TW201537269A - Polarized light illuminating device - Google Patents

Abstract

A polarized light illuminating device is provided, which can obtain good polarized axis features within an illuminating range. The invention includes a light source 5, a filter 20, a polarized element 25, a polarized element holding portion 26 and a light shielding plate 30. The light source 5 emits light. The filter 20 is illuminated by the light emitted by the light source 5 and then emits UV. The polarized element 25 is disposed at one side of the filter 20 facing to the light source 5, the UV enters and then polarized light is emitted. The polarized element holding portion 26 holds the polarized element 25 and has an opening portion 27 transmitting the polarized light emitted by the polarized element 25. The light shielding plate 30 is disposed at one side of the polarized element holding portion 26 facing to the light source 5 and disposed to enclose the opening portion 27.

Description

Polarized light irradiation device

Embodiments of the present invention relate to a polarized light irradiation device used in liquid crystal panel manufacturing or the like.

Although a rubbing step is known as a technique for aligning an alignment film during production of a liquid crystal panel or the like, in recent years, as a technique for replacing the rubbing step, the alignment film is irradiated with polarized light of a predetermined wavelength. A technique of performing orientation treatment, that is, so-called photo-alignment, has been attracting attention. As a polarized light irradiation device which is a device for performing the photo-alignment, for example, a bar-shaped lamp as a linear light source and a wire-grid polarizing element having a grid of a wire grid are proposed. A polarized light irradiation device.

The dependence of the extinction ratio of the polarized light emitted from the wire-gate polarizing element on the angle of the light incident on the polarizing element is smaller than that of the polarizing element using the vapor deposited film or the Brewster angle. Therefore, even if the divergent light such as the light emitted from the rod-shaped lamp is within the range of ±45°, the polarized light having a relatively good extinction ratio can be obtained over the entire area irradiated with the light. Thus, in this bias In the illuminating device, the length of the rod-shaped lamp is set to a length corresponding to the width of the alignment film as the object to be processed, and the alignment film is unidirectionally moved with respect to the polarized light irradiation device during the alignment treatment. A rod-shaped lamp can be used to perform orientation treatment of a large-area alignment film.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-265290

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-145381

Here, the polarized light irradiation device is configured to irradiate light to the irradiation surface of the alignment film with as much light as possible, and specifically, to condense light from the rod-shaped lamp. The polarizing element suppresses the irradiation loss toward the outside of the polarizing element. However, when the light originating from the rod-shaped lamp is condensed on the polarizing element as described above, the polarized light transmitted through the polarizing element is diffused. Further, the polarized light spreads beyond the area of the polarizing element on the irradiated surface on which the diffused polarized light is irradiated. It is known that the polarization axis of polarized light that is irradiated to a position beyond the area of the polarizing element is deteriorated. When the light whose polarization axis has deteriorated is irradiated to the alignment film as an object to be irradiated, the characteristics of the alignment film are lowered.

The present invention has been made in view of the above circumstances, and an object is to provide a polarization A light irradiation device that suppresses irradiation of polarized light having a reduced polarization axis characteristic outside the irradiation range. Further, a second object of the present invention is to provide a polarized light irradiation apparatus using an absorbing polarizing element.

The polarized light irradiation device of the embodiment includes a light source, a filter, a polarizing element, a polarizing element holding unit, and a light shielding plate. The light source emits light. The filter is irradiated with light emitted from the light source to emit ultraviolet rays. The polarizing element is disposed on a side of the optical filter opposite to the light source, and receives ultraviolet light and emits polarized light. The polarizing element holding portion holds the polarizing element and has an opening that transmits polarized light emitted from the polarizing element. The light shielding plate is disposed on a side of the polarizing element holding portion that faces the light source, and is disposed to surround the opening. A transparent member that closes the inner space of the light shielding plate is disposed at an end portion on the opposite side to the side where the opening portion of the light shielding plate is located. An air supply and exhaust portion is formed in a plurality of portions of the light shielding plate. Further, the polarized light irradiation device according to the embodiment includes a light source that emits light, and a first polarizing element that transmits polarized light of a polarization axis parallel to a predetermined reference direction among light emitted from the light source, and an absorbing polarizing element. Among the light transmitted through the reflective polarizing element, the polarized light of the polarization axis parallel to the predetermined reference direction is transmitted. Further, a filter is provided between the light source and the first polarizing element. Moreover, the light source is a mercury lamp or a metal halide lamp.

According to the present invention, it is possible to suppress a decrease in polarization axis characteristics outside the irradiation range. Moreover, according to the present invention, it is possible to provide a polarized light irradiation apparatus using an absorbing polarizing element.

1, 40, 100‧‧‧ polarized light irradiation device

5‧‧‧Light source

10‧‧‧reflector

11‧‧‧reflecting surface

12‧‧‧Voids

20‧‧‧ filter

21‧‧‧ Filter frame

25‧‧‧Polarizing element

26‧‧‧Polarizing element holding unit

27‧‧‧ openings

30, 50‧‧ ‧ visor

31, 51‧‧ ‧ visor reflective surface

52‧‧‧glass plate (transparent member)

55‧‧‧Air supply and exhaust

56‧‧‧Air Supply Department

57‧‧‧Exhaust Department

210, 220, 230‧‧‧ polarized light irradiation device (ultraviolet irradiation device)

211‧‧‧Light source

212‧‧‧Mirror

214‧‧‧ Filter

216‧‧‧1st polarizing element

216a‧‧‧glass plate

216b‧‧‧ lattice

218‧‧‧Absorbing polarizing element

219‧‧‧Media

C‧‧‧Light Center

E‧‧‧cooling wind

F‧‧‧ focus

L1, L3‧‧‧ part of the light

L2, L4‧‧‧ part of polarized light

M1, m2‧‧‧ polarized light

PA, PB‧‧‧ polarization axis

U, U ' ‧ ‧ light

UA‧‧‧UV (light)

UB, UC‧‧‧ ultraviolet (polarized light)

W‧‧‧Workpiece (object)

X, Y, Z‧‧‧ axes

Y1‧‧‧ arrow

Fig. 1 is an exploded perspective view showing a configuration of a polarized light irradiation device according to a first embodiment.

Fig. 2 is a cross-sectional view taken along the line A-A of the single-dot chain line A-A of the polarized light irradiation device shown in Fig. 1;

FIG. 3 is an explanatory view showing an irradiation state of light in the polarized light irradiation device shown in FIG. 1.

4 is an explanatory view of a polarized light irradiation device in which a light shielding plate is not provided.

Fig. 5 is a cross-sectional view showing the polarized light irradiation device of the second embodiment in the X-axis direction.

Figure 6 is a B-B arrow view of Figure 5.

Figure 7 is a C-C arrow view of Figure 6.

FIG. 8 is a view showing a modification of the polarized light irradiation device according to the second embodiment, and is a view when the light shielding plate is viewed in the Y-axis direction.

Figure 9 is a D-D arrow view of Figure 8.

FIG. 10 is a perspective view showing a schematic configuration of an ultraviolet irradiation device according to an embodiment.

Fig. 11 is a view of the ultraviolet irradiation device of the embodiment as seen from the Y-axis direction.

FIG. 12 is a schematic view showing a configuration of a first polarizing element 216 of the ultraviolet irradiation device according to the embodiment.

Fig. 13 is a schematic view showing a modification of the ultraviolet irradiation device of the embodiment.

Fig. 14 is a view showing a modification of the ultraviolet irradiation device of the embodiment.

Fig. 15 is a view showing another modification of the ultraviolet irradiation device of the embodiment.

