TW201532085A - Rare earth permanent magnet and manufacturing method of rare earth permanent magnet - Google Patents

Rare earth permanent magnet and manufacturing method of rare earth permanent magnet Download PDF

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TW201532085A
TW201532085A TW103105001A TW103105001A TW201532085A TW 201532085 A TW201532085 A TW 201532085A TW 103105001 A TW103105001 A TW 103105001A TW 103105001 A TW103105001 A TW 103105001A TW 201532085 A TW201532085 A TW 201532085A
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magnet
permanent magnet
sintered body
rare earth
earth permanent
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Takashi Yamamoto
Katsuya Kume
Toshiaki Okuno
Izumi Ozeki
Takashi Ozaki
Tomohiro Omure
Keisuke Taihaku
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Nitto Denko Corp
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Abstract

The present invention provides a manufacturing method of rare earth permanent magnet and rare earth permanent magnet which does not decrease the magnetic property, and which increases coercive force by Cu and inhibits principal phase decomposition or the precipitation of alpha Fe even the calcination is launched in the hydrogen gas environment. The permanent magnet is produced by forming and pulverizing magnet material without Cu and subjecting the formed article in the hydrogen gas environment at 200 Celsius degree ~ 900 Celsius degree for several hours to dozens of hours and then performing calcination treatment, followed by performing vacuum sintering or pressure sintering to sinter the formed article, further followed by sputtering Cu on the surface of the sintered body.

Description

稀土類永久磁石及稀土類永久磁石之製造方法 Method for manufacturing rare earth permanent magnet and rare earth permanent magnet

本發明係關於一種稀土類永久磁石及稀土類永久磁石之製造方法。 The invention relates to a method for manufacturing a rare earth permanent magnet and a rare earth permanent magnet.

近年來,對油電混合車或硬碟驅動器等中所使用之永久磁石馬達要求小型輕量化、高輸出化、高效率化。並且,於實現上述永久磁石馬達之小型輕量化、高輸出化、高效率化時,對埋設於永久磁石馬達之永久磁石要求磁特性之進一步提高。再者,作為永久磁石,有鐵氧體磁石、Sm-Co系磁石、Nd-Fe-B系磁石、Sm2Fe17Nx系磁石等,尤其使用殘留磁通密度較高之Nd-Fe-B系磁石作為永久磁石馬達用永久磁石。 In recent years, permanent magnet motors used in hybrid electric vehicles, hard disk drives, and the like have been required to be small, lightweight, high in output, and high in efficiency. Further, when the permanent magnet motor is reduced in size, weight, output, and efficiency, the magnetic properties of the permanent magnet embedded in the permanent magnet motor are further improved. Further, as the permanent magnet, there are ferrite magnets, Sm-Co magnets, Nd-Fe-B magnets, and Sm 2 Fe 17 N x magnets, and in particular, Nd-Fe- having a high residual magnetic flux density is used. The B-series magnet is used as a permanent magnet for a permanent magnet motor.

然而,Nd-Fe-B等Nd系磁石存在耐熱溫度較低之問題。因此,於將Nd系磁石用於永久磁石馬達之情形時,若連續驅動該馬達,則磁石之殘留磁通密度緩慢地下降。又,亦產生不可逆退磁。因此,作為提高Nd系磁石之保磁力之方法,先前以來一直添加微量Cu。 However, Nd-based magnets such as Nd-Fe-B have a problem that the heat resistance temperature is low. Therefore, when the Nd-based magnet is used for a permanent magnet motor, if the motor is continuously driven, the residual magnetic flux density of the magnet gradually decreases. Also, irreversible demagnetization occurs. Therefore, as a method of increasing the coercive force of the Nd-based magnet, a trace amount of Cu has been added.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

專利文獻1:日本專利特開2007-294917號公報(第7頁) Patent Document 1: Japanese Patent Laid-Open Publication No. 2007-294917 (page 7)

又,作為使Nd系磁石之磁性能下降之原因,可列舉含碳物殘留於磁石內。尤其是於Nd系磁石中,Nd與碳之反應性非常高,因此若 於燒結步驟中直至升為高溫仍殘留含碳物,則會形成碳化物。其結果,存在如下問題:因所形成之碳化物而於燒結後之磁石之主相與晶界相之間產生空隙,無法對磁石整體進行緻密燒結,磁性能明顯下降。又,即便於未產生空隙之情形時,亦存在因所形成之碳化物而於燒結後之磁石之主相內析出αFe,使磁石特性大幅降低之問題。因此,想到如下技術:對磁石進行燒結前於氫氣環境下進行鍛燒處理,藉此使含碳物熱分解而去除所含之碳。 Further, as a cause of deteriorating the magnetic properties of the Nd-based magnet, carbonaceous materials remain in the magnet. Especially in Nd-based magnets, the reactivity of Nd with carbon is very high, so if The carbonaceous material remains in the sintering step until it rises to a high temperature, and carbides are formed. As a result, there is a problem that a void is formed between the main phase of the magnet after sintering and the grain boundary phase due to the formed carbide, and the entire magnet cannot be densely sintered, and the magnetic properties are remarkably lowered. Further, even when voids are not formed, there is a problem that αFe is precipitated in the main phase of the magnet after sintering due to the formed carbide, and the magnet characteristics are largely lowered. Therefore, a technique is considered in which a calcination treatment is performed in a hydrogen atmosphere before the magnet is sintered, whereby the carbonaceous material is thermally decomposed to remove the contained carbon.

然而,於在氫氣環境下進行上述鍛燒處理時,認為會於稀土類磁石內發生以下(1)之反應。 However, when the calcination treatment is carried out in a hydrogen atmosphere, it is considered that the following reaction (1) occurs in the rare earth magnet.

Nd2Fe14B+2H2→2NdH2+12Fe+Fe2B....(1) Nd 2 Fe 14 B+2H 2 →2NdH 2 +12Fe+Fe 2 B. . . . (1)

因上述(1)之反應向右側推進,使稀土類磁石之主相(Nd2Fe14B)分解並且析出αFe,而成為磁石特性降低之原因。再者,亦考慮藉由其後進行之燒結處理而使所分解之主相之一部分恢復,但αFe殘存。 When the reaction of the above (1) is pushed to the right side, the main phase of the rare earth magnet (Nd 2 Fe 14 B) is decomposed and αFe is precipitated, which causes a decrease in magnet characteristics. Further, it is also considered that one part of the decomposed main phase is recovered by the subsequent sintering treatment, but αFe remains.

並且,若如上述專利文獻1般設為預先使Cu包含於磁石原料之構成,則於進行鍛燒處理之時間點Cu包含於磁石中。於此情形時,存在上述(1)之反應容易向右側推進之問題。此處,圖12係對於藉由將如上述專利文獻1般預先包含Cu之磁石原料粉碎、成形及燒結而製成之永久磁石與藉由將不含Cu之磁石原料粉碎、成形及燒結而製成之永久磁石,改變鍛燒處理之條件而比較保磁力的圖。 In addition, as in the case of the above-described Patent Document 1, it is assumed that Cu is contained in the magnet raw material in advance, and Cu is contained in the magnet at the time of performing the calcination treatment. In this case, there is a problem that the reaction of the above (1) is easily advanced to the right side. Here, FIG. 12 is a permanent magnet produced by pulverizing, molding, and sintering a magnet raw material containing Cu in advance as in Patent Document 1, and by pulverizing, forming, and sintering a magnet raw material containing no Cu. A permanent magnet, which changes the conditions of the calcination process and compares the coercive force.

如圖12所示,於不在氫氣環境下進行鍛燒處理之情形時,於包含Cu之永久磁石與不含Cu之永久磁石之間未產生較大之保磁力之差。然而,於在氫氣環境下進行鍛燒處理之情形時,包含Cu之永久磁石與不含Cu之永久磁石相比,保磁力降低,若進而提高進行鍛燒處理之溫度,則其保磁力之差變大。即,於在氫氣環境下進行鍛燒處理之情形時,包含Cu之永久磁石容易向右側推進上述(1)之反應,與利用脫碳獲得之保磁力之提高相比,由主相之分解或αFe之析出引起 的保磁力之降低影響更大,可預測到保磁力降低。 As shown in FIG. 12, when the calcination treatment is not performed in a hydrogen atmosphere, a large coercive force difference is not generated between the permanent magnet containing Cu and the permanent magnet containing no Cu. However, when the calcination treatment is carried out in a hydrogen atmosphere, the permanent magnet containing Cu has a lower coercive force than the permanent magnet containing no Cu, and if the temperature for the calcination treatment is further increased, the coercive force difference is obtained. Become bigger. That is, in the case where the calcination treatment is performed in a hydrogen atmosphere, the permanent magnet containing Cu easily advances the reaction of the above (1) to the right side, and is decomposed by the main phase as compared with the increase in the coercive force obtained by decarburization. Precipitation of αFe The influence of the reduction of the coercive force is greater, and it is predicted that the coercive force is lowered.

本發明係為了消除上述先前之問題而完成者,其目的在於提供一種稀土類永久磁石及稀土類永久磁石之製造方法,該稀土類永久磁石可實現利用Cu獲得之保磁力之提高,並且即便於在氫氣環境下進行鍛燒之情形時,亦可抑制主相之分解或αFe之析出,不會使磁特性降低。 The present invention has been made to eliminate the above-mentioned problems, and an object thereof is to provide a method for producing a rare earth permanent magnet and a rare earth permanent magnet, which can achieve an increase in coercive force obtained by using Cu, and even if When calcination is carried out in a hydrogen atmosphere, decomposition of the main phase or precipitation of αFe can be suppressed without deteriorating the magnetic properties.

為了達成上述目的,本發明之稀土類永久磁石之特徵在於藉由如下步驟而製造:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;於成形前或成形後且燒結前、於氫氣環境或氫氣與惰性氣體之混合氣體環境下對上述磁石粉末進行鍛燒之步驟;藉由將上述成形體保持於燒成溫度而進行燒結,獲得燒結體之步驟;及於上述燒結體之表面濺鍍Cu之步驟。 In order to achieve the above object, the rare earth permanent magnet of the present invention is characterized by the steps of: pulverizing a magnet raw material into a magnet powder; and forming a shaped body by molding the pulverized magnet powder; a step of calcining the magnet powder before or after forming and before sintering, in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen and an inert gas; sintering is performed by holding the formed body at a firing temperature to obtain a sintered body And a step of sputtering Cu on the surface of the sintered body.

又,本發明之稀土類永久磁石之特徵在於藉由如下步驟而製造:藉由對濺鍍有Cu之上述燒結體進行加熱,而使濺鍍於上述燒結體之表面之Cu擴散於上述燒結體之內部的步驟。 Further, the rare earth permanent magnet of the present invention is characterized in that: by sputtering the sintered body sputtered with Cu, Cu sputtered on the surface of the sintered body is diffused to the sintered body Internal steps.

又,本發明之稀土類永久磁石之特徵在於:於對濺鍍有Cu之上述燒結體進行加熱時,於低於上述燒成溫度之溫度下進行加熱。 Further, the rare earth permanent magnet of the present invention is characterized in that heating is performed at a temperature lower than the firing temperature when the sintered body in which Cu is sputtered is heated.

又,本發明之稀土類永久磁石之特徵在於:於在上述燒結體之表面濺鍍Cu之步驟中,於上述燒結體之表面濺鍍Nd後,於上述燒結體之表面濺鍍Cu。 Further, the rare earth permanent magnet of the present invention is characterized in that in the step of sputtering Cu on the surface of the sintered body, after sputtering of Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body.

又,本發明之稀土類永久磁石之特徵在於:藉由於上述經粉碎之磁石粉末中添加含有Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb並且不含氧原子及氮原子之有機金屬化合物,而於上述磁石粉末之粒子表面附著上述有機金屬化合物,並藉由使粒子表面附著有上述有機金屬化合物之上述磁石粉末成 形而形成成形體。 Further, the rare earth permanent magnet of the present invention is characterized in that Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co are added to the pulverized magnet powder. Bi, Zn, Mg or Nb and an organometallic compound which does not contain an oxygen atom and a nitrogen atom, and the above organometallic compound is adhered to the surface of the particle of the magnet powder, and the above-mentioned magnet powder is adhered to the surface of the particle by the above organometallic compound. to make Formed into a shaped body.

又,本發明之稀土類永久磁石之特徵在於:中心金屬為Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁。 Further, the rare earth permanent magnet of the present invention is characterized in that the central metal is Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb. Metal complex, or diisobutylaluminum hydride.

又,本發明之稀土類永久磁石之特徵在於:於使上述磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 Further, the rare earth permanent magnet of the present invention is characterized in that in the step of molding the magnet powder into a molded body, a mixture in which the magnet powder and the binder are mixed is produced, and the mixture is formed into a sheet shape to be produced. A green sheet of the above shaped body.

又,本發明之稀土類永久磁石之製造方法之特徵在於包括:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;於成形前或成形後且燒結前、於氫氣環境或氫氣與惰性氣體之混合氣體環境下對上述磁石粉末進行鍛燒之步驟;藉由將上述成形體保持於燒成溫度而進行燒結,獲得燒結體之步驟;及於上述燒結體之表面濺鍍Cu之步驟。 Further, the method for producing a rare earth permanent magnet of the present invention is characterized by comprising the steps of: pulverizing a magnet raw material into a magnet powder; forming a shaped body by molding the pulverized magnet powder; before or after forming And a step of calcining the magnet powder in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen and an inert gas before sintering; and performing the sintering by maintaining the molded body at a firing temperature to obtain a sintered body; The step of sputtering Cu on the surface of the sintered body.

又,本發明之稀土類永久磁石之製造方法之特徵在於包括:藉由對濺鍍有Cu之上述燒結體進行加熱,而使濺鍍於上述燒結體之表面之Cu擴散於上述燒結體之內部的步驟。 Further, the method for producing a rare earth permanent magnet according to the present invention is characterized in that Cu is sputtered on the surface of the sintered body by heating the sintered body in which Cu is sputtered, and is diffused inside the sintered body. A step of.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於對濺鍍有Cu之上述燒結體進行加熱時,於低於上述燒成溫度之溫度下進行加熱。 Moreover, the method for producing a rare earth permanent magnet according to the present invention is characterized in that heating is performed at a temperature lower than the firing temperature when the sintered body in which Cu is sputtered is heated.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於在上述燒結體之表面濺鍍Cu之步驟中,於上述燒結體之表面濺鍍Nd後,於上述燒結體之表面濺鍍Cu。 Further, in the method for producing a rare earth permanent magnet according to the present invention, in the step of sputtering Cu on the surface of the sintered body, after sputtering Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body. .

又,本發明之稀土類永久磁石之製造方法之特徵在於:藉由於上述經粉碎之磁石粉末中添加含有Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb並且不含氧原子及氮原子之有機金屬化合物,而於上述磁石粉末之粒子表面附著上述有機金 屬化合物,並藉由使粒子表面附著有上述有機金屬化合物之上述磁石粉末成形而形成成形體。 Further, the method for producing a rare earth permanent magnet of the present invention is characterized in that Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga are added to the pulverized magnet powder. , Co, Bi, Zn, Mg or Nb and does not contain an organometallic compound of an oxygen atom and a nitrogen atom, and the above organic gold is adhered to the surface of the particle of the magnet powder. It is a compound and forms a molded body by molding the above-described magnet powder to which the above-described organometallic compound adheres.

又,本發明之稀土類永久磁石之製造方法之特徵在於:上述有機金屬化合物係中心金屬為Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁。 Further, the method for producing a rare earth permanent magnet according to the present invention is characterized in that the organometallic compound-based central metal is Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, A metal complex of Bi, Zn, Mg or Nb, or diisobutylaluminum hydride.

進而,本發明之稀土類永久磁石之製造方法之特徵在於:於使上述磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 Further, in the method for producing a rare earth permanent magnet according to the present invention, in the step of molding the magnet powder into a molded body, a mixture in which the magnet powder and the binder are mixed is produced, and the mixture is formed into a sheet shape. A green sheet as the above molded body was produced.

根據具有上述構成之本發明之稀土類永久磁石,可實現利用Cu獲得之保磁力之提高,並且即便於在氫氣環境下進行鍛燒之情形時,亦可抑制主相之分解或αFe之析出,防止磁特性降低。又,對粉末狀之磁石粒子進行鍛燒之情形與對成形後之磁石粒子進行鍛燒之情形相比,可擴大成為鍛燒對象之磁石之表面積。即,可更確實地減少鍛燒體中之碳量。 According to the rare earth permanent magnet of the present invention having the above-described configuration, the coercive force obtained by Cu can be improved, and even in the case of calcination in a hydrogen atmosphere, decomposition of the main phase or precipitation of αFe can be suppressed. Prevent deterioration of magnetic properties. Further, in the case of calcining the powdery magnet particles, the surface area of the magnet to be calcined can be expanded as compared with the case of calcining the magnet particles after molding. That is, the amount of carbon in the calcined body can be more surely reduced.

又,根據本發明之稀土類永久磁石,藉由對濺鍍有Cu之燒結體進行加熱,而使濺鍍於燒結體之表面之Cu擴散於燒結體之內部,因此可不預先於磁石原料中包含Cu,而使燒結後濺鍍之Cu適當地偏靠於晶界。即,可不預先於磁石原料中包含Cu,而利用Cu獲得保磁力提高之效果。 Further, according to the rare earth permanent magnet of the present invention, since the sintered body sputtered with Cu is heated, the Cu sputtered on the surface of the sintered body is diffused inside the sintered body, so that it is not included in the magnet raw material. Cu, so that the Cu which is sputtered after sintering is appropriately biased against the grain boundary. In other words, the effect of improving the coercive force can be obtained by using Cu without preliminarily including Cu in the magnet raw material.

又,根據本發明之稀土類永久磁石,於對濺鍍有Cu之燒結體進行加熱時,於低於燒成溫度之溫度下進行加熱,因此於使所濺鍍之Cu擴散於燒結體之內部之步驟中,可防止產生磁石粒子之晶粒成長。 Further, according to the rare earth permanent magnet of the present invention, when the sintered body sputtered with Cu is heated at a temperature lower than the firing temperature, the sputtered Cu is diffused inside the sintered body. In the step, grain growth of the magnet particles can be prevented.

又,根據本發明之稀土類永久磁石,於燒結體之表面濺鍍Nd後,於燒結體之表面濺鍍Cu,因此可於更低溫下進行使所濺鍍之Cu擴散於燒結體之內部之步驟。 Further, according to the rare earth permanent magnet of the present invention, after sputtering of Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body, so that the sputtered Cu can be diffused inside the sintered body at a lower temperature. step.

又,根據本發明之稀土類永久磁石,可使有機金屬化合物中所含之Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb效率良好地偏靠於磁石之晶界。其結果,可提高永久磁石之磁性能。又,可將Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之添加量設為較先前之更少量,因此可抑制殘留磁通密度之降低。 Further, according to the rare earth permanent magnet of the present invention, Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn contained in the organometallic compound can be used. Mg or Nb is efficiently biased against the grain boundaries of the magnet. As a result, the magnetic properties of the permanent magnet can be improved. Further, the addition amount of Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb can be set to be smaller than the previous one, so The reduction of the residual magnetic flux density is suppressed.

