JP2008067463A - Linear motor type table unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear motor type table unit which achieves downsizing and space saving by suppressing the height dimensions and also maintains high plane accuracy at all times, without its movable table being influenced by magnetic attraction generated by a linear motor mechanism. <P>SOLUTION: This linear motor type table unit A is equipped with a base 2, a direct-acting guide 4, the movable table 6, and a linear motor mechanism 8, and the direct-acting guide is provided with a guide rail 40 and a slider 42. A moving member mounting member 20 is interposed between the linear motor moving member 82 and the movable table. The linear motor moving member is fixed to the movable member mounting member. The fixing part is fixed to the movable table, keeping the linear motor moving member contactless, leaving a specified space to the movable table. The moving member mounting member elastically deforms for absorption thereby preventing the above attraction from a linear motor stator to the linear motor moving member from working on the movable table. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a table device that moves various products, for example, in manufacturing, inspection, and the like, and in particular, a linear motor table on which a linear motor mechanism is mounted as a positioning mechanism for reciprocating the moving table and stopping it at a predetermined position. It relates to the improvement of the device.

  2. Description of the Related Art Conventionally, for example, a table device that moves various products by manufacturing or inspection is known. In this case, in such a table device, for example, a ball screw mechanism, a belt mechanism, a linear motor mechanism, or the like is applied as a positioning mechanism for reciprocating a table on which various products are placed and stopping at a predetermined position. Table devices equipped with these various positioning mechanisms have been put into practical use.

  FIGS. 2A and 2B show an example of a linear motor type table device equipped with a linear motor mechanism as a positioning mechanism. The table device B includes a base 2 and a base 2. A pair of linear motion guide devices 4 are provided, and a moving table 6 that is guided by the linear motion guide devices 4 to reciprocate.

  In this case, each linear motion guide device 4 includes a guide rail 40 extending linearly in a predetermined direction (longitudinal direction of the base 2 (left and right direction in FIG. 2B)), and along the guide rail 40. And a reciprocally movable slider 42. According to the table device B configured as described above, the moving table 6 can be reciprocated by the linear motor mechanism 8 serving as a positioning mechanism while being guided by the linear motion guide device 4, and at a predetermined position. It can be stopped. That is, in the table device B, the moving table 6 is configured to be able to reciprocate along the guide rail 40 via the slider 42 and to stop at a predetermined position.

  2 (a) and 2 (b), the table device B is provided with two linear motion guide devices 4 (two guide rails 40) in parallel. In this case, a total of four sliders 42 are provided on each of the two guide rails 40, and one moving table 6 is installed on the four sliders 42.

  Further, in the table device B, the linear motor mechanism 8 is provided between the pair of linear guide devices 4, specifically, between the two guide rails 40 arranged in parallel, the guide rail 40. A linear motor stator 80 including a plurality of permanent magnets 8M extending at predetermined intervals along the extending direction of the magnet and a magnetic body, and a yoke 8Y having the plurality of permanent magnets 8M fixed to the upper surface. And a linear motor movable element 82 provided with a plurality of armature coils (not shown) with a core wound around a core such as an iron core. The linear motor movable element 82 is attached to the moving table 6 so as to face the linear motor stator 80.

  In this case, in the linear motor stator 80, the magnetic poles of the permanent magnets 8M facing the linear motor movable element 82 (stator magnetic pole surfaces (upper surfaces in FIGS. 2A and 2B)) 80a are alternately arranged. The yoke 8Y is fastened to the stator mounting portion 2b by a fastening member (screw) 14 so as to be an N pole or an S pole, and is fixed to the base 2. Note that the yoke 8Y of the linear motor stator 80 is configured to have a plate-like body whose length is substantially the same as the length of the base 2 (the distance in the left-right direction in FIG. 2B). Here, the stator mounting portion 2b is fixed to the base 2 with a predetermined width (in the left-right direction of FIG. 2A) between the two guide rail arrangement surfaces 2a on which the two guide rails 40 are arranged. Distance), a predetermined length (substantially the same as the length of the base 2 (distance in the left-right direction in FIG. 2B)), and a predetermined depth (distance in the vertical direction in FIG. 2A) It is recessed.

  Further, the linear motor movable element 82 is an armature coil (illustrated) attached to a surface 82a (a lower surface in FIGS. 2A and 2B) of the linear motor movable element 82 facing the linear motor stator 80. However, it is fastened and fixed to the mover mounting portion 6b by a fastening member (screw) 10 so as to face each stator magnetic pole surface 80a with a predetermined interval. The mover mounting portion 6b has a fastening member (screw) on the bottom surface 6a with respect to a surface (bottom surface (lower surface in FIGS. 2 (a) and 2 (b))) 6a facing the base 2 of the moving table 6. ) A portion surrounded by four sliders 42 fastened and fixed by 12 has a predetermined width (distance in the left-right direction in FIG. 2A) and a predetermined length (distance in the left-right direction in FIG. 2B). And a predetermined depth (the distance in the vertical direction in FIG. 2A).

  According to such a linear motor mechanism 8, when a current is passed through an armature coil (not shown) of the linear motor movable element 82, a magnetic force is generated in the armature coil based on Fleming's left-hand rule. A repulsive force and a suction force can be alternately applied between the linear motor stator 80 and the linear motor stator 80. Thereby, a predetermined driving force can be applied to the linear motor movable element 82. As a result, the moving table 6 can be smoothly reciprocated along the guide rail 40 via the slider 42 together with the linear motor movable element 82, and the current can be moved by stopping the supply of current to the armature coil. The table 6 can be stopped at a predetermined position.

  However, in the case of the linear motor mechanism 8 configured as shown in FIGS. 2A and 2B, a very high driving force can be given to the moving table 6, while the linear motor movable element 82. In order to give the propulsive force between the armature coil (not shown) and the linear motor stator 80, a strong repulsive force and attractive force due to magnetic force are generated. In this case, for example, the attractive force between the armature coil (not shown) of the linear motor movable element 82 and the linear motor stator 80 acts to give a propulsive force to the moving table 6, and at the same time, It also acts to suck the moving table 6 itself.