The polarized light irradiation device 1 and the polarized light irradiation device 40 according to the embodiment to be described below include the light source 5, the optical filter 20, the polarizing element 25, the polarizing element holding portion 26, the light shielding plate 30, and the light shielding plate 50. The light source 5 emits light. The filter 20 is irradiated with light emitted from the light source 5 to emit ultraviolet rays. The polarizing element 25 is disposed on the side of the optical filter 20 that faces the light source 5, and receives ultraviolet rays and emits polarized light. The polarizing element holding portion 26 holds the polarizing element 25 and has an opening portion 27 that transmits polarized light. The light shielding plate 30 and the light shielding plate 50 are disposed on the side of the polarization element holding portion 26 that faces the light source 5, and are disposed to surround the opening portion 27.

Further, in the polarized light irradiation device 40 of the embodiment to be described below, a transparent member that closes the inner space of the light shielding plate 50 is disposed at an end portion on the opposite side to the side where the opening portion 27 of the light shielding plate 50 is located. That is, the glass plate 52.

Further, in the polarized light irradiation device 40 of the embodiment to be described below, the supply and exhaust portion 55 is formed in a plurality of portions of the light shielding plate 50.

Further, the polarized light irradiation device 210 of the embodiment to be described below has a light source 211, a first polarizing element 216, and an absorbing polarizing element 218. The light source 211 emits light. The first polarizing element 216 transmits polarized light of a polarization axis parallel to a predetermined reference direction among the light emitted from the light source 211. Absorptive polarizing element 218 Among the light transmitted through the first polarizing element 216, the polarized light of the polarization axis parallel to the predetermined reference direction is transmitted.

Further, in the polarized light irradiation device 210 of the embodiment to be described below, the filter 214 is provided between the light source 211 and the first polarizing element 216.

Further, in the polarized light irradiation device 210 of the embodiment to be described below, the light source 211 is a mercury lamp or a metal halide lamp.

[Embodiment 1]

Next, the polarized light irradiation device of the first embodiment will be described based on the drawings. Fig. 1 is an exploded perspective view showing a configuration of a polarized light irradiation device according to a first embodiment. Fig. 2 is a cross-sectional view of the polarized light irradiation device shown in Fig. 1 as seen in the X-axis direction. The polarized light irradiation device 1 shown in FIG. 1 and FIG. 2 is used, for example, in the production of an alignment film of a liquid crystal panel or an alignment film of a viewing angle compensation film. The reference direction of the polarization axis of the ultraviolet ray that is irradiated onto the surface of the workpiece W as the workpiece can be appropriately set depending on the structure, use, or required specifications of the workpiece W. Hereinafter, the width direction of the workpiece W is referred to as an X-axis direction, and the longitudinal direction of the workpiece W (also referred to as a conveyance direction) orthogonal to the X-axis direction is referred to as a Y-axis direction, and the Y-axis direction and the X-axis direction are referred to. The orthogonal direction is called the Z-axis direction.

The polarized light irradiation device 1 of the first embodiment includes a light source 5 that emits light including ultraviolet rays, a reflector 10 that controls light distribution of light emitted from the light source 5, and a filter 20 that is disposed on the reflector 10 The traveling direction side of the light of the light distribution is controlled by the reflecting plate 10, and the light emitted from the light source 5 and the light that is controlled by the reflecting plate 10 are emitted to emit ultraviolet rays; the polarizing element 25 is disposed at Filter The exit side of 20 emits polarized light incident on the ultraviolet light emitted from the filter 20, and the polarizing element holding portion 26 holds the polarizing element 25.

The light source 5 is a rod-shaped or linear light source. In addition, the light source 5 is, for example, a high-pressure mercury lamp in which a rare gas such as mercury or argon is sealed in an ultraviolet-transmitting glass tube, or a metal halide lamp in which a metal halide such as iron or iodine is further sealed in a high-pressure mercury lamp. The tube type lamp has at least a linear light-emitting portion. The longitudinal direction of the light-emitting portion of the light source 5 is parallel to the X-axis direction, and the length of the light-emitting portion of the light source 5 is longer than the width of the workpiece W. The light source 5 can emit light including, for example, ultraviolet rays having a wavelength of 200 nm to 400 nm from the linear light-emitting portion, and the light emitted from the light source 5 is so-called non-polarized light having various polarization axis components.

Further, the reflecting plate 10 has a reflecting surface 11 that reflects the light emitted from the light source 5 on a surface facing the light source 5. The shape of the reflecting surface 11 when viewed in the direction along the axis of the light source 5 formed in a rod shape (the shape observed in the axial direction), that is, the shape viewed in the X-axis direction is a part of an elliptical opening. . The reflector 10 is provided such that the center of the light source 5, that is, the lamp center C is located at one of the two focal points of the ellipse of the reflecting surface 11, and the other focus side is open. The reflecting plate 10 has a shape of a part of an ellipse as described above, and the reflecting plate 10 is a so-called concentrating reflecting plate as described below, that is, when the light source 5 is disposed at a position of one of the focal points, The light emitted from the light source 5 is concentrated near the other focus (the focus F of Fig. 3). Further, the reflector 10 is disposed in a direction in which it is opened in the Z-axis direction.

The reflecting plate 10 extends along the shape and in parallel with respect to the light source 5 along a light source 5 formed in a rod shape. Further, the elliptical opening of the reflecting plate 10 on the reflecting surface 11 A void portion 12 which is a void which is open in the circumferential direction of the ellipse or in the Y-axis direction is formed in the vicinity of the portion on the opposite side of the side and the portion where the curvature of the ellipse is the largest. That is, as seen from the light source 5, the gap portion 12 is formed on the opposite side of the elliptical opening side of the reflecting surface 11 in the Z-axis direction. The reflector 10 communicates with the space on the inner side and the outer side of the ellipse by the gap portion 12. Further, the reflector 10 has a configuration in which a cold mirror (cold mirror) in which a base material contains glass and a reflective surface 11 is formed of a multilayer film. When the polarized light irradiation device 1 irradiates the irradiated object with polarized light, the light source 5 emits light while generating heat, but the air whose temperature rises due to the heat flows upward and escapes from the gap portion 12 to the upper side of the reflecting plate 10. . Thereby, the polarized light irradiation device 1 irradiates the workpiece W with ultraviolet rays and the temperature does not become excessively high.

Further, the filter 20 includes a conventional band-pass filter that transmits only a specific wavelength of light emitted from the light source 5, so that light emitted from the light source 5, for example, 254 nm or Ultraviolet light of a predetermined wavelength such as 365 nm is transmitted, and light transmission at other wavelengths is restricted. Further, the optical filter 20 is disposed on the elliptical opening side of the reflecting surface 11 in the Z-axis direction with respect to the light source 5 and the reflecting plate 10. The X-axis direction of the filter 20 and the periphery in the Y-axis direction are surrounded by a filter frame 21, whereby the filter 20 is held by the filter frame 21.

Similarly to the optical filter 20, the polarizing element 25 is disposed on the elliptical opening side of the reflecting surface 11 in the Z-axis direction with respect to the light source 5 and the reflecting plate 10. The reflecting plate 10 as a condensing type reflecting plate is provided in such a manner as to collect light onto the polarizing element 25.

