybutylene terephthalate, polyether oxime, polycarbonate or polyimine.
前述之透明導電基板可為於透明基板之全部表面上具有氧化錫(SnO2)所形成之NESA膜(美國PPG®)或具有氧化銦-氧化錫(In2O3-SnO2)所形成之ITO膜等。 The transparent conductive substrate may be formed by a NESA film (PPG®) formed of tin oxide (SnO 2 ) on the entire surface of the transparent substrate or having indium oxide-tin oxide (In 2 O 3 -SnO 2 ). ITO film, etc.
前述薄膜之形成方法可使用塗佈法或乾膜法。 A coating method or a dry film method can be used for the formation of the aforementioned film.
以塗佈法形成薄膜之方法係將本發明之感光性樹脂組成物的溶液塗佈於前述之透明導電膜上,且該透明導電膜較佳係先將塗佈面加熱(預烤)。應用於塗佈法之感光性樹脂組成物的溶液之固形物濃度為5重量百分比至50重量百分比,較佳為10重量百分比至40重量百分比,且更佳為15重量百分比至35重量百分比。該塗佈法可包含但不限於噴塗法、輥塗法、旋塗法、縫模塗佈法、棒塗佈法或噴墨塗佈法,且較佳可為旋塗法或縫模塗佈法。 A method of forming a film by a coating method is to apply a solution of the photosensitive resin composition of the present invention to the above-mentioned transparent conductive film, and it is preferred that the transparent conductive film first heats (pre-bake) the coated surface. The solid solution concentration of the solution applied to the photosensitive resin composition of the coating method is from 5 to 50% by weight, preferably from 10 to 40% by weight, and more preferably from 15 to 35 % by weight. The coating method may include, but is not limited to, a spray coating method, a roll coating method, a spin coating method, a slit die coating method, a bar coating method, or an inkjet coating method, and preferably may be a spin coating method or a slit coating method. law.
其次,以乾膜法形成薄膜之方法係將包含本發明之感光性樹脂組成物的感光乾膜堆疊於一基膜上。 Next, a method of forming a film by a dry film method is to laminate a photosensitive dry film comprising the photosensitive resin composition of the present invention on a base film.
前述之感光乾膜可堆疊並於移除溶劑後形成感光膜。進行乾膜法時,本發明之感光性樹脂組成物的固形物濃度可為5重量百分比至50重量百分比,較佳為10重量百分比至50重量百分比,更佳為20重量百分比至50重量百分比,且特佳為30重量百分比至50重量百分比。該感光乾膜之基膜的具體例可為聚對苯二甲酸乙二醇酯(PET)、聚乙烯、聚丙烯或聚碳酸酯或聚氯乙烯。該感光乾膜之基膜的厚度較佳為15μm至125μm,且更佳為1μm至30μm。 The aforementioned photosensitive dry film can be stacked and form a photosensitive film after removing the solvent. When the dry film method is carried out, the solid content of the photosensitive resin composition of the present invention may be from 5 to 50% by weight, preferably from 10 to 50% by weight, more preferably from 20 to 50% by weight, And particularly preferably from 30% by weight to 50% by weight. Specific examples of the base film of the photosensitive dry film may be polyethylene terephthalate (PET), polyethylene, polypropylene or polycarbonate or polyvinyl chloride. The base film of the photosensitive dry film preferably has a thickness of from 15 μm to 125 μm , and more preferably from 1 μm to 30 μm .
當感光乾膜不使用時,該感光乾膜亦可堆疊並以覆蓋膜覆蓋保存。本發明之覆蓋膜較佳係具有離型性,以使感光乾膜不使用時,感光乾膜與覆蓋膜不分離,但感光乾膜欲使用時,感光乾膜與覆蓋膜可輕易分離。 When the photosensitive dry film is not used, the photosensitive dry film may also be stacked and covered with a cover film. The cover film of the present invention preferably has a release property so that the photosensitive dry film and the cover film are not separated when the photosensitive dry film is not used, but the photosensitive dry film and the cover film can be easily separated when the photosensitive dry film is to be used.
具有前述特性之覆蓋膜的具體例可將有機矽脫模劑塗佈或印刷於合成樹脂薄膜上,例如PET薄膜、聚丙烯 薄膜、聚乙烯薄膜、聚氯乙烯薄膜或聚胺酯薄膜。該覆蓋膜之厚度較佳為約5μm至30μm。前述之覆蓋膜亦可為積層二層或三層之覆蓋膜。 Specific examples of the cover film having the above characteristics may be applied or printed on a synthetic resin film such as a PET film, a polypropylene film, a polyethylene film, a polyvinyl chloride film or a polyurethane film. The thickness of the cover film is preferably from about 5 μm to 30 μm . The cover film may also be a two-layer or three-layer cover film.