又,根據本發明之稀土類永久磁石,使用中心金屬為Cu、Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁作為有機金屬化合物,因此於其後之加熱步驟中可容易地進行有機金屬化合物之熱分解,可使有機金屬化合物中所含之金屬適當地偏靠於晶界。又,亦可藉由進行熱分解而減少殘存於磁石內之碳量。其結果,不會於燒結後之磁石之主相與晶界相之間產生空隙,又,可對磁石整體進行緻密燒結,可防止保磁力降低。又,於燒結後之磁石之主相內不會析出大量αFe,不會使磁石特性大幅降低。 Further, according to the rare earth permanent magnet of the present invention, the central metal is Cu, Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb. The metal complex or the diisobutylaluminum hydride is used as the organometallic compound, so that the thermal decomposition of the organometallic compound can be easily performed in the subsequent heating step, and the metal contained in the organometallic compound can be appropriately biased. Rely on the grain boundary. Further, the amount of carbon remaining in the magnet can be reduced by thermal decomposition. As a result, voids are not formed between the main phase of the magnet after sintering and the grain boundary phase, and the entire magnet can be densely sintered to prevent a decrease in coercive force. Further, a large amount of αFe is not precipitated in the main phase of the magnet after sintering, and the magnet characteristics are not greatly lowered.

又,根據本發明之稀土類永久磁石,藉由對將磁石粉末與黏合劑混合而成形之生片進行燒結所得之磁石構成永久磁石,因此因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。 Further, according to the rare earth permanent magnet of the present invention, the magnet obtained by sintering the green sheet formed by mixing the magnet powder and the binder constitutes a permanent magnet, so that shrinkage due to sintering becomes uniform without sintering. After the deformation such as warping or depression, and the pressure unevenness in the case of no pressurization, the correction processing after the previous sintering is not required, and the manufacturing steps can be simplified. Thereby, the permanent magnet can be formed with higher dimensional accuracy.

又,根據本發明之稀土類永久磁石之製造方法,可實現利用Cu獲得之保磁力之提高,並且即便於在氫氣環境下進行鍛燒之情形時,亦可抑制主相之分解或αFe之析出,防止磁特性降低。又,對粉末狀 之磁石粒子進行鍛燒之情形與對成形後之磁石粒子進行鍛燒之情形相比,可擴大成為鍛燒對象之磁石之表面積。即,可更確實地減少鍛燒體中之碳量。 Further, according to the method for producing a rare earth permanent magnet of the present invention, the coercive force obtained by Cu can be improved, and the decomposition of the main phase or the precipitation of αFe can be suppressed even when the calcination is performed in a hydrogen atmosphere. To prevent deterioration of magnetic properties. Also, for powder When the magnet particles are calcined, the surface area of the magnet to be calcined can be expanded as compared with the case where the magnet particles after the forming are calcined. That is, the amount of carbon in the calcined body can be more surely reduced.

又,根據本發明之稀土類永久磁石之製造方法,藉由對濺鍍有Cu之燒結體進行加熱,而使濺鍍於燒結體之表面之Cu擴散於燒結體之內部,因此可不預先於磁石原料中包含Cu,而使燒結後濺鍍之Cu適當地偏靠於晶界。即,可不預先於磁石原料中包含Cu,而利用Cu獲得保磁力提高之效果。 Further, according to the method for producing a rare earth permanent magnet of the present invention, since the sintered body sputtered with Cu is heated, Cu deposited on the surface of the sintered body is diffused inside the sintered body, so that it is not necessary to be in advance of the magnet. Cu is contained in the raw material, and Cu which is sputtered after sintering is appropriately biased against the grain boundary. In other words, the effect of improving the coercive force can be obtained by using Cu without preliminarily including Cu in the magnet raw material.

又,根據本發明之稀土類永久磁石之製造方法,於對濺鍍有Cu之燒結體進行加熱時,於低於燒成溫度之溫度下進行加熱,因此於使所濺鍍之Cu擴散於燒結體之內部之步驟中,可防止產生磁石粒子之晶粒成長。 Moreover, according to the method for producing a rare earth permanent magnet of the present invention, when the sintered body sputtered with Cu is heated, the temperature is lowered at a temperature lower than the firing temperature, so that the sputtered Cu is diffused to the sintered body. In the step of the inside of the body, grain growth of the magnet particles can be prevented from occurring.

又,根據本發明之稀土類永久磁石之製造方法,於燒結體之表面濺鍍Nd後,於燒結體之表面濺鍍Cu,因此可於更低溫下進行使所濺鍍之Cu擴散於燒結體之內部之步驟。 Further, according to the method for producing a rare earth permanent magnet of the present invention, after sputtering of Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body, so that the sputtered Cu can be diffused to the sintered body at a lower temperature. Internal steps.

又,根據本發明之稀土類永久磁石之製造方法,可使有機金屬化合物中所含之Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb效率良好地偏靠於磁石之晶界。其結果,可提高永久磁石之磁性能。又,可將Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之添加量設為較先前之更少量,因此可抑制殘留磁通密度之降低。 Further, according to the method for producing a rare earth permanent magnet of the present invention, Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi contained in the organometallic compound can be used. Zn, Mg or Nb is efficiently biased against the grain boundaries of the magnet. As a result, the magnetic properties of the permanent magnet can be improved. Further, the addition amount of Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb can be set to be smaller than the previous one, so The reduction of the residual magnetic flux density is suppressed.

又,根據本發明之稀土類永久磁石之製造方法,使用中心金屬為Cu、Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁作為有機金屬化合物,因此於其後之加熱步驟中可容易地進行有機金屬化合物之熱分解,可使有機金屬化合物中所含之金屬適當地偏靠於晶界。又,亦可 藉由進行熱分解而減少殘存於磁石內之碳量。其結果,不會於燒結後之磁石之主相與晶界相之間產生空隙,又,可對磁石整體進行緻密燒結,可防止保磁力降低。又,於燒結後之磁石之主相內不會析出大量αFe,不會使磁石特性大幅降低。 Further, according to the method for producing a rare earth permanent magnet of the present invention, the central metal is Cu, Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, a metal complex of Mg or Nb or diisobutylaluminum hydride as an organometallic compound, so that thermal decomposition of the organometallic compound can be easily performed in the subsequent heating step, and the metal contained in the organometallic compound can be obtained. Properly biased against the grain boundary. Also, The amount of carbon remaining in the magnet is reduced by thermal decomposition. As a result, voids are not formed between the main phase of the magnet after sintering and the grain boundary phase, and the entire magnet can be densely sintered to prevent a decrease in coercive force. Further, a large amount of αFe is not precipitated in the main phase of the magnet after sintering, and the magnet characteristics are not greatly lowered.

進而,根據本發明之稀土類永久磁石之製造方法,藉由對將磁石粉末與黏合劑混合而成形之生片進行燒結所得之磁石構成永久磁石,因此因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。 Further, according to the method for producing a rare earth permanent magnet of the present invention, the magnet obtained by sintering the green sheet formed by mixing the magnet powder and the binder constitutes a permanent magnet, so that shrinkage due to sintering becomes uniform without Deformation such as warpage or depression after sintering is generated, and the pressure is not uniform when there is no pressurization, so that the correction processing after the previous sintering is not required, and the manufacturing steps can be simplified. Thereby, the permanent magnet can be formed with higher dimensional accuracy.

1‧‧‧永久磁石 1‧‧‧ permanent magnet

2‧‧‧Nd結晶粒子 2‧‧‧Nd crystal particles

3‧‧‧金屬偏靠層 3‧‧‧Metal bias

4‧‧‧包含Cu等之粒 4‧‧‧Includes grains such as Cu

10‧‧‧粗粉碎磁石粉末 10‧‧‧ coarsely crushed magnet powder

11‧‧‧珠磨機 11‧‧‧Bead mill

12‧‧‧複合物 12‧‧‧Complex

13‧‧‧支持基材 13‧‧‧Support substrate

14‧‧‧生片 14‧‧‧Life

15‧‧‧模具 15‧‧‧Mold

16‧‧‧塊體 16‧‧‧ Block

17‧‧‧塊體 17‧‧‧ Block

18‧‧‧狹縫 18‧‧‧ slit

19‧‧‧模腔 19‧‧‧ cavity

20‧‧‧供給口 20‧‧‧ supply port

21‧‧‧噴出口 21‧‧‧Spray outlet

22‧‧‧塗佈輥 22‧‧‧Application roller

25‧‧‧螺線管 25‧‧‧ Solenoid

26‧‧‧加熱板 26‧‧‧heating plate

27‧‧‧箭頭 27‧‧‧ arrow

30‧‧‧磁場施加裝置 30‧‧‧Magnetic field application device

31‧‧‧線圈部 31‧‧‧ coil department

32‧‧‧線圈部 32‧‧‧ coil part

33‧‧‧磁極片 33‧‧‧Magnetic pole pieces

34‧‧‧磁極片 34‧‧‧Magnetic pole pieces

35‧‧‧膜 35‧‧‧film

37‧‧‧加熱裝置 37‧‧‧ heating device

38‧‧‧平板構件 38‧‧‧Table components

39‧‧‧空洞 39‧‧‧ hollow

40‧‧‧成形體 40‧‧‧Formed body

41‧‧‧燒結模具 41‧‧‧Sintering mould

42‧‧‧真空腔室 42‧‧‧vacuum chamber

43‧‧‧上部衝頭 43‧‧‧Upper punch

44‧‧‧下部衝頭 44‧‧‧lower punch

45‧‧‧上部衝頭電極 45‧‧‧Upper punch electrode

46‧‧‧下部衝頭電極 46‧‧‧ Lower punch electrode

50‧‧‧燒結體 50‧‧‧Sintered body

51‧‧‧Nd之薄膜 51‧‧‧Nd film

52‧‧‧Cu之薄膜 52‧‧‧Cu film

d‧‧‧金屬偏靠層之厚度 d‧‧‧The thickness of the metal bias layer

D‧‧‧Nd結晶粒子之粒徑(圖2) Particle size of D‧‧‧Nd crystal particles (Fig. 2)

D‧‧‧模具與支持基材間之間隙(圖6) D‧‧‧The gap between the mold and the supporting substrate (Fig. 6)

圖1係表示本發明之永久磁石之整體圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a general view showing a permanent magnet of the present invention.

圖2係將本發明之永久磁石之晶界附近放大表示的模式圖。 Fig. 2 is a schematic enlarged view showing the vicinity of a grain boundary of the permanent magnet of the present invention.

圖3係將本發明之永久磁石之晶界附近放大表示的模式圖。 Fig. 3 is a schematic enlarged view showing the vicinity of a grain boundary of the permanent magnet of the present invention.

圖4係表示本發明之永久磁石之製造步驟的說明圖。 Fig. 4 is an explanatory view showing a manufacturing step of the permanent magnet of the present invention.

圖5係表示本發明之永久磁石之製造步驟的說明圖。 Fig. 5 is an explanatory view showing a manufacturing step of the permanent magnet of the present invention.

圖6係表示本發明之永久磁石之製造步驟中尤其是生片之成形步驟的說明圖。 Fig. 6 is an explanatory view showing a forming step of a green sheet, in particular, a green sheet in the manufacturing process of the permanent magnet of the present invention.

圖7係表示本發明之永久磁石之製造步驟中尤其是生片之加熱步驟及磁場配向步驟的說明圖。 Fig. 7 is an explanatory view showing a heating step and a magnetic field alignment step of a green sheet in the manufacturing process of the permanent magnet of the present invention.

圖8係表示於生片之面內垂直方向配向磁場之例的圖。 Fig. 8 is a view showing an example in which a magnetic field is aligned in the vertical direction in the plane of the green sheet.

圖9係對使用熱介質(聚矽氧油)之加熱裝置進行說明的圖。 Fig. 9 is a view for explaining a heating device using a heat medium (polyoxygenated oil).

圖10係表示本發明之永久磁石之製造步驟中尤其是生片之加壓燒結步驟的模式圖。 Fig. 10 is a schematic view showing a step of pressure sintering of a green sheet in the manufacturing process of the permanent magnet of the present invention.

圖11係表示關於實施例與比較例之各磁石之各種測定結果的圖。 Fig. 11 is a view showing various measurement results of the respective magnets of the examples and the comparative examples.

圖12係對先前技術之問題進行說明之圖。 Fig. 12 is a diagram for explaining problems of the prior art.

以下,對於本發明之稀土類永久磁石及稀土類永久磁石之製造方法,一面參照以下圖式一面對具體化之一實施形態詳細地進行說明。 Hereinafter, the method for producing the rare earth permanent magnet and the rare earth permanent magnet of the present invention will be described in detail with reference to the following embodiment.

[永久磁石之構成] [Composition of permanent magnets]

首先,對本發明之永久磁石1之構成進行說明。圖1係表示本發明之永久磁石1之整體圖。再者,圖1所示之永久磁石1具備扇型形狀,永久磁石1之形狀根據沖裁形狀而變化。 First, the configuration of the permanent magnet 1 of the present invention will be described. Figure 1 is a general view showing a permanent magnet 1 of the present invention. Further, the permanent magnet 1 shown in Fig. 1 has a fan shape, and the shape of the permanent magnet 1 changes depending on the punched shape.

本發明之永久磁石1為Nd-Fe-B系之各向異性磁石。又,將用以提高永久磁石1之磁性能之Cu、Al、Dy(鏑)、Tb(鋱)、Nb(鈮)、V(釩)、Mo(鉬)、Zr(鋯)、Ta(鉭)、Ti(鈦)或W(鎢)偏靠於形成永久磁石1之各結晶粒子之界面(晶界)。再者,各成分之含量設為Nd:25~37wt%、Cu、Al、Dy、Tb、Nb、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg中任一者(其中至少包含Cu;以下稱為Cu等):0.01~5wt%、B:0.8~2wt%、Fe(電解鐵):60~75wt%。又,為了提高磁特性,亦可含有少量Si等其他元素。 The permanent magnet 1 of the present invention is an anisotropic magnet of the Nd-Fe-B system. Further, Cu, Al, Dy (镝), Tb (鋱), Nb (铌), V (vanadium), Mo (molybdenum), Zr (zirconium), Ta (钽) for improving the magnetic properties of the permanent magnet 1 ), Ti (titanium) or W (tungsten) is biased against the interface (grain boundary) of each of the crystal particles forming the permanent magnet 1. Further, the content of each component is set to Nd: 25 to 37 wt%, Cu, Al, Dy, Tb, Nb, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg Either (including at least Cu; hereinafter referred to as Cu or the like): 0.01 to 5 wt%, B: 0.8 to 2 wt%, and Fe (electrolytic iron): 60 to 75 wt%. Further, in order to improve the magnetic properties, a small amount of other elements such as Si may be contained.

具體而言,本發明之永久磁石1係如圖2所示般藉由於構成永久磁石1之Nd結晶粒子(主相)2之結晶粒之表面部分(外殼)產生包含Cu等之層3(以下稱為金屬偏靠層3),而使Cu等偏靠於Nd結晶粒子2之晶界。圖2係將構成永久磁石1之Nd結晶粒子2放大表示的圖。再者,金屬偏靠層3較佳為成為非磁性。 Specifically, the permanent magnet 1 of the present invention generates a layer 3 containing Cu or the like by the surface portion (outer shell) of the crystal grains constituting the Nd crystal particles (main phase) 2 of the permanent magnet 1 as shown in FIG. 2 (hereinafter) It is referred to as a metal bias layer 3), and Cu or the like is biased against the grain boundary of the Nd crystal particles 2. Fig. 2 is an enlarged view of the Nd crystal particles 2 constituting the permanent magnet 1. Furthermore, the metal bias layer 3 is preferably non-magnetic.

此處,於本發明中,尤其為了產生包含Cu之金屬偏靠層3,如下所述般於燒結體之表面濺鍍Cu。具體而言,將燒結體安裝於濺鍍裝置,於燒結體之表面濺鍍Cu後,對所濺鍍之燒結體進行加熱。其結果,所濺鍍之Cu擴散滲透於燒結體之內部,形成圖2所示之金屬偏靠層3。又,尤其是若於濺鍍Cu前濺鍍Nd,則可使Cu以較Cu單體為低 熔點之Nd-Cu合金(熔點459℃)之狀態進行擴散滲透,可使Cu更容易地擴散滲透於燒結體之內部。 Here, in the present invention, in particular, in order to produce the metal bias layer 3 containing Cu, Cu is sputtered on the surface of the sintered body as described below. Specifically, the sintered body is attached to a sputtering apparatus, and after sputtering of Cu on the surface of the sintered body, the sintered body to be sputtered is heated. As a result, the sputtered Cu diffuses and penetrates into the inside of the sintered body to form the metal offset layer 3 shown in FIG. Moreover, especially if Sputtering Nd before sputtering Cu, Cu can be made lower than Cu monomer. The state of the Nd-Cu alloy having a melting point (melting point of 459 ° C) is diffused and infiltrated, so that Cu can be more easily diffused and diffused into the inside of the sintered body.

又,為了產生包含Cu等之內、Cu以外之金屬元素(以下稱為Dy等)之金屬偏靠層3,於使經粉碎之磁石粉末成形前將包含Dy等之有機金屬化合物添加至磁石粉末中。具體而言,對添加有包含Dy等之有機金屬化合物之磁石粉末進行燒結時,藉由濕式分散使均勻附著於Nd結晶粒子2之粒子表面之該有機金屬化合物中之Dy等擴散滲入至Nd結晶粒子2之結晶成長區域並進行置換,而形成圖2所示之金屬偏靠層3。再者,Nd結晶粒子2例如包含Nd2Fe14B金屬間化合物,金屬偏靠層3例如包含Nd-Cu金屬間化合物、Nd-Fe-Cu金屬間化合物、NbFeB金屬間化合物、(DyxNd1-x)2Fe14B金屬間化合物等。又,除了金屬偏靠層3以外,於晶界中亦可形成例如富Nd相等。 In addition, in order to produce a metal offset layer 3 containing a metal element other than Cu (hereinafter referred to as Dy or the like), an organometallic compound containing Dy or the like is added to the magnet powder before molding the pulverized magnet powder. in. Specifically, when the magnet powder to which the organometallic compound containing Dy or the like is added is sintered, Dy or the like which is uniformly adhered to the surface of the particles of the Nd crystal particles 2 is diffused and diffused into the Nd by wet dispersion. The crystal growth region of the crystal particles 2 is replaced and replaced to form the metal offset layer 3 shown in FIG. Further, the Nd crystal particles 2 include, for example, an Nd 2 Fe 14 B intermetallic compound, and the metal bias layer 3 includes, for example, an Nd—Cu intermetallic compound, an Nd—Fe—Cu intermetallic compound, an NbFeB intermetallic compound, (Dy x Nd). 1-x ) 2 Fe 14 B intermetallic compound or the like. Further, in addition to the metal bias layer 3, for example, Nd-rich may be formed in the grain boundaries.

