TW201547075A - Organic thin-film transistor and organic electronic device - Google Patents

Organic thin-film transistor and organic electronic device Download PDF

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TW201547075A
TW201547075A TW104106176A TW104106176A TW201547075A TW 201547075 A TW201547075 A TW 201547075A TW 104106176 A TW104106176 A TW 104106176A TW 104106176 A TW104106176 A TW 104106176A TW 201547075 A TW201547075 A TW 201547075A
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film transistor
thin film
organic
organic thin
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Shizuo Tokito
Kenjiro Fukuda
Satoshi Hamura
Takashi Fukuda
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Tosoh Corp
Nat Univ Corp Yamagata Univ
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • H10K85/657Polycyclic condensed heteroaromatic hydrocarbons
    • H10K85/6576Polycyclic condensed heteroaromatic hydrocarbons comprising only sulfur in the heteroaromatic polycondensed ring system, e.g. benzothiophene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/464Lateral top-gate IGFETs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/466Lateral bottom-gate IGFETs comprising only a single gate

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  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Thin Film Transistor (AREA)

Abstract

This invention provides an organic thin-film transistor that exhibits low property variability and high carrier mobility, a high-performance differential-amplifier circuit using said thin-film transistor, and an organic electronic device. This organic thin-film transistor, which has a gate electrode, a gate-insulating film, a source electrode, a drain electrode, and an organic semiconductor film, is characterized in that the organic semiconductor film comprises an organic semiconductor that can be represented by formula (1), the surface energy between said organic semiconductor and the material used for the gate-insulating film is less than or equal to 2.0 mJ/m2, and the organic semiconductor film is created via a printing process. (R1 through R6 each independently represent a hydrogen atom, a C1-20 alkyl group, a group that can be represented by formula (2), or the like.) (R7 represents a C3-10 cycloalkyl group or the like, and Y represents a C1-6 divalent alkyl group or the like.).

Description

有機薄膜電晶體及有機電子裝置 Organic thin film transistor and organic electronic device

本發明係關於有機薄膜電晶體及有機電子裝置, 詳言之係關於載子遷移率高,限值電壓等的性能的誤差小的有機薄膜電晶體及有機電子裝置。 The present invention relates to an organic thin film transistor and an organic electronic device, More specifically, it relates to an organic thin film transistor and an organic electronic device having a small carrier mobility and a small error in performance such as a limit voltage.

以有機薄膜電晶體代表的有機半導體裝置,近幾 年由於具有節能、低成本及軟性等的無機半導體裝置所沒有的特點而受到注目。 Organic semiconductor device represented by organic thin film transistor, recent In recent years, attention has been paid to features not found in inorganic semiconductor devices such as energy saving, low cost, and softness.

該有機半導體裝置,係由有機半導體層、基板、絕緣層、電極等的幾種材料所構成,其中擔任電荷載子遷移的有機半導體層,具有該裝置的中心的腳色。 The organic semiconductor device is composed of several materials such as an organic semiconductor layer, a substrate, an insulating layer, an electrode, and the like, and an organic semiconductor layer that functions as a charge carrier has a color at the center of the device.

然而,有機半導體裝置的性能,由於係由構成該 有機半導體層的有機材料的載子遷移率左右,故期望可提供高載子遷移率的有機材料的出現。 However, the performance of the organic semiconductor device is due to Since the organic material of the organic semiconductor layer has a carrier mobility of about, it is desirable to provide an organic material capable of providing high carrier mobility.

製作有機半導體層的方法,已知在高溫真空下,使有機材料氣化而實施的真空蒸鍍法、將有機材料以適合的溶劑溶解塗佈該溶液的塗佈法等的方法。塗佈由於可不使用高溫高真空的條件使用印刷技術亦可實施,故被認為是經濟性較佳的製程,而期望塗層性高,載子遷移率優良的有機半導體層。 As a method of producing an organic semiconductor layer, a vacuum vapor deposition method in which an organic material is vaporized under a high-temperature vacuum, a coating method in which an organic material is dissolved in a suitable solvent, and the like is applied. Since coating can be carried out by using a printing technique without using a high-temperature and high-vacuum condition, it is considered to be an economically preferable process, and an organic semiconductor layer having high coating property and excellent carrier mobility is desired.

此外,先前已知的印刷型有機薄膜電晶體,面臨 性能誤差大的重要的課題(參照例如,專利文獻1、專利文獻2),而期望性能的誤差小的印刷型有機薄膜電晶體。一般載子遷移率與性能的誤差處於折衷的關係,結晶性高的低分子系半導體在容易得到較高的遷移率的另一方面有性能誤差大的趨勢,而高分子半導體則有相反的趨勢。 In addition, previously known printed organic thin film transistors are faced An important problem is that the performance error is large (see, for example, Patent Document 1 and Patent Document 2), and a printed organic thin film transistor having a small performance error is desired. The general carrier mobility and performance error are in a trade-off relationship. Low-molecular-based semiconductors with high crystallinity tend to have high performance errors on the other hand, and polymer semiconductors have opposite trends. .

已知有使用特定的低分子系半導體,而在有機薄 膜電晶體的的諸性能之中,可使載子遷移率的誤差變小的印刷型有機薄膜電晶體(參照例如,專利文獻3)。但是,專利文獻3所述的印刷型有機薄膜電晶體,在藉由印刷形成有機半導體膜之後,需要藉由熱等的外部刺激改變分子架構,故有製程的限制。此外,於專利文獻3,並沒有記載關於作為有機薄膜電晶體的性能很重要的限值電壓。 It is known to use specific low molecular semiconductors, but in organic thin Among the properties of the film transistor, a printing type organic thin film transistor having a small carrier mobility error can be obtained (see, for example, Patent Document 3). However, in the printed organic thin film transistor described in Patent Document 3, after the organic semiconductor film is formed by printing, it is necessary to change the molecular structure by external stimulation such as heat, and thus there is a limitation in the process. Further, Patent Document 3 does not describe a limit voltage which is important as a performance of an organic thin film transistor.

實現包含高的載子遷移率與限值電壓的諸性能的 誤差小的印刷型有TFT,在裝置的應用上不可缺少。 Achieve performance with high carrier mobility and limit voltage The printed type with small error is TFT, which is indispensable for the application of the device.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

專利文獻1:日本特開2011-233724號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2011-233724

專利文獻2;日本特開2008-066439號公報 Patent Document 2; Japanese Patent Laid-Open Publication No. 2008-066439

專利文獻3:日本特開2013-201363號公報 Patent Document 3: Japanese Laid-Open Patent Publication No. 2013-201363

本發明係有鑑於上述課題而完成者,其目的係在於提供載子遷移率高,限值電壓等性能的誤差小的有機薄膜電 晶體、及使用該有機薄膜電晶體的有機薄膜電晶體陣列、電子機器。 The present invention has been made in view of the above problems, and an object thereof is to provide an organic thin film electrode having a high carrier mobility and a small error in performance such as a limit voltage. A crystal, an organic thin film transistor array using the organic thin film transistor, and an electronic device.

發明者們為解決上述課題而專心研究的結果發現,可形成載子遷移率高且限值電壓等性能的誤差小的有機薄膜電晶體而達至完成本發明。 As a result of intensive studies to solve the above problems, the inventors have found that an organic thin film transistor having a high carrier mobility and a small error in performance such as a limit voltage can be formed to complete the present invention.

即,本發明係關於一種有機薄膜電晶體,其係具有閘極電極、閘極絕緣膜、源極電極、汲極電極及有機半導體膜的有機薄膜電晶體,其特徵在於:該有機半導體膜,包含以通式(1)所表示之有機半導體,使用於該閘極絕緣膜的材料與該有機半導體之間的界面能為2.0mJ/m2以下,且該有機半導體膜係以印刷製程製膜而得: That is, the present invention relates to an organic thin film transistor which is an organic thin film transistor having a gate electrode, a gate insulating film, a source electrode, a drain electrode, and an organic semiconductor film, characterized in that the organic semiconductor film, In the organic semiconductor represented by the general formula (1), the interface energy between the material used for the gate insulating film and the organic semiconductor is 2.0 mJ/m 2 or less, and the organic semiconductor film is formed by a printing process. And got:

式中,R1~R6係分別獨立地表示,氫原子、碳數1~20之烷基、碳數2~20之烯基、碳數2~20之炔基、碳數1~20之烷氧基、碳數1~20之烷硫基、碳數1~20之鹵化烷基、碳數3~10之環烷基、碳數6~14之芳基、3~12員環之環雜烷基、5~14員環之雜芳基,或以通式(2)表示之基:[化2]-Y-R7 (2) In the formula, R 1 to R 6 are each independently represented by a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, and a carbon number of 1 to 20; Alkoxy group, alkylthio group having 1 to 20 carbon atoms, halogenated alkyl group having 1 to 20 carbon atoms, cycloalkyl group having 3 to 10 carbon atoms, aryl group having 6 to 14 carbon atoms, ring of 3 to 12 member rings a heteroalkyl group, a heteroaryl group of 5 to 14 membered rings, or a group represented by the formula (2): [Chemical 2]-YR 7 (2)

式中,R7係表示碳數3~10之環烷基、碳數6~14之芳基、 3~12員環之環雜烷基、或5~14員環之雜芳基,Y係表示碳數1~6之2價烷基、或碳數1~6之2價鹵化烷基。 In the formula, R 7 represents a cycloalkyl group having 3 to 10 carbon atoms, an aryl group having 6 to 14 carbon atoms, a cycloheteroalkyl group having 3 to 12 member rings, or a heteroaryl group having 5 to 14 member rings, and a Y system. It represents a divalent alkyl group having 1 to 6 carbon atoms or a divalent halogenated alkyl group having 1 to 6 carbon atoms.

此外,本發明係關於一種有機薄膜電晶體,其特 徵在於:上述印刷製程,係選自由點膠印刷、噴墨印刷、膠版印刷、凸版印刷、凹版印刷、照相凹版印刷、狹縫塗佈印刷或網版印刷之印刷製程。 Furthermore, the present invention relates to an organic thin film transistor, which is characterized by The above printing process is selected from the printing process of dispensing printing, inkjet printing, offset printing, letterpress printing, gravure printing, gravure printing, slit coating printing or screen printing.

此外,本發明係關於使用上述有機薄膜電晶體而得之有機薄膜電晶體陣列、差動增幅電路、使用該差動增幅電路的有機電子裝置。 Further, the present invention relates to an organic thin film transistor array obtained by using the above organic thin film transistor, a differential amplification circuit, and an organic electronic device using the differential amplification circuit.

根據本發明,可提供載子遷移率高且限值電壓等性能的誤差小的有機薄膜電晶體。此外,藉由使用本有機薄膜電晶體,可形成輸出輸入差小的理想的印刷型有機薄膜電晶體陣列,特別是顯示理想的輸入輸出特性的差動增幅電路,而可應用於各種傳感器。 According to the present invention, it is possible to provide an organic thin film transistor having a high carrier mobility and a small error in performance such as a limit voltage. Further, by using the organic thin film transistor, it is possible to form an ideal printed organic thin film transistor array having a small output-input difference, in particular, a differential amplification circuit which exhibits an ideal input/output characteristic, and can be applied to various sensors.

(A)‧‧‧底閘極-頂接觸型有機薄膜電晶體 (A) ‧‧‧Bottom gate-top contact organic thin film transistor

(B)‧‧‧底門底接觸型有機薄膜電晶體 (B) ‧‧‧ bottom-bottom contact type organic thin film transistor

(C)‧‧‧首位門首位接觸型有機薄膜電晶體 (C) ‧‧‧ First door contact organic thin film transistor

(D)‧‧‧首位門底接觸型有機薄膜電晶體 (D)‧‧‧The first door-bottom contact type organic thin film transistor

1‧‧‧有機半導體層 1‧‧‧Organic semiconductor layer

2‧‧‧基板 2‧‧‧Substrate

3‧‧‧閘極電極 3‧‧‧gate electrode

4‧‧‧閘極絕緣層 4‧‧‧ gate insulation

5‧‧‧源極電極 5‧‧‧Source electrode

6‧‧‧汲極電極 6‧‧‧汲electrode

第1圖係表示有機薄膜電晶體之剖面形狀的構造之圖。 Fig. 1 is a view showing the structure of a cross-sectional shape of an organic thin film transistor.

第2圖係表示傳輸特性圖之圖。 Fig. 2 is a diagram showing a transmission characteristic diagram.

第3圖係表示遷移率的柱狀圖之圖。 Figure 3 is a diagram showing a histogram of mobility.

第4圖係表示限值電壓的柱狀圖之圖。 Fig. 4 is a view showing a histogram of the limit voltage.

第5圖係表示差動增幅電路之圖。 Fig. 5 is a view showing a differential amplification circuit.

第6圖係表示傳輸特性圖之圖。 Fig. 6 is a diagram showing a transmission characteristic diagram.

第7圖係表示遷移率的柱狀圖之圖。 Figure 7 is a diagram showing a histogram of mobility.

第8圖係表示限值電壓的柱狀圖之圖。 Figure 8 is a diagram showing a histogram of the limit voltage.

第9圖係表示傳輸特性圖之圖。 Figure 9 is a diagram showing a transmission characteristic diagram.

第10圖係表示遷移率的柱狀圖之圖。 Figure 10 is a diagram showing a histogram of mobility.

第11圖係表示限值電壓的柱狀圖之圖。 Figure 11 is a diagram showing a histogram of the limit voltage.

第12圖係表示傳輸特性圖之圖。 Figure 12 is a diagram showing a transmission characteristic diagram.

第13圖係表示遷移率的柱狀圖之圖。 Figure 13 is a diagram showing a histogram of mobility.

第14圖係表示限值電壓的柱狀圖之圖。 Figure 14 is a diagram showing a histogram of the limit voltage.

使用於本發明之有機薄膜電晶體之閘極電極,並 無特別限制,可舉例如鋁、金、銀、銅、高摻雜矽、錫氧化物、氧化銦、銦錫氧化物、氧化鉬、鉻、鈦、鉭、鉻、石墨烯、奈米碳管等的無機材料;摻雜導電性高分子(例如PEDOT-PSS)等的有機材料。 Used in the gate electrode of the organic thin film transistor of the present invention, and There is no particular limitation, and examples thereof include aluminum, gold, silver, copper, highly doped cerium, tin oxide, indium oxide, indium tin oxide, molybdenum oxide, chromium, titanium, cerium, chromium, graphene, and carbon nanotubes. An inorganic material such as an organic material doped with a conductive polymer (for example, PEDOT-PSS).

