TW201611084A - Ultraclean autosampler with syringe delivery for mass spectrometry - Google Patents

Ultraclean autosampler with syringe delivery for mass spectrometry Download PDF

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TW201611084A
TW201611084A TW104127041A TW104127041A TW201611084A TW 201611084 A TW201611084 A TW 201611084A TW 104127041 A TW104127041 A TW 104127041A TW 104127041 A TW104127041 A TW 104127041A TW 201611084 A TW201611084 A TW 201611084A
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valve
chemical
standard
sample
fluid
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TWI663627B (en
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丹尼爾R 懷德林
奧斯丁 舒茲
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自然科學公司
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
    • B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction, e.g. ion-exchange, ion-pair, ion-suppression or ion-exclusion
    • B01D15/361—Ion-exchange
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/02—Influencing flow of fluids in pipes or conduits
    • F15D1/06—Influencing flow of fluids in pipes or conduits by influencing the boundary layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38—Diluting, dispersing or mixing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Plasma & Fusion (AREA)
  • Electrochemistry (AREA)
  • Toxicology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Dispersion Chemistry (AREA)

Abstract

A system can include a valve assembly including a first valve and a second valve in fluid communication with the first valve. The valve assembly can be configured to deliver one or more of a sample, a chemical (e.g., an acid, a base, an organic chemical, etc.), and a standard via flow of a working fluid facilitated by one or more syringe pumps. Further, the one or more of the sample, the chemical, and the standard can maintain a physical separation from the one or more syringe pumps during delivery of the one or more of the sample, the chemical, and the standard.

Description

用於質譜分析之具有注射器輸送之超淨化自動取樣器 Ultra-purified autosampler with syringe delivery for mass spectrometry [相關申請案之交叉參考][Cross-Reference to Related Applications]

本申請案主張依據35 U.S.C.§119(e)之2014年8月19日申請且題為「ULTRACLEAN AUTOSAMPLER WITH SYRINGE DELIVERY FOR MASS SPECTROMETRY」之美國臨時申請案第62/039,315號之權利。美國臨時申請案第62/039,315號之全文以引用的方式併入本文中。 The present application claims the benefit of U.S. Provisional Application Serial No. 62/039,315, filed on Aug. 19, 2014, which is incorporated herein by reference. The entire disclosure of U.S. Provisional Application Serial No. 62/039,315 is incorporated herein by reference.

電感耦合電漿(ICP)光譜分析係一種通常用於判定液體樣本中之微量元素濃度及同位素比率的分析技術。ICP光譜分析採用電磁地產生之部分電離氬氣電漿,其達到趨近7000K之一溫度。當將一樣本引入至電漿時,高溫致使樣本原子變成電離或發射光。因為各化學元素產生一特性質量或發射光譜,所以量測所發射質量或光之光譜允許判定原始樣本之元素組成。 Inductively Coupled Plasma (ICP) Spectroscopy is an analytical technique commonly used to determine trace element concentrations and isotope ratios in liquid samples. ICP spectroscopy uses partially ionized argon plasma generated electromagnetically, which reaches a temperature approaching 7000K. When the same is introduced into the plasma, the high temperature causes the sample atoms to become ionized or emit light. Since each chemical element produces a characteristic mass or emission spectrum, measuring the emitted mass or spectrum of light allows for determining the elemental composition of the original sample.

可採用樣本引入系統來使液體樣本引入至ICP光譜分析儀器(例如,一電感耦合電漿質譜分析儀(ICP/ICP-MS)、一電感耦合電漿原子發射光譜分析儀(ICP-AES)或其類似者)中用於分析。例如,一樣本引入系統可自一容器取出一液體樣本之一分液且其後將該分液運輸至一噴霧器,該噴霧器使該分液轉換成適用於在電漿中由ICP光譜分析儀器之電離的一多分散氣霧劑。接著,將該氣霧劑儲存於一噴霧室中以移除較大氣霧顆粒。一旦離開噴霧室,則氣霧劑由ICP-MS或ICP-AES 儀器之一電漿火炬總成引入至電漿中用於分析。 A sample introduction system can be employed to introduce a liquid sample into an ICP spectrometer (eg, an inductively coupled plasma mass spectrometer (ICP/ICP-MS), an inductively coupled plasma atomic emission spectrometer (ICP-AES), or It is used in the analysis). For example, the present introduction system can dispense a liquid sample from a container and then transport the liquid to a sprayer, which converts the liquid to an ICP spectrometer suitable for use in plasma. A polydisperse aerosol that is ionized. The aerosol is then stored in a spray chamber to remove larger aerosol particles. Once leaving the spray chamber, the aerosol is either ICP-MS or ICP-AES One of the instrument's plasma torch assemblies is introduced into the plasma for analysis.

一種系統可包含包含一第一閥及與該第一閥流體連通之一第二閥的一閥總成。該閥總成可經組態以經由由一或多個注射器泵協助之一工作流體的流動而輸送一樣本、一化學品(例如,一酸、一鹼、一有機化學品等)及一標準品之一或多者。進一步言之,該樣本、該化學品、及該標準品之該一或多者可在該樣本、該化學品、及該標準品之該一或多者之輸送期間維持與該一或多個注射器泵之一實體分離。 A system can include a valve assembly including a first valve and a second valve in fluid communication with the first valve. The valve assembly can be configured to deliver the same, a chemical (eg, an acid, a base, an organic chemical, etc.) and a standard via the flow of one of the working fluids assisted by one or more syringe pumps One or more of the products. Further, the one or more of the sample, the chemical, and the standard may be maintained with the one or more during delivery of the sample, the chemical, and the one or more of the standard One of the syringe pumps is physically separated.

提供此【發明內容】以引入呈一簡化形式之概念之一選擇,其在下文【實施方式】中經進一步描述。此【發明內容】不意欲識別所主張之標的之關鍵特徵或基本特徵,亦不意欲用作判定所主張標的之範疇之一輔助。 This [invention] is provided to introduce one of the concepts in a simplified form, which is further described in the following [Embodiment]. This Summary is not intended to identify key features or essential features of the claimed subject matter, and is not intended to be used as an aid in determining the scope of the claimed subject matter.

