TW201631041A - Organic thin film transistor - Google Patents

Organic thin film transistor Download PDF

Info

Publication number
TW201631041A
TW201631041A TW104142887A TW104142887A TW201631041A TW 201631041 A TW201631041 A TW 201631041A TW 104142887 A TW104142887 A TW 104142887A TW 104142887 A TW104142887 A TW 104142887A TW 201631041 A TW201631041 A TW 201631041A
Authority
TW
Taiwan
Prior art keywords
group
compound
organic
formula
thin film
Prior art date
Application number
TW104142887A
Other languages
Chinese (zh)
Other versions
TWI623590B (en
Inventor
竹谷純一
熊澤和久
岩佐淳司
Original Assignee
日本曹達股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本曹達股份有限公司 filed Critical 日本曹達股份有限公司
Publication of TW201631041A publication Critical patent/TW201631041A/en
Application granted granted Critical
Publication of TWI623590B publication Critical patent/TWI623590B/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/40Organosilicon compounds, e.g. TIPS pentacene
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/20Organic diodes
    • H10K10/29Diodes comprising organic-inorganic heterojunctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/468Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/474Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure
    • H10K10/476Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure comprising at least one organic layer and at least one inorganic layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Thin Film Transistor (AREA)
  • Polymerisation Methods In General (AREA)
  • Paints Or Removers (AREA)

Abstract

An organic thin film transistor including, as a gate insulator film, an isolation layer composed of an organic-inorganic complex thin film containing (a) a condensation product of an organosilicon compound represented by the following formula (I) (wherein, R represents an organic group having a carbon atom directly bonded to Si, X represents a hydroxyl group or a hydrolysable group, n represents 1 or 2, each of R may be the same or different from each other if n is 2, and each of X may be the same or different from each other if (4-n) is 2 or more), and (b) a cured material of an electromagnetic radiation curable compound is provided. RnSiX4-n (I).

Description

有機薄膜電晶體 Organic thin film transistor

本發明係關於一種有機薄膜電晶體。 This invention relates to an organic thin film transistor.

本申請案基於在2015年1月14日在日本提出申請之特願2015-005413號主張優先權,將其內容援用至本文中。 The present application claims priority based on Japanese Patent Application No. 2015-005413, filed on Jan.

作為具有低臨界電壓及驅動電壓且與有機活性層之電荷遷移率高之有機絕緣體,已知如下有機無機絕緣體形成組成物,其含有(i)有機-無機混合物質、(ii)一種以上有機金屬化合物及/或一種以上有機高分子、及(iii)使上述(i)及上述(ii)之成分溶解之溶劑(參照專利文獻1)。已知有機-無機混合物質為有機矽烷化合物或使用酸或鹼觸媒及水使有機矽烷化合物於有機溶劑內水解反應及縮合反應而獲得之聚合物,有機金屬化合物為正丁醇鈦(IV)等鈦化合物。 As an organic insulator having a low threshold voltage and a driving voltage and having a high charge mobility with an organic active layer, an organic inorganic insulator forming composition containing (i) an organic-inorganic hybrid, and (ii) one or more organic metals is known. A compound and/or one or more organic polymers, and (iii) a solvent which dissolves the components (i) and (ii) above (see Patent Document 1). It is known that the organic-inorganic hybrid compound is an organic decane compound or a polymer obtained by hydrolyzing and condensing an organodecane compound in an organic solvent using an acid or a base catalyst and water, and the organometallic compound is titanium (IV) n-butoxide. A titanium compound.

又,作為有機溶劑與單體之溶解性優異,且具有高介電常數之新穎有機絕緣體組成物,已知有如下有機絕緣體組成物,其含有i)下述式1所表示之有機/無機金屬混合物質、ii)單體及/或有機高分子、及iii)使上述成分i)及ii)溶解之溶劑。已知下述式(1)所表示之化合物係使用酸或鹼 觸媒及水使有機矽烷化合物及有機金屬化合物於有機溶劑中進行水解反應或聚縮合反應而獲得(參照專利文獻2)。 Further, as a novel organic insulator composition having excellent solubility in an organic solvent and a monomer and having a high dielectric constant, an organic insulator composition containing i) an organic/inorganic metal represented by the following formula 1 is known. a mixed substance, ii) a monomer and/or an organic polymer, and iii) a solvent which dissolves the above components i) and ii). It is known that the compound represented by the following formula (1) is an acid or a base. The catalyst and water are obtained by subjecting an organodecane compound and an organometallic compound to a hydrolysis reaction or a polycondensation reaction in an organic solvent (see Patent Document 2).

上述式中,M為金屬原子,R1、R2及R3分別獨立為碳數2~5之(甲基)丙烯醯基、(甲基)丙烯醯氧基或經環氧基取代之碳數1~10之烷基、乙烯基等,R4、R5及R6分別獨立為氫原子、碳數1~10之烷基等。 In the above formula, M is a metal atom, and R 1 , R 2 and R 3 are each independently a (meth)acryloyl group having 2 to 5 carbon atoms, a (meth)acryloxy group or an epoxy group-substituted carbon. The alkyl group having a number of 1 to 10, a vinyl group or the like, and each of R 4 , R 5 and R 6 are independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms.

[專利文獻1]日本專利特開2005-120371號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-120371

[專利文獻2]日本專利特開2006-70029號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2006-70029

然而,即便使用如上述之有機絕緣體組成物而設置絕緣層,於維持與有機半導體層之接著性,且具有實用之載子遷移率之方面,仍有改良之餘地。 However, even if an insulating layer is provided using the organic insulator composition as described above, there is still room for improvement in terms of maintaining adhesion to the organic semiconductor layer and having practical carrier mobility.

本發明之目的在於提供一種維持與有機半導體層之接著性,且具有實用之載子遷移率之有機薄膜電晶體。 It is an object of the present invention to provide an organic thin film transistor which maintains adhesion to an organic semiconductor layer and has a practical carrier mobility.

本發明人為了解決上述課題而進行努力研究,結果發現,藉由在積層有特定絕緣層之基板上設置有機半導體層,可解決上述課題,從而完成本發明。 The present inventors have made an effort to solve the above problems, and as a result, have found that the above problems can be solved by providing an organic semiconductor layer on a substrate having a specific insulating layer laminated thereon, and the present invention has been completed.

即,本發明包含以下態樣。 That is, the present invention encompasses the following aspects.

(1)一種有機薄膜電晶體,其具備由含有下述a)及b)之有機無機複合薄膜所構成之閘極絕緣層,a)式(I)所表示之有機矽化合物之縮合物、及b)電磁輻射硬化性化合物之硬化物。 (1) An organic thin film transistor comprising a gate insulating layer comprising an organic-inorganic composite film comprising the following a) and b), a) a condensate of an organic cerium compound represented by the formula (I), and b) A hardened substance of an electromagnetic radiation curable compound.

RnSiX4-n (I) R n SiX 4-n (I)

(式中,R表示碳原子直接鍵結於Si之有機基,X表示羥基或水解性基;n表示1或2,n為2時,各R可相同亦可不同,(4-n)為2以上時,各X可相同,亦可不同) (wherein R represents a carbon atom directly bonded to an organic group of Si, X represents a hydroxyl group or a hydrolyzable group; n represents 1 or 2, and when n is 2, each R may be the same or different, and (4-n) is When 2 or more, each X can be the same or different)

(2)如上述(1)記載之有機薄膜電晶體,其中上述式(I)所表示之有機矽化合物係由有機矽化合物Si1與有機矽化合物Si2所構成,其中該有機矽化合物Si1藉由Fedors之推算法求出之R之溶解度參數SP1較藉由Fedors之推算法求出之電磁輻射硬化性化合物之溶解度參數SP2小1.6以上,該有機矽化合物Si2之上述溶解度參數SP1較上述溶解度參數SP2小未達1.6或與上述溶解度參數SP2相等或較上述溶解度參數SP2大, (2) The organic thin film transistor according to the above (1), wherein the organic ruthenium compound represented by the above formula (I) is composed of an organic ruthenium compound Si1 and an organic ruthenium compound Si2, wherein the organic ruthenium compound Si1 is obtained by Fedors The solubility parameter SP1 of R obtained by the push algorithm is smaller than the solubility parameter SP2 of the electromagnetic radiation curable compound obtained by the Fedors algorithm, and the solubility parameter SP1 of the organic germanium compound Si2 is smaller than the solubility parameter SP2. Not up to 1.6 or equal to the above solubility parameter SP2 or larger than the above solubility parameter SP2,

上述有機矽化合物Si1與上述有機矽化合物Si2之莫耳比Si1:Si2為5:5~10:0。 The molar ratio of the above organic cerium compound Si1 to the above organic cerium compound Si2 is Si:Si2 of 5:5 to 10:0.

(3)如上述(1)記載之有機薄膜電晶體,其中上述式(I)所表示之 有機矽化合物係由式(I-1)所表示之化合物、式(I-2)所表示之化合物、及若存在則為該等之水解縮合物所構成, R1 nSiX4-n...(I-1) (3) The organic thin film transistor according to the above (1), wherein the organic oxime compound represented by the above formula (I) is a compound represented by the formula (I-1) and a compound represented by the formula (I-2). And if present, is formed by the hydrolysis condensate, R 1 n SiX 4-n . . . (I-1)

(式中,n表示1或2,n為2時,R1相互可相同亦可不同,R1為有機基,R1中之1個以上表示含乙烯基之烴基;X表示羥基或水解性基,相互可相同,亦可不同) (wherein, n represents 1 or 2, and when n is 2, R 1 may be the same or different, R 1 is an organic group, and one or more of R 1 represents a vinyl group-containing hydrocarbon group; and X represents a hydroxyl group or hydrolyzability. Base, they can be the same or different)

R2 nSiX4-n...(I-2) R 2 n SiX 4-n . . . (I-2)

(式中,n表示1或2,n為2時,R2可相同亦可不同,R2表示碳原子直接鍵結於式中之Si之含乙烯基之烴基以外之有機基;X表示羥基或水解性基,相互可相同,亦可不同), {[式(I-1)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]}/{[式(I-1)之化合物]+[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}×100=30~100莫耳%,且 {[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}/{[式(I-1)之化合物]+[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}×100=0~70莫耳%。 (wherein, n represents 1 or 2, and when n is 2, R 2 may be the same or different, and R 2 represents an organic group in which a carbon atom is directly bonded to a vinyl group-containing hydrocarbon group of Si in the formula; X represents a hydroxyl group. Or a hydrolyzable group, which may be the same or different from each other, {[a compound of the formula (I-1)] + [if present, a unit derived from a compound of the formula (I-1) in the hydrolysis condensate]} /{[Compound of the formula (I-1)] + [Compound of the formula (I-2)] + [if present, a unit derived from the compound of the formula (I-1) in the hydrolysis condensate] + [if If present, the unit derived from the compound of the formula (I-2) in the hydrolysis condensate]}×100=30-100 mol%, and {[the compound of the formula (I-2)]+[if present, a unit derived from the compound of the formula (I-2) in the hydrolysis condensate]}/{[a compound of the formula (I-1)]+[a compound of the formula (I-2)]+[if present, hydrolysis condensation a unit derived from the compound of the formula (I-1)] + [if present, a unit derived from the compound of the formula (I-2) in the hydrolysis condensate]} × 100 = 0 to 70 mol % .

(4)一種顯示裝置,其具備上述(1)至(3)中任一項記 載之有機薄膜電晶體。 (4) A display device comprising any one of the above (1) to (3) Organic thin film transistor.

(5)一種感測器,其具備上述(1)至(3)中任一項記載之有機薄膜電晶體。 (5) A sensor comprising the organic thin film transistor according to any one of the above (1) to (3).

(6)一種電子標籤,其具有上述(1)至(3)中任一項記載之有機薄膜電晶體。 (6) An electronic label comprising the organic thin film transistor according to any one of the above (1) to (3).

本發明之有機薄膜電晶體維持與有機半導體層之接著性,且顯示出實用之載子遷移率。 The organic thin film transistor of the present invention maintains adhesion to an organic semiconductor layer and exhibits practical carrier mobility.

圖1A係表示實施例1之有機薄膜電晶體中,施加有作為飽和區域之VD=-30V之源極/汲極電壓時之ID-VG之電晶體特性的圖。 Fig. 1A is a view showing the transistor characteristics of I D - V G when a source/drain voltage of V D = -30 V is applied as a saturation region in the organic thin film transistor of Example 1.

圖1B係表示實施例1之有機薄膜電晶體之傳達特性之圖。 Fig. 1B is a view showing the communication characteristics of the organic thin film transistor of Example 1.

圖2A係表示實施例1之有機薄膜電晶體之相對於閘極電壓之飽和區域之載子遷移率(場效遷移率)的圖。 Fig. 2A is a graph showing the carrier mobility (field-effect mobility) of the organic thin film transistor of Example 1 with respect to the saturation region of the gate voltage.

圖2B係表示相對於閘極電壓之於線形區域之載子遷移率(有效遷移率)的圖。 Fig. 2B is a graph showing the carrier mobility (effective mobility) with respect to the gate voltage in the linear region.

圖3係表示實施例1之有機薄膜電晶體之輸出特性的圖。 Fig. 3 is a graph showing the output characteristics of the organic thin film transistor of Example 1.

圖4A係表示實施例2之有機薄膜電晶體中,施加有作為飽和區域之VD=-30V之源極/汲極電壓時之ID-VG之電晶體特性的圖。 Fig. 4A is a view showing the transistor characteristics of I D - V G when a source/drain voltage of V D = -30 V is applied as a saturated region in the organic thin film transistor of Example 2.

圖4B係表示實施例2之有機薄膜電晶體之傳達特性的圖。 Fig. 4B is a view showing the communication characteristics of the organic thin film transistor of Example 2.

圖5A係表示實施例2之有機薄膜電晶體之相對於閘極電壓之飽和區域 之載子遷移率(場效遷移率)的圖。 5A is a view showing a saturated region of the organic thin film transistor of Example 2 with respect to a gate voltage. A map of carrier mobility (field efficiency mobility).

圖5B(b)係表示相對於閘極電壓之於線形區域之載子遷移率(有效遷移率)的圖。 Fig. 5B(b) is a graph showing the carrier mobility (effective mobility) with respect to the gate voltage in the linear region.

圖6係表示實施例2之有機薄膜電晶體之輸出特性的圖。 Fig. 6 is a graph showing the output characteristics of the organic thin film transistor of Example 2.