又,於本發明中,尤其如下所述般將包含Dy等或Nd並且不含氧原子及氮原子之有機金屬化合物、更具體為中心金屬為Dy等或Nd之金屬錯合物或氫化二異丁基鋁(DIBAL)添加至有機溶劑中,並於濕式狀態下混合於磁石粉末中。藉此,可使包含Dy等或Nd之有機金屬化合物分散於有機溶劑中,於Nd結晶粒子2之粒子表面均勻附著包含Dy等或Nd之有機金屬化合物。 Further, in the present invention, in particular, an organometallic compound containing Dy or the like and Nd and containing no oxygen atom and nitrogen atom, more specifically, a metal complex of Dy or the like or Nd or a hydrogenated dihydric compound is contained as follows. Butyl aluminum (DIBAL) is added to the organic solvent and mixed in the magnet powder in a wet state. Thereby, an organometallic compound containing Dy or the like or Nd can be dispersed in an organic solvent, and an organometallic compound containing Dy or the like or Nd can be uniformly adhered to the surface of the particles of the Nd crystal particles 2.

此處,作為上述金屬錯合物,尤其是較理想為使用配位基為烷基之金屬烷基錯合物。尤其理想為包含環戊二烯基、甲基、苄基、異丁基、苯基、辛基、乙基環戊二烯基、異丙基環戊二烯基、四甲基環戊二烯基或五甲基環戊二烯基之金屬錯合物,或者乙炔金屬錯合物。作為此種金屬錯合物,例如有:三(乙基環戊二烯基)鏑(III)、三(異丙基環戊二烯基)鋱(III)、雙(環戊二烯基)鎂(II)、雙(環戊二烯基)二苄基鈮(IV)、三氫化雙(五甲基二環戊二烯基)鈮(V)、雙(環戊二烯基)二甲基鈦(IV)、雙(環戊二烯基)二甲基鋯(IV)、二氫化雙(環戊二烯基)鋯 (IV)、三(四甲基環戊二烯基)釹(III)、三辛基鋁(III)、二苯基鋅(II)、三苯基鉍(III)、第三丁基炔化銀(I)、(2,4,6-三甲苯基)銀(I)、三環戊二烯基鎵(III)。並且,於本發明中,尤其為了提高永久磁石1之磁性能,使用Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb作為金屬錯合物之中心金屬。 Here, as the above metal complex, it is particularly preferred to use a metal alkyl complex in which a ligand is an alkyl group. Particularly preferred is a cyclopentadienyl group, a methyl group, a benzyl group, an isobutyl group, a phenyl group, an octyl group, an ethylcyclopentadienyl group, an isopropylcyclopentadienyl group, a tetramethylcyclopentadiene. a metal or pentamethylcyclopentadienyl metal complex, or an acetylene metal complex. Examples of such a metal complex include tris(ethylcyclopentadienyl)ruthenium (III), tris(isopropylcyclopentadienyl)ruthenium (III), and bis(cyclopentadienyl). Magnesium (II), bis(cyclopentadienyl)dibenzyl ruthenium (IV), bis(pentamethyldicyclopentadienyl) ruthenium (V), bis(cyclopentadienyl) dimethyl Titanium (IV), bis(cyclopentadienyl)dimethylzirconium (IV), dihydro(cyclopentadienyl)zirconium dihydride (IV), tris(tetramethylcyclopentadienyl) ruthenium (III), trioctyl aluminum (III), diphenyl zinc (II), triphenyl ruthenium (III), tert-butyl alkyne Silver (I), (2,4,6-trimethylphenyl)silver (I), tricyclopentadienyl gallium (III). Further, in the present invention, in particular, in order to improve the magnetic properties of the permanent magnet 1, Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb acts as the central metal of the metal complex.

又,若於適當之燒成條件下對添加有機金屬化合物之磁石粉末之成形體進行燒成,則可防止Dy等向Nd結晶粒子2內擴散滲透(固溶化)。藉此,於本發明中,即便添加Dy等,亦可於燒結後使Dy等僅偏靠於晶界。其結果,作為結晶粒整體(即,作為燒結磁石整體),成為核心之Nd2Fe14B金屬間化合物相占較大之體積比例之狀態。藉此,可抑制該磁石之殘留磁通密度(使外部磁場之強度為0時之磁通密度)之降低。 In addition, when the molded body of the magnet powder to which the organometallic compound is added is fired under appropriate firing conditions, diffusion or penetration (solid solution) of Dy or the like into the Nd crystal particles 2 can be prevented. Therefore, in the present invention, even if Dy or the like is added, Dy or the like can be biased only to the grain boundary after sintering. As a result, as a whole of the crystal grains (that is, as a whole of the sintered magnet), the core Nd 2 Fe 14 B intermetallic compound phase accounts for a large volume ratio. Thereby, the decrease in the residual magnetic flux density of the magnet (the magnetic flux density when the intensity of the external magnetic field is 0) can be suppressed.

又,通常認為若燒結後之各Nd結晶粒子2為緻密之狀態,則於各Nd結晶粒子2間傳播交換相互作用。其結果,於自外部施加磁場之情形時,容易發生各結晶粒子之磁化反轉,即便能夠暫且將燒結後之結晶粒子分別設為單磁區結構,保磁力亦降低。然而,於本發明中,藉由塗佈於Nd結晶粒子2之表面之非磁性之金屬偏靠層3,將Nd結晶粒子2間之交換相互作用切斷,即便於自外部施加磁場之情形時,亦可防止各結晶粒子之磁化反轉。 Moreover, it is considered that if each of the Nd crystal particles 2 after sintering is in a dense state, exchange interaction occurs between the respective Nd crystal particles 2. As a result, when a magnetic field is applied from the outside, magnetization reversal of each crystal particle is likely to occur, and even if the crystal particles after sintering are temporarily set to a single magnetic domain structure, the coercive force is also lowered. However, in the present invention, the exchange interaction between the Nd crystal particles 2 is cut by the non-magnetic metal biasing layer 3 applied to the surface of the Nd crystal particles 2, even when a magnetic field is applied from the outside. It is also possible to prevent magnetization reversal of each crystal particle.

又,於本發明中,由至少包含Cu之層構成金屬偏靠層3,因此亦作為使燒結後之永久磁石1中之富Nd相均勻地分散而提高保磁力的方法發揮功能。 Further, in the present invention, since the metal offset layer 3 is formed of a layer containing at least Cu, it also functions as a method of uniformly dispersing the Nd-rich phase in the permanent magnet 1 after sintering to increase the coercive force.

又,若由尤其包含作為高熔點金屬之V、Mo、Zr、Ta、Ti、W或Nb之層構成金屬偏靠層3,則塗佈於Nd結晶粒子2之表面之金屬偏靠層3於進行永久磁石1之燒結時亦作為抑制Nd結晶粒子2之平均粒徑增加之所謂晶粒成長的方法發揮功能。 Further, when the metal bias layer 3 is composed of a layer containing V, Mo, Zr, Ta, Ti, W or Nb as a high melting point metal, the metal layer 3 applied to the surface of the Nd crystal particle 2 is When the permanent magnet 1 is sintered, it also functions as a method of suppressing so-called grain growth in which the average particle diameter of the Nd crystal particles 2 is increased.

另一方面,若由尤其包含磁氣各向異性較高之Dy或Tb之層構成金屬偏靠層3,則亦作為抑制逆磁區之產生而提高保磁力(阻止磁化反轉)之方法發揮功能。 On the other hand, when the metal bias layer 3 is composed of a layer including Dy or Tb having a high magnetic anisotropy, the method of suppressing the generation of the antimagnetic region and improving the coercive force (preventing the magnetization reversal) is also exerted. Features.

又,若由尤其包含Al之層構成金屬偏靠層3,則亦作為與Cu一併使燒結後之永久磁石1中之富Nd相均勻地分散而提高保磁力之方法發揮功能。 Further, when the metal offset layer 3 is made of a layer containing, in particular, Al, it functions as a method of uniformly dispersing the Nd-rich phase in the permanent magnet 1 after sintering and increasing the coercive force.

又,於由包含其他Ag、Ga、Co、Bi、Zn或Mg之層構成金屬偏靠層3之情形時,亦可期待利用晶界控制或晶粒成長抑制之保磁力提高等提高永久磁石之磁性能的效果。 Further, in the case where the metal bias layer 3 is composed of a layer containing other Ag, Ga, Co, Bi, Zn or Mg, it is also expected to improve the permanent magnet by the grain boundary control or the increase in the coercive force of the grain growth suppression. The effect of magnetic properties.

又,若設為添加包含Nd之有機金屬化合物之構成,則可於燒結後之永久磁石1中使富Nd相均勻地分散。又,即便於製造過程中稀土類元素與氧或碳結合,相對於化學計量組成,稀土類元素亦充足,可抑制燒結後之永久磁石1中產生αFe。 Moreover, when the structure of the organometallic compound containing Nd is added, the Nd-rich phase can be uniformly dispersed in the permanent magnet 1 after sintering. Further, even if the rare earth element is combined with oxygen or carbon during the production process, the rare earth element is sufficient with respect to the stoichiometric composition, and generation of αFe in the permanent magnet 1 after sintering can be suppressed.

又,Nd結晶粒子2之粒徑D較理想為設為0.2μm~1.2μm,較佳為設為0.3μm左右。又,若金屬偏靠層3之厚度d為2nm左右,則可獲得利用金屬偏靠層3之效果(抑制晶粒成長、切斷交換相互作用、提高保磁力等)。其中,若金屬偏靠層3之厚度d變得過大,則未發現磁性之非磁性成分之含有率變大,因此殘留磁通密度降低。 Further, the particle diameter D of the Nd crystal particles 2 is preferably 0.2 μm to 1.2 μm, preferably about 0.3 μm. Further, when the thickness d of the metal bias layer 3 is about 2 nm, the effect of using the metal offset layer 3 (suppressing grain growth, cutting exchange interaction, and increasing coercive force) can be obtained. However, when the thickness d of the metal bias layer 3 is excessively large, the content ratio of the nonmagnetic nonmagnetic component is not increased, and thus the residual magnetic flux density is lowered.

再者,作為使Cu等偏靠於Nd結晶粒子2之晶界之構成,亦可設為如圖3所示般使包含Cu等之粒4散佈於Nd結晶粒子2之晶界之構成。即便為圖3所示之構成,亦可獲得相同之效果(抑制晶粒成長、切斷交換相互作用、提高保磁力等)。再者,關於以何種方式使Cu等偏靠於Nd結晶粒子2之晶界,例如可藉由SEM(Scanning Electron Microscope,掃描式電子顯微鏡)、FIB(Focused Ion Beam,聚焦離子束)/SEM系統、TEM(Transmission Electron Microscopy,穿透式電子顯微鏡)、三維原子探針法而進行確認。 In addition, as a structure in which Cu or the like is biased against the grain boundary of the Nd crystal particles 2, as shown in FIG. 3, the grain 4 containing Cu or the like may be dispersed in the grain boundary of the Nd crystal particles 2. Even in the configuration shown in Fig. 3, the same effect (suppression of grain growth, cutting exchange interaction, improvement of coercive force, etc.) can be obtained. Further, regarding the manner in which Cu or the like is biased against the grain boundary of the Nd crystal particles 2, for example, SEM (Scanning Electron Microscope), FIB (Focused Ion Beam), and SEM can be used. The system, TEM (Transmission Electron Microscopy), and three-dimensional atom probe method were used for confirmation.

又,金屬偏靠層3無需為僅由Cu化合物、Al化合物、Dy化合物、Tb化合物、Nb化合物、V化合物、Mo化合物、Zr化合物、Ta化合物、Ti化合物、Ag化合物、Ga化合物、Co化合物、Bi化合物、Zn化合物、Mg化合物或W化合物(以下稱為Cu等化合物)構成之層,亦可為包含Cu等化合物與Nd化合物之混合體之層。於此情形時,形成包含Cu等化合物與Nd化合物之混合體之層。其結果,可助長Nd磁石粉末之燒結時之液相燒結。 Further, the metal offset layer 3 need not be only a Cu compound, an Al compound, a Dy compound, a Tb compound, a Nb compound, a V compound, a Mo compound, a Zr compound, a Ta compound, a Ti compound, an Ag compound, a Ga compound, a Co compound, or the like. A layer composed of a Bi compound, a Zn compound, a Mg compound or a W compound (hereinafter referred to as a compound such as Cu) may be a layer containing a mixture of a compound such as Cu and a Nd compound. In this case, a layer containing a mixture of a compound such as Cu and a Nd compound is formed. As a result, liquid phase sintering at the time of sintering of the Nd magnet powder can be promoted.

此處,永久磁石1係具備例如0.05mm~10mm(例如1mm)之厚度之薄膜狀之永久磁石。永久磁石1係如下所述般藉由對利用壓粉成形而成形之成形體或由混合有磁石粉末與黏合劑之混合物成形而成之成形體(生坯)進行燒結而製造。又,生坯係如下所述般藉由使混合有磁石粉末與黏合劑之混合物(漿料或複合物)成形為特定形狀(例如片材形狀、塊體形狀、最終製品形狀等)而製作。再者,亦可暫且使混合物成形為最終製品形狀以外之形狀,其後進行沖裁加工、切削加工、變形加工等,藉此成為形成最終製品形狀之構成。又,尤其是若成為於暫且使混合物形成片材形狀後加工成最終製品形狀之構成,則可藉由以連續步驟進行生產而提高生產性,又,亦可提高成形之精度。於使混合物形成片材形狀之情形時,製成具備例如0.05mm~10mm(例如1mm)之厚度之薄膜狀之片材構件。再者,即便於形成片材形狀之情形時,只要積層複數片,則亦可製造大型之永久磁石1。 Here, the permanent magnet 1 is a film-shaped permanent magnet having a thickness of, for example, 0.05 mm to 10 mm (for example, 1 mm). The permanent magnet 1 is produced by sintering a molded body formed by powder molding or a molded body (green body) obtained by mixing a mixture of a magnet powder and a binder as described below. Further, the green body is produced by molding a mixture (slurry or composite) in which a mixture of a magnet powder and a binder is mixed into a specific shape (for example, a sheet shape, a block shape, a final product shape, etc.) as follows. Further, the mixture may be temporarily molded into a shape other than the shape of the final product, and then subjected to punching, cutting, deformation processing, or the like, thereby forming a shape of the final product. Further, in particular, when the mixture is formed into a sheet shape and then processed into a final product shape, productivity can be improved by production in a continuous step, and the precision of molding can be improved. When the mixture is formed into a sheet shape, a film member having a film thickness of, for example, 0.05 mm to 10 mm (for example, 1 mm) is formed. Further, even in the case of forming a sheet shape, a large permanent magnet 1 can be produced by laminating a plurality of sheets.

又,於本發明中,尤其於藉由對生坯進行燒結而製造永久磁石1之情形時,混合於磁石粉末中之黏合劑可使用樹脂、長鏈烴、脂肪酸酯或該等之混合物等。 Further, in the present invention, in particular, when the permanent magnet 1 is produced by sintering the green body, the binder mixed in the magnet powder may be a resin, a long-chain hydrocarbon, a fatty acid ester or a mixture thereof. .

進而,於黏合劑使用樹脂之情形時,較佳為使用結構中不含氧原子且具有解聚性之聚合物。又,如下所述般,為了再利用使磁石粉末與黏合劑之混合物成形為最終製品形狀時所產生之混合物之殘餘 物,以及為了於將所成形之混合物加熱使之軟化之狀態下進行磁場配向,而使用熱塑性樹脂。具體而言,包含選自以下通式(1)所表示之單體中之1種或2種以上之聚合物或共聚物的聚合物較為適合。 Further, in the case where a resin is used as the binder, it is preferred to use a polymer having no oxygen atom and having depolymerization property in the structure. Further, as described below, in order to reuse the residue of the mixture produced by molding the mixture of the magnet powder and the binder into the shape of the final product A thermoplastic resin is used for the magnetic field alignment in order to soften the formed mixture by heating it. Specifically, a polymer containing one or two or more polymers or copolymers selected from the monomers represented by the following formula (1) is suitable.

(其中,R1及R2表示氫原子、低級烷基、苯基或乙烯基) (wherein R 1 and R 2 represent a hydrogen atom, a lower alkyl group, a phenyl group or a vinyl group)

作為符合上述條件之聚合物,例如有:作為異丁烯之聚合物之聚異丁烯(PIB)、作為異戊二烯之聚合物之聚異戊二烯(異戊二烯橡膠、IR)、作為1,3-丁二烯之聚合物之聚丁二烯(丁二烯橡膠、BR)、作為苯乙烯之聚合物之聚苯乙烯、作為苯乙烯與異戊二烯之共聚物之苯乙烯-異戊二烯嵌段共聚物(SIS)、作為異丁烯與異戊二烯之共聚物之丁基橡膠(IIR)、作為苯乙烯與丁二烯之共聚物之苯乙烯-丁二烯嵌段共聚物(SBS)、作為2-甲基-1-戊烯之聚合物之2-甲基-1-戊烯聚合樹脂、作為2-甲基-1-丁烯之聚合物之2-甲基-1-丁烯聚合樹脂、作為α-甲基苯乙烯之聚合物之α-甲基苯乙烯聚合樹脂等。再者,為了對α-甲基苯乙烯聚合樹脂賦予柔軟性,較理想為添加低分子量之聚異丁烯。又,作為黏合劑中所使用之樹脂,亦可設為包含少量含有氧原子之單體之聚合物或共聚物(例如聚甲基丙烯酸丁酯或聚甲基丙烯酸甲酯等)之構成。進而,亦可使不屬於上述通式(1)之單體進行部分共聚合。即便於此情形時,亦可達成本案發明之目的。 Examples of the polymer satisfying the above conditions include polyisobutylene (PIB) which is a polymer of isobutylene, polyisoprene (isoprene rubber, IR) which is a polymer of isoprene, and 1, Polybutadiene (butadiene rubber, BR) of 3-butadiene polymer, polystyrene as polymer of styrene, styrene-isoprene as copolymer of styrene and isoprene Diene block copolymer (SIS), butyl rubber (IIR) as a copolymer of isobutylene and isoprene, styrene-butadiene block copolymer as a copolymer of styrene and butadiene ( SBS), 2-methyl-1-pentene polymer resin as a polymer of 2-methyl-1-pentene, 2-methyl-1- as a polymer of 2-methyl-1-butene Butylene polymer resin, α-methylstyrene polymer resin as a polymer of α-methylstyrene, and the like. Further, in order to impart flexibility to the α-methylstyrene polymer resin, it is preferred to add a low molecular weight polyisobutylene. Further, the resin used as the binder may be a polymer or a copolymer (for example, polybutyl methacrylate or polymethyl methacrylate) containing a small amount of a monomer containing an oxygen atom. Further, a monomer which does not belong to the above formula (1) may be partially copolymerized. Even in this case, the object of the invention can be achieved.

