TW201532294A - Thin-film solar panel structure for thermal damage prevention - Google Patents

Thin-film solar panel structure for thermal damage prevention Download PDF

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TW201532294A
TW201532294A TW103104630A TW103104630A TW201532294A TW 201532294 A TW201532294 A TW 201532294A TW 103104630 A TW103104630 A TW 103104630A TW 103104630 A TW103104630 A TW 103104630A TW 201532294 A TW201532294 A TW 201532294A
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opening pattern
solar panel
thermal damage
film solar
thin film
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TW103104630A
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TWI464894B (en
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Chih-Jen Mao
Jia-Shian Lin
Sheng-Jui Lee
Chi-Shan Huang
Chih-Wei Chang
Bo-Yu Lai
Chien-Nan Tu
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Nexpower Technology Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Abstract

A thin-film solar panel structure for the prevention of thermal damage comprises a transparent substrate, a front electrode layer, a light absorption layer and a back electrode layer. The first opening pattern on the front electrode is continuously extended as a first partition line. The light absorption layer and the opening pattern of the back electrode form a first groove jointly. The front electrode layer, the light absorption layer and the back electrode layer further form a plurality of second grooves. The extension or corrugated progression direction of the second groove is perpendicular to the first groove. The density of the second grooves for preventing the thermal damage on the thin-film solar panel structure is 50~250 strips/m2, which occupies 0.5~12.5% of the area of the thin-film solar panel structure capable of thermal damage prevention. By increasing the density of second grooves and further dividing the solar panel into several blocks to prevent heat concentration and thus reduce the thermal damage area, the present invention may enhance the production yield and service life for the thin-film solar panel.

Description

用於防治熱損傷之薄膜太陽能板結構 Thin film solar panel structure for preventing thermal damage

本發明係涉及一種用於防治熱損傷之薄膜太陽能板結構,尤其具有高密度的開槽,來防治因為電流熱集中所造成的熱損傷。 The present invention relates to a thin film solar panel structure for controlling thermal damage, particularly having a high density of grooves for preventing thermal damage caused by current heat concentration.

太陽能板,利用太陽光照轉換成電能,是目前面對地球資源逐漸匱乏時急需發展的綠色能源,目前綠建築上,各國政府也廣泛地補助以推動太陽能板的普遍性。傳統太陽能能板上,通常具有基板、前電極層、光電轉換層,以及背電極層,而由於目前強調節能,或是自主發電的綠建築,太陽能板都盡量裝設於屋頂、屋瓦、天井等區域,以吸收太陽能的光能來轉換成電能。但是,出現了以下的問題。 Solar panels, which use solar light to convert into electrical energy, are currently facing the urgent need for development when the earth's resources are scarce. At present, governments in various green buildings have also widely subsidized to promote the universality of solar panels. Conventional solar energy panels usually have a substrate, a front electrode layer, a photoelectric conversion layer, and a back electrode layer, and because of the current emphasis on energy saving, or green buildings that generate electricity by themselves, solar panels are installed on roofs, roof tiles, and patios. The area is converted to electrical energy by absorbing solar energy. However, the following problems have arisen.

首先發生的問題在於,太陽能板,多有不透明的矽晶、背電極層等材料,這都會照成光線的遮蔽,或是產生吸熱效應,反而導致室內必須開燈、冷氣,而無法達到綠建築節能的效果。進一步地,在製程測試,或是光電轉換層在進行光電轉換將電能轉換輸出時,容易因膜層缺陷而蓄積高熱,而背電極層又將光能持續反射到光電轉換層中,這容易產生高熱損傷,而導致部分的區域斷路或無效。因此,需要一種能夠解決上述問題的薄膜太陽能板結構。 The first problem is that solar panels, which have opaque crystals, back electrode layers and other materials, will be shielded by light or have an endothermic effect. Instead, the interior must be turned on and off, and green buildings cannot be reached. The effect of energy saving. Further, in the process test, or when the photoelectric conversion layer performs photoelectric conversion to convert and output electric energy, it is easy to accumulate high heat due to defects of the film layer, and the back electrode layer continuously reflects the light energy into the photoelectric conversion layer, which is easy to generate. High heat damage, resulting in partial disconnection or ineffectiveness. Therefore, there is a need for a thin film solar panel structure that can solve the above problems.

