JP5886051B2 - Resin composition - Google Patents
Resin composition Download PDFInfo
- Publication number
- JP5886051B2 JP5886051B2 JP2012001631A JP2012001631A JP5886051B2 JP 5886051 B2 JP5886051 B2 JP 5886051B2 JP 2012001631 A JP2012001631 A JP 2012001631A JP 2012001631 A JP2012001631 A JP 2012001631A JP 5886051 B2 JP5886051 B2 JP 5886051B2
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- component
- liquid resin
- mass
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011342 resin composition Substances 0.000 title claims description 102
- 239000007788 liquid Substances 0.000 claims description 36
- 239000003822 epoxy resin Substances 0.000 claims description 31
- 229920000647 polyepoxide Polymers 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000002245 particle Substances 0.000 claims description 19
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 15
- 125000000217 alkyl group Chemical group 0.000 claims description 15
- 239000000945 filler Substances 0.000 claims description 15
- 229910052739 hydrogen Inorganic materials 0.000 claims description 15
- 239000001257 hydrogen Substances 0.000 claims description 15
- 125000004432 carbon atom Chemical group C* 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 12
- YAPQBXQYLJRXSA-UHFFFAOYSA-N theobromine Chemical compound CN1C(=O)NC(=O)C2=C1N=CN2C YAPQBXQYLJRXSA-UHFFFAOYSA-N 0.000 claims description 12
- 150000002500 ions Chemical class 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- RYYVLZVUVIJVGH-UHFFFAOYSA-N caffeine Chemical group CN1C(=O)N(C)C(=O)C2=C1N=CN2C RYYVLZVUVIJVGH-UHFFFAOYSA-N 0.000 claims description 6
- ZFXYFBGIUFBOJW-UHFFFAOYSA-N theophylline Chemical compound O=C1N(C)C(=O)N(C)C2=C1NC=N2 ZFXYFBGIUFBOJW-UHFFFAOYSA-N 0.000 claims description 6
- GVJHHUAWPYXKBD-IEOSBIPESA-N α-tocopherol Chemical compound OC1=C(C)C(C)=C2O[C@@](CCC[C@H](C)CCC[C@H](C)CCCC(C)C)(C)CCC2=C1C GVJHHUAWPYXKBD-IEOSBIPESA-N 0.000 claims description 5
- WGVKWNUPNGFDFJ-DQCZWYHMSA-N β-tocopherol Chemical compound OC1=CC(C)=C2O[C@@](CCC[C@H](C)CCC[C@H](C)CCCC(C)C)(C)CCC2=C1C WGVKWNUPNGFDFJ-DQCZWYHMSA-N 0.000 claims description 5
- QUNWUDVFRNGTCO-UHFFFAOYSA-N 1,7-dimethylxanthine Chemical compound N1C(=O)N(C)C(=O)C2=C1N=CN2C QUNWUDVFRNGTCO-UHFFFAOYSA-N 0.000 claims description 4
- 239000008393 encapsulating agent Substances 0.000 claims description 4
- WIGCFUFOHFEKBI-UHFFFAOYSA-N gamma-tocopherol Natural products CC(C)CCCC(C)CCCC(C)CCCC1CCC2C(C)C(O)C(C)C(C)C2O1 WIGCFUFOHFEKBI-UHFFFAOYSA-N 0.000 claims description 4
- 235000004835 α-tocopherol Nutrition 0.000 claims description 4
- 239000002076 α-tocopherol Substances 0.000 claims description 4
- QUEDXNHFTDJVIY-DQCZWYHMSA-N γ-tocopherol Chemical compound OC1=C(C)C(C)=C2O[C@@](CCC[C@H](C)CCC[C@H](C)CCCC(C)C)(C)CCC2=C1 QUEDXNHFTDJVIY-DQCZWYHMSA-N 0.000 claims description 4
- OTXNTMVVOOBZCV-WAZJVIJMSA-N γ-tocotrienol Chemical compound OC1=C(C)C(C)=C2O[C@@](CC/C=C(C)/CC/C=C(C)/CCC=C(C)C)(C)CCC2=C1 OTXNTMVVOOBZCV-WAZJVIJMSA-N 0.000 claims description 4
- RZFHLOLGZPDCHJ-KTWAZNHYSA-N 2,5,7,8-tetramethyl-2-[(3e,7e)-4,8,12-trimethyltrideca-3,7,11-trienyl]-3,4-dihydrochromen-6-ol Chemical compound OC1=C(C)C(C)=C2OC(CC/C=C(C)/CC/C=C(C)/CCC=C(C)C)(C)CCC2=C1C RZFHLOLGZPDCHJ-KTWAZNHYSA-N 0.000 claims description 3