使用於本發明的有機薄膜電晶體的閘極絕緣膜, 係該閘極絕緣膜的材料與有機半導體之間的界面能為2.0mJ/m2以下,以1.8mJ/m2以下為佳,以0.001~1.5mJ/m2更佳。藉由使該界面能在於上述範圍,可使形成於閘極絕緣膜表面的有機半導體膜得到均勻的結晶(層狀結晶),而使有機薄膜電晶體的限值電壓等的性能的誤差變小。 Gate used in the present invention, an organic thin film transistor a gate insulating film, the interface between the material of the line gate insulating film and the organic semiconductor energy of 2.0mJ / m 2 or less, to 1.8mJ / m 2 or less is preferable, and 0.001 to 1.5 mJ/m 2 is more preferable. By allowing the interface to be in the above range, the organic semiconductor film formed on the surface of the gate insulating film can be uniformly crystallized (layered crystal), and the error in the performance of the limit voltage of the organic thin film transistor can be made small. .

在於本發明,使用於閘極絕緣膜的材料與有機半 導體之間的界面能,可以下式(a)算出。 In the present invention, the material used for the gate insulating film and the organic half The interface energy between the conductors can be calculated by the following formula (a).

γ1212-(γ1 dγ2 d)1/2-2(γ1 pγ2 p)1/2 (a) γ 1212 -(γ 1 d γ 2 d ) 1/2 -2(γ 1 p γ 2 p ) 1/2 (a)

式中,γ12係表示界面能,γ1係使用於閘極絕緣膜的材料的表面能,γ1 d係使用閘極絕緣膜的材料的分散力,γ1 p係使用於 閘極絕緣膜的材料的極性成分,γ2係有機半導體的表面能,γ2 d係有機半導體的分散力,γ2 p係有機半導體的極性成分。再者,該等的值係使用閘極絕緣膜、有機半導體材料的各個薄膜,測定水的接觸角及碘甲烷的接觸角以θ/2法測定,以Owens-Wendt的方法計算。 In the formula, γ 12 represents the interfacial energy, γ 1 is the surface energy of the material used for the gate insulating film, γ 1 d is the dispersing force of the material using the gate insulating film, and γ 1 p is used for the gate insulating film. polar component material, the surface of the organic semiconductor γ 2 based energy, dispersion force γ 2 d-based organic semiconductor, the polar component γ 2 p type organic semiconductors. Further, these values were measured using a gate insulating film or an organic semiconductor material, and the contact angle of water and the contact angle of methyl iodide were measured by the θ/2 method and calculated by the method of Owens-Wendt.

本發明,可用於閘極絕緣膜的材料,可為蒸鍍型 材料或塗層型材料。在此,所謂「蒸鍍型材料」係指可藉由蒸鍍得到閘極絕緣膜的材料,所謂「塗層型材料」係指可藉由塗層得到閘極絕緣膜的材料。一般蒸鍍型材料,由於蒸鍍前的物質對溶劑的溶解度低,很難以塗層製程而得,塗層型材料,由於蒸鍍前物質的蒸汽壓低,而難以蒸鍍製程而得。 The invention can be used for a material of a gate insulating film, and can be an evaporation type Material or coated material. Here, the "vapor deposition type material" means a material which can obtain a gate insulating film by vapor deposition, and the "coating type material" means a material which can obtain a gate insulating film by a coating. In general, the vapor deposition type material is difficult to obtain a coating process because the solubility of the substance before vapor deposition is low, and the coating type material is difficult to be vapor-deposited because the vapor pressure of the substance before vapor deposition is low.

在於本發明,可於製造閘極絕緣膜時採用塗層製 程,由於適合以高生產性製造有機薄膜電晶體,故使用於閘極絕緣膜的材料以塗層型材料為佳。此外,於塗層型材料之中,由可於塗層之後的塗層液以架橋操作硬化,適合以更高生產性製造有機薄膜電晶體,以使用具有架橋點的有機低分子或具有架橋點的有機高分子而得之塗層型材料(有機塗層型材料)更佳。在此,架橋操作,可將具有該架橋點的有機低分子或具有該架橋點的有機高分子在塗層之後,以熱或光處理進行。 According to the present invention, it can be coated by a gate insulating film. Since the organic thin film transistor is suitable for high productivity, the material used for the gate insulating film is preferably a coating type material. In addition, among the coating materials, the coating liquid after coating can be hardened by bridging operation, and it is suitable for manufacturing organic thin film transistors with higher productivity to use organic low molecules having bridging points or having bridging points. A coating material (organic coating type material) derived from an organic polymer is more preferable. Here, the bridging operation can carry out the organic low molecular molecule having the bridging point or the organic polymer having the bridging point after the coating, by heat or light treatment.

此外,在於本發明,使用蒸鍍型材料時,由膜厚控制的容易度,以蒸鍍有機低分子而得之蒸鍍型材料(有機蒸鍍型材料)為佳。 Further, in the present invention, when a vapor deposition type material is used, a vapor deposition type material (organic vapor deposition type material) obtained by vapor deposition of an organic low molecule is preferable because of the ease of film thickness control.

使用於閘極絕緣膜的材料,只要與有機半導體之 間的界面能為2.0mJ/m2以下,並無特別限制。具體而言,可舉 例如,使用塗層型的無機系氧化物的無機塗層型材料;架橋聚甲基丙烯酸甲酯系樹脂、架橋聚丙烯酸甲酯系樹脂、架橋聚醯亞胺系樹脂(以具有環化點的聚醯胺酸作為前驅物,藉由使該聚醯胺酸的醯胺酸基做脫水環化反應,賦予耐溶劑性的架橋聚醯亞胺系樹脂)、架橋聚碳酸酯系樹脂、架橋聚(富馬酸二異丙酯)系樹脂、架橋聚(二乙基富馬酸)系樹脂、架橋聚對苯二甲酸乙二醇酯系樹脂、架橋聚萘二甲酸乙二醇酯系樹脂、架橋聚醚碸系樹脂、架橋環狀聚烯烴系樹脂、架橋聚苯乙烯系樹脂、架橋聚-α-甲基苯乙烯系樹脂、架橋聚乙烯系樹脂、架橋聚丙烯系樹脂、架橋聚(乙烯-丙烯)共聚物系樹脂、架橋聚(乙烯-降冰片烯)共聚物系樹脂、BCB樹脂(塗層前的物質:二乙烯基矽氧烷苯並環丁烯(BCB))等的有機塗層型材料;使用蒸鍍型的無機系氧化物的無機蒸鍍型材料;聚(對二亞甲苯)(蒸鍍前的物質:二對二亞甲苯),聚(氯對二亞甲苯)(蒸鍍前的物質:二氯對二亞甲苯),聚(二氯對二亞甲苯)(蒸鍍前的物質:四氯二對二亞甲苯)等的有機蒸鍍型材料等。 The material used for the gate insulating film is not particularly limited as long as the interface energy with the organic semiconductor is 2.0 mJ/m 2 or less. Specifically, for example, an inorganic coating type material using a coating type inorganic oxide; a bridged polymethyl methacrylate type resin, a bridged polymethyl methacrylate type resin, and a bridged polyimide type resin ( A poly-proline which has a cyclization point as a precursor, a dehydration cyclization reaction of a proline acid group of a polyproline, a solvent-resistant bridging polyimide resin, and a bridged polycarbonate Ester resin, bridging poly(diisopropyl fumarate) resin, bridging poly(diethyl fumarate) resin, bridging polyethylene terephthalate resin, bridging polyethylene naphthalate Glycol ester-based resin, bridged polyether oxime resin, bridged cyclic polyolefin resin, bridged polystyrene resin, bridged poly-α-methylstyrene resin, bridged polyethylene resin, bridged polypropylene Resin, bridged poly(ethylene-propylene) copolymer resin, bridged poly(ethylene-norbornene) copolymer resin, BCB resin (pre-coating material: divinyl siloxane benzocyclobutene (BCB) )) organic coating type materials; use of vapor-deposited inorganic oxides Evaporation type material; poly(p-xylene) (pre-evaporation material: di-p-xylene), poly(chloro-p-xylene) (pre-evaporation material: dichloro-p-xylene), poly An organic vapor deposition type material such as (dichloro-p-xylene) (substance before vapor deposition: tetrachlorodi-p-xylene).

在於本發明,塗層型材料,由於BCB樹脂,係有 機塗層型材料,且適於得到界面能更小且性能的誤差小的有機薄膜電晶體而特別佳。此外,蒸鍍型材料,由於聚(氯對二亞甲苯),係有機蒸鍍型材料,且適於得到界面能更小且性能的誤差小的有機薄膜電晶體而特別佳。 In the present invention, the coated material, due to the BCB resin, is The machine-coated material is particularly suitable for obtaining an organic thin film transistor having a smaller interface energy and a small error in performance. Further, the vapor-deposited material is particularly preferred because it is an organic vapor-deposited material because of poly(chloro-p-xylene), and is suitable for obtaining an organic thin film transistor having a smaller interface energy and a small error in performance.

於閘極絕緣膜使用有機塗層型材料時,可使用例 如,以溶解於氯仿、甲苯、二甲苯、四氫呋喃、丙二醇、丙二醇-1-單甲醚-2-醋酸酯、甲乙酮、甲基環己酮醇等的溶劑所塗 層之膜作為閘極絕緣膜。 When an organic coating type material is used for the gate insulating film, an example can be used. For example, it is coated with a solvent dissolved in chloroform, toluene, xylene, tetrahydrofuran, propylene glycol, propylene glycol-1-monomethyl ether-2-acetate, methyl ethyl ketone, methyl cyclohexanone or the like. The film of the layer serves as a gate insulating film.

此外,閘極絕緣膜的表面,亦可使用例如,以十 八烷基三氯矽烷、癸基三氯矽烷、癸基三甲氧基矽烷、辛基三氯矽烷、十八烷基三甲氧基矽烷、β-乙氧苯基三氯矽烷、β-乙氧苯基甲氧基矽烷、苯基三氯矽烷、苯基三甲氧基矽烷、苯基三乙氧基甲矽烷等的矽烷類;六甲基二矽氮烷等的矽基胺類做修飾處理者。 In addition, the surface of the gate insulating film can also be used, for example, in ten Octachlorotrichloromethane, decyltrichlorodecane, decyltrimethoxydecane, octyltrichlorodecane, octadecyltrimethoxydecane, β-ethoxyphenyltrichlorodecane, β-ethoxybenzene A decane such as methoxy methoxy hexane, phenyl trichloro decane, phenyltrimethoxy decane or phenyltriethoxymethane or a decylamine such as hexamethyldiazepine or the like.

一般由於藉由進行閘極絕緣膜的表面處理,會發 生構成有機半導體膜的材料的結晶粒徑的增大及分子配向的提升,可得載子遷移率及電流開‧關比的提升,及降低限值電壓的較佳的結果。 Generally, it is possible to perform surface treatment of the gate insulating film. The increase in the crystal grain size and the improvement of the molecular alignment of the material constituting the organic semiconductor film can improve the carrier mobility and the current opening/closing ratio, and a preferable result of lowering the limit voltage.

使用於本發明的有機薄膜電晶體的源極電極及汲 極電極的材料,並無特別限制,可使用與閘極電極同樣的材料,可與閘極電極的材料相同亦可不同,亦可將異種材料層積。此外,為提升載子的植入效率,亦可對該等電極材料實施表面處理。電極材料的表面處理劑,可舉例如苯硫醇、五氟苯硫醇。 Source electrode and tantalum used in the organic thin film transistor of the present invention The material of the electrode electrode is not particularly limited, and the same material as that of the gate electrode can be used, and the material of the gate electrode can be the same or different, and the dissimilar materials can be laminated. In addition, in order to improve the implantation efficiency of the carriers, surface treatment may be performed on the electrode materials. The surface treatment agent for the electrode material may, for example, be phenylthiol or pentafluorobenzenethiol.

進行電極的表面處理時,亦可將表面處理劑以溶 劑稀釋使用。稀釋的溶劑,並無特別限制,可舉例如,甲醇、乙醇、2-丙醇等的醇系溶劑;鄰-二氯苯、氯苯、1,2-二氯乙烷,1,1,2,2-四氯乙烷、氯仿等的鹵素系溶劑;THF(四氫呋喃),二氧雜環乙烷等的醚系統溶劑;甲苯、二甲苯、三甲苯等的芳香族化合物的烴系溶劑;醋酸乙酯、γ-丁內酯等的酯系溶劑;N,N-二甲基甲醯胺、N-甲基吡咯烷酮等的醯胺系溶劑等。 When the surface treatment of the electrode is performed, the surface treatment agent may be dissolved. The agent is diluted and used. The solvent to be diluted is not particularly limited, and examples thereof include alcohol solvents such as methanol, ethanol, and 2-propanol; o-dichlorobenzene, chlorobenzene, 1,2-dichloroethane, 1, 1, 2 , a halogen-based solvent such as 2-tetrachloroethane or chloroform; an ether system solvent such as THF (tetrahydrofuran) or dioxane; a hydrocarbon solvent of an aromatic compound such as toluene, xylene or trimethylbenzene; An ester solvent such as ethyl ester or γ-butyrolactone; a guanamine solvent such as N,N-dimethylformamide or N-methylpyrrolidone.

使用於本發明的有機薄膜電晶體的有機半導體 膜,係含有特定有機半導體者。 Organic semiconductor used in the organic thin film transistor of the present invention Membrane, which contains a specific organic semiconductor.

