TW201441628A - Current-diverting guide plate for probe module and probe module using the same - Google Patents

Current-diverting guide plate for probe module and probe module using the same Download PDF

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TW201441628A
TW201441628A TW102113494A TW102113494A TW201441628A TW 201441628 A TW201441628 A TW 201441628A TW 102113494 A TW102113494 A TW 102113494A TW 102113494 A TW102113494 A TW 102113494A TW 201441628 A TW201441628 A TW 201441628A
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Taiwan
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guide
probe module
shunt
probe
conductive layers
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TW102113494A
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Chinese (zh)
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TWI515437B (en
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xian-da Xu
hong-guang Fan
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Mpi Corp
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Priority to TW102113494A priority Critical patent/TW201441628A/en
Priority to US14/152,755 priority patent/US9423424B2/en
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Abstract

A current-diverting guide plate for use in a probe module is disclosed to include a plate body having a first surface, a second surface opposite to the first surface, and a plurality of through holes penetrating through the first and second surfaces. A conducting layer is provided at a periphery wall of each through hole of the plate body and electrically coupled to a probe slidably inserted through the through holes. A current-diverting circuit trace is disposed on the first surface of the plate body and electrically connected with the conducting layers for diverting the electric current flowing through probes. Thus, the current-diverting guide plate can be used to prevent the probes from possible damage due to an excessive instantaneous current.

Description

用於探針模組之分流導板及使用該分流導板之探針模組 Splitter guide for probe module and probe module using the same

本發明有關於一種用於垂直式探針卡上之探針模組,特別是指一種用於探針模組中用以對位、導引並支撐探針且具有電流分散路徑之分流導板,以及使用該分流導板之探針模組。 The invention relates to a probe module for a vertical probe card, in particular to a shunt guide for a positioning, guiding and supporting probe in a probe module and having a current dispersion path. And a probe module using the shunt guide.

請參閱第1圖所示係一種習知常用於垂直式探針卡上之探針模組10,其主要包含有一上導板11、一下導板12,以及多數根探針13,各探針13之針頭132及針尖134分別穿設於上導板11之上導孔112及下導板12之下導孔122內。藉此,當各探針13之針尖134接觸到待測物之測試點時,來自待測物之反作用力將使得各探針之針尖134往後退縮而相對該下導孔122滑移,進而使各探針13之針身136產生變形,藉此,各探針13之針尖134能夠提供穩定的接觸力量抵觸待測物的電性接點,以確實傳遞來自測試機台的測試訊號,並藉由該針身136之彈性變形提供探針13點觸待測物時之緩衝效果,以保護待測物或探針。 Please refer to FIG. 1 , which is a conventional probe module 10 commonly used for a vertical probe card, which mainly comprises an upper guide 11 , a lower guide 12 , and a plurality of probes 13 and probes . The needle 132 and the tip 134 of the 13 are respectively disposed in the guide hole 112 above the upper guide plate 11 and the guide hole 122 below the lower guide plate 12. Thereby, when the tip 134 of each probe 13 contacts the test point of the object to be tested, the reaction force from the object to be tested will cause the tip 134 of each probe to retreat backward and slide relative to the lower guide hole 122, thereby The needle body 136 of each probe 13 is deformed, whereby the needle tip 134 of each probe 13 can provide a stable contact force against the electrical contact of the test object to reliably transmit the test signal from the test machine, and The elastic deformation of the needle body 136 provides a buffering effect when the probe 13 touches the object to be tested to protect the object to be tested or the probe.

為了滿足電子產品的體積微型化及功能多元化的需求,待測物之相鄰兩個測試點之間的節距(Pitch)有朝向越變越小之趨勢,迫使探針13之針徑也就必須適當的縮小才能順利接觸到待測物之測試點。但是在針徑變細之後,探針13(特別是形成如挫曲或彎曲的針身136部位)很容易因為瞬間電流過大而發生燒針斷裂的情況,不但影響測試進度,亦造成必須維修或更換探針的問題。 In order to meet the requirements of volume miniaturization and functional diversification of electronic products, the pitch between adjacent test points of the object to be tested has a tendency to become smaller and smaller, forcing the needle diameter of the probe 13 also. It is necessary to properly shrink in order to smoothly access the test points of the test object. However, after the needle diameter is thinned, the probe 13 (especially forming a portion of the needle body 136 such as a buckling or bending) is liable to break the needle due to excessive instantaneous current, which not only affects the test progress but also requires repair or The problem of replacing the probe.

