TW201510488A - Apparatus for determining the mass flow of a vapour transported in a carrier gas - Google Patents

Abstract

The invention relates to an apparatus for determining the mass flow of a vapour (2) of a solid or liquid starting material (3), which vapour is transported in a carrier gas (1), having a first mass flowmeter/controller (5) which provides a first measured value (M1) which corresponds to the mass flow of a carrier gas which has been fed in, having a vapour feed (7), a second mass flowmeter (8) which provides a second measured value (M2) which corresponds to the mass flow of a carrier gas vapour mixture (10), and having an electronic evaluation device (11) for forming an output value (A) corresponding to the mass flow of the vapour by relating the first measured value (M1) to the second measured value (M2), wherein the second mass flowmeter (8) has heated filaments (12, 13, 14) which are behind one another in the direction of flow and are each heated by a control device (16, 17, 18); to temperatures (T1, T2, T3) different from one another using an electrical current. The control device (16, 17, 18) is set up in such a manner that the temperature (T1, T2, T3) of each filament (12, 13, 14) is held at a predefined value by selecting an electrical power (P1 , P2, P3) which is fed into the particular filament (12, 13, 14), and the output value (A) is determined from the value of the powers (P1, P2 , P3) fed into the filaments (12, 13, 14) in each case.

Description

Device for determining the mass flow rate of steam transported by a carrier gas

The invention first relates to a device for determining the mass flow rate of steam of a solid or liquid feedstock carried by a carrier gas, comprising: a carrier gas feed passage for feeding a carrier gas, the mass flow of the carrier gas being obtainable by the first mass a flow meter/regulator measuring or regulating; a flow path connecting the mass flow meter in a flow direction, the flow path being in communication with the steam feed channel or having a steam generator in the flow path; and a second mass flow rate connecting the flow path along the flow direction a discharge passage disposed downstream of the second mass flow meter to discharge the carrier gas-steam mixture; and an electronic evaluation device for measuring the first mass flow meter/regulator and the second The measured value of the mass flow meter is associated with the output value, wherein the second mass flow meter has heating filaments, and the filaments are disposed one after another along the flow direction and are respectively heated by the control device by a current to each Not the same temperature.

The invention further relates to a method of determining the mass flow rate of steam from a solid or liquid feedstock carried by a carrier gas, wherein the carrier gas is directed by a carrier gas feed passage and a first mass flow meter/regulator, utilizing the first mass The flow meter/regulator determines or adjusts a mass flow value fed to the carrier gas, wherein the steam is fed or generated in a flow path disposed downstream of the first mass flow meter/regulator, wherein the flow is communicated with the flow path A second mass flow meter determines a mass flow value of the mixture of the carrier gas and the vapor, the mixture being discharged through a discharge passage, wherein the mass flow corresponding to the steam is determined by correlating the mass flow values An output value, wherein the second mass flow meter has heating filaments, the filaments being disposed one after another along the flow direction and heated by the control device to a different temperature by a current degree.

The invention further relates to an apparatus for use in any of the foregoing apparatus or any of the foregoing methods, wherein the mass flow meter has heating filaments disposed along the flow direction one by one and controlled by the control device respectively by an electric current Heat to different temperatures.

A description of the method and device of the aforementioned type can be found in DE 10 2011 051 931 A1. The carrier gas is fed into the mass flow regulator or mass flow meter using a carrier gas feed channel. The mass flow meter is used to measure the mass flow rate of the carrier gas, or if a mass flow regulator is used, it is used to adjust the mass flow rate of the carrier gas. The mass flow is mixed with the vapor of the liquid or solid feedstock in the mixing zone. To do this, the liquid or solid raw material is first converted into a gas gel. The gas gel then evaporates in the evaporator. The steam fed into the flow path or the steam generated inside the flow path in the above manner is then sent to a second mass flow meter, and the mass flow rate of the mixture of the carrier gas and the steam is determined by the second mass flow meter. The mass flow of steam is determined by correlating the two measurements. The second mass flow meter has filaments disposed one after another along the flow direction, with which the heat transfer from one filament to the other filament is measured. The carrier gas mass flow is subtracted from the mass flow of the carrier gas-steam mixture by this associated operation, leaving the mass flow of pure steam as an output value. By means of this mass flow, the steam feed (i.e., in particular the gas feed) can be adjusted so that the device can generate the steam at a regulated flow rate. This steam is sent to a coating apparatus in which steam flows from the heating inlet mechanism into the processing chamber. A substrate is provided in the processing chamber, which is placed flat on the cooling substrate carrier. The steam fed in quantitatively should be condensed into layers on this substrate. The carrier gas is fed to the first mass flow regulator at a pressure above atmospheric pressure. The pressure in the runner system located behind the first mass flow meter is between 1 mbar and 10 mbar. The first mass flow regulator acts as a throttle to some extent. The pressure in the downstream runner system is regulated by a pressure regulator that cooperates with a vacuum pump disposed downstream of the processing chamber.

EP 2 057 454 B1 describes a Pirani for measuring the pressure of vaporized organic materials Type vacuum gauge. It is heated by energizing two adjacent filaments. The filament temperature is measured by the change in resistance.

