TW201510108A - Pigment dispersion, photosensitive resin composition containing pigment dispersion, and dispersion aid - Google Patents

Pigment dispersion, photosensitive resin composition containing pigment dispersion, and dispersion aid Download PDF

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TW201510108A
TW201510108A TW103126783A TW103126783A TW201510108A TW 201510108 A TW201510108 A TW 201510108A TW 103126783 A TW103126783 A TW 103126783A TW 103126783 A TW103126783 A TW 103126783A TW 201510108 A TW201510108 A TW 201510108A
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substituent
pigment
pigment dispersion
oxime ester
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TWI596164B (en
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Dai Shiota
Naoto Yamaguchi
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Tokyo Ohka Kogyo Co Ltd
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Abstract

The present invention provides a pigment dispersion, photosensitive resin composition containing pigment dispersion, and dispersion aid; the pigment dispersion constitutes a photosensitive resin composition; the photosensitive resin composition still has better stability of pigment dispersion even containing reduced amount of dispersion, and further forms highly-adhesive fine patterns under low amount of exposure. The pigment dispersion of the present invention comprises a pigment composed of nitrogen-containing aromatic compounds, a dispersant, an oxime ester compound and a solvent; said oxime ester compound comprises carbon atom in an oxime group which bonds together through containing the organic group and carbonyl group of the aromatic ring, and aromatic hydrocarbon ring or aromatic heterocyclic ring. The photosensitive resin composition of the present invention comprises a base resin, a photopolymerization initiator and the above-described pigment dispersion. The present invention has a dispersion aid composed of the above-described oxime ester compound.

Description

顏料分散液、含有該顏料分散液之感光性樹脂組成物、及分散助劑 Pigment dispersion, photosensitive resin composition containing the pigment dispersion, and dispersion aid

本發明關於顏料分散液、含有該顏料分散液之感光性樹脂組成物、及分散助劑。 The present invention relates to a pigment dispersion liquid, a photosensitive resin composition containing the pigment dispersion liquid, and a dispersion aid.

液晶面板具備用以強調影像對比的黑色矩陣(black matrix)、或一般由紅(R)、綠(G)、及藍(B)各種顏色構成之RGB的著色層所形成之彩色濾光片。此等之黑色矩陣或彩色濾光片,是藉由重複進行將分散有黑色或各顏色的顏料之感光性樹脂組成物塗佈於基板上,乾燥後將得到的塗膜曝光、顯影,形成期望的圖案而形成。為了製造如此的感光性樹脂組成物,是使用了分散有顏料之顏料分散液。例如,在專利文獻1中,揭示了一種顏料分散液,該顏料分散液含有顏料、溶劑、分散劑及特定的添加劑,該特定的添加劑具有偶氮基、醯胺基及羰基。 The liquid crystal panel is provided with a black matrix for emphasizing image contrast, or a color filter formed of RGB color layers generally composed of red (R), green (G), and blue (B) colors. Such a black matrix or a color filter is obtained by repeatedly applying a photosensitive resin composition in which a black or a pigment of each color is dispersed onto a substrate, and drying and then exposing and developing the obtained coating film to form a desired one. Formed by the pattern. In order to produce such a photosensitive resin composition, a pigment dispersion liquid in which a pigment is dispersed is used. For example, Patent Document 1 discloses a pigment dispersion liquid containing a pigment, a solvent, a dispersant, and a specific additive having an azo group, a guanamine group, and a carbonyl group.

[先前技術文獻] [Previous Technical Literature] (專利文獻) (Patent Literature)

專利文獻1:日本特開2012-087233號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2012-087233

近年,針對液晶面板的高解像度化,技術革新持續進展,正尋求RGB著色層的發色性的提升。針對用以形成RGB著色層之感光性樹脂組成物,藉由提高顏料的濃度,能夠謀求上述發色性的提升。然而,因為顏料的高濃度化,會導致上述感光性樹脂組成物對光的感度降低,例如,變得不易以低曝光量來形成良好形狀之圖案,曝光步驟中的生產性容易降低。 In recent years, technological innovation continues to advance in response to high resolution of liquid crystal panels, and improvement in color development of RGB colored layers is being sought. The coloring property can be improved by increasing the concentration of the pigment in the photosensitive resin composition for forming the RGB colored layer. However, the high sensitivity of the pigment causes the sensitivity of the photosensitive resin composition to light to be lowered. For example, it becomes difficult to form a pattern having a good shape with a low exposure amount, and the productivity in the exposure step is liable to lower.

又,若能減低顏料分散液中的分散劑的量,在由顏料分散液而得的感光性樹脂組成物中,對應分散劑的減少量,就能夠增加相當於該減少量的光聚合起始劑的量或光聚合性單體等之光聚合性化合物的量,能夠提高感光性樹脂組成物對光的感度。為此,尋求一種即使減少分散劑的含量,顏料的分散安定性仍良好的技術。 Further, if the amount of the dispersant in the pigment dispersion liquid can be reduced, in the photosensitive resin composition obtained from the pigment dispersion liquid, the amount of photopolymerization corresponding to the reduction amount can be increased in accordance with the amount of reduction of the dispersant. The amount of the agent or the amount of the photopolymerizable compound such as a photopolymerizable monomer can improve the sensitivity of the photosensitive resin composition to light. For this reason, a technique for achieving good dispersion stability of a pigment even if the content of the dispersant is reduced is sought.

本發明是鑑於如此以往的實情而完成,其目的在於提供一種顏料分散液、含有該顏料分散液之感光性樹脂組成物、及分散助劑,該顏料分散液能夠組成一種感光性樹脂組成物,該感光性樹脂組成物即使減少分散劑的含量,顏料的分散安定性仍良好,且即使低曝光量也能形成高黏附性的微小圖案。 The present invention has been made in view of the above circumstances, and an object thereof is to provide a pigment dispersion liquid, a photosensitive resin composition containing the pigment dispersion liquid, and a dispersion aid which can constitute a photosensitive resin composition. Even if the photosensitive resin composition reduces the content of the dispersant, the dispersion stability of the pigment is good, and a fine pattern having high adhesion can be formed even at a low exposure amount.

本案發明人等深入探討的結果,發現藉由在顏料分散液中添加特定的肟酯化合物,該特定的肟酯化合物含有由含氮芳香環化合物所構成的顏料,能夠解決上述問題而完成 本發明。具體而言,本發明提供以下技術。 As a result of intensive investigation by the inventors of the present invention, it has been found that by adding a specific oxime ester compound to the pigment dispersion liquid, the specific oxime ester compound contains a pigment composed of a nitrogen-containing aromatic ring compound, which can solve the above problems. this invention. In particular, the present invention provides the following techniques.

本發明之第一態樣是一種顏料分散液,其含有由含氮芳香環化合物所構成的顏料、分散劑、肟酯化合物及溶劑,上述肟酯化合物,是在包含於肟基上的碳原子,經由包含芳香環之有機基和羰基,與芳香族烴環或芳香族雜環鍵結而成者。 A first aspect of the present invention is a pigment dispersion containing a pigment, a dispersant, an oxime ester compound and a solvent composed of a nitrogen-containing aromatic ring compound, and the above oxime ester compound is a carbon atom contained on a sulfhydryl group. It is bonded to an aromatic hydrocarbon ring or an aromatic heterocyclic ring via an organic group containing an aromatic ring and a carbonyl group.

本發明之第二態樣是一種感光性樹脂組成物,其含有基材樹脂、光聚合起始劑及上述顏料分散液。 A second aspect of the present invention is a photosensitive resin composition comprising a base resin, a photopolymerization initiator, and the above pigment dispersion.

本發明之第三態樣是一種分散助劑,其由肟酯化合物所構成,上述肟酯化合物,是在包含於肟基上的碳原子,經由包含芳香環之有機基和羰基,與芳香族烴環或芳香族雜環鍵結而成者。 The third aspect of the present invention is a dispersing aid composed of an oxime ester compound which is a carbon atom contained on a mercapto group, an organic group and a carbonyl group containing an aromatic ring, and an aromatic group. A hydrocarbon ring or an aromatic heterocyclic bond is formed.

根據本發明,能夠提供一種顏料分散液、含有該顏料分散液之感光性樹脂組成物、及分散助劑,該顏料分散液能夠組成一種感光性樹脂組成物,該感光性樹脂組成物即使減少分散劑的含量,顏料的分散安定性仍良好,且即使低曝光量也能形成高黏附性的微小圖案。 According to the present invention, it is possible to provide a pigment dispersion liquid, a photosensitive resin composition containing the pigment dispersion liquid, and a dispersion aid which can constitute a photosensitive resin composition, and the photosensitive resin composition can be dispersed even if it is dispersed. The content of the agent, the dispersion stability of the pigment are still good, and a fine pattern with high adhesion can be formed even with a low exposure amount.

<顏料分散液> <Pigment dispersion>

關於本發明之顏料分散液,其含有由含氮芳香環化合物所構成的顏料、分散劑、肟酯化合物及溶劑。另外,關於本 發明之顏料分散液,不含光聚合性單體等之光聚合性化合物或光聚合起始劑等。 The pigment dispersion liquid of the present invention contains a pigment, a dispersant, an oxime ester compound and a solvent composed of a nitrogen-containing aromatic ring compound. In addition, about this The pigment dispersion liquid of the invention does not contain a photopolymerizable compound such as a photopolymerizable monomer or a photopolymerization initiator.

〔由含氮芳香環化合物所構成的顏料〕 [Pigments composed of nitrogen-containing aromatic ring compounds]

關於本發明之顏料分散液,其含有由含氮芳香環化合物所構成的顏料。關於本發明之顏料分散液,藉由含有如此的顏料,較佳使用於例如液晶顯示器的彩色濾光片、塗料、阻焊劑、噴墨用墨水等的形成。上述顏料能夠單獨或是組合2種以上來使用。 The pigment dispersion of the present invention contains a pigment composed of a nitrogen-containing aromatic ring compound. The pigment dispersion liquid of the present invention is preferably used for the formation of a color filter such as a liquid crystal display, a paint, a solder resist, an ink for inkjet, or the like, by containing such a pigment. These pigments can be used singly or in combination of two or more.

作為由含氮芳香環化合物所構成的顏料,並無特別限定,例如可舉出二酮基吡咯并吡咯(diketo-pyrrolo-pyrrole)系顏料、酞花青(phthalocyanine)系顏料、苝系顏料、偶氮系顏料、喹吖酮系顏料、苯并咪唑酮系顏料、異吲哚啉酮系顏料、二系顏料、陰丹士林系顏料等,較佳為使用二酮基吡咯并吡咯系顏料、酞花青系顏料、及/或苝系顏料。 The pigment composed of the nitrogen-containing aromatic ring compound is not particularly limited, and examples thereof include a diketo-pyrrolo-pyrrole pigment, a phthalocyanine pigment, an anthraquinone pigment, and Azo-based pigment, quinophthalone pigment, benzimidazolone pigment, isoindolinone pigment, two The pigment, the indanthrene pigment, and the like are preferably a diketopyrrolopyrrole pigment, a phthalocyanine pigment, and/or an anthraquinone pigment.

作為二酮基吡咯并吡咯系顏料,無特別限定,例如可舉出由下列式(b-1)表示之化合物。 The diketopyrrolopyrrole pigment is not particularly limited, and examples thereof include compounds represented by the following formula (b-1).

式(b-1)中,A3及A4各自獨立地表示鹵素原子、甲基、乙基、三級丁基、苯基、N,N-二甲胺基、三氟甲基、氰基,k及k’各自獨立地表示0~5之整數,當k及k’各自為2以上之整數時,多數的A3及A4亦可各自相同亦可各自相異。 In the formula (b-1), A 3 and A 4 each independently represent a halogen atom, a methyl group, an ethyl group, a tertiary butyl group, a phenyl group, an N,N-dimethylamino group, a trifluoromethyl group, or a cyano group. , k and k' each independently represent an integer of 0 to 5. When k and k' are each an integer of 2 or more, most of A 3 and A 4 may be the same or different.

在式(b-1),k及k’係各自獨立為0~5之整數。其中,從達成高對比,容易調整適合於彩色濾光片等之紅色的特點而言,k及k’較佳是各自獨立為0~3之整數,k及k’更佳是各自獨立為0或1之整數。 In the formula (b-1), k and k' are each independently an integer of 0 to 5. Among them, from the point of achieving a high contrast and easily adjusting the red color suitable for a color filter or the like, k and k' are preferably independent integers of 0 to 3, and k and k' are preferably independent of each other. Or an integer of 1.

作為二酮基吡咯并吡咯系顏料,其中,從可形成高亮度及高對比之彩色濾光片等的特點而言,較佳為C.I.顏料紅(Pigment Red)254、C.I.顏料紅255、C.I.顏料紅264、C.I.顏料紅270、C.I.顏料紅272、C.I.顏料橙(Pigment Orange)71、C.I.顏料橙73,從色相及著色力的特點而言,更佳為C.I.顏料紅254、C.I.顏料紅255。二酮基吡咯并吡咯系顏料能夠單獨1種或是組合2種以上來使用。 As the diketopyrrolopyrrole pigment, among the characteristics of a color filter capable of forming high brightness and high contrast, CI Pigment Red 254, CI Pigment Red 255, CI Pigment are preferred. Red 264, CI Pigment Red 270, CI Pigment Red 272, CI Pigment Orange 71, and CI Pigment Orange 73 are more preferably CI Pigment Red 254 or CI Pigment Red 255 from the characteristics of hue and color strength. The diketopyrrolopyrrole pigments can be used alone or in combination of two or more.

作為本發明所使用之二酮基吡咯并吡咯系顏料的平均一次粒徑,只要是可進行期望的發色者即可,並無特別限定。從提升對比的特點而言,較佳為在10~50nm的範圍內,更佳為在10~30nm的範圍內。藉由顏料的平均一次粒徑在上述範圍,例如,能夠將彩色濾光片作成高對比且高品質者。另外,上述顏料之平均粒徑,能夠以從電子顯微鏡照片直接量測一次粒子的大小之方法而求得。具體而言,量測每個一次粒子的短軸徑與長軸徑,將其平均作為其粒子之粒徑。其 次,針對100個以上的粒子,將各自粒子的體積(質量),以近似於求得之粒徑的長方體來求取,求得體積平均粒徑並將其作為平均粒徑。另外,使用穿透型(TEM)及掃描型(SEM)的任一種作為電子顯微鏡都可以得到相同結果。 The average primary particle diameter of the diketopyrrolopyrrole pigment used in the present invention is not particularly limited as long as it can produce a desired color. From the viewpoint of improving the contrast, it is preferably in the range of 10 to 50 nm, more preferably in the range of 10 to 30 nm. By the average primary particle diameter of the pigment in the above range, for example, the color filter can be made highly contrasted and of high quality. Further, the average particle diameter of the above pigment can be determined by a method of directly measuring the size of primary particles from an electron micrograph. Specifically, the minor axis diameter and the major axis diameter of each primary particle are measured, and the average is taken as the particle diameter of the particle. its In the case of 100 or more particles, the volume (mass) of each particle is obtained by a rectangular parallelepiped which approximates the obtained particle diameter, and the volume average particle diameter is determined and used as an average particle diameter. In addition, the same result can be obtained by using either of a transmission type (TEM) and a scanning type (SEM) as an electron microscope.

本發明所使用之二酮基吡咯并吡咯系顏料,能以再結晶法、溶解鹽磨(solvent salt milling)法等公知的方法來製造。又,亦可使用市售的二酮基吡咯并吡咯系顏料。 The diketopyrrolopyrrole pigment used in the present invention can be produced by a known method such as a recrystallization method or a solvent salt milling method. Further, a commercially available diketopyrrolopyrrole pigment can also be used.

作為酞花青系顏料,並無特別限定,例如可舉出以下列式(b-2)表示之化合物。 The phthalocyanine pigment is not particularly limited, and examples thereof include compounds represented by the following formula (b-2).

〔式中,X1~X4各自獨立地表示亦可具有取代基之烷基、亦可具有取代基之芳基、亦可具有取代基之環烷基、亦可具有取代基之雜環式基、亦可具有取代基之烷氧基、亦可具有取代基之芳氧基、亦可具有取代基之烷硫基,或亦可具有取代基之芳硫基。Y1~Y4各自獨立地表示鹵素原子、硝 基、亦可具有取代基之苯二甲醯亞胺甲基、或亦可具有取代基之胺磺醯基。M表示銅原子、鋅原子等金屬原子。m1、m2、m3、m4、n1、n2、n3、及n4各自獨立地表示0~4之整數,m1+n1、m2+n2、m3+n3、m4+n4各個為0~4之整數,可相同亦可相異。〕 [wherein, X 1 to X 4 each independently represent an alkyl group which may have a substituent, an aryl group which may have a substituent, a cycloalkyl group which may have a substituent, and a heterocyclic ring which may have a substituent The alkoxy group which may have a substituent, the aryloxy group which may have a substituent, the alkylthio group which may have a substituent, or the arylthio group which may have a substituent. Y 1 to Y 4 each independently represent a halogen atom, a nitro group, a benzyl quinone imine methyl group which may have a substituent, or an amine sulfonyl group which may have a substituent. M represents a metal atom such as a copper atom or a zinc atom. M1, m2, m3, m4, n1, n2, n3, and n4 each independently represent an integer of 0 to 4, and m1+n1, m2+n2, m3+n3, and m4+n4 are each an integer of 0 to 4, which may be The same can be different. 〕

通式(b-2)中,X1~X4可相同亦可相異,作為其具體例可舉出亦可具有取代基之烷基、亦可具有取代基之芳基、亦可具有取代基之環烷基、亦可具有取代基之雜環式基、亦可具有取代基之烷氧基、亦可具有取代基之芳氧基、亦可具有取代基之烷硫基、亦可具有取代基之芳硫基。上述X1~X4具有取代基時,取代基可相同亦可相異,作為其具體例,除了氟原子、氯原子、溴原子等鹵素原子及胺基、羥基、硝基等特性基之外,能夠舉出烷基、芳基、環烷基、烷氧基、芳氧基、烷硫基、芳硫基等。又,此等之取代基亦可為多數。 In the general formula (b-2), X 1 to X 4 may be the same or different, and specific examples thereof include an alkyl group which may have a substituent, an aryl group which may have a substituent, or a substitution. a cycloalkyl group, a heterocyclic group which may have a substituent, an alkoxy group which may have a substituent, an aryloxy group which may have a substituent, an alkylthio group which may have a substituent, or may have The arylthio group of the substituent. When the above X 1 to X 4 have a substituent, the substituents may be the same or different, and specific examples thereof include a halogen atom such as a fluorine atom, a chlorine atom or a bromine atom, and a characteristic group such as an amine group, a hydroxyl group or a nitro group. Examples thereof include an alkyl group, an aryl group, a cycloalkyl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and the like. Moreover, such substituents may also be a plurality.

作為亦可具有取代基之烷基的「烷基」,可舉出甲基、乙基、丙基、異丙基、丁基、異丁基、三級丁基、新戊基、正己基、正辛基、硬脂醯基、2-乙基己基等直鏈或支鏈烷基;作為「具有取代基之烷基」,可舉出三氯甲基、三氟甲基、2,2,2-三氟乙基、2,2-二溴乙基、2,2,3,3-四氟丙基、2-乙氧基乙基、2-丁氧基乙基、2-硝基丙基、苄基、4-甲基苄基、4-三級丙基苄基、4-甲氧基苄基、4-硝基苄基、2,4-二氯苄基等。 Examples of the "alkyl group" which may have a substituent alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tertiary butyl group, a neopentyl group, and a n-hexyl group. a straight-chain or branched alkyl group such as an n-octyl group, a stearyl group or a 2-ethylhexyl group; and the "alkyl group having a substituent" may, for example, be a trichloromethyl group, a trifluoromethyl group or a 2,2 group. 2-Trifluoroethyl, 2,2-dibromoethyl, 2,2,3,3-tetrafluoropropyl, 2-ethoxyethyl, 2-butoxyethyl, 2-nitropropyl Base, benzyl, 4-methylbenzyl, 4-triisopropyl benzyl, 4-methoxybenzyl, 4-nitrobenzyl, 2,4-dichlorobenzyl, and the like.