再者,作為黏合劑中所使用之樹脂,為了適當地進行磁場配向,較理想為使用於250℃以下軟化之熱塑性樹脂、更具體而言為玻 璃轉移點或熔點250℃以下之熱塑性樹脂。 Further, as the resin used in the binder, in order to appropriately perform magnetic field alignment, it is preferred to use a thermoplastic resin which is softened at 250 ° C or lower, more specifically, glass. A glass transition point or a thermoplastic resin having a melting point of 250 ° C or less.

另一方面,於黏合劑使用長鏈烴之情形時,較佳為於室溫下為固體且於室溫以上為液體之長鏈飽和烴(長鏈烷烴)。具體而言,較佳為使用碳數為18以上之長鏈飽和烴。並且,如下所述般對磁石粉末與黏合劑之混合物進行磁場配向時,於以長鏈烴之熔點以上之溫度加熱混合物使之軟化之狀態下進行磁場配向。 On the other hand, in the case where a long-chain hydrocarbon is used as the binder, a long-chain saturated hydrocarbon (long-chain alkane) which is solid at room temperature and liquid at room temperature or higher is preferable. Specifically, it is preferred to use a long-chain saturated hydrocarbon having a carbon number of 18 or more. Further, when the mixture of the magnet powder and the binder is subjected to magnetic field alignment as described below, the mixture is heated in a state where the mixture is heated at a temperature higher than the melting point of the long-chain hydrocarbon to soften the magnetic field.

又,於黏合劑使用脂肪酸酯之情形時,亦同樣較佳為使用於室溫下為固體且於室溫以上為液體之硬脂酸甲酯或山萮酸甲酯等。並且,如下所述般對磁石粉末與黏合劑之混合物進行磁場配向時,於以脂肪酸酯之熔點以上之溫度加熱混合物使之軟化之狀態下進行磁場配向。 Further, when a fatty acid ester is used as the binder, it is also preferred to use methyl stearate or methyl behenate which is solid at room temperature and liquid at room temperature or higher. Further, when the mixture of the magnet powder and the binder is subjected to magnetic field alignment as described below, the magnetic field alignment is performed in a state where the mixture is heated and softened at a temperature equal to or higher than the melting point of the fatty acid ester.

藉由使用滿足上述條件之黏合劑作為混合於磁石粉末中之黏合劑,可減少磁石內所含之碳量及氧量。具體而言,將燒結後殘存於磁石之碳量設為2000ppm以下、更佳為1000ppm以下。又,將燒結後殘存於磁石之氧量設為5000ppm以下、更佳為2000ppm以下。 By using a binder satisfying the above conditions as a binder mixed in the magnet powder, the amount of carbon and the amount of oxygen contained in the magnet can be reduced. Specifically, the amount of carbon remaining in the magnet after sintering is 2,000 ppm or less, more preferably 1,000 ppm or less. Moreover, the amount of oxygen remaining in the magnet after sintering is 5,000 ppm or less, more preferably 2,000 ppm or less.

又,為了於使漿料或經加熱熔融之複合物成形時提高成形體之厚度精度,黏合劑之添加量係設為適當地填充磁石粒子間之空隙之量。例如,黏合劑相對於磁石粉末與黏合劑之合計量之比率設為1wt%~40wt%、更佳為2wt%~30wt%、進而較佳為3wt%~20wt%。 Further, in order to increase the thickness precision of the molded body when molding the slurry or the composite which is heated and melted, the amount of the binder added is an amount which appropriately fills the space between the magnet particles. For example, the ratio of the binder to the total amount of the magnet powder and the binder is from 1 wt% to 40 wt%, more preferably from 2 wt% to 30 wt%, still more preferably from 3 wt% to 20 wt%.

[永久磁石之製造方法] [Method of manufacturing permanent magnet]

繼而,使用圖4及圖5對本發明之永久磁石1之製造方法進行說明。圖4及圖5係表示本實施形態之永久磁石1之製造步驟之說明圖。 Next, a method of manufacturing the permanent magnet 1 of the present invention will be described with reference to FIGS. 4 and 5. 4 and 5 are explanatory views showing the manufacturing steps of the permanent magnet 1 of the present embodiment.

首先,製造包含特定分率之Nd-Fe-B(例如Nd:32.7wt%、Fe(電解鐵):65.96wt%、B:1.34wt%)之鑄錠(ingot)。其後,藉由搗碎機或壓碎機等將鑄錠粗粉碎成200μm左右之大小。或者,將鑄錠熔解 薄,利用帶連鑄法(strip casting)製作薄片,並利用氫壓碎法使之粗粉化。藉此,獲得粗粉碎磁石粉末10。 First, an ingot containing a specific fraction of Nd-Fe-B (for example, Nd: 32.7 wt%, Fe (electrolytic iron): 65.96 wt%, B: 1.34 wt%) is produced. Thereafter, the ingot is roughly pulverized to a size of about 200 μm by a masher, a crusher or the like. Or, melt the ingot Thin, strips are produced by strip casting, and coarsely pulverized by hydrogen crushing. Thereby, the coarsely pulverized magnet powder 10 is obtained.

繼而,藉由利用珠磨機11之濕式法或使用噴射磨機之乾式法等對粗粉碎磁石粉末10進行微粉碎。例如,於使用利用珠磨機11之濕式法之微粉碎中,於溶劑中將粗粉碎磁石粉末10微粉碎成特定範圍之粒徑(例如0.1μm~5.0μm),並且使磁石粉末分散於溶劑中。又,用於粉碎之溶劑之種類並無特別限制,可使用:異丙醇、乙醇、甲醇等醇類,乙酸乙酯等酯類,戊烷、己烷等低級烴類,苯、甲苯、二甲苯等芳香族類,酮類,該等之混合物等。再者,較佳為使用溶劑中不含氧原子之溶劑。 Then, the coarsely pulverized magnet powder 10 is finely pulverized by a wet method using a bead mill 11 or a dry method using a jet mill. For example, in the fine pulverization using the wet method using the bead mill 11, the coarsely pulverized magnet powder 10 is finely pulverized into a specific range of particle diameter (for example, 0.1 μm to 5.0 μm) in a solvent, and the magnet powder is dispersed. In the solvent. Further, the type of the solvent to be pulverized is not particularly limited, and examples thereof include alcohols such as isopropyl alcohol, ethanol, and methanol, esters such as ethyl acetate, and lower hydrocarbons such as pentane and hexane, and benzene, toluene, and An aromatic group such as toluene, a ketone, a mixture of the above, and the like. Further, it is preferred to use a solvent which does not contain an oxygen atom in the solvent.

另一方面,於使用利用噴射磨機之乾式法之微粉碎中,於(a)含氧量實質上為0%之包含氮氣、氬氣、氦氣等惰性氣體之環境中、或(b)含氧量為0.0001~0.5%之包含氮氣、氬氣、氦氣等惰性氣體之環境中,藉由噴射磨機對經粗粉碎之磁石粉末進行微粉碎,形成具有特定範圍之粒徑(例如0.7μm~5.0μm)之平均粒徑之微粉末。再者,所謂氧濃度實質上為0%,並不限定於氧濃度完全為0%之情形時,係表示亦可含有於微粉之表面形成極少氧化覆膜之程度之量之氧。 On the other hand, in the fine pulverization using a dry method using a jet mill, (a) an atmosphere containing an inert gas such as nitrogen, argon or helium in an oxygen content of substantially 0%, or (b) In an environment containing an inert gas such as nitrogen gas, argon gas or helium gas having an oxygen content of 0.0001 to 0.5%, the coarsely pulverized magnet powder is finely pulverized by a jet mill to form a particle diameter having a specific range (for example, 0.7). A fine powder having an average particle diameter of μm to 5.0 μm). In addition, when the oxygen concentration is substantially 0%, it is not limited to the case where the oxygen concentration is completely 0%, and it means that oxygen may be contained in an amount which is extremely small in the surface of the fine powder.

繼而,藉由對濕式粉碎後之包含磁石粉末之溶劑添加有機金屬化合物並進行混合,而於磁石粉末之粒子表面附著有機金屬化合物。再者,作為所熔解之有機金屬化合物,較理想為使用如上所述般包含Dy等或Nd並且不含氧原子及氮原子之有機金屬化合物、更具體為中心金屬為Dy等或Nd之金屬錯合物(例如:三(乙基環戊二烯基)鏑(III)、三(異丙基環戊二烯基)鋱(III)、雙(環戊二烯基)鎂(II)、雙(環戊二烯基)二苄基鈮(IV)、三氫化雙(五甲基二環戊二烯基)鈮(V)、雙(環戊二烯基)二甲基鈦(IV)、雙(環戊二烯基)二甲基鋯(IV)、二氫化雙(環戊二烯基)鋯(IV)、三(四甲基環戊二烯基)釹(III)、三辛基鋁(III)、二 苯基鋅(II)、三苯基鉍(III)、第三丁基炔化銀(I)、(2,4,6-三甲苯基)銀(I)、三環戊二烯基鎵(III)等)或DIBAL。又,所熔解之有機金屬化合物之量並無特別限制,Dy等相對於燒結後之磁石之含量較佳為設為成為0.001wt%~10wt%、較佳為0.01wt%~5wt%之量。再者,有機金屬化合物之添加亦可設為於粉碎步驟之前對溶劑添加,同時進行粉碎與混合之構成。又,於使用利用噴射磨機之乾式法之情形時,藉由將粉碎後之磁石粉末與有機金屬化合物分別添加至溶劑中並進行混合,而於磁石粉末之粒子表面附著有機金屬化合物。其後,以真空乾燥等使濕式粉碎後之溶劑中所含之磁石粉末乾燥,提取乾燥之磁石粉末。 Then, an organometallic compound is attached to the surface of the particles of the magnet powder by adding and mixing the organometallic compound to the solvent containing the magnet powder after the wet pulverization. Further, as the molten organometallic compound, it is preferred to use an organometallic compound containing Dy or the like as described above and containing no oxygen atom and nitrogen atom, more specifically, a metal metal of Dy or the like or Nd. (eg, tris(ethylcyclopentadienyl)ruthenium (III), tris(isopropylcyclopentadienyl)ruthenium (III), bis(cyclopentadienyl)magnesium (II), double (cyclopentadienyl) dibenzyl ruthenium (IV), bis(pentamethyldicyclopentadienyl) ruthenium (V), bis(cyclopentadienyl)dimethyltitanium (IV), Bis(cyclopentadienyl)dimethylzirconium (IV), di(cyclopentadienyl)zirconium(IV) dihydride, tris(tetramethylcyclopentadienyl)ruthenium(III), trioctyl Aluminum (III), two Phenyl zinc (II), triphenyl ruthenium (III), tributyl butyl acetylide (I), (2,4,6-trimethylphenyl) silver (I), tricyclopentadienyl gallium ( III) etc.) or DIBAL. Further, the amount of the organometallic compound to be melted is not particularly limited, and the content of Dy or the like with respect to the magnet after sintering is preferably 0.001% by weight to 10% by weight, preferably 0.01% by weight to 5% by weight. Further, the addition of the organometallic compound may be carried out by adding the solvent to the solvent before the pulverization step and simultaneously pulverizing and mixing. Further, in the case of using a dry method using a jet mill, an organometallic compound is adhered to the surface of the particles of the magnet powder by separately adding and mixing the pulverized magnet powder and the organometallic compound to the solvent. Thereafter, the magnet powder contained in the solvent after the wet pulverization is dried by vacuum drying or the like to extract the dried magnet powder.

繼而,使粒子表面附著有機金屬化合物而成之磁石粉末成形為所需形狀。再者,磁石粉末之成形例如包括係使用模具成形為所需形狀之壓粉成形,或者使混合有磁石粉末與黏合劑之混合物成形為所需形狀的生坯成形。進而,壓粉成形包括將乾燥之微粉末填充至模腔中之乾式法、及不使包含磁石粉末之漿料乾燥而填充至模腔中之濕式法。另一方面,於生坯成形中,可使混合物直接成形為最終製品形狀,亦可使混合物暫且成形為最終製品形狀以外之形狀,進行磁場配向,其後進行沖裁加工、切削加工、變形加工等,藉此形成最終製品形狀。於以下實施例中,使混合物暫且成形為片材形狀(以下稱為生片)後,加工成最終製品形狀。又,於使混合物成形為尤其是片材形狀之情形時,例如有利用如下方式之成形:於將混合有磁石粉末與黏合劑之複合物加熱後使其成形為片材形狀的熱熔塗敷,或者藉由將包含磁石粉末、黏合劑及有機溶劑之漿料塗敷於基材上而使其成形為片狀之漿料塗敷等。 Then, a magnet powder obtained by attaching an organometallic compound to the surface of the particle is formed into a desired shape. Further, the formation of the magnet powder includes, for example, powder molding in which a mold is formed into a desired shape, or a green mold in which a mixture of the magnet powder and the binder is mixed into a desired shape. Further, the powder molding includes a dry method in which the dried fine powder is filled into the cavity, and a wet method in which the slurry containing the magnet powder is not dried and filled into the cavity. On the other hand, in the green molding, the mixture can be directly formed into the shape of the final product, or the mixture can be temporarily formed into a shape other than the shape of the final product to perform magnetic field alignment, and then subjected to punching, cutting, and deformation processing. Etc., thereby forming the final article shape. In the following examples, the mixture was temporarily formed into a sheet shape (hereinafter referred to as a green sheet) and then processed into a final product shape. Further, in the case of forming the mixture into a sheet shape in particular, for example, it is formed by hot-melt coating in which a composite in which a mixture of a magnet powder and a binder is heated and formed into a sheet shape is formed. Or, a slurry containing a magnet powder, a binder, and an organic solvent is applied to a substrate to form a sheet-like slurry coating or the like.

以下,特別對使用熱熔塗敷之生片成形進行說明。 Hereinafter, the green sheet molding using hot melt coating will be specifically described.

首先,藉由將磁石粉末與黏合劑混合,而製作包含磁石粉末及 黏合劑之粉末狀之混合物(複合物)12。此處,作為黏合劑,可如上所述般使用樹脂、長鏈烴、脂肪酸酯或該等之混合物等。例如較佳為:於使用樹脂之情形時使用包含結構中不含氧原子且具有解聚性之聚合物的熱塑性樹脂,另一方面,於使用長鏈烴之情形時使用於室溫下為固體且於室溫以上為液體之長鏈飽和烴(長鏈烷烴)。又,於使用脂肪酸酯之情形時,較佳為使用硬脂酸甲酯或山萮酸甲酯等。又,黏合劑之添加量係設為如上所述般添加後之複合物12中之黏合劑相對於磁石粉末與黏合劑之合計量之比率成為1wt%~40wt%、更佳為2wt%~30wt%、進而較佳為3wt%~20wt%的量。 First, a magnet powder is prepared by mixing a magnet powder and a binder. A powdery mixture (composite) of the binder 12 . Here, as the binder, a resin, a long-chain hydrocarbon, a fatty acid ester, a mixture of these, or the like can be used as described above. For example, it is preferred to use a thermoplastic resin containing a polymer having no oxygen atom and having depolymerization in the case of using a resin, and, on the other hand, a solid at room temperature in the case of using a long-chain hydrocarbon. And a long-chain saturated hydrocarbon (long-chain alkane) which is liquid above room temperature. Further, in the case of using a fatty acid ester, methyl stearate or methyl behenate or the like is preferably used. Further, the amount of the binder added is such that the ratio of the binder in the composite 12 added as described above to the total amount of the magnet powder and the binder is from 1% by weight to 40% by weight, more preferably from 2% by weight to 30% by weight. The amount of %, further preferably from 3 wt% to 20 wt%.

又,為了提高後續進行之磁場配向步驟中之配向度,亦可於上述複合物12中添加助長配向之添加劑。作為助長配向之添加劑,例如可使用烴系之添加劑,尤其理想為使用具有極性(具體而言,酸解離常數pKa未達41)之添加劑。又,添加劑之添加量依存於磁石粉末之粒徑,磁石粉末之粒徑越小,越需要增加添加量。作為具體添加量,相對於磁石粉末,設為0.1份~10份、更佳為1份~8份。並且,磁石粉末中所添加之添加劑附著於磁石粒子之表面,於下述磁場配向處理中具有輔助磁石粒子之旋動之作用。其結果,於施加磁場時配向容易進行,可使磁石粒子之易磁化軸方向一致於同一方向(即,提高配向度)。尤其是,於向磁石粉末中添加黏合劑之情形時,於粒子表面存在黏合劑,故而配向時之摩擦力提高,粒子之配向性降低,因此加入添加劑之效果變得更明顯。 Further, in order to increase the degree of alignment in the subsequent magnetic field alignment step, an additive for promoting alignment may be added to the composite 12. As the additive for promoting the alignment, for example, a hydrocarbon-based additive can be used, and it is particularly preferable to use an additive having a polarity (specifically, an acid dissociation constant pKa of less than 41). Further, the amount of the additive to be added depends on the particle diameter of the magnet powder, and the smaller the particle diameter of the magnet powder, the more the amount of addition is required. The specific addition amount is 0.1 parts to 10 parts, more preferably 1 part to 8 parts, per part of the magnet powder. Further, the additive added to the magnet powder adheres to the surface of the magnet particles, and has an effect of assisting the rotation of the magnet particles in the magnetic field alignment treatment described below. As a result, the alignment is easily performed when a magnetic field is applied, and the direction of the easy magnetization axis of the magnet particles can be made to coincide with the same direction (that is, the alignment degree is improved). In particular, when a binder is added to the magnet powder, a binder is present on the surface of the particles, so that the frictional force at the time of alignment is improved, and the alignment property of the particles is lowered, so that the effect of adding an additive becomes more remarkable.

再者,黏合劑之添加係於包含氮氣、氬氣、氦氣等惰性氣體之環境下進行。再者,磁石粉末與黏合劑之混合例如藉由向有機溶劑中分別投入磁石粉末與黏合劑,並利用攪拌機進行攪拌而進行。又,為了促進混練性,亦可進行加熱攪拌。並且,藉由於攪拌後將包含磁石粉末與黏合劑之有機溶劑加熱而使有機溶劑氣化,而提取複合物12。 又,磁石粉末與黏合劑之混合較理想為於包含氮氣、氬氣、氦氣等惰性氣體之環境下進行。又,尤其於利用濕式法將磁石粉末粉碎之情形時,亦可設為如下構成:可不自用於粉碎之溶劑中提取磁石粉末,而將黏合劑添加至溶劑中並進行混練,其後使溶劑揮發而獲得下述複合物12。 Further, the addition of the binder is carried out in an environment containing an inert gas such as nitrogen, argon or helium. Further, the mixing of the magnet powder and the binder is carried out, for example, by separately charging a magnet powder and a binder into an organic solvent and stirring the mixture with a stirrer. Further, in order to promote kneading, heating and stirring may be performed. Further, the composite 12 is extracted by heating an organic solvent containing a magnet powder and a binder after heating to vaporize the organic solvent. Further, the mixing of the magnet powder and the binder is preferably carried out in an atmosphere containing an inert gas such as nitrogen, argon or helium. Further, in particular, when the magnet powder is pulverized by the wet method, the magnet powder may be extracted from the solvent used for pulverization, and the binder may be added to the solvent and kneaded, and then the solvent may be used. Volatilization gave the following composite 12.

