TW201439190A - Liquid resin composition, flip chip implementation and manufacturing method thereof - Google Patents

Liquid resin composition, flip chip implementation and manufacturing method thereof Download PDF

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TW201439190A
TW201439190A TW103104221A TW103104221A TW201439190A TW 201439190 A TW201439190 A TW 201439190A TW 103104221 A TW103104221 A TW 103104221A TW 103104221 A TW103104221 A TW 103104221A TW 201439190 A TW201439190 A TW 201439190A
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resin composition
liquid resin
curing agent
component
mass
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TWI612096B (en
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Eriko Kato
Kazuki Iwaya
Yohei Hosono
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Namics Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L33/00Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • C08L33/04Homopolymers or copolymers of esters
    • C08L33/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
    • C08L33/08Homopolymers or copolymers of acrylic acid esters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14625Optical elements or arrangements associated with the device
    • H01L27/14627Microlenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Wire Bonding (AREA)

Abstract

An object of this invention is to suppress bleeding of a liquid resin composition to an imaging surface of a semiconductor chip which is not coated with fluorine, so as to improve image quality of image elements of an image sensor module and the like. This invention provides a liquid resin composition, containing: (A) an epoxy resin, (B) a curing agent, and (C) a copolymer of dimethylaminopropyl acrylamide and butyl acrylate. The (B) component preferably is at least one selected from the group consisting of a phenolic-based curing agent, an amine-based curing agent, an acid anhydride-based curing agent and an imidazole-based curing agent.

Description

液狀樹脂組成物、覆晶安裝體及其製造方法 Liquid resin composition, flip chip mounting body and method of producing the same

本發明係有關於半導體元件之安裝體,具體而言,係有關於覆晶安裝體,特別是有關於在影像感測器模組等圖像元件之覆晶安裝體之封裝所用的液狀樹脂組成物、以及使用該液狀樹脂組成物之覆晶安裝體、及覆晶安裝體的製造方法。 The present invention relates to a semiconductor device mounting body, and more particularly to a flip chip mounting body, and more particularly to a liquid resin used for packaging a flip chip mounting body of an image sensor such as an image sensor module. A composition, a flip chip mounted body using the liquid resin composition, and a method of producing a flip chip mounted body.

近年來,覆晶接合法(flip-chip bonding)係被利用作為半導體晶片的安裝方式,其可對應使電子機器的配線等更進一步高密度化、高頻率化。一般而言,覆晶接合法係將半導體晶片與基板之間隙以被稱為底部填充材料(underfill material)之液狀樹脂組成物來封裝。 In recent years, flip-chip bonding has been used as a mounting method of a semiconductor wafer, and it is possible to further increase the density and frequency of wiring of an electronic device. In general, the flip chip bonding method encapsulates the gap between the semiconductor wafer and the substrate with a liquid resin composition called an underfill material.

在屬於圖像元件之1種的影像感測器模組中,以薄型化為目的而採用覆晶結構之模型亦正在增加。第1圖係表示影像感測器模組之剖面的示意圖之一例。影像感測器模組1係將通過透鏡8之光(在第1圖係以虛線之箭頭表示)以微透鏡4集光而在光二極體3檢測出。 In the image sensor module which is one type of image element, a model using a flip chip structure for the purpose of thinning is also increasing. Fig. 1 is a diagram showing an example of a schematic view of a cross section of an image sensor module. The image sensor module 1 detects the light passing through the lens 8 (indicated by a broken line in the first drawing) by the microlens 4 and is detected by the photodiode 3.

在此,關於將光二極體等半導體晶片與基板之間隙予以封裝之半導體用封裝材料(底部填充材料)的問題之一,係為 溢出(bleed)。在影像感測器模組之溢出,係指屬於液狀樹脂組成物之半導體用封裝材料中的液狀成分,從半導體晶片下方往半導體晶片之攝像面(感測面)或微透鏡擴散滲出之現象,當產生溢出時,由於使半導體晶片之攝像面或微透鏡受到汚染,故影像感測器模組之畫質會惡化,進而成為致命性的問題。第2圖係表示用以說明在影像感測器模組之溢出的示意圖。在影像感測器模組之製造步驟中,係有下述步驟:將使用於影像感測器模組之基板12與形成於半導體晶片13之墊(pad)131接合後,使用分注器(dispenser)20,將半導體用封裝材料11填充到基板12與半導體晶片13之間的步驟。此時,當半導體用封裝材料11中的液狀成分滲出而產生溢出111時,半導體晶片13之攝像面或微透鏡14則會受到汚染。為了抑制此溢出,係使用在半導體晶片之攝像面塗布氟樹脂之方法(專利文獻1),但卻有因塗布氟而使畫質降低之新問題。 Here, one of the problems of a semiconductor packaging material (underfill material) in which a gap between a semiconductor wafer such as a photodiode and a substrate is encapsulated is Bleeted. The overflow of the image sensor module refers to a liquid component in the semiconductor packaging material belonging to the liquid resin composition, and diffuses from the lower surface of the semiconductor wafer to the imaging surface (sensing surface) of the semiconductor wafer or the microlens. In the case of overflow, since the imaging surface or the microlens of the semiconductor wafer is contaminated, the image quality of the image sensor module is deteriorated, which is a fatal problem. Figure 2 is a schematic diagram showing the overflow of the image sensor module. In the manufacturing step of the image sensor module, the following steps are performed: after the substrate 12 used for the image sensor module is bonded to the pad 131 formed on the semiconductor wafer 13, the dispenser is used ( Dispenser 20, a step of filling the semiconductor package material 11 between the substrate 12 and the semiconductor wafer 13. At this time, when the liquid component in the semiconductor package material 11 bleeds out to cause the overflow 111, the imaging surface of the semiconductor wafer 13 or the microlens 14 is contaminated. In order to suppress this overflow, a method of applying a fluororesin to an imaging surface of a semiconductor wafer (Patent Document 1) is used, but there is a new problem that the image quality is lowered by applying fluorine.

因此,近年來為了提升影像感測器模組之畫質,正檢討著不在半導體晶片之攝像面塗布氟之方法。然而,在未塗布氟的半導體晶片之攝像面使用既存之半導體用封裝材料時,則會如上述般產生溢出而造成問題。 Therefore, in recent years, in order to improve the image quality of the image sensor module, a method of applying fluorine to the image pickup surface of the semiconductor wafer is being reviewed. However, when an existing semiconductor package material is used for an imaging surface of a fluorine-free semiconductor wafer, overflow occurs as described above, which causes a problem.