本發明的主要目的在於提供一種用於防治熱損傷之薄膜太陽能板結構,該用於防治熱損傷之薄膜太陽能板結構由一入光方向上依序包含透明基板、前電極層、光吸收層及背 電極層。前電極層形成在該透明基板上,在該前電極上形成有至少一第一開口圖案,及複數個第四開口圖案,該至少一第一開口圖案朝一第一方向上連續延伸,而形成至少一第一分隔線。光吸收層形成在該前電極層上且覆蓋該至少一第一分隔線,包含至少一第二開口圖案,以及複數個第五開口圖案,該至少一第二開口圖案平行於該至少一第一開口圖案,朝該第一方向連續延伸。背電極層形成在該光吸收層上,包含至少一第三開口圖案,以及複數個第六開口圖案,該至少一第三開口圖案朝該第一方向延伸,且該至少一第三開口圖案與該至少一第二開口圖案寬度相等且位置重疊,而共同在該第一方向上共同形成一至少一第一開槽。 The main object of the present invention is to provide a thin film solar panel structure for preventing thermal damage, wherein the thin film solar panel structure for preventing thermal damage sequentially comprises a transparent substrate, a front electrode layer, a light absorbing layer, and a light absorbing layer in a light incident direction. Back Electrode layer. The front electrode layer is formed on the transparent substrate, and the front electrode is formed with at least one first opening pattern and a plurality of fourth opening patterns, and the at least one first opening pattern continuously extends toward a first direction to form at least A first dividing line. The light absorbing layer is formed on the front electrode layer and covers the at least one first dividing line, and includes at least one second opening pattern, and a plurality of fifth opening patterns, the at least one second opening pattern being parallel to the at least one first An opening pattern extending continuously in the first direction. The back electrode layer is formed on the light absorbing layer, and includes at least one third opening pattern, and a plurality of sixth opening patterns, the at least one third opening pattern extending toward the first direction, and the at least one third opening pattern and The at least one second opening pattern has the same width and overlapping positions, and together forms a at least one first slot in the first direction.

該等第四開口圖案、該等第五開口圖案以及第六開口圖案位置重疊共同形成複數個第二開槽,該等第二開槽包含一直線、一週期性波浪狀曲線、一週期性的三角波線的至少其中之一,該直線的一延伸方向,以及該週期性波浪狀曲線及該週期性的三角波線的波形前進方向為與該第一方向正交的一第二方向,該等第二開槽的寬度為100~500μm,該等第二開槽在該用於防治熱損傷之薄膜太陽能板結構上的密度為50~250條/m2,佔該防治熱損傷之薄膜太陽能板結構面積的0.5~12.5%,藉由該至少一第一開槽、該等第二開槽將該光吸收層分成複數個區塊。 The fourth opening pattern, the fifth opening pattern and the sixth opening pattern are overlapped to form a plurality of second slots, wherein the second slots comprise a straight line, a periodic wave curve, and a periodic triangle. At least one of the wave lines, an extending direction of the straight line, and a waveform direction of the periodic wavy curve and the periodic triangular wave line are a second direction orthogonal to the first direction, the second The width of the slot is 100~500 μm , and the density of the second slot on the thin film solar panel structure for preventing thermal damage is 50-250 strips/m2, which accounts for the thermal damage of the thin film solar panel structure. 0.5 to 12.5% of the area, the light absorbing layer is divided into a plurality of blocks by the at least one first groove and the second grooves.

藉由提高第二開槽的密度,從而將太陽能板分割層成多個區塊,而避免因膜層缺陷而產生的熱集中,從而減少熱損傷區域面積,能提高薄膜太陽能板的製作良率及使用壽命。 By increasing the density of the second groove, the solar panel is divided into a plurality of blocks, thereby avoiding heat concentration due to film defects, thereby reducing the area of the heat damage region, and improving the production yield of the thin film solar panel. And service life.

1‧‧‧用於防治熱損傷之薄膜太陽能板結構 1‧‧‧Thin solar panel structure for thermal damage prevention

10‧‧‧第一分隔線 10‧‧‧ first dividing line

11‧‧‧透明基板 11‧‧‧Transparent substrate

12‧‧‧第二分隔線 12‧‧‧Second separation line

13‧‧‧前電極層 13‧‧‧ front electrode layer

15‧‧‧光吸收層 15‧‧‧Light absorbing layer

17‧‧‧背電極層 17‧‧‧Back electrode layer

20‧‧‧第一開槽 20‧‧‧First slotting

21‧‧‧第一開口圖案 21‧‧‧First opening pattern

23‧‧‧第二開口圖案 23‧‧‧Second opening pattern

25‧‧‧第三開口圖案 25‧‧‧ Third opening pattern

27‧‧‧第四開口圖案 27‧‧‧fourth opening pattern

30‧‧‧第二開槽 30‧‧‧Second slotting

31‧‧‧第五開口圖案 31‧‧‧ fifth opening pattern

33‧‧‧第六開口圖案 33‧‧‧ sixth opening pattern

35‧‧‧第七開口圖案 35‧‧‧ seventh opening pattern

A‧‧‧第一方向 A‧‧‧First direction

B‧‧‧第二方向 B‧‧‧second direction

第一圖為本發明用於防治熱損傷之薄膜太陽能板結構的上視示意圖。 The first figure is a top view of the structure of a thin film solar panel for preventing thermal damage according to the present invention.

第二圖為用於防治熱損傷之薄膜太陽能板結構的上視示意 圖在第一圖中A方向的側視圖。 The second figure shows the top view of the thin film solar panel structure used to prevent thermal damage. The figure is a side view in the A direction in the first figure.

第三A圖、第三B圖及三C圖,分別為本發明第二開槽的第一實施例、第二實施例、第三實施例的剖面示意圖。 3A, 3B, and 3C are respectively schematic cross-sectional views of the first embodiment, the second embodiment, and the third embodiment of the second slot of the present invention.

以下配合圖式及元件符號對本發明之實施方式做更詳細的說明,俾使熟習該項技藝者在研讀本說明書後能據以實施。 The embodiments of the present invention will be described in more detail below with reference to the drawings and the <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;

同時參閱第一圖及第二圖,本發明用於防治熱損傷之薄膜太陽能板結構的上視示意圖及本發明用於防治熱損傷之薄膜太陽能板結構的上視示意圖在第一圖中A方向的側視圖,如第一圖及第二圖所示,本發明的用於防治熱損傷之薄膜太陽能板結構1由光線進光方向依序為堆疊一透明基板11、一前電極層13、一光吸收層15,以及一背電極層17,該前電極層13形成在該透明基板11上,且包含有一第一開口圖案21,該第一開口圖案21朝第一方向A延伸,而形成一第一分隔線10。光吸收層15形成在該前電極層13上,覆蓋該第一分隔線10,且包含一第二開口圖案23以及一第三開口圖案25,該第二開口圖案23及第三開口圖案,平行於該第一開口圖案21,該第二開口圖案23在第一方向A上連續延伸而形成一第二分隔線12。該背電極層17形成在該光吸收層15上,覆蓋該第二分隔線12並包含一第四開口圖案27,該第四開口圖案27與該第三開口圖案25寬度相同且位置重疊,且在第一方向A上連續延伸,而共同在第一方向A上形成一第一開槽20。 Referring also to the first and second figures, the top view of the thin film solar panel structure for preventing thermal damage of the present invention and the top view of the thin film solar panel structure for preventing thermal damage of the present invention are shown in the first direction in the A direction. As shown in the first and second figures, the thin film solar panel structure 1 for preventing thermal damage of the present invention is sequentially stacked with a transparent substrate 11 and a front electrode layer 13 in the light entering direction. a light absorbing layer 15 and a back electrode layer 17 formed on the transparent substrate 11 and including a first opening pattern 21 extending toward the first direction A to form a The first dividing line 10. The light absorbing layer 15 is formed on the front electrode layer 13 and covers the first dividing line 10 and includes a second opening pattern 23 and a third opening pattern 25. The second opening pattern 23 and the third opening pattern are parallel. In the first opening pattern 21, the second opening pattern 23 continuously extends in the first direction A to form a second dividing line 12. The back electrode layer 17 is formed on the light absorbing layer 15 and covers the second dividing line 12 and includes a fourth opening pattern 27, the fourth opening pattern 27 having the same width and overlapping positions as the third opening pattern 25, and Extending continuously in the first direction A, a first slot 20 is formed in the first direction A.

參閱第三A圖至第三C圖,分別為本發明第二開槽的第一實施例、第二實施例、第三實施例的剖面示意圖。如第一圖、第三A圖至第三C圖所示,在該前電極層13、該光吸收層15及一背電極層17上還分別包含複數個第五開口圖案31、複數個第六開口圖案33及複數個第七開口圖案35,該等第五開口圖案31、該等第六開口圖案33及該等第七 開口圖案35位置重疊,而且連續延伸,而共同形成複數個第二開槽30。 Referring to the third to third C, respectively, a cross-sectional view of the first embodiment, the second embodiment, and the third embodiment of the second slot of the present invention is shown. As shown in the first figure, the third A to the third C, the front electrode layer 13, the light absorbing layer 15 and the back electrode layer 17 further comprise a plurality of fifth opening patterns 31 and a plurality of a sixth opening pattern 33 and a plurality of seventh opening patterns 35, the fifth opening patterns 31, the sixth opening patterns 33, and the seventh The opening patterns 35 are overlapped in position and continuously extended to form a plurality of second slots 30 together.

如第三A圖所示,該等第五開口圖案31、該等第六開口圖案33及該等第七開口圖案35的寬度相同;如第三B圖所示,該等第六開口圖案33及該等第七開口圖案35的寬度相同,而該等第五開口圖案31的寬度小於該等第六開口圖案33及該等第七開口圖案35的寬度;或者,如第三C圖所示,該等第六開口圖案33及該等第七開口圖案35的寬度相同,該等第五開口圖案31的寬度大於該等第六開口圖案33及該等第七開口圖案35的寬度,但由於但第七開口圖案41的側壁形成有光吸收層15,使得實際形成的下部開口圖案50的寬度與第五開口圖案31及第六開口圖案33相等。 As shown in FIG. 3A, the fifth opening patterns 31, the sixth opening patterns 33, and the seventh opening patterns 35 have the same width; as shown in the third B, the sixth opening patterns 33 And the widths of the seventh opening patterns 35 are the same, and the widths of the fifth opening patterns 31 are smaller than the widths of the sixth opening patterns 33 and the seventh opening patterns 35; or, as shown in the third C The widths of the sixth opening patterns 33 and the seventh opening patterns 35 are the same, and the widths of the fifth opening patterns 31 are larger than the widths of the sixth opening patterns 33 and the seventh opening patterns 35, but However, the side wall of the seventh opening pattern 41 is formed with the light absorbing layer 15 such that the actually formed lower opening pattern 50 has the same width as the fifth opening pattern 31 and the sixth opening pattern 33.

第二開槽30可以為直線、週期性的波浪狀曲線、週期性的三角波線等,直線的延伸方向,或是週期性的前進方向為與第一方向A正交的第二方向B,該等第二開槽30,藉由第一開槽20及第二開槽30,將太陽能板分為複數個區塊。第二開槽30若為週期性的波浪狀曲線或週期性的三角波線時,週期性波浪狀曲線或週期性的三角波線的振幅為10μm至10mm,週期為5μm至5mm,且波形相位可為相同、偏移或相反。該等第二開漕30之間不交錯,前進方向或延伸方向呈平行,該等第二開槽30的寬度為100~500μm,該等第二開槽30在該用於防治熱損傷之薄膜太陽能板結構上的密度為50~250條/m2,佔該防治熱損傷之薄膜太陽能板結構面積的0.5~12.5%。 The second slot 30 may be a straight line, a periodic wave curve, a periodic triangular wave line, or the like, the extending direction of the line, or the periodic advancing direction is a second direction B orthogonal to the first direction A, Waiting for the second slot 30, the solar panel is divided into a plurality of blocks by the first slot 20 and the second slot 30. If the second slot 30 is a periodic wavy curve or a periodic triangular wave line, the periodic wavy curve or the periodic triangular wave line has an amplitude of 10 μm to 10 mm and a period of 5 μm to 5 mm, and The waveform phases can be the same, offset or opposite. The second openings 30 are not staggered, and the advancing direction or the extending direction is parallel. The second slots 30 have a width of 100-500 μm. The second slots 30 are used for preventing thermal damage. The density of the thin film solar panel structure is 50 to 250 strips/m 2 , which accounts for 0.5 to 12.5% of the structural area of the thin film solar panel for preventing and controlling thermal damage.

透明基板11為無鹼玻璃、石英玻璃、壓克力等透明材料所製成。該前電極層13由,例如銦錫氧化物及鋁鋅氧化物的透明導電材料所製成,光吸收層15為單晶矽、多晶矽、無非晶矽、微晶矽、銅銦鎵硒薄膜、銅銦鎵硒硫薄膜的至少 其中之一。背電極層17為該透明導電材料及/或一金屬材料,例如鉬、銀、鎳,用以反射光線至光吸收層15中,以增加光電轉換效率。第二開槽30可以利用綠光雷射及紅外光雷射切割而形成。 The transparent substrate 11 is made of a transparent material such as alkali-free glass, quartz glass, or acryl. The front electrode layer 13 is made of a transparent conductive material such as indium tin oxide and aluminum zinc oxide. The light absorbing layer 15 is a single crystal germanium, a polycrystalline germanium, an amorphous germanium, a microcrystalline germanium, a copper indium gallium selenide film, At least a copper indium gallium selenide film one of them. The back electrode layer 17 is a transparent conductive material and/or a metal material such as molybdenum, silver, or nickel for reflecting light into the light absorbing layer 15 to increase photoelectric conversion efficiency. The second slot 30 can be formed by laser cutting with green light and infrared light.

[實驗示例][Experimental example]

本發明以以下實際的實驗示例,來說明第二開槽的密度與熱損傷的關係,其結果如表1所示。 The present invention will explain the relationship between the density of the second groove and the thermal damage in the following practical experimental examples, and the results are shown in Table 1.

由上述實現數據可以明顯地看出,提升第二開槽的密度,雖然會增加熱損傷區域量,但能有效減少最大熱損傷區域面積及前10大熱損傷區域面積比例,從而整體製程的良率能夠有效地提高,而避免熱損傷造成不良品的問題,並在後續的使用上,能有效提高薄膜太陽能板的使用壽命。 It can be clearly seen from the above implementation data that increasing the density of the second slot increases the amount of thermal damage, but can effectively reduce the area of the largest thermal damage area and the area ratio of the top 10 thermal damage areas, so that the overall process is good. The rate can be effectively improved, and the problem of defective products caused by thermal damage is avoided, and the service life of the thin film solar panel can be effectively improved in subsequent use.

本發明的特點主要在於,藉由提高第二開槽的密度,從而將太陽能板分割層成多個區塊,而避免熱集中,從而減少熱損傷區域面積,提高薄膜太陽能板的製作良率及使用壽命。 The invention is mainly characterized in that by increasing the density of the second slot, the solar panel is divided into a plurality of blocks to avoid heat concentration, thereby reducing the area of the heat damage area, improving the production yield of the thin film solar panel and Service life.

以上所述者僅為用以解釋本發明之較佳實施例,並非企圖據以對本發明做任何形式上之限制,是以,凡有在相同之 發明精神下所作有關本發明之任何修飾或變更,皆仍應包括在本發明意圖保護之範疇。 The above is only a preferred embodiment for explaining the present invention, and is not intended to impose any form limitation on the present invention, so that all are in the same Any modifications or variations of the present invention made in the spirit of the invention are still included in the scope of the invention.

1‧‧‧用於防治熱損傷之薄膜太陽能板結構 1‧‧‧Thin solar panel structure for thermal damage prevention

10‧‧‧第一分隔線 10‧‧‧ first dividing line

12‧‧‧第二分隔線 12‧‧‧Second separation line

20‧‧‧第一開槽 20‧‧‧First slotting

30‧‧‧第二開槽 30‧‧‧Second slotting

A‧‧‧第一方向 A‧‧‧First direction

B‧‧‧第二方向 B‧‧‧second direction

Claims (8)

一種用於防治熱損傷之薄膜太陽能板結構,由一入光方向上依序包含:一透明基板;一前電極層,形成在該透明基板上,在該前電極上形成有至少一第一開口圖案,及複數個第五開口圖案,該至少一第一開口圖案朝一第一方向上連續延伸,而形成至少一第一分隔線;一光吸收層,形成在該前電極層上且覆蓋該至少一第一分隔線,包含至少一第二開口圖案及至少一第三開口圖案,以及複數個第六開口圖案,該至少一第二開口圖案及該至少一第三開口圖案平行於該至少一第一開口圖案,該至少一第二開口圖案朝該第一方向連續延伸,而形成一第二分隔線;以及一背電極層,形成在該光吸收層上,包含至少一第四開口圖案,以及複數個第七開口圖案,該至少一第四開口圖案朝該第一方向延伸,且該至少一第四開口圖案與該至少一第三開口圖案寬度相等且位置重疊,而共同在該第一方向上共同形成一至少一第一開槽;其中該等第五開口圖案、該等第六開口圖案以及第七開口圖案位置重疊,而共同形成複數個第二開槽,該等第二開槽包含一直線、一週期性波浪狀曲線、一週期性的三角波線的至少其中之一,該直線的一延伸方向,以及該週期性波浪狀曲線及該週期性的三角波線的波形前進方向為與該第一方向正交的一第二方向,該等第二開槽的寬度為100~500μm,該等第二開槽在該用於防治熱損傷之薄膜太陽能板結構上的密度為50~250條/m2,佔該防治熱損傷之薄膜太陽能板結構面積的0.5~12.5%。 A thin film solar panel structure for preventing thermal damage comprises: a transparent substrate in a light incident direction; a front electrode layer formed on the transparent substrate, at least one first opening formed on the front electrode a pattern, and a plurality of fifth opening patterns, the at least one first opening pattern continuously extending toward a first direction to form at least one first dividing line; a light absorbing layer formed on the front electrode layer and covering the at least a first dividing line comprising at least one second opening pattern and at least one third opening pattern, and a plurality of sixth opening patterns, the at least one second opening pattern and the at least one third opening pattern being parallel to the at least one An opening pattern, the at least one second opening pattern continuously extending toward the first direction to form a second dividing line; and a back electrode layer formed on the light absorbing layer, including at least a fourth opening pattern, and a plurality of seventh opening patterns extending toward the first direction, and the at least one fourth opening pattern is equal in width to the at least one third opening pattern Forming an overlap, and jointly forming at least one first slot in the first direction; wherein the fifth opening pattern, the sixth opening pattern, and the seventh opening pattern are overlapped to form a plurality of second Slotting, the second slots comprising at least one of a straight line, a periodic wavy curve, and a periodic triangular wave line, an extending direction of the line, and the periodic wavy curve and the periodic The waveform advance direction of the triangular wave line is a second direction orthogonal to the first direction, and the width of the second slots is 100-500 μm, and the second slots are used for the thin film solar panel for preventing thermal damage. The density of the structure is 50~250 strips/m 2 , which accounts for 0.5~12.5% of the structural area of the thin film solar panel for preventing and controlling thermal damage. 