  In the configuration shown in FIGS. 2A and 2B, the armature coil (not shown) of the linear motor mover 82 and the linear motor stator 80 face each other in the vertical direction (vertical direction in the figure). Therefore, when the suction force against the moving table 6 itself as described above is continuously applied, depending on the suction force and the degree of continuation, the moving table 6 bends in the vertical direction (the same direction in the figure) and is localized. May be deformed.

  That is, when an attractive force is generated between the armature coil (not shown) of the linear motor movable element 82 and the linear motor stator 80, the linear motor movable element 82 moves in the direction of the linear motor stator 80 (FIG. ), (b) downward). In this case, since the linear motor movable element 82 is fixed to the movable element attaching portion 6b of the moving table 6, the moving table 6 includes the linear motor movable element 82 and the linear motor movable element 82 in the vicinity thereof. It will be sucked in the direction of the stator 80 (downward direction in FIGS. 2A and 2B).

  As a result, the movable table 6 may be deformed by the mover mounting portion 6b and the vicinity thereof being bent in a convex shape in the direction of the linear motor stator 80 (downward direction in FIGS. 2A and 2B). In this way, when the moving table 6 is bent and deformed, for example, the plane accuracy of the work mounting surface (upper surface in FIGS. 2A and 2B) 6w of the moving table 6 or the moving table 6 itself. As a result, the straight running stability of the workpiece deteriorates, resulting in inconveniences in manufacturing and inspection of the workpiece placed on the workpiece mounting surface 6w. Further, for example, even when various interfaces are added to the workpiece mounting surface 6w, inconveniences such as rattling of the interface occur.

  In this table apparatus B, the depth of the stator mounting portion 2b (FIG. 2 (a), (FIG. 2), so that the linear motor stator 80 and the linear motor movable element 82 of the linear motor mechanism 8 are not brought into contact with each other. b), the height of the linear motion guide device 4 (the guide rail 40 and the slider 42) (distance in the same direction in the figure), and the depth of the mover mounting portion 6b (the same direction in the figure). Each dimension tolerance) is managed.

  Then, if necessary, for example, a height adjusting member (shim (not shown)) is interposed between the linear motor movable element 82 and the movable element attaching portion 6b, so that the stator magnetic pole surface of the linear motor stator 80 is obtained. The distance between 80a and the facing surface 82a of the linear motor movable element 82 is adjusted to a predetermined value.

  However, in such a countermeasure, first, the moving table 6 is once removed from the table device B, and the linear motor movable element 82 is further removed from the moving table 6, and then a shim (not shown) is inserted or processed. It is necessary to work, and it takes much time and effort.

  Therefore, as a measure for solving such inconvenience, for example, in Patent Document 1, a linear motor stator of a linear motor mechanism and a linear motor movable element are configured as shown in FIGS. 2 (a) and 2 (b). As described above, a table device is disclosed as an example, in which the stator magnetic pole face and the armature coil are not configured to face each other in the vertical direction but are mounted with a linear motor mechanism in which these are opposed in the horizontal direction.

Such a table device is configured such that the two guide rail mounting surfaces of the base are raised, and the depth of the stator mounting portion that is recessed between the two guide rail mounting surfaces is increased. The linear motor stator is attached to the two inner wall portions facing each other so that the stator magnetic pole surfaces face each other, not the bottom of the stator attachment portion.
On the other hand, the linear motor mover has two armatures that are spaced apart from the stator magnetic pole surface of the linear motor stator attached to the inner wall portion of the stator attachment portion and can face each other in a non-contact state. The coils are respectively attached to the side surfaces of the linear motor movable element.

  According to the table device having such a configuration, the attractive force generated between the armature coil of the linear motor movable element and the linear motor stator does not act in the vertical direction but acts only in the horizontal direction. However, the attractive force generated between the linear motor stator attached to one inner wall portion of the stator attachment portion and one armature coil of the linear motor movable element facing the linear motor stator, and the other of the stator attachment portions Since the suction force generated between the linear motor stator attached to the inner wall portion of the motor and the other armature coil of the linear motor movable element facing this acts on the same size and in the opposite direction, Both suction forces can be offset.

  In this case, not only the above-described suction force but also a repulsive force is generated between the armature coil of the linear motor movable element and the linear motor stator. However, as in the case of the suction force described above, the repulsive force does not act in the vertical direction and can be canceled in the horizontal direction.

For this reason, not only the vertical suction force and repulsion force but also the horizontal suction force and repulsion force do not act on the moving table. As a result, the moving table does not bend in either the vertical direction or the horizontal direction. For example, the deterioration of the plane accuracy of the work mounting surface of the moving table or the deterioration of the straight running stability of the moving table itself is effective. Can be avoided.
JP-A-11-266577

  However, in such a table device, since the stator magnetic pole surface of the linear motor stator and the armature coil of the linear motor mover are disposed opposite to each other in the horizontal direction, the linear motor stator and the linear motor mover are It is necessary to secure a mounting space to some extent in the height direction (vertical direction) of the table device, and to secure a facing area between the stator magnetic pole surface and the armature coil.

For this reason, such a table device includes a linear motor mechanism 8 having a linear motor stator 80 and a linear motor movable element 82 as shown in FIGS. Compared with the mounted table apparatus B, the height dimension (distance in the vertical direction) becomes large.
Thus, in such a table device, it is an essential requirement to increase the height dimension, the expansion of the height dimension, depending on the extent of the expansion, in order to reduce the overall size of the table device and save space, It becomes a bottleneck.

  The present invention has been made in order to solve such a problem, and an object of the present invention is to reduce the size and save space by suppressing the height dimension, and the magnetic attraction force generated by the moving table by the linear motor mechanism. It is an object of the present invention to provide a linear motor type table device that can always maintain a high level of plane accuracy without being affected by the above.