另一方面,為了解決對基板之溢出,係已報告有例如含有具羧基或胺基之液狀聚矽氧化合物的液狀封裝樹脂組成物(專利文獻2),含有聚矽氧橡膠微粉末之絶緣性糊料(專利文獻3),含有甲基丙烯酸烷酯共聚物、經非反應性有機矽化合物所表面處理之無機填充劑、以及改質聚矽氧樹脂的側部填充材料(side-fill material)(專利文獻4、5),但該等文獻所考慮的是抑制對於經電漿 處理之基板(專利文獻2)與未經電漿等表面處理而使用之基板(專利文獻3至5)的溢出,而有無法抑制對未塗布氟的半導體晶片之攝像面之溢出的問題。 On the other hand, in order to solve the problem of overflow of the substrate, for example, a liquid encapsulating resin composition containing a liquid polyoxynitride having a carboxyl group or an amine group has been reported (Patent Document 2), which contains a micronized rubber micropowder. Insulating paste (Patent Document 3), which contains an alkyl methacrylate copolymer, an inorganic filler surface-treated with a non-reactive organic bismuth compound, and a side filler of a modified polyoxyl resin (side-fill) Material) (Patent Documents 4, 5), but these documents are considered to inhibit the plasma The substrate to be processed (Patent Document 2) and the substrate (Patent Documents 3 to 5) which are not subjected to surface treatment such as plasma are overflowed, and there is a problem that the overflow of the image pickup surface of the semiconductor wafer to which fluorine is not applied cannot be suppressed.

[先行技術文獻] [Advanced technical literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特表2008-527419號公報 [Patent Document 1] Japanese Patent Publication No. 2008-527419

[專利文獻2]日本特開2006-219575號公報 [Patent Document 2] Japanese Laid-Open Patent Publication No. 2006-219575

[專利文獻3]日本特開平05-174629號公報 [Patent Document 3] Japanese Laid-Open Patent Publication No. 05-174629

[專利文獻4]日本特開平2005-36069號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2005-36069

[專利文獻5]日本特開平2005-105243號公報 [Patent Document 5] Japanese Patent Laid-Open Publication No. 2005-105243

本發明係基於提升影像感測器模組等圖像元件之畫質之目的,以抑制液狀樹脂組成物對未塗布氟的半導體晶片之攝像面的溢出為課題。本發明之目的係提供一種液狀樹脂組成物,其係可抑制對於為了使影像感測器模組等圖像元件之畫質提升而未塗布氟的半導體晶片之攝像面之溢出。 The present invention has an object of suppressing the overflow of a liquid resin composition on an image pickup surface of a semiconductor wafer not coated with fluorine for the purpose of improving the image quality of an image sensor such as an image sensor module. An object of the present invention is to provide a liquid resin composition which can suppress an overflow of an image pickup surface of a semiconductor wafer which is not coated with fluorine in order to improve the image quality of an image sensor such as an image sensor module.

本發明者們在專心進行研究時,開發出因在液狀樹脂組成物中添加特定的添加劑,故即便在未塗布氟的半導體晶片之攝像面亦不會產生溢出之液狀樹脂組成物。本發明係有關於因具有以下之構成而解決上述問題之液狀樹脂組成物、半導體用封裝材料、圖像元件用封裝材料、覆晶安裝體、以及覆晶安裝體之 製造方法。 When the inventors concentrated on the research, the liquid resin composition which does not overflow even on the imaging surface of the semiconductor wafer to which fluorine is not applied is developed by adding a specific additive to the liquid resin composition. The present invention relates to a liquid resin composition, a semiconductor packaging material, an image element sealing material, a flip chip mounting body, and a flip chip mounting body which solve the above problems by the following configuration. Production method.

[1]一種液狀樹脂組成物,係含有(A)環氧樹脂、(B)硬化劑、以及(C)二甲基胺基丙基丙烯醯胺與丙烯酸丁酯之共聚物。 [1] A liquid resin composition comprising (A) an epoxy resin, (B) a curing agent, and (C) a copolymer of dimethylaminopropyl acrylamide and butyl acrylate.

[2]如上述[1]所述之液狀樹脂組成物,其中,(B)成分係選自由酚系硬化劑、胺系硬化劑、酸酐系硬化劑以及咪唑系硬化劑所組成群組之至少1種。 [2] The liquid resin composition according to the above [1], wherein the component (B) is selected from the group consisting of a phenolic curing agent, an amine curing agent, an acid anhydride curing agent, and an imidazole curing agent. At least one.

[3]如上述[1]所述之液狀樹脂組成物,其中,相對於液狀樹脂組成物100質量份,(C)成分係0.02至2.5質量份。 [3] The liquid resin composition according to the above [1], wherein the component (C) is 0.02 to 2.5 parts by mass based on 100 parts by mass of the liquid resin composition.

[4]如上述[2]所述之液狀樹脂組成物,其中,(B)成分係含有酚系硬化劑,相對於液狀樹脂組成物100質量份,所含有之酚系硬化劑係1至50質量份。 [4] The liquid resin composition according to the above [2], wherein the component (B) contains a phenolic curing agent, and the phenolic curing agent 1 is contained in 100 parts by mass of the liquid resin composition. Up to 50 parts by mass.

[5]一種半導體用封裝材料,係含有上述[1]所述之液狀樹脂組成物。 [5] A packaging material for a semiconductor, comprising the liquid resin composition according to [1] above.

[6]一種圖像元件用封裝材料,係使用上述[5]所述之半導體用封裝材料。 [6] A packaging material for an image element, which is the packaging material for a semiconductor according to the above [5].

[7]一種覆晶安裝體,係具有上述[1]所述之液狀樹脂組成物之硬化物。 [7] A flip-chip mounting body comprising the cured product of the liquid resin composition according to the above [1].

[8]一種覆晶安裝體之製造方法,係使用上述[5]所述之半導體用封裝材料進行封裝。 [8] A method of producing a flip chip mount, which is packaged using the semiconductor package material according to the above [5].

依據本發明[1],可提供可對未塗布氟的半導體晶片之攝像面抑制溢出之液狀樹脂組成物。 According to the invention [1], it is possible to provide a liquid resin composition which can suppress the overflow of the image pickup surface of the semiconductor wafer to which fluorine is not applied.

依據本發明[5],可提供可對未塗布氟的半導體晶片之攝像面抑制溢出的半導體用封裝材料。依據本發明[6],藉由使 用未塗布氟的半導體晶片之攝像面,可得到畫質提升之影像感測器等圖像元件。 According to the invention [5], it is possible to provide a packaging material for a semiconductor which can suppress overflow of an imaging surface of a semiconductor wafer to which fluorine is not applied. According to the invention [6], by making An image sensor such as an image sensor with improved image quality can be obtained by using an imaging surface of a semiconductor wafer to which fluorine is not applied.