US 6,370,950 B1 and US 6,629,456 B2 disclose mass flow meters for measuring the mass flow rate of a gaseous medium. The temperature difference is maintained at zero by feeding the heating element a corresponding power.

US 8,069,718 B2 discloses a mass flow meter whose heating element maintains a temperature above the temperature of the gas. Impurities may accumulate on these heating elements. The temperature is kept constant by appropriate adjustment without being affected by possible accumulation of impurities.

A mass flow measuring device for mass flow through a Rahmentransport (...) fluid is also disclosed in US 2004/0040386 A1, US 2007/00251315 A1 and US 3,680,377.

It is an object of the present invention to provide a number of measures for determining mass flow with sufficient accuracy even at low total pressures.

In order to achieve the above object, the present invention firstly and primarily proposes a solution for maintaining the temperature of the filaments by a change in the power of the filaments, and determining the mass flow rate based on the value of the feed power. . The regulating device selects the power in such a way that the temperature of the filaments is maintained at a constant temperature without being affected by the flow conditions of the mass flow meter. In particular, an adjustment/control device is assigned to each filament in particular, by means of which the filament is adjusted to a predetermined temperature. Wherein, the first filament disposed along the flow direction maintains a first temperature which is lower than a temperature maintained by the second filament disposed downstream of the first filament. The filaments are so closely arranged side by side that the heat entering the gas also affects the adjacent filaments. For example, if the flow rate of the mass flow meter is zero, an isothermal field is formed around each filament. The upstream filament is not only heated by the electrical power fed to the filament. It is also heated by the heat transfer along the filaments flowing downstream. Here, heating is generally effected only by gas heat conduction, which gas has a total pressure of from 1 mbar to 10 mbar. Such The filaments are generally thermally decoupled from the solid environment (i.e., especially the carrier carrying the filaments). If a gas flows through the mass flow meter, the isothermal field around the filament will shift in the direction of flow. As a result, the upstream filament having a lower temperature is heated to a slightly lower degree by the heating power of the hot filament disposed downstream. Therefore, the filament must be fed with higher electrical power to better maintain the temperature constant.

In a preferred embodiment, three filaments are provided. The third filament is disposed behind the second filament along the flow direction. The temperature of the third filament is lower than the temperature of the second filament. When the flow stops in the mass flow meter, the third filament is affected by the heat flow emitted by the second filament. If a gas flows through the mass flow meter, the second filament delivers more heat to the third filament, in which case the heating power required to feed the third filament in order to keep the temperature of the third filament constant is reduced. The material used to make the filaments has a temperature dependent electrical resistance so that the filament temperature can be determined based on the current flowing through the filament and the voltage across the filament. The temperature maintained by the filaments is preferably lower than the steam decomposition temperature. However, this temperature is higher than the vapor condensation temperature. The temperature of the flow path through which the carrier gas-steam mixture flows is also higher than the vapor condensation temperature. One or more other filaments may be provided to, for example, determine the temperature of the carrier gas-steam mixture. There are thus a number of filaments that are placed one after the other along the flow. At least one lower temperature filament is provided upstream and downstream of the filament having the highest temperature. The other filaments are separated from the filament of the highest temperature by a distance such that heat transfer from the filament having the highest temperature to the downstream and upstream filaments is achieved by heat conduction through the gas. In a further development of the invention, at least one further filament is provided, which filament is arranged upstream or downstream of the aforementioned three filaments. The at least one filament is arranged in close proximity to the array of filaments consisting of three filaments so that heat is also transferred to the additional filament. In a modified solution, five filaments are arranged, which are arranged so closely side by side that the heat transfer between the two adjacent filaments is achieved by gas heat conduction. In this configuration, the two outermost filaments (i.e., the most upstream and downstream filaments) have the lowest temperatures, respectively, and the intermediate filaments have the highest temperature. The filaments disposed between the outermost filaments and the intermediate filaments are each at a temperature between the filaments adjacent the filaments. Feeding the corresponding power to keep the temperature constant, so the power to be supplied in order to keep the temperature constant can be determined Mass Flow. The additional sensor elements, which are composed of filaments, each have a temperature regulating device that is individually assigned thereto. This configuration can further reduce lateral sensitivity. In the operating state in which the gas is stationary inside the flow volume of the mass flow meter and has a total pressure of several millibars, heat transfer from the hotter filaments to the cooler filaments is achieved by gas heat conduction. If the gas flows through the flow volume of the mass flow meter, it also transfers heat through convection along the gas flow direction.

According to a further development, the filaments are arranged in a gas permeable first carrier. The carrier can be a foam that is generally disposed in the center of the flow cross section of the first pass. The end face of the carrier through which the carrier gas-steam mixture can flow into the carrier is less than 50% of the cross section of the flow. The foam is composed of a solid foam. The solid is heat resistant. The filaments are generally only joined to the edges of the carrier. The filaments are suspended through the cavity of the carrier, the carrier having a covering so that the fixed points of the filaments are assigned to the covering.

