TW201506177A - Evaporation source device - Google Patents

Abstract

Provided is an evaporation source device that is capable of exhibiting an excellent energy conservation effect when used, for example, with a crucible for large-substrate vapor deposition. An evaporation source device according to the present invention is equipped with: a main body heating unit (4) that heats a crucible main body (2) in which is housed a vapor deposition material (1) and in which a crucible opening part (3) is formed so as to protrude; and an opening part heating unit (5) that heats the crucible opening part (3). The evaporation source device is further provided with a heating control unit that controls the opening part heating unit (5) such that the heating start time of the crucible opening part (3) is delayed from the heating start time of the crucible main body (2), and such that the heating of the crucible opening part (3) is started before the temperature of the crucible main body (2) reaches the melting temperature or the sublimation temperature of the vapor deposition material (1). The evaporation source device is structured such that when the temperature of the crucible main body (2) reaches the melting temperature or the sublimation temperature of the vapor deposition material (1), the temperature of the crucible opening part (3) is at the melting temperature or the sublimation temperature of the vapor deposition material (1).

Description

Evaporation source device

The present invention relates to an evaporation source device.

For example, as shown in FIG. 1, the vapor deposition material 31 is formed on the crucible body 32 in which the vapor deposition material 31 is housed, and the vapor deposition material 31 that is heated and accommodated in the crucible body 32 is formed. The nozzle-like opening portion 33 is provided with a body heating portion 34 for heating the first body 32 and an opening heating portion 35 for heating the opening portion 33.

In such an evaporation source device, in order to prevent clogging due to adhesion of the vapor deposition material 31 due to evaporation or sublimation of the crucible body 32 to the crucible opening portion 33, the temperature of the crucible opening portion 33 is made the crucible body 32. The vapor deposition was performed at a temperature higher than the temperature.

Specifically, in the conventional evaporation source device, for example, as disclosed in Patent Document 1, the heating by the opening heating unit 35 is controlled to be started earlier than the heating by the main body heating unit 34, or as shown in FIG. 2, The control cost body heating unit 34 starts heating simultaneously with the opening portion heating unit 35, and the temperature of the crucible opening portion 33 is surely made into the vapor deposition material 31. The vapor deposition was carried out in a state where the melting temperature or the sublimation temperature was higher than the melting temperature. In Fig. 2, the curve a1 shows the change of the temperature of the crucible body 32 with respect to time, the curve a2 shows the change of the heating output of the main body heating portion 34 with respect to time, and the curve b1 shows the change of the temperature of the opening portion 33 with respect to time. Curve b2 shows the change in the heating output of the opening heating portion 35 with respect to time.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-188763

In addition, in the case where the heating portion of the opening portion is controlled as described above, the vapor deposition may be performed in a state where the temperature of the opening of the crucible is more than or equal to the evaporation temperature or the sublimation temperature of the vapor deposition material. The increase in the size of the substrate increases the size of the evaporation source, and the number of openings in the crucible increases as the size increases. The increase in the energy consumption when heating the evaporation source becomes a major problem. Therefore, the inventors focused on the heating of the opening. The heating control of the Ministry, after the results of various reviews, obtained the following explanation.

That is, the opening portion of the crucible is generally smaller than the crucible body, and the heating time is shorter than that of the crucible body. Therefore, the heating start time of the crucible opening is slower than the heating start time of the crucible body, or the temperature of the crucible body. Before reaching the melting temperature or the sublimation temperature of the vapor deposition material, even if the heating output is reduced, vapor deposition can be performed in a state where the temperature of the opening of the crucible is made higher than that of the crucible body.

The present invention has been developed in accordance with the above-described explanations of the inventors of the present invention, and an object of the invention is to provide energy consumption for suppressing heating of a crucible opening, and to provide excellent energy saving for, for example, vapor deposition on a large substrate. The evaporation source device of the effect.

The gist of the present invention will be described in detail with reference to the drawings.

In the evaporation source device of the present invention, the crucible body 2 in which the vapor deposition material 1 is housed is formed with an opening portion 3 for ejecting the vapor deposition material 1 accommodated in the crucible body 2 and heated, and is provided with heating. The main body heating unit 4 of the crucible body 2 and the opening heating unit 5 that heats the crucible opening 3 are characterized in that a heating control unit is provided, and the heating control unit controls the opening heating unit 5 to open the opening portion 3 of the crucible The heating start time is slower than the heating start time of the crucible body 2, and the heating of the crucible opening portion 3 is started before the temperature of the crucible body 2 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1, when the crucible body 2 is When the temperature reaches the melting temperature or the sublimation temperature of the vapor deposition material 1, the temperature of the crucible opening 3 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1.

