TW201536470A - Aerostatic bearing stage - Google Patents
Aerostatic bearing stage Download PDFInfo
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- TW201536470A TW201536470A TW103111134A TW103111134A TW201536470A TW 201536470 A TW201536470 A TW 201536470A TW 103111134 A TW103111134 A TW 103111134A TW 103111134 A TW103111134 A TW 103111134A TW 201536470 A TW201536470 A TW 201536470A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
本發明是關於一種氣靜壓平台，特別是關於一種具有氣靜壓軸承之氣靜壓平台。This invention relates to a hydrostatic platform, and more particularly to a hydrostatic platform having a hydrostatic bearing.
請參閱第11圖，一種習知氣靜壓平台200，其包含一導軌210及一載台220，該載台220設置於該導軌210上，該導軌210為一T字型導軌，該載台200相對具有一T字型導引空間，藉由該導軌210與導引空間的相對關係，可將該載台220拘束於該導軌210上，其中該載台220具有複數個氣靜壓軸承221，該些氣靜壓軸承221用以提供氣靜壓使該載台220氣浮於該導軌210上，再藉由一驅動元件(圖未繪出)的驅動，即可使該載台220於該導軌210上線性移動，且由於該載台220與該導軌210之間並未接觸，因此該載台220與該導軌210之間的摩擦力幾乎為零，藉此使該氣靜壓平台200可用以承載需高精度加工之元件，並進行高精度之定位，但由於習知氣靜壓平台200所使用的氣靜壓軸承較多(共6組氣靜壓軸承)，因此於氣壓的控制上較為困難，造成該載台220的平面度較難調教且精度難以控制，此外，由於該氣靜壓平台200的直線度拘束軸軸元件(最左及最右之氣靜壓軸承)的相對位置較遠，因此，較難控制該載台220的線性拘束度。Referring to FIG. 11 , a conventional air static pressure platform 200 includes a guide rail 210 and a loading platform 220 . The loading platform 220 is disposed on the guide rail 210 . The rail 210 is a T-shaped guide rail. The 200 has a T-shaped guiding space. The carrier 220 can be restrained on the guide rail 210 by the relative relationship between the guide rail 210 and the guiding space. The loading platform 220 has a plurality of gas static pressure bearings 221 The gas static pressure bearing 221 is configured to provide a static pressure to float the stage 220 on the guide rail 210, and then the drive unit (not shown) can drive the stage 220. The guide rail 210 moves linearly, and since the stage 220 is not in contact with the guide rail 210, the friction between the stage 220 and the guide rail 210 is almost zero, thereby making the air static pressure platform 200 It can be used to carry components that require high-precision machining and to perform high-precision positioning. However, since the conventional aerostatic pressure platform 200 uses a large number of hydrostatic bearings (a total of 6 sets of hydrostatic bearings), the control of the air pressure It is difficult to make the flatness of the stage 220 difficult to adjust and the accuracy is difficult to control. The relative position of the platform 200 for Air straightness of the shaft element binding (the leftmost and rightmost gas hydrostatic bearings) farther, therefore, difficult to control the linearity of the carrier block 220 of the restraint.
本發明的主要目的在於藉由朝向第一側面之第一氣靜壓軸承及朝向第二側面之第二氣靜壓軸承提供氣靜壓，使得載台可氣浮於導軌之導槽上，且由於第一側面及第二側面朝向導軌之開口，可大幅減少氣靜壓平台之高度，而能更廣泛地適用各種加工環境且載台與導軌之間的組裝較為便捷、快速，而完成載台與導軌的組裝後，僅需兩個氣靜壓軸承即可將載台氣浮於導軌上，於氣壓的控制上較為簡單且定位精度高，使得載台之平面度及移動精度可大幅提升。The main object of the present invention is to provide aerostatic pressure by the first hydrostatic bearing facing the first side and the second hydrostatic bearing facing the second side, so that the stage can float on the guide groove of the guide rail, and Since the first side surface and the second side surface face the opening of the guide rail, the height of the air static pressure platform can be greatly reduced, and the processing environment can be more widely applied, and the assembly between the stage and the guide rail is convenient and fast, and the stage is completed. After assembly with the guide rail, only two hydrostatic bearings are required to float the stage on the guide rail, which is simple in air pressure control and high in positioning accuracy, so that the flatness and movement accuracy of the stage can be greatly improved.
