TW201512116A - Chemically strengthened glass and method for producing chemically strengthened glass - Google Patents

Chemically strengthened glass and method for producing chemically strengthened glass Download PDF

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TW201512116A
TW201512116A TW103124840A TW103124840A TW201512116A TW 201512116 A TW201512116 A TW 201512116A TW 103124840 A TW103124840 A TW 103124840A TW 103124840 A TW103124840 A TW 103124840A TW 201512116 A TW201512116 A TW 201512116A
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glass
chemically strengthened
molten salt
layer
density
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TW103124840A
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Taku Yamada
Toshifumi Nihei
Yoichi Sera
Yuichi Suzuki
Daisuke Kobayashi
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Asahi Glass Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/002Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075Cleaning of glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C03C3/085Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
    • C03C3/087Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The present invention is chemically strengthened glass having, at the glass surface, a compression stress layer that has been subjected to ion exchange, wherein the chemically strengthened glass has a low-density layer resulting from the surface of the compression stress layer having a lowered density, the thickness of the low-density layer is 5-200 nm inclusive, and the ratio (D1/D3) of the density (D1) of the low-density layer and the density (D3) of an intermediate layer sandwiched between compressive stress layers and extending at the glass center section is at least 0.5 and less than 0.93.

Description

化學強化玻璃及化學強化玻璃之製造方法 Method for producing chemically strengthened glass and chemically strengthened glass

本發明係關於一種新穎之化學強化玻璃及該化學強化玻璃之製造方法。 The present invention relates to a novel chemically strengthened glass and a method of producing the same.

數位相機、行動電話及PDA(Personal Digital Assistants,個人數位助理)等顯示裝置等之覆蓋玻璃及顯示器之玻璃基板係使用藉由離子交換等進行化學強化處理而得之玻璃(以下有時簡稱為「化學強化玻璃」)。玻璃雖然理論強度較高,但因損傷導致強度大幅降低。化學強化玻璃與未強化之玻璃相比機械強度較高,防止玻璃表面受到損傷,故而適合於該等用途。 A glass substrate that covers a glass or a display such as a digital camera, a mobile phone, or a PDA (Personal Digital Assistants) is a glass obtained by chemical strengthening treatment by ion exchange or the like (hereinafter sometimes referred to as " Chemically strengthened glass"). Although the theoretical strength of the glass is high, the strength is greatly reduced due to the damage. Chemically strengthened glass has higher mechanical strength than unreinforced glass and prevents damage to the glass surface, so it is suitable for such applications.

又,近年來作為太陽電池用覆蓋玻璃所採用之例亦有所增加。藉由利用化學強化玻璃代替現有覆蓋玻璃,而即便進行薄型化亦可達成同等程度之機械強度。藉由玻璃之輕量化,而具有設置於先前因重量限制而無法設置之部位、或減小施工之負荷之優點。 Moreover, in recent years, the example used as the cover glass for solar cells has also increased. By replacing the existing cover glass with chemically strengthened glass, the same degree of mechanical strength can be achieved even if the thickness is reduced. By the weight reduction of the glass, there is an advantage that it is provided in a portion that was previously impossible to be set due to weight limitation, or that the load on the construction is reduced.

利用離子交換進行之化學強化處理係藉由將玻璃中含有之離子半徑較小之金屬離子(例如Na離子)與離子半徑更大之金屬離子(例如K離子)置換,而於玻璃表面產生壓縮應力層,從而提高玻璃之強度之處理。 Chemical strengthening treatment by ion exchange generates compressive stress on the glass surface by replacing metal ions (such as Na ions) having a small ionic radius in the glass with metal ions (such as K ions) having a larger ionic radius. The layer, which increases the strength of the glass.

又,於各種顯示器等中,多要求抗反射功能,於經利用離子交換進行之化學處理而強化之強化玻璃中,亦存在要求抗反射功能之情形。通常於化學強化玻璃中,於形成抗反射膜後,無法使K離子擴散 至玻璃內部,故而難以進行強化處理。因此,必須於強化處理後形成抗反射膜。 Further, in various displays and the like, an anti-reflection function is often required, and in the tempered glass reinforced by chemical treatment by ion exchange, an anti-reflection function is also required. Usually in chemically strengthened glass, after the antireflection film is formed, K ions cannot be diffused. It is difficult to carry out the strengthening treatment to the inside of the glass. Therefore, it is necessary to form an anti-reflection film after the strengthening treatment.

為了對所得之化學強化玻璃賦予低反射性,而於玻璃表面以多層膜、或單層膜之形式形成抗反射膜。作為於基材表面被覆多層膜之抗反射膜之方法,已知有於基材上依序積層具有相對高折射率之膜與相對低折射率之膜之方法,或利用上述積層方法交替積層多層之具有相對高折射率與相對低折射率之膜而獲得多層膜之技術(專利文獻1)。 In order to impart low reflectivity to the obtained chemically strengthened glass, an antireflection film is formed as a multilayer film or a single layer film on the surface of the glass. As a method of coating an antireflection film of a multilayer film on a surface of a substrate, a method of sequentially laminating a film having a relatively high refractive index and a film having a relatively low refractive index on a substrate, or alternately laminating a plurality of layers by the above lamination method is known. A technique of obtaining a multilayer film with a film having a relatively high refractive index and a relatively low refractive index (Patent Document 1).

作為形成抗反射膜之方法,塗佈含有細粒子之塗佈液並藉由加熱處理而形成凝膠化之抗反射膜的溶膠-凝膠法因生產成本較低,生產亦較高,故而目前正成為主流。作為藉由此種溶膠-凝膠法所形成之抗反射膜,例如已知有包含矽化合物之水解縮合物、金屬螯合化合物及低折射矽溶膠者(專利文獻2)。 As a method of forming an antireflection film, a sol-gel method of coating a coating liquid containing fine particles and forming a gelled antireflection film by heat treatment is low in production cost and high in production, so currently Is becoming the mainstream. As the antireflection film formed by such a sol-gel method, for example, a hydrolysis condensate containing a ruthenium compound, a metal chelate compound, and a low refractive ruthenium sol are known (Patent Document 2).

另一方面,近年來公開有如下抗反射性強化玻璃之製造方法,即藉由使抗反射膜最佳化,於形成抗反射膜後進行化學強化處理,使K離子擴散至玻璃內部,從而進行玻璃之強化(專利文獻3)。 On the other hand, in recent years, there has been disclosed a method for producing an antireflection-strengthened glass in which an antireflection film is optimized, a chemical strengthening treatment is performed after forming an antireflection film, and K ions are diffused into the inside of the glass. Strengthening of glass (Patent Document 3).

又,藉由使表面具有特異性紋理結構,亦可賦予低反射性(專利文獻4)。 Further, by having a specific texture structure on the surface, it is possible to impart low reflectivity (Patent Document 4).

再者,玻璃為低反射性意指透過率較高,藉由使玻璃表面低密度化即低折射率化,可提高透過率。 Further, the low reflectivity of the glass means that the transmittance is high, and the transmittance is improved by lowering the density of the glass surface, that is, lowering the refractive index.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開平4-357134號公報 [Patent Document 1] Japanese Patent Laid-Open No. 4-357134

[專利文獻2]日本專利特開2002-221602號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-221602

[專利文獻3]日本專利特開2011-88765號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2011-88765

[專利文獻4]日本專利特開2013-40091號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2013-40091

然而,於對化學強化玻璃賦予低反射性之先前技術中,於如專利文獻1般使抗反射膜包含2層以上之多層膜之情形時,雖然藉由光學設計可確實地發揮抗反射效果,但存在反射率之入射角依存性,另外因膜之塗佈次數需為兩次以上,故難免製造成本增高。另一方面,於使抗反射膜以單層構成之情形時,由於在暫時形成金屬氧化物膜後實施加熱處理與蝕刻處理,或者在暫時形成金屬氧化物膜後實施與氣體之化學反應處理,故而雖然為單層之抗反射膜,亦難以實現製造成本之低廉化。 However, in the prior art which imparts low reflectivity to the chemically strengthened glass, when the antireflection film contains two or more layers of the film as in Patent Document 1, the antireflection effect can be surely exhibited by the optical design. However, there is an incident angle dependency of the reflectance, and since the number of times of coating the film needs to be two or more, it is inevitable that the manufacturing cost is increased. On the other hand, when the antireflection film is formed of a single layer, the heat treatment and the etching treatment are performed after the metal oxide film is temporarily formed, or the chemical reaction treatment with the gas is performed after the metal oxide film is temporarily formed. Therefore, although it is a single-layer anti-reflection film, it is difficult to achieve a reduction in manufacturing cost.

又,於如專利文獻2中之在將玻璃化學強化前藉由溶膠-凝膠法形成抗反射膜之方法中,由於必須對實施有化學強化處理之製品逐個形成抗反射膜,因此其生產性顯著降低,喪失溶膠-凝膠法固有之高生產性之優點。 Further, in the method of forming an antireflection film by a sol-gel method before chemical strengthening of glass, as in Patent Document 2, since it is necessary to form an antireflection film one by one for a product subjected to chemical strengthening treatment, productivity is also obtained. Significantly reduced, the advantages of the high productivity inherent in the sol-gel process are lost.

另一方面,即便如專利文獻3所述般在化學強化處理前形成抗反射膜之方法,於化學強化處理步驟前亦必需至少如下3個步驟。 On the other hand, even if the method of forming an antireflection film before the chemical strengthening treatment as described in Patent Document 3, at least the following three steps must be performed before the chemical strengthening treatment step.

(1)預先由矽化合物、中空矽溶膠及金屬螯合化合物製備塗佈液之步驟。 (1) A step of preparing a coating liquid from a ruthenium compound, a hollow ruthenium sol, and a metal chelating compound in advance.

(2)將塗佈液塗佈於玻璃上之步驟。 (2) A step of applying a coating liquid onto the glass.

(3)對玻璃進行乾燥及熱處理之步驟。 (3) The steps of drying and heat treating the glass.

由於該等步驟,除需要先前之化學強化處理裝置以外,亦需要設備之新投資。 Due to these steps, in addition to the need for previous chemical strengthening treatment equipment, new investment in equipment is also required.

又,於專利文獻4中,亦需要使玻璃表面具有紋理結構等與玻璃之化學強化處理不同之加工處理,為了製造賦予了低反射性之低反射化學強化玻璃而需較高之成本。又,就製造上之特殊性而言,對化學強化玻璃之兩面進行低反射處理或進行大面積之低反射處理非常困 難。 Further, in Patent Document 4, it is necessary to have a processing process different from the chemical strengthening treatment of glass such as a textured structure on the glass surface, and it is necessary to have a high cost in order to manufacture a low-reflection chemically strengthened glass to which low reflectivity is imparted. Moreover, in terms of manufacturing particularity, it is very difficult to perform low-reflection treatment on both sides of the chemically strengthened glass or to perform large-area low-reflection treatment. difficult.

