TW201508856A - Wireless transmission module and inflatable base and inflatable cabinet using the same - Google Patents

Abstract

The present invention relates to a wireless transmission module used in an inflatable base. The wireless transmission module comprises a micro processing unit, a wireless broadcasting unit, an antenna unit, a power management unit, and flow connection port. The antenna unit is connected to the micro processing unit via the wireless broadcasting unit. The power management unit is also connected to the micro processing unit for providing power required by the entire module. Moreover, the flow connection port is used for receiving a flow signal of a corresponding flowmeter of the inflatable base. Accordingly, the wireless transmission module of the present invention can be used to detect the gas flow of the inflatable base and transmit data in a wireless manner. Through the modular design of the present invention, consumption of the signal lines can be effectively reduced, such that the present invention can be not only easy to be installed but also easy to inspect and maintain, thereby effectively reducing the cost of installation, maintenance, and repair.

Description

Wireless transmission module and application of the inflatable seat and the inflatable cabinet

The invention relates to a wireless transmission monitoring technology, in particular to a wireless transmission module which can simplify wiring and an inflatable seat and an inflatable cabinet, thereby facilitating installation and maintenance.

According to the development of electronic products, such as thin, light, high-frequency, high-efficiency, etc., the core chips used in electronic products need to be miniaturized and high-performance, and in order to make the wafers miniaturized and highly efficient, The integrated circuit wire diameter on the wafer is made fine. Under the consideration of miniaturization and cost reduction of integrated circuits, the size of wafers is getting larger and larger, and the number of wafers on each wafer is increasing. Therefore, the value of wafers is increasing, so the process of crystal Any problems on the circle can cause great losses.

However, in the process of production, cleaning, operation, storage and transportation, the wafer/photomask is mainly placed in the interior of the transfer container or in the clean room environment, and there are many particles, moisture, gas, Harmful substances such as chemical solvent molecules, which may cause particles to adhere, crystallize, or atomize on the surface of the wafer or the reticle after being heated for a long time or exposed to the process, and the reticle is applied to the yellow lithography. In the process example, it directly affects the light transmittance of the reticle, distorts the pattern on the reticle, causes the wafer yield to decrease, increases the cleaning and improvement time, reduces the production efficiency, and relatively increases the operation. the cost of.

In order to solve this problem, in the semiconductor manufacturing process, the Automated Material Handling System (AMHS) and the Standard Mechanical Interface (SMIF) device are used to perform the mask during the non-use period. Maintenance and transportation can not only replace the traditional manual handling, reduce the cost of construction and maintenance of clean room equipment, but also improve the cleanliness of the wafer/mask and achieve high production yield. Therefore, in recent years, AMHS and SMIF have It is listed as a standard equipment specification for international semiconductor factories.

According to the above technical concept, in addition to the process, the wafer/mask must be placed in a high cleanliness, air tightness and low gas escape during normal shipping or storage. [Outgassing] In a sealed carrier, such as a wafer transfer cassette [FOUP], a wafer transport cassette [FOSB], a reticle transfer cassette [Reticle SMIF Pod, RSP], for example, US Patent No. 4,532,970 and US Patent No. 4,534,389. The wafer and optically sealed transfer system effectively prevent contamination of the wafer and the reticle to ensure that particles in the surrounding environment do not enter the environment adjacent to the reticle and wafer. In order to improve the cleanliness of the sealed carrier, the sealed carrier is usually filled with a clean gas such as nitrogen (N2) to form a positive pressure inside the carrier to reduce harmful gas infiltration. Limited to the problem of insufficient air tightness of the carrier, usually after a period of time, it will lose its effect due to air leakage. Therefore, in recent years, the industry has further set up an inflatable seat on its transport equipment or storage equipment, through the inflatable seat. Each of the sealed carriers is continuously inflated to maintain the interior of the sealed carrier.

However, due to design problems, the existing inflatable seat can only perform continuous inflation, so that the continuous continuous discharge of gas causes unnecessary waste of inert gas, which not only increases the material cost, but also discharges a large amount of inert gas into the working environment. It also poses a threat to the health of staff. In addition, the inflatable seat generally designs a flow meter on the intake circuit to monitor the flow rate of the inflation, to avoid damage to the wafer/mask due to excessive flow, or to form a positive pressure due to too small a flow rate, but a large wafer /The reticle storage cabinet usually has hundreds of inflatable seats, and each of the inflatable seats is provided with a flow meter, which is extremely large, which causes inconvenience for the operator to check, such as pulling the signal lines one by one to a computer system. Although it is possible to obtain complete information, it is extremely difficult to arrange these signal lines, and it is also extremely inconvenient for maintenance and repair in the future. Therefore, how to let the staff immediately control the inflation of each inflatable seat is easy. The effectiveness of installation and maintenance is a very important issue.

