TW201638601A - Method of adjusting displacement distance of probe in accordance with horizontal positions of multiple to-be-tested points - Google Patents

Abstract

This invention relates to a method of adjusting a displacement distance of a probe in accordance with horizontal positions of multiple to-be-tested points. The method uses at least one point testing device to perform an equal pressure calibration process, which drives a driving device to move multiple probes so that the tips of the probes touch multiple to-be-tested points, respectively. This method further uses the point testing device to receive point-testing pressures applied onto the to-be-tested points by the probes. Then, it is determined that whether a difference among the point-testing pressures falls within a built-in threshold value. If so, the equal pressure calibration process is completed; if not, the driving device is then driven to further adjust the distances between the probe tips and the corresponding to-be-tested points. In this way, this method effectively prevents damages on the to-be-tested objects or influencing the point testing accuracy caused by oversize or undersize point-testing pressure.

Description

Method for adjusting displacement distance of probe according to horizontal position of a plurality of points to be measured

The invention is capable of adjusting the needle pressure of the corresponding probes according to the horizontal positions of the plurality of points to be tested on the object to be tested, so that the needle pressures received by the points to be measured are within a predetermined range.

Inspect, the existing Light-Emitting Diode (LED) is a kind of semiconductor electronic component that can produce bright light after being energized. The main light-emitting component is crystal grain, due to the brightness and wavelength of the crystal grain. Characteristics such as color temperature and operating voltage may vary depending on slight differences in process conditions. Therefore, the manufacturer usually performs a "point test program" through a point measuring device to accurately transfer current to the die. The light characteristics (such as wavelength, luminous intensity, color, etc.) emitted by the crystal grains are measured, and the manufacturing quality of the crystal grains is judged, thereby controlling the factory yield of the crystal grains.

Please refer to FIGS. 1 and 2 , which are schematic diagrams of a point measuring device 1 previously designed by the applicant. The measuring device 1 includes a carrying platform 11 and a plurality of needle holders 12 (only shown in FIG. 1 ) A needle holder 12) is provided, wherein the top surface of the loading table 11 can be used for placing at least one object to be tested (eg, LED die, integrated circuit, etc.), and a bottom surface is provided with a first driving device 13 The first driving device 13 can drive the loading table 11 to be displaced horizontally or vertically. In this embodiment, the first driving device 13 includes a first longitudinal moving portion 131 and a first lateral moving portion 133. The first longitudinal moving portion 131 can drive the longitudinal displacement of the loading platform 11 along the pointing device 1. The first lateral moving portion 133 can drive the lateral displacement of the loading platform 11 along the pointing device 1 . The operator can control the position of the carrier 11 through the first drive unit 13.

Referring to Figures 1 and 2, each of the hubs 12 is positioned above the carrier 11, and a probe 121 is disposed at one end thereof, wherein one end of the probe 121 is connected to the needle One end of the seat 12, the other end (ie, the needle tip) extends toward the top surface of the loading table 11, and each of the needle holders 12 is respectively connected to a second driving device 14, and the second driving device 14 can The second driving device 14 includes a second longitudinal moving portion 141 and a second lateral moving portion 143. The second longitudinal moving portion 143 is disposed in the horizontal direction or the vertical direction. The 141 can drive the longitudinal displacement of the hub 12 along the pointing device 1. The second lateral moving portion 143 can drive the lateral displacement of the hub 12 along the pointing device 1, so that the operator can use the second The drive unit 14 adjusts the position of the hub 12.

In general, the size of the LED die is about 1000 to 150 micrometers (μm), and the size of the pad to be measured is usually 50 to 70 micrometers (μm), so the worker cannot use the naked eye. The horizontal position of each point to be measured is viewed, and the staff cannot manually fine-tune the position of the tip of the plurality of probes 121. Therefore, the worker usually regards the point to be measured of the LED die as the same horizontal position, and uses the same One point is to measure the pressure. Therefore, as shown in Figures 1 and 2, in the existing "pointing program", when the worker wants to detect the quality of the LED die, the first driving device 13 and the second driving can be made. The device 14 is respectively actuated so that the carrier 11 and the needle holders 12 are respectively positioned at the one-point measurement position, and the other end of the probe 121 of the needle holders 12 (ie, the needle tip) is maintained at the same horizontal position. The second driving device 14 will simultaneously drive the needle holders 12 toward the loading table 11 until the other end of the probes 121 simultaneously touch the LED dies on the carrier 11. Current is delivered to the LED die to measure the light emitted by the LED die Sex. However, in general, the plurality of points to be measured on the LED die are not the same level between each other. Therefore, when the probes 121 are simultaneously moved down and pressed to the corresponding points to be tested, if such The spotting pressure of the probe 121 (ie, the pressure applied by the probe 121 to the point to be measured) is suitable for the point to be measured at a lower horizontal position, which is bound to result in a point to be measured that is higher in the horizontal position. Withstand a large point pressure, so that under long-term use, not only will the wear rate of the probe 121 be accelerated, but too large point pressure will easily cause damage to the LED die; otherwise, if the probes 121 point When the pressure is suitable for the point to be measured with a higher horizontal position, the point to be measured with the lower position in the horizontal position and the probe 121 cannot be closely adhered to each other, thereby affecting the accuracy of the point measurement.