作為亦可具有取代基之芳基的「芳基」,可舉出苯基、萘基、蒽基等;作為「具有取代基之芳基」,可舉出對 甲基苯基、對溴苯基、對硝基苯基、對甲氧基苯基、2,4-二氯苯基、五氟苯基、2-胺基苯基、2-甲基-4-氯苯基、4-羥基-1-萘基、6-甲基-2-萘基、4,5,8-三氯-2-萘基、蒽醌基、2-胺基蒽醌基等。 Examples of the "aryl group" which may have an aryl group having a substituent include a phenyl group, a naphthyl group, an anthracenyl group and the like; and the "aryl group having a substituent" may be exemplified Methylphenyl, p-bromophenyl, p-nitrophenyl, p-methoxyphenyl, 2,4-dichlorophenyl, pentafluorophenyl, 2-aminophenyl, 2-methyl-4 -Chlorophenyl, 4-hydroxy-1-naphthyl, 6-methyl-2-naphthyl, 4,5,8-trichloro-2-naphthyl, anthracenyl, 2-aminoindenyl, etc. .

作為亦可具有取代基之環烷基的「環烷基」,可舉出環戊基、環己基、金剛烷基等;作為「具有取代基之環烷基」,可舉出2,5-二甲基環戊基、4-三級丁基環己基等。 Examples of the "cycloalkyl group" which may be a cycloalkyl group having a substituent include a cyclopentyl group, a cyclohexyl group, an adamantyl group and the like; and the "cycloalkyl group having a substituent" may, for example, be 2,5- Dimethylcyclopentyl, 4-tributylcyclohexyl and the like.

作為亦可具有取代基之雜環式基的「雜環式基」,可舉出吡啶基、吡唑基、哌啶基、哌喃基、嗎啉基、吖啶基等;作為「具有取代基之雜環式基」,可舉出3-甲基吡啶基、N-甲基哌啶基,N-甲基吡咯基等。 Examples of the "heterocyclic group" which may have a heterocyclic group of a substituent include a pyridyl group, a pyrazolyl group, a piperidinyl group, a piperidyl group, a morpholinyl group, an acridinyl group, and the like; Examples of the heterocyclic group of the group include a 3-methylpyridyl group, an N-methylpiperidinyl group, and an N-methylpyrrolyl group.

作為亦可具有取代基之烷氧基的「烷氧基」,可舉出甲氧基、乙氧基、丙氧基、異丙氧基、正丁氧基、異丁氧基、三級丁氧基、新戊氧基、2,3-二甲基-3-戊氧基、正己氧基、正辛氧基、硬脂醯氧基、2-乙基己氧基等直鏈或支鏈烷氧基;作為「具有取代基之烷氧基」,可舉出三氯甲氧基、三氟甲氧基、2,2,2-三氟乙氧基、2,2,3,3-四氟丙氧基、2,2-雙三氟甲基丙氧基、2-乙氧基乙氧基、2-丁氧基乙氧基、2-硝基丙氧基、苄氧基等。 Examples of the "alkoxy group" which may have a substituent alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a n-butoxy group, an isobutoxy group, and a tertiary butyl group. Straight or branched chain such as oxy, neopentyloxy, 2,3-dimethyl-3-pentyloxy, n-hexyloxy, n-octyloxy, stearyloxy, 2-ethylhexyloxy Alkoxy; as a "alkoxy group having a substituent", a trichloromethoxy group, a trifluoromethoxy group, a 2,2,2-trifluoroethoxy group, 2,2,3,3- Tetrafluoropropoxy, 2,2-bistrifluoromethylpropoxy, 2-ethoxyethoxy, 2-butoxyethoxy, 2-nitropropoxy, benzyloxy, and the like.

作為亦可具有取代基之芳氧基的「芳氧基」,可舉出苯氧基、萘氧基、蒽氧基等;作為「具有取代基之芳氧基」,可舉出對甲基苯氧基、對硝基苯氧基、對甲氧基苯氧基、2,4-二氯苯氧基、五氟苯氧基、2-甲基-4-氯苯氧基等。 Examples of the "aryloxy group" which may have an aryloxy group having a substituent include a phenoxy group, a naphthyloxy group, a decyloxy group, and the like; and the "aryloxy group having a substituent" includes a p-methyl group. Phenoxy, p-nitrophenoxy, p-methoxyphenoxy, 2,4-dichlorophenoxy, pentafluorophenoxy, 2-methyl-4-chlorophenoxy and the like.

作為亦可具有取代基之烷硫基的「烷硫基」,可舉 出甲硫基、乙硫基、丙硫基、丁硫基、戊硫基、己硫基、辛硫基、癸硫基、十二基硫基、十八基硫基等;作為「具有取代基之烷硫基」,可舉出甲氧基乙硫基、胺基乙硫基、苄胺基乙硫基、甲基羰基胺基乙硫基、苯基羰基胺基乙硫基等。 As the "alkylthio group" which may have a substituent alkylthio group, Methylthio, ethylthio, propylthio, butylthio, pentylthio, hexylthio, octylthio, sulfonylthio, dodecylthio, octadecylthio, etc.; Examples of the alkylthio group include a methoxyethylthio group, an aminoethylthio group, a benzylaminoethylthio group, a methylcarbonylaminoethylthio group, a phenylcarbonylaminoethylthio group and the like.

作為亦可具有取代基之芳硫基的「芳硫基」,可舉出苯硫基、1-萘硫基、2-萘硫基、9-蒽硫基等;作為「具有取代基之芳硫基」,可舉出氯苯硫基、三氟甲基苯硫基、氰基苯硫基、硝基苯硫基、2-胺基苯硫基、2-羥基苯硫基等。 Examples of the "arylthio group" which may have an arylthio group having a substituent include a phenylthio group, a 1-naphthylthio group, a 2-naphthylthio group, a 9-fluorenylthio group, and the like; Examples of the sulfur group include a chlorophenylthio group, a trifluoromethylphenylthio group, a cyanophenylthio group, a nitrophenylthio group, a 2-aminophenylthio group, and a 2-hydroxyphenylthio group.

其次,作為Y1~Y4的具體例,可舉出鹵素原子、硝基、亦可具有取代基之苯二甲醯亞胺甲基(C6H4(CO)2N-CH2-)、胺磺醯基(H2NSO2-)。又,所謂具有取代基之苯二甲醯亞胺甲基,表示苯二甲醯亞胺甲基中的氫原子羥由取代基所取代之結構,所謂具有取代基之胺磺醯基,表示胺磺醯基中的氫原子經由取代基所取代之結構。較佳的Y1~Y4為鹵素原子及胺磺醯基。m1~m4為0(換句話說,沒有Y1~Y4)之酞花青化合物亦可合適地使用。作為鹵素原子,可舉出氟原子、氯原子、溴原子、碘原子。作為亦可具有取代基之苯二甲醯亞胺甲基、及亦可具有取代基之胺磺醯基的「取代基」,係與X1~X4之取代基同義。 Next, specific examples of Y 1 to Y 4 include a halogen atom, a nitro group, and a benzoquinone imine methyl group (C 6 H 4 (CO) 2 N-CH 2 -) which may have a substituent. Aminesulfonyl (H 2 NSO 2 -). Further, the benzyl quinone imine methyl group having a substituent means a structure in which a hydrogen atom in a benzyl quinone imine methyl group is substituted with a substituent, and the amine sulfonyl group having a substituent means an amine. A structure in which a hydrogen atom in a sulfonyl group is substituted with a substituent. Desirable Y 1 to Y 4 are a halogen atom and an amine sulfonyl group. A phthalocyanine compound in which m1 to m4 are 0 (in other words, there is no Y 1 to Y 4 ) can be suitably used. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The "substituent" which may also have a substituent of a xylylenediamine methyl group and an aminesulfonyl group which may have a substituent is synonymous with a substituent of X 1 to X 4 .

作為酞花青系顏料,較佳為C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠37、C.I.顏料綠58、C.I.顏料藍16、C.I.顏料藍75、及C.I.顏料藍15(包含從15:1至15:6等)等,更佳為C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠58、C.I.顏料藍15:1~15:6。酞花青系顏料能夠單獨1種或是組合2 種以上來使用。 As the phthalocyanine pigment, CI Pigment Green 7, CI Pigment Green 36, CI Pigment Green 37, CI Pigment Green 58, CI Pigment Blue 16, CI Pigment Blue 75, and CI Pigment Blue 15 (including from 15: 1 to 15:6, etc.), more preferably CI Pigment Green 7, CI Pigment Green 36, CI Pigment Green 58, CI Pigment Blue 15:1 to 15:6.酞Cyanine pigments can be used alone or in combination 2 More than one kind to use.

本發明所使用的酞花青系顏料,能夠以公知的方法來製造。又,亦可使用市售之酞花青系顏料。 The phthalocyanine pigment used in the present invention can be produced by a known method. Further, commercially available phthalocyanine pigments can also be used.

作為苝系顏料,可舉出以下列式(e-1)表示之苝系顏料、下列式(e-2)表示之苝系顏料、及下列式(e-3)表示之苝系顏料。在市售品中,能夠較佳地使用BASF公司製之製品名K0084、及K0086或顏料黑21、30、31、32、33、及34等作為苝系顏料。 Examples of the fluorene-based pigments include an anthraquinone pigment represented by the following formula (e-1), an anthracene pigment represented by the following formula (e-2), and an anthracene pigment represented by the following formula (e-3). Among the commercially available products, product names K0084 and K0086 or pigment blacks 21, 30, 31, 32, 33, and 34 manufactured by BASF Corporation can be preferably used as the fluorene-based pigment.

式(e-1)中,Re1及Re2各自獨立地表示碳原子數1~3之伸烷基,Re3及Re4各自獨立地表示氫原子、羥基、甲氧基、或乙醯基。 In the formula (e-1), R e1 and R e2 each independently represent an alkylene group having 1 to 3 carbon atoms, and R e3 and R e4 each independently represent a hydrogen atom, a hydroxyl group, a methoxy group or an ethylidene group. .

式(e-2)中,Re5及Re6各自獨立地表示碳原子數1~7之伸烷基。 In the formula (e-2), R e5 and R e6 each independently represent an alkylene group having 1 to 7 carbon atoms.

式(e-3)中,Re7及Re8各自獨立為氫原子、碳原子數1~22之烷基,亦可含有N、O、S、或P之雜原子。Re7及Re8為烷基時,該烷基可為直鏈狀亦可為支鏈狀。 In the formula (e-3), R e7 and R e8 each independently represent a hydrogen atom, an alkyl group having 1 to 22 carbon atoms, and may contain a hetero atom of N, O, S or P. When R e7 and R e8 are an alkyl group, the alkyl group may be linear or branched.

以上述式(e-1)表示之化合物、以式(e-2)表示之化合物、及以式(e-3)表示之化合物,能夠使用例如日本特開昭62-1753號公報、日本特公昭63-26784號公報等中記載的方法來合成。亦即,將苝-3,5,9,10-四羧酸或其二酐與胺類作為原料,在水或有機溶劑中進行加熱反應。然後,藉由使獲得之粗製物在硫酸中予以再沈澱,或者,在水、有機溶劑或是此等之混合溶劑中予以再結晶能夠獲得目的物。 For example, a compound represented by the above formula (e-1), a compound represented by the formula (e-2), and a compound represented by the formula (e-3) can be used, for example, in Japanese Patent Laid-Open No. 62-1753, The method described in Japanese Patent Publication No. 63-26784 and the like is synthesized. That is, hydrazine-3,5,9,10-tetracarboxylic acid or a dianhydride thereof and an amine are used as a raw material, and a heating reaction is carried out in water or an organic solvent. Then, the object obtained can be obtained by reprecipitating the obtained crude product in sulfuric acid or by recrystallization in water, an organic solvent or a mixed solvent of these.

為了使苝系顏料良好地分散,苝系顏料的平均粒子徑較佳為10~1000nm。 In order to disperse the lanthanoid pigment well, the average particle diameter of the lanthanoid pigment is preferably from 10 to 1,000 nm.

此外,本發明之顏料分散液中,因調整色調之目的,亦可加入具有紫色、橙色、棕色、黃色等色調的由含氮芳香環化合物所構成的顏料。例如,可舉出:顏料紫1、1:1、2、2:2、3、3:1、3:3、5、5:1、14、15、16、19、23、25、27、29、31、32、36、37、38、39、42、44、47、49、50、溶劑紫(Solvent Violet)13、36等紫色顏料; C.I.顏料橙1、2、5、13、14、16、17、19、20、21、22、23、24、34、36、38、39、40、43、46、48、49、51、61、62、63、64、65、67、68、69、70、71、72、73、74、75、77、78、79等橙色顏料;C.I.顏料棕23、25等棕色顏料;C.I.顏料黃83、117、129、138、139、150、154、155、180、185等黃色顏料。 Further, in the pigment dispersion liquid of the present invention, a pigment composed of a nitrogen-containing aromatic ring compound having a hue of purple, orange, brown or yellow may be added for the purpose of adjusting the color tone. For example, pigment violet 1, 1:1, 2, 2: 2, 3, 3: 1, 3: 3, 5, 5: 1, 14, 15, 16, 19, 23, 25, 27, 29, 31, 32, 36, 37, 38, 39, 42, 44, 47, 49, 50, Solvent Violet 13, 36 and other purple pigments; CI Pigment Orange 1, 2, 5, 13, 14, 16, 17, 19, 20, 21, 22, 23, 24, 34, 36, 38, 39, 40, 43, 46, 48, 49, 51, 61 , 62, 63, 64, 65, 67, 68, 69, 70, 71, 72, 73, 74, 75, 77, 78, 79 and other orange pigments; CI pigment brown 23, 25 and other brown pigments; CI pigment yellow 83 Yellow pigments such as 117, 129, 138, 139, 150, 154, 155, 180, 185.

由含氮芳香環化合物所構成的顏料的含量,相對於本發明之顏料分散液的固體成分較佳為5~95質量%,更佳為25~90質量%。 The content of the pigment composed of the nitrogen-containing aromatic ring compound is preferably from 5 to 95% by mass, more preferably from 25 to 90% by mass, based on the solid content of the pigment dispersion liquid of the present invention.

〔分散劑〕 〔Dispersant〕

本發明之顏料分散液,係含有分散劑。若上述顏料分散液含有分散劑,則在上述顏料分散液中,顏料變得容易均勻地分散。分散劑可單獨使用,亦可併用2種以上使用。 The pigment dispersion of the present invention contains a dispersant. When the pigment dispersion liquid contains a dispersant, the pigment is easily dispersed uniformly in the pigment dispersion liquid. The dispersing agent may be used singly or in combination of two or more.

作為分散劑,舉出公知者,較佳為使用聚乙烯亞胺系高分子分散劑、胺甲酸酯樹脂系高分子分散劑、丙烯酸樹脂系高分子分散劑。 As a dispersing agent, a polyethyleneimine-based polymer dispersing agent, a urethane resin-based polymer dispersing agent, and an acrylic resin-based polymer dispersing agent are preferably used.

本發明之顏料分散液中的分散劑的含量,相對於顏料100質量份,較佳為1~50質量份,更佳為1~20質量份,進而更佳為1~15質量份。若分散劑的含量在上述之範圍,本發明之顏料分散液中的顏料變得更容易均勻地分散。又,由於上限越小,後述之感光性樹脂組成物中各成分的平衡性易於變得良好,能夠使該感光性樹脂組成物中其他成分的摻 合量相對地增加,因此使感度等其他特性易於提升。針對感度特性,特別是使用將感光波長吸收掉之藍色系顏料時的效果變得良好。 The content of the dispersant in the pigment dispersion liquid of the present invention is preferably from 1 to 50 parts by mass, more preferably from 1 to 20 parts by mass, even more preferably from 1 to 15 parts by mass, per 100 parts by mass of the pigment. If the content of the dispersant is in the above range, the pigment in the pigment dispersion of the present invention becomes more easily and uniformly dispersed. In addition, the lower the upper limit, the balance of each component in the photosensitive resin composition described later is likely to be good, and the other components in the photosensitive resin composition can be blended. The combination increases relatively, so that other characteristics such as sensitivity are easily improved. The effect on the sensitivity characteristics, particularly when a blue pigment that absorbs the photosensitive wavelength is used is good.

〔肟酯化合物〕 [肟 ester compound]

本發明之顏料分散液含有肟酯化合物,該肟酯化合物係在包含於肟基上的碳原子,經由包含芳香環之有機基和羰基,與芳香族烴環或芳香族雜環鍵結。此肟酯化合物,兼備作為光聚合起始劑之機能與作為分散助劑之機能。因此,含有由含氮芳香環化合物所構成的顏料之顏料分散液,若含有上述肟酯化合物,易於變得即使減少分散劑的含量,顏料的分散安定性仍良好。亦即,因為使用上述肟酯化合物,變得容易在不損及顏料的分散安定性下,而將顏料分散液中的分散劑的含量減少。結果,是用上述肟酯化合物來置換分散劑的一部分。上述肟酯化合物,由於也有作為光聚合起始劑的機能,上述的置換,相當於減少分散劑含量,增加光聚合起始劑含量。因此,從含有上述肟酯化合物之顏料分散液所獲得的感光性樹脂組成物中,能夠增加光聚合起始劑的含量,而容易由此感光性樹脂組成物以低曝光量形成高黏附性的微小圖案。上述肟酯化合物能夠單獨或是組合2種以上來使用。 The pigment dispersion liquid of the present invention contains an oxime ester compound which is bonded to an aromatic hydrocarbon ring or an aromatic heterocyclic ring via a carbon atom contained in the fluorenyl group via an organic group containing a aromatic ring and a carbonyl group. This oxime ester compound has both the function as a photopolymerization initiator and the function as a dispersing aid. Therefore, when the pigment dispersion liquid containing the pigment composed of the nitrogen-containing aromatic ring compound contains the above-described oxime ester compound, it is easy to make the dispersion stability of the pigment good even if the content of the dispersant is reduced. That is, since the above oxime ester compound is used, it becomes easy to reduce the content of the dispersing agent in the pigment dispersion liquid without impairing the dispersion stability of the pigment. As a result, a part of the dispersing agent is replaced with the above oxime ester compound. The above oxime ester compound has a function as a photopolymerization initiator, and the above substitution corresponds to a reduction in the dispersant content and an increase in the photopolymerization initiator content. Therefore, the content of the photopolymerization initiator can be increased from the photosensitive resin composition obtained from the pigment dispersion containing the above oxime ester compound, and the photosensitive resin composition can easily form a high adhesion with a low exposure amount. Tiny pattern. These oxime ester compounds can be used individually or in combination of 2 or more types.

由含氮芳香環化合物所構成的顏料中,π電子系係受到分子中所包含之氮原子的影響,與不含氮原子的情況比較下是不安定的狀態。因此,由含氮芳香環化合物所構成的顏料,分散安定性不易變得良好。本發明之顏料分散液所使 用的上述肟酯化合物,由於含有肟基及羰基,並且,在此等基鍵結有芳香環,而形成安定的π電子系。推測是在上述肟酯化合物與由含氮芳香環化合物所構成的顏料之間,產生π-π相互作用,分子彼此互相堆疊,使上述顏料的π電子系受到安定化。其結果,認為上述肟酯化合物,能夠提升由含氮芳香環化合物所構成的顏料的分散安定性。 Among the pigments composed of the nitrogen-containing aromatic ring compound, the π-electron system is affected by the nitrogen atoms contained in the molecule, and is in an unstable state as compared with the case where the nitrogen atom is not contained. Therefore, the pigment composed of the nitrogen-containing aromatic ring compound is less likely to be excellent in dispersion stability. The pigment dispersion of the present invention The above oxime ester compound has a sulfhydryl group and a carbonyl group, and an aromatic ring is bonded to the group to form a stable π-electron system. It is presumed that a π-π interaction occurs between the above oxime ester compound and a pigment composed of a nitrogen-containing aromatic ring compound, and the molecules are stacked on each other to stabilize the π-electron system of the above pigment. As a result, it is considered that the above oxime ester compound can improve the dispersion stability of the pigment composed of the nitrogen-containing aromatic ring compound.