100‧‧‧系統 100‧‧‧ system

102‧‧‧迴路 102‧‧‧ circuit

104‧‧‧泵 104‧‧‧ pump

106‧‧‧離子交換段 106‧‧‧Ion exchange section

108‧‧‧三通連接件 108‧‧‧Three-way connector

110‧‧‧歧管 110‧‧‧Management

112‧‧‧注射器泵 112‧‧‧Syringe pump

112a‧‧‧注射器泵 112a‧‧Injector pump

112b‧‧‧注射器泵 112b‧‧"Syringe pump

112c‧‧‧注射器泵 112c‧‧"Syringe pump

112d‧‧‧注射器泵 112d‧‧‧Syringe pump

114‧‧‧閥 114‧‧‧ valve

116‧‧‧載體 116‧‧‧ Carrier

118‧‧‧內部標準品 118‧‧‧Internal standard

120‧‧‧離子交換段 120‧‧‧Ion exchange section

122‧‧‧閥 122‧‧‧ valve

124‧‧‧自動取樣器 124‧‧‧Autosampler

126‧‧‧樣本迴路 126‧‧‧sample loop

128‧‧‧噴霧器 128‧‧‧ sprayer

130‧‧‧氣旋噴霧室 130‧‧‧ cyclone spray chamber

132‧‧‧電感耦合電漿(ICP)火炬 132‧‧‧Inductively Coupled Plasma (ICP) Torch

200‧‧‧輸送部分 200‧‧‧Transportation section

202‧‧‧閥 202‧‧‧Valve

204‧‧‧經淨化流體 204‧‧‧ purified fluid

206a‧‧‧流體線 206a‧‧‧ fluid line

206b‧‧‧流體線 206b‧‧‧ fluid line

206c‧‧‧流體線 206c‧‧‧ fluid line

206d‧‧‧流體線 206d‧‧‧ fluid line

208a‧‧‧流體線 208a‧‧‧ fluid line

208b‧‧‧流體線 208b‧‧‧ fluid line

208c‧‧‧流體線 208c‧‧‧ fluid line

208d‧‧‧流體線 208d‧‧‧ fluid line

210a‧‧‧段 Paragraph 210a‧‧

210b‧‧‧段 210b‧‧‧

210c‧‧‧段 210c‧‧‧

300‧‧‧閥總成 300‧‧‧ valve assembly

302‧‧‧樣本迴路 302‧‧‧sample loop

304‧‧‧標準品迴路 304‧‧‧ standard circuit

306‧‧‧化學品迴路 306‧‧‧Chemical circuit

308a‧‧‧流體線 308a‧‧‧ fluid line

308b‧‧‧流體線 308b‧‧‧ fluid line

308c‧‧‧流體線 308c‧‧‧ fluid line

310a‧‧‧裝載器 310a‧‧‧Loader

310b‧‧‧裝載器 310b‧‧‧Loader

310c‧‧‧裝載器 310c‧‧‧Loader

312‧‧‧混合埠 312‧‧‧ mixed 埠

314‧‧‧電感耦合電漿質譜分析儀(ICP-MS) 314‧‧‧Inductively Coupled Plasma Mass Spectrometer (ICP-MS)

316‧‧‧閥 316‧‧‧ valve

參考隨附圖式而描述【實施方式】。 Reference is made to the accompanying drawings to describe the embodiments.

圖1係根據本發明之一實例實施例之一系統的一圖解說明,該系統經組態以輸送經淨化流體(例如,至一質譜分析系統)。 1 is an illustration of a system in accordance with an example embodiment of the present invention configured to deliver a purified fluid (eg, to a mass spectrometry system).

圖2係根據本發明之一實例實施例之一系統的一圖解說明,該系統經組態以將經淨化流體引入至該系統之部分且引入經淨化流體作為該系統內之一工作流體。 2 is an illustration of a system in accordance with an example embodiment of the present invention configured to introduce a purified fluid into a portion of the system and introduce a purified fluid as a working fluid within the system.

圖3係根據本發明之一實例實施例之一系統的一圖解說明,該系統用於提供超淨化稀釋及化學(例如,酸性)尖峰之線內製備用於由ICP-MS判定高純度化學品中之微量金屬。 3 is a graphical illustration of a system for providing ultra-purified dilution and chemical (eg, acidic) spikes for in-line preparation for determining high purity chemicals by ICP-MS, in accordance with an example embodiment of the present invention. A trace amount of metal.