<有機薄膜電晶體> <Organic Thin Film Transistor>

本發明之有機薄膜電晶體較佳為於基板上具備有機半導體層、與該有機半導體層接觸之源極電極及汲極電極、以及相對於上述有機半導體層隔著絕緣層而設置之閘極電極。 The organic thin film transistor of the present invention preferably includes an organic semiconductor layer on the substrate, a source electrode and a drain electrode in contact with the organic semiconductor layer, and a gate electrode provided with an insulating layer interposed therebetween with respect to the organic semiconductor layer. .

[基板] [substrate]

作為基板,可列舉樹脂基板。作為樹脂基板,可例示由聚對酞酸乙二酯(PET)、聚萘二甲酸乙二酯(PEN)、聚醚碸(PES)、聚醚醯亞胺、聚醚醚酮、聚苯硫、聚芳酯、聚醯亞胺、聚碳酸酯(PC)、三乙酸纖維素(TAC)、醋酸丙酸纖維素(CAP)等所構成之基板,其中較佳為由聚萘二甲酸乙二酯(PEN)、聚醯亞胺(PI)所構成之基板。基板之形狀可為膜狀、片狀、板狀等任意形狀,尤佳為膜狀。 A resin substrate is mentioned as a board|substrate. As the resin substrate, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyether oxime (PES), polyether oxime, polyether ether ketone, polyphenyl sulphate can be exemplified. a substrate composed of polyarylate, polyimide, polycarbonate (PC), cellulose triacetate (TAC), cellulose acetate propionate (CAP), etc., wherein polyethylene naphthalate is preferably used. A substrate composed of an ester (PEN) or a polyimine (PI). The shape of the substrate may be any shape such as a film shape, a sheet shape, or a plate shape, and is preferably a film shape.

基板可為由未延伸膜所構成者,亦可為由延伸膜所構成者。又,可為單層膜,亦可為使兩層以上藉由層壓、塗佈等手段積層而成之積層膜。 The substrate may be composed of an unstretched film or may be composed of a stretched film. Further, it may be a single layer film, or a laminated film obtained by laminating two or more layers by lamination or coating.

基板之厚度並無特別限制,較佳為1~1000μm,更佳為3~500μm。 The thickness of the substrate is not particularly limited, but is preferably 1 to 1000 μm, more preferably 3 to 500 μm.

[閘極電極、源極電極、汲極電極] [gate electrode, source electrode, drain electrode]

形成源極電極、汲極電極及閘極電極之材料只要為導電性材料,則無特別限定,可使用鉑、金、銀、鎳、鉻、銅、鐵、錫、含銻鉛、鉭、銦、鈀、碲、錸、銥、鋁、釕、鍺、鉬、鎢、氧化錫-銻、氧化銦-錫(ITO)、摻氟氧化鋅、鋅、碳、石墨、玻璃石墨、銀漿及碳漿、鋰、鈹、鈉、鎂、鉀、鈣、鈧、鈦、錳、鋯、鎵、鈮、鈉、鈉-鉀合金、鎂、鋰、鋁、鎂/銅混合物、鎂/銀混合物、鎂/鋁混合物、鎂/銦混合物、鋁/氧化鋁混合物、鋰/鋁混合物等,尤佳為鉑、金、銀、銅、鋁、銦、ITO、碳、鉻/金/鉻之積層體。或者亦可適宜地使用利用摻雜等而提高導電率之公知之導電性聚合物例如導電性聚苯胺、導電性聚吡咯、導電性聚噻吩、聚伸乙二氧基噻吩與聚苯乙烯磺酸之錯合物等。其中,較佳為於與有機半導體層之接觸面電阻小者。 The material forming the source electrode, the drain electrode, and the gate electrode is not particularly limited as long as it is a conductive material, and platinum, gold, silver, nickel, chromium, copper, iron, tin, antimony lead, antimony, or indium can be used. , palladium, rhodium, iridium, ruthenium, aluminum, osmium, iridium, molybdenum, tungsten, tin oxide-niobium, indium oxide-tin (ITO), fluorine-doped zinc oxide, zinc, carbon, graphite, glass graphite, silver paste and carbon Pulp, lithium, barium, sodium, magnesium, potassium, calcium, barium, titanium, manganese, zirconium, gallium, germanium, sodium, sodium-potassium alloy, magnesium, lithium, aluminum, magnesium/copper mixture, magnesium/silver mixture, magnesium /Aluminum mixture, magnesium/indium mixture, aluminum/aluminum oxide mixture, lithium/aluminum mixture, etc., particularly preferably a laminate of platinum, gold, silver, copper, aluminum, indium, ITO, carbon, chromium/gold/chromium. Alternatively, a known conductive polymer such as conductive polyaniline, conductive polypyrrole, conductive polythiophene, poly(ethylenedioxythiophene), and polystyrenesulfonic acid may be suitably used to increase conductivity by doping or the like. The complex and the like. Among them, it is preferable that the contact surface resistance with the organic semiconductor layer is small.

作為電極之形成方法,可列舉:使用公知之照相石印法或舉離法(lift-off method)使利用蒸鍍或濺鍍等方法以上述作為原料而形成之導電性薄膜形成為電極之方法;使用藉由熱轉印、噴墨等所形成之抗蝕劑於鋁或銅等金屬箔上進行蝕刻之方法。又,可藉由直接噴墨使導電性聚合物之溶液或分散液、導電性微粒子分散液圖案化,亦可藉由平版印刷或雷射剝蝕等而由塗佈膜所形成。進而,亦可使用利用凸版、凹版、平版、網版印刷等印刷法使含有導電性聚合物或導電性微粒子之墨水(ink)、導電性糊等進行圖案化之方法。 Examples of the method for forming the electrode include a method in which a conductive film formed by using the above-described raw material by vapor deposition or sputtering is formed into an electrode by a known lithographic method or a lift-off method; A method of etching on a metal foil such as aluminum or copper by using a resist formed by thermal transfer, inkjet, or the like. Further, the solution or the dispersion of the conductive polymer or the conductive fine particle dispersion can be patterned by direct ink jetting, or can be formed by a coating film by lithography or laser ablation. Further, a method of patterning an ink (ink) or a conductive paste containing a conductive polymer or conductive fine particles by a printing method such as relief printing, gravure, lithography or screen printing may be used.

作為使用於此種電極之金屬微粒子分散液之製造方法,可列舉:氣相蒸發法、濺鍍法、金屬蒸汽合成法等物理生成法,或膠體法、共 沈澱法等於液相中將金屬離子還原而生成金屬微粒子之化學生成法,較佳為藉由日本專利特開平11-76800號公報、日本專利特開平11-80647號公報、日本專利特開平11-319538號公報、日本專利特開2000-239853號公報等所揭示之膠體法、日本專利特開2001-254185號公報、日本專利特開2001-53028號公報、日本專利特開2001-35255號公報、日本專利特開2000-124157號公報、日本專利特開2000-123634號公報等所記載之氣相蒸發法所製造之金屬微粒子分散物。藉由使用該等金屬微粒子分散物而形成層後,將溶劑乾燥,進而於100~300℃、較佳為150~200℃之範圍內熱處理,使金屬微粒子熱熔合,藉此形成電極。 Examples of the method for producing the metal fine particle dispersion liquid used in such an electrode include a physical production method such as a vapor phase evaporation method, a sputtering method, and a metal vapor synthesis method, or a colloid method. The precipitation method is equivalent to a chemical formation method in which a metal ion is reduced in a liquid phase to form a metal fine particle, and is preferably a Japanese Patent Laid-Open No. Hei 11-76800, a Japanese Patent Laid-Open No. Hei 11-80647, and a Japanese Patent Laid-Open No. 11- The colloidal method disclosed in Japanese Laid-Open Patent Publication No. 2000-239853, the Japanese Patent Publication No. 2001-254185, the Japanese Patent Publication No. 2001-53028, and the Japanese Patent Laid-Open No. 2001-35255, A fine metal particle dispersion produced by a vapor phase evaporation method described in Japanese Laid-Open Patent Publication No. 2000-123634, and the like. After the layer is formed by using the metal fine particle dispersion, the solvent is dried, and further heat-treated at 100 to 300 ° C, preferably 150 to 200 ° C, to thermally fuse the metal fine particles, thereby forming an electrode.

[絕緣層] [Insulation]

絕緣層係由作為閘極絕緣膜之(A)有機無機複合薄膜所構成。 The insulating layer is composed of (A) an organic-inorganic composite film as a gate insulating film.

構成絕緣層之有機無機複合薄膜至少含有a)有機矽化合物之縮合物、及b)電磁輻射硬化性化合物之硬化物。 The organic-inorganic composite film constituting the insulating layer contains at least a condensate of a) an organic cerium compound and b) a cured product of an electromagnetic radiation curable compound.

《a)有機矽化合物之縮合物》 "a) Condensate of organic bismuth compounds"

使用於本發明之有機矽化合物由以下式(I)表示。 The organic hydrazine compound used in the present invention is represented by the following formula (I).

RnSiX4-n (I) R n SiX 4-n (I)

式中,R表示碳原子直接鍵結於Si之有機基,X表示羥基或水解性基。n表示1或2,n為2時,各R可相同亦可不同,(4-n)為2以上時,各X可相同,亦可不同。 In the formula, R represents an organic group in which a carbon atom is directly bonded to Si, and X represents a hydroxyl group or a hydrolyzable group. n represents 1 or 2, and when n is 2, each R may be the same or different, and when (4-n) is 2 or more, each X may be the same or different.

此處,作為R所表示之「碳原子直接鍵結於Si之有機基」, 可列舉亦可經取代之烴基。 Here, as the R, the "carbon atom is directly bonded to the organic group of Si", A hydrocarbon group which may also be substituted may be mentioned.

作為上述「亦可經取代之烴基」之烴基,較佳為碳數1~30之烴基,例如可列舉:烷基、環烷基、環烷基烷基、烯基、環烯基、炔基、芳基、芳基烷基、芳基烯基等。 The hydrocarbon group of the above-mentioned "hydrocarbon group which may be substituted" is preferably a hydrocarbon group having 1 to 30 carbon atoms, and examples thereof include an alkyl group, a cycloalkyl group, a cycloalkylalkyl group, an alkenyl group, a cycloalkenyl group, and an alkynyl group. , aryl, arylalkyl, arylalkenyl and the like.

又,上述「烴基」亦可具有氧原子、氮原子、或矽原子。 Further, the above "hydrocarbon group" may have an oxygen atom, a nitrogen atom or a ruthenium atom.

作為烷基,較佳為碳數1~10之直鏈或支鏈之烷基,例如可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第三丁基、正戊基、異戊基、新戊基、正己基、異己基、正庚基、正辛基、正壬基、異壬基、正癸基等。進而,作為碳數超過10之長鏈之烷基,可列舉:月桂基、十三基、肉豆蔻基、十五基、棕櫚基、十七基、硬脂基(stearyl group)等。 The alkyl group is preferably a linear or branched alkyl group having 1 to 10 carbon atoms, and examples thereof include a methyl group, an ethyl group, a n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a third group. Butyl, n-pentyl, isopentyl, neopentyl, n-hexyl, isohexyl, n-heptyl, n-octyl, n-decyl, isodecyl, n-decyl and the like. Further, examples of the alkyl group having a long chain of more than 10 carbon atoms include a lauryl group, a thirteen group, a myristyl group, a pentadecyl group, a palmity group, a heptadecyl group, and a stearyl group.

作為環烷基,較佳為碳數3~8之環烷基,例如可列舉環丙基、環丁基、環戊基、環己基、環庚基、環辛基等。 The cycloalkyl group is preferably a cycloalkyl group having 3 to 8 carbon atoms, and examples thereof include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group.

作為環烷基烷基,較佳為碳數4~20之環烷基烷基,例如可列舉環丙基甲基、環丁基甲基、環戊基甲基、環己基甲基、環庚基乙基、環辛基乙基、環癸基甲基、環十四基甲基、環十八基甲基等。 The cycloalkylalkyl group is preferably a cycloalkylalkyl group having 4 to 20 carbon atoms, and examples thereof include a cyclopropylmethyl group, a cyclobutylmethyl group, a cyclopentylmethyl group, a cyclohexylmethyl group, and a cycloheptyl group. Base, cyclooctylethyl, cyclodecylmethyl, cyclotetrakisylmethyl, cyclooctadecylmethyl, and the like.

作為烯基,較佳為碳數2~10之直鏈或支鏈之烯基,其意指於任意一處以上具有碳-碳雙鍵之碳數2~10之直鏈或支鏈之烯基,例如可列舉:乙烯基、1-丙烯-1-基、2-丙烯-1-基、1-丙烯-2-基、1-丁烯-1-基、2-丁烯-1-基、3-丁烯-1-基、1-丁烯-2-基、3-丁烯-2-基、1-戊烯-1-基、4-戊烯-1-基、1-戊烯-2-基、4-戊烯-2-基、3-甲基-1-丁烯-1-基、1-己烯-1-基、5-己烯-1-基、1-庚烯-1-基、6-庚烯-1-基、1-辛烯-1-基、7-辛烯-1 -基、1,3-丁二烯-1-基等。 The alkenyl group is preferably a linear or branched alkenyl group having 2 to 10 carbon atoms, which means a straight or branched alkene having 2 to 10 carbon atoms having a carbon-carbon double bond at any one or more positions. Examples of the group include a vinyl group, a 1-propen-1-yl group, a 2-propen-1-yl group, a 1-propen-2-yl group, a 1-buten-1-yl group, and a 2-buten-1-yl group. , 3-buten-1-yl, 1-buten-2-yl, 3-buten-2-yl, 1-penten-1-yl, 4-penten-1-yl, 1-pentene -2-yl, 4-penten-2-yl, 3-methyl-1-buten-1-yl, 1-hexen-1-yl, 5-hexen-1-yl, 1-heptene -1-yl, 6-hepten-1-yl, 1-octen-1-yl, 7-octene-1 - group, 1,3-butadien-1-yl and the like.

作為環烯基,較佳為碳數3~8之環烯基,其意指於任意一處以上具有碳-碳雙鍵且具有環狀部分之碳數3~8之烯基,例如可列舉:1-環戊烯-1-基、2-環戊烯-1-基、1-環己烯-1-基、2-環己烯-1-基、3-環己烯-1-基等。 The cycloalkenyl group is preferably a cycloalkenyl group having 3 to 8 carbon atoms, which means an alkenyl group having 3 to 8 carbon atoms which has a carbon-carbon double bond and has a cyclic moiety. : 1-cyclopenten-1-yl, 2-cyclopenten-1-yl, 1-cyclohexen-1-yl, 2-cyclohexen-1-yl, 3-cyclohexen-1-yl Wait.

