TW201532086A - Rare earth permanent magnet and production method for rare earth permanent magnet - Google Patents

Rare earth permanent magnet and production method for rare earth permanent magnet Download PDF

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TW201532086A
TW201532086A TW103105002A TW103105002A TW201532086A TW 201532086 A TW201532086 A TW 201532086A TW 103105002 A TW103105002 A TW 103105002A TW 103105002 A TW103105002 A TW 103105002A TW 201532086 A TW201532086 A TW 201532086A
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sintering
permanent magnet
rare earth
earth permanent
magnet
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TW103105002A
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Chinese (zh)
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Izumi Ozeki
Katsuya Kume
Toshiaki Okuno
Takashi Ozaki
Tomohiro Omure
Keisuke Taihaku
Takashi Yamamoto
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Nitto Denko Corp
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Abstract

The present invention provides a rare earth permanent magnet whose density is increased after sintering, and a method for producing a rare earth permanent magnet. A compound (12) is formed by grinding a magnet raw material into a magnet powder and mixing the ground magnet powder with an adhesive. Then, the compound (12) is molded into a sheet on a supporting base (13) by hot melt molding, thereby producing a raw sheet (14). After that, the molded raw sheet (14) is heated and softened, and magnetic field orientation is carried out by applying a magnetic field to the heated raw sheet (14). The raw sheet (14) after the magnetic field orientation is sintered in vacuum, and is subsequently sintered under pressure, thereby producing a permanent magnet (1).

Description

稀土類永久磁石及稀土類永久磁石之製造方法 Method for manufacturing rare earth permanent magnet and rare earth permanent magnet

本發明係關於一種稀土類永久磁石及稀土類永久磁石之製造方法。 The invention relates to a method for manufacturing a rare earth permanent magnet and a rare earth permanent magnet.

近年來,對油電混合車或硬碟驅動器等中所使用之永久磁石馬達要求小型輕量化、高輸出化、高效率化。因此,於實現上述永久磁石馬達之小型輕量化、高輸出化、高效率化時,對埋設於馬達之永久磁石要求薄膜化及磁特性之進一步提高。 In recent years, permanent magnet motors used in hybrid electric vehicles, hard disk drives, and the like have been required to be small, lightweight, high in output, and high in efficiency. Therefore, when the permanent magnet motor is reduced in size, weight, output, and efficiency, it is required to further improve the thickness and magnetic properties of the permanent magnet embedded in the motor.

此處,作為永久磁石馬達中所使用之永久磁石之製造方法,先前以來通常使用粉末燒結法。此處,粉末燒結法係首先製造藉由噴射磨機(乾式粉碎)等將原材料粉碎而成之磁石粉末。其後,將該磁石粉末放入模具,加壓成形為所需形狀。然後,將成形為所需形狀之固體狀之磁石粉末於特定溫度(例如,於為Nd-Fe-B系磁石時為1100℃)下進行燒結,藉此製造永久磁石(例如日本專利特開平2-266503號公報)。又,通常對於永久磁石,為了提高磁特性,藉由自外部施加磁場而進行磁場配向。並且,先前之利用粉末燒結法之永久磁石之製造方法係於加壓成形時向模具中填充磁石粉末,施加磁場進行磁場配向後施加壓力,而使經壓粉之成形體成形。又,其他利用擠出成形法、射出成形法、壓延成形法等之永久磁石之製造方法係於施加磁場之環境下施加壓力而使磁石成形。藉此,可形成構成永久磁石之各磁石粒子之易磁化軸方向一致於磁場之施加方向之成形體。 Here, as a method of manufacturing a permanent magnet used in a permanent magnet motor, a powder sintering method has been conventionally used. Here, the powder sintering method firstly produces a magnet powder obtained by pulverizing a raw material by a jet mill (dry pulverization) or the like. Thereafter, the magnet powder is placed in a mold and press-formed into a desired shape. Then, the solid magnet powder formed into a desired shape is sintered at a specific temperature (for example, 1100 ° C when it is a Nd—Fe—B-based magnet), thereby producing a permanent magnet (for example, Japanese Patent Laid-Open No. 2) -266503). Further, in general, for permanent magnets, in order to improve magnetic characteristics, magnetic field alignment is performed by applying a magnetic field from the outside. Further, in the conventional method for producing a permanent magnet by a powder sintering method, a magnet powder is filled into a mold at the time of press molding, and a magnetic field is applied to perform magnetic field alignment, and then a pressure is applied to form a compacted body. Further, other methods for producing permanent magnets such as an extrusion molding method, an injection molding method, and a calender molding method apply pressure to an environment in which a magnetic field is applied to form a magnet. Thereby, it is possible to form a molded body in which the direction of the easy magnetization axis of each of the magnet particles constituting the permanent magnet coincides with the direction in which the magnetic field is applied.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

專利文獻1:日本專利特開平2-266503號公報(第5頁) Patent Document 1: Japanese Patent Laid-Open No. Hei 2-266503 (page 5)

此處,作為使磁石之磁特性降低之原因之一,可列舉於磁石之內部形成空隙。因此,為了排除該等空隙,燒結後之磁石之高密度化(全緻密化)較為重要。然而,先前之燒結方法中,未能夠使燒結後之磁石之密度充分地高密度化。 Here, as one of the causes of lowering the magnetic properties of the magnet, a void is formed inside the magnet. Therefore, in order to eliminate these voids, it is important to increase the density (total densification) of the magnet after sintering. However, in the prior sintering method, the density of the magnet after sintering has not been sufficiently increased.

本發明係為了消除上述先前之問題而完成者,其目的在於提供一種稀土類永久磁石及稀土類永久磁石之製造方法,該稀土類永久磁石係將成形體藉由非加壓燒結進行燒結後,進而藉由加壓燒結進行燒結,藉此使燒結後之永久磁石之密度高密度化,提高永久磁石之磁特性。 The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for producing a rare earth permanent magnet and a rare earth permanent magnet which is sintered by non-pressure sintering. Further, sintering is performed by pressure sintering, whereby the density of the permanent magnet after sintering is increased, and the magnetic properties of the permanent magnet are improved.

為了達成上述目的,本發明之稀土類永久磁石之特徵在於藉由如下步驟而製造:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;藉由對上述成形體施加磁場而進行磁場配向之步驟;藉由非加壓燒結對經磁場配向之上述成形體進行燒結之步驟;及藉由向相對於施加磁場之方向之垂直方向加壓之加壓燒結,對藉由上述非加壓燒結進行燒結之上述成形體即燒結體進而進行燒結的步驟。 In order to achieve the above object, the rare earth permanent magnet of the present invention is characterized by the steps of: pulverizing a magnet raw material into a magnet powder; and forming a shaped body by molding the pulverized magnet powder; a step of performing magnetic field alignment by applying a magnetic field to the molded body; a step of sintering the formed body aligned by a magnetic field by non-pressure sintering; and a pressurization by a vertical direction with respect to a direction in which a magnetic field is applied Press-sintering is a step of sintering the sintered body which is sintered as described above by the non-pressure sintering.

又,本發明之稀土類永久磁石之特徵在於:其係如技術方案1之稀土類永久磁石,且於上述藉由加壓燒結對燒結體進行燒結之步驟中,藉由單軸加壓燒結進行燒結。 Further, the rare earth permanent magnet of the present invention is characterized in that it is a rare earth permanent magnet of the first aspect, and is subjected to uniaxial pressure sintering in the step of sintering the sintered body by pressure sintering. sintering.

又,本發明之稀土類永久磁石之特徵在於:於上述藉由加壓燒 結對燒結體進行燒結之步驟中,藉由通電燒結進行燒結。 Further, the rare earth permanent magnet of the present invention is characterized in that it is burned by pressure as described above. In the step of sintering the sintered body, sintering is performed by electric conduction sintering.

又,本發明之稀土類永久磁石之特徵在於:藉由加壓燒結進行燒結而成之上述稀土類永久磁石之密度為95%以上。 Further, the rare earth permanent magnet of the present invention is characterized in that the density of the rare earth permanent magnet obtained by sintering by pressure sintering is 95% or more.

又,本發明之稀土類永久磁石之特徵在於:於對上述成形體進行非加壓燒結前,將上述成形體於非氧化性環境下進行鍛燒,藉此去除上述成形體中之碳。 Further, the rare earth permanent magnet of the present invention is characterized in that the molded body is calcined in a non-oxidizing atmosphere before the non-pressure sintering of the formed body, thereby removing carbon in the molded body.

又,本發明之稀土類永久磁石之特徵在於:於上述對成形體進行鍛燒之步驟中,使上述成形體於非氧化性環境下以2℃/min以下之升溫速度升溫至設定溫度後,於上述設定溫度下保持一定時間。 Further, the rare earth permanent magnet of the present invention is characterized in that, in the step of calcining the formed body, the formed body is heated to a set temperature in a non-oxidizing atmosphere at a temperature increase rate of 2 ° C/min or less. Maintain a certain time at the above set temperature.

又,本發明之稀土類永久磁石之特徵在於:於上述使磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 Further, the rare earth permanent magnet of the present invention is characterized in that in the step of molding the magnet powder into a molded body, a mixture in which the magnet powder and the binder are mixed is produced, and the mixture is formed into a sheet shape to be produced. A green sheet of the above shaped body.

又,本發明之稀土類永久磁石之特徵在於:於上述使磁石粉末成形為成形體之步驟中,藉由壓粉成形使上述磁石粉末成形為上述成形體。 Further, in the rare earth permanent magnet of the present invention, in the step of molding the magnet powder into a molded body, the magnet powder is molded into the molded body by powder molding.

又,本發明之稀土類永久磁石之製造方法之特徵在於包括:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;藉由對上述成形體施加磁場而進行磁場配向之步驟;藉由非加壓燒結對經磁場配向之上述成形體進行燒結之步驟;及藉由向相對於施加磁場之方向之垂直方向加壓之加壓燒結,對藉由上述非加壓燒結進行燒結之上述成形體即燒結體進而進行燒結的步驟。 Further, the method for producing a rare earth permanent magnet of the present invention is characterized by comprising the steps of: pulverizing a magnet raw material into a magnet powder; forming a shaped body by molding the pulverized magnet powder; a step of applying a magnetic field to perform magnetic field alignment; a step of sintering the formed body aligned by a magnetic field by non-pressure sintering; and a pressure sintering by pressurizing in a direction perpendicular to a direction in which the magnetic field is applied The sintered body which is sintered by the above-described non-pressure sintering is further subjected to sintering.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於上述藉由加壓燒結對燒結體進行燒結之步驟中,藉由單軸加壓燒結進行燒結。 Moreover, the method for producing a rare earth permanent magnet according to the present invention is characterized in that sintering is performed by uniaxial pressure sintering in the step of sintering the sintered body by pressure sintering.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於上述 藉由加壓燒結對燒結體進行燒結之步驟中,藉由通電燒結進行燒結。 Moreover, the method for producing a rare earth permanent magnet of the present invention is characterized in that In the step of sintering the sintered body by pressure sintering, sintering is performed by electric conduction sintering.

又,本發明之稀土類永久磁石之製造方法之特徵在於:藉由加壓燒結進行燒結而成之上述稀土類永久磁石之密度為95%以上。 Moreover, the method for producing a rare earth permanent magnet according to the present invention is characterized in that the density of the rare earth permanent magnet obtained by sintering by pressure sintering is 95% or more.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於對上述成形體進行非加壓燒結前,將上述成形體於非氧化性環境下進行鍛燒,藉此去除上述成形體中之碳。 Moreover, the method for producing a rare earth permanent magnet according to the present invention is characterized in that before the non-pressure sintering of the formed body, the formed body is calcined in a non-oxidizing atmosphere to remove the molded body. carbon.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於上述對成形體進行鍛燒之步驟中,使上述成形體於非氧化性環境下以2℃/min以下之升溫速度升溫至設定溫度後,於上述設定溫度下保持一定時間。 Further, in the method for producing a rare earth permanent magnet according to the present invention, in the step of calcining the formed body, the molded body is heated to a temperature setting rate of 2 ° C/min or less in a non-oxidizing atmosphere. After the temperature, it is kept at the above set temperature for a certain period of time.

又,本發明之稀土類永久磁石之製造方法之特徵在於:於上述使磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 Further, in the method for producing a rare earth permanent magnet according to the present invention, in the step of molding the magnet powder into a molded body, a mixture in which the magnet powder and the binder are mixed is produced, and the mixture is formed into a sheet shape. A green sheet as the above molded body was produced.

進而,本發明之稀土類永久磁石之製造方法之特徵在於:於上述使磁石粉末成形為成形體之步驟中,藉由壓粉成形使上述磁石粉末成形為上述成形體。 Further, in the method for producing a rare earth permanent magnet according to the present invention, in the step of molding the magnet powder into a molded body, the magnet powder is molded into the molded body by powder molding.

根據具有上述構成之本發明之稀土類永久磁石,於藉由非加壓燒結對成形體進行燒結後,進而藉由加壓燒結進行燒結,因此可使燒結後之永久磁石之密度高密度化(全緻密化)。又,於進行加壓燒結時,於相對於施加磁場之方向之垂直方向對燒結體進行加壓,因此不會因對燒結體之加壓而使配向後之磁石粒子之C軸(易磁化軸)方向變化。因此,無使配向度降低之虞,亦可防止磁特性之降低。 According to the rare earth permanent magnet of the present invention having the above-described configuration, the molded body is sintered by non-pressure sintering, and then sintered by pressure sintering, whereby the density of the permanent magnet after sintering can be increased. Fully densified). Further, when the pressure sintering is performed, the sintered body is pressurized in the direction perpendicular to the direction in which the magnetic field is applied, so that the C axis of the magnet particles after the alignment is not pressed by the sintered body (the easy magnetization axis) ) The direction changes. Therefore, it is possible to prevent a decrease in magnetic properties without lowering the alignment degree.

又,根據本發明之稀土類永久磁石,於藉由加壓燒結對燒結體進行燒結之步驟中,藉由單軸加壓燒結進行燒結,因此因由燒結引起 之收縮變得均勻,而可防止產生燒結後之翹曲或凹陷等變形。又,亦可防止配向度之降低。 Further, according to the rare earth permanent magnet of the present invention, in the step of sintering the sintered body by pressure sintering, sintering is performed by uniaxial pressure sintering, and thus is caused by sintering. The shrinkage becomes uniform, and deformation such as warpage or depression after sintering can be prevented. Moreover, it is also possible to prevent a decrease in the degree of alignment.

又,根據本發明之稀土類永久磁石,於藉由加壓燒結對燒結體進行燒結之步驟中,藉由通電燒結進行燒結,因此可急速升溫、冷卻,又,可於較低之溫度區域進行燒結。其結果,可縮短燒結步驟中之升溫、保持時間,可製作抑制磁石粒子之晶粒成長之緻密之燒結體。 Further, according to the rare earth permanent magnet of the present invention, in the step of sintering the sintered body by pressure sintering, sintering is performed by electric conduction sintering, so that the temperature can be rapidly increased and cooled, and the temperature can be lowered in a lower temperature region. sintering. As a result, the temperature rise and the holding time in the sintering step can be shortened, and a dense sintered body which suppresses grain growth of the magnet particles can be produced.

