TW201529529A - Method for produce porous ceramics, porous ceramics, setter and sintering jig - Google Patents
Method for produce porous ceramics, porous ceramics, setter and sintering jig Download PDFInfo
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- TW201529529A TW201529529A TW103143449A TW103143449A TW201529529A TW 201529529 A TW201529529 A TW 201529529A TW 103143449 A TW103143449 A TW 103143449A TW 103143449 A TW103143449 A TW 103143449A TW 201529529 A TW201529529 A TW 201529529A
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- porous ceramic
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Abstract
Description
本發明所揭示之實施形態係關於一種多孔質陶瓷的製造方法、多孔質陶瓷、托架及燒製輔助具。 The embodiment disclosed in the present invention relates to a method for producing a porous ceramic, a porous ceramic, a bracket, and a baking aid.
以往,如從由氣體或液體去除雜質的過濾器或吸附劑、汽車之排氣淨化用觸媒的擔持材料等,在陶瓷形成有多數氣孔之多孔質陶瓷,係被利用在多方面之用途上。 Conventionally, porous ceramics in which a large number of pores are formed in ceramics, such as a filter or an adsorbent for removing impurities from a gas or a liquid, or a supporting material for an exhaust gas purifying catalyst for automobiles, are used for various purposes. on.
就該多孔質陶瓷之製造方法而言,已知有下列方法:在使懸浮體(漿體)凝膠化之後,運用使之凍結之凝膠化凍結法的方法(例如參照專利文獻1),該懸浮體(漿體)係使陶瓷粒子分散在水溶性高分子之水溶液而成者。 In the method for producing a porous ceramic, a method in which a gelation freezing method for freezing a suspension (slurry) is used (for example, refer to Patent Document 1) is known. This suspension (slurry) is obtained by dispersing ceramic particles in an aqueous solution of a water-soluble polymer.
專利文獻1:日本特許第5176198號公報 Patent Document 1: Japanese Patent No. 5176198
然而,在專利文獻1所記載之製造方法中,可藉由變更凍結溫度或陶瓷粒子之調配量而獲得具有各式各樣之氣孔徑、氣孔率的多孔質陶瓷,但另一方面在製造耐熱衝撃性及彎曲強度佳之多孔質陶瓷之方面尚有改善之餘地。 However, in the manufacturing method described in Patent Document 1, a porous ceramic having various pore diameters and porosity can be obtained by changing the freezing temperature or the amount of ceramic particles, but on the other hand, heat resistance is produced. There is still room for improvement in the area of porous ceramics with excellent punching properties and bending strength.
實施形態之一態樣係鑑於上述課題而研創者,其目的在於提供一種耐熱衝撃性及彎曲強度佳之多孔質陶瓷的製造方法、多孔質陶瓷、托架及燒製輔助具。 In view of the above-described problems, an object of the present invention is to provide a method for producing a porous ceramic having excellent heat-resistant punching properties and bending strength, a porous ceramic, a bracket, and a firing aid.
實施形態之多孔質陶瓷的製造方法係包含:懸浮體凝膠化之步驟;使經凝膠化之前述懸浮體凍結而生成凍結體之步驟;去除成長於前述凍結體之冰並生成氣孔之步驟;以及燒製經去除前述冰之前述凍結體的步驟。懸浮體係包含陶瓷粒子、水溶性高分子、及水。凝膠化前之前述懸浮體在20℃之黏度η(mPa.s)、與前述陶瓷粒子之平均粒徑d(μm)係具有η≧950×d-0.77之關係。 The method for producing a porous ceramic according to the embodiment includes a step of gelling a suspension, a step of freezing the gelled suspension to form a frozen body, and removing the ice grown on the frozen body to form pores. And firing the step of removing the aforementioned frozen body of the ice. The suspension system contains ceramic particles, a water-soluble polymer, and water. The viscosity η (mPa.s) of the suspension before gelation at 20 ° C and the average particle diameter d (μm) of the ceramic particles have a relationship of η ≧ 950 × d - 0.77 .
依據實施形態之一態樣,可提供一種氣孔徑之變異較少之多孔質陶瓷、多孔質陶瓷的製造方法及冷卻裝置。 According to one aspect of the embodiment, a porous ceramic, a method for producing a porous ceramic, and a cooling device having a small variation in pore diameter can be provided.
1、1a‧‧‧陶瓷粒子 1, 1a‧‧‧ceramic particles
2、2a‧‧‧水溶性高分子 2, 2a‧‧‧Water soluble polymer
3、3a‧‧‧水 3, 3a‧‧‧ water
4、4a‧‧‧懸浮體 4, 4a‧‧‧ suspension
5、5a‧‧‧冰 5, 5a‧‧‧ ice
6、6a‧‧‧凍結體 6, 6a‧‧‧ frozen body
7、7a‧‧‧下表面 7, 7a‧‧‧ lower surface
8、8a‧‧‧上表面 8, 8a‧‧‧ upper surface
9、9a‧‧‧陶瓷骨架 9, 9a‧‧‧ ceramic skeleton
10、10a‧‧‧氣孔 10, 10a‧‧‧ stomata
11、11a‧‧‧多孔質陶瓷 11, 11a‧‧‧ Porous ceramics
12、12a‧‧‧冷卻裝置 12, 12a‧‧‧ Cooling device
13‧‧‧燒製輔助具 13‧‧‧Burning aids
14‧‧‧基台 14‧‧‧Abutment
15‧‧‧板部 15‧‧‧ Board Department
16‧‧‧支撐部 16‧‧‧Support
17‧‧‧托架 17‧‧‧ bracket
17a‧‧‧上表面 17a‧‧‧Upper surface
18‧‧‧被燒製物 18‧‧‧Furned goods
第1圖係說明實施形態之多孔質陶瓷的製造方法之概要的說明圖。 Fig. 1 is an explanatory view showing an outline of a method for producing a porous ceramic according to an embodiment.
第2A圖係顯示實施形態之燒製輔助具之構成概要的示意立體圖。 Fig. 2A is a schematic perspective view showing the outline of the configuration of the firing aid of the embodiment.
第2B圖係第2A圖之燒製輔助具之示意俯視圖。 Fig. 2B is a schematic plan view of the firing aid of Fig. 2A.
第3圖係藉由實施例1所製作之多孔質陶瓷的局部剖面圖。 Fig. 3 is a partial cross-sectional view showing a porous ceramic produced by Example 1.
第4A圖係藉由實施例8所製作之多孔質陶瓷的局部剖面圖。 Fig. 4A is a partial cross-sectional view showing a porous ceramic produced by Example 8.
第4B圖係藉由實施例8所製作之多孔質陶瓷的局部剖面圖。 Fig. 4B is a partial cross-sectional view of the porous ceramic produced by the eighth embodiment.
第5圖係用以說明平均氣孔徑及氣孔徑之變異之測定方法的圖。 Fig. 5 is a view for explaining a method of measuring variations in average pore diameter and pore diameter.
第6圖係顯示實施形態之多孔質陶瓷的製造方法之一例的流程圖。 Fig. 6 is a flow chart showing an example of a method for producing a porous ceramic according to an embodiment.
第7圖係用以說明多孔質陶瓷的製造方法之概要的說明圖。 Fig. 7 is an explanatory view for explaining an outline of a method for producing a porous ceramic.
第8圖係藉由比較例1所製作之多孔質陶瓷的局部剖面圖。 Fig. 8 is a partial cross-sectional view showing a porous ceramic produced by Comparative Example 1.
以下,參照附圖詳細地說明本案所揭示之多孔質陶瓷的製造方法、多孔質陶瓷、托架及燒製輔助具之實施形態。此外,本發明並非由以下所示之實施形態所限定者。 Hereinafter, embodiments of the method for producing a porous ceramic disclosed in the present invention, a porous ceramic, a bracket, and a firing aid will be described in detail with reference to the accompanying drawings. Further, the present invention is not limited to the embodiments described below.
實施形態之多孔質陶瓷係在可藉由包含凝膠化、凍結、乾燥、脫脂及燒製之各步驟的製造方法所製作之方面,與習知之多孔質陶瓷共通。另一方面,在實施形態之多孔質陶瓷的製造方法中,由於凝膠化前之懸浮體之在20℃的黏度η及陶瓷粒子的平均粒徑d具有特定之關係,因此形成具有與習知之製造方法不同之特長的多孔質陶瓷。以下,首先針對實施形態之多孔質陶瓷、多孔質陶瓷的製造方法加以說明。 The porous ceramic of the embodiment is compatible with a conventional porous ceramic in that it can be produced by a production method including steps of gelation, freezing, drying, degreasing, and firing. On the other hand, in the method for producing a porous ceramic according to the embodiment, since the viscosity η at 20 ° C and the average particle diameter d of the ceramic particles have a specific relationship in the suspension before gelation, it is formed and known. Porous ceramics with different manufacturing methods. Hereinafter, first, a method for producing a porous ceramic or a porous ceramic according to an embodiment will be described.
第1圖係說明實施形態之多孔質陶瓷的製造方法之概要的說明圖。第7圖係用以說明適用凝膠化凍結法之多孔質陶瓷的製造方法之概要的說明圖。此外,在第1圖、第7圖中,係圖示上述之製造步驟中之從左依序為凝膠化、凍結、及燒製之各步驟,且省略對應乾燥、脫脂之各步驟的圖示。 Fig. 1 is an explanatory view showing an outline of a method for producing a porous ceramic according to an embodiment. Fig. 7 is an explanatory view for explaining an outline of a method for producing a porous ceramic to which a gelation freezing method is applied. In addition, in the first drawing and the seventh drawing, the steps of gelatinization, freezing, and firing from the left in the above-described manufacturing steps are illustrated, and the steps corresponding to the steps of drying and degreasing are omitted. Show.
首先,針對凝膠化步驟加以說明。凝膠化步驟係使懸浮體4置入模具並使之凝膠化的步驟,該懸浮體係包含陶瓷粒子1a、水溶性高分子2及水3a,且使陶瓷粒子1a均勻地分散在水溶性高分子2之水溶液中。藉由懸浮體4之凝膠化,形成有在陶瓷粒子1a分散於水溶性高分子2之水溶液中的狀態下暫時固定之構造體(凝膠化體)。 First, the gelation step will be described. The gelation step is a step of placing the suspension 4 into a mold and gelating the same, the suspension system comprising the ceramic particles 1a, the water-soluble polymer 2, and the water 3a, and uniformly dispersing the ceramic particles 1a in a water-soluble state. In the aqueous solution of molecule 2. By the gelation of the suspension 4, a structure (gelled body) temporarily fixed in a state in which the ceramic particles 1a are dispersed in the aqueous solution of the water-soluble polymer 2 is formed.