  In order to achieve such an object, a linear motor table device according to the present invention includes a base, a linear motion guide device provided on the base, and a reciprocating motion guided by the linear motion guide device. A moving table and a linear motor mechanism for moving the moving table back and forth and stopping at a predetermined position are provided. In this case, the linear motion guide device is provided with a guide rail extending in a predetermined direction and a slider on which the moving table is fixed and reciprocating along the guide rail. Further, the linear motor mechanism includes a linear motor stator that is extended on the base along the guide rail, and a linear motor movable element that is disposed to face the linear motor stator at a predetermined interval. The moving table is reciprocated by applying a propulsive force by alternately applying a repulsive force and a suction force to the linear motor movable element from the linear motor stator.

  In such a linear motor type table device, a mover mounting member is interposed between the linear motor mover and the moving table, and the linear motor mover is fixed to the mover mounting member, and The fixed part is fixed to the moving table via the movable element mounting member so as to be in a non-contact state with a predetermined interval between the movable table and the movable element mounting member is at least a linear motor. The suction force applied from the stator to the linear motor movable element is prevented from acting on the moving table by elastically deforming and absorbing it.

The mover mounting member has a certain rigidity with respect to the moving direction of the linear motor mover, and can be elastically deformed by an amount that absorbs the suction force with respect to the action direction of the suction force. It is configured.
The mover mounting member is interposed between the linear motor mover and the moving table and between the moving table and the slider, and the linear motor mover is interposed between the mover mounting member and the slider. A gap adjusting spacer for adjusting a gap between the linear motor stator and the linear motor stator is interposed.

  According to the linear motor type table device of the present invention, it is possible to reduce the size and space by suppressing the height dimension, and the moving table is not affected by the magnetic attraction force generated by the linear motor mechanism. , Can always keep high plane accuracy.

  Hereinafter, a linear motor table device according to an embodiment of the present invention will be described with reference to the accompanying drawings. The basic configuration of the linear motor type table device according to the present embodiment is the same as that of the conventional linear motor type table device B (FIGS. 2A and 2B) described above. The same or similar components are denoted by the same reference numerals in the drawings, and the description thereof is omitted or simplified.

  1 (a) and 1 (b) show a linear motor table device (hereinafter simply referred to as a table device A) according to the present embodiment. The table device A includes a base 2, a linear motion guide device 4 provided on the base 2, a movable table 6 that can be reciprocated while being guided by the linear motion guide device 4, and the movable table 6. And a linear motor mechanism 8 for stopping the motor at a predetermined position. Further, the linear guide device 4 is provided with a guide rail 40 extending in a predetermined direction and a slider 42 to which the moving table 6 is fixed and reciprocates along the guide rail 40.

  In the configuration shown in FIGS. 1A and 1B, the table apparatus A has two guide rails 40 as a linear motion guide apparatus 4 linearly in a predetermined direction (left and right direction in FIG. 1B). It extends and is arranged in parallel on the guide rail arrangement surface 2 a of the base 2, and the guide rail 40 has two sliders 42 that can reciprocate along each guide rail 40. Four are provided. In this case, in the table apparatus A, as an example, one moving table 6 is fixed to the two sliders 42 of each guide rail 40 and straddles the two guide rails 40 via the slider 42. Is provided.

  The number of guide rails 40 arranged as the linear motion guide device 4 is not particularly limited, and may be, for example, only one, or may be three or more. Further, the number of sliders 42 provided on each guide rail 40 is not particularly limited, and may be, for example, only one, or three or more. Further, when a plurality of guide rails 40 are provided, the number of sliders 42 provided on each guide rail 40 may not be the same for all the guide rails 40. The number of moving tables 6 fixed to the sliders 42 is not particularly limited. For example, the number of moving tables 6 may be two or more. In this case, the moving table 6 is fixed for each slider 42 and a plurality of moving tables 6 are fixed. The moving table 6 may be provided. When a plurality of sliders 42 are provided, the number of moving tables 6 fixed to each slider 42 may not be the same for all the sliders 42.

  Further, in the configuration shown in FIGS. 1A and 1B, as the linear motion guide device 4, a linear motion bearing including a plurality of rolling elements (balls) capable of rolling on the raceway groove is applied as an example. Yes. In such a linear motion bearing, a plurality of balls are provided on the guide rail 40 (for example, both side surfaces 40s and 40t) and the slider 42 (for example, the inner side surfaces facing the both side surfaces 40s and 40t of the guide rail 40 in the concave portion). A raceway groove (not shown) is circulated (FIG. 1A shows, for example, only the raceway grooves 44a and 44b on the guide rail 40 side) facing each other, and a plurality of balls are circulated in the slider 42. A rolling element passage (not shown) is formed. The rolling element passages extend in parallel with the raceway grooves and penetrate at both ends of the slider 42 (both ends in the moving direction of the slider 42). The slider 42 includes end caps (not shown) fixed to both ends thereof, and each end cap has a circulation path (not shown) that allows the raceway groove and the rolling element passage to communicate with each other. Is provided.

  In this case, when the slider 42 is moved along the guide rail 40, the ball (not shown) between the slider 42 and the raceway groove of the guide rail 40 rolls in the direction opposite to the moving direction of the slider 42 and then ends. It is fed to the rolling element passages via the cap circulation path. Then, after traveling in the moving direction of the slider 42 through the rolling element passage, it is fed again between the raceway grooves via the circulation path of the end cap and rolls there. As the balls circulate in this manner, the slider 42 can move smoothly along the guide rail 40.

The rolling element may be a roller instead of a ball as long as the slider 42 can be smoothly moved along the guide rail 40.
Further, the linear motion guide device 4 may be any mechanism that can reciprocate the slider 42 along the guide rail 40, and the form thereof is not particularly limited. For example, as a type of the linear motion guide device 4, a cam follower, a roller follower, and a slide bearing in addition to a linear motion bearing provided with a plurality of rolling elements (balls and rollers) capable of rolling the raceway groove (opposing surface) described above. A hydrostatic bearing such as an air bearing can be arbitrarily selected and applied.