以乾膜法堆疊該薄膜之具體方法係在透明基膜上熱壓黏合透明感光性乾膜。 A specific method of stacking the film by a dry film method is to heat-bond a transparent photosensitive dry film on a transparent base film.
於前述之方法中,該薄膜較佳係以塗佈法製造,其次係藉由乾膜法製造,且較佳可對該薄膜進行預烤處理。該預烤處理之條件可依成分及混合比例而有所不同,較佳係於70℃至120℃下加熱1分鐘至15分鐘。 In the above method, the film is preferably produced by a coating method, and secondarily by a dry film method, and the film is preferably pre-baked. The conditions of the pre-baking treatment may vary depending on the ingredients and the mixing ratio, and are preferably heated at 70 ° C to 120 ° C for 1 minute to 15 minutes.
於預烤處理後,膜之厚度較佳為0.5μm至10μm,且更佳為1.0μm至7.0μm。 After the prebaking treatment, the thickness of the film is preferably from 0.5 μm to 10 μm , and more preferably from 1.0 μm to 7.0 μm .
步驟(b)係以放射線照射該薄膜之至少一部份。當照射該薄膜之一部分時,可使用具有預定圖案之光罩覆蓋。 Step (b) irradiates at least a portion of the film with radiation. When a portion of the film is illuminated, it can be covered with a reticle having a predetermined pattern.
前述用以曝光之放射線的具體例可為可見光、紫外光或遠紅外光。其中該放射線之波長較佳為250nm至550nm,且更佳為365nm。 Specific examples of the radiation to be exposed may be visible light, ultraviolet light or far infrared light. The wavelength of the radiation is preferably from 250 nm to 550 nm, and more preferably 365 nm.
曝光量係以照度計(Optical Associates公司製造之商品,且其型號為OAI model 356)量測波長為365nm之放射線的強度。曝光量較佳為100J/m2至5,000J/m2,且更佳為200J/m2至3,000J/m2。 The exposure amount was measured by the illuminance meter (manufactured by Optical Associates, Inc., and model number is OAI model 356) to measure the intensity of radiation having a wavelength of 365 nm. Exposure is preferably 100J / m 2 to 5,000J / m 2, and more preferably 200J / m 2 to 3,000J / m 2.
步驟(c)係於放射線照射後進行顯影,以去除不需要之部分並形成一預定之圖案。 Step (c) is developed after radiation irradiation to remove unnecessary portions and form a predetermined pattern.
顯影用之顯影液的具體例可包含氫氧化鈉、氫 氧化鉀、碳酸鈉、矽酸鈉、偏矽酸酸鈉或氨等之無機鹼;乙胺或正丙胺等之第一級脂肪胺;二乙胺或正丙胺等之第二級脂肪胺;三甲胺、二乙胺甲基、二甲基乙基胺或三乙胺等之第三級脂肪胺;吡咯、哌啶、N-甲基哌啶、N-甲基1,8-二氮雜雙環[5.4.0]-7-十一碳烯或1,5-二氮雜雙環[4.3.0]-5-壬烯等之第三級脂肪環酸;吡啶、甲基嘧啶、二甲基吡啶或喹啉等之第三級芳香胺;四甲基氫氧化銨或四乙基氫氧化銨之水溶液等的第四級銨鹽鹼性化合物。水溶性有機溶劑及/或表面活性劑,例如甲醇或乙醇,亦可視需要添加至上述顯影液中。 Specific examples of the developing solution for development may include sodium hydroxide and hydrogen. An inorganic base such as potassium oxide, sodium carbonate, sodium citrate, sodium metasilicate or ammonia; a first-grade fatty amine such as ethylamine or n-propylamine; a second-grade fatty amine such as diethylamine or n-propylamine; a third-stage fatty amine such as an amine, diethylamine methyl, dimethylethylamine or triethylamine; pyrrole, piperidine, N-methylpiperidine, N-methyl 1,8-diazabicyclo [5.4.0] -7-undecene or a tertiary aliphatic acid such as 1,5-diazabicyclo[4.3.0]-5-decene; pyridine, methylpyrimidine, lutidine Or a fourth-order ammonium salt such as quinoline or the like; a fourth-order ammonium salt basic compound such as an aqueous solution of tetramethylammonium hydroxide or tetraethylammonium hydroxide. A water-soluble organic solvent and/or a surfactant such as methanol or ethanol may also be added to the above developer as needed.
該顯影之方法,例如浸漬法、含浸法或淋浴法,較佳係於室溫至180℃顯影約10秒。 The developing method, for example, the dipping method, the impregnation method or the shower method, is preferably developed at room temperature to 180 ° C for about 10 seconds.