可採用樣本引入系統以使液體樣本引入至ICP光譜分析儀器中用於分析。例如,可使用多個線內注射器與閥注射一起以一受控速率將一樣本(其已裝載至一第一閥迴路中)自動地輸送至一噴霧器中,且可 視情況執行其他稀釋及/或標準尖峰。實例包含一樣本在分析之前之自動線內稀釋、內部標準溶液之自動添加及標準溶液或其他溶液至添加或其他應用之方法之樣本的相繼尖峰。由於在相當低位準(例如,小於兆分之五(5ppt))處分析金屬,所以由一或多個注射器泵泵抽之注射器流體中之污染物的存在可致使量測之錯誤。進一步言之,用作為標準或尖峰之某些溶液若經允許以使某些區域與樣本引入系統接觸,則可有害於該系統之部分。例如,一淨化段(例如,採用一離子交換樹脂以自一工作流體(諸如高純度水)移除雜質的一段)一旦暴露至酸性溶液則可釋放經捕獲之雜質。若一酸性溶液用作為一標準品或一尖峰溶液,則該酸性溶液可致使該等經捕獲之雜質釋放至該系統中,導致錯誤引入。另外,當分析高純度化學品中之微量材料(例如,微量金屬)時,任何受污染流體之引入可提供錯誤的測試條件。例如,用於受控流體輸送之注射器泵當不同流體經允許接觸該注射器泵時可引入污染物。 A sample introduction system can be employed to introduce a liquid sample into an ICP spectrometer for analysis. For example, a plurality of in-line injectors can be used to automatically deliver the same (which has been loaded into a first valve circuit) to a nebulizer at a controlled rate using a plurality of in-line injectors. Perform other dilutions and/or standard spikes as appropriate. Examples include successive spikes of samples such as automatic in-line dilution prior to analysis, automatic addition of internal standard solutions, and methods of standard solutions or other solutions to addition or other applications. The presence of contaminants in the syringe fluid pumped by one or more syringe pumps can cause measurement errors due to the analysis of the metal at a relatively low level (e.g., less than five tenths (5 ppt)). Further, certain solutions used as standards or spikes may be detrimental to portions of the system if allowed to contact certain areas with the sample introduction system. For example, a purge section (eg, a section that uses an ion exchange resin to remove impurities from a working fluid (such as high purity water)) can release trapped impurities upon exposure to an acidic solution. If an acidic solution is used as a standard or a spike solution, the acidic solution can cause the captured impurities to be released into the system, resulting in erroneous introduction. In addition, the introduction of any contaminated fluid can provide erroneous test conditions when analyzing trace amounts of materials (eg, trace metals) in high purity chemicals. For example, a syringe pump for controlled fluid delivery can introduce contaminants when different fluids are allowed to contact the syringe pump.

據此,描述輸送經淨化流體(諸如超高純度水)之系統及方法,其中該等系統維持樣本溶液、標準溶液及化學(例如,酸性的、鹼性的、有機的等)溶液與用於驅動工作流體穿過該系統以驅動該等樣本溶液、標準溶液及化學溶液之注射器泵的一實體分離。本文中所描述之該等系統及方法可包含用於提供超淨化稀釋及化學尖峰之線內製備用於由ICP-MS而判定高純度化學品中之微量材料(例如,微量金屬)的注射器驅動系統及方法。 Accordingly, systems and methods for delivering purified fluids, such as ultra high purity water, are described, wherein the systems maintain a sample solution, a standard solution, and a chemical (eg, acidic, basic, organic, etc.) solution and A physical separation of the syringe pump that drives the working fluid through the system to drive the sample solution, standard solution, and chemical solution. The systems and methods described herein can include in-line preparation of syringes for the determination of trace amounts of materials (eg, trace metals) in high purity chemicals by ICP-MS to provide ultra-purification dilution and chemical spikes. System and method.

通常參考圖1,描述經組態以輸送經淨化流體之實例系統100。一系統100包含經組態以淨化流體(例如,以產生去離子(DI)水)之一淨化器(例如,一泵104及一離子交換段106(諸如一陽離子交換段))。可將泵104及離子交換段106定位於一第一位置處。系統100亦包含經組態以使經淨化流體在該第一位置處之該淨化器與一第二位置之間循環 的一迴路102,該第二位置可遠離該第一位置(例如,遠離該第一位置若干米、遠離該第一位置若干米以上等)或可位於相同於該第一位置處。系統100進一步包含該第二位置處之一連接件(例如,一歧管110)。在一些實施例中,迴路102經由一三通連接件108而連接至歧管110。歧管110經組態以連接至(例如)質譜分析設備以將DI水供應至該質譜分析設備。 Referring generally to Figure 1, an example system 100 configured to deliver a purified fluid is depicted. A system 100 includes a purifier configured to purify a fluid (eg, to produce deionized (DI) water) (eg, a pump 104 and an ion exchange section 106 (such as a cation exchange section)). Pump 104 and ion exchange section 106 can be positioned at a first location. System 100 also includes a configuration configured to cycle the purified fluid between the purifier and the second location at the first location The primary circuit 102 can be remote from the first location (eg, several meters away from the first location, several meters away from the first location, etc.) or can be located at the same location. System 100 further includes a connector (eg, a manifold 110) at the second location. In some embodiments, loop 102 is coupled to manifold 110 via a three-way connector 108. Manifold 110 is configured to be coupled to, for example, a mass spectrometry apparatus to supply DI water to the mass spectrometry apparatus.

在一些實施例中,歧管110連接至一或多個注射器泵112,一或多個注射器泵112可經組態以將該DI水(及可能稀釋劑及/或載體116、內部標準品118等)供應至該質譜分析設備。例如,一閥114(例如,一旋轉閥)與注射器泵112耦合。在一些實施例中,一或多個淨化段(例如,額外離子交換段120(諸如額外陽離子交換段)等)安置於閥114與另一閥122(例如,一第二旋轉閥)之間,閥122可連接至一取樣器總成(諸如一自動取樣器124)用於自容納於試管中之數個樣本自動地收集一樣本等等。在一些實施例中,一系統100可用於輸送具有小於兆分之一(ppt)之一污染物元素(諸如鈉(Na))之一濃度的DI水。 In some embodiments, manifold 110 is coupled to one or more syringe pumps 112, and one or more syringe pumps 112 can be configured to utilize the DI water (and possibly diluents and/or carriers 116, internal standards 118 Etc.) supplied to the mass spectrometry equipment. For example, a valve 114 (eg, a rotary valve) is coupled to the syringe pump 112. In some embodiments, one or more purification sections (eg, additional ion exchange sections 120 (such as additional cation exchange sections), etc.) are disposed between valve 114 and another valve 122 (eg, a second rotary valve), Valve 122 can be coupled to a sampler assembly (such as an autosampler 124) for automatically collecting the same samples from a plurality of samples contained in a test tube. In some embodiments, a system 100 can be used to deliver DI water having a concentration of one of less than one trillionth (ppt) of one of the contaminant elements, such as sodium (Na).