本發明之一種氣靜壓平台包含一導軌及一載台，該導軌具有一導槽，該導槽具有一第一側面、一第二側面及一槽底面，該第一側面及該槽底面之間具有一第一夾角，該第二側面及該槽底面之間具有一第二夾角，該第一側面具有一第一頂緣，該第二側面具有一第二頂緣，該第一頂緣及該第二頂緣之間形成有一開口，該第一側面及該第二側面朝向該開口，該載台設置於該導槽，該載台具有一第一安裝部、一第二安裝部、一第一氣靜壓軸承及一第二氣靜壓軸承，該第一氣靜壓軸承設置於該第一安裝部，該第二氣靜壓軸承設置於該第二安裝部，該第一氣靜壓軸承具有一第一表面，該第一表面朝向該第一側面，該第二氣靜壓軸承具有一第二表面，該第二表面朝向該第二側面。An air static pressure platform of the present invention comprises a guide rail and a loading platform, the guide rail has a guiding groove, the guiding groove has a first side surface, a second side surface and a groove bottom surface, the first side surface and the bottom surface of the groove Between the second side and the bottom surface of the groove, a second angle is formed, the first side has a first top edge, and the second side has a second top edge, the first top edge An opening is formed between the second top edge, the first side surface and the second side surface are opposite to the opening, the loading platform is disposed on the guiding slot, and the loading platform has a first mounting portion and a second mounting portion. a first aerostatic bearing and a second aerostatic bearing, the first hydrostatic bearing is disposed at the first mounting portion, and the second hydrostatic bearing is disposed at the second mounting portion, the first gas The hydrostatic bearing has a first surface facing the first side, and the second aerostatic bearing has a second surface, the second surface facing the second side.
本發明藉由該導軌之該第一側面及該第二側面朝向該開口而呈現V字型，能有效的減少該導軌的尺寸且使該載台易於裝設，相同地，該第一氣靜壓軸承之該第一表面及該第二氣靜壓軸承之該第二表面亦呈現V字型，可扁平化該氣靜壓平台，且在有限的體積中取得最大的軸承面積，此外，由於本案所使用之氣靜壓軸承數量較少，於氣壓的控制氣壓的控制上較為簡單且定位精度高，使得載台之平面度及移動精度可大幅提升。According to the present invention, the first side surface and the second side surface of the guide rail are V-shaped toward the opening, which can effectively reduce the size of the guide rail and make the stage easy to install. Similarly, the first air static The first surface of the pressure bearing and the second surface of the second hydrostatic bearing also exhibit a V-shape, which can flatten the aerostatic platform and achieve a maximum bearing area in a limited volume, and The number of hydrostatic bearings used in this case is small, the control of the air pressure is relatively simple and the positioning accuracy is high, so that the flatness and movement accuracy of the stage can be greatly improved.
請參閱第1及2圖，為本發明之第一實施例，一種氣靜壓平台100包含一導軌110、一載台120、一磁吸裝置130、一驅動裝置140及一感測裝置150。Referring to FIGS. 1 and 2 , a first embodiment of the present invention, a static pressure platform 100 includes a guide rail 110 , a loading platform 120 , a magnetic attraction device 130 , a driving device 140 , and a sensing device 150 .