上述肟酯化合物,能夠合適地作為分散助劑,特別是作為用以分散由含氮芳香環化合物所構成的顏料的分散助劑來使用。 The above oxime ester compound can be suitably used as a dispersing aid, and particularly as a dispersing aid for dispersing a pigment composed of a nitrogen-containing aromatic ring compound.

上述肟酯化合物中,作為包含芳香環之有機基,並無特別限定,例如可舉出亦可具有取代基之芳基。作為亦可具有取代基之芳基,可舉出於下述針對式(1)中之R1所例示的基。 The oxime ester compound is not particularly limited as the organic group containing an aromatic ring, and examples thereof include an aryl group which may have a substituent. The aryl group which may have a substituent may, for example, be a group exemplified for R 1 in the formula (1).

上述肟酯化合物中,作為芳香族烴環,並無特別限定,例如可舉出亦可具有取代基之芳基。又,上述肟酯化合物中,作為芳香族雜環,並無特別限定,例如可舉出亦可具有取代基之雜芳基。作為亦可具有取代基之芳基及亦可具有取代基之雜芳基,可舉出於下述針對式(1)中之R2所例示的基。 The oxime ester compound is not particularly limited as the aromatic hydrocarbon ring, and examples thereof include an aryl group which may have a substituent. Further, the oxime ester compound is not particularly limited as the aromatic heterocyclic ring, and examples thereof include a heteroaryl group which may have a substituent. Examples of the aryl group which may have a substituent and the heteroaryl group which may have a substituent include the groups exemplified for R 2 in the formula (1).

作為上述肟酯化合物,例如可舉出以下列式(1)表示之肟酯化合物。 The oxime ester compound is, for example, an oxime ester compound represented by the following formula (1).

(式中,R1表示亦可具有取代基之芳基,R2表示亦可具有取代基之芳基、或亦可具有取代基之雜芳基,R3表示氫原子或碳數1~6之烷基。) (wherein R 1 represents an aryl group which may have a substituent, R 2 represents an aryl group which may have a substituent, or a heteroaryl group which may have a substituent, and R 3 represents a hydrogen atom or a carbon number of 1 to 6 Alkyl.)

式(1)中,R1表示亦可具有取代基之芳基。作為亦可具有取代基之芳基,例如可舉出亦可具有取代基之苯基。 In the formula (1), R 1 represents an aryl group which may have a substituent. The aryl group which may have a substituent may, for example, be a phenyl group which may have a substituent.

R1中,芳基或苯基亦可具有之取代基,在不妨礙本發明目的之範圍並無特別限定。作為苯基亦可具有之適宜的取代基之例,可舉出烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、飽和脂肪族醯氧基、烷氧羰基、亦可具有取代基之苯基、亦可具有取代基之苯氧基、亦可具有取代基之苯硫基、亦可具有取代基之苯甲醯基、亦可具有取代基之苯氧羰基、亦可具有取代基之苯甲醯氧基基、亦可具有取代基之苯烷基、亦可具有取代基之萘基、亦可具有取代基之萘氧基、亦可具有取代基之萘甲醯基,亦可具有取代基之萘氧羰基、亦可具有取代基之萘甲醯氧基、亦可具有取代基之萘烷基、亦可具有取代基之雜環基,亦可具有取代基之雜環羰基、胺基、經1或2個有機基取代之胺基、嗎福啉-1-基、哌-1-基、鹵素原子、硝基、及氰基等。 In R 1 , the aryl group or the phenyl group may have a substituent, and the scope of the object of the present invention is not particularly limited. Examples of suitable substituents which the phenyl group may have include an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic fluorenyl group, a saturated aliphatic decyloxy group, an alkoxycarbonyl group, and the like. a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a phenylthio group which may have a substituent, a benzamyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a benzyl methoxy group having a substituent, a phenylalkyl group which may have a substituent, a naphthyl group which may have a substituent, a naphthyloxy group which may have a substituent, and a naphthyl group which may have a substituent A mercapto group, a naphthyloxycarbonyl group having a substituent, a naphthylmethoxy group which may have a substituent, a naphthyl group which may have a substituent, a heterocyclic group which may have a substituent, or a substituent a heterocyclic carbonyl group, an amine group, an amine group substituted with 1 or 2 organic groups, a phenanthroline-1-yl group, a piperidine a -1- group, a halogen atom, a nitro group, a cyano group, and the like.

取代基為烷基時,較佳為碳數1~20,更佳為碳數1 ~6。取代基為烷基時,可為直鏈亦可為支鏈。作為取代基為烷基時的具體例,可舉出甲基、乙基、正丙基、異丙基、正丁基、異丁基、二級丁基、三級丁基、正戊基、異戊基、二級戊基、三級戊基、正己基、正庚基、正辛基、異辛基、二級辛基、三級辛基、正壬基、異壬基、正癸基、及異癸基等。又,取代基為烷基時,烷基亦可在碳鏈中含有醚鍵(-O-)。作為碳鏈中具有醚鍵的烷基之例,可舉出甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧基乙基、及甲氧基丙基等。 When the substituent is an alkyl group, it preferably has a carbon number of 1 to 20, more preferably a carbon number of 1. ~6. When the substituent is an alkyl group, it may be a straight chain or a branched chain. Specific examples of the case where the substituent is an alkyl group include a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, an isobutyl group, a secondary butyl group, a tertiary butyl group, and a n-pentyl group. Isoamyl, secondary pentyl, tertiary pentyl, n-hexyl, n-heptyl, n-octyl, isooctyl, secondary octyl, tertiary octyl, n-decyl, isodecyl, n-decyl , and different bases, etc. Further, when the substituent is an alkyl group, the alkyl group may have an ether bond (-O-) in the carbon chain. Examples of the alkyl group having an ether bond in the carbon chain include a methoxyethyl group, an ethoxyethyl group, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, and a propoxy group B. Oxyethyl, methoxypropyl and the like.

取代基為烷氧基時,較佳為碳數1~20,更佳為碳數1~6。又,取代基為烷氧基時,可為直鏈亦可為支鏈。作為取代基為烷氧基時的具體例,可舉出甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、二級丁氧基、三級丁氧基、正戊氧基、異戊氧基、二級戊氧基、三級戊氧基、正己氧基、正庚氧基、正辛氧基、異辛氧基、二級辛氧基、三級辛氧基、正壬氧基、異壬氧基、正癸氧基、及異癸氧基等。再者,取代基為烷氧基時,烷氧基亦可在碳鏈中含有醚鍵(-O-)。作為碳鏈中具有醚鍵之烷氧基的例,可舉出甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基、及甲氧基丙氧基等。 When the substituent is an alkoxy group, it preferably has a carbon number of from 1 to 20, more preferably a carbon number of from 1 to 6. Further, when the substituent is an alkoxy group, it may be a straight chain or a branched chain. Specific examples of the case where the substituent is an alkoxy group include a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, an isobutoxy group, a secondary butoxy group, and the like. Butoxy, n-pentyloxy, isopentyloxy, secondary pentyloxy, tertiary pentyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyloxy, secondary octyloxy a group, a tertiary octyloxy group, a n-decyloxy group, an isodecyloxy group, a n-decyloxy group, an isodecyloxy group, and the like. Further, when the substituent is an alkoxy group, the alkoxy group may have an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include a methoxyethoxy group, an ethoxyethoxy group, a methoxyethoxyethoxy group, and an ethoxyethoxyethoxy group. , propoxyethoxyethoxy, and methoxypropoxy.

取代基為環烷基或環烷氧基時,較佳為碳數3~10,更佳為碳數3~6。作為取代基為環烷基時的具體例,可舉出環丙基、環丁基、環戊基、環己基、環庚基、及環辛基等。作為取代基為環烷氧基時的具體例,可舉出環丙氧基、環丁 氧基、環戊氧基、環己氧基、環庚氧基、及環辛氧基等。 When the substituent is a cycloalkyl group or a cycloalkoxy group, it preferably has a carbon number of 3 to 10, more preferably a carbon number of 3 to 6. Specific examples of the case where the substituent is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Specific examples of the case where the substituent is a cycloalkoxy group include a cyclopropoxy group and a cyclobutene. An oxy group, a cyclopentyloxy group, a cyclohexyloxy group, a cycloheptyloxy group, a cyclooctyloxy group, and the like.

取代基為飽和脂肪族醯基或飽和脂肪族醯氧基時,較佳為碳數2~20,更佳為碳數2~7。作為取代基為飽和脂肪族醯基時的具體例,可舉出乙醯基、丙醯基、正丁醯基、2-甲基丙醯基、正戊醯基、2,2-二甲基丙醯基、正己醯基、正庚醯基、正辛醯基、正壬醯基、正癸醯基、正十一醯基、正十二醯基、正十三醯基、正十四醯基、正十五醯基、及正十六醯基等。作為取代基為飽和脂肪族醯氧基時的具體例,可舉出乙醯氧基、丙醯氧基、正丁醯氧基、2-甲基丙醯氧基、正戊醯氧基、2,2-二甲基丙醯氧基、正己醯氧基、正庚醯氧基、正辛醯氧基、正壬醯氧基、正癸醯氧基、正十一醯氧基、正十二醯氧基、正十三醯氧基、正十四醯氧基、正十五醯氧基、及正十六醯氧基等。 When the substituent is a saturated aliphatic fluorenyl group or a saturated aliphatic fluorenyloxy group, it preferably has a carbon number of 2 to 20, more preferably a carbon number of 2 to 7. Specific examples of the case where the substituent is a saturated aliphatic fluorenyl group include an ethyl fluorenyl group, a propyl fluorenyl group, a n-butyl fluorenyl group, a 2-methyl propyl fluorenyl group, a n-pentamethylene group, and a 2,2-dimethyl propyl hydrazine group. Base, positive hexyl group, n-heptyl sulfhydryl group, n-octyl sulfhydryl group, n-decyl group, n-decyl group, positive eleventh fluorenyl group, positive zirconium group, positive thirteenth fluorenyl group, positive fourteenth fluorenyl group, positive ten Wuyiji, and Zhengliujiji, etc. Specific examples of the case where the substituent is a saturated aliphatic oxime group include an ethoxycarbonyl group, a propenyloxy group, a n-butenyloxy group, a 2-methylpropenyloxy group, a n-pentamoxy group, and 2 ,2-dimethylpropoxycarbonyl, n-hexyloxy, n-heptyloxy, n-octyloxy, n-decyloxy, n-decyloxy, n-decyloxy, n-xyl Alkoxy, n-tridecyloxy, n-tetradecyloxy, n-pentadecyloxy, n-hexadecanoyloxy and the like.

取代基為烷氧羰基時,較佳為碳數2~20,更佳為碳數2~7。作為取代基為烷氧羰基時的具體例,可舉出甲氧羰基、乙氧羰基、正丙氧羰基、異丙氧羰基、正丁氧羰基、異丁氧羰基、二級丁氧羰基、三級丁氧羰基、正戊氧羰基、異戊氧羰基、二級戊氧羰基、三級戊氧羰基、正己氧羰基、正庚氧羰基、正辛氧基羰基、異辛氧基羰基、二級辛氧羰基、三級辛氧羰基、正壬氧羰基、異壬氧羰基、正癸氧羰基、及異癸氧羰基等。 When the substituent is an alkoxycarbonyl group, it preferably has a carbon number of 2 to 20, more preferably a carbon number of 2 to 7. Specific examples of the case where the substituent is an alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, a n-propoxycarbonyl group, an isopropoxycarbonyl group, a n-butoxycarbonyl group, an isobutoxycarbonyl group, a secondary butoxycarbonyl group, and the like. Butyroxycarbonyl, n-pentyloxycarbonyl, isopentyloxycarbonyl, secondary pentyloxycarbonyl, tertiary pentyloxycarbonyl, n-hexyloxycarbonyl, n-heptyloxycarbonyl, n-octyloxycarbonyl, isooctyloxycarbonyl, secondary Octyloxycarbonyl, tertiary octyloxycarbonyl, n-nonyloxycarbonyl, isodecyloxycarbonyl, n-decyloxycarbonyl, isodecyloxycarbonyl, and the like.

取代基為亦可具有取代基之苯烷基時,較佳為碳數7~20,更佳為碳數7~10。又,取代基為亦可具有取代基之萘烷基時,較佳為碳數11~20,更佳為碳數11~14。作為取 代基為亦可具有取代基之苯烷基時的具體例,可舉出苄基、2-苯乙基、3-苯丙基、及4-苯丁基。作為取代基為亦可具有取代基之萘烷基時的具體例,可舉出α-萘甲基、β-萘甲基、2-(α-萘基)乙基、及2-(β-萘基)乙基。 When the substituent is a phenylalkyl group which may have a substituent, the carbon number is preferably from 7 to 20, more preferably from 7 to 10. Further, when the substituent is a naphthyl group which may have a substituent, the number of carbon atoms is preferably from 11 to 20, more preferably from 11 to 14. Specific examples of the case where the substituent is a phenylalkyl group which may have a substituent include a benzyl group, a 2-phenylethyl group, a 3-phenylpropyl group, and a 4-phenylbutyl group. Specific examples of the case where the substituent is a naphthyl group which may have a substituent include α -naphthylmethyl, β -naphthylmethyl, 2-( α -naphthyl)ethyl, and 2-( β- Naphthyl)ethyl.

取代基為亦可具有取代基之雜環基時,上述雜環基為含有1個以上之N、S、O的5員或6員之單環,抑或,相關單環彼此或相關單環與苯環縮合之雜環基。上述雜環基為縮合環時,設在環數至3為止者。作為構成相關雜環基之雜環,可舉出呋喃、噻吩、吡咯、唑(oxazole)、異唑、噻唑、噻二唑、異噻唑、咪唑、吡唑、三唑、吡啶、吡(pyrazine)、嘧啶、嗒(pyridazine)、苯并呋喃、苯并噻吩、吲哚、異吲哚、吲(indolizine)、苯并咪唑、苯并三唑,苯并唑、苯并噻唑、咔唑、嘌呤、喹啉、異喹啉、喹唑啉、呔(phthalazine)、啉(cinnoline)、及喹啉(quinoxaline)等。 When the substituent is a heterocyclic group which may have a substituent, the above heterocyclic group is a single ring of 5 or 6 members containing one or more of N, S, and O, or a related single ring or a related single ring and a heterocyclic group in which a benzene ring is condensed. When the above heterocyclic group is a condensed ring, it is provided in the number of rings to 3. Examples of the heterocyclic ring constituting the related heterocyclic group include furan, thiophene, and pyrrole. Oxazole Oxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyridyl (pyrazine), pyrimidine, pyrene (pyridazine), benzofuran, benzothiophene, hydrazine, isoindole, hydrazine (indolizine), benzimidazole, benzotriazole, benzo Azole, benzothiazole, carbazole, anthracene, quinoline, isoquinoline, quinazoline, anthracene (phthalazine), Cinnoline, and quinine Quinoxaline and the like.

取代基為經1或2個有機基取代之胺基時,作為有機基的合適之例,可舉出:碳數1~20之烷基、碳數3~10之環烷基、碳數2~20之飽和脂肪族醯基、亦可具有取代基之苯基、亦可具有取代基之苯甲醯基、亦可具有取代基之碳數7~20之苯烷基、亦可具有取代基之萘基、亦可具有取代基之萘甲醯基、亦可具有取代基之碳數11~20之萘烷基、及雜環基等。此等之合適的有機基之具體例,與在上述針對取代基所例示者相同。作為經1或2個有機基取代之胺基的具體例,可舉出甲胺基、乙胺基、二乙胺基、正丙胺基、二-正丙胺基、異丙胺基、正丁胺基、二-正丁胺基、正戊胺基、正 己胺基、正庚胺基、正辛胺基、正壬胺基、正癸胺基、苯胺基、萘胺基、乙醯胺基、丙醯胺基、正丁醯胺基、正戊醯胺基、正己醯胺基、正庚醯胺基、正辛醯胺基、正癸醯胺基、苯甲醯胺基、α-萘甲醯胺基、及β-萘甲醯胺基等。 When the substituent is an amine group substituted with 1 or 2 organic groups, a suitable example of the organic group is an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, and a carbon number of 2 a saturated aliphatic fluorenyl group of ~20, a phenyl group which may have a substituent, a benzyl fluorenyl group which may have a substituent, a phenylalkyl group having a carbon number of 7 to 20 which may have a substituent, or a substituent The naphthyl group may be a naphthylmethyl group which may have a substituent, a naphthyl group having a carbon number of 11 to 20 which may have a substituent, and a heterocyclic group. Specific examples of such suitable organic groups are the same as those exemplified above for the substituents. Specific examples of the amine group substituted with one or two organic groups include a methylamino group, an ethylamino group, a diethylamino group, a n-propylamino group, a di-n-propylamino group, an isopropylamine group, and a n-butylamino group. , bis-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n-nonylamino, anilino, naphthylamino, acetoamine, C Amidino, n-butylamino, n-pentamethylene, n-hexylamine, n-heptylamino, n-octylamine, n-nonylamine, benzamidine, alpha -naphthoquinone Amine group, and β -naphthylamino group and the like.

作為上述取代基中,苯基、萘基、及雜環基等進一步具有取代基時的取代基之例,可舉出:碳數1~6之烷基;碳數1~6之烷氧基;碳數2~7之飽和脂肪族醯基;碳數2~7之烷氧羰基;碳數2~7之飽和脂肪族醯氧基;苯基;萘基;苯甲醯基;萘甲醯基;以選擇自由碳數1~6之烷基、嗎福啉-1-基、哌-1-基、及苯基所成群組的基所取代之苯甲醯基;具有碳數1~6之烷基的單烷胺基;具有碳數1~6之烷基的二烷胺基;嗎福啉-1-基;哌-1-基;鹵素原子;硝基;氰基。上述取代基中所包含的苯基、萘基、及雜環基等進一步具有取代基時,其取代基之數量,在不妨礙本發明目的之範圍並無限定,較佳為1~4。苯基、萘基、及雜環基等,具有多數取代基時,多數取代基可相同亦可相異。 In the above substituent, examples of the substituent in the case where the phenyl group, the naphthyl group, and the heterocyclic group further have a substituent include an alkyl group having 1 to 6 carbon atoms and an alkoxy group having 1 to 6 carbon atoms. a saturated aliphatic fluorenyl group having 2 to 7 carbon atoms; an alkoxycarbonyl group having 2 to 7 carbon atoms; a saturated aliphatic fluorenyl group having 2 to 7 carbon atoms; a phenyl group; a naphthyl group; a benzamidine group; Base; to select an alkyl group having a free carbon number of 1 to 6, a phenanthroline-1-yl group, a piperidine a benzyl group substituted with a group of a group of -1- groups and a phenyl group; a monoalkylamino group having an alkyl group having 1 to 6 carbon atoms; a dialkylamine having an alkyl group having 1 to 6 carbon atoms; Base; phenanthroline-1-yl; -1-yl; halogen atom; nitro; cyano group. When the phenyl group, the naphthyl group, the heterocyclic group or the like contained in the above substituent further has a substituent, the number of the substituents is not limited, and is preferably from 1 to 4, without departing from the scope of the object of the present invention. When a phenyl group, a naphthyl group, a heterocyclic group or the like has a plurality of substituents, most of the substituents may be the same or different.

式(1)中,R2表示亦可具有取代基之芳基、或亦可具有取代基之雜芳基。作為亦可具有取代基之芳基,例如可舉出亦可具有取代基之苯基。作為亦可具有取代基之雜芳基,例如可舉出亦可具有取代基之咔唑基。 In the formula (1), R 2 represents an aryl group which may have a substituent or a heteroaryl group which may have a substituent. The aryl group which may have a substituent may, for example, be a phenyl group which may have a substituent. Examples of the heteroaryl group which may have a substituent include a carbazolyl group which may have a substituent.

