TW201900381A - Film forming device including a control device and a mold device that has an inner circumference member, an outer circumference member, and an adjustment unit - Google Patents

Film forming device including a control device and a mold device that has an inner circumference member, an outer circumference member, and an adjustment unit Download PDF

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TW201900381A
TW201900381A TW106117675A TW106117675A TW201900381A TW 201900381 A TW201900381 A TW 201900381A TW 106117675 A TW106117675 A TW 106117675A TW 106117675 A TW106117675 A TW 106117675A TW 201900381 A TW201900381 A TW 201900381A
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lever
peripheral member
film forming
film
outer peripheral
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TW106117675A
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TWI755398B (en
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中野勝之
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住友重機械摩登股份有限公司
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Abstract

The present invention provides a film forming device. The film forming device of the present invention comprises: a mold device, which extrudes molten resin in a tubular shape to form a film; and a control device (7), which controls the mold device. The mold device includes: an inner circumference member defining an inner circumference of an annular discharge port; an outer circumference member surrounding the inner circumference member and defining an outer circumference of the discharge port; and an adjustment unit, which elastically deforms at least one of the inner circumference member and the outer circumference member by imposing a load thereto, so as to vary a width of the discharge port in a radial direction. The control device (7) controls the thickness of the film by the load given by the adjustment unit.

Description

薄膜成形裝置  Film forming device  

本發明係有關一種薄膜成形裝置。 The present invention relates to a film forming apparatus.

已知有一種薄膜成形裝置,係使從模具裝置的環狀的吐出口呈管狀擠出之熔融樹脂固化而成形為薄膜。以往提出的薄膜成形裝置所具備的模具裝置,係對界定環狀的吐出口的外周之外周構件利用螺栓進行按壓而讓其彈性變形,藉此使吐出口的寬度局部地變化(專利文獻1)。藉由使吐出口的寬度局部地變化,能夠在周方向上局部地控制薄膜的厚度。 There is known a film forming apparatus which is formed by solidifying a molten resin which is tubularly extruded from an annular discharge port of a die device and formed into a film. In the mold apparatus provided in the conventional film forming apparatus, the outer peripheral member of the outer peripheral opening of the annular discharge port is pressed by a bolt and elastically deformed, whereby the width of the discharge port is locally changed (Patent Document 1). . By locally changing the width of the discharge port, the thickness of the film can be locally controlled in the circumferential direction.

(先前技術文獻)  (previous technical literature)   (專利文獻)  (Patent Literature)  

專利文獻1:日本特開2012-166365號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2012-166365

在專利文獻1所記載之習知薄膜成形裝置,係對按壓外周構件之螺栓的移動量(旋入量)進行管理,從而控制 薄膜的厚度。然而,模具裝置的附近因用於讓樹脂熔融的熱而成為比較高的溫度,因此按壓外周構件之螺栓可能受該熱而熱膨脹。在管理螺栓的移動量而控制薄膜的厚度之情況下,此熱膨脹會對其精度帶來不良影響。 In the conventional film forming apparatus described in Patent Document 1, the amount of movement (the amount of screwing) of the bolt that presses the outer peripheral member is managed to control the thickness of the film. However, the vicinity of the mold device becomes a relatively high temperature due to heat for melting the resin, and thus the bolt that presses the outer peripheral member may be thermally expanded by the heat. In the case where the amount of movement of the bolt is managed to control the thickness of the film, this thermal expansion adversely affects its accuracy.

本發明係鑑於此種情形而完成者,其目的在於提供一種能夠以較高之精度來控制薄膜的厚度之薄膜成形裝置。 The present invention has been made in view of such circumstances, and an object thereof is to provide a film forming apparatus capable of controlling the thickness of a film with high precision.

為了解決上述課題,本發明的一態樣的薄膜成形裝置係具備:模具裝置,將熔融樹脂呈管狀擠出而成形為薄膜;及控制裝置,控制模具裝置。模具裝置包括:內周構件,界定圓環狀的吐出口的內周;外周構件,環繞內周構件且界定吐出口的外周;及調節部,藉由對內周構件及外周構件中的至少一方賦予荷重而讓其彈性變形,使吐出口的徑方向的寬度變化。控制裝置利用調節部所賦予之荷重來控制薄膜的厚度。 In order to solve the above problems, a film forming apparatus according to an aspect of the present invention includes a mold device that molds a molten resin into a tubular shape and forms a film, and a control device that controls the mold device. The mold apparatus includes: an inner peripheral member defining an inner circumference of the annular discharge port; an outer peripheral member surrounding the inner peripheral member and defining an outer circumference of the discharge port; and an adjustment portion by at least one of the inner circumferential member and the outer peripheral member The load is imparted and elastically deformed to change the width of the discharge port in the radial direction. The control device controls the thickness of the film by the load given by the adjustment portion.

另外,以上構成要件的任意的組合、或本發明的構成要件和表現方式在方法、裝置、系統等之間相互置換,作為本發明的態樣亦是有效的。 Further, any combination of the above constituent elements, or constituent elements and expressions of the present invention are mutually replaced by methods, apparatuses, systems, and the like, and are also effective as aspects of the present invention.

依本發明,可提供一種能夠以較高之精度來控制薄膜的厚度之薄膜成形裝置。 According to the present invention, it is possible to provide a film forming apparatus capable of controlling the thickness of a film with high precision.

1‧‧‧薄膜成形裝置 1‧‧‧Film forming device

2‧‧‧模具裝置 2‧‧‧Molding device

3‧‧‧冷卻裝置 3‧‧‧Cooling device

6‧‧‧厚度感測器 6‧‧‧ thickness sensor

7‧‧‧控制裝置 7‧‧‧Control device

10‧‧‧模具本體 10‧‧‧Mold body

12‧‧‧內周構件 12‧‧‧ inner week components

14‧‧‧外周構件 14‧‧‧peripheral components

16‧‧‧調節部 16‧‧‧Regulatory Department

80‧‧‧保持部 80‧‧‧ Keeping Department

81‧‧‧取得部 81‧‧‧Acquisition Department

82‧‧‧決定部 82‧‧‧Decision Department

83‧‧‧調節動作控制部 83‧‧‧Adjustment Action Control Department

圖1係表示第1實施形態之薄膜成形裝置的概略構成之圖。 Fig. 1 is a view showing a schematic configuration of a film forming apparatus according to a first embodiment.

圖2係表示圖1的模具裝置的上部與其周邊之剖面圖。 Figure 2 is a cross-sectional view showing the upper portion of the mold apparatus of Figure 1 and its periphery.

圖3係圖1的模具裝置的俯視圖。 3 is a top plan view of the mold apparatus of FIG. 1.

圖4係表示圖2的外周構件的上部與安裝於其之調節部之立體圖。 Fig. 4 is a perspective view showing an upper portion of the outer peripheral member of Fig. 2 and an adjusting portion attached thereto.

圖5係表示圖2的外周構件的上部與安裝於其之調節部之側視圖。 Fig. 5 is a side view showing an upper portion of the outer peripheral member of Fig. 2 and an adjusting portion attached thereto.

圖6係表示圖2的調節部之立體圖。 Fig. 6 is a perspective view showing the adjusting portion of Fig. 2;

圖7係表示圖2的調節部之立體圖。 Fig. 7 is a perspective view showing the adjusting portion of Fig. 2;

圖8(A)、(B)係用以說明調節部的動作之說明圖。 8(A) and 8(B) are explanatory views for explaining the operation of the adjustment unit.

圖9係示意表示圖1的控制裝置的功能及結構之方塊圖。 Fig. 9 is a block diagram schematically showing the function and structure of the control device of Fig. 1.

圖10係表示第2實施形態之薄膜成形裝置的調節部的結構之局部放大剖面圖。 Fig. 10 is a partially enlarged cross-sectional view showing the configuration of an adjustment portion of the film forming apparatus of the second embodiment.

圖11係表示第3實施形態之薄膜成形裝置的調節部的結構之局部放大剖面圖。 Fig. 11 is a partially enlarged cross-sectional view showing the configuration of an adjustment portion of the film forming apparatus of the third embodiment.

圖12係表示第4實施形態之薄膜成形裝置的調節部的結構之局部放大剖面圖。 Fig. 12 is a partially enlarged cross-sectional view showing the configuration of an adjustment portion of the film forming apparatus of the fourth embodiment.

圖13(A)、(B)係表示第5實施形態之薄膜成形裝置的調節部的結構之圖。 (A) and (B) are views showing the configuration of an adjustment portion of the film forming apparatus of the fifth embodiment.

圖14係表示變形例之薄膜成形裝置的模具裝置的上部與其周邊之剖面圖。 Fig. 14 is a cross-sectional view showing the upper portion of the mold device of the film forming apparatus according to the modification and its periphery.

圖15係圖14的調節部的結構之局部放大剖面圖。 Fig. 15 is a partially enlarged sectional view showing the structure of the adjusting portion of Fig. 14.

圖16係表示另一變形例之薄膜成形裝置的模具裝置的上部與其周邊之剖面圖。 Fig. 16 is a cross-sectional view showing the upper portion of the mold device of the film forming apparatus according to another modification and its periphery.

圖17係表示圖16的調節部的結構之局部放大剖面圖。 Fig. 17 is a partially enlarged cross-sectional view showing the structure of the adjusting portion of Fig. 16.