請參閱第1、2及5圖，該導軌110具有一導槽111及一底面112，該導槽111具有一第一側面111a、一第二側面111b及一槽底面111c，該第一側面111a及該槽底面111c之間具有一第一夾角θ1，該第二側面111b及該槽底面111c之間具有一第二夾角θ2，在本實施例中，該第一夾角θ1及該第二夾角θ2不小於90度，且該第一夾角θ1實質上等於該第二夾角θ2，較佳的，該第一夾角θ1及該第二夾角θ2介於95度至160度之間，請參閱第2及5圖，該第一側面111a具有一第一頂緣111d，該第二側面111b具有一第二頂緣111e，該第一頂緣111d及該第二頂緣111e之間形成有一開口111f，該第一側面111a及該第二側面111b朝向該開口111f，使該第一側面111a及該第二側面111b呈現V字型，以扁平化該導軌110之高度，且該第一側面111a之該第一頂緣111d及該第二側面111b之該第二頂緣111e之間具有一第一間距D1，該槽底面111c具有一寬度W，該第一間距D1大於該寬度W，使得該載台120可直接置入該導槽111中而易於組裝。Referring to Figures 1, 2 and 5, the guide rail 110 has a guide groove 111 and a bottom surface 112. The guide groove 111 has a first side surface 111a, a second side surface 111b and a groove bottom surface 111c. The first side surface 111a A first angle θ1 is formed between the bottom surface 111c of the groove and a second angle θ2 between the second side surface 111b and the bottom surface 111c. In the embodiment, the first angle θ1 and the second angle θ2 are Not less than 90 degrees, and the first angle θ1 is substantially equal to the second angle θ2. Preferably, the first angle θ1 and the second angle θ2 are between 95 degrees and 160 degrees, please refer to the second and 5, the first side 111a has a first top edge 111d, the second side 111b has a second top edge 111e, and an opening 111f is formed between the first top edge 111d and the second top edge 111e. The first side surface 111a and the second side surface 111b face the opening 111f, and the first side surface 111a and the second side surface 111b are V-shaped to flatten the height of the rail 110, and the first side surface 111a A top edge 111d and the second top edge 111e of the second side surface 111b have a first spacing D1, and the groove bottom surface 111c has A width W, the first distance D1 is greater than the width W, so that the stage 120 can be directly inserted in the guide groove 111 and easy to assemble.
請參閱第2、3、4及5圖，該載台120設置於該導槽111，該載台120具有一第一安裝部121、一第二安裝部122、一第一氣靜壓軸承123、一第二氣靜壓軸承124、一凹槽125及一安裝座126，該第一安裝部121具有一第一通氣槽121a，該第二安裝部122具有一第二通氣槽122a，該第一氣靜壓軸承123設置於該第一安裝部121，該第二氣靜壓軸承124設置於該第二安裝部122，且該第一氣靜壓軸承123罩蓋該第一通氣槽121a，該第二氣靜壓軸承124罩蓋該第二通氣槽122a，較佳的，該第一氣靜壓軸承123及該第二氣靜壓軸承124為多孔質節流元件製成，可在有限的軸承面積下取得最高的承載力及剛性。其中，該第一氣靜壓軸承123具有一第一表面123a，該第一表面123a朝向該第一側面111a，該第二氣靜壓軸承124具有一第二表面124a，該第二表面124a朝向該第二側面111b，由於該導槽111之該第一側面111a及該第二側面111b為V字型，因此該第一表面123a及該第二表面124a亦呈現V字型，亦可扁平化該導軌110之高度，且藉由該第一氣靜壓軸承123及該第二氣靜壓軸承124提供之氣靜壓可使該載台120穩定地氣浮於該導槽111中而進行精密之定位。Referring to the figures 2, 3, 4 and 5, the stage 120 is disposed on the guiding slot 111. The stage 120 has a first mounting portion 121, a second mounting portion 122, and a first air static bearing 123. a second aerostatic bearing 124, a recess 125, and a mounting seat 126. The first mounting portion 121 has a first venting groove 121a, and the second mounting portion 122 has a second venting groove 122a. An aerostatic bearing 123 is disposed on the first mounting portion 121, the second aerostatic bearing 124 is disposed on the second mounting portion 122, and the first hydrostatic bearing 123 covers the first venting groove 121a. The second air static pressure bearing 124 covers the second ventilation groove 122a. Preferably, the first air static pressure bearing 123 and the second air static pressure bearing 124 are made of a porous throttling element, which can be limited The highest bearing capacity and rigidity are achieved under the bearing area. The first air static pressure bearing 123 has a first surface 123a facing the first side surface 111a, and the second air static pressure bearing 124 has a second surface 124a facing the second surface 124a. The first side surface 111a and the second side surface 111b of the second side surface 111b are V-shaped, and the first surface 123a and the second surface 124a are also V-shaped and can be flattened. The height of the guide rail 110 and the static pressure provided by the first hydrostatic bearing 123 and the second hydrostatic bearing 124 enable the stage 120 to stably float in the guide groove 111 for precision. Positioning.