因此,本發明之目的在於藉由將化學強化玻璃之表面低密度化而形成被稱為低密度層之改質層,從而提供一種表層具有低密度層(低折射率層)之化學強化玻璃及其製造方法。 Accordingly, an object of the present invention is to provide a chemically strengthened glass having a low density layer (low refractive index layer) in a surface layer by forming a modified layer called a low density layer by densifying the surface of the chemically strengthened glass. Its manufacturing method.

本發明者等人反覆進行銳意研究,結果發現,藉由進行於化學強化處理所使用之熔鹽中添加特定之鹽而使上述熔鹽中之Na濃度保持為一定值以上以及對化學強化處理後之玻璃進行酸處理中之至少任一者,而可獲得以一片玻璃為原料且其表層已被賦予低反射性之化學強化玻璃,從而完成本發明。 As a result of intensive research, the inventors of the present invention found that by adding a specific salt to the molten salt used in the chemical strengthening treatment, the Na concentration in the molten salt is maintained at a constant value or more and after chemical strengthening treatment. The glass is subjected to at least one of acid treatment, and a chemically strengthened glass in which one sheet of glass is used as a raw material and whose surface layer has been imparted with low reflectivity can be obtained, thereby completing the present invention.

即,本發明係關於下述<1>~<7>者。 That is, the present invention relates to the following <1> to <7>.

<1>一種化學強化玻璃,其係於玻璃表面包含經離子交換之壓縮應力層者,且其包含將上述壓縮應力層之表面低密度化而成之低密度層,上述低密度層之厚度為5nm以上且200nm以下,且上述低密度層之密度(D1)與存在於玻璃中心部且夾於上述壓縮應力層中之中間層之密度(D3)的比(D1/D3)為0.5以上且未達0.93。 <1> A chemically strengthened glass comprising an ion-exchanged compressive stress layer on a surface of a glass, comprising: a low-density layer obtained by lowering a surface of the compressive stress layer, wherein the thickness of the low-density layer is 5 nm or more and 200 nm or less, and the ratio (D1/D3) of the density (D1) of the low-density layer to the density (D3) of the intermediate layer which is present in the center portion of the glass and sandwiched in the compressive stress layer is 0.5 or more and is not Up to 0.93.

<2>如上述<1>之化學強化玻璃,其中上述低密度層之H/(Na+K)莫耳比(C1)大於上述中間層之H/(Na+K)莫耳比(C3),即(C1>C3)。 <2> The chemically strengthened glass according to the above <1>, wherein the H/(Na+K) molar ratio (C1) of the low-density layer is larger than the H/(Na+K) molar ratio (C3) of the intermediate layer. , ie (C1>C3).

<3>如上述<1>或<2>之化學強化玻璃,其中上述低密度層之H/(Na+K)莫耳比(C1)為1.0以上。 <3> The chemically strengthened glass according to <1> or <2> above, wherein the low density layer has a H/(Na+K) molar ratio (C1) of 1.0 or more.

<4>如上述<1>至<3>中任一項之化學強化玻璃,其中上述玻璃為鋁矽酸鹽玻璃或鈉鈣玻璃。 The chemically strengthened glass according to any one of <1> to <3> wherein the glass is an aluminosilicate glass or a soda lime glass.

<5>一種化學強化玻璃之製造方法,其係藉由將玻璃浸漬於含有硝酸鉀之熔鹽中而將上述玻璃中之Na與上述熔鹽中之K進行離子交換者,且包括向上述熔鹽中添加選自由K2CO3、Na2CO3、KHCO3、 NaHCO3、K3PO4、Na3PO4、K2SO4、Na2SO4、KOH及NaOH所組成之群中之至少1種鹽之步驟以及於上述離子交換後洗淨玻璃之步驟,進而包括使上述熔鹽中之Na濃度成為500重量ppm以上之步驟及於上述洗淨後對玻璃進行酸處理之步驟中之至少任一步驟。 <5> A method for producing a chemically strengthened glass by ion-exchange of Na in the glass with K in the molten salt by immersing the glass in a molten salt containing potassium nitrate, and including melting to the above Adding to the salt is selected from the group consisting of K 2 CO 3 , Na 2 CO 3 , KHCO 3 , NaHCO 3 , K 3 PO 4 , Na 3 PO 4 , K 2 SO 4 , Na 2 SO 4 , KOH and NaOH. a step of at least one salt and a step of washing the glass after the ion exchange, and further comprising the step of causing the Na concentration in the molten salt to be 500 ppm by weight or more and the step of subjecting the glass to acid treatment after the washing At least either step.

<6>如上述<5>之化學強化玻璃之製造方法,其同時包括使上述熔鹽中之Na濃度成為500重量ppm以上之步驟、及於上述洗淨後對玻璃進行酸處理之步驟。 <6> The method for producing a chemically strengthened glass according to the above <5>, which comprises the steps of: setting the Na concentration in the molten salt to 500 ppm by weight or more, and subjecting the glass to acid treatment after the washing.

<7>如上述<5>或<6>之化學強化玻璃之製造方法,其中使上述熔鹽中之Na濃度成為500重量ppm以上之步驟包括向上述熔鹽中添加Na鹽之步驟。 <7> The method for producing a chemically strengthened glass according to the above <5>, wherein the step of causing the Na concentration in the molten salt to be 500 ppm by weight or more includes a step of adding a Na salt to the molten salt.

本發明之化學強化玻璃藉由包含將經離子交換之壓縮應力層之表面低密度化而成之低密度層而賦予低反射性,另外無需旨在賦予低反射性而使用其他裝置之加工處理步驟。因此,於製造低反射性之化學強化玻璃時,與先前相比,可謀求成本之降低。 The chemically strengthened glass of the present invention imparts low reflectivity by including a low-density layer in which the surface of the ion-exchanged compressive stress layer is reduced in density, and further requires no processing steps for using other means for imparting low reflectivity. . Therefore, when manufacturing a chemically strengthened glass of low reflectivity, the cost can be reduced compared with the prior art.

又,根據本發明之化學強化玻璃之製造方法,藉由以一片玻璃為原料,並於其表面形成壓縮應力層及低密度層,而可獲得低反射性之化學強化玻璃,故而可對大面積之玻璃或玻璃之兩面實施低反射處理,而非常有用。 Further, according to the method for producing a chemically strengthened glass of the present invention, a sheet of glass is used as a raw material, and a compressive stress layer and a low-density layer are formed on the surface thereof, whereby a chemically strengthened glass having low reflectivity can be obtained, so that a large area can be obtained. It is very useful to perform low reflection treatment on both sides of the glass or glass.

1‧‧‧低密度層 1‧‧‧Low density layer

2‧‧‧壓縮應力層 2‧‧‧Compressive stress layer

3‧‧‧中間層 3‧‧‧Intermediate

圖1(a)~(c)係表示本發明之化學強化玻璃之製造步驟之模式圖。 Fig. 1 (a) to (c) are schematic views showing the steps of producing the chemically strengthened glass of the present invention.

圖2係表示藉由RBS-ERDA分析而得之實施例1之距離表面500nm深度之區域之H及Si分佈的圖。 Fig. 2 is a view showing the distribution of H and Si in the region of the depth of 500 nm from the surface of Example 1 by RBS-ERDA analysis.

以下,對本發明進行詳細說明,但本發明並不限定於以下實施形態,可於不脫離本發明主旨之範圍內進行任意變化而實施。 The present invention will be described in detail below, but the present invention is not limited to the embodiments described below, and may be carried out without departing from the scope of the invention.

此處,於本說明書中,所謂“質量%”與“重量%”、“質量ppm”與“重量ppm”之含義分別相同。 Here, in the present specification, the meanings of "% by mass" and "% by weight", "ppm by mass" and "ppm by weight" are respectively the same.

又,於本說明書中,於表述為「Na濃度」時意指以Na計之濃度。 In the present specification, the expression "Na concentration" means the concentration in terms of Na.

<化學強化玻璃> <Chemical tempered glass>

本發明之化學強化玻璃係於玻璃表面具有經離子交換之壓縮應力層者,且其具有將上述壓縮應力層之表面進一步低密度化而成之低密度層。 The chemically strengthened glass of the present invention has an ion-exchanged compressive stress layer on the surface of the glass, and has a low-density layer in which the surface of the compressive stress layer is further reduced in density.

於本說明書中,所謂「壓縮應力層」係藉由如下方式所形成之高密度層:藉由將作為原料之玻璃浸漬於硝酸鉀等無機鉀熔鹽中而將玻璃表面之Na離子與熔鹽中之K離子進行離子交換。 In the present specification, the "compressive stress layer" is a high-density layer formed by immersing a glass as a raw material in an inorganic potassium molten salt such as potassium nitrate to form a Na ion and a molten salt on the surface of the glass. The K ion in the ion exchange.

(熔鹽) (molten salt)

用以獲得本發明之化學強化玻璃之玻璃強化用熔鹽(以下有時亦簡稱為「熔鹽」)含有無機鉀鹽。作為無機鉀鹽,較佳為於進行化學強化之玻璃之應變點(通常500~600℃)以下具有熔點者,於本發明中,較佳為含有硝酸鉀(熔點330℃)作為主成分之熔鹽。若硝酸鉀為主成分,則於玻璃之應變點以下為熔融狀態,且於使用溫度區域內變得容易操作,故而較佳。此處,所謂主成分,意指於熔鹽中之含量為50質量%以上。 The molten salt for glass reinforcement (hereinafter sometimes simply referred to as "molten salt") for obtaining the chemically strengthened glass of the present invention contains an inorganic potassium salt. The inorganic potassium salt preferably has a melting point below the strain point (usually 500 to 600 ° C) of the glass subjected to chemical strengthening. In the present invention, it is preferred to contain potassium nitrate (melting point 330 ° C) as a main component. salt. When potassium nitrate is a main component, it is preferably in a molten state below the strain point of the glass, and it is easy to handle in the use temperature region. Here, the main component means that the content in the molten salt is 50% by mass or more.

以下,作為熔鹽之無機鉀鹽,以將硝酸鉀作為主成分之「硝酸鉀熔鹽」為例進行說明。 Hereinafter, the inorganic potassium salt of the molten salt will be described by taking "potassium nitrate molten salt" containing potassium nitrate as a main component as an example.

熔鹽較佳為進而含有選自由K2CO3、Na2CO3、KHCO3、NaHCO3、K3PO4、Na3PO4、K2SO4、Na2SO4、KOH及NaOH所組成之群中之至少1種鹽,其中更佳為含有選自由K2CO3、Na2CO3、KHCO3及NaHCO3所組成之群中之至少1種鹽。 The molten salt preferably further comprises a component selected from the group consisting of K 2 CO 3 , Na 2 CO 3 , KHCO 3 , NaHCO 3 , K 3 PO 4 , Na 3 PO 4 , K 2 SO 4 , Na 2 SO 4 , KOH and NaOH. At least one salt of the group, more preferably containing at least one salt selected from the group consisting of K 2 CO 3 , Na 2 CO 3 , KHCO 3 and NaHCO 3 .