According to a further development of the invention, the first carrier is arranged in the second carrier. The second carrier constitutes a carrier for the first carrier. The carrier may also be composed of a foamed solid. The first solid foam for carrying the filaments has a pore width smaller than the pore width of the solid foam constituting the second carrier. Therefore, the specific flow resistance of the first carrier is greater than the specific flow resistance of the second carrier. The first carrier can have a cavity in which three filaments are placed next to each other in close proximity. The filaments may be arranged side by side in the cavity. The filaments disposed along the flow direction cover the filaments disposed downstream of the flow. The filaments may be in the form of a helix. Only the end is fixed to the carrier, so the heat flowing from the filament into the carrier is minimized. These filaments have a minimum thermal mass. It can be surrounded by a ceramic cover. The foam for receiving the filaments has two opposite end faces for the carrier gas-steam mixture to enter and exit. The wall of the cover disposed between the end walls is airtight. The cavity provided with filaments has a wall portion that is only clear in the direction of flow, so that substantially no gas can enter the cavity laterally transverse to the main flow. The first foam may have a pore width of 100 pores per inch. The second foam has only 45 pores per turn. The filaments are preferably constructed of tungsten and are similar to spiral filaments of incandescent lamps. The ends of the filaments are respectively connected to a feeder line composed of a constantan wire. The feeders are connected to adjustment devices that feed electrical power into the filaments and determine the filament temperature based on the current and voltage degree. The invention specifically follows a single regulator arrangement in which each filament is connected to a regulator assigned thereto. The regulators provide an output value corresponding to the power fed to the filament. The mass flow meter evaluation circuit uses a table or the like to determine the mass flow rate of the mixture of carrier gas and steam flowing through the mass flow meter based on the electrical power fed to the filament. Accuracy can be improved by this optional temperature sensor. The mass flow measurement is transmitted to an evaluation device that is part of the control device. The evaluation device subtracts the carrier gas mass flow value provided by the first mass flow meter from the mass flow value provided by the second mass flow meter, thereby leaving a net mass flow rate of steam as an output value. The superior regulator can use this output value to control the steam feed so that the carrier gas-steam mixture generator can provide a constant steam mass flow. On the one hand, the steam generation rate can be influenced by the amount of gas glue fed into the evaporator. However, the rate of steam generation can also be affected by changes in the carrier gas flow or changes in the evaporation rate of the evaporator (ie, through its temperature). The carrier gas-steam mixture produced in this manner is sent to a coating apparatus. The coating apparatus has a processing chamber into which a carrier gas-steam mixture is introduced by a heated air intake mechanism. Please refer to WO 2012/175124 for details. With regard to the generation and evaporation of the gas gel and how it is fed into the processing chamber, reference is also made to DE 10 2011 051 263 A1, the entire contents of which are incorporated herein. The same is true of DE 10 2011 051 931 A1, which discloses the basic principle of steam mass flow measurement.

The invention is illustrated below with reference to the accompanying drawings.