  In any type of linear motion guide device 4, the linear motion guide device 4 is configured to have very high rigidity, for example, by forming a predetermined high-rigidity material as a material. ing. In particular, in the linear motion guide device 4 according to the present embodiment, the slider 42 and the guide rail 40 are formed by using a predetermined high-rigidity material as an example, and are vertically arranged (up and down in FIGS. 1A and 1B). (Direction), it has a very high rigidity.

  In the table apparatus A, the linear motor mechanism 8 includes a linear motor stator 80 and a linear motor movable element 82, and the linear motor stator 80 is disposed in parallel to the base 2. Further, between the two guide rails 42, an appropriate number of fastening members (screws) 14 are fastened and fixed on the stator mounting portion 2b, fixed on the yoke 8Y made of a magnetic material, and the yoke 8Y. And a plurality of permanent magnets 8 </ b> M extending at predetermined intervals along the extending direction of the guide rail 42.

  In this case, the plurality of permanent magnets 8M are arranged so that the magnetic pole surfaces (stator magnetic pole surfaces 80a of the linear motor stator 80) are alternately N poles or S poles. A plurality of armature coils (not shown) are provided on a surface (a lower surface in FIGS. 1A and 1B) 82a facing the magnetic pole surface of the permanent magnet 8M (the stator magnetic pole surface 80a of the linear motor stator 80). ) Is attached. As the armature coil, for example, a cored type in which a coil is wound around a core such as an iron core and a type without a core that does not have such a core can be applied. As an example, in this embodiment, the case where the type with a core is applied as an armature coil is assumed.

In the configuration shown in FIGS. 1A and 1B, the linear motor stator 80 has the magnetic poles of the surfaces of the permanent magnets 8M facing the linear motor movable element 82 (stator magnetic pole surface 80a of the linear motor stator 80). The yoke 8Y is fastened to the stator mounting portion 2b by fastening members (screws) 14 so as to be alternately N poles or S poles, thereby being fixed to the base 2.
Note that the size (width (distance in the left-right direction in FIG. 1A)), length (distance in the left-right direction in FIG. 1 (b)), and depth (in FIG. 1 (a)) of the stator mounting portion 2b. The distance in the vertical direction)), shape, position, and the like are not particularly limited here, for example, because they are arbitrarily set according to the size of the base 2 and the like.

  For example, in the configuration shown in FIGS. 1 (a) and 1 (b), the stator mounting portion 2b is, for example, the longitudinal direction of the both ends of the base 2 (the left end portion and the right end portion in FIG. 1 (a)). A rectangular parallelepiped concave is formed between two guide rail arrangement surfaces 2a provided along the horizontal direction 1 (b). In this case, the stator mounting portion 2b is slightly smaller than the distance between the two guide rails 40 arranged in parallel (the distance in the left-right direction in FIG. 1 (a)), and its length is It forms the same size as the distance in the longitudinal direction of the base 2 (the distance in the left-right direction in FIG. 1B), and its depth is the height of the linear motor stator 80 (the vertical direction in FIG. 1A). ) And a predetermined size slightly larger than the distance. Thereby, the stator attachment part 2b can accommodate the linear motor stator 80 in the inside along the extension direction of the guide rail 42, and the extension length.

  Here, the method of fixing the linear motor stator 80 to the stator mounting portion 2b is not particularly limited to fastening and fixing as shown in FIGS. 1 (a) and 1 (b). For example, the linear motor stator 80 is bonded by welding or welding. It may be fixed. Moreover, you may fix the linear motor stator 80 with respect to the stator attachment part 2b combining several fixing methods, such as fastening fixation and joining fixation.

  Further, the table device A is provided with a mover mounting member 20 that is interposed between the linear motor mover 82 and the moving table 6 and fixes the linear motor mover 82 and the moving table 6. Yes. In the configuration shown in FIGS. 1A and 1B, the linear motor movable element 82 is fixed to the movable element mounting member 20, and the fixed portion is spaced from the movable table 6 by a predetermined interval. The movable table 6 is fixed to the movable table 6 via the movable element mounting member 20 so as to be in a non-contact state. On the other hand, the linear motor mover 82 is fixed to the moving table 6 via the mover mounting member 20 so as to be opposed to the linear motor stator 80 at a predetermined interval.

  In this case, the magnetic repulsive force from the linear motor stator 80 (specifically, the stator magnetic pole surface 80a) to the linear motor movable element 82 (specifically, the armature coil with a core (not shown)) The moving table 6 is reciprocated by applying a magnetic attraction force alternately and applying a propulsive force to the linear motor movable element 82. At this time, the mover mounting member 20 is at least opposed to the linear motor mover 82 from the linear motor stator 80, specifically, from the stator magnetic pole surface 80 a of the linear motor stator 80. The suction force acting perpendicularly to the surface 82a is prevented from acting on the moving table 6 by elastically deforming and absorbing it.

  The mover mounting member 20 is composed of a plate-like body having a relatively small dimension in the thickness direction, so that the moving direction of the linear motor mover 82 (the left-right direction in FIG. 1B) is reduced. Among the magnetic attraction forces described above that operate in the vertical direction (vertical direction in FIGS. 1 (a) and 1 (b)) while having high rigidity without being easily elastically deformed, It is configured such that it can be easily elastically deformed by a predetermined amount that absorbs the magnetic attractive force. In this case, for example, it is more preferable that the mover mounting member 20 is made of a predetermined material that has high rigidity in the moving direction and can be easily elastically deformed in the vertical direction.

  In the configuration shown in FIGS. 1A and 1B, the mover mounting member 20 has, as an example, the width (the distance in the left-right direction in FIG. 1A) is the width of the movable table 6 (the same direction in the figure). The length (the distance in the left-right direction in FIG. 1B) is slightly smaller than the length of the moving table 6 (the distance in the same direction in FIG. 1). Has been. Further, the mover mounting member 20 is provided with a convex portion 20a in which a portion facing the mover mounting portion 6b is projected to the moving table 6 side.