Further, in the evaporation source device, the crucible body 2 in which the vapor deposition material 1 is housed is formed with an opening portion 3 for ejecting the vapor deposition material 1 accommodated in the crucible body 2 and heated, and is provided with heating. The main body heating unit 4 of the crucible body 2 and the opening heating unit 5 that heats the crucible opening 3 are characterized in that a heating control unit is provided, and the heating control unit controls The opening heating unit 5 is configured to start heating the crucible opening 3 before the temperature of the crucible body 2 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1. The heating control unit is configured to follow the crucible body When the temperature of 2 approaches the melting temperature or the sublimation temperature of the vapor deposition material 1, the crucible opening 3 is heated while gradually increasing the heating output of the opening heating unit 5, and the temperature of the crucible body 2 reaches the vapor deposition material 1 At the melting temperature or the sublimation temperature, the temperature of the crucible opening portion 3 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1.

Further, in the evaporation source device according to the first aspect of the invention, the shape of the opening portion 3 is set such that the heat capacity of the opening portion 3 is smaller than the heat capacity of the crucible body 2, and is configured to be heated compared to the body. The energy consumed by the portion 4 is less than the energy consumption of the opening heating portion 5.

Further, in the evaporation source device of the second aspect of the invention, the shape of the opening portion 3 is set such that the heat capacity of the opening portion 3 is smaller than the heat capacity of the body 2, and is configured to be heated compared to the body. The energy consumed by the portion 4 is less than the energy consumption of the opening heating portion 5.

In the evaporation source device of the third aspect of the invention, the shape of the opening of the crucible opening 3 is set such that the heat capacity becomes smaller as the protruding front end side of the crucible opening 3 is formed.

In the evaporation source device of the fourth aspect of the invention, the shape of the opening of the crucible opening 3 is set such that the heat capacity becomes smaller as the protruding front end side of the opening portion 3 is formed.

The evaporation source device according to any one of claims 1 to 6, wherein the opening portion 3 is made of a material having a thermal conductivity higher than that of the crucible body 2.

The evaporation source device according to any one of claims 1 to 6, wherein the opening heating unit 5 includes a mesh-shaped cylindrical member 7 provided around the opening 3 of the crucible; a heater around the cylindrical member 7; and a heat reflecting member 9 provided around the heater.

The evaporation source device according to the seventh aspect of the invention, wherein the opening heating unit 5 includes a mesh-shaped cylindrical member 7 provided around the opening 3 of the crucible; the cylindrical member 7 is provided a surrounding heater; and a heat reflecting member 9 disposed around the heater.

According to the present invention, it is possible to reduce the energy consumption for heating the opening of the crucible, and to exhibit an excellent energy saving effect, for example, in the vapor deposition of a large substrate.

1‧‧‧ evaporation materials

2‧‧‧坩锅体

3‧‧‧ Shabu-shabu opening

4‧‧‧ Body heating

5‧‧‧ Opening heating section

6‧‧‧Flange

7‧‧‧Cylinder components

8‧‧‧ Jacket heater

9‧‧‧ Heat reflecting member

10‧‧‧round window

11‧‧‧ square window

Fig. 1 is a schematic cross-sectional view showing an evaporation source device.

Fig. 2 is a schematic explanatory view showing a conventional temperature control mode.

Fig. 3 is a schematic explanatory view showing a temperature control mode of the embodiment.

Fig. 4 is a schematic cross-sectional view showing the embodiment.

Fig. 5 is a schematic cross-sectional view showing a configuration example of an evaporation source device.

Fig. 6 is a schematic cross-sectional view showing a configuration example of an evaporation source device.

Fig. 7 is a schematic cross-sectional view showing a configuration example of an evaporation source device.

Fig. 8 is a schematic cross-sectional view showing a configuration example of an evaporation source device.

Fig. 9 is a schematic cross-sectional view showing a configuration example of an evaporation source device.

Fig. 10 is a schematic cross-sectional view showing a configuration example of an evaporation source device.

Fig. 11 is a schematic explanatory diagram showing an example of a temperature control mode.

Fig. 12 is a schematic explanatory view showing an example of a temperature control mode.

Fig. 13 is a schematic explanatory diagram showing an example of a temperature control mode.

Fig. 14 is an enlarged schematic cross-sectional view showing a part of a configuration example of an evaporation source device.