於硝酸鉀之熔鹽中添加選自由具有切斷以Si-O-Si鍵為代表之玻 璃之網狀結構的性質之K2CO3、Na2CO3、KHCO3、NaHCO3、K3PO4、Na3PO4、K2SO4、Na2SO4、KOH及NaOH所組成之群中之至少1種鹽(以下有時亦稱為「熔劑」)。由於進行化學強化處理之溫度高達數百℃,故而於該溫度下玻璃之Si-O間之共價鍵被適當切斷,變得容易進行後述之低密度化處理。 K 2 CO 3 , Na 2 CO 3 , KHCO 3 , NaHCO 3 , K 3 PO selected from the properties of a network having a network in which a glass represented by a Si—O—Si bond is cleaved is added to a molten salt of potassium nitrate. 4. At least one salt of a group consisting of Na 3 PO 4 , K 2 SO 4 , Na 2 SO 4 , KOH, and NaOH (hereinafter sometimes referred to as "flux"). Since the temperature at which the chemical strengthening treatment is performed is as high as several hundred ° C, the covalent bond between the Si—O of the glass is appropriately cut at this temperature, and the lower density treatment described later is facilitated.

再者,切斷共價鍵之程度根據玻璃組成或所使用之無機鹽(熔劑)之種類、將玻璃浸漬於熔鹽中之溫度、時間等化學強化處理條件而有所不同,認為較佳為選擇切斷自Si伸出之4個共價鍵中之1~2個鍵之程度之條件。 Further, the degree of cutting the covalent bond varies depending on the glass composition, the type of the inorganic salt (flux) to be used, and the chemical strengthening treatment conditions such as the temperature and time at which the glass is immersed in the molten salt, and it is considered to be preferable. The condition for cutting off one or two of the four covalent bonds from which Si is extended is selected.

例如於使用K2CO3作為熔劑之情形時,若將熔鹽中之熔劑之含量設為0.1重量%以上,將化學強化處理溫度設為350~500℃,則化學強化處理時間較佳為1分鐘~10小時,更佳為5分鐘~8小時,進而較佳為10分鐘~4小時。 For example, when K 2 CO 3 is used as the flux, if the content of the flux in the molten salt is 0.1% by weight or more and the chemical strengthening treatment temperature is 350 to 500° C., the chemical strengthening treatment time is preferably 1 Minutes to 10 hours, more preferably 5 minutes to 8 hours, and further preferably 10 minutes to 4 hours.

就生產性之觀點而言,熔劑之添加量較佳為使用熔鹽之溫度下之飽和溶解度以下,又,若過量添加,則有導致玻璃之腐蝕之虞。 From the viewpoint of productivity, the amount of the flux added is preferably equal to or less than the saturated solubility at the temperature at which the molten salt is used, and if it is excessively added, there is a possibility of causing corrosion of the glass.

熔鹽除含硝酸鉀及熔劑以外,亦可於不阻礙本發明效果之範圍內含有其他化學物種,例如可列舉氯化鈉、氯化鉀、硼酸鈉、硼酸鉀等鹼金屬氯化鹽或鹼金屬硼酸鹽等。該等可單獨添加,亦可組合添加複數種。 In addition to the potassium nitrate and the flux, the molten salt may contain other chemical species within a range that does not inhibit the effects of the present invention, and examples thereof include alkali metal chlorides or alkalis such as sodium chloride, potassium chloride, sodium borate, and potassium borate. Metal borate, etc. These may be added alone or in combination.

(熔鹽之製造方法1) (Method 1 of manufacturing molten salt)

熔鹽可藉由下述所示之步驟而製造。 The molten salt can be produced by the steps shown below.

步驟1a:硝酸鉀熔鹽之製備 Step 1a: Preparation of potassium nitrate molten salt

步驟2a:熔劑於上述步驟1a所製備之硝酸鉀熔鹽中之添加 Step 2a: adding the flux to the potassium nitrate molten salt prepared in the above step 1a

(步驟1a-硝酸鉀熔鹽之製備-) (Step 1a - Preparation of potassium nitrate molten salt -)

於步驟1a中,將硝酸鉀投入容器中,加熱至熔點以上之溫度而熔融,藉此製備熔鹽。由於硝酸鉀熔點為330℃,沸點為500℃,故而於 該範圍內之溫度下進行熔融。就可對玻璃賦予之表面壓縮應力(CS)與壓縮應力層深度(DOL)之平衡性及強化時間之方面而言,尤佳為將熔融溫度設為350~470℃。 In the step 1a, potassium nitrate is introduced into a vessel, heated to a temperature above the melting point, and melted, thereby preparing a molten salt. Since the melting point of potassium nitrate is 330 ° C and the boiling point is 500 ° C, Melting is carried out at a temperature within this range. In terms of the balance between the surface compressive stress (CS) and the compressive stress layer depth (DOL) imparted to the glass and the strengthening time, it is particularly preferable to set the melting temperature to 350 to 470 °C.

將硝酸鉀熔融之容器可使用金屬、石英、陶瓷等。其中,就耐久性之觀點而言,較理想為金屬材質,就耐腐蝕性之觀點而言,較佳為不鏽鋼(SUS)材質。 A metal, quartz, ceramic, or the like can be used for the container in which potassium nitrate is melted. Among them, from the viewpoint of durability, a metal material is preferable, and a stainless steel (SUS) material is preferable from the viewpoint of corrosion resistance.

(步驟2a-熔劑於步驟1a所製備之硝酸鉀熔鹽中之添加-) (Step 2a - Addition of flux to the potassium nitrate molten salt prepared in step 1a -)

於步驟2a中,於步驟1a所製備之硝酸鉀熔鹽中添加上述熔劑,一面將溫度保持為一定範圍,一面藉由攪拌翼等進行混合以使整體變得均勻。於併用複數種熔劑之情形時,添加順序並無限定,亦可同時添加。 In the step 2a, the above-mentioned flux is added to the potassium nitrate molten salt prepared in the step 1a, and while maintaining the temperature within a certain range, the mixture is mixed by a stirring blade or the like to make the whole uniform. When a plurality of kinds of fluxes are used in combination, the order of addition is not limited and may be added at the same time.

溫度較佳為硝酸鉀之熔點以上、即330℃以上,更佳為350~500℃。又,攪拌時間較佳為1分鐘~10小時,更佳為10分鐘~2小時。 The temperature is preferably not less than the melting point of potassium nitrate, i.e., 330 ° C or higher, more preferably 350 to 500 ° C. Further, the stirring time is preferably from 1 minute to 10 hours, more preferably from 10 minutes to 2 hours.

(熔鹽之製造方法2) (Manufacturing method 2 of molten salt)

於上述熔鹽之製造方法1中,已例示於製備硝酸鉀之熔鹽後加入熔劑之方法,又,熔鹽亦可藉由下述所示之步驟而製造。 In the method 1 for producing a molten salt, a method of adding a flux after preparing a molten salt of potassium nitrate has been exemplified, and a molten salt can also be produced by the steps shown below.

步驟1b:硝酸鉀與熔劑之混合 Step 1b: Mixing potassium nitrate with flux

步驟2b:上述步驟1b所得之混合鹽之熔融 Step 2b: melting of the mixed salt obtained in the above step 1b

(步驟1b-硝酸鉀與熔劑之混合-) (Step 1b - Mixing Potassium Nitrate with Flux -)

於步驟1b中,將硝酸鉀與熔劑投入容器中,藉由攪拌翼等進行混合。於併用複數種熔劑之情形時,添加順序並無限定,亦可同時添加。容器可使用與上述步驟1a中所使用者相同者。 In the step 1b, potassium nitrate and a flux are put into a container, and mixing is performed by a stirring blade or the like. When a plurality of kinds of fluxes are used in combination, the order of addition is not limited and may be added at the same time. The container can use the same one as the user in the above step 1a.

(步驟2b-步驟1b所得之混合鹽之熔融-) (Step 2b - Melting of the mixed salt obtained in Step 1b -)

於步驟2b中,對藉由步驟1b而得之混合鹽進行加熱而熔融。由於硝酸鉀熔點為330℃,沸點為500℃,故而於該範圍內之溫度下進行熔融。就可對玻璃賦予之表面壓縮應力(CS)與壓縮應力層深度(DOL) 之平衡性及強化時間之方面而言,尤佳為將熔融溫度設為350~470℃。攪拌時間較佳為1分鐘~10小時,更佳為10分鐘~2小時。 In the step 2b, the mixed salt obtained in the step 1b is heated and melted. Since potassium nitrate has a melting point of 330 ° C and a boiling point of 500 ° C, it is melted at a temperature within this range. The surface compressive stress (CS) and compressive stress layer depth (DOL) that can be imparted to the glass In terms of balance and strengthening time, it is particularly preferable to set the melting temperature to 350 to 470 °C. The stirring time is preferably from 1 minute to 10 hours, more preferably from 10 minutes to 2 hours.

於藉由上述步驟1a及2a或步驟1b及2b而得之熔鹽中,於因添加熔劑而產生析出物之情形時,在進行玻璃之化學強化處理前,將其靜置直至該析出物沈澱至容器底部為止。於該析出物中包含超過飽和溶解度之量之熔劑、或熔劑之陽離子於熔鹽中被交換所得之鹽。 In the molten salt obtained by the above steps 1a and 2a or steps 1b and 2b, when a precipitate is generated by the addition of a flux, it is allowed to stand until the precipitate precipitates before the chemical strengthening treatment of the glass is performed. Until the bottom of the container. A flux containing an amount exceeding the saturated solubility or a salt obtained by exchanging the cation of the flux in the molten salt is contained in the precipitate.

以上,藉由上述步驟1a及2a或步驟1b及2b,可製備熔鹽。再者,以下,有時將步驟1a或1b簡稱為「步驟1」,將步驟2a或2b簡稱為「步驟2」。 Above, the molten salt can be prepared by the above steps 1a and 2a or steps 1b and 2b. In the following, step 1a or 1b may be simply referred to as "step 1", and step 2a or 2b may be simply referred to as "step 2".

又,繼步驟2後,亦可視需要進行下述步驟2'。 Moreover, after step 2, the following step 2' can also be performed as needed.

步驟2':熔鹽中之Na濃度之調整 Step 2': Adjustment of Na concentration in molten salt

藉由將以NaNO3為代表之Na鹽添加至所製造之熔鹽中,可對熔鹽中之Na濃度進行調整。後文敍述步驟2'之詳細內容。 The Na concentration in the molten salt can be adjusted by adding Na salt represented by NaNO 3 to the molten salt to be produced. The details of step 2' will be described later.

(化學強化處理-壓縮應力層之形成-) (Chemical strengthening treatment - formation of compressive stress layer -)

繼而,對化學強化處理方法進行說明。 Next, the chemical strengthening treatment method will be described.

化學強化處理係藉由如下方式進行:將玻璃浸漬於熔鹽中,使玻璃中之金屬離子(Na離子)與熔鹽中之離子半徑較大之金屬離子(K離子)置換。藉由該離子交換而改變玻璃表面之組成,可形成玻璃表面經高密度化之壓縮應力層2。由於因該玻璃表面之高密度化而產生壓縮應力,故而可將玻璃強化[圖1(a)~(b)]。 The chemical strengthening treatment is carried out by immersing the glass in a molten salt to replace metal ions (Na ions) in the glass with metal ions (K ions) having a large ionic radius in the molten salt. By changing the composition of the glass surface by the ion exchange, the compressive stress layer 2 having a high density of the glass surface can be formed. Since the compressive stress is generated due to the high density of the glass surface, the glass can be strengthened [Fig. 1 (a) to (b)].

