TW201636183A - Valve device of thin film shaping device - Google Patents

Abstract

The present invention provides a valve device of thin film shaping device capable of raising the durability. The thin film shaping device uses the cooling wind from the air cooling ring to cool the melt resin, which is squeezed in a tube shape from the mold, and to cure the same to form the thin film. The valve device (9) adjusts the volume of the cooling wind blowing from the air cooling ring. The valve device (9) comprises an actuator (40) that adjusts the open degree thereof. The actuator (40) includes a telescope component (41) of proceeding telescope according to the pressure of the fluid supplied to the interior. The open degree of the valve device (9) is adjusted in accordance with the telescope scale of the telescope component (41).

Description

Valve device for film forming device

The present application claims priority based on Japanese Patent Application No. 2015-048509, filed on Jan. The entire contents of this Japanese application are incorporated herein by reference.

The present invention relates to a valve device for a film forming apparatus.

A film forming apparatus which is formed into a film by cooling and solidifying a molten resin which is tubular extruded from a mold by a cooling air from an air ring is known (for example, Patent Document 1). In the related art, a film forming apparatus that reduces the thickness deviation of the film (hereinafter referred to as "thickness unevenness") by locally controlling the amount of the cooling air blown from the air cooling ring in the circumferential direction by the valve device has been proposed. .

Patent Document 1: Japanese Laid-Open Patent Publication No. 2002-120284

The valve device of the conventional film forming apparatus usually includes a motor as a power source, and the opening degree is adjusted by the output of the motor. Therefore, air cooling A motor is disposed in the vicinity of the ring, that is, near the mold. The vicinity of the mold becomes a high temperature due to the heat for melting the resin, and therefore the temperature of the motor also becomes relatively high. Therefore, the durability of the motor and the valve device may be lowered.

The present invention has been made in view of such circumstances, and an object thereof is to provide a valve device for a film forming apparatus which can improve durability.

In order to solve the above problems, in the valve device of the film forming apparatus according to the aspect of the invention, the film forming apparatus is formed into a film by cooling and solidifying a molten resin which is extruded from a mold by a cooling air from an air cooling ring, and the valve is formed. The device adjusts the amount of cooling air blown from the air cooling ring, and the valve device is provided with an actuator that adjusts the opening thereof. The actuator includes a telescopic member that expands and contracts in accordance with the pressure of the fluid supplied to the inside. The opening degree of the valve device is adjusted corresponding to the amount of expansion and contraction of the telescopic member.

Further, any combination of the above constituent elements, the constituent elements of the present invention or the manner in which the methods, apparatuses, systems, and the like are mutually replaced can be effectively utilized as the state of the present invention.

According to the present invention, a valve device for a film forming apparatus capable of improving durability is provided.

1‧‧‧Film forming device

2‧‧‧Mold

3‧‧‧Cooling device

7‧‧‧Control device

8‧‧‧Air cooling ring

9‧‧‧ valve device

20‧‧‧ throttle components

20a, 20b‧‧‧ openings

22a, 22b, 22c, 22d‧‧‧ openings

30‧‧‧Sliding valve body

32a, 32b, 32c, 32d‧‧‧ openings

40‧‧‧Actuator

41‧‧‧Flexible members

43‧‧‧Mobile base

Fig. 1 is a view showing a schematic configuration of a film forming apparatus according to a first embodiment.

Fig. 2 is a cross-sectional view showing the cooling device of Fig. 1 and its surroundings.

Fig. 3 is a plan perspective view showing the cooling device of Fig. 1 and its periphery.

Fig. 4 is a view showing the valve device of Fig. 2;

Fig. 5 is a view showing the valve device of Fig. 2;

Fig. 6 is a view showing the valve device of Fig. 2;

Fig. 7 is a view showing the valve device of Fig. 2;

Fig. 8 is a block diagram schematically showing the function and configuration of the control device of Fig. 1.

Fig. 9 is a view showing a valve device according to a modification of the embodiment.

Fig. 10 is a view showing the valve device of the second embodiment.