In summary, the existing "point test program" has problems such as excessive or too small point pressure at each point to be measured, which will not only reduce the industry's spot test. The yield is good, and it will cause damage to the LED die. Therefore, how to provide a more excellent "point test program" method without major changes to the original spot test device becomes an important issue for the relevant industry. .

In view of the existing spot testing program, the plurality of probes are respectively applied to the corresponding point-measuring pressure of the point to be tested, and there may be problems such as excessive or too small pressure measurement, causing grain damage or affecting the accuracy of the point measurement. Therefore, the inventor has, after many years of research and testing, finally designed a method for adjusting the displacement distance of the probe according to the horizontal position of a plurality of points to be measured by virtue of years of practical experience. A new and easy to use, accurate new point test program.

An object of the present invention is to provide a method for adjusting the displacement distance of a probe according to the horizontal position of a plurality of points to be measured, so that the tip of each probe can be kept at a different distance from the corresponding point to be measured. The method is applied to a point measuring device, and the method includes a loading platform, a plurality of needle holders, a control unit, a first driving device, and a plurality of a driving device and a pressure sensing unit, wherein the carrier can be driven by the first driving device to be displaced horizontally or vertically, and at least one object to be tested is placed on the top of the device, and the object to be tested is at least There are a plurality of points to be tested, and the waiting points do not necessarily have the same horizontal position. Each of the needle holders is disposed above the platform and can be respectively driven by a second driving device to be displaced vertically or horizontally. Each of the needle holders is respectively provided with a probe, and the probe can abut against the corresponding point to be tested according to the displacement of the carrier or the needle seat, and the control unit can enable the first driving device and the first driving device The second drive unit is driven separately The displacement position of the loading platform and the needle holders, the method is such that the control unit performs an equal pressure calibration procedure to drive the second driving devices or the first driving device to enable the probes The needle tip respectively touches the corresponding waiting point, and receives the probe pressure sensed by the pressure sensing unit to be applied to one of the corresponding points to be measured, and the control unit calculates and determines the Whether one of the differential pressures is within a threshold value of the built-in threshold, or whether each of the measured pressures is within a range of built-in thresholds, and if so, the pressure calibration is completed. a program; otherwise, driving each of the second driving devices to further adjust a distance between a tip of each probe and a corresponding one of the points to be measured until the difference falls within the threshold value, or each The test pressure is located separately Within the range of the threshold value, the equal pressure calibration procedure is completed.

Another object of the present invention is that before the control unit executes the equal pressure calibration procedure, a first calibration procedure is executed first, wherein the high calibration procedure is that the control unit is configured according to a camera unit. Taking the position of the tip of the probe, or the distance between the tip of the probe and the corresponding waiting point, generating a corresponding calibration data, and driving the second driving device according to the calibration data Adjusting the relative positions of the probe tips of the probes in a horizontal or vertical direction so that the tip heights of the probes can be kept at the same height, or between the tip of the probes and the corresponding waiting point The distance can be kept at the same distance, so that the manufacturer can make the probes abut against the corresponding point to be tested, and no excessive pressure is generated to avoid damage to the object to be tested.