The inventor of the present invention has been engaged in research and development and production experience of related industries for a long time, and has in-depth discussion based on the above-mentioned needs. With the continuous improvement of the present invention, the wireless transmission module and the application of the inflatable seat have been successfully developed. Inflatable cabinets are used to overcome the inconvenience and trouble of the inability of the existing wafer/mask inflatable seat to be inflated.

Accordingly, the main object of the present invention is to provide a wireless transmission module capable of monitoring an inflation condition and an inflatable seat and an inflation cabinet thereof, whereby each wafer/mask carrier can be secured during storage. Inflation efficiency and effectiveness, which in turn improves process yield.

Moreover, another object of the present invention is to provide a wireless transmission module capable of reducing cost and an inflatable seat and an inflating cabinet thereof, which can be modularized and designed, and no need to carry out inspection and repair of the signal line during maintenance. Reduce the cost of maintenance and repair.

Moreover, another main object of the present invention is to provide a wireless transmission module capable of improving performance and an inflatable seat and an inflatable cabinet thereof, which can be remotely controlled and managed, improve overall process management efficiency, and can reduce Waste of gas.

Based on the above, the present invention mainly implements the foregoing objectives and performances through the following technical means; the method includes: a micro processing unit; a wireless broadcast unit, the wireless broadcast unit is connected to the output end of the micro processing unit, and The wireless broadcast unit is connected to an antenna unit for transmitting and receiving signals; a flow port is connected to one of the input terminals of the microprocessor unit, and the flow port is selectively connectable to an external flow meter; a data port, the data port is connected to one of the input terminals of the micro processing unit, and the data port is selectively connectable to an externally located RFID reading element; a power management unit, the power management unit is connected to the foregoing The power management unit provides the power required by the wireless transmission module.

Therefore, through the foregoing technical means, the wireless transmission module of the present invention can instantly detect the air supply condition of the inflatable seat to the vehicle through the flow connection when the carrier is placed on the inflatable seat for inflation. The wireless broadcast unit is instantly transmitted to the outside, and can be remotely monitored and monitored, so that the wafer/mask carrier can be effectively monitored during storage, and the overall process management efficiency can be improved. End manipulation and management, and can reduce the waste of gas.

Furthermore, the wireless transmission module of the inflatable seat of the present invention transmits data wirelessly without using a signal line, which not only facilitates assembly, but also requires no signal line inspection during maintenance due to its modular design. Repair, effectively reduce the cost of maintenance and repair.

The preferred embodiments of the present invention are set forth in the accompanying drawings, and in the claims

(10)‧‧‧ cabinet

(11) ‧‧‧Framework

(12)‧‧‧ side panels

(15)‧‧‧ Door panels

(20)‧‧‧ inflatable seat

(21) ‧ ‧ base

(22)‧‧‧Inflatable valve parts

(23)‧‧‧Exhaust valve parts

(24)‧‧‧Flow control valve

(240)‧‧‧ Gears

(25)‧‧‧ Flowmeter

(27)‧‧‧ Reading components

(30)‧‧‧Wireless transmission module

(31)‧‧‧Microprocessing unit

(32) ‧‧‧Wireless Broadcasting Unit

(33)‧‧‧Antenna unit

(34) ‧‧‧Flow connection埠

(35) ‧‧‧Datalink埠

(37)‧‧‧Power Management Unit

(38)‧‧‧Airflow control unit

(40) ‧‧‧Control drive components

(41)‧‧‧ Gears

(50)‧‧‧Wireless receiving module

(51)‧‧‧Connected lines

(52)‧‧‧Connected lines

(55)‧‧‧Wireless Relay Receiver

(60) ‧‧‧Processing Module

(65) ‧‧‧Human Machine Interface Unit

(80)‧‧‧ Vehicles

(81)‧‧‧Intake valve

(82)‧‧‧Exhaust valve

(85)‧‧‧ Label elements

The first figure is a schematic diagram of a brief architecture of the wireless transmission module of the present invention.

The second figure is a schematic view of the appearance of the inflatable seat of the wireless transmission module of the present invention.

The third figure is a schematic view of the appearance of the inflated storage cabinet body of the wireless transmission module of the present invention.

The fourth figure is a schematic diagram of the line configuration of the inflated storage cabinet body of the wireless transmission module of the present invention.

