TW201531390A - Device for taking material - Google Patents

Device for taking material Download PDF

Info

Publication number
TW201531390A
TW201531390A TW102148551A TW102148551A TW201531390A TW 201531390 A TW201531390 A TW 201531390A TW 102148551 A TW102148551 A TW 102148551A TW 102148551 A TW102148551 A TW 102148551A TW 201531390 A TW201531390 A TW 201531390A
Authority
TW
Taiwan
Prior art keywords
cylinder
fixed
reclaiming device
sliding
base
Prior art date
Application number
TW102148551A
Other languages
Chinese (zh)
Inventor
Qian Lei
Zhong-Qiong Yang
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW102148551A priority Critical patent/TW201531390A/en
Publication of TW201531390A publication Critical patent/TW201531390A/en

Links

Landscapes

  • Manipulator (AREA)

Abstract

A device for taking material is provided. The device includes a base, a sliding track set on the base, a motor set on the base, a sliding table slidably connected to the sliding track, a rotatable air cylinder fixed on the sliding table, a turning plate placed on the air cylinder, and a first air cylinder fixed on the turning plate. The first air cylinder includes a first portion and a sliding portion. The device further includes a second air cylinder fixed on the sliding portion and a mechanism arm. One end of the mechanism arm is fixed on the sliding portion, and another end of the mechanism arm is fixed on the second air cylinder. The sliding portion cooperates with the second air cylinder and the mechanism arm to taking the material.

Description

取料裝置Reclaiming device

本發明涉及一種取料裝置。The invention relates to a reclaiming device.

工廠裏對於一些簡單的取放料作業﹐通常採用傳統的機械手代替人員作業﹐但傳統機械手存在以下缺點:造價高昂,成本太高,對於一些簡單的取放料運作性價比不高;控制複雜,需專業工程師進行編程式控制制;結構複雜笨重,搬運、維修或保養所耗費的人力物力也非常高;機構手的安裝及配套的設備複雜,佔地面積大。In the factory, for some simple pick-and-place operations, traditional robots are usually used instead of manual operations. However, traditional robots have the following disadvantages: high cost, high cost, and low cost performance for some simple pick-and-place materials; The professional engineer is required to carry out the programmatic control system; the structure is complicated and heavy, and the manpower and material resources for handling, repairing or maintaining are also very high; the installation and supporting equipment of the mechanism hand is complicated and the floor space is large.

本發明的主要目的在於提供一種取料裝置,旨在解決上述取料麻煩的問題。The main object of the present invention is to provide a reclaiming device, which aims to solve the above problem of troublesome reclaiming.

本發明提供一種取料裝置,該取料裝置包括底座、設置於底座上的滑軌、設置於底座上的馬達、滑動連接於滑軌上的滑台、固定於滑臺上的旋轉氣缸、置於旋轉氣缸上的轉盤及固定於轉盤上的一對第一氣缸,該第一氣缸包括氣缸部及滑動固定於氣缸部上的滑動部、該取料裝置還包括分別固定於滑動部上的第二氣缸及一對機械臂,該機械臂的一端固定於滑動部上,另外一端固定於第二氣缸上,該滑動部配合第二氣缸及機械臂在氣缸部上滑動以吸取物料,該轉盤在旋轉氣缸的作用下帶動兩個第一氣缸相對旋轉預設度數以互換物料的位置,該滑台在馬達的作用下帶動其上的旋轉氣缸、轉盤及第一氣缸在滑軌上滑動直至將吸取的物料移動至預設位置的上方。The present invention provides a reclaiming device comprising a base, a slide rail disposed on the base, a motor disposed on the base, a slide table slidably coupled to the slide rail, a rotary cylinder fixed to the slide table, and a set a rotating disc on the rotating cylinder and a pair of first cylinders fixed on the rotating disc, the first cylinder includes a cylinder portion and a sliding portion slidably fixed to the cylinder portion, and the reclaiming device further includes a first fixing on the sliding portion a two-cylinder and a pair of mechanical arms, one end of the mechanical arm is fixed on the sliding portion, and the other end is fixed on the second cylinder, the sliding portion cooperates with the second cylinder and the mechanical arm slides on the cylinder portion to suck the material, the rotating plate is Under the action of the rotating cylinder, the two first cylinders are rotated relative to each other to replace the position of the material, and the sliding table drives the rotating cylinder, the rotating disc and the first cylinder on the sliding rail to be sucked under the action of the motor. The material moves to the top of the preset position.

