TW201522978A - High-frequency probe module - Google Patents

High-frequency probe module Download PDF

Info

Publication number
TW201522978A
TW201522978A TW102146085A TW102146085A TW201522978A TW 201522978 A TW201522978 A TW 201522978A TW 102146085 A TW102146085 A TW 102146085A TW 102146085 A TW102146085 A TW 102146085A TW 201522978 A TW201522978 A TW 201522978A
Authority
TW
Taiwan
Prior art keywords
abutting surface
probe module
signal
probes
high frequency
Prior art date
Application number
TW102146085A
Other languages
Chinese (zh)
Other versions
TWI515438B (en
Inventor
Wei-Cheng Ku
Hao Wei
Yang-Hung Cheng
Chih-Hao Ho
Original Assignee
Mpi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mpi Corp filed Critical Mpi Corp
Priority to TW102146085A priority Critical patent/TWI515438B/en
Publication of TW201522978A publication Critical patent/TW201522978A/en
Application granted granted Critical
Publication of TWI515438B publication Critical patent/TWI515438B/en

Links

Abstract

A high-frequency probe module includes an electric signal conduction member, at least two probes, and a signal adapter, wherein the electric signal conduction member comprises a signal line, an insulating layer sheathing the signal line, and a ground layer sheathing the insulating layer; the electric signal conduction member has a first engaging face and a second engaging face. An included angle is formed between the first engaging face and the second engaging face or the extended surface thereof. The probes are welded on the first engaging face, and engage the second engaging face simultaneously in which one probe is connected to the signal line while another probe is connected to the ground layer. The signal adapter has a signal conduction portion and a ground conduction portion. The signal conduction portion is connected to the signal line while the ground conduction portion is connected to the ground layer.

Description

高頻探針模組 High frequency probe module

本發明係與探針有關;特別是指一種高頻探針模組。 The invention relates to a probe; in particular to a high frequency probe module.

按,用以檢測電子產品之各精密電子元件間的電性連接是否確實的方法,是以一探針模組作為一檢測裝置與待測電子裝置之間的測試訊號與電源訊號之傳輸介面。 According to the method for detecting whether the electrical connection between the precision electronic components of the electronic product is true, a probe module is used as a transmission interface between the test signal and the power signal between the detecting device and the electronic device to be tested.

然而,習用探針模組於高頻測試時,其所附帶之微量電感常因高頻訊號而導致其電抗大幅度提升,進而造成線路損耗提升,使得高頻的測試訊號無法順利通過,進而導致訊號不易被檢測裝置所辨識,而容易有測試誤判的情形產生。 However, when the conventional probe module is used for high-frequency testing, the micro-inductance attached to it often causes a large increase in reactance due to high-frequency signals, which in turn causes an increase in line loss, so that the high-frequency test signal cannot pass smoothly, which leads to The signal is not easily recognized by the detecting device, and it is easy to have a test misjudgment.

是以,如何有效地減少高頻訊號傳輸時之訊號損耗以達準確高頻檢測之效,實為現今業者苦思改良之方向。 Therefore, how to effectively reduce the signal loss during high-frequency signal transmission to achieve accurate high-frequency detection is actually the direction of the current industry.

有鑑於此,本發明之目的用於提供一種高頻探針模組,可有效地減少高頻訊號傳輸時之訊號損耗。 In view of this, the object of the present invention is to provide a high frequency probe module, which can effectively reduce signal loss during high frequency signal transmission.