請參閱第3、4及5圖，該載台120之該凹槽125位於該第一安裝部121及該第二安裝部122之間，該凹槽125與該槽底面111c之間構成一腔室C，該安裝座126位於該腔室C中以設置該磁吸裝置130及該驅動裝置140，該磁吸裝置130具有一第一磁吸元件131及一第二磁吸元件132，該第一磁吸元件131設置於該導軌110，該第二磁吸元件132設置於該載台120之該安裝座126，在本實施例中，該第一磁吸元件131為一具有高導磁率之平板，該第二磁吸元件132為永久磁鐵，請參閱第4圖，較佳的，該導軌110具有一安裝槽113及一通孔114，該安裝槽113凹設於該底面112，該通孔114位於該安裝槽113及該腔室C之間，且該通孔114連通該安裝槽113及該腔室C，該第一磁吸元件131設置於該安裝槽113中，該安裝座126具有一側板126a及一底板126b，該底板126b連接該側板126a，且該底板126b位於該通孔114，該底板126b具有一結合槽126c，該第二磁吸元件132結合於該結合槽126c中，請參閱第5及6圖，該第一磁吸元件131及該第二磁吸元件132之間具有一第二間距D2，藉由該第一磁吸元件131及該第二磁吸元件132之間的磁吸力可提供該載台120一磁性預壓，以增加該載台120的穩定度，較佳的，該第二間距D2介於0.03 mm至1.0 mm之間，可提供最佳之磁性預壓。Referring to Figures 3, 4 and 5, the recess 125 of the stage 120 is located between the first mounting portion 121 and the second mounting portion 122. The recess 125 and the bottom surface 111c define a cavity. The chamber C is located in the chamber C to provide the magnetic device 130 and the driving device 140. The magnetic device 130 has a first magnetic element 131 and a second magnetic element 132. A magnetic element 131 is disposed on the rail 110, and the second magnetic element 132 is disposed on the mounting base 126 of the stage 120. In the embodiment, the first magnetic element 131 has a high magnetic permeability. The second magnetic element 132 is a permanent magnet. Please refer to FIG. 4 . Preferably, the guide rail 110 has a mounting groove 113 and a through hole 114 . The mounting groove 113 is recessed in the bottom surface 112 . The first magnetic element 131 is disposed in the mounting groove 113, and the mounting hole 126 has a first magnetic element 131 disposed in the mounting groove 113. a side plate 126a and a bottom plate 126b, the bottom plate 126b is connected to the side plate 126a, and the bottom plate 126b is located in the through hole 114, the bottom plate 126b has a The second magnetic element 132 is coupled to the coupling groove 126c. Referring to FIGS. 5 and 6, the first magnetic element 131 and the second magnetic element 132 have a second spacing D2 therebetween. The magnetic pre-compression of the stage 120 can be provided by the magnetic attraction between the first magnetic element 131 and the second magnetic element 132 to increase the stability of the stage 120. Preferably, the first The two-pitch D2 is between 0.03 mm and 1.0 mm, providing the best magnetic preload.