圖18係表示另一變形例之薄膜成形裝置的模具裝置的上部與其周邊之剖面圖。 Fig. 18 is a cross-sectional view showing the upper portion of the mold device of the film forming apparatus according to another modification and its periphery.

以下,對各圖式中所示之相同或同等的構成要件、構件標註相同的符號,並適當省略重複之說明。並且,為了容易理解,適當放大縮小表示各圖式中的構件的尺寸。並且,在各圖式中,省略表示說明在實施形態方面並非重要之構件的一部分。 In the following, the same or equivalent constituent elements and members are denoted by the same reference numerals, and the description thereof will be omitted as appropriate. Further, for easy understanding, the size of the members in the respective drawings is appropriately enlarged and reduced. Further, in each of the drawings, a part of the members which are not important in the embodiment will be omitted.

(第1實施形態)  (First embodiment)  

圖1表示第1實施形態之薄膜成形裝置1的概略構成。薄膜成形裝置1用於成形管狀的薄膜。薄膜成形裝置1具備:模具裝置2、冷卻裝置3、一對穩定板4、一對夾送輥5、厚度感測器6、控制裝置7。 Fig. 1 shows a schematic configuration of a film forming apparatus 1 according to the first embodiment. The film forming apparatus 1 is used to form a tubular film. The film forming apparatus 1 includes a mold device 2, a cooling device 3, a pair of stabilizing plates 4, a pair of pinch rolls 5, a thickness sensor 6, and a control device 7.

模具裝置2將由擠製機(未圖示)供給之熔融樹脂成形為管狀。尤其,模具裝置2藉由從環狀的狹縫18(圖2 中後述)擠出熔融樹脂來將熔融樹脂成形為管狀。冷卻裝置3配置於模具裝置2的上方。相對於從模具裝置2所擠出之熔融樹脂,冷卻裝置3從外側噴吹冷卻風。熔融樹脂被冷卻而成形為薄膜。 The mold device 2 forms a molten resin supplied from an extruder (not shown) into a tubular shape. In particular, the mold apparatus 2 forms the molten resin into a tubular shape by extruding the molten resin from the annular slit 18 (described later in FIG. 2). The cooling device 3 is disposed above the mold device 2. The cooling device 3 blows the cooling air from the outside with respect to the molten resin extruded from the mold device 2. The molten resin is cooled to be formed into a film.

一對穩定板4配置於冷卻裝置3的上方,且向一對夾送輥5之間引導所成形之薄膜。夾送輥5配置於穩定板4的上方,將被引導之薄膜往上拉並將其扁平地折疊。折疊後之薄膜藉由捲繞機(未圖示)進行捲繞。 The pair of stabilizing plates 4 are disposed above the cooling device 3, and guide the formed film between the pair of pinch rolls 5. The pinch roller 5 is disposed above the stabilizing plate 4, pulls the guided film up and folds it flat. The folded film is wound by a winder (not shown).

厚度感測器6配置於冷卻裝置3與穩定板4之間。厚度感測器6繞著管狀的薄膜轉動並測定薄膜的厚度。厚度感測器6所產生之測定結果被發送至控制裝置7。控制裝置7向模具裝置2發送與從厚度感測器6接收之測定結果相應之控制指令。模具裝置2接收該控制指令,以厚度的不均變小之方式,調節狹縫18(尤其其吐出口)的寬度。 The thickness sensor 6 is disposed between the cooling device 3 and the stabilizing plate 4. The thickness sensor 6 is rotated about the tubular film and the thickness of the film is measured. The measurement result generated by the thickness sensor 6 is sent to the control device 7. The control device 7 transmits a control command corresponding to the measurement result received from the thickness sensor 6 to the mold device 2. The mold device 2 receives the control command to adjust the width of the slit 18 (especially its discharge port) in such a manner that the thickness unevenness becomes small.

圖2係表示模具裝置2與其周邊之剖面圖。圖3係模具裝置2的俯視圖。圖3中,省略冷卻裝置3的表示。 Fig. 2 is a cross-sectional view showing the mold device 2 and its periphery. 3 is a plan view of the mold device 2. In Fig. 3, the representation of the cooling device 3 is omitted.

冷卻裝置3具備空氣冷卻環8及環狀的整流構件9。空氣冷卻環8係內周部向下方凹陷之環狀的殼體。在空氣冷卻環8的內周部形成有在上側開口之環狀的吹出口8a。尤其,吹出口8a形成為與以中心軸A為中心之環狀的狹縫18同心。 The cooling device 3 includes an air cooling ring 8 and an annular flow regulating member 9. The air cooling ring 8 is an annular casing that is recessed downward in the inner peripheral portion. An annular air outlet 8a that is open on the upper side is formed in the inner peripheral portion of the air cooling ring 8. In particular, the air outlet 8a is formed concentrically with the annular slit 18 centered on the central axis A.

另外,在以下的說明,將與中心軸A平行之方向設為軸方向,將在與中心軸A垂直之平面上通過中心軸A之 任意的方向設為半徑方向,將在徑方向上接近中心軸A之一側設為內周側,將遠離中心軸A之一方設為外周側,將在與中心軸A垂直之平面上沿著以中心軸A為中心之圓的圓周之方向設為周方向。 In the following description, the direction parallel to the central axis A is referred to as the axial direction, and the arbitrary direction of the central axis A on the plane perpendicular to the central axis A is set to the radial direction, and the radial direction is close to the center. One side of the axis A is set as the inner peripheral side, and one side away from the central axis A is set as the outer peripheral side, and the direction of the circumference of the circle centered on the central axis A on the plane perpendicular to the central axis A is set as the circumference. direction.

在空氣冷卻環8的外周部,在周方向上等間隔地形成有複數個軟管口8b。在複數個軟管口8b的每一個上連接有軟管(未圖示),冷卻風經由該軟管從鼓風機(未圖示)送入空氣冷卻環8內。送入空氣冷卻環8內之冷卻風從吹出口8a吹出而噴吹於熔融樹脂。 In the outer peripheral portion of the air cooling ring 8, a plurality of hose ports 8b are formed at equal intervals in the circumferential direction. A hose (not shown) is connected to each of the plurality of hose ports 8b, and the cooling air is sent into the air cooling ring 8 from the air blower (not shown) via the hose. The cooling air sent into the air cooling ring 8 is blown out from the air outlet 8a and blown onto the molten resin.

整流構件9以包圍吹出口8a之方式配置於空氣冷卻環8內。整流構件9對送入空氣冷卻環8內之冷卻風進行整流。藉此,冷卻風在周方向上以均勻的流量、風速從吹出口8a吹出。 The flow regulating member 9 is disposed in the air cooling ring 8 so as to surround the air outlet 8a. The flow regulating member 9 rectifies the cooling air sent into the air cooling ring 8. Thereby, the cooling air is blown out from the air outlet 8a at a uniform flow rate and wind speed in the circumferential direction.

模具裝置2具備:模具本體10、內周構件12、外周構件14及複數個(在此為32個)調節部16。內周構件12係載置於模具本體10的上表面之大致圓柱狀的構件。外周構件14係環狀的構件,且環繞內周構件12。在內周構件12與外周構件14之間,形成有呈環狀且朝上下方向延伸之狹縫18。熔融樹脂朝向上側流經該狹縫18,且熔融樹脂從狹縫18的吐出口(亦即上端開口)18a擠出,在冷卻裝置3中進行冷卻,從而形成有與吐出口18a的寬度相應之厚度的薄膜。在模具本體10的外周安裝有複數個加熱器56。並且,在外周構件14的下部(具體而言為後述的大徑部27)的外周亦安裝有加熱器56。模具本體 10及外周構件14藉由加熱器56加熱為所需的溫度。藉此,能夠將流經模具裝置2的內部之熔融樹脂保持為適當的溫度及熔融狀態。 The mold apparatus 2 includes a mold main body 10, an inner peripheral member 12, an outer peripheral member 14, and a plurality of (here, 32) adjustment portions 16. The inner peripheral member 12 is a substantially cylindrical member placed on the upper surface of the mold body 10. The outer peripheral member 14 is an annular member and surrounds the inner peripheral member 12. A slit 18 that is annular and extends in the vertical direction is formed between the inner peripheral member 12 and the outer peripheral member 14. The molten resin flows through the slit 18 toward the upper side, and the molten resin is extruded from the discharge port (that is, the upper end opening) 18a of the slit 18, and is cooled in the cooling device 3 to be formed to correspond to the width of the discharge port 18a. Thick film. A plurality of heaters 56 are mounted on the outer circumference of the mold body 10. Further, a heater 56 is also attached to the outer periphery of the lower portion of the outer peripheral member 14 (specifically, the large diameter portion 27 to be described later). The mold body 10 and the peripheral member 14 are heated to a desired temperature by the heater 56. Thereby, the molten resin flowing through the inside of the mold device 2 can be maintained at an appropriate temperature and a molten state.

