TW201443448A - 用於射頻功率量測的微製造熱量計 - Google Patents
用於射頻功率量測的微製造熱量計 Download PDFInfo
- Publication number
- TW201443448A TW201443448A TW103105806A TW103105806A TW201443448A TW 201443448 A TW201443448 A TW 201443448A TW 103105806 A TW103105806 A TW 103105806A TW 103105806 A TW103105806 A TW 103105806A TW 201443448 A TW201443448 A TW 201443448A
- Authority
- TW
- Taiwan
- Prior art keywords
- power
- load
- heat medium
- low frequency
- fluid
- Prior art date
Links
- 238000005259 measurement Methods 0.000 title description 42
- 238000000034 method Methods 0.000 claims abstract description 46
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 116
- 239000000758 substrate Substances 0.000 claims description 76
- 230000008859 change Effects 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 239000012809 cooling fluid Substances 0.000 description 29
- 239000000463 material Substances 0.000 description 14
- 238000011144 upstream manufacturing Methods 0.000 description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 description 6
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 6
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- -1 but not limited to Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000002480 mineral oil Substances 0.000 description 2
- 235000010446 mineral oil Nutrition 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- RVCKCEDKBVEEHL-UHFFFAOYSA-N 2,3,4,5,6-pentachlorobenzyl alcohol Chemical compound OCC1=C(Cl)C(Cl)=C(Cl)C(Cl)=C1Cl RVCKCEDKBVEEHL-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
- G01K17/08—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361767872P | 2013-02-22 | 2013-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201443448A true TW201443448A (zh) | 2014-11-16 |
Family
ID=51387499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103105806A TW201443448A (zh) | 2013-02-22 | 2014-02-21 | 用於射頻功率量測的微製造熱量計 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10168365B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2959278A4 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2016510871A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20150121133A (cg-RX-API-DMAC7.html) |
| CN (1) | CN105143841A (cg-RX-API-DMAC7.html) |
| HK (1) | HK1217039A1 (cg-RX-API-DMAC7.html) |
| TW (1) | TW201443448A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2014130689A1 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI727806B (zh) * | 2019-06-06 | 2021-05-11 | 聯發科技股份有限公司 | 熱感測器及晶片 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10184330B2 (en) * | 2015-06-24 | 2019-01-22 | Chevron U.S.A. Inc. | Antenna operation for reservoir heating |
| DE102015119832A1 (de) * | 2015-11-17 | 2017-05-18 | Xylem Ip Management Sàrl | Förderpumpe zur Druckerhöhung in einer Leitung und Verfahren zum Betreiben einer Förderpumpe |
| CN110161303B (zh) * | 2019-06-14 | 2020-12-01 | 电子科技大学 | 一种0-6GHz量热式微波功率计用微波负载 |
| CN112630526B (zh) * | 2020-12-17 | 2024-04-05 | 北京航天计量测试技术研究所 | 改进型流量式微波中功率的测量装置和测量方法 |
| CN113295921B (zh) * | 2021-04-26 | 2022-11-25 | 中国计量科学研究院 | 一种基于微量热计的低频测温修正方法 |
| CN113702698B (zh) * | 2021-09-22 | 2023-08-15 | 中国计量科学研究院 | 用于微波大功率测量系统的电阻片式射频大功率传感器 |
| EP4476794A1 (en) * | 2022-02-07 | 2024-12-18 | Bird Technologies Group Inc. | Liquid-cooled termination for radio frequency power measurement |
| WO2025091051A1 (en) * | 2023-10-26 | 2025-05-01 | Bird Technologies Group Inc. | Radio frequency calorimeter |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH549213A (de) * | 1971-11-25 | 1974-05-15 | Basf Ag | Verfahren und einrichtung zur isothermen kalorimetrie. |
| GB1544270A (en) * | 1975-06-12 | 1979-04-19 | Ryusyo Industrial Co | Integrating calorimeter |