必須加以說明的是,並非只有第1圖所示之習用探針模組10才可能發生燒針之狀況,實際上,只要是習用具有至少一片用來對位、導引及支撐探針之導板的探針模組,例如美國第4622514號及7417447號專利所揭露的探針模組,都有可能發生因通過探針之電流瞬間過大而燒針的問題。 It must be noted that it is not only the conventional probe module 10 shown in FIG. 1 that the needle can be burnt. In fact, as long as it is used, at least one guide for aligning, guiding and supporting the probe is used. The probe module of the board, such as the probe module disclosed in U.S. Patent Nos. 4,622,514 and 7,417, 447, may have a problem of burning the needle due to the excessive current passing through the probe.

本發明之主要目的在於提供一種用於探針模組之分流導板,其能有效分散通過各探針之電流。 SUMMARY OF THE INVENTION A primary object of the present invention is to provide a shunt guide for a probe module that effectively dissipates current through each probe.

為了達成上述目的,本發明之分流導板包含有一板體、多數個導電層,以及一分流導線。該板體具有一第一表面、一背對該第一表面之第二表面,以及多數個貫穿該第一、第二表面之貫孔,該貫孔用以供一探針可滑移地穿設;各該導電層設於該板體之各該貫孔的孔壁,用以與穿設於該貫孔內之該探針形成電性接觸;該分流導線佈設於該板體之第一表面且電性連接各該導電層,用以分散通過各該探針之電流。 In order to achieve the above object, the shunt guide of the present invention comprises a plate body, a plurality of conductive layers, and a shunt wire. The plate body has a first surface, a second surface facing away from the first surface, and a plurality of through holes extending through the first and second surfaces, the through holes are for a probe to be slidably worn Each of the conductive layers is disposed on a hole wall of each of the through holes of the plate for electrically contacting the probe disposed in the through hole; the shunt wire is disposed on the first of the plate Each of the conductive layers is surface-connected and electrically connected to disperse current through each of the probes.

在本發明之實施例中,該分流導線具有多數條主分流段,各該主分流段連接在相鄰二該導電層之間,用以作為分散通過各該探針之電流的主要路徑。 In an embodiment of the invention, the shunt wire has a plurality of main shunt segments, each of the main shunt segments being connected between two adjacent conductive layers for acting as a main path for dispersing current through each of the probes.

在本發明之實施例中,該分流導線更具有多數條副分流段,連接在相鄰二該導電層之間,用以作為分散通過各該探針之電流的次要路徑。 In an embodiment of the invention, the shunt wire further has a plurality of sub-split sections connected between adjacent ones of the conductive layers for use as a secondary path for dispersing current through the probes.

在本發明之實施例中,各該導電層係為一具有一金屬底層及一金屬表層之複合導電層,該金屬表層設於該金屬底層之表面且摻雜有多數個高分子粒子,用以降低該貫孔之孔壁與該探針之間的摩擦係數。然而前述導電層之結構並不以此為限。 In an embodiment of the invention, each of the conductive layers is a composite conductive layer having a metal underlayer and a metal surface layer. The metal surface layer is disposed on the surface of the metal underlayer and is doped with a plurality of polymer particles for The coefficient of friction between the wall of the through hole and the probe is lowered. However, the structure of the foregoing conductive layer is not limited thereto.

藉此,本發明之分流導板能夠對通過各該探針之電流提供良好的分流效果,以避免瞬間電流過大而對各該探針造成損壞。 Thereby, the shunting guide of the present invention can provide a good shunting effect on the current passing through each of the probes to avoid damage to each of the probes caused by excessive instantaneous current.