又,根據本發明之稀土類永久磁石,藉由將稀土類永久磁石之密度設為95%以上,可不在磁石之內部形成空隙而防止因空隙使磁石特性大幅降低。 Further, according to the rare earth permanent magnet of the present invention, by setting the density of the rare earth permanent magnet to 95% or more, it is possible to prevent the magnetic properties from being greatly lowered by the voids without forming voids inside the magnet.

又,根據本發明之稀土類永久磁石,即便於為了脫碳而對成形體進行鍛燒處理之情形時,亦可使燒結後之永久磁石之密度高密度化。 Further, according to the rare earth permanent magnet of the present invention, even when the molded body is subjected to calcination treatment for decarburization, the density of the permanent magnet after sintering can be increased.

又,根據本發明之稀土類永久磁石,藉由使成形體於非氧化性環境下以2℃/min以下之升溫速度升溫至設定溫度後,於設定溫度下保持一定時間,而進行鍛燒處理,因此可隨著緩慢之溫度變化,階段性地去除成形體中所含之碳。因此,可不在磁石之內部形成大量空隙而製造密度較高之稀土類永久磁石。 Further, according to the rare earth permanent magnet of the present invention, the molded body is heated to a set temperature at a temperature increase rate of 2 ° C/min or less in a non-oxidizing atmosphere, and then maintained at a set temperature for a predetermined period of time to be calcined. Therefore, the carbon contained in the formed body can be removed stepwise with a slow temperature change. Therefore, a rare earth permanent magnet having a high density can be produced without forming a large number of voids inside the magnet.

又,根據本發明之稀土類永久磁石,藉由對將磁石粉末與黏合劑混合而成形之生片進行燒結所得之磁石構成永久磁石,因此因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。 Further, according to the rare earth permanent magnet of the present invention, the magnet obtained by sintering the green sheet formed by mixing the magnet powder and the binder constitutes a permanent magnet, so that shrinkage due to sintering becomes uniform without sintering. After the deformation such as warping or depression, and the pressure unevenness in the case of no pressurization, the correction processing after the previous sintering is not required, and the manufacturing steps can be simplified. Thereby, the permanent magnet can be formed with higher dimensional accuracy.

又,根據本發明之稀土類永久磁石,即便於藉由壓粉成形使磁石粉末成形之情形時,亦可使燒結後之永久磁石之密度高密度化。 Further, according to the rare earth permanent magnet of the present invention, even when the magnet powder is molded by powder compaction, the density of the permanent magnet after sintering can be increased.

又,根據本發明之稀土類永久磁石之製造方法,藉由非加壓燒 結對成形體進行燒結後,進而藉由加壓燒結進行燒結,因此可使燒結後之永久磁石之密度高密度化(全緻密化)。又,於進行加壓燒結時,於相對於施加磁場之方向之垂直方向對燒結體進行加壓,因此不會因對燒結體之加壓而使配向後之磁石粒子之C軸(易磁化軸)方向變化。因此,無使配向度降低之虞,亦可防止磁特性之降低。 Moreover, the method for producing a rare earth permanent magnet according to the present invention is produced by non-pressure burning After the cemented body is sintered and further sintered by pressure sintering, the density of the permanent magnet after sintering can be made higher (all densification). Further, when the pressure sintering is performed, the sintered body is pressurized in the direction perpendicular to the direction in which the magnetic field is applied, so that the C axis of the magnet particles after the alignment is not pressed by the sintered body (the easy magnetization axis) ) The direction changes. Therefore, it is possible to prevent a decrease in magnetic properties without lowering the alignment degree.

又,根據本發明之稀土類永久磁石之製造方法,於藉由加壓燒結對燒結體進行燒結之步驟中,藉由單軸加壓燒結進行燒結,因此因由燒結引起之收縮變得均勻,而可防止產生燒結後之翹曲或凹陷等變形。又,亦可防止配向度之降低。 Further, according to the method for producing a rare earth permanent magnet of the present invention, in the step of sintering the sintered body by pressure sintering, sintering is performed by uniaxial pressure sintering, so that shrinkage due to sintering becomes uniform. It can prevent deformation such as warpage or depression after sintering. Moreover, it is also possible to prevent a decrease in the degree of alignment.

又,根據本發明之稀土類永久磁石之製造方法,於藉由加壓燒結對燒結體進行燒結之步驟中,藉由通電燒結進行燒結,因此可急速升溫、冷卻,又,可於較低之溫度區域內進行燒結。其結果,可縮短燒結步驟中之升溫、保持時間,可製作抑制磁石粒子之晶粒成長之緻密之燒結體。 Further, according to the method for producing a rare earth permanent magnet of the present invention, in the step of sintering the sintered body by pressure sintering, sintering is performed by electric conduction sintering, so that the temperature can be rapidly increased and cooled, and the lower portion can be cooled. Sintering takes place in the temperature zone. As a result, the temperature rise and the holding time in the sintering step can be shortened, and a dense sintered body which suppresses grain growth of the magnet particles can be produced.

又,根據本發明之稀土類永久磁石之製造方法,藉由將所製造之稀土類永久磁石之密度設為95%以上,可不在磁石之內部形成空隙而防止因空隙使磁石特性大幅降低。 Moreover, according to the method for producing a rare earth permanent magnet of the present invention, by setting the density of the rare earth permanent magnet to be produced to 95% or more, it is possible to prevent the magnetic properties from being greatly lowered by the voids without forming voids in the magnet.

又,根據本發明之稀土類永久磁石之製造方法,即便於為了脫碳而對成形體進行鍛燒處理之情形時,亦可使燒結後之永久磁石之密度高密度化。 Moreover, according to the method for producing a rare earth permanent magnet of the present invention, even when the molded body is subjected to calcination treatment for decarburization, the density of the permanent magnet after sintering can be increased.

又,根據本發明之稀土類永久磁石之製造方法,藉由使成形體於非氧化性環境下以2℃/min以下之升溫速度升溫至設定溫度後,於設定溫度下保持一定時間,而進行鍛燒處理,因此可隨著緩慢之溫度變化,階段性地去除成形體中所含之碳。因此,可不在磁石之內部形成大量空隙而製造密度較高之稀土類永久磁石。 Further, according to the method for producing a rare earth permanent magnet of the present invention, the molded body is heated to a set temperature at a temperature increase rate of 2 ° C/min or less in a non-oxidizing atmosphere, and then held at a set temperature for a predetermined period of time. The calcination treatment can remove the carbon contained in the formed body stepwise with a slow temperature change. Therefore, a rare earth permanent magnet having a high density can be produced without forming a large number of voids inside the magnet.

又,根據本發明之稀土類永久磁石之製造方法,藉由對將磁石 粉末與黏合劑混合而成形之生片進行燒結所得之磁石構成永久磁石,因此因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。 Further, according to the method for producing a rare earth permanent magnet according to the present invention, by using a magnet The magnet obtained by sintering the green sheet formed by mixing the powder and the binder constitutes a permanent magnet, so that the shrinkage due to sintering becomes uniform without deformation such as warpage or depression after sintering, and no pressure is applied. The pressure is uneven, so the correction processing after the previous sintering is not required, and the manufacturing steps can be simplified. Thereby, the permanent magnet can be formed with higher dimensional accuracy.

進而,根據本發明之稀土類永久磁石之製造方法,即便於藉由壓粉成形使磁石粉末成形之情形時,亦可使燒結後之永久磁石之密度高密度化。 Further, according to the method for producing a rare earth permanent magnet of the present invention, even when the magnet powder is molded by powder molding, the density of the permanent magnet after sintering can be increased.

1‧‧‧永久磁石 1‧‧‧ permanent magnet

10‧‧‧粗粉碎磁石粉末 10‧‧‧ coarsely crushed magnet powder

11‧‧‧噴射磨機 11‧‧‧jet mill

12‧‧‧複合物 12‧‧‧Complex

13‧‧‧支持基材 13‧‧‧Support substrate

14‧‧‧生片 14‧‧‧Life

15‧‧‧模具 15‧‧‧Mold

16‧‧‧塊體 16‧‧‧ Block

17‧‧‧塊體 17‧‧‧ Block

18‧‧‧狹縫 18‧‧‧ slit

19‧‧‧模腔 19‧‧‧ cavity

20‧‧‧供給口 20‧‧‧ supply port

21‧‧‧噴出口 21‧‧‧Spray outlet

22‧‧‧塗佈輥 22‧‧‧Application roller

25‧‧‧螺線管 25‧‧‧ Solenoid

26‧‧‧加熱板 26‧‧‧heating plate

27‧‧‧箭頭 27‧‧‧ arrow

30‧‧‧磁場施加裝置 30‧‧‧Magnetic field application device

31‧‧‧線圈部 31‧‧‧ coil department

32‧‧‧線圈部 32‧‧‧ coil part

33‧‧‧磁極片 33‧‧‧Magnetic pole pieces

34‧‧‧磁極片 34‧‧‧Magnetic pole pieces

35‧‧‧膜 35‧‧‧film

37‧‧‧加熱裝置 37‧‧‧ heating device

38‧‧‧平板構件 38‧‧‧Table components

39‧‧‧空洞 39‧‧‧ hollow

40‧‧‧成形體 40‧‧‧Formed body

41‧‧‧燒結模具 41‧‧‧Sintering mould

42‧‧‧真空腔室 42‧‧‧vacuum chamber

43‧‧‧上部衝頭 43‧‧‧Upper punch

44‧‧‧下部衝頭 44‧‧‧lower punch

45‧‧‧上部衝頭電極 45‧‧‧Upper punch electrode

46‧‧‧下部衝頭電極 46‧‧‧ Lower punch electrode

50‧‧‧燒結體 50‧‧‧Sintered body

D‧‧‧間隙 D‧‧‧ gap

圖1係表示本發明之永久磁石之整體圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a general view showing a permanent magnet of the present invention.

圖2係表示本發明之永久磁石之製造步驟的說明圖。 Fig. 2 is an explanatory view showing a manufacturing step of the permanent magnet of the present invention.

圖3係表示本發明之永久磁石之製造步驟中尤其是生片之成形步驟的說明圖。 Fig. 3 is an explanatory view showing a step of forming a green sheet, particularly a green sheet, in the manufacturing process of the permanent magnet of the present invention.

圖4係表示本發明之永久磁石之製造步驟中尤其是生片之加熱步驟及磁場配向步驟的說明圖。 Fig. 4 is an explanatory view showing a heating step and a magnetic field alignment step of a green sheet in the manufacturing process of the permanent magnet of the present invention.

圖5係表示於生片之面內垂直方向配向磁場之例的圖。 Fig. 5 is a view showing an example in which a magnetic field is aligned in the vertical direction in the plane of the green sheet.

圖6係對使用熱介質(聚矽氧油)之加熱裝置進行說明之圖。 Fig. 6 is a view for explaining a heating device using a heat medium (polyoxygenated oil).

圖7係對本發明之永久磁石之製造步驟中尤其是鍛燒步驟之升溫態樣進行說明的圖。 Fig. 7 is a view for explaining a heating state of a permanent magnet in the manufacturing process of the present invention, in particular, a calcination step.

圖8係表示本發明之永久磁石之製造步驟中尤其是燒結體之加壓燒結步驟的說明圖。 Fig. 8 is an explanatory view showing a step of press-sintering of a sintered body in the manufacturing process of the permanent magnet of the present invention.

圖9係表示關於實施例與比較例之各磁石之各種測定結果的圖。 Fig. 9 is a view showing various measurement results of the respective magnets of the examples and the comparative examples.

以下,對於本發明之稀土類永久磁石及稀土類永久磁石之製造方法,一面參照以下圖式一面對具體化之一實施形態詳細地進行說明。 Hereinafter, the method for producing the rare earth permanent magnet and the rare earth permanent magnet of the present invention will be described in detail with reference to the following embodiment.

[永久磁石之構成] [Composition of permanent magnets]

首先,對本發明之永久磁石1之構成進行說明。圖1係表示本發明之永久磁石1之整體圖。再者,圖1所示之永久磁石1具備扇型形狀,永久磁石1之形狀根據沖裁形狀而變化。 First, the configuration of the permanent magnet 1 of the present invention will be described. Figure 1 is a general view showing a permanent magnet 1 of the present invention. Further, the permanent magnet 1 shown in Fig. 1 has a fan shape, and the shape of the permanent magnet 1 changes depending on the punched shape.

本發明之永久磁石1為Nd-Fe-B系之各向異性磁石。再者,各成分之含量設為Nd:27~40wt%、B:0.8~2wt%、Fe(電解鐵):60~70wt%。又,為了提高磁特性,亦可含有少量Dy、Tb、Co、Cu、Al、Si、Ga、Nb、V、Pr、Mo、Zr、Ta、Ti、W、Ag、Bi、Zn、Mg等其他元素。圖1係表示本實施形態之永久磁石1之整體圖。 The permanent magnet 1 of the present invention is an anisotropic magnet of the Nd-Fe-B system. Further, the content of each component is Nd: 27 to 40% by weight, B: 0.8 to 2% by weight, and Fe (electrolytic iron): 60 to 70% by weight. Further, in order to improve the magnetic properties, a small amount of Dy, Tb, Co, Cu, Al, Si, Ga, Nb, V, Pr, Mo, Zr, Ta, Ti, W, Ag, Bi, Zn, Mg, etc. may be contained. element. Fig. 1 is a view showing the entire permanent magnet 1 of the present embodiment.

此處,永久磁石1係具備例如0.05mm~10mm(例如1mm)之厚度之薄膜狀之永久磁石。永久磁石1如下所述般藉由對利用壓粉成形而成形之成形體或由混合有磁石粉末與黏合劑之混合物成形而成之成形體(生坯)進行燒結而製造。又,生坯係如下所述般藉由使混合有磁石粉末與黏合劑之混合物(漿料或複合物)成形為特定形狀(例如片材形狀、塊體形狀、最終製品形狀等)而製作。再者,亦可暫且使混合物成形為最終製品形狀以外之形狀,其後進行沖裁加工、切削加工、變形加工等,藉此成為形成最終製品形狀之構成。又,尤其是若成為於暫且使混合物形成片材形狀後加工成最終製品形狀之構成,則可藉由以連續步驟進行生產而提高生產性,又,亦可提高成形之精度。於使混合物形成片材形狀之情形時,製成具備例如0.05mm~10mm(例如1mm)之厚度之薄膜狀之片材構件。再者,即便於形成片材形狀之情形時,只要積層複數片,則亦可製造大型之永久磁石1。 Here, the permanent magnet 1 is a film-shaped permanent magnet having a thickness of, for example, 0.05 mm to 10 mm (for example, 1 mm). The permanent magnet 1 is produced by sintering a molded body formed by powder molding or a molded body (green body) obtained by mixing a mixture of a magnet powder and a binder as described below. Further, the green body is produced by molding a mixture (slurry or composite) in which a mixture of a magnet powder and a binder is mixed into a specific shape (for example, a sheet shape, a block shape, a final product shape, etc.) as follows. Further, the mixture may be temporarily molded into a shape other than the shape of the final product, and then subjected to punching, cutting, deformation processing, or the like, thereby forming a shape of the final product. Further, in particular, when the mixture is formed into a sheet shape and then processed into a final product shape, productivity can be improved by production in a continuous step, and the precision of molding can be improved. When the mixture is formed into a sheet shape, a film member having a film thickness of, for example, 0.05 mm to 10 mm (for example, 1 mm) is formed. Further, even in the case of forming a sheet shape, a large permanent magnet 1 can be produced by laminating a plurality of sheets.