- LRFVTYWOQMYALW-UHFFFAOYSA-N 9H-xanthine Chemical class O=C1NC(=O)NC2=C1NC=N2 LRFVTYWOQMYALW-UHFFFAOYSA-N 0.000 claims description 3
- GZIFEOYASATJEH-UHFFFAOYSA-N D-delta tocopherol Natural products OC1=CC(C)=C2OC(CCCC(C)CCCC(C)CCCC(C)C)(C)CCC2=C1 GZIFEOYASATJEH-UHFFFAOYSA-N 0.000 claims description 3
- LPHGQDQBBGAPDZ-UHFFFAOYSA-N Isocaffeine Natural products CN1C(=O)N(C)C(=O)C2=C1N(C)C=N2 LPHGQDQBBGAPDZ-UHFFFAOYSA-N 0.000 claims description 3
- 229960001948 caffeine Drugs 0.000 claims description 3
- VJEONQKOZGKCAK-UHFFFAOYSA-N caffeine Natural products CN1C(=O)N(C)C(=O)C2=C1C=CN2C VJEONQKOZGKCAK-UHFFFAOYSA-N 0.000 claims description 3
- 239000007822 coupling agent Substances 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 3
- 239000005060 rubber Substances 0.000 claims description 3
- 229940065721 systemic for obstructive airway disease xanthines Drugs 0.000 claims description 3
- 229960004559 theobromine Drugs 0.000 claims description 3
- 229960000278 theophylline Drugs 0.000 claims description 3
- GZIFEOYASATJEH-VHFRWLAGSA-N δ-tocopherol Chemical compound OC1=CC(C)=C2O[C@@](CCC[C@H](C)CCC[C@H](C)CCCC(C)C)(C)CCC2=C1 GZIFEOYASATJEH-VHFRWLAGSA-N 0.000 claims description 3
- ODADKLYLWWCHNB-LDYBVBFYSA-N δ-tocotrienol Chemical compound OC1=CC(C)=C2O[C@@](CC/C=C(C)/CC/C=C(C)/CCC=C(C)C)(C)CCC2=C1 ODADKLYLWWCHNB-LDYBVBFYSA-N 0.000 claims description 3
- 239000005011 phenolic resin Substances 0.000 claims 1
- 239000010949 copper Substances 0.000 description 26
- 230000005012 migration Effects 0.000 description 25
- 238000013508 migration Methods 0.000 description 25
- 239000000047 product Substances 0.000 description 22
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 238000012360 testing method Methods 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 239000000758 substrate Substances 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 10
- 238000003860 storage Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 239000007787 solid Substances 0.000 description 9
- 150000001412 amines Chemical class 0.000 description 8
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 7
- -1 methylnadic acid anhydride Chemical class 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 6
- 150000008065 acid anhydrides Chemical class 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 230000008719 thickening Effects 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000004594 Masterbatch (MB) Substances 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- DHXVGJBLRPWPCS-UHFFFAOYSA-N Tetrahydropyran Chemical group C1CCOCC1 DHXVGJBLRPWPCS-UHFFFAOYSA-N 0.000 description 4
- 239000011324 bead Substances 0.000 description 4
- 150000001565 benzotriazoles Chemical class 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical compound NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 150000001721 carbon Chemical group 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 229930003802 tocotrienol Natural products 0.000 description 3
- 239000011731 tocotrienol Substances 0.000 description 3
- 235000019148 tocotrienols Nutrition 0.000 description 3