Fig. 11 is a view showing the valve device of the second embodiment.

Fig. 12 is a view showing the valve device of the second embodiment.

In the following, the same or equivalent constituent elements and members are denoted by the same reference numerals, and the description thereof will be omitted as appropriate. Further, the size of the members in the respective drawings is appropriately enlarged and reduced for easy understanding. Further, in the drawings, a part of the members which are not important in explaining the embodiment will be omitted.

(First embodiment)

Fig. 1 shows a schematic configuration of a film forming apparatus 1 of the first embodiment. The film forming apparatus 1 molds a film. The film forming apparatus 1 includes a mold 2, a cooling device 3, a pair of stabilizing plates 4, a pair of pinch rolls 5, a thickness sensor 6, and a control device 7.

The mold 2 is formed into a tubular shape by a molten resin supplied from an extruder (not shown). The molten resin is extruded into a tubular shape by extruding the molten resin from the mold 2, in particular, the annular die slit 2a (Fig. 2, described later). The cooling device 3 is disposed above the mold 2. The cooling device 3 blows cooling air from the outside to the molten resin extruded from the mold 2. The molten resin is cooled and formed into a film.

The pair of stabilizing plates 4 are disposed above the cooling device 3, and guide the formed film between the pair of pinch rolls 5. The pinch roller 5 is disposed above the stabilizing plate 4, and is folded into a flat shape while pulling the guided film up. The folded film is taken up by a coiler (not shown).

The thickness sensor 6 is disposed between the cooling device 3 and the stabilizing plate 4. The thickness sensor 6 measures the thickness of the film while rotating around the tubular film. The measurement result of the thickness sensor 6 is sent to the control device 7. The control device 7 transmits a control command corresponding to the measurement result received from the thickness sensor 6 to the cooling device 3. After receiving the control command, the cooling device 3 adjusts the amount of wind of the cooling air to make the thickness unevenness small. Further, the film forming apparatus 1 is provided with a plurality of thickness sensors 6.

Fig. 2 is a cross-sectional view showing the cooling device 3 and its periphery. Fig. 3 is a plan perspective view showing the cooling device 3 and its periphery. The cooling device 3 is provided with an air cooling ring 8 and is disposed in the air cooling ring 8 and adjusted from the air A plurality of (20 in FIG. 3) valve devices 9 of the amount of cooling air blown by the cooling ring 8.

The air cooling ring 8 is formed of an annular casing that is recessed downward in the inner peripheral portion. An annular air outlet 8a having an open upper side is formed in an inner peripheral portion of the air cooling ring 8. The air outlet 8a is an annular shape centering on the central axis A, and is formed concentrically with the annular die slit 2a formed in the mold 2. In the following description, an arbitrary direction passing through the central axis A on the plane perpendicular to the central axis A is defined as a radial direction, and a circumferential direction of a circle centering on the central axis A and perpendicular to the central axis A is defined as a circumference. direction.

In the outer peripheral portion of the air cooling ring 8, a plurality of (eight in the third drawing) hose ports 8b are formed at equal intervals in the circumferential direction. A hose (not shown) is connected to each of the plurality of hose ports 8b, and the cooling air is sent from the air blower (not shown) into the air cooling ring 8 via the hose. The cooling air sent into the air cooling ring 8 is blown out from the air outlet 8a and blown onto the molten resin.

In the air passage between the air outlet 8a and the hose port 8b, a plurality of valve devices 9 are disposed without a gap in the circumferential direction. By adjusting the opening degree of each of the plurality of valve devices 9, the amount of the cooling air blown from the air outlet 8a can be adjusted. For example, by setting the opening degrees of all the valve devices 9 to be the same, the amount of the cooling air blown out from the air outlet 8a can be made uniform in the circumferential direction. Further, for example, by changing the opening degree of at least one valve device 9 to a different opening degree from the other valve device 9, the amount of the cooling air blown from the air outlet 8a can be changed in the circumferential direction. When the film is uneven in thickness, for example, the opening of the valve device 9 corresponding to the thinner portion (for example, below the thinner portion) is increased to make the molten tree below the thinner portion. The amount of air blown by the grease increases. Thereby, the thickness unevenness of the film to be formed next becomes small.