又,於本發明中,尤其於藉由對生坯進行燒結而製造永久磁石1之情形時,混合於磁石粉末中之黏合劑可使用樹脂、長鏈烴、脂肪酸酯或該等之混合物等。 Further, in the present invention, in particular, when the permanent magnet 1 is produced by sintering the green body, the binder mixed in the magnet powder may be a resin, a long-chain hydrocarbon, a fatty acid ester or a mixture thereof. .

進而,於黏合劑使用樹脂之情形時,較佳為使用結構中不含氧 原子且具有解聚性之聚合物。又,如下所述般,為了再利用使磁石粉末與黏合劑之混合物成形為最終製品形狀時所產生之混合物之殘餘物,以及為了於將所成形之混合物加熱使之軟化之狀態下進行磁場配向,而使用熱塑性樹脂。具體而言,包含選自以下通式(1)所表示之單體中之1種或2種以上之聚合物或共聚物的聚合物較為適合。 Further, in the case where the binder is used as a binder, it is preferred that the structure does not contain oxygen. A polymer having an atom and having a depolymerization property. Further, as described below, the magnetic field alignment is performed in order to re-use the residue of the mixture produced by molding the mixture of the magnet powder and the binder into the final product shape, and in order to soften the formed mixture by heating it. And use a thermoplastic resin. Specifically, a polymer containing one or two or more polymers or copolymers selected from the monomers represented by the following formula (1) is suitable.

(其中,R1及R2表示氫原子、低級烷基、苯基或乙烯基) (wherein R 1 and R 2 represent a hydrogen atom, a lower alkyl group, a phenyl group or a vinyl group)

作為符合上述條件之聚合物,例如有:作為異丁烯之聚合物之聚異丁烯(PIB)、作為異戊二烯之聚合物之聚異戊二烯(異戊二烯橡膠、IR)、作為1,3-丁二烯之聚合物之聚丁二烯(丁二烯橡膠、BR)、作為苯乙烯之聚合物之聚苯乙烯、作為苯乙烯與異戊二烯之共聚物之苯乙烯-異戊二烯嵌段共聚物(SIS)、作為異丁烯與異戊二烯之共聚物之丁基橡膠(IIR)、作為苯乙烯與丁二烯之共聚物之苯乙烯-丁二烯嵌段共聚物(SBS)、作為2-甲基-1-戊烯之聚合物之2-甲基-1-戊烯聚合樹脂、作為2-甲基-1-丁烯之聚合物之2-甲基-1-丁烯聚合樹脂、作為α-甲基苯乙烯之聚合物之α-甲基苯乙烯聚合樹脂等。再者,為了對α-甲基苯乙烯聚合樹脂賦予柔軟性,較理想為添加低分子量之聚異丁烯。又,作為黏合劑中所使用之樹脂,亦可設為包含少量含有氧原子之單體之聚合物或共聚物(例如聚甲基丙烯酸丁酯或聚甲基丙烯酸甲酯等)之構成。進而,亦可使不屬於上述通式(1)之單體進行部分共聚合。即便於此情形時,亦可達成本案發明之目的。 Examples of the polymer satisfying the above conditions include polyisobutylene (PIB) which is a polymer of isobutylene, polyisoprene (isoprene rubber, IR) which is a polymer of isoprene, and 1, Polybutadiene (butadiene rubber, BR) of 3-butadiene polymer, polystyrene as polymer of styrene, styrene-isoprene as copolymer of styrene and isoprene Diene block copolymer (SIS), butyl rubber (IIR) as a copolymer of isobutylene and isoprene, styrene-butadiene block copolymer as a copolymer of styrene and butadiene ( SBS), 2-methyl-1-pentene polymer resin as a polymer of 2-methyl-1-pentene, 2-methyl-1- as a polymer of 2-methyl-1-butene Butylene polymer resin, α-methylstyrene polymer resin as a polymer of α-methylstyrene, and the like. Further, in order to impart flexibility to the α-methylstyrene polymer resin, it is preferred to add a low molecular weight polyisobutylene. Further, the resin used as the binder may be a polymer or a copolymer (for example, polybutyl methacrylate or polymethyl methacrylate) containing a small amount of a monomer containing an oxygen atom. Further, a monomer which does not belong to the above formula (1) may be partially copolymerized. Even in this case, the object of the invention can be achieved.

再者,作為黏合劑中所使用之樹脂,為了適當地進行磁場配向,較理想為使用於250℃以下軟化之熱塑性樹脂、更具體而言為玻璃轉移點或熔點250℃以下之熱塑性樹脂。 Further, as the resin used in the binder, in order to appropriately perform the magnetic field alignment, it is preferably a thermoplastic resin which is softened at 250 ° C or lower, more specifically, a glass transition point or a thermoplastic resin having a melting point of 250 ° C or lower.

另一方面,於黏合劑使用長鏈烴之情形時,較佳為使用於室溫下為固體且於室溫以上為液體之長鏈飽和烴(長鏈烷烴)。具體而言,較佳為使用碳數為18以上之長鏈飽和烴。並且,如下所述般對磁石粉末與黏合劑之混合物進行磁場配向時,於以長鏈烴之熔點以上之溫度加熱混合物使之軟化之狀態下進行磁場配向。 On the other hand, in the case where a long-chain hydrocarbon is used as the binder, it is preferred to use a long-chain saturated hydrocarbon (long-chain alkane) which is solid at room temperature and liquid at room temperature or higher. Specifically, it is preferred to use a long-chain saturated hydrocarbon having a carbon number of 18 or more. Further, when the mixture of the magnet powder and the binder is subjected to magnetic field alignment as described below, the mixture is heated in a state where the mixture is heated at a temperature higher than the melting point of the long-chain hydrocarbon to soften the magnetic field.

又,於黏合劑使用脂肪酸酯之情形時,亦同樣較佳為使用於室溫下為固體且於室溫以上為液體之硬脂酸甲酯或山萮酸甲酯等。並且,如下所述般對磁石粉末與黏合劑之混合物進行磁場配向時,於以脂肪酸酯之熔點以上之溫度加熱混合物使之軟化之狀態下進行磁場配向。 Further, when a fatty acid ester is used as the binder, it is also preferred to use methyl stearate or methyl behenate which is solid at room temperature and liquid at room temperature or higher. Further, when the mixture of the magnet powder and the binder is subjected to magnetic field alignment as described below, the magnetic field alignment is performed in a state where the mixture is heated and softened at a temperature equal to or higher than the melting point of the fatty acid ester.

藉由使用滿足上述條件之黏合劑作為混合於磁石粉末中之黏合劑,可減少磁石內所含之碳量及氧量。具體而言,將燒結後殘存於磁石之碳量設為2000ppm以下、更佳為1000ppm以下。又,將燒結後殘存於磁石之氧量設為5000ppm以下、更佳為2000ppm以下。 By using a binder satisfying the above conditions as a binder mixed in the magnet powder, the amount of carbon and the amount of oxygen contained in the magnet can be reduced. Specifically, the amount of carbon remaining in the magnet after sintering is 2,000 ppm or less, more preferably 1,000 ppm or less. Moreover, the amount of oxygen remaining in the magnet after sintering is 5,000 ppm or less, more preferably 2,000 ppm or less.

又,為了於使漿料或經加熱熔融之複合物成形時提高成形體之厚度精度,黏合劑之添加量係設為適當地填充磁石粒子間之空隙之量。例如,黏合劑相對於磁石粉末與黏合劑之合計量之比率設為1wt%~40wt%、更佳為2wt%~30wt%、進而較佳為3wt%~20wt%。 Further, in order to increase the thickness precision of the molded body when molding the slurry or the composite which is heated and melted, the amount of the binder added is an amount which appropriately fills the space between the magnet particles. For example, the ratio of the binder to the total amount of the magnet powder and the binder is from 1 wt% to 40 wt%, more preferably from 2 wt% to 30 wt%, still more preferably from 3 wt% to 20 wt%.

[永久磁石之製造方法] [Method of manufacturing permanent magnet]

繼而,使用圖2對本發明之永久磁石1之製造方法進行說明。圖2係表示本實施形態之永久磁石1之製造步驟之說明圖。 Next, a method of manufacturing the permanent magnet 1 of the present invention will be described with reference to Fig. 2 . Fig. 2 is an explanatory view showing a manufacturing procedure of the permanent magnet 1 of the embodiment.

首先,製造包含特定分率之Nd-Fe-B(例如Nd:32.7wt%、Fe(電 解鐵):65.96wt%、B:1.34wt%)之鑄錠(ingot)。其後,藉由搗碎機或壓碎機等將鑄錠粗粉碎成200μm左右之大小。或者,將鑄錠熔解,利用薄帶連鑄法(strip casting)製作薄片,並利用氫壓碎法使之粗粉化。藉此,獲得粗粉碎磁石粉末10。 First, Nd-Fe-B containing a specific fraction is produced (for example, Nd: 32.7 wt%, Fe (electricity) Iron (iron): 65.96 wt%, B: 1.34 wt%) ingot. Thereafter, the ingot is roughly pulverized to a size of about 200 μm by a masher, a crusher or the like. Alternatively, the ingot is melted, and a sheet is produced by strip casting, and coarsely pulverized by a hydrogen crushing method. Thereby, the coarsely pulverized magnet powder 10 is obtained.

繼而,藉由利用珠磨機11之濕式法或使用噴射磨機之乾式法等對粗粉碎磁石粉末10進行微粉碎。例如,於使用利用珠磨機11之濕式法之微粉碎中,於溶劑中將粗粉碎磁石粉末10微粉碎成特定範圍之粒徑(例如0.1μm~5.0μm),並且使磁石粉末分散於溶劑中。其後,利用真空乾燥等使濕式粉碎後之溶劑中所含之磁石粉末乾燥,提取乾燥之磁石粉末。又,用於粉碎之溶劑之種類並無特別限制,可使用:異丙醇、乙醇、甲醇等醇類,乙酸乙酯等酯類,戊烷、己烷等低級烴類,苯、甲苯、二甲苯等芳香族類,酮類,該等之混合物等。再者,較佳為使用溶劑中不含氧原子之溶劑。 Then, the coarsely pulverized magnet powder 10 is finely pulverized by a wet method using a bead mill 11 or a dry method using a jet mill. For example, in the fine pulverization using the wet method using the bead mill 11, the coarsely pulverized magnet powder 10 is finely pulverized into a specific range of particle diameter (for example, 0.1 μm to 5.0 μm) in a solvent, and the magnet powder is dispersed. In the solvent. Thereafter, the magnet powder contained in the solvent after the wet pulverization is dried by vacuum drying or the like to extract the dried magnet powder. Further, the type of the solvent to be pulverized is not particularly limited, and examples thereof include alcohols such as isopropyl alcohol, ethanol, and methanol, esters such as ethyl acetate, and lower hydrocarbons such as pentane and hexane, and benzene, toluene, and An aromatic group such as toluene, a ketone, a mixture of the above, and the like. Further, it is preferred to use a solvent which does not contain an oxygen atom in the solvent.

另一方面,於使用利用噴射磨機之乾式法之微粉碎中,於(a)含氧量實質上為0%之包含氮氣、氬氣、氦氣等惰性氣體之環境中、或(b)含氧量為0.0001~0.5%之包含氮氣、氬氣、氦氣等惰性氣體之環境中,藉由噴射磨機對經粗粉碎之磁石粉末進行微粉碎,形成具有特定範圍之粒徑(例如0.7μm~5.0μm)之平均粒徑之微粉末。再者,所謂氧濃度實質上為0%,並不限定於氧濃度完全為0%之情形時,係表示亦可含有於微粉之表面形成極少氧化覆膜之程度之量之氧。 On the other hand, in the fine pulverization using a dry method using a jet mill, (a) an atmosphere containing an inert gas such as nitrogen, argon or helium in an oxygen content of substantially 0%, or (b) In an environment containing an inert gas such as nitrogen gas, argon gas or helium gas having an oxygen content of 0.0001 to 0.5%, the coarsely pulverized magnet powder is finely pulverized by a jet mill to form a particle diameter having a specific range (for example, 0.7). A fine powder having an average particle diameter of μm to 5.0 μm). In addition, when the oxygen concentration is substantially 0%, it is not limited to the case where the oxygen concentration is completely 0%, and it means that oxygen may be contained in an amount which is extremely small in the surface of the fine powder.

繼而,使經珠磨機11等微粉碎之磁石粉末成形為所需形狀。再者,磁石粉末之成形例如包括使用模具成形為所需形狀之壓粉成形,或者使混合有磁石粉末與黏合劑之混合物成形為所需形狀之生坯成形。進而,壓粉成形包括將乾燥之微粉末填充至模腔中之乾式法、及不使包含磁石粉末之漿料乾燥而填充至模腔中之濕式法。另一方面,於生坯成形中,可使混合物直接成形為最終製品形狀,亦可使混合物 暫且成形為最終製品形狀以外之形狀,進行磁場配向,其後進行沖裁加工、切削加工、變形加工等,藉此形成最終製品形狀。於以下實施例中,使混合物暫且成形為片材形狀(以下稱為生片)後,加工成最終製品形狀。又,於使混合物成形為尤其是片材形狀之情形時,例如有利用如下方式之成形:於將混合有磁石粉末與黏合劑之複合物加熱後使其成形為片材形狀的熱熔塗敷,或者藉由將包含磁石粉末、黏合劑及有機溶劑之漿料塗敷於基材上而使其成形為片狀之漿料塗敷等。 Then, the magnet powder finely pulverized by the bead mill 11 or the like is formed into a desired shape. Further, the formation of the magnet powder includes, for example, powder molding in which a mold is formed into a desired shape, or a green mold in which a mixture of the magnet powder and the binder is mixed into a desired shape. Further, the powder molding includes a dry method in which the dried fine powder is filled into the cavity, and a wet method in which the slurry containing the magnet powder is not dried and filled into the cavity. On the other hand, in the green molding, the mixture can be directly formed into the shape of the final product, and the mixture can also be made. Temporarily formed into a shape other than the shape of the final product, magnetic field alignment is performed, and then punching, cutting, deformation processing, and the like are performed, thereby forming a final product shape. In the following examples, the mixture was temporarily formed into a sheet shape (hereinafter referred to as a green sheet) and then processed into a final product shape. Further, in the case of forming the mixture into a sheet shape in particular, for example, it is formed by hot-melt coating in which a composite in which a mixture of a magnet powder and a binder is heated and formed into a sheet shape is formed. Or, a slurry containing a magnet powder, a binder, and an organic solvent is applied to a substrate to form a sheet-like slurry coating or the like.