系統100亦可包含具有複數個位置之一切換閥,該切換閥可選擇該注射器流體之源。該注射器流體可具有允許該注射器流體中之污染物約束於該淨化段中的一pH或離子強度。該切換閥亦可選擇具有能夠使該淨化段再生之一pH或離子強度的一第二注射器流體。 System 100 can also include a switching valve having a plurality of positions that can select a source of the injector fluid. The syringe fluid can have a pH or ionic strength that allows contaminants in the syringe fluid to be confined in the purge section. The switching valve can also be selected to have a second syringe fluid capable of regenerating one of the pH or ionic strength of the purge section.

系統100亦可包含與一氣旋噴霧室130耦合之一噴霧器128用於向一電感耦合電漿(ICP)火炬132供應樣本氣體,樣本來自自動取樣器124、內部標準品118、載體116、DI水等。閥122可與自動取樣器124、噴霧器128及閥114耦合。閥122可接收來自自動取樣器124之樣本、內部標準品118、載體116及/或DI水且將其等供應至噴霧器128。閥122亦可與一樣本迴路126耦合用於固持加注流體等。亦可使用一蠕動泵以抽空來自噴霧器128之廢物。例如,該蠕動泵可連接至噴霧器 128之一排放腔室。 The system 100 can also include a sprayer 128 coupled to a cyclonic spray chamber 130 for supplying sample gas to an inductively coupled plasma (ICP) torch 132 from the autosampler 124, internal standard 118, carrier 116, DI water. Wait. Valve 122 can be coupled to autosampler 124, nebulizer 128, and valve 114. Valve 122 may receive a sample from autosampler 124, internal standard 118, carrier 116, and/or DI water and supply it to nebulizer 128. Valve 122 may also be coupled to the same circuit 126 for holding a fill fluid or the like. A peristaltic pump can also be used to evacuate the waste from the atomizer 128. For example, the peristaltic pump can be connected to a nebulizer One of the discharge chambers of 128.

參考圖2,展示將經淨化流體引入系統100之部分且引入經淨化流體作為系統100內之一工作流體的一輸送部分200。該經淨化流體可包含(例如)超高純度水(諸如,具有具有小於兆分之一(ppt)之一污染物元素(諸如鈉(Na))之一濃度的去離子水)。輸送部分200包含與複數個注射器泵112(展示四個注射器泵,其等標籤為112a、112b、112c、112d)流體連通之一閥202(例如,一旋轉閥)。閥202亦與經淨化流體204之一源流體連通。在實施方案中,經淨化流體204之該源係由圖1中所展示之離子交換段106淨化之流體。在實施方案中,經淨化流體204之該源係經淨化流體之一容器。在實施方案中,具有能夠使系統100之一或多個淨化段再生之一pH或離子強度可被引入至輸送部分200作為貫穿該系統之一或多個部分分佈之經淨化流體204。 Referring to FIG. 2, a delivery portion 200 that introduces a purified fluid into a portion of system 100 and introduces the purified fluid as one of the working fluids within system 100 is shown. The purified fluid can comprise, for example, ultra high purity water (such as deionized water having a concentration of one of less than one trillion (ppt) of one of the contaminant elements (such as sodium (Na)). Delivery portion 200 includes a valve 202 (e.g., a rotary valve) in fluid communication with a plurality of syringe pumps 112 (showing four syringe pumps, such as labels 112a, 112b, 112c, 112d). Valve 202 is also in fluid communication with a source of purified fluid 204. In an embodiment, the source of purified fluid 204 is a fluid purified by ion exchange section 106 as shown in FIG. In an embodiment, the source of purified fluid 204 is a container of one of the purified fluids. In an embodiment, having a pH or ionic strength capable of regenerating one or more purification stages of system 100 can be introduced to delivery portion 200 as purified fluid 204 distributed throughout one or more portions of the system.

閥202可在兩個操作位置之間切換。在閥202之一第一操作位置中,注射器泵112將自經淨化流體204之該源的該經淨化流體汲取至閥202及經耦合流體線中。例如,注射器泵112a可將經淨化流體汲取至流體線206a中,注射器泵112b可將經淨化流體汲取至流體線206b中,注射器泵112c可將經淨化流體汲取至流體線206c中,且注射器泵112d可將經淨化流體汲取至流體線206d中。在閥202之一第二操作位置中,該等注射器泵將該經淨化流體自該等流體線(例如,流體線206a、206b、206c、206d)驅動至系統100之其他部分,在本文中進一步描述。例如,注射器泵112a可驅動該流體自流體線206a至流體線208a,注射器泵112b可驅動該流體自流體線206b至流體線208b,注射器泵112c可驅動該流體自流體線206c至流體線208c,且注射器泵112d可驅動該流體自流體線206d至流體線208d。在實施方案中,閥202與經組態以在該經淨化流體進入系統100之其他部分之前處理該經淨化流體的一或多個淨化段流體連通。該一或多個淨化段在允許該經淨化 流體操縱遍及該系統之部分之前可確保該經淨化流體之純度。例如,流體線208a可在閥202與一淨化段210a之間耦合,流體線208b可在閥202與一淨化段210b之間耦合,流體線208c可在閥202與一淨化段210c之間耦合,且流體線208d可在閥202與一淨化段210d之間耦合。將進一步參考圖3而描述自該等段(210a、210b、210c、210d)之各者至系統100的流動。 Valve 202 is switchable between two operating positions. In a first operational position of valve 202, syringe pump 112 draws the purified fluid from the source of purified fluid 204 into valve 202 and the coupled fluid line. For example, syringe pump 112a can draw purified fluid into fluid line 206a, syringe pump 112b can draw purified fluid into fluid line 206b, syringe pump 112c can draw purified fluid into fluid line 206c, and syringe pump 112d may draw the purified fluid into fluid line 206d. In a second operational position of valve 202, the syringe pumps drive the purified fluid from the fluid lines (eg, fluid lines 206a, 206b, 206c, 206d) to other portions of system 100, further herein. description. For example, syringe pump 112a can drive the fluid from fluid line 206a to fluid line 208a, syringe pump 112b can drive the fluid from fluid line 206b to fluid line 208b, and syringe pump 112c can drive the fluid from fluid line 206c to fluid line 208c, And the syringe pump 112d can drive the fluid from the fluid line 206d to the fluid line 208d. In an embodiment, the valve 202 is in fluid communication with one or more purge sections configured to treat the purified fluid prior to entering the other portion of the system 100. The one or more purification sections are allowing the purification The purity of the purified fluid is ensured prior to fluid manipulation throughout the portion of the system. For example, fluid line 208a can be coupled between valve 202 and a purge section 210a, fluid line 208b can be coupled between valve 202 and a purge section 210b, and fluid line 208c can be coupled between valve 202 and a purge section 210c. And fluid line 208d can be coupled between valve 202 and a purge section 210d. The flow from each of the segments (210a, 210b, 210c, 210d) to the system 100 will be described with further reference to FIG.