接著,針對凍結步驟加以說明。凍結步驟係將經凝膠化之懸浮體4予以冷卻而生成凍結體6之步驟。當使經凝膠化之懸浮體4冷卻時,從水溶性高分子2之水溶液分離的水3係狀態變化成冰5,且一面形成結晶 構造,一面成長。結果,可獲得凍結體6,該凍結體6係包含陶瓷粒子1、水溶性高分子2之水溶液經凝膠化之部分(未圖示)、及經結晶化之冰5的部分。 Next, the freezing step will be described. The freezing step is a step of cooling the gelled suspension 4 to form a frozen body 6. When the gelled suspension 4 is cooled, the water 3 system separated from the aqueous solution of the water-soluble polymer 2 changes to ice 5, and crystallizes on one side. Structure, grow on one side. As a result, the frozen body 6 is obtained, and the frozen body 6 includes a portion (not shown) in which the aqueous solution of the ceramic particles 1 and the water-soluble polymer 2 is gelled, and a portion of the crystallized ice 5.
於習知之製造方法,係例如將冷卻裝置12a配置在下表面7a側而將經凝膠化之懸浮體4從一方側予以冷卻,且經凝膠化之懸浮體4a中之水3a會從下表面7a側凍結而狀態變化成冰5a,該冰5a之結晶欲從下表面7a側朝上表面8a側成長。並且,在冰5a之結晶成長時,例如會有用以使平均粒徑為0.01至5μm左右之比較小的陶瓷粒子1a移動所需之充分程度的推壓力作用。因此,當在冰5a之結晶欲成長之方向存在有陶瓷粒子1a時,藉由凝膠化而暫時固定之陶瓷粒子1a係以被排除至成長之冰5a之結晶之周圍的方式移動。 In the conventional manufacturing method, for example, the cooling device 12a is disposed on the lower surface 7a side to cool the gelled suspension 4 from one side, and the water 3a in the gelled suspension 4a is from the lower surface. The 7a side is frozen and the state is changed to ice 5a, and the crystal of the ice 5a is intended to grow from the lower surface 7a side toward the upper surface 8a side. In addition, when the crystal of the ice 5a grows, for example, there is a sufficient pressing force for moving the relatively small ceramic particles 1a having an average particle diameter of about 0.01 to 5 μm. Therefore, when the ceramic particles 1a are present in the direction in which the crystals of the ice 5a are to be grown, the ceramic particles 1a temporarily fixed by gelation are moved so as to be excluded from the crystal of the grown ice 5a.
如此,在第7圖所示之習知的製造方法中,當將經凝膠化之懸浮體4a從一方向冷卻時,以包圍從一方向側朝另一方向側成長為柱狀之冰5a的結晶之方式將陶瓷粒子1a予以再排列,藉此獲得在陶瓷粒子1a之分佈產生疏密之凍結體6。 Thus, in the conventional manufacturing method shown in Fig. 7, when the gelled suspension 4a is cooled from one direction, the ice 5a which grows into a column shape from one side to the other side is surrounded. In the manner of crystallization, the ceramic particles 1a are rearranged, whereby the frozen body 6 which is densely distributed in the distribution of the ceramic particles 1a is obtained.
相對於此,在實施形態之多孔質陶瓷的製造方法中,係使用將黏性調整為隨著要使用之陶瓷粒子1的平均粒徑變小,懸浮體4之黏度η會變大之懸浮體4。具體而言,凝膠化前之前述懸浮體在20℃之黏度η(mPa.s)、與陶瓷粒子之平均粒徑d(μm)係具有η≧950×d-0.77之關係。 On the other hand, in the method for producing a porous ceramic according to the embodiment, the viscosity is adjusted so that the viscosity of the suspension 4 becomes larger as the average particle diameter of the ceramic particles 1 to be used becomes smaller. 4. Specifically, the viscosity η (mPa.s) of the suspension before gelation at 20 ° C and the average particle diameter d (μm) of the ceramic particles have a relationship of η ≧ 950 × d - 0.77.
當平均粒徑d及黏度η具有該種關係時,即使冰5之結晶成長且與陶瓷粒子1接近或碰撞,陶瓷粒子1不論其大小皆可抵抗伴隨冰5之結晶成長所產生之推壓力。因此,該部位之陶瓷粒子1在凍結步驟中亦幾乎不會移動,且停留在保持為凝膠化體之位置。 When the average particle diameter d and the viscosity η have such a relationship, even if the crystal of the ice 5 grows and approaches or collides with the ceramic particle 1, the ceramic particle 1 can withstand the pressing force generated by the crystal growth accompanying the ice 5 regardless of its size. Therefore, the ceramic particles 1 at this portion hardly move in the freezing step, and stay at the position where they remain as the gelled body.
再者,冰5係在每當碰撞陶瓷粒子1之際改變結晶之成長方向,同時使結晶從配置有冷卻裝置12之下表面7側朝上表面8側以鋸齒狀成長。再者,由於冰5之結晶係以鋸齒狀成長,因此相接近之冰5的結晶彼此會依情況一面反覆碰撞或接觸,一面成長。因此,在實施形態之多孔質陶瓷的製造方法中,如第1圖所示,即使將經凝膠化之懸浮體4從下表面7側冷卻,結果亦可獲得具有冰5朝隨機方向成長於陶瓷粒子1之間的部位之凍結體6。 Further, the ice 5 system changes the growth direction of the crystal every time the ceramic particles 1 are collided, and the crystal grows in a zigzag shape from the side of the lower surface 7 where the cooling device 12 is disposed toward the upper surface 8 side. Further, since the crystals of the ice 5 grow in a zigzag manner, the crystals of the ice 5 close to each other grow and collide with each other depending on the situation. Therefore, in the method for producing a porous ceramic according to the embodiment, as shown in Fig. 1, even if the gelled suspension 4 is cooled from the lower surface 7 side, it is possible to obtain ice 5 which grows in a random direction. The frozen body 6 at the portion between the ceramic particles 1.
如此,在實施形態之多孔質陶瓷的製造方法中,即使將經凝膠化之懸浮體4從下表面7側冷卻時,亦可獲得具有冰5朝隨機方向成長於均勻地分散之陶瓷粒子1之間的部位之凍結體6。並且,當上述平均粒徑d及黏度η特別具有η≧1630×d-0.77之關係時,可獲得冰5遍及整體朝隨機方向成長之凍結體6。 As described above, in the method for producing a porous ceramic according to the embodiment, even when the gelled suspension 4 is cooled from the lower surface 7 side, ceramic particles 1 having ice 5 grown in a random direction and uniformly dispersed can be obtained. The frozen body 6 between the parts. Further, when the average particle diameter d and the viscosity η particularly have a relationship of η ≧ 1630 × d - 0.77 , the frozen body 6 in which the ice is grown 5 times and the whole is grown in the random direction can be obtained.
接著,針對乾燥步驟加以說明。乾燥步驟係將成長為凍結體6之冰5予以去除而生成氣孔10之步驟。例如藉由真空乾燥使成長有冰5之凍結體6乾燥時,冰5之結晶會昇華而消失,取而代之的是形成氣孔10。亦即,乾燥步驟係將冰5取代成氣孔10之步驟。 Next, the drying step will be described. The drying step is a step of removing the ice 5 which has grown into the frozen body 6 to form the pores 10. For example, when the frozen body 6 in which the ice 5 is grown is dried by vacuum drying, the crystal of the ice 5 is sublimated and disappears, and the pores 10 are formed instead. That is, the drying step is a step of replacing the ice 5 with the pores 10.
接著,針對脫脂步驟加以說明。脫脂步驟係從在乾燥步驟中生成氣孔10之凍結體6去除水溶性高分子2等之有機成分的步驟。具體而言,依據陶瓷粒子1之種類,執行在預設之溫度條件下分解水溶性高分子2等之有機成分並予以去除之處理。 Next, the degreasing step will be described. The degreasing step is a step of removing the organic component of the water-soluble polymer 2 or the like from the frozen body 6 which forms the pores 10 in the drying step. Specifically, depending on the type of the ceramic particles 1, a treatment for decomposing the organic component of the water-soluble polymer 2 or the like under a predetermined temperature condition and removing it is performed.
最後,針對燒製步驟加以說明。燒製步驟係將冰5及水溶性高分子2等有機成分予以去除,且對形成有氣孔10之凍結體6進行燒製而製作多孔質陶瓷11的步驟。藉由燒製所得之多孔質陶瓷11係具有:在上述之乾燥步驟中所形成之氣孔10;及以包圍氣孔10之方式使陶瓷粒子1彼此結合而緻密化之陶瓷骨架9。 Finally, the firing step is explained. In the firing step, the organic component such as ice 5 and water-soluble polymer 2 is removed, and the frozen body 6 in which the pores 10 are formed is fired to produce a porous ceramic 11 . The porous ceramic 11 obtained by firing has the pores 10 formed in the above-described drying step, and the ceramic skeleton 9 which is densified by bonding the ceramic particles 1 to each other so as to surround the pores 10.
燒製後所得之多孔質陶瓷11係隨著在凍結步驟中所生成之凍結體6的形狀之不同而具有不同之形狀。亦即,在習知之製造方法中,如第7圖所示在從一方向側朝另一方向側而形成之柱狀的氣孔10a之周圍生成形成有陶瓷骨架9a之多孔質陶瓷11a。相對於此,在實施形態之多孔質陶瓷11的製造方法中,以朝隨機之方向形成氣孔10之方式,將陶瓷骨架9形成為3維之網眼狀,藉此生成耐熱衝撃性及彎曲強度佳之多孔質陶瓷11(參照第3圖)。在此,氣孔10「朝隨機之方向形成」係指氣孔10之平均高寬比為2.0以上、更佳為3.5以上。此外,氣孔10之平均高寬比係可藉由後述之實施例所記載之方法而測定。 The porous ceramic 11 obtained after firing has a different shape depending on the shape of the frozen body 6 formed in the freezing step. In other words, in the conventional manufacturing method, as shown in Fig. 7, a porous ceramic 11a in which a ceramic skeleton 9a is formed is formed around a columnar pore 10a formed from one direction side toward the other direction side. On the other hand, in the method for producing the porous ceramics 11 of the embodiment, the ceramic skeleton 9 is formed into a three-dimensional mesh shape so that the pores 10 are formed in a random direction, thereby generating heat-resistant punching property and bending strength. Good porous ceramic 11 (see Figure 3). Here, the "holes 10 are formed in a random direction" means that the average aspect ratio of the pores 10 is 2.0 or more, and more preferably 3.5 or more. Further, the average aspect ratio of the pores 10 can be measured by the method described in the examples below.