R2中,芳基、雜芳基、苯基、或咔唑基亦可具有的取代基,在不妨礙本發明目的之範圍並無特別限定。作為芳基、雜芳基、苯基、或咔唑基,在碳原子上亦可具有合適的取代基之例,可舉出烷基、烷氧基、環烷基、環烷氧基、飽 和脂肪族醯基、飽和脂肪族醯氧基、烷氧羰基、亦可具有取代基之苯基、亦可具有取代基之苯氧基、亦可具有取代基之苯硫基、亦可具有取代基之苯甲醯基、亦可具有取代基之苯氧羰基、亦可具有取代基之苯甲醯氧基、亦可具有取代基之苯烷基、亦可具有取代基之萘基、亦可具有取代基之萘氧基、亦可具有取代基之萘甲醯基、亦可具有取代基之萘氧羰基、亦可具有取代基之萘甲醯氧基、亦可具有取代基之萘烷基、亦可具有取代基之雜環基、亦可具有取代基之雜環羰基、胺基、經1或2個有機基取代之胺基、嗎福啉-1-基、哌-1-基、鹵素原子、硝基、及氰基等。 The substituent which the aryl group, the heteroaryl group, the phenyl group, or the carbazolyl group may have in R 2 is not particularly limited insofar as it does not impair the object of the present invention. Examples of the aryl group, heteroaryl group, phenyl group or carbazolyl group which may have a suitable substituent on the carbon atom include an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkyloxy group, and a saturated group. An aliphatic fluorenyl group, a saturated aliphatic decyloxy group, an alkoxycarbonyl group, a phenyl group which may have a substituent, a phenoxy group which may have a substituent, a phenylthio group which may have a substituent, or a substituent a benzhydryl group, a phenoxycarbonyl group which may have a substituent, a benzylideneoxy group which may have a substituent, a phenylalkyl group which may have a substituent, a naphthyl group which may have a substituent, or may have a naphthyloxy group of a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthylmethoxy group which may have a substituent, a naphthyl group which may have a substituent, a heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, an amine group, an amine group substituted with 1 or 2 organic groups, a phenanthroline-1-yl group, a piperidine a -1- group, a halogen atom, a nitro group, a cyano group, and the like.

R2為雜芳基或咔唑基時,作為雜芳基在氮原子等之雜原子上亦可具有合適的取代基,以及咔唑基在氮原子上亦可具有合適的取代基之例,可舉出烷基、環烷基、飽和脂肪族醯基、烷氧羰基、亦可具有取代基之苯基、亦可具有取代基之苯甲醯基、亦可具有取代基之苯氧羰基、亦可具有取代基之苯烷基、亦可具有取代基之萘基、亦可具有取代基之萘甲醯基、亦可具有取代基之萘氧羰基、亦可具有取代基之萘烷基、亦可具有取代基之雜環基、及亦可具有取代基之雜環羰基等。在此等取代基之中,較佳為烷基,更佳為碳數1~20之烷基,進而更佳為碳數1~6之烷基,特別佳為乙基。 When R 2 is a heteroaryl group or a carbazolyl group, the heteroaryl group may have a suitable substituent at a hetero atom such as a nitrogen atom, and the carbazolyl group may have a suitable substituent on the nitrogen atom. Examples thereof include an alkyl group, a cycloalkyl group, a saturated aliphatic fluorenyl group, an alkoxycarbonyl group, a phenyl group which may have a substituent, a benzamyl group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a phenylalkyl group having a substituent, a naphthyl group which may have a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthyl group which may have a substituent, A heterocyclic group which may have a substituent, a heterocyclic carbonyl group which may have a substituent, and the like. Among these substituents, an alkyl group is preferred, an alkyl group having 1 to 20 carbon atoms is more preferred, and an alkyl group having 1 to 6 carbon atoms is more preferred, and an ethyl group is particularly preferred.

針對芳基、雜芳基、苯基、或咔唑基亦可具有的取代基之具體例,關於烷基、烷氧基、環烷基、環烷氧基、飽和脂肪族醯基、飽和脂肪族醯氧基、烷氧羰基、亦可具有取代基之苯烷基、亦可具有取代基之萘烷基、亦可具有取代基 之雜環基、及經1或2個有機基取代之胺基,係與針對R1所說明者相同。 Specific examples of the substituent which the aryl group, heteroaryl group, phenyl group, or carbazolyl group may have, regarding an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkyloxy group, a saturated aliphatic fluorenyl group, and a saturated fat a cerium oxy group, an alkoxycarbonyl group, a phenylalkyl group which may have a substituent, a naphthyl group which may also have a substituent, a heterocyclic group which may have a substituent, and an amine substituted with 1 or 2 organic groups The base is the same as that described for R 1 .

上述取代基中,關於苯基、萘基、及雜環基等進一步具有取代基時的取代基,係與針對R1所說明者相同。 Among the above substituents, the substituents when the phenyl group, the naphthyl group, and the heterocyclic group further have a substituent are the same as those described for R 1 .

在R2之中,從感光性樹脂組成物感度優異之方面而言,較佳為以下列式(2)或(3)表示之基,更佳為以下列式(2)表示之基,以下列式(2)表示之基,特別佳為A是S的基。 Among the R 2 , the photosensitive resin composition is excellent in sensitivity, and is preferably a group represented by the following formula (2) or (3), more preferably a group represented by the following formula (2), and the following The formula (2) represents a group, and particularly preferably A is a group of S.

(R4為選擇自由1價之有機基、胺基、鹵素原子、硝基、及氰基所成群組的基,A為S或O,n為0~4之整數。) (R 4 is a group in which a monovalent organic group, an amine group, a halogen atom, a nitro group, and a cyano group are selected, and A is S or O, and n is an integer of 0 to 4.)

(R5及R6各自為1價之有機基。) (R 5 and R 6 are each a monovalent organic group.)

使用感光性樹脂組成物來形成圖案時,由於在圖案形成時的後烘(post-bake)步驟之加熱,易於對圖案產生著色。 然而,感光性樹脂組成物中,在使用以式(1)表示之肟酯化合物,其R2為以上述式(2)表示之基,A為S之基,來作為光聚合起始劑的情況,能夠抑制加熱所導致的圖案之著色。 When a pattern is formed using a photosensitive resin composition, coloring of the pattern is apt to occur due to heating in a post-bake step at the time of pattern formation. However, in the photosensitive resin composition, an oxime ester compound represented by the formula (1) wherein R 2 is a group represented by the above formula (2) and A is a group of S as a photopolymerization initiator is used. In this case, it is possible to suppress the coloration of the pattern caused by the heating.

式(2)中的R4為有機基時,在不妨礙本發明目的之範圍,能夠選擇自各種的有機基。作為式(2)中R4為有機基時合適之例,可舉出:碳數1~6之烷基;碳數1~6之烷氧基;碳數2~7之飽和脂肪族醯基;碳數2~7之烷氧羰基;碳數2~7之飽和脂肪族醯氧基;苯基;萘基;苯甲醯基;萘甲醯基;以選擇自由碳數1~6之烷基、嗎福啉-1-基、哌-1-基、及苯基所成群組的基所取代之苯甲醯基;具有碳數1~6之烷基的單烷胺基;具有碳數1~6之烷基的二烷胺基;嗎福啉-1-基;哌-1-基;鹵素;硝基;氰基。 When R 4 in the formula (2) is an organic group, various organic groups can be selected without departing from the object of the present invention. Examples of suitable examples of the formula (2) in which R 4 is an organic group include an alkyl group having 1 to 6 carbon atoms; an alkoxy group having 1 to 6 carbon atoms; and a saturated aliphatic fluorenyl group having 2 to 7 carbon atoms. ; alkoxycarbonyl group having 2 to 7 carbon atoms; saturated aliphatic methoxy group having 2 to 7 carbon atoms; phenyl; naphthyl group; benzamidine group; naphthylmethyl group; Base, phenanthroline-1-yl, piperazine a benzyl group substituted with a group of a group of -1- groups and a phenyl group; a monoalkylamino group having an alkyl group having 1 to 6 carbon atoms; a dialkylamine having an alkyl group having 1 to 6 carbon atoms; Base; phenanthroline-1-yl; -1-yl; halogen; nitro; cyano.

在R4之中,較佳為:苯甲醯基;萘甲醯基;以選擇自由碳數1~6之烷基、嗎福啉-1-基、哌-1-基、及苯基所成群組的基所取代之苯甲醯基;硝基。更佳為:苯甲醯基;萘甲醯基;2-甲基苯羰基;4-(哌-1-基)苯羰基;4-(苯基)苯羰基。 Among R 4 , preferred is: benzylidene group; naphthylmethyl group; to select an alkyl group having a free carbon number of 1 to 6, a phenanthroline-1-yl group, a piperidine a benzyl group substituted with a group of a group of a group of -1- groups and a phenyl group; a nitro group. More preferably: benzylidene; naphthylmethyl; 2-methylphenylcarbonyl; 4-(piperider -1-yl)phenylcarbonyl; 4-(phenyl)phenylcarbonyl.

又,式(2)中,n較佳為0~3之整數,更佳為0~2之整數,特別佳為0或1。n為1時,R4之鍵結位置,相對於R4所鍵結之苯基與原子A鍵結之原子鍵,較佳為對位。 Further, in the formula (2), n is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, particularly preferably 0 or 1. n is 1, the bonding position of R 4, with respect to the atom bonded to the phenyl group and A atoms of R 4 are bonded, preferably para.

式(3)中的R5,在不妨礙本發明目的之範圍,能夠選擇自各種的有機基。作為R5合適之例,可舉出:碳數1~20之烷基、碳數3~10之環烷基、碳數2~20之飽和脂肪族醯基、碳數2~20之烷氧羰基、亦可具有取代基之苯基、 亦可具有取代基之苯甲醯基、亦可具有取代基之苯氧羰基、亦可具有取代基之碳數7~20之苯烷基、亦可具有取代基之萘基、亦可具有取代基之萘甲醯基、亦可具有取代基之萘氧羰基、亦可具有取代基之碳數11~20之萘烷基、亦可具有取代基之雜環基、及亦可具有取代基之雜環羰基等。 R 5 in the formula (3) can be selected from various organic groups without departing from the object of the present invention. Suitable examples of R 5 include an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a saturated aliphatic fluorenyl group having 2 to 20 carbon atoms, and an alkoxy group having 2 to 20 carbon atoms. a carbonyl group, a phenyl group which may have a substituent, a benzylidene group which may have a substituent, a phenoxycarbonyl group which may have a substituent, a phenylalkyl group having a substituent of 7 to 20 carbon atoms, or a naphthyl group having a substituent, a naphthylmethyl group which may have a substituent, a naphthyloxycarbonyl group which may have a substituent, a naphthyl group having a carbon number of 11 to 20 which may have a substituent, or a substituent A heterocyclic group, a heterocyclic carbonyl group which may have a substituent, and the like.

在R5之中,較佳為碳數1~20之烷基,更佳為碳數1~6之烷基,特別佳為乙基。 Among R 5 , an alkyl group having 1 to 20 carbon atoms is preferred, and an alkyl group having 1 to 6 carbon atoms is more preferred, and ethyl is particularly preferred.

式(3)中的R6,在不妨礙本發明目的之範圍並無特別限定,能夠選擇自各種的有機基。作為R6合適的基之具體例,可舉出:碳數1~20之烷基、亦可具有取代基之苯基、亦可具有取代基之萘基、及亦可具有取代基之雜環基。作為R6,在此等基之中較佳為亦可具有取代基之苯基,特別佳為2-甲基苯基。 R 6 in the formula (3) is not particularly limited insofar as it does not impair the object of the present invention, and various organic groups can be selected. Specific examples of a suitable group of R 6 include an alkyl group having 1 to 20 carbon atoms, a phenyl group which may have a substituent, a naphthyl group which may have a substituent, and a heterocyclic ring which may have a substituent. base. As R 6 , among these, a phenyl group which may have a substituent is preferable, and a 2-methylphenyl group is particularly preferable.

作為R4、R5、或R6中含有的苯基、萘基、及雜環基進一步具有取代基時的取代基,可舉出:碳數1~6之烷基、碳數1~6之烷氧基、碳數2~7之飽和脂肪族醯基、碳數2~7之烷氧羰基、碳數2~7之飽和脂肪族醯氧基、具有碳數1~6之烷基的單烷胺基、具有碳數1~6之烷基的二烷胺基、嗎福啉-1-基、哌-1-基、鹵素、硝基、及氰基等。R4、R5、或R6中含有的苯基、萘基、及雜環基進一步具有取代基時,其取代基的數量,在不妨礙本發明目的之範圍並無限定,較佳為1~4。R4、R5、或R6中含有的苯基、萘基、及雜環基,具有多數的取代基時,多數的取代基可相同亦可相異。 Examples of the substituent in the case where the phenyl group, the naphthyl group, and the heterocyclic group contained in R 4 , R 5 or R 6 further have a substituent include an alkyl group having 1 to 6 carbon atoms and a carbon number of 1 to 6 Alkoxy group, saturated aliphatic fluorenyl group having 2 to 7 carbon atoms, alkoxycarbonyl group having 2 to 7 carbon atoms, saturated aliphatic decyloxy group having 2 to 7 carbon atoms, alkyl group having 1 to 6 carbon atoms Monoalkylamino group, dialkylamino group having an alkyl group having 1 to 6 carbon atoms, phenanthroline-1-yl group, and piperazine -1-yl, halogen, nitro, and cyano. When the phenyl group, the naphthyl group, and the heterocyclic group contained in R 4 , R 5 or R 6 further have a substituent, the number of the substituents is not limited, and is preferably 1 insofar as the object of the present invention is not impaired. ~4. When a phenyl group, a naphthyl group, and a heterocyclic group contained in R 4 , R 5 or R 6 have a plurality of substituents, most of the substituents may be the same or different.

式(1)中,R3為氫原子或碳數1~6之烷基。作為 R3,較佳為甲基或乙基,更佳為甲基。 In the formula (1), R 3 is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. As R 3 , a methyl group or an ethyl group is preferred, and a methyl group is more preferred.

以通式(1)表示之肟酯化合物,例如能夠根據下列流程圖來合成。具體而言,對以下列通式(2-1)表示之酮化合物,於塩酸的存在下,與以下列通式(2-2)表示之亞硝酸酯(RONO,R為碳數1~6之烷基。)進行反應,獲得以下列通式(2-3)表示之酮圬化合物,接著,使以下列通式(2-3)表示之酮圬化合物與以下列通式(2-4)表示之酸酐((R3CO)2O),或與以下列通式(2-5)表示之酸鹵(R3COHal,Hal為鹵素。)進行反應,能夠獲得以下列通式(2-6)表示之肟酯化合物。另外,在下列通式(2-1)、(2-3)、(2-4)、(2-5)、及(2-6)中,R1、R2、R3、及m係與通式(1)相同。 The oxime ester compound represented by the formula (1) can be synthesized, for example, according to the following scheme. Specifically, a ketone compound represented by the following formula (2-1) is present in the presence of citric acid and a nitrite represented by the following formula (2-2) (RONO, R is a carbon number of 1 to 6) The alkyl group is subjected to a reaction to obtain a ketoxime compound represented by the following formula (2-3), followed by a ketone oxime compound represented by the following formula (2-3) and a formula (2-4) The acid anhydride ((R 3 CO) 2 O) or the acid halide (R 3 COHal, Hal is a halogen) represented by the following formula (2-5) can be obtained by the following formula (2) -6) represents an oxime ester compound. Further, in the following general formulae (2-1), (2-3), (2-4), (2-5), and (2-6), R 1 , R 2 , R 3 , and m are It is the same as the general formula (1).

作為由通式(1)表示之肟酯化合物之中特別合適的化合物,可舉出下列之PI-1~PI-42。 Among the compounds particularly suitable for the oxime ester compound represented by the formula (1), the following PI-1 to PI-42 are mentioned.

本發明之顏料分散液中,上述肟酯化合物的含量,在不妨礙本發明目的之範圍並無特別限定。上述肟酯化合物的含量,就典型而言,相對於顏料100質量份,較佳為1~50質量份,更佳為1~10質量份。藉由將上述肟酯化合物的含量設在這樣的範圍,於獲得的顏料分散液中,顏料的分散安定性容易變得良好。又,上述肟酯化合物的含量在上述之範圍的顏料分散液,可合適地用於製備能夠以低曝光量形成高 黏附性的微小圖案的感光性樹脂組成物。 In the pigment dispersion liquid of the present invention, the content of the above oxime ester compound is not particularly limited insofar as it does not impair the object of the present invention. The content of the above-mentioned oxime ester compound is preferably from 1 to 50 parts by mass, more preferably from 1 to 10 parts by mass, per 100 parts by mass of the pigment. By setting the content of the above oxime ester compound in such a range, the dispersion stability of the pigment in the obtained pigment dispersion liquid tends to be good. Further, the pigment dispersion liquid having a content of the above oxime ester compound in the above range can be suitably used for preparation to form a high exposure amount with a low exposure amount. A photosensitive resin composition having a fine pattern of adhesion.

又,本發明之顏料分散液中,分散劑與上述肟酯化合物的合計含量,相對於顏料100質量份,較佳為1~60質量份,更佳為1~55質量份,進而更佳為1~20質量份。上述合計含量若在上述之範圍,不僅確保本發明之顏料分散液中的顏料均勻地分散或上述肟酯化合物導致的效果,而且上述顏料分散液及由此顏料分散液獲得之感光性樹脂組成物中,各成分的平衡性易於變得良好。且由於上限越小,該感光性樹脂組成物中其他成分的摻合量能夠相對地增加,因此感度等其他特性變得易於提升。 Further, in the pigment dispersion liquid of the present invention, the total content of the dispersant and the oxime ester compound is preferably 1 to 60 parts by mass, more preferably 1 to 55 parts by mass, even more preferably 100 parts by mass of the pigment. 1 to 20 parts by mass. When the total content is within the above range, not only the pigment in the pigment dispersion of the present invention is uniformly dispersed or the effect of the above-described oxime ester compound, but also the above pigment dispersion and the photosensitive resin composition obtained from the pigment dispersion are obtained. In this case, the balance of each component tends to be good. Further, since the upper limit is smaller, the blending amount of other components in the photosensitive resin composition can be relatively increased, and thus other characteristics such as sensitivity can be easily improved.

〔溶劑〕 [solvent]

作為本發明之顏料分散液中的溶劑,例如可舉出乙二醇單甲醚、乙二醇單乙醚、乙二醇正丙醚、乙二醇單正丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單正丙醚、丙二醇單正丁醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、二丙二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等之(聚)伸烷基二醇單烷基醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等之(聚)伸烷基二醇單烷基醚乙酸酯類;二乙二醇二甲醚、二乙二醇甲乙醚、二乙二醇二乙醚、四氫呋喃等之其他醚類;甲乙酮、 環己酮、2-庚酮、3-庚酮等之酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷基酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-側氧丁酸乙酯等之其他酯類;甲苯、二甲苯等之芳香族烴類;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等之醯胺類等。溶劑能夠單獨或是組合2種以上來使用。 Examples of the solvent in the pigment dispersion liquid of the present invention include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol n-propyl ether, ethylene glycol mono-n-butyl ether, and diethylene glycol monomethyl ether. Diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol Mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, etc. Alkyl glycol monoalkyl ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate (poly)alkylene glycol monoalkyl ether acetates such as ester, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate; diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, two Other ethers such as ethylene glycol diethyl ether and tetrahydrofuran; methyl ethyl ketone, a ketone such as cyclohexanone, 2-heptanone or 3-heptanone; an alkyl lactate such as methyl 2-hydroxypropionate or ethyl 2-hydroxypropionate; 2-hydroxy-2-methylpropane Ethyl acetate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate , ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate , ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-butyrate Ester, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetate, ethyl acetate, ethyl 2-oxobutanoate And other esters; aromatic hydrocarbons such as toluene and xylene; decylamines such as N-methylpyrrolidone, N,N-dimethylformamide, and N,N-dimethylacetamide Classes, etc. The solvent can be used singly or in combination of two or more.