- DFUSDJMZWQVQSF-XLGIIRLISA-N (2r)-2-methyl-2-[(4r,8r)-4,8,12-trimethyltridecyl]-3,4-dihydrochromen-6-ol Chemical compound OC1=CC=C2O[C@@](CCC[C@H](C)CCC[C@H](C)CCCC(C)C)(C)CCC2=C1 DFUSDJMZWQVQSF-XLGIIRLISA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- QCBSYPYHCJMQGB-UHFFFAOYSA-N 2-ethyl-1,3,5-triazine Chemical compound CCC1=NC=NC=N1 QCBSYPYHCJMQGB-UHFFFAOYSA-N 0.000 description 2
- GJJVAFUKOBZPCB-UHFFFAOYSA-N 2-methyl-2-(4,8,12-trimethyltrideca-3,7,11-trienyl)-3,4-dihydrochromen-6-ol Chemical compound OC1=CC=C2OC(CCC=C(C)CCC=C(C)CCC=C(C)C)(C)CCC2=C1 GJJVAFUKOBZPCB-UHFFFAOYSA-N 0.000 description 2
- OTXNTMVVOOBZCV-UHFFFAOYSA-N 2R-gamma-tocotrienol Natural products OC1=C(C)C(C)=C2OC(CCC=C(C)CCC=C(C)CCC=C(C)C)(C)CCC2=C1 OTXNTMVVOOBZCV-UHFFFAOYSA-N 0.000 description 2
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical compound N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 2
- GOYGTBXFJBGGLI-UHFFFAOYSA-N 7a-but-1-enyl-3a-methyl-4,5-dihydro-2-benzofuran-1,3-dione Chemical compound C1=CCCC2(C)C(=O)OC(=O)C21C=CCC GOYGTBXFJBGGLI-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000005062 Polybutadiene Substances 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- RZFHLOLGZPDCHJ-DLQZEEBKSA-N alpha-Tocotrienol Natural products Oc1c(C)c(C)c2O[C@@](CC/C=C(/CC/C=C(\CC/C=C(\C)/C)/C)\C)(C)CCc2c1C RZFHLOLGZPDCHJ-DLQZEEBKSA-N 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- 150000004982 aromatic amines Chemical class 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910001410 inorganic ion Inorganic materials 0.000 description 2
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 239000003094 microcapsule Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229920002857 polybutadiene Polymers 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 150000003918 triazines Chemical class 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- 125000005591 trimellitate group Chemical group 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- LTQBNYCMVZQRSD-UHFFFAOYSA-N (4-ethenylphenyl)-trimethoxysilane Chemical compound CO[Si](OC)(OC)C1=CC=C(C=C)C=C1 LTQBNYCMVZQRSD-UHFFFAOYSA-N 0.000 description 1
- FGYKUFVNYVMTAM-UHFFFAOYSA-N (R)-2,5,8-trimethyl-2-(4,8,12-trimethyl-trideca-3t,7t,11-trienyl)-chroman-6-ol Natural products OC1=CC(C)=C2OC(CCC=C(C)CCC=C(C)CCC=C(C)C)(C)CCC2=C1C FGYKUFVNYVMTAM-UHFFFAOYSA-N 0.000 description 1
- GJJVAFUKOBZPCB-ZGRPYONQSA-N (r)-3,4-dihydro-2-methyl-2-(4,8,12-trimethyl-3,7,11-tridecatrienyl)-2h-1-benzopyran-6-ol Chemical class OC1=CC=C2OC(CC/C=C(C)/CC/C=C(C)/CCC=C(C)C)(C)CCC2=C1 GJJVAFUKOBZPCB-ZGRPYONQSA-N 0.000 description 1
- YQMXOIAIYXXXEE-UHFFFAOYSA-N 1-benzylpyrrolidin-3-ol Chemical compound C1C(O)CCN1CC1=CC=CC=C1 YQMXOIAIYXXXEE-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- LLEASVZEQBICSN-UHFFFAOYSA-N 2-undecyl-1h-imidazole Chemical compound CCCCCCCCCCCC1=NC=CN1 LLEASVZEQBICSN-UHFFFAOYSA-N 0.000 description 1
- ODADKLYLWWCHNB-UHFFFAOYSA-N 2R-delta-tocotrienol Natural products OC1=CC(C)=C2OC(CCC=C(C)CCC=C(C)CCC=C(C)C)(C)CCC2=C1 ODADKLYLWWCHNB-UHFFFAOYSA-N 0.000 description 1
- WVRNUXJQQFPNMN-VAWYXSNFSA-N 3-[(e)-dodec-1-enyl]oxolane-2,5-dione Chemical group CCCCCCCCCC\C=C\C1CC(=O)OC1=O WVRNUXJQQFPNMN-VAWYXSNFSA-N 0.000 description 1