1‧‧‧ carrier gas

2‧‧‧Steam

3‧‧‧Materials

4‧‧‧ Carrier gas feed channel

5‧‧‧First mass flow meter

6‧‧‧ flow path

6'‧‧‧Runner

6"‧‧‧ flow path

7‧‧‧Steam feed device

8‧‧‧Second mass flowmeter

9‧‧‧Drainage channel

10‧‧‧Carrier-steam mixture

11‧‧‧Evaluation device

12‧‧‧ filament

12'‧‧‧ filament

13‧‧‧ filament

14‧‧‧ filament

14'‧‧‧ filament

15‧‧‧Film/temperature sensor

16‧‧‧Adjustment device

17‧‧‧Adjustment device

18‧‧‧ adjustment device

19‧‧‧Adjustment device

20‧‧‧ first carrier

21‧‧‧ Pipe fittings

22‧‧‧Second carrier

23‧‧‧First cavity

24‧‧‧ end face

25‧‧‧ end face

26‧‧‧ Cover wall

26'‧‧‧ Covered wall

27‧‧‧Ceramic cover

28‧‧‧ fixed point

29‧‧‧ Feeder

30‧‧‧ Wellbore

31‧‧‧Second cavity

32‧‧‧ storage container

33‧‧‧Spiral conveyor

34‧‧‧ gas gel generator

35‧‧‧Evaporator

A‧‧‧ output value

M ₁ ‧‧‧ measured value

M ₂ ‧‧‧ measured value

P ₁ ‧‧‧Power

P ₂ ‧‧‧Power

P ₃ ‧‧‧Power

P ₁ '‧‧‧ Power

P ₂ '‧‧‧ power

P ₃ '‧‧‧ power

T ₁ ‧‧‧temperature

T ₂ ‧‧‧temperature

T ₃ ‧‧‧temperature

T ₄ ‧‧‧temperature

X ₁ ‧‧‧ distance

X ₂ ‧‧‧ distance

X ₃ ‧‧‧ distance

1 is a schematic view of a first embodiment of the present invention; FIG. 2 is an enlarged view of the mass flow meter of FIG. 1 according to the present invention; FIG. 3 is a cross-sectional view of the mass flow meter of the present invention taken along line III-III; FIG. 5a is a cross-sectional view taken along the line IV-IV; FIG. 5a is a temperature distribution of the section of the mass flowmeter provided with the filaments 12, 13, 14; FIG. 5b is a temperature shown in FIG. 5a when the flow is stopped And must feed the filament 12, 13, 14 power; Figure 5c is the power P1', P3', P4' to feed the filaments 12, 13, 14 in order to reach the temperature shown in Figure 5a when gas flows through the mass flowmeter; Figure 6 4 is related to another embodiment; FIG. 7a is as shown in FIG. 5a, and is related to the embodiment shown in FIG. 4; FIG. 7b is as shown in FIG. 5b; and FIG. 7c is as shown in FIG. 5c.

Figure 1 is a schematic diagram of the basic components of the apparatus of the present invention. The carrier gas stream 1 is fed by a carrier gas feed channel 4 into a first mass flow meter 5, which may for example be hydrogen, nitrogen or a noble gas. Mass flow regulators are also available here. The mass flow meter 5 or mass flow regulator measures the mass flow rate of the carrier gas 1 fed into the carrier gas feed channel 4 in a conventional manner. This measured value M _{1 is} transmitted to the evaluation device 11. However, the carrier gas stream 1 can also be adjusted. If so, M ₁ is the mass flow through the mass flow regulator 5.

The mass flow of the carrier gas 1 flows through the flow passages 6, 6', 6" to the second mass flow meter 8. During this time, the vapor of the liquid or solid feedstock is fed into the flow passage 6 by the steam feed means 7. For example by the gas gel generator 34 The raw material 3 is converted into a gas gel. The gas gel is heated to convert it into steam. For example, a device as described in DE 10 2011 051 263 A1 can be used to generate steam. Figure 1 shows a storage container 32, which is conveyed by means of a screw The machine 33 feeds the powder from the storage container to the gas gel generator 34. The carrier gas flowing through the flow path 6 enters the gas gel generator 34. The powdery solid material 3 is injected into the carrier gas stream. The gas gel is transported by the flow path 6'. To the evaporator 35. The evaporator may be composed of a solid foam which is a conductive solid through which the solid-carrier gas mixture enters the foam through the foam pores of the conductive solid. The evaporator 35 is heated to the evaporation temperature by an electric current. Thereby, the solid component of the gas gel is evaporated. Then, the carrier gas 1 carries the vapor 2 it carries through the other channel 6".

Therefore, the generation of steam is carried out inside the flow paths 6, 6', 6". The carrier gas-steam mixture It is transported to the second mass flow meter 8 and has a mass flow measuring device composed of three filaments 12, 13, and 14. The three filaments 12, 13, 14 are arranged one after another along the flow direction. The filaments 12, 13, 14 are arranged in a line and are parallel.

A carrier 20 is provided to hold the filaments 12, 13, 14. Only the ends of the filaments 12, 13, 14 are held such that a minimum degree of heat transfer is formed between the filaments and the carrier comprised of the solid 20.

Carrier 20 is a solid foam 20. It forms a cavity 23 to provide the filaments 12, 13, 14. The filaments are each composed of a spiral filament used in a commercially available incandescent lamp. The spiral filaments are composed of tungsten but are coated with a ceramic material 27. The ceramic cover separates the metal screw filament from the gas flow. The ceramic material is such that opposite ends of the filaments are also joined to the edges of the carrier 20.

The filaments 12, 13, 14 are spaced apart from each other and are not in contact with each other. It also does not contact the side walls of the cavity 23. Only the cover 26' is fixed to the carrier 20 at both ends thereof.

The filaments are placed side by side in close contact with each other. This heat transfer is achieved by the heat conduction of the gas carried by the flow path 6. The gas preferably has a total pressure between 1 mbar and 10 mbar. In contrast, the degree of heat transfer to the carrier 20 at a fixed location is the lowest.

Each of the three filaments 12, 13, 14 is maintained at a constant temperature T ₁ , T ₂ , T ₃ by a single control/regulating device 16, 17, 18. The relevant temperature is shown in Figure 5a. T _C represents the vapor condensation temperature. As shown, the temperatures T ₁ , T ₂ , T _{3 of the} filaments 12, 13, 14 are above the condensation temperature.

Three filaments 13, 14 is provided disposed downstream from the empty chamber 15 of the other filaments, which maintain a constant temperature T ₄ in the control means 19 effect. The filament 15 can be used to measure the temperature of the gas. The filaments 15 are placed away from the other filaments 12, 13, 14 and are hardly affected by their temperature. In a variant not shown, the filaments 15 are arranged upstream of the three filaments 12, 13, 14.

The first carrier 20 is inserted in the second carrier 22, the second carrier holding the first carrier At a central position inside the flow cross section of the tubular member 21, a gas flow flows through the tubular member. The second carrier can likewise be composed of a solid foam. The pore width of the first solid foam is less than the pore width of the second solid foam. The outer carrier 22 fills the cross section of the tubular member 21 through which the gas flows. It has a wellbore 30 for the insertion of the inner carrier 20. Feed line 29 leading to filaments 12, 13, 14 runs through wellbore 30.