在實施形態之多孔質陶瓷11之製造方法 中,陶瓷粒子1係只要在燒製步驟中可適當地進行燒製者,則無特別限制。具體而言,例如可適用氧化鋯、氧化鋁、二氧化矽、二氧化鈦、碳化矽、碳化硼、氮化矽、氮化硼、堇青石、羥磷石灰、賽倫陶瓷(sialon)、鋯石、鈦酸鋁、及莫來石中之1種以上作為陶瓷粒子1,但並不限定於上述者。並且,例如適用氧化鋁及二氧化矽來製作莫來石,或適用氧化鋯及氧化鋁來製作複合體,且依據所希望之特性組合使用複數個陶瓷粒子1。 Manufacturing method of porous ceramic 11 in embodiment In the meantime, the ceramic particles 1 are not particularly limited as long as they can be appropriately fired in the firing step. Specifically, for example, zirconia, alumina, ceria, titania, tantalum carbide, boron carbide, tantalum nitride, boron nitride, cordierite, hydroxyphosphorus lime, sialon, zircon, One or more of aluminum titanate and mullite are used as the ceramic particles 1, but the invention is not limited thereto. Further, for example, alumina or cerium oxide is used to produce mullite, or zirconia and alumina are used to produce a composite, and a plurality of ceramic particles 1 are used in combination depending on desired characteristics.
再者,陶瓷粒子1係較佳為實用上平均粒徑為100μm以下者。當陶瓷粒子1之平均粒徑超過100μm時,會有因所希望之多孔質陶瓷11的形狀或大小而造成難以對陶瓷粒子1進行適當燒製之情形。在此,「平均粒徑」係指雷射繞射式粒度分佈測定裝置(濕式法)中,依據換算成球相當徑之體積基準的粒度分佈所得之中間值徑(d50)。此外,只要是可得到相同結果者,測定方法並無限制。 Further, the ceramic particles 1 are preferably those having a practical average particle diameter of 100 μm or less. When the average particle diameter of the ceramic particles 1 exceeds 100 μm, it is difficult to appropriately fire the ceramic particles 1 due to the shape or size of the desired porous ceramics 11. Here, the "average particle diameter" refers to an intermediate value diameter (d50) obtained by a particle size distribution based on a volume equivalent to a sphere equivalent diameter in a laser diffraction type particle size distribution measuring apparatus (wet method). Further, as long as the same result can be obtained, the measurement method is not limited.
懸浮體中之陶瓷粒子1的調配量,較佳為1至50vol%之範圍,更佳為1至30vol%。陶瓷粒子1之調配量未達1vol%時,例如會有在乾燥步驟中無法維持形狀之情形,且難以製作具有所希望之強度的多孔質陶瓷11。此外,當陶瓷粒子1之調配量超過50vol%時,有時所得之多孔質陶瓷11之氣孔率會變低,且不會充分地顯現多孔體所希望之特徵。在此,「氣孔率」係指依據JISR1634:2008所規定之手法,由阿基米德法所得之值。在該測定中,由 於未考慮閉氣孔,因此亦稱為「外觀氣孔率」。此外,在本實施形態中,由於幾乎未形成閉氣孔,因此可將「外觀氣孔率」處理為「氣孔率」。 The blending amount of the ceramic particles 1 in the suspension is preferably in the range of 1 to 50 vol%, more preferably 1 to 30 vol%. When the amount of the ceramic particles 1 is less than 1 vol%, for example, the shape may not be maintained in the drying step, and it is difficult to produce the porous ceramic 11 having a desired strength. Further, when the compounding amount of the ceramic particles 1 exceeds 50 vol%, the porosity of the obtained porous ceramics 11 may become low, and the desired characteristics of the porous body may not be sufficiently exhibited. Here, "porosity" means the value obtained by the Archimedes method according to the method specified in JISR1634:2008. In this assay, by The closed pores are not considered, so they are also called "appearance porosity". Further, in the present embodiment, since the air vent is hardly formed, the "appearance porosity" can be treated as "porosity".
再者,為了使陶瓷粒子1適當地燒製,亦可依陶瓷粒子1之種類將一種或二種以上之燒製助劑調配在懸浮體中。就燒製助劑之具體例而言,可列舉氧化鋁、碳酸鈣、氧化釔、碳化硼、二氧化鈰等,但並不限定於上述者。此外,作為燒製助劑所添加之碳酸鈣(CaCO3)係藉由燒製而分解,且成為氧化鈣(CaO)而殘存於多孔質陶瓷11中。 Further, in order to appropriately fire the ceramic particles 1, one or two or more kinds of firing aids may be blended in the suspension depending on the type of the ceramic particles 1. Specific examples of the baking aid include alumina, calcium carbonate, cerium oxide, boron carbide, cerium oxide, and the like, but are not limited thereto. Further, calcium carbonate (CaCO 3 ) added as a baking aid is decomposed by firing and becomes calcium oxide (CaO) and remains in the porous ceramic 11 .
此外,為了使懸浮體適當地凝膠化,若有必要,亦可依據水溶性高分子2種類添加pH調整劑或起始劑、交聯劑、增黏劑等各種添加劑。 Further, in order to appropriately gel the suspension, if necessary, various additives such as a pH adjuster, an initiator, a crosslinking agent, and a tackifier may be added depending on the type of the water-soluble polymer.
再者,就水溶性高分子2而言,只要是可從凝膠化步驟至乾燥步驟使陶瓷粒子1之分散穩定地保持,且在凍結步驟中不會妨礙冰5之成長者,則其種類並無特別限制。具體而言,例如適用N-烷基醯胺系高分子、N-異丙基丙烯醯胺系高分子、磺酸基甲基化丙烯醯胺系高分子、N-二甲基胺基丙基甲基丙烯醯胺系高分子、聚烷基丙烯醯胺系高分子、海藻酸、海藻酸鈉、海藻酸銨、聚乙烯亞胺、羧基甲基纖維素、羥基甲基纖維素、甲基纖維素、羥基乙基纖維素、羥基丙基甲基纖維素、羥基乙基甲基纖維素、聚丙烯酸鈉、聚乙二醇、聚環氧乙烷、聚乙烯醇、聚乙烯基吡咯啶酮、羧基乙烯基聚合物、澱粉、明膠、瓊脂、果膠、聚葡甘露糖(glucomannan)、三仙膠、刺槐豆膠、 卡拉膠、瓜爾膠、及結冷膠(gellan gum)中之1種或2種以上作為水溶性高分子2,但並不限定於上述者。其中,在藉由進行冷卻而適用具有使懸浮體4凝膠化之性質的水溶性高分子2時,為了容易地進行製作懸浮體4時之陶瓷粒子1及水3的混合,實用上較佳為水溶性高分子2之凝膠化溫度為50℃以下。此外,就該水溶性高分子2之具體例而言,可列舉明膠、瓊脂、卡拉膠、及結冷膠。 In addition, as for the water-soluble polymer 2, the dispersion of the ceramic particles 1 can be stably maintained from the gelation step to the drying step, and the growth of the ice 5 does not hinder the growth of the ice 5 in the freezing step. There are no special restrictions. Specifically, for example, an N-alkyl guanamine-based polymer, an N-isopropyl acrylamide-based polymer, a sulfonic acid methylated acrylamide-based polymer, and an N-dimethylaminopropyl group are used. Methyl acrylamide-based polymer, polyalkyl acrylamide-based polymer, alginic acid, sodium alginate, ammonium alginate, polyethyleneimine, carboxymethylcellulose, hydroxymethylcellulose, methylcellulose , hydroxyethyl cellulose, hydroxypropyl methyl cellulose, hydroxyethyl methyl cellulose, sodium polyacrylate, polyethylene glycol, polyethylene oxide, polyvinyl alcohol, polyvinyl pyrrolidone, Carboxyvinyl polymer, starch, gelatin, agar, pectin, glucomannan, sambag, locust bean gum, One or two or more kinds of carrageenan, guar gum, and gellan gum are used as the water-soluble polymer 2, but are not limited thereto. In the case where the water-soluble polymer 2 having the property of gelling the suspension 4 is applied by cooling, it is practically preferable to easily mix the ceramic particles 1 and 3 when the suspension 4 is produced. The gelation temperature of the water-soluble polymer 2 is 50 ° C or lower. Further, specific examples of the water-soluble polymer 2 include gelatin, agar, carrageenan, and gellan gum.
此外,為了使陶瓷粒子1容易地均勻分散至懸浮體4中,例如亦可適用羧酸系分散劑、馬來酸系分散劑等分散劑。此外,為了將懸浮體4之黏度η調整成對應於陶瓷粒子1之平均粒徑d的所希望程度,亦可調配可組合使用水溶性高分子2之水溶性的增黏劑。就該種增黏劑之具體例而言,例如可列舉增黏多糖類、纖維素介電質系、聚乙烯系、聚酯系、聚醯胺系、聚乙二醇系、聚乙烯醇系、聚環氧烷基系、聚丙烯酸系及該等組合之化合物等,但並不限定於上述者。此外,例示之增黏劑雖與上述之水溶性高分子2重複,但在此係在上述之凝膠化步驟中,將未凝膠化之成分規定為「增黏劑」。 Further, in order to easily and uniformly disperse the ceramic particles 1 in the suspension 4, for example, a dispersant such as a carboxylic acid-based dispersant or a maleic acid-based dispersant may be used. Further, in order to adjust the viscosity η of the suspension 4 to a desired degree corresponding to the average particle diameter d of the ceramic particles 1, a water-soluble tackifier which can be used in combination with the water-soluble polymer 2 may be blended. Specific examples of such a tackifier include, for example, a thickening polysaccharide, a cellulose dielectric, a polyethylene, a polyester, a polyamine, a polyethylene glycol, or a polyvinyl alcohol. The polyepoxyalkyl group, the polyacrylic acid, and the compounds of the combinations are not limited to the above. Further, although the exemplified tackifier is the same as the above-described water-soluble polymer 2, the ungelled component is defined as a "tackifier" in the above gelation step.