FIG. 5 is a schematic structural diagram of another embodiment of an inflated storage cabinet for applying a wireless transmission module according to the present invention.

The present invention relates to a wireless transmission module and an inflatable seat and an inflating cabinet thereof. The specific embodiments of the present invention and the components thereof, as illustrated in the accompanying drawings, all relate to front and rear, left and right, top and bottom, upper and lower portions. The horizontal and vertical references are merely for convenience of description and are not intended to limit the invention, nor to limit its components to any position or spatial orientation. The schema and the designation specified in the instructions The dimensions may vary depending on the design and needs of the specific embodiments of the invention, without departing from the scope of the invention.

For the detailed configuration of the inflatable seat and the inflating cabinet of the wireless transmission module of the present invention, please refer to the first, second and third figures. The inflatable device may be a cabinet (10) or an inflatable seat ( 20), wherein the inflatable seat (20) can inflate a carrier (80), and each of the cabinets (10) can be layered with a plurality of inflatable seats (20) for storing a large number of wafers/masks. The carrier (80) is placed, and each of the carriers (80) may be, but not limited to, a wafer transfer cassette [FOUP], a wafer transport cassette [FOSB], a reticle transfer box [Reticle SMIF Pod, RSP], etc. . The bottom surface of the carrier (80) has at least one intake valve (81) and at least one exhaust valve (82), and the periphery of the carrier (80) is further provided with an RFID tag component (85) for recording related process data, and Each of the inflatable seats (20) is provided with a wireless transmission module (30), and each of the wireless transmission modules (30) is configured to monitor the inflation status of the corresponding carrier (80) of each of the inflatable seats (20); The cabinet (10) is composed of a frame (11), and each of the aforementioned inflatable seats (20) is arranged on the frame (11) one by one, and the cabinet (10) is placed on the frame (11). The outer side is provided with a side panel (12) for closing the inner space, and the cabinet body (10) is provided with at least one door panel (15) for selective opening and closing on at least one of the side plates (12) for placement and access. a carrier (80); the inflatable seat (20) is also shown in the third figure, and has a base body (21) on which the carrier (80) is placed, and the base body (21) is provided with at least An inflation valve member (22) connected to the air supply circuit and at least one exhaust valve member (23) connected to the exhaust circuit for respectively corresponding to the intake valve (81) and the exhaust valve of the carrier (80) for inflating The seat (20) can charge and exhaust the carrier (80), and then base The body (21) is further provided with a flow control valve (24) connected to the gas supply circuit and a flow meter (25) for respectively controlling and detecting the flow of the gas supply circuit, and the base of the inflatable seat (20) ( 21) is provided with an RFID reading component (27), which can be used to read the data of the label component (85) on the carrier (80); further, each of the wireless The transmission module (30) is as shown in the fourth figure, and has a micro processing unit (31) for reading, computing and processing related information, and the micro processing unit (31) is connected with a a wireless broadcast unit (32), the wireless broadcast unit (32) may be selected from a WiFi communication mode or a Bluetooth communication mode, and the wireless broadcast unit (32) is connected to an antenna unit (33) for wirelessly receiving and transmitting data. The input end of the micro processing unit (31) of the wireless transmission module (30) has a flow connection port (34), and the flow connection port (34) is available for selection with the flow meter (25) of the aforementioned inflatable seat (20). The connection is for receiving the signal of the flow of the air supply loop detected by the receiving flow meter (25), and the micro processing unit (31) of the wireless transmission module (30) further has a data connection. (35), the data port (35) is adapted to selectively connect the RFID reading element (27) of the aerating seat (20) for receiving the tag element on the carrier (80) through the reading element (27) ( 85) The data transmission signal, and the wireless transmission module (30) has a power management unit (37) connected to the micro processing unit (31), and the power management unit (37) can provide the entire wireless transmission module (30). a battery of the power source, and the power management unit (37) can provide power to the flow meter (25), and the microprocessor unit (31) of the wireless transmission module (30) has a flow control unit (38). The airflow control unit (38) is connected to a control driving component (40), and the control driving component (40) is disposed on the aforementioned inflatable seat ( 20) One side of the flow control valve (24), and the control drive element (40) and the flow control valve (24) respectively have an intermeshable gear (41, 240) for controlling the flow control of the drive element (40) The valve (24) adjusts the flow rate of the gas supply circuit; thereby, each of the inflatable seats (20) of the cabinet (10) has a wireless transmission module (30) for allowing transmission through the wireless transmission module (30) The monitoring of the staff at the remote end constitutes a wireless transmission module and the application of the inflatable seat and the inflatable cabinet.