The cavity 23 provided with three filaments 12, 13, 14 flows only in the flow direction. The cavity 23 has a circumferentially closed wall portion 26, 26' in a direction transverse to the flow direction. The wall portions 26, 26' may be constructed of a ceramic material such as a mica sheet.

Figure 5b shows a tubular member 21 that is a mass flow meter 8 is de-energized to make the filaments 13, 14 to maintain the temperature of the power P T _1, T _2, T ₃ and to be provided _1, P _2, P _3. The temperature T ₁ of the first filament disposed along the flow direction is lower than the temperature T ₂ of the second filament 13 disposed along the flow direction. The temperature T ₃ of the third filament 14 disposed along the flow direction is still lower than the temperature T _{2 of the} intermediate filament. The temperatures T ₁ and T ₃ can be substantially equal.

Can also be seen from Figure 5b, the filament 13 to the intermediate holding temperature T ₂ to be fed and the power of the filament is higher than 12 or 14 in order to make the filament power P holding temperature T ₁ or T ₃ must be provided ₁ and P ₃ . In an embodiment, the powers T ₁ and T _{3 are} substantially equal. Since the filaments are different due to tolerances, the powers may not be equal.

Figure 5c shows the power P ₁ ', P ₂ ', P ₃ ' to be supplied in order for the filaments 12, 13, 14 to maintain the temperatures T ₁ , T ₂ , T ₃ as the gas flows through the mass flow meter 8 . As can be seen, the feeding power difference △ _P 12 filament and 14 is greater than the flow stop (FIG. 5b) of the power difference. The temperatures T ₁ , T ₂ , and T _{3 were} measured by the electric resistance of the filaments 12, 13, and 14.

The distance X _{1 of the} filaments 12, 13 is substantially equal to the distance X ₂ between the two filaments 13 and 14. These distances are on the order of the diameter of the ceramic covering 27, thereby ensuring that the filaments 12, 13, 14 can still exert a thermal influence on each other when the flow is stopped and the gas pressure is in the millibar range. For this purpose, the filaments 12, 13, 14 are also arranged in parallel. The filaments 15 are separated from the filaments 14 by a distance X _{3 that is} much larger than the distances X ₁ and X ₂ . The distance X _{3 is} so large that the filaments 12, 13, 14 cannot exert a heating effect on the filament 15. For this reason, it is also necessary to provide a section made of a porous material of the solid 20 between the cavity for accommodating the filaments 12, 13, 14 and the cavity 31 for accommodating the filament 15.

The variable electric powers P ₁ , P ₂ , P _{3 are} fed to the filaments 12, 13, 14 by the adjusting means 16, 17, 18. The magnitudes of the powers P ₁ , P ₂ , P ₃ are such that the filament temperatures T ₁ , T ₂ , T ₃ remain constant. The filaments 12, 13, 14 are dissipated as the gas flows through the flow path formed by the covering sleeves 26, 26', so that the filaments 12, 13, 14 are fed with higher power P ₁ , P ₂ , P ₃ . Since the isothermal field around the filaments 12, 13, 14 also changes, and each filament 12, 13, 14 is located in the isothermal field of the adjacent filaments 12, 13, 14 The mass flow rate is determined by the feed powers P ₁ , P ₂ , P ₃ varying in response to different flow conditions. The correlation value M _{2 is} transmitted to the evaluation device 11. The evaluation device differs between the mass flow value M ₂ and the mass flow value M ₁ provided by the first mass flow meter 5, so that the output signal A is separated from the entire measuring device via the discharge channel 9 and is not shown by another The fluid line is fed into the processing chamber (the related content is disclosed in DE 10 2011 051 931 A1). The net mass flow of the steam 10 leaves the processing chamber and enters the vacuum pump, whereby the pumping power is at least used to transport the carrier gas. - The total internal pressure of the flow passage 6" of the steam mixture is maintained in the low pressure range.

The carrier gas temperature T _G is measured by a filament 15 preferably disposed downstream of the filaments 12, 13, 14 to thereby improve the accuracy of the measured value M ₂ .

Figure 6, Fig. 4, is another embodiment in which five filaments 12', 12, 13, 14, 14' are provided in the cavity 23 of the carrier 20. Figure 7 is a temperature diagram of the filaments. In addition to the embodiment shown in Fig. 4, another filament 12' is provided upstream of the filament 12, which is maintained at a constant temperature by the adjustment means 16'. For this purpose, the power P ₄ needs to be fed into the filament 12'.

The other filament 14 is provided downstream of the filaments 14 ', adjustment means 18' to provide a power P ₆ so that the filaments 14 'maintaining the temperature T _6.

