TW201609377A - Manufacturing method of electronic device, manufacturing method of glass lamination body - Google Patents

Manufacturing method of electronic device, manufacturing method of glass lamination body Download PDF

Info

Publication number
TW201609377A
TW201609377A TW104124584A TW104124584A TW201609377A TW 201609377 A TW201609377 A TW 201609377A TW 104124584 A TW104124584 A TW 104124584A TW 104124584 A TW104124584 A TW 104124584A TW 201609377 A TW201609377 A TW 201609377A
Authority
TW
Taiwan
Prior art keywords
glass substrate
temporary support
polyimide
layer
electronic device
Prior art date
Application number
TW104124584A
Other languages
Chinese (zh)
Other versions
TWI655089B (en
Inventor
Atsushi Komori
Hiroshi Shimoda
Kenichi Ebata
Junichi Kakuta
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of TW201609377A publication Critical patent/TW201609377A/en
Application granted granted Critical
Publication of TWI655089B publication Critical patent/TWI655089B/en

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Photovoltaic Devices (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention relates to a manufacturing method of electronic device, which comprises: step (1) to form the polyimide resin layer on the temporarily supporting layer, wherein the side surface of polyimide resin layer opposite to the temporarily supporting layer is processed by Silane coupling agent; step (2) to allocate a glass substrate with thickness below 0.2mm on the aforementioned polyimide resin layer, so as to obtain the glass lamination body; step (3) to allocate the member for electronic devices on the surface of aforementioned glass substrate, so as to obtain the glass lamination body with the member attached thereto; and step (4) to remove the aforementioned temporarily supporting body from the aforementioned glass lamination body with the member attached thereto, thereby obtaining the electronic device comprising the aforementioned polyimide resin layer, the glass substrate, and the member for the aforementioned electronic device.

Description

電子裝置之製造方法、玻璃積層體之製造方法 Method for manufacturing electronic device, method for manufacturing glass laminate

本發明係關於一種電子裝置之製造方法、及玻璃積層體之製造方法。 The present invention relates to a method of manufacturing an electronic device and a method of manufacturing a glass laminate.

近年來,太陽電池(PV)、液晶面板(LCD)、有機EL面板(OLED)等裝置(電子設備)之薄型化、輕量化不斷進行,而用於該等裝置之玻璃基板之薄板化推進。若因薄板化而導致玻璃基板之強度不足,則於裝置之製造步驟中,玻璃基板之處理性降低。 In recent years, devices (electronic devices) such as solar cells (PV), liquid crystal panels (LCDs), and organic EL panels (OLEDs) have been thinned and lightened, and the thinning of glass substrates used in such devices has progressed. If the strength of the glass substrate is insufficient due to the thinning, the glass substrate is rationally lowered in the manufacturing process of the device.

因此,揭示有將樹脂層等配置於玻璃基板上而補強玻璃基板之技術(例如專利文獻1)。然而,近來,經薄膜化之玻璃基板之尺寸進一步擴大,而難以於此種玻璃基板上形成性狀優異之樹脂層。例如,若對玻璃基板上賦予樹脂層形成用組合物,則玻璃基板彎曲,而難以形成厚度均勻之塗膜。 Therefore, a technique of arranging a resin layer or the like on a glass substrate to reinforce the glass substrate has been disclosed (for example, Patent Document 1). However, recently, the size of the thinned glass substrate has been further expanded, and it has been difficult to form a resin layer excellent in properties on such a glass substrate. For example, when a composition for forming a resin layer is applied to a glass substrate, the glass substrate is bent, and it is difficult to form a coating film having a uniform thickness.

另一方面,作為於玻璃基板上形成樹脂層之方法之一,提出有轉印法(專利文獻2)。更具體而言,於專利文獻2之實施例欄中,揭示有如下態樣:於剝離性輔助基板之顯示易剝離性之表面上形成依序具有未硬化之硬化性樹脂組合物層及玻璃基板之硬化前積層體,其後,使硬化前積層體中之未硬化之硬化性樹脂組合物層硬化,而獲得具有樹脂層之硬化後積層體,進而,由硬化後積層體獲得具有玻璃基板及與其表面接觸之樹脂層的附有樹脂層之玻璃基板。 On the other hand, as one of the methods of forming a resin layer on a glass substrate, a transfer method has been proposed (Patent Document 2). More specifically, in the column of the example of Patent Document 2, it is disclosed that the uncured curable resin composition layer and the glass substrate are sequentially formed on the surface of the releasable auxiliary substrate which exhibits easy peelability. The pre-hardened laminate, and thereafter, the uncured curable resin composition layer in the laminate before curing is cured to obtain a cured laminate having a resin layer, and further, a glass substrate is obtained from the cured laminate A glass substrate with a resin layer attached to the resin layer in contact with the surface.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特表2002-542971號 [Patent Document 1] Japanese Patent Special Table 2002-542971

[專利文獻2]國際公開第2013/054792號 [Patent Document 2] International Publication No. 2013/054792

近年來,就耐熱性優異方面而言,聚醯亞胺樹脂層備受矚目。 In recent years, the polyimide film has attracted attention in terms of excellent heat resistance.

本發明者等人參照專利文獻2中所記載之轉印法,使用包含相當於聚醯亞胺樹脂之前驅物之聚醯胺酸的組合物作為硬化性樹脂組合物,嘗試製造上述附有樹脂層之玻璃基板。更具體而言,於剝離性輔助基板上塗佈包含聚醯胺酸之組合物,而形成未硬化之硬化性樹脂組合物層,於其上積層玻璃基板,並實施加熱處理,結果於所獲得之樹脂層(聚醯亞胺樹脂層)與玻璃基板之界面產生發泡。推測發泡係因所謂之醯亞胺化時產生之水之揮發所導致者。因此,產生發泡之部分之玻璃基板表面隆起,而玻璃基板表面之平坦性受損。如此,若玻璃基板表面上之平坦性變差,則於將各種電子裝置用構件配置於玻璃基板表面上時容易產生位置偏移,結果導致電子裝置之生產性較差。 In the transfer method described in Patent Document 2, the inventors of the present invention used a composition containing a polyamido acid corresponding to a precursor of a polyimide resin as a curable resin composition, and attempted to manufacture the above-mentioned resin. A layer of glass substrate. More specifically, a composition containing polyamic acid is applied onto the releasable auxiliary substrate to form an uncured curable resin composition layer, a glass substrate is laminated thereon, and heat treatment is performed, and as a result, obtained Foaming occurs at the interface between the resin layer (polyimine resin layer) and the glass substrate. It is presumed that the foaming system is caused by the volatilization of water generated during the so-called hydrazine imidization. Therefore, the surface of the glass substrate where the foaming occurs is embossed, and the flatness of the surface of the glass substrate is impaired. When the flatness of the surface of the glass substrate is deteriorated, the positional displacement is likely to occur when the various electronic device members are placed on the surface of the glass substrate, and as a result, the productivity of the electronic device is inferior.

又,若於樹脂層(聚醯亞胺樹脂層)與玻璃基板之界面產生發泡,則亦成為樹脂層與玻璃基板之密接性受損之原因。 Moreover, when foaming occurs at the interface between the resin layer (polyimine resin layer) and the glass substrate, the adhesion between the resin layer and the glass substrate is also impaired.

本發明係鑒於上述問題而完成者,其目的在於提供一種電子裝置之製造方法,該方法可簡便地製造包括電子裝置用構件、玻璃基板、及用以補強上述玻璃基板之聚醯亞胺樹脂層之電子裝置,且於所獲得之電子裝置中玻璃基板與聚醯亞胺樹脂層之間產生發泡受到抑制,而兩者之密接性優異。 The present invention has been made in view of the above problems, and an object thereof is to provide a method of manufacturing an electronic device which can easily manufacture a member including an electronic device, a glass substrate, and a polyimide layer for reinforcing the glass substrate. In the electronic device, foaming between the glass substrate and the polyimide resin layer is suppressed in the obtained electronic device, and the adhesion between the two is excellent.

又,本發明之目的亦在於提供一種可較佳地用於上述電子裝置之製造、且包括暫時支持體、聚醯亞胺樹脂層、及玻璃基板的玻璃積層體之製造方法。 Further, another object of the present invention is to provide a method for producing a glass laminate which can be preferably used in the manufacture of the above electronic device and which includes a temporary support, a polyimide resin layer, and a glass substrate.

本發明者等人為了解決上述問題而進行努力研究,結果完成本發明。 The inventors of the present invention have diligently studied in order to solve the above problems, and as a result, have completed the present invention.

即,本發明之第1態樣係一種電子裝置之製造方法,其具備:步驟(1),其係於暫時支持體上形成與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層;步驟(2),其係於聚醯亞胺樹脂層上配置厚度0.2mm以下之玻璃基板,而獲得玻璃積層體;步驟(3),其係於玻璃基板之表面上配置電子裝置用構件,而獲得附有構件之玻璃積層體;及步驟(4),其係自附有構件之玻璃積層體去除暫時支持體,而獲得包括聚醯亞胺樹脂層、玻璃基板及電子裝置用構件之電子裝置。 That is, a first aspect of the present invention provides a method for producing an electronic device comprising the step (1) of forming a polysiloxane-based treatment agent on a surface of a temporary support opposite to the temporary support side. a bismuth imine resin layer; the step (2), wherein a glass substrate having a thickness of 0.2 mm or less is disposed on the polyimide film layer to obtain a glass laminate; and the step (3) is disposed on the surface of the glass substrate a member for an electronic device to obtain a glass laminate with a member; and a step (4) for removing the temporary support from the glass laminate with the member, thereby obtaining a layer comprising a polyimide film, a glass substrate, and an electron Electronic device for components of the device.

於第1態樣中,較佳為步驟(1)具備:步驟(A),其係於暫時支持體上塗佈包含聚醯胺酸之組合物,而形成包含聚醯胺酸之塗膜;步驟(B),其係於塗膜表面上賦予矽烷偶合劑;及步驟(C),其係對塗膜實施加熱處理,而獲得與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 In a first aspect, preferably, the step (1) comprises: a step (A) of applying a composition comprising polyamic acid to a temporary support to form a coating film comprising polyamic acid; a step (B) of applying a decane coupling agent to the surface of the coating film; and a step (C) of subjecting the coating film to heat treatment to obtain a surface opposite to the side of the temporary support by a decane coupling agent. Polyimine resin layer.

於第1態樣中,較佳為步驟(1)具備:步驟(D),其係於暫時支持體上形成聚醯亞胺樹脂層;及步驟(E),其係對聚醯亞胺樹脂層表面上賦予矽烷偶合劑,而獲得與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 In the first aspect, preferably, the step (1) comprises: a step (D) of forming a polyimine resin layer on the temporary support; and a step (E) of the polyimine resin A decane coupling agent was applied to the surface of the layer to obtain a polyimide resin layer treated with a decane coupling agent on the surface opposite to the side of the temporary support.

於第1態樣中,較佳為步驟(2)係如下步驟(2'),該步驟(2')係將具有較聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於聚醯亞胺樹脂層上留有不與玻璃基板接觸之周緣區域之方式積層於聚醯亞胺樹脂層上,且於步驟(2)與步驟(3)之間進而具備如下步驟(5),該步驟(5)係沿玻璃基板之外周緣,將玻璃積層體中之聚醯亞胺樹脂層及暫時支持體切斷。 In the first aspect, the step (2) is preferably the following step (2′), wherein the step (2′) is to form a glass substrate having a size smaller than that of the polyimine resin layer. The polyimine resin layer is laminated on the polyimide film layer so as not to be in contact with the glass substrate, and further comprises the following step (5) between the steps (2) and (3), In the step (5), the polyimide layer and the temporary support in the glass laminate are cut along the outer periphery of the glass substrate.

本發明之第2態樣係一種玻璃積層體之製造方法,該玻璃積層體依序具有暫時支持體、與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層、及玻璃基板,且用於在玻璃基板之表面上配置電子裝置用構件,其後,將暫時支持體去除,而獲得包括聚醯亞胺樹脂層、玻璃基板及電子裝置用構件之電子裝置,並且該玻璃積層體之製造方法具備:步驟(1),其係於暫時支持體上形成與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層;及步驟(2),其係於聚醯亞胺樹脂層上配置厚度0.2mm以下之玻璃基板,而獲得玻璃積層體。 According to a second aspect of the present invention, there is provided a method for producing a glass laminate comprising a temporary support and a polyimide layer treated with a decane coupling agent on a surface opposite to the side of the temporary support. And a glass substrate for arranging a member for an electronic device on a surface of the glass substrate, and thereafter removing the temporary support to obtain an electronic device including a polyimide layer, a glass substrate, and a member for an electronic device, and The method for producing a glass laminate includes the step (1) of forming a polyimine resin layer treated with a decane coupling agent on a surface of the temporary support opposite to the side of the temporary support; and the step (2) A glass substrate having a thickness of 0.2 mm or less is disposed on the polyimide film layer to obtain a glass laminate.

於第2態樣中,較佳為步驟(1)具備:步驟(A),其係於暫時支持體上塗佈包含聚醯胺酸之組合物,而形成包含聚醯胺酸之塗膜;步驟(B),其係對塗膜表面上賦予矽烷偶合劑;及步驟(C),其係對塗膜實施加熱處理,而獲得與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 In a second aspect, preferably, the step (1) comprises: a step (A) of applying a composition comprising polyamic acid to a temporary support to form a coating film comprising polyamic acid; a step (B) of applying a decane coupling agent to the surface of the coating film; and a step (C) of subjecting the coating film to heat treatment to obtain a surface opposite to the side of the temporary support by a decane coupling agent. Polyimine resin layer.

於第2態樣中,較佳為步驟(1)具備:步驟(D),其係於暫時支持體上形成聚醯亞胺樹脂層;及步驟(E),其係對聚醯亞胺樹脂層表面上賦予矽烷偶合劑,而獲得與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 In the second aspect, preferably, the step (1) comprises: a step (D) of forming a polyimine resin layer on the temporary support; and a step (E) of the polyimine resin A decane coupling agent was applied to the surface of the layer to obtain a polyimide resin layer treated with a decane coupling agent on the surface opposite to the side of the temporary support.

於第2態樣中,較佳為步驟(2)係如下步驟(2'),該步驟(2')係將具有較聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於聚醯亞胺樹脂層上留有不與玻璃基板接觸之周緣區域之方式積層於聚醯亞胺樹脂層上,且於步驟(2)後進而具備如下步驟(5),該步驟(5)係沿玻璃基板之外周緣,將玻璃積層體中之聚醯亞胺樹脂層及暫時支持體切斷。 In the second aspect, the step (2) is preferably the following step (2′), wherein the step (2′) is to form a glass substrate having a size smaller than that of the polyimine resin layer. The polyimine resin layer is laminated on the polyimide film layer so as not to remain in contact with the glass substrate, and further includes the following step (5) after the step (2), the step (5) The polyimide layer and the temporary support in the glass laminate are cut along the outer periphery of the glass substrate.

根據本發明,可提供一種電子裝置之製造方法,其可簡便地製 造包括電子裝置用構件、玻璃基板、及用以補強上述玻璃基板之聚醯亞胺樹脂層的電子裝置,且於所獲得之電子裝置中玻璃基板與聚醯亞胺樹脂層之間之產生發泡受到抑制,而兩者之密接性優異。 According to the present invention, a method of manufacturing an electronic device can be provided, which can be easily manufactured And an electronic device comprising a member for an electronic device, a glass substrate, and a polyimide layer for reinforcing the glass substrate, and the generated between the glass substrate and the polyimide resin layer in the obtained electronic device The bubbles are suppressed, and the adhesion between the two is excellent.

又,根據本發明,亦可提供一種可較佳地用於上述電子裝置之製造、且包括暫時支持體、聚醯亞胺樹脂層、及玻璃基板的玻璃積層體之製造方法。 Moreover, according to the present invention, it is also possible to provide a method for producing a glass laminate which can be preferably used for the manufacture of the above electronic device and which includes a temporary support, a polyimide resin layer, and a glass substrate.

10‧‧‧暫時支持體 10‧‧‧ temporary support

12‧‧‧聚醯亞胺樹脂層 12‧‧‧ Polyimine resin layer

12a‧‧‧表面 12a‧‧‧ surface

12b‧‧‧周緣區域 12b‧‧‧ Peripheral area

14‧‧‧玻璃基板 14‧‧‧ glass substrate

14a‧‧‧第1主面 14a‧‧‧1st main face

14b‧‧‧第2主面 14b‧‧‧2nd main face

16‧‧‧電子裝置用構件 16‧‧‧Members for electronic devices

100‧‧‧玻璃積層體 100‧‧‧glass laminate

110‧‧‧附有構件之玻璃積層體 110‧‧‧Glass laminate with components

120‧‧‧電子裝置 120‧‧‧Electronic devices

200‧‧‧玻璃積層體 200‧‧‧glass laminate

300‧‧‧切斷後積層體 300‧‧‧After cutting the laminated body

圖1係表示本發明之電子裝置之製造方法之第1實施形態之製造步驟的流程圖。 Fig. 1 is a flow chart showing the manufacturing procedure of the first embodiment of the method of manufacturing an electronic device of the present invention.

圖2(A)~(D)係按步驟順序表示本發明之電子裝置之製造方法之第1實施形態的模式剖視圖。 2(A) to 2(D) are schematic cross-sectional views showing a first embodiment of a method of manufacturing an electronic device according to the present invention in order of steps.

圖3係表示本發明之電子裝置之製造方法之第2實施形態之製造步驟的流程圖。 Fig. 3 is a flow chart showing the manufacturing procedure of the second embodiment of the method of manufacturing the electronic device of the present invention.

圖4(A)~(E)係按步驟順序表示本發明之電子裝置之製造方法之第2實施形態的模式剖視圖。 4(A) to 4(E) are schematic cross-sectional views showing a second embodiment of a method of manufacturing an electronic device according to the present invention in order of steps.

圖5(A)係步驟(2')中所獲得之玻璃積層體之俯視圖。圖5(B)係聚醯亞胺樹脂層之周緣部附近之放大剖視圖。圖5(C)係於圖5(B)中之聚醯亞胺樹脂層上積層有玻璃基板時之放大剖視圖。 Fig. 5(A) is a plan view of the glass laminate obtained in the step (2'). Fig. 5 (B) is an enlarged cross-sectional view showing the vicinity of the peripheral portion of the polyimide film layer. Fig. 5(C) is an enlarged cross-sectional view showing a state in which a glass substrate is laminated on the polyimide film of Fig. 5(B).

以下,參照圖式對用以實施本發明之形態進行說明,但本發明並不限制於以下之實施形態,可不脫離本發明之範圍而對以下之實施形態施加各種變化及置換。 In the following, the embodiments of the present invention are described with reference to the drawings, but the present invention is not limited to the embodiments described below, and various changes and substitutions may be made in the following embodiments without departing from the scope of the invention.

作為本發明之電子裝置及玻璃積層體之製造方法之特徵點之一,可列舉如下方面:於暫時支持體上配置表面經矽烷偶合劑處理之聚醯亞胺樹脂層,並轉印至玻璃基板上。 One of the features of the electronic device and the method for producing a glass laminate according to the present invention is that a polyimine resin layer having a surface treated with a decane coupling agent is disposed on a temporary support and transferred to a glass substrate. on.