作為炔基,較佳為碳數2~10之炔基,例如可列舉乙炔基、1-丙炔-1-基、2-丙炔-1-基、1-丁炔-1-基、3-丁炔-1-基、1-戊炔-1-基、4-戊炔-1-基、1-己炔-1-基、5-己炔-1-基、1-庚炔-1-基、1-辛炔-1-基、7-辛炔-1-基等。 The alkynyl group is preferably an alkynyl group having 2 to 10 carbon atoms, and examples thereof include an ethynyl group, a 1-propyn-1-yl group, a 2-propyn-1-yl group, a 1-butyn-1-yl group, and 3 -butyn-1-yl, 1-pentyn-1-yl, 4-pentyn-1-yl, 1-hexyn-1-yl, 5-hexyn-1-yl, 1-heptyne-1 -yl, 1-octyn-1-yl, 7-octyn-1-yl and the like.

作為環烷基烷基,較佳為碳數3~10之環烷基與碳數1~10之烷基鍵結而成之基,例如可列舉:環丙基甲基、環丙基丙基、環丁基甲基、環戊基甲基、環戊基乙基、環己基乙基、環庚基甲基等。 The cycloalkylalkyl group is preferably a group in which a cycloalkyl group having 3 to 10 carbon atoms is bonded to an alkyl group having 1 to 10 carbon atoms, and examples thereof include a cyclopropylmethyl group and a cyclopropylpropyl group. , cyclobutylmethyl, cyclopentylmethyl, cyclopentylethyl, cyclohexylethyl, cycloheptylmethyl and the like.

作為芳基,意指單環或多環之芳基,於多環芳基之情形時,除完全不飽和以外,亦包含部分飽和之基,具體而言,可例示苯基、萘基、薁基、茚基、二氫茚基、四氫萘基等,較佳為碳數6~10之芳基。 The aryl group means a monocyclic or polycyclic aryl group, and in the case of a polycyclic aryl group, in addition to being completely unsaturated, a partially saturated group is also included, and specifically, a phenyl group, a naphthyl group or an anthracene is exemplified. The aryl group, the fluorenyl group, the indanyl group, the tetrahydronaphthyl group and the like are preferably an aryl group having 6 to 10 carbon atoms.

作為芳基烷基,較佳為碳數6~10之芳基與碳數1~10之烷基鍵結而成之基,例如可列舉:苄基、苯乙基、3-苯基-正丙基、4-苯基-正丁基、5-苯基-正戊基、8-苯基-正辛基、萘基甲基等。 The arylalkyl group is preferably a group in which an aryl group having 6 to 10 carbon atoms is bonded to an alkyl group having 1 to 10 carbon atoms, and examples thereof include a benzyl group, a phenethyl group, and a 3-phenyl group. Propyl, 4-phenyl-n-butyl, 5-phenyl-n-pentyl, 8-phenyl-n-octyl, naphthylmethyl and the like.

作為芳基烯基,較佳為碳數6~10之芳基與碳數2~10之烯基鍵結而成之基,例如可列舉:苯乙烯基、3-苯基-1-丙烯-1-基、3-苯基-2-丙烯-1-基、4-苯基-1-丁烯-1-基、4-苯基-3-丁烯-1-基、5-苯基-1-戊烯-1-基、5-苯基-4-戊烯-1一基、8-苯基 -1-辛烯-1-基、8-苯基-7-辛烯-1-基、萘基乙烯基等。 The arylalkenyl group is preferably a group in which an aryl group having 6 to 10 carbon atoms is bonded to an alkenyl group having 2 to 10 carbon atoms, and examples thereof include a styryl group and a 3-phenyl-1-propene group. 1-yl, 3-phenyl-2-propen-1-yl, 4-phenyl-1-buten-1-yl, 4-phenyl-3-buten-1-yl, 5-phenyl- 1-penten-1-yl, 5-phenyl-4-pentene-1 -yl, 8-phenyl 1-octene-1-yl, 8-phenyl-7-octene-1-yl, naphthylvinyl and the like.

作為「具有氧原子之烴基」,可列舉:烷氧基烷基、環氧烷基、環氧丙氧基烷基等具有環氧乙烷環(環氧基)之基、丙烯醯氧基甲基、甲基丙烯醯氧基甲基等。 Examples of the "hydrocarbon group having an oxygen atom" include a group having an oxirane ring (epoxy group) such as an alkoxyalkyl group, an alkylene oxide group or a glycidoxyalkyl group, and an acryloxy group. Base, methacryloxymethyl group, and the like.

此處,作為烷氧基烷基,較佳為碳數1~6之烷氧基與碳數1~6之烷基鍵結而成之基,例如可列舉:甲氧基甲基、2-甲氧基乙基、3-乙氧基-正丙基等。 Here, the alkoxyalkyl group is preferably a group in which an alkoxy group having 1 to 6 carbon atoms is bonded to an alkyl group having 1 to 6 carbon atoms, and examples thereof include a methoxymethyl group and a 2- Methoxyethyl, 3-ethoxy-n-propyl and the like.

作為環氧烷基,較佳為碳數3~10之直鏈或支鏈之環氧烷基,例如可列舉:環氧丙基、環氧丙基甲基、2-環氧丙基乙基、3-環氧丙基丙基、4-環氧丙基丁基、3,4-環氧丁基、4,5-環氧戊基、5,6-環氧己基等直鏈狀之含有環氧基之烷基;β-甲基環氧丙基、β-乙基環氧丙基、β-丙基環氧丙基、2-環氧丙基丙基、2-環氧丙基丁基、3-環氧丙基丁基、2-甲基-3-環氧丙基丙基、3-甲基-2-環氧丙基丙基、3-甲基-3,4-環氧丁基、3-乙基-3,4-環氧丁基、4-甲基-4,5-環氧戊基、5-甲基-5,6-環氧己基等分枝狀之含有環氧基之烷基等。 The epoxyalkyl group is preferably a linear or branched alkylene oxide having 3 to 10 carbon atoms, and examples thereof include a glycidyl group, a glycidylmethyl group, and a 2-epoxypropylethyl group. , 3-cyclopropylpropyl, 4-epoxypropylbutyl, 3,4-epoxybutyl, 4,5-epoxypentyl, 5,6-epoxyhexyl, etc. Alkyl group of epoxy group; β-methylepoxypropyl group, β-ethyl epoxypropyl group, β-propyl epoxypropyl group, 2-epoxypropylpropyl group, 2-epoxypropyl group , 3-epoxypropylbutyl, 2-methyl-3-epoxypropylpropyl, 3-methyl-2-epoxypropylpropyl, 3-methyl-3,4-epoxy Branched ring containing butyl, 3-ethyl-3,4-epoxybutyl, 4-methyl-4,5-epoxypentyl, 5-methyl-5,6-epoxyhexyl An alkyl group of an oxy group or the like.

作為環氧丙氧基烷基,可列舉環氧丙氧基甲基、環氧丙氧基丙基等。 Examples of the glycidoxyalkyl group include a glycidoxymethyl group and a glycidoxypropyl group.

作為「具有氮原子之烴基」,較佳為具有-NR'2(式中,R'表示氫原子、烷基或芳基,各R'相互可相同,亦可不同)之基、或具有-N=CR"2(式中,R"表示氫原子、烷基或芳基,各R"相互可相同,亦可不同)之基,作為烷基,可列舉與上述相同者,作為芳基,可列舉苯基、萘基、蒽-1-基、菲-1-基等。 The "hydrocarbon group having a nitrogen atom" preferably has a group of -NR' 2 (wherein R' represents a hydrogen atom, an alkyl group or an aryl group, and each R' may be the same or different), or has - N=CR" 2 (wherein R" represents a hydrogen atom, an alkyl group or an aryl group, and each R" may be the same or different from each other. The alkyl group may be the same as the above, and as an aryl group, Examples thereof include a phenyl group, a naphthyl group, an inden-1-yl group, and a phenan-1-yl group.

例如,作為具有-NR'2之基,可列舉:-CH2NH2基、-CH2(CH2)2NH2基、-CH2NHCH3基等。作為具有-N=CR"2之基,可列舉:-CH2N=CHCH3基、-C2N=C(CH3)2基、-CH2CH2N=CHCH3基、-CH2N=CHPh基、-CH2N=C(Ph)CH3基等。 For example, examples of the group having -NR' 2 include a -CH 2 NH 2 group, a -CH 2 (CH 2 ) 2 NH 2 group, and a -CH 2 NHCH 3 group. Examples of the group having -N=CR" 2 include: -CH 2 N=CHCH 3 group, -C 2 N=C(CH 3 ) 2 group, -CH 2 CH 2 N=CHCH 3 group, -CH 2 N=CHPh group, -CH 2 N=C(Ph)CH 3 group, and the like.

作為上述「亦可經取代」之取代基,例如可列舉:鹵素原子、烷基、烯基、芳基、甲基丙烯醯氧基等。作為烷基、烯基、芳基,可例示與R中相同者。 Examples of the substituent which may be substituted or not include a halogen atom, an alkyl group, an alkenyl group, an aryl group, and a methacryloxy group. The alkyl group, the alkenyl group, and the aryl group are the same as those in R.

上述中,就有機無機複合薄膜之表面之無機化之觀點而言,乙烯基、具有環氧乙烷環之基、具有-NR'2之基、或具有-N=CR"2之基為較佳之基。 In the above, from the viewpoint of the inorganication of the surface of the organic-inorganic composite film, a vinyl group, a group having an oxirane ring group, a group having -NR' 2 or a group having -N=CR" 2 is Good base.

又,式(I)中,n表示1或2,尤佳為n=1者。於n為2時,各R可相同,亦可不同。又,該等可使用單獨1種,或將2種以上組合使用。 Further, in the formula (I), n represents 1 or 2, and particularly preferably n = 1. When n is 2, each R may be the same or different. Further, these may be used alone or in combination of two or more.

式(I)中,X表示羥基或水解性基。於式(I)之(4-n)為2以上時,各X可相同,亦可不同。所謂水解性基,意指例如可於無觸媒、過量水之共存下,藉由在25℃~100℃進行加熱,被水解而生成矽烷醇基之基、或可形成矽氧烷縮合物之基,具體而言,可列舉:烷氧基、醯氧基、鹵基原子、異氰酸基、未經取代或經取代之胺基等,較佳為碳數1~4之烷氧基或碳數1~6之醯氧基。 In the formula (I), X represents a hydroxyl group or a hydrolyzable group. When (4-n) of the formula (I) is 2 or more, each X may be the same or different. The hydrolyzable group means that, for example, it can be hydrolyzed at 25 to 100 ° C in the presence of no catalyst or excess water to form a stanol group, or a oxane condensate can be formed. Specific examples thereof include an alkoxy group, a decyloxy group, a halogen atom, an isocyanate group, an unsubstituted or substituted amino group, and the like, and preferably an alkoxy group having 1 to 4 carbon atoms or A carbon number of 1 to 6 carbon atoms.

作為碳數1~4之烷氧基,可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、第三丁氧基等,作為碳數1~6之醯氧基(其中,碳數不包括羰基之碳),可列舉乙醯氧基、苄醯氧基等。作 為鹵素原子,可列舉:氟原子、氯原子、溴原子、碘原子等。 Examples of the alkoxy group having 1 to 4 carbon atoms include a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, an isobutoxy group, and a third butoxy group. The decyloxy group having 1 to 6 carbon atoms (wherein the carbon number does not include the carbon of the carbonyl group) may, for example, be an ethoxy group or a benzyloxy group. Make Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

再者,(A)有機無機複合薄膜所含之有機矽化合物之縮合物意指該等有機矽化合物之縮合物及/或有機矽化合物之縮合物之進一步之縮合物。 Further, the condensate of the organic hydrazine compound contained in the (A) organic-inorganic composite film means a further condensate of the condensate of the organic hydrazine compound and/or the condensate of the organic hydrazine compound.

有機矽化合物之縮合物之摻合比率相對於(A)有機無機複合薄膜總體之固形物成分,較佳為2~98質量%,更佳為5~50質量%,進而較佳為5~30質量%。 The blending ratio of the condensate of the organic cerium compound is preferably from 2 to 98% by mass, more preferably from 5 to 50% by mass, even more preferably from 5 to 30%, based on the total solid content of the (A) organic-inorganic composite film. quality%.

作為本發明中所使用之有機矽化合物之較佳態樣,具體而言,可例示下述a-1)、a-2)、及a-3)之混合物。 As a preferred aspect of the organic ruthenium compound used in the present invention, specifically, a mixture of the following a-1), a-2), and a-3) can be exemplified.

a-1)式(I-1)所表示之化合物。 A-1) A compound represented by the formula (I-1).

R1 nSiX4-n...(I-i) R 1 n SiX 4-n . . . (Ii)

式中,n表示1或2,n為2時,R1可相同亦可不同,R1為有機基,R1中之1個以上表示含乙烯基之烴基。X表示羥基或水解性基,相互可相同,亦可不同。此處,作為有機基、水解性基,較佳可例示式(I)所記載者。作為含乙烯基之烴基,可例示:乙烯基、烯丙基、3-丁烯基、4-己烯基等烯基(較佳為C2-C8烯基)等。 In the formula, n represents 1 or 2, and when n is 2, R 1 may be the same or different, R 1 is an organic group, and one or more of R 1 represents a vinyl group-containing hydrocarbon group. X represents a hydroxyl group or a hydrolyzable group, and may be the same or different from each other. Here, as the organic group or the hydrolyzable group, those described in the formula (I) are preferably exemplified. The vinyl group-containing hydrocarbon group may, for example, be an alkenyl group such as a vinyl group, an allyl group, a 3-butenyl group or a 4-hexenyl group (preferably a C2-C8 alkenyl group).

a-2)式(I-2)所表示之化合物。 A-2) A compound represented by the formula (I-2).