As shown in Fig. 7a, the filament 13 provided in the middle maintains the highest temperature T ₂ . The filaments 12 and 14 directly adjacent to the filament 13 maintain temperatures T ₁ and T ₃ which are lower than the temperature T ₂ . Two additional threads 12 ', 14' maintaining the temperature T ₅ and T _6. The two temperatures T ₅ and T _{6 are} lower than the temperatures T ₁ and T _{3 of the} adjacent filaments 12, 14. The filaments 12' and 14' are so closely disposed adjacent to the filaments 12 and 14 directly adjacent thereto such that the filaments 12' and 12 and 14 and 14' can exert thermal energy interaction with each other, that is, the gas will heat The filaments 12' are transferred to the filaments 12 or from the filaments 12 to the filaments 12', and heat is transferred from the filaments 14 to the filaments 14' or from the filaments 14' to the filaments 14. When the gas is at rest, the heat transfer mechanism of the carrier gas (which may be hydrogen, nitrogen, helium, argon or other rare gases) is heat conduction of the gas. When the carrier gas flows, the heat transfer is further convective. The total gas pressure is below 10 mbar. Since the outermost filaments ', 14' 12 the lowest temperature, i.e. the temperature of the filament 12 of the filament 12 is higher than T ₁ 'of the temperature T ₅ and the temperature T ₃ higher than the filament 14 of the filament 14' of the temperature T _6, Heat transfer is achieved by heat transfer from the filament 12 to the filament 12' and from the filament 14 to the filament 14'.

Figure 7b shows the operational state of no gas flowing through the mass flow meter. In this case, the powers P ₅ and P ₆ to be supplied in order to maintain the filaments 12', 14' at temperatures T ₅ and T ₆ are substantially equal, since the temperatures T ₅ and T _{6 are} also substantially equal. 14 is that the sensor 12 and the holding temperature T ₁ and T ₃ and the power required to provide P ₃ and P ₁ is relatively high. These powers are also substantially equal in the embodiment because the temperatures T ₁ and T ₃ are equal. The maximum power P ₂ is applied in order to heat the intermediate filament 13 to the highest temperature T ₂ .

If the gas flows through the mass flow meter in the direction of flow (from left to right in the figure), the heat is transferred from left to right. As a result, in order for the filament 12 'maintaining the temperature T ₅ must provide high heat P' _5. The same applies to the filament 12 and the power P' ₂ to be supplied for insulation. Power P _'3 lower than the filament 14 such that the holding temperature T ₃ is required to provide the power P _3. Power P _'6 is lower than that the same filament 14' while maintaining the temperature T ₆ shall be provided power P _6.

The foregoing embodiments are intended to illustrate the invention as embodied in the present application, which are separately constructed separately from the prior art by a combination of the following features: a device characterized by the control device (16, 17, 18) Designed to bring the temperature of each filament (12, 13, 14) by the electrical power (P ₁ , P ₂ , P ₃ ) fed into the respective filament (12, 13, 14) (T ₁ , T ₂ , T ₃ ) maintain the preset value and determine the output value (A) based on the value of the power (P ₁ , P ₂ , P ₃ ) fed to the filaments (12, 13, 14).

A method characterized in that the temperature of each filament (12, 13, 14) is made by selecting an electrical power (P ₁ , P ₂ , P ₃ ) fed to the respective filament (12, 13, 14) (T ₁ , T ₂ , T ₃ ) maintains a preset value and determines the output value (A) based on the value of the power (P ₁ , P ₂ , P ₃ ) fed to the filaments (12, 13, 14) .

A device, characterized in that the control device (16, 17, 18) is designed to be made by selecting an electric power (P ₁ , P ₂ , P ₃ ) fed into the respective filament (12, 13, 14) The temperature (T ₁ , T ₂ , T ₃ ) of each filament (12, 13, 14) is maintained at a preset value and is based on the power (P ₁ , P ₂ ) fed into the filaments (12, 13, 14) The value of P ₃ ) measures the mass flow rate.

A device characterized by having a self-adjusting device (16, 17, 18) provided for each filament (12, 13, 14) by means of which the filament (12, 13,14) Adjust to the preset temperature (T ₁ , T ₂ , T ₃ ).

An apparatus and a method, wherein the upstream of the first filament (12) maintaining the first temperature (T _1), disposed in the first temperature is lower than the first filament (12) downstream of the second filament (13) the maintained temperature (T ₂ ), and a third filament (14) is disposed at least in sections downstream of the second filament (13), the third filament maintaining a third temperature (T ₃ ), The third temperature is lower than the temperature (T ₂ ) maintained by the second filament (13).

An apparatus and a method, wherein those filaments (12,13,14) maintained temperature _{(T 1, T 2, T} 3) is lower than the vapor (2) of the decomposition temperature.

A device and a method, characterized in that the first mass flow meter/regulator (5) is provided with a carrier gas feed channel (4) in front of the steam feed device (7) and the second mass flow meter (8) Another flow path (6") is provided, and a discharge passage (9) is provided downstream of the second mass flow meter (8), wherein the passages (4, 6, 6', 6", 9) are maintained one The temperature is lower than the temperature (T ₁ , T ₂ , T ₃ ) of the filaments (12, 13, 14) but higher than the condensation temperature of the steam (2).