如上所述,於欲於經薄膜化之玻璃基板表面設置某些層而對其 表面賦予各種材料之情形時,難以形成均勻之塗膜,即便形成有塗膜,若為了實施其後之處理(例如乾燥處理)而欲搬送玻璃基板,則玻璃基板亦會彎曲,塗膜之厚度產生不均,而導致設置於玻璃基板表面之層(例如樹脂層)產生破裂。又,於對玻璃基板表面上直接賦予各種材料之情形時,通常玻璃基板之與賦予材料之側為相反側之表面與用以支持玻璃基板之構件接觸。若上述構件接觸,則亦有成為於玻璃基板表面發生損傷等表面性狀變差之主要原因,而於其後之電子裝置用構件之製造時產生不良影響之虞。又,多數情況下於玻璃基板上塗佈時固定於真空吸附台,但若玻璃基板之板厚較薄,則容易因吸附孔與接觸部之溫度差而產生塗膜之偏液、乾燥不均。 As described above, a certain layer is provided on the surface of the thinned glass substrate. When a surface is provided with various materials, it is difficult to form a uniform coating film. Even if a coating film is formed, if a glass substrate is to be conveyed in order to carry out subsequent processing (for example, drying treatment), the glass substrate is also bent, and the thickness of the coating film is formed. The unevenness is generated, and the layer (for example, the resin layer) provided on the surface of the glass substrate is broken. Further, when various materials are directly applied to the surface of the glass substrate, the surface of the glass substrate opposite to the side on which the material is applied is usually in contact with the member for supporting the glass substrate. When the above-mentioned members are in contact with each other, the surface properties such as damage to the surface of the glass substrate are deteriorated, which may cause adverse effects in the subsequent manufacture of the member for an electronic device. Moreover, in many cases, it is fixed to the vacuum adsorption stage when it is applied on a glass substrate. However, if the thickness of the glass substrate is thin, it is easy to cause liquid migration and uneven drying of the coating film due to the temperature difference between the adsorption hole and the contact portion. .

對此,於本發明中,於暫時支持體上暫時設置聚醯亞胺樹脂層並轉印至玻璃基板,故而對玻璃基板進行操作之次數變少,可降低對玻璃基板表面之損傷。又,先於暫時支持體上形成聚醯亞胺樹脂層,故而更容易控制聚醯亞胺樹脂層之厚度。進而,聚醯亞胺樹脂層表面經矽烷偶合劑處理,故而對玻璃基板之密接性優異。因此,可如下所述般,於玻璃積層體中之玻璃基板上形成電子裝置用構件,此後,以暫時支持體與聚醯亞胺樹脂層之界面作為剝離面,將暫時支持體容易地去除。 On the other hand, in the present invention, since the polyimide film is temporarily provided on the temporary support and transferred to the glass substrate, the number of times of operation on the glass substrate is reduced, and damage to the surface of the glass substrate can be reduced. Further, since the polyimide layer is formed on the temporary support, it is easier to control the thickness of the polyimide layer. Further, since the surface of the polyimide resin layer is treated with a decane coupling agent, it is excellent in adhesion to a glass substrate. Therefore, the member for an electronic device can be formed on the glass substrate in the glass laminate as follows, and thereafter, the temporary support is easily removed by using the interface between the temporary support and the polyimide resin layer as a release surface.

如此,根據本發明,可簡便地製造特定之電子裝置。又,本發明之玻璃積層體亦可謂可較佳地用於簡便地製造包括作為薄玻璃基板之補強層而發揮功能之聚醯亞胺樹脂層及玻璃基板之電子裝置。 Thus, according to the present invention, a specific electronic device can be easily manufactured. Moreover, the glass laminate of the present invention can be preferably used for easily manufacturing an electronic device including a polyimide film layer and a glass substrate which function as a reinforcing layer of a thin glass substrate.

[第1實施形態] [First Embodiment]

圖1係表示本發明之電子裝置之製造方法之第1實施形態之製造步驟的流程圖。如圖1所示,電子裝置之製造方法具備:聚醯亞胺樹脂層形成步驟S102(相當於步驟(1)),其係於暫時支持體上配置特定之聚醯亞胺樹脂層;玻璃基板積層步驟S104(相當於步驟(2)),其係於聚 醯亞胺樹脂層上配置玻璃基板;構件形成步驟S106(相當於步驟(3)),其係於玻璃基板上配置電子裝置用構件;及分離步驟S108(步驟(4)),其係分離而獲得電子裝置。 Fig. 1 is a flow chart showing the manufacturing procedure of the first embodiment of the method of manufacturing an electronic device of the present invention. As shown in FIG. 1, the method of manufacturing an electronic device includes a polyimine resin layer forming step S102 (corresponding to the step (1)), in which a specific polyimide resin layer is disposed on a temporary support; a glass substrate Laminating step S104 (corresponding to step (2)), which is tied to the poly a glass substrate is disposed on the yttrium imide resin layer; a member forming step S106 (corresponding to step (3)) for arranging the member for electronic device on the glass substrate; and a separating step S108 (step (4)), which is separated Obtain an electronic device.

又,圖2(A)~(D)係依序表示本發明之電子裝置之製造方法之第1實施形態之各製造步驟的模式剖視圖。 2(A) to 2(D) are schematic cross-sectional views showing the respective manufacturing steps of the first embodiment of the method of manufacturing the electronic device of the present invention.

以下,一面參照圖1及圖2(A)~(D),一面對各步驟中所使用之材料及其順序進行詳述。首先,對聚醯亞胺樹脂層形成步驟S102進行詳述。 Hereinafter, the materials used in the respective steps and the order thereof will be described in detail with reference to FIGS. 1 and 2 (A) to (D). First, the polyimine resin layer forming step S102 will be described in detail.

<步驟(1):聚醯亞胺樹脂層形成步驟S102> <Step (1): Polyimine resin layer forming step S102>

步驟(1)係於暫時支持體上形成與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層的步驟。如圖2(A)所示,藉由實施本步驟,而獲得於暫時支持體10上配置有表面12a經矽烷偶合劑處理之聚醯亞胺樹脂層12之積層體。 The step (1) is a step of forming a polyimine resin layer treated with a decane coupling agent on the surface of the temporary support on the side opposite to the temporary support side. As shown in Fig. 2(A), by carrying out this step, a laminate of the polyimine resin layer 12 having the surface 12a treated with a decane coupling agent on the temporary support 10 is obtained.

以下,首先對本步驟中所使用之構件、材料進行詳述,其後對步驟之順序進行詳述。 Hereinafter, the members and materials used in this step will be described in detail first, and the order of the steps will be described in detail later.

(暫時支持體) (temporary support)

暫時支持體10係於下述步驟(4)之前支持聚醯亞胺樹脂層之基板,於步驟(4)時與聚醯亞胺樹脂層12分離。即,暫時支持體10係與聚醯亞胺樹脂層12可剝離地密接。 The temporary support 10 is a substrate which supports the polyimide resin layer before the step (4), and is separated from the polyimide resin layer 12 in the step (4). That is, the temporary support 10 is adhered to the polyimide layer 12 in a peelable manner.

作為暫時支持體10,只要可與聚醯亞胺樹脂層12剝離,則其種類並無特別限制,可使用公知之基板。例如,作為暫時支持體,可使用玻璃板、塑膠板(例如聚矽氧基板)、SUS板等金屬板、或將該等積層而成之基板等。 The temporary support 10 is not particularly limited as long as it can be peeled off from the polyimide resin layer 12, and a known substrate can be used. For example, as the temporary support, a metal plate such as a glass plate, a plastic plate (for example, a polymethoxyl plate), a SUS plate, or the like can be used.

再者,如下所述,於製造聚醯亞胺樹脂層12時使用調平劑(表面調整劑)之情形時(換言之,於聚醯亞胺樹脂層中含有調平劑之情形時),藉由調平劑之效果,無論暫時支持體之材料之種類為何,暫時 支持體10與聚醯亞胺樹脂層12之兩者均容易剝離。 Further, as described below, when a leveling agent (surface conditioning agent) is used in the production of the polyimide resin layer 12 (in other words, when a leveling agent is contained in the polyimide layer), The effect of the leveling agent, regardless of the type of material of the temporary support, temporarily Both the support 10 and the polyimide resin layer 12 are easily peeled off.

暫時支持體10之厚度並無特別限制,可厚於所積層之聚醯亞胺樹脂層12,亦可薄於所積層之聚醯亞胺樹脂層12。關於暫時支持體10之厚度,就可使用現行之製造裝置方面、及操作性方面而言,較佳為0.3~3.0mm,更佳為0.5~1.0mm。 The thickness of the temporary support 10 is not particularly limited, and may be thicker than the laminated polyimide layer 12 or thinner than the laminated polyimide layer 12. The thickness of the temporary support 10 is preferably from 0.3 to 3.0 mm, more preferably from 0.5 to 1.0 mm, in terms of the current manufacturing apparatus and the operability.

再者,視需要亦可將暫時支持體10之表面利用聚矽氧系脫模劑(例如二甲基聚矽氧烷之類的聚矽氧油)或其他脫模劑進行處理,而提高與聚醯亞胺樹脂層12之剝離性。作為如上所述之脫模處理之具體方法,可列舉使上述聚矽氧系脫模劑接觸暫時支持體10之表面上並進行燒接處理(例如350℃左右)之方法。 Further, if necessary, the surface of the temporary support 10 may be treated with a polyfluorene-based release agent (for example, a polyoxygenated oil such as dimethyl polyoxyalkylene) or another release agent. The releasability of the polyimide film layer 12. Specific examples of the release treatment as described above include a method in which the polyfluorene-based release agent is brought into contact with the surface of the temporary support 10 and subjected to a baking treatment (for example, at about 350 ° C).

(聚醯亞胺樹脂層) (polyimine resin layer)

聚醯亞胺樹脂層12係配置於上述暫時支持體10上之層,且表面12a(與暫時支持體10側為相反側之表面)經矽烷偶合劑處理。聚醯亞胺樹脂層12係如下所述般於玻璃基板積層步驟S104中藉由表面12a與玻璃基板14接觸而轉印至玻璃基板14上。 The polyimide phase resin layer 12 is a layer disposed on the temporary support 10, and the surface 12a (surface opposite to the side of the temporary support 10) is treated with a decane coupling agent. The polyimide film 12 is transferred onto the glass substrate 14 by contacting the glass substrate 14 with the surface 12a in the glass substrate lamination step S104 as follows.

聚醯亞胺樹脂層12之厚度並無特別限制,就於步驟(4)時容易使刀侵入至暫時支持體10與聚醯亞胺樹脂層12之間而產生剝離起點方面而言,較佳為1μm以上,就剝離性方面而言,更佳為2μm以上,進而較佳為4μm以上。再者,上限並無特別限制,就薄膜化方面而言,較佳為100μm以下,更佳為50μm以下。 The thickness of the polyimide layer 12 is not particularly limited, and it is preferable in the case of the step (4) that the blade is easily invaded between the temporary support 10 and the polyimide resin layer 12 to cause a peeling starting point. The thickness is 1 μm or more, and more preferably 2 μm or more, and still more preferably 4 μm or more in terms of peelability. In addition, the upper limit is not particularly limited, and is preferably 100 μm or less, and more preferably 50 μm or less in terms of film formation.

再者,上述厚度意指平均厚度,係測定聚醯亞胺樹脂層12之任意5點之厚度並將其等進行算術平均所得者。 Further, the above thickness means an average thickness, and is obtained by measuring the thickness of any five points of the polyimide film 12 and arithmetically averaging them.

聚醯亞胺樹脂層12係包含聚醯亞胺樹脂之層,聚醯亞胺樹脂之結構並無特別限制,可使用公知之聚醯亞胺樹脂。就耐熱性或操作性方面而言,較佳為包含下述式(1)所表示之具有四羧酸類之殘基(X)及二胺類之殘基(A)之重複單元。再者,聚醯亞胺樹脂係含有式(1)所表 示之重複單元作為主成分(相對於全部重複單元較佳為95莫耳%以上),但亦可含有除此以外之其他重複單元(例如下述式(2-1)或(2-2)所表示之重複單元)。 The polyimine resin layer 12 is a layer containing a polyimide resin, and the structure of the polyimide resin is not particularly limited, and a known polyimide resin can be used. In terms of heat resistance and handleability, a repeating unit containing a residue (X) of a tetracarboxylic acid and a residue (A) of a diamine represented by the following formula (1) is preferred. Furthermore, the polyimine resin contains the formula (1) The repeating unit is shown as a main component (preferably 95 mol% or more with respect to all repeating units), but may also contain other repeating units (for example, the following formula (2-1) or (2-2)) The repeating unit indicated).

再者,所謂四羧酸類之殘基(X),意指自四羧酸類去除羧基所得之四羧酸殘基,所謂二胺類之殘基(A),意指自二胺類去除胺基所得之二胺殘基。 Further, the residue (X) of the tetracarboxylic acid means a tetracarboxylic acid residue obtained by removing a carboxyl group from a tetracarboxylic acid, and a residue (A) of a diamine, which means removal of an amine group from a diamine. The resulting diamine residue.

式(1)中,X表示自四羧酸類去除羧基所得之四羧酸殘基,A表示自二胺類去除胺基所得之二胺殘基。 In the formula (1), X represents a tetracarboxylic acid residue obtained by removing a carboxyl group from a tetracarboxylic acid, and A represents a diamine residue obtained by removing an amine group from a diamine.

式(1)中,X表示自四羧酸類去除羧基所得之四羧酸殘基,較佳為包含選自由以下之式(X1)~(X4)所表示之基所組成之群中之至少1種基。其中,就聚醯亞胺樹脂層12之耐熱性更優異方面而言,更佳為X之總數之50莫耳%以上(較佳為80~100莫耳%)包含選自由以下之式(X1)~(X4)所表示之基所組成之群中之至少1種基。進而較佳為X之總數之實質上全部(100莫耳%)包含選自由以下之式(X1)~(X4)所表示之基所組成之群中之至少1種基。又,A表示自二胺類去除胺基所得之二胺殘基,較佳為包含選自由以下之式(A1)~(A8)所表示之基所組成之群中之至少1種基。其中,就聚醯亞胺樹脂層12之耐熱性更優異方面而言,更佳為A之總數之50莫耳%以上(較佳為80~100莫耳%)包含選自由以下之式(A1)~(A8)所表示之基所組成之群中之至少1種基。進而較佳為A之總數之實質上全部(100莫耳%)包含選自由以下之式(A1)~(A8)所表示之基所組成之群中之至少1種基。 In the formula (1), X represents a tetracarboxylic acid residue obtained by removing a carboxyl group from a tetracarboxylic acid, and preferably contains at least 1 selected from the group consisting of groups represented by the following formulas (X1) to (X4). Kind of base. In particular, in terms of more excellent heat resistance of the polyimide resin layer 12, more preferably 50 mol% or more (preferably 80 to 100 mol%) of the total number of X is selected from the following formula (X1) At least one of the groups consisting of the groups represented by ~(X4). Further, it is preferable that substantially all of the total number of X (100 mol%) includes at least one group selected from the group consisting of the groups represented by the following formulas (X1) to (X4). Further, A represents a diamine residue obtained by removing an amine group from a diamine, and preferably contains at least one group selected from the group consisting of groups represented by the following formulas (A1) to (A8). In particular, in terms of more excellent heat resistance of the polyimide resin layer 12, more preferably 50 mol% or more (preferably 80 to 100 mol%) of the total number of A is selected from the following formula (A1) At least one of the groups consisting of the bases represented by ~(A8). Further, it is preferable that substantially all of the total number of A (100 mol%) includes at least one group selected from the group consisting of the groups represented by the following formulas (A1) to (A8).

再者,就聚醯亞胺樹脂層12之耐熱性更優異方面而言,較佳為X之總數之80~100莫耳%包含選自由以下之式(X1)~(X4)所表示之基所組成之群中之至少1種基,且A之總數之80~100莫耳%包含選自由以下之式(A1)~(A8)所表示之基所組成之群中之至少1種基,更佳為X之總數之實質上全部(100莫耳%)包含選自由以下之式(X1)~(X4)所表示之基所組成之群中之至少1種基,且A之總數之實質上全部(100莫耳%)包含選自由以下之式(A1)~(A8)所表示之基所組成之群中之至少1種基。 In addition, in terms of more excellent heat resistance of the polyimide resin layer 12, it is preferable that 80 to 100 mol% of the total number of Xs is selected from the group represented by the following formulas (X1) to (X4). At least one of the groups of the group, and 80 to 100 mol% of the total number of A includes at least one group selected from the group consisting of the groups represented by the following formulas (A1) to (A8), More preferably, substantially all of the total number of X (100 mol%) includes at least one group selected from the group consisting of the groups represented by the following formulas (X1) to (X4), and the essence of the total number of A All of the above (100 mol%) contains at least one group selected from the group consisting of the groups represented by the following formulas (A1) to (A8).

其中,就聚醯亞胺樹脂層12之耐熱性更優異方面而言,作為X,較佳為式(X1)所表示之基及式(X4)所表示之基,更佳為式(X1)所表示之基。 In the case where the heat resistance of the polyimide resin layer 12 is more excellent, X is preferably a group represented by the formula (X1) and a group represented by the formula (X4), and more preferably a formula (X1). The basis of the representation.

又,就聚醯亞胺樹脂層12之耐熱性更優異方面而言,作為A,較佳為式(A1)所表示之基及式(A6)所表示之基,更佳為式(A1)所表示之基。 In addition, as for A, the base represented by the formula (A1) and the group represented by the formula (A6) are more preferable, and the formula (A1) is more preferable. The basis of the representation.

作為包含式(X1)~(X4)所表示之基與式(A1)~(A8)所表示之基的較佳組合之聚醯亞胺樹脂,可較佳地列舉:X為式(X1)所表示之基且A為式(A1)所表示之基的聚醯亞胺樹脂1、及X為式(X4)所表示之基且A為式(A6)所表示之基的聚醯亞胺樹脂2。於聚醯亞胺樹脂1之情形時,耐熱性更優異。又,於聚醯亞胺樹脂2之情形時,於無色透明性方面較佳。 As the polyimine resin containing a preferred combination of the groups represented by the formulae (X1) to (X4) and the groups represented by the formulae (A1) to (A8), X is preferably a formula (X1). The polyimine resin 1 having the group represented by the formula (A1) and the group represented by the formula (X4), and A being a group represented by the formula (A6) Resin 2. In the case of the polyimide resin 1, the heat resistance is more excellent. Moreover, in the case of the polyimine resin 2, it is preferable in terms of colorless transparency.

聚醯亞胺樹脂中之上述式(1)所表示之重複單元之重複數(n)並無特別限制,較佳為2以上之整數,就聚醯亞胺樹脂層12之耐熱性及塗膜之成膜性方面而言,較佳為10~10000,更佳為15~1000。 The number of repetitions (n) of the repeating unit represented by the above formula (1) in the polyimine resin is not particularly limited, and is preferably an integer of 2 or more, in terms of heat resistance and coating film of the polyimide layer 12 . In terms of film formability, it is preferably from 10 to 10,000, more preferably from 15 to 1,000.

上述聚醯亞胺樹脂亦可於無損耐熱性之範圍內包含選自由下述所例示之基所組成之群中之1種以上作為四羧酸類之殘基(X)。又,亦可包含2種以上之下述所例示之基。 The polyimine resin may further contain, as a tetracarboxylic acid residue (X), one or more selected from the group consisting of the groups exemplified below in the range of non-deterioration heat resistance. Further, two or more kinds of the groups exemplified below may be included.