再者,實際上,化學強化玻璃之密度係自存在於玻璃中心之中間層3之外緣朝壓縮應力層表面逐漸高密度化,故而於中間層3與壓縮應力層2之間不存在密度急遽變化之明確之邊界。此處,所謂中間層表示存在於玻璃中心部且夾於壓縮應力層中之層。該中間層與壓縮應力層不同,係未經離子交換之層。 Furthermore, in practice, the density of the chemically strengthened glass is gradually increased from the outer edge of the intermediate layer 3 existing in the center of the glass toward the surface of the compressive stress layer, so that there is no sharp density between the intermediate layer 3 and the compressive stress layer 2. The clear boundary of change. Here, the intermediate layer means a layer existing in the center portion of the glass and sandwiched in the compressive stress layer. The intermediate layer, unlike the compressive stress layer, is a layer that is not ion exchanged.

具體而言,本發明之化學強化處理可藉由下述步驟3進行。 Specifically, the chemical strengthening treatment of the present invention can be carried out by the following step 3.

步驟3:玻璃之化學強化處理 Step 3: Chemical strengthening treatment of glass

(步驟3-玻璃之化學強化處理-) (Step 3 - Chemical strengthening treatment of glass -)

於步驟3中,對玻璃進行預熱,將上述步驟1及2或上述步驟1、2及2'所製備之熔鹽調整為進行化學強化之溫度。其次,將經預熱之玻璃於熔鹽中浸漬特定時間後,自熔鹽中提起玻璃,並放置冷卻。再者,較佳為於化學強化處理前對玻璃進行根據用途之形狀加工,例如切斷、端面加工及開孔加工等機械加工。 In step 3, the glass is preheated, and the molten salt prepared in the above steps 1 and 2 or the above steps 1, 2 and 2' is adjusted to a temperature at which chemical strengthening is performed. Next, after the preheated glass is immersed in the molten salt for a certain period of time, the glass is lifted from the molten salt and left to cool. Further, it is preferred to process the glass according to the shape of the application before the chemical strengthening treatment, for example, cutting, end surface processing, and drilling.

玻璃之預熱溫度依存於浸漬於熔鹽中之溫度,通常較佳為100℃以上。 The preheating temperature of the glass depends on the temperature immersed in the molten salt, and is usually preferably 100 ° C or more.

化學強化溫度較佳為被強化玻璃之應變點(通常500~600℃)以下,為了獲得更大之壓縮應力層深度,尤佳為350℃以上。 The chemical strengthening temperature is preferably below the strain point of the tempered glass (usually 500 to 600 ° C), and is preferably 350 ° C or more in order to obtain a larger compressive stress layer depth.

玻璃於熔鹽中之浸漬時間較佳為1分鐘~10小時,更佳為5分鐘~8小時,進而較佳為10分鐘~4小時。若處於該範圍,則可獲得強度與壓縮應力層之深度之平衡性優異之化學強化玻璃。 The immersion time of the glass in the molten salt is preferably from 1 minute to 10 hours, more preferably from 5 minutes to 8 hours, and still more preferably from 10 minutes to 4 hours. When it is in this range, the chemically strengthened glass which is excellent in the balance of the strength and the depth of the compressive stress layer can be obtained.

(低密度層) (low density layer)

本發明之化學強化玻璃進而具有將壓縮應力層2之表面低密度化而成之低密度層1[圖1(b)~(c)]。 The chemically strengthened glass of the present invention further has a low-density layer 1 in which the surface of the compressive stress layer 2 is reduced in density [Fig. 1 (b) to (c)].

所謂低密度層,係藉由Na或K自壓縮應力層之最表面逸出(浸出),取而代之H進入(置換)而形成,可藉由上述步驟2'及後文之步驟5中之至少任一者而進行。再者,後文敍述步驟5之詳細內容,於步驟5之前進行下述步驟4。 The so-called low-density layer is formed by Na (or) escaping (leaching) from the outermost surface of the compressive stress layer, and H is introduced (displaced), and can be formed by at least one of the above step 2' and the following step 5 One is done. Furthermore, the details of step 5 will be described later, and step 4 below is performed before step 5.

步驟4:玻璃之洗淨 步驟5:經過步驟4後之玻璃之酸處理 Step 4: Washing the glass Step 5: Acid treatment of the glass after step 4

(步驟4-玻璃之洗淨-) (Step 4 - Washing the glass -)

於步驟4中,使用工業用水、離子交換水等來洗淨玻璃。其中較佳為離子交換水。洗淨之條件根據所使用之清潔液而有所不同,於使用離子交換水之情形時,就完全去除所附著之鹽之方面而言,較佳為 於0~100℃下進行洗淨。 In step 4, the glass is washed with industrial water, ion exchange water or the like. Among them, ion exchange water is preferred. The conditions for washing vary depending on the cleaning liquid to be used, and in the case of using ion-exchanged water, in terms of completely removing the adhered salt, it is preferably Wash at 0~100 °C.

但是,即便僅於上述添加有熔劑之熔鹽中對玻璃進行化學強化處理,與在未添加熔劑之熔鹽中進行化學強化處理之情形相比,亦可將化學強化玻璃之透過性稍提高。認為其原因在於:即便僅藉由通常之利用水之洗淨步驟亦會引起上述浸出,而將壓縮應力層之表面低密度化。然而,認為於該情形時之低密度層形成之效果較弱,藉由下述步驟5而進一步促進該效果。 However, even if the glass is chemically strengthened only in the molten salt to which the flux is added, the permeability of the chemically strengthened glass can be slightly improved as compared with the case where the chemical strengthening treatment is performed in the molten salt to which no flux is added. The reason for this is considered to be that the surface of the compressive stress layer is reduced in density even if the above-described leaching is caused only by the usual washing step using water. However, it is considered that the effect of forming the low-density layer in this case is weak, and the effect is further promoted by the following step 5.

如前文所述,藉由將化學強化玻璃之壓縮應力層表面低密度化,而使折射率降低,可獲得玻璃之透過率得以提高之低反射性之玻璃。 As described above, by lowering the surface of the compressive stress layer of the chemically strengthened glass to lower the refractive index, it is possible to obtain a glass having a low reflectivity in which the transmittance of the glass is improved.

低密度層之密度可藉由利用X射線反射率法(X-ray-Reflectometry,XRR)所測得之臨界角(θc)而求出。又,根據利用XRR所測得之週期(△θ)可求出低密度層之厚度。再者,簡便而言,亦可藉由利用掃描式電子顯微鏡(SEM)觀察玻璃之剖面而確認低密度層之形成與層之厚度。又,中間層之密度可藉由利用研磨、蝕刻等去除壓縮應力層,以同樣之方式求出。 The density of the low density layer can be determined by the critical angle (θc) measured by X-ray-reflection spectroscopy (XRR). Further, the thickness of the low-density layer can be obtained from the period (Δθ) measured by XRR. Further, in simple terms, the formation of the low-density layer and the thickness of the layer can be confirmed by observing the cross section of the glass by a scanning electron microscope (SEM). Further, the density of the intermediate layer can be obtained in the same manner by removing the compressive stress layer by polishing, etching, or the like.

低密度層之Na/Si莫耳比與K/Si莫耳比可藉由X射線光電子分光法(X-ray Photoelectron Spectroscopy,XPS)而確認,H/Si莫耳比可藉由拉塞福逆散射(Rutherford Backscattering Spectrometry,RBS)-彈性反沖檢測法(Elastic Recoil Detection Analysis,ERDA)而確認。即,低密度層之H/(Na+K)莫耳比可藉由XPS及RBS-ERDA而求出。又,中間層之H/(Na+K)莫耳比可藉由利用研磨、蝕刻等去除壓縮應力層,以同樣之方式求出。 The Na/Si molar ratio and the K/Si molar ratio of the low density layer can be confirmed by X-ray photoelectron spectroscopy (XPS), and the H/Si molar ratio can be reversed by the Raspford It was confirmed by Rutherford Backscattering Spectrometry (RBS)-Elastic Recoil Detection Analysis (ERDA). That is, the H/(Na+K) molar ratio of the low density layer can be determined by XPS and RBS-ERDA. Further, the H/(Na+K) molar ratio of the intermediate layer can be obtained in the same manner by removing the compressive stress layer by polishing, etching, or the like.

低密度層之厚度由於與透過玻璃之光之最大波長有關,故而較佳為5nm以上且200nm以下,更佳為50nm以上且200nm以下。 The thickness of the low-density layer is preferably 5 nm or more and 200 nm or less, and more preferably 50 nm or more and 200 nm or less, depending on the maximum wavelength of light transmitted through the glass.

就所得之化學強化玻璃之低反射性之觀點而言,低密度層之密 度(D1)與中間層之密度(D3)之比(D1/D3)較佳為0.5以上且未達0.93,更佳為0.7以上且未達0.85,進而較佳為0.7以上且未達0.8。 The density of the low density layer is from the viewpoint of the low reflectivity of the obtained chemically strengthened glass. The ratio (D1/D3) of the degree (D1) to the density (D3) of the intermediate layer is preferably 0.5 or more and less than 0.93, more preferably 0.7 or more and less than 0.85, still more preferably 0.7 or more and less than 0.8.

又,低密度層之H/(Na+K)莫耳比(C1)與中間層之H/(Na+K)莫耳比(C3)之大小關係較佳為C1>C3。 Further, the relationship between the H/(Na+K) molar ratio (C1) of the low-density layer and the H/(Na+K) molar ratio (C3) of the intermediate layer is preferably C1>C3.

就賦予低反射性之方面而言,較佳為低密度層之H/(Na+K)莫耳比(C1)為1.0以上,更佳為10.0以上。 In terms of imparting low reflectivity, the H/(Na+K) molar ratio (C1) of the low-density layer is preferably 1.0 or more, and more preferably 10.0 or more.

(步驟2'-熔鹽中之Na濃度之調整-) (Step 2'-Adjustment of Na concentration in molten salt -)

於步驟2'中,視需要將用於上述步驟3之化學強化處理之熔鹽中之Na濃度調整為500重量ppm以上。 In the step 2', the Na concentration in the molten salt used in the chemical strengthening treatment of the above step 3 is adjusted to 500 ppm by weight or more as needed.

藉由使熔鹽中之Na濃度為500重量ppm以上,變得容易進行玻璃最表面之網狀結構之切斷、低密度化處理,對低密度層加以深化。 By setting the Na concentration in the molten salt to 500 ppm by weight or more, it is easy to cut the network structure on the outermost surface of the glass and to reduce the density, and to deepen the low-density layer.