複數個調節部16以圍繞外周構件14的上端側之方式在周方向上大致無間隙地配置。尤其,調節部16以懸臂狀安裝於外周構件14。在複數個調節部16的上方固定著冷卻裝置3。複數個調節部16分別能夠對外周構件14賦予向徑方向內側的按壓荷重或向徑方向外側的拉伸荷重。因此,藉由調節複數個調節部16,能夠在周方向上局部性地調整吐出口18a的寬度,且能夠在周方向上局部地控制薄膜的厚度。在薄膜中產生厚度的不均之情況下,例如,從與壁厚較薄之部分對應(例如位於壁厚較薄之部分的下方)之調節部16對外周構件14賦予拉伸荷重,加大壁厚較薄之部分的下方的吐出口18a的間隙。藉此,使薄膜厚度的不均變小。 The plurality of adjustment portions 16 are arranged substantially without a gap in the circumferential direction so as to surround the upper end side of the outer peripheral member 14. In particular, the adjustment portion 16 is attached to the outer peripheral member 14 in a cantilever shape. The cooling device 3 is fixed above the plurality of adjustment portions 16. Each of the plurality of adjustment portions 16 can provide the outer peripheral member 14 with a pressing load on the inner side in the radial direction or a tensile load on the outer side in the radial direction. Therefore, by adjusting the plurality of adjustment portions 16, the width of the discharge port 18a can be locally adjusted in the circumferential direction, and the thickness of the film can be locally controlled in the circumferential direction. In the case where unevenness in thickness occurs in the film, for example, the adjustment portion 16 corresponding to a portion having a thin wall thickness (for example, located below a portion having a thin wall thickness) is given a tensile load to the outer peripheral member 14, and is enlarged. A gap between the discharge port 18a below the portion having a thin wall thickness. Thereby, the unevenness of the film thickness is made small.

圖4、圖5係表示外周構件14的上部與安裝於其之調節部16之立體圖及側視圖。圖4、圖5中,僅表示1個調節部16,且省略剩餘的調節部16的表示。圖6、圖7係表示調節部16之立體圖。圖7中,表示拆卸一對支撐構件30的一方後之狀態。 4 and 5 are a perspective view and a side view showing the upper portion of the outer peripheral member 14 and the adjusting portion 16 attached thereto. In FIGS. 4 and 5, only one adjustment unit 16 is shown, and the representation of the remaining adjustment unit 16 is omitted. 6 and 7 are perspective views showing the adjustment unit 16. Fig. 7 shows a state in which one of the pair of support members 30 is detached.

外周構件14的上部係具有:小徑部25,形成於上端;中徑部26,在小徑部25的下方形成為比小徑部25更大之直徑;及大徑部27,在中徑部26的下方形成為比中徑部26更大之直徑。小徑部25具有撓性唇部22。撓 性唇部22係指比沿著周方向設置之凹狀的缺口部20更靠上側的小徑部25的部分。撓性唇部22以缺口部20為邊界而發生彈性變形。撓性唇部22包括:圓筒狀的本體部28、以及從本體部28向徑方向外側突出之環狀的突出環繞部29。 The upper portion of the outer peripheral member 14 has a small diameter portion 25 formed at the upper end, a middle diameter portion 26 formed to have a larger diameter than the small diameter portion 25 below the small diameter portion 25, and a large diameter portion 27 at the middle diameter. The lower portion of the portion 26 is formed to have a larger diameter than the intermediate diameter portion 26. The small diameter portion 25 has a flexible lip portion 22. The flexible lip portion 22 is a portion of the small diameter portion 25 that is located above the concave notch portion 20 provided along the circumferential direction. The flexible lip portion 22 is elastically deformed by the notch portion 20 as a boundary. The flexible lip portion 22 includes a cylindrical main body portion 28 and an annular projecting surrounding portion 29 that protrudes outward in the radial direction from the main body portion 28.

調節部16包括:一對支撐構件30,安裝於外周構件14;轉動軸32,固定於一對支撐構件30;槓桿34,被支撐為能夠以轉動軸32為支點而轉動;動作桿36,接受槓桿34所致之旋轉力而沿軸線方向動作;連結構件38,沿軸線方向連結動作桿36與撓性唇部22;軸承構件40,將動作桿可沿軸線方向滑動地支撐;及致動器24,對槓桿34賦予旋轉力。 The adjusting portion 16 includes a pair of supporting members 30 attached to the outer peripheral member 14 and a rotating shaft 32 fixed to the pair of supporting members 30. The lever 34 is supported to be rotatable with the rotating shaft 32 as a fulcrum; the operating lever 36 accepts a rotation force due to the lever 34 moves in the axial direction; the coupling member 38 connects the actuating lever 36 and the flexible lip 22 in the axial direction; the bearing member 40 supports the actuating lever in the axial direction; and the actuator 24, imparting a rotational force to the lever 34.

一對支撐構件30形成為平板狀,且以彼此平行之方式利用螺絲固定於外周構件14。在一對支撐構件30之間設置有用以讓槓桿34介入之空間。軸承構件40形成為長方體狀,且在支撐構件30的徑方向內側利用螺絲固定於外周構件14。在軸承構件40上形成有貫穿徑方向之插穿孔42。插穿孔42的內周面構成所謂滑動軸承(無供油型的軸承),且將動作桿36可滑動地支撐。 The pair of support members 30 are formed in a flat plate shape, and are fixed to the outer peripheral member 14 by screws in parallel with each other. A space is provided between the pair of support members 30 to allow the lever 34 to intervene. The bearing member 40 is formed in a rectangular parallelepiped shape, and is fixed to the outer peripheral member 14 by screws at the inner side in the radial direction of the support member 30. An insertion hole 42 penetrating in the radial direction is formed in the bearing member 40. The inner peripheral surface of the insertion hole 42 constitutes a so-called sliding bearing (a bearing without oil supply type), and the operating rod 36 is slidably supported.

轉動軸32以其軸朝向水平方向且與徑方向大致正交之方式固定於一對支撐構件30。 The rotating shaft 32 is fixed to the pair of supporting members 30 such that its axis faces the horizontal direction and is substantially orthogonal to the radial direction.

動作桿36形成為具有段差之圓柱狀,且其中間部插穿於軸承構件40的插穿孔42。在動作桿36的徑方向外側設置有縮徑部44。如後所述,縮徑部44可發揮與槓桿 34的連結部之功能。在動作桿36的徑方向內側設置有凹狀的卡合部46。如後所述,卡合部46可發揮與連結構件38的連接部之功能。撓性唇部22的突出環繞部29的外周面(以下,稱為“受壓面23”)與動作桿36的前端面對置。 The action lever 36 is formed in a cylindrical shape having a step, and a middle portion thereof is inserted through the insertion hole 42 of the bearing member 40. A reduced diameter portion 44 is provided on the outer side in the radial direction of the operating lever 36. As will be described later, the reduced diameter portion 44 functions as a joint portion with the lever 34. A concave engaging portion 46 is provided on the inner side in the radial direction of the operating lever 36. As will be described later, the engaging portion 46 can function as a connecting portion with the connecting member 38. The outer peripheral surface (hereinafter referred to as "pressure receiving surface 23") of the protruding surrounding portion 29 of the flexible lip portion 22 faces the front end of the operating lever 36.

從縱剖面觀察時連結構件38形成為分叉形狀。具體而言,在連結構件38,在軸方向上與外周構件14對置之面上設置有向下側突出之卡合部48、50。卡合部48與動作桿36的卡合部46呈大致互補形狀。並且,在撓性唇部22的突出環繞部29形成有朝軸方向下方凹陷之環狀的卡合槽52。卡合部50與該卡合槽52呈大致互補形狀。 The connecting member 38 is formed in a bifurcated shape when viewed in a longitudinal section. Specifically, in the connecting member 38, the engaging portions 48 and 50 projecting downward are provided on the surface facing the outer peripheral member 14 in the axial direction. The engaging portion 48 has a substantially complementary shape with the engaging portion 46 of the operating lever 36. Further, an annular engagement groove 52 that is recessed downward in the axial direction is formed in the protruding surrounding portion 29 of the flexible lip portion 22. The engaging portion 50 and the engaging groove 52 have a substantially complementary shape.

以卡合部48卡合在卡合部46且卡合部50卡合在卡合槽52之方式將動作桿36與連結構件38利用螺絲固定。卡合部48與卡合部46的彼此的對置面設為錐面。藉此,隨著鎖緊螺絲54,使動作桿36的前端面緊壓於撓性唇部22的受壓面23,而使動作桿36與撓性唇部22牢牢固定在一起。藉由連結構件38的卡合部50與動作桿36的前端部夾住撓性唇部22的一部分。藉此,使動作桿36在其軸線方向上與撓性唇部22連接。 The actuating lever 36 and the connecting member 38 are screwed by the engaging portion 48 being engaged with the engaging portion 46 and the engaging portion 50 being engaged with the engaging groove 52. The opposing surface of the engaging portion 48 and the engaging portion 46 is a tapered surface. Thereby, with the locking screw 54, the front end surface of the actuating lever 36 is pressed against the pressure receiving surface 23 of the flexible lip 22, and the actuating lever 36 and the flexible lip 22 are firmly fixed together. A part of the flexible lip portion 22 is sandwiched by the engaging portion 50 of the connecting member 38 and the front end portion of the operating lever 36. Thereby, the actuating lever 36 is connected to the flexible lip 22 in the axial direction thereof.