A device characterized by a temperature sensor (15) for determining the temperature of a mixture of the carrier gas (1) and the vapor (2).

A device characterized in that at least three, preferably at least four or five filaments (12', 12, 13, 14, 14') are arranged one after another along the flow direction, wherein two adjacent filaments are thermally coupled to each other.

A device characterized in that the filaments (12, 13, 14, 15) are provided in a gas permeable first carrier (20), in particular a first foam.

A device, characterized in that the first carrier (20) is inserted in a second carrier, in particular a second foam (22).

A device characterized in that the pores of the first foam body (20) are smaller than the pores of the second foam body (22).

A device, characterized in that the first foam body (20) has two opposite end faces (24, 25) and a peripheral surface (26, 26') adjacent to the end faces (24, 25), wherein the gas flows through the first The end face (24) enters the foam body (20) and can exit the foam body (20) via the opposite second end face (25) and is disposed on the circumferential surface between the two end faces (24, 25) (26, 26' ) Hermetic seal.

A device characterized in that the filaments (12, 13, 14, 15) are helically shaped and suspended between two opposing sheath wall segments of the carrier, and/or the filaments (12, 13,14,15) is coated with ceramic material (27).

A device characterized in that the foam body (20) has a cavity (23) in which the three filaments (12, 13, 14) are disposed.

A device characterized in that the foam has a second cavity (31) in which the temperature measuring filament (15) is disposed.

A device characterized in that the filaments (12, 13, 14) are thus thermally decoupled from the carrier (20) and arranged side by side such that when the total pressure is between 1 mbar and 10 mbar, the heat is relatively hot. The heat transfer of the filaments (13) to the cooler filaments (12, 14) is primarily gas heat conduction.

A device or a method, characterized in that the distance between the filaments (12, 13, 14) and the temperature (T ₁ , T ₃ ) are selected such that the temperatures of the filaments (T ₁ , T _{2 )} , T ₃ ) interact with each other.

All the revealed features (ie, themselves) are the essence of the invention. Therefore, the disclosure of the present application also contains all the contents disclosed in the related/attached priority file (copy of the prior application), and the features described in the files are also included in the scope of the patent application of the present application. The sub-items illustrate the features of the prior art improvements of the prior art using optional side-by-side wording, the main purpose of which is to make a divisional application on the basis of the claims.

12‧‧‧ filament

13‧‧‧ filament

14‧‧‧ filament

15‧‧‧Film/temperature sensor

16‧‧‧Adjustment device

17‧‧‧Adjustment device

18‧‧‧ adjustment device

19‧‧‧Adjustment device

20‧‧‧ first carrier

23‧‧‧First cavity

24‧‧‧ end face

25‧‧‧ end face

26‧‧‧ Cover wall

26'‧‧‧ Covered wall

27‧‧‧Ceramic cover

28‧‧‧ fixed point

31‧‧‧Second cavity

M ₂ ‧‧‧ measured value

P ₁ ‧‧‧Power

P ₂ ‧‧‧Power

P ₃ ‧‧‧Power

T _G ‧‧‧carrier gas temperature

X ₁ ‧‧‧ distance

X ₂ ‧‧‧ distance

X ₃ ‧‧‧ distance

Claims (18)

