CN2935213Y

CN2935213Y - Raw material supply bottle cover

Info

Publication number: CN2935213Y
Application number: CN 200620124566
Authority: CN
Inventors: 蔡明伦
Original assignee: Individual
Current assignee: Individual
Priority date: 2006-07-03
Filing date: 2006-07-03
Publication date: 2007-08-15
Anticipated expiration: 2016-07-03

Abstract

The utility model relates to a bottle cap for a raw material bottle, including an air connector and a raw material output connector arranged on the cap. The utility is characterized in that a material reflux connector is arranged on the cap. In the utility, a material reflux connector is arranged on the raw material bottle, a pump can be used to recycle the chemical raw material extruded during the working process, therefore the cost of chemical raw material and recovery cost can be reduced and the damage to the environment is also decreased.

Description

A kind of raw material supply bottle cap

[technical field]

The utility model is specifically related to a kind of raw material supply bottle cap.

[background technology]

In SIC (semiconductor integrated circuit) or TFT-LCD manufacture process, generally how can carry out the manufacturing of interlock circuit by exposure imaging and etched flow process, its principle mainly is evenly to cover or apply a kind of fluoropolymer resin that comprises, the photoresist that Photoactive compounds and solvent are formed on insulator layer on monocrystalline silicon disk or the glass substrate or conductive metal layer.

Finish monocrystalline silicon disk or glass substrate that photoresist covers or applies, make after the solvent evaporation through heating to cure, selectivity is exposed under the radiation of some form, such as ultraviolet ray, electronics or X ray; Monocrystalline silicon disk that exposed to the open air or glass substrate are after heat is roasting, roasting monocrystalline silicon disk of heat or glass substrate develop and produce desired pattern, the monocrystalline silicon disk or the glass substrate that develop remove insulator layer or conductive metal layer with etching again, and remove remaining photoresist layer, micro pattern is passed on monocrystalline silicon disk or the glass baseplate surface.

The automated job of manufacturing and processing equipment coating photoresist, must photoresist be delivered to the manufacturing and processing equipment place by relevant conveying loop, as shown in Figure 1, used photoresist conveying loop mainly is to be provided with one first pipeline 61 and one second pipeline 62 at raw material supply bottle 10 places in order to the splendid attire photoresist, utilize first pipeline 61 and inert gas (as nitrogen) source of supply to connect, utilize second pipeline 62 and reservoir 20, pump 30 and manufacturing and processing equipment 40 to connect.

In the previous operations that chemical raw material begins to supply, utilize inert gas that the chemical raw material in the raw material supply bottle 10 is pushed and enter second pipeline 62, and under the effect of reservoir 20 and delivery pipe 21, the air of second pipeline, 62 inside is discharged, when treating that second pipeline 62 is full of photoresist fully, can be under the effect of pump 30 or inert gas photoresist be pushed to manufacturing and processing equipment 40 places, 30 demands according to reality processing operation of pump are set in set time or some procedure of processings a certain amount of photoresist of discharging automatically.

In order to make raw material supply bottle 10 be in closed state, being beneficial to inert gas is pushed to chemical raw material in first pipeline 61, as shown in Figure 2, at present be provided with the pneumatic fittings 111 that a confession first pipeline 61 continues at its bottle cap 11 places with raw material supply bottle 10, the raw material out splice going splice 112 that continues with a confession second pipeline 62, in addition there is no any structure for the chemical raw material input, therefore the photoresist that is discharged can only directly be discharged into through the floss hole of pump 30 front ends in the waste liquid tube 50, as waste disposal, not only cause the waste of photoresist, but also increase the disposal cost of waste liquid.

[utility model content]

Goal of the invention of the present utility model aims to provide can be for the instant a kind of raw material supply bottle cap that refluxes of raw material.

To achieve these goals, the utility model is achieved through the following technical solutions:

A kind of raw material supply bottle cap comprises pneumatic fittings and raw material out splice going splice that bottle cap is provided with, it is characterized in that being provided with on bottle cap a raw material backflow fittings.