- RDNPPYMJRALIIH-UHFFFAOYSA-N 3-methylcyclohex-3-ene-1,1,2,2-tetracarboxylic acid Chemical compound CC1=CCCC(C(O)=O)(C(O)=O)C1(C(O)=O)C(O)=O RDNPPYMJRALIIH-UHFFFAOYSA-N 0.000 description 1
- LVNLBBGBASVLLI-UHFFFAOYSA-N 3-triethoxysilylpropylurea Chemical compound CCO[Si](OCC)(OCC)CCCNC(N)=O LVNLBBGBASVLLI-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 1
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 1
- DRPJWBIHQOHLND-UHFFFAOYSA-N 4-[dimethoxy(methyl)silyl]oxybutyl 2-methylprop-2-enoate Chemical compound CO[Si](C)(OC)OCCCCOC(=O)C(C)=C DRPJWBIHQOHLND-UHFFFAOYSA-N 0.000 description 1
- QXBYUPMEYVDXIQ-UHFFFAOYSA-N 4-methyl-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound CC1CCCC2C(=O)OC(=O)C12 QXBYUPMEYVDXIQ-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- FKBMTBAXDISZGN-UHFFFAOYSA-N 5-methyl-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1C(C)CCC2C(=O)OC(=O)C12 FKBMTBAXDISZGN-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 description 1
- JRLTTZUODKEYDH-UHFFFAOYSA-N 8-methylquinoline Chemical group C1=CN=C2C(C)=CC=CC2=C1 JRLTTZUODKEYDH-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical group CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 229920002732 Polyanhydride Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 208000034189 Sclerosis Diseases 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000006230 acetylene black Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920000800 acrylic rubber Polymers 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 229940087168 alpha tocopherol Drugs 0.000 description 1
- 229940064063 alpha tocotrienol Drugs 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 235000006708 antioxidants Nutrition 0.000 description 1
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000000440 bentonite Substances 0.000 description 1
- 229910000278 bentonite Inorganic materials 0.000 description 1
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 1
- 229940066595 beta tocopherol Drugs 0.000 description 1
- FGYKUFVNYVMTAM-YMCDKREISA-N beta-Tocotrienol Natural products Oc1c(C)c2c(c(C)c1)O[C@@](CC/C=C(\CC/C=C(\CC/C=C(\C)/C)/C)/C)(C)CC2 FGYKUFVNYVMTAM-YMCDKREISA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 235000010389 delta-tocopherol Nutrition 0.000 description 1
- BTNBMQIHCRIGOU-UHFFFAOYSA-N delta-tocotrienol Natural products CC(=CCCC(=CCCC(=CCCOC1(C)CCc2cc(O)cc(C)c2O1)C)C)C BTNBMQIHCRIGOU-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 238000002296 dynamic light scattering Methods 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- FGYKUFVNYVMTAM-MUUNZHRXSA-N epsilon-Tocopherol Natural products OC1=CC(C)=C2O[C@@](CCC=C(C)CCC=C(C)CCC=C(C)C)(C)CCC2=C1C FGYKUFVNYVMTAM-MUUNZHRXSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- OTXNTMVVOOBZCV-YMCDKREISA-N gamma-Tocotrienol Natural products Oc1c(C)c(C)c2O[C@@](CC/C=C(\CC/C=C(\CC/C=C(\C)/C)/C)/C)(C)CCc2c1 OTXNTMVVOOBZCV-YMCDKREISA-N 0.000 description 1
- 235000010382 gamma-tocopherol Nutrition 0.000 description 1
- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 230000008642 heat stress Effects 0.000 description 1