請參閱第2、4及5圖，該驅動裝置140位於該腔室C中，在本實施例中，該驅動裝置140為一線性馬達，該驅動裝置140具有一定子141及一動子142，該動子142結合於該安裝座126，該定子141結合於該導軌110，該動子142可相對該定子141移動，由於該動子142結合於該安裝座126，因此，當該動子142相對該定子141移動時，該載台120亦於該導軌110、該第一氣靜壓軸承123及該第二氣靜壓軸承124的拘束下線性移動以進行高精密度的定位，此外，請參閱第1及2圖，該氣靜壓平台100另包含有一第一擋止件161及一第二擋止件162，該第一擋止件161及該第二擋止件162設置於該導軌110，且該載台120位於該第一擋止件161及該第二擋止件162之間，並將該載台120限位於該第一擋止件161及該第二擋止件162之間，以避免該載台120脫離該導軌110。Referring to Figures 2, 4 and 5, the driving device 140 is located in the chamber C. In the embodiment, the driving device 140 is a linear motor, and the driving device 140 has a stator 141 and a mover 142. The mover 142 is coupled to the mounting seat 126. The stator 141 is coupled to the guide rail 110. The mover 142 is movable relative to the stator 141. Since the mover 142 is coupled to the mount 126, when the mover 142 is opposite When the stator 141 moves, the stage 120 is linearly moved under the restraint of the guide rail 110, the first hydrostatic bearing 123 and the second hydrostatic bearing 124 for high-precision positioning. In the first and second embodiments, the air static pressure platform 100 further includes a first stop member 161 and a second stop member 162. The first stop member 161 and the second stop member 162 are disposed on the guide rail 110. The stage 120 is located between the first stop member 161 and the second stop member 162, and the stage 120 is limited between the first stop member 161 and the second stop member 162. In order to avoid the stage 120 being detached from the guide rail 110.
請參閱第2、4及5圖，該感測裝置150位於該腔室C中，在本實施中，該感測裝置150可為光學尺裝置或磁性尺裝置，該感測裝置150具有一第一感測元件151及一第二感測元件152，該第一感測元件151可為光學尺或磁性尺，該第二感測元件152可為相對光學尺或磁性尺的讀頭，且該第一感測元件151固定於該導軌110，該第二感測元件152設置於該載台120，而當載台120受該動子142帶動而移動時，該第二感測元件152亦相對該第一感測元件151移動，並藉由該第二感測元件152對該第一感測元件151之間的感應進行該載台120的定位。藉由該載台120之該凹槽125與該槽底面111c形成之該腔室C容置該驅動裝置140及該感測裝置150，使得該氣靜壓平台100不需再由外部安裝驅動裝置或感測裝置，而可進一步的縮小該氣靜壓平台100的尺寸。Referring to FIGS. 2, 4 and 5, the sensing device 150 is located in the chamber C. In the present embodiment, the sensing device 150 can be an optical scale device or a magnetic scale device, and the sensing device 150 has a first a sensing component 151 and a second sensing component 152, the first sensing component 151 can be an optical scale or a magnetic ruler, and the second sensing component 152 can be a read head relative to an optical scale or a magnetic ruler, and the The first sensing component 151 is fixed to the rail 110, and the second sensing component 152 is disposed on the carrier 120. When the carrier 120 is moved by the mover 142, the second sensing component 152 is also opposite. The first sensing element 151 is moved, and the positioning of the stage 120 is performed by the second sensing element 152 between the sensing of the first sensing element 151. The chamber C formed by the recess 125 of the stage 120 and the bottom surface 111c of the stage accommodates the driving device 140 and the sensing device 150, so that the air static pressure platform 100 does not need to be externally mounted. Or sensing the device, and the size of the aerostatic platform 100 can be further reduced.
請參閱第7、8、9及10圖，為本發明之第二實施例，其與第一實施例的差異在於該導槽111之該第一側面111a凹設有一第一嵌合槽111g，該導槽111之該第二側面111b凹設有一第二嵌合槽111h，該第一磁吸元件131具有一第一磁吸組131a及一第二磁吸組131b，該第一磁吸組131a設置於該第一嵌合槽111g，該第二磁吸組131b設置於該第二嵌合槽111h，該第一氣壓軸承123之該第一表面123a凹設有一第一固定槽123b，該第二氣壓軸承124之該第二表面124a凹設有一第二固定槽124b，該第二磁吸元件132具有一第三磁吸組132a及一第四磁吸組132b，該第三磁吸組132a設置於該第一固定槽123b中，該第四磁吸組132b設置於該第二固定槽124b中，藉由該第一磁吸組131a及該第三磁吸組132a之間的磁吸力以及該第二磁吸組131b及該第四磁吸組132b之間的磁吸力作為該氣靜壓平台100的磁性預壓，本實施例以左右對稱的方式提供預壓可使該載台120初步動作時更加穩定。Referring to Figures 7, 8, 9 and 10, a second embodiment of the present invention is different from the first embodiment in that the first side surface 111a of the guide groove 111 is recessed with a first fitting groove 111g. A second engaging groove 111h is defined in the second side surface 111b of the guiding groove 111. The first magnetic component 131 has a first magnetic group 131a and a second magnetic group 131b. The first magnetic group The first clamping groove 111g is disposed in the first fitting groove 111g. The second magnetic component 131b is disposed in the second fitting groove 111h. The first surface 123a of the first pneumatic bearing 123 is recessed with a first fixing groove 123b. The second surface 124a of the second air pressure bearing 124 is recessed with a second fixing groove 124b. The second magnetic component 132 has a third magnetic group 132a and a fourth magnetic group 132b. The third magnetic group 132a is disposed in the first fixing groove 123b, and the fourth magnetic group 132b is disposed in the second fixing groove 124b, and the magnetic attraction between the first magnetic group 131a and the third magnetic group 132a And the magnetic attraction between the second magnetic group 131b and the fourth magnetic group 132b is used as the magnetic preload of the static pressure platform 100. To provide a more stable manner preloading the initial operation stage carrier 120 can.
本發明藉由該導軌110之該第一側面111a及該第二側面111b朝向該開口111f而呈現V字型，能有效的減少該導軌110的尺寸且使該載台120易於裝設，相同地，該第一氣靜壓軸承123之該第一表面123a及該第二氣靜壓軸承124之該第二表面124a亦呈現V字型，可扁平化該氣靜壓平台100，且可在有限的體積中取得最大的軸承面積，此外，由於本案所使用之氣靜壓軸承數量較少，於氣壓的控制氣壓的控制上較為簡單且定位精度高，使得該載台120之平面度及移動精度可大幅提升。The first side 111a and the second side 111b of the guide rail 110 are V-shaped toward the opening 111f, which can effectively reduce the size of the guide rail 110 and make the stage 120 easy to install. The first surface 123a of the first aerostatic bearing 123 and the second surface 124a of the second aerostatic bearing 124 are also V-shaped, and the static pressure platform 100 can be flattened, and can be limited The largest bearing area is obtained in the volume. In addition, since the number of the gas static pressure bearings used in the present case is small, the control of the air pressure is relatively simple and the positioning accuracy is high, so that the flatness and the movement accuracy of the stage 120 are improved. Can be greatly improved.
本發明之保護範圍當視後附之申請專利範圍所界定者為準，任何熟知此項技藝者，在不脫離本發明之精神和範圍內所作之任何變化與修改，均屬於本發明之保護範圍。The scope of the present invention is defined by the scope of the appended claims, and any changes and modifications made by those skilled in the art without departing from the spirit and scope of the invention are within the scope of the present invention. .