本發明的取料裝置,通過兩對氣缸分別驅動對應的吸嘴上下左右移動來吸取對應的物料,並將其移動到相應位置,以此實現快速取料的效果。The reclaiming device of the invention realizes the effect of fast reclaiming by sucking corresponding nozzles up and down and left and right by two pairs of cylinders respectively to suck corresponding materials and moving them to corresponding positions.

圖1為本發明取料裝置的立體視圖。Figure 1 is a perspective view of the take-up device of the present invention.

圖2為本發明取料裝置的分解視圖。Figure 2 is an exploded view of the take-up device of the present invention.

圖3為本發明取料裝置中部分放大視圖。Figure 3 is a partially enlarged view of the take-up device of the present invention.

圖4至圖6為本發明取料裝置取物料的過程示意圖。4 to 6 are schematic views showing the process of taking materials from the reclaiming device of the present invention.

請參考圖1-3所示,為一種取料裝置1。該取料裝置1包括底座10、設置於底座10上的滑軌20、設置於底座10上的馬達30、滑動連接於滑軌20上的滑台40、固定於滑台40上的旋轉氣缸50、置於旋轉氣缸50上的轉盤60及固定於轉盤60上的一對第一氣缸70。該第一氣缸70包括氣缸部72及滑動固定於氣缸部72上的滑動部71。該取料裝置1還包括分別固定於滑動部71上的第二氣缸80及一對機械臂90。該機械臂90的一端固定於滑動部71上,另外一端固定於第二氣缸80上。該滑動部71配合第二氣缸80及機械臂90在氣缸部72上滑動以吸取物料2(如圖4所示)。該轉盤60在旋轉氣缸50的作用下帶動兩個第一氣缸70相對旋轉預設度數以互換物料2的位置。該滑台40在馬達30的作用下帶動其上的旋轉氣缸50、轉盤60及第一氣缸70在滑軌20上滑動直至將吸取的物料2移動至預設位置的上方。本實施方式中,該旋轉氣缸50為180度旋轉氣缸,該第一氣缸70為無桿氣缸,該第二氣缸80為筆形氣缸。Please refer to FIG. 1-3, which is a reclaiming device 1. The reclaiming device 1 includes a base 10, a slide rail 20 disposed on the base 10, a motor 30 disposed on the base 10, a slide table 40 slidably coupled to the slide rail 20, and a rotary cylinder 50 fixed to the slide table 40. A turntable 60 placed on the rotary cylinder 50 and a pair of first cylinders 70 fixed to the turntable 60. The first cylinder 70 includes a cylinder portion 72 and a sliding portion 71 that is slidably fixed to the cylinder portion 72. The take-up device 1 further includes a second cylinder 80 and a pair of robot arms 90 that are respectively fixed to the sliding portion 71. One end of the mechanical arm 90 is fixed to the sliding portion 71, and the other end is fixed to the second cylinder 80. The sliding portion 71 cooperates with the second cylinder 80 and the mechanical arm 90 to slide on the cylinder portion 72 to suck the material 2 (as shown in FIG. 4). The turntable 60 drives the two first cylinders 70 to rotate relative to each other by the rotation cylinder 50 to exchange the position of the material 2. The slide table 40, under the action of the motor 30, drives the rotary cylinder 50, the turntable 60 and the first cylinder 70 thereon to slide on the slide rail 20 until the sucked material 2 is moved above the preset position. In the present embodiment, the rotary cylinder 50 is a 180-degree rotary cylinder, and the first cylinder 70 is a rodless cylinder, and the second cylinder 80 is a pen-shaped cylinder.

該滑軌20設置於底座10的底面上。該馬達30設置於底座10上滑軌20的一端。The slide rail 20 is disposed on the bottom surface of the base 10. The motor 30 is disposed at one end of the slide rail 20 on the base 10.