依據本發明[7],可提供使用未塗布氟的半導體晶片之攝像面,並且溢出受到抑制之覆晶安裝體。依據本發明[8],可容易地得到使用本發明[5]之封裝用液狀樹脂組成物封裝之覆晶安裝體。 According to the invention [7], it is possible to provide a flip chip mounted body in which an image pickup surface of a semiconductor wafer not coated with fluorine is used and overflow is suppressed. According to the invention [8], a flip chip mounted body encapsulated with the liquid resin composition for encapsulation of the invention [5] can be easily obtained.

1‧‧‧影像感測器模組 1‧‧‧Image Sensor Module

2、12、22‧‧‧基板 2,12,22‧‧‧substrate

3、13、23‧‧‧半導體晶片 3, 13, 23‧‧‧ semiconductor wafer

31、131、231‧‧‧墊 31, 131, 231‧‧‧ pads

4、14、24‧‧‧微透鏡 4, 14, 24‧‧‧ microlens

5‧‧‧支架(holder) 5‧‧‧ bracket

6‧‧‧支架接著劑 6‧‧‧ bracket adhesive

7‧‧‧IR過濾器 7‧‧‧IR filter

8‧‧‧透鏡 8‧‧‧ lens

9‧‧‧透鏡鏡筒 9‧‧‧Lens tube

10、11、21‧‧‧半導體用封裝材料 10, 11, 21‧‧ ‧ semiconductor packaging materials

111‧‧‧溢出 111‧‧‧ overflow

20、30‧‧‧分注器 20, 30‧‧ ‧ Dispenser

第1圖係表示影像感測器模組之剖面的示意圖之一例之圖。 Fig. 1 is a view showing an example of a schematic view of a cross section of an image sensor module.

第2圖係用以說明在影像感測器模組之溢出的示意圖。 Figure 2 is a schematic diagram illustrating the overflow of the image sensor module.

第3圖係用以說明本發明之液狀樹脂組成物之使用例的示意圖。 Fig. 3 is a schematic view for explaining an example of use of the liquid resin composition of the present invention.

本發明之液狀樹脂組成物係含有(A)環氧樹脂、(B)硬化劑、以及(C)二甲基胺基丙基丙烯醯胺與丙烯酸丁酯之共聚物。 The liquid resin composition of the present invention contains (A) an epoxy resin, (B) a curing agent, and (C) a copolymer of dimethylaminopropyl acrylamide and butyl acrylate.

(A)成分係對液狀樹脂組成物賦予硬化性、耐熱性、以及接著性,並對硬化後之液狀樹脂組成物賦予耐久性。(A)成分可列舉雙酚A型環氧樹脂、溴化雙酚A型環氧樹脂、雙酚F型環氧樹脂、萘型環氧樹脂、聯苯型環氧樹脂、酚醛清漆(novolac)型環氧樹脂、胺基酚系環氧樹脂、脂環式環氧樹脂、醚系或聚醚系環氧樹脂、含有環氧乙烷(oxirane)環之環氧樹脂等,其中,雙酚F型環氧樹脂、胺基酚系環氧樹脂、雙酚A型環氧樹脂、萘型環氧樹脂,係從液狀樹脂組成物之玻璃轉移點、耐回流性、以及 耐濕性之觀點來看為較佳。(A)成分之環氧當量,從黏度調整之觀點來看,較佳為80至250g/eq。就市售商品而言,可列舉新日鐵化學製之雙酚F型環氧樹脂(商品名:YDF8170、YDF870GS)、新日鐵化學製之雙酚A型環氧樹脂(商品名:YD-128、YD-825GS)、DIC製之萘型環氧樹脂(商品名:HP4032D)等,但(A)成分不限於該等商品。(A)成分可單獨使用或將2種以上併用。 The component (A) imparts curability, heat resistance, and adhesion to the liquid resin composition, and imparts durability to the liquid resin composition after curing. Examples of the component (A) include bisphenol A type epoxy resin, brominated bisphenol A type epoxy resin, bisphenol F type epoxy resin, naphthalene type epoxy resin, biphenyl type epoxy resin, and novolac (novolac). Type epoxy resin, aminophenol type epoxy resin, alicyclic epoxy resin, ether type or polyether type epoxy resin, epoxy resin containing ethylene oxide (oxirane ring), among them, bisphenol F Type epoxy resin, aminophenol type epoxy resin, bisphenol A type epoxy resin, naphthalene type epoxy resin, glass transition point from liquid resin composition, reflow resistance, and From the standpoint of moisture resistance, it is preferred. The epoxy equivalent of the component (A) is preferably from 80 to 250 g/eq from the viewpoint of viscosity adjustment. For the commercially available products, bisphenol F type epoxy resin (trade name: YDF8170, YDF870GS) manufactured by Nippon Steel Chemical Co., Ltd., and bisphenol A type epoxy resin manufactured by Nippon Steel Chemical Co., Ltd. (trade name: YD- 128, YD-825GS), a naphthalene type epoxy resin (trade name: HP4032D) manufactured by DIC, etc., but the component (A) is not limited to these products. The component (A) may be used singly or in combination of two or more.

(B)成分只要是具有使(A)成分硬化之能力者即可,製成液狀樹脂組成物時,只要在室溫能保持流動性,即便為固形態亦可使用。(B)成分可列舉酚系硬化劑、酸酐系硬化劑、胺系硬化劑、咪唑系硬化劑、羧酸二醯肼硬化劑等,較佳為選自由酚系硬化劑、胺系硬化劑、酸酐系硬化劑以及咪唑系硬化劑所組成群組之至少1種。又,從接著性之觀點來看,更佳為酚系硬化劑,又,從液狀樹脂組成物之流動性、半導體晶片與基板之接續性之觀點來看,更佳為酸酐系硬化劑。從保存安定性之觀點來看,更佳為咪唑系硬化劑。 The component (B) may have any ability to cure the component (A). When the liquid resin composition is prepared, the fluidity can be maintained at room temperature, and it can be used even in a solid form. Examples of the component (B) include a phenol-based curing agent, an acid anhydride-based curing agent, an amine-based curing agent, an imidazole-based curing agent, and a bismuth carboxylic acid curing agent, and are preferably selected from the group consisting of a phenolic curing agent and an amine curing agent. At least one of the group consisting of an acid anhydride-based curing agent and an imidazole-based curing agent. In addition, it is more preferable that it is a phenolic hardening|curing agent, and it is more preferable that it is an acid-acid-hardening agent from the viewpoint of the fluidity of a liquid resin composition, and the connection of a semiconductor wafer and a board|substrate. From the viewpoint of preservation stability, an imidazole-based hardener is more preferable.