The polarizing element 25 is formed by arranging a plurality of linear electric conductors (for example, metal wires such as chromium or aluminum alloy) on the substrate such as quartz glass at equal intervals and in parallel. Wire grid polarizing element. The longitudinal direction of the electrical conductor is orthogonal to the reference direction. The pitch of the electric conductor is preferably 1/3 or less of the wavelength of the ultraviolet light emitted from the light source 5. In the ultraviolet light emitted from the filter 20 by the light incident from the light source 5, the polarizing element 25 reflects or absorbs most of the ultraviolet rays whose polarization axis is parallel to the longitudinal direction of the electric conductor, and causes the polarization axis to be electrically connected. Ultraviolet rays orthogonal to the longitudinal direction of the conductor pass through and are irradiated to the workpiece W. The polarizing element 25 extracts ultraviolet rays whose polarization axis vibrates only in the reference direction from the ultraviolet rays emitted from the filter 20 disposed between the light source 5 and the polarizing element 25 as polarized light. Further, the polarizing element 25 can extract light having a polarization axis vibrating only in the reference direction from light having various polarization axis components emitted from the light source 5 and vibrating in the same direction in all directions. Further, generally, light in which the polarization axis vibrates only in the reference direction is referred to as linear polarization. Further, the polarization axis refers to the direction of vibration of the electric field and the magnetic field of light.

The polarizing element holding portion 26 holds the polarizing element 25 that receives the ultraviolet ray and emits the polarized light, and has the opening portion 27 that transmits the polarized light emitted from the polarizing element 25. Further, the periphery of the polarizing element 25 in the X-axis direction and the Y-axis direction is surrounded by the polarizing element holding portion 26, whereby the polarizing element holding portion 26 holds the polarizing element 25.

Further, in the first embodiment, the polarizing element 25 is disposed such that the longitudinal direction of the electric conductor is parallel to the Y-axis direction, and the ultraviolet ray having the polarization axis parallel to the X-axis direction passes. That is, in the first embodiment, the reference direction is parallel to the X-axis direction.

Further, a light shielding plate 30 is provided on a side of the polarizing element holding portion 26 facing the light source 5. The light shielding plate 30 is disposed to surround the opening 27 of the polarization element holding portion 26 . In detail, the polarizing element 25 is formed in a rectangular plate shape. Similarly to the polarizing element 25, the opening 27 formed in the polarizing element holding portion 26 that holds the polarizing element 25 is formed in a rectangular shape corresponding to the polarizing element 25.

The light shielding plate 30 is located on the emission side of the polarization light in the opening 27 of the polarization element holding portion 26, and protrudes from the polarization element holding portion 26 in the direction opposite to the direction in which the light source 5 or the like is located, and when viewed in the opening direction of the opening portion 27, The light shielding plate 30 is disposed to surround the opening portion 27. In other words, the shape of the inner side of the light shielding plate 30 is formed in a substantially angular cylindrical shape that is slightly larger than the opening portion 27, and the entire opening portion 27 of the rectangular shape is surrounded from the periphery when viewed in the Z-axis direction. The axial direction of the cylinder is arranged in the direction of the Z-axis direction. Therefore, the end of the light shielding plate 30 facing the polarization element holding portion 26 is opened. The surface on the inner side of the light shielding plate 30 thus provided is formed as a light shielding plate reflecting surface 31 that reflects light, for example, by disposing an aluminum foil or the like.

Further, the light shielding plate 30 is preferably provided in a range of 5 mm or less with respect to the opening portion 27 of the polarizing element holding portion 26 with the four sides of the corner cylinder being within 5 mm. Further, it is preferable that the height of the light shielding plate 30 in the Z-axis direction has an interval of at least 5 mm or more with respect to the irradiation surface of the workpiece W when the workpiece W is irradiated by the polarized light irradiation device 1.

The polarized light irradiation device 1 of the first embodiment has the above-described configuration, and the operation thereof will be described below. FIG. 3 is an explanatory view showing an irradiation state of light in the polarized light irradiation device shown in FIG. 1. When the workpiece W which is an object to be irradiated, such as an alignment film of a liquid crystal panel or an alignment film of a viewing angle compensation film, is subjected to an alignment treatment by the polarized light irradiation device 1, the transfer device (not shown) of the workpiece W is used in the Y-axis direction. The workpiece W is conveyed in the direction of the parallel arrow Y1, and is emitted from the light source 5 Ultraviolet light.

Of the light emitted from the light source 5, a part of the light is incident on the filter 20 in the direction of the filter 20 (for example, L1 of FIG. 3). The filter 20 transmits only ultraviolet light without transmitting light other than ultraviolet rays, and emits only ultraviolet rays from the surface on the opposite side to the surface on the light incident side.

The ultraviolet light emitted from the filter 20 is incident on the polarizing element 25 held by the polarizing element holding portion 26 on the opposite side to the side on which the light source 5 in the filter 20 is located. In the polarizing element 25, most of the ultraviolet rays incident in the ultraviolet ray parallel to the longitudinal direction of the electric conductor constituting the polarizing element 25 do not pass through, and only the polarization axis is orthogonal to the longitudinal direction of the electric conductor. UV rays pass through. Thereby, the polarizing element 25 emits only the ultraviolet rays vibrating in the reference direction from the surface on the opposite side to the surface on the side where the optical filter 20 is located. The polarized light including the ultraviolet light vibrating in the reference direction emitted from the polarizing element 25 is transmitted through the opening 27 of the polarizing element holding portion 26, and is irradiated to the workpiece W via the inner side of the light shielding plate 30, and the light shielding plate 30 is disposed at The opposite side of the side where the filter 20 in the polarizing element holding portion 26 is located. In the workpiece W, the alignment treatment is performed using polarized light containing the ultraviolet rays.

Further, as described above, of the polarized light emitted from the polarizing element 25 by the light emitted from the light source 5 passing through the filter 20 and the polarizing element 25, a part of the polarized light is directed toward the light shielding plate 30 (for example, L2 of FIG. 3). . That is, a part of the polarized light that is emitted from the polarizing element 25 passes through the opening 27 of the polarizing element holding portion 26 and faces the light shielding plate reflecting surface 31 in the light shielding plate 30 to reach the light shielding plate reflecting surface 31, which is a light emitting plate. 30 is an opening surrounding the polarization element holding portion 26 when viewed in the Z-axis direction. The part 27 is arranged in a manner. Thereby, the polarized light that has arrived at the light-shielding plate reflecting surface 31 travels in the opposite direction to the direction in which the light-shielding plate reflecting surface 31 is in the Y-axis direction, and is blocked by the light shielding plate 30.

As described above, the inner surface of the light shielding plate 30 that blocks the polarized light is formed as the light shielding plate reflecting surface 31 that reflects the light, and thus the polarized light that reaches the light shielding plate reflecting surface 31 is reflected by the light shielding plate reflecting surface 31 and faces toward the light shielding plate. The opposite direction of the incident direction of the reflecting surface 31. In other words, the polarized light reflected by the light shielding plate reflecting surface 31 faces the direction away from the polarizing element holding portion 26 in the direction of the light shielding plate reflecting surface 31 facing the light shielding plate reflecting surface 31 on which the polarized light is reflected. Thereby, the polarized light reflected by the light shielding plate reflecting surface 31 is irradiated to the workpiece W in the direction of the workpiece W.

Further, of the light emitted from the light source 5, part of the light is directed toward the reflecting surface 11 of the reflecting plate 10, and the light directed toward the reflecting surface 11 is reflected by the reflecting surface 11 toward the direction of the filter 20 (for example, L3 of FIG. 3) . Light that is directed toward the filter 20 in this manner is irradiated to the filter 20 to emit only ultraviolet rays, and ultraviolet rays emitted from the filter 20 are incident on the polarizing element 25.