在上述溶劑之中,丙二醇單甲醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、二乙二醇二甲醚、二乙二醇甲乙醚、環己酮、3-甲氧基丁基乙酸酯,由於能夠對於後述之鹼可溶性樹脂、光聚合性單體、及光聚合起始劑,和對於以上述式(1)表示之化合物顯示優異的溶解性,同時使上述顏料的分散性良好而較佳,特別佳為使用丙二醇單甲醚乙酸酯、3-甲氧基丁基乙酸酯。 Among the above solvents, propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, diethylene glycol methyl ether And cyclohexanone and 3-methoxybutyl acetate can be displayed for the alkali-soluble resin, photopolymerizable monomer, and photopolymerization initiator described later, and for the compound represented by the above formula (1) It is excellent in solubility and good in dispersibility of the above pigment, and it is particularly preferable to use propylene glycol monomethyl ether acetate or 3-methoxybutyl acetate.

溶劑的含量,本發明之顏料分散液的固體成分濃度,較佳為成為1~50質量%的量,更佳為成為5~30質量%的量。 The solid content concentration of the pigment dispersion liquid of the present invention is preferably from 1 to 50% by mass, and more preferably from 5 to 30% by mass.

〔肟酯化合物以外之分散助劑〕 [Dispersing aids other than oxime ester compounds]

本發明之顏料分散液,亦可含有上述肟酯化合物以外之分散助劑來作為任意成分。上述肟酯化合物以外之分散助劑,就堆疊性方面,較佳為具有含氮芳香環之分散助劑,例如,就使用後述之感光性樹脂組成物,能夠形成對基板的黏附性、耐水性良好的圖案方面,較佳為具有含氮芳香環之矽烷偶合劑。作為具有含氮芳香環之矽烷偶合劑,具體而言,較佳為以下列式(11)表示者。 The pigment dispersion liquid of the present invention may contain an optional component other than the above-described oxime ester compound as an optional component. The dispersing aid other than the oxime ester compound is preferably a dispersing aid having a nitrogen-containing aromatic ring in terms of stacking property. For example, a photosensitive resin composition described later can be used to form adhesion to a substrate and water resistance. In terms of a good pattern, a decane coupling agent having a nitrogen-containing aromatic ring is preferred. As the decane coupling agent having a nitrogen-containing aromatic ring, specifically, it is preferably represented by the following formula (11).

R11 pR12 (3-p)Si-R13-NH-C(O)-Y-R14-X‧‧‧(11)(式(11)中,R11為烷氧基,R12為烷基,p為1~3之整數,R13為伸烷基,Y為-NH-、-O-、或-S-,R14為單鍵、或伸烷基,X為亦可具有取代基且可為單環亦可為多環的含氮雜芳基,X中與-Y-R14-鍵結之環為含氮6員芳香環,-Y-R14-與前述含氮6員芳香環中的碳原子鍵結。) R 11 p R 12 (3-p) Si-R 13 -NH-C(O)-YR 14 -X‧‧‧(11) (In the formula (11), R 11 is an alkoxy group, and R 12 is an alkane a group, p is an integer of 1 to 3, R 13 is an alkylene group, Y is -NH-, -O-, or -S-, R 14 is a single bond or an alkyl group, and X may have a substituent. Further, it may be a monocyclic ring or a polycyclic nitrogen-containing heteroaryl group, and the ring bonded to -YR 14 - in X is a nitrogen-containing 6-membered aromatic ring, -YR 14 - and the aforementioned nitrogen-containing 6-member aromatic ring. Carbon atom bonding.)

式(11)中,R11為烷氧基。關於R11,烷氧基之碳原子數較佳為1~6,更佳為1~4,從矽烷偶合劑之反應性的觀點而言特別佳為1或2。作為R11較佳的具體例,可舉出甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、異丁氧基、二級丁氧基、三級丁氧基、正戊氧基、及正己氧基。在此等烷氧基之中,較佳為甲氧基、及乙氧基。 In the formula (11), R 11 is an alkoxy group. With respect to R 11 , the number of carbon atoms of the alkoxy group is preferably from 1 to 6, more preferably from 1 to 4, and particularly preferably from 1 or 2 from the viewpoint of reactivity of the decane coupling agent. Preferred examples of R 11 include a methoxy group, an ethoxy group, a n-propoxy group, an isopropoxy group, a n-butoxy group, an isobutoxy group, a secondary butoxy group, and a tertiary butoxide. Base, n-pentyloxy, and n-hexyloxy. Among these alkoxy groups, a methoxy group and an ethoxy group are preferred.

烷氧基亦即R11受到水解而生成的矽醇基由於與基板之表面等產生反應,而使用後述之感光性樹脂組成物形成之圖案對基板表面的黏附性會提升。因此,從易於提升圖案 對基板表面的黏附性的方面而言,p較佳為3。 The alkoxy group, that is, the sterol group formed by hydrolysis of R 11 reacts with the surface of the substrate or the like, and the adhesion of the pattern formed using the photosensitive resin composition described later to the surface of the substrate is improved. Therefore, p is preferably 3 from the viewpoint of easily improving the adhesion of the pattern to the surface of the substrate.

式(11)中,R12為烷基。關於R12,烷基之碳原子數較佳為1~12,更佳為1~6,從矽烷偶合劑的反應性之觀點而言,特別佳為1或2。作為R12之較佳具體例,可舉出甲基、乙基、正丙基、異丙基、正丁基、異丁基、二級丁基、三級丁基、正戊基、正己基、正庚基、正辛基、正壬基、正癸基、正十一基、及正十二基。 In the formula (11), R 12 is an alkyl group. With respect to R 12 , the number of carbon atoms of the alkyl group is preferably from 1 to 12, more preferably from 1 to 6, and particularly preferably from 1 or 2 from the viewpoint of reactivity of the decane coupling agent. Preferred examples of R 12 include a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, an isobutyl group, a secondary butyl group, a tertiary butyl group, a n-pentyl group, and a n-hexyl group. , n-heptyl, n-octyl, n-decyl, n-decyl, n-l-decyl, and n-d-decyl.

式(11)中,R13為伸烷基。關於R13,伸烷基之碳原子數較佳為1~12,更佳為1~6,特別佳為2~4。作為R13之較佳具體例,可舉出甲烯基、1,2-乙烯基、1,1-乙烯基、丙烷-1,3-二基、丙烷-1,2-二基、丙烷-1,1-二基、丙烷-2,2-二基、丁烷-1,4-二基、丁烷-1,3-二基、丁烷-1,2-二基、丁烷-1,1-二基、丁烷-2,2-二基、丁烷-2,3-二基、戊烷-1,5-二基、戊烷-1,4-二基、及己烷-1,6-二基、庚烷-1,7-二基、辛烷-1,8-二基、壬烷-1,9-二基、癸烷-1,10-二基、十一烷-1,11-二基、及十二烷-1,12-二基。在此等伸烷基之中,較佳為1,2-乙烯基、丙烷-1,3-二基、及丁烷-1,4-二基。 In the formula (11), R 13 is an alkylene group. With respect to R 13 , the number of carbon atoms of the alkyl group is preferably from 1 to 12, more preferably from 1 to 6, particularly preferably from 2 to 4. Preferred examples of R 13 include a vinyl group, a 1,2-vinyl group, a 1,1-vinyl group, a propane-1,3-diyl group, a propane-1,2-diyl group, and a propane group. 1,1-diyl, propane-2,2-diyl, butane-1,4-diyl, butane-1,3-diyl, butane-1,2-diyl, butane-1 , 1-diyl, butane-2,2-diyl, butane-2,3-diyl, pentane-1,5-diyl, pentane-1,4-diyl, and hexane- 1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, decane-1,9-diyl, decane-1,10-diyl, undecane -1,11-diyl, and dodecane-1,12-diyl. Among these alkylene groups, preferred are 1,2-vinyl, propane-1,3-diyl, and butane-1,4-diyl.

Y為-NH-、-O、或-S-,較佳為-NH-。由於相較於以-CO-O-、或-CO-S-表示之鍵結,以-CO-NH-表示之鍵結較不易受到水解,因此後述之感光性樹脂組成物中若使用Y係為-NH-的矽烷偶合劑,易於形成耐水性優異的圖案。 Y is -NH-, -O, or -S-, preferably -NH-. Since the bond represented by -CO-NH- is less susceptible to hydrolysis than the bond represented by -CO-O- or -CO-S-, the Y-system is used in the photosensitive resin composition described later. The oxiran coupling agent which is -NH- is easy to form a pattern excellent in water resistance.

R14為單鍵、或伸烷基,較佳為單鍵。R14為伸烷基時的較佳例,與R13相同。 R 14 is a single bond or an alkylene group, preferably a single bond. A preferred example when R 14 is an alkylene group is the same as R 13 .

X為亦可具有取代基且可為單環亦可為多環的含氮 雜芳基,X中與-Y-R14-鍵結之環為含氮6員芳香環,-Y-R14-與該含氮6員芳香環中的碳原子鍵結。理由雖然不明,但後述之感光性樹脂組成物中若使用具有如此之X的矽烷偶合劑,能夠形成對基板的黏附性、耐水性優異的圖案。 X is a nitrogen-containing heteroaryl group which may have a substituent and may be a single ring or a polycyclic ring, and the ring bonded to -YR 14 - in X is a nitrogen-containing 6-membered aromatic ring, -YR 14 - and A carbon atom in a 6-membered aromatic ring is bonded. Although the reason is not known, when a decane coupling agent having such X is used in the photosensitive resin composition described later, a pattern excellent in adhesion to a substrate and water resistance can be formed.

X為多環雜芳基時,雜芳基亦可為多數之單環所縮合的基,亦可為多數之單環經由單鍵而鍵結的基。X為多環雜芳基時,多環雜芳基中包含的環數較佳為1~3。X為多環雜芳基時,X中縮合或鍵結於含氮6員芳香環的環,可含雜原子亦可不含雜原子,可為芳香環亦可為非芳香環。 When X is a polycyclic heteroaryl group, the heteroaryl group may be a group in which a plurality of monocyclic rings are condensed, or a group in which a plurality of monocyclic rings are bonded via a single bond. When X is a polycyclic heteroaryl group, the number of rings contained in the polycyclic heteroaryl group is preferably from 1 to 3. When X is a polycyclic heteroaryl group, the ring condensed or bonded to the nitrogen-containing 6-membered aromatic ring in X may contain a hetero atom or a hetero atom, and may be an aromatic ring or a non-aromatic ring.

作為含氮雜芳基亦即X所亦可具有的取代基,可舉出:碳原子數1~6之烷基、碳原子數1~6之烷氧基、碳原子數2~6之烯基、碳原子數2~6之烯氧基、碳原子數2~6之脂肪族醯基、苯甲醯基、硝基、亞硝基、胺基、羥基、巰基、氰基、磺酸基、羧基、及鹵素原子等。X所具有的取代基數量,在不妨礙本發明目的之範圍並無特別限定。X所具有的取代基數量,較佳為5以下,更佳為3以下。X具有多數的取代基時,多數的取代基可相同亦可相異。 Examples of the substituent which the nitrogen-containing heteroaryl group, that is, X, may have are an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, and an alkene having 2 to 6 carbon atoms. Base, alkoxy group having 2 to 6 carbon atoms, aliphatic fluorenyl group having 2 to 6 carbon atoms, benzamidine group, nitro group, nitroso group, amine group, hydroxyl group, mercapto group, cyano group, sulfonic acid group , a carboxyl group, a halogen atom, and the like. The number of substituents which X has is not particularly limited insofar as it does not impair the object of the present invention. The number of substituents which X has is preferably 5 or less, more preferably 3 or less. When X has a plurality of substituents, most of the substituents may be the same or different.

作為X的較佳例,可舉出下列式的基。 As a preferable example of X, the base of the following formula is mentioned.

在上述的基之中,下列式的基作為X為佳。 Among the above groups, the group of the following formula is preferably X.

作為經以上說明的以式(11)表示之化合物的合適具體例,可舉出以下之化合物。 Specific examples of the compound represented by the formula (11) described above include the following compounds.

上述肟酯化合物以外之分散助劑的含量,在本發明之顏料分散液中,較佳為0.1~10質量%,更佳為0.5~5質量%。 The content of the dispersing aid other than the above oxime ester compound is preferably from 0.1 to 10% by mass, more preferably from 0.5 to 5% by mass, in the pigment dispersion liquid of the present invention.

〔顏料分散液之製備方法〕 [Preparation method of pigment dispersion]

本發明之顏料分散液,能夠將由含氮芳香環化合物所構成的顏料、分散劑、上述肟酯化合物及溶劑,以三輥滾軋機、球磨機、混砂機等攪拌機混合(分散、混練),並依必要以5μm膜過濾器等過濾器過濾而製備。認為在顏料分散液的製備,由於將由含氮芳香環化合物所構成的顏料、(作為分散助劑的)上述肟酯化合物,一起先以攪拌機混合(分散、混練),因此在由含氮芳香環化合物所構成的顏料與上述肟酯化合物之間,產生π-π相互作用,而獲得本發明之效果。 The pigment dispersion liquid of the present invention can be mixed (dispersed and kneaded) with a pigment composed of a nitrogen-containing aromatic ring compound, a dispersant, the above-described oxime ester compound, and a solvent in a mixer such as a three-roll mill, a ball mill, or a sand mixer. It is prepared by filtering with a filter such as a 5 μm membrane filter as necessary. It is considered that in the preparation of the pigment dispersion liquid, the pigment composed of the nitrogen-containing aromatic ring compound and the above-mentioned oxime ester compound (as a dispersing aid) are first mixed (dispersed, kneaded) with a stirrer, and thus the nitrogen-containing aromatic ring is used. The π-π interaction between the pigment composed of the compound and the above oxime ester compound gives the effect of the present invention.

<感光性樹脂組成物> <Photosensitive resin composition>

本發明之感光性樹脂組成物,至少含有基材樹脂、光聚合起始劑、及本發明之顏料分散液。 The photosensitive resin composition of the present invention contains at least a base resin, a photopolymerization initiator, and a pigment dispersion of the present invention.

〔基材樹脂〕 [Substrate Resin]

作為基材樹脂,並沒有特別限定,可舉出感光性樹脂組成物中一般所使用的公知之樹脂。基材樹脂能夠單獨或是組合2種以上來使用。 The base resin is not particularly limited, and examples thereof include known resins generally used in the photosensitive resin composition. The base resin can be used singly or in combination of two or more.

作為基材樹脂,例如,可舉出含聚合性基樹脂等之聚合性樹脂。作為如此的聚合性樹脂,在後述之鹼可溶性樹脂之中,可舉出具有乙烯性不飽和基者。 The base resin is, for example, a polymerizable resin containing a polymerizable base resin or the like. As such a polymerizable resin, among the alkali-soluble resins to be described later, those having an ethylenically unsaturated group are mentioned.

又,作為基材樹脂,可舉出鹼可溶性樹脂。所謂鹼可溶性樹脂,是藉由樹脂濃度20質量%之樹脂溶液(溶劑: 丙二醇單甲醚乙酸酯),於基板上形成膜厚1μm之樹脂膜,浸漬於濃度0.05質量%之KOH水溶液中1分鐘時,溶解膜厚0.01μm以上者稱之。 Further, examples of the base resin include an alkali-soluble resin. The alkali-soluble resin is a resin solution having a resin concentration of 20% by mass (solvent: Propylene glycol monomethyl ether acetate) was formed by forming a resin film having a thickness of 1 μm on a substrate and immersing it in a KOH aqueous solution having a concentration of 0.05% by mass for 1 minute, and having a thickness of 0.01 μm or more.

作為鹼可溶性樹脂,只要是顯示上述之鹼可溶性的樹脂則沒有特別限定,能夠使用習知公知之鹼可溶性樹脂。鹼可溶性樹脂能夠單獨或是組合2種以上來使用。 The alkali-soluble resin is not particularly limited as long as it exhibits the above-described alkali-soluble resin, and a conventionally known alkali-soluble resin can be used. The alkali-soluble resin can be used singly or in combination of two or more.

作為合適的鹼可溶性樹脂之一例,可舉出(A1)具有咔哚結構(cardo structure)之樹脂。作為(A1)具有咔哚結構之樹脂,並沒有特別限定,能夠使用習知公知之樹脂。在其中,較佳為以下列式(a-1)表示之樹脂。 An example of a suitable alkali-soluble resin is (A1) a resin having a cardo structure. The resin having a fluorene structure (A1) is not particularly limited, and a conventionally known resin can be used. Among them, a resin represented by the following formula (a-1) is preferred.

上述式(a-1)中,Xa顯示以下列式(a-2)表示之基。 In the above formula (a-1), X a shows a group represented by the following formula (a-2).

上述式(a-2)中,Ra1各自獨立地表示氫原子、碳數1~6之烴基、或鹵素原子,Ra2各自獨立地表示氫原子或甲基,Wa表示單鍵或以下列式(a-3)表示之基。 In the above formula (a-2), R a1 each independently represents a hydrogen atom, a hydrocarbon group having 1 to 6 carbon atoms, or a halogen atom, and R a2 each independently represents a hydrogen atom or a methyl group, and W a represents a single bond or the following The formula (a-3) represents the base.

又,上述式(a-1)中,Ya表示從二羧酸酐去除酸酐基(-CO-O-CO-)之殘基。作為二羧酸酐之例,可舉出馬來酸酐、琥珀酸酐、伊康酸酐、苯二甲酸酐、四氫苯二甲酸酐、六氫苯二甲酸酐、甲基內亞甲基四氫苯二甲酸酐、氯橋酸酐、甲基四氫苯二甲酸酐、戊二酸酐等。 Further, in the above formula (a-1), Y a represents a residue obtained by removing an acid anhydride group (-CO-O-CO-) from a dicarboxylic acid anhydride. Examples of the dicarboxylic acid anhydride include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and methyl endomethylene tetrahydrophthalate. Anhydride, chloro-bromic anhydride, methyltetrahydrophthalic anhydride, glutaric anhydride, and the like.

又,上述式(a-1)中,Za表示從四羧酸二酐去除2個酸酐基之殘基。作為四羧酸二酐之例,可舉出苯均四酸二酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、聯苯醚四羧酸二酐等。 Further, in the above formula (a-1), Z a represents a residue from which two acid anhydride groups are removed from the tetracarboxylic dianhydride. Examples of the tetracarboxylic dianhydride include pyromellitic dianhydride, benzophenone tetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, and diphenyl ether tetracarboxylic dianhydride.

又,上述式(a-1)中,m表示0~20之整數。 Further, in the above formula (a-1), m represents an integer of 0 to 20.

(A1)具有咔哚結構的樹脂之質量平均分子量,較佳為1000~40000,更佳為2000~30000。藉由設在上述之範圍,能夠獲得良好的顯影性,同時獲得充分的耐熱性、膜強度。 (A1) The mass average molecular weight of the resin having a fluorene structure, preferably from 1,000 to 40,000, more preferably from 2,000 to 30,000. By setting it in the said range, the favorable developability can be acquired, and sufficient heat resistance and film intensity are acquired.

又,作為合適的鹼可溶性樹脂之其他例,可舉出(A2)環氧樹脂。作為(A2)環氧樹脂,並沒有特別限定,能夠使用習知公知的環氧樹脂,亦可為不具有乙烯性不飽和基者,亦可為具有乙烯性不飽和基者。 Moreover, as another example of a suitable alkali-soluble resin, (A2) epoxy resin is mentioned. The (A2) epoxy resin is not particularly limited, and a known publicly known epoxy resin may be used, or an ethylenically unsaturated group may not be used, or an ethylenically unsaturated group may be used.

作為不具有乙烯性不飽和基之環氧樹脂,例如,能夠使用至少使不飽和羧酸與含環氧基不飽和化合物所共聚合 而得之樹脂(A2-1)。 As the epoxy resin having no ethylenically unsaturated group, for example, at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound can be used for copolymerization. And the resin (A2-1).

作為不飽和羧酸,可舉出(甲基)丙烯酸、巴豆酸等單羧酸;馬來酸、富馬酸、檸康酸、中康酸、伊康酸等二羧酸;此等二羧酸之酐等。在此等之中,從共聚合反應性、獲得之樹脂的鹼溶解性、取得之容易性等方面而言,較佳為(甲基)丙烯酸及馬來酸酐。此等不飽和羧酸能夠單獨或是組合2種以上來使用。 Examples of the unsaturated carboxylic acid include monocarboxylic acids such as (meth)acrylic acid and crotonic acid; and dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; and these dicarboxylic acids; Acid anhydride and the like. Among these, (meth)acrylic acid and maleic anhydride are preferable from the viewpoints of copolymerization reactivity, alkali solubility of the obtained resin, ease of availability, and the like. These unsaturated carboxylic acids can be used individually or in combination of 2 or more types.