酚系硬化劑可列舉酚酚醛清漆、甲酚酚醛清漆等,較佳為酚酚醛清漆。又,由於相較於酸酐系硬化劑、胺系硬化劑、咪唑系硬化劑等其他硬化劑,酚系硬化劑係硬化速度緩慢,故在使用其他硬化劑而使液狀樹脂組成物之硬化速度變太快時,可併用酚系硬化劑,以達到延緩液狀樹脂組成物之硬化速度之目的而使用之。 The phenolic curing agent may, for example, be a phenol novolac or a cresol novolac, and is preferably a phenol novolak. In addition, since the curing speed of the phenol-based curing agent is slower than other curing agents such as an acid anhydride-based curing agent, an amine-based curing agent, and an imidazole-based curing agent, the curing rate of the liquid resin composition is achieved by using another curing agent. When it becomes too fast, a phenolic hardener can be used in combination to achieve the purpose of delaying the hardening speed of the liquid resin composition.

酸酐可列舉四氫酞酸酐、六氫酞酸酐、甲基四氫酞酸酐、甲基六氫酞酸酐、甲基納迪克酸酐(Methyl nadic anhydride)、氫化甲基納迪克酸酐、三烷基四氫酞酸酐、甲基環己烯四羧酸二 酐、酞酸酐、苯偏三酸酐、焦蜜石酸酐、二苯基酮四羧酸二酐、乙二醇雙苯偏三酸酐酯、甘油雙(苯偏三酸酐)單乙酸酯、十二烯基琥珀酸酐、脂肪族二元酸聚酐、氯橋酸酐(chlorendic anhydride)、甲基丁烯基四氫酞酸酐、烷基化四氫酞酸酐、甲基哈米克酸酐(methyl Himic anhydride)、經烯基取代之琥珀酸酐、戊二酸酐等,較佳為甲基丁烯基四氫酞酸酐。 Examples of the acid anhydride include tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, methyl nadic anhydride, hydrogenated methyl nadic anhydride, and trialkyltetrahydrogen. Phthalic anhydride, methylcyclohexene tetracarboxylic acid Anhydride, phthalic anhydride, trimellitic anhydride, pyrogallic anhydride, diphenyl ketone tetracarboxylic dianhydride, ethylene glycol bistricarboxylic anhydride, glycerol bis(benzenetricarboxylic anhydride) monoacetate, twelve Alkenyl succinic anhydride, aliphatic dibasic acid polyanhydride, chlorendic anhydride, methylbutenyl tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, methyl Himic anhydride The alkenyl substituted succinic anhydride, glutaric anhydride or the like is preferably methylbutenyltetrahydrophthalic anhydride.

胺系硬化劑可列舉鏈狀脂肪族胺、環狀脂肪族胺、脂肪芳香族胺、芳香族胺等,較佳為芳香族胺。羧酸二醯肼硬化劑可列舉己二酸二醯肼、間苯二甲酸二醯肼、癸二酸二醯肼、十二酸二醯肼等,較佳為己二酸二醯肼。 The amine-based curing agent may, for example, be a chain aliphatic amine, a cyclic aliphatic amine, a fatty aromatic amine or an aromatic amine, and is preferably an aromatic amine. Examples of the bismuth carboxylate hardener include diammonium adipate, diammonium isophthalate, diterpene sebacate, dinonanoate, and the like, and preferably diammonium adipate.

咪唑系硬化劑中,從保存安定性之觀點來看,係以經微膠囊化之咪唑化合物硬化劑、胺加成型硬化劑為較佳,從作業性、硬化速度、保存安定性之觀點來看,則以在液狀雙酚A型等液狀環氧樹脂中分散之經微膠囊化之咪唑化合物硬化劑為更佳。咪唑硬化劑可列舉2-甲基咪唑、2-十一基咪唑、2-十七基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]乙基-s-三、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2,3-二氫-1H-吡咯并[1,2-a]苯并咪唑等,其中2,4-二胺基-6-[2’-甲基咪唑基-(1’)]乙基-s-三、2,4-二胺基-6-[2’-十一基咪唑基-(1)-乙基-s-三、2,4-二胺基-6-[2’-乙基-4’-甲基咪唑基-(1’)]-乙基-s-三等係從硬化速度、作業性、耐濕性之觀點來看為較佳。 In the imidazole-based curing agent, it is preferable to use a microencapsulated imidazole compound curing agent or an amine addition-hardening agent from the viewpoint of storage stability, from the viewpoints of workability, curing speed, and storage stability. Further, a microencapsulated imidazole compound hardener dispersed in a liquid epoxy resin such as liquid bisphenol A type is more preferable. Examples of the imidazole hardener include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methyl Imidazole, 2,4-diamino-6-[2'-methylimidazolyl-(1')]ethyl-s-three , 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo[1,2-a Benzimidazole and the like, wherein 2,4-diamino-6-[2'-methylimidazolyl-(1')]ethyl-s-three 2,4-Diamino-6-[2'-undecylimidazolyl-(1)-ethyl-s-three 2,4-Diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-s-three The system is preferred from the viewpoints of curing speed, workability, and moisture resistance.

(B)成分之市販品可列舉明和化成製之酚硬化劑(商品名:MEH8000、MEH8005)、三菱化學製之酸酐(等級:YH306、 YH307)、日立化成工業製之3或4-甲基-六氫酞酸酐(商品名:HN-5500)、日本化藥製之胺基硬化劑(商品名:KAYAHARD A-A)、日本Finechem製之己二酸二醯肼(商品名:ADH)、旭化成E-Materials製之經微膠囊化之咪唑化合物硬化劑(商品名:HX3722、HX3742、HX3932HP)、味之素fine-techno製之胺加成型硬化劑(商品名:PN-40J)等,但(B)成分不限於該等商品。在此,在調配液狀樹脂組成物之成分後,若使用篩孔尺寸1μm的過濾器來過濾調配物時,較佳係使用(B)成分之粒徑未達1μm者。(B)成分可單獨使用或將2種以上併用。 (B) The phenolic curing agent (trade name: MEH8000, MEH8005) and the acid anhydride of Mitsubishi Chemical (grade: YH306, YH307), 3 or 4-methyl-hexahydrophthalic anhydride (trade name: HN-5500) manufactured by Hitachi Chemical Co., Ltd., amine-based hardener (trade name: KAYAHARD AA) manufactured by Nippon Kasei Co., Ltd., manufactured by Japan Finechem Diacid diacetate (trade name: ADH), Asahi Kasei E-Materials microencapsulated imidazole compound hardener (trade name: HX3722, HX3742, HX3932HP), Ajinomoto fine-techno amine and shape hardening The agent (trade name: PN-40J) or the like, but the component (B) is not limited to these products. Here, after the components of the liquid resin composition are blended, when the mixture is filtered using a filter having a mesh size of 1 μm, it is preferred to use the component (B) having a particle diameter of less than 1 μm. The component (B) may be used singly or in combination of two or more.