該取料裝置1還包括一防塵罩100。該防塵罩100固定於底座10兩側壁之間,用於防止灰塵進入底座10內。該滑台40置於防塵罩100下方,該旋轉氣缸50部分置於防塵罩100下方,另外部分置於防塵罩100上方。本實施方式中,該旋轉氣缸50為現有機構,因此針對該旋轉氣缸的結構在此不做詳細描述。The take-up device 1 further includes a dust cover 100. The dust cover 100 is fixed between the two side walls of the base 10 for preventing dust from entering the base 10. The slide table 40 is placed under the dust cover 100, and the rotary cylinder 50 is partially disposed under the dust cover 100, and the other portion is placed above the dust cover 100. In the present embodiment, the rotary cylinder 50 is a conventional mechanism, and therefore the structure of the rotary cylinder will not be described in detail herein.

該取料裝置1還包括一緩衝機構110。該緩衝機構110包括固定塊111及固定於固定塊111兩端的兩個緩衝器112。該緩衝機構110通過該固定塊111固定於旋轉氣缸50的上表面。該轉盤60上開設有至少一孔61。該孔中設置一阻擋塊62。該轉盤60在旋轉的過程中,通過該阻擋塊62與緩衝器112的作用使得該轉盤60旋轉至預設度數。本實施方式中,該孔61的數量為兩個。The reclaiming device 1 further includes a buffer mechanism 110. The buffer mechanism 110 includes a fixed block 111 and two buffers 112 fixed to both ends of the fixed block 111. The buffer mechanism 110 is fixed to the upper surface of the rotary cylinder 50 by the fixing block 111. The turntable 60 is provided with at least one hole 61. A blocking block 62 is disposed in the hole. The turntable 60 rotates the turntable 60 to a preset degree by the action of the blocking block 62 and the buffer 112 during the rotation. In the present embodiment, the number of the holes 61 is two.

該機械臂90包括連接部91及轉動連接於連接部91上的伸展部92。該連接部91固定於滑動部71上。該伸展部92一端轉動連接於連接部91,另外一端連接於第二氣缸80上。該滑動部71上設置有多個吸嘴93。該伸展部92在初始狀態與連接部91垂直連接,並在第二氣缸80供氣時相對連接部91伸展直至與連接部91在同一水平面上。該吸嘴93用於在伸展部92與連接部91在同一水平面上時,吸取地面上放置的物料2。The robot arm 90 includes a connecting portion 91 and a stretch portion 92 rotatably coupled to the connecting portion 91. The connecting portion 91 is fixed to the sliding portion 71. The extension portion 92 is rotatably connected to the connecting portion 91 at one end, and the other end is connected to the second cylinder 80. A plurality of suction nozzles 93 are provided on the sliding portion 71. The stretched portion 92 is vertically connected to the connecting portion 91 in the initial state, and extends relative to the connecting portion 91 when the second cylinder 80 is supplied with air until it is on the same level as the connecting portion 91. The suction nozzle 93 is used to suck the material 2 placed on the ground when the stretched portion 92 is on the same level as the joint portion 91.

該取料裝置1還包括一魚眼接頭120。該魚眼接頭120的一端固定於第二氣缸80上,另外一端固定於伸展部92的下表面,從而將機械臂90的伸展部92連接於第二氣缸80上。本實施方式中,該魚眼接頭120的結構為現有結構,因此在此不再做詳細描述。The take-up device 1 also includes a fisheye connector 120. One end of the fisheye joint 120 is fixed to the second cylinder 80, and the other end is fixed to the lower surface of the stretched portion 92, thereby connecting the stretched portion 92 of the robot arm 90 to the second cylinder 80. In the present embodiment, the structure of the fisheye joint 120 is an existing structure, and thus will not be described in detail herein.

請參考圖4-6所示,在安裝該取料裝置1時,首先用戶將滑軌20固定於底座10底面上,將滑台40置於滑軌20上,將防塵罩100固定於底座10兩側壁上,將旋轉氣缸50固定於滑台40上,將轉盤60轉動連接於旋轉氣缸50上,將緩衝機構110固定於旋轉氣缸50上,將兩個第一氣缸70固定於轉盤60上,將兩個第二氣缸80分別固定於第一氣缸70的滑動部71上,將兩個機械臂90分別固定於滑動部71及第二氣缸80上。Referring to FIG. 4-6, when the reclaiming device 1 is installed, the user first fixes the sliding rail 20 to the bottom surface of the base 10, places the sliding table 40 on the sliding rail 20, and fixes the dust cover 100 to the base 10. On both side walls, the rotary cylinder 50 is fixed on the slide table 40, the turntable 60 is rotatably coupled to the rotary cylinder 50, the buffer mechanism 110 is fixed to the rotary cylinder 50, and the two first cylinders 70 are fixed on the rotary table 60. The two second cylinders 80 are respectively fixed to the sliding portion 71 of the first cylinder 70, and the two robot arms 90 are fixed to the sliding portion 71 and the second cylinder 80, respectively.