In the actual application, as shown in the first and second figures, each of the inflatable seats (20) of the cabinet (10) is connected with a wireless transmission module (30), and the cabinet (10) is inside. A wireless receiving module (50) is further provided, and the wireless receiving module (50) is configured to receive data transmitted by the wireless transmission module (30) of each of the inflatable seats (20), thereby further reducing signal lines. The wireless receiving module is configured to transmit the wireless signal only inside the cabinet (10), and the wireless receiving module (50) can utilize a connecting line (51) and a processing module (60) disposed outside the cabinet (10). The connection, wherein the connection line (51) can be selected from the RJ45 signal line to avoid the interference problem of the metal shielding of the cabinet (10), to ensure the correctness and effectiveness of the data transmission, and the processing module (60) has logic, The operation module and the processing module (60) can be built in an inflation management program. The processing module (60) can be selected from a general computer, and the processing module (60) is connected to a display and control function. The machine interface unit (65) is configured to display and monitor the state of each of the inflatable seats (20) in the cabinet (10) for monitoring by a staff member; Referring to a second, as shown in FIG. 3 & 4, the wireless transmission module (30) using the flow port (34), data ports (35) and the flow control unit (38) and the flow meter (25) of the inflatable seat (20), the reading element (27) and the control drive element (40) of the flow control valve (24), when the flow meter (25) When it is detected that the flow rate of the air supply circuit is lower than a preset value or is 0, the micro processing unit (31) of the wireless transmission module (30) determines that the vehicle (80) is not placed on the inflatable seat (20). The scanning operation of the reading component (27) and the transmission operation of the radio broadcasting unit (32) and the antenna unit (33) can be stopped by the power management unit (37) for energy saving purposes; and when the carrier (80) is placed On the inflatable seat (20), and synchronously opening the charging and exhausting valve members (22, 23) and the intake and exhaust valves (81, 82), after the airflow in the air supply circuit starts to flow, the flowmeter (25) can be inspected. Knowing the flow rate, and transmitting the flow data to the micro processing unit (31) via the flow connection port (34), and determining that the carrier device (80) is set by the micro processing unit (31), at which time the micro processing unit (31) transmits power. The management unit (37) activates the reading component (27) to scan and read the data on the label component (85) of the carrier (80), and activates the wireless broadcast unit (32) and the antenna unit (33) for wireless data transmission; Transmission module (30) After receiving the relevant signal, the micro processing unit (31) can be interpreted and processed by the micro processing unit (31), then transmitted by the wireless broadcasting unit (32) via the antenna unit (33), and the wireless transmission module (30) The airflow control unit (38) can synchronously provide power and control signals to the control driving component (40) of the venting seat (20) flow control valve (24), and can actuate the driving component (40) to synchronously drive the flow according to actual conditions. The control valve (24) is configured to adjust the gas flow rate of the gas supply circuit, and can provide different inflation time and inflation efficiency of each of the inflatable seats (20) to meet different inflation requirements; enabling the creation to be located at the distal end Processing module (60) display And monitoring the inflation and use state of each of the inflatable seats (20) in the cabinet (10), so that the staff can operate according to the actual situation to increase the inflation rate and ensure the stable circulation of the gas inside the vehicle (80). To achieve the effect of saving gas, the environmental conditions inside the carrier (80), such as humidity and temperature, can be further controlled.

In another embodiment of the present invention, as shown in FIG. 5, the wireless receiving module (50) may be disposed outside the cabinet (10), and a wireless relay is further disposed inside the cabinet (10). a receiver (55), wherein the wireless relay receiver (55) is configured to receive data transmitted by each of the wireless transmission modules (30) of each of the inflatable seats (20), and transmit the data to an external wireless receiving module The group (50), the wireless receiving module (50) can be connected to the processing module (60) by using a connecting line (52), wherein the connecting line (52) can be selected from the RS232 signal line to reduce The interference of the metal shield of the cabinet (10) improves the correctness and effectiveness of the data transmission, and has the same efficacy and practical value as the foregoing.

Through the implementation of the foregoing technical means, the present invention further has the following performance and power enhancement in addition to the aforementioned performance:

1. The inflatable seat (20) and the wireless transmission module (30) of the present invention can be separately modularized, and since the wireless transmission module (30) is a wireless transmission design, the configuration and installation of the overall line can be simplified. Thereby reducing the installation cost of the system.

2. Furthermore, the inflatable seat (20) and the wireless transmission module (30) of the present invention are modularly designed to greatly reduce the configuration of the power line and the signal line, so that no power line or power line is required for maintenance. The repair of signal lines effectively reduces the cost of maintenance and repair.