本發明之另一目的在於提供一種使用前述分流導板的探針模組,前述分流導板適用於任何具有至少一個用以導引、對位及支撐探針之導板的探針模組中,例如(但不限於)本案、美國第4622514號或7417447號專利所揭露所之各種探針模組。 Another object of the present invention is to provide a probe module using the foregoing shunt guide, which is suitable for use in any probe module having at least one guide for guiding, aligning and supporting the probe. For example, but not limited to, the various probe modules disclosed in U.S. Patent No. 4,622,514 or U.S. Patent No. 7,417,447.

10‧‧‧探針模阻 10‧‧‧ probe mode resistance

11‧‧‧上導板 11‧‧‧Upper guide

12‧‧‧下導板 12‧‧‧ lower guide

13‧‧‧探針 13‧‧‧ probe

132‧‧‧針頭 132‧‧‧ needle

134‧‧‧針尖 134‧‧‧needle

112‧‧‧上導引孔 112‧‧‧Upper guide hole

122‧‧‧下導引孔 122‧‧‧ lower guide hole

136‧‧‧針身 136‧‧‧ needle body

20‧‧‧分流導板 20‧‧‧Split deflector

22‧‧‧探針 22‧‧‧ probe

30‧‧‧板體 30‧‧‧ board

32‧‧‧第一表面 32‧‧‧ first surface

34‧‧‧第二表面 34‧‧‧second surface

36‧‧‧貫孔 36‧‧‧through holes

40‧‧‧複合導電層 40‧‧‧Composite conductive layer

42‧‧‧金屬底層 42‧‧‧Metal bottom layer

44‧‧‧金屬表層 44‧‧‧Metal surface

46‧‧‧高分子粒子 46‧‧‧ polymer particles

50‧‧‧分流導線 50‧‧‧Split wire

52‧‧‧主分流段 52‧‧‧Main diversion section

P1‧‧‧主分流路徑 P1‧‧‧ main diversion path

54‧‧‧副分流段 54‧‧‧Sub-segment

P2‧‧‧副分流路徑 P2‧‧‧Secondary diversion path

60、70‧‧‧探針模組 60, 70‧‧‧ probe module

80‧‧‧支撐導板 80‧‧‧Support guide

82‧‧‧導孔 82‧‧‧ Guide hole

第1圖為習用探針模組之結構示意圖。 Figure 1 is a schematic view of the structure of a conventional probe module.

第2圖為本發明一較佳實施例所提供之分流導板之結構示意圖。 FIG. 2 is a schematic structural view of a shunt guide provided by a preferred embodiment of the present invention.

第3圖為本發明之局部放大圖,主要顯示複合導電層之細部結構。 Figure 3 is a partial enlarged view of the present invention, mainly showing the detailed structure of the composite conductive layer.

第4圖為本發明一較佳實施例所提供之分流導板之俯視示意圖。 FIG. 4 is a top plan view of a shunting guide provided by a preferred embodiment of the present invention.

第5圖為使用有本發明一較佳實施例所提供之分流導板之第一種探針模組的結構示意圖。 Figure 5 is a schematic view showing the structure of a first type of probe module using a shunting guide provided by a preferred embodiment of the present invention.

第6圖為使用有本發明一較佳實施例所提供之分流導板之第二種探針模組的結構示意圖。 Figure 6 is a block diagram showing the structure of a second type of probe module using a shunting guide provided by a preferred embodiment of the present invention.

請參閱第2及4圖,為本發明所提供之分流導板20,包含有一板體30、多數個複合導電層40,以及一分流導線50。以下將對前述各個構件之結構特徵以及各構件間之相互關係詳加說明。 Referring to FIGS. 2 and 4, the shunting guide 20 of the present invention includes a plate body 30, a plurality of composite conductive layers 40, and a shunt wire 50. The structural features of the respective members described above and the mutual relationship between the members will be described in detail below.

板體30具有一第一表面32、一背對第一表面32之第二表面34,以及多數個貫穿第一、第二表面32、34之貫孔36,貫孔36的斷面形狀可以是圓形或方形,在此以圓形為例。另外需要補充說明的是,板體30可以由非導體材質(例如陶瓷)、半導體材質或導體材質(例如矽)所製成,若採用半導體材質或導體材質的情況下,板體30之表面需要經過絕緣處理。 The plate body 30 has a first surface 32, a second surface 34 facing away from the first surface 32, and a plurality of through holes 36 extending through the first and second surfaces 32, 34. The cross-sectional shape of the through hole 36 may be Round or square, here is a circle. In addition, the board body 30 may be made of a non-conductor material (for example, ceramic), a semiconductor material, or a conductor material (for example, tantalum). If a semiconductor material or a conductor material is used, the surface of the board 30 needs to be After insulation treatment.