參考圖3,展示用於提供超淨化稀釋及化學(例如,酸性的、鹼性的、有機的等)尖峰(例如,用於由ICP-MS判定高純度化學品中之微量金屬)之線內製備的一閥總成300。閥總成300包含與一第二閥(展示為閥122)流體連通之一第一閥(展示為閥114)。在實施方案中,閥114經組態以經由與流體線208a(例如,由注射器泵112a驅動)、流體線208b(例如,由注射器泵112b驅動)及流體線208d(例如,由注射器泵112d驅動)之耦合而接收該經淨化流體,而閥122經組態以經由與流體線208c(例如,由注射器泵112c驅動)之耦合而接收該經淨化流體。閥總成300包含與閥114及閥122流體連通之一或多個固持迴路。例如,圖3顯示與閥114及閥122流體連通(例如,在閥114與閥122之間耦合)之一樣本迴路302、與閥114及閥122流體連通(例如,在閥114與閥122之間耦合)之一標準品迴路304及與閥114及閥122流體連通(例如,在閥114與閥122之間耦合)之一化學品迴路306。化學品迴路306可係指經組態以將一化學品(諸如一尖峰溶液)固持於系統100內之一迴路,且可包含(但不限於)一酸性的、一鹼性的、一有機化學品及其類似者。在實施方案中,樣本迴路302可對應於參考圖1所描述之樣本迴路126。在一實施方案中,樣本迴路302具有大致2.5毫升(2.5mL)之一體積,標準品迴路304具有大致0.3毫升(0.3mL)與3.0毫升(3.0mL)之間的一體積,且化學品迴路306具有大致0.3毫升(0.3mL)與3.0毫升(3.0mL)之間的一體積。如本文中所使用者,術語「迴路」(例如,樣本迴路 302、標準品迴路304、化學品迴路306)可係指一經捲繞流體線、一筆直流體線、一彎曲流體線、一容器、或具有一經定義體積以固持並轉移流體之其他結構。 Referring to Figure 3, there is shown in-line for providing ultra-purification dilution and chemical (e.g., acidic, basic, organic, etc.) spikes (e.g., for determining trace metals in high purity chemicals by ICP-MS) A valve assembly 300 is prepared. Valve assembly 300 includes a first valve (shown as valve 114) in fluid communication with a second valve (shown as valve 122). In an embodiment, the valve 114 is configured to be driven via fluid line 208a (eg, driven by syringe pump 112a), fluid line 208b (eg, driven by syringe pump 112b), and fluid line 208d (eg, by syringe pump 112d) The coupled fluid receives the purified fluid, and the valve 122 is configured to receive the purified fluid via coupling with a fluid line 208c (eg, driven by a syringe pump 112c). Valve assembly 300 includes one or more holding circuits in fluid communication with valve 114 and valve 122. For example, FIG. 3 shows one sample circuit 302 in fluid communication with valve 114 and valve 122 (eg, coupled between valve 114 and valve 122) in fluid communication with valve 114 and valve 122 (eg, at valve 114 and valve 122) One of the standard circuits 304 and one of the chemical circuits 306 in fluid communication with the valves 114 and 122 (e.g., coupled between the valve 114 and the valve 122). Chemical circuit 306 may refer to a circuit configured to hold a chemical, such as a spike solution, within system 100, and may include, but is not limited to, an acidic, a basic, an organic chemistry Products and similar. In an embodiment, sample loop 302 may correspond to sample loop 126 described with reference to FIG. In one embodiment, the sample loop 302 has a volume of approximately 2.5 milliliters (2.5 mL) and the standard loop 304 has a volume between approximately 0.3 milliliters (0.3 mL) and 3.0 milliliters (3.0 mL), and the chemical loop 306 has a volume between approximately 0.3 mL (0.3 mL) and 3.0 mL (3.0 mL). As used herein, the term "loop" (eg, sample loop) 302, standard circuit 304, chemical circuit 306) may refer to a wound fluid line, a DC body line, a curved fluid line, a container, or other structure having a defined volume to hold and transfer fluid.

在實施方案中,閥122經組態以接收一樣本(例如,經由流體線308a)、一標準品(例如,經由流體線308b)及一化學品(例如,一酸性的、一鹼性的、一有機化學品等)(例如,經由流體線308c)。在實施方案中,該標準品可對應於內部標準品118。例如,該樣本可經由自動取樣器124而獲得且經由一裝載器310a(例如,一壓力源或負壓力源(諸如一注射器泵或真空吸塵器))而汲取至閥總成300中及至樣本迴路302中,該標準品可經由一裝載器310b(例如,一壓力源或負壓力源(諸如一注射器泵或真空吸塵器))而汲取至閥總成300中及至標準品迴路304中,且該化學品可經由一裝載器310c(例如,一壓力源或負壓力源(諸如一注射器泵或真空吸塵器))而汲取至閥總成300中及至化學品迴路306中。 In an embodiment, the valve 122 is configured to receive the same (eg, via fluid line 308a), a standard (eg, via fluid line 308b), and a chemical (eg, an acidic, alkaline, An organic chemical, etc.) (eg, via fluid line 308c). In an embodiment, the standard can correspond to internal standard 118. For example, the sample can be obtained via autosampler 124 and drawn into valve assembly 300 and to sample loop 302 via a loader 310a (eg, a pressure source or a negative pressure source (such as a syringe pump or vacuum cleaner)). The standard may be drawn into the valve assembly 300 and into the standard circuit 304 via a loader 310b (eg, a pressure source or a negative pressure source (such as a syringe pump or vacuum cleaner), and the chemical It can be drawn into the valve assembly 300 and into the chemical circuit 306 via a loader 310c (eg, a pressure source or a negative pressure source such as a syringe pump or vacuum cleaner).