繼而,藉由使複合物12成形為片狀而製作生片。尤其是,於熱熔塗敷中,藉由將複合物12加熱而使複合物12熔融並成為流體狀,其後塗敷於分隔件等支持基材13上。其後,藉由進行散熱使之凝固,而於支持基材13上形成長條片狀之生片14。再者,將複合物12加熱熔融時之溫度根據所使用之黏合劑之種類或量而不同,設為50~300℃。其中,必須設為高於所使用之黏合劑之熔點的溫度。再者,於使用漿料塗敷之情形時,使磁石粉末及黏合劑(亦可進而包含助長配向之添加劑)分散於大量有機溶劑中,將漿料塗敷於分隔件等支持基材13上。其後,藉由進行乾燥使有機溶劑揮發,而於支持基材13上形成長條片狀之生片14。 Then, a green sheet is produced by forming the composite 12 into a sheet shape. In particular, in the hot melt coating, the composite 12 is melted and heated in a fluid state by heating the composite 12, and then applied to a support substrate 13 such as a separator. Thereafter, it is solidified by heat dissipation to form a long sheet-like green sheet 14 on the support substrate 13. Further, the temperature at which the composite 12 is heated and melted differs depending on the type or amount of the binder to be used, and is set to 50 to 300 °C. Among them, it must be set to a temperature higher than the melting point of the binder used. Further, in the case of using a slurry coating, the magnet powder and the binder (which may further contain an additive for promoting alignment) are dispersed in a large amount of an organic solvent, and the slurry is applied onto a support substrate 13 such as a separator. . Thereafter, the organic solvent is volatilized by drying to form a long sheet-like green sheet 14 on the support substrate 13.

此處,經熔融之複合物12之塗敷方式較佳為使用狹縫式模具方式或軋光輥方式等層厚控制性優異之方式。尤其是,為了實現較高之厚度精度,較理想為使用尤其層厚控制性優異(即,可於基材之表面塗敷高精度之厚度之層之方式)之模具方式或缺角輪塗敷方式。例如,於狹縫式模具方式中,藉由利用齒輪泵將進行加熱而成為流體狀之複合物12擠出並插入至模具而進行塗敷。又,於軋光輥方式中,向經加熱之兩根輥之間隙添加一定量之複合物12,一面使輥旋轉一面於支持基材13上塗敷因輥之熱熔融之複合物12。又,作為支持基材13,例如使用經聚矽氧處理之聚酯膜。進而較佳為藉由使用消泡劑或進行加熱真空脫泡等,以使展開層中不殘存氣泡之方式充分地進行脫泡處理。又,亦可設為如下構成:並非塗敷於支持基材13上,而是利用擠 出成形或射出成形使經熔融之複合物12成形為片狀並且擠出至支持基材13上,藉此於支持基材13上使生片14成形。 Here, the coating method of the molten composite 12 is preferably a method in which the layer thickness controllability such as a slit die method or a calender roll method is excellent. In particular, in order to achieve a high thickness precision, it is preferable to use a mold method or a notch wheel coating which is excellent in layer thickness control property (i.e., a layer which can apply a high-precision thickness layer on the surface of a substrate). the way. For example, in the slit die method, the composite 12 which is heated by the gear pump is extruded and inserted into a mold to perform coating. Further, in the calender roll method, a certain amount of the composite 12 is added to the gap between the two heated rolls, and the composite 12 which is thermally melted by the rolls is applied to the support substrate 13 while rotating the rolls. Further, as the support substrate 13, for example, a polyester film treated with polyfluorene oxide is used. Further, it is preferable to sufficiently perform the defoaming treatment so that air bubbles do not remain in the developed layer by using an antifoaming agent or heating vacuum defoaming. Further, it may be configured not to be applied to the support substrate 13, but to be squeezed. The forming or injection molding forms the melted composite 12 into a sheet shape and is extruded onto the support substrate 13, whereby the green sheet 14 is formed on the support substrate 13.

以下,使用圖6特別對利用狹縫式模具方式之生片14之形成步驟進一步詳細地進行說明。圖6係表示利用狹縫式模具方式之生片14之形成步驟的模式圖。 Hereinafter, the step of forming the green sheet 14 by the slit mold method will be described in more detail with reference to Fig. 6 . Fig. 6 is a schematic view showing a step of forming a green sheet 14 by a slit mold method.

如圖6所示,狹縫式模具方式中所使用之模具15係藉由使塊體16、17相互重合而形成,藉由塊體16、17之間之間隙而形成狹縫18及模腔(儲液部)19。模腔19與設置於塊體17之供給口20連通。並且,供給口20與由齒輪泵(未圖示)等構成之塗佈液之供給系統連接,對模腔19經由供給口20,利用定量泵等供給經計量之流體狀之複合物12。進而,供給至模腔19之流體狀之複合物12係向狹縫18送液,以單位時間一定量、寬度方向上均勻之壓力,根據預先設定之塗佈寬度自狹縫18之噴出口21噴出。另一方面,支持基材13係隨著塗佈輥22之旋轉,以預先設定之速度連續搬送。其結果,將所噴出之流體狀之複合物12以特定厚度塗佈於支持基材13,其後,進行散熱而凝固,藉此於支持基材13上使長條片狀之生片14成形。 As shown in FIG. 6, the mold 15 used in the slit mold method is formed by overlapping the blocks 16, 17 with each other, and the slit 18 and the cavity are formed by the gap between the blocks 16, 17. (liquid storage unit) 19. The cavity 19 communicates with the supply port 20 provided in the block 17. Further, the supply port 20 is connected to a supply system of a coating liquid composed of a gear pump (not shown) or the like, and supplies the measured fluid-like composite 12 to the cavity 19 via the supply port 20 by a metering pump or the like. Further, the fluid-like composite 12 supplied to the cavity 19 is supplied with liquid to the slit 18, and is supplied at a constant amount per unit time and uniformly in the width direction, and is ejected from the slit 21 of the slit 18 in accordance with a predetermined coating width. ejection. On the other hand, the support base material 13 is continuously conveyed at a predetermined speed as the coating roller 22 rotates. As a result, the discharged fluid-like composite 12 is applied to the support substrate 13 with a specific thickness, and then heat-dissipated and solidified, whereby the elongated sheet-like green sheet 14 is formed on the support substrate 13. .

又,於利用狹縫式模具方式之生片14之形成步驟中,較理想為對塗敷後之生片14之片材厚度進行實測,基於實測值對模具15與支持基材13間之間隙D進行反饋控制。又,較理想為使供給至模具15之流體狀之複合物12之量之變動儘可能地降低(例如抑制為±0.1%以下之變動),進而使塗敷速度之變動亦儘可能地降低(例如抑制為±0.1%以下之變動)。藉此,可進一步提高生片14之厚度精度。再者,所形成之生片14之厚度精度相對於設計值(例如1mm)設為±10%以內、更佳為±3%以內、進而較佳為±1%以內。再者,另一方面,軋光輥方式中,藉由同樣地基於實測值控制軋光條件,可控制複合物12於支持基材13上之轉印膜厚。 Further, in the step of forming the green sheet 14 by the slit mold method, it is preferable to actually measure the thickness of the sheet of the green sheet 14 after the application, and the gap between the mold 15 and the support substrate 13 based on the measured value. D performs feedback control. Moreover, it is preferable that the fluctuation of the amount of the fluid-like composite 12 supplied to the mold 15 is as small as possible (for example, the variation is suppressed to ±0.1% or less), and the fluctuation of the coating speed is also reduced as much as possible ( For example, the suppression is ±0.1% or less). Thereby, the thickness precision of the green sheet 14 can be further improved. Further, the thickness accuracy of the formed green sheet 14 is set to within ±10%, more preferably within ±3%, and even more preferably within ±1% with respect to the design value (for example, 1 mm). Further, on the other hand, in the calender roll method, by controlling the calendering conditions based on the measured values in the same manner, the transfer film thickness of the composite 12 on the support substrate 13 can be controlled.

再者,生片14之設定厚度較理想為設定於0.05mm~20mm之範圍內。若將厚度設為小於0.05mm,則必須進行多層積層,故而生產性降低。 Further, the thickness of the green sheet 14 is preferably set to be in the range of 0.05 mm to 20 mm. When the thickness is less than 0.05 mm, it is necessary to laminate a plurality of layers, so that productivity is lowered.

繼而,進行藉由上述熱熔塗敷形成於支持基材13上之生片14之磁場配向。具體而言,首先,藉由將與支持基材13一併連續搬送之生片14加熱而使生片14軟化。具體而言,進行軟化至生片14之黏度成為1~1500Pa.s、更佳為1~500Pa.s為止。藉此,可適當地進行磁場配向。 Then, the magnetic field alignment of the green sheet 14 formed on the support substrate 13 by the above-described hot melt coating is performed. Specifically, first, the green sheet 14 is softened by heating the green sheet 14 continuously conveyed together with the support base material 13. Specifically, the viscosity is softened until the green sheet 14 has a viscosity of 1 to 1500 Pa. s, more preferably 1~500Pa. s so far. Thereby, the magnetic field alignment can be appropriately performed.

再者,將生片14加熱時之溫度及時間根據所使用之黏合劑之種類或量而不同,例如設為100~250℃、0.1~60分鐘。其中,為了使生片14軟化,必須設為所使用之黏合劑之玻璃轉移點或熔點以上之溫度。又,作為將生片14加熱之加熱方式,例如有利用加熱板之加熱方式或將熱介質(聚矽氧油)用作熱源之加熱方式。繼而,對因加熱軟化之生片14之面內方向且長度方向施加磁場,藉此進行磁場配向。所施加之磁場之強度設為5000[Oe]~150000[Oe]、較佳為10000[Oe]~120000[Oe]。其結果,使生片14中所含之磁石結晶之C軸(易磁化軸)配向於一方向上。再者,作為施加磁場之方向,亦可對生片14之面內方向且寬度方向施加磁場。又,亦可設為同時對複數片生片14配向磁場之構成。 Further, the temperature and time when the green sheet 14 is heated vary depending on the type or amount of the binder to be used, and is, for example, 100 to 250 ° C for 0.1 to 60 minutes. However, in order to soften the green sheet 14, it is necessary to set the temperature of the glass transition point or the melting point of the binder to be used. Further, as a heating method for heating the green sheet 14, there is, for example, a heating method using a hot plate or a heating method using a heat medium (polyoxygenated oil) as a heat source. Then, a magnetic field is applied to the in-plane direction and the longitudinal direction of the green sheet 14 which is softened by heating, thereby performing magnetic field alignment. The intensity of the applied magnetic field is set to 5000 [Oe] to 150,000 [Oe], preferably 10,000 [Oe] to 120,000 [Oe]. As a result, the C-axis (easy magnetization axis) of the magnet crystal contained in the green sheet 14 is aligned in one direction. Further, as a direction in which the magnetic field is applied, a magnetic field may be applied to the in-plane direction and the width direction of the green sheet 14. Further, it is also possible to adopt a configuration in which a plurality of green sheets 14 are simultaneously aligned with a magnetic field.

進而,於對生片14施加磁場時,可設為與加熱步驟同時進行施加磁場之步驟之構成,亦可於進行加熱步驟後且生片凝固前進行施加磁場之步驟。又,亦可設為於藉由熱熔塗敷所塗敷之生片14凝固前進行磁場配向之構成。於此情形時,無需加熱步驟。 Further, when a magnetic field is applied to the green sheet 14, a step of applying a magnetic field simultaneously with the heating step may be employed, and a step of applying a magnetic field may be performed after the heating step and before the green sheet is solidified. Further, it is also possible to adopt a configuration in which the green sheet 14 coated by the hot melt coating is subjected to magnetic field alignment before solidification. In this case, no heating step is required.

繼而,使用圖7對生片14之加熱步驟及磁場配向步驟更詳細地進行說明。圖7係表示生片14之加熱步驟及磁場配向步驟之模式圖。再者,於圖7所示之例中,對與加熱步驟同時進行磁場配向步驟之例進 行說明。 Next, the heating step and the magnetic field alignment step of the green sheet 14 will be described in more detail using FIG. Fig. 7 is a schematic view showing a heating step and a magnetic field alignment step of the green sheet 14. Furthermore, in the example shown in FIG. 7, the magnetic alignment step is performed simultaneously with the heating step. Line description.

如圖7所示,對上述藉由狹縫式模具方式所塗敷之生片14之加熱及磁場配向係對藉由輥進行連續搬送之狀態之長條片狀之生片14而進行。即,將用以進行加熱及磁場配向之裝置配置於塗敷裝置(模具等)之下游側,藉由與上述塗敷步驟連續之步驟而進行。 As shown in Fig. 7, the heating and the magnetic field alignment of the green sheet 14 coated by the slit die method are performed on the long sheet-like green sheet 14 in a state of being continuously conveyed by a roller. That is, the apparatus for performing heating and magnetic field alignment is disposed on the downstream side of the coating device (such as a mold), and is carried out by a step that is continuous with the coating step.

具體而言,於模具15或塗佈輥22之下游側,以使所搬送之支持基材13及生片14通過螺線管25內之方式配置螺線管25。進而,於螺線管25內相對於生片14上下成對地配置加熱板26。然後,藉由上下成對地配置之加熱板26將生片14加熱,並且向螺線管25通入電流,藉此於長條片狀之生片14之面內方向(即,與生片14之片材面平行之方向)且長度方向上產生磁場。藉此,利用加熱使連續搬送之生片14軟化,並且對經軟化之生片14之面內方向且長度方向(圖7之箭頭27方向)施加磁場,而可對生片14適當地配向均勻之磁場。尤其,藉由將施加磁場之方向設為面內方向,可防止生片14之表面起毛。 Specifically, on the downstream side of the mold 15 or the application roller 22, the solenoid 25 is placed such that the supported support substrate 13 and the green sheet 14 pass through the inside of the solenoid 25. Further, the heating plate 26 is disposed in the solenoid 25 in the upper and lower sides of the green sheet 14 in pairs. Then, the green sheet 14 is heated by the heating plate 26 disposed in pairs up and down, and an electric current is supplied to the solenoid 25, thereby in the in-plane direction of the long sheet-like green sheet 14 (ie, with the green sheet) The sheet of 14 is parallel to the direction of the surface and a magnetic field is generated in the longitudinal direction. Thereby, the continuous conveyance of the green sheet 14 is softened by heating, and a magnetic field is applied to the in-plane direction of the softened green sheet 14 and the longitudinal direction (the direction of the arrow 27 in Fig. 7), so that the green sheet 14 can be appropriately aligned uniformly. The magnetic field. In particular, by setting the direction in which the magnetic field is applied to the in-plane direction, the surface of the green sheet 14 can be prevented from fluffing.

又,於磁場配向後進行之生片14之散熱及凝固較佳為於搬送狀態下進行。藉此,可使製造步驟進一步效率化。 Further, the heat dissipation and solidification of the green sheet 14 after the magnetic field alignment is preferably carried out in a conveyed state. Thereby, the manufacturing steps can be further streamlined.

再者,於對生片14之面內方向且寬度方向進行磁場配向之情形時,係以代替螺線管25而於所搬送之生片14之左右配置一對磁場線圈之方式構成。並且,藉由對各磁場線圈通入電流,可於長條片狀之生片14之面內方向且寬度方向產生磁場。 In the case where the magnetic field is aligned in the in-plane direction and the width direction of the green sheet 14, a pair of magnetic field coils are disposed on the right and left sides of the conveyed green sheet 14 instead of the solenoid 25. Further, by applying an electric current to each of the field coils, a magnetic field can be generated in the in-plane direction and the width direction of the long sheet-like green sheet 14.

又,亦可將磁場配向設為相對於生片14之面之垂直方向。於對相對於生片14之面之垂直方向進行磁場配向之情形時,例如藉由使用磁極片等之磁場施加裝置進行。具體而言,如圖8所示,使用磁極片等之磁場施加裝置30包含以中心軸成為同一軸之方式平行配置之2個環狀線圈部31、32、及分別配置於線圈部31、32之環形孔之2個大致圓柱狀之磁極片33、34,相對於所搬送之生片14隔開特定間隔地配 置。並且,藉由對線圈部31、32通入電流,而於相對於生片14之面之垂直方向產生磁場,進行生片14之磁場配向。再者,於將磁場配向方向設為相對於生片14之面之垂直方向之情形時,較佳為如圖8所示般對生片14於積層有支持基材13之相反側之面亦積層膜35。藉此,可防止生片14之表面之起毛。 Further, the magnetic field alignment may be set to be perpendicular to the surface of the green sheet 14. In the case where the magnetic field is aligned in the direction perpendicular to the surface of the green sheet 14, it is performed by, for example, a magnetic field applying device using a magnetic pole piece or the like. Specifically, as shown in FIG. 8 , the magnetic field applying device 30 using a magnetic pole piece or the like includes two annular coil portions 31 and 32 that are arranged in parallel so that the central axis is the same axis, and are disposed in the coil portions 31 and 32, respectively. The two substantially cylindrical pole pieces 33 and 34 of the annular hole are arranged at a predetermined interval with respect to the conveyed green sheet 14 Set. Then, by applying a current to the coil portions 31 and 32, a magnetic field is generated in a direction perpendicular to the surface of the green sheet 14, and the magnetic field alignment of the green sheet 14 is performed. Further, when the direction of the magnetic field alignment is set to be perpendicular to the surface of the green sheet 14, it is preferable that the green sheet 14 is also on the opposite side of the laminated support substrate 13 as shown in FIG. The laminated film 35. Thereby, the raising of the surface of the green sheet 14 can be prevented.

又,亦可使用以熱介質(聚矽氧油)為熱源之加熱方式代替上述利用加熱板26之加熱方式。此處,圖9係表示使用熱介質之加熱裝置37之一例之圖。 Further, instead of the heating method using the heating plate 26, a heating method using a heat medium (polyoxygenated oil) as a heat source may be used. Here, FIG. 9 is a view showing an example of a heating device 37 using a heat medium.