在使用該取料裝置1時,在初始狀態,兩個伸展部92與連接部91垂直,在需要取物料2時,該第二氣缸80供氣驅使該伸展部92伸直直至該伸展部92與連接部91在同一水平面上,接著通過第一氣缸70驅使該滑動部71在氣缸部72上移動,該滑動部71帶動機械臂90向靠近地面的方向上移動直至該伸展部92上的吸嘴93可以吸取取物料2,在吸取到物料2後,用戶可再次通過第一氣缸70將伸展部92及物料2移動至一定的高度,接著再通過馬達30驅使滑台40在滑軌20上移動直至該第一氣缸70及物料2被移動至預設位置的上方。再次通過第一氣缸70驅使該滑動部71在氣缸部72上移動直至該物料2靠近地面。最後給吸嘴93斷氣,該物料2放置於地面上以待對物料2進行加工。When the take-up device 1 is used, in the initial state, the two stretched portions 92 are perpendicular to the connecting portion 91, and when the material 2 needs to be taken, the second cylinder 80 supplies air to drive the stretched portion 92 straight until the stretched portion 92 On the same horizontal plane as the connecting portion 91, the sliding portion 71 is then moved by the first cylinder 70 on the cylinder portion 72, and the sliding portion 71 drives the robot arm 90 to move toward the ground until the suction on the extending portion 92 The mouth 93 can suck the material 2, after the material 2 is sucked, the user can move the stretch portion 92 and the material 2 to a certain height through the first cylinder 70, and then drive the slide table 40 on the slide rail 20 through the motor 30. Move until the first cylinder 70 and the material 2 are moved above the preset position. The sliding portion 71 is again driven by the first cylinder 70 to move on the cylinder portion 72 until the material 2 is close to the ground. Finally, the nozzle 93 is deflated, and the material 2 is placed on the ground to be processed.

在用戶通過兩個吸嘴93吸取了不同的物料2後,需要互換兩個物料的位置時,用戶可通過旋轉轉盤60,該轉盤60帶動第一氣缸70及其上固定的第二氣缸80及機械臂90一起旋轉,從而可將所吸取的物料2的位置進行互換。After the user picks up the different materials 2 through the two suction nozzles 93, the user needs to interchange the positions of the two materials, the user can rotate the turntable 60, the turntable 60 drives the first cylinder 70 and the second cylinder 80 fixed thereon and The robot arms 90 rotate together so that the position of the picked material 2 can be interchanged.

在用戶將對應的物料2放置於預設位置後,該第二氣缸80斷氣,該伸展部92在重力的作用下相對連接部91旋轉直至垂直於連接部91。After the user places the corresponding material 2 in the preset position, the second cylinder 80 is cut off, and the extension portion 92 is rotated relative to the connecting portion 91 by gravity until it is perpendicular to the connecting portion 91.

在不同的實施方式中,用戶可根據需要分別對兩個第一氣缸70、第二氣缸80進行不同的操作,使得兩個伸展部92完成不同的操作,如利用一個吸嘴93取物料2的同時,利用另外一個吸嘴93放置物料2等。In different embodiments, the user can perform different operations on the two first cylinders 70 and the second cylinders 80 as needed, so that the two extensions 92 perform different operations, such as taking the material 2 by using one nozzle 93. At the same time, the material 2 and the like are placed by another suction nozzle 93.