熔鹽中之Na濃度可藉由添加以硝酸鈉為代表之無機鈉鹽進行調整。 The Na concentration in the molten salt can be adjusted by adding an inorganic sodium salt represented by sodium nitrate.

(步驟5-經過步驟4後之玻璃之酸處理-) (Step 5 - Acid treatment of the glass after step 4 -)

於步驟5中,進而對步驟4中洗淨之玻璃進行酸處理。 In step 5, the glass washed in step 4 is further subjected to an acid treatment.

於在步驟4後進行步驟5之情形時,藉由對洗淨之化學強化玻璃進行酸處理,而促進化學強化玻璃之壓縮應力層最表面之低密度化。又,於在經步驟2'調整Na濃度之熔鹽中進行化學強化處理後進行步驟5之情形時,可實現低密度層之進一步深化。 When the step 5 is carried out after the step 4, the chemically strengthened glass to be washed is subjected to an acid treatment to promote the lowering of the outermost surface of the compressive stress layer of the chemically strengthened glass. Further, in the case where the step 5 is carried out after performing the chemical strengthening treatment in the molten salt in which the Na concentration is adjusted in the step 2', further deepening of the low-density layer can be achieved.

所謂玻璃之酸處理,係藉由將化學強化玻璃浸漬於酸性溶液中而將化學強化玻璃表面之Na及/或K置換為H之處理。 The acid treatment of glass is a treatment in which Na and/or K on the surface of the chemically strengthened glass is replaced with H by immersing the chemically strengthened glass in an acidic solution.

溶液只要為酸性,則並無特別限制,所使用之酸可為弱酸,亦可為強酸,不受其pH值影響。具體而言,較佳為鹽酸、硝酸、硫酸、磷酸、乙酸、草酸、碳酸及檸檬酸等酸。該等酸可單獨使用,亦可組合使用複數種。 The solution is not particularly limited as long as it is acidic, and the acid to be used may be a weak acid or a strong acid, and is not affected by the pH. Specifically, an acid such as hydrochloric acid, nitric acid, sulfuric acid, phosphoric acid, acetic acid, oxalic acid, carbonic acid or citric acid is preferred. These acids may be used singly or in combination of plural kinds.

進行酸處理之溫度亦根據所使用之酸之種類或濃度、時間而有 所不同,較佳為於100℃以下進行。 The temperature at which the acid is treated is also dependent on the type or concentration of the acid used, and the time. The difference is preferably 100 ° C or less.

進行酸處理之時間亦根據所使用之酸之種類或濃度、溫度而有所不同,就生產性之方面而言,較佳為10秒~5小時,更佳為1分鐘~2小時。 The time for the acid treatment varies depending on the kind, concentration, and temperature of the acid to be used, and in terms of productivity, it is preferably from 10 seconds to 5 hours, more preferably from 1 minute to 2 hours.

進行酸處理之溶液之濃度根據所使用之酸之種類或時間、溫度而有所不同,但較佳為容器腐蝕之顧慮較少之濃度。 The concentration of the acid-treated solution varies depending on the kind, time, and temperature of the acid to be used, but it is preferably a concentration at which the container is less corroded.

藉由酸處理所使用之酸之種類、濃度、酸處理之溫度、時間等,可控制所形成之低密度層之厚度。 The thickness of the formed low density layer can be controlled by the type of acid used, the concentration of the acid, the temperature of the acid treatment, the time, and the like.

透過玻璃之光之最大透過波長由低密度層之厚度決定,故而只要根據化學強化玻璃之用途而適當決定酸處理條件即可。 The maximum transmission wavelength of the light transmitted through the glass is determined by the thickness of the low-density layer. Therefore, the acid treatment conditions may be appropriately determined depending on the use of the chemically strengthened glass.

如前文所述,低密度層之厚度較佳為5~200nm,更佳為50~200nm。有延長酸處理時間等越加強酸處理條件,透過率之增加幅度越大之傾向。 As described above, the thickness of the low density layer is preferably from 5 to 200 nm, more preferably from 50 to 200 nm. There is a tendency that the acid treatment conditions are prolonged, such as the acid treatment time is prolonged, and the increase in the transmittance is increased.

基於該等內容,根據情況適當決定酸處理條件。 Based on these contents, the acid treatment conditions are appropriately determined depending on the circumstances.

又,於藉由步驟5之酸處理進行低密度化處理之情形時,低密度層中之Na濃度及K濃度均低於H濃度由於可獲得更低反射性之化學強化玻璃,故而較佳。 Further, in the case where the low-densification treatment is carried out by the acid treatment in the step 5, it is preferable that the Na concentration and the K concentration in the low-density layer are both lower than the H concentration because a chemically strengthened glass having lower reflectivity can be obtained.

<玻璃> <glass>

本發明所使用之玻璃只要含有鈉即可,只要為具有可實現利用成形、化學強化處理而強化之組成者,則可使用各種組成者。具體而言,例如可列舉:鋁矽酸鹽玻璃、鈉鈣玻璃、硼矽酸玻璃、鉛玻璃、鹼鋇玻璃、鋁硼矽酸鹽玻璃等。 The glass to be used in the present invention may be any one as long as it has a composition that can be strengthened by molding or chemical strengthening treatment. Specific examples thereof include aluminosilicate glass, soda lime glass, borosilicate glass, lead glass, alkali bismuth glass, and aluminum borosilicate glass.

玻璃之製造方法並無特別限定,可藉由如下方式製造:將所需之玻璃原料投入連續熔融爐中,於較佳為1500~1600℃下將玻璃原料加熱熔融,澄清後,供給至成形裝置,其後將熔融玻璃成形為板狀並緩冷。 The method for producing the glass is not particularly limited, and it can be produced by introducing a desired glass raw material into a continuous melting furnace, heating and melting the glass raw material at 1,500 to 1600 ° C, clarifying, and then supplying it to a forming apparatus. Thereafter, the molten glass is formed into a plate shape and slowly cooled.

再者,玻璃之成形可採用各種方法。例如可採用下拉法(例如溢流下拉法、流孔下引法及再曳引法等)、浮式法、滾壓法及壓製法等各種成形方法。 Further, various methods can be employed for forming the glass. For example, various forming methods such as a down-draw method (for example, an overflow down-draw method, a flow-down method, and a re-drawing method), a floating method, a rolling method, and a pressing method can be employed.

玻璃之厚度並無特別限制,為了有效地進行化學強化處理,通常較佳為5mm以下,更佳為3mm以下。 The thickness of the glass is not particularly limited, and is usually preferably 5 mm or less, more preferably 3 mm or less, in order to carry out the chemical strengthening treatment efficiently.

作為本發明之化學強化用玻璃之組成,並無特別限定,例如可列舉以下之玻璃組成。(i)以莫耳%所表示之組成計,含有50~80%之SiO2、2~25%之Al2O3、0~10%之Li2O、0~18%之Na2O、0~10%之K2O、0~15%之MgO、0~5%之CaO及0~5%之ZrO2的玻璃 The composition of the glass for chemical strengthening of the present invention is not particularly limited, and examples thereof include the following glass compositions. (i) containing 50 to 80% of SiO 2 , 2 to 25% of Al 2 O 3 , 0 to 10% of Li 2 O, and 0 to 18% of Na 2 O, in terms of composition represented by % by mole. 0 to 10% of K 2 O, 0 to 15% of MgO, 0 to 5% of CaO, and 0 to 5% of ZrO 2 glass

(ii)以莫耳%所表示之組成為含有50~74%之SiO2、1~10%之Al2O3、6~14%之Na2O、3~11%之K2O、2~15%之MgO、0~6%之CaO及0~5%之ZrO2,SiO2及Al2O3之含量之合計為75%以下,Na2O及K2O之含量之合計為12~25%,MgO及CaO之含量之合計為7~15%的玻璃 (ii) The composition expressed by mole % is 50 to 74% SiO 2 , 1 to 10% Al 2 O 3 , 6 to 14% Na 2 O, 3 to 11% K 2 O, 2 ~15% of MgO, 0 to 6% of CaO, and 0 to 5% of ZrO 2 , the total content of SiO 2 and Al 2 O 3 is 75% or less, and the total content of Na 2 O and K 2 O is 12 ~25%, the total content of MgO and CaO is 7~15% glass

(iii)以莫耳%所表示之組成為含有68~80%之SiO2、4~10%之Al2O3、5~15%之Na2O、0~1%之K2O、4~15%之MgO及0~1%之ZrO2的玻璃 (iii) The composition expressed by mol% is 68 to 80% SiO 2 , 4 to 10% Al 2 O 3 , 5 to 15% Na 2 O, 0 to 1% K 2 O, 4 ~15% of MgO and 0~1% of ZrO 2 glass

(iv)以莫耳%所表示之組成為含有67~75%之SiO2、0~4%之Al2O3、7~15%之Na2O、1~9%之K2O、6~14%之MgO及0~1.5%之ZrO2,SiO2及Al2O3之含量之合計為71~75%,Na2O及K2O之含量之合計為12~20%,且於含有CaO之情形時其含量未達1%的玻璃 (iv) The composition expressed by mol% is 67 to 75% SiO 2 , 0 to 4% Al 2 O 3 , 7 to 15% Na 2 O, 1 to 9% K 2 O, 6 ~14% of MgO and 0~1.5% of ZrO 2 , the total content of SiO 2 and Al 2 O 3 is 71~75%, and the total content of Na 2 O and K 2 O is 12-20%, and Glass containing less than 1% in the case of CaO

於在化學強化處理前對玻璃進行研磨之情形時,作為研磨方法,例如可列舉一面供給研磨漿料一面利用研磨墊進行研磨之方法,研磨漿料可使用含有研磨材料與水者。作為研磨材料,較佳為氧化鈰(ceria)及二氧化矽。 In the case of polishing the glass before the chemical strengthening treatment, for example, a method of polishing the polishing slurry while polishing the polishing slurry may be used, and the polishing slurry may contain an abrasive material and water. As the abrasive, cerium oxide (ceria) and cerium oxide are preferred.

於對玻璃進行研磨之情形時,利用清潔液將研磨後之玻璃洗 淨。作為清潔液,較佳為中性洗劑及水,更佳為於經中性洗劑洗淨後利用水洗淨。作為中性洗劑,可使用市售者。 When the glass is ground, the polished glass is washed with a cleaning liquid. net. As the cleaning liquid, a neutral lotion and water are preferred, and it is more preferably washed with water after washing with a neutral detergent. As a neutral lotion, a commercially available person can be used.

利用清潔液對藉由上述洗淨步驟洗淨之玻璃基板進行最終洗淨。作為清潔液,例如可列舉:水、乙醇及異丙醇等。其中較佳為水。 The glass substrate washed by the above-described washing step is finally washed with a cleaning liquid. Examples of the cleaning liquid include water, ethanol, and isopropyl alcohol. Among them, water is preferred.

上述最終洗淨後將玻璃乾燥。乾燥條件只要考慮洗淨步驟所使用之清潔液、及玻璃之特性等而選擇最佳之條件即可。 After the final washing described above, the glass was dried. The drying conditions may be selected in consideration of the conditions of the cleaning liquid used in the washing step, the characteristics of the glass, and the like.