另外,於本說明書中,「(甲基)丙烯酸」意指丙烯酸與甲基丙烯酸兩者。 Further, in the present specification, "(meth)acrylic acid" means both acrylic acid and methacrylic acid.

上述樹脂(A2-1)中來自不飽和羧酸之構成單位(具有羧基之構成單位)佔有的比例,較佳為5~29質量%,更佳為10~25質量%。藉由設在上述範圍,能夠使感光性樹脂組成物的顯影性為適當。 The proportion of the constituent unit (having a constituent unit having a carboxyl group) derived from the unsaturated carboxylic acid in the resin (A2-1) is preferably 5 to 29% by mass, and more preferably 10 to 25% by mass. By setting it in the said range, the developability of the photosensitive resin composition can be suitably.

含環氧基不飽和化合物,亦可為不具有脂環式環氧基者,亦可為具有脂環式環氧基者,但較佳為具有脂環式環氧基者。 The epoxy group-containing unsaturated compound may be one which does not have an alicyclic epoxy group, or which has an alicyclic epoxy group, but preferably has an alicyclic epoxy group.

作為不具有脂環式環氧基之含環氧基不飽和化合物,可舉出(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2-甲基縮水甘油酯、(甲基)丙烯酸3,4-環氧基丁酯、(甲基)丙烯酸6,7-環氧基庚酯、(甲基)丙烯酸3,4-環氧基環己酯等之(甲基)丙烯酸環氧基烷基酯類;α-乙基丙烯酸縮水甘油酯、α-正丙基丙烯酸縮水甘油酯、α-正丁基丙烯酸縮水甘油酯、α-乙基丙烯酸6,7-環氧基庚酯等之α-烷基丙烯酸環氧基烷酯類;鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油 醚、對乙烯基苄基縮水甘油醚等之縮水甘油醚類等。在此等之中,從共聚合反應性、硬化後之樹脂的強度等方面而言,較佳為(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2-甲基縮水甘油酯,(甲基)丙烯酸6,7-環氧基庚酯、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、及對乙烯基苄基縮水甘油醚。 Examples of the epoxy group-containing unsaturated compound having no alicyclic epoxy group include glycidyl (meth)acrylate, 2-methylglycidyl (meth)acrylate, and (meth)acrylic acid 3. (meth)acrylic acid epoxyalkyl group such as 4-epoxybutyl ester, 6,7-epoxyheptyl (meth)acrylate, 3,4-epoxycyclohexyl (meth)acrylate Ester; α -glycidyl acrylate, glycidyl α -n-propyl acrylate, glycidyl α -n-butyl acrylate, α -ethyl acrylate 6,7-epoxyheptyl ester, etc. α - Alkyl acrylate alkyl acrylates; o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, glycidyl ethers such as p-vinylbenzyl glycidyl ether, and the like. Among these, from the viewpoints of copolymerization reactivity, strength of the resin after curing, and the like, glycidyl (meth)acrylate and 2-methylglycidyl (meth)acrylate are preferable. 6,7-epoxyheptyl acrylate, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, and p-vinylbenzyl glycidyl ether.

具有脂環式環氧基之含環氧基不飽和化合物的脂環式基,可為單環亦可為多環。作為單環之脂環式基,可舉出環戊基、環己基等。又,作為多環之脂環式基,可舉出降莰基、異莰基、三環壬基、三環癸基、四環十二基等。 The alicyclic group of the epoxy group-containing unsaturated compound having an alicyclic epoxy group may be a single ring or a polycyclic ring. Examples of the monocyclic alicyclic group include a cyclopentyl group and a cyclohexyl group. Further, examples of the polycyclic alicyclic group include a thiol group, an isoindole group, a tricyclic fluorenyl group, a tricyclic fluorenyl group, and a tetracyclic decyl group.

具體而言,作為具有脂環式環氧基之含環氧基不飽和化合物,例如可舉出以下列式(a4-1)~(a4-16)表示之化合物。在此等之中,為了使感光性樹脂組成物的顯影性為適當,較佳為以下列式(a4-1)~(a4-6)表示之化合物,更佳為以下列式(a4-1)~(a4-4)表示之化合物。 Specifically, examples of the epoxy group-containing unsaturated compound having an alicyclic epoxy group include compounds represented by the following formulas (a4-1) to (a4-16). Among these, in order to make the developability of the photosensitive resin composition appropriate, a compound represented by the following formula (a4-1) to (a4-6) is preferable, and the following formula (a4-1) is more preferable. ) a compound represented by ~(a4-4).

上述式中,Ra3表示氫原子或甲基,Ra4表示碳數1~6之2價脂肪族飽和烴基,Ra5表示碳數1~10之2價烴基,n表示0~10之整數。作為Ra4,較佳為直鏈狀或支鏈狀之伸烷基,例如甲烯基、乙烯基、丙烯基、四甲烯基、乙基乙烯基、五甲烯基、六甲烯基。作為Ra5,較佳為例如甲烯基、乙烯基、丙烯基、四甲烯基、乙基乙烯基、五甲烯基、六甲烯基、伸苯基、伸環己基、-CH2-Ph-CH2-(Ph表示伸苯基)。 In the above formula, R a3 represents a hydrogen atom or a methyl group, R a4 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R a5 represents a divalent hydrocarbon group having 1 to 10 carbon atoms, and n represents an integer of 0 to 10. As R a4 , a linear or branched alkyl group such as a vinyl group, a vinyl group, a propenyl group, a tetramethylalkenyl group, an ethylvinyl group, a pentenyl group or a hexamethylal group is preferable. R a5 is preferably, for example, a alkenyl group, a vinyl group, a propenyl group, a tetramethylalkenyl group, an ethylvinyl group, a pentenyl group, a hexamethyl group, a phenylene group, a cyclohexyl group, or a -CH 2 -Ph group. -CH 2 - (Ph represents a phenylene group).

此等含環氧基不飽和化合物能夠單獨或是組合2種以上來使用。 These epoxy group-containing unsaturated compounds can be used singly or in combination of two or more.

上述樹脂(A2-1)中來自含環氧基不飽和化合物之構成單位(具有環氧基之構成單位)佔有的比例,較佳為5 ~90質量,更佳為15~75質量%。藉由設在上述範圍,變得易於形成良好形狀之彩色濾光片等。 The proportion of the constituent unit (constituting unit having an epoxy group) derived from the epoxy group-containing unsaturated compound in the resin (A2-1) is preferably 5 ~90 mass, more preferably 15~75 mass%. By being set in the above range, it becomes easy to form a color filter or the like having a good shape.

上述樹脂(A2-1),較佳為使含脂環式基不飽和化合物進一步進行共聚合。 The resin (A2-1) is preferably a copolymerization of an alicyclic group-containing unsaturated compound.

含脂環式基不飽和化合物的脂環式基,可為單環亦可為多環。作為單環之脂環式基,可舉出環戊基、環己基等。又,作為多環之脂環式基,可舉出金剛烷基、降莰基、異莰基、三環壬基、三環癸基、四環十二基等。 The alicyclic group containing an alicyclic unsaturated compound may be a single ring or a polycyclic ring. Examples of the monocyclic alicyclic group include a cyclopentyl group and a cyclohexyl group. Further, examples of the polycyclic alicyclic group include an adamantyl group, a norbornyl group, an isodecyl group, a tricyclodecyl group, a tricyclodecyl group, and a tetracyclododecyl group.

具體而言,作為含脂環式基不飽和化合物,例如可舉出以下列式(a5-1)~(a5-8)表示之化合物。在此等之中,為了使感光性樹脂組成物的顯影性為適當,較佳為以下列式(a5-3)~(a5-8)表示之化合物,更佳為以下列式(a5-3)、(a5-4)表示之化合物。 Specifically, examples of the alicyclic unsaturated group-containing compound include compounds represented by the following formulas (a5-1) to (a5-8). Among these, in order to make the developability of the photosensitive resin composition appropriate, a compound represented by the following formula (a5-3) to (a5-8) is preferable, and the following formula (a5-3) is more preferable. ), a compound represented by (a5-4).

上述式中,Ra6表示氫原子或甲基,Ra7表示單鍵或碳數1~6之2價脂肪族飽和烴基,Ra8表示氫原子或碳數1~5之烷基。作為Ra7,較佳為單鍵、直鏈狀或支鏈狀之伸烷基,例如甲烯基、乙烯基、丙烯基、四甲烯基、乙基乙烯基、五甲烯基、六甲烯基。作為Ra8,較佳為例如甲基、乙基。 In the above formula, R a6 represents a hydrogen atom or a methyl group, R a7 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R a8 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R a7 is preferably a single bond, a linear or branched alkyl group such as a vinyl group, a vinyl group, a propenyl group, a tetramethyl group, an ethyl vinyl group, a pentenyl group, a hexamethylene group. base. As R a8 , for example, a methyl group or an ethyl group is preferable.

上述樹脂(A2-1)中來自含脂環式基不飽和化合物之構成單位佔有的比例,較佳為1~40質量%,更佳為5~30質量%。 The proportion of the constituent unit derived from the alicyclic unsaturated group-containing compound in the resin (A2-1) is preferably from 1 to 40% by mass, more preferably from 5 to 30% by mass.

又,上述樹脂(A2-1),亦可為使上述以外之其他化合物進一步進行共聚合者。作為如此的其他化合物,可舉出 (甲基)丙烯酸酯類、(甲基)丙烯醯胺類、烯丙化合物、乙烯基醚類、乙烯基酯類、苯乙烯類等。此等化合物能夠單獨或是組合2種以上來使用。 Further, the resin (A2-1) may be further copolymerized with other compounds than the above. As such other compounds, mention may be made (Meth) acrylates, (meth) acrylamides, allylic compounds, vinyl ethers, vinyl esters, styrenes, and the like. These compounds can be used singly or in combination of two or more.

作為(甲基)丙烯酸酯類,可舉出(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸三級辛酯等之直鏈狀或支鏈狀的(甲基)丙烯酸烷酯;(甲基)丙烯酸氯乙酯、(甲基)丙烯酸2,2-二甲基羥基丙酯、(甲基)丙烯酸2-羥基乙酯、三羥甲基丙烷單(甲基)丙烯酸酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸糠酯等。 Examples of the (meth) acrylates include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, amyl (meth)acrylate, and (meth)acrylic acid. Linear or branched alkyl (meth)acrylate such as octyl ester; chloroethyl (meth)acrylate, 2,2-dimethylhydroxypropyl (meth)acrylate, (methyl) 2-hydroxyethyl acrylate, trimethylolpropane mono(meth)acrylate, benzyl (meth)acrylate, decyl (meth)acrylate, and the like.

作為(甲基)丙烯醯胺類,可舉出(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥乙基-N-甲基(甲基)丙烯醯胺等。 Examples of the (meth) acrylamides include (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, and N, N-di. Alkyl (meth) acrylamide, N,N-aryl (meth) acrylamide, N-methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl-N- Base (meth) acrylamide and the like.

作為烯丙化合物,可舉出乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯乙酸烯丙酯、乳酸烯丙酯等烯丙酯類;烯丙氧基乙醇等。 Examples of the allyl compound include allyl acetate, allyl hexanoate, allyl octanoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, and B. Allyl acetate such as allyl acetate and allyl lactate; allyloxyethanol and the like.

作為乙烯基醚類,可舉出己基乙烯基醚、辛基乙烯基醚、癸基乙烯基醚、乙基己基乙烯基醚、甲氧基乙基乙烯基醚、乙氧基乙基乙烯基醚、氯乙基乙烯基醚、1-甲基-2,2-二甲基丙基乙烯基醚、2-乙基丁基乙烯基醚、羥乙基乙烯基醚、二乙二醇乙烯基醚、二甲基胺乙基乙烯基醚、二乙基胺 乙基乙烯基醚、丁基胺乙基乙烯基醚、苄基乙烯基醚、四氫糠基乙烯基醚等烷基乙烯基醚;乙烯基苯基醚、乙烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等乙烯基芳基醚等。 Examples of the vinyl ethers include hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, and ethoxyethyl vinyl ether. , chloroethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether , dimethylamine ethyl vinyl ether, diethylamine An alkyl vinyl ether such as ethyl vinyl ether, butylamine ethyl vinyl ether, benzyl vinyl ether or tetrahydrofurfuryl vinyl ether; vinyl phenyl ether, vinyl tolyl ether, vinyl chloride A vinyl aryl ether such as phenyl ether, vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether or vinyl decyl ether.

作為乙烯基酯類,可舉出丁酸乙烯酯、異丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯乙酸乙烯酯、乙醯乙酸乙烯酯、乳酸乙烯酯、β-苯丁酸乙烯酯、苯甲酸乙烯酯、柳酸乙烯酯、氯苯甲酸乙烯酯、四氯苯甲酸乙烯酯、萘甲酸乙烯酯等。 Examples of the vinyl esters include vinyl butyrate, vinyl isobutyrate, trimethyl vinyl acetate, diethyl vinyl acetate, vinyl valerate, vinyl hexanoate, vinyl chloroacetate, and Vinyl chloroacetate, vinyl methoxyacetate, vinyl butoxyacetate, vinyl phenyl acetate, vinyl acetate, vinyl lactate, vinyl β -phenylbutyrate, vinyl benzoate, vinyl urate Ester, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthoate, and the like.

作為苯乙烯類,可舉出苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-乙基苯乙烯、二甲氧基苯乙烯等烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等鹵苯乙烯等。 Examples of the styrene include styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, and butyl styrene; Alkenyl styrene, cyclohexyl styrene, mercapto styrene, benzyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, ethoxymethyl methyl styrene Styrene; alkoxystyrene such as methoxystyrene, 4-methoxy-3-ethylstyrene, dimethoxystyrene; chlorostyrene, dichlorostyrene, trichlorostyrene, Tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodine styrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3 - Halogen styrene such as trifluoromethyl styrene.

樹脂(A2-1)之質量平均分子量,較佳為2000~50000,更佳為5000~30000。藉由設在上述之範圍,有著易於取得感光性樹脂組成物的膜形成能、顯影性之平衡性的傾 向。 The mass average molecular weight of the resin (A2-1) is preferably from 2,000 to 50,000, more preferably from 5,000 to 30,000. In the above range, it is easy to obtain a film forming ability and a balance of developability of the photosensitive resin composition. to.

另一方面,作為具有乙烯性不飽和基之環氧樹脂,例如,能夠使用至少使不飽和羧酸與含環氧基不飽和化合物所聚合而得之樹脂的羧基,與含環氧基不飽和化合物的環氧基加以反應而得之樹脂(A2-2),或者,使用至少使不飽和羧酸與含環氧基不飽和化合物所聚合而得之樹脂的環氧基,與不飽和羧酸的羧基加以反應而得之樹脂(A2-3)。 On the other hand, as the epoxy resin having an ethylenically unsaturated group, for example, a carboxyl group of a resin obtained by polymerizing at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound, and an epoxy group-containing unsaturated group can be used. a resin (A2-2) obtained by reacting an epoxy group of a compound, or an epoxy group of a resin obtained by polymerizing at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound, and an unsaturated carboxylic acid The resin obtained by the reaction of the carboxyl group (A2-3).

作為不飽和羧酸、含環氧基不飽和化合物,可舉出以上述樹脂(A2-1)所例示之化合物。因此,作為至少使不飽和羧酸與含環氧基不飽和化合物所聚合而得之樹脂,例示了上述樹脂(A2-1)。 The unsaturated carboxylic acid or the epoxy group-containing unsaturated compound may, for example, be a compound exemplified as the above resin (A2-1). Therefore, the resin (A2-1) is exemplified as a resin obtained by polymerizing at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound.

上述樹脂(A2-2)、(A2-3)中來自不飽和羧酸之構成單位(具有羧基之構成單位)佔有的比例,較佳為5~60質量%,更佳為10~40質量%。藉由設在上述範圍,能夠使感光性樹脂組成物的顯影性為適當。 The ratio of the constituent unit (having a constituent unit having a carboxyl group) derived from the unsaturated carboxylic acid in the resins (A2-2) and (A2-3) is preferably 5 to 60% by mass, more preferably 10 to 40% by mass. . By setting it in the said range, the developability of the photosensitive resin composition can be suitably.

又,上述樹脂(A2-2)、(A2-3)中來自含環氧基不飽和化合物之構成單位(具有環氧基之構成單位)佔有的比例,較佳為5~90質量%,更佳為15~75質量%。藉由設在上述範圍,變得易於形成良好形狀的彩色濾光片等。 In addition, the ratio of the constituent unit (the constituent unit having an epoxy group) derived from the epoxy group-containing unsaturated compound in the resin (A2-2) or (A2-3) is preferably 5 to 90% by mass, more preferably Good is 15~75% by mass. By being set in the above range, it becomes easy to form a color filter or the like having a good shape.

樹脂(A2-2)、(A2-3)之質量平均分子量,較佳為2000~50000,更佳為5000~30000。藉由設在上述範圍,傾向於容易取得感光性樹脂組成物之膜形成能、顯影性之平衡性。 The mass average molecular weight of the resins (A2-2) and (A2-3) is preferably from 2,000 to 50,000, more preferably from 5,000 to 30,000. By setting it in the said range, it is easy to acquire the film formation ability of the photosensitive resin composition, and the balance of developability.

上述之外,作為(A2)環氧樹脂,亦能夠使用使雙 酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、酚系或甲酚酚醛型環氧樹脂、可溶酚醛型(resol type)環氧樹脂、三苯甲烷型環氧樹脂、多元羧酸聚縮水甘油酯、多元醇聚縮水甘油酯、胺環氧樹脂、二羥基苯型環氧樹脂等環氧樹脂的環氧基,與(甲基)丙烯酸加以反應而得之環氧基(甲基)丙烯酸樹脂等。 In addition to the above, as (A2) epoxy resin, it is also possible to use double Phenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol type or cresol novolac type epoxy resin, resol type epoxy resin, triphenylmethane type An epoxy group of an epoxy resin, a polycarboxylic acid polyglycidyl ester, a polyhydric alcohol polyglycidyl ester, an amine epoxy resin, or a dihydroxybenzene type epoxy resin, and reacted with (meth)acrylic acid An epoxy group (meth)acrylic resin or the like.

基材樹脂的含量,相對於感光性樹脂組成物的固體成分較佳為40~85質量%,更佳為45~75質量%。藉由設在上述範圍,傾向於容易取得顯影性之平衡性。 The content of the base resin is preferably from 40 to 85% by mass, more preferably from 45 to 75% by mass, based on the solid content of the photosensitive resin composition. By setting it in the said range, it is easy to acquire the balance of developability.

〔光聚合起始劑〕 [Photopolymerization initiator]

作為光聚合起始劑,並沒有特別限定,能夠使用習知公知之光聚合起始劑。光聚合起始劑能夠單獨或是組合2種以上來使用。 The photopolymerization initiator is not particularly limited, and a conventionally known photopolymerization initiator can be used. The photopolymerization initiator can be used singly or in combination of two or more.