[化3] [Chemical 3]

又,上述聚醯亞胺樹脂亦可於無損耐熱性之範圍內包含選自由下述所例示之基所組成之群中之1種以上作為二胺類之殘基(A)。又,亦可包含2種以上之下述所例示之基。 In addition, the polyimine resin may contain one or more kinds of diamines (A) selected from the group consisting of the groups exemplified below in the range of non-destructive heat resistance. Further, two or more kinds of the groups exemplified below may be included.

[化4] [Chemical 4]

聚醯亞胺樹脂層12中之聚醯亞胺樹脂之含量並無特別限制,就聚醯亞胺樹脂層12之耐熱性更優異方面而言,相對於樹脂層總質量,較佳為50~100質量%,更佳為75~100質量%,進而較佳為90~100質量%。 The content of the polyimine resin in the polyimide layer 12 is not particularly limited, and the heat resistance of the polyimide layer 12 is more excellent, preferably 50% with respect to the total mass of the resin layer. 100% by mass, more preferably 75 to 100% by mass, still more preferably 90 to 100% by mass.

於聚醯亞胺樹脂層12中,視需要亦可含有除上述聚醯亞胺樹脂以外之其他成分(例如不妨礙耐熱性之填料等)。 The polyimine resin layer 12 may contain other components than the above-mentioned polyimine resin (for example, a filler which does not impair heat resistance), if necessary.

作為不妨礙耐熱性之填料,可列舉纖維狀之填充劑、或板狀、 鱗片狀、粒狀、不定形狀、破碎品等非纖維狀之填充劑,具體而言,例如可列舉:玻璃纖維、PAN系或瀝青系之碳纖維、不鏽鋼纖維、鋁纖維或黃銅纖維等金屬纖維、石膏纖維、陶瓷纖維、石棉纖維、氧化鋯纖維、氧化鋁纖維、二氧化矽纖維、氧化鈦纖維、碳化矽纖維、岩絨、鈦酸鉀晶須、鈦酸鋇晶須、硼酸鋁晶須、氮化矽晶須、雲母、滑石、高嶺土、二氧化矽、碳酸鈣、玻璃珠、玻璃薄片、玻璃微球、黏土、二硫化鉬、矽灰石、氧化鈦、氧化鋅、多磷酸鈣、石墨(graphite)、金屬粉、金屬薄片、金屬帶、金屬氧化物、碳粉末、石墨(black lead)、碳薄片、鱗片狀碳、奈米碳管等。作為金屬粉、金屬薄片、金屬帶之金屬種類之具體例,可例示:銀、鎳、銅、鋅、鋁、不鏽鋼、鐵、黃銅、鉻、錫等。 Examples of the filler that does not inhibit heat resistance include a fibrous filler or a plate, Examples of the non-fibrous filler such as a scaly shape, a granular shape, an indefinite shape, and a crushed product, and specific examples thereof include metal fibers such as glass fibers, PAN-based or pitch-based carbon fibers, stainless steel fibers, aluminum fibers, or brass fibers. , gypsum fiber, ceramic fiber, asbestos fiber, zirconia fiber, alumina fiber, cerium oxide fiber, titanium oxide fiber, cerium carbide fiber, rock wool, potassium titanate whisker, barium titanate whisker, aluminum borate whisker , cerium nitride whiskers, mica, talc, kaolin, cerium oxide, calcium carbonate, glass beads, glass flakes, glass microspheres, clay, molybdenum disulfide, ash, titanium oxide, zinc oxide, calcium polyphosphate, Graphite, metal powder, metal flakes, metal strips, metal oxides, carbon powder, black lead, carbon flakes, scaly carbon, carbon nanotubes, and the like. Specific examples of the metal type of the metal powder, the metal foil, and the metal strip include silver, nickel, copper, zinc, aluminum, stainless steel, iron, brass, chromium, tin, and the like.

再者,就藉由下述矽烷偶合劑與側鏈之羧酸進行化學鍵結而使密接力之控制變得容易方面而言,聚醯亞胺樹脂層12較佳為由包含聚醯胺酸(藉由熱硬化而成為聚醯亞胺樹脂之硬化性樹脂)之層所形成。即,聚醯亞胺樹脂層12較佳為藉由對包含聚醯胺酸之層實施加熱處理而形成之層,進而,更佳為藉由如下方式而形成之層:對藉由熱硬化而成為包含上述式(1)所表示之具有四羧酸類之殘基(X)及二胺類之殘基(A)之重複單元之聚醯亞胺樹脂的硬化性樹脂(聚醯胺酸)之層實施加熱處理。再者,加熱處理亦可改變溫度而階段性地實施。 Further, in terms of facilitating the control of the adhesion by chemical bonding of the decane coupling agent to the side chain carboxylic acid, the polyimine resin layer 12 is preferably composed of polyglycine ( It is formed by a layer which is a hardening resin of a polyimine resin by thermal hardening. That is, the polyimide film 12 is preferably a layer formed by heat-treating a layer containing polyamic acid, and more preferably a layer formed by heat hardening. A curable resin (polyproline) comprising a polyimine resin having a repeating unit of a residue (X) of a tetracarboxylic acid represented by the above formula (1) and a residue (A) of a diamine The layer is subjected to a heat treatment. Further, the heat treatment can be carried out stepwise by changing the temperature.

又,聚醯亞胺樹脂層12之表面12a(與暫時支持體10側為相反側之表面)經矽烷偶合劑處理。換言之,於聚醯亞胺樹脂層12之表面上配置矽烷偶合劑之層。再者,利用矽烷偶合劑所進行之處理可對聚醯亞胺樹脂層12之整個表面12a進行,亦可對一部分進行。 Further, the surface 12a of the polyimide layer 12 (the surface opposite to the side of the temporary support 10) is treated with a decane coupling agent. In other words, a layer of a decane coupling agent is disposed on the surface of the polyimide resin layer 12. Further, the treatment with the decane coupling agent may be carried out on the entire surface 12a of the polyimide resin layer 12, or a part thereof may be carried out.

所使用之矽烷偶合劑之種類並無特別限制,較佳為具有可與形成聚醯亞胺樹脂層時所使用之聚醯胺酸進行反應之反應性基。若矽烷偶合劑具有該反應性基,則矽烷偶合劑經由該反應性基而與聚醯亞胺 樹脂層12形成鍵,並且經由矽烷偶合劑中所含有之矽烷醇基而與玻璃基板14形成鍵,而兩者之密接性進一步提高。 The type of the decane coupling agent to be used is not particularly limited, and it is preferably a reactive group which can react with the polyamic acid used in forming the polyimide layer. If the decane coupling agent has the reactive group, the decane coupling agent is reacted with the polyimine via the reactive group. The resin layer 12 forms a bond and forms a bond with the glass substrate 14 via the stanol group contained in the decane coupling agent, and the adhesion between the two is further improved.

作為上述反應性基,只要可與聚醯胺酸中之官能基進行反應,則無特別限制,例如可列舉可與聚醯胺酸中之羧酸基或二級胺基(-NH-)進行反應之基,更具體而言,可列舉:一級胺基、二級胺基、羥基、羧酸基、環氧基等。 The reactive group is not particularly limited as long as it can react with a functional group in polyamic acid, and examples thereof include a carboxylic acid group or a secondary amine group (-NH-) in polyglycine. Specific examples of the reaction group include a primary amino group, a secondary amino group, a hydroxyl group, a carboxylic acid group, and an epoxy group.

作為矽烷偶合劑之較佳態樣,可列舉以下之式(3)所表示之化合物。 Preferred examples of the decane coupling agent include compounds represented by the following formula (3).

式(3) X-L-Si(Y)3 Formula (3) XL-Si(Y) 3

X表示反應性基,L表示單鍵或2價連結基,Y分別獨立地表示羥基或水解性基。 X represents a reactive group, L represents a single bond or a divalent linking group, and Y each independently represents a hydroxyl group or a hydrolyzable group.

反應性基之定義如上所述。 The definition of the reactive group is as described above.

作為2價連結基,例如可列舉:-O-、-CO-、-NH-、-CO-NH-、-COO-、-O-COO-、伸烷基、伸芳基、雜環基(雜伸芳基)、及將該等組合而成之基。 Examples of the divalent linking group include -O-, -CO-, -NH-, -CO-NH-, -COO-, -O-COO-, an alkylene group, an extended aryl group, and a heterocyclic group ( Heteroaryl group), and the combination of these groups.

水解性基表示可生成矽烷醇基之基、或可形成矽氧烷縮合物之基,具體而言,可列舉:鹵基、烷氧基、醯氧基、異氰酸酯基等。其中,可較佳地列舉烷氧基(較佳為碳數1~2)。 The hydrolyzable group means a group which can form a stanol group, or a group which can form a siloxane condensate, and specifically, a halogen group, an alkoxy group, a decyloxy group, an isocyanate group, etc. are mentioned. Among them, an alkoxy group (preferably having a carbon number of 1 to 2) is preferable.

(步驟之順序) (order of steps)

步驟(1)之順序只要可於暫時支持體上形成與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層,則無特別限制,可採用公知之方法。 The order of the step (1) is not particularly limited as long as it can form a polyimine resin layer treated with a decane coupling agent on the side opposite to the side of the temporary support on the temporary support, and a known method can be employed.

其中,就聚醯亞胺樹脂層與玻璃基板之密接性更優異方面而言,較佳為以下之2種態樣,更佳為態樣X。 Among them, in terms of being more excellent in adhesion between the polyimide film and the glass substrate, the following two aspects are preferable, and the aspect X is more preferable.

(態樣X)具備如下步驟之態樣:步驟(A),其係於暫時支持體上塗佈包含聚醯胺酸之組合物,而形成包含聚醯胺酸之塗膜;步驟(B), 其係對塗膜表面上賦予矽烷偶合劑;及步驟(C),其係對塗膜實施加熱處理,而獲得與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層 (Section X) has the following steps: Step (A), which is applied to a temporary support to coat a composition comprising polyamic acid to form a coating film comprising polyamic acid; and step (B) , Providing a decane coupling agent to the surface of the coating film; and a step (C) of heat-treating the coating film to obtain a polyimide resin treated with a decane coupling agent on the opposite side of the temporary support side. Floor

(態樣Y)具備如下步驟之態樣:步驟(D),其係於暫時支持體上形成聚醯亞胺樹脂層;及步驟(E),其係對聚醯亞胺樹脂層表面上賦予矽烷偶合劑,而獲得與暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層 (Stage Y) has the following steps: step (D), which forms a polyimide layer on the temporary support; and step (E), which is imparted to the surface of the polyimide layer a decane coupling agent to obtain a polyimine resin layer treated with a decane coupling agent on the opposite side of the temporary support side

態樣X與態樣Y之不同在於賦予矽烷偶合劑之時期不同。態樣X係如下態樣:對包含聚醯胺酸之塗膜上賦予矽烷偶合劑,其後,實施加熱處理(閉環處理(醯亞胺化處理))使塗膜硬化,而獲得表面經矽烷偶合劑處理之聚醯亞胺樹脂層。另一方面,態樣Y係如下態樣:暫時製造聚醯亞胺樹脂層後,對該聚醯亞胺樹脂層上賦予矽烷偶合劑,而獲得表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 The difference between the aspect X and the aspect Y is that the period of the decane coupling agent is different. The aspect X is as follows: a decane coupling agent is applied to a coating film containing polyamic acid, and then a heat treatment (closed-loop treatment (醯imination treatment)) is applied to harden the coating film to obtain a surface decane. A coupling agent treated polyimine resin layer. On the other hand, the aspect Y is as follows: after temporarily preparing a polyimide resin layer, a decane coupling agent is imparted to the polyimide film layer to obtain a polyimide resin having a surface treated with a decane coupling agent. Floor.

於比較上述兩種態樣時,態樣X使矽烷偶合劑之層與包含聚醯胺酸之塗膜之間之界面容易混合,而兩者之密接性優異,結果聚醯亞胺樹脂層與玻璃基板之密接性更優異。又,於矽烷偶合劑具有可與聚醯胺酸進行反應之反應性基之情形時,尤其於態樣X中聚醯亞胺樹脂層與玻璃基板之密接性更優異。 When comparing the above two aspects, the pattern X makes the interface between the layer of the decane coupling agent and the coating film containing the poly-proline acid easy to be mixed, and the adhesion between the two is excellent, and as a result, the polyimide layer and the polyimide layer are The adhesion of the glass substrate is more excellent. Further, in the case where the decane coupling agent has a reactive group capable of reacting with poly-proline, the adhesion between the polyimine resin layer and the glass substrate is particularly excellent in the aspect X.

以下,對上述態樣X及Y之順序分別進行詳述。 Hereinafter, the order of the above-described aspects X and Y will be described in detail.

(態樣X) (state X)

於態樣X中,首先,實施步驟(A):於暫時支持體上塗佈包含聚醯胺酸之組合物,而形成包含聚醯胺酸之塗膜。 In the aspect X, first, the step (A) is carried out by coating a composition containing polylysine on a temporary support to form a coating film containing polylysine.

以下,首先,對本步驟中所使用之材料(聚醯胺酸等)進行詳述。 Hereinafter, the material (polylysine, etc.) used in this step will be described in detail first.

所謂聚醯胺酸,係藉由熱硬化而成為聚醯亞胺樹脂之硬化性樹脂,較佳為使四羧酸二酐與二胺類反應而獲得之聚醯胺酸,更佳為四羧酸二酐之至少一部分包含選自由下述式(Y1)~(Y4)所表示之化合物 所組成之群中之至少1種四羧酸二酐,且二胺類之至少一部分包含選自由下述式(B1)~(B8)所表示之化合物所組成之群中之至少1種二胺類。 The polyamic acid is a curable resin which is a polyimine resin by thermal curing, and is preferably a polyamic acid obtained by reacting a tetracarboxylic dianhydride with a diamine, more preferably a tetracarboxylic acid. At least a portion of the acid dianhydride comprises a compound selected from the group consisting of the following formulas (Y1) to (Y4) At least one of the tetracarboxylic dianhydrides in the group, and at least a part of the diamines contains at least one diamine selected from the group consisting of compounds represented by the following formulas (B1) to (B8) class.

再者,聚醯胺酸通常作為包含以下式(2-1)及/或式(2-2)所表示之重複單元的結構式而表示。再者,式(2-1)及/或式(2-2)中,X、A之定義如上所述。 Further, poly-proline is usually represented by a structural formula containing a repeating unit represented by the following formula (2-1) and/or formula (2-2). Further, in the formula (2-1) and/or the formula (2-2), X and A are as defined above.

四羧酸二酐與二胺類之反應條件並無特別限制,就可高效率地合成聚醯胺酸方面而言,較佳為於-30~70℃(較佳為-20~40℃)下進行反應。 The reaction conditions of the tetracarboxylic dianhydride and the diamine are not particularly limited, and in terms of efficiently synthesizing the polyamic acid, it is preferably -30 to 70 ° C (preferably -20 to 40 ° C). The reaction is carried out.

四羧酸二酐與二胺類之混合比率並無特別限制,可列舉:相對於二胺類1莫耳,使較佳為0.66~1.5莫耳、更佳為0.9~1.1莫耳、進而較佳為0.97~1.03莫耳之四羧酸二酐進行反應。 The mixing ratio of the tetracarboxylic dianhydride to the diamine is not particularly limited, and is preferably 0.66 to 1.5 mol, more preferably 0.9 to 1.1 mol, and more preferably 1 mol of the diamine. Preferably, 0.97~1.03 mole of tetracarboxylic dianhydride is reacted.

於四羧酸二酐與二胺類之反應時,視需要可使用有機溶劑。所使用之有機溶劑之種類並無特別限制,例如可使用N-甲基-2-吡咯啶酮、N,N-二甲基乙醯胺、N,N-二乙基乙醯胺、N,N-二甲基甲醯胺、N,N-二乙基甲醯胺、N-甲基己內醯胺、六甲基磷醯胺、四亞甲基碸、二甲基亞碸、間甲酚、苯酚、對氯苯酚、2-氯-4-羥基甲苯、二乙二醇二甲醚、三乙二醇二甲醚、四乙二醇二甲醚、二烷、γ-丁內酯、二氧雜環戊烷、環己酮、環戊酮等,亦可並用2種以上。 When reacting a tetracarboxylic dianhydride with a diamine, an organic solvent can be used as needed. The type of the organic solvent to be used is not particularly limited, and for example, N-methyl-2-pyrrolidone, N,N-dimethylacetamide, N,N-diethylacetamide, N, can be used. N-dimethylformamide, N,N-diethylformamide, N-methylcaprolactam, hexamethylphosphoniumamine, tetramethylene hydrazine, dimethyl hydrazine, m. Phenol, phenol, p-chlorophenol, 2-chloro-4-hydroxytoluene, diethylene glycol dimethyl ether, triethylene glycol dimethyl ether, tetraethylene glycol dimethyl ether, two Alkane, γ-butyrolactone, dioxolane, cyclohexanone, cyclopentanone or the like may be used in combination of two or more kinds.

於上述反應時,視需要亦可一併使用除選自由上述式(Y1)~(Y4)所表示之化合物所組成之群中之四羧酸二酐以外之其他四羧酸二酐。 In the above reaction, other tetracarboxylic dianhydrides other than the tetracarboxylic dianhydride selected from the group consisting of the compounds represented by the above formulas (Y1) to (Y4) may be used as needed.

又,於上述反應時,視需要亦可一併使用除選自由上述式(B1)~(B8)所表示之化合物所組成之群中之二胺類以外之其他二胺類。 Further, at the time of the above reaction, other diamines other than the diamines selected from the group consisting of the compounds represented by the above formulas (B1) to (B8) may be used as needed.

於包含聚醯胺酸之組合物中,視需要亦可含有除聚醯胺酸以外之成分。 In the composition containing polylysine, a component other than polyamic acid may be contained as needed.

例如,於組合物中可含有溶劑。作為溶劑,尤其就聚醯胺酸之溶解性方面而言,較佳為有機溶劑。作為所使用之有機溶劑,可列舉於上述聚醯胺酸之反應時所使用之有機溶劑。 For example, a solvent may be contained in the composition. As the solvent, in particular, in terms of solubility of polyamic acid, an organic solvent is preferred. The organic solvent to be used may, for example, be an organic solvent used in the reaction of the above polyamic acid.

再者,於組合物中含有有機溶劑之情形時,只要為可使塗膜之厚度之調整、塗佈性變得良好之量,則有機溶劑之含量並無特別限制,一般相對於組合物總質量,較佳為5~95質量%,更佳為10~90質量%。 In addition, when the organic solvent is contained in the composition, the content of the organic solvent is not particularly limited as long as the thickness of the coating film can be adjusted and the coating property is good, and generally relative to the total composition. The mass is preferably from 5 to 95% by mass, more preferably from 10 to 90% by mass.

又,視需要亦可一併使用用以促進聚醯胺酸之脫水閉環之脫水劑或脫水閉環觸媒。作為脫水劑,例如可使用乙酸酐、丙酸酐、三氟乙酸酐等酸酐。又,作為脫水閉環觸媒,例如可使用吡啶、三甲基吡啶、二甲基吡啶、三乙基胺等三級胺。 Further, a dehydrating agent or a dehydration ring-closing catalyst for promoting the dehydration ring closure of polyamic acid may be used as needed. As the dehydrating agent, for example, an acid anhydride such as acetic anhydride, propionic anhydride or trifluoroacetic anhydride can be used. Further, as the dehydration ring-closing catalyst, for example, a tertiary amine such as pyridine, trimethylpyridine, lutidine or triethylamine can be used.