以下,特別對使用熱熔塗敷之生片成形進行說明。 Hereinafter, the green sheet molding using hot melt coating will be specifically described.

首先,藉由在經珠磨機11等微粉碎之磁石粉末中混合黏合劑,而製作包含磁石粉末及黏合劑之粉末狀之混合物(複合物)12。此處,作為黏合劑,可如上所述般使用樹脂、長鏈烴、脂肪酸酯或該等之混合物等。例如較佳為:於使用樹脂之情形時使用包含結構中不含氧原子且具有解聚性之聚合物的熱塑性樹脂,另一方面,於使用長鏈烴之情形時使用於室溫下為固體且於室溫以上為液體之長鏈飽和烴(長鏈烷烴)。又,於使用脂肪酸酯之情形時,較佳為使用硬脂酸甲酯或山萮酸甲酯等。又,黏合劑之添加量係設為如上所述般添加後之複合物12中之黏合劑相對於磁石粉末與黏合劑之合計量之比率成為1wt%~40wt%、更佳為2wt%~30wt%、進而較佳為3wt%~20wt%的量。 First, a powdery mixture (composite) 12 containing a magnet powder and a binder is prepared by mixing a binder in a magnet powder finely pulverized by a bead mill 11 or the like. Here, as the binder, a resin, a long-chain hydrocarbon, a fatty acid ester, a mixture of these, or the like can be used as described above. For example, it is preferred to use a thermoplastic resin containing a polymer having no oxygen atom and having depolymerization in the case of using a resin, and, on the other hand, a solid at room temperature in the case of using a long-chain hydrocarbon. And a long-chain saturated hydrocarbon (long-chain alkane) which is liquid above room temperature. Further, in the case of using a fatty acid ester, methyl stearate or methyl behenate or the like is preferably used. Further, the amount of the binder added is such that the ratio of the binder in the composite 12 added as described above to the total amount of the magnet powder and the binder is from 1% by weight to 40% by weight, more preferably from 2% by weight to 30% by weight. The amount of %, further preferably from 3 wt% to 20 wt%.

又,為了提高後續進行之磁場配向步驟中之配向度,亦可於上述複合物12中添加助長配向之添加劑。作為助長配向之添加劑,例如可使用烴系之添加劑,尤其理想為使用具有極性(具體而言,酸解離常數pKa未達41)之添加劑。又,添加劑之添加量依存於磁石粉末之粒徑,磁石粉末之粒徑越小,越需要增加添加量。作為具體添加量,相對於磁石粉末,設為0.1份~10份、更佳為1份~8份。並且,磁石粉末中所添加之添加劑附著於磁石粒子之表面,於下述磁場配向處理中具有輔助磁石粒子之旋動之作用。其結果,於施加磁場時配向容易進 行,可使磁石粒子之易磁化軸方向一致於同一方向(即,提高配向度)。尤其是,於向磁石粉末中添加黏合劑之情形時,於粒子表面存在黏合劑,故而配向時之摩擦力提高,粒子之配向性降低,因此加入添加劑之效果變得更明顯。 Further, in order to increase the degree of alignment in the subsequent magnetic field alignment step, an additive for promoting alignment may be added to the composite 12. As the additive for promoting the alignment, for example, a hydrocarbon-based additive can be used, and it is particularly preferable to use an additive having a polarity (specifically, an acid dissociation constant pKa of less than 41). Further, the amount of the additive to be added depends on the particle diameter of the magnet powder, and the smaller the particle diameter of the magnet powder, the more the amount of addition is required. The specific addition amount is 0.1 parts to 10 parts, more preferably 1 part to 8 parts, per part of the magnet powder. Further, the additive added to the magnet powder adheres to the surface of the magnet particles, and has an effect of assisting the rotation of the magnet particles in the magnetic field alignment treatment described below. As a result, the alignment is easy to advance when a magnetic field is applied. In the row, the direction of the easy magnetization axis of the magnet particles can be made to coincide with the same direction (ie, the alignment degree is improved). In particular, when a binder is added to the magnet powder, a binder is present on the surface of the particles, so that the frictional force at the time of alignment is improved, and the alignment property of the particles is lowered, so that the effect of adding an additive becomes more remarkable.

再者,黏合劑之添加係於包含氮氣、氬氣、氦氣等惰性氣體之環境下進行。再者,磁石粉末與黏合劑之混合例如係藉由將磁石粉末與黏合劑分別投入攪拌機中,利用攪拌機攪拌而進行。又,為了促進混練性,亦可進行加熱攪拌。又,磁石粉末與黏合劑之混合較理想為於包含氮氣、氬氣、氦氣等惰性氣體之環境下進行。又,尤其是於利用濕式法粉碎磁石粉末之情形時,亦可設為如下構成:不自用於粉碎之溶劑中提取磁石粉末,且於溶劑中添加黏合劑並進行混練,其後使溶劑揮發而獲得下述複合物12。 Further, the addition of the binder is carried out in an environment containing an inert gas such as nitrogen, argon or helium. Further, the mixing of the magnet powder and the binder is carried out, for example, by introducing the magnet powder and the binder into a mixer and stirring them with a stirrer. Further, in order to promote kneading, heating and stirring may be performed. Further, the mixing of the magnet powder and the binder is preferably carried out in an atmosphere containing an inert gas such as nitrogen, argon or helium. Further, in particular, when the magnet powder is pulverized by the wet method, the magnet powder may not be extracted from the solvent used for pulverization, and a binder may be added to the solvent and kneaded, and then the solvent may be volatilized. The following composite 12 was obtained.

繼而,藉由使複合物12成形為片狀而製作生片。尤其是於熱熔塗敷中,藉由將複合物12加熱而使複合物12熔融並成為流體狀,其後將其塗敷於分隔件等支持基材13上。其後,藉由進行散熱使之凝固,而於支持基材13上形成長條片狀之生片14。再者,將複合物12加熱熔融時之溫度根據所使用之黏合劑之種類或量而不同,設為50~300℃。其中,必須設為高於所使用之黏合劑之熔點的溫度。再者,於使用漿料塗敷之情形時,使磁石粉末及黏合劑(亦可進而包含助長配向之添加劑)分散於大量有機溶劑中,將漿料塗敷於分隔件等支持基材13上。其後,藉由進行乾燥使有機溶劑揮發,而於支持基材13上形成長條片狀之生片14。 Then, a green sheet is produced by forming the composite 12 into a sheet shape. In particular, in the hot melt coating, the composite 12 is melted and heated by heating the composite 12, and then applied to a support substrate 13 such as a separator. Thereafter, it is solidified by heat dissipation to form a long sheet-like green sheet 14 on the support substrate 13. Further, the temperature at which the composite 12 is heated and melted differs depending on the type or amount of the binder to be used, and is set to 50 to 300 °C. Among them, it must be set to a temperature higher than the melting point of the binder used. Further, in the case of using a slurry coating, the magnet powder and the binder (which may further contain an additive for promoting alignment) are dispersed in a large amount of an organic solvent, and the slurry is applied onto a support substrate 13 such as a separator. . Thereafter, the organic solvent is volatilized by drying to form a long sheet-like green sheet 14 on the support substrate 13.

此處,經熔融之複合物12之塗敷方式較佳為使用狹縫式模具方式或軋光輥方式等層厚控制性優異之方式。尤其是,為了實現較高之厚度精度,較理想為使用尤其層厚控制性優異(即,可於基材之表面塗敷高精度之厚度之層之方式)之模具方式或缺角輪塗敷方式。例 如,於狹縫式模具方式中,藉由利用齒輪泵將進行加熱而成為流體狀之複合物12擠出並插入至模具而進行塗敷。又,於軋光輥方式中,向經加熱之兩根輥之間隙添加一定量之複合物12,一面使輥旋轉一面於支持基材13上塗敷因輥之熱熔融之複合物12。又,作為支持基材13,例如使用經聚矽氧處理之聚酯膜。進而較佳為藉由使用消泡劑或進行加熱真空脫泡等,以使展開層中不殘存氣泡之方式充分地進行脫泡處理。又,亦可設為如下構成:並非塗敷於支持基材13上,而是利用擠出成形或射出成形使經熔融之複合物12成形為片狀並且擠出至支持基材13上,藉此於支持基材13上使生片14成形。 Here, the coating method of the molten composite 12 is preferably a method in which the layer thickness controllability such as a slit die method or a calender roll method is excellent. In particular, in order to achieve a high thickness precision, it is preferable to use a mold method or a notch wheel coating which is excellent in layer thickness control property (i.e., a layer which can apply a high-precision thickness layer on the surface of a substrate). the way. example For example, in the slit die method, the composite 12 which is heated by the gear pump is extruded and inserted into a mold to perform coating. Further, in the calender roll method, a certain amount of the composite 12 is added to the gap between the two heated rolls, and the composite 12 which is thermally melted by the rolls is applied to the support substrate 13 while rotating the rolls. Further, as the support substrate 13, for example, a polyester film treated with polyfluorene oxide is used. Further, it is preferable to sufficiently perform the defoaming treatment so that air bubbles do not remain in the developed layer by using an antifoaming agent or heating vacuum defoaming. Further, it is also possible to adopt a configuration in which the melted composite 12 is formed into a sheet shape by extrusion molding or injection molding, and is extruded onto the support substrate 13 without being applied to the support substrate 13. The green sheet 14 is formed on the support substrate 13.

以下,使用圖3特別對利用狹縫式模具方式之生片14之形成步驟進一步詳細地進行說明。圖3係表示利用狹縫式模具方式之生片14之形成步驟的模式圖。 Hereinafter, the steps of forming the green sheet 14 by the slit mold method will be described in more detail with reference to Fig. 3 . Fig. 3 is a schematic view showing a step of forming a green sheet 14 by a slit mold method.

如圖3所示,狹縫式模具方式中所使用之模具15係藉由使塊體16、17相互重合而形成,藉由塊體16、17之間之間隙而形成狹縫18及模腔(儲液部)19。模腔19與設置於塊體17之供給口20連通。並且,供給口20與由齒輪泵(未圖示)等構成之塗佈液之供給系統連接,對模腔19經由供給口20,利用定量泵等供給經計量之流體狀之複合物12。進而,供給至模腔19之流體狀之複合物12係向狹縫18送液,以單位時間一定量、寬度方向上均勻之壓力,根據預先設定之塗佈寬度自狹縫18之噴出口21噴出。另一方面,支持基材13係隨著塗佈輥22之旋轉,以預先設定之速度連續搬送。其結果,將所噴出之流體狀之複合物12以特定厚度塗佈於支持基材13,其後,進行散熱而凝固,藉此於支持基材13上使長條片狀之生片14成形。 As shown in FIG. 3, the mold 15 used in the slit mold method is formed by overlapping the blocks 16 and 17, and the slit 18 and the cavity are formed by the gap between the blocks 16 and 17. (liquid storage unit) 19. The cavity 19 communicates with the supply port 20 provided in the block 17. Further, the supply port 20 is connected to a supply system of a coating liquid composed of a gear pump (not shown) or the like, and supplies the measured fluid-like composite 12 to the cavity 19 via the supply port 20 by a metering pump or the like. Further, the fluid-like composite 12 supplied to the cavity 19 is supplied with liquid to the slit 18, and is supplied at a constant amount per unit time and uniformly in the width direction, and is ejected from the slit 21 of the slit 18 in accordance with a predetermined coating width. ejection. On the other hand, the support base material 13 is continuously conveyed at a predetermined speed as the coating roller 22 rotates. As a result, the discharged fluid-like composite 12 is applied to the support substrate 13 with a specific thickness, and then heat-dissipated and solidified, whereby the elongated sheet-like green sheet 14 is formed on the support substrate 13. .

又,於利用狹縫式模具方式之生片14之形成步驟中,較理想為對塗敷後之生片14之片材厚度進行實測,基於實測值對模具15與支持基材13間之間隙D進行反饋控制。又,較理想為使供給至模具15之流 體狀之複合物12之量之變動儘可能地降低(例如抑制為±0.1%以下之變動),進而使塗敷速度之變動亦儘可能地降低(例如抑制為±0.1%以下之變動)。藉此,可進一步提高生片14之厚度精度。再者,所形成之生片14之厚度精度相對於設計值(例如1mm)設為±10%以內、更佳為±3%以內、進而較佳為±1%以內。再者,另一方面,軋光輥方式中,藉由同樣地基於實測值控制軋光條件,可控制複合物12於支持基材13上之轉印膜厚。 Further, in the step of forming the green sheet 14 by the slit mold method, it is preferable to actually measure the thickness of the sheet of the green sheet 14 after the application, and the gap between the mold 15 and the support substrate 13 based on the measured value. D performs feedback control. Further, it is preferable to supply the flow to the mold 15 The variation in the amount of the composite 12 is as small as possible (for example, the variation is ±0.1% or less), and the fluctuation in the coating speed is also reduced as much as possible (for example, the variation is suppressed by ±0.1% or less). Thereby, the thickness precision of the green sheet 14 can be further improved. Further, the thickness accuracy of the formed green sheet 14 is set to within ±10%, more preferably within ±3%, and even more preferably within ±1% with respect to the design value (for example, 1 mm). Further, on the other hand, in the calender roll method, by controlling the calendering conditions based on the measured values in the same manner, the transfer film thickness of the composite 12 on the support substrate 13 can be controlled.

再者,生片14之設定厚度較理想為設定於0.05mm~20mm之範圍內。若將厚度設為小於0.05mm,則必須進行多層積層,故而生產性降低。 Further, the thickness of the green sheet 14 is preferably set to be in the range of 0.05 mm to 20 mm. When the thickness is less than 0.05 mm, it is necessary to laminate a plurality of layers, so that productivity is lowered.

繼而,進行藉由上述熱熔塗敷形成於支持基材13上之生片14之磁場配向。具體而言,首先,藉由將與支持基材13一併連續搬送之生片14加熱而使生片14軟化。具體而言,進行軟化至生片14之黏度成為1~1500Pa.s、更佳為1~500Pa.s為止。藉此,可適當地進行磁場配向。 Then, the magnetic field alignment of the green sheet 14 formed on the support substrate 13 by the above-described hot melt coating is performed. Specifically, first, the green sheet 14 is softened by heating the green sheet 14 continuously conveyed together with the support base material 13. Specifically, the viscosity is softened until the green sheet 14 has a viscosity of 1 to 1500 Pa. s, more preferably 1~500Pa. s so far. Thereby, the magnetic field alignment can be appropriately performed.