3. The wireless transmission module (30) of the present invention can use the flow rate of the detection flow meter (25) to determine whether the carrier (80) is placed on the base (21) of the inflatable seat (20) for use as When the carrier (80) is placed, the wireless broadcasting unit (32) and the antenna unit (33) of the wireless transmission module (30) are activated, and the RFID reading element (27) of the inflatable seat (20) is scanned for scanning without continuing. Sexual scanning, reading and transmitting data to achieve energy saving.

4. The wireless transmission module (30) of the present invention is provided with a flow control unit (38) connected to the control drive element (40) of the flow control valve (24) for selectively controlling the flow rate of the air supply circuit to It can start the inflation circuit, the inflation amount and the inflation rate according to the actual situation, without continuously injecting clean gas, which can effectively reduce the gas cost.

In this way, it can be understood that the present invention is an excellent creation, in addition to effectively solving the problems faced by the practitioners, and greatly improving the efficiency, and the same or similar product creation or public use is not seen in the same technical field. At the same time, it has the effect of improving the efficiency. Therefore, the present invention has met the requirements for "novelty" and "progressiveness" of the invention patent, and is filed for patent application according to law.

(24)‧‧‧Flow control valve

(240)‧‧‧ Gears

(25)‧‧‧ Flowmeter

(30)‧‧‧Wireless transmission module

(31)‧‧‧Microprocessing unit

(32) ‧‧‧Wireless Broadcasting Unit

(33)‧‧‧Antenna unit

(34) ‧‧‧Flow connection埠

(35) ‧‧‧Datalink埠

(37)‧‧‧Power Management Unit

(38)‧‧‧Airflow control unit

(40) ‧‧‧Control drive components

(41)‧‧‧ Gears

Claims (9)

A wireless transmission module includes: a micro processing unit; a wireless broadcasting unit, the wireless broadcasting unit is connected to the micro processing unit; an antenna unit is connected to the wireless broadcasting unit to send and receive a signal; The flow connection port is connected to the micro processing unit, and the flow connection port is selectively connectable to an external flow meter; a data connection port, the data connection port is connected to the micro processing unit, and the data connection port is available Optionally connected to an externally located RFID reading component; a power management unit coupled to the aforementioned microprocessor unit, the power management unit providing power required by the wireless transmission module. The wireless transmission module of claim 1, wherein the wireless broadcast unit is selectable from a WiFi communication mode. The wireless transmission module of claim 1, wherein the wireless broadcast unit is selectable from a Bluetooth communication mode. The wireless transmission module according to claim 1, wherein the microprocessor unit has an airflow control unit, and the airflow control unit is connected to an external control driving component, and the control driving component is disposed outside. The flow control valve allows the control drive element to actuate the flow control valve to adjust the flow rate. The wireless transmission module of claim 4, wherein the control drive component and the flow control valve have a gear that can mesh with each other. An inflatable seat comprising: a base body having at least one inflation valve member connected to the air supply circuit and at least one exhaust valve member connected to the exhaust circuit, and further comprising a connecting air supply circuit on the base body a flow meter, and an RFID reading element is disposed on the base of the inflatable seat; and at least one wireless transmission module as claimed in claim 1 is fixed in the base body, correspondingly for a gas flowing through the inflatable seat Generate and transmit a signal. The inflatable seat according to Item 6 of the patent application, wherein the air supply circuit of the base body is provided with a flow control valve in front of the flow meter. An inflatable cabinet comprising: a cabinet having at least one pole, and a periphery of the rack is covered with a side panel; at least one inflatable seat as claimed in claim 6 is fixed in the mast of the cabinet a wireless receiving module, the wireless receiving module is disposed inside the cabinet for wirelessly receiving and transmitting the signal to the wireless transmission module of each of the inflatable seats; and a processing module, the processing module is disposed in the cabinet Outside the body, the processing module connects the wireless receiving module with a signal. An inflatable cabinet comprising: a cabinet having at least one pole, and a periphery of the rack is covered with a side panel; at least one inflatable seat as claimed in claim 6 is fixed in the mast of the cabinet ; a wireless relay receiver, the wireless relay receiver is disposed inside the cabinet, and wirelessly receives and transmits the signal to each wireless transmission module of the inflatable seat; a wireless receiving module, the wireless receiving module Provided on the outside of the cabinet for wirelessly receiving and transmitting the signal to the wireless relay receiver; and a processing module, the processing module is disposed outside the cabinet, and the processing module is connected to the wireless receiver by using a signal Module.