That is, the reflecting surface 11 of the reflecting plate 10 reflects the light which is emitted from the light source 5 and reaches the reflecting surface 11 to condense it in the vicinity of the polarizing element 25 to the one where the filter 20 located in the polarizing element 25 is located. The focal point F of the opposite side of the side. Therefore, the ultraviolet light emitted from the filter 20 after being reflected by the reflecting surface 11 and irradiated to the filter 20 is incident on the polarizing element 25 which is in the vicinity of the focus F when viewed from the filter 20. The polarizing element 25 on which the ultraviolet light from the filter 20 is incident emits polarized light containing ultraviolet rays vibrating in the reference direction. The polarized light is illuminated via the inner side of the visor 30 Shoot to the workpiece W.

Further, of the polarized light emitted from the polarizing element 25 by the reflecting surface 11 of the reflecting plate 10 and passing through the filter 20 and the polarizing element 25, a part of the polarized light passes through the focal point F toward the visor 30 (for example, L4) of Figure 3. The polarized light that is directly incident on the filter 20 from the light source 5 and passes through the filter 20 and the polarizing element 25 to reach the light shielding plate reflecting surface 31 and is reflected by the light shielding plate reflecting surface 31 is similarly reflected by the light shielding plate The face 31 reflects in the direction of the workpiece W. That is, the polarized light that has arrived at the light shielding plate reflecting surface 31 is blocked by the light shielding plate 30 with respect to the traveling direction before reaching the light shielding plate 30, and is reflected by the light shielding plate reflecting surface 31 in the direction toward the workpiece W. Thereby, the polarized light reflected by the light shielding plate reflecting surface 31 is irradiated to the workpiece W.

Since the polarized light irradiation device 1 of the first embodiment blocks a part of the polarized light emitted from the polarizing element 25 by the light shielding plate 30, it is possible to irradiate the polarized light to the workpiece W without excessively expanding. 4 is an explanatory view of a polarized light irradiation device in which a light shielding plate is not provided. In other words, when the polarized light irradiation device 100 without the light shielding plate 30 is used to irradiate the workpiece W with polarized light, the light emitted from the light source 5 is emitted from the polarizing element 25 by directly passing through the filter 20 and the polarizing element 25. The polarized light is irradiated to the workpiece W in the same manner as in the case of the polarized light irradiation device 1 of the first embodiment (for example, m1 in Fig. 4). In the polarized light irradiation device 1 of the first embodiment, a part of the polarized light is blocked by the light shielding plate 30, so that the polarized light does not pass before reaching the light shielding plate 30, in comparison with the ultraviolet ray orbit of the two of the light shielding plates. The direction in which it is directed forward is beyond the position in the Y-axis direction of the light shielding plate 30, but is reflected by the light shielding plate reflecting surface 31. On the other hand, in the polarized light irradiation device 100 in which the light shielding plate 30 is not provided, Since the polarized light is not blocked by the light shielding plate 30, it is out of the position where the light shielding plate 30 of the polarizing light irradiation device 1 of the first embodiment is disposed in the outer direction of the light shielding plate 30 formed in the shape of a rectangular tube.

Similarly, the polarized light emitted from the polarizing element 25 and the polarized light of the first embodiment are emitted toward the reflecting plate 10 from the light source 5 and after passing through the reflecting plate 11 and passing through the filter 20 and the polarizing element 25 The case of the device 1 is similarly irradiated to the workpiece W (for example, m2 of Fig. 4). If the ray of both ultraviolet rays affected by the presence or absence of the visor is compared, the polarized light reflected by the reflecting surface 11 is also not blocked by the visor 30, so that a part of the polarized light is directed toward the louver formed in the shape of a rectangular cylinder. The outer direction of 30 is beyond the position where the light shielding plate 30 is disposed in the polarized light irradiation device 1 of the first embodiment.

In other words, in the polarized light irradiation device 100 in which the light shielding plate 30 is not provided, the polarized light emitted from the polarizing element 25 is not blocked by the light shielding plate 30, and thus expands beyond the area where the polarizing element 25 is disposed when viewed in the Z-axis direction. Or a region formed by the opening portion 27, whereby the workpiece W is easily irradiated with light whose polarization axis has deteriorated. On the other hand, in the polarized light irradiation device 1 of the first embodiment, among the polarized light emitted from the polarizing element 25, the polarized light that has reached the light shielding plate 30 from the inside of the light shielding plate 30, that is, the light shielding plate reflecting surface 31, is shielded by the light shielding plate. Since 30 is blocked, it is difficult to expand the irradiation area when viewed in the Z-axis direction. Therefore, it is suppressed that the workpiece W is irradiated with polarized light whose characteristics of the polarization axis outside the irradiation range have been lowered.

Further, the inventors of the present invention have provided the light shielding plate 30 with respect to the irradiation state of the polarized light irradiated by the polarized light irradiation device 1 and the light shielding plate 30 is not provided. The situation was tested. Table 1 is a graph of test results regarding the irradiation state of polarized light. The test is carried out by irradiating polarized light by the polarized light irradiation device 1 and the polarized light irradiation device 100, and measuring the polarization axis characteristics on the irradiation surface with respect to the polarized light at a plurality of measurement points, the polarized light irradiation device 1, and the polarization In the light irradiation device 100, the width of the opening 27 in the Y-axis direction is 50 mm, that is, the opening 27 is opened in the range of ±25 mm in the Y-axis direction from directly below the light source 5. The measurement point is in the polarized light irradiation device 1 (FIG. 3) having the light shielding plate 30 and the polarized light irradiation device 100 (FIG. 4) having no light shielding plate 30, respectively, directly under the light source 5, from the light source 5 Immediately below the position of ±20 mm in the Y-axis direction, a position away from ±30 mm in the Y-axis direction from directly below the light source 5, and a position away from ±40 mm in the Y-axis direction from directly below the light source 5 Determination of polarization axis characteristics.

In the test, polarized light having a polarization axis of 0.02° was detected in the polarized light irradiation device 1 having the light shielding plate 30 and the polarized light irradiation device 100 having no light shielding plate 30 directly under the light source 5. Further, at a position of ±20 mm directly below the light source 5, polarized light having a polarization axis of 0.06° can be detected in the polarized light irradiation device 1 having the light shielding plate 30 and the polarized light irradiation device 100 having no light shielding plate 30. .

On the other hand, at a position of ±30 mm directly below the light source 5 and a position of ±40 mm directly below the light source 5, polarized light can be detected in the polarized light irradiation device 100 having no light shielding plate 30, but in the above At the position, the polarized light is not detected in the polarized light irradiation device 1 having the light shielding plate 30. In other words, at a position of ±30 mm directly below the light source 5, polarized light having a polarization axis of 0.15° can be detected in the polarized light irradiation device 100 having no light shielding plate 30, and is located at a position of ±40 mm directly below the light source 5. In the polarized light irradiation device 100 having no light shielding plate 30, polarized light having a polarization axis of 0.30° can be detected. On the other hand, in the polarized light irradiation device 1 having the light shielding plate 30, the polarized light was not detected at the measurement point. In the above case, it was confirmed that the polarized light emitted from the opening 27 was not irradiated to the outside of the light shielding plate 30.

In the polarized light irradiation device 1 of the first embodiment, the exit side of the polarized light formed in the opening 27 of the polarizing element holding portion 26 is provided to surround the opening 27 when viewed in the opening direction of the opening 27. Since the light shielding plate 30 is disposed in such a manner, the polarized light outside the region formed by the opening portion 27 when viewed in the direction can be blocked by the light shielding plate 30. Thereby, it is possible to make it difficult to expand the polarized light emitted from the polarizing element 25, and it is possible to suppress the polarized light whose characteristic of the polarization axis which is outside the irradiation range from being irradiated to the workpiece W is lowered.