For your convenience, the review committee can make a further understanding and understanding of the purpose, technical features and effects of the present invention. The embodiments are combined with the drawings, and the details are as follows:

[study]

1‧‧‧Measurement device

11‧‧‧Loading station

12‧‧‧ needle seat

121‧‧‧Probe

13‧‧‧First drive

131‧‧‧First longitudinal movement

133‧‧‧First lateral movement

14‧‧‧Second drive

141‧‧‧Second longitudinal movement

143‧‧‧Second Lateral Movement

〔this invention〕

2‧‧‧Measurement device

21‧‧‧Loading station

22‧‧‧ needle seat

221‧‧‧ probe

23‧‧‧Control unit

24‧‧‧First drive

25‧‧‧Second drive

26‧‧‧ camera unit

27‧‧‧ Pressure sensing unit

3‧‧‧Test object

31, 31A, 31B‧‧‧ points to be tested

4A‧‧‧etc.

4B‧‧‧Isostatic adjustment procedure

1 is a schematic view of a conventional spot measuring device; FIG. 2 is a partial schematic view of a conventional spot measuring device; FIG. 3 is a schematic view of the spot measuring device of the present invention; FIG. 4 is a schematic view of a test object; Figure 5 is a flow chart of the method of the present invention.

The present invention is a method for adjusting the displacement distance of a probe according to the horizontal position of a plurality of points to be measured, and the method is applied to the point measuring device 2. In an embodiment, please refer to FIG. 3, the measuring device 2 includes a carrying platform 21, a plurality of needle holders 22, a control unit 23, a first driving device 24, a plurality of second driving devices 25, an imaging unit 26 and at least one pressure sensing unit 27, wherein the bearing The stage 21 is coupled to the first drive unit 24 to be capable of being driven by the first drive unit 24. In this embodiment, the first drive unit 24 can displace the stage 21 in a horizontal or vertical direction. Moreover, the loading platform 21 can be axially rotated about its own axis. However, the structure of the first driving device 24 and the manner of driving the loading platform 21 are not the focus of the present invention, and the applicant has long applied for a related patent. Therefore, it will not be repeated.

Referring to Figures 3 and 4, the top of the carrying platform 21 is at least one flat. The object to be tested 3 (eg, a crystal grain), the object to be tested 3 has at least a plurality of points 31 to be measured (eg, electrode contacts on the die). In this embodiment, the object to be tested 3 is provided with two The points to be measured 31A, 31B, and the horizontal position of the point to be measured 31A is higher than the point to be measured 31B. However, in other embodiments of the present invention, the waiting point 31 can have the same horizontal position, or The object 3 can have more than three points to be measured 31, and the waiting point 31 does not necessarily have the same horizontal position.

Referring to FIG. 3, the needle holders 22 are disposed above the loading platform 21, and a probe 221 is disposed on the needle 221. The needle tip of the probe 221 extends downward, and each of the needle holders 22 is further Each of the second driving devices 25 is connected to be driven by each of the second driving devices 25 to be vertically or horizontally displaced to adjust the position of the tip of each of the probes 221 corresponding to the carrying platform 21. In addition, when the tip of each of the probes 221 is located at a position corresponding to each of the points 31 to be measured (as shown in FIG. 4), the first driving device 24 can drive the loading table 21 to be displaced upward, so that The needle tips of the probes 221 abut against the corresponding points 31 to be tested, or each of the second driving devices 25 can drive each of the needle holders 22 to be displaced downward, so that the needle tips of the probes 221 abut against the corresponding points. Point 31 to be tested for subsequent spotting operations (eg, supply current).

Referring to FIG. 3, in the embodiment, the control unit 23 is electrically connected to the first driving device 24 and the second driving device 25, respectively, so that the first driving device 24 can drive the The position of the loading table 21 is displaced, and the second driving device 25 can respectively drive the displacement positions of the corresponding needle holders 22, and the imaging unit 26 is positioned on the side of the loading table 21 and the needle holders 22 a square (eg, obliquely above or obliquely below) to simultaneously capture images of the carrier 21 (or the object to be tested 3) and the probe 221 for the control unit 23 to determine the object to be tested 3 and the position of the probes 221, however, in other embodiments of the present invention, the camera unit 26 can be directly above the carrier 21, rather than necessarily having to simultaneously capture the carrier 21 (or to be tested) 3) and the image of the probe 221, or in order to more accurately determine the position of the object to be tested 3 and the probes 221, the operator can be provided with a plurality of camera units 26, one of which can be located at Above the carrying platform 21, another camera unit 26 is located below the needle holder 22 and adjacent to the carrier 21 The position of the edge is such that the tip image can be accurately captured. Thus, the control unit 23 can accurately calculate the position of the tip of the probe 221 according to the captured image of the camera unit 26, and the probe The distance between the needle 221 and the object to be tested 3.