1‧‧‧取料裝置1‧‧‧Reclaiming device

10‧‧‧底座10‧‧‧Base

20‧‧‧滑軌20‧‧‧Slide rails

30‧‧‧馬達30‧‧‧Motor

40‧‧‧滑台40‧‧‧ slide table

50‧‧‧旋轉氣缸50‧‧‧Rotary cylinder

60‧‧‧轉盤60‧‧‧ Turntable

70‧‧‧第一氣缸70‧‧‧First cylinder

72‧‧‧氣缸部72‧‧‧Cylinder Department

71‧‧‧滑動部71‧‧‧Sliding section

80‧‧‧第二氣缸80‧‧‧second cylinder

90‧‧‧機械臂90‧‧‧ Robotic arm

2‧‧‧物料2‧‧‧Materials

100‧‧‧防塵罩100‧‧‧ dust cover

110‧‧‧緩衝機構110‧‧‧buffering mechanism

111‧‧‧固定塊111‧‧‧Fixed block

112‧‧‧緩衝器112‧‧‧buffer

61‧‧‧孔61‧‧‧ hole

62‧‧‧阻擋塊62‧‧‧Block block

91‧‧‧連接部91‧‧‧Connecting Department

92‧‧‧伸展部92‧‧‧Stretching Department

93‧‧‧吸嘴93‧‧‧ nozzle

120‧‧‧魚眼接頭120‧‧‧ fish eye connector

no

1‧‧‧取料裝置 1‧‧‧Reclaiming device

10‧‧‧底座 10‧‧‧Base

100‧‧‧防塵罩 100‧‧‧ dust cover

Claims (8)

一種取料裝置,該取料裝置包括底座、設置於底座上的滑軌、設置於底座上的馬達、滑動連接於滑軌上的滑台、固定於滑臺上的旋轉氣缸、置於旋轉氣缸上的轉盤及固定於轉盤上的一對第一氣缸,該第一氣缸包括氣缸部及滑動固定於氣缸部上的滑動部、該取料裝置還包括分別固定於滑動部上的第二氣缸及一對機械臂,該機械臂的一端固定於滑動部上,另外一端固定於第二氣缸上,該滑動部配合第二氣缸及機械臂在氣缸部上滑動以吸取物料,該轉盤在旋轉氣缸的作用下帶動兩個第一氣缸相對旋轉預設度數以互換物料的位置,該滑台在馬達的作用下帶動其上的旋轉氣缸、轉盤及第一氣缸在滑軌上滑動直至將吸取的物料移動至預設位置的上方。A reclaiming device comprising a base, a slide rail disposed on the base, a motor disposed on the base, a slide table slidably coupled to the slide rail, a rotary cylinder fixed on the slide table, and a rotary cylinder And a pair of first cylinders fixed on the turntable, the first cylinder includes a cylinder portion and a sliding portion slidably fixed to the cylinder portion, the reclaiming device further comprising a second cylinder fixed to the sliding portion respectively a pair of mechanical arms, one end of which is fixed on the sliding portion, and the other end is fixed on the second cylinder, the sliding portion cooperates with the second cylinder and the mechanical arm slides on the cylinder portion to suck the material, and the rotating plate is in the rotary cylinder Actuating the two first cylinders relative to each other to rotate the preset degree to exchange the position of the material. The sliding table drives the rotating cylinder, the rotating disc and the first cylinder on the sliding rail to move the sucked material under the action of the motor. To the top of the preset position. 如申請專利範圍第1項所述的取料裝置,其中:該旋轉氣缸為180度旋轉氣缸。The reclaiming device of claim 1, wherein the rotating cylinder is a 180-degree rotating cylinder. 如申請專利範圍第1項所述的取料裝置,其中:該取料裝置還包括一緩衝機構,該緩衝機構包括固定塊及固定於固定塊兩端的兩個緩衝器,該緩衝機構通過該固定塊固定於旋轉氣缸的上表面,該轉盤上開設至少一孔,該孔中設置一阻擋塊,該轉盤在旋轉的過程中,通過該阻擋塊與緩衝器的作用下使得該轉盤旋轉至預設度數。The reclaiming device of claim 1, wherein the reclaiming device further comprises a buffering mechanism, the buffering mechanism comprising a fixing block and two buffers fixed at two ends of the fixing block, wherein the buffering mechanism passes the fixing The block is fixed on the upper surface of the rotary cylinder, and the turntable is provided with at least one hole, and a blocking block is disposed in the hole, and the rotating plate rotates the preset to the preset by the blocking block and the buffer during the rotating process. degree. 如申請專利範圍第1項所述的取料裝置,其中:該機械臂包括連接部及轉動連接於連接部上的伸展部,該連接部固定於滑動部上,該滑動部上設置有多個吸嘴,該伸展部在初始狀態與連接部垂直連接,並在第二氣缸的作用下相對連接部伸展,該吸嘴用於吸取物料。The reclaiming device of claim 1, wherein the mechanical arm includes a connecting portion and a stretching portion rotatably coupled to the connecting portion, the connecting portion is fixed to the sliding portion, and the sliding portion is provided with a plurality of The nozzle is vertically connected to the connecting portion in an initial state and extends relative to the connecting portion under the action of the second cylinder for sucking the material. 如申請專利範圍第4項所述的取料裝置,其中:該取料裝置還包括一魚眼接頭,該魚眼接頭的一端固定於第二氣缸上,另外一端固定於伸展部的下表面,從而將機械臂的伸展部連接於第二氣缸上。The reclaiming device of claim 4, wherein the reclaiming device further comprises a fisheye joint, one end of the fisheye joint is fixed to the second cylinder, and the other end is fixed to the lower surface of the stretching portion. Thereby the extension of the robot arm is connected to the second cylinder. 如申請專利範圍第1項所述的取料裝置,其中:該第一氣缸為無桿氣缸。The reclaiming device of claim 1, wherein the first cylinder is a rodless cylinder. 如申請專利範圍第1項所述的取料裝置,其中:該第二氣缸為筆形氣缸。The reclaiming device of claim 1, wherein the second cylinder is a pen-shaped cylinder. 如申請專利範圍第1項所述的取料裝置,其中:該取料裝置還包括置於底座的上表面的防塵罩,該防塵罩用於防止灰塵進入底座。The reclaiming device of claim 1, wherein the reclaiming device further comprises a dust cover disposed on an upper surface of the base, the dust cover being configured to prevent dust from entering the base.
TW102148551A 2013-12-26 2013-12-26 Device for taking material TW201531390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102148551A TW201531390A (en) 2013-12-26 2013-12-26 Device for taking material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102148551A TW201531390A (en) 2013-12-26 2013-12-26 Device for taking material