[Embodiment 2]

The polarized light irradiation device 40 of the second embodiment has substantially the same configuration as the polarized light irradiation device 1 of the first embodiment, but has a feature that a transparent member that shields the inner space of the light shielding plate is disposed in the light shielding plate. Since the other configuration is the same as that of the first embodiment, the description thereof is omitted and the same reference numerals are attached.

Fig. 5 is a cross-sectional view showing the polarized light irradiation device of the second embodiment in the X-axis direction. Similarly to the polarized light irradiation device 1 of the first embodiment, the polarized light irradiation device 40 of the second embodiment includes a reflector 10 that controls the light distribution of the light emitted from the light source 5, and the filter 20 that only makes the incident light. The ultraviolet light is emitted; the polarizing element 25; and the polarizing element holding portion 26 holds the polarizing element 25. Further, a light shielding plate 50 which is formed in a substantially rectangular tubular shape and blocks polarized light is provided on a side of the polarizing element holding portion 26 facing the light source 5. Similarly to the light shielding plate 30 included in the polarized light irradiation device 1 of the first embodiment, the inner surface of the light shielding plate 50 is formed as a light shielding plate reflecting surface 51 that reflects light.

Further, in the polarized light irradiation device 40 of the second embodiment, a transparent member that closes the inner space of the light shielding plate 50, that is, glass, is disposed at an end portion on the opposite side of the side where the opening portion 27 of the light shielding plate 50 is located. Board 52. In other words, the light shielding plate 50 is formed such that the longitudinal direction of the corner cylinder is oriented in the Z-axis direction, and the end opposite to the end portion on the side of the polarizing element holding portion 26 on the side facing the workpiece W is opened. It is formed, but the glass plate 52 is formed in such a manner as to close the opening portion in the light shielding plate 50.

The glass plate 52 is formed into a rectangular plate shape by a transparent member that transmits light, that is, glass, and the rectangular plate shape is substantially the same as the shape when the shape of the light shielding plate 50 is viewed in the Z-axis direction, that is, the shape of the corner tube. The glass plate 52 is disposed at an end portion of the light shielding plate 50 in a direction parallel to the polarizing element 25. Thereby, the glass plate 52 closes the inner space of the light shielding plate 50, and shields the inner space of the light shielding plate 50 with respect to the outer side of the light shielding plate 50.

Figure 6 is a B-B arrow view of Figure 5. Figure 7 is a C-C arrow view of Figure 6. An air supply and exhaust unit 55 is formed in a plurality of portions of the light shielding plate 50. The air supply and exhaust unit 55 includes an air supply unit 56 and an exhaust unit 57 formed on one of the four wall surfaces constituting the light shielding plate 50, and the exhaust unit 57 is formed. On the wall facing the wall surface. Specifically, among the four wall surfaces of the light shielding plate 50, the air supply portion 56 is provided on one of the two wall surfaces facing the X-axis direction at the end portion located in the X-axis direction, and the other wall surface is provided on the other wall surface. An exhaust portion 57 is provided above.

The air supply portion 56 is formed in a tubular shape and is attached to communicate with the wall surface of the light shielding plate 50. A hole communicating with the inside of the tubular air supply portion 56 is formed in a portion of the wall surface of the light shielding plate 50 where the air supply portion 56 is attached, whereby the air supply portion 56 communicates with the inner space of the light shielding plate 50. A plurality of (three in the second embodiment) air supply portions 56 thus formed are provided on the same wall surface of the light shielding plate 50. An air blowing device (not shown) such as external high-pressure air is connected to the air supply portion 56 thus provided, so that the air sent from the air blowing device flows in the air supply portion 56.

Further, among the four wall surfaces of the light shielding plate 50, among the two wall surfaces facing the X-axis direction at the end portion located in the X-axis direction, the other one facing the one wall surface on which the air supply portion 56 is provided An exhaust portion 57 is provided on the wall surface. The exhaust portion 57 is formed by a hole penetrating through the wall surface, whereby the exhaust portion 57 communicates with the inner space and the outer side of the light shielding plate 50. Similarly to the air supply unit 56, a plurality of (three in the second embodiment) exhaust portions 57 thus formed are provided on the same wall surface of the light shielding plate 50.

The polarized light irradiation device 40 according to the second embodiment has the configuration described above, and the operation thereof will be described below. When the workpiece W such as the alignment film of the liquid crystal panel or the alignment film of the viewing angle compensation film is subjected to alignment treatment by the polarized light irradiation device 40, Light containing ultraviolet rays is emitted from the light source 5. Thereby, the light is emitted from the optical filter 20 only when the light passes through the filter 20, and the ultraviolet light emits polarized light having ultraviolet rays vibrating in the reference direction when the polarizing element 25 emits. The polarized light emitted from the polarizing element 25 is directly reflected by the inner side of the light shielding plate 50 or by the light shielding plate reflecting surface 51, thereby being directed toward the opposite side of the end portion of the light shielding plate 50 on the side where the polarizing element holding portion 26 is located. The direction of the end.

The glass plate 52 is disposed at the end on the opposite side of the end portion on the side of the polarizing element holding portion 26 in the light shielding plate 50, and thus the polarized light toward the direction is incident on the glass plate 52. Since the glass plate 52 has a transparent member, light can be transmitted, and thus the polarized light incident on the glass plate 52 is directly transmitted through the glass plate 52 and is emitted from the surface on the opposite side to the surface on the side on which the polarized light is incident. The polarized light transmitted through the glass plate 52 in this manner is irradiated to the workpiece W in the direction of the workpiece W.

As described above, when the light source 5 of the polarized light irradiation device 40 is turned on and the workpiece W is subjected to the alignment treatment, the cooling air E is caused to flow inside the light shielding plate 50 by the high-pressure air connected to the air supply portion 56, and the polarizing element 25 is performed. Cooling. Specifically, air is supplied to the air supply unit 56 as the cooling air E by the high-pressure air, and the air is sent from the air supply unit 56 to the inside of the light shielding plate 50. The exhaust portion 57 is formed on the surface of the light shielding plate 50 opposite to the surface on which the air supply portion 56 is disposed. Therefore, when the air is supplied from the air supply portion 56 to the inner side of the light shielding plate 50, the air is fed into the light shielding plate 50. Correspondingly, the air inside the light shielding plate 50 is extruded from the exhaust portion 57 and exhausted to the outside of the light shielding plate 50.

When the light source 5 of the polarized light irradiation device 40 is turned on, heat is generated while emitting light, and the polarized light irradiation device 40 gathers the light emitted from the light source 5 The light is collected in the vicinity of the polarizing element 25, and therefore, the heat generated by the light source 5 at the time of light emission is also easily concentrated by the polarizing element 25 by radiation. Therefore, when the light source 5 is turned on, the temperature of the polarizing element 25 is likely to rise, and accordingly, the temperature of the air inside the light shielding plate 50 is likely to rise, but the air is supplied from the air supply portion 56 to the light shielding plate 50. The air in the light shielding plate 50 is discharged from the exhaust portion 57 on the inner side, and the air having a higher temperature can be replaced with the air having a lower temperature.

Thereby, the air inside the light shielding plate 50 whose temperature is lowered exchanges heat with the polarizing element 25 whose temperature rises, and the temperature of the polarizing element 25 can fall. As described above, the air supply and exhaust portion 55 having the air supply portion 56 and the exhaust portion 57 feeds air into the inner side of the light shielding plate 50, and discharges the air in the light shielding plate 50, thereby being able to be inside the light shielding plate 50. The cooling air E that can cool the polarizing element 25 flows, and the polarizing element 25 is cooled by the heat radiating to the cooling air E.