再者,在凍結步驟中,可利用公知之冷卻裝置12。具體而言,可列舉適用下列各種冷卻方法之冷卻裝置12:令使懸浮體4凝膠化之凝膠化體的下表面7側接觸於例如經冷卻之金屬板等固體、依模具使之浸漬於經冷卻的液體中。此外,例如以在乙醇之液面附近不會產生停滯或波浪之方式從相對向之一方側流動至另一方側之方 式,使冷卻為預定溫度之乙醇循環,藉此亦可適用將液面附近之溫度保持為一定之乙醇冷卻裝置作為冷卻裝置12。藉由適用具有該構成之乙醇冷卻裝置,使置入有懸浮體4之模具的底面接觸或浸漬於經冷卻之乙醇的液面並予以保持,以生成凍結體6,即可製作氣孔徑之變異少之多孔質陶瓷11。 Further, in the freezing step, a known cooling device 12 can be utilized. Specifically, a cooling device 12 to which the following various cooling methods are applied is provided: the lower surface 7 side of the gelled body which gels the suspension 4 is brought into contact with a solid such as a cooled metal plate, and impregnated with a mold. In a cooled liquid. In addition, for example, in a manner that does not cause stagnation or waves near the liquid level of ethanol, from one side to the other side In the formula, the ethanol is cooled to a predetermined temperature, whereby an ethanol cooling device that maintains the temperature in the vicinity of the liquid surface to a constant temperature can be applied as the cooling device 12. By applying the ethanol cooling device having the above configuration, the bottom surface of the mold in which the suspension 4 is placed is brought into contact with or immersed in the liquid surface of the cooled ethanol to hold the frozen body 6, thereby producing a variation in the pore diameter. Less porous ceramics 11.
此外,凍結步驟中之凝膠化體的凍結溫度係只要凝膠化體中之水3可凍結而生成冰5之程度,則並無制限。此外,依水溶性高分子2之種類,會有因水溶性高分子2與水3之相互作用而造成凝膠化體在比-10℃高之溫度下不會凍結之情形,因此較佳為-10℃以下之凍結溫度。 Further, the freezing temperature of the gelled body in the freezing step is not limited as long as the water 3 in the gelled body can be frozen to form ice 5 . Further, depending on the type of the water-soluble polymer 2, there is a case where the gelled body does not freeze at a temperature higher than -10 ° C due to the interaction between the water-soluble polymer 2 and the water 3, and therefore it is preferably Freezing temperature below -10 °C.
此外,在乾燥步驟中,可利用藉由一面抑制凍結體6之內外之乾燥速度的差,一面緩緩地將冰5替換為氣孔10而防止龜裂之乾燥手法。具體而言,藉由對凍結體6進行凍結乾燥,或將凍結體6浸漬於水溶性有機溶劑或水溶性有機溶劑水溶液中並進行風乾,即可將冰5替換為氣孔10。 Further, in the drying step, it is possible to use a drying method in which the ice 5 is gradually replaced with the pores 10 while suppressing the difference in the drying speed between the inside and the outside of the frozen body 6 to prevent cracking. Specifically, the ice 5 can be replaced with the pores 10 by freeze-drying the frozen body 6 or by immersing the frozen body 6 in a water-soluble organic solvent or a water-soluble organic solvent aqueous solution and air drying.
例如,當將凍結體6浸漬在水溶性有機溶劑或水溶性有機溶劑水溶液中時,凍結體6中之冰5會溶解,且與水溶性有機溶劑混合。藉由對該操作執行1次或複數次,首先凍結體6中之屬於冰5的部分係被替換成水溶性有機溶劑。然後,在大氣中或減壓條件下使凍結體6內部由水溶性有機溶劑所替換之凍結體6乾燥,在凍結步驟中 屬於冰5的部分係被替換成氣孔10。 For example, when the frozen body 6 is immersed in a water-soluble organic solvent or an aqueous solution of a water-soluble organic solvent, the ice 5 in the frozen body 6 is dissolved and mixed with a water-soluble organic solvent. By performing the operation one or more times, first, the portion of the frozen body 6 belonging to the ice 5 is replaced with a water-soluble organic solvent. Then, the frozen body 6 replaced by the water-soluble organic solvent inside the frozen body 6 is dried in the atmosphere or under reduced pressure, in the freezing step. The portion belonging to the ice 5 is replaced with the air hole 10.
在利用水溶性有機溶劑之乾燥步驟中,就水溶性有機溶劑而言,適用不會侵蝕水溶性高分子2且揮發性比水3高者。具體而言,可列舉甲醇、乙醇、異丙醇、丙酮、醋酸乙酯等,但並不限定於上述者。藉由執行1次或複數次單獨使用該等水溶性有機溶劑、或併用複數種類之乾燥,在凍結體6內屬於冰5之部分,形成有氣孔10。 In the drying step using a water-soluble organic solvent, the water-soluble organic solvent is suitable for those which do not erode the water-soluble polymer 2 and have a higher volatility than water 3. Specific examples thereof include methanol, ethanol, isopropanol, acetone, ethyl acetate, and the like, but are not limited thereto. The pores 10 are formed in the frozen body 6 by the use of the water-soluble organic solvent alone or in plural times, or in combination with a plurality of types of drying, in the portion of the frozen body 6 which belongs to the ice 5.
再者,在脫脂步驟中,適用例如300℃至900℃之脫脂溫度。在此,將例如碳化矽、氮化矽等非氧化物陶瓷予以脫脂時。較佳為在氬氣或氮氣等惰性氣體環境下進行脫脂。相對於此,例如將氧化鋁、氧化鋯、磷灰石等氧化物陶瓷作為原料時,較佳為在大氣環境下進行脫脂。 Further, in the degreasing step, for example, a degreasing temperature of 300 ° C to 900 ° C is applied. Here, when a non-oxide ceramic such as tantalum carbide or tantalum nitride is degreased. Degreasing is preferably carried out under an inert gas atmosphere such as argon or nitrogen. On the other hand, when an oxide ceramic such as alumina, zirconia or apatite is used as a raw material, it is preferable to carry out degreasing in an atmospheric environment.
再者,在燒製步驟中,依據使用之陶瓷粒子1的種類或調配量、目標之硬度等,適當地調整燒製溫度、燒製時間及燒製環境,藉此製作出耐熱衝撃性及彎曲強度佳的多孔質陶瓷11。 Further, in the firing step, the firing temperature, the firing time, and the firing environment are appropriately adjusted depending on the type or blending amount of the ceramic particles 1 to be used, the hardness of the target, and the like, thereby producing heat-resistant punching properties and bending. Porous ceramic 11 with good strength.
如上述方式所得之多孔質陶瓷11之氣孔率較佳為50%至99%之範圍,更佳為70%至99%。當多孔質陶瓷11之氣孔率未達50%時,採用實施形態之多孔質陶瓷11之製造方法的必要性會減低。此外,多孔質陶瓷11之氣孔率超過99%時,例如有時在乾燥步驟中會無法維持形狀,且難以製作具有所希望強度之多孔質陶瓷11。 The porosity of the porous ceramic 11 obtained as described above is preferably in the range of 50% to 99%, more preferably 70% to 99%. When the porosity of the porous ceramics 11 is less than 50%, the necessity of using the method for producing the porous ceramics 11 of the embodiment is reduced. Further, when the porosity of the porous ceramics 11 exceeds 99%, for example, the shape may not be maintained in the drying step, and it is difficult to produce the porous ceramic 11 having a desired strength.
此外,多孔質陶瓷11在實用上較佳為具有之平均氣孔徑10μm至300μm之連通孔,更佳為10μm 至100μm。此外,平均氣孔徑係可藉由後述之實施例記載之方法而測定。 Further, the porous ceramic 11 is preferably a communication hole having an average pore diameter of 10 μm to 300 μm, more preferably 10 μm. Up to 100 μm. Further, the average pore diameter can be measured by the method described in the examples below.
此外,多孔質陶瓷11之平均彎曲強度,在實用上較佳為10MPa。並且,多孔質陶瓷11之耐熱衝撃性,在實用上較佳為450℃以上,更佳為600℃以上。此外,平均彎曲強度及耐熱衝撃性係可藉由後述之實施例記載之方法而測定。 Further, the average bending strength of the porous ceramics 11 is preferably 10 MPa in practical use. Further, the heat-resistant punchability of the porous ceramics 11 is preferably 450 ° C or more, more preferably 600 ° C or more. Further, the average bending strength and the heat-resistant punching property can be measured by the method described in the examples below.
如以上所製作之多孔質陶瓷11係例如可利用作為在製造積層陶瓷電容器等電子零件的過程中所包含之燒製電子零件的步驟中使用之燒製輔助具。在該燒製步驟中,係使屬於被燒製物之電子零件載置於燒製輔助具,而在窯爐內進行燒製。 As the porous ceramic 11 produced as described above, for example, a firing aid used in the step of firing an electronic component included in the process of manufacturing an electronic component such as a laminated ceramic capacitor can be used. In the firing step, the electronic component belonging to the object to be fired is placed in the firing aid and fired in the kiln.
以下,利用第2A、2B圖,針對實施形態之可適用多孔質陶瓷11之燒製輔助具加以說明。此外,在第2A、2B圖中,為了更容易地說明,係規定彼此正交之X軸方向、Y軸方向及Z軸方向,並將Z軸正方向設為鉛直向上方向。 Hereinafter, the firing aid for the porous ceramic 11 to which the embodiment is applicable will be described with reference to FIGS. 2A and 2B. In addition, in FIGS. 2A and 2B, in order to more easily explain, the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other are defined, and the Z-axis positive direction is defined as a vertical upward direction.
第2A圖係顯示實施形態之燒製輔助具之構成概要的示意立體圖。第2B圖係從Y軸之負側觀看第2A圖所示之燒製輔助具時之示意俯視圖。 Fig. 2A is a schematic perspective view showing the outline of the configuration of the firing aid of the embodiment. Fig. 2B is a schematic plan view showing the firing aid shown in Fig. 2A viewed from the negative side of the Y-axis.
如第2A、2B圖所示,燒製輔助具13係具備基台14、托架17。並且,在燒製輔助具13之托架17上,載置有被燒製物18。 As shown in FIGS. 2A and 2B, the firing aid 13 is provided with a base 14 and a bracket 17. Further, the fired material 18 is placed on the bracket 17 of the baking aid 13 .
被燒製物18係例如積層陶瓷電容器等電子 零件。亦即,上述之燒製輔助具13為電子零件用之燒製輔助具。此外,在上述說明中,雖將被燒製物18作為積層陶瓷電容器,但其為例示,並非限定於此。亦即,被燒製物18係只要是例如晶片感應器或半導體基板等進行燒製之電子零件,則亦可為任何種類者。 The object to be fired 18 is an electron such as a laminated ceramic capacitor. Components. That is, the above-described firing aid 13 is a firing aid for electronic parts. Further, in the above description, the object 18 to be fired is used as a laminated ceramic capacitor, but it is exemplified, and is not limited thereto. In other words, the object to be fired 18 may be any type as long as it is an electronic component that is fired, such as a wafer sensor or a semiconductor substrate.
