TW201617587A - Measurement device of linear bearing stage and measuring method thereof - Google Patents
Measurement device of linear bearing stage and measuring method thereof Download PDFInfo
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Abstract
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本發明是關於一種量測裝置，特別是關於一種線性平台的量測裝置。This invention relates to a measuring device, and more particularly to a measuring device for a linear platform.
習知技術於線性平台之量測及定位常使用雷射干涉儀、光學尺、自動視準儀(autocollimator)或電子水平儀等量測儀器進行量測，但由於上述之量測元件的整體架構太重，並不適合安裝於精密定位機械上作線上量測。The measurement and positioning of the conventional technology on the linear platform is often measured using a laser interferometer, an optical scale, an autocollimator or an electronic level meter, but the overall structure of the measuring component is too Heavy, not suitable for installation on precision positioning machinery for on-line measurement.
其中，習知技術中雷射干涉儀的量測方式是利用光學干涉的方式進行離線校正，光學干涉是藉由將光束分光並經由不同路徑到反射鏡後反射至光學量測儀器中，再透過兩個分光光束之行程路徑的差異而產生之干涉條紋，最後再將干涉條紋換算成直度誤差，但由於此方式所需進行的計算較為繁複，因此僅能以離線的方式進行計算、校正，而無法達成線型平台即時量測的需求。Among them, the measurement method of the laser interferometer in the prior art is to perform off-line correction by means of optical interference, and the optical interference is reflected by the light beam and reflected to the optical mirror through different paths, and then transmitted through the optical measuring instrument. Interference fringes generated by the difference of the travel paths of the two split beams, and finally the interference fringes are converted into straightness errors, but since the calculations required in this manner are complicated, calculation and correction can only be performed in an off-line manner. It is impossible to meet the needs of real-time measurement of linear platforms.
本發明的主要目的在於藉由將設置於移動平台之光源所提供之入射光照射至設置於導軌的二維光柵，且二維光柵的反射光形成光斑於四象限感測器上，而使四象限感測器產生感測訊號，由於光斑之強度及角度會隨著移動平台的移動而改變，進而改變四象限感測器之感測訊號的強度，因此，將四象限感測器所感測之感測訊號透過斜率訊號公式及位置訊號公式的計算後即可求得線性平台之一運動軸向及一徑向的位移量，進而求得線性平台之直度誤差。The main object of the present invention is to illuminate the two-dimensional grating provided on the guide rail by the incident light provided by the light source disposed on the moving platform, and the reflected light of the two-dimensional grating forms a spot on the four-quadrant sensor, thereby making four The quadrant sensor generates a sensing signal, and since the intensity and angle of the spot change with the movement of the moving platform, thereby changing the intensity of the sensing signal of the four-quadrant sensor, the four-quadrant sensor senses After the sensing signal is calculated by the slope signal formula and the position signal formula, the motion axis and the radial displacement of the linear platform can be obtained, and the straightness error of the linear platform can be obtained.
本發明之一種線性平台之量測裝置，其用以量測一線性平台的位移量，該線性平台之量測裝置包含一光源、一二維光柵、一四象限感測器及一處理器，該光源提供一入射光，該二維光柵設置於該入射光的路徑上，該二維光柵反射一反射光，該四象限感測器設置於該反射光的路徑上，該四象限感測器接收該反射光，以產生複數個感測訊號，該處理器接收該些感測訊號，並將該些感測訊號透過該二維光柵之一斜率訊號公式計算一斜率訊號，且該處理器將該些感測訊號透過二維光柵之一位置訊號公式求得一初始位置訊號及一終止位置訊號，其中該處理器根據該斜率訊號、該初始位置訊號及該終止位置訊號求得該線性平台的位移量。The measuring device of the linear platform is used for measuring the displacement of a linear platform. The measuring device of the linear platform comprises a light source, a two-dimensional grating, a four-quadrant sensor and a processor. The light source provides an incident light, the two-dimensional grating is disposed on the path of the incident light, the two-dimensional grating reflects a reflected light, and the four-quadrant sensor is disposed on the path of the reflected light, the four-quadrant sensor Receiving the reflected light to generate a plurality of sensing signals, the processor receiving the sensing signals, and calculating the slope signals by using the slope signal formula of the two-dimensional grating, and the processor will The sensing signals obtain an initial position signal and a termination position signal through a position signal formula of the two-dimensional grating, wherein the processor obtains the linear platform according to the slope signal, the initial position signal, and the termination position signal. The amount of displacement.