- FLBJFXNAEMSXGL-UHFFFAOYSA-N het anhydride Chemical compound O=C1OC(=O)C2C1C1(Cl)C(Cl)=C(Cl)C2(Cl)C1(Cl)Cl FLBJFXNAEMSXGL-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 125000002883 imidazolyl group Chemical group 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000003273 ketjen black Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- VYKXQOYUCMREIS-UHFFFAOYSA-N methylhexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21C VYKXQOYUCMREIS-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 229960000984 tocofersolan Drugs 0.000 description 1
- 229940068778 tocotrienols Drugs 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- VTHOKNTVYKTUPI-UHFFFAOYSA-N triethoxy-[3-(3-triethoxysilylpropyltetrasulfanyl)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCSSSSCCC[Si](OCC)(OCC)OCC VTHOKNTVYKTUPI-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- IUURMAINMLIZMX-UHFFFAOYSA-N tris(2-nonylphenyl)phosphane Chemical compound CCCCCCCCCC1=CC=CC=C1P(C=1C(=CC=CC=1)CCCCCCCCC)C1=CC=CC=C1CCCCCCCCC IUURMAINMLIZMX-UHFFFAOYSA-N 0.000 description 1
- WXAZIUYTQHYBFW-UHFFFAOYSA-N tris(4-methylphenyl)phosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 WXAZIUYTQHYBFW-UHFFFAOYSA-N 0.000 description 1
- DSROZUMNVRXZNO-UHFFFAOYSA-K tris[(1-naphthalen-1-yl-3-phenylnaphthalen-2-yl)oxy]alumane Chemical compound C=1C=CC=CC=1C=1C=C2C=CC=CC2=C(C=2C3=CC=CC=C3C=CC=2)C=1O[Al](OC=1C(=C2C=CC=CC2=CC=1C=1C=CC=CC=1)C=1C2=CC=CC=C2C=CC=1)OC(C(=C1C=CC=CC1=C1)C=2C3=CC=CC=C3C=CC=2)=C1C1=CC=CC=C1 DSROZUMNVRXZNO-UHFFFAOYSA-K 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- RZFHLOLGZPDCHJ-XZXLULOTSA-N α-Tocotrienol Chemical compound OC1=C(C)C(C)=C2O[C@@](CC/C=C(C)/CC/C=C(C)/CCC=C(C)C)(C)CCC2=C1C RZFHLOLGZPDCHJ-XZXLULOTSA-N 0.000 description 1
- 235000019145 α-tocotrienol Nutrition 0.000 description 1
- 239000011730 α-tocotrienol Substances 0.000 description 1
- 235000007680 β-tocopherol Nutrition 0.000 description 1
- 239000011590 β-tocopherol Substances 0.000 description 1
- 235000019151 β-tocotrienol Nutrition 0.000 description 1
- 239000011723 β-tocotrienol Substances 0.000 description 1
- FGYKUFVNYVMTAM-WAZJVIJMSA-N β-tocotrienol Chemical compound OC1=CC(C)=C2O[C@@](CC/C=C(C)/CC/C=C(C)/CCC=C(C)C)(C)CCC2=C1C FGYKUFVNYVMTAM-WAZJVIJMSA-N 0.000 description 1
- 239000002478 γ-tocopherol Substances 0.000 description 1
- 235000019150 γ-tocotrienol Nutrition 0.000 description 1
- 239000011722 γ-tocotrienol Substances 0.000 description 1
- 150000003789 δ-tocopherols Chemical class 0.000 description 1
- 235000019144 δ-tocotrienol Nutrition 0.000 description 1
- 239000011729 δ-tocotrienol Substances 0.000 description 1
Description
本発明は、樹脂組成物に関し、特に、回路基板に搭載された半導体素子と、回路基板と半導体素子とを電気的に接続する銅製ワイヤーと、を封止する樹脂組成物に関する。 The present invention relates to a resin composition, and more particularly, to a resin composition that seals a semiconductor element mounted on a circuit board and a copper wire that electrically connects the circuit board and the semiconductor element.
従来、ダイオード、トランジスタ等の半導体素子は、回路基板と電気的接合をするために、金製ワイヤーを使用し、これらの半導体素子と金製ワイヤーを封止樹脂により、封止している。 2. Description of the Related Art Conventionally, semiconductor elements such as diodes and transistors use gold wires for electrical connection with a circuit board, and these semiconductor elements and gold wires are sealed with a sealing resin.