Figures 4 through 7 show one of a plurality of valve devices 9. The other valve device 9 also has the same configuration as the valve device 9 of Figs. 4 to 7 . In addition, at least one of the other valve devices 9 can also be a different type of valve device. Fig. 4 is a side view of the valve device 9, and Figs. 5 to 7 are perspective views of the valve device 9 viewed from different directions, respectively. Figs. 5 and 6 show a state in which the slide valve body 30 is located in front of the throttle member 20, and Fig. 7 shows a state in which the throttle member 20 is located in front of the slide valve body 30. The valve device 9 includes a throttle member 20, a sliding valve body 30, an actuator 40, and a regulator (not shown).

The throttle member 20 is a plate-like member that is substantially rectangular in plan view. The throttle member 20 is fixed to the air cooling ring 8 with the main faces 20a and 20b facing in the radial direction. The throttle member 20 is formed with slits (also, elongated) openings 22a to 22c that communicate the main surface 20a and the main surface 20b. The openings 22a to 22c are sequentially arranged in the short side direction. The openings 22a to 22c are formed such that their respective longitudinal directions are substantially the same as the direction orthogonal to the sliding direction D of the sliding valve body 30.

Similarly to the throttle member 20, the slide valve body 30 is a plate-like member having a substantially rectangular shape in plan view. The sliding valve body 30 is disposed such that the main faces 30a and 30b face in the radial direction. The sliding valve body 30 is disposed such that its main surface 30b faces the main surface 20a of the throttle member 20. The sliding valve body 30 receives a force from the actuator 40 and slides relative to the throttle member 20 in a state where the main surface 30b slides on the main surface 20a of the throttle member 20.

In the sliding valve body 30, slits 32a to 32c that are formed in a slit shape (that is, elongated) that communicates with the main surface 30a and the main surface 30b are formed. The openings 32a to 32c are sequentially arranged in the short side direction. The openings 32a to 32c are formed such that their longitudinal directions are substantially the same as the direction orthogonal to the sliding direction D of the sliding valve body 30, that is, the longitudinal direction of the openings 22a to 22c.

In the present embodiment, the sliding valve body 30 slides in the vertical direction. Therefore, in the present embodiment, the openings 22a to 22c of the throttle member 20 and the openings 32a to 32c of the slide valve body 30 are formed such that their longitudinal directions substantially coincide with the horizontal direction.

The actuator 40 includes a telescopic member 41, a fixed base 42, a moving base 43, two guide bars 44, two flange portions 45, two coil springs 46, and a coupling member 47. The members constituting the actuator 40 are disposed in the air cooling ring 8. The telescopic element 41 includes a bellows-shaped cylindrical portion 41a, a first base 41b and a second base 41c that respectively block the two openings of the cylindrical portion 41a. The cylindrical portion 41a, the first base 41b, and the second base 41c are formed of, for example, a metal material such as stainless steel or aluminum. The first base 41b is fixed to the fixed base 42 and the second base 41c is fixed to the movable base 43.

Fluid (for example, air) is supplied from the regulator to the inside of the telescopic element 41 via the fluid supply port 42a formed in the fixed base 42 and the supply port (not shown) formed in the first base 41b. Or pumping fluid through a regulator. Thereby, the pressure of the fluid in the telescopic member 41 changes, and the cylindrical portion 41a expands and contracts in accordance with the pressure. In addition, the expansion and contraction member 41 can be reduced by suctioning the fluid in the elastic member 41 until the pressure of the fluid in the elastic member 41 becomes equal to or lower than the atmospheric pressure. In the form, as will be described later, the telescopic member 41 is reduced by the elastic pressure of the coil spring 46.

The moving base 43 supports the telescopic member 41. Further, the moving base 43 moves up and down in accordance with the expansion and contraction of the telescopic member 41. Each of the two guide bars 44 is a columnar member that extends in a direction substantially parallel to the expansion and contraction direction of the telescopic member 41, and one end thereof is fixed to the fixed base 42. The flange portion 45 is fixed to the other end of the guide bar 44. The guide rod 44 is inserted into the movement base 43 and functions as a guide for guiding the movement of the movement base 43 in the vertical direction.