In this case, the convex portion 20a has a size (width (distance in the left-right direction in FIG. 1 (a)), length (distance in the left-right direction in FIG. 1 (b)), It is formed in a rectangular parallelepiped shape slightly smaller than the depth (the distance in the vertical direction in FIG. 1A) and protrudes toward the moving table 6 side.
Thereby, the mover mounting member 20 can cover substantially the entire bottom surface 6a of the movable table 6 in a state of being in contact with the contour thereof, and can cover substantially the entire movable member mounting portion 6b along the contour. And can be covered in a non-contact state with a predetermined interval S therebetween.

  In addition, the magnitude | size and shape of the needle | mover mounting member 20, and the magnitude | size and shape of the convex-shaped part 20a are not specifically limited to the structure shown to Fig.1 (a), (b), For example, the moving table 6 What is necessary is just to set arbitrarily according to a magnitude | size, the shape of the linear motor mover 82, etc. FIG. For example, the mover mounting member 20 may be formed in a series of flat surfaces from which the convex portions 20a are omitted. Further, for example, the convex portion 20a may be formed in a trapezoidal shape, a spherical shape, a wave shape, or the like. Furthermore, for example, the mover mounting member 20 may have a divided configuration. In this case, as an example, the mover mounting member 20 has a predetermined position (for example, a substantially intermediate portion) in the width direction (left-right direction in FIG. 1A) and the length direction (left-right direction in FIG. 1B). Thus, it can be configured to be divided (for example, divided into two or four).

In this case, the moving table 6 has a fastening member that penetrates from the workpiece mounting surface (upper surface in FIGS. 1A and 1B) 6w to the movable element mounting portion 6b and fastens and fixes the linear motor movable element 82. Ten (10) mounting holes 6c for accommodating the head of the (screw) 10 are provided. Therefore, the attachment hole 6c does not necessarily have to be penetrated to the workpiece attachment surface 6w. However, when the penetration hole 6c is penetrated, it can be effectively used for maintenance. Further, the fastening member (screw) 10 is screwed into the linear motor movable element 82 on the surface 82b (the upper surface in FIGS. 1A and 1B) facing the movable element mounting portion 6b of the moving table 6. Fastening holes 82c in which a spiral groove (for example, a female screw portion) is formed in the inner peripheral portion are provided at predetermined positions that can communicate with the mounting holes 6c of the moving table 6.
Further, the movable member mounting member 20 penetrates from the surface to the bottom surface of the convex portion 20a (from the upper surface to the lower surface in FIGS. 1A and 1B), and the fastening member (screw). The through holes 20c for passing the ten shaft portions are provided at predetermined positions that can communicate with the mounting holes 6c of the moving table 6 and the fastening holes 82c of the linear motor movable element 82, respectively. Therefore, the through hole 20 c is configured such that the inner diameter is smaller than the outer diameter of the head of the fastening member (screw) 10 and larger than the outer diameter of the shaft portion of the fastening member (screw) 10. Yes.

  When the linear motor movable element 82 is fixed to the movable element attaching member 20, first, the movable element attaching member 20 and the linear motor movable element 82 are positioned so that the through hole 20c and the fastening hole 82c communicate with each other. . Next, the fastening member (screw) 10 is inserted through the through hole 20c and screwed into a spiral groove (for example, a female screw portion) of the fastening hole 82c. Then, the fastening member (screw) until the head of the fastening member (screw) 10 contacts the surface of the convex portion 20a of the mover mounting member 20 (the upper surface in FIGS. 1A and 1B). 10 is screwed into a spiral groove (for example, a female screw portion) of the fastening hole 82c. Thereby, the linear motor movable element 82 can be fixed to the convex portion 20 a of the movable element attaching member 20.

  As a result, the linear motor movable element 82 is in a non-contact state with a predetermined interval S between the fixed portion (convex portion 20a) with the movable element mounting member 20 and the moving table 6. It can be fixed to the moving table 6 via the mover mounting member 20.

  Here, the method of fixing the linear motor movable element 82 and the movable element attachment member 20 is not particularly limited to the fastening and fixing as shown in FIGS. 1A and 1B. For example, these may be bonded or welded. It may be bonded and fixed. Further, the linear motor movable element 82 and the movable element attaching member 20 may be fixed by combining a plurality of fixing methods such as fastening and joining.

  Further, in the configuration shown in FIGS. 1A and 1B, the moving table 6 is inserted with a fastening member (screw) 12 that penetrates from the work mounting surface 6w to the bottom surface 6a and is fastened and fixed to the slider 42. A mounting hole 6d is provided. Further, the slider 42 has a spiral groove (for example, a female screw portion) for screwing the fastening member (screw) 12 on the upper surface (the upper surface in FIGS. 1A and 1B) 42a. Fastening holes 42 d formed in the inner periphery are provided at predetermined positions where the fastening holes 42 d can communicate with the mounting holes 6 d of the moving table 6.

  Further, the mover mounting member 20 passes through from the front surface to the bottom surface (from the upper surface to the lower surface in FIGS. 1A and 1B) and passes the fastening member (screw) 12. The through holes 20d are provided at predetermined positions where they can communicate with the mounting holes 6d of the moving table 6 and the fastening holes 42d of the slider 42, respectively.

  When the movable table 6 is fixed to the slider 42, first, the movable table 6 and the linear motor movable element 82 are fixed so that the mounting hole 6d, the through hole 20d, and the fastening hole 42d communicate with each other. The child attachment member 20 and the slider 42 are positioned. Next, the fastening member (screw) 12 is inserted from the mounting hole 6d, passed through the through hole 20d, and screwed into a spiral groove (for example, a female screw portion) of the fastening hole 42d. Then, until the head of the fastening member (screw) 12 comes into contact with the bottom of the mounting hole 6d of the movable table 6, the fastening member (screw) 12 is screwed into the spiral groove (for example, female screw portion) of the fastening hole 42d. Let

  Thereby, the mover mounting member 20 can be fixed to the moving table 6 and the slider 42 while being interposed between the moving table 6 and the slider 42. In another way, the moving table 6 can be fixed to the slider 42 via the mover mounting member 20 to which the linear motor mover 82 is fixed.