Further, since the light shielding plate 50 is closed inside by the glass plate 52, dust or the like is not allowed to enter the inside of the light shielding plate 50. Therefore, it is difficult for dust or the like to adhere to the polarizing element 25 for emitting polarized light that is irradiated to the workpiece W, so that the polarizing element 25 is hard to be contaminated.

In the polarized light irradiation device 40 of the second embodiment, the glass plate 52 is disposed at the end on the side opposite to the side where the opening 27 of the polarizing element holding portion 26 of the light shielding plate 50 is located, so that the polarizing element 25 can be prevented. Attached to the dirt. Thereby, the reduction in the extinction ratio in the polarizing element 25 can be suppressed. As a result, the performance of photo-orientation can be maintained for a long time.

Moreover, the air supply and exhaust portion 55 is formed in a plurality of portions of the light shielding plate 50, and Since the cooling air E flows through the supply and exhaust portion 55 inside the light shielding plate 50, the polarizing element 25 can be cooled by the cooling air E. As a result, deterioration of the polarizing element 25 due to an increase in temperature of the polarizing element 25 can be suppressed, so that a decrease in the extinction ratio can be more surely suppressed.

[Modification]

Further, in the polarized light irradiation device 40 of the second embodiment, the air supply and exhaust unit 55 is formed on the wall surface of the light shielding plate 50 facing the X-axis direction, but the air supply and exhaust unit 55 may be formed in addition to the above. The location. FIG. 8 is a view showing a modification of the polarized light irradiation device according to the second embodiment, and is a view when the light shielding plate is viewed in the Y-axis direction. Figure 9 is a D-D arrow view of Figure 8. For example, as shown in FIGS. 8 and 9 , the air supply and exhaust unit 55 may be provided on a wall surface facing the Y-axis direction among the four wall surfaces of the light shielding plate 50 . Specifically, the air supply and exhaust unit 55 may be provided by providing the air supply unit 56 on one of the two wall surfaces facing the Y-axis direction at the end portion located in the Y-axis direction, in another An exhaust portion 57 is formed on one wall surface.

In this case, for example, when a plurality of polarizing elements 25 are arranged in the X-axis direction, it is preferable to form a plurality of air supply portions 56 and exhaust portions 57 corresponding to the positions of the polarizing elements 25 in the X-axis direction. . By providing the air supply portion 56 and the exhaust portion 57 in correspondence with the polarizing element 25 as described above, the cooling air E flowing inside the light shielding plate 50 and each of the polarizing elements 25 can be utilized by the air supply portion 56 and the exhaust portion 57. Flow correspondingly. Thereby, the polarizing element 25 can be cooled more reliably, and deterioration of the polarizing element 25 due to temperature increase can be more reliably suppressed.

Further, in the polarized light irradiation device 40 of the second embodiment, Although the case where the air blowing device is connected to the air supply unit 56 has been described, the present invention is not limited thereto. For example, an example in which the air blowing device is connected to the tubular exhaust portion 57 and the air is sucked from the exhaust portion 57 by the air blowing device may be used. Further, the air supply unit 56 and the exhaust unit 57 may both be tubular, and the cooling air E may be circulated by the air circulation device.

Further, in the polarized light irradiation device 1 and the polarized light irradiation device 40, the base material of the reflection plate 10 is glass and the reflection surface 11 is formed of a multilayer film, but the reflection plate 10 may be provided by other materials. For example, the reflector 10 may be entirely made of a metal such as aluminum. Moreover, the reflecting surface 11 may not be strictly formed into an elliptical shape.

Further, in the polarized light irradiation device 1 and the polarized light irradiation device 40, a tubular type so-called discharge lamp is used for the light source 5. However, the light source 5 may use a discharge lamp other than the discharge lamp. As the light source 5, for example, a small-sized lamp such as a light-emitting diode (LED) chip, a laser diode, or an organic electroluminescence (EL) that can emit ultraviolet light having a wavelength of 200 nm to 400 nm is disposed. In the case of a straight line or the like, it is possible to use a light other than a discharge lamp as long as it emits light containing ultraviolet rays.

[Embodiment 3]

Next, the ultraviolet irradiation device 210 (also referred to as "polarized light irradiation device 210", the same applies hereinafter) of the embodiment of the present invention will be described based on the drawings. FIG. 10 is a perspective view showing a schematic configuration of an ultraviolet irradiation device according to an embodiment, FIG. 11 is a view of the ultraviolet irradiation device of the embodiment as seen from the Y-axis direction, and FIG. 12 is a view showing a configuration of a first polarizing element of the ultraviolet irradiation device according to the embodiment. Schematic diagram.

The polarized light irradiation device 210 of the embodiment shown in FIG. 10 is taken as The surface of the workpiece W to be processed is irradiated with a device having a polarization axis PB (indicated by an arrow in FIG. 1 , also referred to as a vibration direction), which is parallel to the predetermined reference direction. The polarized light irradiation device 210 of the embodiment is used, for example, in the production of an alignment film of a liquid crystal panel, an alignment film of a viewing angle compensation film, or a polarizing film. The polarized light irradiation device 210 mainly irradiates the surface of the workpiece W with ultraviolet rays UC having a wavelength of 365 [nm] as a desired wavelength. Further, the "ultraviolet rays" referred to in the present embodiment are, for example, light of a wavelength band of 340 [nm] to 400 [nm].

Further, the polarization axis PB of the ultraviolet ray illuminating the surface of the workpiece W can be appropriately set depending on the structure, use, or required specifications of the workpiece W. Hereinafter, the width direction of the workpiece W is referred to as an X-axis direction, and the longitudinal direction of the workpiece W is orthogonal to the X-axis direction, and the direction orthogonal to the Y-axis direction and the X-axis direction is referred to as Z. Axis direction. Further, the direction parallel to the Z-axis is referred to as a direction in which the tip end of the arrow indicating the direction of the Z-axis is directed, and a direction in which the direction of the arrow leading to the direction of the Z-axis is directed downward is referred to as a lower direction.

As shown in FIG. 10, the polarized light irradiation device 210 includes a light source 211, a first polarizing element 216, and an absorbing polarizing element 218, and the light source 211 emits light in the same direction and has a wavelength of 200 [nm] to 900 [ UV, visible light, and infrared light U around nm]. Further, a mirror 212 and a filter 214 may be provided.

The light source 211 is a tubular lamp such as a metal halide lamp in which a mercury gas such as argon or helium is sealed in a UV-transmissive glass tube, or a metal halide such as iron or iodine is further sealed in a mercury lamp. And at least linear Light emitting part. The longitudinal direction of the light-emitting portion of the light source 211 is parallel to the Y-axis direction. The light U emitted from the light source 211 includes ultraviolet light having a wavelength of about 200 [nm] to 900 [nm], visible light, and infrared light, and is so-called non-polarized light having various polarization axis components. In the present embodiment, one light source 211 is provided, and is disposed above the first polarizing element 216, the absorbing polarizing element 218, and the workpiece W.

The mirror 212 is disposed above the light source 211, and reflects the light U emitted from the light source 211 toward the workpiece W. Further, the light U reflected by the light source 211 is reflected by the mirror 212 as the light U ' . The mirror 212 may use a parallel type parabolic mirror, a condensing type elliptical mirror or a mirror of other shapes or the like.

The filter 214 transmits the ultraviolet UA in the light U emitted by the light source 211 and the light U ' reflected by the mirror 212, and suppresses (limits) light transmission other than the ultraviolet UA. The filter 214 emits the ultraviolet light UA from the light U emitted from the light source 211 and the light U ' reflected by the mirror 212 to the first polarizing element 216 side. Further, the ultraviolet ray UA emitted from the filter 214 is so-called unpolarized light having various polarization axis components. In the present embodiment, the filter 214 is disposed below the light source 211 and above the first polarizing element 216.