R2 nSiX4-n...(I-2) R 2 n SiX 4-n . . . (I-2)

式中,n表示1或2,n為2時,R2可相同亦可不同,R2表 示碳原子直接鍵結於式中之Si之含乙烯基之烴基以外之有機基。X表示羥基或水解性基,相互可相同,亦可不同。此處,作為含乙烯基之烴基以外之有機基,可例示自式(I)所記載者中除去烯基或芳基烯基等含乙烯基之有機基者。作為水解性基,可例示式(I)所記載者。 In the formula, n represents 1 or 2, and when n is 2, R 2 may be the same or different, and R 2 represents an organic group in which a carbon atom is directly bonded to a vinyl group-containing hydrocarbon group of Si in the formula. X represents a hydroxyl group or a hydrolyzable group, and may be the same or different from each other. Here, examples of the organic group other than the vinyl group-containing hydrocarbon group include those having a vinyl group-containing organic group such as an alkenyl group or an arylalkenyl group removed from the formula (I). The hydrolyzable group can be exemplified by those described in the formula (I).

a-3)若存在的話,該等之水解縮合物。 A-3) if present, the hydrolysis condensate.

式(I-2)所表示之化合物及將其作為單元而含有之水解縮合物亦可未必存在。所謂水解縮合物係化合物彼此水解縮合而形成有矽氧烷鍵結之二聚物等,可為僅式(I-1)或式(I-2)之化合物進行水解縮合而成者,亦可為式(I-1)之化合物及式(I-2)之化合物進行水解縮合而成者,亦可為該等2種以上混合存在。 The compound represented by the formula (I-2) and the hydrolysis-condensation product contained as a unit may not necessarily exist. The hydrolyzed condensate compound is hydrolyzed and condensed to form a diene-bonded dimer or the like, and may be obtained by hydrolyzing and condensing only the compound of the formula (I-1) or the formula (I-2). The compound of the formula (I-1) and the compound of the formula (I-2) may be hydrolyzed and condensed, or two or more of them may be mixed.

{[式(I-1)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]}/{[式(I-1)之化合物]+[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}×100較佳為30~100莫耳%,更佳為30~95莫耳%。 {[Compound of the formula (I-1)] + [if present, a unit derived from the compound of the formula (I-1) in the hydrolysis condensate]} / {[a compound of the formula (I-1)] + [ a compound of the formula (I-2)] + [if present, a unit derived from a compound of the formula (I-1) in the hydrolysis condensate] + [if present, a form derived from the hydrolysis condensate (I- 2) The unit of the compound]} × 100 is preferably 30 to 100 mol%, more preferably 30 to 95 mol%.

另一方面,{[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}/{[式(I-1)之化合物]+[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}×100較佳為0~70莫耳%,更佳為5~70莫耳%。 On the other hand, {[the compound of the formula (I-2)] + [if present, the unit derived from the compound of the formula (I-2) in the hydrolysis condensate]} / {[formula (I-1)) Compound] + [compound of formula (I-2)] + [unit of compound derived from formula (I-1), if present, in hydrolysis condensate] + [if present, derived from hydrolyzed condensate The unit of the compound of the formula (I-2)]}100 is preferably 0 to 70 mol%, more preferably 5 to 70 mol%.

又,水解縮合物之平均粒徑較佳為2nm~100nm,更佳為5nm~30nm。若平均粒徑大於100nm,則膜白濁,溶液變得不穩定,而變得容易凝膠化。 若平均粒徑小於2nm,則有對塗膜性產生影響之情形。 Further, the average particle diameter of the hydrolysis condensate is preferably from 2 nm to 100 nm, more preferably from 5 nm to 30 nm. When the average particle diameter is more than 100 nm, the film becomes cloudy, the solution becomes unstable, and gelation becomes easy. When the average particle diameter is less than 2 nm, there is a case where the coating property is affected.

該等可單獨使用1種,或者亦可將2種以上組合使用。 These may be used alone or in combination of two or more.

於將有機矽化合物組合使用之情形時,例如,可較佳地例示乙烯基三甲氧基矽烷與3-甲基丙烯醯氧基丙基三甲氧基矽烷之組合、乙烯基三甲氧基矽烷與3-環氧丙氧基丙基三甲氧基矽烷之組合。 In the case where an organic cerium compound is used in combination, for example, a combination of vinyltrimethoxydecane and 3-methacryloxypropyltrimethoxydecane, vinyltrimethoxydecane and 3 may be preferably exemplified. a combination of glycidoxypropyltrimethoxydecane.

又,作為式(I-1)所表示之有機矽化合物,R1之碳數為3以下之有機矽化合物摻合30莫耳%以上,更佳為50~100莫耳%,更佳為R1之碳數為4以上之有機矽化合物摻合70莫耳%以下,更佳為0~50莫耳%。 Further, as the organic ruthenium compound represented by the formula (I-1), the organic ruthenium compound having a carbon number of 3 or less of R 1 is blended in an amount of 30 mol% or more, more preferably 50 to 100 mol%, more preferably R. the carbon number of 1 or more of the organic silicon compound 4 blend 70 mole% or less, more preferably 0 to 50 mole%.

作為本發明中所使用之有機矽化合物之另一較佳態樣,具體而言,由藉由Fedors之推算法求出之上述R之溶解度參數SP1較藉由Fedors之推算法求出之電磁輻射硬化性化合物之溶解度參數SP2小1.6以上,較佳為小1.6~8.5,進而更佳為小1.6~7.2之有機矽化合物Si1及上述溶解度參數SP1較上述溶解度參數SP2小未達1.6或與上述溶解度參數SP2相等或較上述溶解度參數SP2大之有機矽化合物Si2所構成,上述有機矽化合物Si1與上述有機矽化合物Si2之莫耳比Si1:Si2為5:5~10:0,更佳為9:1~10:0。 As another preferred aspect of the organic ruthenium compound used in the present invention, specifically, the solubility parameter SP1 of the above R determined by the Fedors algorithm is compared with the electromagnetic radiation obtained by the Fedors algorithm. The solubility parameter SP2 of the curable compound is 1.6 or more, preferably 1.6 to 8.5, more preferably 1.6 to 7.2, and the solubility parameter SP1 is less than 1.6 or less than the above solubility parameter SP1. The organic germanium compound Si2 having the same parameter SP2 or larger than the solubility parameter SP2 is composed of the organic germanium compound Si1 and the organic germanium compound Si2 having a molar ratio of Si1:Si2 of 5:5 to 10:0, more preferably 9: 1~10:0.

有機矽化合物根據所使用之電磁輻射硬化性化合物之種類而異。有機矽化合物及電磁輻射硬化性化合物之溶解度參數(SP值)可基於Fedors之推算法進行計算,因此可基於預先計算出之SP值,決定有機矽化合物與電磁輻射硬化性化合物之組合。 The organic cerium compound varies depending on the type of the electromagnetic radiation curable compound to be used. The solubility parameter (SP value) of the organic ruthenium compound and the electromagnetic radiation curable compound can be calculated based on the Fedors' push algorithm. Therefore, the combination of the organic ruthenium compound and the electromagnetic radiation curable compound can be determined based on the pre-calculated SP value.

上述式(I)中,於n為2且R不同之情形時,將數值較大者之SP值設為上述SP1,而決定與電磁輻射硬化性化合物之組合。 In the above formula (I), when n is 2 and R is different, the SP value of the larger value is set to the above SP1, and the combination with the electromagnetic radiation curable compound is determined.

將可用於本發明之有機矽化合物之一例與SP值一起列示於以下之第1表。再者,化合物No.1~No.15相當於上述式(I-1)之化合物。 An example of an organic ruthenium compound which can be used in the present invention is shown in Table 1 below together with the SP value. Further, the compounds No. 1 to No. 15 correspond to the compound of the above formula (I-1).

《b)電磁輻射硬化性化合物之硬化物》 "b) Hardened compound of electromagnetic radiation hardening compound"

使用於本發明之所謂電磁輻射硬化性化合物係具有於視需要添加之聚合起始劑之存在下藉由電磁輻射之照射而引起聚合反應之官能基的化合物或樹脂,作為所使用之電磁輻射,可使用紫外線、X射線、放射線、離子化放射線、電離性放射線(α、β、γ射線、中子射線、電子束),較佳為 包含350nm以下之波長之光。 The electromagnetic radiation curable compound to be used in the present invention is a compound or resin having a functional group which causes polymerization by irradiation of electromagnetic radiation in the presence of a polymerization initiator to be added as needed, as electromagnetic radiation to be used, Ultraviolet rays, X-rays, radiation, ionized radiation, ionizing radiation (α, β, γ ray, neutron ray, electron beam) can be used, preferably Contains light at wavelengths below 350 nm.

電磁輻射之照射例如可使用超高壓水銀燈、高壓水銀燈、低壓水銀燈、金屬鹵素燈、準分子燈、碳弧燈、氙弧燈等公知裝置而進行,作為所照射之光源,較佳為包含150~350nm之範圍之任意波長之光之光源,更佳為包含250~310nm之範圍之任意波長之光之光源。 The irradiation of the electromagnetic radiation can be performed by using a known device such as an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a low pressure mercury lamp, a metal halide lamp, an excimer lamp, a carbon arc lamp, or a xenon arc lamp, and the light source to be irradiated preferably comprises 150~. A light source of any wavelength in the range of 350 nm is more preferably a light source containing light of any wavelength in the range of 250 to 310 nm.

又,作為為了使有機無機複合薄膜形成用組成物充分地硬化而照射之光之照射光量,例如可列舉0.1~100J/cm2左右,若考慮膜硬化效率(照射能量與膜硬化程度之關係),則較佳為1~10J/cm2左右,更佳為1~5J/cm2左右。 In addition, the amount of light to be irradiated by the composition for sufficiently curing the composition for forming an organic-inorganic composite film is, for example, about 0.1 to 100 J/cm 2 , and the film hardening efficiency (the relationship between the irradiation energy and the degree of film hardening) is considered. It is preferably about 1 to 10 J/cm 2 , more preferably about 1 to 5 J/cm 2 .

作為電磁輻射硬化性化合物,可例示(甲基)丙烯酸酯系化合物、環氧系化合物、除丙烯酸酯系化合物以外之乙烯基化合物等。官能基之數量只要為1個以上,則無特別限定。將可使用於本發明之電磁輻射硬化性化合物之一例與SP值一起列示於以下之第2表。 Examples of the electromagnetic radiation curable compound include a (meth)acrylate compound, an epoxy compound, and a vinyl compound other than the acrylate compound. The number of the functional groups is not particularly limited as long as it is one or more. An example of the electromagnetic radiation curable compound used in the present invention can be listed together with the SP value in the second table below.

又,除上述化合物以外,作為上述丙烯酸酯系化合物,可使用聚胺酯(甲基)丙烯酸酯(polyurethane(meth)acrylate)、聚酯(甲基)丙烯酸酯、環氧聚(甲基)丙烯酸酯、聚醯胺(甲基)丙烯酸酯、聚丁二烯(甲基)丙烯酸酯、聚苯乙烯基(甲基)丙烯酸酯、聚碳酸酯二丙烯酸酯等。該等化合物之SP值亦取決於所含有之官能基之種類,為9~11之範圍內。 Further, in addition to the above compounds, as the acrylate-based compound, a polyurethane (meth) acrylate, a polyester (meth) acrylate, an epoxy poly(meth) acrylate, or the like may be used. Polyamine (meth) acrylate, polybutadiene (meth) acrylate, polystyryl (meth) acrylate, polycarbonate diacrylate, and the like. The SP value of these compounds also depends on the type of functional group contained, and is in the range of 9-11.

環氧聚(甲基)丙烯酸酯例如可藉由低分子量之雙酚型環氧樹脂或酚醛清漆環氧樹脂之環氧乙烷環與丙烯酸之酯化反應而獲得。 The epoxy poly(meth) acrylate can be obtained, for example, by an esterification reaction of an oxirane ring of a low molecular weight bisphenol type epoxy resin or a novolac epoxy resin with acrylic acid.

關於聚酯(甲基)丙烯酸酯,例如藉由如下方式獲得,即,將藉由多元羧 酸與多元醇之縮合而獲得之於兩末端具有羥基之聚酯低聚物之羥基利用丙烯酸進行酯化。或者,將藉由多元羧酸與烯化氧(alkylene oxide)加成而獲得之低聚物之末端之羥基利用丙烯酸進行酯化,藉此獲得。 With regard to the polyester (meth) acrylate, for example, by using a polycarboxylic acid, The hydroxyl group of the polyester oligomer having a hydroxyl group at both terminals obtained by condensation of an acid with a polyol is esterified with acrylic acid. Alternatively, a hydroxyl group at the terminal of the oligomer obtained by addition of a polyvalent carboxylic acid and an alkylene oxide is obtained by esterification with acrylic acid.

胺酯(甲基)丙烯酸酯係使多元醇與二異氰酸酯進行反應而獲得之異氰酸酯化合物、與具有羥基之丙烯酸酯單體之反應生成物,作為多元醇,可列舉聚酯多元醇、聚醚多元醇、聚碳酸酯二醇。 The amine ester (meth) acrylate is a reaction product of an isocyanate compound obtained by reacting a polyol with a diisocyanate and an acrylate monomer having a hydroxyl group, and examples of the polyol include polyester polyol and polyether polyol. Alcohol, polycarbonate diol.