緣以達成上述目的,本發明所提供高頻探針模組用以於一檢測裝置以及一待測物之間傳遞電訊號,且包括一電訊號傳導件、至少二探針以及一訊號接頭。其中,該電訊號傳導件包含有一以導體製成之訊號線、一包覆該訊號線且以絕緣材料製成之絕緣層、以及一包覆該絕緣層且以導體 製成之接地層;另外,該電訊號傳導件具有一第一端以及位於相反側之第二端,且該電訊號傳導件於該第一端處具有一第一接抵面以及一第二接抵面,而該第一接抵面與該第二接抵面或其延伸面之間形成有一夾角。該二探針以導體製成,且用以與該待測物接抵;該等探針係焊設於該第一接抵面上,並同時與該第二接抵面抵接,且其中一探針與該訊號線電性連接,而另外一探針則與該接地層電性連接。該訊號接頭連接於該電訊號傳導件之第二端,用以供與該檢測裝置電性連接;另外,該訊號接頭具有一訊號傳導部以及一接地傳導部,該訊號傳導部與該訊號線電性連接,而該接地傳導部則與該接地層電性連接。 To achieve the above objective, the high-frequency probe module of the present invention is configured to transmit an electrical signal between a detecting device and a test object, and includes an electrical signal conducting member, at least two probes, and a signal connector. The electrical signal conducting member comprises a signal line made of a conductor, an insulating layer covering the signal line and made of an insulating material, and a conductor covered with the insulating layer. The grounding layer is formed; in addition, the electrical signal conducting member has a first end and a second end on the opposite side, and the electrical signal conducting member has a first contact surface and a second at the first end The contact surface is formed, and an angle is formed between the first contact surface and the second contact surface or the extended surface thereof. The two probes are made of a conductor and are connected to the object to be tested; the probes are soldered on the first contact surface and simultaneously abut the second contact surface, and wherein One probe is electrically connected to the signal line, and the other probe is electrically connected to the ground layer. The signal connector is connected to the second end of the electrical signal conducting member for electrically connecting to the detecting device; and the signal connector has a signal conducting portion and a grounding conducting portion, the signal conducting portion and the signal line The grounding conductive portion is electrically connected to the grounding layer.

藉此,透過上述之設計,該高頻探針模組於高頻訊號傳輸時,可有效地減少高頻訊號造成之訊號損耗,而使得高頻檢測能更加地準確。 Therefore, through the above design, the high-frequency probe module can effectively reduce the signal loss caused by the high-frequency signal during high-frequency signal transmission, so that the high-frequency detection can be more accurate.