該有機半導體,具有下述通式(1)所示構造: The organic semiconductor has a structure represented by the following formula (1):

式(1)中,R1~R6係分別獨立地表示,氫原子;甲 基、乙基、正丙基、異丙基、正丁基、第二丁基、第三丁基、異丁基、正戊基、異戊基、新戊基、正己基、正丁基、正辛基等的碳數為1~20,以4~8為佳的烷基;乙烯基、丙烯基、丁烯基、戊烯基、己烯基、丁二烯基、戊二烯基、己二烯基等的碳數為2~20,以4~8為佳的內部或末端烯基;乙炔基、丙炔基、丁炔基、戊炔基等的碳數為2~20,以4~8為佳的內部或末端炔基;甲氧基、乙氧基、正丙氧基、異丙氧基、第三丁氧基等的碳數為1~20、以4~8為佳的烷氧基;甲硫基、乙硫基、正丙硫基、異丙硫基、第三丁硫基等的碳數為1~20、以4~8為佳的烷硫基;三氟甲基、五氟乙基、二氟甲基、氟甲基、三氯甲基、二氯甲基、氯甲基、五氯乙基等的具有1個以上的鹵素取代基的碳數1~20,以4~8為佳的鹵化烷基;環丙基、環戊基、環己基、環庚基、環戊烯基、環己烯基、環己二烯基、環庚三烯基、降莰烷基、降菔烷基、降蒈烷基、金剛烷基、雙環[4,5]癸烯基等的碳數3~10之環烷基;苯基、1-萘基、2-萘基、蒽基、菲基等的碳數為6~14,以6~10為佳之芳基;3~12 員環,以4~8員環為佳的環雜烷基、5~14員環,以5~8員環為佳的雜芳基,或以通式(2)表示之烷基-環烷基、苄基等的烷基芳基;烷基環雜烷基、烷基雜芳基等:[化4]-Y-R7 (2) In the formula (1), R 1 to R 6 each independently represent a hydrogen atom; methyl, ethyl, n-propyl, isopropyl, n-butyl, t-butyl, t-butyl, isobutyl Base, n-pentyl, isopentyl, neopentyl, n-hexyl, n-butyl, n-octyl, etc., having a carbon number of 1 to 20, preferably 4 to 8 alkyl; vinyl, propenyl, butyl Alkenyl, pentenyl, hexenyl, butadienyl, pentadienyl, hexadienyl and the like have a carbon number of 2 to 20, preferably 4 to 8 internal or terminal alkenyl groups; ethynyl groups, a propynyl group, a butynyl group, a pentynyl group or the like having 2 to 20 carbon atoms, preferably 4 to 8 internal or terminal alkynyl groups; methoxy, ethoxy, n-propoxy, isopropoxy And the third butoxy group has a carbon number of 1 to 20, preferably 4 to 8 alkoxy group; methylthio group, ethylthio group, n-propylthio group, isopropylthio group, tert-butylthio group, etc. The alkyl group having a carbon number of 1 to 20 and 4 to 8 is preferred; trifluoromethyl, pentafluoroethyl, difluoromethyl, fluoromethyl, trichloromethyl, dichloromethyl, and chloroform. a carbon number of 1 to 20 having one or more halogen substituents such as a pentachloroethyl group, preferably a halogenated alkyl group of 4 to 8; a cyclopropyl group, a cyclopentyl group, and a ring; , cycloheptyl, cyclopentenyl, cyclohexenyl, cyclohexadienyl, cycloheptatrienyl, norbornyl, norbornyl, norbornyl, adamantyl, bicyclo[4 5] a cycloalkyl group having a carbon number of 3 to 10, such as a decyl group; a carbon number of 6 to 14 in the case of a phenyl group, a 1-naphthyl group, a 2-naphthyl group, an anthryl group or a phenanthryl group, and 6 to 10 Jiazhi aryl; 3~12 member ring, 4~8 member ring is preferred cycloheteroalkyl group, 5~14 member ring, 5~8 member ring is preferred heteroaryl group, or general formula (2) An alkylaryl group represented by an alkyl-cycloalkyl group, a benzyl group or the like; an alkylcycloheteroalkyl group, an alkylheteroaryl group or the like: [Chemical 4]-YR 7 (2)

式中,R7係表示碳數3~10,以4~8為佳的環烷基、碳數6~14,以6~10為佳之芳基、3~12員環、以4~8員環為佳的環雜烷基、或5~14員環、以5~8員環為佳的雜芳基,Y係表示碳數1~6,以2~4為佳的2價烷基,或碳數1~6、以2~4為佳的2價鹵化烷基。 In the formula, R 7 represents a carbon number of 3 to 10, preferably 4 to 8 is a cycloalkyl group, a carbon number of 6 to 14, a 6 to 10 is preferably an aryl group, a 3 to 12 member ring, and a 4 to 8 member. The ring is preferably a cycloheteroalkyl group, or a 5- to 14-membered ring, a heteroaryl group having a 5- to 8-membered ring, and the Y-based group is a divalent alkyl group having a carbon number of 1 to 6, preferably 2 to 4. Or a divalent halogenated alkyl group having a carbon number of 1 to 6 and preferably 2 to 4.

再者,亦可以碳數1~20之烷基、碳數2~20之烯基、碳數2~20之炔基、碳數3~10之環烷基、碳數6~14之芳基、3~12員環的環雜烷基,或5~14員環的雜芳基,1~4個鹵素原子、氰基、硝基、氧基、羥基、NH2、碳數1~20之胺基、碳數6~14的芳胺基、磺醯基、甲醯基、碳數1~20之烷基羰基、碳數6~14的芳羰基、羰基、碳數1~20之烷基羥基羰基、碳數6~14的芳氧羰基、醯亞胺基、碳數1~20之烷基醯亞胺基、碳數6~14的芳醯亞胺基、硫醯亞胺基、碳數1~20之烷基硫醯亞胺基、碳數6~14的芳基硫醯亞胺基、磺醯亞胺基、碳數1~20之烷基磺醯亞胺基、碳數6~14的芳基磺醯亞胺基、矽基、碳數1~20之烷基矽基、碳數1~20之烷基、碳數2~20之烯基、碳數2~20之炔基、碳數1~20之烷氧基、碳數1~20之烷硫基、碳數1~20之鹵化烷基、碳數3~20之環烷基、碳數6~14之芳基、鹵化芳基、3~12員環之環雜烷基及/或5~14員環之雜芳基 取代。 Further, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, and an aryl group having 6 to 14 carbon atoms may be used. a cycloalkylene group of a 3 to 12 membered ring, or a heteroaryl group of a 5 to 14 membered ring, 1 to 4 halogen atoms, a cyano group, a nitro group, an oxy group, a hydroxyl group, a NH 2 group, and a carbon number of 1 to 20 Amine group, arylamino group having 6 to 14 carbon atoms, sulfonyl group, methionyl group, alkylcarbonyl group having 1 to 20 carbon atoms, arylcarbonyl group having 6 to 14 carbon atoms, carbonyl group, alkyl group having 1 to 20 carbon atoms Hydroxycarbonyl group, aryloxycarbonyl group having 6 to 14 carbon atoms, quinone imine group, alkyl quinone imine group having 1 to 20 carbon atoms, aryl fluorinylene group having 6 to 14 carbon atoms, thioresenimine group, carbon 1 to 20 alkylthioanilide groups, 6 to 14 carbon aryl sulfoximine groups, sulfonimide groups, alkyl 1 to 20 alkyl sulfonimide groups, carbon number 6 ~14 arylsulfonimide, fluorenyl, alkyl 1 to 20 alkyl, alkyl 1 to 20, 2 to 20 alkenyl, 2 to 20 alkyne Base, alkoxy group having 1 to 20 carbon atoms, alkylthio group having 1 to 20 carbon atoms, halogenated alkyl group having 1 to 20 carbon atoms, cycloalkyl group having 3 to 20 carbon atoms, and aryl group having 6 to 14 carbon atoms Halogenated aryl, cycloalkylene of 3 to 12 membered rings and/or 5 to 14 membered rings A substituted aryl group.

以式(1)表示之有機半導體,由於以通式(3)所示構 造,可得高的溶解度,且可得限值等的性能的誤差更小的有機薄膜電晶體而佳: The organic semiconductor represented by the formula (1) is excellent in solubility due to the structure represented by the formula (3), and an organic thin film transistor having a smaller error in performance such as a limit value can be obtained:

式(3)中,R1、R2係分別獨立地表示,甲基、乙基、 正丙基、異丙基、正丁基、第二丁基、第三丁基、異丁基、正戊基、異戊基、新戊基、正己基、正庚基、正辛基等的碳數為1~20,以4~8為佳的烷基;甲氧基、乙氧基、正丙氧基、異丙氧基、第三丁氧基等的碳數為1~20,以4~8為佳的烷氧基等,在於本發明更佳的構造,係通式(3)中,R1、R2係各自獨立地表示,碳數為1~20,以4~8為佳的烷基。 In the formula (3), R 1 and R 2 each independently represent a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, a second butyl group, a t-butyl group, an isobutyl group, and a positive group. The pentyl group, the isopentyl group, the neopentyl group, the n-hexyl group, the n-heptyl group, the n-octyl group and the like have a carbon number of 1 to 20, preferably 4 to 8 alkyl groups; methoxy group, ethoxy group, and n-propyl group. The oxy group, the isopropoxy group, the third butoxy group or the like has a carbon number of 1 to 20, preferably 4 to 8 or more, and is a more preferable structure of the present invention. In the formula (3), R 1 and R 2 each independently represent an alkyl group having a carbon number of 1 to 20 and preferably 4 to 8.

使用於本發明之有機半導體之具體例,可舉2,7- 二(正甲基)二噻吩並苯並二噻吩、2,7-二(正乙基)二噻吩並苯並二噻吩、2,7-二(正丙基)二噻吩並苯並二噻吩、2,7-二(異丙基)二噻吩並苯並二噻吩、2,7-二(正丁基)二噻吩並苯並二噻吩、2,7-二(第二丁基)二噻吩並苯並二噻吩、2,7-二(第三丁基)二噻吩並苯並二噻吩、2,7-二(異丁基)二噻吩並苯並二噻吩、2,7-二(正戊基)二噻吩並苯並二噻吩、2,7-二(異戊基)二噻吩並苯並二噻吩、2,7-二(新戊基)二噻吩並苯並二噻吩、2,7-二(正己基) 二噻吩並苯並二噻吩、2,7-二(正庚基)二噻吩並苯並二噻吩、2,7-二(正辛基)二噻吩並苯並二噻吩、2,7-二(正癸基)二噻吩並苯並二噻吩、2,7-二(正十二基)二噻吩並苯並二噻吩、2,7-二(正十四烷基)二噻吩並苯並二噻吩、2,7-二(乙烯基)二噻吩並苯並二噻吩、2,7-二(丙烯基)二噻吩並苯並二噻吩、2,7-二(丁烯基)二噻吩並苯並二噻吩、2,7-二(戊烯基)二噻吩苯並二噻吩、2,7-二(己烯基)二噻吩並苯並二噻吩、2,7-二(丁二烯基)二噻吩並苯並二噻吩、2,7-二(戊二烯基)二噻吩並苯並二噻吩、2,7-二(己二烯基)二噻吩並苯並二噻吩、2,7-二(乙炔基)二噻吩並苯並二噻吩、2,7-二(丙烯基)二噻吩並苯並二噻吩、2,7-二(丁炔基)二噻吩並苯並二噻吩、2,7-二(戊炔基)二噻吩並苯並二噻吩、2,7-二(甲氧基)二噻吩並苯並二噻吩、二(甲氧基)二噻吩並苯並二噻吩、2,7-二(正丙氧基)二噻吩並苯並二噻吩、2,7-二(異丙氧基)二噻吩並苯並二噻吩、2,7-二(第三丁氧基)二噻吩並苯並二噻吩等。 Specific examples of the organic semiconductor used in the present invention include 2,7- Di(n-methyl)dithienobenzodithiophene, 2,7-di(n-ethyl)dithienobenzodithiophene, 2,7-di(n-propyl)dithienobenzodithiophene, 2,7-di(isopropyl)dithienobenzodithiophene, 2,7-di(n-butyl)dithienobenzodithiophene, 2,7-di(t-butyl)dithiophene Benzodithiophene, 2,7-di(t-butyl)dithienobenzodithiophene, 2,7-di(isobutyl)dithienobenzodithiophene, 2,7-di(n-pentyl) Di) thienobenzodithiophene, 2,7-di(isopentyl)dithienobenzodithiophene, 2,7-di(neopentyl)dithienobenzodithiophene, 2,7- Two (n-hexyl) Dithienobenzodithiophene, 2,7-di(n-heptyl)dithienobenzodithiophene, 2,7-di(n-octyl)dithienobenzodithiophene, 2,7-di ( N-decyl)dithienobenzodithiophene, 2,7-di(n-dodecyl)dithienobenzodithiophene, 2,7-di(n-tetradecyl)dithienobenzodithiophene , 2,7-di(vinyl)dithienobenzodithiophene, 2,7-di(propylene)dithienobenzodithiophene, 2,7-di(butenyl)dithienobenzophenone Dithiophene, 2,7-di(pentenyl)dithiophenebenzodithiophene, 2,7-di(hexenyl)dithienobenzodithiophene, 2,7-di(butadienyl) Thienobenzodithiophene, 2,7-di(pentadienyl)dithienobenzodithiophene, 2,7-di(hexadienyl)dithienobenzodithiophene, 2,7-di (ethynyl)dithienobenzodithiophene, 2,7-di(propenyl)dithienobenzodithiophene, 2,7-di(butynyl)dithienobenzodithiophene, 2,7 - bis(pentynyl)dithienobenzodithiophene, 2,7-bis(methoxy)dithienobenzodithiophene, bis(methoxy)dithienobenzodithiophene, 2,7 - bis(n-propoxy)dithienobenzothiazide , 2,7-di (isopropoxy) bis thieno benzodithiophene, 2,7-bis (tert-butoxy) bis thieno benzodithiophene like.

本發明的有機薄膜電晶體中的有機半導體膜,其 特徵在於可以印刷製程製膜。藉由印刷製程製膜有機半導體膜,不僅可發揮很高的生產性,且可形成載子遷移率高且限值電壓的誤差小的有機薄膜電晶體。 An organic semiconductor film in the organic thin film transistor of the present invention, It is characterized in that it can be printed by a process film. By forming a film-forming organic semiconductor film by a printing process, it is possible to exhibit not only high productivity, but also an organic thin film transistor having a high carrier mobility and a small error in the limit voltage.

該有機半導體膜,例如,可藉由對基板印刷上述 通式(1)所示之有機半導體而製造。此時,在基板上印刷有機半導體的溶液之後,藉由加熱、氣流及/或自然乾燥等的方法使溶劑氣化而形成有機半導體膜。 The organic semiconductor film can be printed, for example, by printing on the substrate It is produced by an organic semiconductor represented by the formula (1). At this time, after printing the solution of the organic semiconductor on the substrate, the solvent is vaporized by a method such as heating, gas flow, and/or natural drying to form an organic semiconductor film.