作為本發明所使用之胺酯(甲基)丙烯酸酯之市售品,例如可列舉:荒川化學工業股份有限公司製造之商品名:BEAMSET(註冊商標)102、502H、505A-6、510、550B、551B、575、575CB、EM-90、EM92;聖諾普科(San Nopco)股份有限公司製造之商品名:Photomer(註冊商標)6008、6210;新中村化學工業股份有限公司製造之商品名:NK Oligo U-2PPA、U-4HA、U-6HA、H-15HA、UA-32PA、U-324A、U-4H、U-6H;東亞合成股份有限公司製造之商品名:ARONIX(註冊商標)M-1100、M-1200、M-1210、M-1310、M-1600、M-1960;共榮社化學股份有限公司製造之商品名:AH-600、AT606、UA-306H;日本化藥股份有限公司製造之商品名:Kayarad(註冊商標)UX-2201、UX-2301、UX-3204、UX-3301、UX-4101、UX-6101、UX-7101;日本合成化學工業股份有限公司製造之商品名:紫光(註冊商標)UV-1700B、UV-3000B、UV-6100B、UV-6300B、UV-7000、UV-7600B、UV-2010B;根上工業股份有限公司製造之商品名:Art resin(註冊商標)UN-1255、UN-5200、HDP-4T、HMP-2、UN-901T、UN-3320HA、UN-3320HB、UN-3320HC、UN-3320HS、H-61、HDP-M20;Daicel-UCB股份有限公司製造之商品 名:Ebecryl(註冊商標)I6700、204、205、220、254、1259、1290K、1748、2002、2220、4833、4842、4866、5129、6602、8301等。 The commercial product of the amine ester (meth) acrylate used in the present invention is, for example, a product name: BEAMSET (registered trademark) 102, 502H, 505A-6, 510, 550B manufactured by Arakawa Chemical Industries Co., Ltd. , 551B, 575, 575CB, EM-90, EM92; trade name manufactured by San Nopco Co., Ltd.: Photomer (registered trademark) 6008, 6210; trade name manufactured by Shin-Nakamura Chemical Industry Co., Ltd.: NK Oligo U-2PPA, U-4HA, U-6HA, H-15HA, UA-32PA, U-324A, U-4H, U-6H; manufactured by Toagosei Co., Ltd.: ARONIX (registered trademark) M -1100, M-1200, M-1210, M-1310, M-1600, M-1960; trade names manufactured by Kyoeisha Chemical Co., Ltd.: AH-600, AT606, UA-306H; Nippon Chemical Co., Ltd. Trade name of the company: Kayarad (registered trademark) UX-2201, UX-2301, UX-3204, UX-3301, UX-4101, UX-6101, UX-7101; trade name manufactured by Japan Synthetic Chemical Industry Co., Ltd. : Violet (registered trademark) UV-1700B, UV-3000B, UV-6100B, UV-6300B, UV-7000, UV-7600B, UV-2010B; Trade name of the company: Art resin (registered trademark) UN-1255, UN-5200, HDP-4T, HMP-2, UN-901T, UN-3320HA, UN-3320HB, UN-3320HC, UN-3320HS, H- 61. HDP-M20; goods manufactured by Daicel-UCB Co., Ltd. Name: Ebecryl (registered trademark) I6700, 204, 205, 220, 254, 1259, 1290K, 1748, 2002, 2220, 4833, 4842, 4866, 5129, 6602, 8301, and the like.

該等中,較佳為聚酯(甲基)丙烯酸酯、聚胺酯(甲基)丙烯酸酯、環氧聚(甲基)丙烯酸酯,更佳為聚胺酯(甲基)丙烯酸酯。 Among these, polyester (meth) acrylate, polyurethane (meth) acrylate, epoxy poly(meth) acrylate, and more preferably polyurethane (meth) acrylate.

關於分子量,只要能夠溶解至有機無機複合薄膜形成用組成物中,則無限度,作為質量平均分子量,較佳為500~50,000,更佳為1,000~10,000。 The molecular weight is indefinite as long as it can be dissolved in the composition for forming an organic-inorganic composite film, and the mass average molecular weight is preferably 500 to 50,000, more preferably 1,000 to 10,000.

關於上述有機無機複合薄膜中之上述電磁輻射硬化性化合物之硬化物之摻合量,相對於上述有機無機複合薄膜總體之固形物成分(有機矽化合物之縮合物、電磁輻射硬化性化合物之硬化物及視需要摻合之其他成分之總質量),較佳為2~98質量%,更佳為50~95質量%,進而較佳為70~95質量%。 The blending amount of the hardened material of the electromagnetic radiation curable compound in the organic-inorganic composite film, the solid content of the organic-inorganic composite film as a whole (the condensate of the organic cerium compound, the hardened compound of the electromagnetic radiation curable compound) The total mass of the other components to be blended as needed is preferably from 2 to 98% by mass, more preferably from 50 to 95% by mass, even more preferably from 70 to 95% by mass.

於本發明中,可混合聚合起始劑,作為此種起始劑,可列舉藉由照射電磁輻射而產生陽離子種之化合物及藉由照射電磁輻射而產生活性自由基種之化合物等公知之起始劑。 In the present invention, a polymerization initiator may be mixed, and as such an initiator, a compound which generates a cationic species by irradiation with electromagnetic radiation and a compound which generates an active radical species by irradiation with electromagnetic radiation may be mentioned. Starting agent.

<(A)有機無機複合薄膜之製造法> <(A) Method for producing organic-inorganic composite film>

[有機無機複合薄膜形成用溶液之製備] [Preparation of a solution for forming an organic-inorganic composite film]

關於本發明之(A)有機無機複合薄膜之形成用溶液,除有機矽化合物、電磁輻射硬化性化合物以外,適當混合具有聚合起始劑、矽烷醇縮合觸媒能力等之金屬化合物、水及/或溶劑等而製備。 In the solution for forming the organic-inorganic composite film of the present invention (A), in addition to the organic ruthenium compound and the electromagnetic radiation curable compound, a metal compound having a polymerization initiator, a decyl alcohol condensation catalyst, or the like, water and/or is appropriately mixed. Or prepared by solvent or the like.

再者,作為用作矽烷醇縮合觸媒之金屬化合物,具體而言,可例示:金屬烷氧化物、金屬螯合化合物、有機酸金屬鹽或該等之水解縮合物等,更具體而言,可例示:四異丙氧基鈦(tetraisopropoxy titanium)、二異丙氧基 雙乙醯丙酮酸鈦、或其水解縮合物等。 Further, specific examples of the metal compound used as the decyl alcohol condensation catalyst include a metal alkoxide, a metal chelate compound, an organic acid metal salt or the like, and the like, and more specifically, It can be exemplified by tetraisopropoxy titanium, diisopropoxy Titanium diacetate pyruvate, or a hydrolysis condensate thereof, or the like.

製備方法並無特別限制,具體而言,可例示如下製備方法:將金屬螯合化合物等金屬化合物混合至溶劑中,添加特定量之水,進行(部分)水解,繼而添加有機矽化合物(部分)進行水解,另一方面,將熱或電磁輻射硬化性化合物溶解至溶劑,視需要添加聚合起始劑或硬化劑,然後將兩溶液混合等。該等四成分亦可同時混合,又,關於有機矽化合物與金屬化合物之混合方法,可列舉於將有機矽化合物與金屬化合物混合後,添加水進行(部分)水解之方法、或將使有機矽化合物及金屬化合物分別(部分)水解者混合之方法。未必需要添加水或溶劑,但較佳預先添加水製成(部分)水解物。作為特定量之水之量,亦取決於金屬化合物之種類,例如於金屬化合物為具有2個以上羥基或者水解性基之金屬化合物之情形時,相對於金屬化合物1莫耳,較佳使用0.5莫耳以上之水,更佳使用0.5~2莫耳之水。又,於金屬化合物為金屬螯合化合物或有機酸金屬鹽之情形時,相對於金屬螯合化合物或有機酸金屬鹽1莫耳,較佳使用5~100莫耳之水,更佳使用5~20莫耳之水。 The production method is not particularly limited, and specific examples thereof include a method in which a metal compound such as a metal chelate compound is mixed into a solvent, a specific amount of water is added, (partial) hydrolysis, and then an organic ruthenium compound (partial) is added. Hydrolysis is carried out. On the other hand, a heat or electromagnetic radiation curable compound is dissolved in a solvent, a polymerization initiator or a hardener is added as needed, and then the two solutions are mixed. These four components may be mixed at the same time, and a method of mixing the organic ruthenium compound and the metal compound may be exemplified by a method in which an organic ruthenium compound and a metal compound are mixed, and then (partially) hydrolyzed by adding water or organic ruthenium A method in which a compound and a metal compound are separately (partially) hydrolyzed. It is not necessary to add water or a solvent, but it is preferred to add water in advance to prepare a (partial) hydrolyzate. The amount of the specific amount of water depends on the kind of the metal compound. For example, when the metal compound is a metal compound having two or more hydroxyl groups or a hydrolyzable group, it is preferably used in the case of the metal compound 1 molar. For water above the ear, it is better to use 0.5~2 moles of water. Further, in the case where the metal compound is a metal chelate compound or an organic acid metal salt, it is preferably used in an amount of 5 to 100 mols of water, more preferably 5~, relative to the metal chelate compound or the organic acid metal salt 1 mol. 20 moles of water.

作為a)有機矽化合物之縮合物,亦可使用利用公知之矽烷醇縮合觸媒將有機矽化合物(部分)水解而成者。 As the condensate of the a) organic hydrazine compound, the organic hydrazine compound (partially) may be hydrolyzed by a known decyl alcohol condensation catalyst.

作為有機無機複合薄膜形成用組成物,除上述各成分以外,較佳含有水及/或溶劑等。 The composition for forming an organic-inorganic composite film preferably contains water, a solvent, or the like in addition to the above components.

作為所使用之溶劑,並無特別限制,例如可列舉:苯、甲苯、二甲苯等芳香族烴類;己烷、辛烷等脂肪族烴類;環己烷、環戊烷等脂環族烴類;丙酮、甲基乙基酮、甲基異丁基酮、環己酮等酮類;四氫呋喃、二烷等 醚類;乙酸乙酯、乙酸丁酯等酯類;N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等醯胺類;二甲基亞碸等亞碸類;甲醇、乙醇等醇類;乙二醇單甲醚、乙二醇單甲醚乙酸酯等多元醇衍生物類等。該等溶劑可單獨使用1種,或者組合2種以上使用。 The solvent to be used is not particularly limited, and examples thereof include aromatic hydrocarbons such as benzene, toluene, and xylene; aliphatic hydrocarbons such as hexane and octane; and alicyclic hydrocarbons such as cyclohexane and cyclopentane. Ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone; tetrahydrofuran, Ethers such as alkyl ethers; esters such as ethyl acetate and butyl acetate; decylamines such as N,N-dimethylformamide and N,N-dimethylacetamide; Classes; alcohols such as methanol and ethanol; polyol derivatives such as ethylene glycol monomethyl ether and ethylene glycol monomethyl ether acetate. These solvents may be used alone or in combination of two or more.

作為矽烷醇縮合觸媒,除上述金屬化合物以外,可列舉酸、鹼等。 Examples of the stanol condensation catalyst include an acid, a base, and the like in addition to the above metal compound.

作為酸,可列舉有機酸、無機酸,具體而言,例如作為有機酸,可列舉:乙酸、甲酸、草酸、碳酸、酞酸、三氟乙酸、對甲苯磺酸、甲磺酸等,作為無機酸,可列舉:鹽酸、硝酸、硼酸、氟硼酸等。 Examples of the acid include an organic acid and an inorganic acid. Specific examples of the organic acid include acetic acid, formic acid, oxalic acid, carbonic acid, citric acid, trifluoroacetic acid, p-toluenesulfonic acid, and methanesulfonic acid. Examples of the acid include hydrochloric acid, nitric acid, boric acid, and fluoroboric acid.

此處,具體而言,藉由光照射產生酸之光酸產生劑亦包括六氟磷酸二苯基錪鎓、六氟磷酸三苯基鏻等。 Here, specifically, the photoacid generator which generates an acid by light irradiation also includes diphenylphosphonium hexafluorophosphate, triphenylphosphonium hexafluorophosphate or the like.

作為鹼,可列舉:四甲基胍、四甲基胍基丙基三甲氧基矽烷等強鹼類;有機胺類、有機胺之羧酸中和鹽、四級銨鹽等。 Examples of the base include strong bases such as tetramethylguanidine and tetramethylguanidinopropyltrimethoxydecane; organic amines, carboxylic acid neutralized salts of organic amines, and quaternary ammonium salts.

作為本發明之有機無機複合薄膜形成用溶液中之固形物成分,較佳為1~98質量%,更佳為10~60質量%,進而較佳為15~45質量%。 The solid content component in the solution for forming an organic-inorganic composite film of the present invention is preferably from 1 to 98% by mass, more preferably from 10 to 60% by mass, still more preferably from 15 to 45% by mass.

[(A)有機無機複合薄膜之製造] [(A) Manufacture of organic-inorganic composite film]

(A)有機無機複合薄膜可藉由經過將上述有機無機複合薄膜形成用溶液塗佈於樹脂基板上,進行乾燥及/或加熱之步驟;實施電漿處理或者UV臭氧處理之步驟而製造。 (A) The organic-inorganic composite film can be produced by applying a solution for forming the above-mentioned organic-inorganic composite film onto a resin substrate, drying and/or heating, and performing a plasma treatment or a UV ozone treatment.

關於(A)有機無機複合薄膜,較佳為藉由ESCA分析所測定之距表面10nm之深度之碳原子濃度較距表面100nm之深度之碳原子濃 度少20%以上之膜。 Regarding the (A) organic-inorganic composite film, it is preferred that the concentration of carbon atoms at a depth of 10 nm from the surface as determined by ESCA analysis is thicker than the carbon atom at a depth of 100 nm from the surface. A film that is less than 20% less.

此處,所謂「碳原子濃度」,意指於將(總金屬原子+氧原子+碳原子)設為100%時之碳原子之莫耳濃度。其他元素之濃度亦相同。 Here, the "carbon atom concentration" means the molar concentration of carbon atoms when (total metal atom + oxygen atom + carbon atom) is 100%. The concentrations of other elements are also the same.

作為有機無機複合薄膜形成用溶液之塗佈方法,可使用公知之塗佈方法,例如可列舉浸漬法、噴霧法、棒式塗佈法、輥塗法、旋轉塗佈法、簾塗佈法、凹版印刷法、絲網印刷法、噴墨法等。又,作為所形成之膜厚,並無特別限制,例如為0.1~20μm左右。 As a coating method of the solution for forming an organic-inorganic composite film, a known coating method can be used, and examples thereof include a dipping method, a spray method, a bar coating method, a roll coating method, a spin coating method, and a curtain coating method. Gravure printing method, screen printing method, inkjet method, and the like. Further, the film thickness to be formed is not particularly limited, and is, for example, about 0.1 to 20 μm.

作為塗佈有機無機複合薄膜形成用溶液所形成之膜之乾燥、加熱處理,例如較佳於40~200℃進行0.5~120分鐘左右,更佳於60~160℃進行1~60分鐘左右,進而較佳於60~120℃進行1~60分鐘左右。 The drying and heat treatment of the film formed by applying the solution for forming an organic-inorganic composite film is preferably carried out at about 40 to 200 ° C for about 0.5 to 120 minutes, more preferably at 60 to 160 ° C for about 1 to 60 minutes, and further It is preferably about 60 to 120 ° C for about 1 to 60 minutes.

絕緣層由上述構成所構成作為閘極絕緣膜。因此,於有機薄膜電晶體中,絕緣層與有機半導體層之親和性提高,變得可抑制漏電流。有機薄膜電晶體具有實用之載子遷移率。 The insulating layer is constituted by the above-described configuration as a gate insulating film. Therefore, in the organic thin film transistor, the affinity between the insulating layer and the organic semiconductor layer is improved, and leakage current can be suppressed. Organic thin film transistors have practical carrier mobility.