(C)成分係使液狀樹脂組成物之潤濕性變良好,並且抑制液狀樹脂組成物之溢出。(C)成分係化學式(1)所示之二甲基胺基丙基丙烯醯胺 The component (C) improves the wettability of the liquid resin composition and suppresses the overflow of the liquid resin composition. (C) component is a dimethylaminopropyl propylene decylamine represented by the chemical formula (1)

與化學式(2)所示之丙烯酸丁酯的共聚物: Copolymer with butyl acrylate represented by formula (2):

相對於二甲基胺基丙基丙烯醯胺與丙烯酸丁酯之合計100質量份,二甲基胺基丙基丙烯醯胺之質量較佳為1至30質 量份。在此,二甲基胺基丙基丙烯醯胺與丙烯酸丁酯之定量分析係以GPC與NMR進行。 The mass of dimethylaminopropyl acrylamide is preferably from 1 to 30, based on 100 parts by mass of the total of dimethylaminopropyl acrylamide and butyl acrylate. Quantities. Here, quantitative analysis of dimethylaminopropyl acrylamide and butyl acrylate was carried out by GPC and NMR.

又,(C)成分更佳係重量平均分子量為10,000至30,000者。在此,重量平均分子量係採用凝膠滲透層析法(GPC),使用依據標準聚苯乙烯之校準曲線(calibration curve)所得之值。(C)成分抑制液狀樹脂組成物溢出的機制仍不明確,但可推測為是因與半導體晶片面之攝像面的親和性降低之故。就(C)成分的市售商品而言,可列舉BYK-Chemie製品(商品名:DISPERBYK112、DISPERBYK116)等,但(C)成分不限於該等商品。 Further, the component (C) is more preferably a weight average molecular weight of 10,000 to 30,000. Here, the weight average molecular weight is a value obtained by gel permeation chromatography (GPC) using a calibration curve according to standard polystyrene. The mechanism by which the component (C) suppresses the overflow of the liquid resin composition is still unclear, but it is presumed that the affinity with the imaging surface of the semiconductor wafer surface is lowered. The commercially available product of the component (C) may, for example, be a BYK-Chemie product (trade name: DISPERBYK112, DISPERBYK116), but the component (C) is not limited to these products.

封裝樹脂組成物中,相對於封裝樹脂組成物100質量份,(A)成分較佳為含有10至60質量份,更佳為含有15至55質量份。 In the encapsulating resin composition, the component (A) is preferably contained in an amount of 10 to 60 parts by mass, more preferably 15 to 55 parts by mass, per 100 parts by mass of the encapsulating resin composition.

封裝樹脂組成物中,相對於封裝樹脂組成物100質量份,(B)成分較佳為含有10至60質量份,更佳為含有10至55質量份。未達10質量份時,因反應性降低而使硬化性容易惡化,硬化後的液狀樹脂組成物之耐濕可靠度、耐遷移性容易劣化,超過60質量份時,增黏倍率容易變太高,而容易產生空隙,或增加離子性雜質,使可靠度容易惡化。在此,以延遲液狀樹脂組成物之硬化速度為目的而使用酚系硬化劑時,相對於封裝樹脂組成物100質量份,酚系硬化劑以外的(B)成分較佳為含有5至15質量份,且相對於封裝樹脂組成物100質量份,酚系硬化劑較佳為含有1至5質量份。 In the encapsulating resin composition, the component (B) is preferably contained in an amount of 10 to 60 parts by mass, more preferably 10 to 55 parts by mass, per 100 parts by mass of the encapsulating resin composition. When the amount is less than 10 parts by mass, the curability is likely to be deteriorated due to a decrease in reactivity, and the moisture resistance reliability and migration resistance of the liquid resin composition after curing are likely to be deteriorated. When the amount is more than 60 parts by mass, the viscosity increasing ratio tends to become too large. It is high, and it is easy to generate voids or to increase ionic impurities, which makes the reliability easy to deteriorate. When a phenol-based curing agent is used for the purpose of retarding the curing rate of the liquid resin composition, the component (B) other than the phenol-based curing agent preferably contains 5 to 15 with respect to 100 parts by mass of the encapsulating resin composition. The phenolic curing agent preferably contains 1 to 5 parts by mass based on 100 parts by mass of the encapsulating resin composition.

相對於液狀樹脂組成物100質量份,從抑制液狀樹脂組成物之溢出之觀點來看,(C)成分較佳為0.001至5.0質量份, 更佳為0.02至2.5質量份,若為0.03至2.1質量份則又更佳。當為0.02質量份以上時,即良好地抑制液狀樹脂組成物之溢出,當為2.5質量份以下時,則液狀樹脂組成物之儲存期限(pot life)為明顯良好。 The component (C) is preferably 0.001 to 5.0 parts by mass from the viewpoint of suppressing the overflow of the liquid resin composition, with respect to 100 parts by mass of the liquid resin composition. More preferably, it is 0.02 to 2.5 parts by mass, and more preferably 0.03 to 2.1 parts by mass. When it is 0.02 parts by mass or more, the overflow of the liquid resin composition is satisfactorily suppressed, and when it is 2.5 parts by mass or less, the pot life of the liquid resin composition is remarkably good.

液狀樹脂組成物復含有(D)填料時,從熱循環時等之應力緩和、密著性之觀點來看為較佳。就(D)成分而言,可列舉膠質氧化矽(colloidal silica)、疏水性氧化矽、球狀氧化矽等氧化矽、滑石等,從塗布時的流動性之觀點來看,以球狀氧化矽係更佳。(D)成分更佳係平均粒徑0.01至20μm之氧化矽,再更佳係平均粒徑0.02至10μm之氧化矽。就市售商品而言,可列舉Admatechs製之球狀氧化矽(商品名:SO-E2)、Admatechs製之球狀氧化矽(商品名:SE2300)、電氣化學工業製之氧化矽填料(商品名:FB5SDX)、宇部Materials製之碳酸鈣填料(商品名:CS 4NA),但(D)成分不限於該等商品。在此,(D)成分之平均粒徑係藉由動態光散射式Nanotrac粒徑分析儀進行測定。(D)成分可單獨使用或將2種以上併用。 When the (D) filler is contained in the liquid resin composition, it is preferable from the viewpoint of stress relaxation and adhesion at the time of heat cycle. Examples of the component (D) include cerium oxide such as colloidal silica, hydrophobic cerium oxide, and spherical cerium oxide, talc, and the like, and spherical cerium oxide from the viewpoint of fluidity at the time of coating. Better. The component (D) is more preferably cerium oxide having an average particle diameter of 0.01 to 20 μm, more preferably cerium oxide having an average particle diameter of 0.02 to 10 μm. The commercially available product includes spheroidal cerium oxide (trade name: SO-E2) manufactured by Admatechs, spherical cerium oxide (trade name: SE2300) manufactured by Admatechs, and cerium oxide filler (product name) manufactured by the electric chemical industry. : FB5SDX), calcium carbonate filler (trade name: CS 4NA) manufactured by Ube Materials, but the component (D) is not limited to these products. Here, the average particle diameter of the component (D) was measured by a dynamic light scattering type Nanotrac particle size analyzer. The component (D) may be used singly or in combination of two or more.