在實施方案中,閥114及閥122之各者可在一第一操作位置與一第二操作位置之間切換。例如,在該第一操作位置中,該樣本可被汲取至閥總成300中及至樣本迴路302中,該標準品可被汲取至閥總成300中及至標準品迴路304中,且該化學品可被汲取至閥總成300中及至化學品迴路306中。在該第二操作位置中,該樣本經由由注射器泵112b而供應穿過流體線208b之該經淨化流體(例如,工作流體)之流動而自樣本迴路302驅動,該標準品經由由注射器泵112d而供應穿過流體線208d之該經淨化流體(例如,工作流體)之流動而自標準品迴路304驅動,且該化學品經由由注射器泵112a而供應穿過流體線208a之該經淨化流體(例如,工作流體)之流動而自化學品迴路306驅動。據此,該樣本保持與注射器泵112b實體分離,該標準品保持與注射器泵112d實體分離,且該化學品保持與注射器泵112a實體分離,藉此僅該經淨化 流體(例如,工作流體)與該樣本、該標準品及該化學品相互作用以自其等各自被固持之迴路驅動該樣本、該標準品及該化學品。 In an embodiment, each of valve 114 and valve 122 is switchable between a first operational position and a second operational position. For example, in the first operational position, the sample can be drawn into the valve assembly 300 and into the sample circuit 302, the standard can be drawn into the valve assembly 300 and into the standard circuit 304, and the chemical It can be drawn into the valve assembly 300 and into the chemical circuit 306. In the second operational position, the sample is driven from sample loop 302 via flow of the purified fluid (e.g., working fluid) supplied through fluid line 208b by syringe pump 112b via a syringe pump 112d While the flow of the purified fluid (e.g., working fluid) supplied through fluid line 208d is driven from standard loop 304, the chemical is supplied to the purified fluid through fluid line 208a via syringe pump 112a ( For example, the flow of working fluid is driven from chemical loop 306. Accordingly, the sample remains physically separated from the syringe pump 112b, the standard remains physically separated from the syringe pump 112d, and the chemical remains physically separated from the syringe pump 112a, whereby only the purified A fluid (eg, a working fluid) interacts with the sample, the standard, and the chemical to drive the sample, the standard, and the chemical from their respective held loops.

在實施方案中,該樣本、該標準品及該化學品分別自樣本迴路302、標準品迴路304及化學品迴路306被驅動至閥122之一混合埠312。混合埠312亦可與流體線208c流體連通以接收由注射器泵112c供應之該經淨化流體(例如,稀釋劑)之一流動以便在混合埠312處與該樣本、標準品及該化學品之一或多者混合及/或稀釋該樣本、標準品及該化學品之一或多者。在實施方案中,該樣本、該標準品、該化學品及該稀釋劑由混合埠312實質上同時接收。在實施方案中,系統100包含經組態以在一規定時間驅動注射器泵112c以提供該稀釋劑至混合埠312之流動的一計時器,其中該規定時間可包含與該樣本、該標準品及該化學品之一或多者實質上同時之一時間、不同於該樣本、該標準品及該化學品之一或多者的一時間等等。在實施方案中,閥114耦合至該稀釋劑之一源且經組態以將該稀釋劑裝載至在閥114與閥122之間耦合之一稀釋劑迴路中用於將該稀釋劑自該稀釋劑迴路引入至混合埠312中。 In an embodiment, the sample, the standard, and the chemical are driven from sample loop 302, standard loop 304, and chemical loop 306 to one of valves 122, 埠 312. The mixing bowl 312 can also be in fluid communication with the fluid line 208c to receive one of the purified fluid (eg, diluent) supplied by the syringe pump 112c for flow with the sample, the standard, and the chemical at the mixing bowl 312 Or more than mixing and/or diluting the sample, standard, and one or more of the chemicals. In an embodiment, the sample, the standard, the chemical, and the diluent are received substantially simultaneously by the mixing bowl 312. In an embodiment, system 100 includes a timer configured to drive syringe pump 112c for a specified time to provide a flow of the diluent to mixing bowl 312, wherein the specified time can include the sample, the standard, and One or more of the chemicals are substantially simultaneously one time, different from the sample, the standard, and one or more of the chemical, and the like. In an embodiment, the valve 114 is coupled to a source of the diluent and is configured to load the diluent into a diluent loop coupled between the valve 114 and the valve 122 for diluting the diluent from the diluent The agent circuit is introduced into the mixing bowl 312.