[有機半導體層] [Organic Semiconductor Layer]

作為構成有機薄膜電晶體之有機半導體層之材料,可使用π共軛系材料,例如可使用聚吡咯、聚(N-取代吡咯)、聚(3-取代吡咯)、聚(3,4-二取代吡咯)等聚吡咯類;聚噻吩、聚(3-取代噻吩)、聚(3,4-二取代噻吩)、聚苯并噻吩等聚噻吩類、聚異苯并噻吩等聚異苯并噻吩類、聚伸噻吩乙炔等聚伸噻吩乙炔類;聚(對苯乙炔)等聚(對苯乙炔)類、聚苯胺、聚(N-取代苯胺)、聚(3-取代苯胺)、聚(2,3-取代苯胺)等聚苯胺類、聚乙炔等聚乙炔類;聚二乙炔等聚二乙炔類、聚薁等聚薁類、聚芘等聚芘類、聚咔唑、聚(N-取代咔唑)等聚咔唑類、聚硒吩等聚硒吩類;聚呋喃、聚苯并呋喃等聚呋喃 類;聚(對苯)等聚(對苯)類;聚吲哚等聚吲哚類、聚嗒等聚嗒類;稠四苯、稠五苯、稠六苯、稠七苯、二苯并稠五苯、四苯并稠五苯、芘、二苯并芘、、苝、蔻、特銳烯(terrylene)、卵苯、誇特銳烯(quaterrylene)、循環蒽(circumanthracene)等多并苯類;將多并苯類之碳之一部分取代為N、S、O等原子、羰基等官能基之衍生物(三苯并二、三苯并二噻、稠六苯-6,15-醌等);聚乙烯基咔唑、聚苯硫、聚乙烯硫(polyvinylene sulfide)等聚合物;日本專利特開平11-195790號公報所記載之多環縮合體等。 As a material constituting the organic semiconductor layer of the organic thin film transistor, a π-conjugated material can be used, and for example, polypyrrole, poly(N-substituted pyrrole), poly(3-substituted pyrrole), poly(3,4-di) can be used. Polypyrroles such as pyrrole); polythiophenes such as polythiophenes, poly(3-substituted thiophenes), poly(3,4-disubstituted thiophenes), polybenzothiophenes, polyisobenzothiophenes, and the like Polythiophene acetylenes such as polythiophene acetylene; poly(p-phenylacetylene) such as poly(p-phenylacetylene), polyaniline, poly(N-substituted aniline), poly(3-substituted aniline), poly(2) Polyaniline such as polyaniline or polyacetylene; polydiacetylene such as polydiacetylene, polyfluorene such as polyfluorene, polyfluorene such as polyfluorene, polycarbazole, poly(N-substituted) Polycarbazoles such as carbazoles and polyselenes; polyfurans such as polyfuran and polybenzofuran; poly(p-benzene)s such as poly(p-phenylene); polyfluorenes Class Concentration Classes; thick tetraphenyl, fused pentabenzene, hexabenzene, hexabenzene, dibenzo pentacene, tetraphenyl pentacene, anthracene, dibenzopyrene, , ruthenium, osmium, terrylene, egg benzene, quaterrylene, circummanthracene and other polyacenes; replacing one of the polyacene carbons with N, S, O a derivative of a functional group such as an atom or a carbonyl group (tribenzoic acid) Tribenzothiazide a polycyclic condensate as described in Japanese Laid-Open Patent Publication No. Hei 11-195790, which is a condensed hexabenzene, a hexafluorene, a polyphenylene sulfide, or a polyvinylene sulfide. Wait.

又,亦可較佳地使用與該等聚合物具有相同重複單元之例如作為噻吩六聚物之α-六噻吩α,ω-二己基-α-六噻吩、α,ω-二己基-α-五噻吩(quinquetliophene)、α,ω-雙(3-丁氧基丙基)-α-六噻吩、苯乙烯苯(styrylbenzene)衍生物等低聚物。 Further, it is also preferred to use α-hexathiophene α, ω-dihexyl-α-hexathiophene, α,ω-dihexyl-α- as the thiophene hexamer having the same repeating unit as the polymers. An oligomer such as quinquetliophene, α,ω-bis(3-butoxypropyl)-α-hexathiophene or styrylbenzene derivative.

進而,可列舉:銅酞青或日本專利特開平11-251601號公報所記載之氟取代銅酞青等金屬酞青類;萘1,4,5,8-四羧酸二醯亞胺、N,N'-雙(4-三氟甲基苄基)萘1,4,5,8-四羧酸二醯亞胺、以及N,N'-雙(1H,1H-全氟辛基)、N,N'-雙(1H,1H-全氟丁基)及N,N'-二辛基萘1,4,5,8-四羧酸二醯亞胺衍生物、萘2,3,6,7四羧酸二醯亞胺等萘四羧酸二醯亞胺類、及蒽2,3,6,7-四羧酸二醯亞胺等蒽四羧酸二醯亞胺類等縮合環四羧酸二醯亞胺類;C60、C70、C76、C78、C84等富勒烯類;SWNT等奈米碳管、部花青素色素類、半花青素(hemicyanine)色素類等色素等。 Further, a copper indigo or a metal indigo such as a fluorine-substituted copper indigo described in Japanese Patent Laid-Open Publication No. Hei 11-251601; naphthalene 1,4,5,8-tetracarboxylic acid diimine, N , N'-bis(4-trifluoromethylbenzyl)naphthalene 1,4,5,8-tetracarboxylic acid diimine, and N,N'-bis(1H,1H-perfluorooctyl), N,N'-bis(1H,1H-perfluorobutyl) and N,N'-dioctylnaphthalene 1,4,5,8-tetracarboxylic acid diimine derivatives, naphthalene 2,3,6 a condensed ring of a ruthenium tetracarboxylic acid such as a ruthenium tetracarboxylic acid such as a ruthenium dicarboxyimine such as a tetracarboxylic acid such as a tetracarboxylic acid and a ruthenium diamine of a ruthenium 2,3,6,7-tetracarboxylic acid. Dicarboxylic acid diamines; fullerenes such as C60, C70, C76, C78, C84; pigments such as SWNT and other carbon nanotubes, merocyanin pigments, hemicyanine pigments, etc. .

該等π共軛系材料之中,較佳為選自由將噻吩、伸乙烯基、伸噻吩乙炔、苯乙炔、對伸苯基、該等之取代體或該等之2種以上作為重複單元,且該重複單元之數量n為4~10之低聚物或者該重複單元之數量n 為20以上之聚合物、稠五苯等縮合多環芳香族化合物、富勒烯類、縮合環四羧酸二醯亞胺類、金屬酞青所組成之群中之至少1種。 Among the π-conjugated materials, it is preferably selected from the group consisting of thiophene, vinylene, thiophene acetylene, phenylacetylene, para-phenylene, these or the like, or two or more of them as repeating units. And the number n of the repeating units is an oligomer of 4-10 or the number of the repeating units n It is at least one of a group consisting of a polymer of 20 or more, a condensed polycyclic aromatic compound such as fused pentabenzene, a fullerene, a condensed cyclic tetracarboxylic acid diimine, and a metal indigo.

又,作為其他有機半導體材料,亦可使用四硫富瓦烯(TTF)-四氰基苯醌二甲烷(TCNQ)錯合物、雙伸乙基四硫富瓦烯(BEDTTTF)-過氯酸錯合物、BEDTTTF-碘錯合物、TCNQ-碘錯合物等有機分子錯合物。進而,亦可使用聚矽烷、聚鍺烷等σ共軛系聚合物或日本專利特開2000-260999號公報所記載之有機-無機混成材料。 Further, as another organic semiconductor material, tetrathiafulvalene (TTF)-tetracyanoquinone dimethane (TCNQ) complex, diexiethyltetrathiafulvalene (BEDTTTF)-perchloric acid can also be used. An organic molecular complex such as a complex, BEDTTTF-iodine complex, TCNQ-iodine complex. Further, a σ-conjugated polymer such as polydecane or polydecane or an organic-inorganic hybrid material described in JP-A-2000-260999 may be used.

作為有機半導體層之製作法,可列舉:真空蒸鍍法、分子束磊晶生長法、離子團束法、低能量離子束法、離子鍍敷法、CVD法、濺鍍法、電漿聚合法、電解聚合法、化學聚合法、噴塗法、旋轉塗佈法、刮刀塗佈法、浸漬法、澆鑄法、輥塗法、棒式塗佈法、模塗佈(die coat)法、或LB法等,可根據材料使用。然而,該等中,就生產性之方面而言,較佳為可使用有機半導體之溶液簡單且精密地形成薄膜之旋轉塗佈法、刮刀塗佈法、浸漬塗佈法、輥塗法、棒式塗佈法、模塗佈法、或澆鑄法等。進而,就控制構成有機半導體層之分子化合物之配向性之方面而言,較佳為作為特殊之澆鑄法之間隙澆鑄法、或邊緣澆鑄法。 Examples of the method for producing the organic semiconductor layer include a vacuum deposition method, a molecular beam epitaxy growth method, an ion beam method, a low energy ion beam method, an ion plating method, a CVD method, a sputtering method, and a plasma polymerization method. , electrolytic polymerization, chemical polymerization, spray coating, spin coating, knife coating, dipping, casting, roll coating, bar coating, die coating, or LB Etc., can be used according to the material. However, in the above, in terms of productivity, a spin coating method, a knife coating method, a dip coating method, a roll coating method, a rod which can form a film simply and precisely using a solution of an organic semiconductor is preferable. Coating method, die coating method, casting method, and the like. Further, in terms of controlling the alignment of the molecular compound constituting the organic semiconductor layer, a gap casting method or an edge casting method which is a special casting method is preferred.

再者,亦可如Advanced Material雜誌1999年第6號、p480~483所記載般,對於稠五苯等前驅物可溶於溶劑者,對藉由塗佈形成之前驅物之膜進行熱處理,而形成目標有機材料之薄膜。 Further, as described in Advanced Material Magazine No. 6 of 1999, p480 to 483, for a precursor in which a precursor such as fused pentene is soluble in a solvent, heat treatment is performed on a film formed by coating a precursor. A film of the target organic material is formed.

作為有機半導體層之膜厚,並無特別限制,所獲得之元件之特性大多會受到由有機半導體所構成之活性層之膜厚較大之影響,其膜厚根據有機半導體而異,較佳為1μm以下,尤佳為10~300nm。 The film thickness of the organic semiconductor layer is not particularly limited, and the characteristics of the obtained element are often affected by the film thickness of the active layer composed of the organic semiconductor, and the film thickness varies depending on the organic semiconductor, and is preferably 1 μm or less, particularly preferably 10 to 300 nm.

[摻雜劑層] [dopant layer]

本發明之有機薄膜電晶體較佳於源極電極及汲極電極與有機半導體層之間具備摻雜劑層。作為摻雜劑層,例如亦可含有具有丙烯酸、乙醯胺、二甲基胺基、氰基、羧基、硝基等官能基之材料、或如苯并醌衍生物、四氰乙烯及四氰基苯醌二甲烷或該等之衍生物等般成為接受電子之受體之材料、或例如具有胺基、三苯基、烷基、羥基、烷氧基、苯基等官能基之材料、如苯二胺等取代胺類、蒽、苯并蒽、取代苯并蒽類、芘、取代芘、咔唑及其衍生物、四硫富瓦烯及其衍生物等般成為作為電子之供予體之施體般之材料,實施所謂摻雜處理。 The organic thin film transistor of the present invention preferably has a dopant layer between the source electrode and the drain electrode and the organic semiconductor layer. As the dopant layer, for example, a material having a functional group such as acrylic acid, acetamide, dimethylamino group, cyano group, carboxyl group, or nitro group, or a benzofluorene derivative, tetracyanoethylene, and tetracyanide may be contained. a material that accepts electron acceptors, or a material having a functional group such as an amine group, a triphenyl group, an alkyl group, a hydroxyl group, an alkoxy group, or a phenyl group, such as a quinone dimethane or a derivative thereof Substituted amines such as phenylenediamine, anthracene, benzopyrene, substituted benzofluorenes, anthracene, substituted anthracene, carbazole and derivatives thereof, tetrathiafulvalene and derivatives thereof, etc. The body-like material is subjected to a so-called doping treatment.

所謂上述摻雜處理,意指將電子授予性分子(受體)或電子供予性分子(施體)作為摻雜劑而導入至該有機半導體層。因此,實施有摻雜之有機半導體層係含有上述縮合多環芳香族化合物及摻雜劑之薄膜。作為使用於本發明之摻雜劑,可採用公知者。 The above doping treatment means that an electron-donating molecule (acceptor) or an electron-donating molecule (donor) is introduced as a dopant into the organic semiconductor layer. Therefore, the doped organic semiconductor layer is provided with a film containing the above condensed polycyclic aromatic compound and a dopant. As the dopant to be used in the present invention, a known one can be used.

作為摻雜劑層所使用之材料,進而可列舉三氯化鐵、TCNQ、F4TCNQ(四氟四氰基苯醌二甲烷)、富勒烯及其衍生物等,較佳為F4TCNQ。 Examples of the material used for the dopant layer include ferric chloride, TCNQ, F4TCNQ (tetrafluorotetracyanobenzoquinone dimethane), fullerene and derivatives thereof, and preferably F4TCNQ.

[自組化單分子膜] [Self-assembled monomolecular film]

又,為了於絕緣層與有機半導體層之間提高有機半導體層之電荷遷移率,較佳具備有自組化單分子膜(SAM)。又,藉由具備SAM,亦可進行閾值電壓之控制。作為用以形成SAM之成分,具體而言,可例示:十八基三氯矽烷、十八基三甲氧基矽烷、癸基三氯矽烷、癸基三甲氧基矽烷、β-苯乙基三氯矽烷、β-苯乙基三甲氧基矽烷(β-PTS)、三氯甲基矽氮烷、或烷烴磷酸、烷烴膦酸、烷烴磺酸、烷烴羧酸等。 Further, in order to increase the charge mobility of the organic semiconductor layer between the insulating layer and the organic semiconductor layer, a self-assembled monomolecular film (SAM) is preferably provided. Further, by providing the SAM, it is also possible to control the threshold voltage. Specific examples of the component for forming the SAM include octadecyltrichlorodecane, octadecyltrimethoxydecane, decyltrichlorodecane, decyltrimethoxydecane, and β-phenylethyltrichloride. Decane, β-phenethyltrimethoxydecane (β-PTS), trichloromethyl decazane, or alkane phosphoric acid, alkanephosphonic acid, alkane sulfonic acid, alkane carboxylic acid, and the like.

