TW201616622A - Non-sticking testing method and substrate used by the method - Google Patents
Non-sticking testing method and substrate used by the method Download PDFInfo
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本發明係有關一種封裝製程之檢測,特別係有關一種不著檢出(Non-Sticking)測試方法及其所用之基板。 The present invention relates to the detection of a packaging process, and more particularly to a non-Sticking test method and a substrate for use therewith.
隨著電子產品朝向多功能、行動化之趨勢,半導體封裝技術已發展至高密度之晶片尺寸封裝製程(Chip Scale Package,簡稱CSP)。在此封裝技術的發展過程中,球柵陣列式封裝已成為目前最主要的封裝方式,而具有多晶片模組(Multi-Chip Module,簡稱MCM)的球柵陣列式封裝更是重要。而在封裝過程期間,通常會進行所謂的不著檢出(Non-Sticking)測試,以得知此晶片與基板的電性連接是否良好。 As electronic products move toward versatility and mobility, semiconductor packaging technology has evolved to a high-density chip scale package (CSP). In the development of this packaging technology, the ball grid array package has become the most important packaging method at present, and the ball grid array package with Multi-Chip Module (MCM) is more important. During the packaging process, a so-called non-Sticking test is usually performed to know whether the electrical connection between the wafer and the substrate is good.
第1A圖係習知多晶片封裝基板的上視示意圖。如第1A圖所示,該封裝基板1係定義有至少一封裝區11(虛線內)以及至少一檢測區12(虛線外)。該封裝區11設有複數晶片座111,112,113,114及複數互連線路111a,112a,113a,114a。該檢測區12設有複數金屬片121,122,123,124,且各該金屬片121,122,123,124分別經由 該些互連線路111a,112a,113a,114a電性連接各該晶片座111,112,113,114。 Figure 1A is a top plan view of a conventional multi-chip package substrate. As shown in FIG. 1A, the package substrate 1 defines at least one package area 11 (within a dotted line) and at least one detection area 12 (outside of a broken line). The package area 11 is provided with a plurality of wafer holders 111, 112, 113, 114 and a plurality of interconnection lines 111a, 112a, 113a, 114a. The detecting area 12 is provided with a plurality of metal pieces 121, 122, 123, 124, and each of the metal pieces 121, 122, 123, 124 is respectively The interconnection lines 111a, 112a, 113a, 114a are electrically connected to the wafer holders 111, 112, 113, 114.
當將晶片(未圖示)分別設置於晶片座111,112,113,114後,進行打線接合製程(或覆晶製程),使各該晶片電性連接各該晶片座111,112,113,114周邊之互連線路111a,112a,113a,114a。為得知晶片與封裝基板1間之電性連接是否發生脫線或脫球的現象(亦即電性接合之良率),故需進行不著檢出測試。 After the wafers (not shown) are respectively disposed on the wafer holders 111, 112, 113, 114, a wire bonding process (or a flip chip process) is performed, and the wafers are electrically connected to the interconnection lines 111a, 112a, 113a around the wafer pads 111, 112, 113, 114, 114a. In order to know whether the electrical connection between the wafer and the package substrate 1 is off-line or off-ball (that is, the yield of electrical bonding), it is necessary to perform the detection test.
習知不著檢出測試係分別對晶片通入電流,再經由對應之不著檢出測試點(即金屬片121,122,123,124)中可否分別測出電流,來間接判定於晶片與銲線(或銲球)間電性連接的優劣。 It is not known that the test system separately applies current to the wafer, and then indirectly determines whether the current can be separately measured in the test points (ie, the metal sheets 121, 122, 123, 124) to indirectly determine the wafer and the bonding wire (or solder balls). The advantages and disadvantages of the electrical connection.
具體地,如第1B及1C圖所示,係對各晶片通入電流,藉由熱壓板10之彈片101以其接觸桿1011依序接觸各該金屬片121,122,123,124而判斷各該金屬片121,122,123,124是否產生電流,以判定各晶片與封裝基板1間電性接點之良率。 Specifically, as shown in FIGS. 1B and 1C, current is applied to each of the wafers, and the elastic piece 10 of the hot platen 10 sequentially contacts the metal pieces 121, 122, 123, 124 with the contact rods 1011 to determine whether the metal pieces 121, 122, 123, 124 are respectively A current is generated to determine the yield of the electrical contact between each wafer and the package substrate 1.