本發明藉由簡易的訊號分析得到該斜率訊號的位階數，並將該斜率訊號之位階數所對應之位階位移量及斜率位移量疊合後即可求得該線性平台的位移量，由於計算簡潔快速，因此可適用於線上量測該線性平台之位移及直度誤差，進而藉由資訊的回授而即時地控制該線性平台。In the present invention, the number of steps of the slope signal is obtained by simple signal analysis, and the displacement of the step and the displacement of the slope corresponding to the order of the slope signal are superimposed, and the displacement of the linear platform can be obtained, It is simple and fast, so it can be applied to measure the displacement and straightness error of the linear platform online, and then control the linear platform instantaneously by feedback of information.
請參閱第1、2及3圖，其分別為本發明之一種線性平台之量測方法10及一種線性平台之量測裝置100，其用以量測一線性平台200的位移量。請參閱第1圖，於「提供線性平台之量測裝置11」中提供該線性平台之量測裝置100，請參閱第2圖，在本實施例中，該線性平台之量測裝置100包含一光源110、一準直透鏡120、一偏極分光元件130、一第一反射元件140、一二維光柵150、一第二反射元件160、一聚焦透鏡170及一四象限感測器(QPD)180。Please refer to Figures 1, 2 and 3, which are respectively a linear platform measuring method 10 and a linear platform measuring device 100 for measuring the displacement of a linear platform 200. Referring to FIG. 1 , the measuring device 100 of the linear platform is provided in the “measuring device 11 for providing a linear platform”. Referring to FIG. 2 , in the embodiment, the measuring device 100 of the linear platform includes a The light source 110, a collimating lens 120, a polarizing beam splitting element 130, a first reflecting element 140, a two-dimensional grating 150, a second reflecting element 160, a focusing lens 170 and a four-quadrant sensor (QPD) 180.
請參閱第2圖，該光源110提供一入射光，較佳的，該光源110為一雷射光，該準直透鏡120設置於該入射光的路徑上，且該準直透鏡120位於於該光源110及該偏極分光元件130之間，該準直透鏡120用以該入射光轉為準直光束，以避免入射光於傳播路徑中發散。該偏極分光元件130設置於該入射光的路徑上，該偏極分光元件130具有一極化分光鏡131及一四分之一波片132，該極化分光鏡131用以將該入射光導引至該二維光柵150，在本實施例中，該入射光是穿透該極化分光鏡131而到達該四分之一波片132，該四分之一波片132用以偏振該入射光。Referring to FIG. 2, the light source 110 provides an incident light. Preferably, the light source 110 is a laser beam. The collimating lens 120 is disposed on the path of the incident light, and the collimating lens 120 is located at the light source. Between 110 and the polarizing element 130, the collimating lens 120 converts the incident light into a collimated beam to prevent incident light from diverging in the propagation path. The polarizing beam splitting element 130 is disposed on the path of the incident light. The polarizing beam splitting element 130 has a polarizing beam splitter 131 and a quarter wave plate 132. The polarizing beam splitter 131 is used for the incident light. Guided to the two-dimensional grating 150, in the embodiment, the incident light penetrates the polarizing beam splitter 131 to reach the quarter-wave plate 132, and the quarter-wave plate 132 is used to polarize the light. Incident light.
請參閱第2圖，該第一反射元件140設置於該偏極分光元件130及該二維光柵150之間，該第一反射元件140將該入射光由該偏極分光元件130導引至該二維光柵150，在本實施例中，該第一反射元件140為一反射鏡。該二維光柵150設置於該入射光的路徑上，且該二維光柵150反射一反射光，請參閱第4圖，較佳的，該二維光柵150為一反射式二維弦波光柵，其中，該反射性式二維弦波光柵之輪廓方程式為： 。 為該反射性式二維弦波光柵之輪廓方程式， 分別為該反射性式二維弦波光柵之一x 軸方向及一z 軸方向的弦波振幅， 分別為該反射性式二維弦波光柵之該x 軸方向及該z 軸方向的弦波波長，x 及y 分別為該二維光柵150之該x 軸方向及該z 軸方向的位置。在本實施利中， 。分別對該二維光柵150之x 及z 進行偏微分可求得該二維光柵150的該x 軸方向及該z 軸方向的斜率方程： 由上式可知，該二維光柵150之該x 軸方向及該z 軸方向的斜率訊號公式僅與該x 軸方向及該z 軸方向的數據有關，因此，可分別獨立計算該二維光柵150之x 軸方向及z軸方向的斜率訊號。Referring to FIG. 2 , the first reflective element 140 is disposed between the polarized light splitting component 130 and the two-dimensional grating 150 , and the first reflective component 140 guides the incident light from the polarized light splitting component 130 to the The two-dimensional grating 150 is in the embodiment, the first reflective element 140 is a mirror. The two-dimensional grating 150 is disposed on the path of the incident light, and the two-dimensional grating 150 reflects a reflected light. Referring to FIG. 4, preferably, the two-dimensional grating 150 is a reflective two-dimensional sine wave grating. Wherein, the contour equation of the reflective two-dimensional sine wave grating is: . The contour equation of the reflective two-dimensional sine wave grating is respectively a x- axis direction of the reflective two-dimensional sine wave grating and a sine wave amplitude in a z- axis direction, respectively, the reflective two-dimensional sine wave The x- axis direction of the grating and the sine wave wavelength in the z- axis direction, x and y are the positions of the two-dimensional grating 150 in the x- axis direction and the z- axis direction, respectively. In this implementation, it is. The x- axis direction of the two-dimensional grating 150 and the slope equation of the z- axis direction can be obtained by separately differentiating the x and z of the two-dimensional grating 150: From the above formula, the x- axis of the two-dimensional grating 150 The direction signal and the slope signal formula in the z- axis direction are only related to the data in the x- axis direction and the z- axis direction. Therefore, the slope signals of the two-dimensional grating 150 in the x- axis direction and the z-axis direction can be independently calculated.