  As a result, the linear motor movable element 82 is moved so that the fixed portion (convex portion 20 a) between the linear motor movable element 82 and the movable element mounting member 20 is in a non-contact state with a predetermined distance S between the movable table 6 and the movable table 6. It can be fixed to the moving table 6 via the child mounting member 20. Further, the movable table 6 and the linear motor movable element 82 can be smoothly reciprocated along the guide rail 40 via the slider 42.

  Here, the method of fixing the moving table 6 and the slider 42 via the mover mounting member 20 is not particularly limited to the fastening and fixing as shown in FIGS. 1 (a) and 1 (b). They may be joined and fixed by welding or the like. Further, the moving table 6 and the slider 42 may be fixed by combining a plurality of fixing methods such as fastening and joining.

  When the moving table 6 and the slider 42 are fixed via the mover mounting member 20, both the moving table 6 and the slider 42 may be fixed in a state where both of the moving table 6 and the slider 42 are in contact with the mover mounting member 20. However, in this embodiment, the gap adjusting spacer 22 is interposed between the slider 42 and the mover mounting member 20 as in the configuration shown in FIGS.

  The gap adjusting spacer 22 is interposed between the slider 42 and the mover mounting member 20 and adjusts the dimensional tolerance of the mover mounting member 20 itself, so that the linear motor mover 82 and the linear motor stator 80 are adjusted. The gap between them is adjusted. That is, by interposing the gap adjusting spacer 22 between the slider 42 and the mover mounting member 20, for example, even when a predetermined dimensional error occurs in the processing accuracy of the mover mounting member 20, The dimensional error can be adjusted by the gap adjusting spacer 20, and the gap (interval) between the linear motor movable element 82 and the linear motor stator 80 can be stopped within an appropriate range.

  In the configuration shown in FIGS. 1A and 1B, the gap adjusting spacer 22 has, as an example, the width (the distance in the left-right direction in FIG. 1A) is the width of the slider 42 (in the same direction in FIG. 1A). Slightly longer than (distance), and its length (distance in the left-right direction in FIG. 1 (b)) forms a plate having the same size as the length of slider 42 (distance in the same direction in FIG. 1). It is configured.

  In this case, the gap adjusting spacer 22 penetrates from the surface to the bottom surface (from the upper surface to the lower surface in FIGS. 1A and 1B), and the movable table 6 is moved with respect to the slider 42. The through holes 22d through which the fastening members (screws) 12 to be fastened are passed are communicated with the mounting holes 6d of the moving table 6, the through holes 20d of the mover mounting member 20, and the fastening holes 42d of the slider 42, respectively. What is necessary is just to provide in the predetermined position where possible.

  Further, the size and shape of the gap adjusting spacer 22 are not particularly limited here because they are arbitrarily set according to, for example, the size of the slider 42 and the shape of the mover mounting member 20. For example, the gap adjusting spacer 22 may have a size (length) that can be installed on two sliders 42 arranged in the front and rear in the moving direction. Note that the height of the gap adjusting spacer 22 (the vertical distance in FIGS. 1A and 1B) is, for example, in accordance with the processing accuracy of the mover mounting member 20 and the linear motor mover 82 and the linear motor. What is necessary is just to set to the predetermined | prescribed magnitude | size which can stop the gap (interval) between the stators 80 in an appropriate range. Further, the same number of gap adjusting spacers 22 may be provided for each slider 42 provided on the guide rail 40.

  Further, an adjustment spacer (not shown) for adjusting only the height position of the work mounting surface 6 w of the moving table 6 may be interposed between the moving table 6 and the mover mounting member 20. Further, the gap adjusting spacer 22 may be interposed between the slider 42 and the mover mounting member 20, and the adjusting spacer may be interposed between the moving table 6 and the mover mounting member 20.

Further, in the present embodiment, the movable table 6 penetrates from the workpiece mounting surface 6w to the bottom surface 6a, and a protruding member (for example, for avoiding contact between the linear motor movable element 82 and the linear motor stator 80). A through hole 6e for attaching a rice screw (not shown) is provided at a predetermined position that can face each slider 42.
Further, the movable member mounting member 20 and the gap adjusting spacer 22 penetrate from the surface to the bottom surface (from the upper surface to the lower surface in FIGS. 1A and 1B), and the projecting member Through holes 20e, 22e are provided at predetermined positions where the through holes 6e of the movable table 6 can communicate with each other.

Such a protruding member (not shown) is used to fix the linear motor movable element 82 and the linear motor when the movable table 6 with the linear motor movable element 82 fixed thereto via the movable element attaching member 20 is fixed to the slider 42. This prevents the child 80 from coming into contact with and being damaged.
In the present embodiment, it is assumed as an example that a potato screw (four as an example) is applied as the protruding member (not shown), and the through hole 20e and the gap adjusting spacer of the mover mounting member 20 are assumed. At least one of the 22 through-holes 22e is formed with a spiral groove (for example, a female screw portion) for screwing the screw into the inner peripheral portion thereof.

  According to such a configuration, when the movable table 6 is fixed to the slider 42, the gap adjustment spacer 22 and the mover mounting member 20 are in close contact with each other than the lower surface of the gap adjustment spacer 22. The worm screw is previously screwed into the mover mounting member 20 or the gap adjusting spacer 22 so that the tip of the potato screw protrudes by a predetermined length. Then, the mover mounting member 20 to which the linear motor mover 82 is fixed is temporarily fastened to the moving table 6 with a fastening member (screw) 12 and the mover mounting member 20 is interposed between the moving table 6 and the moving table 6. The linear motor movable element 82 is integrated. In this state, the distance between the upper surface 42a of the slider 42 and the mover mounting member 20 is a larger distance than when the assembly is completed.