再者,將生片14加熱時之溫度及時間根據所使用之黏合劑之種類或量而不同,例如設為100~250℃、0.1~60分鐘。其中,為了使生片14軟化,必須設為所使用之黏合劑之玻璃轉移點或熔點以上之溫度。又,作為將生片14加熱之加熱方式,例如有利用加熱板之加熱方式或將熱介質(聚矽氧油)用作熱源之加熱方式。繼而,對因加熱軟化之生片14之面內方向且長度方向施加磁場,藉此進行磁場配向。所施加之磁場之強度設為5000[Oe]~150000[Oe]、較佳為10000[Oe]~120000[Oe]。其結果,使生片14中所含之磁石結晶之C軸(易磁化軸)配向於一方向上。再者,作為施加磁場之方向,亦可對生片14之面內方向且寬度方向施加磁場。又,亦可設為同時對複數片生片14配向磁場之構成。 Further, the temperature and time when the green sheet 14 is heated vary depending on the type or amount of the binder to be used, and is, for example, 100 to 250 ° C for 0.1 to 60 minutes. However, in order to soften the green sheet 14, it is necessary to set the temperature of the glass transition point or the melting point of the binder to be used. Further, as a heating method for heating the green sheet 14, there is, for example, a heating method using a hot plate or a heating method using a heat medium (polyoxygenated oil) as a heat source. Then, a magnetic field is applied to the in-plane direction and the longitudinal direction of the green sheet 14 which is softened by heating, thereby performing magnetic field alignment. The intensity of the applied magnetic field is set to 5000 [Oe] to 150,000 [Oe], preferably 10,000 [Oe] to 120,000 [Oe]. As a result, the C-axis (easy magnetization axis) of the magnet crystal contained in the green sheet 14 is aligned in one direction. Further, as a direction in which the magnetic field is applied, a magnetic field may be applied to the in-plane direction and the width direction of the green sheet 14. Further, it is also possible to adopt a configuration in which a plurality of green sheets 14 are simultaneously aligned with a magnetic field.

進而,於對生片14施加磁場時,可設為與加熱步驟同時進行施加磁場之步驟之構成,亦可於進行加熱步驟後且生片凝固前進行施加磁場之步驟。又,亦可設為於藉由熱熔塗敷所塗敷之生片14凝固前進行磁場配向之構成。於此情形時,無需加熱步驟。 Further, when a magnetic field is applied to the green sheet 14, a step of applying a magnetic field simultaneously with the heating step may be employed, and a step of applying a magnetic field may be performed after the heating step and before the green sheet is solidified. Further, it is also possible to adopt a configuration in which the green sheet 14 coated by the hot melt coating is subjected to magnetic field alignment before solidification. In this case, no heating step is required.

繼而,使用圖4對生片14之加熱步驟及磁場配向步驟更詳細地進行說明。圖4係表示生片14之加熱步驟及磁場配向步驟之模式圖。再者,於圖4所示之例中,對與加熱步驟同時進行磁場配向步驟之例進行說明。 Next, the heating step and the magnetic field alignment step of the green sheet 14 will be described in more detail using FIG. Fig. 4 is a schematic view showing a heating step and a magnetic field alignment step of the green sheet 14. Further, in the example shown in Fig. 4, an example in which the magnetic field alignment step is performed simultaneously with the heating step will be described.

如圖4所示,對上述藉由狹縫式模具方式所塗敷之生片14之加熱及磁場配向係對藉由輥進行連續搬送之狀態之長條片狀之生片14而進行。即,將用以進行加熱及磁場配向之裝置配置於塗敷裝置(模具等)之下游側,藉由與上述塗敷步驟連續之步驟而進行。 As shown in Fig. 4, the heating and the magnetic field alignment of the green sheet 14 coated by the slit die method are performed on the long sheet-like green sheet 14 in a state of being continuously conveyed by a roller. That is, the apparatus for performing heating and magnetic field alignment is disposed on the downstream side of the coating device (such as a mold), and is carried out by a step that is continuous with the coating step.

具體而言,於模具15或塗佈輥22之下游側,以使所搬送之支持基材13及生片14於螺線管25內通過之方式配置螺線管25。進而,於螺線管25內相對於生片14上下成對地配置加熱板26。然後,藉由上下成對地配置之加熱板26將生片14加熱,並且向螺線管25通入電流,藉此於長條片狀之生片14之面內方向(即,與生片14之片材面平行之方向)且長度方向上產生磁場。藉此,利用加熱使連續搬送之生片14軟化,並且對經軟化之生片14之面內方向且長度方向(圖4之箭頭27方向)施加磁場,而可對生片14適當地配向均勻之磁場。尤其,藉由將施加磁場之方向設為面內方向,可防止生片14之表面起毛。 Specifically, on the downstream side of the mold 15 or the application roller 22, the solenoid 25 is placed so that the conveyed support substrate 13 and the green sheet 14 pass through the solenoid 25. Further, the heating plate 26 is disposed in the solenoid 25 in the upper and lower sides of the green sheet 14 in pairs. Then, the green sheet 14 is heated by the heating plate 26 disposed in pairs up and down, and an electric current is supplied to the solenoid 25, thereby in the in-plane direction of the long sheet-like green sheet 14 (ie, with the green sheet) The sheet of 14 is parallel to the direction of the surface and a magnetic field is generated in the longitudinal direction. Thereby, the continuous conveyance of the green sheet 14 is softened by heating, and a magnetic field is applied to the in-plane direction of the softened green sheet 14 and the longitudinal direction (the direction of the arrow 27 in Fig. 4), whereby the green sheet 14 can be appropriately aligned uniformly. The magnetic field. In particular, by setting the direction in which the magnetic field is applied to the in-plane direction, the surface of the green sheet 14 can be prevented from fluffing.

又,於磁場配向後進行之生片14之散熱及凝固較佳為於搬送狀態下進行。藉此,可使製造步驟進一步效率化。 Further, the heat dissipation and solidification of the green sheet 14 after the magnetic field alignment is preferably carried out in a conveyed state. Thereby, the manufacturing steps can be further streamlined.

再者,於對生片14之面內方向且寬度方向進行磁場配向之情形時,係以代替螺線管25而於所搬送之生片14之左右配置一對磁場線圈之方式構成。並且,藉由對各磁場線圈通入電流,可於長條片狀之生 片14之面內方向且寬度方向產生磁場。 In the case where the magnetic field is aligned in the in-plane direction and the width direction of the green sheet 14, a pair of magnetic field coils are disposed on the right and left sides of the conveyed green sheet 14 instead of the solenoid 25. Moreover, by applying current to each of the magnetic field coils, it is possible to grow in a long strip shape. A magnetic field is generated in the in-plane direction and the width direction of the sheet 14.

又,亦可將磁場配向設為相對於生片14之面之垂直方向。於對相對於生片14之面之垂直方向進行磁場配向之情形時,例如藉由使用磁極片等之磁場施加裝置進行。具體而言,如圖5所示,使用磁極片等之磁場施加裝置30包含以中心軸成為同一軸之方式平行配置之2個環狀線圈部31、32、及分別配置於線圈部31、32之環形孔之2個大致圓柱狀之磁極片33、34,相對於所搬送之生片14隔開特定間隔地配置。並且,藉由對線圈部31、32通入電流,而於相對於生片14之面之垂直方向產生磁場,進行生片14之磁場配向。再者,於將磁場配向方向設為相對於生片14之面之垂直方向之情形時,較佳為如圖5所示般對生片14於積層有支持基材13之相反側之面亦積層膜35。藉此,可防止生片14之表面之起毛。 Further, the magnetic field alignment may be set to be perpendicular to the surface of the green sheet 14. In the case where the magnetic field is aligned in the direction perpendicular to the surface of the green sheet 14, it is performed by, for example, a magnetic field applying device using a magnetic pole piece or the like. Specifically, as shown in FIG. 5 , the magnetic field applying device 30 using a magnetic pole piece or the like includes two annular coil portions 31 and 32 that are arranged in parallel so that the central axis is the same axis, and are disposed in the coil portions 31 and 32, respectively. The two substantially cylindrical pole pieces 33 and 34 of the annular hole are arranged at a predetermined interval with respect to the conveyed green sheet 14. Then, by applying a current to the coil portions 31 and 32, a magnetic field is generated in a direction perpendicular to the surface of the green sheet 14, and the magnetic field alignment of the green sheet 14 is performed. Further, when the direction of the magnetic field alignment is set to be perpendicular to the surface of the green sheet 14, it is preferable that the green sheet 14 is also on the opposite side of the laminated support substrate 13 as shown in FIG. The laminated film 35. Thereby, the raising of the surface of the green sheet 14 can be prevented.

又,亦可使用以熱介質(聚矽氧油)為熱源之加熱方式代替上述利用加熱板26之加熱方式。此處,圖6係表示使用熱介質之加熱裝置37之一例之圖。 Further, instead of the heating method using the heating plate 26, a heating method using a heat medium (polyoxygenated oil) as a heat source may be used. Here, Fig. 6 is a view showing an example of a heating device 37 using a heat medium.

如圖6所示,加熱裝置37係設為如下構成:於成為發熱體之平板構件38之內部形成大致U字型之空洞39,於空洞39內使加熱至特定溫度(例如100~300℃)之作為熱介質之聚矽氧油循環。並且,於螺線管25內相對於生片14上下成對地配置加熱裝置37代替圖4所示之加熱板26。藉此,經由藉由熱介質而發熱之平板構件38對連續搬送之生片14進行加熱使之軟化。再者,平板構件38可與生片14抵接,亦可隔開特定間隔而配置。並且,藉由配置於經軟化之生片14之周圍之螺線管25,對生片14之面內方向且長度方向(圖4之箭頭27方向)施加磁場,可對生片14適當地配向均勻之磁場。再者,於圖6所示之使用熱介質之加熱裝置37中,不如通常之加熱板26般於內部具有電熱線,故而即便於配置於磁場中之情形時,亦無因勞侖茲力(Lorentz force)使電熱 線振動或切斷之虞,可適當地進行生片14之加熱。又,於利用電流進行控制之情形時,具有因電源之ON或OFF使電熱線振動而成為疲勞破壞之原因之問題,但藉由使用以熱介質為熱源之加熱裝置37,可消除此種問題。 As shown in Fig. 6, the heating device 37 has a configuration in which a substantially U-shaped cavity 39 is formed inside the flat member 38 which is a heating element, and is heated to a specific temperature (for example, 100 to 300 ° C) in the cavity 39. It is used as a heat medium for the polyoxygen oil cycle. Further, in the solenoid 25, a heating device 37 is disposed in the upper and lower rows of the green sheet 14 in place of the heating plate 26 shown in Fig. 4 . Thereby, the continuously conveyed green sheet 14 is softened by the flat member 38 which generates heat by the heat medium. Further, the flat member 38 may be in contact with the green sheet 14, or may be disposed at a predetermined interval. Further, by applying a magnetic field to the in-plane direction and the longitudinal direction (the direction of the arrow 27 in FIG. 4) of the green sheet 14 by the solenoid 25 disposed around the softened green sheet 14, the green sheet 14 can be appropriately aligned. A uniform magnetic field. Further, in the heating device 37 using the heat medium shown in Fig. 6, the heating wire is not provided inside the heating plate 26 as usual, and therefore, even in the case of being placed in a magnetic field, there is no Lorentz force ( Lorentz force) After the wire is vibrated or cut, the heating of the green sheet 14 can be appropriately performed. Further, when the current is controlled, there is a problem that the heating wire is vibrated due to the ON or OFF of the power source, which causes fatigue fracture. However, by using the heating device 37 using the heat medium as the heat source, the problem can be eliminated. .

此處,於不使用熱熔成形而利用通常之狹縫式模具方式或刮刀方式等,藉由漿料等流動性較高之液狀物使生片14成形之情形時,若於產生磁場之梯度時搬入生片14,則會將生片14中所含之磁石粉末牽引至磁場較強之側,有產生形成生片14之漿料之偏液、即生片14之厚度偏差之虞。相對於此,於如本發明般藉由熱熔成形使複合物12成形為生片14之情形時,室溫附近之黏度達到數萬~數十萬Pa.s,不會發生磁場梯度通過時之磁性粉末之集中。進而,藉由於均勻磁場中進行搬送、加熱,可使黏合劑之黏度降低,僅以均勻磁場中之轉矩進行同樣之C軸配向。 Here, in the case where the green sheet 14 is formed by a liquid material having a high fluidity such as a slurry by a conventional slit die method or a doctor blade method without using hot melt molding, if a magnetic field is generated When the green sheet 14 is moved in the gradient, the magnet powder contained in the green sheet 14 is pulled to the side where the magnetic field is strong, and the liquid phase of the slurry forming the green sheet 14, that is, the thickness deviation of the green sheet 14 is generated. On the other hand, when the composite 12 is formed into the green sheet 14 by hot melt forming as in the present invention, the viscosity at room temperature reaches tens of thousands to hundreds of thousands of Pa. s, the concentration of magnetic powder when the magnetic field gradient passes does not occur. Further, by carrying out the transportation and heating in a uniform magnetic field, the viscosity of the adhesive can be lowered, and the same C-axis alignment can be performed only with the torque in the uniform magnetic field.

又,於不使用熱熔成形而利用通常之狹縫式模具方式或刮刀方式等藉由包含有機溶劑之漿料等流動性較高之液狀物使生片14成形之情形時,若欲製作厚度超過1mm之片材,則由於乾燥時漿料等中所含之有機溶劑氣化導致之發泡成為課題。進而,若為了抑制發泡而增加乾燥時間,則會產生磁石粉末之沈澱,隨之產生磁石粉末之密度分佈相對於重力方向之偏差,成為燒成後之翹曲之原因。因此,於漿料之成形中,為了實質上規制厚度之上限值,必須使生片以1mm以下之厚度成形,其後進行積層。然而,於此情形時,黏合劑彼此之融合不足,於其後之脫黏合劑步驟(鍛燒處理)中發生層間剝離,其成為C軸(易磁化軸)配向性之降低、即殘留磁通密度(Br)之下降原因。相對於此,於如本發明般藉由熱熔成形使複合物12成形為生片14之情形時,由於不含有機溶劑,因此即便於製作厚度超過1mm之片材之情形時,亦可消除如上所述之發泡之擔憂。並且,黏合劑處於充分融合 之狀態,故而無於脫黏合劑步驟中發生層間剝離之虞。 In the case where the green sheet 14 is formed by a liquid material having a high fluidity such as a slurry containing an organic solvent, such as a conventional slit die method or a doctor blade method, the hot-melt molding is used. When the sheet having a thickness of more than 1 mm is foamed by the vaporization of the organic solvent contained in the slurry or the like during drying, it becomes a problem. Further, when the drying time is increased in order to suppress the foaming, precipitation of the magnet powder occurs, and a variation in the density distribution of the magnet powder with respect to the direction of gravity occurs, which causes the warpage after the firing. Therefore, in the molding of the slurry, in order to substantially regulate the upper limit of the thickness, it is necessary to form the green sheet to a thickness of 1 mm or less, and then laminate the green sheet. However, in this case, the binders are insufficiently fused to each other, and interlayer peeling occurs in the subsequent debonding step (calcining treatment), which becomes a decrease in the alignment of the C-axis (easy magnetization axis), that is, residual magnetic flux. The reason for the decrease in density (Br). On the other hand, when the composite 12 is formed into the green sheet 14 by hot melt forming as in the present invention, since the organic solvent is not contained, even when a sheet having a thickness of more than 1 mm is produced, it can be eliminated. The fear of foaming as described above. And the adhesive is fully integrated In this state, there is no entanglement of interlayer peeling in the debonding step.