作為光聚合起始劑具體而言,可舉出1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-〔4-(2-羥基乙氧基)苯基〕-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二基苯基)-2-羥基-2-甲基丙烷-1-酮、雙(4-二甲基胺苯基)酮、2,4,6-三甲基苯甲醯基二苯基氧化膦、4-苯甲醯基-4’-甲基二甲基硫醚、4-二甲基胺苯甲酸、4-二甲基胺苯甲酸甲酯、4-二甲基胺苯甲酸乙酯、4-二甲基胺苯甲酸丁酯、4-二甲基胺基-2-乙基己基苯甲酸、4-二甲基胺基-2-異戊基苯甲酸、苄基-β-甲氧基乙基縮醛、苄基二甲基縮酮、1-苯基-1,2-丙烷二酮-2-(鄰乙氧基羰基) 肟,鄰苯甲醯基苯甲酸甲酯、2,4-二乙基噻噸酮(thioxanthone)、2-氯噻噸酮、2,4-二甲基噻噸酮、1-氯-4-丙氧基噻噸酮、噻噸(thioxanthene)、2-氯噻噸、2,4-二乙基噻噸、2-甲基噻噸、2-異丙基噻噸、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮二異丁腈、過氧化苯甲醯、過氧化異丙苯(cumene peroxide)、2-巰基苯并咪唑、2-巰基苯并唑、2-巰基苯并噻唑、2-(鄰氯苯基)-4,5-二苯基咪唑二聚體、2-(鄰氯苯基)-4,5-二(甲氧基苯基)咪唑二聚體、2-(鄰氟苯基)-4,5-二苯基咪唑二聚體、2-(鄰甲氧基苯基)-4,5-二苯基咪唑二聚體、2-(對甲氧基苯基)-4,5-二苯基咪唑二聚體、2,4,5-三芳基咪唑二聚體、二苯甲酮、2-氯二苯甲酮、4,4’-雙二甲胺基二苯甲酮(亦即,米其勒酮)、4,4’-雙二乙胺基二苯甲酮(亦即,乙基米其勒酮)、4,4’-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苄基、苯偶姻、苯偶姻甲醚、苯偶姻乙醚、苯偶姻異丙醚、苯偶姻正丁醚、苯偶姻異丁醚、苯偶姻丁醚、苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對三級丁基苯乙酮、對二甲胺基苯乙酮、對三級丁基三氯苯乙酮、對三級丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮、噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、二苯并軟木酮(dibenzosuberone)、4-二甲胺基苯甲酸戊酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、對甲氧基三嗪、2,4,6-參(三氯甲基)-s-三嗪、2-甲基-4,6-雙(三氯甲基)-s-三嗪、2-〔2-(5-甲基呋喃-2- 基)乙烯基〕-4,6-雙(三氯甲基)-s-三嗪、2-〔2-(呋喃-2-基)乙烯基〕-4,6-雙(三氯甲基)-s-三嗪、2-〔2-(4-二乙胺基-2-甲基苯基)乙烯基〕-4,6-雙(三氯甲基)-s-三嗪、2-〔2-(3,4-二甲氧基苯基)乙烯基〕-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-正丁氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三嗪、乙酮,1-〔9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基〕-,1-(O-乙醯肟)、1,2-辛烷二酮,1-〔4-(苯硫基)-,2-(O-苯甲醯基肟)〕、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁酮-1、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、2-甲基-1-(4-甲硫基苯基)-2-嗎啉基丙烷-1-酮、「NCI-831」(商品名:ADEKA公司製)等。又,本發明所使用的肟酯化合物,亦即,在包含於肟基上的碳原子,經由包含芳香環之有機基和羰基,與芳香族烴環或芳香族雜環鍵結的肟酯化合物,亦能作為光聚合起始劑來使用。換句話說,本發明之感光性樹脂組成物中,上述肟酯化合物不但係作為分散助劑而被包含(在上述顏料分散液中作為分散助劑而被包含),並且,亦可作為光聚合起始劑而被包含。此時,作為光聚合起始劑的肟酯化合物,認為在與由含氮芳香環化合物所構成的顏料之間,並沒有產生π-π相互作用。關於作為光聚合起始劑的肟酯化 合物,與上述相同,較佳為以上述式(1)表示之化合物。 Specific examples of the photopolymerization initiator include 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, and 1-[4-(2-hydroxyl). Ethoxy)phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one , 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, bis(4-dimethylaminophenyl)one, 2,4,6-trimethylbenzene Methyl phenyl diphenyl phosphine oxide, 4-benzylidene-4'-methyl dimethyl sulfide, 4-dimethylamine benzoic acid, methyl 4-dimethylamine benzoate, 4-di Ethyl methylamine benzoate, butyl 4-dimethylaminebenzoate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino-2-isopentylbenzoic acid , benzyl-β-methoxyethyl acetal, benzyl dimethyl ketal, 1-phenyl-1,2-propanedione-2-(o-ethoxycarbonyl) fluorene, o-benzidine Methyl benzoate, 2,4-diethyl thioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 1-chloro-4-propoxythioxanthone , thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2-ethylhydrazine, octadecyl Base, 1,2-benzopyrene, 2,3-diphenylanthracene, azobisisobutyronitrile, benzammonium peroxide, cumene peroxide, 2-mercaptobenzene Imidazole, 2-mercaptobenzophenone Azole, 2-mercaptobenzothiazole, 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(o-chlorophenyl)-4,5-di(methoxyphenyl) Imidazole dimer, 2-(o-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(o-methoxyphenyl)-4,5-diphenylimidazole dimer, 2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer, benzophenone, 2-chlorobenzophenone, 4 , 4'-bisdimethylaminobenzophenone (i.e., mireconone), 4,4'-bisdiethylaminobenzophenone (i.e., ethyl mizirone), 4 , 4'-dichlorobenzophenone, 3,3-dimethyl-4-methoxybenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin Isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoin butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-pair Methylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butyl acetophenone, p-dimethylaminoacetophenone, p-tertiary butyl trichloroacetophenone, three-stage Butyl dichloroacetophenone, α ,α-dichloro-4-phenoxyacetophenone, thioxanthone, 2-methylthioxanthone , 2-isopropylthioxanthone, dibenzosuberone, amyl 4-dimethylaminobenzoate, 9-phenyl acridine, 1,7-bis-(9-acridinyl) Heptane, 1,5-bis-(9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxytriazine, 2,4,6-para (three Chloromethyl)-s-triazine, 2-methyl-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(5-methylfuran-2-yl)vinyl -4,6-bis(trichloromethyl)-s-triazine, 2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-s-three Oxazine, 2-[2-(4-diethylamino-2-methylphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(3 ,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxyphenyl)-4,6-bis (three Chloromethyl)-s-triazine, 2-(4-ethoxystyryl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-n-butoxybenzene -4,6-bis(trichloromethyl)-s-triazine, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-three Pyrazine, 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-trichloromethyl-6-(3- Bromo-4-methoxy)styrylphenyl-s-triazine, 2,4-bis-trichloromethyl-6-(2-bromo 4-methoxy)styrylphenyl-s-triazine, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzylidene)-9H-indazol-3-yl ]-, 1-(O-acetamidine), 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzylidenehydrazine), 2-benzyl Benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butanone-1,2,2-dimethoxy-1,2-diphenylethane-1-one, 2 -Methyl-1-(4-methylthiophenyl)-2-morpholinylpropan-1-one, "NCI-831" (trade name: manufactured by ADEKA CORPORATION). Further, the oxime ester compound used in the present invention, that is, an oxime ester compound bonded to an aromatic hydrocarbon ring or an aromatic heterocyclic ring via a carbon atom containing an aromatic ring and a carbonyl group, is contained in a carbon atom contained in the fluorenyl group. It can also be used as a photopolymerization initiator. In other words, in the photosensitive resin composition of the present invention, the oxime ester compound is contained not only as a dispersing aid but also as a dispersing aid in the pigment dispersion liquid, and also as a photopolymerization. It is included as a starter. At this time, the oxime ester compound as a photopolymerization initiator is considered to have no π-π interaction with the pigment composed of the nitrogen-containing aromatic ring compound. The oxime ester compound as a photopolymerization initiator is preferably a compound represented by the above formula (1) as described above.

光聚合起始劑的含量,相對於感光性樹脂組成物之固體成分,較佳為0.5~20質量%。藉由設在上述範圍,能夠獲得充分的耐熱性、耐藥品性,且能夠提升塗膜形成能、抑制硬化不良。 The content of the photopolymerization initiator is preferably from 0.5 to 20% by mass based on the solid content of the photosensitive resin composition. By setting it in the said range, it can obtain sufficient heat resistance and chemical-resistance, and can improve a coating film formation ability, and can suppress a hardening defect.

又,感光性樹脂組成物含有上述肟酯化合物作為光聚合起始劑時,上述肟酯化合物的比例,相對於光聚合起始劑的總量,較佳為1~100質量%,更佳為20~100質量%,進而更佳為50~100質量%,特別佳為80~100質量%。由於設在上述範圍,能夠提升感光性樹脂組成物之敏感度或細線黏附性。 In addition, when the photosensitive resin composition contains the oxime ester compound as a photopolymerization initiator, the ratio of the oxime ester compound is preferably from 1 to 100% by mass, more preferably from 1 to 100% by mass based on the total amount of the photopolymerization initiator. 20 to 100% by mass, and more preferably 50 to 100% by mass, particularly preferably 80 to 100% by mass. Since it is set in the above range, the sensitivity or fine line adhesion of the photosensitive resin composition can be improved.

〔顏料分散液〕 [Pigment dispersion]

本發明之顏料分散液的含量,只要依感光性樹脂組成物的用途適當決定即可,作為一例,感光性樹脂組成物中顏料的含量,相對於感光性樹脂組成物的固體成分,較佳為達5~70質量%的量,更佳為達25~60質量%的量。 The content of the pigment dispersion liquid of the present invention is appropriately determined depending on the use of the photosensitive resin composition. As an example, the content of the pigment in the photosensitive resin composition is preferably based on the solid content of the photosensitive resin composition. The amount is 5 to 70% by mass, more preferably 25 to 60% by mass.

並且,使用後述之光聚合性單體時,本發明之顏料分散液的含量,其感光性樹脂組成物中上述肟酯化合物的含量,相對於基材樹脂與光聚合性單體之合計量100質量份,較佳為達0.01~2.5質量份的量,更佳為達0.01~0.5質量份的量。藉由為了使感光性樹脂組成物中上述肟酯化合物的含量達到相關範圍,而調整本發明之顏料分散液的含量,變得易於形成對基板之黏附性優異的微小圖案。 In the case of using the photopolymerizable monomer described later, the content of the pigment dispersion liquid in the photosensitive resin composition of the present invention is 100% of the total amount of the base resin and the photopolymerizable monomer. The mass portion is preferably an amount of from 0.01 to 2.5 parts by mass, more preferably from 0.01 to 0.5 parts by mass. By adjusting the content of the pigment dispersion liquid of the present invention in order to bring the content of the above-mentioned oxime ester compound into the relevant range in the photosensitive resin composition, it is easy to form a fine pattern excellent in adhesion to the substrate.

〔光聚合性單體〕 [Photopolymerizable monomer]

本發明之感光性樹脂組成物,亦可含有光聚合性單體。作為光聚合性單體,並沒有特別限定,能夠使用習知公知之單官能單體、多官能單體。光聚合性單體能夠單獨或是組合2種以上來使用。 The photosensitive resin composition of the present invention may further contain a photopolymerizable monomer. The photopolymerizable monomer is not particularly limited, and a conventionally known monofunctional monomer or polyfunctional monomer can be used. The photopolymerizable monomer can be used singly or in combination of two or more.

作為單官能單體,可舉出(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、馬來酸酐、伊康酸、伊康酸酐、檸康酸、檸康酸酐、巴豆酸、2-丙烯醯胺-2-甲基丙烷磺酸、三級丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、2-(甲基)丙烯醯氧基-2-羥基丙基苯二甲酸酯、單(甲基)丙烯酸甘油酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸二甲胺酯、(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、苯二甲酸衍生物之半(甲基)丙烯酸酯等。此等單官能單體能夠單獨或是組合2種以上來使用。 Examples of the monofunctional monomer include (meth)acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, and ethoxymethyl (methyl). Acrylamide, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N-hydroxyl Base (meth) acrylamide, (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-propene oxime Amine-2-methylpropanesulfonic acid, tertiary butyl propylene sulfonamide, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, (meth) acrylate 2 -ethylhexyl ester, cyclohexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxybutyl (meth)acrylate, (A) 2-phenoxy-2-hydroxypropyl acrylate, 2-(methyl)propenyloxy-2-hydroxypropyl phthalate, glycerol mono(meth)acrylate, (methyl) Tetrahydrofurfuryl acrylate, dimethylamine (meth)acrylate, glycidyl (meth)acrylate, (A) ) 2,2,2-trifluoroethyl acrylate, ethyl (meth) acrylate, 2,2,3,3-tetrafluoro-propyl, semi-phthalic acid derivative of (meth) acrylate. These monofunctional monomers can be used singly or in combination of two or more.

另一方面,作為多官能單體,可舉出乙二醇二(甲 基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、二(甲基)丙烯酸甘油酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二縮水甘油醚二(甲基)丙烯酸酯、二乙二醇二縮水甘油醚二(甲基)丙烯酸酯、苯二甲酸二縮水甘油酯二(甲基)丙烯酸酯、三丙烯酸甘油酯、甘油聚縮水甘油醚聚(甲基)丙烯酸酯、胺甲酸酯(甲基)丙烯酸酯(亦即,二異氰酸甲伸苯酯)、三甲基六亞甲基二異氰酸酯與六亞甲基二異氰酸酯與(甲基)丙烯酸2-羥基乙酯之反應物、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等多官能單體、或1,3,5-三丙烯醯基六氫-1,3,5-三嗪(triacrylformal)等。此等多官能單體能夠單獨或是組合2種以上來使用。 On the other hand, as a polyfunctional monomer, ethylene glycol di(A) Acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, dibutyl Alcohol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, two (meth)acrylic acid glyceride, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol di(meth) acrylate, pentaerythritol tri(meth) acrylate, pentaerythritol IV (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2,2-bis(4-(methyl) propylene decyloxy diethoxy phenyl) Propane, 2,2-bis(4-(methyl)propenyloxypolyethoxyphenyl)propane, 2-hydroxy-3-(methyl)propenyloxypropyl (meth) acrylate, Ethylene glycol diglycidyl ether di(meth) acrylate, diethylene glycol diglycidyl ether di(meth) acrylate, phthalic acid diglycidyl Di(meth)acrylate, glyceryl triacrylate, glycerol polyglycidyl ether poly(meth) acrylate, urethane (meth) acrylate (ie, phenylphenyl diisocyanate), Reaction of trimethylhexamethylene diisocyanate with hexamethylene diisocyanate and 2-hydroxyethyl (meth)acrylate, methylene bis(meth) acrylamide, (meth) acrylamide a polyfunctional monomer such as a condensate of methylene ether, a polyhydric alcohol and N-methylol (meth) acrylamide, or 1,3,5-tripropenyl hexahydro-1,3,5-tri Triacrylformal and the like. These polyfunctional monomers can be used singly or in combination of two or more.

光聚合性單體的含量,相對於感光性樹脂組成物之固體成分,較佳為1~30質量%,更佳為5~20質量%。藉由 設在上述範圍,傾向於容易取得敏感度、顯影性、解析度的平衡性。 The content of the photopolymerizable monomer is preferably from 1 to 30% by mass, and more preferably from 5 to 20% by mass, based on the solid content of the photosensitive resin composition. By In the above range, it tends to be easy to obtain the balance of sensitivity, developability, and resolution.

〔其他成分〕 [Other ingredients]

上述感光性樹脂組成物,依照其必要亦可含有各種添加劑。作為添加劑,可舉出增感劑、硬化促進劑、充填劑、附著促進劑、抗氧化劑、解凝劑、熱聚合抑制劑、消泡劑、界面活性劑等。 The photosensitive resin composition may contain various additives as necessary. Examples of the additive include a sensitizer, a curing accelerator, a filler, an adhesion promoter, an antioxidant, a deagglomerating agent, a thermal polymerization inhibitor, an antifoaming agent, and a surfactant.

<感光性樹脂組成物之製造方法> <Method for Producing Photosensitive Resin Composition>

本發明之感光性樹脂組成物之製造方法,至少包含將基材樹脂、光聚合起始劑、與本發明之顏料分散液混合之步驟。在此步驟中,除了上述成分,亦可混合光聚合性單體及/或其他成分。此等成分,能夠用例如三輥滾軋機、球磨機、混砂機等攪拌機來混合。另外,為了使製造出來的感光性樹脂組成物為均勻,亦可使用5μm膜過濾器等過濾器來過濾。 The method for producing a photosensitive resin composition of the present invention comprises at least a step of mixing a base resin, a photopolymerization initiator, and the pigment dispersion of the present invention. In this step, a photopolymerizable monomer and/or other components may be mixed in addition to the above components. These components can be mixed by a mixer such as a three-roll mill, a ball mill, or a sand mixer. Further, in order to make the produced photosensitive resin composition uniform, it is also possible to filter using a filter such as a 5 μm membrane filter.

在本發明之感光性樹脂組成物之製造方法,預先混合由含氮芳香環化合物所構成的顏料、分散劑、上述肟酯化合物及溶劑而製備顏料分散液,將此顏料分散液與基材樹脂等其他成分混合。藉由經過如此的步驟,可獲得即使低曝光量也能形成高黏附性的微小圖案的感光性樹脂組成物。 In the method for producing a photosensitive resin composition of the present invention, a pigment dispersion liquid composed of a nitrogen-containing aromatic ring compound, a dispersant, the above-described oxime ester compound, and a solvent are prepared in advance to prepare a pigment dispersion liquid, and the pigment dispersion liquid and the base resin are prepared. Mix other ingredients. By such a procedure, a photosensitive resin composition capable of forming a fine pattern having high adhesion even at a low exposure amount can be obtained.

[實施例] [Examples]

以下,指出實施例來更具體地說明本發明,但本發明之範圍並不限定於此等實施例。 Hereinafter, the invention will be more specifically described by way of examples, but the scope of the invention is not limited to the examples.

在以下的實施例及比較例,係使用下列化合物1及比較化合物1~4來作為肟酯化合物。 In the following examples and comparative examples, the following compound 1 and comparative compounds 1 to 4 were used as the oxime ester compound.

<肟酯化合物之合成> <Synthesis of oxime ester compounds>

以下,針對化合物1之合成,藉由合成例1來說明。 Hereinafter, the synthesis of the compound 1 will be described by Synthesis Example 1.

〔合成例1〕 [Synthesis Example 1]

將2-(2-甲基苯基)-1-〔4-(苯巰基)苯基〕乙烷-1,2- 二酮7.68g(23.13mmol)、羥胺鹽酸鹽2.93g(42.16mmol)、三乙胺4.15g(41.01mmol)混合於乙醇64.00g中,在75℃~80℃反應3小時。將反應液蒸發,加入乙酸乙酯,用飽和食鹽水清洗,並用無水硫酸鎂乾燥後,進行蒸發獲得2-(2-甲基苯基)2-(N-羥基亞胺基)-1-〔4-(苯巰基)苯基〕乙烷-1-酮8.03g。將獲得之2-(2-甲基苯基)-2-(N-羥基亞胺基)-1-〔4-(苯巰基)苯基〕乙烷-1-酮8.03g在乙酸中,經由乙酸酐13.33g(130.57mmol)而乙醯化,獲得以上述式表示之肟酯化合物6.25g。 2-(2-methylphenyl)-1-[4-(phenylhydrazino)phenyl]ethane-1,2- 7.68 g (23.13 mmol) of diketone, 2.93 g (42.16 mmol) of hydroxylamine hydrochloride, and 4.15 g (41.01 mmol) of triethylamine were mixed in 64.00 g of ethanol, and reacted at 75 ° C to 80 ° C for 3 hours. The reaction solution was evaporated, ethyl acetate was added, washed with brine, and dried over anhydrous magnesium sulfate and evaporated to give 2-(2-methylphenyl)2-(N-hydroxyimino)-1- 4-(phenylhydrazino)phenyl]ethane-1-one 8.03 g. 8.03 g of 2-(2-methylphenyl)-2-(N-hydroxyimino)-1-[4-(phenylhydrazino)phenyl]ethane-1-one obtained in acetic acid 13.33 g (130.57 mmol) of acetic anhydride was acetonitrile, and 6.25 g of the oxime ester compound represented by the above formula was obtained.