Publications (1)

Publication Number Publication Date
TW201531390A true TW201531390A (en) 2015-08-16

Family

ID=54343014

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102148551A TW201531390A (en) 2013-12-26 2013-12-26 Device for taking material

Country Status (1)

Country Link
TW (1) TW201531390A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108747277A (en) * 2018-08-03 2018-11-06 安吉县力顺电声配件厂 A kind of speaker dust cap production and processing feeding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108747277A (en) * 2018-08-03 2018-11-06 安吉县力顺电声配件厂 A kind of speaker dust cap production and processing feeding device

Similar Documents

Publication Publication Date Title
CN100541711C (en) Base-plate buffering device and method and processing unit
TWI491483B (en) Manipulator and production device thereof.
TWI664132B (en) The reversing apparatus for a panel and the method using the same
TWI464824B (en) Chip pick and place apparatus
JPWO2009034795A1 (en) Substrate transfer robot, vacuum processing equipment
TWI576174B (en) Automatic cleaning device
JP2015112656A (en) Robot hand, robot, and robot cell
KR20190089533A (en) Panel Inversion System
WO2019071632A1 (en) Loading apparatus
TW201531390A (en) Device for taking material
JP4490449B2 (en) Workpiece suction transfer device
JP2015208935A (en) Reversing device for brittle material substrate
TW201433401A (en) Processing system
TW201625931A (en) An adjustable vacuum absorbing device, and a material sheet detecting apparatus, a material sheet transfer apparatus comprising the same
CN104724497A (en) Material taking device
CN105217311A (en) A kind of LDI unit operatorless device
TW201625930A (en) A vacuum absorbing device, a material sheet detecting apparatus, and a material sheet transfer apparatus comprising the same
JP5001354B2 (en) Substrate processing system
JP6331656B2 (en) Method and apparatus for conveying brittle material substrate
JP2010203205A (en) Joint device for ceiling
CN207206416U (en) A kind of mechanical gripper fixing device
CN207343397U (en) Non-contact cleaning equipment
CN207432161U (en) A kind of antistatic workbench during purification is dustless
TWM506827U (en) Glass plate loading device
JP2016115776A (en) Washing apparatus