請配合參閱第3圖,各複合導電層40係佈設於該板體30之貫孔36之孔壁,並定義出一可供探針穿過的孔洞。各該複合導電層40具有一金屬底層42及一金屬表層44,金屬底層42的材質及金屬表層44的材質均可以選自金、鈷、鎳、鎳合金或前述各金屬的合金,金屬表層44設於金屬底層42之表面,而且,金屬表層44的內部摻雜有多數個高分子粒子 46(例如聚四氟乙烯),用以提供潤滑效果而降低摩擦係數。 Referring to FIG. 3, each composite conductive layer 40 is disposed on the hole wall of the through hole 36 of the plate body 30, and defines a hole through which the probe can pass. Each of the composite conductive layers 40 has a metal underlayer 42 and a metal surface layer 44. The material of the metal underlayer 42 and the material of the metal surface layer 44 may be selected from gold, cobalt, nickel, nickel alloys or alloys of the foregoing metals, and the metal surface layer 44 It is disposed on the surface of the metal underlayer 42, and the inside of the metal surface layer 44 is doped with a plurality of polymer particles. 46 (for example, Teflon) to provide a lubricating effect and reduce the coefficient of friction.

請配合參閱第2及4圖,分流導線50佈設於板體30之第一表面32,並且具有多數條呈直線形之主分流段52及多數條概呈U形之副分流段54。前述分流導線50可利用一般印刷電路板佈設線路之方法或其他合適的方法來達成。其中,各主分流段52連接在相鄰兩個複合導電層40之間,用以將該多數個複合導電層40串接在一起,使得該些主分流段52共同構成一主分流路徑P1;相鄰兩條副分流段54之間相互並排地連接在一起並且分別連接兩個相鄰的複合導電層40,使得該些副分流段54共同構成一副分流路徑P2。 Referring to Figures 2 and 4, the shunt wire 50 is disposed on the first surface 32 of the plate body 30, and has a plurality of linear main shunt segments 52 and a plurality of U-shaped sub-split segments 54. The aforementioned shunt wire 50 can be achieved by a conventional printed circuit board routing method or other suitable method. The main shunt section 52 is connected between two adjacent composite conductive layers 40 for connecting the plurality of composite conductive layers 40 in series, so that the main shunt sections 52 together form a main shunt path P1; The adjacent two sub-flow segments 54 are connected to each other side by side and respectively connect two adjacent composite conductive layers 40 such that the sub-dividing segments 54 together form a secondary shunt path P2.

請再配合參閱第2及5圖,第5圖顯示有使用本發明之分流導板20的第一種探針模組60,圖中所示之探針模組60係將兩個分流導板20以上下相對的方式設置,使兩個分流導板20之板體30的第二表面34彼此相對而朝向內側,此時兩個分流導板20之板體30的第一表面32則是朝向外側,如此便能讓佈設於第一表面32之分流導線50顯露於外,以方便後續檢查線路是否有問題。 Please refer to Figures 2 and 5 again. Figure 5 shows a first type of probe module 60 using the shunting guide 20 of the present invention. The probe module 60 shown in the figure is a two-way diversion guide. The second surface 34 of the plate body 30 of the two flow dividing guides 20 is opposite to each other and faces inward, and the first surface 32 of the plate body 30 of the two flow dividing guides 20 is oriented toward each other. On the outside, the shunt wire 50 disposed on the first surface 32 can be exposed to facilitate subsequent inspection of the line.