進而,視需要亦可於組合物中含有調平劑。所謂調平劑,係使塗佈物之表面張力降低而改良對被塗佈物之濕潤之化合物。作為調平劑,可使用一般之調平劑,例如可列舉氟系調平劑(例如氟系界面活性劑)、丙烯酸系調平劑、聚矽氧系調平劑(例如聚矽氧系界面活性劑)等,可使用該等中之1種或2種以上。 Further, a leveling agent may be contained in the composition as needed. The leveling agent is a compound which reduces the surface tension of the coating material and improves the wetting of the object to be coated. As the leveling agent, a general leveling agent can be used, and examples thereof include a fluorine-based leveling agent (for example, a fluorine-based surfactant), an acrylic leveling agent, and a polyfluorene-based leveling agent (for example, a polyfluorene-based interface). One or two or more of these may be used as the active agent or the like.

於暫時支持體表面上塗佈組合物之方法並無特別限定,可使用公知之方法。例如可列舉:噴塗法、模嘴塗佈法、旋轉塗佈法、浸漬塗佈法、輥式塗佈法、棒式塗佈法、網版印刷法、凹版塗佈法等。 The method of applying the composition on the surface of the temporary support is not particularly limited, and a known method can be used. For example, a spray coating method, a die coating method, a spin coating method, a dip coating method, a roll coating method, a bar coating method, a screen printing method, a gravure coating method, and the like can be given.

藉由上述處理所獲得之塗膜之厚度並無特別限制,以可獲得上述較佳厚度之聚醯亞胺樹脂層之方式進行適當調整。 The thickness of the coating film obtained by the above treatment is not particularly limited, and is appropriately adjusted so as to obtain the above-mentioned preferred thickness of the polyimide film.

於上述塗佈後,視需要可為了去除塗膜中所含有之揮發成分(例如溶劑)而實施乾燥處理。乾燥處理之方法只要為聚醯胺酸之閉環反應(醯亞胺化反應)不進行之方法,則無特別限制。例如,可列舉實施 加熱處理之方法、或實施風乾處理之方法等。 After the above coating, a drying treatment may be carried out in order to remove a volatile component (for example, a solvent) contained in the coating film as needed. The method of the drying treatment is not particularly limited as long as it is a method in which the ring closure reaction of the polyamic acid (the ruthenium imidization reaction) is not carried out. For example, it can be enumerated A method of heat treatment, a method of performing air drying treatment, or the like.

加熱處理之條件係根據所使用之聚醯胺酸之結構而異,作為加熱溫度,通常較佳為40~200℃,就抑制樹脂層之發泡方面而言,較佳為40~150℃。尤佳為於上述加熱溫度之範圍內,於未達溶劑之沸點下進行加熱。作為加熱時間,根據所使用之聚醯胺酸之結構而適當選擇最佳之時間,就可進一步防止聚醯胺酸之解聚合方面而言,較佳為5~60分鐘,更佳為10~30分鐘。 The conditions of the heat treatment vary depending on the structure of the polyamic acid to be used, and the heating temperature is usually preferably from 40 to 200 ° C, and from 40 to 150 ° C in terms of suppressing foaming of the resin layer. It is particularly preferred to carry out the heating at a boiling point of the solvent within the above range of the heating temperature. The heating time is appropriately selected according to the structure of the polyamic acid to be used, and further, it is preferably 5 to 60 minutes, more preferably 10 to 10, in terms of depolymerization of polyglycine. 30 minutes.

加熱之環境並無特別限制,例如於大氣中、真空下或惰性氣體下實施。若於真空下實施,則即便於較低之溫度下加熱亦可於更短之時間內去除揮發成分,又,可進一步控制聚醯胺酸之解聚合,故而較佳。 The heating environment is not particularly limited, and is, for example, carried out in the atmosphere, under vacuum or under an inert gas. When it is carried out under vacuum, even if it is heated at a relatively low temperature, the volatile component can be removed in a shorter period of time, and the depolymerization of polyglycine can be further controlled, which is preferable.

再者,乾燥處理亦可於不同之溫度條件下階段性地實施。 Furthermore, the drying treatment can also be carried out stepwise under different temperature conditions.

繼而,實施步驟(B):對上述步驟(A)中所獲得之包含聚醯胺酸之塗膜表面上賦予矽烷偶合劑。 Then, the step (B) is carried out: a decane coupling agent is imparted to the surface of the coating film containing the polyamic acid obtained in the above step (A).

賦予矽烷偶合劑之方法並無特別限制,可採用公知之方法。例如可列舉:將包含矽烷偶合劑之組合物賦予至塗膜表面上之方法(塗佈方法)、或將上述附有塗膜之支持體浸漬於包含矽烷偶合劑之組合物中之方法(浸漬方法)。其中,就容易調整矽烷偶合劑之賦予量方面而言,較佳為塗佈方法。於塗佈方法中,塗佈包含矽烷偶合劑之組合物之方法並無特別限制,可列舉上述塗佈包含聚醯胺酸之組合物之方法。 The method of imparting the decane coupling agent is not particularly limited, and a known method can be employed. For example, a method of applying a composition containing a decane coupling agent to the surface of a coating film (coating method), or a method of immersing the above-mentioned coating film-attached support in a composition containing a decane coupling agent (impregnation) method). Among them, in terms of easily adjusting the amount of the decane coupling agent to be applied, a coating method is preferred. In the coating method, the method of applying the composition containing the decane coupling agent is not particularly limited, and a method of applying the composition containing the polyaminic acid described above can be mentioned.

於包含矽烷偶合劑之組合物中含有上述矽烷偶合劑。 The above decane coupling agent is contained in the composition containing a decane coupling agent.

又,於包含矽烷偶合劑之組合物中,視需要亦可含有溶劑。關於溶劑之種類,可列舉可含有於上述包含聚醯胺酸之組合物中之溶劑。 Further, the composition containing a decane coupling agent may optionally contain a solvent. The type of the solvent may, for example, be a solvent which may be contained in the above-mentioned composition containing polyamic acid.

再者,於賦予上述矽烷偶合劑後,視需要亦可為了去除塗膜中 所含有之揮發成分(例如溶劑)而實施乾燥處理。乾燥處理之方法只要為聚醯胺酸之閉環反應(醯亞胺化反應)不迅速進行之方法,則無特別限制。例如,可列舉實施加熱處理之方法、或實施風乾處理之方法等。作為加熱處理之條件,可列舉可於上述步驟(A)中實施之加熱處理之條件(加熱溫度、加熱時間、環境)。 Furthermore, after the above-mentioned decane coupling agent is added, it is also possible to remove the coating film as needed. Drying treatment is carried out by containing a volatile component (for example, a solvent). The method of the drying treatment is not particularly limited as long as it is a method in which the ring closure reaction of the polyamic acid (the ruthenium imidization reaction) does not proceed rapidly. For example, a method of performing heat treatment or a method of performing air-drying treatment may be mentioned. The conditions of the heat treatment include the conditions (heating temperature, heating time, and environment) which can be subjected to the heat treatment performed in the above step (A).

繼而,實施步驟(C):對步驟(B)中所獲得之表面賦予有矽烷偶合劑之包含聚醯胺酸之塗膜實施加熱處理,而獲得表面經矽烷偶合劑處理之聚醯亞胺樹脂層。於本步驟(C)中,進行所謂閉環反應(醯亞胺化反應)。 Then, the step (C) is carried out: a coating film containing a polydecyl acid having a decane coupling agent is subjected to heat treatment on the surface obtained in the step (B), and a polyimide resin having a surface treated with a decane coupling agent is obtained. Floor. In the present step (C), a so-called ring closure reaction (oxime imidization reaction) is carried out.

本步驟(C)中之加熱溫度並無特別限制,較佳為250~500℃,就殘留溶劑率變低並且醯亞胺化率進一步上升而本發明之效果更優異方面而言,更佳為300~450℃。 The heating temperature in the step (C) is not particularly limited, but is preferably from 250 to 500 ° C, and is more preferably in the case where the residual solvent ratio is low and the ruthenium iodide ratio is further increased to make the effect of the present invention more excellent. 300~450 °C.

加熱時間並無特別限制,根據所使用之聚醯胺酸之結構而適當選擇最佳之時間,就殘留溶劑率變低並且醯亞胺化率進一步上升而本發明之效果更優異方面而言,較佳為15~120分鐘,更佳為30~60分鐘。 The heating time is not particularly limited, and the optimum time is appropriately selected depending on the structure of the polyamic acid to be used, and the residual solvent ratio is lowered and the sulfiliation rate is further increased to further improve the effect of the present invention. It is preferably 15 to 120 minutes, more preferably 30 to 60 minutes.

加熱之環境並無特別限制,例如於大氣中、真空下或惰性氣體下實施。 The heating environment is not particularly limited, and is, for example, carried out in the atmosphere, under vacuum or under an inert gas.

再者,加熱處理亦可於不同之溫度下階段性地實施。 Furthermore, the heat treatment can also be carried out stepwise at different temperatures.

藉由經過上述步驟(C),而形成包含聚醯亞胺樹脂之聚醯亞胺樹脂層。 The polyimine resin layer containing the polyimide resin is formed by the above step (C).

聚醯亞胺樹脂之醯亞胺化率並無特別限制,就聚醯亞胺樹脂層之耐熱性更優異方面而言,較佳為99.0%以上,更佳為99.5%以上。 The ruthenium imidization ratio of the polyimide resin is not particularly limited, and is preferably 99.0% or more, and more preferably 99.5% or more, in terms of further excellent heat resistance of the polyimide film.

醯亞胺化率之測定方法係將於氮氣環境下將聚醯胺酸以350℃加熱2小時之情形設為100%之醯亞胺化率,並根據於聚醯胺酸之IR之光譜中源自醯亞胺羰基之峰:約1780cm-1之峰強度相對於加熱處理前後 不變之峰強度(例如源自苯環之峰:約1500cm-1)之強度比而求出。 The method for measuring the imidization rate of hydrazine is to set the polyaminic acid to be heated at 350 ° C for 2 hours under a nitrogen atmosphere, and to set the imidization ratio of 100% according to the IR spectrum of poly-proline. peak derived from the carbonyl (PEI): a peak strength of about 1780cm -1 to the peak intensity of the phase change before and after heat treatment (e.g., benzene ring derived peak: about 1500cm -1) and the intensity ratio is obtained.

(態樣Y) (state Y)

於態樣Y中,首先,實施步驟(D):於暫時支持體上形成聚醯亞胺樹脂層。 In the aspect Y, first, the step (D) is carried out: a polyimine resin layer is formed on the temporary support.

形成聚醯亞胺樹脂層之方法並無特別限制,可採用公知之方法。例如可列舉:將上述包含聚醯胺酸之組合物塗佈於暫時支持體上而形成塗膜,其後實施加熱處理而獲得聚醯亞胺樹脂層的方法(方法1);或將包含聚醯亞胺樹脂層之組合物塗佈於暫時支持體上,視需要實施乾燥處理,而獲得聚醯亞胺樹脂層的方法(方法2)等。其中,就更容易調整聚醯亞胺樹脂層之厚度方面而言,較佳為上述方法1。再者,方法1相當於實施上述態樣X中之步驟(A)及步驟(C)之態樣,各者之順序、條件與上述步驟(A)及步驟(C)相同。 The method of forming the polyimide layer of the polyimide resin is not particularly limited, and a known method can be employed. For example, a method of forming a coating film by applying the composition containing polyamic acid to a temporary support to form a coating film, followed by heat treatment to obtain a polyimide film layer (method 1); or containing a poly The composition of the quinone imine resin layer is applied to a temporary support, and if necessary, a drying treatment is carried out to obtain a method of the polyimine resin layer (method 2). Among them, in the aspect of adjusting the thickness of the polyimide film layer more easily, the above method 1 is preferred. Further, the method 1 corresponds to the steps of the steps (A) and (C) in the above-described aspect X, and the order and conditions of the respective steps are the same as those in the above steps (A) and (C).

繼而,實施步驟(E):對步驟(D)中所獲得之聚醯亞胺樹脂層表面上賦予矽烷偶合劑,而獲得表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 Then, the step (E) is carried out: a decane coupling agent is imparted to the surface of the polyimine resin layer obtained in the step (D) to obtain a polyimine resin layer having a surface treated with a decane coupling agent.

賦予矽烷偶合劑之方法並無特別限制,例如可列舉與上述態樣X中之步驟(B)相同之順序。 The method of imparting the decane coupling agent is not particularly limited, and examples thereof include the same procedures as in the step (B) of the above-described aspect X.

<步驟(2):玻璃基板積層步驟S104> <Step (2): Glass Substrate Lamination Step S104>

步驟(2)係於上述步驟(1)中所獲得之聚醯亞胺樹脂層上配置厚度0.2mm以下之玻璃基板而獲得玻璃積層體的步驟。如圖2(B)所示,藉由實施本步驟,而於聚醯亞胺樹脂層12之經矽烷偶合劑處理之表面12a上配置玻璃基板14,獲得依序具有暫時支持體10、聚醯亞胺樹脂層12及玻璃基板14之玻璃積層體100。再者,聚醯亞胺樹脂層12與玻璃基板14經由矽烷偶合劑而密接。 The step (2) is a step of disposing a glass substrate having a thickness of 0.2 mm or less on the polyimide film obtained in the above step (1) to obtain a glass laminate. As shown in Fig. 2(B), by performing this step, the glass substrate 14 is placed on the surface 12a of the polydecylene resin layer 12 treated with the decane coupling agent, and the temporary support 10 and the polyfluorene are obtained in this order. The imide resin layer 12 and the glass laminate 100 of the glass substrate 14. Further, the polyimide resin layer 12 and the glass substrate 14 are in close contact with each other via a decane coupling agent.

以下,首先對本步驟中所使用之構件、材料進行詳述,其後對步驟之順序進行詳述。 Hereinafter, the members and materials used in this step will be described in detail first, and the order of the steps will be described in detail later.

(玻璃基板) (glass substrate)

玻璃基板14係第1主面14a與聚醯亞胺樹脂層12接觸,於與聚醯亞胺樹脂層12側為相反側之第2主面14b設置電子裝置用構件。即,玻璃基板14係用於形成下述電子裝置之基板。 In the glass substrate 14, the first main surface 14a is in contact with the polyimide film 12, and the electronic device member is provided on the second main surface 14b on the side opposite to the polyimide layer 12 side. That is, the glass substrate 14 is used to form a substrate of the following electronic device.

玻璃基板14之種類可為一般者,例如可列舉LCD、OLED等顯示裝置用之玻璃基板等。玻璃基板14之耐化學品性、耐透濕性優異,且熱收縮率較低。作為熱收縮率之指標,可使用JIS R 3102(1995年修訂)中所規定之線膨脹係數。 The type of the glass substrate 14 can be a general one, and examples thereof include a glass substrate for a display device such as an LCD or an OLED. The glass substrate 14 is excellent in chemical resistance and moisture permeability resistance, and has a low heat shrinkage rate. As an index of the heat shrinkage rate, the linear expansion coefficient prescribed in JIS R 3102 (1995 Revision) can be used.

若玻璃基板14之線膨脹係數較大,則多數情況下下述構件形成步驟伴有加熱處理,因此容易產生各種不良情況。例如,於在玻璃基板14上形成TFT(薄膜電晶體)之情形時,若將於加熱下形成有TFT之玻璃基板14冷卻,則有因玻璃基板14之熱收縮而導致TFT之位置偏移過大之虞。 When the linear expansion coefficient of the glass substrate 14 is large, in many cases, the following member forming step is accompanied by heat treatment, and thus various problems are likely to occur. For example, when a TFT (thin film transistor) is formed on the glass substrate 14, if the glass substrate 14 in which the TFT is formed under heating is cooled, the positional shift of the TFT is excessive due to thermal contraction of the glass substrate 14. After that.

玻璃基板14係使玻璃原料熔融並將熔融玻璃成形為板狀而獲得。此種成形方法可為一般者,例如可使用浮式法、熔融法、流孔下引法、富可法、魯伯法等。又,尤其是厚度較薄之玻璃基板14可藉由將暫時成形為板狀之玻璃加熱至可成形之溫度,並利用延伸等方法拉伸使其變薄的方法(再曳引法)進行成形而獲得。 The glass substrate 14 is obtained by melting a glass raw material and shaping the molten glass into a plate shape. Such a molding method may be a general one, and for example, a floating method, a melting method, a flow down method, a rich method, a Luber method, or the like may be used. Further, in particular, the glass substrate 14 having a small thickness can be formed by heating a glass which is temporarily formed into a plate shape to a temperature at which it can be formed, and stretching it by stretching or the like (re-drawing method). And get.

玻璃基板14之玻璃之種類並無特別限定,較佳為無鹼硼矽酸玻璃、硼矽酸玻璃、鈉鈣玻璃、高二氧化矽玻璃、其他以氧化矽為主要成分之氧化物系玻璃。作為氧化物系玻璃,較佳為利用氧化物換算所得之氧化矽之含量為40~90質量%之玻璃。 The type of the glass of the glass substrate 14 is not particularly limited, and is preferably an alkali-free borosilicate glass, a borosilicate glass, a soda lime glass, a high cerium oxide glass, or another oxide-based glass containing cerium oxide as a main component. The oxide-based glass is preferably a glass having a cerium oxide content of 40 to 90% by mass in terms of oxide.

作為玻璃基板14之玻璃,採用適合於電子裝置用構件之種類或其製造步驟之玻璃。例如,液晶面板用之玻璃基板由於鹼金屬成分之溶出容易對液晶造成影響,故而包含實質上不含有鹼金屬成分之玻璃(無鹼玻璃)(但通常含有鹼土金屬成分)。如此,玻璃基板14之玻璃係 根據所應用之裝置之種類及其製造步驟而適當選擇。 As the glass of the glass substrate 14, a glass suitable for the type of the member for an electronic device or a manufacturing step thereof is used. For example, a glass substrate for a liquid crystal panel contains a glass (alkali-free glass) which does not substantially contain an alkali metal component (but usually contains an alkaline earth metal component) because the elution of an alkali metal component is likely to affect the liquid crystal. Thus, the glass system of the glass substrate 14 It is appropriately selected depending on the type of the device to be applied and its manufacturing steps.

玻璃基板14之厚度為0.2mm以下,就玻璃基板14之薄型化及/或輕量化之觀點而言,較佳為0.15mm以下,更佳為0.10mm以下。於0.2mm以下之情形時,可對玻璃基板14賦予良好之可撓性。於0.15mm以下之情形時,可將玻璃基板14捲取為捲筒狀。 The thickness of the glass substrate 14 is 0.2 mm or less, and is preferably 0.15 mm or less, and more preferably 0.10 mm or less from the viewpoint of thickness reduction and/or weight reduction of the glass substrate 14. When it is 0.2 mm or less, the glass substrate 14 can be provided with good flexibility. When it is 0.15 mm or less, the glass substrate 14 can be wound up in a roll shape.

又,就容易製造玻璃基板14、玻璃基板14之操作較容易等理由而言,玻璃基板14之厚度較佳為0.03mm以上。 Moreover, the thickness of the glass substrate 14 is preferably 0.03 mm or more for the reason that the operation of the glass substrate 14 and the glass substrate 14 is easy.

再者,玻璃基板14亦可包含2層以上,於該情形時,形成各層之材料可為同種材料,亦可為不同種材料。又,於該情形時,「玻璃基板14之厚度」意指所有層之合計厚度。 Furthermore, the glass substrate 14 may also include two or more layers. In this case, the materials forming the layers may be the same material or different materials. Moreover, in this case, "the thickness of the glass substrate 14" means the total thickness of all the layers.