如圖9所示,加熱裝置37係設為如下構成:於成為發熱體之平板構件38之內部形成大致U字型之空洞39,於空洞39內使加熱至特定溫度(例如100~300℃)之作為熱介質之聚矽氧油循環。並且,於螺線管25內相對於生片14上下成對地配置加熱裝置37代替圖7所示之加熱板26。藉此,經由藉由熱介質而發熱之平板構件38對連續搬送之生片14進行加熱使之軟化。再者,平板構件38可與生片14抵接,亦可隔開特定間隔而配置。並且,藉由配置於經軟化之生片14之周圍之螺線管25,對生片14之面內方向且長度方向(圖7之箭頭27方向)施加磁場,可對生片14適當地配向均勻之磁場。再者,於圖9所示之使用熱介質之加熱裝置37中,不如通常之加熱板26般於內部具有電熱線,故而即便於配置於磁場中之情形時,亦無因勞侖茲力(Lorentz force)使電熱線振動或切斷之虞,可適當地進行生片14之加熱。又,於利用電流進行控制之情形時,具有因電源之ON或OFF使電熱線振動而成為疲勞破壞之原因之問題,但藉由使用以熱介質為熱源之加熱裝置37,可消除此種問題。 As shown in FIG. 9, the heating device 37 is configured such that a substantially U-shaped cavity 39 is formed inside the flat member 38 which is a heating element, and is heated to a specific temperature (for example, 100 to 300 ° C) in the cavity 39. It is used as a heat medium for the polyoxygen oil cycle. Further, in the solenoid 25, a heating device 37 is disposed in the upper and lower rows of the green sheet 14 in place of the heating plate 26 shown in Fig. 7. Thereby, the continuously conveyed green sheet 14 is softened by the flat member 38 which generates heat by the heat medium. Further, the flat member 38 may be in contact with the green sheet 14, or may be disposed at a predetermined interval. Further, by applying a magnetic field to the in-plane direction and the longitudinal direction (the direction of the arrow 27 in FIG. 7) of the green sheet 14 by the solenoid 25 disposed around the softened green sheet 14, the green sheet 14 can be appropriately aligned. A uniform magnetic field. Further, in the heating device 37 using the heat medium shown in FIG. 9, the heating wire is not provided inside the heating plate 26 as usual, and therefore, even in the case of being placed in a magnetic field, there is no Lorentz force ( Lorentz force) The heating of the green sheet 14 can be appropriately performed by vibrating or cutting the heating wire. Further, when the current is controlled, there is a problem that the heating wire is vibrated due to the ON or OFF of the power source, which causes fatigue fracture. However, by using the heating device 37 using the heat medium as the heat source, the problem can be eliminated. .

此處,於不使用熱熔成形而利用通常之狹縫式模具方式或刮刀方式等,藉由漿料等流動性較高之液狀物使生片14成形之情形時,若於產生磁場之梯度時搬入生片14,則會將生片14中所含之磁石粉末牽 引至磁場較強之側,有產生形成生片14之漿料之偏液、即生片14之厚度偏差之虞。相對於此,於如本發明般藉由熱熔成形使複合物12成形為生片14之情形時,室溫附近之黏度達到數萬~數十萬Pa.s,不會發生磁場梯度通過時之磁性粉末之集中。進而,藉由於均勻磁場中進行搬送、加熱,可使黏合劑之黏度降低,僅以均勻磁場中之轉矩進行同樣之C軸配向。 Here, in the case where the green sheet 14 is formed by a liquid material having a high fluidity such as a slurry by a conventional slit die method or a doctor blade method without using hot melt molding, if a magnetic field is generated When the gradient is carried into the green sheet 14, the magnet powder contained in the green sheet 14 is pulled. Leading to the side where the magnetic field is strong, there is a difference in the thickness of the green sheet which forms the slurry of the green sheet 14, that is, the thickness of the green sheet 14. On the other hand, when the composite 12 is formed into the green sheet 14 by hot melt forming as in the present invention, the viscosity at room temperature reaches tens of thousands to hundreds of thousands of Pa. s, the concentration of magnetic powder when the magnetic field gradient passes does not occur. Further, by carrying out the transportation and heating in a uniform magnetic field, the viscosity of the adhesive can be lowered, and the same C-axis alignment can be performed only with the torque in the uniform magnetic field.

又,於不使用熱熔成形而利用通常之狹縫式模具方式或刮刀方式等藉由包含有機溶劑之漿料等流動性較高之液狀物使生片14成形之情形時,若欲製作厚度超過1mm之片材,則由於乾燥時漿料等中所含之有機溶劑氣化導致之發泡成為課題。進而,若為了抑制發泡而增加乾燥時間,則會產生磁石粉末之沈澱,隨之產生磁石粉末之密度分佈相對於重力方向之偏差,成為燒成後之翹曲之原因。因此,於漿料之成形中,為了實質上規制厚度之上限值,必須使生片以1mm以下之厚度成形,其後進行積層。然而,於此情形時,黏合劑彼此之融合不足,於其後之脫黏合劑步驟(鍛燒處理)中發生層間剝離,其成為C軸(易磁化軸)配向性之降低、即殘留磁通密度(Br)之下降原因。相對於此,於如本發明般藉由熱熔成形使複合物12成形為生片14之情形時,由於不含有機溶劑,因此即便於製作厚度超過1mm之片材之情形時,亦可消除如上所述之發泡之擔憂。並且,黏合劑處於充分融合之狀態,故而無於脫黏合劑步驟中發生層間剝離之虞。 In the case where the green sheet 14 is formed by a liquid material having a high fluidity such as a slurry containing an organic solvent, such as a conventional slit die method or a doctor blade method, the hot-melt molding is used. When the sheet having a thickness of more than 1 mm is foamed by the vaporization of the organic solvent contained in the slurry or the like during drying, it becomes a problem. Further, when the drying time is increased in order to suppress the foaming, precipitation of the magnet powder occurs, and a variation in the density distribution of the magnet powder with respect to the direction of gravity occurs, which causes the warpage after the firing. Therefore, in the molding of the slurry, in order to substantially regulate the upper limit of the thickness, it is necessary to form the green sheet to a thickness of 1 mm or less, and then laminate the green sheet. However, in this case, the binders are insufficiently fused to each other, and interlayer peeling occurs in the subsequent debonding step (calcining treatment), which becomes a decrease in the alignment of the C-axis (easy magnetization axis), that is, residual magnetic flux. The reason for the decrease in density (Br). On the other hand, when the composite 12 is formed into the green sheet 14 by hot melt forming as in the present invention, since the organic solvent is not contained, even when a sheet having a thickness of more than 1 mm is produced, it can be eliminated. The fear of foaming as described above. Further, since the binder is in a state of being sufficiently fused, there is no possibility that interlayer peeling occurs in the debonding step.

又,於同時對複數片生片14施加磁場之情形時,例如於積層有複數片(例如6片)生片14之狀態下進行連續搬送,以使所積層之生片14於螺線管25內通過之方式構成。藉此,可提高生產性。 Further, when a magnetic field is applied to the plurality of green sheets 14 at the same time, for example, continuous deposition is carried out in a state in which a plurality of sheets (for example, 6 sheets) of the green sheets 14 are laminated so that the green sheets 14 of the layers are placed on the solenoid 25 It is formed by means of internal passage. Thereby, productivity can be improved.

其後,將進行了磁場配向之生片14沖裁成所需之製品形狀(例如圖1所示之扇形形狀),而使成形體40成形。 Thereafter, the green sheet 14 subjected to the magnetic field alignment is punched into a desired product shape (for example, a fan shape as shown in Fig. 1), and the formed body 40 is molded.

繼而,藉由使所成形之成形體40於大氣壓、或加壓至高於大氣 壓之壓力或低於大氣壓之壓力(例如1.0Pa或1.0MPa)之非氧化性環境(尤其於本發明中為氫氣環境或氫氣與惰性氣體之混合氣體環境)下、於黏合劑分解溫度(於添加助長配向之添加劑之情形時,為亦滿足該添加劑之熱分解溫度以上之條件的溫度)下保持數小時~數十小時(例如5小時)而進行鍛燒處理。於在氫氣環境下進行之情形時,例如鍛燒中之氫氣之供給量設為5L/min。藉由進行鍛燒處理,可利用解聚反應等使黏合劑等有機化合物分解成單體並飛散去除。又,可將有機金屬化合物熱分解,使金屬元素殘存於晶界中並且將碳去除。即,進行減少成形體40中之碳量之所謂脫碳。又,鍛燒處理係於將成形體40中之碳量設為2000ppm以下、更佳為1000ppm以下之條件下進行。藉此,可利用其後之燒結處理對永久磁石1整體進行緻密燒結,不會使殘留磁通密度或保磁力降低。又,於將上述進行鍛燒處理時之加壓條件設為高於大氣壓之壓力而進行之情形時,較理想為設為15MPa以下。再者,若將加壓條件設為高於大氣壓之壓力、更具體為0.2MPa,則尤其可期待碳量減少之效果。 Then, by forming the formed body 40 at atmospheric pressure or pressurizing it to above the atmosphere a non-oxidizing environment at a pressure or a pressure lower than atmospheric pressure (for example, 1.0 Pa or 1.0 MPa) (especially in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen and an inert gas in the present invention) at a binder decomposition temperature (in In the case where the additive for promoting the alignment is added, the calcination treatment is carried out for several hours to several tens of hours (for example, 5 hours) at a temperature which satisfies the conditions of the thermal decomposition temperature of the additive. In the case of performing in a hydrogen atmosphere, for example, the supply amount of hydrogen in calcination is set to 5 L/min. By performing the calcination treatment, an organic compound such as a binder can be decomposed into monomers by a depolymerization reaction or the like and scattered and removed. Further, the organometallic compound can be thermally decomposed to leave the metal element in the grain boundary and remove the carbon. That is, so-called decarburization which reduces the amount of carbon in the molded body 40 is performed. In addition, the calcination treatment is carried out under the conditions that the amount of carbon in the molded body 40 is 2,000 ppm or less, more preferably 1,000 ppm or less. Thereby, the entire permanent magnet 1 can be densely sintered by the subsequent sintering treatment without deteriorating the residual magnetic flux density or the coercive force. In the case where the pressurization condition at the time of the calcination treatment is carried out at a pressure higher than atmospheric pressure, it is preferably 15 MPa or less. Further, when the pressurization condition is set to a pressure higher than atmospheric pressure, more specifically 0.2 MPa, the effect of reducing the amount of carbon can be expected in particular.

再者,黏合劑分解溫度係基於黏合劑分解產物及分解殘渣之分析結果而決定。具體而言,選擇達成以下情形之溫度範圍:收集黏合劑之分解產物,未產生單體以外之分解產物,且於殘渣之分析中亦未檢測到由殘留之黏合劑成分之副反應所產生之產物。黏合劑分解溫度根據黏合劑之種類而不同,設為200℃~900℃、更佳為400℃~600℃(例如450℃)。又,關於有機金屬化合物之熱分解溫度,係根據添加之有機金屬化合物之種類而決定,但只要為上述黏合劑分解溫度,則亦可基本地進行有機金屬化合物之熱分解。再者,於不將磁石粉末與黏合劑混合而成形(例如壓粉成形)之情形時,於有機金屬化合物之熱分解溫度下進行鍛燒處理。 Further, the binder decomposition temperature is determined based on the analysis results of the binder decomposition product and the decomposition residue. Specifically, a temperature range is selected in which the decomposition product of the binder is collected, no decomposition products other than the monomer are produced, and no side reaction due to the residual binder component is detected in the residue analysis. product. The decomposition temperature of the binder varies depending on the type of the binder, and is set to 200 ° C to 900 ° C, more preferably 400 ° C to 600 ° C (for example, 450 ° C). Further, the thermal decomposition temperature of the organometallic compound is determined depending on the type of the organometallic compound to be added, but the thermal decomposition of the organometallic compound can be basically performed as long as the binder decomposition temperature is obtained. Further, in the case where the magnet powder is mixed with a binder and molded (for example, powder molding), the calcination treatment is carried out at the thermal decomposition temperature of the organometallic compound.

又,尤其於在有機溶劑中藉由濕式粉碎將磁石原料粉碎之情形 時,於構成有機溶劑之有機化合物之熱分解溫度且黏合劑分解溫度下進行鍛燒處理。藉此,亦可去除所殘留之有機溶劑。關於有機化合物之熱分解溫度,根據所使用之有機溶劑之種類而決定,但只要為上述黏合劑分解溫度,則亦可基本地進行有機化合物之熱分解。 Further, in particular, the case where the magnet raw material is pulverized by wet pulverization in an organic solvent At the time, the calcination treatment is carried out at the thermal decomposition temperature of the organic compound constituting the organic solvent and at the binder decomposition temperature. Thereby, the residual organic solvent can also be removed. The thermal decomposition temperature of the organic compound is determined depending on the type of the organic solvent to be used, but the thermal decomposition of the organic compound can be basically performed as long as it is the decomposition temperature of the above-mentioned binder.

又,上述鍛燒處理較佳為與進行通常之磁石之燒結之情況相比減慢升溫速度。具體而言,將升溫速度設為2℃/min以下(例如1.5℃/min)。因此,於進行鍛燒處理之情形時,以2℃/min以下之特定之升溫速度升溫,達到預先設定之設定溫度(黏合劑分解溫度)後,於該設定溫度下保持數小時~數十小時,藉此進行鍛燒處理。如上所述之鍛燒處理係藉由減慢升溫速度,階段性地去除而非急遽地去除成形體40中之碳,因此可使燒結後之永久磁石之密度上升(即,減少永久磁石中之空隙)。並且,若將升溫速度設為2℃/min以下,則可將燒結後之永久磁石之密度設為95%以上,可期待較高之磁石特性。 Further, it is preferable that the calcination treatment slows down the temperature increase rate as compared with the case of sintering a normal magnet. Specifically, the temperature increase rate is set to 2 ° C / min or less (for example, 1.5 ° C / min). Therefore, in the case of performing the calcination treatment, the temperature is raised at a specific temperature increase rate of 2 ° C/min or less, and after reaching a preset set temperature (adhesive decomposition temperature), the temperature is maintained at the set temperature for several hours to several tens of hours. Thereby, the calcination treatment is performed. The calcining treatment as described above removes the carbon in the formed body 40 stepwise rather than sharply by slowing down the rate of temperature rise, so that the density of the permanent magnet after sintering can be increased (i.e., reduced in the permanent magnet) Void). In addition, when the temperature increase rate is 2° C./min or less, the density of the permanent magnet after sintering can be made 95% or more, and high magnet characteristics can be expected.

又,亦可將經鍛燒處理鍛燒而成之成形體40繼續保持於真空環境下而進行脫氫處理。於脫氫處理中,藉由使經鍛燒處理產生之成形體40中之NdH3(活性度大)自NdH3(活性度大)向NdH2(活性度小)階段性地變化,而使經鍛燒處理活化之成形體40之活性度降低。藉此,即便於其後使經鍛燒處理鍛燒而成之成形體40向大氣中移動之情形時,亦可防止Nd與氧結合,不會降低殘留磁通密度或保磁力。又,亦可期待使磁石結晶之結構自NdH2等恢復至Nd2Fe14B結構之效果。 Further, the molded body 40 obtained by calcining by calcination may be further subjected to a dehydrogenation treatment while maintaining the vacuum atmosphere. In the dehydrogenation treatment, NdH 3 (large activity) in the molded body 40 produced by the calcination treatment is changed stepwise from NdH 3 (large activity) to NdH 2 (small activity). The activity of the molded body 40 activated by the calcination treatment is lowered. Thereby, even when the molded body 40 calcined by the calcination treatment is moved to the atmosphere, Nd can be prevented from being combined with oxygen, and the residual magnetic flux density or coercive force is not lowered. Further, an effect of restoring the structure of the magnet crystal from NdH 2 or the like to the Nd 2 Fe 14 B structure can be expected.

繼而,進行對經鍛燒處理鍛燒而成之成形體40進行燒結之燒結處理。再者,作為成形體40之燒結方法,除了通常之真空燒結以外,亦可使用於加壓之狀態下對成形體40進行燒結的加壓燒結等。例如,於以真空燒結進行燒結之情形時,以特定之升溫速度升溫至800℃~1080℃左右之燒成溫度並保持0.1~2小時左右。於此期間成為真空燒成,作為真空度,較佳為設為5Pa以下、較佳為10-2Pa以下。其後, 進行冷卻,再次於300℃~1000℃下進行2小時熱處理。然後,進行燒結,結果獲得經燒結之磁石之成形體(以下稱為燒結體50)。 Then, a sintering treatment for sintering the formed body 40 which has been calcined by calcination is performed. In addition, as the sintering method of the molded body 40, in addition to the usual vacuum sintering, pressure sintering or the like for sintering the molded body 40 in a pressurized state may be used. For example, when sintering is performed by vacuum sintering, the temperature is raised to a firing temperature of about 800 ° C to 1080 ° C at a specific temperature increase rate for about 0.1 to 2 hours. In this period, vacuum firing is performed, and as the degree of vacuum, it is preferably 5 Pa or less, preferably 10 -2 Pa or less. Thereafter, the mixture was cooled, and heat treatment was again performed at 300 ° C to 1000 ° C for 2 hours. Then, sintering is performed, and as a result, a molded body of the sintered magnet (hereinafter referred to as sintered body 50) is obtained.

另一方面,作為加壓燒結,例如有熱壓燒結、熱均壓加壓(HIP)燒結、超高壓合成燒結、氣體加壓燒結、放電電漿(SPS)燒結等。其中,為了抑制燒結時之磁石粒子之晶粒成長,並且抑制燒結後之磁石所產生之翹曲,較佳為使用為於單軸方向上加壓之單軸加壓燒結且藉由通電燒結進行燒結之SPS燒結。再者,於以SPS燒結進行燒結之情形時,較佳為將加壓值設為例如0.01MPa~100MPa,於數Pa以下之真空環境下以10℃/min上升至940℃,其後保持5分鐘。其後進行冷卻,再次於300℃~1000℃下進行2小時熱處理。然後,進行燒結,結果獲得燒結體50。 On the other hand, as the pressure sintering, there are, for example, hot press sintering, hot press pressure (HIP) sintering, ultrahigh pressure synthetic sintering, gas pressure sintering, and discharge plasma (SPS) sintering. In order to suppress the grain growth of the magnet particles during sintering and to suppress the warpage caused by the magnet after sintering, it is preferably used for uniaxial pressure sintering in a uniaxial direction and by electric conduction sintering. Sintered SPS is sintered. Further, in the case of sintering by SPS sintering, it is preferred to set the pressurization value to, for example, 0.01 MPa to 100 MPa, and to increase the temperature to 10 ° C/min to 940 ° C in a vacuum atmosphere of several Pa or less, and thereafter to maintain 5 minute. Thereafter, the mixture was cooled, and heat treatment was again performed at 300 ° C to 1000 ° C for 2 hours. Then, sintering is performed, and as a result, the sintered body 50 is obtained.

以下,使用圖10對利用SPS燒結獲得之成形體40之加壓燒結步驟更詳細地進行說明。圖10係表示利用SPS燒結獲得之成形體40之加壓燒結步驟的模式圖。 Hereinafter, the pressure sintering step of the molded body 40 obtained by SPS sintering will be described in more detail with reference to Fig. 10 . Fig. 10 is a schematic view showing a pressure sintering step of the formed body 40 obtained by SPS sintering.