在與多數根探針22進行組裝時,各探針22之頂、底兩端分別穿設於兩個分流導板20之板體30的貫孔36內(導電層40所形成的孔洞內),且分別電性接觸兩個分流導板20之複合導電層40,藉此,當各探針22接觸到待測物之測試點時,各探針22能藉由複合導電層40之低摩擦係數的設計而順暢地於各貫孔36內上下滑移,且縱使該探針22滑移時,仍能確保探針22與複合導電層40處於相互電性接觸之狀態。此外,再如第4及5圖所示,當各探針22接觸到待測物之測試點時,通過各探針22之電流會先經由各複合導電層40流至各分流導線50,接著再分別從各分流導線50之主分流段52所構成之主分流路徑P1及各分流導線50之副分流段54所構成之副分流路徑P2分散出去,如此一來,即使通過各探針22的是高強度電流也不容易造成燒針現象,所以 探針22就可以配合實際需要而適當的縮小針徑,以達到最佳的測試效果。 When assembled with the plurality of root probes 22, the top and bottom ends of each probe 22 are respectively disposed in the through holes 36 of the plate body 30 of the two branching guides 20 (in the holes formed by the conductive layer 40). And electrically contacting the composite conductive layer 40 of the two shunting guides 20, respectively, whereby each probe 22 can be low-friction by the composite conductive layer 40 when each probe 22 contacts the test point of the object to be tested. The coefficient is designed to smoothly slide down in each of the through holes 36, and even when the probe 22 is slipped, the probe 22 and the composite conductive layer 40 are ensured to be in electrical contact with each other. In addition, as shown in FIGS. 4 and 5, when each probe 22 contacts the test point of the object to be tested, the current passing through each probe 22 flows first through each composite conductive layer 40 to each of the shunt wires 50, and then Further, the main shunt path P1 formed by the main shunt section 52 of each of the shunt wires 50 and the sub shunt path P2 formed by the sub-split sections 54 of the shunt wires 50 are respectively dispersed, so that even through the probes 22 It is a high-intensity current that does not easily cause pinching, so The probe 22 can appropriately reduce the needle diameter according to actual needs to achieve the best test result.

然而,分流導板20並不一定要同時設置兩個,如第6圖所示,本發明之第二種探針模組70係將一個支撐導板80與一個分流導板20以上下相對的方式設置,其中的支撐導板80在此單純提供對位、導引及支撐的功能,並未佈設有複合導電層40及分流導線50。 However, the splitter guide 20 does not have to be provided at the same time. As shown in FIG. 6, the second probe module 70 of the present invention has a support guide 80 and a split guide 20 opposite to each other. In a manner, the support guide 80 simply provides the functions of alignment, guiding and support, and the composite conductive layer 40 and the shunt wire 50 are not disposed.

支撐導板80可以依據實際需要設置在分流導板20的上方或下方(在此以設置在分流導板20的上方為例),實際上只要支撐導板80能夠正對於分流導板20之板體30的第二表面34,使分流導板20之板體30的第一表面32朝向外側,以達到方便檢查分流導線50的目的。 The support guide 80 can be disposed above or below the splitter guide 20 according to actual needs (here, it is disposed above the splitter guide 20), in fact, as long as the support guide 80 can face the board of the split guide 20 The second surface 34 of the body 30 faces the first surface 32 of the body 30 of the flow dividing guide 20 for the purpose of facilitating inspection of the shunt wires 50.

在與各探針22進行組裝時,各探針22之頂端穿設於支撐導板80之一導孔82內,各探針22之底端穿設於分流導板20之板體30的貫孔36內且電性接觸複合導電層40,藉此,當各探針22接觸到待測物之測試點時,通過各探針22之電流能經由分流導板20之分流導線50分散出去,如此同樣可以達到分流效果。 When assembled with the probes 22, the tips of the probes 22 are disposed in the guide holes 82 of the support guides 80, and the bottom ends of the probes 22 are disposed through the plate 30 of the flow dividing guide 20. The composite conductive layer 40 is electrically contacted in the hole 36, whereby when the probes 22 are in contact with the test points of the test object, the current through the probes 22 can be dispersed through the shunt wires 50 of the shunt guide 20. This can also achieve the shunt effect.