槓桿34具有沿徑方向延伸之長條板狀的本體60,其一端部是藉由轉動軸32可轉動地支撐。槓桿34設置成,在非動作的狀態下,使本體60和動作桿36大致平行。並且,以從本體60的一端部朝與該本體60的軸線垂直的方向延伸之方式設置有分叉形狀的連結部62。亦即,連結 部62由一對連結片64構成,且構成為使其等的間隔比動作桿36的縮徑部44的外徑稍大,其等的寬度比縮徑部44的長度稍小。藉由此種結構,以連結部62嵌合在縮徑部44之態樣使槓桿34與動作桿36互相連結。 The lever 34 has a long plate-like body 60 extending in the radial direction, and one end portion thereof is rotatably supported by the rotating shaft 32. The lever 34 is disposed such that the body 60 and the actuating lever 36 are substantially parallel in a non-operating state. Further, a branching portion 62 having a bifurcated shape is provided so as to extend from one end portion of the main body 60 in a direction perpendicular to the axis of the main body 60. In other words, the connecting portion 62 is constituted by the pair of connecting pieces 64, and is configured such that the interval therebetween is slightly larger than the outer diameter of the reduced diameter portion 44 of the operating lever 36, and the width thereof is slightly smaller than the length of the reduced diameter portion 44. . With such a configuration, the lever 34 and the actuating lever 36 are coupled to each other with the connecting portion 62 fitted to the reduced diameter portion 44.

另外,只要構成為使槓桿34的旋轉力直接賦予動作桿36即可,並不限定於本實施形態。例如,連結部62亦可以構成為,不從本體60的軸線朝垂直方向延伸。本體60的軸線與連結部62的延伸方向也可以呈銳角,或者呈鈍角。並且槓桿34可以設為,在非動作的狀態下,使本體60不與動作桿36平行。 In addition, the configuration is not limited to the present embodiment as long as the rotational force of the lever 34 is directly applied to the operating lever 36. For example, the connecting portion 62 may be configured not to extend in the vertical direction from the axis of the body 60. The axis of the body 60 and the extending direction of the connecting portion 62 may also be acute or obtuse. Further, the lever 34 may be such that the body 60 is not parallel to the operating lever 36 in a non-operating state.

致動器24在本實施形態中係氣壓驅動式,且包括:藉由壓縮空氣的供排而動作之兩組的波紋管70、72和波紋管71、73、第1基座75、配置於第1基座75的軸方向下側之第2基座76、及4根連結棒77。第1基座75與第2基座76是在軸方向上分開配置,且藉由4根連結棒77連結。在槓桿34與第1基座75之間配置有波紋管70、72,且在槓桿34與第2基座之間配置有波紋管71、73。亦即,槓桿34的成為施力點之端部,是以被夾在波紋管70、72和波紋管71、73之間之方式被支撐。藉由對波紋管70、72或波紋管71、73的一方供給壓縮空氣,使槓桿34朝圖中順時針或逆時針方向被旋轉驅動。 In the present embodiment, the actuator 24 is of a pneumatic drive type, and includes two sets of bellows 70 and 72, bellows 71 and 73, and a first base 75 that are operated by supply and discharge of compressed air, and are disposed in The second base 76 on the lower side in the axial direction of the first base 75 and the four connecting rods 77 are provided. The first pedestal 75 and the second pedestal 76 are disposed apart from each other in the axial direction, and are connected by four connecting rods 77. Bellows 70 and 72 are disposed between the lever 34 and the first base 75, and bellows 71 and 73 are disposed between the lever 34 and the second base. That is, the end portion of the lever 34 that becomes the point of application is supported so as to be sandwiched between the bellows 70, 72 and the bellows 71, 73. By supplying compressed air to one of the bellows 70, 72 or the bellows 71, 73, the lever 34 is rotationally driven in the clockwise or counterclockwise direction in the drawing.

圖5中,若藉由壓縮空氣的供給對波紋管70、72賦予壓力而使波紋管70、72伸長,槓桿34朝圖中逆時針方向轉動,其旋轉力轉換為朝向動作桿36的軸線方向左側 (亦即徑方向外側)的力。其結果,對於撓性唇部22賦予拉伸荷重,使對應之(亦即該調節部16的徑方向內側的)狹縫18的吐出口18a的部分的間隙朝增大之方向變化。另一方面,若藉由壓縮空氣的供給對波紋管71、73賦予壓力而使波紋管71、73伸長,槓桿34朝圖中順時針方向轉動,其旋轉力轉換為朝向動作桿36的軸線方向右側(亦即徑方向內側)的力。其結果,對於撓性唇部22賦予按壓荷重,使對應之狹縫18的部分的間隙朝縮小之方向變化。 In Fig. 5, when the bellows 70, 72 are extended by applying pressure to the bellows 70, 72 by the supply of compressed air, the lever 34 is rotated counterclockwise in the drawing, and the rotational force is converted to the axial direction of the operating lever 36. The force on the left side (ie, the outer side in the radial direction). As a result, the tensile load is applied to the flexible lip portion 22, and the gap of the portion corresponding to the discharge port 18a of the slit 18 (that is, the inner side in the radial direction of the adjustment portion 16) is changed in the increasing direction. On the other hand, when the bellows 71, 73 are extended by applying pressure to the bellows 71, 73 by the supply of compressed air, the lever 34 is rotated clockwise in the drawing, and the rotational force is converted to the axial direction of the operating lever 36. The force on the right side (ie, the inner side in the radial direction). As a result, the pressing load is applied to the flexible lip portion 22, and the gap of the portion corresponding to the slit 18 is changed in the direction of reduction.

為了實現此種氣壓驅動,壓縮空氣從未圖示的壓力調整裝置經由形成於第1基座75之供給路75a或供給於第2基座76之供給路76a而被供給。壓力調整裝置根據來自調節動作控制部83(後述)的控制指令,控制波紋管70~73內的壓力。 In order to realize such air pressure driving, compressed air is supplied from a pressure adjusting device (not shown) via a supply path 75a formed in the first susceptor 75 or a supply path 76a supplied to the second susceptor 76. The pressure adjusting device controls the pressure in the bellows 70 to 73 in accordance with a control command from the adjustment operation control unit 83 (described later).

圖8係用以說明調節部16的動作之說明圖。圖8(A)表示調節部16的中立狀態(波紋管70~73均為非動作的狀態),圖4(B)表示調節部16的擴開動作狀態(僅波紋管70、72動作之狀態)。 FIG. 8 is an explanatory diagram for explaining the operation of the adjustment unit 16. 8(A) shows the neutral state of the adjustment unit 16 (the bellows 70 to 73 are in a non-operating state), and FIG. 4(B) shows the expanded operation state of the adjustment unit 16 (only the states of the bellows 70 and 72 are operated). ).

藉由調節部16,使槓桿34的旋轉力在作用點P上可直接賦予動作桿36。亦即,槓桿34的旋轉力作為動作桿36的軸線方向的力而賦予撓性唇部22。此時,動作桿36藉由外周構件14而被穩定地支撐,因此該軸線方向的力可效率良好地傳遞至撓性唇部22。其結果,能夠讓用以調整內周構件12與外周構件14之間的間隙之驅動力有效 地起作用。 By the adjustment portion 16, the rotational force of the lever 34 can be directly applied to the action lever 36 at the point of action P. That is, the rotational force of the lever 34 is imparted to the flexible lip portion 22 as a force in the axial direction of the operating lever 36. At this time, since the actuating lever 36 is stably supported by the outer peripheral member 14, the force in the axial direction can be efficiently transmitted to the flexible lip portion 22. As a result, the driving force for adjusting the gap between the inner peripheral member 12 and the outer peripheral member 14 can be effectively functioned.

本實施形態中,如圖8(A)所示構成為,使連結槓桿34與動作桿36的連接點(槓桿34的作用點P)和轉動軸32(槓桿34的支點)之直線L1與動作桿36的軸線L2正交。藉此,以轉動軸32為中心而通過作用點P之假想圓C的切線方向與動作桿36的軸線方向一致。 In the present embodiment, as shown in Fig. 8(A), the connection point of the connection lever 34 and the operating lever 36 (the point of action P of the lever 34) and the line L1 of the rotating shaft 32 (the fulcrum of the lever 34) are configured. The axis L2 of the rod 36 is orthogonal. Thereby, the tangential direction of the virtual circle C passing through the action point P around the rotation axis 32 coincides with the axial direction of the operating lever 36.

因此,如圖8(B)所示,槓桿34的旋轉力的作用點P上的方向與動作桿36的軸線方向一致。其結果,槓桿34的旋轉力就那樣成為動作桿36的軸線方向的驅動力,能夠最大限度地提高力的傳遞效率。亦即,能夠讓使撓性唇部22進行擴開動作時的致動器24的驅動力極有效率地作用(參照圖中粗線箭頭)。 Therefore, as shown in FIG. 8(B), the direction of the action point P of the rotational force of the lever 34 coincides with the axial direction of the operating lever 36. As a result, the rotational force of the lever 34 becomes the driving force in the axial direction of the operating lever 36, and the force transmission efficiency can be maximized. In other words, the driving force of the actuator 24 when the flexible lip portion 22 is expanded can be efficiently operated (see a thick arrow in the drawing).