Described raw material out splice going splice place is provided with the suction pipe that extends in the raw material supply bottle.

Described pneumatic fittings is a high-pressure pipe connector.

Described raw material out splice going splice is a high-pressure pipe connector.

Described raw material backflow fittings is a high-pressure pipe connector.

The utility model is provided with a raw material backflow fittings in addition on the raw material supply bottle cap, this raw material backflow fittings is attached to the floss hole of pump; When operation, by pump or inert gas chemical raw material is pushed to the manufacturing and processing equipment place, when treating that the raw material supply system arrives the set condition of stop supplies chemical raw material, can immediately chemical raw material be transmitted back to the raw material supply bottle by pump, with the chemical raw material recycling, not only reduce the cost of chemical raw material, the expense of waste recovery, also reduce harm environment.

[description of drawings]

Fig. 1 is for now using chemical raw material supply loop figure;

Fig. 2 is for now using the structural representation of raw material supply bottle cap;

Fig. 3 is the structural representation of bottle cap described in the utility model;

The chemical raw material supply loop figure of Fig. 4 position application of the present utility model.

[embodiment]

As shown in Figure 3 and Figure 4, bottle cap 11 places in order to the raw material supply bottle 10 of splendid attire chemical raw material, except being provided with the pneumatic fittings 111 that a confession first pipeline 61 continues, outside the raw material out splice going splice 112 that continues with a confession second pipeline 62, also be provided with a raw material backflow fittings 113 and continue, can connect the floss hole of pump 30 by the 3rd pipeline 63 for one the 3rd pipeline 63.

Wherein, first pipeline 61 connects with inert gas (as nitrogen) source of supply, second pipeline 62 connects with reservoir 20, pump 30 and manufacturing and processing equipment 40, pneumatic fittings 111, raw material out splice going splice 112 and raw material backflow fittings 113 are high-pressure pipe connector, make it can bear the raw material supply system and be applied to working pressure on the raw material supply bottle 10, be provided with the suction pipe that extends to raw material supply bottle bottom at discharge conection 112 places.

The previous operations that begins to supply at chemical raw material, can utilize inert gas that the chemical raw material in the raw material supply bottle 10 is pushed and enter second pipeline 62, and under reservoir 20 and delivery pipe 21 effects, the air of second pipeline, 62 inside is discharged, when treating that second pipeline 62 is full of chemical raw material fully, can be under the effect of pump 30 or inert gas chemical raw material be pushed to manufacturing and processing equipment 40 places.

Pump 30 discharges chemical raw material automatically in set time or some procedure of processings, during with the bubble in the eliminating chemical raw material, can chemical raw material be transmitted back to raw material supply bottle 10 immediately through the 3rd pipeline 63 and raw material backflow fittings 113 by pump 30, with the chemical raw material recycling, reach the purpose that reduces chemical raw material cost, waste recovery expense and reduce environmental hazard.

In the specific implementation, can with pipeline that raw material backflow fittings 113 is connected on valve is set, this valve can be a manually-operated gate, is convenient to the opportunity that the user controls the chemical raw material loopback; Certainly, valve also can be electrically operated valve, is controlled the opportunity of chemical raw material loopback by relevant control circuit; Also valve can be set,, reach the purpose of controlling the chemical raw material loopback by setting the mistiming that pump and inert gas start.

Claims

1, a kind of raw material supply bottle cap comprises pneumatic fittings and raw material out splice going splice that bottle cap is provided with, it is characterized in that being provided with on bottle cap a raw material backflow fittings.

2, a kind of raw material supply bottle cap according to claim 1 is characterized in that described raw material out splice going splice place is provided with the suction pipe that extends in the raw material supply bottle.

3, a kind of raw material supply bottle cap according to claim 1 is characterized in that described pneumatic fittings is a high-pressure pipe connector.

4, a kind of raw material supply bottle cap according to claim 1 is characterized in that described raw material out splice going splice is a high-pressure pipe connector.

5, a kind of raw material supply bottle cap according to claim 1 is characterized in that described raw material backflow fittings is a high-pressure pipe connector.