所得之圖案於顯影後進行蒸氣清洗30秒至90秒,並藉由壓縮空氣或氮氣風乾。 The resulting pattern was subjected to steam cleaning for 30 seconds to 90 seconds after development, and air-dried by compressed air or nitrogen.
步驟(d)係於顯影後進行加熱,將所製得具有圖案之薄膜以適當的加熱器(例如:加熱板或烘箱)加熱至100℃至250℃,並進行30分至180分(後烤)。 Step (d) is followed by heating after development, and the prepared film is heated to 100 ° C to 250 ° C with a suitable heater (for example, a hot plate or an oven), and is subjected to 30 minutes to 180 minutes (post baked) ).
前述所製得之具有所欲圖案的間隙體或保護膜具有優異之性質,例如抗壓強度、液晶配向膜之耐磨強度及基板之黏著力。 The gap body or protective film having the desired pattern prepared as described above has excellent properties such as compressive strength, abrasion resistance of the liquid crystal alignment film, and adhesion of the substrate.
本發明之液晶顯示元件包含前述之薄膜。本發 明之液晶顯示元件較佳係將感光性樹脂組成物形成間隙體,並於至少一側形成保護膜,較佳係於間隙體之兩側形成保護膜。 The liquid crystal display element of the present invention comprises the aforementioned film. This hair The liquid crystal display device of the present invention preferably forms a spacer body with a photosensitive resin composition and forms a protective film on at least one side, and preferably forms a protective film on both sides of the spacer.
本發明之液晶顯示元件可藉由下述之兩種方法 製造,以下析述之。 The liquid crystal display element of the present invention can be obtained by the following two methods Manufacturing, as described below.
第一種方法係將前述之感光性樹脂組成物藉由 前述之方法形成於至少一側具有透明導電膜的第一(電極)透明基板之一側或兩側上。然後,將具有液晶配向性之配向膜形成於具有間隙體及/或保護膜之透明導電膜上。 The first method is to use the aforementioned photosensitive resin composition by The foregoing method is formed on one side or both sides of the first (electrode) transparent substrate having at least one side of the transparent conductive film. Then, an alignment film having liquid crystal alignment properties is formed on the transparent conductive film having the interstitial body and/or the protective film.
於前述之基材中,配向膜所形成之一側稱為內 側面,以使各種配向膜之液晶排列方向成反方向並通過一定間隙(細胞間隙)反向配置。接著,在藉由基材表面(配向膜)及間隔所區劃之細胞間隙內填充液晶化合物,並封裝充填孔,以形成液晶單元。因此,內外之液晶單元可利用黏接垂直偏光板或排列於一個基板表面之液晶偏振方向,形成內外表面之配向方向一致之液晶顯示元件。 In the foregoing substrate, one side of the alignment film is formed inside The side faces are such that the liquid crystal alignment directions of the various alignment films are reversed and arranged in a reverse direction (cell gap). Next, a liquid crystal compound is filled in a cell gap partitioned by a surface of the substrate (alignment film) and a space, and a filling hole is encapsulated to form a liquid crystal cell. Therefore, the liquid crystal display unit can be formed by bonding the vertical polarizing plate or the liquid crystal polarization direction arranged on the surface of one substrate to form a liquid crystal display element having the same alignment direction of the inner and outer surfaces.
第二種方法係將本發明之感光性樹脂組成物利 用前述之第一種方法形成保護膜或間隙體於至少一側具有透明導電膜之第一透明基板之一側或兩側上。然後,沿基板之邊緣塗佈紫外光硬化型之黏著劑。接著,利用液晶分配器將液晶化合物滴於基板上,並於真空下堆疊基板。接著,在紫外光之照射下封裝,並貼合液晶內外之偏光板即可製得液晶顯示元件。 The second method is to use the photosensitive resin composition of the present invention. The protective film or the spacer is formed on one side or both sides of the first transparent substrate having the transparent conductive film on at least one side by the first method described above. Then, an ultraviolet curing adhesive is applied along the edge of the substrate. Next, the liquid crystal compound was dropped on the substrate using a liquid crystal dispenser, and the substrate was stacked under vacuum. Next, a liquid crystal display element can be obtained by encapsulating under ultraviolet light and bonding the polarizing plate inside and outside the liquid crystal.