惟,習知不著檢出測試方法中,各種電子產品之功能電路具有不同尺寸或不同佈線設計之封裝件,以致於該些金屬片121,122,123,124之位置需隨著不同之封裝件而作改變,使得該些金屬片121,122,123,124於該封裝基板1上之位置受到限制,造成該封裝基板1布局設計上的困擾。 However, it is not known to detect the test method, the functional circuits of various electronic products have packages of different sizes or different wiring designs, so that the positions of the metal pieces 121, 122, 123, 124 need to be changed with different packages, so that The positions of the metal sheets 121, 122, 123, and 124 on the package substrate 1 are limited, causing troubles in the layout design of the package substrate 1.
因此,如何克服上述習知技術的問題,實已成目前亟欲解決的課題。 Therefore, how to overcome the problems of the above-mentioned prior art has become a problem that is currently being solved.
鑑於上述習知技術之種種缺失,本發明係提供一種封裝用基板,係包括:基板本體,係具有封裝區與檢測區;至少一不著檢出部,係設於該檢測區上,且該不著檢出部係由複數條導電跡線所構成;以及至少一互連線路,係形成於該基板本體上且由該封裝區延伸至該檢測區以連接該不著檢出部。 The present invention provides a substrate for packaging, comprising: a substrate body having a package area and a detection area; at least one detection portion is disposed on the detection area, and the The detecting portion is formed by a plurality of conductive traces; and at least one interconnecting line is formed on the substrate body and extends from the package region to the detecting region to connect the detecting portion.
本發明復提供一種封裝製程之不著檢出測試方法,係包括:設置至少一電子元件於前述之封裝用基板之封裝區上,且該電子元件電性連接該互連線路;以檢測裝置之接觸部接觸該些導電跡線;以及通電該電子元件,且該檢測裝置量測電流是否通過該些導電跡線,以判定該電子元件與該互連線路之間的電性連接是否良好。 The present invention provides a packaging process that does not detect the test method, comprising: disposing at least one electronic component on the package area of the foregoing package substrate, and the electronic component is electrically connected to the interconnection line; The contact contacts the conductive traces; and energizes the electronic component, and the detecting device measures whether the current passes through the conductive traces to determine whether the electrical connection between the electronic component and the interconnect is good.
前述之測試方法中,單一該接觸部係同時接觸至少兩條該導電跡線。 In the foregoing test method, a single contact portion simultaneously contacts at least two of the conductive traces.
前述之測試方法中,該接觸部係為片體。 In the aforementioned test method, the contact portion is a sheet.
前述之測試方法及其所用之基板中,該檢測區係圍繞該封裝區。 In the aforementioned test method and the substrate used therewith, the detection zone surrounds the package area.
前述之測試方法及其所用之基板中,該些導電跡線係彼此平行。 In the aforementioned test method and the substrate used therewith, the conductive traces are parallel to each other.
前述之測試方法及其所用之基板中,復包括複數金屬片,係設於該檢測區上,且該不著檢出部係位於兩該金屬片之間。例如,該些導電跡線係接觸該金屬片。 The foregoing test method and the substrate used therein include a plurality of metal sheets disposed on the detection area, and the non-detection portion is located between the two metal sheets. For example, the conductive traces contact the metal sheet.
由上可知,本發明不著檢出測試方法及其所用之基 板,係藉由複數導電跡線構成一不著檢出部,使該基板本體上之不著檢出部之位置可不受限制,故能提升線路布局設計之彈性,且能提升檢測之準確性。 As can be seen from the above, the present invention does not detect the test method and the basis used therein. The board is formed by a plurality of conductive traces without a detecting portion, so that the position of the substrate body without the detecting portion can be unrestricted, thereby improving the flexibility of the line layout design and improving the accuracy of the detection. .
1‧‧‧封裝基板 1‧‧‧Package substrate
10,3‧‧‧熱壓板 10,3‧‧‧Hot platen
101,30‧‧‧彈片 101, 30‧‧ ‧ shrapnel
1011‧‧‧接觸桿 1011‧‧‧Contact rod
11‧‧‧封裝區 11‧‧‧Package area
111,112,113,114‧‧‧晶片座 111,112,113,114‧‧‧ wafer holder
111a,112a,113a,114a‧‧‧互連線路 111a, 112a, 113a, 114a‧‧‧ interconnection
12‧‧‧檢測區 12‧‧‧Detection area
121,122,123,124‧‧‧金屬片 121,122,123,124‧‧‧metal pieces
2‧‧‧基板 2‧‧‧Substrate
20‧‧‧基板本體 20‧‧‧Substrate body
200,200’‧‧‧銲墊 200,200’‧‧· solder pads
201‧‧‧封裝區 201‧‧‧Package area
2011‧‧‧置晶處 2011‧‧‧Settings
202‧‧‧檢測區 202‧‧‧Detection area
21‧‧‧互連線路 21‧‧‧Interconnection lines
22,22’‧‧‧不著檢出部 22,22’‧‧‧Without the inspection department
220‧‧‧導電跡線 220‧‧‧conductive traces
23‧‧‧金屬片 23‧‧‧metal pieces
300‧‧‧接觸部 300‧‧‧Contacts
4,4’‧‧‧電子元件 4,4’‧‧‧Electronic components
第1A圖係習知多晶片封裝基板的上視示意圖;第1B圖係習知不著檢出測試方法之示意圖;第1C圖係第1B圖之局部上視示意圖;第2圖係本發明封裝用基板之上視示意圖;第3A圖係本發明不著檢出測試方法之立體示意圖;以及第3B圖係第3A圖之局部側視圖。 1A is a top view of a conventional multi-chip package substrate; FIG. 1B is a schematic diagram of a conventional test method; FIG. 1C is a partial top view of FIG. 1B; and FIG. 2 is a package for the present invention. The top view of the substrate is omitted; the 3A is a perspective view of the test method without the detection method; and the 3B is a partial side view of the 3A.
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。 The other embodiments of the present invention will be readily understood by those skilled in the art from this disclosure.
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書中所引用之如“上”及“一”等之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實 質變更技術內容下,當亦視為本發明可實施之範疇。 It is to be understood that the structure, the proportions, the size, and the like of the present invention are intended to be used in conjunction with the disclosure of the specification, and are not intended to limit the invention. The conditions are limited, so it is not technically meaningful. Any modification of the structure, change of the proportional relationship or adjustment of the size should remain in this book without affecting the effects and the objectives that can be achieved by the present invention. The technical content disclosed in the invention can be covered. In the meantime, the terms "upper" and "one" as used in the specification are merely for convenience of description, and are not intended to limit the scope of the invention, and the relative relationship is changed or adjusted. real The scope of the quality change technology is also considered to be within the scope of the invention.
如第2圖所示,本發明封裝用基板2係包括一基板本體20、複數互連線路21,21’、複數不著檢出部22,22’、以及複數金屬片23。 As shown in Fig. 2, the package substrate 2 of the present invention comprises a substrate body 20, a plurality of interconnection lines 21, 21', a plurality of detection portions 22, 22', and a plurality of metal sheets 23.
所述之基板本體20係具有一封裝區201(圖中虛線”---“內)及一檢測區202(圖中虛線”---“外),且該檢測區202係圍繞該封裝區201。 The substrate body 20 has a package area 201 (dashed line in the figure)---"inner" and a detection area 202 (dashed line in the figure)---"outside", and the detection area 202 surrounds the package area. 201.
所述之互連線路21,21’係形成於該基板本體20上且自該封裝區201延伸至該檢測區202以連接該不著檢出部22,22’。 The interconnection lines 21, 21' are formed on the substrate body 20 and extend from the package area 201 to the detection area 202 to connect the detection portions 22, 22'.
所述之不著檢出部22,22’係設於該檢測區202上,且單一該不著檢出部22係由複數條導電跡線220所構成,如圖所示之三條。 The non-detection portions 22, 22' are disposed on the detection region 202, and the single non-detection portion 22 is composed of a plurality of conductive traces 220, as shown in the figure.
所述之金屬片23係設於該檢測區202上,且該不著檢出部22,22’係位於兩金屬片23之間。於不同態樣中,該些導電跡線220可接觸該金屬片23、或者該不著檢出部22’不接觸該金屬片23。 The metal piece 23 is disposed on the detecting area 202, and the detecting portion 22, 22' is located between the two metal sheets 23. In various aspects, the conductive traces 220 may contact the metal sheet 23 or the non-detection portion 22' may not contact the metal sheet 23.
於本實施例中,該基板2可為球柵陣列式封裝基板,但不以此為限,且該封裝區201可包含複數置晶處2011(圖中虛線”---“所劃分),該些置晶處2011係以陣列方式排列,又該基板本體20上形成有各種功能電路,如銲墊200,200’。 In this embodiment, the substrate 2 can be a ball grid array package substrate, but not limited thereto, and the package region 201 can include a plurality of crystal places 2011 (dotted line in the figure)---"divided" The seeding portions 2011 are arranged in an array, and the substrate body 20 is formed with various functional circuits such as pads 200, 200'.
再者,該些互連線路21,21’係佈設於該置晶處2011以電性連接該銲墊200,200’,且該互連線路21可獨立連接該 不著檢出部22;或者,複數互連線路21,21’可共同接地連接該不著檢出部22’。 Moreover, the interconnecting lines 21, 21' are disposed at the crystallizing portion 2011 to electrically connect the pads 200, 200', and the interconnecting lines 21 can be independently connected. The detecting portion 22 is not provided; or, the plurality of interconnecting lines 21, 21' can be connected to the detecting portion 22' in common.
又,該些導電跡線220係彼此平行地設於該檢測區202。 Moreover, the conductive traces 220 are disposed in the detection region 202 in parallel with each other.
另外,該金屬片23係位於封裝製程之澆注口(mold gate)之位置。 In addition, the metal piece 23 is located at the position of the mold gate of the packaging process.
因此,藉由該些導電跡線220構成該不著檢出部22,22’,使該不著檢出部22,22’之位置可不受晶片位置的限制,故該基板本體20上之佈線可因應不同晶片封裝需求而彈性設計。 Therefore, the conductive traces 220 constitute the non-detection portions 22, 22', so that the positions of the non-detection portions 22, 22' are not restricted by the position of the wafer, so the wiring on the substrate body 20 Flexible design for different chip package needs.
於進行不著檢出測試方法時,先設置一電子元件4於該封裝區201之置晶處2011上,並以打線製程電性連接該電子元件4與該些銲墊200,藉以電性導通該電子元件4與該互連線路21;亦可設置複數電子元件4’於該置晶處2011上,並以覆晶製程電性連接該些電子元件4’與互連線路21。於本實施例中,所述之電子元件4,4’係為如半導體晶片之主動元件或如電阻、電容及電感之被動元件。再者,該些銲墊200’之排設係為單一晶片覆晶用;若用於複數晶片,則縮小該些銲墊200’之範圍並分為四區域(各區域仍為九個銲墊200’),即可用於圖中四個晶片之覆晶。 When the test method is not performed, an electronic component 4 is first disposed on the seeding portion 2011 of the package region 201, and the electronic component 4 and the pads 200 are electrically connected by a wire bonding process, thereby electrically conducting. The electronic component 4 and the interconnecting line 21; a plurality of electronic components 4' may be disposed on the crystallizing portion 2011, and the electronic components 4' and the interconnecting lines 21 are electrically connected by a flip chip process. In this embodiment, the electronic components 4, 4' are active components such as semiconductor wafers or passive components such as resistors, capacitors, and inductors. Furthermore, the pads 200' are arranged for single wafer flipping; if used for a plurality of wafers, the extents of the pads 200' are reduced and divided into four regions (there are still nine pads in each region) 200'), can be used for flip chip of four wafers in the figure.
接著,將一檢測裝置之熱壓板3設於該基板本體20上,且該熱壓板3上之彈片30之接觸部300係接觸該些導電跡線220,如第3A及3B圖所示(省略打線製程後之電子元件4)。於本實施例中,單一該接觸部300係同時接 觸至少兩條該導電跡線220,且該接觸部300係為片體,故藉由複數導電跡線220與該接觸部300之設計,使該接觸部300可接觸多條導電跡線220而容易對位接觸,以增進檢測之準確性。 Next, the hot plate 3 of a detecting device is disposed on the substrate body 20, and the contact portion 300 of the elastic piece 30 on the hot plate 3 contacts the conductive traces 220, as shown in FIGS. 3A and 3B. (Electronic component 4 after the wire bonding process is omitted). In this embodiment, the single contact portion 300 is connected at the same time. At least two of the conductive traces 220 are touched, and the contact portion 300 is a sheet body. Therefore, the contact portion 300 can contact the plurality of conductive traces 220 by the design of the plurality of conductive traces 220 and the contact portion 300. Easy to positional contact to improve the accuracy of the test.
之後,該檢測裝置將電流導入該電子元件4後,該檢測裝置會量測電流是否通過該些導電跡線220,以直接判定該銲墊200與該互連線路21之電性連接是否良好,實際上,乃間接判斷該電子元件4與該銲墊200間之電性連接是否良好,簡言之,即判定該電子元件4與該互連線路21之電性連接是否良好。其中,當該不著檢出部22導通電流,即表示該電子元件4與該銲墊200間沒有如脫線(或脫球)等電性連接異常情形,反之,則表示有異常情形發生。 After the current is introduced into the electronic component 4, the detecting device measures whether the current passes through the conductive traces 220 to directly determine whether the electrical connection between the bonding pad 200 and the interconnection 21 is good. In fact, it is indirectly determined whether the electrical connection between the electronic component 4 and the pad 200 is good. In short, it is determined whether the electrical connection between the electronic component 4 and the interconnection 21 is good. However, when the current is not turned on by the detecting portion 22, it means that there is no electrical connection abnormality such as off-line (or off-ball) between the electronic component 4 and the pad 200, and vice versa.
綜上所述,本發明不著檢出測試方法及其所用之基板,主要藉由複數導電跡線構成一不著檢出部,使該基板本體上之不著檢出部之位置可不受限制,故能提升線路布局設計之彈性,且能提升檢測之準確性。 In summary, the present invention does not detect the test method and the substrate used therein, and the main conductive traces are not formed by the plurality of conductive traces, so that the position of the substrate without the detection portion can be unrestricted. Therefore, the flexibility of the layout design can be improved, and the accuracy of the detection can be improved.
上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。 The above embodiments are intended to illustrate the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the appended claims.
2‧‧‧基板 2‧‧‧Substrate
20‧‧‧基板本體 20‧‧‧Substrate body
200,200’‧‧‧銲墊 200,200’‧‧· solder pads
201‧‧‧封裝區 201‧‧‧Package area
2011‧‧‧置晶處 2011‧‧‧Settings
202‧‧‧檢測區 202‧‧‧Detection area
21‧‧‧互連線路 21‧‧‧Interconnection lines
22,22’‧‧‧不著檢出部 22,22’‧‧‧Without the inspection department
220‧‧‧導電跡線 220‧‧‧conductive traces
23‧‧‧金屬片 23‧‧‧metal pieces
4,4’‧‧‧電子元件 4,4’‧‧‧Electronic components
Claims (12)
Priority Applications (2)
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TW103137769A TWI665771B (en) | 2014-10-31 | 2014-10-31 | Non-sticking testing method and substrate used by the method |
CN201410636226.0A CN105655265A (en) | 2014-10-31 | 2014-11-12 | Non-sticking detection test method and substrate used therefor |
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TW103137769A TWI665771B (en) | 2014-10-31 | 2014-10-31 | Non-sticking testing method and substrate used by the method |
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TW201616622A true TW201616622A (en) | 2016-05-01 |
TWI665771B TWI665771B (en) | 2019-07-11 |
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TW103137769A TWI665771B (en) | 2014-10-31 | 2014-10-31 | Non-sticking testing method and substrate used by the method |
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CN (1) | CN105655265A (en) |
TW (1) | TWI665771B (en) |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5053357A (en) * | 1989-12-27 | 1991-10-01 | Motorola, Inc. | Method of aligning and mounting an electronic device on a printed circuit board using a flexible substrate having fixed lead arrays thereon |
US6063640A (en) * | 1997-03-18 | 2000-05-16 | Fujitsu Limited | Semiconductor wafer testing method with probe pin contact |
JP4234244B2 (en) * | 1998-12-28 | 2009-03-04 | 富士通マイクロエレクトロニクス株式会社 | Wafer level package and semiconductor device manufacturing method using wafer level package |
US6133054A (en) * | 1999-08-02 | 2000-10-17 | Motorola, Inc. | Method and apparatus for testing an integrated circuit |
US6623997B2 (en) * | 2000-12-15 | 2003-09-23 | Agilent Technologies, Inc. | Method for burn-in processing of optical transmitter arrays using a submount substrate |
US7126228B2 (en) * | 2003-04-23 | 2006-10-24 | Micron Technology, Inc. | Apparatus for processing semiconductor devices in a singulated form |
TWI220462B (en) * | 2003-08-14 | 2004-08-21 | Advanced Semiconductor Eng | None-sticking detection method |
CN100346200C (en) * | 2003-11-05 | 2007-10-31 | 友达光电股份有限公司 | Display assembly and assembling method thereof |
US7709278B2 (en) * | 2007-02-26 | 2010-05-04 | Sandisk Corporation | Method of making PCB circuit modification from multiple to individual chip enable signals |
TWI349320B (en) * | 2007-09-12 | 2011-09-21 | Powertech Technology Inc | Semiconductor packaging process enabling completely performing non-stick test of wire-bonding on a substrate strip |
CN101359671B (en) * | 2008-09-25 | 2010-12-01 | 友达光电股份有限公司 | Active array substrate, liquid crystal display board and method for manufacturing liquid crystal display board |
CN201654182U (en) * | 2010-04-06 | 2010-11-24 | 北京京东方光电科技有限公司 | Substrate detecting equipment |
-
2014
- 2014-10-31 TW TW103137769A patent/TWI665771B/en active
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CN105655265A (en) | 2016-06-08 |
TWI665771B (en) | 2019-07-11 |
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