將結束上述洗淨之玻璃應用於化學強化處理之上述步驟3。 The above-mentioned washed glass is applied to the above step 3 of the chemical strengthening treatment.

以上,已對本發明之化學強化玻璃進行了說明,本發明之化學強化玻璃可藉由包括以下之步驟1~4以及步驟2'及5中之至少任一步驟而製造。其中,藉由包括步驟2',可使低密度層深化,藉由包括步驟5,可使低密度層進一步深化,更佳為同時包括步驟2'及5。再者,各步驟之詳細內容如前文所述。 The chemically strengthened glass of the present invention has been described above, and the chemically strengthened glass of the present invention can be produced by including at least one of the following steps 1 to 4 and steps 2' and 5. Wherein, by including step 2', the low-density layer can be deepened, and by including step 5, the low-density layer can be further deepened, and more preferably, steps 2' and 5 are included. Furthermore, the details of each step are as described above.

步驟1:硝酸鉀熔鹽之製備(1a)或硝酸鉀與熔劑之混合(1b) Step 1: Preparation of potassium nitrate molten salt (1a) or mixing of potassium nitrate with flux (1b)

步驟2:熔劑對於上述步驟1a所製備之硝酸鉀熔鹽中之添加(2a)或上述步驟1b所得之混合鹽之熔融(2b) Step 2: melting of the molten salt in the potassium nitrate molten salt prepared in the above step 1a (2a) or the mixed salt obtained in the above step 1b (2b)

步驟2':熔鹽中之Na濃度之調整 Step 2': Adjustment of Na concentration in molten salt

步驟3:玻璃之化學強化處理 Step 3: Chemical strengthening treatment of glass

步驟4:玻璃之洗淨 步驟5:經過上述步驟4後之玻璃之酸處理 Step 4: Washing the glass Step 5: Acid treatment of the glass after the above step 4

[實施例] [Examples]

以下列舉實施例,對本發明進行具體說明,但本發明並不限定於該等。 The present invention will be specifically described below by way of examples, but the present invention is not limited thereto.

<評價方法> <Evaluation method>

於本實施例中,所合成之化合物之結構係藉由如下所示之分析方法進行。 In the present embodiment, the structure of the synthesized compound was carried out by the analysis method shown below.

(玻璃之評價:透過率) (Evaluation of glass: transmittance)

玻璃之透過率係使用分光光度計(Hitachi High-Technologies股份有限公司製造之U-4100),對300nm~1000nm之波長區域之透過光譜進行測定,而算出該波長範圍中之透過率之最大值TmaxThe transmittance of the glass is measured by using a spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Co., Ltd.) to measure the transmission spectrum in the wavelength range of 300 nm to 1000 nm, and the maximum value of the transmittance in the wavelength range is calculated. Max .

(玻璃之評價:低密度層之密度D1、低密度層之厚度T1) (Evaluation of glass: density D1 of low density layer, thickness T1 of low density layer)

於玻璃表面所形成之改質層之密度及膜厚之測定係利用X射線繞射裝置(Rigaku公司製造:ATX-G,X射線源:Cu-Kα),藉由X射線反射率法(XRR)而求出。根據X射線反射率圖案之臨界角(θc)算出密度,根據干涉週期(△θ)算出層之厚度。分析係使用GlobalFit Ver.1.3.3(Rigaku公司)而算出。 The density and film thickness of the modified layer formed on the surface of the glass were measured by an X-ray diffraction apparatus (manufactured by Rigaku: ATX-G, X-ray source: Cu-Kα) by X-ray reflectance method (XRR). And find it. The density was calculated from the critical angle (θc) of the X-ray reflectance pattern, and the thickness of the layer was calculated from the interference period (Δθ). The analysis was calculated using GlobalFit Ver. 1.3.3 (Rigaku Co., Ltd.).

(中間層之密度D3之測定) (Measurement of density D3 of the intermediate layer)

準備藉由研磨、蝕刻等去除了壓縮應力層之基板,藉由上述X射線反射率法算出中間層之密度D3。 The substrate on which the compressive stress layer is removed by polishing, etching, or the like is prepared, and the density D3 of the intermediate layer is calculated by the X-ray reflectance method.

(低密度層之H/(Na+K)莫耳比C1之測定) (Measurement of H/(Na+K) Mo Er ratio C1 in low density layer)

於玻璃表面所形成之改質層之Na/Si及K/Si莫耳比之測定係使用X射線光電子分光法(X-ray Photoelectron Spectroscopy,XPS)。XPS分析係於使用安裝於同一裝置上之C60離子濺射槍去除試樣之表面污染後實施。 The Na/Si and K/Si molar ratios of the modified layer formed on the surface of the glass were measured by X-ray photoelectron spectroscopy (XPS). The XPS analysis was carried out after removing the surface contamination of the sample using a C 60 ion sputtering gun mounted on the same device.

H/Si莫耳比之測定係使用拉塞福逆散射(Rutherford Backscattering Spectrometry,RBS)-彈性反沖檢測法(Elastic Recoil Detection Analysis,ERDA)。於藉由RBS-ERDA分析而求出H/Si莫耳比之情形時,必須考慮由有機物引起之表面污染之影響。此處,假定表面污染有機物量為3×1015atoms/cm2,假定表面污染有機物之密度為10×1022atoms/cm3The H/Si molar ratio was determined using Rutherford Backscattering Spectrometry (RBS)-Elastic Recoil Detection Analysis (ERDA). When the H/Si molar ratio is obtained by RBS-ERDA analysis, the influence of surface contamination caused by organic matter must be considered. Here, it is assumed that the amount of surface-contaminated organic matter is 3 × 10 15 atoms/cm 2 , and the density of the surface-contaminated organic substance is assumed to be 10 × 10 22 atoms/cm 3 .

再者,於在ERDA分析中確認出H計數隨時間降低之現象之情形時,需進行將其考慮在內之修正。根據藉由XPS分析而得之Na/Si莫耳比及K/Si莫耳比、藉由RBS-ERDA分析而得之H/Si莫耳比,求出H/(Na +K)莫耳比。XPS及RBS-ERDA分析之分析條件如下所述。 Furthermore, in the case where the phenomenon that the H count decreases with time is confirmed in the ERDA analysis, corrections to be taken into consideration are required. According to the Na/Si molar ratio and the K/Si molar ratio obtained by XPS analysis, the H/Si molar ratio obtained by RBS-ERDA analysis finds H/(Na +K) Moerby. The analysis conditions for XPS and RBS-ERDA analysis are as follows.

(XPS分析) (XPS analysis)

裝置:PHYSICAL ELECTRONICS公司製造之ESCA5500 Device: ESCA5500 manufactured by PHYSICAL ELECTRONICS

X射線源:Al Kα X-ray source: Al Kα

通能:93.9eV Tongneng: 93.9eV

能階:0.8eV/step Energy level: 0.8eV/step

檢測角:相對於試樣面之法線為15° Detection angle: 15° with respect to the normal of the sample surface

用於去除表面污染之濺射槍之離子種類:C60離子 Ion species for sputter guns used to remove surface contamination: C 60 ions

分析軟體:MultiPak Ver.9.3.0.3 Analysis software: MultiPak Ver.9.3.0.3

(RBS-ERDA分析) (RBS-ERDA analysis)

裝置:National Electrostatics Corporation製造之Pelletron 3SDH Device: Pelletron 3SDH manufactured by National Electrostatics Corporation

入射離子:He++ Incident ion: He ++

入射離子之能量:2.3MeV Energy of incident ions: 2.3 MeV

RBS散射角:160度 RBS scattering angle: 160 degrees

ERDA散射角:30度 ERDA scattering angle: 30 degrees

入射角:相對於試樣面之法線為75度 Incidence angle: 75 degrees from the normal to the sample surface

試樣電流:2nA Sample current: 2nA

照射量:10μC Irradiation: 10μC

(中間層之H/(Na+K)莫耳比C3之測定) (Measurement of H/(Na+K) Mo Er ratio C3 in the middle layer)

較理想為如下方法:準備藉由研磨、蝕刻等去除了壓縮應力層之基板,以與上述低密度層之H/(Na+K)莫耳比C1之測定相同之方式進行XPS分析及RBS-ERDA分析,算出中間層之H/(Na+K)莫耳比C3。然而,此處係使用後文所述之根據玻璃組成而算出之方法求出C3。只要已知玻璃組成,且確認較低密度層更深之區域之H濃度為ERDA分析之檢測下限以下(1莫耳%以下),則即便不準備藉由研磨、蝕刻等去除了壓縮應力層之基板,亦可容易地推算出C3之值。 It is preferable to prepare a substrate in which the compressive stress layer is removed by grinding, etching, or the like, and perform XPS analysis and RBS- in the same manner as the measurement of the H/(Na+K) molar ratio C1 of the low-density layer. The ERDA analysis calculates the H/(Na+K) molar ratio C3 of the intermediate layer. However, here, C3 is obtained by a method calculated based on the glass composition described later. When the glass composition is known and the H concentration in the region where the lower density layer is deeper is below the detection limit of the ERDA analysis (1 mol% or less), the substrate having the compressive stress layer removed by polishing, etching, or the like is not prepared. It is also easy to calculate the value of C3.

<玻璃> <glass>

進行化學強化之玻璃係使用下述組成之鈉鈣玻璃及鋁矽酸鹽玻璃之兩種玻璃。 As the glass to be chemically strengthened, two types of glass of soda lime glass and aluminosilicate glass of the following composition are used.

鈉鈣玻璃(以莫耳%所表示之組成):SiO2 72.0%、Al2O3 1.1%、Na2O 12.6%、K2O 0.2%、MgO 5.5%、CaO 8.6% Soda lime glass (composition expressed as % by mole): SiO 2 72.0%, Al 2 O 3 1.1%, Na 2 O 12.6%, K 2 O 0.2%, MgO 5.5%, CaO 8.6%

鋁矽酸鹽玻璃(以莫耳%所表示之組成):SiO2 64.4%、Al2O3 8.0%、Na2O 12.5%、K2O 4.0%、MgO 10.5%、CaO 0.1%、SrO 0.1%、BaO 0.1%、ZrO2 0.5% Aluminosilicate glass (composition expressed as % by mole): SiO 2 64.4%, Al 2 O 3 8.0%, Na 2 O 12.5%, K 2 O 4.0%, MgO 10.5%, CaO 0.1%, SrO 0.1 %, BaO 0.1%, ZrO 2 0.5%

上述玻璃使用於進行化學強化處理前經研磨者。關於研磨條件,發泡聚胺基甲酸酯墊使用LP-66,含有研磨材料粒子使用玻璃用研磨劑Luminox(平均粒徑0.75~1.25μm、比重1.05~1.15g/cm3之氧化鈰),將研磨速率設為0.07~0.10μm/min,將加工壓力設為約0.15kg/cm2,單面去除50μm以上且兩面合計去除150μm。 The above glass is used for being polished before being subjected to chemical strengthening treatment. For the polishing conditions, LP-66 is used for the foamed polyurethane pad, and Luminox (having an average particle diameter of 0.75 to 1.25 μm and a specific gravity of 1.05 to 1.15 g/cm 3 ) is used as the abrasive particles. The polishing rate was set to 0.07 to 0.10 μm/min, the processing pressure was set to be about 0.15 kg/cm 2 , the single side was removed by 50 μm or more, and the total of both surfaces was removed by 150 μm.