燒製輔助具13係在托架17之上表面17a載置有被燒製物18的狀態下,配置在未圖示之窯爐內,且進行將被燒製物18予以燒製之步驟。 The baking aid 13 is placed in a kiln (not shown) in a state where the object 18 to be fired on the upper surface 17a of the bracket 17, and the workpiece 18 is fired.
燒製輔助具13之基台14係具備板部15、支撐部16。板部15係形成為可在上表面載置托架17之形狀,具體而言例如為大致平板狀,且為俯視大致為矩形狀。 The base 14 of the baking aid 13 is provided with a plate portion 15 and a support portion 16. The plate portion 15 is formed in a shape in which the bracket 17 can be placed on the upper surface, and specifically, for example, has a substantially flat shape and is substantially rectangular in plan view.
支撐部16係具有複數個(例如4個,在第2A圖有1個看不到),且形成在板部15之下表面側的適當位置。具體而言,支撐部16係以從板部15之下表面的四角隅部分朝Z軸之負方向突出之方式形成,以支撐板部15。 The support portion 16 has a plurality of (for example, four, one of which is not visible in the second AA), and is formed at an appropriate position on the lower surface side of the plate portion 15. Specifically, the support portion 16 is formed to protrude from the square corner portion of the lower surface of the plate portion 15 in the negative direction of the Z-axis to support the plate portion 15.
再者,基台14並非限定在第2A、2B圖所示之形狀者。亦即,基台14亦可為例如套(匣盆)或承載板等,主要是可載置托架17之形狀即可。此外,基台14與托架17並不一定要為不同體,亦可構成為一體化。 Further, the base 14 is not limited to the shape shown in FIGS. 2A and 2B. That is, the base 14 may be, for example, a sleeve (a basin) or a carrier plate, and the like, and the shape of the bracket 17 may be mainly placed. Further, the base 14 and the bracket 17 do not have to be different bodies, and may be configured to be integrated.
此外,板部15之形狀並非限定於上述之大致矩形狀者。亦即,板部15之形狀亦可為例如正方形或三角形等多角形、或圓形或橢圓形等其他形狀。 Further, the shape of the plate portion 15 is not limited to the above-described substantially rectangular shape. That is, the shape of the plate portion 15 may be a polygonal shape such as a square or a triangle, or other shapes such as a circular shape or an elliptical shape.
此外,本實施形態之托架17係形成為於俯視時大致矩形狀,且設為Z軸方向之厚度較薄之薄板狀。 如此,藉由將托架17設為薄板狀,即可使托架17、甚至燒製輔助具13本身輕量化。 Further, the bracket 17 of the present embodiment is formed into a substantially rectangular shape in a plan view and has a thin plate shape having a thin thickness in the Z-axis direction. Thus, by making the bracket 17 into a thin plate shape, the bracket 17 and even the baking aid 13 itself can be made lighter.
就如上述方式構成之燒製輔助具13而言,可適用實施形態之多孔質陶瓷11。此外,構成基台14之板部15及支撐部16亦可一體成形,個別製作之板部15及支撐部16係適用例如接著、壓接、燒結等其他各種接合手法,來製作基台14。 The porous ceramics 11 of the embodiment can be applied to the firing aid 13 configured as described above. Further, the plate portion 15 and the support portion 16 constituting the base 14 may be integrally molded, and the plate portion 15 and the support portion 16 which are separately formed may be formed by a variety of other joining methods such as adhesion, pressure bonding, and sintering.
再者,實施形態之多孔質陶瓷11適用作為燒製輔助具13時,多孔質陶瓷11較佳為相對於調配作為陶瓷粒子1之完全安定化二氧化鋯含有0.01至1.5質量%之Al2O3及0.01至2.0質量%的CaO。當實施形態之多孔質陶瓷11相對於完全安定化二氧化鋯含有適量之Al2O3及Ca時,耐熱衝撃性及彎曲強度會更為提升。 Further, when the porous ceramics 11 of the embodiment is used as the firing aid 13, the porous ceramics 11 preferably contains 0.01 to 1.5% by mass of Al 2 O with respect to the fully stabilized zirconia as the ceramic particles 1 . 3 and 0.01 to 2.0% by mass of CaO. When the porous ceramic 11 of the embodiment contains an appropriate amount of Al 2 O 3 and Ca with respect to the fully stabilized zirconia, the heat-resistant squeezing property and the bending strength are further improved.
如此,由於實施形態之多孔質陶瓷11適用作為燒製輔助具13,因此在燒製被燒製物18之際窯爐內之熱風會通過配置在被燒製物18之下表面側的基台14及托架17而到達窯爐之下方及側方。因此,可減低窯爐內之溫度不均,且可有效率地使被燒製物18進行燒製。此外,在進行將調配於被燒製物18之黏結劑等其他有機成分予以去除之脫脂時,可有效率地將有機成分從被燒製物18去除。 In this way, since the porous ceramics 11 of the embodiment are used as the baking aid 13, the hot air in the kiln passes through the abutment disposed on the lower surface side of the object 18 when the workpiece 18 is fired. 14 and the bracket 17 reach the lower side and the side of the kiln. Therefore, the temperature unevenness in the kiln can be reduced, and the fired material 18 can be efficiently fired. Further, when degreasing is performed to remove other organic components such as a binder to be prepared in the object 18 to be fired, the organic component can be efficiently removed from the object 18 to be fired.
此外,在第2A、2B圖中,雖係顯示一個燒製輔助具13,但並不限定於此,例如亦可將燒製輔助具13朝Z軸正方向堆疊成複數段,並將載置於複數段之燒製輔 助具13的多數被燒製物18同時地進行燒製。 Further, in the drawings 2A and 2B, although one firing aid 13 is shown, the present invention is not limited thereto. For example, the firing aid 13 may be stacked in a plurality of stages in the positive direction of the Z-axis, and placed. Burning in the plural Most of the fired articles 18 of the aid 13 are simultaneously fired.
此外,在上述說明中,雖以實施形態之多孔質陶瓷11適用於基台14及托架17之例加以說明,但亦可將多孔質陶瓷11適用於基台14及托架17中之其中一者。再者,亦可將實施形態之多孔質陶瓷11適用於構成基台14之板部15及支撐部16中之其中一者。 Further, in the above description, the porous ceramic 11 of the embodiment is applied to the base 14 and the bracket 17, but the porous ceramic 11 may be applied to the base 14 and the bracket 17. One. Further, the porous ceramic 11 of the embodiment may be applied to one of the plate portion 15 and the support portion 16 constituting the base 14.
接著,針對製作實施形態之多孔質陶瓷11的方法,利用第6圖詳細地加以說明。第6圖係顯示製造實施形態之多孔質陶瓷11的處理順序的流程圖。 Next, a method of producing the porous ceramic 11 of the embodiment will be described in detail with reference to FIG. Fig. 6 is a flow chart showing the processing procedure of the porous ceramic 11 of the embodiment.
如第6圖所示,首先混合陶瓷粒子1、水溶性高分子2、及水3來調製懸浮體4(步驟S101)。燒製助劑、pH調整劑、起始劑、交聯劑等各種添加劑係可在該時間點添加。此外,水溶性高分子2亦可使用在與陶瓷粒子1混合之前預先與水3混合而成為水溶液者,且亦可將預先混合有水溶性高分子2與陶瓷粒子1者添加在攪拌中之水3。並且,在使用分散劑時,較佳為預先與陶瓷粒子1混合。 As shown in Fig. 6, first, the ceramic particles 1, the water-soluble polymer 2, and the water 3 are mixed to prepare a suspension 4 (step S101). Various additives such as a baking aid, a pH adjuster, a starter, and a crosslinking agent can be added at this point in time. In addition, the water-soluble polymer 2 may be used by mixing with the water 3 before mixing with the ceramic particles 1 to form an aqueous solution, or may be added to the water during stirring by mixing the water-soluble polymer 2 and the ceramic particles 1 in advance. 3. Further, when a dispersant is used, it is preferred to mix with the ceramic particles 1 in advance.
接著,使在步驟S101中所調製之懸浮體4凝膠化而形成凝膠化體(步驟S102)。為了促進懸浮體4之凝膠化,若有必要,亦可加熱懸浮體4。 Next, the suspension 4 prepared in the step S101 is gelated to form a gelled body (step S102). In order to promote gelation of the suspension 4, the suspension 4 may be heated if necessary.
接著,使凝膠化體4凍結而生成具有冰5之結晶朝隨機方向成長之部位的凍結體6(步驟S103)。然後,使凍結體6乾燥並去除成長於凍結體6之冰5,而生成氣孔10(步驟S104)。 Next, the gelled body 4 is frozen to form a frozen body 6 having a portion where the crystal of the ice 5 grows in a random direction (step S103). Then, the frozen body 6 is dried and the ice 5 grown on the frozen body 6 is removed to form the pores 10 (step S104).
再者,進行從凍結體6去除水溶性高分子2 等之有機成分的脫脂(步驟S105),接著進行燒製(S106),該凍結體6係去除冰5而生成氣孔10者。藉由以上之各步驟,結束實施形態之一連串之多孔質陶瓷11的製造。 Furthermore, the removal of the water-soluble polymer 2 from the frozen body 6 is performed. Degreasing of the organic component (step S105), followed by firing (S106), wherein the frozen body 6 removes the ice 5 to form the pores 10. By the above steps, the production of a series of porous ceramics 11 of one embodiment is completed.
如以上所述,實施形態之多孔質陶瓷的製造方法係包含使懸浮體凝膠化之步驟、使經凝膠化之上述懸浮體凍結而生成凍結體之步驟、將成長於凍結體之冰予以去除而生成氣孔的步驟、及對去除冰後之上述凍結體進行燒製之步驟。懸浮體係包含陶瓷粒子、水溶性高分子、及水。凝膠化前之前述懸浮體在20℃之黏度η(mPa.s)、與前述陶瓷粒子之平均粒徑d(μm)係具有η≧950×d-0.77之關係。 As described above, the method for producing a porous ceramic according to the embodiment includes the step of gelling the suspension, the step of freezing the gelled suspension to form a frozen body, and the ice grown in the frozen body. The step of removing the pores and the step of firing the frozen body after removing the ice. The suspension system contains ceramic particles, a water-soluble polymer, and water. The viscosity η (mPa.s) of the suspension before gelation at 20 ° C and the average particle diameter d (μm) of the ceramic particles have a relationship of η ≧ 950 × d - 0.77 .
因此,依據實施形態之多孔質陶瓷的製造方法,可製作耐熱衝撃性及彎曲強度佳之多孔質陶瓷。 Therefore, according to the method for producing a porous ceramic according to the embodiment, a porous ceramic having excellent heat resistance and excellent bending strength can be produced.