近年、電子機器の小型化、軽量化、高性能化に対応するため、半導体素子の高集積化が進み、また、半導体装置の表面実装化が促進されている中で、半導体素子の封止に用いられている樹脂組成物への要求は、ますます厳しくなってきている。さらに、半導体装置に対するコストダウンの要求も激しい上に、金価格が高騰しており、従来の金線接続ではコストが高いため、銅製ワイヤーによる接合が検討されている。 In recent years, in order to cope with the downsizing, weight reduction, and high performance of electronic devices, the integration of semiconductor elements has been advanced, and the surface mounting of semiconductor devices has been promoted. The demand for the resin composition used is becoming more and more severe. Furthermore, the demand for reducing the cost of semiconductor devices is severe, and the price of gold is soaring. Since the cost of conventional gold wire connection is high, bonding with a copper wire is being studied.
しかしながら、銅製ワイヤーは、金製ワイヤー(金線)と比較して、腐食され易いため、銅製ワイヤー間でのマイグレーションが危惧されている。マイグレーションは、銅製ワイヤーの銅が、電気化学反応によって溶出し、抵抗値低下が生じる現象である。銅製ワイヤーは、半導体装置作動時には、電極として作用する。図1に、銅製ワイヤーのマイグレーションを説明する模式図を示す。マイグレーションは、まず陽極2で、反応式:Cu+(OH−)→Cu(OH)によりCuが溶出し、基板1上を、Cu(OH)が実線矢印の向き、すなわち陰極3方向に移動し、陰極3では、基板1上で、反応式:CuOH+H3O+→Cu+2H2OによりCuが破線矢印向き、すなわち陽極2方向に析出する。通常、銅製ワイヤーは、エポキシ樹脂系の樹脂組成物で封止されているが、エポキシ樹脂に吸水されたH2O由来のOH−やH3O+により、マイグレーションが発生する。さらに、雰囲気中にCl−イオンがあると、マイグレーションは飛躍的に加速される。このCl−イオンは、通常、エポキシ樹脂の不純物として存在する。マイグレーションが起きると、銅製ワイヤーの陽極−陰極間の抵抗値が低くなり、マイグレーションが進行すると、陽極と陰極の短絡に至る。なお、Cu(OH)は、正確には、Cu(OH)2の場合と、Cu(OH)+の場合があり、Cu(OH)2の場合には、その濃度差により陰極側に移動し、Cu(OH)+の場合には、電気的に移動する。 However, since copper wires are more easily corroded than gold wires (gold wires), migration between copper wires is a concern. Migration is a phenomenon in which copper in a copper wire is eluted by an electrochemical reaction, resulting in a decrease in resistance value. The copper wire acts as an electrode when the semiconductor device is activated. In FIG. 1, the schematic diagram explaining the migration of copper wires is shown. Migration starts with the anode 2, Cu is eluted by the reaction formula: Cu + (OH − ) → Cu (OH), and Cu (OH) moves on the substrate 1 in the direction of the solid arrow, that is, toward the cathode 3, In the cathode 3, Cu is deposited on the substrate 1 in the direction of the broken line arrow, that is, in the direction of the anode 2 by the reaction formula: CuOH + H 3 O + → Cu + 2H 2 O. Usually, copper wires are sealed with an epoxy resin-based resin composition, but migration occurs due to OH − or H 3 O + derived from H 2 O absorbed in the epoxy resin. Furthermore, in the atmosphere Cl - when there is an ion migration is accelerated dramatically. This Cl − ion is usually present as an impurity of the epoxy resin. When migration occurs, the resistance value between the anode and the cathode of the copper wire decreases, and when migration proceeds, the anode and cathode are short-circuited. In addition, Cu (OH) may be Cu (OH) 2 or Cu (OH) + precisely, and in the case of Cu (OH) 2 , it moves to the cathode side due to the concentration difference. In the case of Cu (OH) + , it moves electrically.