(步驟之順序) (order of steps)

將玻璃基板14積層於聚醯亞胺樹脂層12之表面上(聚醯亞胺樹脂層12之與暫時支持體10側為相反側之表面上)之方法並無特別限制,可採用公知之方法。 The method of laminating the glass substrate 14 on the surface of the polyimide film 12 (the surface of the polyimide layer 12 opposite to the side of the temporary support 10) is not particularly limited, and a known method can be employed. .

例如,可列舉於常壓環境下將玻璃基板14重疊於聚醯亞胺樹脂層12之表面上之方法。再者,視需要亦可於將玻璃基板14重疊於聚醯亞胺樹脂層12之表面上之後,使用輥或加壓機使玻璃基板14壓接於聚醯亞胺樹脂層12。藉由利用輥或加壓機之壓接,可相對較容易地去除混入至聚醯亞胺樹脂層12與玻璃基板14之層之間之氣泡,故而較佳。 For example, a method in which the glass substrate 14 is superposed on the surface of the polyimide film 12 under a normal pressure environment can be mentioned. Further, the glass substrate 14 may be laminated on the surface of the polyimide resin layer 12 as needed, and then the glass substrate 14 may be pressure-bonded to the polyimide film 12 using a roll or a press. It is preferable to remove the bubbles mixed between the layers of the polyimide film 12 and the glass substrate 14 relatively easily by pressure bonding using a roll or a press machine.

若藉由真空層壓法或真空加壓法進行壓接,則可抑制氣泡之混入或確保良好之密接,故而更佳。藉由於真空下進行壓接,即便於殘留有微小氣泡之情形時,亦有氣泡不因加熱而成長,而不易導致玻璃基板14之變形缺陷的優勢。又,藉由於真空加熱下進行壓接,而更不易殘留氣泡。 When the pressure bonding is carried out by a vacuum lamination method or a vacuum press method, it is preferable to suppress the incorporation of air bubbles or to ensure good adhesion. By the pressure bonding under vacuum, even when fine bubbles remain, there are cases where bubbles do not grow by heating, and the deformation defects of the glass substrate 14 are not easily caused. Moreover, by crimping under vacuum heating, bubbles are less likely to remain.

於積層玻璃基板14時,較佳為,將與聚醯亞胺樹脂層12接觸之玻璃基板14之表面充分地清洗,並於潔淨度較高之環境下進行積層。 潔淨度越高,玻璃基板14之平坦性越良好,故而較佳。 In the case of laminating the glass substrate 14, it is preferable that the surface of the glass substrate 14 which is in contact with the polyimide resin layer 12 is sufficiently cleaned and laminated in an environment having high cleanliness. The higher the degree of cleanliness, the better the flatness of the glass substrate 14, which is preferable.

再者,於積層玻璃基板14後,視需要可進行預退火處理(加熱處理)。藉由進行該預退火處理,所積層之玻璃基板14之對聚醯亞胺樹脂層12之密接性提高,於下述步驟(4)時不易產生電子裝置用構件之位置偏移等,而電子裝置之生產性提高。 Further, after the laminated glass substrate 14, a pre-annealing treatment (heat treatment) may be performed as needed. By performing the pre-annealing treatment, the adhesion of the laminated glass substrate 14 to the polyimide resin layer 12 is improved, and the positional shift of the electronic device member is less likely to occur in the following step (4), and the electrons are not generated. The productivity of the device is improved.

預退火處理之條件係根據所使用之聚醯亞胺樹脂層12之種類而適當選擇最佳之條件,就使玻璃基板14與聚醯亞胺樹脂層12之間之剝離強度更適當方面而言,較佳為於200℃以上(較佳為200~400℃)進行5分鐘以上(較佳為5~30分鐘)加熱處理。 The conditions of the pre-annealing treatment are appropriately selected according to the kind of the polyimide resin layer 12 to be used, and the peeling strength between the glass substrate 14 and the polyimide layer 12 is more appropriate. Preferably, the heat treatment is carried out at 200 ° C or higher (preferably 200 to 400 ° C) for 5 minutes or longer (preferably 5 to 30 minutes).

(玻璃積層體) (glass laminate)

經過上述步驟而獲得之本發明之玻璃積層體100可用於各種用途,例如可列舉製造下述顯示裝置用面板、PV、薄膜二次電池、表面形成有電路之半導體晶圓等電子零件之用途等。再者,於該用途中,多數情況下將玻璃積層體100曝露於高溫條件下(例如400℃以上)(例如1小時以上)。 The glass laminate 100 of the present invention obtained by the above-described steps can be used for various purposes, and examples thereof include the use of a panel for a display device, a PV, a thin film secondary battery, and an electronic component such as a semiconductor wafer having a circuit formed thereon. . Further, in this application, the glass laminate 100 is often exposed to high temperature conditions (for example, 400 ° C or higher) (for example, 1 hour or longer).

此處,所謂顯示裝置用面板,包括LCD、OLED、電子紙、電漿顯示面板、場發射面板、量子點LED面板、MEMS(Micro Electro Mechanical Systems,微機電系統)快門面板等。 Here, the panel for a display device includes an LCD, an OLED, an electronic paper, a plasma display panel, a field emission panel, a quantum dot LED panel, a MEMS (Micro Electro Mechanical Systems) shutter panel, and the like.

該玻璃積層體100係使用至步驟(4)。即,該玻璃積層體100係使用至在其玻璃基板14之第2主面14b表面上形成液晶顯示裝置等電子裝置用構件。其後,形成有電子裝置用構件之玻璃積層體分離為暫時支持體10與電子裝置,暫時支持體10不成為構成電子裝置之部分。 This glass laminate 100 is used in the step (4). In other words, the glass laminate 100 is used to form a member for an electronic device such as a liquid crystal display device on the surface of the second main surface 14b of the glass substrate 14. Thereafter, the glass laminate in which the member for electronic device is formed is separated into the temporary support 10 and the electronic device, and the temporary support 10 does not become a part constituting the electronic device.

再者,於玻璃積層體100中,聚醯亞胺樹脂層12固定於玻璃基板14上,暫時支持體10可剝離地密接於聚醯亞胺樹脂層12。於本發明中,該固定與可剝離之密接於剝離強度(即剝離所需之應力)存在差異,固定意指相對於密接而剝離強度較大。即,聚醯亞胺樹脂層12與 玻璃基板14之界面之剝離強度大於聚醯亞胺樹脂層12與暫時支持體10之界面之剝離強度。換言之,所謂可剝離之密接,意指在可剝離之同時,可不產生固定之面之剝離而進行剝離。 Further, in the glass laminate 100, the polyimide resin layer 12 is fixed to the glass substrate 14, and the temporary support 10 is detachably adhered to the polyimide resin layer 12. In the present invention, the fixing is in close contact with the peelable strength (i.e., the stress required for peeling), and the fixing means that the peeling strength is large with respect to the adhesion. That is, the polyimide layer 12 and The peel strength at the interface of the glass substrate 14 is greater than the peel strength at the interface between the polyimide film 12 and the temporary support 10. In other words, the term "peelable" means that the peeling can be performed without peeling off the surface of the fixed surface.

更具體而言,玻璃基板14與聚醯亞胺樹脂層12之界面具有剝離強度(x),若對玻璃基板14與聚醯亞胺樹脂層12之界面施加超過剝離強度(x)之剝離方向之應力,則玻璃基板14與聚醯亞胺樹脂層12之界面發生剝離。聚醯亞胺樹脂層12與暫時支持體10之界面具有剝離強度(y),若對聚醯亞胺樹脂層12與暫時支持體10之界面施加超過剝離強度(y)之剝離方向之應力,則聚醯亞胺樹脂層12與暫時支持體10之界面發生剝離。 More specifically, the interface between the glass substrate 14 and the polyimide resin layer 12 has a peel strength (x), and a peeling direction exceeding the peel strength (x) is applied to the interface between the glass substrate 14 and the polyimide layer 12 The stress is peeled off at the interface between the glass substrate 14 and the polyimide film layer 12. The interface between the polyimide resin layer 12 and the temporary support 10 has a peel strength (y), and when the interface between the polyimide layer 12 and the temporary support 10 is applied with a stress exceeding the peel strength (y), Then, the interface between the polyimide film 12 and the temporary support 10 is peeled off.

於玻璃積層體100(亦意指下述附有構件之玻璃積層體)中,上述剝離強度(x)高於上述剝離強度(y)。因此,若對玻璃積層體100施加將暫時支持體10與玻璃基板14剝離之方向之應力,則本發明之玻璃積層體100於暫時支持體10與聚醯亞胺樹脂層12之界面發生剝離,而分離為暫時支持體10、及包括聚醯亞胺樹脂層12及玻璃基板14之積層體。 In the glass laminate 100 (also referred to as the glass laminate having the member described below), the peel strength (x) is higher than the peel strength (y). Therefore, when the stress in the direction in which the temporary support 10 and the glass substrate 14 are peeled off is applied to the glass laminate 100, the glass laminate 100 of the present invention is peeled off at the interface between the temporary support 10 and the polyimide resin layer 12. Further, it is separated into a temporary support 10 and a laminate including the polyimide layer 12 and the glass substrate 14.

再者,聚醯亞胺樹脂層12與玻璃基板14之密接性可藉由上述矽烷偶合劑而提高。 Further, the adhesion between the polyimide resin layer 12 and the glass substrate 14 can be improved by the above-described decane coupling agent.

<步驟(3):構件形成步驟S106> <Step (3): Member Formation Step S106>

步驟(3)係於步驟(2)中所獲得之玻璃積層體中之玻璃基板之表面上配置電子裝置用構件而獲得附有構件之玻璃積層體的步驟。如圖2(C)所示,藉由實施本步驟,而於玻璃基板之第2表面14b上(與聚醯亞胺樹脂層12為相反側之表面上)配置電子裝置用構件16,獲得依序具有暫時支持體10、聚醯亞胺樹脂層12、玻璃基板14及電子裝置用構件16的附有構件之玻璃積層體110。 The step (3) is a step of disposing a member for an electronic device on the surface of the glass substrate in the glass laminate obtained in the step (2) to obtain a glass laminate having a member. As shown in Fig. 2(C), by performing this step, the member for electronic device 16 is placed on the second surface 14b of the glass substrate (on the surface opposite to the polyimide layer 12). The glass laminate 110 having the temporary support 10, the polyimide phase resin layer 12, the glass substrate 14, and the electronic device member 16 is attached.

以下,首先對本步驟中所使用之電子裝置用構件16進行詳述,其後對步驟之順序進行詳述。 Hereinafter, the electronic device member 16 used in this step will be described in detail first, and the order of the steps will be described in detail later.

(電子裝置用構件(功能性元件)) (Mechanical components (functional components))

電子裝置用構件16係形成於玻璃積層體100中之玻璃基板14上而構成電子裝置之至少一部分之構件。更具體而言,作為電子裝置用構件16,可列舉用於顯示裝置用面板、太陽電池、薄膜二次電池、或表面形成有電路之半導體晶圓等電子零件等之構件(例如,顯示裝置用構件、太陽電池用構件、薄膜二次電池用構件、電子零件用電路)。 The electronic device member 16 is formed on the glass substrate 14 in the glass laminate 100 to constitute at least a part of the electronic device. More specifically, the electronic device member 16 is a member for use in a display device panel, a solar cell, a thin film secondary battery, or an electronic component such as a semiconductor wafer on which a circuit is formed (for example, for a display device) Member, member for solar cell, member for thin film secondary battery, circuit for electronic component).

例如,作為太陽電池用構件,對於矽型,可列舉正極之氧化錫等透明電極、p層/i層/n層所表示之矽層、及負極之金屬等,此外,亦可列舉與化合物型、色素增感型、量子點型等對應之各種構件等。 For example, as a member for a solar cell, a transparent electrode such as a tin oxide of a positive electrode, a ruthenium layer represented by a p layer/i layer/n layer, a metal of a negative electrode, or the like may be mentioned as the ruthenium type, and a compound type may also be mentioned. Various components such as dye-sensitized type and quantum dot type.

又,作為薄膜二次電池用構件,對於鋰離子型,可列舉正極及負極之金屬或金屬氧化物等之透明電極、電解質層之鋰化合物、集電層之金屬、作為密封層之樹脂等,此外,亦可列舉與鎳氫型、聚合物型、陶瓷電解質型等對應之各種構件等。 In addition, examples of the lithium ion type include a transparent electrode such as a metal or a metal oxide of a positive electrode and a negative electrode, a lithium compound of an electrolyte layer, a metal of a collector layer, and a resin as a sealing layer. Further, various members corresponding to a nickel hydrogen type, a polymer type, a ceramic electrolyte type, and the like may be mentioned.

又,作為電子零件用電路,對於CCD(Charge Coupled Device,電荷耦合元件)或CMOS(Complementary Metal Oxide Semiconductor,互補性金屬氧化物半導體),可列舉導電部之金屬、絕緣部之氧化矽或氮化矽等,此外,亦可列舉與壓力感測器、加速度感測器等各種感測器或剛性印刷基板、軟性印刷基板、剛性軟性印刷基板等對應之各種構件等。 In addition, as a circuit for an electronic component, a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) includes a metal of a conductive portion and yttrium oxide or nitridation of an insulating portion. In addition, various members such as various sensors such as a pressure sensor and an acceleration sensor, or a rigid printed circuit board, a flexible printed circuit board, a rigid flexible printed circuit board, and the like may be used.

(步驟之順序) (order of steps)

上述附有構件之玻璃積層體110之製造方法並無特別限定,可根據電子裝置用構件之構成構件之種類而利用先前公知之方法,於玻璃積層體100之玻璃基板14之第2主面14b表面上形成電子裝置用構件16。 The method for producing the glass laminate 110 having the member is not particularly limited, and the second main surface 14b of the glass substrate 14 of the glass laminate 100 can be formed by a conventionally known method depending on the type of the constituent member of the electronic device member. A member 16 for an electronic device is formed on the surface.

再者,電子裝置用構件16亦可並非最終形成於玻璃基板14之第2主面14b之構件之全部(以下稱為「全部構件」)而為全部構件之一部 分(以下稱為「部分構件」)。亦可將剝離暫時支持體10而獲得之附有部分構件之玻璃基板於之後之步驟中製成附有全部構件之玻璃基板(相當於下述電子裝置)。 In addition, the electronic device member 16 may not be all of the members (hereinafter referred to as "all members") which are finally formed on the second main surface 14b of the glass substrate 14, and may be one of all members. Points (hereinafter referred to as "partial components"). The glass substrate with the partial members obtained by peeling off the temporary support 10 may be formed into a glass substrate (corresponding to the following electronic device) with all the members in the subsequent step.

又,亦可組裝附有全部構件之積層體,其後,自附有全部構件之積層體剝離暫時支持體10,而製造電子裝置。進而,亦可使用2片附有全部構件之積層體而組裝電子裝置,其後,自附有全部構件之積層體剝離2片暫時支持體10,而製造具有2片玻璃基板之電子裝置。 Further, a laminate having all the members may be assembled, and thereafter, the temporary support 10 is peeled off from the laminate having all the members, and an electronic device is manufactured. Further, the electronic device may be assembled by using two laminated bodies with all the members attached thereto, and thereafter, the two temporary members 10 are peeled off from the laminated body with all the members, and an electronic device having two glass substrates is manufactured.

例如,以製造OLED之情形為例,為了於玻璃積層體100之玻璃基板14之與聚醯亞胺樹脂層12側為相反側之表面上(相當於玻璃基板14之第2主面14b)形成有機EL構造體,而進行以下等各種層形成或處理:形成透明電極,進而於形成有透明電極之面上蒸鍍電洞注入層、電洞傳輸層、發光層、電子傳輸層等,形成背面電極,使用密封板進行密封。作為該等層形成或處理,具體而言,例如可列舉成膜處理、蒸鍍處理、密封板之接著處理等。 For example, in the case of manufacturing an OLED, the surface of the glass substrate 14 of the glass laminate 100 on the opposite side to the side of the polyimide layer 12 (corresponding to the second main surface 14b of the glass substrate 14) is formed. In the organic EL structure, various layers are formed or processed by forming a transparent electrode, and further depositing a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and the like on the surface on which the transparent electrode is formed to form a back surface. The electrode is sealed using a sealing plate. Specific examples of the formation or treatment of the layers include a film formation treatment, a vapor deposition treatment, and a subsequent treatment of a sealing plate.

又,例如於製造TFT-LCD之情形時,具有如下等各種步驟:TFT形成步驟,其係於玻璃積層體100之玻璃基板14之第2主面14b上,使用抗蝕液於藉由CVD(Chemical Vapor Deposition,化學氣相沈積)法及濺鍍法等一般之成膜法而形成之金屬膜及金屬氧化膜等形成圖案,而形成薄膜電晶體(TFT);CF形成步驟,其係於另一個玻璃積層體100之玻璃基板14之第2主面14b上,使用抗蝕液形成圖案,而形成彩色濾光片(CF);及貼合步驟,其係將TFT形成步驟中所獲得之附有TFT之積層體與CF形成步驟中所獲得之附有CF之積層體進行積層。 Further, for example, in the case of manufacturing a TFT-LCD, there are various steps such as a TFT forming step on the second main surface 14b of the glass substrate 14 of the glass laminate 100, using a resist liquid on CVD ( A metal film and a metal oxide film formed by a general film formation method such as a chemical vapor deposition method and a sputtering method form a pattern to form a thin film transistor (TFT); a CF forming step is performed on another a second color filter (CF) is formed on the second main surface 14b of the glass substrate 14 of the glass laminate 100 by using a resist liquid; and a bonding step is performed in the TFT forming step. The laminate having the TFT is laminated with the CF-attached laminate obtained in the CF forming step.

於TFT形成步驟或CF形成步驟中,使用周知之光微影技術或蝕刻技術等,於玻璃基板14之第2主面14b上形成TFT或CF。此時,使用抗蝕液作為圖案形成用之塗佈液。 In the TFT forming step or the CF forming step, a TFT or CF is formed on the second main surface 14b of the glass substrate 14 by using a known photolithography technique or an etching technique. At this time, a resist liquid is used as a coating liquid for pattern formation.

再者,亦可於形成TFT或CF前,視需要將玻璃基板14之第2主面 14b進行清洗。作為清洗方法,可使用周知之乾式清洗或濕式清洗。 Furthermore, the second main surface of the glass substrate 14 may be formed as needed before forming the TFT or CF. 14b is cleaned. As the cleaning method, a well-known dry cleaning or wet cleaning can be used.

於貼合步驟中,使附有TFT之積層體之薄膜電晶體形成面與附有CF之積層體之彩色濾光片形成面相對向,並使用密封劑(例如單元形成用紫外線硬化型密封劑)進行貼合。其後,向由附有TFT之積層體與附有CF之積層體所形成之單元內注入液晶材料。作為注入液晶材料之方法,例如有減壓注入法、滴加注入法。 In the bonding step, the thin film transistor forming surface of the laminated body with the TFT is opposed to the color filter forming surface of the laminated body with CF, and a sealing agent (for example, an ultraviolet curing type sealing agent for cell formation) is used. ) to make a fit. Thereafter, a liquid crystal material is injected into a cell formed of a laminate having a TFT and a laminate having CF. As a method of injecting a liquid crystal material, for example, a pressure reduction injection method or a dropping injection method is available.