Two coil springs 46 surround the guide rod 44, respectively. One end of the coil spring 46 abuts against the moving base 43 and the other end abuts against the flange portion 45. The length of the coil spring 46 and the elastic pressure are set such that the moving base 43 can be biased even if the telescopic member 41 is in a state of being reduced to the minimum (that is, the cylindrical portion 41a is in a state of being reduced to the minimum).

The connecting member 47 connects the moving base 43 and the sliding valve body 30. Therefore, when the moving base 43 moves up and down by the expansion and contraction of the telescopic member 41, the sliding valve body 30 also moves up and down. Specifically, when the telescopic member 41 is extended, the moving base 43 moves downward, and accordingly, the sliding valve body 30 also moves downward. When the telescopic member 41 is contracted, the moving base 43 moves upward, and accordingly, the sliding valve body 30 also moves upward. In this manner, the actuator 40 moves the sliding valve body 30 up and down.

When the slide valve body 30 moves, the degree of overlap between the openings 22a to 22d of the throttle member 20 and the openings 32a to 32d of the slide valve body 30 changes as viewed in the radial direction. Specifically, the openings 22a-22d of the throttle member 20 are The openings 32a to 32d of the sliding valve body 30 are changed from the closed state in which the openings 22a to 22d of the throttle member 20 are blocked, that is, the openings 22a to 22d of the throttle member 20, and the sliding valve body 30 are closed. The state in which the openings 32a to 32d are completely overlapped, that is, the openings 22a to 22d of the throttle member 20 are completely free from clogging. The opening of the valve device 9 is adjusted in this way. In the present embodiment, the telescopic member 41 is in the fully open state when the telescopic member 41 is in the minimum state, and the telescopic member 41 is in the closed state when the elongate member 41 is in the longest state.

Fig. 8 is a block diagram schematically showing the function and configuration of the control device 7. In the various blocks shown here, the hardware can be realized by a component or a mechanical device represented by a CPU of a computer, and the software can be realized by a computer program or the like, and the functions realized by combining the functions are described here. Square. Therefore, those skilled in the art should understand that such functional blocks can be implemented in various ways by a combination of hardware and software.

The control device 7 includes a related information holding unit 60, an acquisition unit 61, a calculation unit 62, and a valve control unit 63. The related information holding unit 60 holds and associates the pressure of the fluid in the elastic member 41 with the information on the amount of expansion and contraction of the elastic member 41 when the pressure is applied. The acquisition unit 61 acquires the measurement result based on the thickness sensor 6. The calculation unit 62 grasps the thickness unevenness of the film based on the measurement result obtained by the acquisition unit 61. The calculation unit 62 calculates the opening degree of each valve device 9 so that the thickness unevenness is small. The valve control unit 63 controls each of the valve devices 9 so as to have an opening degree calculated by the calculation unit 62. Specifically, the valve control unit 63 controls the regulator so that the sliding valve body 30 of each valve device 9 is moved by a predetermined amount, that is, the telescopic member 41. The expansion is both quantitative. At this time, the valve control unit 63 refers to the related information holding unit 60 and calculates the pressure of the fluid to be supplied to the elastic member 41 in order to expand and contract the telescopic member 41.

The operation of the valve device 9 configured as above will be described.

The control device 7 grasps the thickness unevenness of the film based on the measurement result based on the thickness sensor 6, and controls the valve device 9 to make the thickness unevenness small. Each valve device 9 receives an instruction from the control device 7 to turn on/off. When an instruction to open the air passage is received, the fluid in the telescopic member 41 is sucked to lower the pressure of the air of the telescopic member 41. When the fluid is air, the pressure of the air of the telescopic member 41 can be lowered by communicating the inside of the telescopic member 41 with the atmosphere. As a result, the elastic member 41 is contracted by the elastic pressure of the coil spring 46 that biases the moving base 43 toward the telescopic member 41, and the throttle member 20 moves upward. Thereby, the ventilation path is opened. Upon receiving the instruction to reduce the opening degree of the air passage or to close the air passage, the fluid is supplied into the telescopic member 41 to increase the pressure of the fluid in the telescopic member 41. As a result, the telescopic member 41 is extended, and the throttle member 20 is moved downward. Thereby, the opening degree of the ventilation path becomes small or the ventilation path is closed.