使用於溶解本發明的有機半導體的溶劑,並無特 別限制。可舉例如鄰二氯苯、氯苯、1,2-二氯乙烷,1,1,2,2-四氯乙烷、氯仿等的鹵素系溶劑;THF、二氧雜環乙烷等的醚系溶劑;甲苯、二甲苯、三甲苯等的芳香族化合物的烴系溶劑;醋酸乙酯、γ-丁內酯等的酯系溶劑;N,N-二甲基甲醯胺、N-甲基吡咯烷酮等的胺系溶劑等,此外,該等溶劑可使用1種或2種以上的混合物。其中,氯苯、甲苯、三甲苯、四氫化萘,由於使用於本發明的有機半導體的溶解度高,且可用於一般的印刷製程而佳。 The solvent used to dissolve the organic semiconductor of the present invention is not particularly Do not limit. For example, a halogen-based solvent such as o-dichlorobenzene, chlorobenzene, 1,2-dichloroethane, 1,1,2,2-tetrachloroethane or chloroform; THF, dioxane or the like; An ether solvent; a hydrocarbon solvent of an aromatic compound such as toluene, xylene or trimethylbenzene; an ester solvent such as ethyl acetate or γ-butyrolactone; N,N-dimethylformamide, N-A An amine solvent such as a pyrrolidone or the like may be used, and one or a mixture of two or more of these solvents may be used. Among them, chlorobenzene, toluene, trimethylbenzene, and tetralin are preferable because they have high solubility in the organic semiconductor used in the present invention and can be used in a general printing process.

上述溶液中的有機半導體的濃度,並無特別限 定,由有機半導體的溶解度與印刷製程的效率,以0.01~10.0重量%為佳,以0.05~7重量%更佳。印刷時的溫度,並無特別限定,由於印刷時無須特殊的裝置,故可於20~200℃之間良好地實施。 The concentration of the organic semiconductor in the above solution is not particularly limited. The solubility of the organic semiconductor and the efficiency of the printing process are preferably 0.01 to 10.0% by weight, more preferably 0.05 to 7% by weight. The temperature at the time of printing is not particularly limited, and since it is not required to be used in the printing, it can be suitably carried out at 20 to 200 °C.

於本發明製作有機半導體膜時,印刷製程,以有 版印刷或無版印刷均可。然後,該印刷製程,只要是在製作有機半導體膜時,將有機半導體的溶液塗佈於基板之後,可結晶化的製程,並無特別限制,由生產性高及容易形成圖案,以點膠印刷、噴墨印刷、膠版印刷、凸版印刷、凹版印刷、照相凹版印刷、狹縫塗佈印刷,或網版印刷為佳。 When the organic semiconductor film is fabricated by the present invention, the printing process has Printed or unprinted. Then, the printing process is not particularly limited as long as the solution of the organic semiconductor is applied to the substrate after the organic semiconductor film is formed, and the process is high in productivity and easy to form a pattern to be dispensed. Inkjet printing, offset printing, letterpress printing, gravure printing, gravure printing, slit coating printing, or screen printing are preferred.

其中,由量產性及精度方面,以點膠印刷、噴墨印刷、膠版印刷、凸版印刷,或狹縫塗佈印刷更佳。 Among them, in terms of mass productivity and precision, it is more preferable to use offset printing, inkjet printing, offset printing, letterpress printing, or slit coating printing.

具有閘極電極、閘極絕緣膜、源極電極、汲極電 極、及有有機半導體膜的有機薄膜電晶體的構造,可舉例如,第1圖所示剖面構造。 With gate electrode, gate insulating film, source electrode, and bungee The structure of the electrode and the organic thin film transistor having an organic semiconductor film may be, for example, the cross-sectional structure shown in Fig. 1.

第1圖中,可分類成(A)底閘極-頂接觸型、(B)底閘極-底接觸型、(C)頂閘極-頂接觸型、(D)頂閘極-底接觸型的有機薄膜電晶體,第1圖中的1係表示有機半導體層,2係基板,3係閘極電極,4係閘極絕緣膜,5係源極電極,6係汲極電極。 In Fig. 1, it can be classified into (A) bottom gate-top contact type, (B) bottom gate-bottom contact type, (C) top gate-top contact type, and (D) top gate-bottom contact. The organic thin film transistor of the type shown in Fig. 1 shows an organic semiconductor layer, a 2-system substrate, a 3-system gate electrode, a 4-system gate insulating film, a 5-series source electrode, and a 6-system drain electrode.

可使用於有機薄膜電晶體的基板的具體例,可舉 例如,聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚甲基丙烯酸甲酯、聚丙烯酸甲酯、聚乙烯、聚丙烯、聚苯乙烯、環狀聚烯烴、氟化環狀聚烯烴、聚醯亞胺、聚碳酸酯、聚乙烯酚、聚乙烯醇、聚(富馬酸二異丙酯)、聚(富馬酸二乙酯)、聚(馬來酸二異丙酯)、聚醚碸、聚苯硫醚、三醋酸纖維素等的塑膠基板;玻璃、石英、氧化鋁、矽、高摻雜矽、氧化矽、二氧化鉭、五氧化鉭、銦錫氧化物等的無機材料基板;金、銅、鉻、鈦、鋁等的金屬基板等。 A specific example of a substrate that can be used for an organic thin film transistor can be mentioned For example, polyethylene terephthalate, polyethylene naphthalate, polymethyl methacrylate, polymethyl acrylate, polyethylene, polypropylene, polystyrene, cyclic polyolefin, fluorination Cyclic polyolefin, polyimine, polycarbonate, polyvinyl phenol, polyvinyl alcohol, poly (diisopropyl fumarate), poly (diethyl fumarate), poly (maleic acid diiso) Plastic substrates such as propyl ester, polyether oxime, polyphenylene sulfide, and cellulose triacetate; glass, quartz, alumina, tantalum, highly doped cerium, lanthanum oxide, cerium oxide, antimony pentoxide, indium tin oxide An inorganic material substrate such as a material; a metal substrate such as gold, copper, chromium, titanium, or aluminum.

再者,於基板使用高摻雜矽時,該基板可兼做本發明的閘極電極。 Furthermore, when a highly doped germanium is used for the substrate, the substrate can also serve as the gate electrode of the present invention.

使用之基板的材料,並無特別限定,可使用結晶 性、非結晶性的各種材料。基板的具體例,可舉例如,聚對苯二甲酸乙二醇酯、聚甲基丙烯酸甲酯、聚乙烯、聚丙烯、聚苯乙烯、環狀聚烯烴、聚醯亞胺、聚碳酸酯、聚乙烯酚、聚乙烯醇、聚(富馬酸二異丙酯)、聚(富馬酸二乙酯)、聚(馬來酸二異丙酯)等的塑膠基板;玻璃、石英、氧化鋁、矽、氧化矽、二氧化鉭、五氧化鉭、銦錫氧化物等的無機材料基板;金、銅、鉻、鈦等的金屬基板等。此外該等基板的表面,亦可使用例如,以十八烷基三氯矽烷、十八烷基三甲氧基矽烷等的矽烷類;以 六甲基二矽氮烷等的矽基胺類修飾處理者。再者,基板亦可為絕緣性或具有介電性的材料。印刷後的溶劑,可於常壓或減壓乾燥去除,亦可藉由加熱或氮氣流乾燥去除。 The material of the substrate to be used is not particularly limited, and crystallization can be used. Sexual, non-crystalline materials. Specific examples of the substrate include polyethylene terephthalate, polymethyl methacrylate, polyethylene, polypropylene, polystyrene, cyclic polyolefin, polyimine, polycarbonate, and the like. Plastic substrate of polyvinylphenol, polyvinyl alcohol, poly(diisopropyl fumarate), poly(diethyl fumarate), poly(diisopropyl maleate), glass, quartz, alumina An inorganic material substrate such as ruthenium, osmium oxide, ruthenium dioxide, ruthenium pentoxide or indium tin oxide; or a metal substrate such as gold, copper, chromium or titanium. Further, for example, a decane such as octadecyltrichlorodecane or octadecyltrimethoxydecane may be used as the surface of the substrate; A mercaptoamine modification processor such as hexamethyldiazepine. Furthermore, the substrate can also be an insulating or dielectric material. The solvent after printing can be removed by drying under normal pressure or reduced pressure, or can be removed by heating or drying with a nitrogen stream.

一般,在用於電路的電晶體的限值電壓可確認誤 差時,電路的動作會變得不安定而難以得到所期望的電路特性。此外,一般為穩定的得到所期望的電路特性,使用電晶體的限值電壓的誤差的標準偏差σ作為指標,進行電路設計,即使在3σ亦可得到穩定的電路特性,因此期望限值電壓的標準偏差σ小的電晶體。本發明的有機薄膜電晶體,由於其特徵在於限值電壓的誤差小,因此藉由將本發明的有機薄膜電晶體使用於電路,可形成顯示穩定的動作的電路。 Generally, the limit voltage of the transistor used in the circuit can be confirmed incorrectly. When the difference is made, the operation of the circuit becomes unstable and it is difficult to obtain the desired circuit characteristics. In addition, generally, the desired circuit characteristics are stably obtained, and the standard deviation σ of the error value of the limit voltage of the transistor is used as an index to perform circuit design, and stable circuit characteristics can be obtained even at 3σ, so that the limit voltage is desired. A transistor with a small standard deviation σ. Since the organic thin film transistor of the present invention is characterized by a small error in the limit voltage, the organic thin film transistor of the present invention can be used in a circuit to form a circuit that exhibits stable operation.

本發明的有機薄膜電晶體的限值,只要是一般已 知用於求得有機電晶體的限值的方法,則可使用任何方法求得,例如,可由有機電晶體的傳輸特性圖,將飽和電流的平方根對閘極電壓繪圖而得之直線的X軸截距求得。 The limit of the organic thin film transistor of the present invention is generally It is known that the method for determining the limit value of the organic transistor can be obtained by any method. For example, the X-axis of the straight line obtained by plotting the square root of the saturation current to the gate voltage can be obtained from the transmission characteristic diagram of the organic transistor. The intercept is obtained.

本發明的有機薄膜電晶體,其特徵在於載子遷移 率高,其中,為得具有良好的性能的有機電子裝置,遷移率以0.001~100cm2/Vs的範圍為佳。 The organic thin film transistor of the present invention is characterized in that the carrier mobility is high, and in order to obtain an organic electronic device having good performance, the mobility is preferably in the range of 0.001 to 100 cm 2 /Vs.

有機薄膜電晶體,為得良好的有機電子裝置,電流開關比以105以上,即,電流開關比的常用對數值(以下,將電流開關比的常用對數值稱為「log10AR」)以5以上為佳。 The organic thin film transistor is a good organic electronic device, and the current switching ratio is more than 10 5 or more, that is, the common logarithmic value of the current switching ratio (hereinafter, the common logarithmic value of the current switching ratio is referred to as "log10AR") is 5 or more. It is better.

本發明的有機薄膜電晶體,其特徵在於限值電壓 的誤差小,此外,其特徵在於配置複數個元件製作有機薄膜電晶體陣列時,關於該有機薄膜電晶體陣列的限值電壓的標準偏 差σ會變小。然後,其中,由於將電壓的微小變化使用於有機電子裝置,故例如配置100個以上的元件製作有機薄膜電晶體陣列時,關於有機薄膜電晶體陣列的限值電壓的標準偏差σ,以0.25以下為佳,以0.2以下更佳,以0.1以下特別佳。 The organic thin film transistor of the present invention is characterized by a limit voltage The error is small, and in addition, it is characterized in that when a plurality of components are arranged to fabricate an organic thin film transistor array, the standard deviation of the limit voltage of the organic thin film transistor array is The difference σ will become smaller. Then, since a small change in voltage is used for the organic electronic device, for example, when 100 or more elements are arranged to form an organic thin film transistor array, the standard deviation σ of the limit voltage of the organic thin film transistor array is 0.25 or less. Preferably, it is preferably 0.2 or less, and particularly preferably 0.1 or less.

本發明的有機薄膜電晶體的載子遷移率的誤差小 為佳,此外,配置複數個元件製作有機薄膜電晶體陣列時,關於該有機薄膜電晶體陣列的載子遷移率的變動係數CV=|標準偏差σ/平均值|(以下,稱為「變動係數CV(載子遷移率)」)小為佳。然後,其中,為穩定的製作有機薄膜電晶體陣列,例如配置100個以上的元件製作有機薄膜電晶體陣列時,變動係數CV(載子遷移率)以25%以下更佳,以20%以下特別佳。 The error of carrier mobility of the organic thin film transistor of the invention is small In addition, when a plurality of elements are arranged to form an organic thin film transistor array, a coefficient of variation of carrier mobility of the organic thin film transistor array is CV=|standard deviation σ/average| (hereinafter, referred to as "variation coefficient" CV (carrier mobility)") is small. Then, in order to stably produce an organic thin film transistor array, for example, when an organic thin film transistor array is formed by disposing 100 or more elements, the coefficient of variation CV (carrier mobility) is preferably 25% or less, and particularly 20% or less. good.

本發明的有機薄膜電晶體與電流開關比的誤差小 為佳,此外,配置複數個元件製作有機薄膜電晶體陣列時,關於該有機薄膜電晶體陣列的log10AR的變動係數CV=|log10AR的標準偏差σ/log10AR的平均值|(以下,稱為「變動係數CV(log10AR)」)小為佳。然後,其中,為穩定的製作有機薄膜電晶體陣列,例如配置100個以上元件製作有機薄膜電晶體陣列時,變動係數CV(log10AR),以20%以下更佳,以15%以下特別佳,以10%以下最佳。 The error of the organic thin film transistor of the invention and the current switching ratio is small In addition, when a plurality of elements are arranged to form an organic thin film transistor array, the variation coefficient of log10AR of the organic thin film transistor array CV=|log 10AR is the average value of the standard deviation σ/log 10AR| (hereinafter, referred to as "variation" The coefficient CV (log10AR)") is small. Then, in order to stably produce an organic thin film transistor array, for example, when an organic thin film transistor array is formed by disposing 100 or more elements, the coefficient of variation CV (log 10 AR) is preferably 20% or less, and particularly preferably 15% or less. 10% or less is the best.

使用有機薄膜電晶體形成差動增幅電路時,為得更高的感測靈敏度,增幅度以1~1000為佳。 When an organic thin film transistor is used to form a differential amplifying circuit, for a higher sensing sensitivity, an increase of 1 to 1000 is preferred.

實施例 Example

以下以實施例更具體說明本發明,惟本發明不應限定於該等實施例。 The invention will be more specifically described by the following examples, but the invention should not be construed as limited.