請參閱第2圖，由於該二維光柵150所反射之反射光是沿原路徑反射，因此，位於該入射光路徑上的該第一反射元件140及該偏極分光元件130亦位於該反射光的路徑上，因此，該第一反射元件140將該反射光由該二維光柵150導引至該偏極分光元件130。該四分之一波片132偏振該反射光，而該極化分光鏡131將該反射光導引至該四象限感測器180，在本實施例中，該反射光是經由該極化分光鏡131的反射而改變方向。Referring to FIG. 2, since the reflected light reflected by the two-dimensional grating 150 is reflected along the original path, the first reflective element 140 and the polarized light splitting element 130 located on the incident light path are also located at the reflected light. Therefore, the first reflective element 140 directs the reflected light from the two-dimensional grating 150 to the polarized beam splitting element 130. The quarter-wave plate 132 polarizes the reflected light, and the polarizing beam splitter 131 directs the reflected light to the four-quadrant sensor 180. In the embodiment, the reflected light is split by the polarization. The reflection of the mirror 131 changes direction.
請參閱第2圖，該第二反射元件160設置於該偏極分光元件130及該聚焦透鏡170之間，該第二反射元件160將該反射光由該偏極分光元件130導引至該聚焦透鏡170，在本實施例中，該第二反射元件160為一反射鏡，該聚焦透鏡170位於該二維光柵150及該四象限感測器180之間以將該反射光聚焦為一光斑LS於該四象限感測器180上。Referring to FIG. 2 , the second reflective component 160 is disposed between the polarizing beam splitting component 130 and the focusing lens 170 , and the second reflective component 160 directs the reflected light from the polarizing beam splitting component 130 to the focus. The lens 170 is in the embodiment, the second reflective element 160 is a mirror, and the focusing lens 170 is located between the two-dimensional grating 150 and the four-quadrant sensor 180 to focus the reflected light into a spot LS. On the four-quadrant sensor 180.
請參閱第2及5圖，該四象限感測器180設置於該反射光的路徑上，且該四象限感測器180接收聚焦之該反射光，以產生複數個感測訊號 、 、 、 ，請參閱第5圖，為光斑LS照射至該四象限感測器180的示意圖，該四象限感測器180具有一第一象限感測單元181、一第二象限感測單元182、一第三象限感測單元183及一第四象限感測單元184且定義有一i 軸及一j 軸，在本實施例中，當該光斑LS照射至該第一象限感測單元181、該第二象限感測單元182、該第三象限感測單元183及該第四象限感測單元184時，該些感測單元會分別產生一電流訊號，或在其他實施例中，該些感測單元是分別產生一電壓訊號。該些電流訊號即為該些感測訊號 、 、 、 ，其中該些感測訊號 、 、 、 正比於該光斑LS照射於該第一象限感測單元181、該第二象限感測單元182、該第三象限感測單元183及該第四象限感測單元184的面積大小，因此，該光斑LS於該四象限感測器180的一i 軸位置可表示為： 該光斑LS於該四象限感測器180的一j 軸位置可表示為： 其中 為該第一象限感測單元181所感測之感測訊號， 為該第二象限感測單元182所感測之感測訊號， 為該第三象限感測單元183所感測之感測訊號， 為該第四象限感測單元184所感測之感測訊號。Referring to FIGS. 2 and 5, the four-quadrant sensor 180 is disposed on the path of the reflected light, and the four-quadrant sensor 180 receives the reflected light to generate a plurality of sensing signals, , , , Referring to FIG. 5, a schematic diagram of the spot LS is irradiated to the four-quadrant sensor 180. The four-quadrant sensor 180 has a first quadrant sensing unit 181, a second quadrant sensing unit 182, and a third. The quadrant sensing unit 183 and the fourth quadrant sensing unit 184 define an i- axis and a j- axis. In this embodiment, when the spot LS is irradiated to the first quadrant sensing unit 181, the second quadrant sense When the measuring unit 182, the third quadrant sensing unit 183 and the fourth quadrant sensing unit 184, the sensing units respectively generate a current signal, or in other embodiments, the sensing units are separately generated. A voltage signal. The current signals are the sensing signals, and, wherein the sensing signals are proportional to the spot LS, and the first quadrant sensing unit 181, the second quadrant sensing unit 182, area size sensing unit 183 in the third quadrant and the fourth