10‧‧‧殼體 10‧‧‧shell

12‧‧‧上殼 12‧‧‧Upper shell

14‧‧‧下殼 14‧‧‧ lower case

16‧‧‧容置空間 16‧‧‧ accommodating space

161‧‧‧第一開口 161‧‧‧ first opening

162‧‧‧第二開口 162‧‧‧ second opening

20‧‧‧電訊號傳導件 20‧‧‧Telecom transmission parts

21‧‧‧訊號線 21‧‧‧ Signal Line

22‧‧‧絕緣層 22‧‧‧Insulation

23‧‧‧接地層 23‧‧‧ Grounding layer

24‧‧‧外皮層 24‧‧‧ outer skin

25‧‧‧第一端 25‧‧‧ first end

251‧‧‧第一切削面 251‧‧‧First cutting surface

252‧‧‧第二切削面 252‧‧‧Second cutting surface

253‧‧‧第一接抵面 253‧‧‧ first contact

254‧‧‧第二接抵面 254‧‧‧second contact

26‧‧‧第二端 26‧‧‧ second end

31~33‧‧‧探針 31~33‧‧‧ probe

40‧‧‧固定件 40‧‧‧Fixed parts

50‧‧‧訊號接頭 50‧‧‧Signal connector

51‧‧‧訊號傳導部 51‧‧‧ Signal Transmitter

52‧‧‧接地傳導部 52‧‧‧ Grounding Conduction

53‧‧‧絕緣墊圈 53‧‧‧Insulated gasket

60‧‧‧定位件 60‧‧‧ positioning parts

70‧‧‧電訊號傳導件 70‧‧‧Telecom transmission parts

75‧‧‧第一端 75‧‧‧ first end

751‧‧‧第一接抵面 751‧‧‧ first contact

752‧‧‧第二接抵面 752‧‧‧second contact

753‧‧‧第三接抵面 753‧‧‧ Third contact

80‧‧‧電訊號傳導件 80‧‧‧Telecom transmission parts

851‧‧‧第一接抵面 851‧‧‧ first contact

853‧‧‧第三接抵面 853‧‧‧ Third contact

854‧‧‧第四接抵面 854‧‧‧4th meet

855‧‧‧第五接抵面 855‧‧‧5th contact

100‧‧‧同軸電纜 100‧‧‧ coaxial cable

圖1為較佳實施例之探針模組的立體圖;圖2為較佳實施例之探針模組另一視角的立體圖;圖3為較佳實施例之探針模組的分解圖;圖4揭示電訊號傳導件、探針與固定件的連接關係;圖5揭示電訊號傳導件、探針與訊號接頭的連接關係;圖6揭示定位件包覆於電訊號傳導件上;圖7為較佳實施例之探針模組傳輸訊號時之波型圖;圖8為另一較佳實施例之電訊號傳導件的側視圖;圖9為再一較佳實施例之電訊號傳導件的立體圖。 1 is a perspective view of a probe module of a preferred embodiment; FIG. 2 is a perspective view of a probe module of a preferred embodiment; FIG. 3 is an exploded view of the probe module of the preferred embodiment; 4 reveals the connection relationship between the signal conducting member, the probe and the fixing member; FIG. 5 discloses the connection relationship between the electrical signal conducting member, the probe and the signal connector; FIG. 6 discloses that the positioning member is coated on the electrical signal conducting member; FIG. 8 is a side view of a telecommunication portion of another preferred embodiment; FIG. 9 is a perspective view of another embodiment of the telecommunication device. Stereo picture.

為能更清楚地說明本發明,茲舉較佳實施例並配合圖示詳細說明如後。請參圖1至圖4所示,本發明一較佳實施例之高頻探針模組用以於一檢測裝置(圖未示)以及一待測物(圖未示)之間傳遞檢測所需之電訊號,且該高頻探針模組包括一殼體10、一電訊號傳導件20、三探針31~33、一固定件40、一訊號接頭50以及一定位件60。其中:該殼體10係以質地堅硬之金屬材料製成,且具有可對合之一上殼12與一下殼14,而該上殼12與下殼14結合後,其內部形成有一容置空間16,且於相反兩側上形成有與該容置空間16連通且之一第一開口161以及一第二開口162。 In order that the present invention may be more clearly described, the preferred embodiments are illustrated in the accompanying drawings. Referring to FIG. 1 to FIG. 4, a high frequency probe module according to a preferred embodiment of the present invention is used for transmitting a detection device between a detecting device (not shown) and an object to be tested (not shown). The high frequency probe module includes a housing 10, an electrical signal conducting member 20, three probes 31-33, a fixing member 40, a signal connector 50, and a positioning member 60. Wherein: the casing 10 is made of a hard metal material, and has an upper casing 12 and a lower casing 14 that can be combined, and the upper casing 12 and the lower casing 14 are combined to form an accommodation space therein. 16 and a first opening 161 and a second opening 162 communicating with the accommodating space 16 are formed on opposite sides.