前述液晶化合物之具體例可為向列型液晶或層 列型液晶,且較佳可為向列型液晶,例如:Shiff鹼型液晶、氧化偶氮型液晶、聯苯型液晶、苯基環乙烷型液晶、酯型液晶、三聯苯型液晶、聯苯環己烷型液晶、嘧啶型液晶、二惡烷聚環辛烷型液晶、二環辛烷型液晶、五環辛烷型液晶、氯化物型液晶、膽固醇碳酸鹽或膽甾液晶之膽固醇型液晶。前述之液晶化合物亦可包含手性劑(chiral agent),例如:p-癸氧基苯亞甲基-p-胺基-2-甲基丁基肉桂酸酯(默克公司製造之產品,且其型號可為C-15或CB-15)的強誘電型液晶。 A specific example of the liquid crystal compound may be a nematic liquid crystal or a layer Columnar liquid crystal, and preferably nematic liquid crystal, for example: Shiff base type liquid crystal, oxidized azo type liquid crystal, biphenyl type liquid crystal, phenylcyclohexane type liquid crystal, ester type liquid crystal, terphenyl type liquid crystal, joint Phenylcyclohexane type liquid crystal, pyrimidine type liquid crystal, dioxane polycyclooctane type liquid crystal, dicyclooctane type liquid crystal, pentacyclooctane type liquid crystal, chloride type liquid crystal, cholesterol carbonate or cholesteric liquid crystal cholesteric type liquid crystal. The liquid crystal compound may also include a chiral agent such as p-decyloxybenzylidene-p-amino-2-methylbutylcinnamate (a product manufactured by Merck & Co., Ltd., and Its model can be a strong induced liquid crystal of C-15 or CB-15).
於液晶顯示元件之外側可使用偏光板或聚乙烯 醇等之配向延伸膜、可吸收碘之「H膜」或設置於纖維醋酸保護膜及偏光板間之「H膜」。 Polarizing plate or polyethylene can be used on the outside of the liquid crystal display element An alignment film of an alcohol or the like, an "H film" capable of absorbing iodine, or an "H film" provided between the cellulose acetate protective film and the polarizing plate.
以下利用數個實施方式以說明本發明之應用, 然其並非用以限定本發明,本發明技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。 Several embodiments are utilized below to illustrate the application of the present invention, It is not intended to limit the invention, and various modifications and changes may be made without departing from the spirit and scope of the invention.
以下係根據第1表製備合成例A-1至合成例A-5之鹼可溶性樹脂(A)。 The alkali-soluble resin (A) of Synthesis Example A-1 to Synthesis Example A-5 was prepared according to the first table.
在一容積1000毫升之四頸錐瓶上設置氮氣入口、攪拌器、加熱器、冷凝管及溫度計。導入氮氣後,添加5重量份的甲基丙烯酸(以下簡稱為MAA)、5重量份的甲基丙烯酸環氧丙酯(以下簡稱為GMA)、10重量份的甲基丙烯酸2-羥基乙酯(以下簡稱為HEMA)、30重量份之甲基丙烯酸二環戊烯氧基乙酯(以下簡稱為FA-513M)、30重量份之甲基丙烯酸苯甲酯(以下簡稱為BzMA)、20重量份之苯乙烯(以下簡稱為SM)、2.4重量份的2,2’-偶氮二(2-甲基丁腈)(以下簡稱為AMBN)及240重量份的二乙二醇二甲醚(以下簡稱為Diglyme)至反應瓶中。接著,緩慢攪拌上述成份,並將溶液加熱至85℃。進行聚縮合反應5小時後,將溶劑脫揮,即可製得合成例A-1之鹼可溶性樹脂(A-1)。 A nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer were placed on a four-necked cone of 1000 ml volume. After introducing nitrogen gas, 5 parts by weight of methacrylic acid (hereinafter abbreviated as MAA), 5 parts by weight of glycidyl methacrylate (hereinafter abbreviated as GMA), and 10 parts by weight of 2-hydroxyethyl methacrylate (10 parts by weight) were added ( Hereinafter, it is abbreviated as HEMA), 30 parts by weight of dicyclopentenyloxyethyl methacrylate (hereinafter abbreviated as FA-513M), 30 parts by weight of benzyl methacrylate (hereinafter abbreviated as BzMA), and 20 parts by weight. Styrene (hereinafter abbreviated as SM), 2.4 parts by weight of 2,2'-azobis(2-methylbutyronitrile) (hereinafter abbreviated as AMBN), and 240 parts by weight of diethylene glycol dimethyl ether (hereinafter referred to as Referred to as Diglyme) to the reaction flask. Next, the above ingredients were slowly stirred, and the solution was heated to 85 °C. After the polycondensation reaction was carried out for 5 hours, the solvent was devolatilized to obtain an alkali-soluble resin (A-1) of Synthesis Example A-1.
合成例A-2至合成例A-5係使用與合成例A-1之鹼可溶性樹脂的製作方法相同之製備方法,不同之處在於合成例A-2至合成例A-5係改變鹼可溶性樹脂中原料的種類與使用量及其聚合條件,且其配方及聚合條件如第1表所示,在此不另贅述。 Synthesis Example A-2 to Synthesis Example A-5 were prepared in the same manner as in the preparation method of the alkali-soluble resin of Synthesis Example A-1 except that Synthesis Example A-2 to Synthesis Example A-5 were changed in alkali solubility. The type and amount of the raw materials in the resin and the polymerization conditions thereof, and the formulation and polymerization conditions are as shown in Table 1, and will not be further described herein.