quadrant sensing unit 184, and thus, the light spot LS i axis to a position of the four-quadrant sensor 180 can be expressed as: light spot LS in the sense of the four quadrants a j axis position detector 180 may be represented as: wherein the sense signal for sensing a first quadrant of the 181 sense the sensing means for sensing a sensing signal of the second quadrant 182 sense the sensing unit, for the third quadrant The sensing signal sensed by the sensing unit 183 is a sensing signal sensed by the fourth quadrant sensing unit 184.
其中，聚焦於該四象限感測器180的該光斑LS之該i 軸方向及該j 軸方向的直徑分別為： 為該光斑LS之該i 軸方向的直徑， 為該光斑LS之該j 軸方向的直徑， 為該聚焦透鏡170的焦距， 為該入射光的波長， 為該入射光之一X軸直徑(該X軸相對於該四象限感測器180之該i 軸)， 為該入射光之一Z軸直徑(Z軸相對於該四象限感測器180之該j 軸)，由且於該些感測訊號 、 、 、 正比於該光斑LS照射於該第一象限感測單元181、該第二象限感測單元182、該第三象限感測單元183及該第四象限感測單元184的面積大小，因此，該四象限感測器180的該i 軸位置及該j 軸位置亦可表示為： 因此，經由換算後，該二維光柵150之一斜率訊號公式為： 為該二維光柵150之該x 軸斜率訊號， 為該入射光之波長， 為該光斑LS的該j 軸位置， 為該反射光之該Z 軸方向直徑， 為該二維光柵150之該z 軸斜率訊號， 為該光斑LS的一i 軸位置， 為該反射光之該X 軸方向直徑。將該二維光柵150之該x 軸斜率訊號及該z 軸斜率訊號代回該二維光柵150的該x 軸及z 軸的斜率方程並求解x 及y 後可求得該二維光柵150之一位置訊號公式： 為二維光柵150之一x 軸位置訊號， 為該二維光柵150軸位置訊號。由上式可知，該二維光柵150之該x 軸方向及該z 軸方向的位置訊號公式僅與該x 軸方向及該z 軸方向的數據有關，因此，可分別獨立計算該二維光柵150之x 軸方向及z軸方向的位置訊號。The i- axis direction and the diameter of the j- axis direction of the spot LS of the four-quadrant sensor 180 are respectively: a diameter of the i- axis direction of the spot LS, and the j- axis of the spot LS The diameter of the direction is the focal length of the focusing lens 170, and the wavelength of the incident light is the X-axis diameter of the incident light (the X-axis is relative to the i- axis of the four-quadrant sensor 180). a Z-axis diameter of the light (the Z-axis is relative to the j- axis of the four-quadrant sensor 180), and the first sensing unit 181 is irradiated to the first quadrant sensing unit 181 by the sensing signal LS The size of the second quadrant sensing unit 182, the third quadrant sensing unit 183, and the fourth quadrant sensing unit 184. Therefore, the i- axis position and the j- axis position of the four-quadrant sensor 180 may also be expressed as: Accordingly, via the conversion, one of the two-dimensional grating 150 slope signals formula: the x-axis for two-dimensional raster slope of the signal 150, for a wavelength of the incident light, that the light spot LS j The axis position, which is the Z- axis diameter of the reflected light, is the z- axis slope signal of the two-dimensional grating 150, The i- axis position of the spot LS is the diameter of the X- axis direction of the reflected light. The x- axis slope signal of the two-dimensional grating 150 and the z- axis slope signal are returned to the slope equations of the x- axis and the z- axis of the two-dimensional grating 150, and x and y are solved to obtain the two-dimensional grating 150. A position signal formula: is an x- axis position signal of the two-dimensional grating 150, and is a 150-axis position signal of the two-dimensional grating. It can be seen from the above formula that the position signal formula of the two-dimensional grating 150 in the x- axis direction and the z- axis direction is only related to the data in the x- axis direction and the z- axis direction, and therefore, the two-dimensional grating 150 can be independently calculated. Position signal in the x- axis direction and the z-axis direction.