請參閱圖4,該電訊號傳導件20包含有一以導體製成之訊號線21、一包覆該訊號線21且以絕緣材料製成之絕緣層22、一包覆該絕緣層22且以導體製成之接地層23、以及一包覆該接地層23且以絕緣材料製成之外皮層24。另外,請參閱圖5,該電訊號傳導件20具有一第一端25以及位於相反側之第二端26,且該電訊號傳導件20於該第一端25處具有一第一切削面251、一第二切削面252、以及位於該第一切削面251與該第二切削面252之間的一第一接抵面253及一第二接抵面254,該第一接抵面253與該第一切削面251連接,且該第二接抵面254則於該第二切削面連接252,而該第一接抵面253與該第二接抵面254連接並形成有一夾角。於本實施例中,該第一接抵面253與該第二接抵面254垂直,且該第一切削面251與該第二切削面252間之距離由該第一端25處往該第二端26處漸擴,且透過上述該等切削面251、252之設計,可有效地降低該等接抵面 253、254之加工難度,進而提升加工之效率與速度。 Referring to FIG. 4, the signal conducting member 20 includes a signal line 21 made of a conductor, an insulating layer 22 covering the signal line 21 and made of an insulating material, and a conductive layer 22 coated with a conductor. A ground layer 23 is formed, and an outer layer 24 is formed by covering the ground layer 23 with an insulating material. In addition, referring to FIG. 5 , the electrical signal conducting member 20 has a first end 25 and a second end 26 on the opposite side, and the electrical signal conducting member 20 has a first cutting surface 251 at the first end 25 . a second cutting surface 252, and a first abutting surface 253 and a second abutting surface 254 between the first cutting surface 251 and the second cutting surface 252, the first abutting surface 253 and The first cutting surface 251 is connected, and the second abutting surface 254 is connected to the second cutting surface 252, and the first abutting surface 253 is connected to the second abutting surface 254 and forms an angle. In this embodiment, the first contact surface 253 is perpendicular to the second contact surface 254, and the distance between the first cutting surface 251 and the second cutting surface 252 is from the first end 25 to the first The two ends 26 are gradually expanded, and through the design of the cutting faces 251 and 252, the contact faces can be effectively reduced. 253, 254 processing difficulty, and thus improve the efficiency and speed of processing.

該等探針31~33以導體製成,一端呈尖狀用以供接抵於該待測物之待側部位上,而另一端係焊設於該第一接抵面253上,並同時與該第二接抵面254抵接。其中一該探針31與該訊號線21電性連接,而另外二探針32、33則與該接地層23電性連接,且與該訊號線21電性連接之該探針31係位於與該接地層23電性連接之該二探針32、33之間,而透過上述探針配置之設計,可增加該等探針31~33對於不同規格、角度或間距之探測點的適用性。 The probes 31 to 33 are made of a conductor, and one end is pointed to be connected to the to-be-side portion of the object to be tested, and the other end is welded to the first contact surface 253, and at the same time The second contact surface 254 is in contact with the second contact surface 254. One of the probes 31 is electrically connected to the signal line 21, and the other two probes 32 and 33 are electrically connected to the ground layer 23, and the probe 31 electrically connected to the signal line 21 is located at The grounding layer 23 is electrically connected between the two probes 32 and 33, and the design of the probe arrangement can increase the applicability of the probes 31-33 to detection points of different specifications, angles or pitches.

該固定件40以絕緣膠材製成,但不以此為限,且係於絕緣膠材呈流體狀時設置於該等探針31~33與該電訊號傳導件20之連接處,並等絕緣膠材固化後而達到包覆該第一端25以及該等探針31~33與該電訊號傳導件20連接之部位,同時遮蔽該電訊號傳導件20於該第一端25處之訊號線21、絕緣層22、接地層23以外皮層24之目的,此設計除可增加固定之效果外,同時可減少電性檢測時外來訊號之干擾。 The fixing member 40 is made of an insulating rubber material, but is not limited thereto, and is disposed at a connection between the probes 31 to 33 and the electrical signal transmitting member 20 when the insulating rubber material is in a fluid state, and the like. After the insulating material is cured, the first end 25 and the portions of the probes 31 to 33 connected to the electrical signal conducting member 20 are covered, and the signal of the electrical signal transmitting member 20 at the first end 25 is shielded. The purpose of the outer layer 24 of the wire 21, the insulating layer 22, and the ground layer 23 is that the design can increase the effect of the fixing, and at the same time, the interference of the external signal during the electrical detection can be reduced.