合成例 Synthesis example (1,4-二(3-溴噻吩)-2,5-二氟苯的合成) Synthesis of (1,4-bis(3-bromothiophene)-2,5-difluorobenzene)

於氮氣氛下,在100ml的舒倫克(Schlenk)反應容器添加異丙基溴化鎂(東京化成工業公司製,0.80mol/l)的THF溶液4.5ml(3.6mmol)及THF10ml。將該混合物冷卻至-75℃,滴入2,3-二溴噻吩(和光純藥工業公司製)873mg(3.61mmol)。以-75℃熟成30分鐘之後,滴入氯化鋅(西格瑪奧瑞奇公司製,1.0mol/l)乙醚溶液3.6ml(3.6mmol)。慢慢升溫至室溫之後,減壓濃縮生成白色漿料液,餾除10ml輕沸份。 To a 100 ml Schlenk reaction vessel, 4.5 ml (3.6 mmol) of THF solution of isopropylmagnesium bromide (manufactured by Tokyo Chemical Industry Co., Ltd.) and 10 ml of THF were placed in a 100 ml Schlenk reaction vessel. The mixture was cooled to -75 ° C, and 873 mg (3.61 mmol) of 2,3-dibromothiophene (manufactured by Wako Pure Chemical Industries, Ltd.) was added dropwise. After aging at -75 ° C for 30 minutes, 3.6 ml (3.6 mmol) of a solution of zinc chloride (1.0 mol/l, manufactured by Sigma Oric) was added dropwise. After slowly raising the temperature to room temperature, it was concentrated under reduced pressure to give a white syrup liquid, and 10 ml of light boiling fraction was distilled off.

對所得白色漿料液(3-溴噻吩-2-氯化鋅),添加1,4- 二溴-2,5-二氟苯(和光純藥工業公司製)272mg(1.00mmol),作為觸媒的四(三苯膦)鈀(東京化成工業公司製)39.1mg(0.0338mmol,對1,4-二溴-2,5-二氟苯3.38莫耳%)及THF10ml。以60℃實施反應8小時之後,將容器水冷,添加3ml3N鹽酸使反應停止。以甲苯萃取,將有機相以食鹽水清洗,以無水硫酸鈉乾燥。減壓濃縮,將所得殘渣以矽膠管柱色層分析純化(由己烷至己烷/二氯甲烷=10/1),進一步由己烷/甲苯=6/4再結晶純化,得到1,4-二(3-溴噻吩)-2,5-二氟苯的淺黃色固體227mg(產率52%)。 Add 1,4- to the obtained white slurry (3-bromothiophene-2-zinc chloride) 272 mg (1.00 mmol) of dibromo-2,5-difluorobenzene (manufactured by Wako Pure Chemical Industries, Ltd.), tetrakis(triphenylphosphine)palladium (manufactured by Tokyo Chemical Industry Co., Ltd.) as a catalyst, 39.1 mg (0.0338 mmol, for 1) , 4-dibromo-2,5-difluorobenzene 3.38 mol%) and THF 10 ml. After the reaction was carried out at 60 ° C for 8 hours, the vessel was cooled with water, and 3 ml of 3N hydrochloric acid was added to terminate the reaction. The organic phase was washed with brine and dried over anhydrous sodium sulfate. The residue was concentrated under reduced pressure, and purified (yield from hexane to hexane/dichloromethane = 10/1). 227 mg (yield 52%) of pale yellow solid of (3-bromothiophene)-2,5-difluorobenzene.

1H-NMR(CDCl3,21℃):δ=7.44(d,J=5.4Hz,2H),7.39(t,J=7,8Hz,2H),7.11(d,J=5.4Hz,2H)。 1 H-NMR (CDCl 3 , 21 ° C): δ = 7.44 (d, J = 5.4 Hz, 2H), 7.39 (t, J = 7, 8 Hz, 2H), 7.11 (d, J = 5.4 Hz, 2H) .

MS m/z:436(M+,100%),276(M+-2Br,13)。 MS m/z: 436 (M + , 100%), 276 (M + -2Br, 13).

(二噻吩並苯並二噻吩的合成) (Synthesis of dithienobenzodithiophene)

於氮氣氛下,在100ml的舒倫克(Schlenk)反應容器添加 1,4-二(3-溴噻吩)-2,5-二氟苯200mg(0.458mmol),NMP10ml,及硫化鈉9水和物(和光純藥工業公司製)240mg(1.00mmol)。將所得混合物以170℃加熱6小時,將所得反應混合物冷卻至室溫。添加甲苯及水之後,使之分相,將有機相以水清洗2次,以無水硫酸鈉乾燥。減壓濃縮之後,將所得殘渣以己烷實施清洗2次,得到二噻吩並苯並噻吩的淡黃色固體95mg(產率69%)。 Add in a 100 ml Schlenk reaction vessel under a nitrogen atmosphere 1,4-bis(3-bromothiophene)-2,5-difluorobenzene 200 mg (0.458 mmol), NMP 10 ml, and sodium sulfide 9 water (manufactured by Wako Pure Chemical Industries, Ltd.) 240 mg (1.00 mmol). The resulting mixture was heated at 170 ° C for 6 hours, and the resulting reaction mixture was cooled to room temperature. After adding toluene and water, the phases were separated, and the organic phase was washed twice with water and dried over anhydrous sodium sulfate. After concentrating under reduced pressure, the obtained residue was washed twice with hexane to give a pale yellow solid (yield 69%) of dithienobenzothiophene.

1H-NMR(CDCl3,60℃):δ=8.28(s,2H),7.51(d,J=5.2Hz,2H),7.30(d,J=5.2Hz,2H)。 1 H-NMR (CDCl 3 , 60 ° C): δ = 8.28 (s, 2H), 7.51 (d, J = 5.2 Hz, 2H), 7.30 (d, J = 5.2 Hz, 2H).

MS m/z:302(M+,100%),270(M+-S,5),151(M+/2,10)。 MS m/z: 302 ( M+ , 100%), 270 ( M+ -S, 5), 151 ( M+ /2, 10).

(2,7-二(正己醯基)二噻吩並苯並二噻吩) (2,7-di(n-hexyl)dithienobenzodithiophene)

於100ml的舒倫克(Schlenk)反應容器添加二噻吩並苯並二噻吩86.8mg(0.286mmol)及二氯甲烷14ml。將該混合物冰冷,添加氯化鋁(和光純藥工業公司製)134mg(1.00mmol)及己醯氯(和光純藥工業公司製)115mg(0.858mmol)。將所得混合物以室溫攪拌30小時後,藉由冰冷加水使反應停止。對所得漿料混合物,添加甲苯使之分相。將黃色漿料液的有機相以水清洗後,減壓濃縮。將所得殘渣以己烷及甲醇清洗得,減壓乾燥之後,得到二正己醯基二噻吩並苯並二噻吩的黃色固體99.8mg(產率70%)。 To a 100 ml Schlenk reaction vessel was added 86.8 mg (0.286 mmol) of dithienobenzodithiophene and 14 ml of dichloromethane. The mixture was ice-cooled, and 134 mg (1.00 mmol) of aluminum chloride (manufactured by Wako Pure Chemical Industries, Ltd.) and hexane chloride (manufactured by Wako Pure Chemical Industries, Ltd.) of 115 mg (0.858 mmol) were added. After the resulting mixture was stirred at room temperature for 30 hours, the reaction was stopped by ice-cooling and water. To the resulting slurry mixture, toluene was added to separate the phases. The organic phase of the yellow slurry was washed with water and concentrated under reduced pressure. The obtained residue was washed with hexane and methanol, and dried under reduced pressure to give 99.8 mg (yield: 70%) of the crude solid of di-n-hexyldithiophenebenzodithiophene.

1H-NMR(重苯,80℃):δ=7.73(s,2H),7.26(s,2H),2.58(t,J=7.2Hz,4H),1.71(m,4H),1.28(m,8H),0.86(t,J=7.0Hz,6H)。 1 H-NMR (heavy benzene, 80 ° C): δ = 7.73 (s, 2H), 7.26 (s, 2H), 2.58 (t, J = 7.2 Hz, 4H), 1.71 (m, 4H), 1.28 (m) , 8H), 0.86 (t, J = 7.0 Hz, 6H).

MS m/z:498(M+,100%),442(M+-C4H9+1,46),427(M+-C5H11,13)。 MS m/z: 498 ( M+ , 100%), 442 ( M+ - C 4 H 9 +1, 46), 427 ( M+ - C 5 H 11 , 13).

(2,7-(二正己基)二噻吩並苯並二噻吩的合成) Synthesis of (2,7-(di-n-hexyl)dithienobenzodithiophene)

於50ml舒倫克(Schlenk)反應容器添加二正己醯基二噻吩並苯並二噻吩50mg(0.1mmol)、THF5mL、氯化鋁(和光純藥工業公司製)69mg(0.52mmol),於冰冷下慢慢加入氫化硼鈉38mg(1.00mmol)之後,進行加熱回流4小時。冷卻至室溫之後,藉由加水使反應停止,對所得漿料混合物添加甲苯,使甲苯與水分相之後,將有機相反覆水洗3次。將有機相以無水硫酸鈉乾燥,減壓濃縮。將所得殘渣以矽膠管柱色層分離純化(己烷至己烷/甲苯=10/1),進一步由己烷(和光純藥工業公司製純等級)再結晶純化3次,得到2,7-二(正己基)二噻吩並苯並二噻吩的白色固體28mg(0.059mmol)(產率59%)。 To a 50 ml Schlenk reaction vessel, 50 mg (0.1 mmol) of di-n-hexyldithiophenebenzodithiophene, 5 mL of THF, and aluminum chloride (manufactured by Wako Pure Chemical Industries, Ltd.) 69 mg (0.52 mmol) were added under ice cooling. After slowly adding 38 mg (1.00 mmol) of sodium borohydride, the mixture was heated under reflux for 4 hours. After cooling to room temperature, the reaction was stopped by adding water, toluene was added to the obtained slurry mixture, and toluene was mixed with water, and the organic opposite water was washed three times. The organic phase was dried over anhydrous sodium sulfate and evaporated. The obtained residue was separated and purified by a color column chromatography (hexane to hexane/toluene = 10/1), and further purified by hexane (purified by Wako Pure Chemical Industries, Ltd.) three times to obtain 2,7-two. 28 mg (0.059 mmol) of a white solid of (n-hexyl)dithienobenzodithiophene (yield 59%).

1H-NMR(CDCls):δ=8.17(s,2H),7.00(s,2H),2.97(t,J=7.2Hz,4H),1.78(m,4H),1.28(m,12H),0.88(t,J=7.0Hz,6H)。 1 H-NMR (CDCls): δ = 8.17 (s, 2H), 7.00 (s, 2H), 2.97 (t, J = 7.2 Hz, 4H), 1.78 (m, 4H), 1.28 (m, 12H), 0.88 (t, J = 7.0 Hz, 6H).

MS m/z:470(M+,100%),399(M+-C5H11,57),328(M+-2C5H11,47)。 MS m/z: 470 (M + , 100%), 399 (M + - C 5 H 11 , 57), 328 (M + -2C 5 H 11 , 47).

熔點:190.2~190.4℃。 Melting point: 190.2~190.4 °C.

實施例1 Example 1 (軟性基板) (soft substrate)

使用厚度125μm的聚萘二甲酸乙二醇酯(帝人杜邦薄膜公司製,Teonex)作為軟性基板。 Polyethylene naphthalate (Teonex, manufactured by Teijin DuPont Film Co., Ltd.) having a thickness of 125 μm was used as a flexible substrate.

(表面平滑層的形成) (formation of surface smoothing layer)

在手套箱內,對10mL的樣品管加入聚乙烯酚(西格瑪奧瑞奇公司製,Mw-25000)0.5g與丙二醇-1-單甲醚-2-醋酸酯(關東化學公司製,鹿特級)4.5g,藉由攪拌10小時所得溶液2g,及於手套箱內對10mL的樣品管加入聚(三聚氰胺-co-甲醛)(西格 瑪奧瑞奇公司製,Mn~432)0.5g與丙二醇-1-單甲醚-2-醋酸酯(關東化學公司製,鹿特級)4.5g,藉由攪拌10小時所得溶液2g,混合所得的溶液之中的0.5ml,於上述軟性基板上,以旋轉塗佈機(MIKASA公司製,MS-A100M)進行旋轉塗佈製膜(1500rpm)之後,藉由150℃×60分鐘的熱處理形成膜厚100nm的架橋聚乙烯酚的表面平滑層。 In a glove box, a 10 mL sample tube was charged with polyvinyl phenol (Mw-25000, Sigma, Inc., Mw-25000), 0.5 g, and propylene glycol-1-monomethyl ether-2-acetate (manufactured by Kanto Chemical Co., Ltd., Rot). 4.5 g, 2 g of the solution obtained by stirring for 10 hours, and adding poly(melamine-co-formaldehyde) to a 10 mL sample tube in a glove box (Sig Mn~432), 0.5 g, and propylene glycol-1-monomethyl ether-2-acetate (manufactured by Kanto Chemical Co., Ltd., Rote grade) 4.5 g, 2 g of the solution obtained by stirring for 10 hours, mixed 0.5 ml of the solution was spin-coated on a soft substrate (MS-A100M, manufactured by MIKASA Co., Ltd.) to form a film (1500 rpm), and then formed into a film thickness by heat treatment at 150 ° C for 60 minutes. A surface smoothing layer of 100 nm bridged polyvinylphenol.

(閘極電極的形成) (formation of gate electrode)

將上述所形成的表面平滑層,以氧電漿表面處理裝置(SAMCO公司製,電漿乾式清潔機PC-300)以氧電漿(100W,1分鐘)處理之後,將銀奈米粒子墨水水溶液(DIC公司製,JAGLT-01),使用10pL的卡夾的噴墨裝置(富士軟片Dimatix公司製,DMP-2831,載台溫度30℃),以間隔60μm滴出描繪,於測試腔(Espec公司製,H-221,溫度30℃,濕度95%RH)內乾燥30分鐘之後,以140℃×60分鐘燒製形成厚度100nm,線寬400μm的閘極電極。在此,形成閘極電極,且將沒有形成閘極絕緣膜的塑膠基板稱為「附有閘極電極的塑膠基板」。 The surface smoothing layer formed above was treated with an oxygen plasma surface treatment apparatus (manufactured by SAMCO Co., Ltd., plasma dry cleaning machine PC-300) with oxygen plasma (100 W, 1 minute), and then a silver nanoparticle aqueous ink solution was applied. (JAGLT-01, manufactured by DIC Corporation), using an inkjet device with a 10pL clip (made by Fujifilm Dimatix Co., Ltd., DMP-2831, stage temperature 30 °C), and dripping at 60 μm intervals in the test chamber (Espec Corporation) After drying for 30 minutes in H-221, temperature 30 ° C, humidity 95% RH), a gate electrode having a thickness of 100 nm and a line width of 400 μm was formed by firing at 140 ° C for 60 minutes. Here, the gate electrode is formed, and the plastic substrate on which the gate insulating film is not formed is referred to as "a plastic substrate with a gate electrode."