此外,在上述之實施形態中,雖列舉凍結使懸浮體4凝膠化之凝膠化體的冷卻裝置12係朝凝膠化體之一方向側配置之例加以說明,但並不限定於此。例如,可為將凝膠化體依模具載置在設定為預定之凍結溫度的冷凍室內之方法,亦可為以隔熱材隔斷上下表面而以輻射伝熱從側面加以冷卻之方法。亦即,依據實施形態之多孔質陶瓷11的製造方法,不論冷卻裝置12之構成為何,皆會生成氣孔10朝隨機方向形成,且耐熱衝撃性及彎曲強度佳的多孔質陶瓷11。 In addition, in the above-described embodiment, the cooling device 12 that freezes the gelled body in which the suspension 4 is gelated is disposed on one side of the gelled body, but the invention is not limited thereto. . For example, the gelled body may be placed in a freezing chamber set to a predetermined freezing temperature depending on the mold, or may be a method in which the upper and lower surfaces are blocked by a heat insulating material and cooled from the side by radiation heat. In other words, according to the method for producing the porous ceramics 11 of the embodiment, regardless of the configuration of the cooling device 12, the porous ceramics 11 in which the pores 10 are formed in a random direction and which have excellent heat-resistant punchability and bending strength are formed.
再者,在上述之實施形態中,雖以將乙醇冷卻裝置作為冷卻裝置12為例加以說明,但只要是凝固溫 度低、且達用來凍結凝膠化體所希望之溫度的液狀冷媒,則亦可適用乙醇以外者。具體而言,可列舉乙醇、甲醇、異丙醇、丙酮、乙二醇等,但並不限定於上述者。此外,可單獨使用該等之冷媒17,或併用複數種類,且可依需要與水混合來使用。 Further, in the above-described embodiment, the ethanol cooling device is used as the cooling device 12 as an example, but the solidification temperature is as long as it is A liquid refrigerant having a low degree and reaching a desired temperature for freezing the gelled body may be used other than ethanol. Specific examples thereof include ethanol, methanol, isopropanol, acetone, ethylene glycol, and the like, but are not limited thereto. Further, the refrigerants 17 may be used singly or in combination of plural kinds, and may be used by mixing with water as needed.
並且,在上述之實施形態中,脫脂步驟(步驟S105)雖作為必須之步驟加以說明,但依水溶性高分子2之種類及調配量,亦可予以省略。此時,水溶性高分子2係在燒製步驟(步驟S106)中被分解、去除。 Further, in the above-described embodiment, the degreasing step (step S105) is described as an essential step, but the type and the amount of the water-soluble polymer 2 may be omitted. At this time, the water-soluble polymer 2 is decomposed and removed in the firing step (step S106).
此外,實施形態之多孔質陶瓷11的製造方法之凝膠化前之懸浮體4在20℃的黏度η、與陶瓷粒子1之平均粒徑d的關係式,係以下述方式所得者。首先,就實施形態之多孔質陶瓷11所要求之特性而言,著眼於氣孔10之平均高寬比、平均彎曲強度、耐熱衝撃性。接著,變更陶瓷粒子1之平均粒徑d(μm)及凝膠化前之懸浮體4在20℃之黏度η(mPa.s)的值,同時製作多孔質陶瓷11,並測定所得之多孔質陶瓷11之上述3個特性。再者,由全部符合氣孔10之平均高寬比1至1.4、平均彎曲強度10MPa以上、及耐熱衝撃性450℃以上之各條件的d及η之值來評價相關性時,可得關係式η≧1630×d-0.77。接著,藉由使用以符合該關係式之方式調整之懸浮體4,確認可製作耐熱衝撃性及彎曲強度佳之多孔質陶瓷11。 Further, the relationship between the viscosity η at 20 ° C and the average particle diameter d of the ceramic particles 1 of the suspension 4 before gelation in the method for producing the porous ceramic 11 of the embodiment is obtained as follows. First, the characteristics required for the porous ceramic 11 of the embodiment are focused on the average aspect ratio, the average bending strength, and the heat-resistant punchability of the pores 10. Next, the average particle diameter d (μm) of the ceramic particles 1 and the viscosity η (mPa.s) of the suspension 4 before gelation at 20 ° C were changed, and the porous ceramic 11 was produced, and the obtained porous material was measured. The above three characteristics of the ceramic 11. Further, when the correlation is evaluated from the values of d and η which satisfy the conditions of the average aspect ratio of the pores 10 to 1.4, the average bending strength of 10 MPa or more, and the heat-resistant punching property of 450 ° C or more, the relationship η can be obtained. ≧1630×d -0.77 . Then, by using the suspension 4 adjusted in such a manner as to conform to the relationship, it was confirmed that the porous ceramic 11 having excellent heat resistance and bending strength can be produced.
再者,上述之黏度η及平均粒徑d具有950×d-0.77≦η<1630×d-0.77之關係時,亦得知氣孔10雖完全 不會隨機地形成,且以局部地具有配向性之方式形成,但會生成耐熱衝撃性及彎曲強度佳之多孔質陶瓷11。 Further, when the viscosity η and the average particle diameter d have a relationship of 950 × d - 0.77 ≦ η < 1630 × d - 0.77, it is also known that the pores 10 are not randomly formed at all, and are partially aligned. The method is formed, but the porous ceramic 11 having excellent heat resistance and bending strength is formed.
(實施例1) (Example 1)
混合平均粒徑9μm之完全安定化二氧化鋯(YSZ)粒子(對應於陶瓷粒子1)20vol%、作為燒製助劑之氧化鋁1.5質量%(相對於安定化二氧化鋯)、碳酸鈣3.5質量%(相對於完全安定化二氧化鋯、以氧化鈣換算為2.0質量%)、及水80.0vol%。在該混合液添加作為增黏劑之微量的羥丙基纖維素、及明膠(對應於水溶性高分子2)3.0質量%(相對於水3)以調製懸浮體4。將所調製之懸浮體4置入於模具,並靜置在5℃之冷藏庫內,以進行懸浮體4之凝膠化。 20 vol% of fully stabilized zirconia (YSZ) particles (corresponding to ceramic particles 1) having an average particle diameter of 9 μm, 1.5% by mass of alumina as a sintering aid (relative to stabilized zirconia), and calcium carbonate 3.5 % by mass (2.0% by mass in terms of fully stabilized zirconia, in terms of calcium oxide), and 80.0 vol% in water. In the mixed liquid, a small amount of hydroxypropylcellulose as a tackifier and 3.0% by mass (relative to water 3) of gelatin (corresponding to water-soluble polymer 2) were added to prepare a suspension 4. The prepared suspension 4 was placed in a mold and allowed to stand in a refrigerator at 5 ° C to effect gelation of the suspension 4 .
接著,將置入有經凝膠化之懸浮體4之模具23放入-15℃之冷凍庫,以生成凍結體6。接著將凍結體6從模具取出,且利用凍結乾燥裝置進行24小時之乾燥。再者,利用大氣環境下之電氣爐在600℃下進行2小時之脫脂後,在1600℃下進行2小時之燒製,藉此可得鉛直方向之厚度c=9mm的多孔質陶瓷11,且藉由施行使水平方向之寬度均等地一致之加工,而設成a×b×c=100mm×100mm×9mm(參照第5圖)。此外,施行加工之前的多孔質陶瓷11之水平方向的寬度a×b,係成為(104至106)mm×(104至106)mm左右。分別將凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表 1,將多孔質陶瓷11之氣孔徑的變異顯示在表2。此外,第3圖係顯示由本實施例所製作之多孔質陶瓷11的局部剖面圖。 Next, the mold 23 in which the gelled suspension 4 was placed was placed in a freezer at -15 ° C to form a frozen body 6. Next, the frozen body 6 was taken out from the mold and dried by a freeze-drying apparatus for 24 hours. Further, after degreasing at 600 ° C for 2 hours in an electric furnace in an air atmosphere, and then firing at 1600 ° C for 2 hours, a porous ceramic 11 having a thickness of c = 9 mm in the vertical direction can be obtained, and By performing the processing in which the width in the horizontal direction is uniformly uniform, it is set to a × b × c = 100 mm × 100 mm × 9 mm (refer to Fig. 5). Further, the width a × b in the horizontal direction of the porous ceramics 11 before the processing is about (104 to 106) mm × (104 to 106) mm. The viscosity of the suspension 4 before gelation at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, the heat-resistant punchability, and the average bending strength are shown in the table. 1. The variation of the pore diameter of the porous ceramic 11 is shown in Table 2. Further, Fig. 3 is a partial cross-sectional view showing the porous ceramic 11 produced by the present embodiment.
在此,「懸浮體4之黏度η」係利用B型黏度計(Brookfield公司製數位黏度計、型式(DV1、PRIME)),轉軸No.SC4-34、轉數20rpm來測定懸浮體4之黏度的值。再者,「平均彎曲強度」係依據JISR1601:2008所規定之3點彎曲試驗所測定之值。 Here, the "viscosity η of the suspension 4" is determined by using a B-type viscometer (a digital viscometer manufactured by Brookfield, model (DV1, PRIME)), a shaft No. SC4-34, and a number of revolutions of 20 rpm to measure the viscosity of the suspension 4. Value. In addition, the "average bending strength" is a value measured in accordance with the 3-point bending test prescribed in JISR1601:2008.
再者,「氣孔10之高寬比」係可依據第3圖所示之局部縱剖面圖之圖像解析來算出。亦即,將氣孔10之剖面部與橢圓體作近似,將測定面積、長徑及短徑時之短徑除以長徑所得之值稱為「氣孔10之高寬比」。此外,將任意選擇之50個的氣孔10之高寬比的平均值規定為「氣孔10之平均高寬比」。 Furthermore, the "aspect ratio of the air holes 10" can be calculated from the image analysis of the partial longitudinal cross-sectional view shown in Fig. 3. That is, the cross-sectional portion of the pores 10 is approximated to the ellipsoid, and the value obtained by dividing the short diameter of the measured area, the long diameter, and the short diameter by the long diameter is referred to as "the aspect ratio of the pores 10". Further, the average value of the aspect ratio of the arbitrarily selected 50 pores 10 is defined as "the average aspect ratio of the pores 10".