閥122與一電感耦合電漿質譜分析儀(ICP-MS)314流體連通。例如,混合埠312可耦合至經組態以將來自混合埠312之該經混合樣本溶液轉移至ICP-MS 314用於分析的一閥316(例如,一轉移閥)。在實施方案中,系統100可在樣本循環之間淨化、流乾、重新裝滿或其類似者。例如,該樣本迴路可在樣本循環之間淨化(例如,經由工作流體、酸性溶液、鹼性溶液、有機溶液、溶劑等)及/或重新裝滿。標準品迴路304及化學品迴路306亦可在樣本循環之間重新裝滿。例如,標準品迴路304之至少一部分或整個標準品迴路304可在樣本循環之間重新裝滿,化學品迴路306之至少一部分或整個化學品迴路306可在樣本循環之間重新裝滿,及其類似者。重新裝滿該等迴路可防止汙濁溶液 在系統100內徘徊,可防止擴散混合在系統100之該等閥之一或多者中之影響等等。 Valve 122 is in fluid communication with an inductively coupled plasma mass spectrometer (ICP-MS) 314. For example, the mixing bowl 312 can be coupled to a valve 316 (eg, a transfer valve) configured to transfer the mixed sample solution from the mixing bowl 312 to the ICP-MS 314 for analysis. In an embodiment, system 100 can be purged, drained, refilled, or the like between sample cycles. For example, the sample loop can be purged between sample runs (eg, via a working fluid, an acidic solution, an alkaline solution, an organic solution, a solvent, etc.) and/or refilled. Standard loop 304 and chemical loop 306 can also be refilled between sample cycles. For example, at least a portion of the standard loop 304 or the entire standard loop 304 can be refilled between sample runs, at least a portion of the chemical loop 306 or the entire chemical loop 306 can be refilled between sample loops, and Similar. Refill these circuits to prevent dirty solutions Within the system 100, diffusion effects can be prevented from affecting one or more of the valves of the system 100, and the like.

儘管語言描述之標的對結構特徵及/或處理操作係特定的,然應理解隨附申請專利範圍中定義之標的不必然受限於上文所描述之特定特徵或行為。實情係上文所描述之特定特徵及行為係揭示為實施申請專利範圍之實例形式。 Although the subject matter of the language is described in terms of structural features and/or processing operations, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the particular features or acts described. The specific features and behaviors described above are disclosed as examples of the scope of the patent application.

100‧‧‧系統 100‧‧‧ system

102‧‧‧迴路 102‧‧‧ circuit

104‧‧‧泵 104‧‧‧ pump

106‧‧‧離子交換段 106‧‧‧Ion exchange section

108‧‧‧三通連接件 108‧‧‧Three-way connector

110‧‧‧歧管 110‧‧‧Management

112‧‧‧注射器泵 112‧‧‧Syringe pump

114‧‧‧閥 114‧‧‧ valve

116‧‧‧載體 116‧‧‧ Carrier

118‧‧‧內部標準品 118‧‧‧Internal standard

120‧‧‧離子交換段 120‧‧‧Ion exchange section

122‧‧‧閥 122‧‧‧ valve

124‧‧‧自動取樣器 124‧‧‧Autosampler

126‧‧‧樣本迴路 126‧‧‧sample loop

128‧‧‧噴霧器 128‧‧‧ sprayer

130‧‧‧氣旋噴霧室 130‧‧‧ cyclone spray chamber

132‧‧‧電感耦合電漿(ICP)火炬 132‧‧‧Inductively Coupled Plasma (ICP) Torch

Claims (20)