若液狀樹脂組成物復含有屬於(E)成分之橡膠添加物時,則從緩和樹脂組成物應力之觀點來看為較佳,(E)成分可列舉丙烯酸系橡膠、胺酯(urethane)橡膠、聚矽氧橡膠(silicone rubber)、丁二烯橡膠等。(E)成分可使用固體者。其形態並無特別限定,可使用例如粒子狀、粉末狀、錠狀者,當為粒子狀時,例如平均粒徑為0.01至20μm,較佳為0.02至10μm,更佳為0.03至5μm。(E)成分可使用常溫時為液狀者,例如可列舉平均分子量較低的聚丁二烯、丁二烯/丙烯腈共聚物、聚異戊二烯(polyisoprene)、聚環 氧丙烷(poly(propylene oxide))、聚二有機矽氧烷(polydiorganosiloxane)。又,(E)成分係可使用末端具有與環氧基反應之基者,此等可為固體、液狀之任一型態。就市售商品而言,可列舉宇部興產製之CTBN1300、ATBN1300-16、CTBN1008-SP、東麗.道康寧(DowCorning Toray)製之聚矽氧橡膠粉末(商品名:AY)、JSR製之橡膠粉末(商品名:XER81)等,但(E)成分不限於該等商品。(E)成分可單獨使用或將2種以上併用。 When the liquid resin composition contains the rubber additive of the component (E), it is preferable from the viewpoint of relaxing the stress of the resin composition, and the component (E) is acryl rubber or urethane rubber. , silicone rubber, butadiene rubber, etc. The component (E) can be used as a solid. The form is not particularly limited, and for example, a particulate form, a powder form, or a tablet shape can be used. When it is a particulate form, for example, the average particle diameter is 0.01 to 20 μm, preferably 0.02 to 10 μm, and more preferably 0.03 to 5 μm. The component (E) can be used in the form of a liquid at normal temperature, and examples thereof include polybutadiene having a low average molecular weight, butadiene/acrylonitrile copolymer, polyisoprene, and polycyclic ring. Poly(propylene oxide), polydiorganosiloxane. Further, the component (E) may be one having a terminal having a reaction with an epoxy group, and these may be either solid or liquid. For the commercially available products, CTBN1300, ATBN1300-16, CTBN1008-SP, Dow Corning Toray polyoxyethylene rubber powder (trade name: AY), and JSR rubber can be used. Powder (trade name: XER81) or the like, but the component (E) is not limited to these products. The component (E) may be used singly or in combination of two or more.

若液狀樹脂組成物復含有屬於(F)成分之偶合劑時, 從液狀樹脂組成物之密著性之觀點來看為較佳,(F)成分可列舉3-縮水甘油氧基丙基三甲氧基矽烷、3-胺基丙基三甲氧基矽烷、乙烯基三甲氧基矽烷、對苯乙烯基三甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基三甲氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、3-脲基丙基三乙氧基矽烷、3-巰基丙基三甲氧基矽烷、雙(三乙氧基矽基丙基)四硫醚、3-異氰酸基丙基三乙氧基矽烷等,其中,3-縮水甘油氧基丙基三甲氧基矽烷、3-胺基丙基三甲氧基矽烷係從液狀樹脂組成物密著性之觀點來看為較佳。就市售商品而言,可列舉信越化學工業製之KBM403、KBE903、KBE9103等,但(F)成分不限於該等商品。(F)成分可單獨使用或將2種以上併用。 If the liquid resin composition contains a coupling agent belonging to the component (F), From the viewpoint of the adhesion of the liquid resin composition, the component (F) may, for example, be 3-glycidoxypropyltrimethoxydecane, 3-aminopropyltrimethoxydecane or vinyl. Trimethoxydecane, p-styryltrimethoxydecane, 3-methylpropenyloxypropylmethyltrimethoxydecane, 3-propenyloxypropyltrimethoxydecane, 3-ureidopropyl Triethoxy decane, 3-mercaptopropyltrimethoxydecane, bis(triethoxymethylpropyl)tetrasulfide, 3-isocyanatopropyltriethoxydecane, etc., among them, 3- Glycidoxypropyltrimethoxydecane and 3-aminopropyltrimethoxydecane are preferred from the viewpoint of the adhesion of the liquid resin composition. The commercially available products include KBM403, KBE903, KBE9103 and the like manufactured by Shin-Etsu Chemical Co., Ltd., but the component (F) is not limited to these products. The component (F) may be used singly or in combination of two or more.

相對於液狀樹脂組成物100質量份,(D)成分較佳為含有0.1至90質量份,更佳為0.5至50質量份。當為0.1至90質量份時,可在抑制線膨張係數上昇的同時亦避免注入性的惡化。 The component (D) is preferably contained in an amount of from 0.1 to 90 parts by mass, more preferably from 0.5 to 50 parts by mass, per 100 parts by mass of the liquid resin composition. When it is 0.1 to 90 parts by mass, it is possible to prevent deterioration of the injectability while suppressing an increase in the linear expansion coefficient.

相對於液狀樹脂組成物100質量份,(E)成分較佳為含有0.1至30質量份,更佳為0.5至25質量份,再更佳為1至20質量份。 The component (E) is preferably contained in an amount of from 0.1 to 30 parts by mass, more preferably from 0.5 to 25 parts by mass, still more preferably from 1 to 20 parts by mass, per 100 parts by mass of the liquid resin composition.

(E)成分為0.1質量份以上時係緩和樹脂組成物之應力,當為30質量份以下時則不會降低耐濕可靠度。 When the amount of the component (E) is 0.1 part by mass or more, the stress of the resin composition is moderated, and when it is 30 parts by mass or less, the moisture resistance reliability is not lowered.

相對於液狀樹脂組成物100質量份,(F)成分較佳為含有0.05至15質量份,更佳為0.1至10質量份。當為0.05質量份以上時,密著性提升,使硬化後之液狀樹脂組成物之耐濕可靠度變更良好,當為15質量份以下時,則抑制液狀樹脂組成物之發泡。 The component (F) is preferably contained in an amount of from 0.05 to 15 parts by mass, more preferably from 0.1 to 10 parts by mass, per 100 parts by mass of the liquid resin composition. When the amount is 0.05 parts by mass or more, the adhesion is improved, and the moisture resistance reliability of the liquid resin composition after curing is changed to be good. When the amount is 15 parts by mass or less, the foaming of the liquid resin composition is suppressed.