Fig. 15 is an exploded perspective view showing a configuration example of the evaporation source device.

Fig. 16 is an exploded perspective view showing a configuration example of the evaporation source unit.

The preferred embodiment of the present invention will be briefly described on the basis of the drawings showing the effects of the present invention.

When the substrate is vapor-deposited by the crucible disposed in the vacuum chamber, The opening heating unit 5 is controlled such that the heating start time of the crucible opening 3 is slower than the heating start time of the crucible body 2, and the opening of the crucible is started before the temperature of the crucible body 2 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1. 3 heating.

In other words, it is not controlled so that the heating by the opening heating unit 5 is started earlier than the heating by the main body heating unit 4, or the main body heating unit 4 starts heating simultaneously with the opening heating unit 5, but by utilizing The heating of the opening heating portion 5 is performed slowly, and this portion can suppress the energy consumption of the opening heating portion 5 by the subsequent heating. In particular, in the case of a large-sized substrate vapor deposition crucible, the number of openings in the crucible is increased, and the energy saving effect is increased.

Specifically, as shown by curves B1 and B2 showing changes in the temperature of the 坩埚 opening 3 and the change in the heating output of the opening heating unit 5 shown in FIG. 3, the heating output control of the opening heating unit 5 is performed so that the display is performed. The curve A1 of the temperature change of the crucible body 2 is heated before reaching the sublimation temperature of the vapor deposition material 1. When the curve A1 reaches the sublimation temperature of the vapor deposition material 1, the temperature of the opening portion 3 becomes the sublimation temperature. the above. The curve b1 and the curve b2 show changes in the temperature of the opening portion 33 of the conventional evaporation source device projected from FIG. 2 and the heating output of the opening heating portion 35. Further, the curve A2 shows a change in the heating output of the main body heating unit 4.

Therefore, in FIG. 3, the curve b2 corresponding to the heating output of the opening heating portion 35 of the conventional evaporation source device and the region X surrounded by the curve B2 indicating the heating output of the opening heating portion 5 of the present invention are shown. In the range, the energy consumption of the opening heating unit 5 can be suppressed.

Here, even if the heating by the opening heating unit 5 is slow, the heat capacity of the opening portion 3 is generally smaller than that of the body 2, and this portion can be achieved by shortening the heating time. Therefore, it can be easily achieved: in the body 2 When the temperature reaches the melting temperature or the sublimation temperature of the vapor deposition material 1, the temperature of the crucible opening portion 3 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1.

Further, the heating by the opening heating unit 5 is not performed slowly, but the heating output by the opening heating unit 5 is set to be small at the start of heating, for example, as the temperature of the crucible body 2 approaches. The melting temperature or the sublimation temperature of the vapor deposition material 1 gradually increases, and the first heating output is set to a small portion, and the energy consumption of the opening heating portion 5 can be suppressed. Moreover, in this case, the opening portion 3 can be gradually heated, and the temperature distribution of the entire crucible can be suppressed.

Further, for example, by setting the shape of the opening portion 3, the heat capacity of the opening portion 3 is reduced, or the shape of the opening portion 3 is set, and the heat capacity of the protruding front end side closer to the opening portion 3 is made smaller. Or the opening portion 3 is made of a material having a thermal conductivity higher than that of the body 2, and the heating time of the opening portion 3 can be further shortened. This portion allows the heating start time of the opening portion 3 to be higher than the heating of the body 2 Slow time can further suppress energy consumption.

Further, the opening heating portion 5 is provided with a mesh-shaped cylindrical member 7 provided around the opening portion 3; a heater provided around the cylindrical member 7; and heating there In the case of the structure of the heat reflecting member 9 around the device, it can be easily manufactured and can be heated more efficiently. The opening portion heating portion 5 of the opening portion 3 is formed.

[Examples]

Specific embodiments of the invention are described in terms of the drawings.

This embodiment is a vacuum tank in a vapor deposition apparatus for evaporating source means for evaporating an organic material on a substrate, for example.

Specifically, in the evaporation source device of the present embodiment, the crucible opening portion 3 for ejecting the vapor-deposited material 1 accommodated in the crucible body 2 and heated is protruded from the crucible body 2 in which the vapor deposition material 1 is housed. Further, the main body heating unit 4 that heats the crucible body 2 and the opening heating unit 5 that heats the crucible opening 3 are provided, and a heating control unit that controls the opening heating unit 5 to open the opening portion The heating start time of 3 is slower than the heating start time of the crucible body 2, and the heating of the crucible opening portion 3 is started before the temperature of the crucible body 2 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1, when the crucible body is When the temperature of 2 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1, the temperature of the crucible opening 3 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1.