於乾燥之氮氣環境中,將0.1莫耳前述式(I-1)所示具有羥基之茀化合物及0.13莫耳之鄰萘醌二疊氮-5-磺酸氯加至450g之γ-丁內酯中。 In a dry nitrogen atmosphere, 0.1 mole of the oxime compound having a hydroxyl group represented by the above formula (I-1) and 0.13 mol of o-naphthoquinonediazide-5-sulfonic acid chloride are added to 450 g of γ-butane. In the ester.
然後,將0.14莫耳之三乙胺溶解於50g之1,4-二噁烷中,以配置成一混合溶液。將該混合溶液滴加至前述之γ-丁內酯溶液中,並避免溶液之溫度超過35℃。 Then, 0.14 mol of triethylamine was dissolved in 50 g of 1,4-dioxane to configure a mixed solution. The mixed solution was added dropwise to the aforementioned γ-butyrolactone solution, and the temperature of the solution was prevented from exceeding 35 °C.
於30℃攪拌2小時後,過濾沉澱析出之三乙胺鹽,並將濾液倒入水中。 After stirring at 30 ° C for 2 hours, the precipitated triethylamine salt was filtered, and the filtrate was poured into water.
然後,過濾收集沉澱物,並利用真空乾燥機烘乾沉澱物,即可製得具有如下式(I-1-1)所示之結構的合成例D-1-1之鄰奈醌二疊氮磺酸酯(D-1-1),且其酯化率為65%:
於式(I-1-1)中,Q1代表或氫原子,且兩者之 比值為1.3:0.7。 In the formula (I-1-1), Q 1 represents Or a hydrogen atom, and the ratio of the two is 1.3:0.7.
於乾燥之氮氣環境中,將0.1莫耳前述式(I-2)所示具有羥基之茀化合物及0.14莫耳之鄰萘醌二疊氮-5-磺酸氯加至450g之γ-丁內酯中。 In a dry nitrogen atmosphere, 0.1 mole of the oxime compound having a hydroxyl group represented by the above formula (I-2) and 0.14 mol of o-naphthoquinonediazide-5-sulfonic acid chloride are added to 450 g of γ-butane. In the ester.
然後,將0.154莫耳之三乙胺溶解於50g之1,4-二噁烷中,以配置成一混合溶液。將該混合溶液滴加至前述之γ-丁內酯溶液中,並避免溶液之溫度超過35℃。 Then, 0.154 mol of triethylamine was dissolved in 50 g of 1,4-dioxane to configure a mixed solution. The mixed solution was added dropwise to the aforementioned γ-butyrolactone solution, and the temperature of the solution was prevented from exceeding 35 °C.
於30℃攪拌2小時後,過濾沉澱析出之三乙胺鹽,並將濾液倒入水中。 After stirring at 30 ° C for 2 hours, the precipitated triethylamine salt was filtered, and the filtrate was poured into water.
然後,過濾收集沉澱物,並利用真空乾燥機烘乾沉澱物,即可製得具有如下式(I-2-1)所示之結構的合成例D-1-2之鄰奈醌二疊氮磺酸酯(D-1-2),且其酯化率為70%:
於式(I-2-1)中,Q2代表或氫原子,且兩者之 比值為1.4:0.6。 In the formula (I-2-1), Q 2 represents Or a hydrogen atom, and the ratio of the two is 1.4:0.6.
於乾燥之氮氣環境中,將0.1莫耳前述式(I-3)所示具有羥基之茀化合物及0.26莫耳之鄰萘醌二疊氮-5-磺酸氯加至450g之γ-丁內酯中。 In a dry nitrogen atmosphere, 0.1 mole of the oxime compound having a hydroxyl group represented by the above formula (I-3) and 0.26 mol of o-naphthoquinonediazide-5-sulfonic acid chloride were added to 450 g of γ-butane. In the ester.
然後,將0.28莫耳之三乙胺溶解於50g之1,4-二噁烷中,以配置成一混合溶液。將該混合溶液滴加至前述之γ-丁內酯溶液中,並避免溶液之溫度超過35℃。 Then, 0.28 mol of triethylamine was dissolved in 50 g of 1,4-dioxane to configure a mixed solution. The mixed solution was added dropwise to the aforementioned γ-butyrolactone solution, and the temperature of the solution was prevented from exceeding 35 °C.
於30℃攪拌2小時後,過濾沉澱析出之三乙胺 鹽,並將濾液倒入水中。 After stirring at 30 ° C for 2 hours, the precipitated triethylamine was filtered off. Salt and pour the filtrate into the water.