<實施例1> <Example 1>

於不鏽鋼(SUS)製之杯中加入硝酸鉀2568g、碳酸鉀321g、硝酸鈉111g,利用加熱套加熱至450℃而製備碳酸鉀8mol%、Na濃度為10000重量ppm之熔鹽。使用攪拌馬達、4片槳葉將所製備之熔鹽攪拌2小時,使整體混合均勻。 2568 g of potassium nitrate, 321 g of potassium carbonate, and 111 g of sodium nitrate were placed in a cup made of stainless steel (SUS), and heated to 450 ° C in a heating mantle to prepare a molten salt of 8 mol% of potassium carbonate and a concentration of Na of 10,000 ppm by weight. The prepared molten salt was stirred for 2 hours using a stirring motor and 4 blades to uniformly mix the whole.

將50mm×50mm×0.7mm之鋁矽酸鹽玻璃預熱至200℃~400℃後,於450℃之熔鹽中浸漬2小時而進行化學強化處理。強化處理後,利用50℃~90℃之離子交換水將玻璃洗淨2次,藉由室溫之離子交換水進行流水洗淨,於60℃下乾燥2小時。 The aluminum silicate glass of 50 mm × 50 mm × 0.7 mm was preheated to 200 ° C to 400 ° C, and then immersed in a molten salt of 450 ° C for 2 hours to carry out chemical strengthening treatment. After the strengthening treatment, the glass was washed twice with ion-exchanged water at 50 ° C to 90 ° C, washed with running water at room temperature with ion-exchanged water, and dried at 60 ° C for 2 hours.

測定所得之玻璃之各物性,算出D1/D3及C1。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 and C1 were calculated. The measurement results and the calculation results are shown in Table 2.

<實施例2、12> <Examples 2, 12>

於SUS製之杯中加入硝酸鉀402g、碳酸鉀47.9g,利用加熱套加 熱至450℃而製備碳酸鉀8mol%之熔鹽。使用攪拌馬達、4片槳葉將所製備之熔鹽攪拌2小時,使整體混合均勻。 Add 402g of potassium nitrate and 47.9g of potassium carbonate to the cup made of SUS. A molten salt of 8 mol% of potassium carbonate was prepared by heating to 450 °C. The prepared molten salt was stirred for 2 hours using a stirring motor and 4 blades to uniformly mix the whole.

以與實施例1相同之方式對鋁矽酸鹽玻璃(實施例2)或鈉鈣玻璃(實施例12)進行強化處理、洗淨及乾燥後,按以下之順序進行酸處理。 After the aluminosilicate glass (Example 2) or the soda lime glass (Example 12) was reinforced, washed, and dried in the same manner as in Example 1, the acid treatment was carried out in the following order.

於燒杯中準備1mol/L(1M)之鹽酸,使用水浴將溫度調整為40℃。藉由將經化學強化之玻璃於所製備之鹽酸中浸漬5分鐘而進行酸處理,其後利用離子交換水洗淨3次後,於60℃下乾燥2小時。 1 mol/L (1 M) of hydrochloric acid was prepared in a beaker, and the temperature was adjusted to 40 ° C using a water bath. The chemically strengthened glass was subjected to an acid treatment by immersing it in the prepared hydrochloric acid for 5 minutes, and then washed with ion-exchanged water for 3 times, and then dried at 60 ° C for 2 hours.

測定所得之玻璃之各物性,算出D1/D3。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 was calculated. The measurement results and the calculation results are shown in Table 2.

<實施例3> <Example 3>

以與實施例1相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥後,以與實施例2相同之方式進行酸處理。 The aluminosilicate glass was reinforced, washed, and dried in the same manner as in Example 1, and then subjected to an acid treatment in the same manner as in Example 2.

測定所得之玻璃之各物性,算出D1/D3及C1。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 and C1 were calculated. The measurement results and the calculation results are shown in Table 2.

<實施例4、5> <Examples 4 and 5>

於SUS製之杯中加入硝酸鉀2568g、碳酸鉀321g、硝酸鈉111g,利用加熱套加熱至450℃而製備碳酸鉀8mol%、Na濃度為10000重量ppm之熔鹽。使用攪拌馬達、4片槳葉將所製備之熔鹽攪拌2小時,使整體混合均勻。 To the cup made of SUS, 2568 g of potassium nitrate, 321 g of potassium carbonate, and 111 g of sodium nitrate were added, and the mixture was heated to 450 ° C by a heating mantle to prepare a molten salt of 8 mol% of potassium carbonate and a concentration of Na of 10,000 ppm by weight. The prepared molten salt was stirred for 2 hours using a stirring motor and 4 blades to uniformly mix the whole.

將化學強化處理時間設為0.5小時(實施例4)、1.0小時(實施例5),除此以外,以與實施例1相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥。 The aluminosilicate glass was reinforced, washed, and dried in the same manner as in Example 1 except that the chemical strengthening treatment time was 0.5 hours (Example 4) and 1.0 hour (Example 5).

測定所得之玻璃之各物性,算出D1/D3。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 was calculated. The measurement results and the calculation results are shown in Table 2.

<實施例6、7> <Examples 6, 7>

於SUS製之杯中加入硝酸鉀385g、碳酸鉀48g、硝酸鈉17g,利用加熱套加熱至450℃而製備碳酸鉀8mol%、Na濃度為10000重量ppm之熔鹽。使用攪拌馬達、4片槳葉將所製備之熔鹽攪拌2小時,使整體混合均勻。 385 g of potassium nitrate, 48 g of potassium carbonate, and 17 g of sodium nitrate were placed in a cup made of SUS, and heated to 450 ° C in a heating mantle to prepare a molten salt of 8 mol% of potassium carbonate and a concentration of Na of 10,000 ppm by weight. The prepared molten salt was stirred for 2 hours using a stirring motor and 4 blades to uniformly mix the whole.

將化學強化處理溫度設為430℃(實施例6)、470℃(實施例7),除此以外,以與實施例1相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥。 The aluminosilicate glass was reinforced, washed, and dried in the same manner as in Example 1 except that the chemical strengthening treatment temperature was 430 ° C (Example 6) and 470 ° C (Example 7).

測定所得之玻璃之各物性,算出D1/D3。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 was calculated. The measurement results and the calculation results are shown in Table 2.

<實施例8、9> <Examples 8, 9>

於SUS製之杯中加入硝酸鉀394g、碳酸鉀48g及硝酸鈉8g(實施例8)、硝酸鈉33g(實施例9),利用加熱套加熱至450℃而製備碳酸鉀8mol%、且Na濃度分別為5000重量ppm(實施例8)、20000重量ppm(實施例9)之熔鹽。除此以外,以與實施例1相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥。 394 g of potassium nitrate, 48 g of potassium carbonate, 8 g of sodium nitrate (Example 8), and 33 g of sodium nitrate (Example 9) were placed in a cup made of SUS, and heated to 450 ° C in a heating mantle to prepare potassium carbonate 8 mol% and Na concentration. The molten salt was 5000 ppm by weight (Example 8) and 20000 ppm by weight (Example 9), respectively. Otherwise, the aluminosilicate glass was reinforced, washed, and dried in the same manner as in Example 1.

測定所得之玻璃之各物性,算出D1/D3。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 was calculated. The measurement results and the calculation results are shown in Table 2.

<實施例10、11> <Examples 10 and 11>

以與實施例1相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥後,按以下之順序進行酸處理。 After the aluminosilicate glass was reinforced, washed, and dried in the same manner as in Example 1, the acid treatment was carried out in the following order.

於燒杯中準備1mol/L(1M)之HNO3(實施例10)、檸檬酸(實施例11),使用水浴將溫度調整為40℃。藉由將經化學強化之玻璃於所製備之鹽酸中浸漬5分鐘而進行酸處理,其後利用離子交換水洗淨3次後,於60℃下乾燥2小時。 1 mol/L (1 M) of HNO 3 (Example 10) and citric acid (Example 11) were prepared in a beaker, and the temperature was adjusted to 40 ° C using a water bath. The chemically strengthened glass was subjected to an acid treatment by immersing it in the prepared hydrochloric acid for 5 minutes, and then washed with ion-exchanged water for 3 times, and then dried at 60 ° C for 2 hours.

測定所得之玻璃之各物性,算出D1/D3。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 was calculated. The measurement results and the calculation results are shown in Table 2.

<比較例1、5> <Comparative Examples 1, 5>

對未進行化學強化處理之研磨後之鋁矽酸鹽玻璃(比較例1)、未研磨之鈉鈣玻璃(比較例5)之各物性進行測定,算出D1/D3。將玻璃基板之測定及算出結果示於表2。此處,所謂低密度層之密度D1係鋁矽酸鹽玻璃最表面之密度,所謂中間層之密度D3係[夾於壓縮應力層中之中間層/存在於上述玻璃中心部(未經離子交換)之中間層]之密度。 The physical properties of the aluminosilicate glass (Comparative Example 1) and the unpolished soda lime glass (Comparative Example 5) after the chemical strengthening treatment were measured, and D1/D3 was calculated. The measurement and calculation results of the glass substrate are shown in Table 2. Here, the density D1 of the low-density layer is the density of the outermost surface of the aluminosilicate glass, and the density D3 of the intermediate layer is [the intermediate layer sandwiched between the compressive stress layers/present in the center of the glass (not ion exchanged) The density of the middle layer].

<比較例2、6> <Comparative Examples 2, 6>

於SUS製之杯中加入硝酸鉀450g,利用加熱套加熱至450℃而製備碳酸鉀及Na濃度均為0之熔鹽。除此以外,以與實施例1相同之方式對鋁矽酸鹽玻璃(比較例2)或鈉鈣玻璃(比較例6)進行強化處理、洗淨及乾燥。 450 g of potassium nitrate was added to a cup made of SUS, and the mixture was heated to 450 ° C by a heating mantle to prepare a molten salt of potassium carbonate and Na having a concentration of 0. Otherwise, the aluminosilicate glass (Comparative Example 2) or the soda lime glass (Comparative Example 6) was reinforced, washed, and dried in the same manner as in Example 1.

測定所得之玻璃之各物性,算出D1/D3。又,亦算出比較例2之C1。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 was calculated. Further, C1 of Comparative Example 2 was also calculated. The measurement results and the calculation results are shown in Table 2.

<比較例3> <Comparative Example 3>

以與比較例2相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥後,按以下之順序進行酸處理。 After the aluminosilicate glass was reinforced, washed, and dried in the same manner as in Comparative Example 2, the acid treatment was carried out in the following order.