このマイグレーションを防止するため、イオン結合剤として、ベンゾトリアゾール類、トリアジン類、およびこれらのイソシアヌル類から選ばれる少なくとも1種の可能物を含む樹脂組成物が報告されている(特許文献1)。 In order to prevent this migration, a resin composition containing at least one possible substance selected from benzotriazoles, triazines, and these isocyanurs has been reported as an ion binder (Patent Document 1).
しかしながら、ベンゾトリアゾール類等を、エポキシ樹脂中に分散すると、室温において、エポキシ樹脂とベンゾトリアゾール類の硬化反応が進行し、粘度が著しく増加する。また、ベンゾトリアゾール類はマイグレーションを防止する効果はあるが、電極部分の銅の腐食を防止できない、という問題がある。 However, when benzotriazoles and the like are dispersed in an epoxy resin, the curing reaction between the epoxy resin and the benzotriazoles proceeds at room temperature, and the viscosity increases remarkably. In addition, benzotriazoles have an effect of preventing migration, but there is a problem that corrosion of copper in the electrode portion cannot be prevented.
本発明は、硬化後の樹脂組成物中の銅線ワイヤーのマイグレーションを防止し、かつ樹脂組成物の保存中の硬化反応を抑制する、具体的には、樹脂組成物を液状で使用する場合の保存中の増粘を抑制することを課題とする。したがって、保存特性に優れ、硬化後には耐マイグレーション性に優れた高信頼性の樹脂組成物を提供することを目的とする。 The present invention prevents migration of the copper wire in the cured resin composition and suppresses the curing reaction during storage of the resin composition, specifically, when the resin composition is used in liquid form. It is an object to suppress thickening during storage. Accordingly, it is an object of the present invention to provide a highly reliable resin composition having excellent storage characteristics and excellent migration resistance after curing.
本発明は、以下の構成を有することによって上記問題を解決した樹脂組成物に関する。
〔1〕(A)エポキシ樹脂、
(B)硬化剤、
(C)充填剤、ならびに
(D)一般式(1):
This invention relates to the resin composition which solved the said problem by having the following structures.
[1] (A) epoxy resin,
(B) a curing agent,
(C) filler, and (D) general formula (1):
(式中、R1、R2およびR3は、それぞれ独立して、水素または炭素数1〜3のアルキル基である)で表されるキサンチン類、一般式(2): (Wherein R 1 , R 2 and R 3 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms), xanthines represented by the general formula (2):
(式中、R4、R5、R6およびR7は、それぞれ独立して、水素または炭素数1〜3のアルキル基であり、mは1〜5の整数である)で表される化合物、および一般式(3): (Wherein, R 4 , R 5 , R 6 and R 7 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, and m is an integer of 1 to 5). And general formula (3):
(式中、R8、R9、R10およびR11は、それぞれ独立して、水素または炭素数1〜3のアルキル基であり、nは、1〜5の整数である)で表される化合物からなる群より選ばれる少なくとも1種
を含有することを特徴とする、樹脂組成物。
〔2〕(D)成分が、カフェイン、テオフィリン、テオブロミン、パラキサンチン、5,8−ジメチルトコール、7,8−ジメチルトコール、8−メチルトコール、5,7,8−トリメチルトコトリエノール、5,8−ジメチルトコトリエノール、7,8−ジメチルトコトリエノール、8−メチルトコトリエノールおよび5,7,8−トリメチルトコールからなる群より選択される少なくとも1種である、上記〔1〕記載の樹脂組成物。
〔3〕(C)成分が、樹脂組成物:100質量部に対して、50〜92質量部である、上記〔1〕または〔2〕記載の樹脂組成物。
〔4〕(C)成分の平均粒径が、0.6〜20μmである、上記〔1〕〜〔3〕のいずれか記載の樹脂組成物。
〔5〕(C)成分が、平均粒径が0.5〜3μmの第1の充填剤と、平均粒径が8〜20μmの第2の充填剤と、を含む、上記〔4〕記載の樹脂組成物。
〔6〕さらに、(E)硬化促進剤を含有する、上記〔1〕〜〔5〕のいずれか記載の樹脂組成物。
〔7〕さらに、(F)カップリング剤を含有する、〔1〕〜〔6〕のいずれか記載の樹脂組成物。
〔8〕さらに、(G)ゴム成分を含有する、上記〔1〕〜〔7〕のいずれか記載の樹脂組成物。
〔9〕さらに、(H)イオン交換体を含有する、上記〔1〕〜〔8〕のいずれか記載の樹脂組成物。
〔10〕(D)成分が、樹脂組成物:100質量部に対して、0.01〜12質量部である、上記〔1〕〜〔9〕のいずれか記載の樹脂組成物。
〔11〕上記〔1〕〜〔10〕のいずれか記載の樹脂組成物を含む。半導体封止材。
〔12〕上記〔1〕〜〔11〕のいずれか記載の樹脂組成物で封止された半導体素子を有する、半導体装置。
(Wherein R 8 , R 9 , R 10 and R 11 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, and n is an integer of 1 to 5). A resin composition comprising at least one selected from the group consisting of compounds.