然後,過濾收集沉澱物,並利用真空乾燥機烘
乾沉澱物,即可製得具有如下式(I-3-1)所示之結構的合成例D-1-3之鄰奈醌二疊氮磺酸酯(D-1-3),且其酯化率為65%:
於式(I-3-1)中,Q3代表或氫原子,且兩者之 比值為1.3:0.7。 In the formula (I-3-1), Q 3 represents Or a hydrogen atom, and the ratio of the two is 1.3:0.7.
於乾燥之氮氣環境中,將0.1莫耳前述式(I-3)所示具有羥基之茀化合物及0.28莫耳之鄰萘醌二疊氮-5-磺酸氯加至450g之γ-丁內酯中。 In a dry nitrogen atmosphere, 0.1 mole of the oxime compound having a hydroxyl group represented by the above formula (I-3) and 0.28 mol of o-naphthoquinonediazide-5-sulfonic acid chloride were added to 450 g of γ-butane. In the ester.
然後,將0.33莫耳之三乙胺溶解於50g之1,4-二噁烷中,以配置成一混合溶液。將該混合溶液滴加至前述之γ-丁內酯溶液中,並避免溶液之溫度超過35℃。 Then, 0.33 mol of triethylamine was dissolved in 50 g of 1,4-dioxane to configure a mixed solution. The mixed solution was added dropwise to the aforementioned γ-butyrolactone solution, and the temperature of the solution was prevented from exceeding 35 °C.
於30℃攪拌2小時後,過濾沉澱析出之三乙胺鹽,並將濾液倒入水中。 After stirring at 30 ° C for 2 hours, the precipitated triethylamine salt was filtered, and the filtrate was poured into water.
然後,過濾收集沉澱物,並利用真空乾燥機烘乾沉澱物,即可製得具有如下式(I-4-1)所示之結構的合成
例D-1-4之鄰奈醌二疊氮磺酸酯(D-1-4),且其酯化率為70%:
於式(I-4-1)中,Q4代表或氫原子,且兩者之 比值為1.4:0.6。 In the formula (I-4-1), Q 4 represents Or a hydrogen atom, and the ratio of the two is 1.4:0.6.
以下係根據第2表製備合成例F-1至合成例F-4之酚醛清漆樹脂(F)。 The novolak resin (F) of Synthesis Example F-1 to Synthesis Example F-4 was prepared according to the second table.
在容積為1000毫升之四頸反應瓶上設置氮氣導入口、攪拌器、加熱器、冷凝管及溫度計。導入氮氣後,將0.7莫耳的間-甲酚、0.3莫耳的對-甲酚、0.65莫耳的甲醛與0.01莫耳的草酸加至反應瓶中。然後,緩慢攪拌上述成分,並將溶液加熱至100℃。進行聚縮合反應6小時後,將溶液加熱至180℃,並以10mmHg之壓力進行減壓乾燥。溶劑去除後,即可製到合成例F-1之酚醛清漆樹脂(F-1)。所得酚醛清漆樹脂之重量平均分子量係以本發明所屬技術領域具有通常知識者所熟知之方法量測,其結果如第2表所示。 A nitrogen inlet, a stirrer, a heater, a condenser, and a thermometer were placed on a four-neck reaction flask having a volume of 1000 ml. After introducing nitrogen gas, 0.7 mol of m-cresol, 0.3 mol of p-cresol, 0.65 mol of formaldehyde, and 0.01 mol of oxalic acid were added to the reaction flask. Then, the above ingredients were slowly stirred, and the solution was heated to 100 °C. After the polycondensation reaction was carried out for 6 hours, the solution was heated to 180 ° C and dried under reduced pressure at a pressure of 10 mmHg. After the solvent was removed, the novolak resin (F-1) of Synthesis Example F-1 was obtained. The weight average molecular weight of the obtained novolac resin is measured by a method well known to those skilled in the art to which the present invention pertains, and the results are shown in Table 2.
合成例F-2至合成例F-4係使用與合成例F-1之酚醛清漆樹脂的製作方法相同之製備方法,不同之處在於合成例F-2至合成例F-4係改變酚醛清漆樹脂中原料的種類與使用量及其聚合條件,且其配方、聚合條件及重量平均分子量如第2表所示,在此不另贅述。 Synthesis Example F-2 to Synthesis Example F-4 The same preparation method as that of the novolak resin of Synthesis Example F-1 was used, except that Synthesis Example F-2 to Synthesis Example F-4 were used to change the novolac. The type and amount of the raw materials in the resin and the polymerization conditions thereof, and the formulation, polymerization conditions, and weight average molecular weight are shown in Table 2, and will not be further described herein.