A device for determining the mass flow rate of steam (2) of a solid or liquid feedstock (3) transported by a carrier gas (1), comprising: a first mass flow meter/regulator (5) providing a feed corresponding to the feed a first measured value (M ₁ ) of the mass flow of the carrier gas; a flow path (6, 6', 6") connected to the first mass flow meter/regulator (5) along the flow of the carrier gas; steam feed a device (7); a second mass flow meter (8) connected to the flow channel (6, 6', 6") in a flow direction, which provides a second measurement corresponding to the mass flow rate of the carrier gas-steam mixture (10) a value (M ₂ ); and an electronic evaluation device (11) for correlating the first measurement value (M ₁ ) with the second measurement value (M ₂ ) to determine a quality corresponding to the steam The output value of the flow rate (A), wherein the second mass flow meter (8) has heating filaments (12, 13, 14) which are arranged one after another along the flow direction and are controlled by the control device (16, 17, 18) ) respectively heated to different temperatures (T ₁ , T ₂ , T ₃ ) by a current, characterized in that the control device (16, 17, 18) is designed to be selected by feeding a corresponding fine wire (13, 14) of the electrical power _{(P 1, P 2, P} 3) to enable each filament (13, 14) The temperature _{(T 1, T 2, T} 3) and preset values _{(P 1, P 2, P} 3) measured values of the output value (A filament in accordance with such feed (13, 14) of the power ). A method for determining the mass flow rate of steam (2) of a solid or liquid feedstock (3) transported by a carrier gas (1), wherein: a first mass flow meter/regulator (5) is provided corresponding to the feed carrier gas (1) a first measured value (M ₁ ) of the mass flow (M ₁ ); feeding the steam into a flow path (6, 6' disposed along the flow direction behind the first mass flow meter/regulator (5), 6"); a second mass flow meter (8) provides a second measurement (M2) corresponding to a mass flow of the mixture of the carrier gas (1) and the vapor ( ₂ ); The measured value (M ₁ ) is associated with the second measured value (M ₂ ) to determine an output value (A) corresponding to the mass flow rate of the steam, wherein the second mass flow meter (8) has a heating filament (12, 13, 14), the filaments are arranged one after another along the flow direction and heated by the control device (16, 17, 18) to different temperatures (T ₁ , T ₂ , T _{3 )} ) characterized in that the temperature of each filament (12, 13, 14) is made by selecting a power (P ₁ , P ₂ , P ₃ ) fed into the respective filament (12, 13, 14) ( _{T 1, T 2, T 3} ) preset values and measured values according to the feeding such filaments (12,13,14) of the power _{(P 1, P 2, P} 3) of the The output value (A). A device for determining mass flow, in particular for a device according to claim 1 or a method according to claim 2, in the form of a mass flow meter (8) having filaments (12, 13, 14) And at least two of the filaments are disposed one after another along the flow direction and can be heated by the control device (16, 17, 18) to different temperatures (T ₁ , T ₂ , T ₃ ) by a current, respectively. It is characterized in that the control device (16, 17, 18) is designed to make each fine by selecting an electric power (P ₁ , P ₂ , P ₃ ) fed into the corresponding filament (12, 13, 14) The temperature (T ₁ , T ₂ , T ₃ ) of the filaments (12, 13, 14) is maintained at a preset value and according to the power (P ₁ , P ₂ , P ₃ ) fed into the filaments (12, 13, 14) The value of this measure the mass flow. The device of claim 1 or the method of claim 2, characterized in that the control device has its own adjustment device (16, 17, 18) for each filament (12, 13, 14). The filaments (12, 13, 14) are adjusted by the adjustment device to the preset temperature (T ₁ , T ₂ , T ₃ ). The apparatus of claim 1 or the method of claim 2, wherein the upstream first filament (12) is maintained at a first temperature (T ₁ ), the first temperature being lower than the first filament ( 12) a temperature (T ₂ ) maintained by the downstream second filament (13), and a third filament (14) is at least segmented downstream of the second filament (13), the third filament remains The third temperature (T ₃ ) is lower than the temperature (T ₂ ) maintained by the second filament (13). The apparatus of claim 1 or the method of claim 2, wherein the filaments (12, 13, 14) maintain a temperature (T ₁ , T ₂ , T ₃ ) lower than the steam (2) Decomposition temperature. The device of claim 1 or the method of claim 2, characterized in that the first mass flow meter/regulator (5) is provided with a carrier gas feed channel (4) in front of the steam feed device (7) and Another flow path (6") is disposed between the two mass flow meters (8), and a discharge passage (9) is provided downstream of the second mass flow meter (8), wherein the passages (4, 6, 6' are made , 6", 9) maintain a temperature which is lower than the temperatures (T ₁ , T ₂ , T ₃ ) of the filaments (12, 13, 14) but higher than the condensation temperature of the steam (2). The apparatus of claim 1 characterized by a temperature sensing sensor (15) for determining the temperature of the mixture of the carrier gas (1) and the vapor (2). A device according to claim 1, characterized in that at least three, preferably at least four or five filaments (12', 12, 13, 14, 14') are arranged one after another along the flow direction, wherein two adjacent filaments are mutually connected Thermal energy coupling. A device according to claim 1, characterized in that the filaments (12, 13, 14, 15) are provided in a gas permeable first carrier (20), in particular a first foam. A device according to claim 1, characterized in that the first carrier (20) is inserted in a second carrier, in particular a second foam (22). A device according to claim 10, characterized in that the pores of the first foam (20) are smaller than the pores of the second foam (22). The device of claim 10, wherein the first foam body (20) has two opposite end faces (24, 25) and a peripheral surface (26, 26') adjacent to the end faces (24, 25), wherein the gas Flowing through the first end surface (24) into the foam body (20) and exiting the foam body (20) via the opposite second end surface (25), and disposed on the circumferential surface between the two end surfaces (24, 25) ( 26, 26') hermetic seal. The device of claim 1, wherein the filaments (12, 13, 14, 15) are helical and extend between the opposing sheath wall segments of the carrier, and/or the Silk (12, 13, 14, 15) is a ceramic material (27) covered. The device of claim 10, characterized in that the foam (20) has a cavity (23) in which the three filaments (12, 13, 14) are disposed. The device of claim 10, wherein the foam has a second cavity (31), and the temperature measuring filament (15) is disposed in the second cavity. A device according to claim 1, characterized in that the filaments (12, 13, 14) are thus thermally decoupled from the carrier (20) and arranged side by side such that when the total pressure is between 1 mbar and 10 mbar The heat transfer from the hot filaments (13) to the cooler filaments (12, 14) is primarily gas heat conduction. The apparatus of claim 1 or the method of claim 2, characterized in that the distance between the filaments (12, 13, 14) and the temperature (T ₁ , T ₃ ) are selected such that the filaments are The temperatures (T ₁ , T ₂ , T ₃ ) affect each other.