雖省略圖示,但是在調節部16的縮窄動作狀態(僅波紋管71、73動作之狀態)下,只是與圖8(B)中的力的方向相反,槓桿34的旋轉力的作用點P上的方向與動作桿36的軸線方向仍會一致。其結果,與擴開動作時同樣地,槓桿34的旋轉力直接成為動作桿36的軸線方向的驅動力,且能夠最大限度地提高力的傳遞效率。亦即,藉由調節部16,能夠讓用以調整狹縫18的吐出口18a的間隔之驅動力有效率地作用。 Although not shown in the figure, in the narrowed operation state of the adjustment portion 16 (only the bellows 71 and 73 are operated), only the direction of the force in FIG. 8(B) is opposite, and the rotational force of the lever 34 acts. The direction on P still coincides with the axial direction of the action lever 36. As a result, similarly to the case of the expansion operation, the rotational force of the lever 34 directly becomes the driving force in the axial direction of the operating lever 36, and the force transmission efficiency can be maximized. In other words, the adjustment portion 16 can effectively act to drive the driving force for adjusting the interval of the discharge port 18a of the slit 18.

另外,只要構成為使槓桿34的旋轉力直接賦予動作桿36即可,並不限定於本實施形態。例如亦可構成為,使連結部62的延伸方向(連結轉動軸32與作用點P之方向)與動作桿36的軸線方向呈銳角或鈍角之結果,而使 槓桿34的旋轉力的作用點P上的方向(為方便起見,也稱為“旋轉力作用方向”)與動作桿36的軸線方向(為方便起見,也稱為“軸線力作用方向”)不一致。此情況下,可以是本體60與動作桿36平行,且本體60的軸線與連結部62的延伸方向呈銳角或鈍角者。或者可以是,本體60的軸線與連結部62的延伸方向呈直角,且本體60與動作桿36非平行者。或者可以是,本體60的軸線與連結部62的延伸方向呈銳角或鈍角,且本體60與動作桿36非平行者。此外,作為本體60,亦可以採用在至少一部分具有彎折部或彎曲部者(不一定能夠界定軸線之結構)。 In addition, the configuration is not limited to the present embodiment as long as the rotational force of the lever 34 is directly applied to the operating lever 36. For example, the direction in which the connecting portion 62 extends (the direction in which the rotating shaft 32 and the point of action P are connected) and the axial direction of the operating lever 36 are at an acute angle or an obtuse angle, and the point of action of the rotational force of the lever 34 can be made. The upward direction (also referred to as "rotational force acting direction" for convenience) is inconsistent with the axial direction of the action lever 36 (also referred to as "axial force acting direction" for convenience). In this case, the body 60 may be parallel to the actuating lever 36, and the axis of the body 60 may be at an acute or obtuse angle with the extending direction of the connecting portion 62. Alternatively, the axis of the body 60 may be at a right angle to the direction in which the connecting portion 62 extends, and the body 60 may be non-parallel to the operating rod 36. Alternatively, the axis of the body 60 may be at an acute or obtuse angle with the direction in which the connecting portion 62 extends, and the body 60 and the actuating rod 36 may be non-parallel. Further, as the body 60, a structure having at least a part having a bent portion or a bent portion (which does not necessarily define an axis) may be employed.

圖9係示意表示控制裝置7的功能及結構之方塊圖。在此所示之各方塊在硬體上能夠由以計算機的CPU為代表之元件或機械裝置來實現,在軟體上能夠由計算機程式等來實現,在此,描繪藉由其等的整合來實現之功能方塊。因此,本領域技術人員能夠理解,這些功能方塊可藉由硬體、軟體的組合而以各種形式實現。 Fig. 9 is a block diagram schematically showing the function and structure of the control device 7. The blocks shown here can be realized by hardware or a device represented by a CPU of a computer, and can be realized by a computer program or the like on a software. Here, the drawing is realized by integration of the same. Function block. Therefore, those skilled in the art can understand that these functional blocks can be implemented in various forms by a combination of hardware and software.

控制裝置7包括:保持部80、取得部81、決定部82及調節動作控制部83。取得部81取得厚度感測器6所產生之測定結果。保持部80將薄膜的厚度與調節部16應施加於外周構件14之荷重建立對應關聯而予以保持。更具體而言,保持部80將薄膜的厚度與為了使具有該厚度之薄膜成為目標的厚度而調節部16應施加於外周構件14之荷重建立對應關聯而予以保持。 The control device 7 includes a holding unit 80, an acquisition unit 81, a determination unit 82, and an adjustment operation control unit 83. The acquisition unit 81 acquires the measurement result generated by the thickness sensor 6. The holding portion 80 holds the thickness of the film in association with the load to be applied to the outer peripheral member 14 by the adjusting portion 16. More specifically, the holding portion 80 holds the thickness of the film in association with the load applied to the outer peripheral member 14 by the adjustment portion 16 in order to make the thickness of the film having the thickness targeted.

決定部82決定為了縮小厚度的不均而各調節部16應對外周構件14賦予之荷重。尤其,決定部82參照藉由厚度感測器6所測定之厚度與保持部80,而決定應向外周構件14賦予之荷重。並且,決定部82為了使所決定之荷重賦予外周構件14,係算出要將調節部16的波紋管70~73的壓力控制為多少。調節動作控制部83以波紋管70~73的壓力成為藉由決定部82所算出之壓力之方式,對壓力調整裝置發送控制指令。 The determination unit 82 determines the load applied to the outer peripheral member 14 by each of the adjustment units 16 in order to reduce the thickness unevenness. In particular, the determination unit 82 refers to the thickness measured by the thickness sensor 6 and the holding portion 80, and determines the load to be applied to the outer peripheral member 14. Further, in order to give the determined load to the outer peripheral member 14, the determining unit 82 calculates how much the pressure of the bellows 70 to 73 of the adjusting unit 16 is to be controlled. The adjustment operation control unit 83 transmits a control command to the pressure adjustment device such that the pressure of the bellows 70 to 73 is the pressure calculated by the determination unit 82.

對如上構成之薄膜成形裝置1的動作進行說明。 The operation of the film forming apparatus 1 configured as above will be described.

控制裝置7利用厚度感測器6所產生之測定結果來掌握薄膜的厚度的不均,且以縮小該厚度的不均之方式控制模具裝置2的各調節部16。在控制裝置7要對調節部16賦予按壓荷重之情況下,係提高調節部16的波紋管71、73的壓力而使槓桿34朝順時針方向轉動。並且,在控制裝置7要對調節部16賦予拉伸荷重之情況下,提高調節部16的波紋管70、72的壓力而使槓桿34朝逆時針方向轉動。 The control device 7 grasps the unevenness of the thickness of the film by the measurement result generated by the thickness sensor 6, and controls each of the adjustment portions 16 of the mold device 2 so as to reduce the unevenness of the thickness. When the control device 7 is to apply a pressing load to the adjustment portion 16, the pressure of the bellows 71, 73 of the adjustment portion 16 is increased to rotate the lever 34 in the clockwise direction. Further, when the control device 7 is to apply the tensile load to the adjustment portion 16, the pressure of the bellows 70, 72 of the adjustment portion 16 is increased to rotate the lever 34 in the counterclockwise direction.

依據以上所說明之本實施形態之薄膜成形裝置1,按照厚度感測器6所測定之薄膜的厚度,來決定調節部16應施加於外周構件14之荷重。在此,模具裝置2的周邊因用以讓樹脂熔融之熱而變為比較高的溫度,因此動作桿36、槓桿34受該熱而熱膨脹。因此,例如根據所測定之薄膜的厚度而以動作桿36的位移量成為所期望的值之方式進行管理,從而控制薄膜的厚度之情況下,可能會對其 精度帶來不良影響。與此相對,本實施形態中,根據所測定之薄膜的厚度,以動作桿36(亦即調節部16)應施加於外周構件14之荷重成為所期望的值之方式進行管理,從而控制薄膜的厚度。因此,即使動作桿36、槓桿34因熱而膨脹,亦能夠以較高精度來控制薄膜的厚度。 According to the film forming apparatus 1 of the present embodiment described above, the load applied to the outer peripheral member 14 by the adjusting portion 16 is determined in accordance with the thickness of the film measured by the thickness sensor 6. Here, since the periphery of the mold device 2 is heated to a relatively high temperature by the heat for melting the resin, the operating lever 36 and the lever 34 are thermally expanded by the heat. Therefore, for example, depending on the thickness of the film to be measured, the amount of displacement of the operating rod 36 is managed to a desired value, and when the thickness of the film is controlled, the accuracy may be adversely affected. On the other hand, in the present embodiment, the thickness of the film to be measured is controlled so that the load applied to the outer peripheral member 14 by the operating rod 36 (that is, the adjusting portion 16) is a desired value, thereby controlling the film. thickness. Therefore, even if the operating lever 36 and the lever 34 are expanded by heat, the thickness of the film can be controlled with high precision.

並且,依實施形態之薄膜成形裝置1,致動器24的旋轉力經由槓桿34傳遞至撓性唇部22。亦即,致動器的旋轉力藉由槓桿原理來放大而傳遞至撓性唇部22。因此,能夠比較降低致動器24所需要之輸出。因此,例如能夠減少致動器24所需之波紋管的數量。或者,能夠縮小波紋管的大小。 Further, according to the film forming apparatus 1 of the embodiment, the rotational force of the actuator 24 is transmitted to the flexible lip portion 22 via the lever 34. That is, the rotational force of the actuator is amplified by the principle of the lever and transmitted to the flexible lip 22. Therefore, the output required for the actuator 24 can be reduced. Therefore, for example, the number of bellows required for the actuator 24 can be reduced. Alternatively, the size of the bellows can be reduced.