以下係根據第3表製備實施例1至實施例12及比較例1至比較例3之感光性樹脂組成物。 The photosensitive resin compositions of Examples 1 to 12 and Comparative Examples 1 to 3 were prepared according to Table 3 below.
將100重量份前述合成例A-1所製得之鹼可溶性樹脂(A-1)、30重量份之三季戊四醇七丙烯酸酯(以下簡稱為B-1-1)、15重量份之1-[4-(苯基硫代)苯基]-辛烷-1,2-二酮2-(O-苯醯基肟)(以下簡稱為C-1)、1重量份前述合成例D-1-1所製得之鄰奈醌二疊氮磺酸酯(D-1-1)及2重量份前述合成例F-1所製得之酚醛清漆樹脂(F-1)加至200重量份之丙二醇甲醚醋酸酯(以下簡稱為E-1)中,攪拌溶解後即可製得實施例1之感光性樹脂組成物。所得之感光性樹脂組成物以下列之評價方式進行評價,其結果如第3表所示,其中解析度及殘渣之檢測方法容後再述。 100 parts by weight of the alkali-soluble resin (A-1) obtained in the above Synthesis Example A-1, 30 parts by weight of tripentaerythritol heptaacrylate (hereinafter abbreviated as B-1-1), and 15 parts by weight of 1-[ 4-(phenylthio)phenyl]-octane-1,2-dione 2-(O-phenylhydrazinyl) (hereinafter abbreviated as C-1), 1 part by weight of the aforementioned synthesis example D-1- 1 ortho-nene diazide sulfonate (D-1-1) and 2 parts by weight of the novolak resin (F-1) obtained in the above Synthesis Example F-1 are added to 200 parts by weight of propylene glycol In the methyl ether acetate (hereinafter abbreviated as E-1), the photosensitive resin composition of Example 1 was obtained by stirring and dissolving. The obtained photosensitive resin composition was evaluated by the following evaluation methods, and the results are shown in Table 3, wherein the resolution and the method for detecting the residue are described later.
實施例2至實施例12及比較例1至比較例3係使用與實施例1之感光性樹脂組成物的製作方法相同之製備 方法,不同之處在於實施例2至實施例12及比較例1至比較例3係改變感光性樹脂組成物中原料的種類及使用量,且其配方及評價結果如第3表所示,在此不另贅述。 Examples 2 to 12 and Comparative Examples 1 to 3 were prepared in the same manner as in the production method of the photosensitive resin composition of Example 1. The method differs in that Example 2 to Example 12 and Comparative Example 1 to Comparative Example 3 change the kind and amount of the raw material in the photosensitive resin composition, and the formulation and evaluation results are shown in Table 3. This will not be repeated.
將前述實施例1至實施例10及比較例1至比較例3所製得之感光性樹脂組成物,以旋轉塗佈之方式分別塗佈在100mm×100mm×0.7mm的素玻璃基板上,並在90℃下預烤150秒,即可製到約4μm之預烤塗膜。 The photosensitive resin compositions obtained in the above-described Examples 1 to 10 and Comparative Examples 1 to 3 were applied by spin coating to a 100 mm × 100 mm × 0.7 mm plain glass substrate, respectively. Prebaked at about 4 μm for about 150 seconds at 90 ° C.
然後,將此預烤塗膜置於所指定之光罩圖案下,並利用能量為60mJ/cm2之紫外光(曝光機型號為AG500-4N,且其為M&R Nano Technology製)照射,以進行曝光製程。 Then, the prebaked coating film was placed under the specified mask pattern, and irradiated with ultraviolet light having an energy of 60 mJ/cm 2 (exposure machine model AG500-4N, which is manufactured by M&R Nano Technology). Exposure process.
接著,將曝光後的塗膜浸於濃度為0.0438%之氫氧化鉀(KOH)水溶液中,以除去未曝光的部分。經過75秒後,以純水洗淨,並以235℃後烤30分鐘,即可於素玻璃基板上形成具有指定圖案之圓柱。 Next, the exposed coating film was immersed in an aqueous solution of potassium hydroxide (KOH) having a concentration of 0.0438% to remove the unexposed portion. After 75 seconds, it was washed with pure water and baked at 235 ° C for 30 minutes to form a cylinder having a specified pattern on the glass substrate.
之後,以Hitachi製造,型號為S-3000N之掃描式電子顯微鏡(SEM)觀察間隙體膜或保護膜之圓柱的可成形最小直徑,並根據以下之基準進行評價: Thereafter, the minimum diameter of the shape of the cylinder of the interstitial film or the protective film was observed by a scanning electron microscope (SEM) manufactured by Hitachi, Model S-3000N, and evaluated according to the following criteria:
◎:圓柱的可成形最小直徑≦10μm ◎: The minimum diameter of the cylindrical shape can be ≦10μm
○:10μm<圓柱的可成形最小直徑≦15μm。 ○: 10 μm < the minimum formable diameter of the cylinder ≦ 15 μm.