Please refer to Figures 3 and 4 for the pressure sensing unit 27 (eg strain The gauge, optical strain gauge, etc. are electrically connected to the control unit 23. In this embodiment, two pressure sensing units 27 are respectively disposed on the needle holders 22 to sense the probes. 221 is applied to the spotting pressure on the point to be tested 31. However, in other embodiments of the present invention, the pressure sensing unit 27 may also be disposed on the carrier 21 or other components, or the pressure sensing unit 27 can It is a non-contact image measuring instrument capable of taking the deformation amount of the needle holder 22 or the probe 221, and calculating the spotting pressure applied by the probe 221 to the point to be measured 31 according to the aforementioned deformation amount, so that the pressure is as long as the pressure The sensing unit 27 can obtain the spotting pressure applied by the probe 221 to the point to be measured 31, and can transmit the aforementioned point pressure to the control unit 23, that is, the pressure sensing unit 27 of the present invention. Bright.

Referring to FIGS. 3 and 5, in this embodiment, when the worker performs a test procedure, the control unit 23 executes a contour adjustment program 4A, wherein when the control unit 23 receives the camera After the image data transmitted by the unit 26, the needle tip position (or the needle tip height) of the probes 221 is determined according to the image data, and a calibration data is generated, and then the control unit 23 according to the The calibration data drives the second driving devices 25 such that the second driving devices 25 can drive the corresponding needle holders 22 to adjust the relative positions of the probe tips of the probes 221 horizontally or vertically. The tip position of the probe 221 can be maintained at the same height.

However, in addition to the aforementioned contour adjustment procedure, as shown in FIGS. 3 and 4, in other embodiments of the present invention, the height adjustment procedure may be performed in other manners, such as: After receiving the image data transmitted by the camera unit 26, the unit 23 generates the calibration data according to the distance between the needle tip of the probe 221 and the corresponding waiting point 31, and according to the calibration data. The second driving device 25 is driven to adjust the relative positions of the tips of the probes 221 in a horizontal or vertical direction so that the distance between the tips of the probes 221 and the corresponding waiting points 31 can be maintained. At the same distance, in this way, the operator can make the probes 221 abut against the corresponding point 31 to be tested, and does not generate excessive point pressure to avoid damage of the object to be tested 3, and in particular, However, although the tip of the probes 221 is kept at the same distance from the corresponding point 31 to be measured, but the accuracy, length, elasticity or other influence of the tip is not ensured that the pressures to be measured by the waiting point 31 are the same. , together with Chen Ming. Moreover, the operator can also make the tip of the probes 221 first press the loading platform 21 when the object to be tested 3 is not present on the carrying platform 21, or place a platform on the loading platform 21, and The tip of the probes 221 is pressed against the platform first, and when the control unit 23 is caused to receive the sensed value of the pressure sensing unit 27, The needle tips representing the probes 221 have been pressed against the carrier 21 (or platform), and the control unit 23 drives the second driving devices 25 so that the second driving devices 25 can drive the corresponding needle holders 22 The displacement causes the tip positions of the probes 221 to be maintained at the same height. Moreover, the sensed values of the pressure sensing unit 27 are only that the needle tips of the probes 221 are pressed against the carrier 21 (or platform). However, it does not mean that the amount of depression of the tip of the probes 221 is the same, which is described first.

Referring to Figures 3 and 5, in this embodiment, after the contour adjustment program 4A is completed, the control unit 23 executes an equal pressure calibration procedure 4B, wherein the control unit 23 drives The first driving device 24 drives the loading table 21 to be displaced, so that the needle tips of the probes 221 can respectively touch the corresponding waiting point 31, but in other embodiments of the present invention When the control unit 23 executes the equal pressure calibration program 4B, it can drive the second driving devices 25 first, and the second driving devices 25 drive the corresponding needle holders 22 so that the probes 221 The needle tip can respectively press the corresponding waiting point 31. The control unit 23 can receive the probe pressure applied by the pressure sensing unit 27 to the corresponding point to be measured 31, and then the control unit 23 calculates the pressure between the points. a difference value, and determining whether the difference is within a threshold value of the built-in threshold. For example, the threshold value built in the control unit 23 ranges from 0.8 to 1.2 grams, and the tip of the probes 221 are respectively When the touch pressure corresponds to the waiting point 31, it is ideal to generate a measuring pressure of 5 grams for the measuring point 31. Therefore, as shown in Figures 3 and 4, when the point to be measured 31A is 5 In grams, when the point pressure to be measured 31B is 4 grams, since the difference (3 grams minus 2 grams) is within the threshold value, it means that the point pressures to be measured by the points 31 to be tested are in compliance with the manufacturer. The expected pressure is measured, the control unit 23 completes the equal pressure calibration procedure 4B; and when the difference is not within the threshold range (eg, the point pressure to be measured 31A is 5 grams, If the spotting pressure of the point to be measured 31B is 3 gram, it means that one of the points to be tested 31 is too large or too small. The pressure is measured. At this time, the control unit 23 drives each of the second driving devices 25, and each of the second driving devices 25 drives the corresponding needle holder 22 to further adjust the tip of each of the probes 221. Corresponding to the distance between each of the points 31 to be measured, until the difference falls within the range of the threshold value, the control unit 23 completes the equal pressure calibration procedure 4B.