請參閱第2及3圖，該線性平台200包含一導軌210及一移動平台220，其中該導軌210固定不動，而該移動平台220則透過一驅動裝置(圖未繪出)沿著該導軌210線性移動，在本實施例中，該二維光柵150設置於該導軌210，該光源110、該準直透鏡120、該偏極分光元件130、該第一反射元件140、該第二反射元件160、該聚焦透鏡170及該四象限感測器180設置於於該移動平台220上並隨著該移動平台220移動。當該移動平台220由一第一位置移動至一第二位置時，該光源110所提供之該入射光亦隨著該移動平台220移動，因此，該入射光照射於該二維光柵150的位置產生變化，使該二維光柵150所反射之該反射光射入該四象限感測器180的角度及強度產生變化，該四象限感測器180接收該反射光後，再藉由上述之該斜率訊號公式及該位置訊號公式即可求得該入射光照射於該二維光柵150的位置及斜率變化。Referring to FIGS. 2 and 3, the linear platform 200 includes a guide rail 210 and a moving platform 220, wherein the guide rail 210 is fixed, and the mobile platform 220 is transmitted along the guide rail 210 through a driving device (not shown). In the present embodiment, the two-dimensional grating 150 is disposed on the guide rail 210, the light source 110, the collimating lens 120, the polarizing beam splitting component 130, the first reflective component 140, and the second reflective component 160. The focusing lens 170 and the four-quadrant sensor 180 are disposed on the moving platform 220 and move along with the moving platform 220. When the moving platform 220 is moved from a first position to a second position, the incident light provided by the light source 110 also moves with the moving platform 220, and therefore, the incident light is irradiated to the position of the two-dimensional grating 150. A change is generated to cause a change in the angle and intensity of the reflected light reflected by the two-dimensional grating 150 into the four-quadrant sensor 180, and the four-quadrant sensor 180 receives the reflected light, and then The position of the incident light and the change in the slope of the two-dimensional grating 150 can be obtained by the slope signal formula and the position signal formula.
請參閱第1圖，於「計算斜率訊號12」中，一處理器(圖未繪出)接收該四象限感測器180的該些感測訊號 、 、 、 ，該處理器將該些感測訊號 、 、 、 代入該二維光柵150之該斜率訊號公式分別計算該二維光柵150的該x 軸方向及該y 軸方向的一斜率訊號 ，該斜率訊號 為隨著該移動平台220之位置變化而改變大小的弦波訊號。該處理器將該些感測訊號 、 、 、 代入二維光柵150之該位置訊號公式分別求得該二維光柵150的該x 軸方向及該z 軸方向的一初始位置訊號 及一終止位置訊號 ，其中該初始位置訊號 是該移動平台220位於該第一位置時，將該些感測訊號 、 、 、 代入該位置訊號公式求得，而該終止位置訊號 是該移動平台220位於該第二位置時，將該些感測訊號 代入該位置訊號公式求得。Referring to FIG. 1 , in “calculating the slope signal 12 ”, a processor (not shown) receives the sensing signals of the four-quadrant sensor 180 , and the processor senses the sensing signals. signal,, is substituted into the slope signal of the two-dimensional grating equation 150 calculates a slope signal of the two-dimensional x-axis direction of the grating 150 and the y-axis direction, the slope signal is a location of the mobile platform 220 with the variation of And change the size of the sine wave signal. The processor determines the position signal formula of the two-dimensional grating 150 by the sensing signal, and the initial position signal and the end position signal of the two-dimensional grating 150 in the x- axis direction and the z- axis direction, respectively. The initial position signal is obtained when the mobile platform 220 is located at the first position, and the sensing signals are substituted into the position signal formula, and the termination position signal is that the mobile platform 220 is located at the second position. The sensing signals are obtained by substituting the sensing signals into the position signal formula.