該訊號接頭50連接於該電訊號傳導件20之第二端26,用以與該檢測裝置之一同軸電纜100連接,而達到與該檢測裝置電性連接之目的。另外,該訊號接頭50具有以導體製成之一訊號傳導部51以及一接地傳導部52,該訊號傳導部51與該訊號線21電性連接,而該接地傳導部52則與該接地層23電性連接。於本實施例中,該訊號傳導部51為一金屬凸柱。該接地傳導部51為一金屬套環且環繞該訊號傳導部51設置。另外,該訊號傳導部51與該接地傳導部52之間更設有一絕緣墊圈53,以隔絕兩者間之訊號相互影響,進而避免該訊號傳導部51與該接地傳導部52之間產生干擾或短路之疑慮。 The signal connector 50 is connected to the second end 26 of the electrical signal conducting member 20 for connecting to the coaxial cable 100 of the detecting device for electrical connection with the detecting device. In addition, the signal connector 50 has a signal conducting portion 51 and a ground conducting portion 52. The signal conducting portion 51 is electrically connected to the signal line 21, and the ground conducting portion 52 is connected to the ground layer 23. Electrical connection. In this embodiment, the signal conducting portion 51 is a metal stud. The ground conducting portion 51 is a metal collar and is disposed around the signal conducting portion 51. In addition, an insulating gasket 53 is further disposed between the signal conducting portion 51 and the ground conducting portion 52 to isolate the signals between the two, thereby preventing interference between the signal conducting portion 51 and the ground conducting portion 52. Short-circuit doubts.

請參閱圖6,該定位件60於本實施例中,係以絕緣之橡膠材料製成,但不以此為限,而可以其它絕緣材料代替。該定位件60係包覆該電訊號傳導件20上包含該第二端26處之部分部位,進而遮蔽該訊號接頭50與該電訊號傳導件20之連接處。另外,該定位件60係結合於該容置空間16中,且其外表面與該上、下殼12、14之內表面接抵,而可達到穩固設置之目的。再者,該定位件60與該殼體10結合後,由圖1與圖2可看出,被該定位件60所包覆之電訊號傳導件20的部位將位於該容置空間16中,而其他未被包覆之一端與該等探針31~33則自該第一開口161伸出而位於該殼體10外,且該訊號接頭50則自該第二開口162伸出而位於該殼體10外,而可方便該等探針31~33與該待測物接抵,並可方便該訊號接頭50與該同軸線100結合。 Referring to FIG. 6, in the embodiment, the positioning member 60 is made of an insulating rubber material, but not limited thereto, and may be replaced by other insulating materials. The positioning member 60 covers a portion of the electrical signal conducting member 20 including the second end 26, thereby shielding the connection between the signal connector 50 and the electrical signal conducting member 20. In addition, the positioning member 60 is coupled to the accommodating space 16, and the outer surface thereof is in contact with the inner surfaces of the upper and lower shells 12, 14 to achieve a stable setting. Moreover, after the positioning member 60 is coupled to the housing 10, it can be seen from FIG. 1 and FIG. 2 that the portion of the electrical signal conducting member 20 covered by the positioning member 60 will be located in the accommodating space 16. The other uncovered ones and the probes 31-33 extend from the first opening 161 and are located outside the housing 10, and the signal connector 50 extends from the second opening 162. Outside the casing 10, the probes 31-33 can be easily connected to the object to be tested, and the signal connector 50 can be easily combined with the coaxial cable 100.

藉此,由圖7之波形可看出,該高頻探針模組在傳導110GHz之高頻訊號時,其反射損耗S11僅為-11dB左右,而可知悉透過上述利用該電訊號傳導件進行內部訊號傳導之設計,可有效地減少高頻訊號造成之訊號損耗,而使得高頻檢測能更加地準確。 Therefore, it can be seen from the waveform of FIG. 7 that the high-frequency probe module has a reflection loss S11 of only about -11 dB when transmitting a high-frequency signal of 110 GHz, and it can be known that the electrical signal transmission member is used for the above-mentioned operation. The internal signal transmission design can effectively reduce the signal loss caused by high-frequency signals, making the high-frequency detection more accurate.