According to the valve device 9 of the present embodiment described above, the opening degree of the valve device 9 is adjusted by the amount of expansion and contraction of the telescopic member 41 that expands and contracts in accordance with the pressure of the fluid supplied from the regulator. The regulator can be disposed at a position away from the air cooling ring 8 by a hose that is connected between the fluid supply port 42a and the fluid supply port 42a. Therefore, although the vicinity of the mold 2 becomes high temperature due to the heat for melting the resin, it is possible to prevent the regulator from becoming a high temperature. Therefore, for example, compared with when the motor is used as the power source of the opening degree of the regulating valve device 9, The durability of the valve device 9 can be increased.

Further, for example, when the motor is used as the power source for adjusting the opening degree of the valve device 9, the rotational motion is converted into a linear motion, and the sliding valve body 30 is moved by the linear motion to adjust the opening degree of the valve device 9. That is, a complicated mechanism that converts rotational motion into linear motion is required. On the other hand, according to the valve device 9 of the present embodiment, the pressure of the fluid is converted into a telescopic motion, that is, a linear motion, by the elastic member 41 having a simple structure. Therefore, the configuration of the valve device 9 can be made relatively simple.

Further, according to the valve device 9 of the present embodiment, the actuator 40 is disposed in the air cooling ring 8. Thereby, the dynamic sealing required when the actuator 40 is disposed outside the air cooling ring 8 is not required, and the manufacturing cost of the cooling device 3 can be reduced.

As described above, the vicinity of the mold 2 becomes a higher temperature due to the heat for melting the resin. Here, for example, when a general cylinder is used as an actuator, when the sliding valve body 30 is moved by the telescopic movement of the rod to adjust the opening degree of the valve device, if the fluid in the cylinder expands due to heat, there is a possibility that the rod is The amount of movement of the telescopic movement, the amount of movement of the sliding valve body, and even the adjustment of the opening degree of the valve device adversely affect. On the other hand, in the valve device 9 of the present embodiment, the actuator 40 moves the slide valve body 30 by the expansion and contraction of the telescopic member 41, thereby adjusting the opening degree of the valve device 9. In the telescopic member 41, regardless of whether or not the fluid inside thereof expands due to heat, the fluid is always supplied to or drawn from the fluid whose internal pressure becomes the pressure calculated by the control device 7. Further, the telescopic member 41 expands and contracts in accordance with the pressure of the fluid supplied to the inside. Therefore, according to the valve device 9 of the present embodiment, even if it is stretched The fluid in the contraction member 41 expands due to heat, and does not adversely affect the amount of expansion and contraction of the telescopic member 41, the amount of movement of the sliding valve body 30, and even the adjustment of the opening degree of the valve device. Therefore, the thickness precision of the film can be improved.

(Second embodiment)

The valve device of the film molding apparatus according to the second embodiment differs from the valve device 9 of the film molding apparatus 1 of the first embodiment mainly in the configuration of the actuator.

Fig. 9 to Fig. 12 show the valve device 109 of the second embodiment. Fig. 9 to Fig. 12 correspond to Fig. 4 to Fig. 7, respectively. The valve device 109 includes a throttle member 20, a sliding valve body 30, an actuator 140, and a regulator (not shown). The actuator 140 includes a first telescopic element 141 , a first fixed base 142 , a moving base 43 , two guide bars 44 , a second telescopic element 148 , and a second fixed base 149 . Each of the first telescopic element 141 and the first fixed base 142 corresponds to the telescopic element 41 and the fixed base 42 of the first embodiment.