請參閱第1及6圖，求得該二維光柵150的該x 軸及該z 軸的該斜率訊號 、該初始位置訊號 及該終止位置訊號 後，進行「求得線性平台位移量13」，該處理器根據該斜率訊號 、該初始位置訊號 及該終止位置訊號 求得該線性平台200的位移量，請參閱第6圖，「求得線性平台位移量13」的步驟中包含「判斷斜率訊號的訊號類型13a」、「計算斜率訊號的總位階數13b」、「計算斜率訊號的總位階位移量13c」、「求得斜率位移量13d」及「將總位階位移量及斜率位移量相加13e」。Referring to FIGS. 1 and 6, the slope signal, the initial position signal, and the end position signal of the x- axis and the z- axis of the two-dimensional grating 150 are obtained, and then the "linear platform displacement amount 13" is obtained. The processor obtains the displacement of the linear platform 200 according to the slope signal, the initial position signal, and the termination position signal. Referring to FIG. 6, the step of “determining the linear platform displacement amount 13” includes “determining the slope signal”. Signal type 13a", "calculate the total order of the slope signal 13b", "calculate the total displacement of the slope signal 13c", "calculate the slope displacement 13d" and "add the total displacement and the slope displacement"13e".
請參閱第6圖，於「判斷斜率訊號的訊號類型13a」中該處理器根據該斜率訊號之一零點個數、一正峰值個數及一負峰值個數判斷該斜率訊號的一訊號類型，其中當該零點個數等於該正峰值個數與該負峰值個數相加時，判斷該斜率訊號為第一類型；當該零點個數大於該正峰值個數與該負峰值個數相加時，判斷該斜率訊號為第二類型；當該零點個數小於該正峰值個數與該負峰值個數相加時，判斷該斜率訊號為第三類型。請參閱第7圖，以該斜率訊號之波形為例，該斜率訊號之零點個數為5，該正峰值個數為3，該負峰值個數為2，由於5=3+2，因此判定此斜率訊號為第一類型。請參閱第8圖，以該斜率訊號之波形為例，該斜率訊號之零點個數為4，該正峰值個數為1，該負峰值個數為2，由於4＞1+2，因此判定此斜率訊號為第二類型。Referring to FIG. 6, in the "signal type 13a for determining the slope signal", the processor determines a signal type of the slope signal according to one zero point, one positive peak number and one negative peak number of the slope signal. When the number of zero points is equal to the number of positive peaks and the number of negative peaks, determining that the slope signal is of a first type; when the number of zero points is greater than the number of positive peaks and the number of negative peaks When the time is over, the slope signal is determined to be the second type; when the number of zero points is less than the positive peak number and the negative peak number is added, the slope signal is determined to be the third type. Please refer to FIG. 7 , taking the waveform of the slope signal as an example, the number of zero points of the slope signal is 5, the number of positive peaks is 3, and the number of negative peaks is 2, because 5=3+2, therefore, This slope signal is of the first type. Please refer to FIG. 8 , taking the waveform of the slope signal as an example, the number of zero points of the slope signal is 4, the number of positive peaks is 1, and the number of negative peaks is 2, because 4>1+2, therefore, This slope signal is of the second type.
請參閱第6圖，判斷該斜率訊號的訊號類型後進行「計算斜率訊號的位階數13b」，該處理器根據該斜率訊號之該正峰值個數、該負峰值個數及該訊號類型計算該斜率訊號之一位階數，其中當該斜率訊號為第一類型時， ；當該斜率訊號為第二類型時， ；當該斜率訊號為第三類型時， 。以第7圖之斜率訊號為例，該斜率訊號的位階數 ，以第8圖之斜率訊號為例，該斜率訊號的位階數 。其中，該位階數為該斜率訊號中有完整形成四分之一週期之訊號的數量。Referring to FIG. 6 , after determining the signal type of the slope signal, performing “calculating the number 13b of the slope signal”, the processor calculates the number of positive peaks, the number of negative peaks, and the type of the signal according to the slope signal. One order of the slope signal, when the slope signal is of the first type, when the slope signal is of the second type, and when the slope signal is of the third type. Taking the slope signal of Figure 7 as an example, the number of steps of the slope signal is taken as the slope signal of Figure 8, and the number of steps of the slope signal. The order is the number of signals in the slope signal that have a complete quarter period.
請參閱第6圖，於「計算斜率訊號的總位階位移量13c」中該處理器根據該斜率訊號之該位階數計算該斜率訊號的一總位階位移量，其中計算該斜率訊號之該總位階位移量的公式為： Tmd為該總位階位移量，Tm為一位階位移量，該位階位移量 ， 為該二維光柵150之弦波波長，Order為該斜率訊號之該位階數。Referring to FIG. 6, in the calculation of the total displacement displacement 13c of the slope signal, the processor calculates a total displacement of the slope signal according to the order of the slope signal, wherein the total level of the slope signal is calculated. The formula of the displacement amount is: Tmd is the total displacement of the step, Tm is the displacement of the first order, the displacement of the step is the sine wave wavelength of the two-dimensional grating 150, and Order is the order of the slope signal.