However, the present invention is not limited to the foregoing method for determining the difference. In other embodiments of the present invention, the control unit 23 may also perform the measurement after receiving the test pressure. The pressure is respectively compared with the range of the threshold value of the one-step measurement to determine whether the measured pressure is within the range of the threshold value. For example, the built-in point measurement threshold of the control unit 23 ranges from 4 to 5 grams. Please refer to Figures 3 and 4, when the measured pressure of the point 31A to be measured is 5 grams, and the point pressure of the point 31B to be measured is 4 grams, the pressure measured by the waiting points 31A, 31B At the point of the threshold value of the measurement, the pressure calibration procedure 4B is completed; when the point pressure of the point to be measured 31A is 5 grams, and the point pressure of the point 31B to be measured is 3 grams, due to the point 31B to be measured The spotting pressure is not located in the range of the threshold value, and the control unit 23 drives the second driving device 25 to adjust the distance between the tip of the probe 221 and the corresponding point to be measured 31B until the point pressure falls. Within the range of the threshold value, the control unit 23 completes the equal pressure calibration procedure 4B.

In particular, in other embodiments of the present invention, the operator may also omit the contour adjustment procedure 4A and only use the equal pressure calibration procedure 4B to improve the efficiency of the spot measurement. In summary, it can be seen that, as shown in FIGS. 3~5, whether the horizontal positions of the plurality of points to be tested 31 on the object to be tested (eg, LED dies) are the same, or regardless of the probes 221 Whether the accuracy, the length, or the elasticity are the same, the pointing device 2 can appropriately adjust the horizontal or vertical direction of each of the probes 221 according to the magnitude of the pressure of the probes 221 in the equal pressure calibration program 4B. Positioned so that the distance between each of the probes 221 and the corresponding points 31 to be measured can be respectively maintained at an optimal initial distance, so that the probes 221 are respectively applied to the subsequent spotting process. Corresponding to the point measurement pressure of the waiting point 31 can be kept at the same or nearly the same level, so as to effectively avoid the damage of the object to be tested or the accuracy of the point measurement due to excessive or too small pressure.

The above is only the preferred embodiment of the present invention, but the scope of the claims of the present invention is not limited thereto, and according to those skilled in the art, according to the technical content disclosed in the present invention, Equivalent changes that are easily considered are within the scope of protection of the invention.

4A‧‧‧etc.

4B‧‧‧Isostatic adjustment procedure

Claims (10)