The second telescopic element 148 includes a cylindrical portion 148a, a first base 148b, and a second base 148c. The cylindrical portion 148a, the first base 148b, and the second base 148c of the second telescopic element 148 have the same structure as the cylindrical portion 41a of the first telescopic element 141, the first base 41b, and the second base 41c. The first base 148b is fixed to the moving base 43, and the second base 148c is fixed to the second fixed base 149.

The supply port 149a formed in the second fixed base 149 and the supply port formed in the second base 148c of the second telescopic member 148 (not As shown in the figure, the fluid is supplied from the regulator to the inside of the second telescopic member 148. Thereby, the pressure of the fluid in the second telescopic element 148 changes, and the cylindrical portion expands and contracts according to the pressure.

In the present embodiment, the moving base 43 is directly coupled to the sliding valve body 30. The second fixed base 149 is fixed to the lower ends of the two guide bars 44. The second fixed base 149 supports the second telescopic member 148.

When the fluid is supplied to the first elastic member 141 to increase the pressure of the fluid in the first elastic member 141 and the fluid in the second elastic member 148 is sucked to lower the pressure of the fluid in the second elastic member 148, the first elastic member The 141 is elongated, and the second telescopic member 148 is contracted. As a result, the moving base 143 moves downward, and accordingly, the sliding valve body 30 also moves downward. On the other hand, when the fluid is supplied to the second elastic member 148 to increase the pressure of the fluid in the second elastic member 148, and the fluid in the first elastic member 141 is sucked to reduce the pressure of the fluid in the first elastic member 141, the first 2 The telescopic element 148 is elongated, and the first telescopic element 141 is contracted. As a result, the moving base 43 moves upward, and accordingly, the sliding valve body 30 also moves upward.

In the present embodiment, when the first telescopic element 141 is reduced to the minimum and the second telescopic element 148 is extended to the longest state, the first telescopic element 141 is fully opened, and the first telescopic element 141 and the second telescopic element 148 are not stretched and contracted (the first telescopic element 141 and When the second telescopic element 148 is in the neutral state, it is in a closed state. In this case, the first telescopic element 141 is always reduced, and the second telescopic element 148 is always extended, and is not switched from the extended state to the reduced state or the reduced state to the extended state. Therefore, it is possible to suppress the extension of the type of switching. The adverse effects of shrinkage control. Needless to say, the first telescopic element 141 may be extended to the longest state, and the second telescopic element 148 may be in a closed state when it is reduced to the minimum.

According to the valve device 109 of the present embodiment, the same operational effects as those of the valve device 9 of the first embodiment can be exhibited. Further, according to the valve device 109 of the present embodiment, the movement of the moving base 43 is controlled by the expansion and contraction of the two telescopic members that move the base 43. Thereby, for example, it is possible to achieve higher controllability than when the movement of the movement base 43 is controlled by the expansion and contraction of one telescopic element. As a result, the controllability of the movement of the sliding valve body 30 and the controllability of the opening degree adjustment of the valve device 9 are improved.

The configuration and operation of the flexural meshing gear device of the embodiment have been described above. Those skilled in the art can understand the embodiments as examples, and various combinations of the constituent elements can be variously modified, and such modifications are also included in the scope of the present invention.

(Modification 1)

In the first to second embodiments, the related information holding unit 60 is configured to associate the pressure of the fluid in the elastic member 41 with the information on the amount of expansion and contraction of the elastic member 41 when the pressure is applied. Keep it, but not limited to this. The related information holding unit 60 may hold information on the relationship between the pressure of the fluid in the telescopic member 41 and the amount of expansion and contraction of the telescopic member 41. For example, the related information holding unit 60 may hold a relational expression indicating the relationship between the pressure of the fluid in the elastic member 41 and the amount of expansion and contraction of the elastic member 41 when the pressure is applied. at this time, The valve control unit 63 may calculate the pressure of the fluid to be supplied to the telescopic member 41 by the governor in order to reduce the amount of expansion and contraction of the telescopic member 41.