請參閱第6圖，於「求得斜率位移量13d」中，該處理器根據該斜率訊號的該訊號類型疊合該初始位置訊號及該終止位置訊號求得一斜率位移量，其中當該斜率訊號為第一類型，且該斜率訊號之第一個峰值位置在第一個零點位置之前時， ；當該斜率訊號為第二類型，且該斜率訊號之第一個峰值位置在第一個零點位置之後時， ；當該斜率訊號為第二類型時， )；當該斜率訊號為第三類型時， 。Referring to FIG. 6 , in the “slope displacement amount 13d”, the processor determines a slope displacement amount according to the signal type of the slope signal, and the slope position amount is obtained by overlapping the initial position signal and the termination position signal, wherein the slope is The signal is of the first type, and the first peak position of the slope signal is before the first zero position; when the slope signal is of the second type, and the first peak position of the slope signal is at the first zero point When the position is after; when the slope signal is of the second type, ); when the slope signal is of the third type, .
請參閱第6圖，最後，於「將總位階位移量及斜率位移量相加13e」中將該總位階位移量及該斜率位移量相加以求得該線性平台200的位移量，請參閱第2及3圖，其中將該x 軸方向的該總位階位移量及該斜率位移量相加即為該線性平台200之一運動軸向的位移量，而將該z 軸方向的該總位階位移量及該斜率位移量相加即為該線性平台200之一徑向的位移量，在本實施利中，該徑向的位移量為垂直方向的位移量，或在其他實施利中，藉由該二維光柵150及該入射光之間位置設置關係可量測得其他方向的位移量。求得該線性平台200之徑向的位移量後，經由分析即可求得該線性平台200的直度誤差。Please refer to FIG. 6. Finally, the total displacement of the linear platform 200 is obtained by adding the total displacement amount and the slope displacement amount in "adding the total displacement amount and the slope displacement amount 13e". 2 and 3, wherein the total displacement amount of the x- axis direction and the slope displacement amount are added as a displacement amount of one of the linear axes of the linear platform 200, and the total displacement of the z- axis direction is shifted. The amount and the slope displacement amount are added as one radial displacement amount of the linear platform 200. In the present embodiment, the radial displacement amount is a vertical displacement amount, or in other implementations, by The positional relationship between the two-dimensional grating 150 and the incident light can measure the amount of displacement in other directions. After the radial displacement of the linear platform 200 is obtained, the straightness error of the linear platform 200 can be obtained through analysis.
本發明藉由簡易的訊號分析得到該斜率訊號的位階數，並將該斜率訊號之位階數所對應之位階位移量及斜率位移量疊合後即可求得該線性平台200的位移量，由於計算簡潔快速，因此可適用於線上量測該線性平台200之位移及直度誤差，進而藉由資訊的回授而即時地控制該線性平台200。In the present invention, the position of the slope signal is obtained by simple signal analysis, and the displacement of the step and the displacement of the slope corresponding to the order of the slope signal are superimposed, and the displacement of the linear platform 200 can be obtained. The calculation is simple and fast, so it can be applied to measure the displacement and straightness error of the linear platform 200 online, and then control the linear platform 200 in real time by feedback of information.
10‧‧‧線性平台之量測方法
11‧‧‧提供線性平台之量測裝置
12‧‧‧計算斜率訊號
13‧‧‧求得線性平台位移量
13a‧‧‧判斷斜率訊號的訊號類型
13b‧‧‧計算斜率訊號的位階數
13c‧‧‧計算斜率訊號的總位階位移量
13d‧‧‧求得斜率位移量
13e‧‧‧將總位階位移量及斜率位移量相加
100‧‧‧線性平台之量測裝置
110‧‧‧光源
120‧‧‧準直透鏡
130‧‧‧偏極分光元件
131‧‧‧極化分光鏡
132‧‧‧四分之一波片
140‧‧‧第一反射元件
150‧‧‧二維光柵
160‧‧‧第二反射元件
170‧‧‧聚焦透鏡
180‧‧‧四象限感測器
181‧‧‧第一象限感測單元
182‧‧‧第二象限感測單元
183‧‧‧第三象限感測單元
184‧‧‧第四象限感測單元
200‧‧‧線性平台
210‧‧‧導軌
220‧‧‧移動平台
LS‧‧‧光斑
I‧‧‧感測訊號
I 2‧‧‧感測訊號
I 3‧‧‧感測訊號
I 4‧‧‧感測訊號10‧‧‧Measurement method for linear platform
11‧‧‧ Providing a linear platform measuring device
12‧‧‧ Calculate the slope signal
13‧‧‧ Find linear platform displacement
13a‧‧‧Determination of the signal type of the slope signal
13b‧‧‧ Calculate the order of the slope signal
13c‧‧‧ Calculate the total displacement of the slope signal
13d‧‧‧Surtained slope displacement