必須加以說明的是,在上述揭露的實施例中,佈設在貫孔36孔壁上的導電層40,係為包含有高分子粒子46的複合導電材料層,然而,前述貫孔36加上導電層40之結構,亦可為一般印刷電路板中常見的、僅具有單一層導電金屬層的鍍通孔(plated through hole)結構,亦即,該導電層40不限於上述實施所揭露的、具有一金屬底層42及一金屬表層44且該金屬表層44的內部摻雜高分子粒子46之複合導電層,其可為僅具有單一層導電金屬或導電材料、且其中摻雜有或未摻雜任何高分子粒子之導電層,只要該層係佈設於板體30之貫孔36孔壁、具導電性並與該分流導線50電性連接,且形成有一可供探針滑移地穿過並與探針接觸而電性連接之孔洞,皆符合本發明此處所定義之導電層。然而,上述摻雜有高分子粒子46之複合材料層,因可提供較低的摩 擦係數,係為較佳的選擇。 It should be noted that, in the above disclosed embodiment, the conductive layer 40 disposed on the hole wall of the through hole 36 is a composite conductive material layer containing the polymer particles 46. However, the through hole 36 is electrically conductive. The structure of the layer 40 may also be a plated through hole structure which is common in a general printed circuit board and has only a single conductive metal layer. That is, the conductive layer 40 is not limited to the one disclosed in the above embodiment. a metal base layer 42 and a metal surface layer 44 and the inner surface of the metal surface layer 44 is doped with a composite conductive layer of polymer particles 46, which may have only a single layer of conductive metal or conductive material, and is doped or undoped therein. The conductive layer of the polymer particles is disposed on the hole wall of the through hole 36 of the plate body 30, is electrically conductive, and is electrically connected to the shunt wire 50, and is formed to allow the probe to slide through and The holes in which the probes are in contact and electrically connected are in accordance with the conductive layer as defined herein. However, the above composite layer of polymer particles 46 is doped to provide a lower friction The coefficient of rubbing is a preferred choice.

其次,上揭實施例中,該分流導線50具有副分流段54,該副分流段54之主要功能係在輔助主分流段52分攤電流,其次在於提供備援功能,亦即,一旦主分流段52若因製造缺陷或長期使用而發生斷線時,該副分流段54仍可確保探針彼此之間電性連通。實際上,該分流導線50亦可以不設置該副分流段54,然而,具有副分流段54之設計可以分攤電流(探針可以承受相對較大的電流),係為較佳的設計選擇。 Secondly, in the above embodiment, the shunt wire 50 has a sub-split section 54, the main function of which is to distribute the current in the auxiliary main shunt section 52, and secondly to provide a backup function, that is, once the main shunt section 52 If the disconnection occurs due to manufacturing defects or long-term use, the secondary shunt section 54 can still ensure that the probes are in electrical communication with each other. In fact, the shunt wire 50 may not be provided with the sub-split section 54, however, the design of the sub-split section 54 can share the current (the probe can withstand a relatively large current), which is a preferred design choice.

本案的實施例主要是用於電源(Power)針的傳輸路徑,電源針主要是在探針卡點觸待測物時,提供給待測物的電源路徑。根據上述說明,目前待測物所需的電源有愈來愈高的趨勢,但電源針的針徑卻必須變細才能符合目前的測試現況,因此,本案的實施例藉由分流導板20配合各探針22(電源針)形成分流路徑,可以將測試機台傳送到待測物的電源進行分流,以改善電源針的燒針問題。 The embodiment of the present invention is mainly used for the transmission path of the power pin. The power pin is mainly provided to the power path of the object to be tested when the probe card touches the object to be tested. According to the above description, the power supply required for the current object to be tested has an increasing trend, but the needle diameter of the power supply pin must be tapered to meet the current test conditions. Therefore, the embodiment of the present invention is coordinated by the flow dividing guide 20. Each of the probes 22 (power pins) forms a shunt path, and the test machine can be sent to the power source of the object to be tested for shunting to improve the pin problem of the power pin.