另外,本發明之電訊號傳導件除上述結構外,亦可如圖8所示之電訊號傳導件70般,其第一端75處除具有第一接抵面751與該第二接抵面752外,更設計有一平行且朝向於該第一接抵面751之第三接抵面753,且組裝時,該第三接抵面753與該等探針31~33接抵,進而利用三面式設計達到穩固固定之效果。當然,除圖8之結構外,亦可如圖9所示之電訊號傳導件80具有平行且相對的第四接抵面854與第五接抵面855,且該第四接抵面854與該第五接抵面855同時垂直於該第一接抵面851與該第三接抵面853,且組裝時,該第四接抵面854與該第五接抵面855分別與最外側之該二探針32、33(圖未示)接抵,如此一來,便可透過五面式之設 計大幅地提升探針組裝時的穩定度。 In addition, in addition to the above structure, the electrical signal conducting member of the present invention may be similar to the electrical signal conducting member 70 shown in FIG. 8 except that the first end 75 has a first abutting surface 751 and the second abutting surface. In addition to the 752, a third abutting surface 753 parallel to the first abutting surface 751 is further disposed, and when assembled, the third abutting surface 753 is coupled to the probes 31-33, thereby utilizing three sides. The design achieves a firm and fixed effect. Of course, in addition to the structure of FIG. 8, the electrical signal conducting member 80 shown in FIG. 9 may have parallel and opposite fourth abutting faces 854 and fifth abutting faces 855, and the fourth abutting faces 854 and The fifth abutting surface 855 is perpendicular to the first abutting surface 851 and the third abutting surface 853, and the fourth abutting surface 854 and the fifth abutting surface 855 are respectively the outermost side when assembled. The two probes 32, 33 (not shown) are connected, so that the five-sided design can be adopted. It greatly improves the stability of the probe assembly.

以上所述僅為本發明較佳可行實施例而已,舉凡應用本發明說明書及申請專利範圍所為之等效變化,理應包含在本發明之專利範圍內。 The above is only a preferred embodiment of the present invention, and equivalent changes to the scope of the present invention and the scope of the patent application are intended to be included in the scope of the present invention.

10‧‧‧殼體 10‧‧‧shell

12‧‧‧上殼 12‧‧‧Upper shell

14‧‧‧下殼 14‧‧‧ lower case

16‧‧‧容置空間 16‧‧‧ accommodating space

20‧‧‧電訊號傳導件 20‧‧‧Telecom transmission parts

31~33‧‧‧探針 31~33‧‧‧ probe

40‧‧‧固定件 40‧‧‧Fixed parts

50‧‧‧訊號接頭 50‧‧‧Signal connector

60‧‧‧定位件 60‧‧‧ positioning parts

Claims (13)