The vapor deposition material 1 is accommodated in the crucible body 2, and a jacket heater as the main body heating portion 4 is provided along the longitudinal direction of the crucible body 2 on the top surface, the side surface, and the bottom surface of the crucible body 2, respectively.

The opening portion 3 is formed in a cylindrical nozzle shape projecting from the top surface of the crucible body 2, and is arranged in a line shape in a plurality of ways along the longitudinal direction of the crucible body 2. Here, the circumferential surface of the opening portion 3 is wound A jacket heater as the opening heating portion 5 is provided. Further, the film formation surface of the substrate is placed in the vacuum chamber so as to face the opening portion 3 of the top surface of the crucible body 2, respectively.

In the present embodiment, the crucible opening portion 3 is formed to have a sufficiently thinner thickness than the crucible body 2 in order to further reduce the heat capacity thereof as shown in FIG. Specifically, it is set to have a thickness equal to or less than 1/4 of the thickness of one of the wall surfaces of the crucible body 2 (about 1/5 in the present embodiment). Further, as shown in FIG. 5, for example, the crucible opening portion 3 may be formed to have a thin thickness, and the heat capacity may be reduced by shortening the protruding length.

Moreover, in the case where the heat capacity becomes smaller toward the protruding distal end side of the opening portion 3, the heating time can be further shortened. For example, as shown in FIG. 6, the inner diameter of the crotch opening 3 may be increased in diameter toward the protruding distal end side, or as shown in FIG. 7, the outer diameter of the crotch opening 3 may be toward the protruding distal end side. The shape of the diameter is reduced, or as shown in FIG. 8, the inner diameter and the outer diameter of the opening portion of the crucible are made smaller toward the front end side and the thickness is made constant, or as shown in FIG. The inner diameter and the outer diameter of the portion are reduced in diameter toward the front end side, and the thickness becomes thinner toward the front end side.

Further, the opening portion 3 of the crucible may be different from the crucible body 2, and may be made of a material having a thermal conductivity higher than that of the main body 2. For example, the crucible body 2 is made of tantalum, and the crucible opening portion 3 is made of, for example, an aluminum alloy. Specifically, as shown in FIG. 10, a structure in which the opening portion 3 made of a high thermal conductivity material is attached to the top surface of the crucible body 2 may be employed. In this case, the flange portion 6 is provided at the base end portion of the opening portion 3 to A flange portion 6 is attached to the crucible body 2 by a bolt or the like.

Further, the main body heating unit 4 and the opening heating unit 5 control the heating output (electric power) by a heating control unit (not shown) to control the temperature of the crucible body 2 and the crucible opening 3. For example, a general PID temperature control device or the like is provided in each heating unit, and the heating output of each heating unit is controlled by these devices in a predetermined predetermined pattern.

In the present embodiment, as described above, the heating output of the main body heating unit 4 and the opening heating unit 5 is performed in the mode shown in FIG. In other words, as shown by the curves B1 and B2 of the temperature of the opening portion 3 and the change in the heating output of the opening portion heating portion 5, the heating output control of the opening portion heating portion 5 is performed so as to change the temperature from the display body 2. When A1 reaches the sublimation temperature of the vapor deposition material 1, heating is started, and when the curve A1 reaches the sublimation temperature of the vapor deposition material 1, the temperature of the opening portion 3 becomes equal to or higher than the sublimation temperature.

When the vapor deposition is performed, the heating start time of the opening heating unit 5 is slower than the heating start time of the main body heating unit 4, but it is possible to obtain the maximum energy consumption suppression effect as much as possible. Slow is better. This is because, for example, as shown in FIG. 11, in the case where the heating start time is slowed and the heating is required to be rapidly heated and the heating output needs to be temporarily increased, the energy consumption increases in the region Y surrounded by the curves B2 and b2, but The region Y is extremely small in comparison with the region X which is widened by slowing the heating start time, and is easily eliminated.

Further, as shown in FIG. 12 and FIG. 13, the heating control unit may be configured to heat the heating output of the opening heating unit 5 while gradually increasing the heating output. In the opening portion 3, when the temperature of the crucible body 2 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1, the temperature of the crucible opening portion 3 reaches the melting temperature or the sublimation temperature of the vapor deposition material 1. In this case, the heating start time of the opening heating unit 5 may be before the heating start time of the opening portion 3. Further, Fig. 12 shows a mode in which the control interval is set to be large and the heating output is stepwise increased. Fig. 13 shows a mode in which the control interval is set to be small and the heating output is continuously increased. Since the control interval is set to be small, it is possible to reduce the overshoot as much as possible, which is extremely desirable.