Further, in the present invention, as long as the filter 214 can suppress the heating of the first polarizing element 216 and the absorbing polarizing element 218, the single filter 214 may be used, or the plurality of filters 214 may be overlapped. Composition. Further, a band pass filter that transmits light such as ultraviolet rays of a desired wavelength, or a dichroic filter that reflects or absorbs visible light rays or the like and transmits light such as ultraviolet rays of a desired wavelength can be used. The filter 214 is constructed. Further, the filter 214 can be, for example, A film having a function of cutting off visible light is formed on one surface, a film having a function of cutting off infrared light is formed on the other surface, and a film having a function of cutting off visible light and a film having cut-off infrared light may be formed on the surface. The function of any of the membranes.

The first polarizing element 216 is irradiated with light (ultraviolet rays UA) transmitted through the filter 214. The first polarizing element 216 transmits the ultraviolet ray UB, which is a polarized light parallel to the reference direction, in the light (ultraviolet UA) transmitted through the filter 214, to the absorbing polarizing element 218. In other words, the first polarizing element 216 extracts the ultraviolet ray UB whose polarization axis PA vibrates only in the reference direction from the ultraviolet ray UA having various polarization axis components that vibrate in the same direction in the transmission filter 214. Further, generally, the ultraviolet ray UB that vibrates only in the reference direction of the polarization axis PA is referred to as linearly polarized light.

In the present embodiment, the first polarizing element 216 is disposed below the filter 214 and above the surface of the absorbing polarizing element 218. As shown in FIG. 12, the first polarizing element 216 is a so-called wire grid polarizing element as described below, that is, regularly formed on the surface of the glass plate 216a with a height of 50 nm to 300 nm, a width of 10 nm to 200 nm, and a pitch of 50 nm to 300 nm. A nano-sized lattice 216b made of titanium oxide is deposited. As the first polarizing element 216, for example, UVT260A manufactured by Moxtek Corporation can be used. Further, as shown in FIG. 12, the first polarizing element 216 is preferably such that the side of the glass plate 216a, that is, the side on which the lattice 216b is not formed, faces the filter 214 side.

The absorbing polarizing element 218 is irradiated with light (ultraviolet UB) transmitted through the first polarizing element 216. The absorbing polarizing element 218 transmits polarized light (ultraviolet UC) parallel to the reference direction of the polarization axis PB of the light (ultraviolet UB) transmitted through the first polarizing element 216 to the workpiece W. That is, the absorbing polarizing element 218 is transmitted through the first The polarizing element 216 and the ultraviolet ray UB having the polarization axis PA extract the ultraviolet ray UC whose polarization axis PB vibrates only in the reference direction. Further, the ultraviolet ray UC in which the polarization axis PB vibrates only in the reference direction is generally referred to as linearly polarized light. Further, the ultraviolet UA, the ultraviolet ray UB, the polarization axis PA of the ultraviolet UC, and the polarization axis PB refer to the vibration directions of the electric field and the magnetic field of the ultraviolet ray UA and the ultraviolet ray UB.

In the present embodiment, the absorbing polarizing element 218 is disposed below the filter 214 and above the surface of the workpiece W. The absorbing polarizing element 218 is formed of metal nanoparticles aligned in a certain direction contained in the glass plate, and absorbs the polarization axis PB of the ultraviolet ray transmitted through the first polarizing element 216 to cross the reference direction (shown in FIG. 1). An example of the ultraviolet light polarizing element is disclosed, and the ultraviolet ray UC whose polarization axis PB is parallel to the reference direction is transmitted. For the absorbing polarizing element 218, for example, colorpol (registered trademark) UV375BC5 manufactured by CODIXX Co., Ltd. can be used.

In the polarized light irradiation device 210 of the above-described configuration, the workpiece W is placed below the absorption-type polarizing element 218 and the light U is emitted from the light source 211. Thereby, the light U emitted from the light source 211 is directly or reflected by the mirror 212 and is irradiated to the filter 214. In the polarized light irradiation device 210, the filter 214 transmits the ultraviolet ray UA to the first polarizing element 216, and suppresses transmission of light other than the ultraviolet ray UA. Further, in the polarized light irradiation device 210, the first polarizing element 216 transmits the ultraviolet ray UB parallel to the reference direction of the polarization axis PA in the ultraviolet ray UA to the absorbing polarizing element 218. Further, in the polarized light irradiation device 210, the absorbing polarizing element 218 transmits the ultraviolet ray UC parallel to the reference direction of the polarization axis PB in the ultraviolet ray UB to the light irradiation region on the surface of the workpiece W, thereby performing orientation treatment on the surface of the workpiece W. .

In the polarized light irradiation device 210 of the above-described configuration, by using the absorbing polarizing element 218, one of the characteristics as polarized light can be improved as compared with the case of using a wire-grid polarizing element as a reflective polarizing element. Extinction ratio. Further, the wire grid type polarizing element has a surface on which a wire grid is formed and a surface on which a wire grid is not formed, that is, a so-called surface, and the extinction ratio changes depending on the front and back of the wire grid polarizing element. However, in the absorbing polarizing element 218, the metal nanoparticles formed inside the absorbing polarizing element 218 absorb light that vibrates outside the reference direction, so that there is no so-called surface and the like like a wire grid polarizing element, so that the operation is easy. .

Further, in the polarized light irradiation device 210, the absorbing polarizing element 218 that absorbs the ultraviolet ray whose polarization axis PB intersects the reference direction is irradiated with the ultraviolet ray UB that is parallel to the polarization axis PA in advance, and the light other than the ultraviolet ray UB is restricted. Therefore, the amount of light absorbed by the absorbing polarizing element 218 in the polarized light irradiation device 210, specifically, the metal nanoparticles formed inside the absorbing polarizing element 218 can be reduced. If the amount of light absorbed by the metal nanoparticles is reduced, the temperature rise of the absorbing polarizing element 218 is suppressed, and the possibility that the absorbing polarizing element 218 becomes a high temperature is lowered, so that, for example, the absorbing polarizing element 218 can be prevented from being cracked. Bad conditions of the class. Therefore, even if the absorbing polarizing element 218 is used in the polarized light irradiation device 210, problems such as cracking of the absorbing polarizing element 218 can be suppressed.

Further, in the polarized light irradiation device 210, the absorbing polarizing element 218 is irradiated with the ultraviolet ray UB, and the light of the wavelength other than the ultraviolet ray 205 is restricted. Therefore, the light U and the light U ′ are directly irradiated to the absorbing polarizing element 218. The ratio of the extinction ratio of the absorbing polarizing element 218 can be suppressed from being lowered. In addition, the extinction ratio is a value obtained by dividing the maximum transmittance of the linearly polarized ultraviolet ray UC as the absorbing polarizing element 218 by the minimum transmittance of the ultraviolet UC which is linearly polarized. That is, the extinction ratio = maximum transmittance / minimum transmittance. Further, the transmittance is the radiation divergence of the ultraviolet ray UC passing through the first polarizing element 216 and the absorbing polarizing element 218 divided by the radiation divergence of the ultraviolet ray incident on the first polarizing element 216 and the absorbing polarizing element 218, and then Multiply the value obtained by 100 (%). That is, the transmittance (%) = (radiation divergence of ultraviolet UC / radiation divergence of ultraviolet UA) × 100.