於燒杯中準備1mol/L(1M)之鹽酸,使用水浴將溫度調整為40℃。藉由將經化學強化之玻璃於所製備之鹽酸中浸漬5分鐘而進行酸處理,其後利用離子交換水洗淨數次後,於60℃下乾燥2小時。 1 mol/L (1 M) of hydrochloric acid was prepared in a beaker, and the temperature was adjusted to 40 ° C using a water bath. The chemically strengthened glass was subjected to an acid treatment by immersing it in the prepared hydrochloric acid for 5 minutes, and then washed with ion-exchanged water several times, and then dried at 60 ° C for 2 hours.

測定所得之玻璃之透過率、低密度層之密度D1,算出D1/D3。 The transmittance of the obtained glass and the density D1 of the low-density layer were measured, and D1/D3 was calculated.

<比較例4> <Comparative Example 4>

於SUS製之杯中加入硝酸鉀402g、碳酸鉀47.9g,利用加熱套加熱至450℃而製備碳酸鉀8mol%之熔鹽。使用攪拌馬達、4片槳葉將所製備之熔鹽攪拌2小時,使整體混合均勻。 To the cup made of SUS, 402 g of potassium nitrate and 47.9 g of potassium carbonate were added, and the mixture was heated to 450 ° C by a heating mantle to prepare a molten salt of 8 mol% of potassium carbonate. The prepared molten salt was stirred for 2 hours using a stirring motor and 4 blades to uniformly mix the whole.

以與實施例1相同之方式對鋁矽酸鹽玻璃進行強化處理、洗淨及乾燥。 The aluminosilicate glass was tempered, washed and dried in the same manner as in Example 1.

測定所得之玻璃之各物性,算出D1/D3及C1。將測定結果及算出結果示於表2。 The physical properties of the obtained glass were measured, and D1/D3 and C1 were calculated. The measurement results and the calculation results are shown in Table 2.

將實施例1~12及比較例1~6之玻璃基板或化學強化玻璃之處理條件示於表1,將各種評價結果示於表2。 The processing conditions of the glass substrate or the chemically strengthened glass of Examples 1 to 12 and Comparative Examples 1 to 6 are shown in Table 1, and various evaluation results are shown in Table 2.

再者,表2所示之實施例1、3及比較例2、4之C3之值並非藉由XPS及RBS-ERDA分析而得之實測值,而係利用以下所說明之方法求出。 Further, the values of C3 of Examples 1 and 3 and Comparative Examples 2 and 4 shown in Table 2 were not obtained by XPS and RBS-ERDA analysis, but were obtained by the method described below.

如實施例中之<玻璃>一項中記載般,本實施例及比較例所使用之鋁矽酸鹽玻璃之以莫耳%所表示之組成為SiO2 64.4%、Al2O3 8.0%、Na2O 12.5%、K2O 4.0%、MgO 10.5%、CaO 0.1%、SrO 0.1%、BaO 0.1%、ZrO2 0.5%。即,Si 21.1%、Al 5.2%、Na 8.2%、K 2.6%、Mg 3.4%、Ca 0.03%、Sr 0.03%、Ba 0.03%、Zr 0.2%、O 59.2%。 As described in the <glass> section of the examples, the composition of the aluminosilicate glass used in the examples and the comparative examples represented by mol% is SiO 2 64.4%, and Al 2 O 3 8.0%. Na 2 O 12.5%, K 2 O 4.0%, MgO 10.5%, CaO 0.1%, SrO 0.1%, BaO 0.1%, and ZrO 2 0.5%. That is, Si 21.1%, Al 5.2%, Na 8.2%, K 2.6%, Mg 3.4%, Ca 0.03%, Sr 0.03%, Ba 0.03%, Zr 0.2%, and O 59.2%.

據此可推算出中間層之(Na+K)/Si莫耳比為0.51。 From this, it can be inferred that the (Na+K)/Si molar ratio of the intermediate layer is 0.51.

又,作為例,圖2中揭示藉由RBS-ERDA分析而得之實施例1之距離表面500nm深度之區域之H及Si分佈。為了以深度記載藉由RBS-ERDA分析而得之分佈之橫軸,必須假定密度或膜厚。此處,將密度假定為7.97×1022atoms/cm3。較低密度層更深之區域之H為檢測下限以下(1莫耳%以下)。 Further, as an example, FIG. 2 discloses the distribution of H and Si in the region of the depth of 500 nm from the surface of Example 1 by RBS-ERDA analysis. In order to record the horizontal axis of the distribution obtained by RBS-ERDA analysis in depth, the density or film thickness must be assumed. Here, the density is assumed to be 7.97 × 10 22 atoms/cm 3 . H in the deeper region of the lower density layer is below the detection limit (1 mol% or less).

如文獻(S.Ilievski et al.,Glastech.Ber.Glass Sci.Technol.,73(2000)39.)所示,通常之玻璃塊中之H濃度為1莫耳%以下。因此,認為中間層之H濃度亦為1莫耳%以下。如上所述,玻璃中之Si為21.1莫耳%,故而可推算出H/Si莫耳比為0.05以下。 As shown in the literature (S. Ilievski et al., Glastech. Ber. Glass Sci. Technol., 73 (2000) 39.), the H concentration in a typical glass block is 1 mol% or less. Therefore, it is considered that the H concentration of the intermediate layer is also 1 mol% or less. As described above, Si in the glass is 21.1 mol%, so that the H/Si molar ratio can be estimated to be 0.05 or less.

根據以上內容,可認為實施例1、3及比較例2、4之中間層之H/(Na+K)莫耳比為0.1以下。 From the above, it is considered that the H/(Na+K) molar ratio of the intermediate layers of Examples 1 and 3 and Comparative Examples 2 and 4 is 0.1 or less.

根據表1及2所示之結果可知,實施例之密度比均未達1.0,故而具有化學強化玻璃表面經低密度化而成之低密度層。 According to the results shown in Tables 1 and 2, since the density ratio of the examples was less than 1.0, the low-density layer having a low density of the surface of the chemically strengthened glass was obtained.

詳細且參照特定之實施態樣對本發明進行了說明,但業者明確可不在脫離本發明之精神與範圍之情況下施加各種變更或修正。本申請案係基於2013年7月19日提出申請之日本專利申請案(日本專利特願2013-151115),將其內容作為參照而引用於本文中。 The present invention has been described in detail with reference to the specific embodiments thereof, and it is obvious that various changes or modifications may be made without departing from the spirit and scope of the invention. The present application is based on Japanese Patent Application No. 2013-151115, filed on Jan.

[產業上之可利用性] [Industrial availability]

根據本發明,可無需其他加工處理步驟而對化學強化玻璃實施低反射處理。進而,可大面積地獲得兩面已實施該低反射處理之低反射化學強化玻璃。其結果為,可以較低成本進行低反射化學強化玻璃之生產,可實現較高之生產性。 According to the present invention, the chemically strengthened glass can be subjected to a low reflection treatment without other processing steps. Further, it is possible to obtain a low-reflection chemically strengthened glass on both sides which has been subjected to the low-reflection treatment over a large area. As a result, the production of low-reflection chemically strengthened glass can be performed at a lower cost, and high productivity can be achieved.

1‧‧‧低密度層 1‧‧‧Low density layer

2‧‧‧壓縮應力層 2‧‧‧Compressive stress layer

3‧‧‧中間層 3‧‧‧Intermediate

Claims (7)

一種化學強化玻璃,其係於玻璃表面包含經離子交換之壓縮應力層者,且其包含將上述壓縮應力層之表面低密度化而成之低密度層,上述低密度層之厚度為5nm以上且200nm以下,且上述低密度層之密度(D1)與存在於玻璃中心部且夾於上述壓縮應力層中之中間層之密度(D3)的比(D1/D3)為0.5以上且未達0.93。 A chemically strengthened glass comprising an ion-exchanged compressive stress layer on a surface of a glass, comprising: a low-density layer obtained by densifying a surface of the compressive stress layer, wherein the low-density layer has a thickness of 5 nm or more and The ratio (D1/D3) of the density (D1) of the low-density layer to the density (D3) of the intermediate layer sandwiched in the central portion of the glass and the intermediate layer in the compressive stress layer is 0.5 or less and less than 0.93. 如請求項1之化學強化玻璃,其中上述低密度層之H/(Na+K)莫耳比(C1)大於上述中間層之H/(Na+K)莫耳比(C3),即(C1>C3)。 The chemically strengthened glass of claim 1, wherein the H/(Na+K) molar ratio (C1) of the low density layer is greater than the H/(Na+K) molar ratio (C3) of the intermediate layer, that is, (C1) >C3). 如請求項1或2之化學強化玻璃,其中上述低密度層之H/(Na+K)莫耳比(C1)為1.0以上。 The chemically strengthened glass according to claim 1 or 2, wherein the low density layer has a H/(Na+K) molar ratio (C1) of 1.0 or more. 如請求項1至3中任一項之化學強化玻璃,其中上述玻璃為鋁矽酸鹽玻璃或鈉鈣玻璃。 The chemically strengthened glass according to any one of claims 1 to 3, wherein the glass is an aluminosilicate glass or a soda lime glass. 一種化學強化玻璃之製造方法,其係藉由將玻璃浸漬於含有硝酸鉀之熔鹽中而將上述玻璃中之Na與上述熔鹽中之K進行離子交換者,且包括向上述熔鹽中添加選自由K2CO3、Na2CO3、KHCO3、NaHCO3、K3PO4、Na3PO4、K2SO4、Na2SO4、KOH及NaOH所組成之群中之至少1種鹽之步驟以及於上述離子交換後洗淨玻璃之步驟,進而包括使上述熔鹽中之Na濃度成為500重量ppm以上之步驟及於上述洗淨後對玻璃進行酸處理之步驟中之至少任一步驟。 A method for producing a chemically strengthened glass by ion-exchange of Na in the glass with K in the molten salt by immersing the glass in a molten salt containing potassium nitrate, and including adding the molten salt to the molten salt At least one selected from the group consisting of K 2 CO 3 , Na 2 CO 3 , KHCO 3 , NaHCO 3 , K 3 PO 4 , Na 3 PO 4 , K 2 SO 4 , Na 2 SO 4 , KOH, and NaOH The step of salt and the step of washing the glass after the ion exchange, and further comprising at least one of a step of increasing the Na concentration in the molten salt to 500 ppm by weight or more, and a step of subjecting the glass to acid treatment after the washing. step. 如請求項5之化學強化玻璃之製造方法,其同時包括使上述熔鹽 中之Na濃度成為500重量ppm以上之步驟、及於上述洗淨後對玻璃進行酸處理之步驟。 The method for producing a chemically strengthened glass according to claim 5, which comprises simultaneously making the above molten salt The step of neutralizing the Na concentration to 500 ppm by weight or more and subjecting the glass to acid treatment after the above washing. 如請求項5或6之化學強化玻璃之製造方法,其中使上述熔鹽中之Na濃度成為500重量ppm以上之步驟包括向上述熔鹽中添加Na鹽之步驟。 The method for producing a chemically strengthened glass according to claim 5 or 6, wherein the step of causing the Na concentration in the molten salt to be 500 ppm by weight or more comprises the step of adding a Na salt to the molten salt.
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