100‧‧‧氣靜壓平台
110‧‧‧導軌
111‧‧‧導槽
111a‧‧‧第一側面
111b‧‧‧第二側面
111c‧‧‧槽底面
111d‧‧‧第一頂緣
111e‧‧‧第二頂緣
111f‧‧‧開口
111g‧‧‧第一嵌合槽
111h‧‧‧第二嵌合槽
112‧‧‧底面
113‧‧‧安裝槽
114‧‧‧通孔
120‧‧‧載台
121‧‧‧第一安裝部
121a‧‧‧第一通氣槽
122‧‧‧第二安裝部
122a‧‧‧第二通氣槽
123‧‧‧第一氣靜壓軸承
123a‧‧‧第一表面
123b‧‧‧第一固定槽
124‧‧‧第二氣靜壓軸承
124a‧‧‧第二表面
124b‧‧‧第二固定槽
125‧‧‧凹槽
126‧‧‧安裝座
126a‧‧‧側板
126b‧‧‧底板
126c‧‧‧結合槽
130‧‧‧磁吸裝置
131‧‧‧第一磁吸元件
131a‧‧‧第一磁吸組
131b‧‧‧第二磁吸組
132‧‧‧第二磁吸元件
132a‧‧‧第三磁吸組
132b‧‧‧第四磁吸組
140‧‧‧驅動裝置
141‧‧‧定子
142‧‧‧動子
150‧‧‧感測裝置
151‧‧‧第一感測元件
152‧‧‧第二感測元件
161‧‧‧第一擋止件
162‧‧‧第二擋止件
θ1‧‧‧第一夾角
θ2‧‧‧第二夾角
D1‧‧‧第一間距
D2‧‧‧第二間距
W‧‧‧寬度
C‧‧‧腔室
200‧‧‧氣靜壓平台
210‧‧‧導軌
220‧‧‧載台
221‧‧‧氣靜壓軸承100‧‧‧Air Static Pressure Platform
110‧‧‧rails
111‧‧‧ Guide slot
111a‧‧‧ first side
111b‧‧‧ second side
111c‧‧‧Slot bottom
111d‧‧‧first top edge
111e‧‧‧second top edge
111f‧‧‧ openings
111g‧‧‧First mating slot
111h‧‧‧Second fitting groove
112‧‧‧ bottom
113‧‧‧Installation slot
114‧‧‧through hole
120‧‧‧ stage
121‧‧‧First Installation Department
121a‧‧‧First ventilation slot
122‧‧‧Second Installation Department
122a‧‧‧second ventilation slot
123‧‧‧First aerostatic bearing
123a‧‧‧ first surface
123b‧‧‧first fixed slot
124‧‧‧Second aerostatic bearing
124a‧‧‧second surface
124b‧‧‧Second fixing slot
125‧‧‧ Groove
126‧‧‧ Mounting
126a‧‧‧ side panels
126b‧‧‧floor
126c‧‧‧ joint slot
130‧‧‧Magnetic device
131‧‧‧First magnetic element
131a‧‧‧First Magnetic Group
131b‧‧‧Second magnetic group
132‧‧‧Second magnetic element
132a‧‧‧third magnetic group
132b‧‧‧fourth magnetic group
140‧‧‧ drive
141‧‧‧stator
142‧‧‧ mover
150‧‧‧Sensing device
151‧‧‧First sensing element
152‧‧‧Second sensing element
161‧‧‧First stop
162‧‧‧Second stop θ1‧‧‧first angle θ2‧‧‧second angle
D1‧‧‧first spacing
D2‧‧‧second spacing
W‧‧‧Width
C‧‧‧室
200‧‧ ‧ aerostatic platform
210‧‧‧rails
220‧‧‧ stage
221‧‧‧Aerostatic bearing
第1圖：依據本發明之第一實施例，一種氣靜壓平台的立體組合圖。 第2圖：依據本發明之第一實施例，該氣靜壓平台的立體分解圖。 第3圖：依據本發明之第一實施例，一載台的立體組合圖。 第4圖：依據本發明之第一實施例，該載台的立體分解圖。 第5圖：依據本發明之第一實施例，該氣靜壓平台的剖視圖。 第6圖：依據本發明之第一實施例，一第一磁吸元件與一第二磁吸元件的示意圖。 第7圖：依據本發明之第二實施例，該氣靜壓平台的立體分解圖。 第8圖：依據本發明之第二實施例，一載台的立體組合圖。 第9圖：依據本發明之第二實施例，該載台的立體分解圖。 第10圖：依據本發明之第二實施例，該氣靜壓平台的剖視圖。 第11圖：一種習知氣靜壓平台的剖視圖。Figure 1 is a perspective assembled view of a hydrostatic platform in accordance with a first embodiment of the present invention. Figure 2: An exploded perspective view of the aerostatic platform in accordance with a first embodiment of the present invention. Figure 3 is a perspective assembled view of a stage in accordance with a first embodiment of the present invention. Figure 4 is an exploded perspective view of the stage in accordance with a first embodiment of the present invention. Figure 5 is a cross-sectional view of the aerostatic platform in accordance with a first embodiment of the present invention. Figure 6 is a schematic view of a first magnetic element and a second magnetic