(第2實施形態)  (Second embodiment)  

接著,對第2實施形態進行說明。本實施形態之調節部除了動作桿與撓性唇部的連接結構不同以外,與第1實施形態相同。因此,對與第1實施形態相同的構成部分標註相同的符號,並省略其說明。圖10係表示第2實施形態之調節部的結構之局部放大剖面圖。 Next, a second embodiment will be described. The adjustment portion of the present embodiment is the same as that of the first embodiment except that the connection structure between the operating lever and the flexible lip is different. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted. Fig. 10 is a partially enlarged cross-sectional view showing the configuration of an adjusting portion of the second embodiment.

在本實施形態,在動作桿236的徑方向內側設置有外螺紋部240。在外螺紋部240的基端部螺合有螺母242。另一方面,連結構件238呈縱剖面U字狀,並在其上部貫穿形成有能夠與外螺紋部240螺合之內螺紋部244。 In the present embodiment, the male screw portion 240 is provided on the inner side in the radial direction of the operating lever 236. A nut 242 is screwed to the proximal end portion of the male screw portion 240. On the other hand, the connecting member 238 has a U-shaped longitudinal section, and an internal thread portion 244 that can be screwed into the male screw portion 240 is formed in the upper portion thereof.

在此種結構下,使外螺紋部240螺合至貫穿內螺紋部244之程度,從而使動作桿236的前端面緊壓於撓性唇部 22的受壓面23,且使動作桿236與撓性唇部22牢牢固定在一起。此時,藉由鎖緊螺母242,能夠使動作桿236與連結構件238的固定穩定。此時,撓性唇部22的一部分成為藉由連結構件238的卡合部50與動作桿236的前端部夾住,藉此,動作桿236在其軸線方向上與撓性唇部22連接。 In this configuration, the male screw portion 240 is screwed to the extent that the internal thread portion 244 is penetrated, so that the front end surface of the operating lever 236 is pressed against the pressure receiving surface 23 of the flexible lip portion 22, and the actuating lever 236 is The flexible lips 22 are securely fastened together. At this time, the fixing of the operating lever 236 and the coupling member 238 can be stabilized by the lock nut 242. At this time, a part of the flexible lip portion 22 is sandwiched by the engaging portion 50 of the connecting member 238 and the distal end portion of the operating lever 236, whereby the operating lever 236 is connected to the flexible lip portion 22 in the axial direction.

(第3實施形態)  (Third embodiment)  

接著,對第3實施形態進行說明。本實施形態之調節部除了動作桿與撓性唇部的連接結構不同以外,與第2實施形態相同。因此,對與第2實施形態相同的結構部分標註相同符號,並省略其說明。圖11係表示第3實施形態之調節部的結構之局部放大剖面圖。 Next, a third embodiment will be described. The adjustment portion of the present embodiment is the same as the second embodiment except that the connection structure between the operating lever and the flexible lip is different. Therefore, the same components as those in the second embodiment are denoted by the same reference numerals, and their description will be omitted. Fig. 11 is a partially enlarged cross-sectional view showing the configuration of an adjusting portion of a third embodiment.

在本實施形態,與第2實施形態同樣地,在動作桿336的下部設置有外螺紋部240,在其基端部螺合有螺母242。另一方面,代替卡合槽52,在撓性唇部22的突出環繞部29設置有從受壓面23朝徑方向內側延伸之內螺紋部344,構成為使外螺紋部240能夠在軸線方向螺合。 In the present embodiment, as in the second embodiment, the male screw portion 240 is provided at the lower portion of the operating lever 336, and the nut 242 is screwed to the proximal end portion. On the other hand, instead of the engagement groove 52, the protruding portion 29 of the flexible lip portion 22 is provided with a female screw portion 344 extending inward in the radial direction from the pressure receiving surface 23, and is configured such that the male screw portion 240 can be in the axial direction. Screwing.

在此種結構下,藉由使外螺紋部240螺合於內螺紋部344,能夠直接連結動作桿336與撓性唇部22。此時,藉由鎖緊螺母242,能夠使動作桿336與撓性唇部22牢牢固定在一起。此時,藉由調整外螺紋部240向內螺紋部344的旋入量,能夠高精度地設定動作桿336與槓桿34的位置關係。亦即,能夠使槓桿34的旋轉力的作用點P 上的方向與動作桿336的軸線方向一致。 In such a configuration, the operating rod 336 and the flexible lip portion 22 can be directly coupled by screwing the male screw portion 240 to the female screw portion 344. At this time, the actuating lever 336 and the flexible lip portion 22 can be firmly fixed by the lock nut 242. At this time, by adjusting the amount of screwing of the male screw portion 240 to the female screw portion 344, the positional relationship between the operating lever 336 and the lever 34 can be set with high precision. That is, the direction of the action point P of the rotational force of the lever 34 can be made to coincide with the axial direction of the operating lever 336.

(第4實施形態)  (Fourth embodiment)  

接著,對本發明的第4實施形態進行說明。本實施形態之調節部除了動作桿與槓桿的連接結構不同以外,與第1實施形態相同。圖12係表示第4實施形態之調節部的結構之局部放大剖面圖。 Next, a fourth embodiment of the present invention will be described. The adjustment unit of the present embodiment is the same as the first embodiment except that the connection structure between the operating lever and the lever is different. Fig. 12 is a partially enlarged cross-sectional view showing the configuration of an adjusting portion of a fourth embodiment.

在本實施形態,藉由在動作桿436的外周側端部上沿軸線方向組裝螺絲420,在動作桿436的外周側端與螺絲420的頭部之間形成縮徑部444。而且,在該縮徑部444組裝有槓桿34的連結部62。藉由此種結構,無需如第1實施形態那樣在動作桿36的外周面加工縮徑部44之製程。縮徑部444在構成作用點P之方面要求高精度,能夠藉由省略其切削加工等來降低製造成本。並且,例如藉由加大螺絲420的鎖緊強度,能夠更堅固地連結動作桿436與槓桿34。 In the present embodiment, the screw 420 is assembled in the axial direction on the outer circumferential side end portion of the operating lever 436, and the reduced diameter portion 444 is formed between the outer circumferential side end of the operating lever 436 and the head of the screw 420. Further, the connecting portion 62 of the lever 34 is assembled to the reduced diameter portion 444. With this configuration, it is not necessary to process the reduced diameter portion 44 on the outer circumferential surface of the operating rod 36 as in the first embodiment. The reduced diameter portion 444 requires high precision in terms of the action point P, and the manufacturing cost can be reduced by omitting the cutting process or the like. Further, for example, by increasing the locking strength of the screw 420, the operating lever 436 and the lever 34 can be more firmly coupled.

(第5實施形態)  (Fifth Embodiment)  

接著,對第5實施形態進行說明。本實施形態之調節部除了動作桿與槓桿的連接結構不同以外,與第1實施形態相同。圖13係表示第5實施形態之調節部的結構之圖。圖13(A)係表示動作桿與槓桿的連接部及其周邊結構之局部放大剖面圖,圖13(B)係動作桿的前視圖。 Next, a fifth embodiment will be described. The adjustment unit of the present embodiment is the same as the first embodiment except that the connection structure between the operating lever and the lever is different. Fig. 13 is a view showing the configuration of an adjustment unit according to the fifth embodiment. Fig. 13(A) is a partially enlarged cross-sectional view showing a connecting portion between the operating lever and the lever and its peripheral structure, and Fig. 13(B) is a front view of the operating lever.

在本實施形態,在動作桿536的外周側端部設置有分 叉形狀的臂部540,並以橫越該臂部540之方式設置有轉動軸544。另一方面,槓桿534的連結部562並非如第1實施形態那樣的分叉形狀,而是呈凸緣狀延伸,並在該中央設置有用以讓轉動軸544插穿之插穿孔546。連結部562是可轉動地連接於轉動軸544。藉由此結構,轉動軸544的位置成為槓桿534的作用點。槓桿534成為能夠在與動作桿536的連結部上相對地轉動,因此在使動作桿536較大地位移之情況下,具有能夠防止過大的負載施加於作用點P之等優點。 In the present embodiment, a fork-shaped arm portion 540 is provided at an outer circumferential side end portion of the operating lever 536, and a rotating shaft 544 is provided across the arm portion 540. On the other hand, the connecting portion 562 of the lever 534 does not extend in a flange shape as in the first embodiment, but is provided with a through hole 546 for inserting the rotating shaft 544 through the center. The connecting portion 562 is rotatably coupled to the rotating shaft 544. With this configuration, the position of the rotating shaft 544 becomes the point of action of the lever 534. Since the lever 534 is relatively rotatable relative to the connecting portion of the operating lever 536, when the operating lever 536 is largely displaced, it is possible to prevent an excessive load from being applied to the operating point P.

以上,對實施形態之薄膜成形裝置的結構與動作進行了說明。這些實施形態係例示,本領域技術人員能夠理解,該等各構成要件的組合能夠有各種變形例,並且這些變形例亦屬於本發明的範圍。 The structure and operation of the film forming apparatus of the embodiment have been described above. These embodiments are illustrative, and those skilled in the art can understand that various combinations of the constituent elements can be variously modified, and such modifications are also within the scope of the invention.