本發明之有機薄膜電晶體可組入至各種電子裝置而使用。例如,可在液晶顯示裝置、有機EL顯示裝置、電子紙等各種顯示裝置中用作主動驅動之驅動元件,可用作在各種感測器中使用之電晶體元件,又,可在電子標籤(IC標籤)中與電容器一併構成記憶體作為元件使用。 The organic thin film transistor of the present invention can be incorporated into various electronic devices for use. For example, it can be used as a driving element for active driving in various display devices such as a liquid crystal display device, an organic EL display device, and electronic paper, and can be used as a transistor element used in various sensors, and can be used in an electronic tag ( The IC tag) together with the capacitor constitutes a memory as an element.

[實施例] [Examples]

以下,基於實施例更具體地說明本發明,但本發明不受該等實施例之任何限定。 Hereinafter, the present invention will be more specifically described based on examples, but the present invention is not limited by the examples.

[製造例1](有機無機複合薄膜形成用溶液之製備) [Production Example 1] (Preparation of solution for forming an organic-inorganic composite film)

將二異丙氧基雙乙醯丙酮酸鈦(日本曹達股份有限公司製造,T-50,氧化鈦換算固形物成分量:16.5重量%)30.3g溶解至Solmix(註冊商標)AP-7(Japan Alcohol Trading股份有限公司製造)58.4g後,一面攪拌一面緩慢滴加離子交換水11.3g(相對於鈦為10倍莫耳),使其水解。1天後過濾溶液,而獲得黃色透明之氧化鈦換算濃度5重量%之氧化鈦奈米分散液[A-1]。氧化鈦之平均粒徑為4.1nm且為單分散性。 Dissolved 30.3 g of diisopropoxy acetoacetate (manufactured by Nippon Soda Co., Ltd., T-50, solid content of titanium oxide: 16.5 wt%) to Solmix (registered trademark) AP-7 (Japan) After 58.4 g of Alcohol Trading Co., Ltd., 11.3 g of ion-exchanged water (10-fold molar relative to titanium) was slowly added dropwise while stirring to hydrolyze. After 1 day, the solution was filtered to obtain a titanium oxide nanoparticle dispersion [A-1] having a yellow transparent titanium oxide concentration of 5% by weight. The average particle diameter of titanium oxide is 4.1 nm and is monodisperse.

作為有機矽化合物,使用將乙烯基三甲氧基矽烷(信越化學工業股份有限公司製造、KBM-1003)(SP值:7.00)及3-甲基丙烯醯氧基丙基三甲氧基矽烷(信越化學工業股份有限公司製造、KBM-503)(SP值:9.48)以7/3(=乙烯基三甲氧基矽烷/3-甲基丙烯醯氧基丙基三甲氧基矽烷)之莫耳比混合之液體[B-1]。 As the organic ruthenium compound, vinyl trimethoxy decane (manufactured by Shin-Etsu Chemical Co., Ltd., KBM-1003) (SP value: 7.00) and 3-methacryloxypropyltrimethoxy decane (Shin-Etsu Chemical) were used. Manufactured by Industrial Co., Ltd., KBM-503) (SP value: 9.48) mixed with a molar ratio of 7/3 (=vinyltrimethoxydecane/3-methylpropenyloxypropyltrimethoxydecane) Liquid [B-1].

以成為元素比(Ti/Si=1/9)之方式將上述[A-1]與[B-1]混合,製作攪拌了12小時之液體[C-1]。[C-1]之固形物成分為29.2重量%。 The above [A-1] and [B-1] were mixed so as to have an element ratio (Ti/Si = 1/9), and a liquid [C-1] which was stirred for 12 hours was prepared. The solid content of [C-1] was 29.2% by weight.

作為電磁輻射硬化性化合物,以使胺酯丙烯酸酯低聚物(日本合成化 學工業股份有限公司製造、紫光UV1700B)(SP值:10~11)成為40重量%之方式溶解至甲基異丁基酮(MIBK)。使作為光聚合起始劑之1-羥基-環己基苯基酮(和光純藥工業股份有限公司製造)以相對於胺酯丙烯酸酯低聚物之固形物成分成為4重量%之方式溶解於該溶液,而製作溶液[D-1]。 As an electromagnetic radiation curable compound, an amine ester acrylate oligomer (synthetic in Japan) Manufactured by Societe Generale Co., Ltd., Violet UV1700B) (SP value: 10 to 11) dissolved in methyl isobutyl ketone (MIBK) in a form of 40% by weight. 1-hydroxy-cyclohexyl phenyl ketone (manufactured by Wako Pure Chemical Industries, Ltd.) as a photopolymerization initiator was dissolved in 4% by weight based on the solid content of the urethane acrylate oligomer. Solution, and make solution [D-1].

以固形物成分之比率成為10重量%/90重量%=[C-1]/[D-1]之方式,將上述[C-1]液與[D-1]溶液混合,製作有機無機複合薄膜形成用溶液[E-1]。 The above-mentioned [C-1] liquid and the [D-1] solution are mixed so that the ratio of the solid content becomes 10% by weight/90% by weight = [C-1] / [D-1], and an organic-inorganic composite is produced. Film forming solution [E-1].

[實施例1] [Example 1]

使用聚萘二甲酸乙二酯膜(PEN膜)作為基板。於該PEN膜上,使用愛發科(ULVAC)公司製造之真空蒸鍍機「EX-400」(真空度:1.3×10-4Pa),依序積層厚度3nm之鉻(Cr)層、厚度20nm之金(Au)層、及厚度5nm之鉻(Cr)層,而形成閘極電極。 A polyethylene naphthalate film (PEN film) was used as the substrate. On the PEN film, a vacuum vapor deposition machine "EX-400" manufactured by ULVAC (vacuum degree: 1.3 × 10 -4 Pa) was used to sequentially deposit a chromium (Cr) layer having a thickness of 3 nm and a thickness. A 20 nm gold (Au) layer and a 5 nm thick chromium (Cr) layer form a gate electrode.

繼而,利用稀釋液將製造例1中所製備之有機無機複合薄膜形成溶液[E-1]稀釋至4倍,使用旋轉塗佈機(2000rpm)將該稀釋後之液體以20秒塗佈於閘極電極上,進行乾燥(熱風乾燥、80℃、3分鐘)、紫外線照射(集光型高壓水銀燈、160W/cm、燈高9.8cm、累積照射量約500mJ/cm2),而獲得膜厚650nm之絕緣層。 Then, the organic-inorganic composite film-forming solution [E-1] prepared in Production Example 1 was diluted to 4 times with a diluent, and the diluted liquid was applied to the gate in 20 seconds using a spin coater (2000 rpm). On the electrode, drying (hot air drying, 80 ° C, 3 minutes), ultraviolet irradiation (light collecting type high pressure mercury lamp, 160 W/cm, lamp height 9.8 cm, cumulative irradiation amount: about 500 mJ/cm 2 ), and obtaining a film thickness of 650 nm Insulation layer.

繼而,將於閘極電極上形成有絕緣層之PEN膜切出2.5×2.5cm2Then, a PEN film having an insulating layer formed on the gate electrode was cut out to 2.5 × 2.5 cm 2 .

其次,依據本發明人等所開發出之塗佈法(邊緣澆鑄:Apple.Phys.Exp.2,111501(2009)),形成有機半導體層。即,於上述切出之PEN膜上放置有溶液保持用之矽基板之碎片(以下亦稱為「溶液保持構造」)。一面使基板傾斜,一面使有機半導體溶液(Pi-crystal公司製造,C10-DNBDT) 以75℃垂滴至溶液保持構造之邊緣。隨著溶劑之蒸發,結晶一面生長一面貼附於基板,以數分鐘結束結晶生長。於該狀態下,於減壓下以室溫放置1小時,進而於減壓下以100℃放置8小時,使結晶膜完全地乾燥(膜厚:10~100nm)。 Next, an organic semiconductor layer was formed in accordance with a coating method developed by the present inventors (edge casting: Apple. Phys. Exp. 2, 111501 (2009)). That is, a fragment of the crucible substrate for holding the solution (hereinafter also referred to as "solution holding structure") is placed on the PEN film which is cut out. An organic semiconductor solution (C10-DNBDT, manufactured by Pi-crystal Corporation) while tilting the substrate Drop the solution at 75 ° C to the edge of the solution retention structure. As the solvent evaporates, the crystal grows on one side and sticks to the substrate, and the crystal growth ends in a few minutes. In this state, the film was allowed to stand at room temperature for 1 hour under reduced pressure, and further allowed to stand at 100 ° C for 8 hours under reduced pressure to completely dry the crystal film (film thickness: 10 to 100 nm).

為了於該有機半導體層上製作源極-汲極電極,使用通道(L:100μm,W:2000μm)之陰影遮罩,形成由F4-TCNQ所構成之厚度1nm之摻雜劑層後,以40nm之厚度蒸鍍金,而製作底部閘極-頂部接點型之有機薄膜電晶體。 In order to fabricate the source-drain electrode on the organic semiconductor layer, a shadow mask of a channel (L: 100 μm, W: 2000 μm) was used to form a dopant layer of 1 nm thick composed of F4-TCNQ, and then 40 nm. The thickness is evaporated to gold, and a bottom gate-top contact type organic thin film transistor is fabricated.

針對所製作之有機薄膜電晶體,使用半導體參數分析儀(型號「keithley 4200」、凱斯雷儀器股份有限公司製造)測定了傳輸特性。 The transmission characteristics were measured using a semiconductor parameter analyzer (model "keithley 4200", manufactured by Kaysley Instruments Co., Ltd.) for the produced organic thin film transistor.

圖1A係表示實施例1之有機薄膜電晶體之飽和區域之結果,圖1B係表示實施例1之有機薄膜電晶體之線形區域之結果。 1A shows the result of the saturated region of the organic thin film transistor of Example 1, and FIG. 1B shows the result of the linear region of the organic thin film transistor of Example 1.

根據圖1A之結果,使用下述式(1),算出實施例1之有機薄膜電晶體之飽和區域之載子遷移率及閾值電壓。 From the results of FIG. 1A, the carrier mobility and the threshold voltage of the saturated region of the organic thin film transistor of Example 1 were calculated using the following formula (1).

此處,ID為汲極電流,W為通道之寬度,L為通道之長度,μ為載子遷移率,COX為閘極絕緣膜之每單元面積之電容,VG為閘極電壓,VT為閾值電壓。 Here, I D is the drain current, W is the width of the channel, L is the length of the channel, μ is the carrier mobility, C OX is the capacitance per unit area of the gate insulating film, and V G is the gate voltage. V T is the threshold voltage.

汲極電壓(VD)設為-30V,使閘極電壓(VG)於20V~-30V變化,測定遷移率。於飽和區域,獲得了5.2cm2/Vs之載子遷移率。閾值電壓為 1.9V。 The drain voltage (V D ) was set to -30 V, and the gate voltage (V G ) was varied from 20 V to -30 V to measure the mobility. In the saturated region, a carrier mobility of 5.2 cm 2 /Vs was obtained. The threshold voltage is 1.9V.

根據圖1B之結果,使用下述式(2),算出實施例1之有機薄膜電晶體之線形區域之載子遷移率及閾值電壓。 From the results of FIG. 1B, the carrier mobility and the threshold voltage of the linear region of the organic thin film transistor of Example 1 were calculated using the following formula (2).

汲極電壓(VD)設為-1V,使閘極電壓(VG)於20V~-30V變化,測定了遷移率。於線形區域,獲得了4.5cm2/Vs之載子遷移率。閾值電壓為-4.3V。 The drain voltage (V D ) was set to -1 V, and the gate voltage (V G ) was varied from 20 V to -30 V, and the mobility was measured. In the linear region, a carrier mobility of 4.5 cm 2 /Vs was obtained. The threshold voltage is -4.3V.

又,將載子遷移率相對於由上述式(1)及(2)所求出之閘極電壓之變化示於圖2A及圖2B。圖2A為實施例1之有機薄膜電晶體之飽和區域之載子遷移率(場效遷移率),圖2B為實施例1之有機薄膜電晶體於線形區域之載子遷移率(有效遷移率)。由圖2A及圖2B確認,相對於閘極電壓,顯示出有實效之載子遷移率。 Further, the change in the carrier mobility with respect to the gate voltages obtained by the above formulas (1) and (2) is shown in FIGS. 2A and 2B. 2A is a carrier mobility (field-effect mobility) of a saturated region of the organic thin film transistor of Example 1, and FIG. 2B is a carrier mobility (effective mobility) of the organic thin film transistor of Example 1 in a linear region. . It is confirmed from Fig. 2A and Fig. 2B that the effective carrier mobility is shown with respect to the gate voltage.

又,圖3表示實施例1之有機薄膜電晶體之輸出特性。汲極電流(ID)與閘極電壓(VG)、汲極電流(ID)與汲極電壓(VD)均顯示出明確之相關關係,確認了實施例1之有機電晶體顯示出優異之特性。 Further, Fig. 3 shows the output characteristics of the organic thin film transistor of Example 1. The gate current (I D ) and the gate voltage (V G ), the gate current (I D ) and the drain voltage (V D ) all show a clear correlation, confirming that the organic transistor of Example 1 shows Excellent characteristics.

[實施例2] [Embodiment 2]

關於實施例2,就於在形成有閘極電極及絕緣層之PEN膜上形成有機半導體層之前,於絕緣層上形成β-苯乙基三氯矽烷(β-PTS)(信越化學製造之LP-1990)之自組化單分子膜之方面而言,與實施例1不同。關於自組化單分子膜,使用UV臭氧清洗裝置(SEN LIGHTS公司製造)對形 成有閘極電極及絕緣層之PEN膜進行10分鐘UV臭氧清洗,進而於β-苯乙基三氯矽烷中浸漬18小時,而形成於絕緣層上。 With respect to Example 2, β-phenethyltrichlorodecane (β-PTS) was formed on the insulating layer before the formation of the organic semiconductor layer on the PEN film on which the gate electrode and the insulating layer were formed (LP manufactured by Shin-Etsu Chemical Co., Ltd.) -1990) is different from Example 1 in terms of a self-assembled monomolecular film. For the self-assembled monomolecular film, a UV ozone cleaning device (manufactured by SEN LIGHTS Co., Ltd.) is used. The PEN film having the gate electrode and the insulating layer was subjected to UV ozone cleaning for 10 minutes, and further immersed in β-phenethyltrichloromethane for 18 hours to form an insulating layer.