(Modification 2)

Although not specifically described in the first to second embodiments, a heating device may be further provided in the air cooling ring 8, and the thickness unevenness of the film may be further adjusted by locally controlling the temperature of the cooling air in the circumferential direction.

(Modification 3)

In the first to second embodiments, the case where the throttle member 20 and the sliding valve body 30 are plate-shaped members has been described, but the invention is not limited thereto. At least one of the throttle member 20 and the sliding valve body 30 may be in the form of a block or other shape.

(Modification 4)

In the first to second embodiments, the slit-shaped openings formed in the throttle member 20 and the sliding valve body 30 are three, respectively, but the present invention is not limited thereto. The slit-shaped openings formed in the throttle member 20 and the sliding valve body 30 may be one, two or four or more.

(Modification 5)

In the second embodiment, the fluid is supplied into the first telescopic element 141. At the same time, the fluid is sucked from the second elastic member 148 or the fluid is supplied into the second elastic member 148, and the fluid is sucked from the first elastic member 141, that is, by changing the inside and the second of the first elastic member 141. Although the case where the amount of fluid in both of the elastic members 148 moves the moving base 43 has been described, it is not limited thereto. The moving base 43 may be moved by changing the amount of any fluid in the first telescopic member 141 or the second telescopic member 148. At this time, the other telescopic member may be supplied with a fluid that can cause the pressure of the internal fluid to be higher than the atmospheric pressure even in the state in which the elongation is the longest.

(Modification 6)

Although not specifically described in the first to second embodiments, a plurality of telescopic members may be connected in series. At this time, the amount of expansion and contraction of the entire plurality of telescopic members can be increased. Further, a plurality of telescopic members may be arranged in parallel.

Any combination of the above embodiments and modifications is also useful as an embodiment of the present invention. The new embodiment produced by the combination has the effects of the combined embodiments and modifications.

9‧‧‧ valve device

20‧‧‧ throttle components

20a‧‧‧ openings

30‧‧‧Sliding valve body

30a‧‧‧ main face

32a‧‧‧ openings

32b‧‧‧ openings

32c‧‧‧ openings

40‧‧‧Actuator

41‧‧‧Flexible members

41a‧‧‧Cylinder

41c‧‧‧2nd base

42‧‧‧Fixed base

42a‧‧‧ fluid supply port

43‧‧‧Mobile base

44‧‧‧guides

45‧‧‧Flange

46‧‧‧Helical spring

47‧‧‧Connecting components

D‧‧‧Swing direction

Claims (6)

A valve device for a film forming device, wherein the film forming device is formed into a film by cooling and solidifying a molten resin extruded from a mold by a cooling film from an air cooling ring, and the valve device adjusts cooling from the air cooling ring The air volume of the wind is characterized in that the valve device includes an actuator that adjusts an opening degree thereof, and the actuator includes a telescopic member that expands and contracts in accordance with a pressure of a fluid supplied to the inside, and the opening degree of the valve device corresponds to The amount of expansion and contraction of the telescopic member is adjusted. The valve device of the film forming apparatus according to the first aspect of the invention includes the control unit that holds information on a relationship between a pressure of a fluid supplied to the inside of the telescopic member and an amount of expansion and contraction of the telescopic member. The valve device of the film forming apparatus according to the first or second aspect of the invention, wherein the actuator includes a biasing member that biases the telescopic member toward a reduction direction of the telescopic member. The valve device of the film forming apparatus according to the first or second aspect of the invention, wherein the actuator includes: another telescopic member that biases the telescopic member toward a reduction direction of the telescopic member. A valve device for a film forming apparatus according to claim 1 or 2, wherein The aforementioned actuator is disposed in the aforementioned air cooling ring. The valve device of the film forming apparatus according to claim 1 or 2, further comprising: a throttle member fixed to the air cooling ring and having a plurality of slit-shaped openings; and a sliding valve body Moving in conjunction with expansion and contraction of the telescopic member, and having a plurality of slit-shaped openings, moving the sliding valve body to change the degree of overlap between the opening of the throttle member and the opening of the sliding valve body, thereby adjusting the valve device Opening.