再者,「耐熱衝撃性」係以列方式進行測定。首先,製作100mm□×厚度3mm之試料。接著,透過設置在相同尺寸之煉瓦質托架的四角隅的支柱從上下方向夾持該試料,並以電氣爐進行高溫加熱而在保持在所希望溫度1小時以上後,從電氣爐取出試料並曝露在室溫下,並以肉眼評價取樣之破裂之有無。一面將設定溫度以50℃為單位從350℃升溫至700℃,一面進行變更,且將不會產生破裂之溫度的上限設為「耐熱衝撃性」。 In addition, "heat-resistant squeezing property" is measured in a row. First, a sample of 100 mm □ x thickness of 3 mm was produced. Then, the sample is sandwiched from the upper and lower sides by the pillars provided in the four corners of the tile bracket of the same size, heated at a high temperature in an electric furnace, and after being held at a desired temperature for one hour or more, the sample is taken out from the electric furnace. The temperature was exposed to room temperature, and the presence or absence of cracking of the sample was visually evaluated. The temperature was raised from 350 ° C to 700 ° C in a unit of 50 ° C, and the upper limit of the temperature at which cracking did not occur was referred to as "heat-resistant squeezing property".
此外,多孔質陶瓷11之「平均氣孔徑」及「氣孔徑的變異」係由下列方式所算出。首先,如第5圖 所示,將所製作之多孔質陶瓷11作為寬度a1×b1=15mm×15mm、厚度c=9mm之試料片,從中央(α)及端部(β、γ、δ、ε)之合計5處分別切開取出。接著,針對該5個試料片分別算出平均氣孔徑。在此,各試料片之「平均氣孔徑」係指以接觸角140度利用水銀壓入法分別對各試料片進行測定,依據使氣孔10近似於圓柱時之氣孔分佈所得之中間值徑(d50)。 Further, the "average pore diameter" and "variation in pore diameter" of the porous ceramic 11 were calculated by the following methods. First, as shown in Fig. 5, the porous ceramic 11 produced was made into a sample piece having a width a 1 × b 1 = 15 mm × 15 mm and a thickness c = 9 mm from the center (α) and the end (β, γ, The total of δ and ε) were cut and taken out respectively. Next, the average pore diameter was calculated for each of the five sample pieces. Here, the "average pore diameter" of each sample piece refers to the measurement of each sample piece by a mercury intrusion method at a contact angle of 140 degrees, and the median diameter (d50) obtained by arranging the pores when the pores 10 are approximated to a cylinder. ).
再者,求出各平均氣孔徑中之最大值與最小值之差,將該值((最大值)-(最小值))除以各平均氣孔徑之平均值所得之值的百分率係設為「氣孔徑之變異」(%)。此外,將依試料片所得之平均氣孔徑的平均值規定為多孔質陶瓷11之「平均氣孔徑」。 Furthermore, the difference between the maximum value and the minimum value in each average pore diameter is obtained, and the percentage of the value obtained by dividing the value ((maximum value - (minimum value)) by the average value of each average pore diameter is set as "Variation of pore size" (%). Further, the average value of the average pore diameters obtained from the test pieces was defined as the "average pore diameter" of the porous ceramics 11.
(實施例2) (Example 2)
混合平均粒徑0.5μm之氧化鋁1.5(對應於陶瓷粒子1)10vol%、水80.0vol%、及微量之羧酸系分散劑。在該混合液添加作為增黏劑之微量的羥丙基纖維素、明膠(對應水溶性高分子2)3質量%(相對於水3)以調製懸浮體4。將所調製之懸浮體置入於模具,以進行懸浮體4之凝膠化。 An alumina 1.5 (corresponding to ceramic particles 1) having an average particle diameter of 0.5 μm was mixed with 10 vol%, water of 80.0 vol%, and a trace amount of a carboxylic acid-based dispersant. To the mixed liquid, a small amount of hydroxypropylcellulose and gelatin (corresponding to water-soluble polymer 2) as a tackifier were added in an amount of 3% by mass (relative to water 3) to prepare a suspension 4. The prepared suspension is placed in a mold to effect gelation of the suspension 4.
接著,將置入有經凝膠化之懸浮體4之模具23放入-15℃之凍結槽並予以冷卻,以生成凍結體6。接著將凍結體6從模具取出,且利用甲醇使之乾燥。再者,利用大氣環境下之電氣爐在1600℃下進行2小時之燒製後,在1600℃下進行2小時之燒製,藉此可得多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在 20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 Next, the mold 23 in which the gelled suspension 4 was placed was placed in a freezing tank at -15 ° C and cooled to form a frozen body 6. The frozen body 6 is then taken out of the mold and dried with methanol. Further, after firing in an electric furnace in an air atmosphere at 1600 ° C for 2 hours, it was fired at 1600 ° C for 2 hours, whereby the porous ceramic 11 was obtained. The suspension 4 before gelation obtained in the same manner as in Example 1 was The viscosity η at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, the heat-resistant punchability, and the average bending strength are shown in Table 1.
(實施例3) (Example 3)
除了將完全安定化二氧化鋯(YSZ)粒子(對應於陶瓷粒子1)之平均粒徑變更為1.5μm,並將以vol%單位表示之陶瓷粒子1與水3之混合比設為15:85,在將經凝膠化之懸浮體4置入模具之狀態下載置於冷卻至-15℃之銅板上2小時間,以生成凍結體6之外,藉由與實施例1同樣之方法來製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。並且,將多孔質陶瓷11之氣孔徑的變異顯示在表2。 The average particle diameter of the completely stabilized zirconia (YSZ) particles (corresponding to ceramic particles 1) was changed to 1.5 μm, and the mixing ratio of ceramic particles 1 and water 3 expressed in units of vol% was set to 15:85. And the gelled suspension 4 was placed in a mold and placed on a copper plate cooled to -15 ° C for 2 hours to form a frozen body 6 by the same method as in Example 1. Porous ceramic 11. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1. Further, the variation of the pore diameter of the porous ceramic 11 is shown in Table 2.
(實施例4) (Example 4)
除了使用平均粒徑5.8μm之完全安定化二氧化鋯(YSZ)粒子,並且適用後述之冷卻裝置12來取代所冷卻之銅板之外,藉由與實施例1同樣之方法來製作多孔質陶瓷11。在冷卻步驟中,係將乙醇冷卻裝置適用作為冷卻裝置12,使置入有經凝膠化之懸浮體4的模具之底面接觸於液面,並保持20分鐘且進行冷卻,該乙醇冷卻裝置係以不會在乙醇之液面附近產生停滯或波浪之方式流動,而從相對向之一方側循環至另一方側,並將液面附近之溫度保持在-15℃。將以與實施例1同樣之方式所得之凝膠化前之懸浮 體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 Porous ceramics 11 were produced in the same manner as in Example 1 except that fully stabilized zirconia (YSZ) particles having an average particle diameter of 5.8 μm were used, and a cooling device 12 to be described later was used instead of the cooled copper plate. . In the cooling step, an ethanol cooling device is applied as the cooling device 12, and the bottom surface of the mold in which the gelled suspension 4 is placed is brought into contact with the liquid surface, and held for 20 minutes and cooled, and the ethanol cooling device is cooled. The flow is not generated in the vicinity of the liquid surface of the ethanol, but is circulated from the opposite side to the other side, and the temperature in the vicinity of the liquid surface is maintained at -15 °C. The suspension before gelation obtained in the same manner as in Example 1 The viscosity η of the body 4 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, the heat-resistant punchability, and the average bending strength are shown in Table 1.
(實施例5) (Example 5)
混合平均粒徑0.7μm之碳化矽(對應於陶瓷粒子1)10vol%、作為燒製助劑之微量之碳及碳化硼、水90vol%,並且添加瓊脂(對應於水溶性高分子2)1.0質量%(相對於水3),以調製懸浮體4。 10 vol% of niobium carbide (corresponding to ceramic particle 1) having an average particle diameter of 0.7 μm, a trace amount of carbon as a sintering aid, boron carbide, water 90 vol%, and agar (corresponding to water-soluble polymer 2) 1.0 mass % (relative to water 3) to modulate the suspension 4.
接著,將經調製之懸浮體4置入模具23且放置在冷藏庫內,並使置入模具之懸浮體4凝膠化。將置入有經凝膠化之懸浮體4的模具浸漬於-15℃之凍結槽並使之冷卻,以生成凍結體6。接著將凍結體6從模具取出,且利用甲醇使之乾燥。再者,利用大氣環境下之電氣爐在1600℃下進行2小時之燒製。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 Next, the prepared suspension 4 is placed in a mold 23 and placed in a refrigerator, and the suspension 4 placed in the mold is gelated. The mold in which the gelled suspension 4 was placed was immersed in a freezing tank at -15 ° C and allowed to cool to form a frozen body 6. The frozen body 6 is then taken out of the mold and dried with methanol. Further, firing was performed at 1600 ° C for 2 hours in an electric furnace in an atmospheric environment. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1.
(實施例6) (Example 6)
混合平均粒徑2.1μm之氮化矽(對應於陶瓷粒子1)10vol%、作為燒製助劑之微量的氧化鋁及氧化釔、及水90vol%。在該混合液添加作為增黏劑之微量的羥丙基纖維素、聚乙烯亞胺(對應於水溶性高分子2)5質量%(相對於水3)、交聯劑(二甘油環氧丙基醚)2.5質量%(相對於水3)並予以混合,以調製懸浮體4。 Nitridium nitride (corresponding to ceramic particles 1) having an average particle diameter of 2.1 μm was mixed at 10 vol%, a trace amount of alumina and cerium oxide as a sintering aid, and water of 90 vol%. To the mixture, a small amount of hydroxypropylcellulose, polyethyleneimine (corresponding to water-soluble polymer 2), 5% by mass (relative to water 3), and a crosslinking agent (diglycerol propylene oxide) were added as a tackifier. The ether was 2.5% by mass (relative to water 3) and mixed to prepare the suspension 4.
接著,使所調製之懸浮體4放入於模具且在20℃靜置6小時,並使懸浮體4凝膠化。將置入有經凝膠化之懸浮體4的模具浸漬於-15℃之凍結槽並使之冷卻,以生成凍結體6。接著將凍結體6從模具取出,且利用凍結乾燥裝置進行24小時之乾燥。接者,利用氮氣環境下之電氣爐在1700℃下進行2小時之燒製。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 Next, the prepared suspension 4 was placed in a mold and allowed to stand at 20 ° C for 6 hours, and the suspension 4 was gelated. The mold in which the gelled suspension 4 was placed was immersed in a freezing tank at -15 ° C and allowed to cool to form a frozen body 6. Next, the frozen body 6 was taken out from the mold and dried by a freeze-drying apparatus for 24 hours. The receiver was fired at 1700 ° C for 2 hours in an electric furnace under a nitrogen atmosphere. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1.
(實施例7) (Example 7)
除了不使用燒製助劑之外,藉由與實施例3同樣之方法來製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 The porous ceramic 11 was produced in the same manner as in Example 3 except that the baking aid was not used. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1.