(閘極絕緣膜的形成) (Formation of gate insulating film)

將二氯二對二甲苯(商品名:dix-C)(第三化成公司製)0.9g,以Labcoater(PARYLENE JAPAN公司製,PDS2010)於附有閘極電極的塑膠基板上真空蒸鍍形成厚度550nm的聚(氯對二甲苯)的閘極絕緣膜。 0.9 g of dichlorodi-p-xylene (trade name: dix-C) (manufactured by Daisei Co., Ltd.) was vacuum-deposited on a plastic substrate with a gate electrode by Labcoater (PDS2010, manufactured by PARYLENE JAPAN Co., Ltd.) to form a thickness. A gate insulating film of 550 nm poly(chloro-p-xylene).

(源.汲極電極的形成) (Source. Formation of the bungee electrode)

於上述閘極絕緣膜上,將銀奈米粒子墨水(哈利瑪化學公司製,NPS-JL),以噴墨裝置(富士軟片Dimatix公司製, DMP-2831,載台溫度50℃)以間隔60μm滴出描繪之後,以120℃×60分鐘燒製形成通道長91μm,通道寬1100μm的源.汲極電極。在此,將形成閘極電極、閘極絕緣膜及源.汲極電極的塑膠基板稱為「電極形成附有閘極絕緣膜的塑膠基板」。 On the gate insulating film, silver nanoparticle ink (NPS-JL, manufactured by Halima Chemical Co., Ltd.) was used as an inkjet device (made by Fujifilm Dimatix Co., Ltd.). DMP-2831, stage temperature 50 ° C) was drawn at intervals of 60 μm, and then fired at 120 ° C × 60 minutes to form a channel with a channel length of 91 μm and a channel width of 1100 μm. Bottom electrode. Here, the gate electrode, the gate insulating film and the source will be formed. The plastic substrate of the drain electrode is referred to as "the electrode forms a plastic substrate with a gate insulating film."

(源.汲極電極修飾) (source. bungee electrode modification)

將電極形成附有閘極絕緣膜的塑膠基板,浸漬於混合五氟苯硫醇(西格瑪奧瑞奇公司製)與2-丙醇(和光純藥工業公司製)的溶液(5mM)3分鐘之後,藉由乾燥進行源.汲極電極的修飾。 The electrode was formed into a plastic substrate with a gate insulating film and immersed in a solution (5 mM) of mixed pentafluorobenzenethiol (manufactured by Sigma-Olympus) and 2-propanol (manufactured by Wako Pure Chemical Industries, Ltd.) for 3 minutes. , by drying the source. Modification of the electrode of the drain.

(阻隔層的形成) (formation of barrier layer)

將上述電極形成附有閘極絕緣膜的塑膠基板保持在30℃,於其上將商品名;鐵氟龍(杜邦公司製,AF1600)以點膠裝置(武藏工程公司製,描繪速度20mm/s,射出壓7kPa,噴嘴溫度30℃)描繪之後,在大氣中乾燥10分鐘,形成厚度200nm、線寬300μm、內徑1.1mm×2.5mm的框圍源.汲極電極的阻隔層。 The above-mentioned electrode was formed to have a plastic substrate with a gate insulating film held at 30 ° C, and the trade name was used thereon; Teflon (AF1600 manufactured by DuPont) was used as a dispensing device (manufactured by Musashi Engineering Co., Ltd., and the drawing speed was 20 mm/s). After the drawing pressure was 7 kPa and the nozzle temperature was 30 ° C), it was dried in the atmosphere for 10 minutes to form a frame surrounding source having a thickness of 200 nm, a line width of 300 μm, and an inner diameter of 1.1 mm × 2.5 mm. The barrier layer of the drain electrode.

(有機半導體層的形成與有機薄膜電晶體的製作) (Formation of Organic Semiconductor Layer and Fabrication of Organic Thin Film Transistor)

於空氣下,對10ml樣品管,加入甲苯3.0g及2,7-二(正己基)二噻吩並苯並二噻吩30mg,加熱為50℃使之溶解而調製有機半導體層形成溶液(濃度:1.0質量%),使用點膠印刷裝置(武藏工程公司製,描繪速度20mm/s,射出壓1kPa,噴嘴溫度30℃),在上述所製作的阻隔層(保持在30℃)內滴出,乾燥形成有機半導體層,製作底閘極-底接觸型有機薄膜電晶體。 To a 10 ml sample tube, 30 g of toluene and 30 mg of 2,7-di(n-hexyl)dithienobenzodithiophene were added to a 10 ml sample tube, and the mixture was dissolved at 50 ° C to prepare an organic semiconductor layer-forming solution (concentration: 1.0). (% by mass), using a dispensing printing apparatus (manufactured by Musashi Engineering Co., Ltd., drawing speed: 20 mm/s, injection pressure: 1 kPa, nozzle temperature: 30 ° C), and dropping in the above-prepared barrier layer (held at 30 ° C), and drying was carried out. An organic semiconductor layer is used to fabricate a bottom gate-bottom contact type organic thin film transistor.

(界面能的計算) (calculation of interface energy)

水對2,7-(正己基)二噻吩並苯並二噻吩的接觸角及二碘甲 烷的接觸角,及水對聚(氯對二甲苯)的接觸角及二碘甲烷的接觸角算出界面能為1.2mJ/m2The contact angle of water to 2,7-(n-hexyl)dithienobenzodithiophene and the contact angle of diiodomethane, and the contact angle of water to poly(chloro-p-xylene) and the contact angle of diiodomethane Can be 1.2mJ/m 2 .

(半導體.電性測定) (semiconductor. electrical measurement)

使用半導體參數分析儀(吉時利公司製,4200-SCS),將有機薄膜電晶體的電性,以汲極電壓(Vd=-20V),將閘極電壓(Vg)由+10~-20V以0.5V的刻度掃描,進行傳輸物性的評估。載子遷移率為1.9cm2/Vs,限值電壓為-0.16V,電流開關比為2.9×108Using a semiconductor parameter analyzer (Keithley Corporation, 4200-SCS), the electrical properties of the organic thin film transistor to drain voltage (V d = -20V), the gate voltage (Vg) of +10 to - The 20V was scanned at a scale of 0.5V to evaluate the physical properties of the transmission. The carrier mobility was 1.9 cm 2 /Vs, the limit voltage was -0.16 V, and the current switching ratio was 2.9 × 10 8 .

實施例2 Example 2

以與實施例1同樣的手法製作有機薄膜電晶體,將該有機薄膜電晶體配置100個元件製作有機薄膜電晶體陣列。 An organic thin film transistor was produced in the same manner as in Example 1, and the organic thin film transistor was placed in 100 elements to fabricate an organic thin film transistor array.

(半導體電性的測定) (Measurement of semiconductor electrical properties)

將所得有機薄膜電晶體陣列,以與實施例1同樣的方法進行電性的測定。然後,將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的有機薄膜電晶體陣列的100個元件中100個元件可做電晶體動作,動作的100個元件的平均載子遷移率為1.1cm2/Vs,且載子遷移率的標準偏差σ為0.17,故變動係數CV(載子遷移率)為15%。此外,100個元件的電流開關比的常用對數的平均為8.0,且與電流開關比的常用對數的標準偏差σ為0.38,故變動係數CV(log10AR)為5%。此外,限值電壓的平均為-0.011V,且限值電壓的標準偏差σ為0.086。 The obtained organic thin film transistor array was subjected to electrical measurement in the same manner as in Example 1. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio were calculated by the coefficient of variation CV, and the degree of error of the limit voltage was calculated by the standard deviation σ. As a result, 100 of the 100 elements of the fabricated organic thin film transistor array can be acted as a transistor, and the average carrier mobility of the 100 elements of the operation is 1.1 cm 2 /Vs, and the standard deviation of the carrier mobility. Since σ is 0.17, the coefficient of variation CV (carrier mobility) is 15%. Further, the average of the common logarithm of the current switching ratio of 100 elements was 8.0, and the standard deviation σ of the common logarithm of the current switching ratio was 0.38, so the coefficient of variation CV (log10AR) was 5%. Further, the average value of the limit voltage is -0.011 V, and the standard deviation σ of the limit voltage is 0.086.

於第2圖表示所得100個元件的傳輸特性圖,於第3圖表 示所得100個元件的遷移率的柱狀圖,於第4圖表示所得100個元件的限值電壓的柱狀圖。 Figure 2 shows the transmission characteristics of the resulting 100 components, in the third chart. A histogram showing the mobility of the obtained 100 elements, and a histogram of the limit voltages of the obtained 100 elements is shown in FIG.

由以上,確認顯示非常小的誤差特性。 From the above, it was confirmed that very small error characteristics were exhibited.

實施例3 Example 3

使用以與實施例1同樣的手法製作的有機薄膜電晶體製作差動增幅電路。於第5圖表示所製作的差動增幅電路。 A differential amplification circuit was fabricated using an organic thin film transistor produced in the same manner as in Example 1. The differential amplification circuit produced is shown in Fig. 5.

(半導體電性的測定) (Measurement of semiconductor electrical properties)

使用半導體參數分析儀(吉時利公司製,4200-SCS),將定電流源(IDD)設定為500nA,測定相對於輸入電壓B(VINB)固定於6V~20V的任意值,將輸入電壓A(VINA)以0V~30V掃描時的輸出電壓VOUTA及VOUTB的結果,輸入電壓差為0V時顯示輸入電壓差為0V的理想的輸出入特性,增幅度為3.5而所製作的差動增幅電路顯示適當的驅動。 Using a semiconductor parameter analyzer (4200-SCS, manufactured by Keithley, Inc.), the constant current source (I DD ) was set to 500 nA, and the measurement was fixed at an arbitrary value of 6 V to 20 V with respect to the input voltage B (V INB ). Voltage A (V INA ) is the result of the output voltages V OUTA and V OUTB when scanning at 0V~30V. When the input voltage difference is 0V, the input-output voltage difference is 0V, which is an ideal input-output characteristic with an increase of 3.5. The differential amplification circuit shows the appropriate drive.

實施例4 Example 4 (閘極絕緣膜的形成) (Formation of gate insulating film)

在手套箱內,將二乙烯基矽氧烷苯並環丁烯(BCB)(商品名:CYCROTEN 3022-35)(道氏化學公司製)3.0g與三甲苯3.0g混合而得之溶液,使用0.5ml以旋轉塗佈機(MIKASA株式會公司製,MS-A100M)旋轉塗佈(500rpm/5秒及2000rpm/60秒)在附有閘極電極的塑膠基板上,進一步以80℃×3分鐘、150℃×3分鐘、210℃×40分鐘、及以250℃×60分鐘的熱處理而得之膜厚525nm的BCB樹脂作為閘極絕緣膜之外,以與實施例1同樣的方法製作底閘極-底接觸型有機薄膜電晶體。 In a glove box, a solution obtained by mixing 3.0 g of divinyloxane benzocyclobutene (BCB) (trade name: CYCROTEN 3022-35) (manufactured by Dow Chemical Co., Ltd.) and 3.0 g of trimethylbenzene was used. 0.5 ml was spin-coated (500 rpm/5 sec and 2000 rpm/60 sec) on a plastic substrate with a gate electrode by a spin coater (MS-A100M, manufactured by MIKASA Co., Ltd.), further at 80 ° C for 3 minutes. In the same manner as in Example 1, a BBB resin having a film thickness of 525 nm obtained by heat treatment at 250 ° C for 60 minutes was used as a gate insulating film at 150 ° C × 3 minutes, 210 ° C × 40 minutes, and heat treatment at 250 ° C × 60 minutes. A pole-bottom contact type organic thin film transistor.

(界面能的計算) (calculation of interface energy)

水對2,7-(正己基)二噻吩並苯並二噻吩的接觸角及二碘甲烷的接觸角,及水對BCB樹脂的接觸角及二碘甲烷的接觸角算出界面為0.35mJ/m2The contact angle of water to 2,7-(n-hexyl)dithienobenzodithiophene and the contact angle of diiodomethane, and the contact angle of water to BCB resin and the contact angle of diiodomethane are 0.35 mJ/m. 2 .

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性測定。將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.85cm/Vs,且載子遷移率的標準偏差σ為0.15,故變動係數CV(載子遷移率)為18%。此外,100個元件的電流開關比的常用對數的平均為7.2且與電流開關比的常用對數的標準偏差σ為0.45,故變動係數CV(log10AR)為6%。此外,限值電壓的平均為-1.5V,且限值電壓的標準偏差σ為0.093。 An organic thin film transistor array was produced in the same manner as in Example 2, and electrical measurement of the organic thin film transistor array was performed. The carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio were calculated by the coefficient of variation CV, and the error degree of the limit voltage was calculated by the standard deviation σ. As a result, the average carrier mobility of the produced 100 elements was 0.85 cm/Vs, and the standard deviation σ of the carrier mobility was 0.15, so the coefficient of variation CV (carrier mobility) was 18%. Further, the average of the common logarithm of the current switching ratio of 100 elements is 7.2 and the standard deviation σ of the common logarithm of the current switching ratio is 0.45, so the coefficient of variation CV (log10AR) is 6%. Further, the average value of the limit voltage is -1.5 V, and the standard deviation σ of the limit voltage is 0.093.

由以上,確認顯示非常小的誤差特性。 From the above, it was confirmed that very small error characteristics were exhibited.