(變形例1)  (Modification 1)  

圖14係表示變形例之薄膜成形裝置的模具裝置2的上部與其周邊之剖面圖。圖14與圖2對應。圖15係表示圖14的調節部的結構之局部放大剖面圖。圖15與圖8(A)對應。在本變形例,連結部62的延伸方向(連結轉動軸32與作用點P之方向)與本體60的軸線呈鈍角,在槓桿34非動作狀態下,本體60的軸線不與動作桿36的軸線平行。因為是利用致動器的旋轉力對外周構件14賦予荷重,可構成為如此般之本體60的軸線不與動作桿36的軸線平行。此情況下,調節部16的配置自由度提高。 Fig. 14 is a cross-sectional view showing the upper portion of the mold device 2 of the film forming apparatus according to the modification and its periphery. Figure 14 corresponds to Figure 2. Fig. 15 is a partially enlarged sectional view showing the structure of the adjusting portion of Fig. 14; Fig. 15 corresponds to Fig. 8(A). In the present modification, the extending direction of the connecting portion 62 (the direction connecting the rotating shaft 32 and the point of action P) is an obtuse angle with the axis of the body 60. In the non-operating state of the lever 34, the axis of the body 60 does not match the axis of the operating lever 36. parallel. Since the load is applied to the outer peripheral member 14 by the rotational force of the actuator, the axis of the body 60 can be configured such that the axis of the body 60 is not parallel to the axis of the operating rod 36. In this case, the degree of freedom in arrangement of the adjustment unit 16 is improved.

(變形例2)  (Modification 2)  

圖16係表示另一變形例之薄膜成形裝置的模具裝置2的上部與其周邊之剖面圖。圖16與圖2對應。圖17係表示圖16的調節部的結構之局部放大剖面圖。圖17與圖8(A)對應。在本變形例,調節部16配置成,朝向軸方向上側而對外周構件14賦予荷重。依本變形例之薄膜成形裝置,能夠發揮與藉由各實施形態之薄膜成形裝置所發揮之作用效果相同之作用效果。 Fig. 16 is a cross-sectional view showing the upper portion of the mold device 2 and the periphery thereof of the film forming apparatus according to another modification. Figure 16 corresponds to Figure 2. Fig. 17 is a partially enlarged cross-sectional view showing the structure of the adjusting portion of Fig. 16. Fig. 17 corresponds to Fig. 8(A). In the present modification, the adjustment portion 16 is disposed such that the outer peripheral member 14 is biased toward the upper side in the axial direction. According to the film forming apparatus of the present modification, the same operational effects as those exhibited by the film forming apparatus of each embodiment can be exhibited.

(變形例3)  (Modification 3)  

在實施形態所說明的情況,調節部16係配置於外周構件14的外側,對外周構件14賦予按壓或拉伸的荷重而使外周構件14發生彈性變形,但是並不限於此。調節部16亦可為,藉由對內周構件12賦予荷重而使外周構件14發生彈性變形,從而使狹縫18的吐出口的徑方向的寬度局部地變化。此情況下,內周構件12可以形成為中空,且調節部16可以配置於該中空部分。並且,例如保持部80可以將薄膜的厚度與為了使具有該厚度之薄膜成為目標的厚度而調節部16應施加於內周構件12之荷重建立對應關聯而予以保持。 In the case described in the embodiment, the adjustment portion 16 is disposed outside the outer peripheral member 14, and the outer peripheral member 14 is elastically deformed by applying a load of pressing or stretching to the outer peripheral member 14. However, the present invention is not limited thereto. The adjustment portion 16 may elastically deform the outer peripheral member 14 by applying a load to the inner peripheral member 12, thereby partially changing the width of the discharge port of the slit 18 in the radial direction. In this case, the inner peripheral member 12 may be formed to be hollow, and the adjustment portion 16 may be disposed in the hollow portion. Further, for example, the holding portion 80 can hold the thickness of the film in association with the load applied to the inner peripheral member 12 by the adjustment portion 16 in order to make the film having the thickness targeted.

(變形例4)  (Modification 4)  

在實施形態所說明的情況,保持部80係將薄膜的厚 度與為了使具有該厚度之薄膜成為目標的厚度而調節部16應施加於外周構件14之荷重建立對應關聯而予以保持,但是並不限於此。保持部80只要保持薄膜的厚度與調節部16應向外周構件14賦予之荷重的關係之相關資訊即可。例如,保持部80亦可以保持表示薄膜的厚度與為了使具有該厚度之薄膜成為目標的厚度而調節部16應施加於外周構件14之荷重的關係之關係式。此情況下,決定部82利用該關係式,以縮小厚度的不均之方式來決定複數個調節部16應施加於外周構件14之荷重即可。而且,決定部82為了將所決定之荷重賦予外周構件14,只要算出要將調節部16的波紋管70~73的壓力控制為多少即可。 In the case described in the embodiment, the holding portion 80 holds the thickness of the film in association with the load applied to the outer peripheral member 14 by the adjustment portion 16 in order to make the thickness of the film having the thickness targeted, but does not Limited to this. The holding portion 80 may hold information on the relationship between the thickness of the film and the load applied to the outer peripheral member 14 by the regulating portion 16. For example, the holding portion 80 may hold a relational expression indicating the relationship between the thickness of the film and the load applied to the outer peripheral member 14 by the adjustment portion 16 in order to make the thickness of the film having the thickness targeted. In this case, the determination unit 82 determines the load to be applied to the outer peripheral member 14 by the plurality of adjustment portions 16 by reducing the thickness unevenness by using the relational expression. Further, in order to apply the determined load to the outer peripheral member 14, the determining unit 82 may calculate the pressure of the bellows 70 to 73 of the adjusting unit 16 to be controlled.

並且,保持部80亦可以將薄膜的厚度與為了使具有該厚度之薄膜成為目標的厚度而用以實現調節部16應施加於外周構件14之荷重之波紋管70~73的壓力建立對應關聯而予以保持。此情況下,決定部82只要參照厚度感測器6所測定之厚度與保持部80來決定波紋管70~73的壓力即可。 Further, the holding portion 80 may associate the thickness of the film with the pressure of the bellows 70 to 73 for applying the load applied to the outer peripheral member 14 to adjust the thickness of the film having the thickness. Keep it. In this case, the determination unit 82 may determine the pressure of the bellows 70 to 73 by referring to the thickness measured by the thickness sensor 6 and the holding portion 80.

(變形例5)  (Modification 5)  

在實施形態構成為,可藉由致動器的驅動所致之槓桿及動作桿的動作,對於撓性唇部賦予拉伸荷重及按壓荷重雙方。亦即,能夠從調節部的中立狀態進行將撓性唇部擴開的動作,或進行縮窄的動作。在變形例中,可以構成為 對於撓性唇部僅賦予拉伸荷重或按壓荷重中的一方,且僅進行撓性唇部的擴開動作或縮窄動作的一方。例如,動作桿36的一端側可以連接成,對於撓性唇部22僅朝按壓方向或拉伸方向中的一方賦予蓄勢力(驅動力)。此情況下可構成為,若經由動作桿36的蓄勢力被解除,撓性唇部22利用其彈性等而回復蓄勢力賦予前的狀態。 In the embodiment, both the tensile load and the pressing load are applied to the flexible lip portion by the operation of the lever and the operating lever by the driving of the actuator. In other words, the operation of expanding the flexible lip portion or the narrowing operation can be performed from the neutral state of the adjustment portion. In the modified example, only one of the tensile load and the pressing load may be applied to the flexible lip portion, and only the expansion operation or the narrowing operation of the flexible lip portion may be performed. For example, one end side of the actuating lever 36 may be connected, and only one of the pressing direction and the stretching direction is given to the flexible lip 22 to apply a force (driving force). In this case, when the accumulating force via the operating lever 36 is released, the flexible lip 22 can return to the state before the accumulating force is applied by the elasticity or the like.

(變形例6)  (Modification 6)  

在實施形態例示出,作為致動器24採用氣壓驅動方式者,對波紋管70、72或波紋管71、73中的一方供給壓縮空氣時,使另一方與大氣連通。在變形例可構成為,藉由對波紋管70、72及波紋管71、73雙方供給壓縮空氣,使其等產生壓力差,從而對撓性唇部賦予拉伸荷重或按壓荷重。例如,可藉由對波紋管70、72及波紋管71、73設置個別的壓力調整閥而產生該壓力差。 In the embodiment, when the air blower is used as the actuator 24, when one of the bellows 70, 72 or the bellows 71, 73 is supplied with compressed air, the other is connected to the atmosphere. In the modification, the compressed air may be supplied to both of the bellows 70 and 72 and the bellows 71 and 73 to cause a pressure difference therebetween, thereby imparting a tensile load or a pressing load to the flexible lip. For example, the pressure difference can be generated by providing individual pressure regulating valves to the bellows 70, 72 and the bellows 71, 73.

(變形例7)  (Modification 7)  

在實施形態例示出,在一個槓桿的兩側分別設置拉伸用的波紋管70、72及按壓用的波紋管71、73之結構。在變形例可構成為,僅在一個槓桿的單側設置波紋管,對該波紋管進行升壓或減壓,而使槓桿沿拉伸方向或按壓方向動作。 In the embodiment, the bellows 70 and 72 for stretching and the bellows 71 and 73 for pressing are provided on both sides of one lever. In the modification, the bellows may be provided on only one side of one of the levers, and the bellows may be pressurized or depressurized to operate the lever in the stretching direction or the pressing direction.