<步驟(4):分離步驟S108> <Step (4): Separation step S108>

步驟(4)係自步驟(3)中所獲得之附有構件之玻璃積層體去除暫時支持體而獲得包括聚醯亞胺樹脂層、玻璃基板及電子裝置用構件之電子裝置的步驟。如圖2(D)所示,係如下步驟:自上述步驟(3)中所獲得之附有構件之玻璃積層體110,將暫時支持體10與聚醯亞胺樹脂層12之界面作為剝離面而分離去除暫時支持體10,從而獲得包括聚醯亞胺樹脂層12、玻璃基板14及電子裝置用構件16之電子裝置120。 The step (4) is a step of obtaining an electronic device including a polyimide film, a glass substrate, and a member for an electronic device by removing the temporary support from the glass laminate with the member obtained in the step (3). As shown in Fig. 2(D), there is a step of using the interface of the temporary support 10 and the polyimide resin layer 12 as a peeling surface from the glass laminate 110 with the member obtained in the above step (3). The temporary support 10 is separated and removed, whereby the electronic device 120 including the polyimide layer 12, the glass substrate 14, and the member 16 for electronic devices is obtained.

於剝離時之玻璃基板14上之電子裝置用構件16為形成所需之全部構成構件之一部分之情形時,於分離後,亦可於玻璃基板14上形成剩餘之構成構件。 When the electronic device member 16 on the glass substrate 14 at the time of peeling is a part of all the constituent members required, the remaining constituent members may be formed on the glass substrate 14 after the separation.

將暫時支持體10與電子裝置120分離之方法並無特別限定。具體而言,例如可於暫時支持體10與聚醯亞胺樹脂層12之界面插入銳利之刀具狀者,而賦予剝離之開端,此後,吹送水與壓縮空氣之混合流體而進行剝離。較佳為,以附有構件之玻璃積層體110之暫時支持體10成為上側、電子裝置用構件16側成為下側之方式設置於壓盤上,並使電子裝置用構件16側真空吸附於壓盤上,於該狀態下首先使刀具進入至暫時支持體10-聚醯亞胺樹脂層12界面。然後,其後利用複數個真空吸附墊吸附暫時支持體10側,使真空吸附墊自插入有刀具之部位附近逐漸上升。若如此操作,則可於暫時支持體10與聚醯亞胺樹脂層12之界面形成空氣層,該空氣層擴散至整個界面,而將暫時支持體10容 易地剝離。 The method of separating the temporary support 10 from the electronic device 120 is not particularly limited. Specifically, for example, a sharp cutter can be inserted into the interface between the temporary support 10 and the polyimide resin layer 12 to provide a peeling opening, and thereafter, a mixed fluid of water and compressed air is blown and peeled off. Preferably, the temporary support 10 of the glass laminate 110 having the member is placed on the pressure plate so that the side of the electronic device member 16 is on the lower side, and the electronic device member 16 is vacuum-adsorbed to the pressure. On the disk, in this state, the cutter is first introduced into the interface of the temporary support 10-polyimine resin layer 12. Then, the side of the temporary support 10 is adsorbed by a plurality of vacuum suction pads, and the vacuum suction pad is gradually raised from the vicinity of the portion where the cutter is inserted. If so, an air layer can be formed at the interface between the temporary support 10 and the polyimide resin layer 12, and the air layer diffuses to the entire interface, and the temporary support 10 is accommodated. Easy to peel off.

再者,於將暫時支持體10與電子裝置120分離時,較佳為一面向暫時支持體10與聚醯亞胺樹脂層12之界面吹送剝離助劑一面進行剝離。所謂剝離助劑,意指上述水等溶劑。作為所使用之剝離助劑,可列舉水或有機溶劑(例如乙醇)或其等之混合物等。 Further, when the temporary support 10 is separated from the electronic device 120, it is preferable to peel off the peeling aid while blowing the interface between the temporary support 10 and the polyimide resin layer 12. The term "peeling aid" means a solvent such as the above water. Examples of the release aid to be used include water or an organic solvent (for example, ethanol) or a mixture thereof or the like.

再者,於自附有構件之玻璃積層體110分離暫時支持體10時,可藉由控制利用離子化器之吹送或濕度,而進一步抑制聚醯亞胺樹脂層12之碎片靜電吸附於暫時支持體10。 Further, when the temporary support 10 is separated from the glass laminate 110 to which the member is attached, it is possible to further suppress the electrostatic adsorption of the fragments of the polyimide resin layer 12 to the temporary support by controlling the blowing or humidity by the ionizer. Body 10.

上述電子裝置120之製造方法適合於製造行動電話或PDA之類的移動終端所使用之小型顯示裝置。顯示裝置主要為LCD或OLED,作為LCD,包括TN(Twisted Nematic,扭轉向列)型、STN(Super Twisted Nematic,超扭轉向列)型、FE(Field Effect,場效應)型、TFT型、MIM(Metal-Insulator-Metal,金屬-絕緣體-金屬)型、IPS(In-Plane Switching,橫向電場切換)型、VA(Vertical Alignment,垂直配向)型等。基本上於被動驅動型、主動驅動型之任一者之顯示裝置之情形均可應用。 The above-described manufacturing method of the electronic device 120 is suitable for manufacturing a small display device used by a mobile terminal such as a mobile phone or a PDA. The display device is mainly LCD or OLED, and as LCD, including TN (Twisted Nematic) type, STN (Super Twisted Nematic) type, FE (Field Effect) type, TFT type, MIM (Metal-Insulator-Metal, metal-insulator-metal) type, IPS (In-Plane Switching) type, VA (Vertical Alignment) type, and the like. It can be applied basically in the case of a display device of either a passive drive type or an active drive type.

作為藉由上述方法所製造之電子裝置120,可列舉:具有玻璃基板及顯示裝置用構件之顯示裝置用面板、具有玻璃基板及太陽電池用構件之太陽電池、具有玻璃基板及薄膜二次電池用構件之薄膜二次電池、具有玻璃基板及電子裝置用構件之電子零件等。作為顯示裝置用面板,包括液晶面板、有機EL面板、電漿顯示面板、場發射面板等。 The electronic device 120 manufactured by the above-mentioned method includes a panel for a display device having a member for a glass substrate and a display device, a solar cell having a member for a glass substrate and a solar cell, and a glass substrate and a thin film secondary battery. A thin film secondary battery of a member, an electronic component having a glass substrate and a member for an electronic device, and the like. The panel for a display device includes a liquid crystal panel, an organic EL panel, a plasma display panel, a field emission panel, and the like.

[第2實施形態] [Second Embodiment]

圖3係表示本發明之電子裝置之製造方法之第2實施形態之製造步驟的流程圖。如圖3所示,電子裝置之製造方法具備:聚醯亞胺樹脂層形成步驟S102(相當於步驟(1)),其係於暫時支持體上配置特定之 聚醯亞胺樹脂層;玻璃基板積層步驟S110(相當於步驟(2')),其係將具有較聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於聚醯亞胺樹脂層上留有不與玻璃基板接觸之周緣區域之方式積層於聚醯亞胺樹脂層上;切斷步驟S112(相當於步驟(5)),其係沿玻璃基板之外周緣,將聚醯亞胺樹脂層及暫時支持體切斷;構件形成步驟S106(相當於步驟(3)),其係於玻璃基板上配置電子裝置用構件;分離步驟S108(步驟(4)),其係分離而獲得電子裝置。 Fig. 3 is a flow chart showing the manufacturing procedure of the second embodiment of the method of manufacturing the electronic device of the present invention. As shown in FIG. 3, the method of manufacturing an electronic device includes a polyimine resin layer forming step S102 (corresponding to step (1)), which is disposed on a temporary support. a polyimide substrate layer; a glass substrate lamination step S110 (corresponding to the step (2')), which is a glass substrate having a size smaller than that of the polyimine resin layer, and a polyimine resin The layer is laminated on the polyimide layer to leave a peripheral region not in contact with the glass substrate; and the cutting step S112 (corresponding to the step (5)) is carried out along the periphery of the glass substrate to The amine resin layer and the temporary support are cut; the member forming step S106 (corresponding to the step (3)) is to arrange the member for the electronic device on the glass substrate; and the separating step S108 (step (4)) is obtained by separating Electronic device.

又,圖4(A)~(E)係依序表示本發明之電子裝置之製造方法之第2實施形態之各製造步驟的模式剖視圖。 4(A) to 4(E) are schematic cross-sectional views showing the respective manufacturing steps of the second embodiment of the method of manufacturing the electronic device of the present invention.

圖3所示之各步驟除玻璃基板積層步驟S110及切斷步驟S112方面以外,係與圖1所示之步驟相同之順序,對相同之步驟標註相同之參照符號,並省略其說明,主要對玻璃基板積層步驟S110及切斷步驟S112進行說明。 The steps shown in FIG. 3 are the same as the steps shown in FIG. 1 except for the steps of the glass substrate lamination step S110 and the cutting step S112, and the same steps are denoted by the same reference numerals, and the description thereof is omitted. The glass substrate lamination step S110 and the cutting step S112 will be described.

<步驟(2'):玻璃基板積層步驟S110> <Step (2'): Glass Substrate Lamination Step S110>

步驟(2')係將具有較聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於聚醯亞胺樹脂層上留有不與玻璃基板接觸之周緣區域之方式積層於聚醯亞胺樹脂層上而獲得玻璃積層體的步驟。如圖4(A)所示,於聚醯亞胺樹脂層形成步驟S102中於暫時支持體10上配置聚醯亞胺樹脂層12,其次,如圖4(B)所示,藉由實施本步驟S110,而於聚醯亞胺樹脂層12上配置具有較聚醯亞胺樹脂層12之外形尺寸小之外形尺寸的玻璃基板14。玻璃基板14係以於聚醯亞胺樹脂層12上留有不與玻璃基板14接觸之周緣區域之方式積層於聚醯亞胺樹脂層上。換言之,玻璃基板14係以於玻璃基板14之外周露出聚醯亞胺樹脂層12之方式積層於聚醯亞胺樹脂層12上。 The step (2') is to laminate a glass substrate having a size smaller than that of the polyimine resin layer to form a polyimide layer on the polyimide layer to leave a peripheral region not in contact with the glass substrate. The step of obtaining a glass laminate on the imide resin layer. As shown in FIG. 4(A), the polyimine resin layer 12 is placed on the temporary support 10 in the polyimine resin layer forming step S102, and next, as shown in FIG. 4(B), In step S110, a glass substrate 14 having a size smaller than that of the polyimine resin layer 12 is disposed on the polyimide layer 12 . The glass substrate 14 is laminated on the polyimide film layer so as to leave a peripheral region which is not in contact with the glass substrate 14 on the polyimide film layer 12. In other words, the glass substrate 14 is laminated on the polyimide film 12 in such a manner that the polyimide film 12 is exposed on the outer periphery of the glass substrate 14.

更具體而言,如圖5(A)所示,以於聚醯亞胺樹脂層12上留有不與玻璃基板14接觸之周緣區域12b之方式,將玻璃基板14積層於聚醯亞 胺樹脂層12上。即,以玻璃基板14之外周緣之所有邊不與聚醯亞胺樹脂層12之外周緣接觸之方式,將玻璃基板14積層於聚醯亞胺樹脂層12上。 More specifically, as shown in FIG. 5(A), the glass substrate 14 is laminated on the polyamid resin layer 12 so as to leave the peripheral region 12b not in contact with the glass substrate 14. On the amine resin layer 12. In other words, the glass substrate 14 is laminated on the polyimide film 12 in such a manner that all the outer edges of the glass substrate 14 are not in contact with the outer periphery of the polyimide layer 12 .

一般而言,於聚醯亞胺樹脂層12之露出表面,容易因其表面張力之影響而於周緣部附近產生凸部(參照圖5(B))。於積層玻璃基板14時,若與此種凸部接觸,則有玻璃基板14之中央部以凹陷之方式彎曲,而損害玻璃基板14之平坦性之情形(參照圖5(C))。因玻璃基板14之平坦性受到損害,而有配置於玻璃基板14上之電子裝置用構件產生位置偏移等之虞,結果有引起電子裝置之良率降低之虞。 In general, on the exposed surface of the polyimide resin layer 12, a convex portion is likely to be generated in the vicinity of the peripheral portion due to the influence of the surface tension (see FIG. 5(B)). When the glass substrate 14 is laminated, when the convex portion is in contact with the convex portion, the central portion of the glass substrate 14 is bent so as to be damaged, thereby impairing the flatness of the glass substrate 14 (see FIG. 5(C)). When the flatness of the glass substrate 14 is impaired, the position of the electronic device member disposed on the glass substrate 14 is shifted, and the like, and the yield of the electronic device is lowered.

因此,藉由使用具有較聚醯亞胺樹脂層12之外形小之外形的玻璃基板14,可不與該凸部接觸而使玻璃基板14與聚醯亞胺樹脂層12接觸。結果抑制玻璃基板14產生彎曲,而抑制電子裝置之良率降低。 Therefore, by using the glass substrate 14 having a shape smaller than that of the polyimine resin layer 12, the glass substrate 14 can be brought into contact with the polyimide film 12 without coming into contact with the convex portion. As a result, the glass substrate 14 is suppressed from being bent, and the yield of the electronic device is suppressed from being lowered.

於該態樣中,聚醯亞胺樹脂層12之外形大於玻璃基板14之外形。聚醯亞胺樹脂層12之與玻璃基板14接觸之區域之面積A與聚醯亞胺樹脂層12之總面積B之比(面積A/總面積B)較佳為0.98以下,更佳為0.95以下。若為上述範圍內,則進一步抑制玻璃基板14產生彎曲。下限並無特別限制,就生產性等方面而言,較佳為0.75以上,更佳為0.80以上。 In this aspect, the outer shape of the polyimide film 12 is larger than the outer shape of the glass substrate 14. The ratio (area A / total area B) of the area A of the region of the polyimide film 12 in contact with the glass substrate 14 to the total area B of the polyimide resin layer 12 is preferably 0.98 or less, more preferably 0.95. the following. If it is in the above range, the glass substrate 14 is further suppressed from being bent. The lower limit is not particularly limited, and is preferably 0.75 or more, and more preferably 0.80 or more in terms of productivity and the like.

又,自玻璃基板14之外周緣至聚醯亞胺樹脂層12之外周緣為止之長度較佳為10mm以上,更佳為15mm以上。若為上述範圍內,則進一步抑制聚醯亞胺樹脂層12產生厚度不均。上限並無特別限制,就生產性等方面而言,較佳為100mm以下。 Moreover, the length from the outer periphery of the glass substrate 14 to the outer periphery of the polyimide resin layer 12 is preferably 10 mm or more, and more preferably 15 mm or more. When it is in the above range, the thickness unevenness of the polyimide film 12 is further suppressed. The upper limit is not particularly limited, and is preferably 100 mm or less in terms of productivity and the like.

再者,作為玻璃基板14之積層方法,可列舉上述第1實施形態之步驟(2)之方法。 Further, as a method of laminating the glass substrate 14, the method of the step (2) of the first embodiment described above can be mentioned.

藉由實施本步驟,而獲得具備暫時支持體10、聚醯亞胺樹脂層12及玻璃基板14之玻璃積層體200。 By performing this step, the glass laminate 200 including the temporary support 10, the polyimide resin layer 12, and the glass substrate 14 is obtained.

<步驟(5):切斷步驟S112> <Step (5): Cutting off step S112>

步驟(5)係沿玻璃基板之外周緣將上述步驟(2')中所獲得之玻璃積層體中之聚醯亞胺樹脂層及暫時支持體切斷的步驟。換言之,係如下步驟:將玻璃積層體中之暫時支持體及聚醯亞胺樹脂層各者之外周部切斷,而使暫時支持體、聚醯亞胺樹脂層、及玻璃基板各者之外周緣之全周對齊。更具體而言,如圖4(C)所示,藉由本步驟S112,沿玻璃基板14之外周緣將暫時支持體10及聚醯亞胺樹脂層12切斷,而獲得切斷後積層體300(實施切斷處理後之積層體)。 The step (5) is a step of cutting the polyimine resin layer and the temporary support in the glass laminate obtained in the above step (2') along the outer periphery of the glass substrate. In other words, the outer peripheral portion of each of the temporary support and the polyimide resin layer in the glass laminate is cut, and the temporary support, the polyimide resin layer, and the glass substrate are each outer periphery. The edge is aligned all week. More specifically, as shown in FIG. 4(C), the temporary support 10 and the polyimide layer 12 are cut along the outer periphery of the glass substrate 14 by this step S112, and the layered body 300 after cutting is obtained ( The laminate after the cutting process is performed).

將暫時支持體10及聚醯亞胺樹脂層12切斷之方法並無特別限制,可採用公知之方法(利用切割器之切斷、利用雷射之切斷等)。例如,可列舉日本專利特開2013-82182號公報之段落0079~0095中所記載之方法。 The method of cutting the temporary support 10 and the polyimide resin layer 12 is not particularly limited, and a known method (cutting by a cutter, cutting by a laser, or the like) can be employed. For example, the method described in paragraphs 0079 to 0095 of JP-A-2013-82182 can be cited.

於上述步驟(5)後,藉由實施上述步驟(3),如圖4(D)所示,於玻璃基板14上配置電子裝置用構件16而形成附有構件之玻璃積層體110。進而,藉由實施上述步驟(4),如圖4(E)所示,自附有構件之玻璃積層體110去除暫時支持體10,而獲得具備聚醯亞胺樹脂層12、玻璃基板14及電子裝置用構件16之電子裝置120。 After the above step (5), by performing the above step (3), as shown in FIG. 4(D), the electronic device member 16 is placed on the glass substrate 14, and the glass laminate 110 with the member is formed. Further, by performing the above step (4), as shown in FIG. 4(E), the temporary support 10 is removed from the glass laminate 110 having the member, and the polyimide substrate 12 and the glass substrate 14 are obtained. The electronic device 120 of the member 16 for electronic devices.

[實施例] [Examples]

以下,藉由實施例等具體地說明本發明,但本發明並不受該等例限定。 Hereinafter, the present invention will be specifically described by way of examples, but the present invention is not limited by the examples.

於以下之實施例及比較例中,作為玻璃基板,使用包含無鹼硼矽酸玻璃之玻璃板(縱150mm、橫150mm、板厚0.1mm,線膨脹係數38×10-7/℃,旭硝子公司製造之商品名「AN100」)。又,作為暫時支持體,使用同樣之包含無鹼硼矽酸玻璃之玻璃板(縱200mm、橫200mm、板厚0.5mm,線膨脹係數38×10-7/℃,旭硝子公司製造之商品名「AN100」)。 In the following examples and comparative examples, a glass plate containing an alkali-free borosilicate glass (150 mm in length, 150 mm in width, 0.1 mm in plate thickness, and linear expansion coefficient 38 × 10 -7 /° C., Asahi Glass Co., Ltd.) was used as the glass substrate. The product name "AN100" is manufactured. In addition, as the temporary support, the same glass plate containing the alkali-free borosilicate glass (200 mm in length, 200 mm in width, 0.5 mm in thickness, and linear expansion coefficient of 38×10 -7 /° C., manufactured by Asahi Glass Co., Ltd.) was used. AN100").

(聚醯胺酸溶液(A)之製造) (Manufacture of polyaminic acid solution (A))

使對苯二胺(10.8g,0.1mol)溶解於1-甲基-2-吡咯啶酮(226.0g)中,並於室溫下進行攪拌。歷時1分鐘向其中添加3,3',4,4'-聯苯四羧酸二酐(29.4g,0.1mol),並於室溫下攪拌2小時,而獲得包含具有上述式(2-1)及/或式(2-2)所表示之重複單元之聚醯胺酸的固形物成分濃度20質量%之聚醯胺酸溶液(A)。測定該溶液之黏度,結果於20℃下為3000厘泊。 P-phenylenediamine (10.8 g, 0.1 mol) was dissolved in 1-methyl-2-pyrrolidone (226.0 g) and stirred at room temperature. 3,3',4,4'-biphenyltetracarboxylic dianhydride (29.4 g, 0.1 mol) was added thereto over 1 minute, and stirred at room temperature for 2 hours, and obtained to have the above formula (2-1) And/or a polyamic acid solution (A) having a solid content of a polyamine of a repeating unit represented by the formula (2-2) of 20% by mass. The viscosity of the solution was measured and found to be 3000 cps at 20 °C.