最後,需說明的是,該探針模組係使用在垂直式探針卡(vertical probe card,VPC)上之探針模組,以及該些探針係為垂直挫屈針(vertical buckling probe)或彈簧針(pogo pin),其中由於垂直挫屈針具有形成如挫曲或彎曲的針身段,故本發明使用在垂直挫屈針上可以得到更佳之功效,因為在其挫曲或彎曲的針身段,不容易因為瞬間電流過大,造成燒針。 Finally, it should be noted that the probe module is a probe module used on a vertical probe card (VPC), and the probes are vertical buckling probes. Or a pogo pin, wherein the needle is formed on the vertical setback needle because the vertical setback needle has a needle body segment such as a buckling or bending, because the needle is deflected or bent in it. The body is not easy because the instantaneous current is too large, causing the needle to burn.

綜上所陳,本發明之分流導板20利用複合導電層40降低與各探針22之間的摩擦力,用以提供良好的對位、導引及支撐功能,同時也提供給電流兩條不同的分流路徑P1、P2,以有效達到分散電流的目的,避免先前技術中探針容易因瞬間過電流而發生燒針斷裂的現象。 In summary, the shunting guide 20 of the present invention utilizes the composite conductive layer 40 to reduce the friction between the probes 22 to provide good alignment, guiding and supporting functions, and also provides two currents. The different shunt paths P1 and P2 are used to effectively achieve the purpose of dispersing the current, and the phenomenon that the probe is easily broken by the instantaneous overcurrent in the prior art is avoided.

20‧‧‧分流導板 20‧‧‧Split deflector

30‧‧‧板體 30‧‧‧ board

32‧‧‧第一表面 32‧‧‧ first surface

34‧‧‧第二表面 34‧‧‧second surface

36‧‧‧貫孔 36‧‧‧through holes

40‧‧‧複合導電層 40‧‧‧Composite conductive layer

52‧‧‧主分流段 52‧‧‧Main diversion section

Claims (17)