In the polarized light irradiation device 210, since the filter 214 suppresses the transmission of ultraviolet rays of a short wavelength, it is possible to suppress ultraviolet light of a short wavelength from being irradiated to the first polarizing element 216 and the absorbing polarizing element 218. Further, in the polarized light irradiation device 210, the filter 214 suppresses transmission of ultraviolet rays, visible rays, and infrared rays of a long wavelength, thereby suppressing irradiation of long-wavelength ultraviolet rays, visible rays, and infrared rays to the first polarizing element 216 and the absorbing polarizing element. 218. Therefore, the polarized light irradiation device 210 can surely suppress the decrease in the life of the first polarizing element 216 and the absorbing polarizing element 218, and can reliably suppress the decrease in the extinction ratio of the first polarizing element 216 and the absorbing polarizing element 218.

Further, in the polarized light irradiation device 210, since a mercury lamp or a metal halide lamp is used as the light source 211, the life of the first polarizing element 216 and the absorbing polarizing element 218 and the reduction of the extinction ratio can be suppressed, and the workpiece W can be sufficiently irradiated. The amount of ultraviolet UC of the light amount suppresses the time required to irradiate the object with light.

Further, in the polarized light irradiation device 210, by using either of the first polarizing element 216 and the absorbing polarizing element 218, compared with the case where only the first polarizing element 216 or the absorbing polarizing element 218 is used, Extinction ratio high.

Here, the phase contrast, the extinction ratio, and the temperature change of the absorbing polarizing element which are influenced by the presence or absence of the filter 214, the first polarizing element 216, and the absorbing polarizing element 218 are evaluated. Further, the surface temperature of the absorbing polarizing element 218 is desirably 350 ° C or lower. If the surface temperature of the absorbing polarizing element 218 exceeds 350 ° C, the absorbing polarizing element 218 is cracked by heat, which is not preferable. Further, the relative illuminance refers to an input power [W/cm] (hereinafter simply referred to as "input power") for each unit length with respect to the light source 211 under the condition of Comparative Example 2, that is, only the absorbing polarizing element 218 is provided. The value obtained by normalizing the 365 nm illuminance at 120 was set to 100. In addition, the illuminance is measured by using the illuminometer main body: UIT-250 manufactured by Ushio Electric Co., Ltd., and UVD-S365 manufactured by Uchiyo Electric Co., Ltd.

Further, in Comparative Example 1, only the first polarizing element 216 was used and the input power [W/cm] was set to 120. In Comparative Example 2, only the absorbing polarizing element 218 was used and the input power [W/cm] was set to 120. In Comparative Example 3, only the absorbing polarizing element 218 was used and the input power [W/cm] was set to 160. In Comparative Example 4, the filter 214 and the absorbing polarizing element 218 were used and the input power [W/cm] was set to 160. In Comparative Example 5, the filter 214 and the absorbing polarizing element 218 were used and the input power [W/cm] was set to 200. In the first aspect of the invention, the first polarizing element 216 and the absorbing polarizing element 218 are used, and the input power [W/cm] is set to 160. In the second aspect of the invention, the first polarizing element 216 and the absorbing polarizing element 218 are used, and the input power [W/cm] is set to 200. In the third aspect of the invention, the filter 214, the first polarizing element 216, and the absorbing polarizing element are used. 218 and set the input power [W/cm] to 160. In the fourth aspect of the invention, the filter 214, the first polarizing element 216, and the absorbing polarizing element 218 are used, and the input power [W/cm] is set to 220.

The results are shown in Table 2. Table 2 is a table showing evaluation results of the extinction ratio and the temperature of the absorbing polarizing element 218 which are affected by the presence or absence of the filter 214, the first polarizing element 216, and the absorbing polarizing element 218 in the ultraviolet ray irradiation apparatus of the embodiment. According to the present invention and the second aspect of the invention, it is apparent that the extinction ratio satisfies 60:1 and the temperature rise of the absorbing polarizing element 218 can be suppressed by using the first polarizing element 216 and the absorbing polarizing element 218. Further, according to the invention 3 of the present invention and the fourth aspect of the invention, it is apparent that the extinction ratio can be further improved by using the filter 214 in addition to the configurations of the first invention and the second invention. In particular, even if the input power [W/cm] is set to 220, the temperature of the absorbing polarizing element 218 can be maintained at 350 ° C or lower, and the contrast can be improved, and the extinction ratio can also satisfy 70:1.

Further, the first polarizing element 216 is not limited to the above configuration. For example, as shown in FIG. 13, the first polarizing element 216 may be formed by superposing the lattice-formed surfaces of the two wire-grid polarizing elements. Further, the first polarizing element 216 may be an absorbing polarizing element.

(Modification)

FIG. 14 is a side view showing a schematic configuration of a modification of the ultraviolet irradiation device 220 (also referred to as "polarized light irradiation device 220" in the same manner as in the following).

In the present modification, the polarized light irradiation device 220 in which the first polarizing element 216 and the absorptive polarizing element 218 are integrated is shown. According to the above configuration, the extinction ratio can be improved in the same manner as in the third embodiment.

FIG. 15 is a side view showing a schematic configuration of another modification of the ultraviolet irradiation device according to the first embodiment.

In the present modification, the ultraviolet irradiation device 230 in which the first polarizing element 216 and the absorbing polarizing element 218 are integrated and the medium 219 is interposed between the first polarizing element 216 and the absorbing polarizing element 218 is shown. (also referred to as "polarized light irradiation device 230"), the medium 219 has substantially the same refractive index as the first polarizing element 216 and the absorptive polarizing element 218. According to the above configuration, the extinction ratio can be improved in the same manner as in the third embodiment.

The embodiments of the present invention have been described, but are not intended to limit the scope of the invention. The embodiments can be implemented in various other forms, and various types can be implemented without departing from the scope of the invention. Omit, replace, change. These embodiments and variations thereof are included in the scope and spirit of the invention, and are equally included in the scope of the invention.

1‧‧‧Polarized light irradiation device

5‧‧‧Light source

10‧‧‧reflector

11‧‧‧reflecting surface

12‧‧‧Voids

20‧‧‧ filter

21‧‧‧ Filter frame

25‧‧‧Polarizing element

26‧‧‧Polarizing element holding unit

27‧‧‧ openings

30‧‧ ‧ visor

31‧‧‧ visor reflective surface

C‧‧‧Light Center

W‧‧‧Workpiece (object)

Y, Z‧‧‧ axis

Claims (6)

A polarized light irradiation device comprising: a light source that emits light; a filter that emits ultraviolet light from the light emitted from the light source; and a polarizing element disposed in the filter a side opposite to the light source, incident on the ultraviolet ray and emitting polarized light; a polarizing element holding portion holding the polarizing element and having an opening for transmitting the polarized light emitted from the polarizing element; and a light shielding plate It is disposed on a side of the polarizing element holding portion that faces the light source, and is disposed to surround the opening. The polarized light irradiation device according to claim 1, wherein an end portion of the light shielding plate opposite to the side where the opening portion is located is provided with an inner space that closes the light shielding plate Transparent member. The polarized light irradiation device according to claim 2, wherein an air supply and exhaust portion is formed in a plurality of portions of the light shielding plate. A polarized light irradiation device comprising: a light source that emits light; and a first polarizing element that transmits polarized light of a polarization axis parallel to a predetermined reference direction among light emitted from the light source; and an absorption type The polarizing element transmits polarized light of a polarization axis parallel to a predetermined reference direction among the light transmitted through the first polarizing element. The polarized light irradiation device according to claim 4, wherein a filter is provided between the light source and the first polarizing element. The polarized light irradiation device of claim 4, wherein the light source is a mercury lamp or a metal halide lamp.