實施例5 Example 5 (閘極絕緣膜的形成) (Formation of gate insulating film)

在手套箱內,將具有環化點的聚醯胺酸(架橋聚醯亞胺系樹脂的前驅物)溶液(商品名:CT4112)(京瓷化學公司製)0.5ml,使用旋轉塗佈機(MIKASA公司製,MS-A100M),旋轉塗佈(500rpm/5秒及6000rpm/120秒)在附有閘極電極的塑膠基板上,進一步以80℃×60分鐘、120℃×60分鐘、及以180℃×60分鐘的熱處理得到膜厚590nm的架橋聚醯亞胺系樹脂作為閘極絕緣膜之外,以與實施例1同樣的方法製作底閘極-底 接觸型有機薄膜電晶體。 In a glove box, a solution of a poly-proline (a precursor of a bridging polyimide resin) having a cyclization point (trade name: CT4112) (manufactured by Kyocera Chemical Co., Ltd.) (0.5 ml) was used, and a spin coater (MIKASA) was used. Company-made, MS-A100M), spin coating (500 rpm/5 sec and 6000 rpm/120 sec) on a plastic substrate with a gate electrode, further at 80 ° C × 60 minutes, 120 ° C × 60 minutes, and 180 A bottom gate-bottom was produced in the same manner as in Example 1 except that a bridged polyimine-based resin having a film thickness of 590 nm was obtained as a gate insulating film by heat treatment at ° C × 60 minutes. Contact type organic thin film transistor.

(界面能的計算) (calculation of interface energy)

水對2,7-(正己基)二噻吩並苯並二噻吩的接觸角及二碘甲烷的接觸角,及水對架橋聚醯亞胺系樹脂的接觸角及二碘甲烷的接觸角算出界面能為1.6mmJ/m2The contact angle of water to 2,7-(n-hexyl)dithienobenzodithiophene and the contact angle of diiodomethane, and the contact angle of water to the bridging polyimine resin and the contact angle of diiodomethane energy of 1.6mmJ / m 2.

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性的測定,結果製作的100個元件的平均載子遷移率為0.55cm2/Vs,且載子遷移率的標準偏差σ為0.051故變動係數CV(載子遷移率)為9%。此外,100個元件的電流開關比的常用對數的平均為6.4且與電流開關比的常用對數的標準偏差σ為0.51,故變動係數CV(log10AR)為8%。 此外,限值電壓的平均為5.8V,且限值電壓的標準偏差σ為0.19。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. As a result, the average carrier mobility of the 100 elements produced was 0.55 cm 2 /Vs, and the carrier was used. The standard deviation σ of the mobility was 0.051, so the coefficient of variation CV (carrier mobility) was 9%. Further, the average of the common logarithm of the current switching ratio of 100 elements is 6.4 and the standard deviation σ of the common logarithm of the current switching ratio is 0.51, so the coefficient of variation CV (log10AR) is 8%. Further, the average value of the limit voltage is 5.8 V, and the standard deviation σ of the limit voltage is 0.19.

由以上,確認顯示非常小的誤差特性。 From the above, it was confirmed that very small error characteristics were exhibited.

實施例6 Example 6 (閘極絕緣膜的形成) (Formation of gate insulating film)

在手套箱內,將具有環化點的聚醯胺酸(架橋聚醯亞胺系樹脂的前驅物)溶液(商品名:CT4200)(京瓷化學公司製)3.0g混合N-甲基2-吡咯烷酮3.0g所得之溶液,使用0.5ml,使用旋轉塗佈機(MIKASA公司製,MS-A100M)旋轉塗佈(500rpm/5秒及2500rpm/120秒)在附有閘極電極的塑膠基板上,進一步以150℃×60分鐘、250℃×30分鐘、及以320℃×30分鐘的熱處理得到膜厚490nm的架橋聚醯亞胺系樹脂作為閘極絕緣膜之 外,以與實施例1同樣的方法製作底閘極-底接觸型有機薄膜電晶體。 In the glove box, a solution of a poly-proline (a precursor of a bridging polyimide resin) having a cyclization point (trade name: CT4200) (manufactured by Kyocera Chemical Co., Ltd.) 3.0 g of mixed N-methyl 2-pyrrolidone 3.0 g of the obtained solution was spin-coated (500 rpm/5 sec and 2500 rpm/120 sec) on a plastic substrate with a gate electrode using a spin coater (MS-A100M, manufactured by MIKASA Co., Ltd.) using 0.5 ml of the solution. A bridged polyimide resin having a film thickness of 490 nm was obtained as a gate insulating film by heat treatment at 150 ° C × 60 minutes, 250 ° C × 30 minutes, and 320 ° C × 30 minutes. A bottom gate-bottom contact type organic thin film transistor was produced in the same manner as in Example 1.

(界面能的計算) (calculation of interface energy)

水對2,7-(正己基)二噻吩並苯並二噻吩的接觸角及二碘甲烷的接觸角,及水對架橋聚醯亞胺系樹脂的接觸角及二碘甲烷的接觸角算出界面能為1.7mJ/m2The contact angle of water to 2,7-(n-hexyl)dithienobenzodithiophene and the contact angle of diiodomethane, and the contact angle of water to the bridging polyimine resin and the contact angle of diiodomethane energy of 1.7mJ / m 2.

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性的測定。然後,將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.42cm2/Vs,且載子遷移率的標準偏差σ為0.087,故變動係數CV(載子遷移率)為20%。此外,100個元件的電流開關比的常用對數的平均為3.1且與電流開關比的常用對數的標準偏差σ為0.31,故變動係數CV(log10AR)為10%。此外,限值電壓的平均為6.2V,且限值電壓的標準偏差σ為0.19。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio were calculated by the coefficient of variation CV, and the degree of error of the limit voltage was calculated by the standard deviation σ. As a result, the average carrier mobility of the produced 100 elements was 0.42 cm 2 /Vs, and the standard deviation σ of the carrier mobility was 0.087, so the coefficient of variation CV (carrier mobility) was 20%. Further, the average of the common logarithm of the current switching ratio of 100 elements is 3.1 and the standard deviation σ of the common logarithm of the current switching ratio is 0.31, so the coefficient of variation CV (log10AR) is 10%. Further, the average value of the limit voltage is 6.2 V, and the standard deviation σ of the limit voltage is 0.19.

由以上,確認顯示非常小的誤差特性。 From the above, it was confirmed that very small error characteristics were exhibited.

實施例7 Example 7 (閘極絕緣膜的形成) (Formation of gate insulating film)

二對二甲苯基(商品名:dix-N))(第三化成公司製)2.7g,以LABCOATER(PARYLENE JAPAN公司製,PDS2010),於附有閘極電極的塑膠基板上真空蒸鍍膜厚431nm的聚(對二甲苯)作為閘極絕緣膜之外,以與實施例1同樣的方法製作底閘極-底 接觸型有機薄膜電晶體。 2.7 g of di-p-dimethylphenyl (trade name: dix-N) (manufactured by Daisei Co., Ltd.), vacuum-deposited 431 nm on a plastic substrate with a gate electrode by LABCOATER (PDS2010, manufactured by PARYLENE JAPAN) The bottom gate-bottom was fabricated in the same manner as in Example 1 except that poly(p-xylene) was used as the gate insulating film. Contact type organic thin film transistor.

(界面能的計算) (calculation of interface energy)

水對2,7-(正己基)二噻吩並苯並二噻吩的接觸角及二碘甲烷的接觸角,及水對架橋聚醯亞胺系樹脂的接觸角及二碘甲烷的接觸角算出界面能為1.5mJ/m2The contact angle of water to 2,7-(n-hexyl)dithienobenzodithiophene and the contact angle of diiodomethane, and the contact angle of water to the bridging polyimine resin and the contact angle of diiodomethane Can be 1.5mJ/m 2 .

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性的測定。然後,將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.75cm2/Vs,且載子遷移率的標準偏差σ為0.072,故變動係數CV(載子遷移率)為9%。此外,100個元件的電流開關比的常用對數的平均為6.8,且與電流開關比的常用對數的標準偏差σ為0.53,故變動係數CV(log10AR)為8%。此外,限值電壓的平均為-0.052V,且限值電壓的標準偏差σ為0.18。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio were calculated by the coefficient of variation CV, and the degree of error of the limit voltage was calculated by the standard deviation σ. As a result, the average carrier mobility of the produced 100 elements was 0.75 cm 2 /Vs, and the standard deviation σ of the carrier mobility was 0.072, so the coefficient of variation CV (carrier mobility) was 9%. Further, the average of the common logarithm of the current switching ratio of 100 elements was 6.8, and the standard deviation σ of the common logarithm of the current switching ratio was 0.53, so the coefficient of variation CV (log10AR) was 8%. Further, the average value of the limit voltage was -0.052 V, and the standard deviation σ of the limit voltage was 0.18.

由以上,確認顯示非常小的誤差特性。 From the above, it was confirmed that very small error characteristics were exhibited.

比較例1 Comparative example 1 (有機半導體層的形成與有機薄膜電晶體的製作) (Formation of Organic Semiconductor Layer and Fabrication of Organic Thin Film Transistor)

形成有機半導體層時,使用0.2wt%的甲苯溶液,使用滴鑄法(滴下0.5μL)之外,以與實施例1同樣的方法製作製作底閘極-底接觸型有機薄膜電晶體。 In the case of forming an organic semiconductor layer, a bottom gate-bottom contact type organic thin film transistor was produced in the same manner as in Example 1 except that a 0.2 wt% toluene solution was used and a dropping casting method (dropping 0.5 μL) was used.

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行 該有機薄膜電晶體陣列的電性的測定。然後將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.37cm2/Vs,且載子遷移率的標準偏差σ為0.13,故變動係數CV(載子遷移率)為35%。此外,100個元件的電流開關比的常用對數的平均為7.3且與電流開關比的常用對數的標準偏差σ為0.48,故變動係數CV(log10AR)為7%。此外,限值電壓的平均為-0.21V,且限值電壓的標準偏差σ為0.29。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio are calculated by the coefficient of variation CV, and the error degree of the limit voltage is calculated by the standard deviation σ. As a result, the average carrier elements 100 fabricated mobility was 0.37cm 2 / Vs, and a standard deviation σ of the carrier mobility of 0.13, so that the coefficient of variation CV (carrier mobility) was 35%. Further, the average logarithm of the current switching ratio of the 100 elements was 7.3 and the standard deviation σ of the common logarithm of the current switching ratio was 0.48, so the coefficient of variation CV (log 10AR) was 7%. Further, the average value of the limit voltage is -0.21 V, and the standard deviation σ of the limit voltage is 0.29.

於第6圖表示所得100個元件的傳輸特性圖,於第7圖表示所得100個元件的變遷率的柱狀圖,於第8圖表示所得100個元件的限值電壓的柱狀圖。 Fig. 6 is a graph showing the transmission characteristics of the obtained 100 elements, Fig. 7 is a histogram showing the transition rates of the obtained 100 elements, and Fig. 8 is a histogram showing the limit voltages of the obtained 100 elements.

使用不是印刷製程的滴鑄法所製作有機薄膜電晶體,無法得到誤差特性小的有機薄膜電晶體。 An organic thin film transistor produced by a dropping casting method which is not a printing process is used, and an organic thin film transistor having a small error characteristic cannot be obtained.

比較例2 Comparative example 2 (有機半導體層的形成與有機薄膜電晶體的製作) (Formation of Organic Semiconductor Layer and Fabrication of Organic Thin Film Transistor)

於有機半導體(溶質)使用2,8-二氟-5,11-雙(三乙基矽基乙炔基)蒽二噻吩(西格瑪奧瑞奇公司製製),且溶劑使用三甲苯之外,以與實施例1同樣的方法製作底閘極-底接觸型有機薄膜電晶體。 2,8-difluoro-5,11-bis(triethyldecylethynyl)phosphonium dithiophene (manufactured by Sigma Oricic Co., Ltd.) was used as the organic semiconductor (solute), and the solvent was used in the presence of trimethylbenzene. A bottom gate-bottom contact type organic thin film transistor was produced in the same manner as in Example 1.

(界面能的計算) (calculation of interface energy)

水對於2,8-二氟-5,11-雙(三乙基矽基乙炔基)蒽二噻吩的接觸角及二碘代甲烷的接觸角,及水對聚(氯對二甲苯)的接觸角以及二碘代甲烷的接觸角算出界面能為0.79mJ/m2The contact angle of water to 2,8-difluoro-5,11-bis(triethyldecylethynyl)phosphonium dithiophene and the contact angle of diiodomethane, and the contact of water with poly(chloro-p-xylene) The interface energy of the angle of contact of the angle and diiodomethane was 0.79 mJ/m 2 .

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性的測定。然後將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.10cm2/Vs,且載子遷移率的標準偏差σ為0.030,故變動係數CV(載子遷移率)為30%。此外,100個元件的電流開關比的常用對數的平均為7.0且與電流開關比的常用對數的標準偏差σ為0.76,故變動係數CV(log10AR)為11%。此外,限值電壓的平均為0.85V,且限值電壓的標準偏差σ為0.35。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio are calculated by the coefficient of variation CV, and the error degree of the limit voltage is calculated by the standard deviation σ. As a result, the average carrier mobility of the produced 100 elements was 0.10 cm 2 /Vs, and the standard deviation σ of the carrier mobility was 0.030, so the coefficient of variation CV (carrier mobility) was 30%. Further, the average of the common logarithm of the current switching ratio of 100 elements was 7.0 and the standard deviation σ of the common logarithm of the current switching ratio was 0.76, so the coefficient of variation CV (log10AR) was 11%. Further, the average value of the limit voltage was 0.85 V, and the standard deviation σ of the limit voltage was 0.35.

於第9圖表示所得100個元件的傳輸特性圖,於第10圖表示所得100個元件的遷移率的柱狀圖,於第11圖表示所得100個元件的限值電壓的柱狀圖。 Fig. 9 is a graph showing the transmission characteristics of the obtained 100 elements, and Fig. 10 is a histogram showing the mobility of the obtained 100 elements, and Fig. 11 is a histogram showing the limit voltages of the obtained 100 elements.

由於有機半導體膜,不包含通式(1)所示有機半導體,故無法得到誤差特性小的有機薄膜電晶體。 Since the organic semiconductor film does not contain the organic semiconductor represented by the general formula (1), an organic thin film transistor having a small error characteristic cannot be obtained.

比較例3 Comparative example 3 (有機半導體層的形成與有機薄膜電晶體的製作) (Formation of Organic Semiconductor Layer and Fabrication of Organic Thin Film Transistor)

於有機半導體(溶質)使用2,8-二氟-5,11-雙(三乙基矽基乙炔基)蒽二噻吩(西格瑪奧瑞奇公司製),使用三甲苯作為溶劑作成0.2wt%的溶液,且形成有機半導體層時,使用該0.2wt%的三甲苯溶液,使用滴鑄法(滴出0.5μL)之外,以與實施例1同樣的方法製作製作底閘極-底接觸型有機薄膜電晶體。 2,8-difluoro-5,11-bis(triethyldecylethynyl)phosphonium dithiophene (manufactured by Sigma Oricic Co., Ltd.) was used as an organic semiconductor (solute), and 0.2 wt% was prepared using trimethylbenzene as a solvent. When the solution was formed and the organic semiconductor layer was formed, the bottom gate-bottom contact organic compound was produced in the same manner as in Example 1 except that the 0.2 wt% trimethylbenzene solution was used and the dropping casting method (dropping 0.5 μL) was used. Thin film transistor.