△:15μm<圓柱的可成形最小直徑≦20μm。 △: 15 μm < the minimum formable diameter of the cylinder ≦ 20 μm.
╳:20μm<圓柱的可成形最小直徑。 ╳: 20 μm < the smallest formable diameter of the cylinder.
將前述實施例1至實施例10及比較例1至比較例3所製得之預烤塗膜置於具有指定圖案之光罩(mask)下,並利用曝光機(Canon製造,且其型號為PLA-501F)以能量為60mJ/cm2的紫外光照射。然後,將曝光後之預烤塗膜浸漬於23℃且濃度為0.0438%之氫氧化鉀水溶液中,以去除基板上尚未曝光之部分。經過75秒後,以純水洗淨,並以235℃之溫度後烤30分鐘,即可在玻璃基板上形成所要之感光性樹脂圖案。接著,以顯微鏡觀察感光性樹脂圖案,確定未曝光之部分是否有殘渣存在,並依據下述基準進行評價: The prebaked coating films prepared in the foregoing Examples 1 to 10 and Comparative Examples 1 to 3 were placed under a mask having a prescribed pattern, and were manufactured by an exposure machine (manufactured by Canon, and the model number thereof was PLA-501F) was irradiated with ultraviolet light having an energy of 60 mJ/cm 2 . Then, the exposed prebaked coating film was immersed in an aqueous solution of potassium hydroxide having a concentration of 0.0438% at 23 ° C to remove the unexposed portion of the substrate. After 75 seconds, it was washed with pure water and baked at a temperature of 235 ° C for 30 minutes to form a desired photosensitive resin pattern on the glass substrate. Next, the photosensitive resin pattern was observed under a microscope to determine whether or not the unexposed portion had a residue, and was evaluated according to the following criteria:
◎:無殘渣。 ◎: No residue.
○:輕微殘渣。 ○: Slight residue.
△:少許殘渣。 △: A little residue.
╳:殘渣很多。 ╳: There are many residues.
由第3表之結果可知,當本發明之具有乙烯性不飽和基之化合物(B)包含具有如式(II)所示之結構的第一化合物(B-1)時,所製得之感光性樹脂組成物具有更佳之解析度。 As is apparent from the results of the third table, when the compound (B) having an ethylenically unsaturated group of the present invention contains the first compound (B-1) having a structure represented by the formula (II), the obtained photosensitive material The resin composition has a better resolution.
其次,當該鄰萘醌二疊氮磺酸酯(D)包含具有如式(I)所示之結構的鄰萘醌二疊氮磺酸酯(D-1)時,所製得之感光性樹脂組成物具有較高之解析度及較少之殘渣。 Next, when the o-naphthoquinonediazide sulfonate (D) contains o-naphthoquinonediazide sulfonate (D-1) having a structure represented by the formula (I), the obtained photosensitivity The resin composition has a high resolution and a small residue.
此外,當本發明之感光性樹脂組成物進一步地包含酚醛清漆樹脂(F)時,感光性樹脂組成物可具有較少之 殘渣。其中,當該酚醛清漆樹脂(F)之重量平均分子量為前述之範圍時,感光性樹脂組成物可具有更少之殘渣。 Further, when the photosensitive resin composition of the present invention further contains a novolak resin (F), the photosensitive resin composition may have less Residue. Here, when the weight average molecular weight of the novolak resin (F) is within the above range, the photosensitive resin composition may have less residue.
需補充的是,本發明雖以特定的化合物、組成、反應條件、製程、分析方法或特定儀器作為例示,說明本發明之感光性樹脂組成物及其應用,惟本發明所屬技術領域中任何具有通常知識者可知,本發明並不限於此,在不脫離本發明之精神和範圍內,本發明之感光性樹脂組成物及其應用亦可使用其他的化合物、組成、反應條件、製程、分析方法或儀器進行。 It should be noted that the present invention describes the photosensitive resin composition of the present invention and its application by taking specific compounds, compositions, reaction conditions, processes, analytical methods or specific instruments as an example, but any of the technical fields of the present invention have It is to be understood by those skilled in the art that the present invention is not limited thereto, and other compounds, compositions, reaction conditions, processes, and analytical methods may be used for the photosensitive resin composition of the present invention and its application without departing from the spirit and scope of the present invention. Or instrumental.
雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,在本發明所屬技術領域中任何具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 The present invention has been disclosed in the above embodiments, and is not intended to limit the present invention. Any one of ordinary skill in the art to which the present invention pertains can make various changes without departing from the spirit and scope of the invention. The scope of protection of the present invention is therefore defined by the scope of the appended claims.
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