  Next, in the state in which the moving table 6, the mover mounting member 20 and the linear motor mover 82 are integrated, the potato screw (not shown) is gradually rotated to reduce the protruding length of the mover mounting member 20. The lower surface is brought closer to the upper surface 42a of the slider. At this time, it is preferable to evenly tighten the protruding lengths of the four potato screws. In this case, the initial protrusion length is such that the linear motor movable element 82 and the linear motor stator 80 are spaced apart from each other with the tip of the worm screw (not shown) in contact with the slider 42. It is set to a predetermined size that does not come into contact.

In the operation of fixing the moving table 6 to the slider 42, as described above, the direction in which the front end of the worm screw is in contact with the slider 42 is opposite to the direction in which the moving table 6 is fixed to the slider 42 (see FIG. 1 (a), (b) upward) while the fastening member (screw) 12 is gradually screwed into a spiral groove (for example, a female screw portion) of the fastening hole 42d of the slider 42. Go.
Then, in the state where the screw is moved in the above-described direction (the upward direction in FIGS. 1A and 1B) until it does not protrude from the through hole 22e of the gap adjusting spacer 22, the fastening member (screw ) The fastening member (screw) 12 is screwed into the spiral groove (for example, female screw portion) of the through hole 20d and the fastening hole 42d until the head of 12 comes into contact with the bottom of the mounting hole 6d of the moving table 6. Thereby, the moving table 6 can be fastened and fixed to the slider 42.

  After the movable table 6 and the slider 42 are fixed, the worm screw (not shown) is left in the through holes 6e, 20e, 22e as it is (not protruding from the through holes 6e, 22e). Alternatively, it may be completely removed from the through holes 6e, 20e, 22e.

In this way, in the fixing work of the moving table 6 to the slider 42, by using a protruding member (for example, a potato screw (not shown)), for example, during the fixing work, the linear motor movable element 82 and the linear motor fixing are fixed. The child 80 can be reliably prevented from being damaged by being attracted and brought into contact with the magnetic attraction force generated between them.
Further, for example, the degree of dimensional errors of the linear motor movable element 82, the linear motor stator 80, the movable element mounting member 20, and the like can be easily confirmed while being assembled to the table apparatus A, and the height of the gap adjusting spacer 22 can be increased. The vertical distance in FIGS. 1A and 1B can be easily set to a predetermined value.

As described above, in this embodiment, the mover mounting member 20 has the mover mounting portion of the moving table 6 in a state where the linear motor mover 82 is fixed and fixed to the moving table 6 and the slider 42. The protruding amount of the convex portion 20a toward the moving table 6 is set to a predetermined size so as to be in a non-contact state with a predetermined distance S from 6b.
In this case, the size (width (distance in the left-right direction in FIG. 1A)), length (distance in the left-right direction in FIG. 1 (b)), and depth (FIG. 1) of the mover mounting portion 6b of the moving table 6 1 (a) in the vertical direction)), shape, position, and the like are arbitrarily set according to the size of the moving table 6 and the linear motor movable element 82, and are not particularly limited here.

For example, in the configuration shown in FIGS. 1A and 1B, the mover mounting portion 6b is surrounded by four sliders 42 on the bottom surface (lower surface in the figure) 6a of the moving table 6 as an example. A rectangular parallelepiped concave is formed on the portion. In this case, the width of the mover mounting portion 6b is larger than the width of the linear motor mover 82 (distance in the left-right direction in FIG. 1A), and the length is the length of the moving table 6 (FIG. 1 ( It is formed to have the same size as the distance b) in the left-right direction.
The depth of the mover mounting portion 6 b is set so that the linear motor stator is fixed to the four sliders 42 when the moving table 6 to which the linear motor mover 82 is fixed is fixed via the mover mounting member 20. An armature coil (not shown) with a core attached to a surface 82a (a lower surface in FIGS. 1A and 1B) 82a of the stator magnetic pole surface 80a is fixed to the linear motor stator 80. It is set to a predetermined size that is positioned facing the child magnetic pole surface 80a with a predetermined interval.

  As described above, the linear motor mover 82 is fixed to the moving table 6 via the mover mounting member 20, so that the armature coil (not shown) with a core of the linear motor mover 82 and the linear motor stator are fixed. Even when a magnetic attraction force acting perpendicularly to the linear motor movable element 82 is generated between the stator magnetic pole face 80a of 80 and the movable element mounting member 20 is elastically deformed, The suction force can be absorbed.

More specifically, in the present embodiment, the linear motor movable element 82 projects from the movable element mounting member 20 in a non-contact state with a predetermined distance S between the linear motor movable element 82 and the movable element mounting part 6b of the moving table 6. It is fixed to the moving table 6 through the movable element mounting member 20 and is mounted on the movable portion 20a so as to face the linear motor stator 80 in the vertical direction (the vertical direction in FIGS. 1A and 1B). Yes.
Therefore, when a magnetic attractive force is generated between the linear motor movable element 82 and the linear motor stator 80, the attractive force is generated by the convex portion 20a of the movable element attaching member 20 to which the linear motor movable element 82 is attached. On the other hand, it acts as a downward force in the direction of the linear motor stator 80 (the downward direction in FIGS. 1A and 1B), that is, in the vertical direction.

As described above, since the convex portion 20a to which the linear motor movable element 82 is attached is in a non-contact state with the movable element attaching portion 6b of the moving table 6, the movable element attaching member 20 has such a suction force. When acting, the convex portion 20a is elastically deformed and bent downward by a predetermined amount in the vertical direction.
In this case, the suction force is absorbed by the elastic deformation of the convex portion 20a of the mover mounting member 20, and before the convex portion 20a is bent downward in the vertical direction. In order to return to the original state, the suction force is canceled by an elastic force that acts in the same direction in the opposite direction (upward in the vertical direction).