一種高頻探針模組,用以於一檢測裝置以及一待測物之間傳遞電訊號,且包括:一電訊號傳導件,包含有一以導體製成之訊號線、一包覆該訊號線且以絕緣材料製成之絕緣層、以及一包覆該絕緣層且以導體製成之接地層;另外,該電訊號傳導件具有一第一端以及位於相反側之第二端,且該電訊號傳導件於該第一端處具有一第一接抵面以及一第二接抵面,而該第一接抵面與該第二接抵面或其延伸面之間形成有一夾角;至少二探針,以導體製成,且用以與該待測物接抵;該等探針係焊設於該第一接抵面上,並同時與該第二接抵面抵接,且其中一探針與該訊號線電性連接,而另外一探針則與該接地層電性連接;以及一訊號接頭,連接於該電訊號傳導件之第二端,用以供與該檢測裝置電性連接;另外,該訊號接頭具有一訊號傳導部以及一接地傳導部,該訊號傳導部與該訊號線電性連接,而該接地傳導部則與該接地層電性連接。 A high frequency probe module for transmitting electrical signals between a detecting device and a test object, and comprising: an electrical signal conducting member, comprising a signal line made of a conductor, and a signal line covered by the signal And an insulating layer made of an insulating material, and a grounding layer covering the insulating layer and made of a conductor; in addition, the electrical signal conducting member has a first end and a second end on the opposite side, and the telecommunications The first conductive end has a first abutting surface and a second abutting surface, and the first abutting surface and the second abutting surface or an extended surface thereof form an angle; at least two The probe is made of a conductor and is for contacting the object to be tested; the probe is soldered on the first contact surface and simultaneously abuts the second contact surface, and one of the probes The probe is electrically connected to the signal line, and the other probe is electrically connected to the ground layer; and a signal connector is connected to the second end of the electrical signal conducting member for electrical connection with the detecting device Connecting; in addition, the signal connector has a signal conducting portion and a ground conducting portion, the signal The conductive portion is electrically connected to the signal line, and the ground conducting portion is connected electrically to the ground layer. 如請求項1所述高頻探針模組,更包含有一固定件,以絕緣材料製成,且包覆該第一端以及該等探針之部分部位,而遮蔽該電訊號傳導件於該第一端處之訊號線、絕緣層以及接地層。 The high frequency probe module of claim 1, further comprising a fixing member made of an insulating material and covering the first end and a part of the probes to shield the electrical signal transmitting member The signal line, the insulating layer and the ground plane at the first end. 如請求項1所述高頻探針模組,其中該電訊號傳導件於該第一端處更具有一第一切削面以及一第二切削面,且該第 一切削面與該第二切削面間之距離由該第一端處往該第二端處漸擴;另外,該第一接抵面以及該第二接抵面位於該第一切削面以及該第二切削面之間,且該第一接抵面與該第一切削面連接,而該第二接抵面則於該第二切削面連接。 The high frequency probe module of claim 1, wherein the electrical signal conducting member further has a first cutting surface and a second cutting surface at the first end, and the a distance between a cutting surface and the second cutting surface is gradually expanded from the first end to the second end; in addition, the first abutting surface and the second abutting surface are located on the first cutting surface and the Between the second cutting faces, the first abutting surface is connected to the first cutting surface, and the second abutting surface is connected to the second cutting surface. 如請求項3所述高頻探針模組,其中該第一接抵面與該第二接抵面連接,且該第一接抵面實質上垂直該第二接抵面。 The high frequency probe module of claim 3, wherein the first abutting surface is connected to the second abutting surface, and the first abutting surface is substantially perpendicular to the second abutting surface. 如請求項1所述高頻探針模組,更包含有一殼體,且該殼體具有一容置空間、以及與該容置空間連通且位於相反兩側之一第一開口以及一第二開口;該電訊號傳導件部分部位位於該容置空間中,且其他部位則自該第一開口伸出而位於該殼體外;該訊號接頭則自該第二開口伸出而位於該殼體外。 The high-frequency probe module of claim 1, further comprising a housing, wherein the housing has an accommodating space, and a first opening and a second on the opposite sides communicating with the accommodating space An opening portion of the electrical signal conducting portion is located in the accommodating space, and the other portion protrudes from the first opening and is located outside the housing; the signal connector extends from the second opening and is located outside the housing. 如請求項5所述高頻探針模組,更包含一定位件,係以絕緣材料製成,且位於該容置空間中,並包覆位於該容置空間之電訊號傳導件。 The high-frequency probe module of claim 5, further comprising a positioning member, which is made of an insulating material and located in the accommodating space and covering the electrical signal conducting member located in the accommodating space. 如請求項6所述高頻探針模組,其中該定位件之外表面與該殼體之內表面接抵。 The high frequency probe module of claim 6, wherein the outer surface of the positioning member is in contact with the inner surface of the housing. 如請求項1所述高頻探針模組,其中該電訊號傳導件更包含有一外皮層,係以絕緣材料製成,且包覆該接地層。 The high frequency probe module of claim 1, wherein the electrical signal conducting member further comprises an outer skin layer made of an insulating material and covering the ground layer. 如請求項1所述高頻探針模組,其中該至少二探針為三探針,其中一探針與該訊號線電性連接,而另外二探針則與該接地層電性連接,且與該號線電性連接之該探針,係位於與該接地層電性連接之該二探針之間。 The high frequency probe module of claim 1, wherein the at least two probes are three probes, wherein one probe is electrically connected to the signal line, and the other two probes are electrically connected to the ground layer. And the probe electrically connected to the line is located between the two probes electrically connected to the ground layer. 如請求項1所述高頻探針模組,其中該電訊號傳導件於該第一端處更具有一第三接抵面,且該第三接抵面朝向該第一接抵面,且與該至少二探針接抵。 The high frequency probe module of claim 1, wherein the electrical signal conducting member further has a third abutting surface at the first end, and the third abutting surface faces the first abutting surface, and And contacting at least two probes. 如請求項10所述高頻探針模組,其中該第三接抵面平行於該第一接抵面。 The high frequency probe module of claim 10, wherein the third contact surface is parallel to the first contact surface. 如請求項10所述高頻探針模組,其中該電訊號傳導件於該第一端處更具有呈相對設置的一第四接抵面及一第五接抵面,且該第四接抵面與該第五接抵面分別與該二探針接抵。 The high frequency probe module of claim 10, wherein the electrical signal conducting member further has a fourth abutting surface and a fifth abutting surface disposed opposite each other at the first end, and the fourth connection The abutting surface and the fifth abutting surface are respectively in contact with the two probes. 如請求項12所述高頻探針模組,其中第四接抵面與該第五接抵面平行,且同時垂直於該第一接抵面與該第三接抵面。 The high frequency probe module of claim 12, wherein the fourth abutting surface is parallel to the fifth abutting surface and perpendicular to the first abutting surface and the third abutting surface.
TW102146085A 2013-12-13 2013-12-13 High frequency probe module TWI515438B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102146085A TWI515438B (en) 2013-12-13 2013-12-13 High frequency probe module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102146085A TWI515438B (en) 2013-12-13 2013-12-13 High frequency probe module