於如圖10所示般進行SPS燒結之情形時,首先,於石墨製之燒結模具41設置成形體40。再者,上述鍛燒處理亦可於將成形體40設置於燒結模具41之狀態下進行。然後,將設置於燒結模具41之成形體40保持於真空腔室42內,並設置同樣為石墨製之上部衝頭43與下部衝頭44。然後,使用連接於上部衝頭43之上部衝頭電極45與連接於下部衝頭44之下部衝頭電極46,施加低電壓且高電流之直流脈衝電壓/電流。與此同時,對上部衝頭43及下部衝頭44使用加壓機構(未圖示)分別自上下方向施加荷重。其結果,對設置於燒結模具41內之成形體40一面加壓一面進行燒結。又,為了提高生產性,較佳為同時對複數個(例如10個)成形體進行SPS燒結。再者,於同時對複數個成形體40進行SPS燒結之情形時,可於一空間配置複數個成形體40,亦可將每個成形體40配置於不同空間內。再者,於將每個成形體40配置於不同空 間內之情形時,於每個空間內對成形體40進行加壓之上部衝頭43或下部衝頭44係以於各空間之間成為一體(即,藉由驅動成為一體之一個上部衝頭43及下部衝頭44可同時對處於各空間之複數個成形體進行加壓)之方式構成。 When SPS sintering is performed as shown in FIG. 10, first, the molded body 40 is provided in the graphite sintered mold 41. Further, the calcination treatment may be performed in a state where the molded body 40 is placed on the sintering mold 41. Then, the formed body 40 provided in the sintering mold 41 is held in the vacuum chamber 42, and the upper punch 43 and the lower punch 44, which are also made of graphite, are provided. Then, a low voltage and high current DC pulse voltage/current is applied using the punch electrode 45 connected to the upper portion of the upper punch 43 and the punch electrode 46 connected to the lower portion of the lower punch 44. At the same time, a load is applied to the upper punch 43 and the lower punch 44 from the vertical direction by a pressurizing mechanism (not shown). As a result, the molded body 40 provided in the sintering mold 41 is pressed while being pressed. Further, in order to improve productivity, it is preferred to simultaneously perform SPS sintering on a plurality of (for example, ten) shaped bodies. Further, when a plurality of molded bodies 40 are simultaneously subjected to SPS sintering, a plurality of molded bodies 40 may be disposed in one space, or each molded body 40 may be disposed in a different space. Furthermore, each shaped body 40 is disposed in a different space. In the case of the space, the molded body 40 is pressurized in each space. The upper punch 43 or the lower punch 44 is integrated between the spaces (i.e., an upper punch that is integrated by driving) 43 and the lower punch 44 can be configured to simultaneously press a plurality of molded bodies in each space.

繼而,如圖5所示,將上述經燒結處理燒結而成之燒結體50安裝於濺鍍裝置,對燒結體50之表面進行Nd之濺鍍。作為濺鍍之條件,例如設為於300mA下60分鐘。再者,於燒結體50具有如圖1所示之薄板形狀之情形時,分別對燒結體50之兩面進行Nd之濺鍍。其結果,於燒結體50之表面形成Nd之薄膜51。 Then, as shown in FIG. 5, the sintered body 50 obtained by sintering the above-described sintering treatment is attached to a sputtering apparatus, and the surface of the sintered body 50 is sputtered by Nd. As a condition of sputtering, for example, it is set to 300 mA for 60 minutes. Further, when the sintered body 50 has a thin plate shape as shown in Fig. 1, Nd is sputtered on both surfaces of the sintered body 50, respectively. As a result, a film 51 of Nd is formed on the surface of the sintered body 50.

繼而,對上述進行過Nd之濺鍍之燒結體50之表面進而進行Cu之濺鍍。作為濺鍍之條件,例如設為於300mA下15分鐘。再者,於燒結體50具有如圖1所示之薄板形狀之情形時,對燒結體50之兩面進行Cu之濺鍍。其結果,於燒結體50之表面重複形成Nd之薄膜51及Cu之薄膜52。 Then, the surface of the sintered body 50 subjected to the Nd sputtering described above is further subjected to Cu sputtering. The conditions for sputtering are, for example, 15 minutes at 300 mA. Further, when the sintered body 50 has a thin plate shape as shown in Fig. 1, Cu is sputtered on both faces of the sintered body 50. As a result, a film 51 of Nd and a film 52 of Cu are repeatedly formed on the surface of the sintered body 50.

其後,對上述藉由濺鍍處理分別形成Nd之薄膜51與Cu之薄膜52之燒結體50進行加熱,藉此進行使濺鍍於燒結體50之表面之Cu擴散於燒結體50之內部的擴散處理。再者,擴散處理係藉由於真空環境下、於低於燒結溫度之溫度且高於Cu與Nd之金屬間化合物(例如Nd-Cu)之熔點之溫度(例如600℃~800℃)下進行一定時間(例如5小時)加熱而進行。其結果,濺鍍於燒結體50之表面之Cu於擴散處理之階段成為液相而滲透於晶界,可使Cu偏靠於晶界。 Then, the sintered body 50 in which the Nd film 51 and the Cu film 52 are respectively formed by sputtering is heated to diffuse Cu sputtered on the surface of the sintered body 50 into the sintered body 50. Diffusion treatment. Furthermore, the diffusion treatment is performed by a temperature in a vacuum environment at a temperature lower than the sintering temperature and higher than the melting point of the intermetallic compound of Cu and Nd (for example, Nd-Cu) (for example, 600 ° C to 800 ° C). The time (for example, 5 hours) is performed by heating. As a result, Cu sputtered on the surface of the sintered body 50 becomes a liquid phase at the stage of the diffusion treatment and penetrates into the grain boundary, so that Cu can be biased against the grain boundary.

此處,與單體金屬相比,Cu與Nd之合金之熔點更低。因此,可於低溫下進行擴散處理,亦無於擴散處理之階段產生晶粒成長之虞。又,即便於將Cu之添加量設為少量(例如0.1wt%)之情形時,亦可使Cu適當地偏靠於晶界。並且,進行上述擴散處理,結果可製造永久磁石1。 Here, the alloy of Cu and Nd has a lower melting point than the monomer metal. Therefore, the diffusion treatment can be performed at a low temperature, and the grain growth is not generated at the stage of the diffusion treatment. Further, even when the amount of addition of Cu is made small (for example, 0.1 wt%), Cu can be appropriately biased against the grain boundary. Further, the diffusion treatment described above is carried out, and as a result, the permanent magnet 1 can be produced.

又,亦可設為對利用上述燒結處理進行之燒結後、且進行上述擴散處理前或進行過後的燒結體50進而進行熱處理的構成。再者,熱處理係藉由於使燒結體暫且散熱後於真空環境下、於低於燒結溫度之溫度(460℃~600℃)下進行一定時間(例如1小時)加熱而進行。 Moreover, the sintered body 50 after the sintering by the above-described sintering treatment and before or after the above-described diffusion treatment may be further subjected to heat treatment. Further, the heat treatment is carried out by heating the sintered body for a predetermined time (for example, one hour) at a temperature lower than the sintering temperature (460 ° C to 600 ° C) in a vacuum atmosphere.

此處,於上述燒結處理後之冷卻階段,於燒結體中有機金屬化合物中所含之Dy等與Nd形成共晶。並且,尤其於有機金屬化合物中所含之Dy等為特定之金屬(例如Al、Ag、Ga(以下稱為Al等))之情形時,與Nd單體相比,共晶之熔點更低。因此,若於燒結後在高於有機金屬化合物中所含之Al等與Nd之共晶之熔點的溫度下進行熱處理,則藉由與有機金屬化合物中所含之Al等之共晶進行低熔點化之富Nd相於熱處理之階段成為液相而滲透於晶界,可於晶界形成均勻之富Nd相。其結果,可提高永久磁石1之保磁力。又,由於在低溫下進行熱處理,故而亦無於熱處理之階段產生晶粒成長之虞。 Here, in the cooling stage after the sintering treatment, Dy or the like contained in the organometallic compound in the sintered body forms a eutectic with Nd. Further, in particular, when Dy or the like contained in the organometallic compound is a specific metal (for example, Al, Ag, or Ga (hereinafter referred to as Al), the melting point of the eutectic is lower than that of the Nd monomer. Therefore, if the heat treatment is performed at a temperature higher than the melting point of the eutectic of Al or the like contained in the organometallic compound after sintering, the eutectic with Al or the like contained in the organometallic compound is used for the low melting point. The Nd-rich phase becomes a liquid phase at the stage of heat treatment and penetrates into the grain boundary, forming a uniform Nd-rich phase at the grain boundary. As a result, the coercive force of the permanent magnet 1 can be increased. Further, since the heat treatment is performed at a low temperature, there is no possibility of grain growth at the stage of heat treatment.

進而,若於高於有機金屬化合物中所含之Cu等與Nd之共晶之熔點的溫度下進行熱處理,則可使與富Nd相一併成為液相的包含Al等之合金滲透於晶界。其結果,即便於將有機金屬化合物之添加量設為少量(例如0.1wt%)之情形時,亦可使有機金屬化合物中所含之Al等適當地偏靠於晶界。 Further, when the heat treatment is performed at a temperature higher than the melting point of the eutectic of Cu or the like contained in the organometallic compound, the alloy containing Al or the like which is in the liquid phase together with the Nd-rich phase can be infiltrated into the grain boundary. . As a result, even when the amount of the organometallic compound added is a small amount (for example, 0.1% by weight), Al or the like contained in the organometallic compound can be appropriately biased to the grain boundary.

[實施例] [Examples]

以下,對於本發明之實施例一面與比較例進行比較一面進行說明。 Hereinafter, an embodiment of the present invention will be described in comparison with a comparative example.

(實施例) (Example)

實施例1之釹磁石粉末之合金組成以wt%計設為Nd/Fe/B=32.7/65.96/1.34。並且,藉由生片成形而成形為厚度3mm之成形體。又,鍛燒處理係藉由使成形體於大氣壓(再者,本實施例特別地將製造時之大氣壓假定為標準大氣壓(約0.1MPa))之氫氣環境下、於450℃ 下保持10小時而進行。又,於對鍛燒體進行真空燒結後,對燒結體之上下面以電流值300mA進行Nd之濺鍍60分鐘,繼而,同樣對燒結體之上下面以電流值300mA進行Cu之濺鍍15分鐘。再者,濺鍍裝置係使用MSP-30T磁控濺鍍裝置(Shinkuu Device製造)。又,於濺鍍後燒結體中所含之Cu之量為0.13wt%。進而進行Cu之濺鍍後,使燒結體於真空環境下、於800℃下保持5小時,藉此進行擴散處理。又,其後,藉由使燒結體於真空環境下、進而於500℃下保持1小時而進行熱處理。再者,其他步驟設為與上述[永久磁石之製造方法]相同之步驟。 The alloy composition of the neodymium magnet powder of Example 1 was set to Nd/Fe/B = 32.7 / 65.96 / 1.34 in wt%. Further, it was molded into a molded body having a thickness of 3 mm by green sheet molding. Further, the calcination treatment is carried out at 450 ° C in a hydrogen atmosphere in which the molded body is at atmospheric pressure (further, in this embodiment, the atmospheric pressure at the time of manufacture is assumed to be a standard atmospheric pressure (about 0.1 MPa)). It is carried out for 10 hours. Further, after vacuum sintering of the calcined body, Nd sputtering was performed on the upper surface of the sintered body at a current value of 300 mA for 60 minutes, and then sputtering of Cu was performed for 15 minutes at a current value of 300 mA on the upper and lower sides of the sintered body. . Further, the sputtering apparatus was an MSP-30T magnetron sputtering apparatus (manufactured by Shinkuu Device). Further, the amount of Cu contained in the sintered body after sputtering was 0.13 wt%. Further, after sputtering of Cu, the sintered body was kept at 800 ° C for 5 hours in a vacuum atmosphere to carry out diffusion treatment. Thereafter, the sintered body was heat-treated by holding the sintered body in a vacuum atmosphere at 500 ° C for 1 hour. In addition, the other steps are the same as the above [manufacturing method of permanent magnet].

(比較例) (Comparative example)

設為預先於磁石原料包含0.1wt%之Cu之構成,將包含Cu之磁石原料粉碎而製作釹磁石粉末。又,不進行對燒結體之Nd或Cu之濺鍍,亦可省略擴散處理。其他條件與實施例相同。 It is assumed that the magnet raw material contains 0.1% by weight of Cu in advance, and the magnet raw material containing Cu is pulverized to prepare a neodymium magnet powder. Further, sputtering of Nd or Cu on the sintered body is not performed, and the diffusion treatment may be omitted. Other conditions are the same as in the embodiment.

(實施例與比較例之磁石特性之比較研究) (Comparative study of magnet characteristics of the examples and comparative examples)

對實施例及比較例之各永久磁石之保磁力[kOe]進行測定。於圖11中表示測定結果之一覽表。 The coercive force [kOe] of each of the permanent magnets of the examples and the comparative examples was measured. A list of measurement results is shown in FIG.

此處,若將實施例與比較例之各永久磁石之保磁力加以比較,則雖然添加之Cu之量大致相同,但是磁石原料中不含Cu而藉由濺鍍偏靠於晶界的實施例之永久磁石顯示出高於比較例之永久磁石之保磁力。即,於在氫氣環境下進行成形體之鍛燒處理之時間點,比較例之永久磁石處於成形體中已包含Cu之狀態,因此預測到於進行鍛燒處理時處於以下(2)之反應容易向右側推進之狀態。 Here, when the coercive force of each of the permanent magnets of the examples and the comparative examples is compared, the amount of Cu added is substantially the same, but the magnet raw material does not contain Cu and the sputtering is biased against the grain boundary. The permanent magnet showed a coercive force higher than that of the permanent magnet of the comparative example. In other words, in the case where the calcination treatment of the molded body is carried out in a hydrogen atmosphere, the permanent magnet of the comparative example is in a state in which Cu is contained in the molded body, and therefore it is predicted that the reaction in the following (2) is easy when the calcination treatment is performed. The state of advancing to the right.

Nd2Fe14B+2H2→2NdH2+12Fe+Fe2B....(2) Nd 2 Fe 14 B+2H 2 →2NdH 2 +12Fe+Fe 2 B. . . . (2)

並且,因上述(2)之反應向右側推進,使稀土類磁石之主相(Nd2Fe14B)分解並且析出αFe,其結果可認為保磁力降低。 In addition, when the reaction of the above (2) is pushed to the right side, the main phase of the rare earth magnet (Nd 2 Fe 14 B) is decomposed and αFe is precipitated, and as a result, the coercive force is considered to be lowered.

另一方面,於在氫氣環境進行成形體之鍛燒處理之時間點,實施例之永久磁石之成形體中不含Cu,因此預測到於進行鍛燒處理時 處於上述(2)之反應難以向右側推進之狀態。其結果,可認為於實施例之稀土類永久磁石中,稀土類磁石之主相(Nd2Fe14B)不會分解,亦可抑制αFe之析出,顯示較高之保磁力。 On the other hand, in the case where the calcining treatment of the formed body is carried out in a hydrogen atmosphere, since the formed body of the permanent magnet of the example does not contain Cu, it is predicted that the reaction of the above (2) is difficult when the calcination treatment is performed. The state of the right side advancement. As a result, it is considered that in the rare earth permanent magnet of the example, the main phase (Nd 2 Fe 14 B) of the rare earth magnet is not decomposed, and precipitation of αFe can be suppressed, and a high coercive force is exhibited.

如以上所說明般,於本實施形態之永久磁石1及永久磁石1之製造方法中,藉由使將不含Cu之磁石原料粉碎並成形之成形體於氫氣環境下、於200℃~900℃下保持數小時~數十小時,而進行鍛燒處理。其後,藉由進行真空燒結或加壓燒結而對成形體進行燒結,進而藉由於燒結體之表面濺鍍Cu而製造永久磁石1。藉此,可實現利用Cu獲得之保磁力之提高,並且即便於在氫氣環境下進行鍛燒之情形時,亦可抑制主相之分解或αFe之析出,防止磁特性降低。 As described above, in the method for producing the permanent magnet 1 and the permanent magnet 1 of the present embodiment, the molded body obtained by pulverizing and molding the magnet raw material containing no Cu in a hydrogen atmosphere at 200 ° C to 900 ° C The calcination treatment is carried out for several hours to several tens of hours. Thereafter, the formed body is sintered by vacuum sintering or pressure sintering, and the permanent magnet 1 is produced by sputtering Cu on the surface of the sintered body. Thereby, the coercive force obtained by Cu can be improved, and even when calcination is performed in a hydrogen atmosphere, decomposition of the main phase or precipitation of αFe can be suppressed, and deterioration of magnetic properties can be prevented.

又,藉由對濺鍍有Cu之燒結體進行加熱,而使濺鍍於燒結體之表面之Cu擴散於燒結體之內部,因此可不預先於磁石原料中包含Cu,而使燒結後濺鍍之Cu適當地偏靠於晶界。即,可不預先於磁石原料中包含Cu,而利用Cu獲得保磁力提高之效果。 Further, by heating the sintered body sputtered with Cu, Cu deposited on the surface of the sintered body is diffused inside the sintered body. Therefore, it is possible to cause sputtering after sintering without including Cu in the magnet raw material. Cu is suitably biased against the grain boundaries. In other words, the effect of improving the coercive force can be obtained by using Cu without preliminarily including Cu in the magnet raw material.

又,於對濺鍍有Cu之燒結體進行加熱時,於低於燒成溫度之溫度(例如800℃)下進行加熱,因此於使所濺鍍之Cu擴散於燒結體之內部之步驟中,可防止產生磁石粒子之晶粒成長。 Further, when the sintered body in which Cu is sputtered is heated, it is heated at a temperature lower than the firing temperature (for example, 800 ° C), so that in the step of diffusing the sputtered Cu into the inside of the sintered body, It prevents the growth of crystal grains of magnet particles.

又,於燒結體之表面濺鍍Nd後,於燒結體之表面濺鍍Cu,因此可於更低溫下進行使所濺鍍之Cu擴散於燒結體之內部之步驟。 Further, after sputtering of Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body, so that the sputtering of Cu can be diffused into the inside of the sintered body at a lower temperature.

又,對經粉碎之磁石粉末添加含有Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb並且不含氧原子及氮原子之有機金屬化合物而對磁石粒子之表面均勻地附著有機金屬化合物,使粒子表面附著有機金屬化合物之磁石粉末成形,藉此形成成形體,因此可使有機金屬化合物中所含之Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb效率良好地偏靠於磁石之晶界。其結果,可提高永久磁石之磁性能。又,可將Al、 Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之添加量設為較先前之更少量,因此可抑制殘留磁通密度之降低。 Further, the pulverized magnet powder is added with Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb and does not contain oxygen atoms and nitrogen. The organometallic compound of the atom uniformly adheres the organometallic compound to the surface of the magnet particle, and forms a magnet powder of the organometallic compound on the surface of the particle to form a molded body. Therefore, Al, Dy, and the like contained in the organometallic compound can be formed. Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb are efficiently biased against the grain boundaries of the magnet. As a result, the magnetic properties of the permanent magnet can be improved. Also, Al, The addition amount of Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb is set to be smaller than the previous one, so that the residual magnetic flux density can be suppressed. reduce.