element in accordance with a first embodiment of the present invention. Figure 7 is an exploded perspective view of the aerostatic platform in accordance with a second embodiment of the present invention. Figure 8 is a perspective assembled view of a stage in accordance with a second embodiment of the present invention. Figure 9 is an exploded perspective view of the stage in accordance with a second embodiment of the present invention. Figure 10 is a cross-sectional view of the aerostatic platform in accordance with a second embodiment of the present invention. Figure 11: A cross-sectional view of a conventional aerostatic platform.
100‧‧‧氣靜壓平台 100‧‧‧Air Static Pressure Platform
110‧‧‧導軌 110‧‧‧rails
111‧‧‧導槽 111‧‧‧ Guide slot
111c‧‧‧槽底面 111c‧‧‧Slot bottom
111f‧‧‧開口 111f‧‧‧ openings
120‧‧‧載台 120‧‧‧ stage
125‧‧‧凹槽 125‧‧‧ Groove
130‧‧‧磁吸裝置 130‧‧‧Magnetic device
140‧‧‧驅動裝置 140‧‧‧ drive
150‧‧‧感測裝置 150‧‧‧Sensing device
161‧‧‧第一擋止件 161‧‧‧First stop
162‧‧‧第二擋止件 162‧‧‧Second stop
Claims (14)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103111134A TWI544979B (en) | 2014-03-25 | 2014-03-25 | Aerostatic bearing stage |
| CN201410440312.4A CN104942610B (en) | 2014-03-25 | 2014-08-28 | Air static pressure platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103111134A TWI544979B (en) | 2014-03-25 | 2014-03-25 | Aerostatic bearing stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201536470A true TW201536470A (en) | 2015-10-01 |
| TWI544979B TWI544979B (en) | 2016-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW103111134A TWI544979B (en) | 2014-03-25 | 2014-03-25 | Aerostatic bearing stage |
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| CN (1) | CN104942610B (en) |
| TW (1) | TWI544979B (en) |
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| TWI631289B (en) * | 2015-12-04 | 2018-08-01 | 財團法人金屬工業研究發展中心 | Aerostatic stage and gap adjusting method thereof |
| WO2021120102A1 (en) * | 2019-12-19 | 2021-06-24 | 诚瑞光学(常州)股份有限公司 | Optical zoom apparatus |
| CN112551072A (en) * | 2020-12-03 | 2021-03-26 | 南通固邦数控机床有限公司 | Oil-gas mixture suspension support device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| AT408081B (en) * | 1997-08-27 | 2001-08-27 | Deinhammer Karl | GUIDE |
| DE10215832A1 (en) * | 2002-04-10 | 2003-10-30 | Neff Antriebstech Automation | Linear drive device |
| TWI260646B (en) * | 2003-03-28 | 2006-08-21 | Sumitomo Heavy Industries | X-Y axis stage device |
| CN101829904A (en) * | 2010-01-26 | 2010-09-15 | 西安交通大学 | Closed hydrostatic slideway |
| CN102950468A (en) * | 2012-10-19 | 2013-03-06 | 北京海普瑞森科技发展有限公司 | High-precision air static pressure guide rail |
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| CN104942610A (en) | 2015-09-30 |
| TWI544979B (en) | 2016-08-11 |
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