<顏料分散液之製備> <Preparation of Pigment Dispersion> 〔實施例1~10,比較例1~10〕 [Examples 1 to 10, Comparative Examples 1 to 10]

將表1中所示之顏料、分散劑、及肟化合物混合,溶解於表1中所示之溶劑,製備成固體成分濃度17~23質量%之顏料分散液。另外,各成分的使用量,係如同表1中所示。又,顏料、分散劑、及溶劑的詳細,係如同下述。實施例10之混合物1,係於上述合成之化合物1(肟酯化合物)與以下列式表示之具有含氮芳香環之矽烷偶合劑的混合物(質量比1:1)。 The pigment, the dispersing agent, and the hydrazine compound shown in Table 1 were mixed and dissolved in the solvent shown in Table 1, to prepare a pigment dispersion liquid having a solid concentration of 17 to 23% by mass. In addition, the amount of each component used is as shown in Table 1. Further, the details of the pigment, the dispersant, and the solvent are as follows. The mixture 1 of Example 10 is a mixture (mass ratio of 1:1) of the above-mentioned synthesized compound 1 (an oxime ester compound) and a decane coupling agent having a nitrogen-containing aromatic ring represented by the following formula.

‧顏料 ‧pigment

R254(C.I.顏料紅254,以下列最左之式表示之二酮基吡咯并吡咯系顏料) R254 (C.I. Pigment Red 254, diketoppyrrolopyrrole pigment represented by the leftmost formula below)

B15:6(C.I.顏料藍15:6,以下列正中央之式表示之酞花青系顏料) B15:6 (C.I. Pigment Blue 15:6, which is represented by the following central formula)

G58(C.I.顏料綠58,以下列最右之式表示之酞花青系顏料) G58 (C.I. Pigment Green 58, 酞Cyanine pigment expressed by the following rightmost formula)

Perylene(3,4,9,10-苝四羧酸二醯亞胺:於上述式(e-3)中,Re7及Re8為氫原子者) Perylene (3,4,9,10-decanetetracarboxylic acid diimine: in the above formula (e-3), R e7 and R e8 are hydrogen atoms)

‧分散劑 ‧Dispersant

丙烯酸樹脂系高分子分散劑(商品名:DisperBYK2001,BYK公司製) Acrylic resin-based polymer dispersant (trade name: DisperBYK2001, manufactured by BYK)

‧溶劑 ‧Solvent

3-甲氧基丁基乙酸酯/丙二醇單甲醚乙酸酯=60/40(質量比)之混合溶劑 Mixed solvent of 3-methoxybutyl acetate / propylene glycol monomethyl ether acetate = 60 / 40 (mass ratio)

〔黏度之評價〕 [Evaluation of viscosity]

使用E型黏度計(東京計器公司製),來測定剛製備後 的顏料分散液之黏度。又,將顏料分散液填充至遮光玻璃容器,以密閉狀態於40℃靜置7日後,使用E型黏度計,再度測定顏料分散液之黏度。剛製備後的黏度值與於40℃靜置7日後的黏度值之差為0.3mPa‧s以下時,判定顏料分散液的分散安定性為良好(○),上述之差為超過0.3mPa‧s時,判定顏料分散液的分散安定性為不良(×)。將結果顯示於表1。 Using an E-type viscometer (manufactured by Tokyo Keiki Co., Ltd.) to measure immediately after preparation The viscosity of the pigment dispersion. Further, the pigment dispersion liquid was filled in a light-shielding glass container, and after standing at 40 ° C for 7 days in a sealed state, the viscosity of the pigment dispersion liquid was measured again using an E-type viscometer. When the difference between the viscosity value immediately after preparation and the viscosity value after standing at 40 ° C for 7 days was 0.3 mPa ‧ s or less, it was judged that the dispersion stability of the pigment dispersion liquid was good (○), and the difference was more than 0.3 mPa ‧ s At the time, it was judged that the dispersion stability of the pigment dispersion liquid was poor (x). The results are shown in Table 1.

如表1所示,在實施例1、2、及4~10,由於添加化合物1,即使減少分散劑的含量,顏料的分散安定性仍良 好。另一方面,在未使用化合物1的比較例1~10,使用了較實施例1、2、及4~10多量的分散劑時,顏料的分散安定性達到良好,或者,即便使用了較實施例1、2、及4~10多量的分散劑,顏料的分散安定性仍不良。由以上可知,本發明之顏料分散液,即使減少分散劑的含量,顏料的分散安定性仍良好。 As shown in Table 1, in Examples 1, 2, and 4 to 10, since the addition of the compound 1, even if the content of the dispersant was reduced, the dispersion stability of the pigment was good. it is good. On the other hand, in Comparative Examples 1 to 10 in which Compound 1 was not used, when a large amount of dispersant was used in Examples 1, 2, and 4 to 10, the dispersion stability of the pigment was good, or even if it was used, it was implemented. In the examples 1, 2, and 4 to 10, a large amount of dispersant has poor dispersion stability of the pigment. From the above, it is understood that the pigment dispersion liquid of the present invention has good dispersion stability of the pigment even if the content of the dispersant is reduced.

<感光性樹脂組成物之製備> <Preparation of photosensitive resin composition> 〔實施例11~24及比較例11~21〕 [Examples 11 to 24 and Comparative Examples 11 to 21]

將表2中記載之光聚合起始劑20質量份、樹脂A(固體成分55質量%,溶劑:3-甲氧基丁基乙酸酯)30質量份、二季戊四醇六丙烯酸酯30質量份、及表2中記載之顏料分散液(各顏料分散液之固體成分濃度為17~23質量%,顏料的含量為15質量%。)100質量份、和由3-甲氧基丁基乙酸酯(60質量%)與丙二醇單甲醚乙酸酯(40質量%)所構成之混合溶劑混合後,經由孔徑5μm之膜過濾器過濾,製備成感光性樹脂組成物。另外,調整混合溶劑的量,將感光性樹脂組成物中固體成分濃度調整至15質量%。 20 parts by mass of the photopolymerization initiator described in Table 2, 30 parts by mass of the resin A (solid content: 55 mass%, solvent: 3-methoxybutyl acetate), and 30 parts by mass of dipentaerythritol hexaacrylate, And the pigment dispersion liquid of Table 2 (solid content concentration of each pigment dispersion liquid is 17-23 mass %, pigment content is 15 mass %.) 100 mass parts, and 3-methoxy butyl acetate. (60% by mass) was mixed with a mixed solvent of propylene glycol monomethyl ether acetate (40% by mass), and then filtered through a membrane filter having a pore size of 5 μm to prepare a photosensitive resin composition. Further, the amount of the mixed solvent was adjusted, and the solid content concentration in the photosensitive resin composition was adjusted to 15% by mass.

又,表2所示之光聚合起始劑之中,「OXE01」及「化合物1+OXE01」的詳細,係如同下述。 Further, among the photopolymerization initiators shown in Table 2, the details of "OXE01" and "Compound 1 + OXE01" are as follows.

OXE01:BASF公司製之光聚合起始劑(商品名:IRGACURE OXE 01:1.2-辛烷二酮,1-〔4-(苯硫基)-,2-(O-苯甲醯基肟)〕) OXE01: Photopolymerization initiator manufactured by BASF Co., Ltd. (trade name: IRGACURE OXE 01: 1.2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzylidene)) )

化合物1+OXE01:化合物1與OXE01之混合物(質量 比1:1) Compound 1 + OXE01: a mixture of Compound 1 and OXE01 (mass Than 1:1)

又,於感光性樹脂組成物之製備所使用的樹脂A,係使用根據以下之處方而合成者。 Moreover, the resin A used for preparation of the photosensitive resin composition was synthesized based on the following points.

首先,在500ml四口燒瓶中,加入雙酚茀型環氧樹脂(環氧基當量235)235g、氯化四甲銨110mg、2,6-二-三級丁基-4-甲酚100mg、及丙烯酸72.0g,對此以25ml/分之速度將空氣吹入同時以90~100℃加熱溶解。其次,溶液直接以白濁的狀態慢慢昇溫,加熱至120℃予以完全溶解。此時,溶液雖然漸漸變得透明黏稠,仍照原樣繼續攪拌。這段期間,測定酸價,在未達1.0mgKOH/g為止持續加熱攪拌。酸價達到目標值為止需要12小時。然後冷卻至室溫,獲得無色透明且固體狀之以下列結構式(a-4)表示之雙酚茀型環氧丙烯酸酯。 First, 235 g of a bisphenol fluorene type epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, and 100 mg of 2,6-di-tert-butyl-4-methylphenol were placed in a 500 ml four-necked flask. And 72.0 g of acrylic acid, which was blown at a rate of 25 ml/min while being dissolved by heating at 90 to 100 °C. Next, the solution was slowly warmed up in a white turbid state, and heated to 120 ° C to be completely dissolved. At this point, although the solution gradually became transparent and viscous, it continued to stir as it was. During this period, the acid value was measured, and heating and stirring were continued until it was less than 1.0 mgKOH/g. It takes 12 hours for the acid price to reach the target value. Then, it was cooled to room temperature to obtain a bisphenolphthalein type epoxy acrylate represented by the following structural formula (a-4) as a colorless transparent and solid.

其次,在如此而獲得的上述之雙酚茀型環氧丙烯酸酯307.0g中加入3-甲氧基丁基乙酸酯600g而溶解後,混合二苯甲酮四羧酸二酐80.5g及溴化四乙銨1g,慢慢昇溫以110~115℃予以反應4小時。確認酸酐基的消失後,混合1,2,3,6-四氫苯二甲酸酐38.0g,以90℃予以反應6小時,獲得樹脂A。酸酐基的消失是經由紅外線光譜來確認。此樹脂A,相當於前述之以通式(a-1)表示之化合物。 Next, after dissolving 600 g of 3-methoxybutyl acetate in 307.0 g of the above-mentioned bisphenolphthalein type epoxy acrylate thus obtained, 80.5 g of benzophenone tetracarboxylic dianhydride and bromine were mixed. 1 g of tetraethylammonium was slowly reacted and reacted at 110 to 115 ° C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed, and the reaction was carried out at 90 ° C for 6 hours to obtain a resin A. The disappearance of the acid anhydride group was confirmed by infrared spectroscopy. This resin A corresponds to the compound represented by the above formula (a-1).

針對各個實施例11~24及比較例11~21之感光性樹脂組成物,根據以下之方法,進行後烘所致著色之評價、及細線黏附性之評價。將結果記載於表2。 The photosensitive resin composition of each of Examples 11 to 24 and Comparative Examples 11 to 21 was evaluated for coloring by post-baking and evaluation of fine line adhesion by the following method. The results are shown in Table 2.

〔著色評價〕 [coloring evaluation]

針對各個實施例11~24及比較例11~21之感光性樹脂組成物,依以下的步驟來進行著色評價。 The photosensitive resin compositions of the respective Examples 11 to 24 and Comparative Examples 11 to 21 were subjected to coloring evaluation according to the following procedure.

首先,藉由將感光性樹脂組成物進行旋轉式塗佈於玻璃基板(10cm×10cm)上,於90℃加熱120秒,而在玻璃基板之表面上形成1.0μm的塗佈膜。之後,使用鏡面投射對準曝光器(mirror projection aligner)(製品名:TME-150RTO,Topcon股份有限公司製),將曝光量設在20、50、100、或200mJ/cm2,將曝光間隙設在200μm,將塗膜進行曝光。將曝光後的膜,以26℃之0.04質量%KOH水溶液顯影30~50秒後,於230℃進行後烘30分鐘。針對後烘前後之塗佈膜,使用瞬間多測光系統(MCPD-3000:大塚電子股份有限公司製),將380nm~780nm波長範圍的穿透率之差設為△Y來測定。△Y的值記載於表2。△Y的絕對值越小,越意味著未被著色。 First, a photosensitive resin composition was spin-coated on a glass substrate (10 cm × 10 cm), and heated at 90 ° C for 120 seconds to form a coating film of 1.0 μm on the surface of the glass substrate. Thereafter, using a mirror projection aligner (product name: TME-150RTO, manufactured by Topcon Corporation), the exposure amount was set to 20, 50, 100, or 200 mJ/cm 2 , and the exposure gap was set. The coating film was exposed at 200 μm. The exposed film was developed with a 0.04 mass% KOH aqueous solution at 26 ° C for 30 to 50 seconds, and then post-baked at 230 ° C for 30 minutes. For the coating film before and after the post-baking, an instantaneous multi-photometric system (MCPD-3000: manufactured by Otsuka Electronics Co., Ltd.) was used, and the difference between the transmittances in the wavelength range of 380 nm to 780 nm was measured as ΔY. The value of ΔY is shown in Table 2. The smaller the absolute value of ΔY, the more it means that it is not colored.

〔細線黏附性之評價〕 [Evaluation of fine line adhesion]

將實施例11~24及比較例11~21之感光性樹脂組成物,使用旋轉塗佈機塗佈於玻璃基板(100mm×100mm)上,於90℃進行預焙120秒,形成膜厚1.0μm之塗膜。其次,使用鏡面投射對準曝光器(製品名:TME-150RTO,Topcon股 份有限公司製),將曝光間隙設在50μm,經由形成5μm之線圖案的負像遮片,對塗膜照射紫外線。曝光量設為20、50、100、及200mJ/cm2之4階段。藉由將曝光後之塗膜以26℃之0.04質量%KOH水溶液顯影40秒後,於230℃進行後烘30分鐘,而形成線圖案。 The photosensitive resin compositions of Examples 11 to 24 and Comparative Examples 11 to 21 were applied onto a glass substrate (100 mm × 100 mm) using a spin coater, and prebaked at 90 ° C for 120 seconds to form a film thickness of 1.0 μm. Coating film. Next, using a mirror projection alignment exposer (product name: TME-150RTO, manufactured by Topcon Corporation), the exposure gap was set to 50 μm, and the coating film was irradiated with ultraviolet rays through a negative image mask which forms a line pattern of 5 μm. The exposure amount was set to four stages of 20, 50, 100, and 200 mJ/cm 2 . After the exposed coating film was developed with a 0.04 mass% KOH aqueous solution at 26 ° C for 40 seconds, it was post-baked at 230 ° C for 30 minutes to form a line pattern.

藉由光學顯微鏡觀察形成之線圖案,來評價細線黏附性。細線黏附性,係將未從基板剝離而形成線圖案者評價為「良好」,將從基板剝離而未形成線圖案者評價為「不良」。將結果顯示於表2。 The line pattern formed by observing the line pattern by an optical microscope was evaluated. The fine line adhesion was evaluated as "good" when the line pattern was not peeled off from the substrate, and it was evaluated as "poor" when the substrate was not peeled off and the line pattern was not formed. The results are shown in Table 2.

如同由表2可知,在實施例11~24,能夠抑制後烘時的加熱所導致之著色,又,以50mJ/cm2這樣的曝光量,5μm之線圖案密合於基板。特別是在實施例12~15、17~24,即使以20mJ/cm2這樣的低曝光量,5μm之線圖案仍密合於基板。 As can be seen from Table 2, in Examples 11 to 24, coloring due to heating during post-baking was suppressed, and a line pattern of 5 μm was adhered to the substrate at an exposure amount of 50 mJ/cm 2 . In particular, in Examples 12 to 15, and 17 to 24, the line pattern of 5 μm was adhered to the substrate even at a low exposure amount of 20 mJ/cm 2 .

相對於此,在比較例11、14、15及17,雖然能夠抑制後烘時的加熱所導致之著色,但是以50mJ/cm2這樣的曝光量,5μm之線圖案未密合於基板,與實施例11~24比較之下,細線黏附性較差。 On the other hand, in Comparative Examples 11, 14, 15, and 17, the coloring by heating during post-baking can be suppressed, but the line pattern of 5 μm is not adhered to the substrate at an exposure amount of 50 mJ/cm 2 . In the comparison of Examples 11 to 24, the fine line adhesion was poor.

又,在比較例12、13、20、及21,以50mJ/cm2這樣的曝光量,5μm之線圖案密合於基板,特別是在比較例12、20、及21,即使以20mJ/cm2這樣的低曝光量,5μm之線圖案仍密合於基板。然而,在比較例12、13、20、及21,並無法抑制後烘時的加熱所導致之著色。比較例12或13之感光性樹脂組成物雖然包含作為光聚合起始劑的化合物1,但由於未能抑制著色,因此認為在化合物1與由含氮芳香環化合物所構成的顏料之間,並未產生π-π相互作用。 Further, in Comparative Examples 12, 13, 20, and 21, a line pattern of 5 μm was adhered to the substrate at an exposure amount of 50 mJ/cm 2 , particularly in Comparative Examples 12, 20, and 21, even at 20 mJ/cm. 2 such a low exposure amount, the line pattern of 5 μm is still in close contact with the substrate. However, in Comparative Examples 12, 13, 20, and 21, the coloring caused by the heating at the time of post-baking could not be suppressed. The photosensitive resin composition of Comparative Example 12 or 13 contains Compound 1 as a photopolymerization initiator, but since it cannot suppress coloring, it is considered that between Compound 1 and a pigment composed of a nitrogen-containing aromatic ring compound, No π-π interaction is produced.

而且,在比較例16、18、19,無法抑制後烘時的加熱所導致之著色,且以50mJ/cm2這樣的曝光量,5μm之線圖案未密合於基板,與實施例11~24比較之下,細線黏附性較差。 Further, in Comparative Examples 16, 18, and 19, coloring due to heating during post-baking could not be suppressed, and a line pattern of 5 μm was not adhered to the substrate at an exposure amount of 50 mJ/cm 2 , and Examples 11 to 24 In comparison, fine lines are less adherent.

Claims (6)

一種顏料分散液,其含有由含氮芳香環化合物所構成的顏料、分散劑、肟酯化合物及溶劑,前述肟酯化合物,是在包含於肟基上的碳原子,經由包含芳香環之有機基和羰基,與芳香族烴環或芳香族雜環鍵結而成者。 A pigment dispersion liquid comprising a pigment, a dispersant, an oxime ester compound and a solvent composed of a nitrogen-containing aromatic ring compound, wherein the oxime ester compound is a carbon atom contained on a sulfhydryl group, via an organic group containing an aromatic ring And a carbonyl group, which is bonded to an aromatic hydrocarbon ring or an aromatic heterocyclic ring. 如請求項1所記載之顏料分散液,其中,前述肟酯化合物為以下列式(1)表示之肟酯化合物: (式中,R1表示亦可具有取代基之芳基,R2表示亦可具有取代基之芳基、或亦可具有取代基之雜芳基,R3表示氫原子或碳數1~6之烷基)。 The pigment dispersion liquid according to claim 1, wherein the oxime ester compound is an oxime ester compound represented by the following formula (1): (wherein R 1 represents an aryl group which may have a substituent, R 2 represents an aryl group which may have a substituent, or a heteroaryl group which may have a substituent, and R 3 represents a hydrogen atom or a carbon number of 1 to 6 Alkyl). 如請求項2所記載之顏料分散液,其中,前述R2為亦可具有取代基之苯基、或亦可具有取代基之咔唑基。 The pigment dispersion liquid according to claim 2, wherein the R 2 is a phenyl group which may have a substituent or a carbazolyl group which may have a substituent. 一種感光性樹脂組成物,其含有基材樹脂、光聚合起始劑及如請求項1所記載之顏料分散液。 A photosensitive resin composition containing a base resin, a photopolymerization initiator, and a pigment dispersion liquid according to claim 1. 一種分散助劑,其由肟酯化合物所構成,前述肟酯化合 物,是在包含於肟基上的碳原子,經由包含芳香環之有機基和羰基,與芳香族烴環或芳香族雜環鍵結而成者。 a dispersing aid consisting of an oxime ester compound, the aforementioned oxime ester compound The carbon atom contained in the fluorenyl group is bonded to an aromatic hydrocarbon ring or an aromatic heterocyclic ring via an organic group and a carbonyl group containing an aromatic ring. 如請求項5所記載之分散助劑,其中,前述肟酯化合物為以下列式(1)表示之肟酯化合物: (式中,R1表示亦可具有取代基之芳基,R2表示亦可具有取代基之芳基、或亦可具有取代基之雜芳基,R3表示氫原子或碳數1~6之烷基)。 The dispersing aid according to claim 5, wherein the oxime ester compound is an oxime ester compound represented by the following formula (1): (wherein R 1 represents an aryl group which may have a substituent, R 2 represents an aryl group which may have a substituent, or a heteroaryl group which may have a substituent, and R 3 represents a hydrogen atom or a carbon number of 1 to 6 Alkyl).
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