Publications (2)

Publication Number Publication Date
TW201522978A true TW201522978A (en) 2015-06-16
TWI515438B TWI515438B (en) 2016-01-01

Family

ID=53935554

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102146085A TWI515438B (en) 2013-12-13 2013-12-13 High frequency probe module

Country Status (1)

Country Link
TW (1) TWI515438B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI739592B (en) * 2020-09-09 2021-09-11 旺矽科技股份有限公司 Probe assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI739592B (en) * 2020-09-09 2021-09-11 旺矽科技股份有限公司 Probe assembly
CN114236198A (en) * 2020-09-09 2022-03-25 旺矽科技股份有限公司 Probe assembly
CN114236198B (en) * 2020-09-09 2024-04-02 旺矽科技股份有限公司 Probe assembly

Also Published As

Publication number Publication date
TWI515438B (en) 2016-01-01

Similar Documents

Publication Publication Date Title
TWI597501B (en) Probe
TWI564568B (en) Use a coaxial pin with a cantilever probe card
TW201504631A (en) High frequency probe card for probing photoelectric device
TWI495880B (en) Probe module
TWI522623B (en) Probe module (1)
TWI447397B (en) Probe card
TWI506280B (en) Probe module (2)
TWI700500B (en) Test device
TWI515438B (en) High frequency probe module
JP6348829B2 (en) Cable assembly and method for manufacturing cable assembly
JP4707038B2 (en) Specimen structure of coaxial cable
TWI537566B (en) Probe module
JP2016110916A5 (en)
TWI651028B (en) Pad structure for RF testing
TWI741531B (en) Test device
JP2012052992A (en) Adaptor for cable inspection
US20110043192A1 (en) Coaxial-cable probe structure
TW201522974A (en) Detection fixture
CN112885527B (en) Serial advanced technology installation cable
KR20130085137A (en) Filter member for shielding electromagnetic waves
TW201712347A (en) Probe card having bypass circuit arranges the bypass circuit in a simple way without damaging the structure and causing no signal interference
KR101734315B1 (en) Connecting cable for diagnosing underground cable
KR100921223B1 (en) Electric line Connecting Apparatus
JP6004488B2 (en) Wireless communication device, wireless communication device inspection method, and wireless communication device manufacturing method
TW201702609A (en) Probe module which comprises a conductive member, two connection members, two extendible/retractable probes, and a signal connector

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees