TW201614394A - Photoresist recycle system and method thereof - Google Patents
Photoresist recycle system and method thereofInfo
- Publication number
- TW201614394A TW201614394A TW103134211A TW103134211A TW201614394A TW 201614394 A TW201614394 A TW 201614394A TW 103134211 A TW103134211 A TW 103134211A TW 103134211 A TW103134211 A TW 103134211A TW 201614394 A TW201614394 A TW 201614394A
- Authority
- TW
- Taiwan
- Prior art keywords
- coupler
- switch device
- photoresist
- recycle system
- disposed
- Prior art date
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Pipeline Systems (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
A photoresist recycle system includes a storage bottle using for storing a photoresist liquid, and the storage bottle has a bottle cap with a first coupler, a second coupler, and a third coupler; a pressurization device connects with the first coupler; an export pipeline connects with the second coupler; a first switch device is disposed at the export pipeline, a second switch device is disposed at the export pipeline between the storage bottle and the first switch device; a recycle pipeline connects with the third coupler and the export pipeline between the first switch device and second switch device; and a third switch device is disposed on the recycle pipeline.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103134211A TWI547772B (en) | 2014-10-01 | 2014-10-01 | Photoresist recycle system and method thereof |
CN201410548284.8A CN105487338A (en) | 2014-10-01 | 2014-10-16 | Photoresist recovery system and method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103134211A TWI547772B (en) | 2014-10-01 | 2014-10-01 | Photoresist recycle system and method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201614394A true TW201614394A (en) | 2016-04-16 |
TWI547772B TWI547772B (en) | 2016-09-01 |
Family
ID=55674403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103134211A TWI547772B (en) | 2014-10-01 | 2014-10-01 | Photoresist recycle system and method thereof |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN105487338A (en) |
TW (1) | TWI547772B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109324484B (en) * | 2018-09-27 | 2020-03-27 | 武汉华星光电技术有限公司 | Developing unit cleaning device and cleaning method using the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5878918A (en) * | 1997-05-02 | 1999-03-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photoresist supplying system for used in a semiconductor fabrication |
TWI235284B (en) * | 1999-03-17 | 2005-07-01 | Winbond Electronics Corp | Photoresist supply device |
US6846360B2 (en) * | 2003-01-13 | 2005-01-25 | Aptos Corporation | Apparatus and method for bubble-free application of a resin to a substrate |
CN2935213Y (en) * | 2006-07-03 | 2007-08-15 | 蔡明伦 | Raw material supply bottle cover |
CN101329512A (en) * | 2007-06-22 | 2008-12-24 | 中芯国际集成电路制造(上海)有限公司 | Photo resistance recovery system |
-
2014
- 2014-10-01 TW TW103134211A patent/TWI547772B/en active
- 2014-10-16 CN CN201410548284.8A patent/CN105487338A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN105487338A (en) | 2016-04-13 |
TWI547772B (en) | 2016-09-01 |
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