如申請專利範圍第1項所述之用於防治熱損傷之薄膜太陽能板結構,其中該等第六開口圖案以及該等第七開口圖案的寬度相同,該等第五開口 的寬度小於該等等第六開口圖案以及該等第七開口圖案的寬度。 The thin film solar panel structure for preventing thermal damage according to claim 1, wherein the sixth opening pattern and the seventh opening pattern have the same width, and the fifth openings The width is smaller than the width of the sixth opening pattern and the seventh opening pattern. 如申請專利範圍第1項所述之用於防治熱損傷之薄膜太陽能板結構,其中該等第五開口圖案以及該等第六開口圖案的寬度相同,該等第五開口的寬度大於該等第六開口圖案以及該等第七開口圖案的寬度,但該第七開口圖案的側壁形成有該光吸收層,使得實際形成的一下部開口圖案的寬度與該第五開口圖案及該第六開口圖案相等。 The thin film solar panel structure for preventing thermal damage according to claim 1, wherein the fifth opening pattern and the sixth opening pattern have the same width, and the fifth openings have a width greater than the first a sixth opening pattern and a width of the seventh opening patterns, but a sidewall of the seventh opening pattern is formed with the light absorbing layer such that a width of the actually formed lower opening pattern and the fifth opening pattern and the sixth opening pattern equal. 如申請專利範圍第1項所述之用於防治熱損傷之薄膜太陽能板結構,其中該等第五開口圖案、該等第六開口圖案以及該等第七開口圖案的寬度相同。 The thin film solar panel structure for preventing thermal damage according to claim 1, wherein the fifth opening patterns, the sixth opening patterns, and the seventh opening patterns have the same width. 如申請專利範圍第1項所述之用於防治熱損傷之薄膜太陽能板結構,其中該週期性波浪狀曲線及該週期性的三角波線的振幅為10μm至10mm,週期為5μm至5mm。 The thin film solar panel structure for controlling thermal damage according to claim 1, wherein the periodic wavy curve and the periodic triangular wave line have an amplitude of 10 μm to 10 mm and a period of 5 μm to 5 mm. 如申請專利範圍第5項所述之用於防治熱損傷之薄膜太陽能板結構,其中該週期性波浪狀曲線及該週期性的三角波線的之間相互平行,且波形相位為相同、偏移或相反。 The thin film solar panel structure for preventing thermal damage according to claim 5, wherein the periodic wave curve and the periodic triangular wave line are parallel to each other, and the waveform phases are the same, offset or in contrast. 如申請專利範圍第1項所述之用於防治熱損傷之薄膜太陽能板結構,其中該透明基板由一無鹼玻璃、一石英玻璃、一壓克力的其中之一所形成;該前電極層為一透明導電材料;該光吸收層為單晶矽、多晶矽、無非晶矽、微晶矽、銅銦鎵硒薄膜、銅銦鎵硒硫薄膜的至少其中之一;以及該背電極層為該透明導電材料及/或一金屬材料。 The thin film solar panel structure for preventing thermal damage according to claim 1, wherein the transparent substrate is formed by one of an alkali-free glass, a quartz glass, and an acryl; the front electrode layer Is a transparent conductive material; the light absorbing layer is at least one of single crystal germanium, polycrystalline germanium, non-amorphous germanium, microcrystalline germanium, copper indium gallium selenide thin film, copper indium gallium selenide thin film; and the back electrode layer is A transparent conductive material and/or a metallic material. 如申請專利範圍第7項所述之用於防治熱損傷之薄膜太陽能板結構,其中該透明導電材料為一銦錫氧化物及一鋁鋅氧化物的至少其中之一;該金屬材料為鉬、銀、鎳的至少其中之一。 The thin film solar panel structure for preventing thermal damage according to claim 7, wherein the transparent conductive material is at least one of an indium tin oxide and an aluminum zinc oxide; the metal material is molybdenum, At least one of silver and nickel.
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