A method for adjusting a displacement distance of a probe according to a horizontal position of a plurality of points to be measured, the method is applied to a point measuring device, the measuring device comprising a carrying platform, a plurality of needle holders and a control unit, wherein The top of the carrying platform is flat with at least one object to be tested, and the loading table can be displaced by a first driving device. The object to be tested has at least a plurality of points to be tested, and the needle holder is disposed above the carrying platform. The probes can be respectively driven by a second driving device, and each of the needle holders is respectively provided with a probe, and the probe can abut against the corresponding point to be tested according to the displacement of the carrier or the needle holder. The control unit is electrically connected to the first driving device and the second driving device, respectively, so that the first driving device and the second driving device can respectively drive the corresponding displacement positions of the loading platform and the needle holders The method is such that the control unit performs the following steps: performing an equal pressure calibration procedure, driving the second driving device or the first driving device, respectively, so that the tip of the probes respectively touch the corresponding waiting point And separately a pressure sensing unit senses that the probe is applied to a corresponding one of the points to be measured; and calculates a difference between the measured pressures, and determines whether the difference is located in one of the built-in Within the threshold value range, if yes, the pressure calibration procedure is completed; otherwise, each of the second driving devices is driven to adjust the distance between the tip of each probe and the corresponding point to be measured until the difference The value falls within the threshold value and the equal pressure calibration procedure is completed. The method of claim 1, wherein before the control unit executes the equal pressure calibration procedure, a first high calibration procedure is performed first, and the high-profile calibration procedures are performed. The control unit generates corresponding calibration data according to the position of the tip of the probes captured by the at least one camera unit, and then drives the second driving devices according to the calibration data to be horizontally or The relative positions of the tips of the probes are adjusted vertically to maintain the tip positions of the probes at the same height. The method of claim 1, wherein before the control unit executes the equal pressure calibration procedure, a first calibration procedure is performed, the high calibration procedure being based on the at least one camera unit Extracting the distance between the tip of the probe and the corresponding waiting point, generating a corresponding calibration data, and driving the second driving device according to the calibration data to be horizontally or vertically The relative positions of the tips of the probes are adjusted so that the distance between the tips of the probes and the corresponding waiting points can be kept at the same distance. The method of claim 1, wherein the object to be tested is not placed on the platform, and the control unit performs a first calibration procedure before performing the equal pressure calibration procedure. After the control unit receives the sensed value generated by the pressure sensing unit, it means that the tip of the probe has been pressed against the carrying platform or a platform, and then the second driving device is driven to be horizontal The relative positions of the tips of the probes are adjusted to or vertically such that the tip positions of the probes are maintained at the same height. The method of claim 1, 2, 3 or 4, wherein the waiting point has at least one different horizontal position. A method for adjusting a displacement distance of a probe according to a horizontal position of a plurality of points to be measured, the method being applied to a point measuring device, the point measuring device comprising a bearing a loading platform, a plurality of needle holders and a control unit, wherein the top of the loading platform is flat with at least one object to be tested, and the loading platform can be displaced by a first driving device, and the object to be tested has at least a plurality of objects Each of the needle holders is disposed above the loading platform and can be respectively displaced by a second driving device. Each of the needle holders is respectively provided with a probe, and the probe can be along with the loading platform or the needle Displacement of the seat and abutting to the corresponding point to be tested, the control unit is electrically connected to the first driving device and the second driving device, respectively, so that the first driving device and the second driving device can Driving the corresponding displacement positions of the loading platform and the needle holders respectively, the method is such that the control unit performs the following steps: performing an equal pressure calibration procedure, driving the second driving devices or the first driving device, so that The probe tips of the probes respectively touch the corresponding waiting points, and respectively receive a probe pressure sensed by the pressure sensing unit and applied to one of the corresponding points to be measured; and determine each of the points Whether the pressure is built in separately Within the range of the threshold value, if yes, the pressure calibration procedure is completed; otherwise, each of the second driving devices is driven to adjust the distance between the tip of each probe and the corresponding point to be measured until Each of the point-measuring pressures falls within the range of the point-measuring threshold, and the equal-pressure calibration procedure is completed. The method of claim 6, wherein before the control unit executes the equal pressure calibration procedure, the first calibration procedure is performed first, and the high calibration procedure is obtained according to a camera unit. Positioning the tip of the probes to generate a corresponding calibration data, and driving the second drivers according to the calibration data The device adjusts the relative positions of the tips of the probes in a horizontal or vertical direction to maintain the tip positions of the probes at the same height. The method of claim 6, wherein before the control unit executes the equal pressure calibration procedure, the first calibration procedure is performed first, and the high calibration procedure is obtained according to a camera unit. A distance between the tip of the probe and the corresponding waiting point is generated, corresponding to one calibration data, and then the second driving device is driven according to the calibration data to adjust the horizontal or vertical direction The relative positions of the probe tips are such that the distance between the tip of the probe and the corresponding waiting point can be kept at the same distance. The method of claim 6, wherein the object to be tested is not placed on the platform, and the control unit performs a first-level calibration procedure before performing the equal-pressure calibration procedure. After the control unit receives the sensed value generated by the pressure sensing unit, it means that the tip of the probe has been pressed against the carrying platform or a platform, and then the second driving device is driven to be horizontal The relative positions of the tips of the probes are adjusted to or vertically such that the tip positions of the probes are maintained at the same height. The method of claim 6, 7, 8, or 9, wherein the waiting point has at least one different horizontal position.