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性的測定。然後將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.10cm2/Vs,且載子遷移率的標準偏差σ為0.060,故變動係數CV(載子遷移率)為60%。此外,100個元件的電流開關比的常用對數的平均為3.8且與電流開關比的常用對數的標準偏差σ為1.5,故變動係數CV(log10AR)為39%。此外,限值電壓的平均為0.22V,且限值電壓的標準偏差σ為0.68。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio are calculated by the coefficient of variation CV, and the error degree of the limit voltage is calculated by the standard deviation σ. As a result, the average carrier mobility of the produced 100 elements was 0.10 cm 2 /Vs, and the standard deviation σ of the carrier mobility was 0.060, so the coefficient of variation CV (carrier mobility) was 60%. Further, the average logarithm of the current switching ratio of the 100 elements was 3.8 and the standard deviation σ of the common logarithm of the current switching ratio was 1.5, so the coefficient of variation CV (log10AR) was 39%. Further, the average value of the limit voltage was 0.22 V, and the standard deviation σ of the limit voltage was 0.68.

於第12圖表示所得100個元件的傳輸特性圖,於第13圖表示所得100個元件的遷移率的柱狀圖,於第14圖表示所得100個元件的限值電壓的柱狀圖。 Fig. 12 is a graph showing the transmission characteristics of the obtained 100 elements, and Fig. 13 is a histogram showing the mobility of the obtained 100 elements, and Fig. 14 is a histogram showing the limit voltages of the obtained 100 elements.

由於有機半導體膜並沒有包含通式(1)所示有機半導體,且使用不是印刷製程的滴鑄法製作有機薄膜電晶體,故無法得到誤差特性小的有機薄膜電晶體。 Since the organic semiconductor film does not contain the organic semiconductor represented by the general formula (1), and the organic thin film transistor is formed by a dropping casting method which is not a printing process, an organic thin film transistor having a small error characteristic cannot be obtained.

比較例4 Comparative example 4 (閘極絕緣膜的形成) (Formation of gate insulating film)

在手套箱內,對10mL的樣品管加入聚乙烯酚(西格瑪奧瑞奇公司製,Mw~25000)1.0g與丙二醇-1-單甲醚-2-醋酸酯(關東化學公司製,鹿特級)4.0g,藉由攪拌10小時所得溶液1g,及於手套箱內對10mL的樣品管加入聚(三聚氰胺-co-甲醛)(西格瑪奧瑞奇公司製,Mn~432)0.5g與丙二醇-1-單甲醚-2-醋酸酯(關東化學公司製,鹿特級)4.5g,藉由攪拌10小時所得溶液 2g,混合所得的溶液之中的0.5ml,於上述軟性基板上,以旋轉塗佈機(MIKASA公司製,MS-A100M)進行旋轉塗佈製膜(500rpm/5秒、及1500rpm/30秒)之後,進一步以90℃×10分鐘,及150℃×60分鐘的熱處理形成膜厚535nm的架橋聚乙烯酚作為絕緣膜之外,以與實施例1同樣的方法製作底閘極-底接觸型有機薄膜電晶體。 In a glove box, 1.0 g of polyvinylphenol (Mw~25000, manufactured by Sigma Oric, Inc.) and propylene glycol-1-monomethyl ether-2-acetate (manufactured by Kanto Chemical Co., Ltd., Rote grade) were added to a 10 mL sample tube. 4.0 g, 1 g of the solution obtained by stirring for 10 hours, and a poly (melamine-co-formaldehyde) (manufactured by Sigma-Rickey Co., Ltd., Mn~432) 0.5 g and propylene glycol-1-1 were added to a 10 mL sample tube in a glove box. Monomethyl ether-2-acetate (manufactured by Kanto Chemical Co., Ltd., Lut grade) 4.5 g, obtained by stirring for 10 hours 2 g, 0.5 ml of the obtained solution was mixed, and spin-coated on a soft substrate (MS-A100M, manufactured by MIKASA Co., Ltd.) on the above-mentioned flexible substrate (500 rpm/5 sec, and 1500 rpm/30 sec) Thereafter, a bridged polyethylene phenol having a film thickness of 535 nm was formed as a heat insulating film at 90 ° C for 10 minutes and at 150 ° C for 60 minutes, and a bottom gate-bottom contact organic compound was produced in the same manner as in Example 1. Thin film transistor.

(界面能的計算) (calculation of interface energy)

水對2,7-(正己基)二噻吩並苯並二噻吩的接觸角及二碘甲烷的接觸角,及水對架橋聚乙烯酚的接觸角及二碘甲烷的接觸角算出界面能為3.9mJ/m2The contact angle of water to 2,7-(n-hexyl)dithienobenzodithiophene and the contact angle of diiodomethane, and the contact angle of water to bridging polyvinylphenol and the contact angle of diiodomethane were calculated to be 3.9. mJ/m 2 .

(半導體電性的測定) (Measurement of semiconductor electrical properties)

以與實施例2同樣的方法製作有機薄膜電晶體陣列,進行該有機薄膜電晶體陣列的電性的測定。然後將100個有機薄膜電晶體元件的載子遷移率及電流開關比的誤差程度以變動係數CV計算,將限值電壓的誤差程度以標準偏差σ計算。結果,所製作的100個元件的平均載子遷移率為0.32cm2/Vs,且載子遷移率的標準偏差σ為0.037,故變動係數CV(載子遷移率)為11%。此外,100個元件的電流開關比的常用對數的平均為4.2且與電流開關比的常用對數的標準偏差σ為0.87,故變動係數CV(log10AR)為21%。此外,限值電壓的平均為-2.7V,且限值電壓的標準偏差σ為0.67。 An organic thin film transistor array was produced in the same manner as in Example 2, and the electrical properties of the organic thin film transistor array were measured. Then, the carrier mobility of the 100 organic thin film transistor elements and the error degree of the current switching ratio are calculated by the coefficient of variation CV, and the error degree of the limit voltage is calculated by the standard deviation σ. As a result, the average carrier mobility of the produced 100 elements was 0.32 cm 2 /Vs, and the standard deviation σ of the carrier mobility was 0.037, so the coefficient of variation CV (carrier mobility) was 11%. Further, the average of the common logarithm of the current switching ratio of the 100 elements was 4.2 and the standard deviation σ of the common logarithm of the current switching ratio was 0.87, so the coefficient of variation CV (log10AR) was 21%. Further, the average value of the limit voltage was -2.7 V, and the standard deviation σ of the limit voltage was 0.67.

由於用於閘極絕緣膜的材料與有機半導體之間的界面能較2mJ/m2大,故無法得到誤差特性小的有機薄膜電晶體。 Since the interface energy between the material for the gate insulating film and the organic semiconductor is larger than 2 mJ/m 2 , an organic thin film transistor having a small error characteristic cannot be obtained.

產業上的可利性 Industrial profitability

本發明的有機薄膜電晶體,可有效地利用遷移率高且限值電壓等性能的誤差小的特徵,利用在半導體pH傳感器、半導體離子傳感器、半導體壓力傳感器、半導體溫度傳感器、光傳感器等地各種高靈敏度傳感器。 The organic thin film transistor of the present invention can effectively utilize various characteristics such as a semiconductor pH sensor, a semiconductor ion sensor, a semiconductor pressure sensor, a semiconductor temperature sensor, and an optical sensor, because of high mobility and low error in performance such as a limit voltage. High sensitivity sensor.

再者,本發明係主張以日本專利申請編號2014-036940為優先權其申請日為西元2014年2月27日,且其說明書、專利申請範圍、圖面及摘要全部內容以參考資料包含於此。 Furthermore, the present invention claims priority to Japanese Patent Application No. 2014-036940, the filing date of which is the entire filing date of .

Claims (9)

一種有機薄膜電晶體,具有閘極電極、閘極絕緣膜、源極電極、汲極電極及有機半導體膜的有機薄膜電晶體,其特徵在於:該有機半導體膜包含以通式(1)所表示之有機半導體,使用於上述閘極絕緣膜的材料與上述有機半導體之間的界面能為2.0mJ/m2以下,且上述有機半導體膜係以印刷製程製膜而得: 式中,R1~R6係分別獨立地表示,氫原子、碳數1~20之烷基、碳數2~20之烯基、碳數2~20之炔基、碳數1~20之烷氧基、碳數1~20之烷硫基、碳數1~20之鹵化烷基、碳數3~10之環烷基、碳數6~14之芳基、3~12員環之環雜烷基、5~14員環之雜芳基,或以通式(2)表示之基:-Y-R7 (2)式中,R7係表示碳數3~10之環烷基、碳數6~14之芳基、3~12員環之環雜烷基、或5~14員環之雜芳基,Y係表示碳數1~6之2價烷基、或碳數1~6之2價鹵化烷基。 An organic thin film transistor having an organic thin film transistor having a gate electrode, a gate insulating film, a source electrode, a drain electrode, and an organic semiconductor film, wherein the organic semiconductor film is represented by the general formula (1) The organic semiconductor has an interface energy of 2.0 mJ/m 2 or less between the material of the gate insulating film and the organic semiconductor, and the organic semiconductor film is formed by a printing process: In the formula, R 1 to R 6 are each independently represented by a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, and a carbon number of 1 to 20; Alkoxy group, alkylthio group having 1 to 20 carbon atoms, halogenated alkyl group having 1 to 20 carbon atoms, cycloalkyl group having 3 to 10 carbon atoms, aryl group having 6 to 14 carbon atoms, ring of 3 to 12 member rings a heteroalkyl group, a heteroaryl group of 5 to 14 membered rings, or a group represented by the formula (2): -YR 7 (2) wherein R 7 represents a cycloalkyl group having 3 to 10 carbon atoms and a carbon number 6 to 14 aryl, 3 to 12 membered ring heteroalkyl, or 5 to 14 membered heteroaryl, Y is a carbon number of 1 to 6 divalent alkyl, or a carbon number of 1 to 6. A divalent halogenated alkyl group. 根據申請專利範圍第1項之有機薄膜電晶體,其中使用於閘極絕緣膜的材料係有機塗層型材料。 The organic thin film transistor according to the first aspect of the patent application, wherein the material used for the gate insulating film is an organic coating type material. 一種有機薄膜電晶體,具有閘極電極、閘極絕緣膜、源極電極、汲極電極及有機半導體膜的有機薄膜電晶體, 其特徵在於:上述有機半導體膜包含以通式(1)所表示之有機半導體,使用於該閘極絕緣膜的材料係聚(氯對二甲苯),且有機半導體膜係以印刷製程製膜而得: 式中,R1~R6係分別獨立地表示,氫原子、碳數1~20之烷基、碳數2~20之烯基、碳數2~20之炔基、碳數1~20之烷氧基、碳數1~20之烷硫基、碳數1~20之鹵化烷基、碳數3~10之環烷基、碳數6~14之芳基、3~12員環之環雜烷基、5~14員環之雜芳基,或以通式(2)表示之基:-Y-R7 (2)式中,R7係表示碳數3~10之環烷基、碳數6~14之芳基、3~12員環之環雜烷基、或5~14員環之雜芳基,Y係表示碳數1~6之2價烷基、或碳數1~6之2價鹵化烷基。 An organic thin film transistor having an organic thin film transistor having a gate electrode, a gate insulating film, a source electrode, a drain electrode, and an organic semiconductor film, wherein the organic semiconductor film is represented by the general formula (1) The organic semiconductor is used for the material of the gate insulating film (chloro-p-xylene), and the organic semiconductor film is formed by a printing process: In the formula, R 1 to R 6 are each independently represented by a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 20 carbon atoms, an alkynyl group having 2 to 20 carbon atoms, and a carbon number of 1 to 20; Alkoxy group, alkylthio group having 1 to 20 carbon atoms, halogenated alkyl group having 1 to 20 carbon atoms, cycloalkyl group having 3 to 10 carbon atoms, aryl group having 6 to 14 carbon atoms, ring of 3 to 12 member rings a heteroalkyl group, a heteroaryl group of 5 to 14 membered rings, or a group represented by the formula (2): -YR 7 (2) wherein R 7 represents a cycloalkyl group having 3 to 10 carbon atoms and a carbon number 6 to 14 aryl, 3 to 12 membered ring heteroalkyl, or 5 to 14 membered heteroaryl, Y is a carbon number of 1 to 6 divalent alkyl, or a carbon number of 1 to 6. A divalent halogenated alkyl group. 根據申請專利範圍第1項之有機薄膜電晶體,其中使用於閘極絕緣膜的材料係聚(對二甲苯)、聚(二氯對二甲苯)。 The organic thin film transistor according to claim 1, wherein the material used for the gate insulating film is poly(p-xylene) or poly(dichloro-p-xylene). 根據申請專利範圍第1至4項中任一項之有機薄膜電晶體,其中有機半導體,係通式(3)所示: 式中,R1、R2係各自獨立地表示,氫原子、碳数1~20之烷 基或碳数1~20之烷氧基。 The organic thin film transistor according to any one of claims 1 to 4, wherein the organic semiconductor is represented by the general formula (3): In the formula, R 1 and R 2 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms or an alkoxy group having 1 to 20 carbon atoms. 根據申請專利範圍第1至5項中任一項之有機薄膜電晶體,其中有機半導體膜的印刷製程係點膠印刷、噴墨印刷、膠版印刷、凸版印刷、凹版印刷、照相凹版印刷、狹縫塗佈印刷或網版印刷。 The organic thin film transistor according to any one of claims 1 to 5, wherein the printing process of the organic semiconductor film is dispensing printing, inkjet printing, offset printing, letterpress printing, gravure printing, gravure printing, slit Coat printing or screen printing. 一種有機薄膜電晶體陣列,使用申請專利範圍第1至6項中任一項之有機薄膜電晶體而得。 An organic thin film transistor array obtained by using the organic thin film transistor of any one of claims 1 to 6. 一種差動增幅電路,使用申請專利範圍第1至6項中任一項之有機薄膜電晶體。 A differential amplification circuit using the organic thin film transistor of any one of claims 1 to 6. 一種有機電子設備,使用申請專利範圍第8項之差動增幅電路而得。 An organic electronic device obtained by using a differential amplification circuit of claim 8 of the patent application.
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