(實施例8) (Example 8)
除了調整增黏劑之添加量並使黏性降低之外,藉由與實施例3同樣之方法來製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。此外,第4A、4B圖係由本實施例所製作之多孔質陶瓷11的局部縱剖面圖。 The porous ceramic 11 was produced in the same manner as in Example 3 except that the amount of the tackifier added was adjusted to lower the viscosity. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1. Further, Figs. 4A and 4B are partial longitudinal sectional views of the porous ceramic 11 produced in the present embodiment.
(實施例9) (Example 9)
除了調整增黏劑之添加量並使黏性降低下之外,藉由與實施例4同樣之方法來製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 The porous ceramic 11 was produced in the same manner as in Example 4 except that the amount of the tackifier added was adjusted and the viscosity was lowered. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1.
(比較例1) (Comparative Example 1)
除了使用平均粒徑1.5μm之完全安定化二氧化鋯(YSZ)粒子,且不添加增黏劑之外,藉由與實施例4同樣之方法來製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。將多孔質陶瓷11之氣孔徑的變異顯示在表2。此外,第8圖係由本比較例所製作之多孔質陶瓷11的局部縱剖面圖。 Porous ceramics 11 were produced in the same manner as in Example 4 except that fully stabilized zirconia (YSZ) particles having an average particle diameter of 1.5 μm were used without adding a tackifier. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1. The variation of the pore diameter of the porous ceramic 11 is shown in Table 2. Further, Fig. 8 is a partial longitudinal sectional view of the porous ceramic 11 produced by the comparative example.
(比較例2) (Comparative Example 2)
除了不添加增黏劑之外,利用與實施例4同樣之方法,製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 The porous ceramic 11 was produced in the same manner as in Example 4 except that the tackifier was not added. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1.
(比較例3) (Comparative Example 3)
除了使用平均粒徑0.5μm之完全安定化二氧化鋯(YSZ)粒子且不添加增黏劑之外,藉由與實施例7同樣之方 法來製作多孔質陶瓷11。將以與實施例1同樣之方式所得之凝膠化前之懸浮體4在20℃的黏度η、所得之多孔質陶瓷11的氣孔率、平均氣孔徑、氣孔10之平均高寬比、耐熱衝撃性、及平均彎曲強度顯示在表1。 The same method as in Example 7 except that fully stabilized zirconia (YSZ) particles having an average particle diameter of 0.5 μm were used without adding a tackifier. The method is to produce a porous ceramic 11. The viscosity of the suspension 4 before gelation obtained in the same manner as in Example 1 at 20 ° C, the porosity of the obtained porous ceramic 11, the average pore diameter, the average aspect ratio of the pores 10, and the heat-resistant ramification The properties and average bending strength are shown in Table 1.
針對實施例1至比較例3中所使用之陶瓷粒子1及所製作之多孔質陶瓷11,總括地顯示在表1。 The ceramic particles 1 used in Examples 1 to 3 and the porous ceramic 11 produced were collectively shown in Table 1.
如表1所示,多孔質陶瓷11(實施例1至7)之氣孔10之平均高寬比皆為1.4以下,該多孔質陶瓷11係以相對於陶瓷粒子1之平均粒徑d,使凝膠化前之懸浮 體4之在20℃的黏度η具有特定關係、亦即關係式η≧1630×d-0.77的方式調製懸浮體4之黏性而得者。再者,從圖像解析之觀點來看視覺上明顯得知,依據實施例1至7,製作形成有朝隨機方向連通之氣孔10的多孔質陶瓷11(參照第3圖)。 As shown in Table 1, the average aspect ratio of the pores 10 of the porous ceramics 11 (Examples 1 to 7) was 1.4 or less, and the porous ceramic 11 was condensed with respect to the average particle diameter d of the ceramic particles 1. The viscosity η at 20 ° C of the suspension 4 before gelation has a specific relationship, that is, the relationship η ≧ 1630 × d - 0.77 to modulate the viscosity of the suspension 4 . Further, from the viewpoint of image analysis, it is apparent from the viewpoint of image analysis that the porous ceramics 11 having the pores 10 communicating in the random direction are formed in accordance with Examples 1 to 7 (see Fig. 3).
再者,多孔質陶瓷11(實施例8、9)之氣孔10之平均高寬比皆為超過1.4且在2.0以下,該多孔質陶瓷11係以使上述之黏度η具有及平均粒徑d具有950×d-0.77≦η<1630×d-0.77之關係之方式調製懸浮體4之黏性而得者。再者,從圖像解析之觀點來看視覺上明顯得知,依據實施例8、9,製作具有所形成之氣孔10朝隨機方向連通之部分(參照第4A圖)、及以具有異向性之方式配向而連通之部分(參照第4B圖)的多孔質陶瓷11(參照第3圖)。 Further, the average aspect ratio of the pores 10 of the porous ceramics 11 (Examples 8 and 9) is more than 1.4 and 2.0 or less, and the porous ceramic 11 has such a viscosity η and an average particle diameter d. The viscosity of the suspension 4 is obtained by modulating the relationship of 950 × d - 0.77 ≦ η < 1630 × d - 0.77 . Further, from the viewpoint of image analysis, it is apparent from the viewpoint of image analysis that, according to Examples 8 and 9, a portion having the formed pores 10 communicating in a random direction (see FIG. 4A) is produced, and anisotropy is obtained. In the manner of the porous ceramics 11 (see Fig. 4B) in which the portions are aligned and connected (see Fig. 4B).
此外,如上述所示以符合關係式950×d-0.77≦η<1630×d-0.77之方式調製懸浮體4之黏性所得之多孔質陶瓷11(實施例8、9)的氣孔10之平均高寬比,係考慮依測定部位之氣孔10的配向性之變異,以下列方式算出。亦即,將所得之多孔質陶瓷11予以分割成5個,在各個部位以與第3圖所示之局部縱剖面圖同樣之方式拍攝SEM照片。接著,針對所得之各SEM照片進行圖像解析,且算出由各圖像任意地選擇之10個、合計50個之氣孔10的高寬比,將該平均值設為「氣孔10之平均高寬比」。 Further, as shown above, the average of the pores 10 of the porous ceramics 11 (Examples 8 and 9) obtained by modulating the viscosity of the suspension 4 in a manner corresponding to the relationship of 950 × d - 0.77 ≦ η < 1630 × d - 0.77 The aspect ratio is calculated in the following manner in consideration of the variation in the alignment of the pores 10 at the measurement site. In other words, the obtained porous ceramics 11 were divided into five, and SEM photographs were taken at the respective portions in the same manner as the partial longitudinal cross-sectional views shown in Fig. 3 . Next, image analysis was performed on each of the obtained SEM photographs, and the aspect ratio of ten or a total of 50 pores 10 arbitrarily selected from the respective images was calculated, and the average value was defined as "the average height and width of the pores 10". ratio".
另一方面,如比較例1至3製作之多孔質陶瓷11的氣孔10之平均高寬比係超過2.0,與由實施例1 至9所製作之多孔質陶瓷11相比較,得知氣孔10係以具有異向性之方式形成。而且,該多孔質陶瓷11之製作,係從圖像解析之觀點來看亦明顯(參照第8圖) On the other hand, the average aspect ratio of the pores 10 of the porous ceramics 11 produced in Comparative Examples 1 to 3 was more than 2.0, and was carried out by Example 1. As compared with the porous ceramic 11 produced in the ninth aspect, it was found that the pores 10 were formed to have an anisotropy. Moreover, the production of the porous ceramic 11 is also apparent from the viewpoint of image analysis (refer to Fig. 8).
再者,如表1所示,具有氣孔10朝隨機方向形成之部分的多孔質陶瓷11,與以氣孔10遍及整體具有異向性之方式形成之多孔質陶瓷11相比較,前者之耐熱衝撃性及平均彎曲強度皆高。亦即,依據實施形態之多孔質陶瓷11的製造方法,可製作耐熱衝撃性及彎曲強度佳之多孔質陶瓷11。 Further, as shown in Table 1, the porous ceramics 11 having the pores 10 formed in the random direction are more resistant to heat than the porous ceramics 11 formed by the pores 10 having anisotropy throughout. And the average bending strength is high. In other words, according to the method for producing the porous ceramic 11 of the embodiment, the porous ceramic 11 having excellent heat resistance and bending strength can be produced.
接著,實施例1至比較例3中,關於在實施例1、實施例3及比較例1中使用在懸浮體4之調製時的增黏劑之有無及所製作之多孔質陶瓷11的氣孔徑之變異,作為代表例總括地顯示在表2。 Next, in Example 1 to Comparative Example 3, the presence or absence of the tackifier used in the preparation of the suspension 4 in Example 1, Example 3, and Comparative Example 1 and the pore diameter of the porous ceramic 11 produced were described. The variation is shown in Table 2 as a representative example.
如表2所示,適用添加有增黏劑之懸浮體4所製作之多孔質陶瓷11,皆形成有氣孔徑之變異為10%以下、氣孔徑之變異較少之氣孔10。其理由可能為藉由增黏劑之添加而抑制冰5之成長,且使冰5之成長速度均質化 之故。 As shown in Table 2, the porous ceramic 11 produced by using the suspension 4 to which the tackifier is added has pores 10 having a pore diameter variation of 10% or less and a small variation in pore diameter. The reason may be that the growth of the ice 5 is suppressed by the addition of the tackifier, and the growth rate of the ice 5 is homogenized. The reason.
更進一步之效果及變形例係可由相關業者容易地導出。因此,本發明之更廣範圍之態樣並非限定於如以上所揭露敘述之特定詳細及代表性之實施形態。因此,在未脫離由附加之申請專利範圍及其等效物所定義之總括性發明概念之精神或範圍的情況下,可進行各種之變更。 Further effects and modifications can be easily derived by the relevant industry. Therefore, the invention in its broader aspects is not limited to the specific details and Accordingly, various modifications may be made without departing from the spirit and scope of the inventions.
1‧‧‧陶瓷粒子 1‧‧‧ceramic particles
2‧‧‧水溶性高分子 2‧‧‧Water soluble polymer
3‧‧‧水 3‧‧‧ water
4‧‧‧懸浮體 4‧‧‧suspension
5‧‧‧冰 5‧‧‧ ice
6‧‧‧凍結體 6‧‧‧Freezing body
7‧‧‧下表面 7‧‧‧ lower surface
8‧‧‧上表面 8‧‧‧ upper surface
9‧‧‧陶瓷骨架 9‧‧‧Ceramic skeleton
10‧‧‧氣孔 10‧‧‧ stomata
11‧‧‧多孔質陶瓷 11‧‧‧Porous ceramics
12‧‧‧冷卻裝置 12‧‧‧Cooling device
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