13e‧‧‧Adding total displacement and slope displacement
100‧‧‧Linear platform measuring device
110‧‧‧Light source
120‧‧‧ Collimating lens
130‧‧‧polar spectroscopic components
131‧‧‧Polarizing beam splitter
132‧‧‧ quarter wave plate
140‧‧‧First reflective element
150‧‧‧ two-dimensional grating
160‧‧‧second reflective element
170‧‧‧focus lens
180‧‧‧ four-quadrant sensor
181‧‧‧First quadrant sensing unit
182‧‧‧Second quadrant sensing unit
183‧‧‧ Third Quadrant Sensing Unit
184‧‧‧fourth quadrant sensing unit
200‧‧‧Linear platform
210‧‧‧rails
220‧‧‧Mobile platform
LS‧‧‧ spot
I ‧‧‧Sensior signals
I 2 ‧‧‧Sensior signals
I 3 ‧‧‧Sensior signals
I 4 ‧‧‧Sense signal
第1圖： 依據本發明之一實施例，一種線性平台之量測方法的流程圖。 第2圖： 依據本發明之一實施例，一種線性平台之量測裝置的方塊圖。 第3圖： 依據本發明之一實施例，該線性平台之量測裝置設置於一線性平台上的示意圖。 第4圖： 依據本發明之一實施例，一二維光柵的示意圖。 第5圖： 依據本發明之一實施例，一光斑照射於一四象限感測器的示意圖。 第6圖： 依據本發明之一實施例，一求得線性平台位移量之步驟的流程圖。 第7圖： 依據本發明之一實施例，一第一類型之斜率訊號的訊號圖。 第8圖： 依據本發明之一實施例，一第二類型之斜率訊號的訊號圖。Figure 1 is a flow chart of a method for measuring a linear platform in accordance with an embodiment of the present invention. 2 is a block diagram of a linear platform measuring device in accordance with an embodiment of the present invention. Figure 3: Schematic diagram of the linear platform measuring device disposed on a linear platform in accordance with an embodiment of the present invention. Figure 4: Schematic representation of a two-dimensional grating in accordance with an embodiment of the present invention. Figure 5: Schematic illustration of a spot illuminating a four-quadrant sensor in accordance with one embodiment of the present invention. Figure 6 is a flow chart showing the steps of determining the displacement of the linear platform in accordance with an embodiment of the present invention. Figure 7: A signal diagram of a first type of slope signal in accordance with an embodiment of the present invention. Figure 8 is a signal diagram of a second type of slope signal in accordance with an embodiment of the present invention.
100‧‧‧線性平台之量測裝置 100‧‧‧Linear platform measuring device
110‧‧‧光源 110‧‧‧Light source
120‧‧‧準直透鏡 120‧‧‧ Collimating lens
130‧‧‧偏極分光元件 130‧‧‧polar spectroscopic components
131‧‧‧極化分光鏡 131‧‧‧Polarizing beam splitter
132‧‧‧四分之一波片 132‧‧‧ quarter wave plate
140‧‧‧第一反射元件 140‧‧‧First reflective element
150‧‧‧二維光柵 150‧‧‧ two-dimensional grating
160‧‧‧第二反射元件 160‧‧‧second reflective element
170‧‧‧聚焦透鏡 170‧‧‧focus lens
180‧‧‧四象限感測器 180‧‧‧ four-quadrant sensor
Claims (15)
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| TW103139682A TWI507663B (en) | 2014-11-14 | 2014-11-14 | Measurement device of linear bearing stage and measuring method thereof |
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| TW103139682A TWI507663B (en) | 2014-11-14 | 2014-11-14 | Measurement device of linear bearing stage and measuring method thereof |
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| TWI712773B (en) * | 2019-01-09 | 2020-12-11 | 國立嘉義大學 | Laser interferometer positioning system |
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| TWI620917B (en) * | 2016-12-21 | 2018-04-11 | 財團法人金屬工業研究發展中心 | Measuring device for linear motion stage |
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| CN202393356U (en) * | 2011-12-27 | 2012-08-22 | 合肥工业大学 | Normal displacement and angle sensing optical measuring head |
| CN102519368A (en) * | 2011-12-27 | 2012-06-27 | 合肥工业大学 | Normal displacement and angle sensing optical measuring head and measuring method thereof |
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| TWI712773B (en) * | 2019-01-09 | 2020-12-11 | 國立嘉義大學 | Laser interferometer positioning system |
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