又,使用中心金屬為Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁作為有機金屬化合物,因此於其後之加熱步驟中可容易地進行有機金屬化合物之熱分解,可使有機金屬化合物中所含之金屬適當地偏靠於晶界。又,亦可藉由進行熱分解而減少殘存於磁石內之碳量。其結果,不會於燒結後之磁石之主相與晶界相之間產生空隙,又,可對磁石整體進行緻密燒結,可防止保磁力降低。又,於燒結後之磁石之主相內不會析出大量αFe,不會使磁石特性大幅降低。 Further, a metal complex of Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb, or hydrogenated diisobutylene is used. Since the base aluminum is used as the organometallic compound, the thermal decomposition of the organometallic compound can be easily performed in the subsequent heating step, and the metal contained in the organometallic compound can be appropriately biased against the grain boundary. Further, the amount of carbon remaining in the magnet can be reduced by thermal decomposition. As a result, voids are not formed between the main phase of the magnet after sintering and the grain boundary phase, and the entire magnet can be densely sintered to prevent a decrease in coercive force. Further, a large amount of αFe is not precipitated in the main phase of the magnet after sintering, and the magnet characteristics are not greatly lowered.

又,藉由對將磁石粉末與黏合劑混合而成形之生片進行燒結所得之磁石構成永久磁石,因此因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。 Further, since the magnet obtained by sintering the green sheet formed by mixing the magnet powder and the binder constitutes a permanent magnet, the shrinkage due to sintering becomes uniform, and deformation such as warpage or depression after sintering does not occur. Further, since the pressure is not uniform when there is no pressurization, it is not necessary to perform the correction processing after the previous sintering, and the manufacturing steps can be simplified. Thereby, the permanent magnet can be formed with higher dimensional accuracy.

再者,當然本發明並不限定於上述實施例,可於不脫離本發明之主旨之範圍內進行各種改良、變化。 It is a matter of course that the present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.

例如,磁石粉末之粉碎條件、混練條件、磁場配向步驟、鍛燒條件、燒結條件、濺鍍條件、擴散處理條件、熱處理條件等不限於上述實施例中所記載之條件。例如,於上述實施例中,藉由狹縫式模具方式形成生片,亦可利用其他方式(例如軋光輥方式、缺角輪塗敷方式、擠出成形、射出成形、模具成形、刮刀方式等)形成生片。又,亦可藉由產生溶劑中混合有磁石粉末或黏合劑之漿料,其後使產生之漿料成形為片狀而製作生片。於此情形時,亦可使用熱塑性樹脂以外作為黏合劑。又,只要進行鍛燒時之環境為非氧化性環境,則亦可於 氫氣環境以外之環境(例如氮氣環境、氦氣環境等、氬氣環境等)下進行。又,亦可設為不進行Nd之濺鍍而僅進行Cu之濺鍍之構成。但是,於此情形時,必須將使所濺鍍之Cu擴散於燒結體之內部時之加熱溫度設為更高之溫度。又,亦可變更Cu與Nd之濺鍍之順序。 For example, the pulverization conditions of the magnet powder, the kneading conditions, the magnetic field alignment step, the calcination conditions, the sintering conditions, the sputtering conditions, the diffusion treatment conditions, the heat treatment conditions, and the like are not limited to the conditions described in the above examples. For example, in the above embodiment, the green sheet is formed by a slit die method, and other methods (for example, a calender roll method, a notch wheel coating method, an extrusion molding, an injection molding, a mold forming, a doctor blade method) may be used. Etc.) Forming a green piece. Further, a slurry in which a magnet powder or a binder is mixed in a solvent may be produced, and then the resulting slurry may be formed into a sheet shape to prepare a green sheet. In this case, a binder other than a thermoplastic resin may also be used. Moreover, as long as the environment during calcination is a non-oxidizing environment, It is carried out in an environment other than a hydrogen atmosphere (for example, a nitrogen atmosphere, a helium atmosphere, or the like, an argon atmosphere, etc.). Further, it is also possible to adopt a configuration in which only sputtering of Cu is performed without performing sputtering of Nd. However, in this case, it is necessary to set the heating temperature at which the sputtered Cu is diffused inside the sintered body to a higher temperature. Moreover, the order of sputtering of Cu and Nd can also be changed.

又,於上述實施例中,設為使磁石粉末與黏合劑之混合體暫且成形為片材形狀後進行磁場配向之構成,亦可設為於成形為片材形狀以外之形狀後進行磁場配向之構成。例如,亦可成形為塊體形狀。並且,藉由進而對經磁場配向之塊體形狀之成形體進行加工而成形為最終製品形狀。 Further, in the above-described embodiment, the mixture of the magnet powder and the binder is temporarily formed into a sheet shape and then subjected to magnetic field alignment, and may be formed into a shape other than the shape of the sheet, and then magnetic field alignment may be performed. Composition. For example, it may be formed into a block shape. Further, the molded body having a block shape aligned by the magnetic field is further processed into a final product shape.

又,於上述實施例中,使用樹脂、長鏈烴或脂肪酸酯作為黏合劑,亦可使用其他材料。 Further, in the above examples, a resin, a long-chain hydrocarbon or a fatty acid ester is used as the binder, and other materials may be used.

又,永久磁石亦可藉由對利用生片成形以外之成形(例如壓粉成形)而成形之成形體進行鍛燒及燒結而製造。於此情形時,亦可對黏合劑以外之成形體中殘存之含碳物(添加之有機金屬化合物,或藉由進行濕式粉碎而殘存之有機化合物等)期待利用鍛燒之脫碳效果。進而,於上述實施例中,於使磁石粉末成形後在氫氣環境或氫氣與惰性氣體之混合氣體環境下進行鍛燒,亦可對成形前之磁石粉末進行鍛燒處理,使作為鍛燒體之磁石粉末成形為成形體,其後進行燒結,藉此製造永久磁石。若設為此種構成,則對粉末狀之磁石粒子進行鍛燒,因此與對成形後之磁石粒子進行鍛燒之情況相比,可擴大成為鍛燒對象之磁石之表面積。即,可更確實地減少鍛燒體中之碳量。其中,於進行利用生坯之成形之情形時,為了以鍛燒處理使黏合劑熱分解,較理想為於成形後進行鍛燒處理。 Further, the permanent magnet can be produced by calcining and sintering a molded body formed by molding (for example, powder molding) other than green sheet molding. In this case, the carbonaceous material remaining in the molded body other than the binder (the added organometallic compound or the organic compound remaining by wet pulverization) may be expected to utilize the decarburization effect by calcination. Further, in the above embodiment, after the magnet powder is molded, calcination is carried out in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen gas and an inert gas, and the magnet powder before molding may be calcined to be used as a calcined body. The magnet powder is formed into a molded body, followed by sintering, thereby producing a permanent magnet. According to this configuration, since the powdery magnet particles are calcined, the surface area of the magnet to be calcined can be expanded as compared with the case where the magnet particles after molding are calcined. That is, the amount of carbon in the calcined body can be more surely reduced. In the case where the green body is formed, in order to thermally decompose the binder by the calcination treatment, it is preferred to carry out the calcination treatment after the molding.

又,於上述實施例中,同時進行生片14之加熱步驟與磁場配向步驟,亦可於進行加熱步驟後且生片14凝固前進行磁場配向步驟。又,於所塗敷之生片14凝固前(即,即便不進行加熱步驟,生片14亦 為已軟化之狀態)進行磁場配向之情形時,亦可省略加熱步驟。 Further, in the above embodiment, the heating step and the magnetic field alignment step of the green sheet 14 are simultaneously performed, and the magnetic field alignment step may be performed after the heating step and before the green sheet 14 is solidified. Moreover, before the applied green sheet 14 is solidified (that is, even if the heating step is not performed, the green sheet 14 is also When the magnetic field is aligned in the softened state, the heating step may be omitted.

又,於上述實施例中,藉由連續之一連串步驟而進行利用狹縫式模具方式之塗敷步驟、加熱步驟及磁場配向步驟,亦可以不藉由連續之步驟進行之方式構成。又,亦可分為塗敷步驟之前之第1步驟與加熱步驟以後之第2步驟,藉由各自連續之步驟而進行。於此情形時,可以如下方式構成:將所塗敷之生片14切斷為特定長度,對靜止狀態之生片14進行加熱及磁場施加,藉此進行磁場配向。 Further, in the above embodiment, the coating step, the heating step, and the magnetic field aligning step by the slit mold method may be carried out by one successive series of steps, or may be configured not by continuous steps. Further, it may be divided into a first step before the coating step and a second step after the heating step, and each step is carried out. In this case, the green sheet 14 to be applied may be cut to a specific length, and the green sheet 14 in a stationary state may be heated and magnetic field applied to perform magnetic field alignment.

又,於上述實施例中,作為添加至磁石粉末中之有機金屬化合物,使用:三(乙基環戊二烯基)鏑(III)、三(異丙基環戊二烯基)鋱(III)、雙(環戊二烯基)鎂(II)、雙(環戊二烯基)二苄基鈮(IV)、三氫化雙(五甲基二環戊二烯基)鈮(V)、雙(環戊二烯基)二甲基鈦(IV)、雙(環戊二烯基)二甲基鋯(IV)、二氫化雙(環戊二烯基)鋯(IV)、三(四甲基環戊二烯基)釹(III)、三辛基鋁(III)、二苯基鋅(II)、三苯基鉍(III)、第三丁基炔化銀(I)、(2,4,6-三甲苯基)銀(I)、三環戊二烯基鎵(III)、DIBAL,但只要為含有Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb並且不含氧原子及氮原子之有機金屬化合物,則亦可為其他有機金屬化合物。例如,亦可使用金屬烷基錯合物以外之金屬錯合物。又,有機金屬化合物亦可設為包含上述金屬元素以外之元素(例如Si等)之構成。 Further, in the above examples, as the organometallic compound added to the magnet powder, tris(ethylcyclopentadienyl)ruthenium (III) or tris(isopropylcyclopentadienyl)phosphonium (III) was used. , bis(cyclopentadienyl)magnesium (II), bis(cyclopentadienyl)dibenzyl ruthenium (IV), trihydrobis(pentamethyldicyclopentadienyl)fluorene (V), Bis(cyclopentadienyl)dimethyltitanium(IV), bis(cyclopentadienyl)dimethylzirconium(IV), di(biscyclopentadienyl)zirconium(IV), tris(tetra) Methylcyclopentadienyl)ruthenium (III), trioctylaluminum (III), diphenylzinc (II), triphenylphosphonium (III), tertiary butylated silver (I), (2) , 4,6-trimethylphenyl)silver (I), tricyclopentadienyl gallium (III), DIBAL, but as long as it contains Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W An organometallic compound which is Ag, Ga, Co, Bi, Zn, Mg or Nb and which does not contain an oxygen atom and a nitrogen atom may be other organometallic compounds. For example, a metal complex other than a metal alkyl complex can also be used. Further, the organometallic compound may be configured to include an element other than the above-described metal element (for example, Si or the like).

又,於本發明中,列舉Nd-Fe-B系磁石為例進行了說明,亦可使用其他磁石(例如釤系鈷磁石、鋁鎳鈷磁石、鐵氧體磁石等)。又,關於磁石之合金組成,於本發明中使Nd成分多於計量組成,亦可設為計量組成。又,不僅各向異性磁石,對於各向同性磁石亦可應用本發明。於此情形時,可省略對生片14之磁場配向步驟。 Further, in the present invention, an Nd-Fe-B-based magnet is exemplified, and other magnets (for example, lanthanum-cobalt magnet, alnico magnet, ferrite magnet, or the like) may be used. Further, in the alloy composition of the magnet, in the present invention, the Nd component is made more than the metered composition, and may be a metering composition. Further, the present invention can be applied not only to anisotropic magnets but also to isotropic magnets. In this case, the magnetic field alignment step of the green sheet 14 can be omitted.

1‧‧‧永久磁石 1‧‧‧ permanent magnet

51‧‧‧Nd之薄膜 51‧‧‧Nd film

52‧‧‧Cu之薄膜 52‧‧‧Cu film

Claims (14)

一種稀土類永久磁石,其特徵在於藉由如下步驟而製造:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;於成形前或成形後且燒結前,於氫氣環境或氫氣與惰性氣體之混合氣體環境下對上述磁石粉末進行鍛燒之步驟;藉由將上述成形體保持於燒成溫度而進行燒結,獲得燒結體之步驟;及於上述燒結體之表面濺鍍Cu之步驟。 A rare earth permanent magnet, which is characterized by the steps of: pulverizing a magnet raw material into a magnet powder; forming a shaped body by shaping the pulverized magnet powder; before or after forming and a step of calcining the magnet powder in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen and an inert gas before sintering; a step of sintering by holding the formed body at a firing temperature to obtain a sintered body; The step of sputtering Cu on the surface of the sintered body. 如請求項1之稀土類永久磁石,其藉由如下步驟而製造:藉由對濺鍍有Cu之上述燒結體進行加熱,而使濺鍍於上述燒結體之表面之Cu擴散於上述燒結體之內部的步驟。 The rare earth permanent magnet of claim 1, which is produced by heating the sintered body sputtered with Cu to diffuse Cu sputtered on the surface of the sintered body to the sintered body. Internal steps. 如請求項2之稀土類永久磁石,其中於對濺鍍有Cu之上述燒結體進行加熱時,於低於上述燒成溫度之溫度下進行加熱。 The rare earth permanent magnet of claim 2, wherein when the sintered body in which Cu is sputtered is heated, heating is performed at a temperature lower than the firing temperature. 如請求項1之稀土類永久磁石,其中於在上述燒結體之表面濺鍍Cu之步驟中,於上述燒結體之表面濺鍍Nd後,於上述燒結體之表面濺鍍Cu。 The rare earth permanent magnet of claim 1, wherein in the step of sputtering Cu on the surface of the sintered body, after sputtering Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body. 如請求項1之稀土類永久磁石,其中藉由於上述經粉碎之磁石粉末中添加含有Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb並且不含氧原子及氮原子之有機金屬化合物,而於上述磁石粉末之粒子表面附著上述有機金屬化合物,藉由使粒子表面附著有上述有機金屬化合物之上述磁石粉末成形而形成成形體。 The rare earth permanent magnet of claim 1, wherein the powder of the pulverized magnet is added with Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb and an organometallic compound containing no oxygen atom or nitrogen atom, and the organometallic compound is adhered to the surface of the particle of the magnet powder, and the magnet powder is formed by forming the above-mentioned organometallic compound on the surface of the particle. Shaped body. 如請求項5之稀土類永久磁石,其中上述有機金屬化合物係中心 金屬為Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁。 The rare earth permanent magnet of claim 5, wherein the organometallic compound center The metal is a metal complex of Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb, or diisobutylaluminum hydride. 如請求項1至6中任一項之稀土類永久磁石,其中於使上述磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 The rare earth permanent magnet according to any one of claims 1 to 6, wherein in the step of forming the magnet powder into a shaped body, a mixture in which the magnet powder and the binder are mixed is produced by forming the mixture into a sheet. A green sheet as the above-mentioned molded body was produced in the form of a shape. 一種稀土類永久磁石之製造方法,其特徵在於包括:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;於成形前或成形後且燒結前,於氫氣環境或氫氣與惰性氣體之混合氣體環境下對上述磁石粉末進行鍛燒之步驟;藉由將上述成形體保持於燒成溫度而進行燒結,獲得燒結體之步驟;及於上述燒結體之表面濺鍍Cu之步驟。 A method for producing a rare earth permanent magnet, comprising: a step of pulverizing a magnet raw material into a magnet powder; a step of forming a shaped body by molding the pulverized magnet powder; before or after forming and before sintering a step of calcining the magnet powder in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen and an inert gas; performing the step of sintering by maintaining the molded body at a firing temperature to obtain a sintered body; and the sintered body The step of sputtering Cu on the surface. 如請求項8之稀土類永久磁石之製造方法,其包括:藉由對濺鍍有Cu之上述燒結體進行加熱,而使濺鍍於上述燒結體之表面之Cu擴散於上述燒結體之內部的步驟。 The method for producing a rare earth permanent magnet according to claim 8, comprising: diffusing Cu sputtered on the surface of the sintered body to the inside of the sintered body by heating the sintered body sputtered with Cu step. 如請求項9之稀土類永久磁石之製造方法,其中於對濺鍍有Cu之上述燒結體進行加熱時,於低於上述燒成溫度之溫度下進行加熱。 The method for producing a rare earth permanent magnet according to claim 9, wherein when the sintered body in which Cu is sputtered is heated, heating is performed at a temperature lower than the firing temperature. 如請求項8之稀土類永久磁石之製造方法,其中於在上述燒結體之表面濺鍍Cu之步驟中,於上述燒結體之表面濺鍍Nd後,於上述燒結體之表面濺鍍Cu。 The method for producing a rare earth permanent magnet according to claim 8, wherein in the step of sputtering Cu on the surface of the sintered body, after sputtering Nd on the surface of the sintered body, Cu is sputtered on the surface of the sintered body. 如請求項8之稀土類永久磁石之製造方法,其中藉由於上述經粉碎之磁石粉末中添加含有Al、Dy、Tb、Nd、V、Mo、Zr、Ta、 Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb並且不含氧原子及氮原子之有機金屬化合物,而於上述磁石粉末之粒子表面附著上述有機金屬化合物,藉由使粒子表面附著有上述有機金屬化合物之上述磁石粉末成形而形成成形體。 The method for producing a rare earth permanent magnet according to claim 8, wherein the powder of the pulverized magnet is added with Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, Zn, Mg or Nb and an organometallic compound which does not contain an oxygen atom and a nitrogen atom, and the above organometallic compound adheres to the surface of the particle of the magnet powder by adhering the surface of the particle The magnet powder having the above organometallic compound is molded to form a molded body. 如請求項12之稀土類永久磁石之製造方法,其中上述有機金屬化合物係中心金屬為Al、Dy、Tb、Nd、V、Mo、Zr、Ta、Ti、W、Ag、Ga、Co、Bi、Zn、Mg或Nb之金屬錯合物、或氫化二異丁基鋁。 The method for producing a rare earth permanent magnet according to claim 12, wherein the central metal of the organometallic compound is Al, Dy, Tb, Nd, V, Mo, Zr, Ta, Ti, W, Ag, Ga, Co, Bi, a metal complex of Zn, Mg or Nb, or diisobutylaluminum hydride. 如請求項8至13中任一項之稀土類永久磁石之製造方法,其中於使上述磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 The method for producing a rare earth permanent magnet according to any one of claims 8 to 13, wherein in the step of forming the magnet powder into a shaped body, a mixture in which the magnet powder and the binder are mixed is produced by using the mixture The green sheet as the molded body was produced into a sheet shape.
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