液狀樹脂組成物中,在無損於本發明目的之範圍內,可視需要而更進一步調配用以提升作業性之觸變劑(thixotropic agent)、碳黑等顏料、離子補捉劑、染料、消泡劑、破泡劑、抗氧化劑、其他添加劑等,更可進一步調配反應性稀釋劑、有機溶劑等。特別是為了使硬化後之封裝用液狀樹脂組成物遮斷光且防止半導體晶片的故障,較佳為添加碳黑。惟於本發明,從抑制液狀樹脂組成物溢出之觀點來看,較佳為不含低沸點之有機溶劑。 In the liquid resin composition, a thixotropic agent for improving workability, a pigment such as carbon black, an ion-retaining agent, a dye, and a consumer may be further blended as needed within the scope of the object of the present invention. A foaming agent, a foam breaker, an antioxidant, other additives, and the like may further be formulated with a reactive diluent, an organic solvent, or the like. In particular, carbon black is preferably added in order to block the liquid resin composition for sealing after curing and to prevent malfunction of the semiconductor wafer. However, in the present invention, from the viewpoint of suppressing the overflow of the liquid resin composition, it is preferred to contain no organic solvent having a low boiling point.

本發明之液狀樹脂組成物,係可藉由例如同時或各別將(A)成分至(C)成分及其他添加劑等一邊視需要進行加熱處理,一邊攪拌、溶融、混合、分散而得到。特別是成分(B)為固態時,若直接調配則樹脂黏度會上昇,使作業性明顯惡化,故較佳為先藉由加熱而液化,再與成分(A)混合。就該等之混合、攪拌、分散等之裝置而言,並無特別限定,而可使用備有攪拌及加熱裝置之擂潰機、三輥研磨機、球磨機、行星式混合機、珠磨機等。又,亦可適當組合使用該等裝置。 The liquid resin composition of the present invention can be obtained by stirring, melting, mixing, and dispersing, for example, simultaneously or separately, the components (A) to (C) and other additives are heat-treated as needed. In particular, when the component (B) is in a solid state, if the resin is directly mixed, the viscosity of the resin is increased and the workability is remarkably deteriorated. Therefore, it is preferred to first liquefy by heating and then mix with the component (A). The apparatus for mixing, stirring, dispersing, etc. is not particularly limited, and a kneading machine equipped with a stirring and heating device, a three-roll mill, a ball mill, a planetary mixer, a bead mill, etc. can be used. . Further, these devices may be used in combination as appropriate.

本發明之液狀樹脂組成物較佳為在溫度25℃時之黏度為1至100Pa‧s。在此,黏度係由Brookfield公司製之黏度計(型 號:DV-1)所測定。 The liquid resin composition of the present invention preferably has a viscosity of from 1 to 100 Pa‧s at a temperature of 25 °C. Here, the viscosity is a viscometer made by Brookfield. No.: DV-1).

本發明之液狀樹脂組成物之硬化較佳為在80至165℃進行1至150分鐘。 The hardening of the liquid resin composition of the present invention is preferably carried out at 80 to 165 ° C for 1 to 150 minutes.

本發明之液狀樹脂組成物較佳係使用於作為半導體用封裝材料,更佳係用於圖像元件半導體用封裝材料。 The liquid resin composition of the present invention is preferably used as a packaging material for a semiconductor, and more preferably used as an encapsulating material for an image element semiconductor.

第1圖係表示影像感測器模組之剖面的示意圖之一例。影像感測器模組1係將通過透鏡8之光(在第1圖係以虛線之箭頭表示)以微透鏡4集光而在光二極體3檢測出。第3圖係用以說明本發明之液狀樹脂組成物之使用例之示意圖。將使用於影像感測器模組之基板22與形成於半導體晶片23之墊231接合後,使用分注器30,將半導體用封裝材料21填充到基板22與半導體晶片23之間。填充半導體用封裝材料21後,可藉由加熱硬化,將基板22與半導體晶片23之間予以封裝。 Fig. 1 is a diagram showing an example of a schematic view of a cross section of an image sensor module. The image sensor module 1 detects the light passing through the lens 8 (indicated by a broken line in the first drawing) by the microlens 4 and is detected by the photodiode 3. Fig. 3 is a schematic view for explaining an example of use of the liquid resin composition of the present invention. After the substrate 22 used in the image sensor module is bonded to the pad 231 formed on the semiconductor wafer 23, the semiconductor package material 21 is filled between the substrate 22 and the semiconductor wafer 23 by using the dispenser 30. After the semiconductor package material 21 is filled, the substrate 22 and the semiconductor wafer 23 can be packaged by heat curing.

在此,基板可列舉環氧樹脂、玻璃-環氧樹脂、聚醯亞胺樹脂等,但不限於此等。墊(凸塊,即bump)係可使用由錫、鉛、銅、鉍、銀、鋅、銦等所成的銲料合金等,從環境問題來看,較佳為無鉛銲料合金,但不限於此等。 Here, examples of the substrate include an epoxy resin, a glass epoxy resin, and a polyimide resin, but are not limited thereto. A pad (bump) may be a solder alloy made of tin, lead, copper, tantalum, silver, zinc, indium, or the like. From the viewpoint of environmental problems, a lead-free solder alloy is preferable, but is not limited thereto. Wait.

如此,本發明之液狀樹脂組成物,可容易地製造使溢出受到抑制的覆晶安裝體。 As described above, in the liquid resin composition of the present invention, the flip chip mounted body in which the overflow is suppressed can be easily produced.

[實施例] [Examples]

以下依據實施例說明本發明,但本發明不受限於此等例。再者,以下的實施例中,份、%在未特別說明之下,係表示重量份及重量%。 Hereinafter, the present invention will be described based on examples, but the present invention is not limited to these examples. In the following examples, parts and % are by weight and % by weight unless otherwise specified.

[實施例1至12,比較例1至6] [Examples 1 to 12, Comparative Examples 1 to 6]

以表1、2所示調配,調製液狀樹脂組成物。 The liquid resin composition was prepared by blending as shown in Tables 1 and 2.

