TW201614394A - Photoresist recycle system and method thereof - Google Patents

Photoresist recycle system and method thereof

Info

Publication number
TW201614394A
TW201614394A TW103134211A TW103134211A TW201614394A TW 201614394 A TW201614394 A TW 201614394A TW 103134211 A TW103134211 A TW 103134211A TW 103134211 A TW103134211 A TW 103134211A TW 201614394 A TW201614394 A TW 201614394A
Authority
TW
Taiwan
Prior art keywords
coupler
switch device
photoresist
recycle system
disposed
Prior art date
Application number
TW103134211A
Other languages
Chinese (zh)
Other versions
TWI547772B (en
Inventor
Guo-Hsih Hsieh
Chieh-Pin Lo
Original Assignee
Powerchip Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Technology Corp filed Critical Powerchip Technology Corp
Priority to TW103134211A priority Critical patent/TWI547772B/en
Priority to CN201410548284.8A priority patent/CN105487338A/en
Publication of TW201614394A publication Critical patent/TW201614394A/en
Application granted granted Critical
Publication of TWI547772B publication Critical patent/TWI547772B/en

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Pipeline Systems (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

A photoresist recycle system includes a storage bottle using for storing a photoresist liquid, and the storage bottle has a bottle cap with a first coupler, a second coupler, and a third coupler; a pressurization device connects with the first coupler; an export pipeline connects with the second coupler; a first switch device is disposed at the export pipeline, a second switch device is disposed at the export pipeline between the storage bottle and the first switch device; a recycle pipeline connects with the third coupler and the export pipeline between the first switch device and second switch device; and a third switch device is disposed on the recycle pipeline.
TW103134211A 2014-10-01 2014-10-01 Photoresist recycle system and method thereof TWI547772B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW103134211A TWI547772B (en) 2014-10-01 2014-10-01 Photoresist recycle system and method thereof
CN201410548284.8A CN105487338A (en) 2014-10-01 2014-10-16 Photoresist recovery system and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103134211A TWI547772B (en) 2014-10-01 2014-10-01 Photoresist recycle system and method thereof

Publications (2)

Publication Number Publication Date
TW201614394A true TW201614394A (en) 2016-04-16
TWI547772B TWI547772B (en) 2016-09-01

Family

ID=55674403

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103134211A TWI547772B (en) 2014-10-01 2014-10-01 Photoresist recycle system and method thereof

Country Status (2)

Country Link
CN (1) CN105487338A (en)
TW (1) TWI547772B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109324484B (en) * 2018-09-27 2020-03-27 武汉华星光电技术有限公司 Developing unit cleaning device and cleaning method using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5878918A (en) * 1997-05-02 1999-03-09 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist supplying system for used in a semiconductor fabrication
TWI235284B (en) * 1999-03-17 2005-07-01 Winbond Electronics Corp Photoresist supply device
US6846360B2 (en) * 2003-01-13 2005-01-25 Aptos Corporation Apparatus and method for bubble-free application of a resin to a substrate
CN2935213Y (en) * 2006-07-03 2007-08-15 蔡明伦 Raw material supply bottle cover
CN101329512A (en) * 2007-06-22 2008-12-24 中芯国际集成电路制造(上海)有限公司 Photo resistance recovery system

Also Published As

Publication number Publication date
CN105487338A (en) 2016-04-13
TWI547772B (en) 2016-09-01

Similar Documents

Publication Publication Date Title
GB2544903A (en) Storing and transferring application data between devices
WO2017218425A3 (en) Interactive pill dispenser for healthcare management
EP4318220A3 (en) Sharing user-configurable graphical constructs
MY187485A (en) Nebulizer, indicator device and container
MY185623A (en) Aerosol provision system
MX364764B (en) System and method for fault analysis and prioritization.
EP3100866A4 (en) Liquid supply device, liquid ejection device, and liquid container unit
MX2015003296A (en) Remote vehicle navigation system purge.
BR212015017654U2 (en) tire sealant dispensing apparatus
CR20170207A (en) SYSTEM AND METHOD FOR DISPENSING A LIQUID
KR101881999B1 (en) Hydrogen refueling system using the liquid hydrogen and hydrogen dispensing methods
MX361224B (en) Systems and methods for providing functionality based on device orientation.
PH12017500168A1 (en) Usage monitoring system and method
EP3162570A4 (en) Waste liquid container, liquid ejection device, and waste liquid recovery system
EP3504471C0 (en) Leak-sealing device, its use and system for sealing a leak
PH12016502004A1 (en) Runway arrangement
EP3468836A4 (en) Load handling device for a transportation unit, and a transportation unit with said device
EP3526128A4 (en) System and method for storing liquid and gaseous fuels
BR112017001764A2 (en) method and apparatus
SG10201709522YA (en) Pressure feed container, storage method using the pressure feed container, and method for transferring liquid using the pressure feed container
MX2017013992A (en) Transfer system for containers.
TW201614394A (en) Photoresist recycle system and method thereof
EP3334921A4 (en) Vehicle comprising a pressurized liquid fuel system and method for operating a pressurized liquid fuel system
SA518391388B1 (en) Storage and dispenser device
WO2014009256A3 (en) A holding tank, a distribution device, and a holding tank system