又,於同時對複數片生片14施加磁場之情形時,例如於積層有複數片(例如6片)生片14之狀態下進行連續搬送,以使所積層之生片14於螺線管25內通過之方式構成。藉此,可提高生產性。 Further, when a magnetic field is applied to the plurality of green sheets 14 at the same time, for example, continuous deposition is carried out in a state in which a plurality of sheets (for example, 6 sheets) of the green sheets 14 are laminated so that the green sheets 14 of the layers are placed on the solenoid 25 It is formed by means of internal passage. Thereby, productivity can be improved.

其後,將進行了磁場配向之生片14沖裁成所需之製品形狀(例如圖1所示之扇形形狀),而使成形體40成形。 Thereafter, the green sheet 14 subjected to the magnetic field alignment is punched into a desired product shape (for example, a fan shape as shown in Fig. 1), and the formed body 40 is molded.

繼而,藉由使所成形之成形體40於大氣壓、或加壓至高於大氣壓之壓力或低於大氣壓之壓力(例如1.0Pa或1.0MPa)之非氧化性環境(尤其於本發明中為氫氣環境或氫氣與惰性氣體之混合氣體環境)下、於黏合劑分解溫度(於添加助長配向之添加劑之情形時,為亦滿足該添加劑之熱分解溫度以上之條件的溫度)下保持數小時~數十小時(例如5小時)而進行鍛燒處理。於在氫氣環境下進行之情形時,例如鍛燒中之氫氣之供給量設為5L/min。藉由進行鍛燒處理,可利用解聚反應等使黏合劑等有機化合物分解成單體並飛散去除。即,進行減少成形體40中之碳量之所謂脫碳。又,鍛燒處理係於將成形體40中之碳量設為2000ppm以下、更佳為1000ppm以下之條件下進行。藉此,可利用其後之燒結處理對永久磁石1整體進行緻密燒結,不會使殘留磁通密度或保磁力降低。又,於將上述進行鍛燒處理時之加壓條件設為高於大氣壓之壓力而進行之情形時,較理想為設為15MPa以下。再者,若將加壓條件設為高於大氣壓之壓力、更具體為0.2MPa,則尤其可期待碳量減少之效果。 Then, by forming the formed body 40 at atmospheric pressure, or by pressure to a pressure higher than atmospheric pressure or a pressure lower than atmospheric pressure (for example, 1.0 Pa or 1.0 MPa) (especially in the present invention, a hydrogen atmosphere) Or in a mixed gas atmosphere of hydrogen and an inert gas, at a temperature at which the binder decomposes (in the case of adding an additive for promoting the alignment, a temperature which satisfies the conditions above the thermal decomposition temperature of the additive) for several hours to several tens The calcination treatment is carried out for an hour (for example, 5 hours). In the case of performing in a hydrogen atmosphere, for example, the supply amount of hydrogen in calcination is set to 5 L/min. By performing the calcination treatment, an organic compound such as a binder can be decomposed into monomers by a depolymerization reaction or the like and scattered and removed. That is, so-called decarburization which reduces the amount of carbon in the molded body 40 is performed. In addition, the calcination treatment is carried out under the conditions that the amount of carbon in the molded body 40 is 2,000 ppm or less, more preferably 1,000 ppm or less. Thereby, the entire permanent magnet 1 can be densely sintered by the subsequent sintering treatment without deteriorating the residual magnetic flux density or the coercive force. In the case where the pressurization condition at the time of the calcination treatment is carried out at a pressure higher than atmospheric pressure, it is preferably 15 MPa or less. Further, when the pressurization condition is set to a pressure higher than atmospheric pressure, more specifically 0.2 MPa, the effect of reducing the amount of carbon can be expected in particular.

再者,黏合劑分解溫度係基於黏合劑分解產物及分解殘渣之分析結果而決定。具體而言,選擇達成以下情形之溫度範圍:收集黏合劑之分解產物,未產生單體以外之分解產物,且於殘渣之分析中亦未檢測到由殘留之黏合劑成分之副反應所產生之產物。黏合劑分解溫度雖根據黏合劑之種類而不同,但設為200℃~900℃、更佳為400℃~ 600℃(例如450℃)。 Further, the binder decomposition temperature is determined based on the analysis results of the binder decomposition product and the decomposition residue. Specifically, a temperature range is selected in which the decomposition product of the binder is collected, no decomposition products other than the monomer are produced, and no side reaction due to the residual binder component is detected in the residue analysis. product. The decomposition temperature of the binder varies depending on the type of the binder, but it is set to 200 ° C to 900 ° C, more preferably 400 ° C. 600 ° C (for example 450 ° C).

又,上述鍛燒處理較佳為與進行通常之磁石之燒結之情況相比減慢升溫速度。具體而言,將升溫速度設為2℃/min以下(例如1.5℃/min)。因此,於進行鍛燒處理之情形時,如圖7所示般以2℃/min以下之特定之升溫速度升溫,達到預先設定之設定溫度(黏合劑分解溫度)後,於該設定溫度下保持數小時~數十小時,藉此進行鍛燒處理。如上所述之鍛燒處理係藉由減慢升溫速度,階段性地去除而非急遽地去除成形體40中之碳,因此可使燒結後之永久磁石之密度上升(即,減少永久磁石中之空隙)。並且,若將升溫速度設為2℃/min以下,則可將燒結後之永久磁石之密度設為95%以上,可期待較高之磁石特性。 Further, it is preferable that the calcination treatment slows down the temperature increase rate as compared with the case of sintering a normal magnet. Specifically, the temperature increase rate is set to 2 ° C / min or less (for example, 1.5 ° C / min). Therefore, in the case of performing the calcination treatment, as shown in FIG. 7, the temperature is raised at a specific temperature increase rate of 2 ° C/min or less, and after reaching a preset set temperature (adhesive decomposition temperature), the temperature is maintained at the set temperature. The calcination treatment is carried out for several hours to several tens of hours. The calcining treatment as described above removes the carbon in the formed body 40 stepwise rather than sharply by slowing down the rate of temperature rise, so that the density of the permanent magnet after sintering can be increased (i.e., reduced in the permanent magnet) Void). In addition, when the temperature increase rate is 2° C./min or less, the density of the permanent magnet after sintering can be made 95% or more, and high magnet characteristics can be expected.

又,亦可將經鍛燒處理鍛燒而成之成形體40繼續保持於真空環境下而進行脫氫處理。於脫氫處理中,藉由使經鍛燒處理產生之成形體40中之NdH3(活性度大)自NdH3(活性度大)向NdH2(活性度小)階段性地變化,而使經鍛燒處理活化之成形體40之活性度降低。藉此,即便於其後使經鍛燒處理鍛燒而成之成形體40向大氣中移動之情形時,亦可防止Nd與氧結合,不會降低殘留磁通密度或保磁力。又,亦可期待使磁石結晶之結構自NdH2等恢復至Nd2Fe14B結構之效果。 Further, the molded body 40 obtained by calcining by calcination may be further subjected to a dehydrogenation treatment while maintaining the vacuum atmosphere. In the dehydrogenation treatment, NdH 3 (large activity) in the molded body 40 produced by the calcination treatment is changed stepwise from NdH 3 (large activity) to NdH 2 (small activity). The activity of the molded body 40 activated by the calcination treatment is lowered. Thereby, even when the molded body 40 calcined by the calcination treatment is moved to the atmosphere, Nd can be prevented from being combined with oxygen, and the residual magnetic flux density or coercive force is not lowered. Further, an effect of restoring the structure of the magnet crystal from NdH 2 or the like to the Nd 2 Fe 14 B structure can be expected.

繼而,進行對經鍛燒處理鍛燒而成之成形體40進行非加壓燒結之非加壓燒結處理。具體而言,不對成形體40進行加壓,而於真空環境下以特定之升溫速度升溫至800℃~1080℃左右之燒成溫度,並保持0.1~2小時左右。於此期間成為真空燒成,作為真空度,較佳為設為5Pa以下、較佳為10-2Pa以下。然後,進行燒結,結果獲得經燒結之磁石之成形體(以下稱為燒結體50)。 Then, a non-pressure sintering treatment for non-pressure-sintering the formed body 40 which has been calcined by calcination is performed. Specifically, the molded body 40 is not pressurized, but is heated to a firing temperature of about 800 ° C to 1080 ° C at a specific temperature increase rate in a vacuum atmosphere, and is maintained for about 0.1 to 2 hours. In this period, vacuum firing is performed, and as the degree of vacuum, it is preferably 5 Pa or less, preferably 10 -2 Pa or less. Then, sintering is performed, and as a result, a molded body of the sintered magnet (hereinafter referred to as sintered body 50) is obtained.

繼而,進行對經非加壓燒結燒結之燒結體50進而進行加壓燒結之加壓燒結處理。再者,進行加壓燒結時之加壓方向設為相對於施加 磁場之方向(例如生片之面內方向且長度方向)垂直之方向。即,對與經磁場配向處理配向之磁石粒子之C軸(易磁化軸)方向之垂直方向進行加壓。作為加壓燒結,例如有:熱壓燒結、熱均壓加壓(HIP)燒結、超高壓合成燒結、氣體加壓燒結、放電電漿(SPS)燒結等。其中,為了抑制燒結時之磁石粒子之晶粒成長,並且抑制燒結後之磁石所產生之翹曲,較佳為使用為於單軸方向上加壓之單軸加壓燒結且藉由通電燒結進行燒結之SPS燒結。再者,於以SPS燒結進行燒結之情形時,較佳為將加壓值設為例如0.01MPa~100MPa,於數Pa以下之真空環境下以10℃/min上升至940℃,其後保持5分鐘。其後進行冷卻,再次於300℃~1000℃下進行2小時熱處理。然後,進行燒結,結果製造出永久磁石1。於本發明中,藉由進行上述加壓燒結,可使永久磁石之密度較加壓燒結前上升(即,減少永久磁石中之空隙)。尤其是若將燒結後之永久磁石之密度設為95%以上,則可期待較高之磁石特性。又,藉由將鍛燒處理中之升溫速度如上所述般設為2℃/min以下,可使燒結度之永久磁石進一步高密度化。 Then, a pressure sintering treatment is performed on the sintered body 50 which is sintered by non-compression sintering and further subjected to pressure sintering. Furthermore, the pressing direction at the time of pressure sintering is set as opposed to the application The direction of the magnetic field (for example, the in-plane direction and the length direction of the green sheet) is perpendicular to the direction. That is, the direction perpendicular to the C-axis (easy magnetization axis) direction of the magnet particles aligned by the magnetic field alignment treatment is applied. Examples of the pressure sintering include hot press sintering, hot pressurization (HIP) sintering, ultrahigh pressure synthetic sintering, gas pressure sintering, and discharge plasma (SPS) sintering. In order to suppress the grain growth of the magnet particles during sintering and to suppress the warpage caused by the magnet after sintering, it is preferably used for uniaxial pressure sintering in a uniaxial direction and by electric conduction sintering. Sintered SPS is sintered. Further, in the case of sintering by SPS sintering, it is preferred to set the pressurization value to, for example, 0.01 MPa to 100 MPa, and to increase the temperature to 10 ° C/min to 940 ° C in a vacuum atmosphere of several Pa or less, and thereafter to maintain 5 minute. Thereafter, the mixture was cooled, and heat treatment was again performed at 300 ° C to 1000 ° C for 2 hours. Then, sintering is performed, and as a result, permanent magnet 1 is produced. In the present invention, by performing the above-described pressure sintering, the density of the permanent magnet can be increased before the pressure sintering (that is, the void in the permanent magnet is reduced). In particular, when the density of the permanent magnet after sintering is 95% or more, a high magnet characteristic can be expected. In addition, by setting the temperature increase rate in the calcining treatment to 2 ° C / min or less as described above, the permanent magnet of the degree of sintering can be further increased in density.

以下,使用圖8對利用SPS燒結進行之燒結體50之加壓燒結步驟更詳細地進行說明。圖8係表示利用SPS燒結進行之燒結體50之加壓燒結步驟的模式圖。 Hereinafter, the pressure sintering step of the sintered body 50 by SPS sintering will be described in more detail with reference to Fig. 8 . Fig. 8 is a schematic view showing a pressure sintering step of the sintered body 50 by SPS sintering.

於如圖8所示般進行SPS燒結之情形時,首先,於石墨製之燒結模具41設置燒結體50。再者,燒結體50係以於相對於施加磁場之方向(例如生片之面內方向且長度方向)垂直之方向加壓之方式設置。然後,將設置於燒結模具41之燒結體50保持於真空腔室42內,並設置同樣為石墨製之上部衝頭43與下部衝頭44。然後,使用連接於上部衝頭43之上部衝頭電極45與連接於下部衝頭44之下部衝頭電極46,施加低電壓且高電流之直流脈衝電壓/電流。與此同時,對上部衝頭43及下部衝頭44使用加壓機構(未圖示)分別自上下方向施加荷重。其結果, 對設置於燒結模具41內之燒結體50一面加壓一面進行燒結。又,為了提高生產性,較佳為同時對複數個(例如10個)成形體進行SPS燒結。再者,於同時對複數個燒結體50進行SPS燒結之情形時,可於一空間配置複數個燒結體50,亦可將每個燒結體50配置於不同空間。再者,於將每個燒結體50配置於不同空間之情形時,於每個空間內對燒結體50進行加壓之上部衝頭43或下部衝頭44係以於各空間之間成為一體(即,藉由驅動成為一體之一個上部衝頭43及下部衝頭44可同時對處於各空間之複數個成形體進行加壓)之方式構成。 In the case where SPS sintering is performed as shown in Fig. 8, first, a sintered body 50 is provided in a graphite sintered mold 41. Further, the sintered body 50 is provided so as to be pressurized in a direction perpendicular to a direction in which a magnetic field is applied (for example, an in-plane direction and a longitudinal direction of the green sheet). Then, the sintered body 50 provided in the sintering mold 41 is held in the vacuum chamber 42, and the upper punch 43 and the lower punch 44, which are also made of graphite, are provided. Then, a low voltage and high current DC pulse voltage/current is applied using the punch electrode 45 connected to the upper portion of the upper punch 43 and the punch electrode 46 connected to the lower portion of the lower punch 44. At the same time, a load is applied to the upper punch 43 and the lower punch 44 from the vertical direction by a pressurizing mechanism (not shown). the result, The sintered body 50 provided in the sintering mold 41 is pressed while being pressed. Further, in order to improve productivity, it is preferred to simultaneously perform SPS sintering on a plurality of (for example, ten) shaped bodies. Further, when a plurality of sintered bodies 50 are simultaneously subjected to SPS sintering, a plurality of sintered bodies 50 may be disposed in one space, and each sintered body 50 may be disposed in a different space. Further, when each sintered body 50 is disposed in a different space, the sintered body 50 is pressurized in each space, and the upper punch 43 or the lower punch 44 is integrated between the spaces ( In other words, the upper punch 43 and the lower punch 44 which are integrally driven can be configured to simultaneously press a plurality of molded bodies in the respective spaces.