(變形例8)  (Modification 8)  

在實施形態,作為致動器24雖採用氣壓驅動式者,但亦可以設為採用水壓或液壓之驅動方式。並且,作為波紋管雖例示了圓形者,但亦能夠採用矩形等其他的形狀。而且,亦可以採用馬達驅動以外的致動器。 In the embodiment, the actuator 24 is pneumatically driven, but it may be a hydraulic or hydraulic drive. Further, although the bellows is exemplified as a circular shape, other shapes such as a rectangle may be employed. Further, an actuator other than the motor drive may be employed.

(變形例8)  (Modification 8)  

圖18係表示另一變形例之薄膜成形裝置的模具裝置2的上部與其周邊之剖面圖。圖18與圖2對應。 Fig. 18 is a cross-sectional view showing the upper portion of the mold device 2 and the periphery thereof of the film forming apparatus according to another modification. Figure 18 corresponds to Figure 2.

本變形例中,在外周構件14的上部的外周,具體而言,在外周構件14的小徑部25的外周也安裝有加熱器56。在外周構件14的上部,因來自空氣冷卻環8的冷卻風的影響而容易使熔融樹脂的溫度下降,藉由在小徑部25的外周安裝加熱器56,能夠以更加適當的溫度及熔融狀態保持熔融樹脂,其結果,能夠提高薄膜的品質。另外,本變形例中,與實施形態同樣地,藉由以應向外周構件14賦予之荷重成為所期望的值之方式進行管理,而控制薄膜的厚度,因此縱使在用以讓樹脂熔融的熱使構成調節部16之構件膨脹時,亦能夠以高精度來控制薄膜的厚度。因此,能夠在外周構件14的小徑部25的外周安裝加熱器56。 In the present modification, the heater 56 is also attached to the outer circumference of the upper portion of the outer peripheral member 14, specifically, the outer circumference of the small diameter portion 25 of the outer peripheral member 14. In the upper portion of the outer peripheral member 14, the temperature of the molten resin is easily lowered by the influence of the cooling air from the air cooling ring 8, and the heater 56 is attached to the outer periphery of the small-diameter portion 25, so that a more appropriate temperature and a molten state can be obtained. The molten resin is maintained, and as a result, the quality of the film can be improved. Further, in the present modification, as in the embodiment, the thickness of the film is controlled so that the load applied to the outer peripheral member 14 becomes a desired value, so that the heat for melting the resin is caused. When the member constituting the adjustment portion 16 is inflated, the thickness of the film can also be controlled with high precision. Therefore, the heater 56 can be attached to the outer circumference of the small diameter portion 25 of the outer peripheral member 14.

並且,在本變形例,小徑部25形成為,與第1實施形態相比,使比突出環繞部29更靠下方的小徑部25的部分、亦即彈性變形之變形部在軸方向上變長。藉此,撓性唇部22的可變量變大,薄膜的厚度的調整範圍變大。 Further, in the present modification, the small-diameter portion 25 is formed such that a portion of the small-diameter portion 25 that is lower than the protruding surrounding portion 29, that is, a deformed portion that is elastically deformed, is axially oriented, as compared with the first embodiment. lengthen. Thereby, the variable amount of the flexible lip portion 22 becomes large, and the adjustment range of the thickness of the film becomes large.

另外,內周構件12形成為中空之情況下,可代替外周構件14的上部的外周,或者除了外周構件14的上部的外周之外,將加熱器56安裝於內周構件12的內周。 Further, when the inner peripheral member 12 is formed to be hollow, the heater 56 may be attached to the inner circumference of the inner peripheral member 12 instead of the outer circumference of the upper portion of the outer peripheral member 14 or in addition to the outer periphery of the upper portion of the outer peripheral member 14.

上述之實施形態及變形例的任意的組合,作為本發明的實施形態亦是有用的。藉由組合而產生之新的實施形態,兼具所組合之實施形態及變形例各個的效果。 Any combination of the above-described embodiments and modifications is also useful as an embodiment of the present invention. The new embodiment produced by the combination has the effects of each of the combined embodiments and modifications.

〔產業上之可利用性〕  [Industrial Applicability]  

依本發明,可提供一種能夠以較高精度來控制薄膜的厚度之薄膜成形裝置。 According to the present invention, it is possible to provide a film forming apparatus capable of controlling the thickness of a film with high precision.

Claims (8)

一種薄膜成形裝置,其特徵在於,係具備:模具裝置,將熔融樹脂呈管狀擠出而成形為薄膜;及控制裝置,控制前述模具裝置,前述模具裝置係包括:內周構件,界定圓環狀的吐出口的內周;外周構件,環繞前述內周構件且界定前述吐出口的外周;及調節部,藉由對前述內周構件及前述外周構件中的至少一方賦予荷重而讓其彈性變形,使前述吐出口的徑方向的寬度變化,前述控制裝置係利用前述調節部所賦予之荷重來控制前述薄膜的厚度。  A film forming apparatus comprising: a mold device for extruding a molten resin into a film to form a film; and a control device for controlling the mold device, wherein the mold device includes an inner peripheral member defining an annular shape An inner circumference of the discharge port; an outer peripheral member surrounding the outer peripheral member and defining an outer circumference of the discharge port; and an adjustment portion that elastically deforms at least one of the inner peripheral member and the outer peripheral member by applying a load thereto The width of the discharge port in the radial direction is changed, and the control device controls the thickness of the film by the load given by the adjustment portion.   如申請專利範圍第1項所述之薄膜成形裝置,其中,進一步具備:測定前述薄膜的厚度之測定部,前述控制裝置係包括:決定部,按照前述測定部所測定之厚度來決定前述調節部所賦予之荷重之相關值;及調節動作控制部,根據前述決定部所決定之值,使前述調節部動作。  The film forming apparatus according to claim 1, further comprising: a measuring unit that measures a thickness of the film, wherein the control device includes a determining unit that determines the adjusting unit according to a thickness measured by the measuring unit The correlation value of the load to be applied; and the adjustment operation control unit to operate the adjustment unit based on the value determined by the determination unit.   如申請專利範圍第2項所述之薄膜成形裝置,其中,前述控制裝置係包括:保持薄膜的厚度與前述調節部 應賦予之荷重的關係之相關資訊之保持部,前述決定部,係根據前述測定部所測定之厚度與前述保持部所保持之資訊,來決定前述調節部所賦予之荷重之相關值。  The film forming apparatus according to claim 2, wherein the control device includes a holding unit that holds information on a relationship between a thickness of the film and a load to be applied to the adjusting portion, and the determining unit is based on the aforementioned The thickness measured by the measuring unit and the information held by the holding unit determine the correlation value of the load given by the adjusting unit.   如申請專利範圍第1至3項中任一項所述之薄膜成形裝置,其中,前述調節部係包括輸出旋轉力之致動器,且利用該致動器的旋轉力來賦予荷重。  The film forming apparatus according to any one of claims 1 to 3, wherein the adjustment unit includes an actuator that outputs a rotational force, and the load is imparted by the rotational force of the actuator.   如申請專利範圍第4項所述之薄膜成形裝置,其中,前述調節部係包括:槓桿,被支撐成以其位置相對於該模具裝置為固定之轉動軸為支點,且接受前述致動器的旋轉力;及動作桿,藉由該模具裝置支撐成可沿軸線方向位移,且被支撐於前述槓桿的作用點;前述槓桿的旋轉力轉換為前述動作桿的軸線方向的力,該軸線方向的力成為對於前述內周構件或前述外周構件之荷重,前述槓桿,係在該槓桿的作用點上直接對前述動作桿賦予力。  The film forming apparatus according to claim 4, wherein the adjusting portion comprises: a lever supported to be supported by a rotating shaft whose position is fixed with respect to the mold device, and which receives the actuator a rotational force; and an action rod supported by the mold device to be displaceable in the axial direction and supported by the action point of the lever; the rotational force of the lever is converted into a force in the axial direction of the action rod, the axial direction The force acts as a load on the inner peripheral member or the outer peripheral member, and the lever directly applies a force to the operating rod at the point of action of the lever.   如申請專利範圍第5項所述之薄膜成形裝置,其中,在未向前述內周構件及前述外周構件賦予荷重之中立狀態下,連結前述槓桿的作用點與前述轉動軸之直線與前 述動作桿的軸線正交,藉此使前述槓桿的旋轉力的前述作用點上的方向與前述動作桿的軸線方向一致。  The film forming apparatus according to claim 5, wherein a line connecting the point of action of the lever and the rotating shaft and the actuating lever is provided in a state in which the inner peripheral member and the outer peripheral member are not biased. The axes are orthogonal, whereby the direction of the aforementioned point of action of the rotational force of the aforementioned lever coincides with the axial direction of the action rod.   如申請專利範圍第5項所述之薄膜成形裝置,其中,進一步具備:連結前述動作桿與前述內周構件或前述外周構件之連結構件,前述動作桿與前述內周構件或前述外周構件的相對位置,是藉由前述連結構件進行調整。  The film forming apparatus according to claim 5, further comprising: a connecting member that connects the operating rod and the inner peripheral member or the outer peripheral member, wherein the operating rod is opposed to the inner peripheral member or the outer peripheral member The position is adjusted by the aforementioned connecting member.   如申請專利範圍第5項所述之薄膜成形裝置,其中,包括前述槓桿的施力點之該槓桿的本體與前述動作桿成為大致平行。  The film forming apparatus according to claim 5, wherein the body of the lever including the point of application of the lever is substantially parallel to the action lever.  
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