Further, a configuration may be adopted in which the jacketed heater is not directly provided in the wound state around the opening portion 3, but a mesh-shaped cylindrical member 7 is provided around the opening portion 3, and the circle is provided therein. The jacket heater 8 is placed in a wound state around the tubular member 7, and a cylindrical heat reflecting member 9 is provided around the jacket heater 8. Further, if the mesh-shaped cylindrical member 7 has a structure in which a plurality of circular windows 10 are provided as shown in Fig. 15, and a plurality of square windows 11 are provided as shown in Fig. 16, a jacket heater can be provided. The heat is smoothly transmitted to the structure of the opening portion 3, and the setting can be freely performed.

In this case, by providing the heat reflecting member 9, the jaw opening portion 3 can be further efficiently heated by the jacket heater 8. Moreover, when the jacket heater 8 is attached to the inner surface of the heat reflecting member 9, it is easier to fit the jacket heater 8 to the mesh-shaped cylindrical member 7 and integrate it, and the opening is easy. Manufacturing and arrangement of the heating unit 5 .

Furthermore, the present invention is not limited to the embodiment, and the specific structure of each constituent element can be appropriately designed.

1‧‧‧ evaporation materials

2‧‧‧坩锅体

3‧‧‧ Shabu-shabu opening

4‧‧‧ Body heating

5‧‧‧ Opening heating section

Claims (9)

An evaporation source device is provided with a crucible opening for ejecting the vapor deposition material accommodated in the crucible body and having a vapor deposition material, and is provided with a heating body for heating the crucible body And an opening heating unit that heats the opening of the crucible, wherein the heating control unit controls the opening heating unit to cause a heating start time of the crucible opening to be higher than a heating start time of the crucible body Slowly, the heating of the opening of the crucible is started before the temperature of the crucible body reaches the melting temperature or the sublimation temperature of the vapor deposition material. When the temperature of the crucible body reaches the melting temperature or the sublimation temperature of the vapor deposition material, the crucible The temperature of the opening reaches the melting temperature or sublimation temperature of the vapor deposition material. An evaporation source device is provided with a crucible opening for ejecting the vapor deposition material accommodated in the crucible body and having a vapor deposition material, and is provided with a heating body for heating the crucible body And an opening heating unit that heats the opening of the crucible, wherein the heating control unit controls the opening heating unit such that the temperature of the crucible body reaches a melting temperature or a sublimation temperature of the vapor deposition material. The heating of the opening portion is started, and the heating control unit is configured to gradually increase the heating output of the heating portion of the opening as the temperature of the crucible body approaches the melting temperature or the sublimation temperature of the vapor deposition material. In the opening of the crucible, when the temperature of the crucible body reaches the melting temperature or the sublimation temperature of the vapor deposition material, the temperature of the crucible opening reaches the melting temperature or the sublimation temperature of the vapor deposition material. The evaporation source device according to claim 1, wherein the shape of the opening of the crucible is set such that a heat capacity of the opening of the crucible is smaller than a heat capacity of the crucible body, and is configured to be larger than energy consumption of the main body heating unit. The energy consumption of the opening heating portion becomes small. The evaporation source device according to claim 2, wherein the shape of the opening of the crucible is set such that a heat capacity of the opening of the crucible is smaller than a heat capacity of the crucible body, and is configured to be larger than energy consumption of the main body heating unit. The energy consumption of the opening heating portion becomes small. In the evaporation source device of the third aspect of the invention, the shape of the opening of the crucible is set such that the heat capacity becomes smaller as the protruding front end side of the opening of the crucible is formed. In the evaporation source device of the fourth aspect of the invention, the shape of the opening of the crucible is set such that the heat capacity becomes smaller as the protruding front end side of the opening of the crucible is formed. The evaporation source device according to any one of claims 1 to 6, wherein the opening of the crucible is made of a material having a thermal conductivity higher than that of the crucible body. The evaporation source device according to any one of claims 1 to 6, wherein the opening heating unit includes a mesh-shaped cylindrical member provided around the opening of the crucible; and the cylindrical member is provided a surrounding heater; and a heat reflecting member disposed around the heater. The evaporation source device according to claim 7, wherein the opening heating portion includes a mesh-shaped cylindrical member provided around the opening of the crucible; and a heater provided around the cylindrical member; And located here A heat reflecting member around the heater.