[實施例] [Examples]

以下,對於本發明之實施例一面與比較例進行比較一面進行說明。 Hereinafter, an embodiment of the present invention will be described in comparison with a comparative example.

(實施例1) (Example 1)

實施例1係Nd-Fe-B系磁石,合金組成以wt%計設為Nd/Fe/B=32.7/65.96/1.34。又,藉由於磁石粉末中添加黏合劑而製作複合物。作為黏合劑,使用聚異丁烯(PIB)。再者,黏合劑相對於磁石粉末之添加量係設為4份。又,藉由狹縫式模具方式將經加熱熔融之複合物塗敷於基材上而成形8mm厚之生片。又,藉由加熱至200℃之加熱板對所成形之生片進行5分鐘加熱,並且於面內方向且長度方向對生片施加12T之磁場,藉此進行磁場配向。然後,於磁場配向後,於氫氣環境下對沖裁成所需形狀之生片進行鍛燒(升溫速度為1.5℃/min且於達到450℃後保持5小時),其後,以真空燒結進行非加壓燒結。進而,將藉由非加壓燒結進行燒結而成之燒結體設置於SPS燒結裝置之燒結模具內,對施加磁場之方向之垂直方向加壓10kgf/cm2,並且於920℃下保持5分鐘而進行加壓燒結。再者,其他步驟係設為與上述[永久磁石之製造方法]相同之步驟。 Example 1 was a Nd-Fe-B based magnet, and the alloy composition was set to Nd/Fe/B = 32.7 / 65.96 / 1.34 in wt%. Further, a composite is produced by adding a binder to the magnet powder. As the binder, polyisobutylene (PIB) is used. Further, the amount of the binder added to the magnet powder was set to 4 parts. Further, the heat-melted composite was applied to a substrate by a slit die method to form a green sheet having a thickness of 8 mm. Further, the formed green sheet was heated by a heating plate heated to 200 ° C for 5 minutes, and a magnetic field of 12 T was applied to the green sheet in the in-plane direction and the longitudinal direction to thereby perform magnetic field alignment. Then, after the magnetic field is aligned, the green sheet which has been punched into a desired shape in a hydrogen atmosphere is calcined (heating rate is 1.5 ° C / min and maintained at 450 ° C for 5 hours), and thereafter, vacuum sintering is performed. Pressure sintering. Further, the sintered body obtained by sintering by non-pressure sintering was placed in a sintering mold of an SPS sintering apparatus, and pressed in a direction perpendicular to the direction in which the magnetic field was applied by 10 kgf/cm 2 and held at 920 ° C for 5 minutes. Pressure sintering is performed. In addition, the other steps are the same as the above [manufacturing method of permanent magnet].

(實施例2、3) (Examples 2 and 3)

藉由與實施例1相同之條件分別製作。 Each was produced under the same conditions as in Example 1.

(比較例1~3) (Comparative examples 1 to 3)

實施例1~3之永久磁石係均不進行加壓燒結而僅藉由非加壓燒結對成形體進行燒結的永久磁石(即,實施例1~3之各永久磁石係進行加壓燒結前之永久磁石)。 Each of the permanent magnets of Examples 1 to 3 was subjected to pressure sintering, and only the permanent magnet which sintered the molded body by non-pressure sintering (that is, before the permanent magnets of Examples 1 to 3 were subjected to pressure sintering) Permanent magnet).

(實施例與比較例之比較) (Comparative Example vs. Comparative Example)

對實施例1~3及比較例1~3之燒結後之各磁石之配向度[%]及密度[%]進行測定。又,對實施例1~3及比較例1~3之各磁石測定殘留磁通密度[kG]與保磁力[kOe]。再者,配向度之測定係藉由使用直流自記磁通計(東英工業股份有限公司製造之「TRF-5BH-25auto」,最大施加磁場25kOe)對Br(殘留磁通密度)與Jmax(最大磁化)進行測定並算出Br/Jmax而進行。於圖9中表示測定結果之一覽表。 The degree of alignment [%] and density [%] of each of the sintered magnets of Examples 1 to 3 and Comparative Examples 1 to 3 were measured. Further, the residual magnetic flux density [kG] and the coercive force [kOe] were measured for each of the magnets of Examples 1 to 3 and Comparative Examples 1 to 3. In addition, the measurement of the degree of alignment is performed by using a DC self-recording magnetic fluxmeter ("TRF-5BH-25auto" manufactured by Dongying Industrial Co., Ltd., the maximum applied magnetic field of 25 kOe) versus Br (residual magnetic flux density) and Jmax (maximum Magnetization) was carried out by measuring and calculating Br/Jmax. A list of measurement results is shown in FIG.

若將實施例1之永久磁石與比較例1之永久磁石之密度加以比較,則未進行加壓燒結之比較例1之永久磁石之密度為97%,相對於此,其後進行加壓燒結之實施例1之永久磁石之密度高於比較例1之永久磁石,密度為99%。即,可認為藉由於非加壓燒結後進而進行加壓燒結,磁石之密度提高。再者,如圖9所示,永久磁石之密度對磁石特性影響較大,密度較高之實施例1之永久磁石於殘留磁通密度或保磁力之方面顯示較高之值。再者,能夠確認到若密度為95%以上,則可發揮充分之磁特性。並且,即便暫時非加壓燒結後且加壓燒結前之永久磁石之密度未達95%,亦可藉由進行加壓燒結而將密度設為95%以上。 When the permanent magnet of Example 1 was compared with the density of the permanent magnet of Comparative Example 1, the density of the permanent magnet of Comparative Example 1 which was not subjected to pressure sintering was 97%, and thereafter, pressure sintering was performed. The permanent magnet of Example 1 had a higher density than the permanent magnet of Comparative Example 1, and had a density of 99%. That is, it is considered that the density of the magnet is improved by the pressure sintering after the non-pressure sintering. Further, as shown in Fig. 9, the density of the permanent magnet has a large influence on the characteristics of the magnet, and the permanent magnet of the first embodiment having a high density shows a high value in terms of residual magnetic flux density or coercive force. In addition, it was confirmed that sufficient magnetic properties can be exhibited if the density is 95% or more. Further, even after the temporary non-pressure sintering and the density of the permanent magnet before the pressure sintering is less than 95%, the density can be made 95% or more by pressure sintering.

又,若將實施例1之永久磁石與比較例1之永久磁石之配向度加以比較,則進行加壓燒結後之永久磁石(實施例1)之配向度與進行加壓燒結前之永久磁石(比較例1)相比,配向度並未降低。即,可知藉由將進行加壓燒結時之加壓方向設為施加磁場之方向(藉由磁場配向 處理進行配向之磁石粒子之C軸(易磁化軸)方向)之垂直方向,不會使藉由對燒結體之加壓進行磁場配向後之磁石粒子之C軸(易磁化軸)方向變化,可維持較高之配向狀態。 Further, when the permanent magnet of the first embodiment is compared with the degree of alignment of the permanent magnet of Comparative Example 1, the degree of alignment of the permanent magnet after the pressure sintering (Example 1) and the permanent magnet before the pressure sintering are performed ( In Comparative Example 1), the degree of alignment was not lowered. That is, it can be seen that the direction of pressurization when performing pressure sintering is the direction in which the magnetic field is applied (by magnetic field alignment) The vertical direction of the C-axis (easy magnetization axis) direction of the magnet particles to be aligned is not changed in the direction of the C-axis (easy magnetization axis) of the magnet particles after the magnetic field alignment of the sintered body is pressed. Maintain a high alignment state.

又,實施例2、3亦同樣,且與比較例2、3相比,密度提高,磁石特性亦提高。又,配向度並未降低。 Further, in the same manner as in Examples 2 and 3, the density was improved and the magnet characteristics were improved as compared with Comparative Examples 2 and 3. Also, the degree of alignment has not decreased.

如以上所說明般,於本實施形態之永久磁石1及永久磁石1之製造方法中,將磁石原料粉碎成磁石粉末,並將經粉碎之磁石粉末與黏合劑混合,藉此產生複合物12。並且,藉由熱熔成形使所產生之複合物12於支持基材13上成形為片狀而製作生片14。其後,將所成形之生片14加熱而使之軟化,並且對經加熱之生片14施加磁場,藉此進行磁場配向,進而,藉由將磁場配向後之生片14真空燒結後進而進行加壓燒結而製造永久磁石1。其結果,因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。又,即便於使永久磁石薄膜化之情形時,亦可不使材料良率下降且防止加工步驟數增加。又,對所成形之生片14進行加熱並且對經加熱之生片14施加磁場,藉此進行磁場配向,因此即便於成形後,亦可適當地對生片14進行磁場配向,可提高永久磁石之磁特性。又,無磁場配向時產生偏液、即生片14之厚度偏差之虞。進而,藉由於均勻磁場中進行搬送、加熱,可使黏合劑之黏度降低,僅以均勻磁場中之轉矩進行相同之C軸配向。進而,即便於製作厚度超過1mm之生片14之情形時,亦不會發泡,而成為黏合劑充分融合之狀態,因此無於脫黏合劑步驟(鍛燒處理)中發生層間剝離之虞。又,於藉由非加壓燒結對成形體40進行燒結後進而藉由加壓燒結進行燒結,因此可使燒結後之永久磁石之密度高密度化(全緻密化)。又,於進行加壓燒結時,於相對於施加磁場之方向之垂直方 向對燒結體50進行加壓,因此不會因對燒結體50之加壓而使配向後之磁石粒子之C軸(易磁化軸)方向變化。因此,無使配向度降低之虞,亦可防止磁特性之降低。 As described above, in the method for producing the permanent magnet 1 and the permanent magnet 1 of the present embodiment, the magnet raw material is pulverized into a magnet powder, and the pulverized magnet powder and the binder are mixed to produce the composite 12. Then, the resulting composite 12 is formed into a sheet shape on the support substrate 13 by hot melt molding to produce a green sheet 14. Thereafter, the formed green sheet 14 is heated and softened, and a magnetic field is applied to the heated green sheet 14, thereby performing magnetic field alignment, and further, vacuum sintering of the green sheet 14 after the magnetic field is aligned is performed. Permanent magnet 1 is produced by pressure sintering. As a result, the shrinkage due to sintering becomes uniform, and deformation such as warpage or depression after sintering does not occur, and the pressure is not uniform when there is no pressurization, so that it is not necessary to perform the correction processing after the previous sintering. Simplify manufacturing steps. Thereby, the permanent magnet can be formed with higher dimensional accuracy. Moreover, even when the permanent magnet is thinned, the material yield can be prevented from decreasing and the number of processing steps can be prevented from increasing. Further, since the formed green sheet 14 is heated and a magnetic field is applied to the heated green sheet 14 to perform magnetic field alignment, the green sheet can be appropriately aligned with the green sheet 14 after the molding, and the permanent magnet can be improved. Magnetic properties. Further, when there is no magnetic field alignment, the liquid phase is generated, that is, the thickness deviation of the green sheet 14 is exceeded. Further, by carrying out the transportation and heating in a uniform magnetic field, the viscosity of the adhesive can be lowered, and the same C-axis alignment can be performed only with the torque in the uniform magnetic field. Further, even in the case of producing the green sheet 14 having a thickness of more than 1 mm, the foaming agent does not foam and the binder is sufficiently fused, so that no delamination occurs in the debonding step (calcining treatment). Further, since the molded body 40 is sintered by non-pressure sintering and then sintered by pressure sintering, the density of the permanent magnet after sintering can be made high density (all densification). Moreover, when performing pressure sintering, it is perpendicular to the direction of the applied magnetic field. Since the sintered body 50 is pressurized, the direction of the C-axis (easy magnetization axis) of the aligned magnet particles is not changed by the pressurization of the sintered body 50. Therefore, it is possible to prevent a decrease in magnetic properties without lowering the alignment degree.

又,於藉由加壓燒結對燒結體50進行燒結之步驟中,藉由單軸加壓燒結進行燒結,因此因由燒結引起之收縮變得均勻,而可防止產生燒結後之翹曲或凹陷等變形。又,亦可防止配向度之降低。 Further, in the step of sintering the sintered body 50 by pressure sintering, sintering is performed by uniaxial pressure sintering, so that shrinkage due to sintering becomes uniform, and warpage or depression after sintering can be prevented. Deformation. Moreover, it is also possible to prevent a decrease in the degree of alignment.

又,於藉由加壓燒結對燒結體50進行燒結之步驟中,藉由通電燒結進行燒結,因此可急速升溫、冷卻,又,可於較低之溫度區域進行燒結。其結果,可縮短燒結步驟中之升溫、保持時間,可製作抑制磁石粒子之晶粒成長之緻密之燒結體。 Further, in the step of sintering the sintered body 50 by pressure sintering, sintering is performed by electric conduction sintering, so that the temperature can be rapidly increased and cooled, and sintering can be performed in a lower temperature region. As a result, the temperature rise and the holding time in the sintering step can be shortened, and a dense sintered body which suppresses grain growth of the magnet particles can be produced.

又,藉由將稀土類永久磁石之密度設為95%以上,可不在磁石之內部形成空隙而防止因空隙使磁石特性大幅降低。 Moreover, by setting the density of the rare earth permanent magnet to 95% or more, it is possible to prevent the magnetic properties from being greatly lowered by the voids without forming voids inside the magnet.

又,即便於為了脫碳而對成形體40進行鍛燒處理之情形時,亦可使燒結後之永久磁石之密度高密度化。 Moreover, even when the molded body 40 is subjected to calcination treatment for decarburization, the density of the permanent magnet after sintering can be increased.