黏度係使用東機美公司(股)製造之DVL-BII型數位黏度計(B型黏度計)測定20℃下之旋轉黏度所得者。 The viscosity was obtained by measuring the rotational viscosity at 20 ° C using a DVL-BII type digital viscometer (B type viscometer) manufactured by Toki Seiki Co., Ltd.

再者,聚醯胺酸中所包含之式(2-1)及/或式(2-2)所表示之重複單元中之X為式(X1)所表示之基,A為式(A1)所表示之基。 Further, X in the repeating unit represented by the formula (2-1) and/or the formula (2-2) contained in the polyamic acid is a group represented by the formula (X1), and A is a formula (A1). The basis of the representation.

(矽烷偶合劑溶液(B)之製造) (Manufacture of decane coupling agent solution (B))

將矽烷偶合劑(信越化學工業股份有限公司製造,3-胺基丙基三甲氧基矽烷,商標KBM903)添加至異丙醇(IPA)中之後,利用旋轉混合器實施約1小時溶液之攪拌,而製作溶液B。再者,矽烷偶合劑之含量係以相對於異丙醇總質量成為0.1質量%之方式添加。 After adding a decane coupling agent (manufactured by Shin-Etsu Chemical Co., Ltd., 3-aminopropyltrimethoxydecane, trade name KBM903) to isopropyl alcohol (IPA), the solution was stirred for about 1 hour using a rotary mixer. And make solution B. Further, the content of the decane coupling agent was added so as to be 0.1% by mass based on the total mass of the isopropyl alcohol.

<實施例1> <Example 1>

利用模嘴塗佈機於實施過清洗之暫時支持體上塗佈上述溶液A,其後於90℃下實施10分鐘乾燥處理,進而於150℃下實施10分鐘乾燥處理,而於暫時支持體上形成包含聚醯胺酸之塗膜。 The solution A was applied onto the temporarily supported support by a die coater, and then dried at 90 ° C for 10 minutes, and further dried at 150 ° C for 10 minutes, and on a temporary support. A coating film containing polylysine is formed.

其次,利用模嘴塗佈機於塗膜表面上塗佈上述溶液B,其後於120℃下實施10分鐘乾燥處理,而獲得賦予有矽烷偶合劑之塗膜。 Next, the solution B was applied onto the surface of the coating film by a die coater, and then dried at 120 ° C for 10 minutes to obtain a coating film to which a decane coupling agent was applied.

其次,對塗膜於氮氣下以350℃實施1小時加熱處理,進行聚醯胺酸之閉環反應,而獲得表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 Next, the coating film was subjected to heat treatment at 350 ° C for 1 hour under nitrogen gas to carry out a ring closure reaction of polyglycine, thereby obtaining a polyimine resin layer having a surface treated with a decane coupling agent.

其次,將具有較聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於聚醯亞胺樹脂層上留有不與玻璃基板接觸之周緣區域之方 式,將基板彼此之中心位置對準而積層,從而獲得玻璃積層體S1。再者,於玻璃積層體S1中,玻璃基板與聚醯亞胺樹脂層之界面之剝離強度(x)高於聚醯亞胺樹脂層與暫時支持體之界面之剝離強度(y)。 Next, a glass substrate having a size smaller than that of the polyimine resin layer is left on the polyimide layer to leave a peripheral region not in contact with the glass substrate. In the formula, the substrates are aligned with each other at the center position to laminate, thereby obtaining the glass laminate S1. Further, in the glass laminate S1, the peel strength (x) at the interface between the glass substrate and the polyimide layer is higher than the peel strength (y) at the interface between the polyimide film layer and the temporary support.

繼而,將玻璃積層體S1之玻璃基板固定於安裝有定位治具之壓盤上,以自壓盤之上表面起與玻璃基板之外周緣中之一邊重疊之方式,於暫時支持體之第2主面(與聚醯亞胺樹脂層側為相反側之主面)上利用金剛石磨輪切割器刻畫切割線後,利用夾持治具夾住暫時支持體之切割線之外側並進行割斷。同樣地亦對與玻璃基板之外周緣之剩餘3邊重疊之暫時支持體之外側進行割斷後,利用具有曲面之磨石研磨暫時支持體之割斷面而實施倒角,從而獲得實施切斷處理後之玻璃積層體SA。 Then, the glass substrate of the glass laminate S1 is fixed to the pressure plate on which the positioning fixture is mounted, and is overlapped with one of the outer edges of the glass substrate from the upper surface of the pressure plate, and is the second of the temporary support. After the cutting line is drawn by the diamond grinding wheel cutter on the main surface (the main surface opposite to the polyimine resin layer side), the outer side of the cutting line of the temporary support body is clamped by the clamping jig and cut. Similarly, the outer side of the temporary support which overlaps the remaining three sides of the outer periphery of the glass substrate is cut, and then the chamfer is ground by grinding the temporary support by the grindstone having a curved surface, thereby obtaining the cutting process. The glass laminate SA.

其次,對玻璃積層體SA實施於將電子裝置用構件配置於玻璃基板上時所實施之加熱處理、即450℃、1小時之加熱處理。於加熱處理後,冷卻至室溫,結果於玻璃積層體SA中未見玻璃基板及暫時支持體之分離、或聚醯亞胺樹脂層之發泡或白化等外觀上之變化。 Next, the glass laminate SA is subjected to heat treatment performed at the time of disposing the electronic device member on the glass substrate, that is, heat treatment at 450 ° C for 1 hour. After the heat treatment, the mixture was cooled to room temperature. As a result, no separation of the glass substrate and the temporary support, or foaming or whitening of the polyimide resin layer was observed in the glass laminate SA.

然後,於玻璃積層體SA之4處角部中1處之暫時支持體與聚醯亞胺樹脂層之界面插入厚度0.1mm之不鏽鋼製刀具而形成剝離之切口部,並且使真空吸附墊吸附於玻璃基板與暫時支持體各自之並非剝離面之面,一面向暫時支持體與聚醯亞胺樹脂層之界面吹送水,一面沿玻璃基板與暫時支持體相互分離之方向施加外力,而將暫時支持體不破損地自玻璃積層體SA分離。此處,刀具之插入係一面自離子化器(Keyence公司製造)向該界面吹送去靜電流體一面進行。 Then, a stainless steel cutter having a thickness of 0.1 mm is inserted into the interface between the temporary support and the polyimide resin layer at one of the four corners of the glass laminate SA to form a peeled cut portion, and the vacuum adsorption pad is adsorbed to Each of the glass substrate and the temporary support is not the surface of the peeling surface, and the water is blown toward the interface between the temporary support and the polyimide film layer, and an external force is applied in a direction in which the glass substrate and the temporary support are separated from each other, and temporary support is provided. The body is separated from the glass laminate SA without damage. Here, the inserting of the cutter is performed while the electrostatic fluid is blown from the ionizer (manufactured by Keyence Corporation) to the interface.

再者,聚醯亞胺樹脂層係與玻璃基板一併自暫時支持體分離。根據上述結果確認,玻璃基板與聚醯亞胺樹脂層之界面之剝離強度(x)高於聚醯亞胺樹脂層與暫時支持體之界面之剝離強度(y)。 Further, the polyimide layer is separated from the temporary support together with the glass substrate. From the above results, it was confirmed that the peel strength (x) at the interface between the glass substrate and the polyimide film layer was higher than the peel strength (y) at the interface between the polyimide film layer and the temporary support.

<實施例2> <Example 2>

利用模嘴塗佈機於實施過清洗之暫時支持體上塗佈上述溶液A,其後於90℃下實施10分鐘乾燥處理,進而於150℃下實施10分鐘乾燥處理,而於暫時支持體上形成包含聚醯胺酸之塗膜。 The solution A was applied onto the temporarily supported support by a die coater, and then dried at 90 ° C for 10 minutes, and further dried at 150 ° C for 10 minutes, and on a temporary support. A coating film containing polylysine is formed.

其次,對塗膜於氮氣下以350℃實施1小時加熱處理,進行聚醯胺酸之閉環反應,而獲得聚醯亞胺樹脂層。 Next, the coating film was subjected to heat treatment at 350 ° C for 1 hour under nitrogen to carry out a ring closure reaction of polyglycine, thereby obtaining a polyimine resin layer.

其次,利用模嘴塗佈機於聚醯亞胺樹脂層表面上塗佈上述溶液B,其後於120℃下實施10分鐘乾燥處理,而獲得表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 Next, the solution B was applied onto the surface of the polyimide resin layer by a die coater, followed by drying at 120 ° C for 10 minutes to obtain a polyimide film having a surface treated with a decane coupling agent. .

其次,將具有較聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於聚醯亞胺樹脂層上留有不與玻璃基板接觸之周緣區域之方式,將基板彼此之中心位置對準而積層,從而獲得玻璃積層體S2。再者,於玻璃積層體S2中,玻璃基板與聚醯亞胺樹脂層之界面之剝離強度(x)高於聚醯亞胺樹脂層與暫時支持體之界面之剝離強度(y)。 Next, a glass substrate having a size smaller than that of the polyimine resin layer is left in the polyimide layer to leave a peripheral region not in contact with the glass substrate, and the center positions of the substrates are opposite to each other. The layers are laminated to obtain the glass laminate S2. Further, in the glass laminate S2, the peel strength (x) at the interface between the glass substrate and the polyimide film layer is higher than the peel strength (y) at the interface between the polyimide film layer and the temporary support.

繼而,將玻璃積層體S2之玻璃基板固定於安裝有定位治具之壓盤上,以自壓盤之上表面起與玻璃基板之外周緣中之一邊重疊之方式,於暫時支持體之第2主面上利用金剛石磨輪切割器刻畫切割線後,利用夾持治具夾住暫時支持體之切割線之外側並進行割斷。同樣地,亦對與玻璃基板之外周緣之剩餘3邊重疊之暫時支持體之外側進行割斷後,利用具有曲面之磨石研磨暫時支持體之割斷面而實施倒角,從而獲得經實施切斷處理之玻璃積層體SB。 Then, the glass substrate of the glass laminate S2 is fixed on the pressure plate on which the positioning fixture is mounted, and the second surface of the temporary support body is overlapped from the upper surface of the glass substrate from the upper surface of the pressure plate. After the cutting line is drawn by the diamond grinding wheel cutter on the main surface, the outer side of the cutting line of the temporary support body is clamped by the clamping jig and cut. Similarly, the outer side of the temporary support which overlaps the remaining three sides of the outer periphery of the glass substrate is also cut, and then the chamfer is ground by grinding the temporary support by the grindstone having the curved surface, thereby obtaining the cut. The treated glass laminate SB.

其次,對玻璃積層體SB實施於將電子裝置用構件配置於玻璃基板上時所實施之加熱處理、即450℃、1小時之加熱處理。於加熱處理後,將其冷卻至室溫,結果於玻璃積層體SB中未見玻璃基板及暫時支持體之分離、或聚醯亞胺樹脂層之發泡或白化等外觀上之變化。 Then, the glass laminate SB is subjected to a heat treatment performed at a time when the electronic device member is placed on the glass substrate, that is, a heat treatment at 450 ° C for one hour. After the heat treatment, the film was cooled to room temperature. As a result, no separation of the glass substrate and the temporary support, or foaming or whitening of the polyimide film layer was observed in the glass laminate SB.

其後,使用玻璃積層體SB代替玻璃積層體SA,除此以外,按照與實施例1相同之順序去除暫時支持體。 Thereafter, the temporary support was removed in the same manner as in Example 1 except that the glass laminate SB was used instead of the glass laminate SA.

根據上述結果確認,玻璃基板與聚醯亞胺樹脂層之界面之剝離強度(x)高於聚醯亞胺樹脂層與暫時支持體之界面之剝離強度(y)。 From the above results, it was confirmed that the peel strength (x) at the interface between the glass substrate and the polyimide film layer was higher than the peel strength (y) at the interface between the polyimide film layer and the temporary support.

如上述實施例1及2所示,根據本發明之方法,可不於聚醯亞胺樹脂層與玻璃基板之間產生發泡而製造包含表面之平坦性優異之玻璃基板的玻璃積層體。又,於對玻璃積層體實施作為製造電子裝置用構件之條件之450℃、1小時之加熱處理後,可於暫時支持體與聚醯亞胺樹脂層之界面進行剝離,而可將包含聚醯亞胺樹脂層及玻璃基板之積層體自暫時支持體分離。根據該等結果確認,聚醯亞胺樹脂層與玻璃基板之間之密接性優異。又,明確,即便於藉由特定之加熱處理而於玻璃基板上製造電子裝置後,亦可自附有構件之玻璃積層體分離暫時支持體。 As shown in the above-described first and second embodiments, according to the method of the present invention, it is possible to produce a glass laminate including a glass substrate having excellent surface flatness without causing foaming between the polyimide film and the glass substrate. In addition, after the heat treatment at 450 ° C for one hour as a condition for manufacturing a member for an electronic device, the glass laminate can be peeled off at the interface between the temporary support and the polyimide resin layer, and the polyfluorene can be contained. The laminate of the imide resin layer and the glass substrate is separated from the temporary support. From these results, it was confirmed that the polyimide and the glass substrate were excellent in adhesion. Further, it is clear that even after the electronic device is fabricated on the glass substrate by a specific heat treatment, the temporary support can be separated from the glass laminate with the member attached thereto.

(密接性評價) (Adhesion evaluation)

於實施例1及2中,藉由比較剝離暫時支持體時所產生之隆起缺陷(聚醯亞胺樹脂層之密接不良)之有無,而評價聚醯亞胺樹脂層對於玻璃基板之密接性。再者,所謂「隆起缺陷」,意指於剝離暫時支持體時聚醯亞胺樹脂層之一部分被暫時支持體拉伸而聚醯亞胺樹脂層自玻璃基板局部地剝離之缺陷。 In Examples 1 and 2, the adhesion of the polyimide film to the glass substrate was evaluated by comparing the presence or absence of the ridge defect (adhesion defect of the polyimide film) when the temporary support was peeled off. In addition, the "bumping defect" means a defect in which one portion of the polyimide film layer is stretched by the temporary support and the polyimide film layer is partially peeled off from the glass substrate when the temporary support is peeled off.

作為密接性評價之方法,於實施例1及2中分別準備5個玻璃積層體,對於各樣品剝離暫時支持體,進行隆起缺陷之觀察。再者,作為隆起缺陷之觀察方法,於螢光燈下以目視確認有無1mmΦ以上之大小之缺陷,將有缺陷之情形設為「×」,將無缺陷之情形設為「○」。 As a method of evaluation of adhesion, five glass laminates were prepared in each of Examples 1 and 2, and the temporary support was peeled off from each sample, and the bump defect was observed. In addition, as a method of observing the ridge defect, it is visually confirmed whether or not there is a defect having a size of 1 mmφ or more under a fluorescent lamp, and the case of the defect is "x", and the case of no defect is "○".

於實施例1之5個樣品均無「隆起缺陷」。另一方面,關於實施例2之5個樣品中之2個,雖然可剝離暫時支持體,但亦發現隆起缺陷。 None of the five samples of Example 1 had "bumping defects". On the other hand, with respect to two of the five samples of Example 2, although the temporary support was peeled off, a bulging defect was also found.

根據該等結果確認,實施例1之態樣(相當於上述態樣X)與實施例2之態樣(相當於上述態樣Y)相比,玻璃基板與聚醯亞胺樹脂層之密接性更優異。 From these results, it was confirmed that the aspect of the first embodiment (corresponding to the above-described aspect X) is inferior to the aspect of the second embodiment (corresponding to the above-described aspect Y), and the adhesion between the glass substrate and the polyimide film layer. More excellent.

再者,確認,於使用藉由以下之順序而獲得之實施過脫模處理之暫時支持體作為實施例1及2中所使用之暫時支持體之情形時,亦可獲得所需之效果。 Further, it was confirmed that the desired effect can be obtained when the temporary support subjected to the release treatment obtained by the following procedure is used as the temporary support used in Examples 1 and 2.

(脫模處理) (release treatment)

使二甲基聚矽氧烷與包含無鹼硼矽酸玻璃之玻璃板之表面接觸,並實施350℃下之燒接處理。 The dimethylpolysiloxane was brought into contact with the surface of the glass plate containing the alkali-free borosilicate glass, and subjected to a heat-sealing treatment at 350 °C.

<比較例1> <Comparative Example 1>

利用模嘴塗佈機於實施過清洗之暫時支持體上塗佈上述溶液A,其後於90℃下實施10分鐘乾燥處理,進而於150℃下實施10分鐘乾燥處理,而於暫時支持體上形成包含聚醯胺酸之塗膜。 The solution A was applied onto the temporarily supported support by a die coater, and then dried at 90 ° C for 10 minutes, and further dried at 150 ° C for 10 minutes, and on a temporary support. A coating film containing polylysine is formed.

其次,利用模嘴塗佈機於塗膜表面上塗佈上述溶液B,其後於120℃下實施10分鐘乾燥處理,而獲得賦予有矽烷偶合劑之塗膜。 Next, the solution B was applied onto the surface of the coating film by a die coater, and then dried at 120 ° C for 10 minutes to obtain a coating film to which a decane coupling agent was applied.

其次,將具有較塗膜之外形尺寸小之外形尺寸的玻璃基板以於塗膜上留有不與玻璃基板接觸之周緣區域之方式,將基板彼此之中心位置對準而積層。 Next, a glass substrate having a shape smaller than the outer diameter of the coating film is placed so as to have a peripheral region which is not in contact with the glass substrate, and the center positions of the substrates are aligned and laminated.

其後,對塗膜於氮氣下以350℃實施1小時加熱處理,而進行聚醯胺酸之閉環反應。 Thereafter, the coating film was subjected to heat treatment at 350 ° C for 1 hour under nitrogen gas to carry out a ring closure reaction of polyglycine.

於加熱處理後,於聚醯亞胺樹脂層與玻璃基板之間產生無數個發泡,而玻璃基板表面之平坦性受到損害。 After the heat treatment, innumerable foaming occurs between the polyimide layer and the glass substrate, and the flatness of the surface of the glass substrate is impaired.

上述比較例1之形態相當於專利文獻2之形態,利用該方法無法製造特定之玻璃積層體及電子裝置。 The form of the above Comparative Example 1 corresponds to the form of Patent Document 2, and a specific glass laminate and an electronic device cannot be manufactured by this method.

<實施例4> <Example 4>

於本例中,使用實施例1中所獲得之玻璃積層體SA而製造OLED。 In this example, an OLED was produced using the glass laminate SA obtained in Example 1.