一種系統,其包括:一第一閥;一第二閥,其與該第一閥流體連通,該第二閥包含一混合埠;一樣本迴路,其耦合於該第一閥與該第二閥之間;一標準品迴路,其耦合於該第一閥與該第二閥之間;一化學品迴路,其耦合於該第一閥與該第二閥之間;一或多個注射器泵,其等經組態以驅動一工作流體穿過該第一閥之至少一部分;其中該第一閥及該第二閥之各者可在一第一位置與一第二位置之間切換,其中在該第一位置中,一樣本經由一樣本裝載器而裝載至該樣本迴路中,一標準品經由一標準品裝載器而裝載至該標準品迴路中,且一化學品經由一化學品裝載器而裝載至該化學品迴路中,且其中在該第二位置中,該樣本經由該工作流體之流動而自該樣本迴路輸送至該第二閥之該混合埠,該標準品經由該工作流體之流動而自該標準品迴路輸送至該第二閥之該混合埠,且該化學品經由該工作閥之流動而自該化學品迴路輸送至該第二閥之該混合埠,該樣本、該標準品及該化學品在該樣本、該標準品及該化學品至該混合埠之輸送期間維持與該一或多個注射器泵之實體分離。 A system comprising: a first valve; a second valve in fluid communication with the first valve, the second valve comprising a mixing cartridge; and a present circuit coupled to the first valve and the second valve a standard circuit coupled between the first valve and the second valve; a chemical circuit coupled between the first valve and the second valve; one or more syringe pumps, The device is configured to drive a working fluid through at least a portion of the first valve; wherein each of the first valve and the second valve is switchable between a first position and a second position, wherein In the first position, the same load is loaded into the sample loop via the same loader, a standard is loaded into the standard circuit via a standard loader, and a chemical is passed through a chemical loader. Loading into the chemical circuit, and wherein in the second position, the sample is delivered from the sample circuit to the mixing bowl of the second valve via the flow of the working fluid, the standard flows through the working fluid And from the standard circuit to the second valve Mixing the crucible and the chemical is transferred from the chemical loop to the mixing bowl of the second valve via the flow of the working valve, the sample, the standard and the chemical in the sample, the standard, and the chemical Maintaining physical separation from the one or more syringe pumps during delivery to the mixing bowl. 如請求項1之系統,其中該標準品迴路及該化學品迴路之一或多者在各樣本循環之間重新裝滿。 The system of claim 1, wherein the standard loop and one or more of the chemical loops are refilled between sample runs. 如請求項1之系統,其中該混合埠與一電感耦合電漿質譜分析儀(ICP-MS)流體連通。 The system of claim 1 wherein the mixed helium is in fluid communication with an inductively coupled plasma mass spectrometer (ICP-MS). 如請求項1之系統,其中該第二閥包含經組態以接收一高純度稀釋劑之一埠,該埠與該混合埠流體連通。 The system of claim 1, wherein the second valve comprises one configured to receive a high purity diluent, the crucible being in fluid communication with the mixing crucible. 如請求項4之系統,其中該混合埠經組態以實質上同時接收該樣本、該標準品、該化學品及該高純度稀釋劑之各者。 The system of claim 4, wherein the mix is configured to receive the sample, the standard, the chemical, and the high purity diluent substantially simultaneously. 如請求項1之系統,其進一步包括:一淨化器,其與該第一閥流體連通,該淨化器經組態以淨化流體以向該第一閥提供該工作流體。 The system of claim 1, further comprising: a purifier in fluid communication with the first valve, the purifier being configured to purge fluid to provide the working fluid to the first valve. 一種系統,其包括:一閥總成,其包含一第一閥及與該第一閥流體連通之一第二閥,該閥總成經組態以經由由一或多個注射器泵協助之一工作流體之流動而輸送一樣本、一化學品及一標準品之一或多者,該樣本、該化學品及該標準品之該一或多者在該樣本、該化學品及該標準品之該一或多者之輸送期間維持與該一或多個注射器泵之一實體分離。 A system comprising: a valve assembly including a first valve and a second valve in fluid communication with the first valve, the valve assembly configured to be assisted by one or more syringe pumps The flow of the working fluid delivers one or more of the same, a chemical, and a standard, and the one or more of the sample, the chemical, and the standard are in the sample, the chemical, and the standard The one or more are maintained separated from one of the one or more syringe pumps during delivery. 如請求項7之系統,其中該第一閥及該第二閥之各者可在一第一位置與一第二位置之間切換,其中在該第一位置中,該樣本、該化學品及該標準品之該一或多者通過一或多個裝載器之動作而汲取至與該第一閥及該第二閥之各者流體連通的一固持迴路中。 The system of claim 7, wherein each of the first valve and the second valve is switchable between a first position and a second position, wherein the sample, the chemical, and The one or more of the standards are captured by a movement of one or more loaders into a holding loop in fluid communication with each of the first valve and the second valve. 如請求項8之系統,其中該一或多個裝載器包含一注射器泵及一真空裝載器之至少一者。 The system of claim 8, wherein the one or more loaders comprise at least one of a syringe pump and a vacuum loader. 如請求項8之系統,其中在該第二位置中,該樣本、該化學品及該標準品之該一或多者經由該工作流體之流動而輸送至該第二閥之一混合埠。 The system of claim 8, wherein in the second position, the one or more of the sample, the chemical, and the standard are delivered to the mixing valve of the second valve via the flow of the working fluid. 如請求項10之系統,其中該混合埠與一電感耦合電漿質譜分析儀(ICP-MS)流體連通。 The system of claim 10, wherein the mixed helium is in fluid communication with an inductively coupled plasma mass spectrometer (ICP-MS). 如請求項7之系統,其進一步包括下列之至少一者:一樣本迴路,其耦合於該第一閥與該第二閥之間;一標準品迴路,其耦合於該第一閥與該第二閥之間;及一化學品迴路,其耦合於該第一閥與該第二閥之間。 The system of claim 7, further comprising at least one of: the same circuit coupled between the first valve and the second valve; a standard circuit coupled to the first valve and the first Between the two valves; and a chemical circuit coupled between the first valve and the second valve. 如請求項12之系統,其中該第一閥及該第二閥可在一第一位置與一第二位置之間切換,其中在該第一位置中,一樣本經由一樣本裝載器而裝載至該樣本迴路中,一標準品經由一標準品裝載器而裝載至該標準品迴路中,且一化學品經由一化學品裝載器而裝載至該化學品迴路中。 The system of claim 12, wherein the first valve and the second valve are switchable between a first position and a second position, wherein in the first position, the same load is loaded via the same loader In the sample loop, a standard is loaded into the standard loop via a standard loader and a chemical is loaded into the chemical loop via a chemical loader. 如請求項13之系統,其中在該第二位置中,該樣本經由由一第一注射器泵協助之該工作流體之流動而自該樣本迴路輸送至該第二閥之一混合埠,該標準品經由由一第二注射器泵協助之該工作流體之流動而自該標準品迴路輸送至該第二閥之該混合埠,且該化學品經由由一第三注射器泵協助之該工作流體之流動而自該化學品迴路輸送至該第二閥之該混合埠。 The system of claim 13, wherein in the second position, the sample is delivered from the sample loop to one of the second valves via a flow of the working fluid assisted by a first syringe pump, the standard Delivering from the standard circuit to the mixing bowl of the second valve via the flow of the working fluid assisted by a second syringe pump, and the chemical flows through the working fluid assisted by a third syringe pump The mixing raft is delivered from the chemical circuit to the second valve. 如請求項14之系統,其進一步包括下列之一或多者:一第一淨化段,其耦合於該第一注射器泵與該第一閥之間;一第二淨化段,其耦合於該第二注射器泵與該第一閥之間;及一第三淨化段,其耦合於該第三注射器泵與該第一閥之間。 The system of claim 14, further comprising one or more of: a first purification section coupled between the first syringe pump and the first valve; a second purification section coupled to the first a second syringe pump and the first valve; and a third purification section coupled between the third syringe pump and the first valve. 如請求項15之系統,其中該第一淨化段、該第二淨化段及該第三淨化段之一或多者包含一離子交換樹脂。 The system of claim 15 wherein one or more of the first purification section, the second purification section, and the third purification section comprise an ion exchange resin. 如請求項14之系統,其中該第二閥包含經組態以接收由一稀釋劑注射器泵協助之一稀釋劑的一埠。 The system of claim 14, wherein the second valve comprises a stack configured to receive one of the diluents assisted by a diluent syringe pump. 如請求項17之系統,其中該稀釋劑包含高純度去離子水。 The system of claim 17, wherein the diluent comprises high purity deionized water. 如請求項17之系統,其進一步包括: 一淨化段,其耦合於該稀釋劑注射器泵與該第二閥之間。 The system of claim 17, further comprising: A purge section coupled between the diluent syringe pump and the second valve. 如請求項7之系統,其進一步包括:一淨化器,其與該閥總成流體連通,該淨化器經組態以淨化流體以向該閥總成提供該工作流體。 The system of claim 7, further comprising: a purifier in fluid communication with the valve assembly, the purifier being configured to purge fluid to provide the working fluid to the valve assembly.
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