又,藉由使成形體40於非氧化性環境下以2℃/min以下之升溫速度升溫至設定溫度後,於設定溫度下保持一定時間,而進行鍛燒處理,因此可隨著緩慢之溫度變化,階段性地去除成形體40中所含之碳。因此,可不在磁石之內部形成大量空隙而製造密度較高之稀土類永久磁石。 Further, the molded body 40 is heated to a set temperature at a temperature increase rate of 2 ° C/min or less in a non-oxidizing atmosphere, and then held at a set temperature for a predetermined period of time to perform a calcination treatment, so that it can be accompanied by a slow temperature. The carbon contained in the formed body 40 is removed stepwise. Therefore, a rare earth permanent magnet having a high density can be produced without forming a large number of voids inside the magnet.

又,藉由對將磁石粉末與黏合劑混合而成形之生片進行燒結所得之磁石構成永久磁石,因此因由燒結引起之收縮變得均勻,而不會產生燒結後之翹曲或凹陷等變形,又,無加壓時之壓力不均,因此無需進行先前進行之燒結後之修正加工,可簡化製造步驟。藉此,可以較高之尺寸精度使永久磁石成形。 Further, since the magnet obtained by sintering the green sheet formed by mixing the magnet powder and the binder constitutes a permanent magnet, the shrinkage due to sintering becomes uniform, and deformation such as warpage or depression after sintering does not occur. Further, since the pressure is not uniform when there is no pressurization, it is not necessary to perform the correction processing after the previous sintering, and the manufacturing steps can be simplified. Thereby, the permanent magnet can be formed with higher dimensional accuracy.

再者,當然本發明並不限定於上述實施例,可於不脫離本發明之主旨之範圍內進行各種改良、變化。 It is a matter of course that the present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.

例如,磁石粉末之粉碎條件、混練條件、成形條件、磁場配向步驟、鍛燒條件、燒結條件等不限於上述實施例中所記載之條件。例如,於上述實施例中,藉由使用珠磨機之濕式粉碎將磁石原料粉碎,亦可藉由利用噴射磨機之乾式粉碎進行粉碎。又,只要進行鍛燒時之環境為非氧化性環境,則亦可於氫氣環境以外之環境(例如氮氣環境、氦氣環境等、氬氣環境等)下進行。又,於上述實施例中,藉由SPS燒結對磁石進行燒結,亦可使用其他加壓燒結方法(例如熱壓燒結等)對磁石進行燒結。又,亦可省略鍛燒處理。於此情形時,於燒結處理之過程中進行脫碳。 For example, the pulverization conditions, the kneading conditions, the molding conditions, the magnetic field alignment step, the calcination conditions, the sintering conditions, and the like of the magnet powder are not limited to the conditions described in the above examples. For example, in the above embodiment, the magnet raw material is pulverized by wet pulverization using a bead mill, or may be pulverized by dry pulverization using a jet mill. Moreover, if the environment in the case of calcination is a non-oxidizing environment, it may be carried out in an environment other than a hydrogen atmosphere (for example, a nitrogen atmosphere, a helium atmosphere, or the like, an argon atmosphere, or the like). Further, in the above embodiment, the magnet is sintered by SPS sintering, and the magnet may be sintered by another pressure sintering method (for example, hot press sintering). Further, the calcination treatment may be omitted. In this case, decarburization is carried out during the sintering process.

又,於上述實施例中,使用樹脂、長鏈烴或脂肪酸酯作為黏合劑,亦可使用其他材料。 Further, in the above examples, a resin, a long-chain hydrocarbon or a fatty acid ester is used as the binder, and other materials may be used.

又,永久磁石亦可藉由對利用生片成形以外之成形(例如壓粉成形)而成形之成形體進行鍛燒及燒結而製造。於此情形時,亦可期待利用進行加壓燒結之高密度化。進而,於上述實施例中,於使磁石粉末成形後在氫氣環境或氫氣與惰性氣體之混合氣體環境下進行鍛燒,亦可對成形前之磁石粉末進行鍛燒處理,使作為鍛燒體之磁石粉末成形為成形體,其後進行燒結,藉此製造永久磁石。若設為此種構成,則對粉末狀之磁石粒子進行鍛燒,因此與對成形後之磁石粒子進行鍛燒之情況相比,可擴大成為鍛燒對象之磁石之表面積。即,可更確實地減少鍛燒體中之碳量。其中,於進行利用生坯之成形之情形時,為了以鍛燒處理使黏合劑熱分解,較理想為於成形後進行鍛燒處理。 Further, the permanent magnet can be produced by calcining and sintering a molded body formed by molding (for example, powder molding) other than green sheet molding. In this case, it is also expected to increase the density by pressure sintering. Further, in the above embodiment, after the magnet powder is molded, calcination is carried out in a hydrogen atmosphere or a mixed gas atmosphere of hydrogen gas and an inert gas, and the magnet powder before molding may be calcined to be used as a calcined body. The magnet powder is formed into a molded body, followed by sintering, thereby producing a permanent magnet. According to this configuration, since the powdery magnet particles are calcined, the surface area of the magnet to be calcined can be expanded as compared with the case where the magnet particles after molding are calcined. That is, the amount of carbon in the calcined body can be more surely reduced. In the case where the green body is formed, in order to thermally decompose the binder by the calcination treatment, it is preferred to carry out the calcination treatment after the molding.

又,於上述實施例中,同時進行生片14之加熱步驟與磁場配向步驟,亦可於進行加熱步驟後且生片14凝固前進行磁場配向步驟。又,於所塗敷之生片14凝固前(即,即便不進行加熱步驟,生片14亦為已軟化之狀態)進行磁場配向之情形時,亦可省略加熱步驟。 Further, in the above embodiment, the heating step and the magnetic field alignment step of the green sheet 14 are simultaneously performed, and the magnetic field alignment step may be performed after the heating step and before the green sheet 14 is solidified. Further, when the green sheet 14 to be applied is solidified (that is, the green sheet 14 is softened even if the heating step is not performed), the heating step may be omitted.

又,於上述實施例中,藉由連續之一連串步驟而進行利用狹縫 式模具方式之塗敷步驟、加熱步驟及磁場配向步驟,亦可以不藉由連續之步驟進行之方式構成。又,亦可分為塗敷步驟之前之第1步驟與加熱步驟以後之第2步驟,藉由各自連續之步驟而進行。於此情形時,可以如下方式構成:將所塗敷之生片14切斷為特定長度,對靜止狀態之生片14進行加熱及磁場施加,藉此進行磁場配向。 Moreover, in the above embodiment, the slit is performed by one consecutive series of steps The coating step, the heating step, and the magnetic field alignment step of the mold method may also be configured not by continuous steps. Further, it may be divided into a first step before the coating step and a second step after the heating step, and each step is carried out. In this case, the green sheet 14 to be applied may be cut to a specific length, and the green sheet 14 in a stationary state may be heated and magnetic field applied to perform magnetic field alignment.

又,於本發明中,列舉Nd-Fe-B系磁石為例進行了說明,亦可使用其他磁石(例如釤系鈷磁石、鋁鎳鈷磁石、鐵氧體磁石等)。又,關於磁石之合金組成,於本發明中使Nd成分多於計量組成,亦可設為計量組成。 Further, in the present invention, an Nd-Fe-B-based magnet is exemplified, and other magnets (for example, lanthanum-cobalt magnet, alnico magnet, ferrite magnet, or the like) may be used. Further, in the alloy composition of the magnet, in the present invention, the Nd component is made more than the metered composition, and may be a metering composition.

1‧‧‧永久磁石 1‧‧‧ permanent magnet

10‧‧‧粗粉碎磁石粉末 10‧‧‧ coarsely crushed magnet powder

11‧‧‧噴射磨機 11‧‧‧jet mill

12‧‧‧複合物 12‧‧‧Complex

13‧‧‧支持基材 13‧‧‧Support substrate

14‧‧‧生片 14‧‧‧Life

15‧‧‧模具 15‧‧‧Mold

25‧‧‧螺線管 25‧‧‧ Solenoid

40‧‧‧成形體 40‧‧‧Formed body

50‧‧‧燒結體 50‧‧‧Sintered body

Claims (16)

一種稀土類永久磁石,其特徵在於藉由如下步驟而製造:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;藉由對上述成形體施加磁場而進行磁場配向之步驟;藉由非加壓燒結對經磁場配向之上述成形體進行燒結之步驟;及藉由向相對於施加磁場之方向之垂直方向加壓之加壓燒結,對藉由上述非加壓燒結進行燒結之上述成形體即燒結體進而進行燒結的步驟。 A rare earth permanent magnet characterized by the steps of: pulverizing a magnet raw material into a magnet powder; forming a shaped body by molding the pulverized magnet powder; and applying the shaped body a step of performing a magnetic field alignment by a magnetic field; a step of sintering the formed body aligned by a magnetic field by non-pressure sintering; and a pressure sintering by pressurizing in a direction perpendicular to a direction in which the magnetic field is applied The step of sintering the sintered body, which is the above-mentioned molded body which is sintered by non-pressure sintering, is further sintered. 如請求項1之稀土類永久磁石,其中於上述藉由加壓燒結對燒結體進行燒結之步驟中,藉由單軸加壓燒結進行燒結。 The rare earth permanent magnet of claim 1, wherein the sintering is performed by uniaxial pressure sintering in the step of sintering the sintered body by pressure sintering. 如請求項1之稀土類永久磁石,其中於上述藉由加壓燒結對燒結體進行燒結之步驟中,藉由通電燒結進行燒結。 The rare earth permanent magnet of claim 1, wherein in the step of sintering the sintered body by pressure sintering, sintering is performed by electric conduction sintering. 如請求項1之稀土類永久磁石,其中藉由加壓燒結進行燒結而成之上述稀土類永久磁石之密度為95%以上。 The rare earth permanent magnet of claim 1, wherein the rare earth permanent magnet obtained by sintering by pressure sintering has a density of 95% or more. 如請求項1之稀土類永久磁石,其中於對上述成形體進行非加壓燒結前,將上述成形體於非氧化性環境下進行鍛燒,藉此去除上述成形體中之碳。 The rare earth permanent magnet of claim 1, wherein the formed body is calcined in a non-oxidizing atmosphere before the non-pressure sintering of the formed body, thereby removing carbon in the formed body. 如請求項5之稀土類永久磁石,其中於上述對成形體進行鍛燒之步驟中,使上述成形體於非氧化性環境下以2℃/min以下之升溫速度升溫至設定溫度後,於上述設定溫度下保持一定時間。 The rare earth permanent magnet according to claim 5, wherein in the step of calcining the formed body, the formed body is heated to a set temperature at a temperature increase rate of 2 ° C/min or less in a non-oxidizing atmosphere, and then Keep it at a set temperature for a certain period of time. 如請求項1至6中任一項之稀土類永久磁石,其中於上述使磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物, 藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 The rare earth permanent magnet according to any one of claims 1 to 6, wherein in the step of forming the magnet powder into a shaped body, a mixture of the magnet powder and the binder is mixed. A green sheet as the above-mentioned molded body was produced by molding the above mixture into a sheet shape. 如請求項1至6中任一項之稀土類永久磁石,其中於上述使磁石粉末成形為成形體之步驟中,藉由壓粉成形使上述磁石粉末成形為上述成形體。 The rare earth permanent magnet according to any one of claims 1 to 6, wherein in the step of molding the magnet powder into a molded body, the magnet powder is formed into the molded body by powder molding. 一種稀土類永久磁石之製造方法,其特徵在於包括:將磁石原料粉碎成磁石粉末之步驟;藉由使上述經粉碎之磁石粉末成形而形成成形體之步驟;藉由對上述成形體施加磁場而進行磁場配向之步驟;藉由非加壓燒結對經磁場配向之上述成形體進行燒結之步驟;及藉由向相對於施加磁場之方向之垂直方向加壓之加壓燒結,對藉由上述非加壓燒結進行燒結之上述成形體即燒結體進而進行燒結的步驟。 A method for producing a rare earth permanent magnet, comprising: a step of pulverizing a magnet raw material into a magnet powder; a step of forming a shaped body by molding the pulverized magnet powder; and applying a magnetic field to the formed body a step of performing magnetic field alignment; a step of sintering the above-mentioned formed body aligned by a magnetic field by non-pressurization sintering; and a pressure sintering by pressurization in a direction perpendicular to a direction in which a magnetic field is applied, by the above-mentioned non- The step of sintering the sintered body, which is a sintered body, which is sintered by pressure sintering. 如請求項9之稀土類永久磁石之製造方法,其中於上述藉由加壓燒結對燒結體進行燒結之步驟中,藉由單軸加壓燒結進行燒結。 The method for producing a rare earth permanent magnet according to claim 9, wherein in the step of sintering the sintered body by pressure sintering, sintering is performed by uniaxial pressure sintering. 如請求項9之稀土類永久磁石之製造方法,其中於上述藉由加壓燒結對燒結體進行燒結之步驟中,藉由通電燒結進行燒結。 The method for producing a rare earth permanent magnet according to claim 9, wherein in the step of sintering the sintered body by pressure sintering, sintering is performed by electric conduction sintering. 如請求項9之稀土類永久磁石之製造方法,其中藉由加壓燒結進行燒結而成之上述稀土類永久磁石之密度為95%以上。 The method for producing a rare earth permanent magnet according to claim 9, wherein the density of the rare earth permanent magnet obtained by sintering by pressure sintering is 95% or more. 如請求項9之稀土類永久磁石之製造方法,其中於對上述成形體進行非加壓燒結前,將上述成形體於非氧化性環境下進行鍛燒,藉此去除上述成形體中之碳。 The method for producing a rare earth permanent magnet according to claim 9, wherein the molded body is calcined in a non-oxidizing atmosphere before the non-pressure sintering of the formed body, thereby removing carbon in the molded body. 如請求項13之稀土類永久磁石之製造方法,其中於上述對成形體進行鍛燒之步驟中,使上述成形體於非氧化性環境下以 2℃/min以下之升溫速度升溫至設定溫度後,於上述設定溫度下保持一定時間。 The method for producing a rare earth permanent magnet according to claim 13, wherein in the step of calcining the shaped body, the formed body is subjected to a non-oxidizing environment. After the temperature increase rate of 2 ° C/min or less is raised to the set temperature, the temperature is maintained at the set temperature for a certain period of time. 如請求項9至14中任一項之稀土類永久磁石之製造方法,其中於上述使磁石粉末成形為成形體之步驟中,產生混合有上述磁石粉末與黏合劑之混合物,藉由使上述混合物成形為片狀而製作作為上述成形體之生片。 The method for producing a rare earth permanent magnet according to any one of claims 9 to 14, wherein in the step of forming the magnet powder into a shaped body, a mixture of the magnet powder and the binder is mixed by using the mixture. The green sheet as the molded body was produced into a sheet shape. 如請求項9至14中任一項之稀土類永久磁石之製造方法,其中於上述使磁石粉末成形為成形體之步驟中,藉由壓粉成形使上述磁石粉末成形為上述成形體。 The method for producing a rare earth permanent magnet according to any one of claims 9 to 14, wherein in the step of molding the magnet powder into a molded body, the magnet powder is formed into the molded body by powder molding.
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