首先,於玻璃積層體SA中之玻璃基板之第2主面上,藉由電漿CVD法使氮化矽、氧化矽、非晶矽依序成膜。繼而,藉由離子摻雜裝 置將低濃度之硼注入至非晶矽層中,並於氮氣環境下進行加熱處理而進行脫氫處理。繼而,利用雷射退火裝置進行非晶矽層之結晶化處理。繼而,藉由使用光微影法之蝕刻及離子摻雜裝置,將低濃度之磷注入至非晶矽層中,而形成N型及P型之TFT區域。繼而,於玻璃基板之第2主面側,利用電漿CVD法成膜氧化矽膜而形成閘極絕緣膜,此後,利用濺鍍法使鉬成膜,並藉由使用光微影法之蝕刻而形成閘極電極。繼而,藉由光微影法及離子摻雜裝置,將高濃度之硼與磷注入至N型、P型各自之所需之區域中,而形成源極區域及汲極區域。繼而,於玻璃基板之第2主面側,藉由利用電漿CVD法所進行之氧化矽之成膜而形成層間絕緣膜,藉由濺鍍法使鋁成膜並藉由使用光微影法之蝕刻而形成TFT電極。繼而,於氫氣環境下進行加熱處理而進行氫化處理,此後,藉由利用電漿CVD法所進行之氮矽之成膜而形成鈍化層。繼而,於玻璃基板之第2主面側塗佈紫外線硬化性樹脂,藉由光微影法而形成平坦化層及接觸孔。繼而,藉由濺鍍法使氧化銦錫成膜,並藉由使用光微影法之蝕刻而形成像素電極。 First, tantalum nitride, ruthenium oxide, and amorphous ruthenium are sequentially formed on the second main surface of the glass substrate in the glass laminate SA by a plasma CVD method. Ion doping A low concentration of boron is injected into the amorphous germanium layer, and subjected to heat treatment in a nitrogen atmosphere to carry out dehydrogenation treatment. Then, the crystallization treatment of the amorphous germanium layer is performed by a laser annealing device. Then, by using a photolithography etching and ion doping apparatus, a low concentration of phosphorus is implanted into the amorphous germanium layer to form N-type and P-type TFT regions. Then, a ruthenium oxide film is formed on the second main surface side of the glass substrate by a plasma CVD method to form a gate insulating film, and thereafter, molybdenum is formed by sputtering, and etching by photolithography is performed. A gate electrode is formed. Then, by using a photolithography method and an ion doping apparatus, a high concentration of boron and phosphorus is implanted into a desired region of each of the N-type and the P-type to form a source region and a drain region. Then, on the second main surface side of the glass substrate, an interlayer insulating film is formed by film formation of ruthenium oxide by a plasma CVD method, and aluminum is formed by sputtering to form a film by using a photolithography method. The etching is performed to form a TFT electrode. Then, the heat treatment was carried out in a hydrogen atmosphere to carry out a hydrogenation treatment, and thereafter, a passivation layer was formed by film formation of nitrogen argon by a plasma CVD method. Then, an ultraviolet curable resin is applied to the second main surface side of the glass substrate, and a planarization layer and a contact hole are formed by photolithography. Then, indium tin oxide is formed into a film by sputtering, and a pixel electrode is formed by etching using photolithography.

繼而,利用蒸鍍法於玻璃基板之第2主面側依序成膜作為電洞注入層之4,4',4"-三(3-甲基苯基苯基胺基)三苯基胺、作為電洞傳輸層之雙[(N-萘基)-N-苯基]聯苯胺、作為發光層之於8-羥基喹啉鋁錯合物(Alq3)中混合有40體積%之2,6-雙[4-[N-(4-甲氧基苯基)-N-苯基]胺基苯乙烯基]萘-1,5-二腈(BSN-BCN)而成者、及作為電子傳輸層之Alq3。繼而,利用濺鍍法使鋁成膜,並藉由使用光微影法之蝕刻而形成對向電極。繼而,於玻璃基板之第2主面側,經由紫外線硬化型之接著層而貼合另一片玻璃基板進行密封。藉由上述順序而於玻璃基板上形成有機EL構造體。於玻璃基板上具有有機EL構造體之玻璃積層體S1(以下稱為面板A)係本發明之附有構件之玻璃積層體。 Then, 4,4',4"-tris(3-methylphenylphenylamino)triphenylamine was formed as a hole injection layer on the second main surface side of the glass substrate by vapor deposition. , as a hole transport layer, bis[(N-naphthyl)-N-phenyl]benzidine, as a light-emitting layer in an 8-hydroxyquinoline aluminum complex (Alq 3 ), mixed with 40% by volume , 6-bis[4-[N-(4-methoxyphenyl)-N-phenyl]aminostyryl]naphthalene-1,5-dicarbonitrile (BSN-BCN), and as Alq 3 of the electron transport layer. Then, aluminum is formed into a film by sputtering, and the counter electrode is formed by etching by photolithography. Then, on the second main surface side of the glass substrate, the ultraviolet curing type is formed. The other glass substrate is bonded to the next layer and sealed. The organic EL structure is formed on the glass substrate by the above procedure. The glass laminate S1 (hereinafter referred to as panel A) having the organic EL structure on the glass substrate is used. A glass laminate with a member of the present invention.

繼而,使面板A之密封體側真空吸附於壓盤之後,將厚度0.1mm 之不鏽鋼製刀具插入至面板A之角部之暫時支持體與聚醯亞胺樹脂層之界面,而對暫時支持體與聚醯亞胺樹脂層之界面賦予剝離之開端。然後,利用真空吸附墊吸附面板A之暫時支持體表面後,使吸附墊上升。此處,刀具之插入係一面自離子化器(Keyence公司製造)向該界面吹送去靜電流體一面進行。繼而,一面自離子化器繼續向所形成之空隙吹送去靜電流體,且一面將水注入剝離前沿,一面提拉真空吸附墊。其結果為,可剝離暫時支持體,而獲得電子裝置。 Then, after the sealing body side of the panel A is vacuum-adsorbed to the pressure plate, the thickness is 0.1 mm. The stainless steel cutter is inserted into the interface between the temporary support of the corner portion of the panel A and the polyimide resin layer, and the opening of the interface between the temporary support and the polyimide resin layer is given. Then, the surface of the temporary support of the panel A is adsorbed by the vacuum adsorption pad, and then the adsorption pad is raised. Here, the inserting of the cutter is performed while the electrostatic fluid is blown from the ionizer (manufactured by Keyence Corporation) to the interface. Then, the electrostatic adsorption fluid is continuously blown from the ionizer to the formed void, and the vacuum adsorption pad is pulled while the water is injected into the peeling front. As a result, the temporary support can be peeled off and an electronic device can be obtained.

繼而,使用雷射切割或劃線-斷裂法將分離之玻璃基板切斷,而分割為複數個單元,此後,組裝形成有有機EL構造體之玻璃基板與對向基板,實施模組形成步驟而製作OLED。如此獲得之OLED於特性上未產生問題。 Then, the separated glass substrate is cut by a laser cutting or scribing-fracture method, and is divided into a plurality of cells. Thereafter, the glass substrate and the counter substrate which are formed with the organic EL structure are assembled, and the module forming step is performed. Making OLEDs. The OLED thus obtained has no problem in characteristics.

再者,製造上述電子裝置時之加熱處理之溫度最大為450℃。 Further, the temperature of the heat treatment in the manufacture of the above electronic device is at most 450 °C.

已參照特定之實施態樣而詳細地說明本發明,但從業者明瞭可不脫離本發明之精神及範圍而施加各種變更或修正。 The present invention has been described in detail with reference to the specific embodiments thereof. It is understood that various changes and modifications may be made without departing from the spirit and scope of the invention.

本申請案係基於2014年8月1日提出申請之日本專利申請案2014-158116者,其內容作為參照而併入本文。 The present application is based on Japanese Patent Application No. 2014-158116, filed on Jan.

Claims (8)

一種電子裝置之製造方法,其具備:步驟(1),其係於暫時支持體上形成與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層;步驟(2),其係於上述聚醯亞胺樹脂層上配置厚度0.2mm以下之玻璃基板,而獲得玻璃積層體;步驟(3),其係於上述玻璃基板之表面上配置電子裝置用構件,而獲得附有構件之玻璃積層體;及步驟(4),其係自上述附有構件之玻璃積層體去除上述暫時支持體,而獲得包括上述聚醯亞胺樹脂層、上述玻璃基板及上述電子裝置用構件之電子裝置。 A method for producing an electronic device, comprising: a step (1) of forming a polyimine resin layer treated with a decane coupling agent on a surface of a temporary support opposite to the side of the temporary support; a glass substrate having a thickness of 0.2 mm or less disposed on the polyimide layer of the polyimide to obtain a glass laminate; and a step (3) of disposing a member for an electronic device on a surface of the glass substrate a glass laminate with a member; and a step (4) of removing the temporary support from the glass laminate with the member, and obtaining the polyimide layer, the glass substrate, and the electronic device The electronic device of the component. 如請求項1之電子裝置之製造方法,其中上述步驟(1)具備:步驟(A),其係於暫時支持體上塗佈包含聚醯胺酸之組合物,而形成包含聚醯胺酸之塗膜;步驟(B),其係對上述塗膜表面上賦予矽烷偶合劑;及步驟(C),其係對上述塗膜實施加熱處理,而獲得與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 The method of manufacturing an electronic device according to claim 1, wherein the step (1) comprises: a step (A) of applying a composition comprising polylysine to a temporary support to form a polyglycine-containing composition. a coating film; a step (B) of applying a decane coupling agent to the surface of the coating film; and a step (C) of subjecting the coating film to heat treatment to obtain a surface opposite to the temporary support side A layer of a polyimide resin treated with a decane coupling agent. 如請求項1之電子裝置之製造方法,其中上述步驟(1)具備:步驟(D),其係於暫時支持體上形成聚醯亞胺樹脂層;及步驟(E),其係對上述聚醯亞胺樹脂層表面上賦予矽烷偶合劑,而獲得與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 The method of manufacturing the electronic device of claim 1, wherein the step (1) comprises: a step (D) of forming a polyimide layer on the temporary support; and a step (E) of A decane coupling agent is applied to the surface of the quinone imine resin layer, and a polyimide quinone resin layer treated with a decane coupling agent on the surface opposite to the side of the temporary support is obtained. 如請求項1至3中任一項之電子裝置之製造方法,其中上述步驟(2)係如下步驟(2'),該步驟(2')係將具有較上述聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於上述聚醯亞胺樹脂層 上留有不與上述玻璃基板接觸之周緣區域之方式積層於上述聚醯亞胺樹脂層上,且於上述步驟(2)與上述步驟(3)之間進而具備如下步驟(5),該步驟(5)係沿上述玻璃基板之外周緣,將上述玻璃積層體中之上述聚醯亞胺樹脂層及上述暫時支持體切斷。 The method of manufacturing an electronic device according to any one of claims 1 to 3, wherein the step (2) is the following step (2'), the step (2') having a shape other than the polyimine resin layer a small-sized outer-sized glass substrate for the above-mentioned polyimide film layer The layered on the polyimide layer is laminated on the polyimide substrate without leaving a peripheral region in contact with the glass substrate, and further includes the following step (5) between the step (2) and the step (3). (5) The polyimine resin layer and the temporary support in the glass laminate are cut along the outer periphery of the glass substrate. 一種玻璃積層體之製造方法,該玻璃積層體依序具有暫時支持體、與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層、及玻璃基板,且用於在上述玻璃基板之表面上配置電子裝置用構件,其後,將上述暫時支持體去除,而獲得包括上述聚醯亞胺樹脂層、上述玻璃基板及上述電子裝置用構件之電子裝置,並且該玻璃積層體之製造方法具備:步驟(1),其係於暫時支持體上形成與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層;及步驟(2),其係於上述聚醯亞胺樹脂層上配置厚度0.2mm以下之玻璃基板,而獲得上述玻璃積層體。 A method for producing a glass laminate, which comprises a temporary support, a polyimide layer treated with a decane coupling agent on a surface opposite to the side of the temporary support, and a glass substrate, and is used for The electronic device member is disposed on the surface of the glass substrate, and then the temporary support is removed to obtain an electronic device including the polyimide layer, the glass substrate, and the electronic device member, and the glass The method for producing a laminate includes the step (1) of forming a polyimine resin layer treated with a decane coupling agent on a surface of the temporary support opposite to the side of the temporary support; and the step (2), A glass substrate having a thickness of 0.2 mm or less is placed on the polyimide layer of the polyimide to obtain the glass laminate. 如請求項5之玻璃積層體之製造方法,其中上述步驟(1)具備:步驟(A),其係於暫時支持體上塗佈包含聚醯胺酸之組合物,而形成包含聚醯胺酸之塗膜;步驟(B),其係對上述塗膜表面上賦予矽烷偶合劑;及步驟(C),其係對上述塗膜實施加熱處理,而獲得與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞胺樹脂層。 The method for producing a glass laminate according to claim 5, wherein the step (1) comprises: a step (A) of coating a composition comprising polylysine on a temporary support to form a poly-proline a coating film; a step (B) of applying a decane coupling agent to the surface of the coating film; and a step (C) of subjecting the coating film to heat treatment to obtain a side opposite to the temporary support side A layer of a polyimide resin treated with a decane coupling agent. 如請求項5之玻璃積層體之製造方法,其中上述步驟(1)具備:步驟(D),其係於暫時支持體上形成聚醯亞胺樹脂層;及步驟(E),其係對上述聚醯亞胺樹脂層表面上賦予矽烷偶合劑,而獲得與上述暫時支持體側為相反側之表面經矽烷偶合劑處理之聚醯亞 胺樹脂層。 The method for producing a glass laminate according to claim 5, wherein the step (1) comprises: a step (D) of forming a polyimide layer on the temporary support; and a step (E) of the above The decane coupling agent is imparted on the surface of the polyimide resin layer, and the surface of the opposite side of the temporary support side is obtained by a decane coupling agent. Amine resin layer. 如請求項5至7中任一項之玻璃積層體之製造方法,其中上述步驟(2)係如下步驟(2'),該步驟(2')係將具有較上述聚醯亞胺樹脂層之外形尺寸小之外形尺寸的玻璃基板以於上述聚醯亞胺樹脂層上留有不與上述玻璃基板接觸之周緣區域之方式積層於上述聚醯亞胺樹脂層上,且於上述步驟(2)後進而具備如下步驟(5),該步驟(5)係沿上述玻璃基板之外周緣,將上述玻璃積層體中之上述聚醯亞胺樹脂層及上述暫時支持體切斷。 The method for producing a glass laminate according to any one of claims 5 to 7, wherein the step (2) is the following step (2'), the step (2') having a layer of the polyimine resin a glass substrate having a small outer size and a size is laminated on the polyimide layer on the polyimide layer to leave a peripheral region not in contact with the glass substrate, and in the above step (2) Further, the method further includes the step (5) of cutting the polyimine resin layer and the temporary support in the glass laminate along the outer periphery of the glass substrate.
TW104124584A 2014-08-01 2015-07-29 Method for manufacturing electronic device, method for manufacturing glass laminate TWI655089B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014158116A JP2016035832A (en) 2014-08-01 2014-08-01 Method of manufacturing electronic device, method of manufacturing glass laminate
JP2014-158116 2014-08-01

Publications (2)

Publication Number Publication Date
TW201609377A true TW201609377A (en) 2016-03-16
TWI655089B TWI655089B (en) 2019-04-01

Family

ID=55242187

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104124584A TWI655089B (en) 2014-08-01 2015-07-29 Method for manufacturing electronic device, method for manufacturing glass laminate

Country Status (4)

Country Link
JP (1) JP2016035832A (en)
KR (1) KR20160016618A (en)
CN (1) CN105313413A (en)
TW (1) TWI655089B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11603328B2 (en) 2017-11-20 2023-03-14 Corning Incorporated Method for increasing fracture toughness of glass ribbons

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016210023A (en) * 2015-04-30 2016-12-15 日本電気硝子株式会社 Method for manufacturing flexible laminate
KR20200059282A (en) * 2017-10-04 2020-05-28 쌩-고벵 글래스 프랑스 Composite glass plate with chamfered through holes
KR102025724B1 (en) * 2017-11-06 2019-09-26 한국표준과학연구원 Method of a releasing target layer using a two-dimensional exfoliation layer
JPWO2019163575A1 (en) * 2018-02-23 2021-01-14 富士フイルム株式会社 Manufacturing method of joint, temporary fixing member, and laminate
JP2020027830A (en) * 2018-08-09 2020-02-20 Tdk株式会社 Method of manufacturing electronic component, and, method of forming conductor layer
WO2020044405A1 (en) * 2018-08-27 2020-03-05 シャープ株式会社 Method for manufacturing display device, and apparatus for manufacturing display device
JP7103163B2 (en) * 2018-10-31 2022-07-20 Agc株式会社 Laminates, continuity check methods, and electronic device manufacturing methods
JP7115511B2 (en) * 2019-06-06 2022-08-09 Agc株式会社 LAMINATED SUBSTRATE, ELECTRONIC DEVICE MANUFACTURING METHOD, AND LAMINATED SUBSTRATE MANUFACTURING METHOD
FR3099152B1 (en) * 2019-07-26 2021-07-23 Saint Gobain Method and system for generating a cutting plan for a complex glass product

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2342801C3 (en) * 1973-08-24 1979-10-04 Ibm Deutschland Gmbh, 7000 Stuttgart Process for coating oxidized, inorganic substrates with polyimide
JPS5855489B2 (en) * 1977-10-07 1983-12-09 株式会社日立製作所 Manufacturing method of liquid crystal display cell
KR101319170B1 (en) * 2008-12-19 2013-10-16 도요보 가부시키가이샤 Laminated body, manufacturing method thereof, and laminated circuit board
KR101723254B1 (en) * 2009-09-08 2017-04-04 도요보 가부시키가이샤 Glass/resin laminate, and electronic device using same
CN103875309A (en) * 2011-10-12 2014-06-18 旭硝子株式会社 Method for manufacturing electronic device with adherent resin layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11603328B2 (en) 2017-11-20 2023-03-14 Corning Incorporated Method for increasing fracture toughness of glass ribbons

Also Published As

Publication number Publication date
KR20160016618A (en) 2016-02-15
CN105313413A (en) 2016-02-10
JP2016035832A (en) 2016-03-17
TWI655089B (en) 2019-04-01

Similar Documents

Publication Publication Date Title
TWI655089B (en) Method for manufacturing electronic device, method for manufacturing glass laminate
KR102180887B1 (en) Flexible base material, and manufacturing method therefor, glass laminate, and manufacturing method therefor, and manufacturing method for electronic device
TWI649192B (en) Glass laminate, method of manufacturing same, and method of manufacturing electronic component
JP5924344B2 (en) LAMINATE, METHOD FOR PRODUCING LAMINATE, AND METHOD FOR PRODUCING GLASS SUBSTRATE WITH ELECTRONIC DEVICE MEMBER
TWI580566B (en) A manufacturing method of an electronic device, and a method for manufacturing a glass laminate
TWI655092B (en) Glass laminate, and method of manufacturing electronic device
WO2014192560A1 (en) Resin-layer-equipped support substrate and method for producing same, glass laminate and method for producing same, and method for producing electronic device
TWI596006B (en) A glass laminate, a method of manufacturing the same, and a supporting substrate of an agglomerated silicone resin layer
WO2015146920A1 (en) Glass laminate
TWI613073B (en) Glass laminate, method of manufacturing the same, and support substrate with oxy-resin layer
KR102526047B1 (en) Glass laminate and method for producing same
TW201420335A (en) Glass laminate and manufacturing method for same, and support substrate having silicone resin layer attached thereto and manufacturing method for same
TW201420640A (en) Organopolysiloxane, manufacturing method for organopolysiloxane, crosslinked organopolysiloxane, and coating composition
WO2015166880A1 (en) Glass laminate, glass substrate with resin layer, support base material with resin layer
TW201518083A (en) Electronic device manufacturing method
JP2015182450A (en) glass laminate