| JPS5426856Y2 (cg-RX-API-DMAC7.html) | 1975-06-30 | 1979-09-04 | ||
| JPS5483484A (en) | 1977-12-15 | 1979-07-03 | Agency Of Ind Science & Technol | Power measuring apparatus by calorimeter method |
| DE3208511A1 (de) | 1982-03-09 | 1983-09-22 | Siemens AG, 1000 Berlin und 8000 München | Waermemengenzaehler |
| US5156459A (en) * | 1989-09-01 | 1992-10-20 | The United States Of America As Represented By The United States Department Of Energy | Radiation beam calorimetric power measurement system |
| US5186540A (en) | 1991-12-30 | 1993-02-16 | Raytheon Company | Power measurement calorimeter |
| US5376880A (en) | 1993-03-30 | 1994-12-27 | At&T Corp. | Method and apparatus for measuring the average power in an electric signal |
| US5343755A (en) | 1993-05-05 | 1994-09-06 | Rosemount Inc. | Strain gage sensor with integral temperature signal |
| US5550526A (en) | 1994-12-27 | 1996-08-27 | Lucent Technologies Inc. | Thermal detection elements with heater |
| US5965410A (en) | 1997-09-02 | 1999-10-12 | Caliper Technologies Corp. | Electrical current for controlling fluid parameters in microchannels |
| US6759839B2 (en) | 2000-01-11 | 2004-07-06 | Anritsu Corporation | Wide-band RF signal power detecting element and power detecting device using the same |
| GB2385673B (en) | 2002-02-20 | 2005-05-18 | Racal Instruments Ltd | Radio frequency power measurement |
| US7447490B2 (en) | 2005-05-18 | 2008-11-04 | Nvidia Corporation | In-situ gain calibration of radio frequency devices using thermal noise |
| JP4831670B2 (ja) * | 2006-02-24 | 2011-12-07 | 富士通株式会社 | 試料抵抗測定装置 |
| US20080114555A1 (en) * | 2006-10-06 | 2008-05-15 | Scott Jonathan B | Fast Extrapolation of a Thermal Sensor's Final Value and Discovery/Verification of a Thermal Sensor's Thermal Time Constant |
| JP2008287999A (ja) * | 2007-05-16 | 2008-11-27 | Panasonic Corp | プラズマ処理装置およびその制御方法 |
| CN100578236C (zh) | 2007-10-12 | 2010-01-06 | 核工业西南物理研究院 | 基于量热法的兆瓦级微波功率测量系统 |
| US8231267B2 (en) | 2008-06-06 | 2012-07-31 | Perkinelmer Health Sciences, Inc. | Calorimeter and methods of using it and control systems therefor |
| US8562210B2 (en) | 2010-11-19 | 2013-10-22 | International Business Machines Corporation | Thermal sensor for semiconductor circuits |
| EP2475007A1 (en) * | 2011-01-05 | 2012-07-11 | Nxp B.V. | Rf-power device |
| CN102494808B (zh) | 2011-11-21 | 2014-02-12 | 中国计量科学研究院 | 微量热计、使用该微量热计的功率基准系统及测量方法 |
-
2014
- 2014-02-20 US US14/769,798 patent/US10168365B2/en active Active
- 2014-02-20 KR KR1020157026047A patent/KR20150121133A/ko not_active Withdrawn
- 2014-02-20 US US14/185,298 patent/US9921251B2/en active Active
- 2014-02-20 JP JP2015558960A patent/JP2016510871A/ja active Pending
- 2014-02-20 EP EP14753815.1A patent/EP2959278A4/en not_active Withdrawn
- 2014-02-20 HK HK16104994.0A patent/HK1217039A1/zh unknown
- 2014-02-20 WO PCT/US2014/017426 patent/WO2014130689A1/en not_active Ceased
- 2014-02-20 CN CN201480022437.3A patent/CN105143841A/zh active Pending
- 2014-02-21 TW TW103105806A patent/TW201443448A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI727806B (zh) * | 2019-06-06 | 2021-05-11 | 聯發科技股份有限公司 | 熱感測器及晶片 |
| US11513012B2 (en) | 2019-06-06 | 2022-11-29 | Mediatek Inc. | Aging calibration for temperature sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016510871A (ja) | 2016-04-11 |
| WO2014130689A1 (en) | 2014-08-28 |
| KR20150121133A (ko) | 2015-10-28 |
| US10168365B2 (en) | 2019-01-01 |
| EP2959278A4 (en) | 2016-11-16 |
| US20160025783A1 (en) | 2016-01-28 |
| CN105143841A (zh) | 2015-12-09 |
| US9921251B2 (en) | 2018-03-20 |
| US20140239940A1 (en) | 2014-08-28 |
| EP2959278A1 (en) | 2015-12-30 |
| HK1217039A1 (zh) | 2016-12-16 |
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