於實施例2中,藉由與實施例1相同之方法測定傳輸特性。圖4A表示實施例2之有機薄膜電晶體之飽和區域之結果,圖4B表示實施例2之有機薄膜電晶體之線形區域之結果。 In Example 2, the transfer characteristics were measured by the same method as in Example 1. 4A shows the result of the saturated region of the organic thin film transistor of Example 2, and FIG. 4B shows the result of the linear region of the organic thin film transistor of Example 2.

根據圖4A之結果,算出飽和區域之載子遷移率及閾值電壓。與實施例1同樣地,汲極電壓(VD)設為-30V,使閘極電壓(VG)於20V~-30V變化,測定了遷移率。於飽和區域,獲得了4.5cm2/Vs之載子遷移率。閾值電壓為16V。 Based on the results of FIG. 4A, the carrier mobility and the threshold voltage of the saturated region were calculated. In the same manner as in the first embodiment, the gate voltage (V D ) was set to -30 V, and the gate voltage (V G ) was changed from 20 V to -30 V, and the mobility was measured. In the saturated region, a carrier mobility of 4.5 cm 2 /Vs was obtained. The threshold voltage is 16V.

又,根據圖4B之結果,算出線形區域之載子遷移率及閾值電壓。與實施例1同樣地,汲極電壓(VD)設為-1V,使閘極電壓(VG)於20V~-30V變化,測定了遷移率。於線形區域,獲得了4.0cm2/Vs之載子遷移率。閾值電壓為29V。可確認藉由形成自組化單分子膜,可在不較大地改變載子遷移率之情況下控制閾值電壓。 Further, based on the result of FIG. 4B, the carrier mobility and the threshold voltage of the linear region are calculated. In the same manner as in the first embodiment, the gate voltage (V D ) was set to -1 V, and the gate voltage (V G ) was changed from 20 V to -30 V, and the mobility was measured. In the linear region, a carrier mobility of 4.0 cm 2 /Vs was obtained. The threshold voltage is 29V. It was confirmed that by forming the self-assembled monomolecular film, the threshold voltage can be controlled without largely changing the carrier mobility.

又,與實施例1同樣地,將載子遷移率相對於由上述式(1)及(2)求出之閘極電壓之變化示於圖5A及圖5B。圖5A為實施例2之有機薄膜電晶體之飽和區域之載子遷移率(場效遷移率),實施例2之有機薄膜電晶體之圖5B為於線形區域之載子遷移率(有效遷移率)。 Further, in the same manner as in the first embodiment, the change in the carrier mobility with respect to the gate voltages obtained by the above formulas (1) and (2) is shown in FIGS. 5A and 5B. 5A is a carrier mobility (field-effect mobility) of a saturated region of the organic thin film transistor of Example 2, and FIG. 5B of the organic thin film transistor of Example 2 is a carrier mobility (effective mobility) in a linear region. ).

又,圖6表示實施例2之有機薄膜電晶體之輸出特性。汲極電流(ID)及閘極電壓(VG)、汲極電流(ID)及汲極電壓(VD)均表示明確之相關關係,確認了實施例2之有機電晶體顯示出優異之特性。 Further, Fig. 6 shows the output characteristics of the organic thin film transistor of Example 2. The gate current (I D ) and the gate voltage (V G ), the drain current (I D ), and the drain voltage (V D ) all indicate a clear correlation, confirming that the organic transistor of Example 2 shows excellent Characteristics.

[產業上之可利用性] [Industrial availability]

本發明之有機薄膜電晶體維持與有機半導體層之接著性,且顯示出實用之載子遷移率。 The organic thin film transistor of the present invention maintains adhesion to an organic semiconductor layer and exhibits practical carrier mobility.

Claims (6)

一種有機薄膜電晶體,其具備由含有下述a)及b)之有機無機複合薄膜所構成之閘極絕緣層,a)式(I)所表示之有機矽化合物之縮合物、及b)電磁輻射硬化性化合物之硬化物,RnSiX4-n (I)(式中,R表示碳原子直接鍵結於Si之有機基,X表示羥基或水解性基;n表示1或2,n為2時,各R可相同亦可不同,(4-n)為2以上時,各X可相同,亦可不同)。 An organic thin film transistor comprising a gate insulating layer composed of an organic-inorganic composite film comprising the following a) and b), a) a condensate of an organic germanium compound represented by the formula (I), and b) an electromagnetic A cured product of a radiation curable compound, R n SiX 4-n (I) (wherein R represents a carbon atom directly bonded to an organic group of Si, X represents a hydroxyl group or a hydrolyzable group; n represents 1 or 2, and n is At 2 o'clock, each R may be the same or different. When (4-n) is 2 or more, each X may be the same or different. 如申請專利範圍第1項之有機薄膜電晶體,其中該式(I)所表示之有機矽化合物係由有機矽化合物Si1與有機矽化合物Si2所構成,其中該有機矽化合物Si1藉由Fedors之推算法求出之R之溶解度參數SP1較藉由Fedors之推算法求出之電磁輻射硬化性化合物之溶解度參數SP2小1.6以上,該有機矽化合物Si2之該溶解度參數SP1較該溶解度參數SP2小未達1.6或與該溶解度參數SP2相等或較該溶解度參數SP2大,該有機矽化合物Si1與該有機矽化合物Si2之莫耳比Si1:Si2為5:5~10:0。 The organic thin film transistor according to claim 1, wherein the organic germanium compound represented by the formula (I) is composed of an organic germanium compound Si1 and an organic germanium compound Si2, wherein the organic germanium compound Si1 is calculated by Fedors. The solubility parameter SP1 of the R obtained by the method is smaller than the solubility parameter SP2 of the electromagnetic radiation curable compound obtained by the Fedors algorithm, and the solubility parameter SP1 of the organic germanium compound Si2 is smaller than the solubility parameter SP2. 1.6 or equal to or greater than the solubility parameter SP2, the molar ratio of the organic germanium compound Si1 to the organic germanium compound Si2 is 5:5 to 10:0. 如申請專利範圍第1項之有機薄膜電晶體,其中該式(I)所表示之有機矽化合物係由式(I-1)所表示之化合物、式(I-2)所表示之化合物及若存在則為該等之水解縮合物所構成, R1 nSiX4-n...(I-1)(式中,n表示1或2,n為2時,R1相互可相同亦可不同,R1為有機基,R1中之1個以上表示含乙烯基之烴基;X表示羥基或水解性基,相互可相同,亦可不同)R2 nSiX4-n...(I-2)(式中,n表示1或2,n為2時,R2可相同亦可不同,R2表示碳原子直接鍵結於式中之Si之含乙烯基之烴基以外之有機基;X表示羥基或水解性基,相互可相同,亦可不同){[式(I-1)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]}/{[式(I-1)之化合物]+[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}×100=30~100莫耳%,且{[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}/{[式(I-1)之化合物]+[式(I-2)之化合物]+[若存在的話,水解縮合物中之源自式(I-1)之化合物之單元]+[若存在的話,水解縮合物中之源自式(I-2)之化合物之單元]}×100=0~70莫耳%。 The organic thin film transistor according to the first aspect of the invention, wherein the organic oxime compound represented by the formula (I) is a compound represented by the formula (I-1), a compound represented by the formula (I-2), and If present, it is composed of the hydrolysis condensate, R 1 n SiX 4-n . . . (I-1) (wherein, n represents 1 or 2, and when n is 2, R 1 may be the same or different, R 1 is an organic group, and one or more of R 1 represents a vinyl group containing a vinyl group; It means that the hydroxyl group or the hydrolyzable group may be the same or different from each other) R 2 n SiX 4-n . . . (I-2) (wherein, n represents 1 or 2, and when n is 2, R 2 may be the same or different, and R 2 represents an organic group other than a vinyl group-containing hydrocarbon group in which a carbon atom is directly bonded to Si in the formula. a group; a compound represented by the formula (I-1); Unit]}/{[Compound of the formula (I-1)]+[Compound of the formula (I-2)]+[If present, a unit derived from the compound of the formula (I-1) in the hydrolysis condensate ]+[If present, the unit derived from the compound of the formula (I-2) in the hydrolysis condensate]}×100=30-100 mol%, and {[the compound of the formula (I-2)]+[ If present, the unit derived from the compound of the formula (I-2) in the hydrolysis condensate]}/{[the compound of the formula (I-1)]+[the compound of the formula (I-2)]+[if present In the case of the hydrolysis condensate, the unit derived from the compound of the formula (I-1)] + [if present, the unit derived from the compound of the formula (I-2) in the hydrolysis condensate]} × 100 = 0~ 70% by mole. 一種顯示裝置,其具備申請專利範圍第1至3項中任一項之有機薄膜電晶體。 A display device comprising the organic thin film transistor according to any one of claims 1 to 3. 一種感測器,其具備申請專利範圍第1至3項中任一項之有機薄膜電晶體。 A sensor comprising the organic thin film transistor according to any one of claims 1 to 3. 一種電子標籤,其具有申請專利範圍第1至3項中任一項之有機薄膜電晶體。 An electronic label having the organic thin film transistor of any one of claims 1 to 3.
TW104142887A 2015-01-14 2015-12-21 Organic thin film transistor TWI623590B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP2015-005413 2015-01-14
JP2015005413 2015-01-14

Publications (2)

Publication Number Publication Date
TW201631041A true TW201631041A (en) 2016-09-01
TWI623590B TWI623590B (en) 2018-05-11

Family

ID=56405616

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104142887A TWI623590B (en) 2015-01-14 2015-12-21 Organic thin film transistor

Country Status (5)

Country Link
JP (1) JP6417626B2 (en)
KR (1) KR101960622B1 (en)
CN (1) CN107112366B (en)
TW (1) TWI623590B (en)
WO (1) WO2016114061A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7249001B2 (en) * 2018-09-04 2023-03-30 国立大学法人 東京大学 Organic semiconductor element, strain sensor, vibration sensor, and method for manufacturing organic semiconductor element
US20210383943A1 (en) 2018-10-22 2021-12-09 The University Of Tokyo Electrically conductive polymer material and method for producing same, polymer film and method for producing same, electrically conductive polymer film, photoelectric conversion element, and field effect transistor
CN111640874B (en) * 2020-05-07 2021-11-19 山东大学 Method for repairing surface step defect based on n-type organic semiconductor crystal and application

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2795524B2 (en) * 1990-06-19 1998-09-10 大八化学工業株式会社 Composition for forming protective film
JP2004161876A (en) * 2002-11-13 2004-06-10 Shin Etsu Chem Co Ltd Composition for forming porous film, porous film, method for producing the same, interlayer insulating film and semiconductor apparatus
KR101012950B1 (en) * 2003-10-15 2011-02-08 삼성전자주식회사 Composition for Preparing Organic Insulator and the Organic Insulator
KR101001441B1 (en) 2004-08-17 2010-12-14 삼성전자주식회사 Organic-Inorganic Metal Hybrid Material and Organic Insulator Composition Comprising the Same
JP2008140786A (en) * 2005-03-28 2008-06-19 Pioneer Electronic Corp Methods of manufacturing gate insulating film, organic transistor, and organic electroluminescent display device, and display
JP2008019285A (en) * 2006-07-10 2008-01-31 Sekisui Chem Co Ltd Method for producing metal-containing polymer, metal-containing polymer, photosensitive resin composition and semiconductor element
JP5407860B2 (en) * 2008-03-18 2014-02-05 東レ株式会社 Gate insulating material, gate insulating film, and organic field effect transistor
JP2010165930A (en) * 2009-01-16 2010-07-29 Idemitsu Kosan Co Ltd Organic thin-film transistor, manufacturing method thereof and device equipped with the same
WO2012053453A1 (en) * 2010-10-18 2012-04-26 ダイキン工業株式会社 Fluorine-containing composition for forming coating-type insulating film, insulating film, and thin-film transistor
EP2873701A4 (en) * 2012-07-10 2016-01-06 Nippon Soda Co Organic-inorganic complex, and forming composition thereof
KR102059489B1 (en) * 2013-04-10 2019-12-26 주식회사 동진쎄미켐 Negative photosensitive organic-inorganic hybrid insulator

Also Published As

Publication number Publication date
KR20170093939A (en) 2017-08-16
TWI623590B (en) 2018-05-11
WO2016114061A1 (en) 2016-07-21
CN107112366A (en) 2017-08-29
CN107112366B (en) 2020-07-10
JPWO2016114061A1 (en) 2017-09-14
KR101960622B1 (en) 2019-03-20
JP6417626B2 (en) 2018-11-07

Similar Documents

Publication Publication Date Title
Liu et al. Self‐Assembled Monolayers of Phosphonic Acids with Enhanced Surface Energy for High‐Performance Solution‐Processed N‐Channel Organic Thin‐Film Transistors
TWI461459B (en) Polyimide precursor and polyimide, and image-forming underlayer application solution
US8373161B2 (en) Organic thin film transistor
US20120153285A1 (en) Solution processable passivation layers for organic electronic devices
EP2122672B1 (en) Laminate structure and its manufacturing method
US10879475B2 (en) Composition, electronic device, and thin film transistor
TWI464182B (en) Gate insulating film forming composition for thin-film transistor
US9988472B2 (en) Composition, electronic device, and thin film transistor
TW201631041A (en) Organic thin film transistor
TWI648889B (en) Organic thin film transistor
US9431619B2 (en) Composition for insulator, insulator, and thin film transistor
TWI535569B (en) Organic semiconductor components
TW201547074A (en) Organic thin film transistor
US10358578B2 (en) Insulating ink and insulator and thin film transistor and electronic device
KR102153604B1 (en) Composition for insulator and insulator and thin film transistor
JP4343572B2 (en) Method for manufacturing organic semiconductor element
JPWO2008090828A1 (en) Organic thin film transistor, manufacturing method thereof, and organic semiconductor device
JP2004281477A (en) Organic thin film transistor and its fabricating method
JP5761841B2 (en) Organic semiconductor device having insulating layer containing phenolic hydroxyl group-containing aromatic polyamide resin and method for producing the same
JP5532839B2 (en) Organic semiconductor device
US9525135B2 (en) Thixotropic composition
JP2016131215A (en) Organic thin film transistor