  Thus, the mover mounting member 20 can absorb and cancel the suction force by elastically deforming the convex portion 20a, specifically, by bending downward in the vertical direction. As a result, the suction force does not act on the moving table 6. For example, the movable member mounting portion 6b of the moving table 6 and the vicinity thereof are in the direction of the linear motor stator 80 (FIGS. 1A and 1B). ) Downward), that is, it does not deform by bending downward in the vertical direction.

  In the present embodiment, since the gap adjusting spacer 20 is interposed between the slider 42 and the mover mounting member 20, for example, the dimensional error of the mover mounting member 20 itself can be easily adjusted. Thus, the gap (interval) between the linear motor movable element 82 and the linear motor stator 80 can be easily adjusted. That is, by interposing the gap adjusting spacer 20 between the slider 42 and the mover mounting member 20, for example, even when a predetermined dimensional error occurs in the processing accuracy of the mover mounting member 20, The dimensional error can be adjusted by the gap adjusting spacer 20, and the gap (interval) between the linear motor movable element 82 and the linear motor stator 80 can be stopped within an appropriate range.

  In the state where the convex portion 20a of the mover mounting member 20 is elastically deformed by the suction force and is bent downward by a predetermined amount in the vertical direction, the suction force is further applied to the slider 42. It also acts as a force (pressing force) for pressing the guide rail 40 downward in the vertical direction. However, the slider 42 and the guide rail 40 are configured to have a very high rigidity in the vertical direction (the vertical direction in FIGS. 1A and 1B). Can be loaded.

  As described above, according to the linear motor type table apparatus A according to the present embodiment, the linear motor movable element 82 can be obtained simply by interposing the movable element mounting member 20 between the moving table 6 and the linear motor movable element 82. And the linear motor stator 80 are arranged so as to face each other in the vertical direction (the vertical direction in FIGS. 1A and 1B), the magnetic attractive force generated between them is deformed with respect to the moving table 6. Adverse effects such as giving As a result, the height dimension of the apparatus (the vertical distance in FIGS. 1A and 1B) can be suppressed, and the apparatus can be reduced in size and space.

  In addition, according to the present embodiment, the planar accuracy of the work mounting surface 6w of the moving table 6 does not deteriorate due to the influence of the suction force. For example, after assembling the moving table 6 to the table device A (slider After fixing to 42), it is not necessary to grind the workpiece mounting surface 6w and readjust its plane accuracy. As a result, it is possible to suppress the generation of costs due to the additional work after the assembly of the table apparatus A, and it is possible to manufacture the table apparatus A at a low cost. As a result, the table apparatus A is used for manufacturing and inspection. Various products can be manufactured at low cost.

  Furthermore, according to this embodiment, the surface area of the table apparatus A can be enlarged by a size corresponding to the surface area of the mover mounting member 20, and the heat dissipation effect when the temperature of the table apparatus A rises can be achieved. Can be improved.

  In the table apparatus A according to the above-described embodiment, in order to apply a propulsive force to the linear motor movable element 82, the vertical direction (see FIG. In addition to the downward magnetic attraction force of 1 (a) and (b) in the vertical direction, an upward magnetic repulsive force in the vertical direction (up and down direction in FIGS. 1A and 1B) also acts.

  Even in this case, like the linear motor type table apparatus A according to the present embodiment, the above-described suction force can be obtained only by interposing the mover mounting member 20 between the moving table 6 and the linear motor mover 82. Similarly to the case, the repulsive force can be absorbed and canceled by elastically deforming the convex portion 20a of the mover mounting member 20. As a result, for example, adverse effects such as the repulsive force deforming the moving table 6 can be similarly eliminated.

  In this case, the weight of the moving table 6 itself and the weights of various interfaces added to the work mounting surface 6w of the moving table 6 are in the vertical direction (vertical direction in FIGS. 1A and 1B). Since it acts downward, for example, the repulsive force acts so much as to deform the moving table 6 as compared with the above-described suction force.

It is a figure which shows the structural example of the linear motor type | mold table apparatus which concerns on one Embodiment of this invention, Comprising: (a) is a front view, (b) is a side view. It is a figure which shows the structural example of the conventional linear motor type | mold table apparatus, Comprising: (a) is a front view, (b) is a side view.

Explanation of symbols

2 base 4 linear motion guide device 6 moving table 8 linear motor mechanism 20 mover mounting member 40 guide rail 42 slider 80 linear motor stator 82 linear motor mover A linear motor type table device

Claims (3)

A base, a linear motion guide device provided on the base, a moving table guided by the linear motion guide device and reciprocally movable, and a linear for reciprocating and stopping the movable table at a predetermined position The linear motion guide device is provided with a guide rail extending in a predetermined direction and a slider on which the moving table is fixed and reciprocating along the guide rail. Comprises a linear motor stator extending along the guide rail to the base, and a linear motor movable element arranged to face the linear motor stator at a predetermined interval. Is a linear motor table device that reciprocally moves the moving table by applying a repulsive force and a suction force to the linear motor movable element alternately to give a propulsive force. ,
A mover mounting member is interposed between the linear motor mover and the moving table. The linear motor mover is fixed to the mover mounting member, and the fixed portion is between the moving table and the moving table. The movable member mounting member is fixed to the moving table via the movable member mounting member so as to be in a non-contact state at a predetermined interval, and the movable member mounting member is at least from the linear motor stator to the linear motor movable member. A linear motor type table device characterized in that the suction force acting on the moving table is prevented from acting on the moving table by elastic deformation and absorption.   The mover mounting member has a certain rigidity with respect to the moving direction of the linear motor mover, and is configured to be elastically deformable by an amount that absorbs the suction force with respect to the acting direction of the suction force. The linear motor type table device according to claim 1, wherein the linear motor type table device is provided. The mover mounting member is interposed between the linear motor mover and the moving table and between the moving table and the slider, and between the mover mounting member and the slider, the linear motor mover and the linear table are arranged. The linear motor type table apparatus according to claim 1, wherein a gap adjusting spacer for adjusting a gap between the motor stator and the motor stator is interposed.

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