一種用於探針模組之分流導板,包含有:一板體,具有一第一表面、一背對該第一表面之第二表面,以及多數個貫穿該第一、第二表面之貫孔;多數個導電層,分別設於該板體之各個貫孔的孔壁;以及一分流導線,佈設於該板體之第一表面且電性連接該多數個導電層。 A shunting guide for a probe module, comprising: a plate body having a first surface, a second surface facing away from the first surface, and a plurality of through the first and second surfaces a plurality of conductive layers respectively disposed on the hole walls of the respective through holes of the plate body; and a shunt wire disposed on the first surface of the plate body and electrically connected to the plurality of conductive layers. 如請求項1所述之用於探針模組之分流導板,其中該分流導線具有至少一主分流段,連接在相鄰二該導電層之間。 The shunt guide for a probe module according to claim 1, wherein the shunt wire has at least one main shunt segment connected between two adjacent conductive layers. 如請求項2所述之用於探針模組之分流導板,其中該分流導線更具有至少一副分流段,連接在相鄰二該導電層之間。 The shunting guide for a probe module according to claim 2, wherein the shunting conductor further has at least one sub-dividing section connected between two adjacent conductive layers. 如請求項1所述之用於探針模組之分流導板,其中各該導電層係為一具有一金屬底層及一設於該金屬底層之表面之金屬表層的複合導電層。 The shunting guide for a probe module according to claim 1, wherein each of the conductive layers is a composite conductive layer having a metal underlayer and a metal surface layer disposed on a surface of the metal underlayer. 如請求項4所述之用於探針模組之分流導板,其中該金屬表層摻雜有高分子粒子。 The shunting guide for a probe module according to claim 4, wherein the metal surface layer is doped with polymer particles. 如請求項1所述之用於探針模組之分流導板,其中各該貫孔的斷面形狀為圓形或方形。 The shunt guide for the probe module according to claim 1, wherein the cross-sectional shape of each of the through holes is circular or square. 一種探針模組,包含有:至少一如請求項1所述之分流導板;以及多數根探針,分別可上下滑移地穿設於該分流導板之板體的貫孔內且電性接觸該分流導板之導電層。 A probe module comprising: at least one shunt guide as claimed in claim 1; and a plurality of probes respectively slidably disposed in the through holes of the plate of the shunt guide and electrically Sexually contacting the conductive layer of the shunting guide. 如請求項7所述之探針模組,包含有二該分流導板,該二分流導板呈上下相對稱設置而使該二分流導板之第二表 面彼此相對,各該探針之兩端分別可上下滑移地穿設於一該分流導板之板體的貫孔內且電性接觸一該分流導板之複合導電層。 The probe module of claim 7, comprising two of the flow dividing guides, wherein the two-way flow guiding plate is arranged symmetrically up and down to make the second table of the two-way flow guiding plate The two sides of the probe are respectively slidably disposed in the through hole of the plate body of the shunting guide plate and electrically contact with the composite conductive layer of the shunting guide plate. 如請求項7所述之探針模組,更包含有一支撐導板,該支撐導板正對於該分流導板之板體的第二表面且具有多數個導孔,各該探針之一端可上下滑移地穿設於該支撐導板之導孔內。 The probe module of claim 7, further comprising a supporting guide plate facing the second surface of the plate body of the shunting guide plate and having a plurality of guiding holes, one end of each of the probes The upper portion is slidably disposed in the guide hole of the support guide. 如請求項9所述之探針模組,其中該分流導板位於該支撐導板的上方。 The probe module of claim 9, wherein the flow dividing guide is located above the support guide. 如請求項9所述之探針模組,其中該分流導板位於該支撐導板的下方。 The probe module of claim 9, wherein the shunt guide is located below the support guide. 如請求項7所述之探針模組,其中該分流導線具有至少一主分流段,連接在相鄰二該導電層之間。 The probe module of claim 7, wherein the shunt wire has at least one main shunt segment connected between two adjacent conductive layers. 如請求項12所述之探針模組,其中該分流導線更具有至少一副分流段,連接在相鄰二該導電層之間。 The probe module of claim 12, wherein the shunt wire further has at least one sub-segment segment connected between two adjacent conductive layers. 如請求項7所述之探針模組,其中各該導電層係為一具有一金屬底層及一設於該金屬底層之表面之金屬表層的複合導電層。 The probe module of claim 7, wherein each of the conductive layers is a composite conductive layer having a metal underlayer and a metal surface layer disposed on a surface of the metal underlayer. 如請求項14所述之探針模組,其中該金屬表層摻雜有高分子粒子。 The probe module of claim 14, wherein the metal surface layer is doped with polymer particles. 如請求項7所述之探針模組,其中各該貫孔的斷面形狀為圓形或方形。 The probe module of claim 7, wherein the cross-sectional shape of each of the through holes is circular or square. 如請求項7所述之探針模組,其中各該探針為垂直挫屈針或彈簧針。 The probe module of claim 7, wherein each of the probes is a vertical set screw or a pogo pin.
TW102113494A 2013-01-11 2013-04-16 Current-diverting guide plate for probe module and probe module using the same TW201441628A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110073224A (en) * 2016-12-16 2019-07-30 泰克诺探头公司 Measuring head with improved frequency performance
CN110325866A (en) * 2017-02-24 2019-10-11 泰克诺探头公司 Vertrical probe measuring head with improved frequency performance
TWI702402B (en) * 2015-05-07 2020-08-21 義大利商探針科技公司 Testing head having vertical probes, in particular for reduced pitch applications
TWI796373B (en) * 2017-10-20 2023-03-21 美商鋒法特股份有限公司 Direct metalized guide plate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI702402B (en) * 2015-05-07 2020-08-21 義大利商探針科技公司 Testing head having vertical probes, in particular for reduced pitch applications
CN110073224A (en) * 2016-12-16 2019-07-30 泰克诺探头公司 Measuring head with improved frequency performance
US11808788B2 (en) 2016-12-16 2023-11-07 Technoprobe S.P.A. Testing head having improved frequency properties
US11921133B2 (en) 2016-12-16 2024-03-05 Technoprobe S.P.A. Testing head having improved frequency properties
CN110325866A (en) * 2017-02-24 2019-10-11 泰克诺探头公司 Vertrical probe measuring head with improved frequency performance
CN110325866B (en) * 2017-02-24 2022-04-08 泰克诺探头公司 Vertical probe test head with improved frequency performance
TWI796373B (en) * 2017-10-20 2023-03-21 美商鋒法特股份有限公司 Direct metalized guide plate

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