[溢出長度的測定] [Measurement of overflow length]

對經鏡面研磨的Si基板進行O2電漿處理(400W,5分鐘),其後,在乾燥器中放置2至24小時。在此經O2電漿處理之Si基板上,將填充於注射器之液狀樹脂組成物以23G的針吐出0.25mg而予以灌封(potting),在120℃使其硬化30分鐘。硬化後,使用光學顯學顯微鏡測定溢出的長度。結果係表示於表1、2。 The mirror-polished Si substrate was subjected to O 2 plasma treatment (400 W, 5 minutes), and thereafter, placed in a desiccator for 2 to 24 hours. On the O 2 plasma-treated Si substrate, the liquid resin composition filled in the syringe was 0.25 mg discharged from a 23 G needle, potted, and cured at 120 ° C for 30 minutes. After hardening, the length of the overflow was measured using an optical microscope. The results are shown in Tables 1 and 2.

[儲存期限之測定] [Measurement of shelf life]

實施例1至12及比較例1、5、6所得之5g之封裝用液狀樹脂組成物之初期黏度係使用Brookfield公司製黏度計(型號:DV-1)在25℃測定。以相同之黏度計測定在室溫保持24小時後之5g的封裝用液狀樹脂組成物的在25℃之黏度變化。(保持24小時後之黏度)/(初期黏度)係未達2倍者標記為○,2至5倍標記為△,超過5倍時標記為×。結果係表示於表1、2。 The initial viscosity of the liquid resin composition for encapsulation of 5 g obtained in each of Examples 1 to 12 and Comparative Examples 1, 5 and 6 was measured at 25 ° C using a Brookfield viscosity meter (Model: DV-1). The viscosity change at 25 ° C of 5 g of the liquid resin composition for encapsulation after 24 hours at room temperature was measured by the same viscosity meter. (The viscosity after 24 hours is maintained) / (Initial viscosity) is less than 2 times and is marked as ○, 2 to 5 times is marked as △, and when it is more than 5 times, it is marked as ×. The results are shown in Tables 1 and 2.

由表1、2可知,實施例1至12中之溢出長度為10μm以下,特別是使用酚系硬化劑作為(B)成分之實施例1至6、8至12中之溢出長度為0至5μm而為更良好。又,在實施例1至12中,24小時以內的黏度上昇為5倍以下且儲存期限良好,而(C)成分為0.02至2.5質量份的範圍內之實施例2至12則是在24小時以內的黏度上昇為2倍以下且儲存期限明顯良好。相對於此,不含有(C)成分之比較例1至6中的溢出長度則為30至50μm而為較長。 As is apparent from Tables 1 and 2, the overflow lengths in Examples 1 to 12 were 10 μm or less, and in particular, the overflow lengths in Examples 1 to 6, 8 to 12 using the phenolic curing agent as the component (B) were 0 to 5 μm. And for better. Further, in Examples 1 to 12, the viscosity within 24 hours was increased to 5 times or less and the shelf life was good, and in Examples 2 to 12 in which the component (C) was in the range of 0.02 to 2.5 parts by mass, it was 24 hours. The viscosity within the rise was less than 2 times and the shelf life was significantly good. On the other hand, in Comparative Examples 1 to 6 which did not contain the component (C), the overflow length was 30 to 50 μm and was long.

如上所述,本發明之液狀樹脂組成物係抑制溢出且儲存期限長,故適合作為半導體元件用之封裝材料,特別是適合 作為覆晶安裝體之封裝材料,其中又非常適合作為圖像元件所用之覆晶安裝體之封裝材料。 As described above, since the liquid resin composition of the present invention suppresses spillage and has a long shelf life, it is suitable as a sealing material for a semiconductor element, and is particularly suitable. As a packaging material for a flip chip mount, it is also very suitable as a package material for a flip chip mount used for an image element.

本案之發明名稱為液狀樹脂組成物、覆晶安裝體及其製造方法,申請專利範圍所請標的為液狀樹脂組成物、半導體用封裝材料、圖像元件用封裝材料、覆晶安裝體及其製造方法。惟本案圖式是說明影像感測器模組之結構及液狀樹脂組成物之使用例的示意圖,該等圖並不足以代表本案發明之技術特徵,故本案無指定代表圖。 The invention name of the present invention is a liquid resin composition, a flip chip mounting body, and a method for producing the same, and the patent application scope is a liquid resin composition, a semiconductor packaging material, an image component packaging material, a flip chip mounting body, and Its manufacturing method. However, the drawing of the present invention is a schematic diagram illustrating the structure of the image sensor module and the use of the liquid resin composition. These figures are not sufficient to represent the technical features of the present invention, so there is no representative representative figure in this case.

Claims (8)

一種液狀樹脂組成物,係含有(A)環氧樹脂、(B)硬化劑、以及(C)二甲基胺基丙基丙烯醯胺與丙烯酸丁酯之共聚物。 A liquid resin composition comprising (A) an epoxy resin, (B) a curing agent, and (C) a copolymer of dimethylaminopropyl acrylamide and butyl acrylate. 如申請專利範圍第1項所述之液狀樹脂組成物,其中,(B)成分係選自由酚系硬化劑、胺系硬化劑、酸酐系硬化劑以及咪唑系硬化劑所組成群組之至少1種。 The liquid resin composition according to claim 1, wherein the component (B) is at least selected from the group consisting of a phenolic curing agent, an amine curing agent, an acid anhydride curing agent, and an imidazole curing agent. 1 species. 如申請專利範圍第1項所述之液狀樹脂組成物,其中,相對於液狀樹脂組成物100質量份,(C)成分係0.02至2.5質量份。 The liquid resin composition according to the first aspect of the invention, wherein the component (C) is 0.02 to 2.5 parts by mass based on 100 parts by mass of the liquid resin composition. 如申請專利範圍第2項所述之液狀樹脂組成物,其中,(B)成分係含有酚系硬化劑,相對於液狀樹脂組成物100質量份,所含有之酚系硬化劑係1至50質量份。 The liquid resin composition according to the second aspect of the invention, wherein the component (B) contains a phenolic curing agent, and the phenolic curing agent 1 to 100 parts by mass of the liquid resin composition 50 parts by mass. 一種半導體用封裝材料,係含有申請專利範圍第1項所述之液狀樹脂組成物。 A packaging material for a semiconductor comprising the liquid resin composition according to claim 1 of the patent application. 一種圖像元件用封裝材料,係使用申請專利範圍第5項所述之半導體用封裝材料。 An encapsulating material for an image element, which is a packaging material for a semiconductor according to item 5 of the patent application. 一種覆晶安裝體,係具有申請專利範圍第1項所述之液狀樹脂組成物之硬化物。 A flip chip mounting body comprising the cured product of the liquid resin composition according to claim 1 of the patent application. 一種覆晶安裝體之製造方法,係使用申請專利範圍第5項所述之半導體用封裝材料進行封裝。 A method for manufacturing a flip chip mount is to be packaged using a semiconductor package material according to claim 5 of the patent application.
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