[2] The component (D) is caffeine, theophylline, theobromine, paraxanthine, 5,8-dimethyltocol, 7,8-dimethyltocol, 8-methyltocol, 5,7,8-trimethyltocotrienol, 5,8 The resin composition according to the above [1], which is at least one selected from the group consisting of dimethyltocotrienol, 7,8-dimethyltocotrienol, 8-methyltocotrienol and 5,7,8-trimethyltocol.
[3] The resin composition according to [1] or [2] above, wherein the component (C) is 50 to 92 parts by mass with respect to 100 parts by mass of the resin composition.
[4] The resin composition according to any one of [1] to [3], wherein the average particle size of the component (C) is 0.6 to 20 μm.
[5] The above (4), wherein the component (C) comprises a first filler having an average particle diameter of 0.5 to 3 μm and a second filler having an average particle diameter of 8 to 20 μm. Resin composition.
[6] The resin composition according to any one of [1] to [5], further including (E) a curing accelerator.
[7] The resin composition according to any one of [1] to [6], further comprising (F) a coupling agent.
[8] The resin composition according to any one of [1] to [7], further comprising (G) a rubber component.
[9] The resin composition according to any one of [1] to [8], further comprising (H) an ion exchanger.
[10] The resin composition according to any one of [1] to [9], wherein the component (D) is 0.01 to 12 parts by mass with respect to 100 parts by mass of the resin composition.
[11] The resin composition according to any one of [1] to [10]. Semiconductor encapsulant.
[12] A semiconductor device having a semiconductor element sealed with the resin composition according to any one of [1] to [11].
本発明〔1〕によれば、保存特性に優れ、具体的には、樹脂組成物を液状で使用する場合に保存中の増粘が抑制され、かつ硬化後に耐マイグレーション性に優れる樹脂組成物を提供することができる。 According to the present invention [1], a resin composition having excellent storage characteristics, specifically, a thickening during storage when the resin composition is used in a liquid state, and having excellent migration resistance after curing. Can be provided.
本発明〔10〕によれば、耐マイグレーション性に優れた高信頼性の半導体装置を容易に提供することができる。 According to the present invention [10], a highly reliable semiconductor device excellent in migration resistance can be easily provided.
本発明の樹脂組成物は、(A)エポキシ樹脂、
(B)硬化剤、
(C)充填剤、ならびに
(D)一般式(1):
The resin composition of the present invention comprises (A) an epoxy resin,
(B) a curing agent,
(C) filler, and (D) general formula (1):
(式中、R1、R2およびR3は、それぞれ独立して、水素または炭素数1〜3のアルキル基である)で表されるキサンチン類、一般式(2): (Wherein R 1 , R 2 and R 3 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms), xanthines represented by the general formula (2):
(式中、R4、R5、R6およびR7は、それぞれ独立して、水素または炭素数1〜3のアルキル基であり、mは1〜5の整数である)で表される化合物、および一般式(3): (Wherein, R 4 , R 5 , R 6 and R 7 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, and m is an integer of 1 to 5). And general formula (3):
(式中、R8、R9、R10およびR11は、それぞれ独立して、水素または炭素数1〜3のアルキル基であり、nは、1〜5の整数である)で表される化合物からなる群より選ばれる少なくとも1種
を含有することを特徴とする。
(Wherein R 8 , R 9 , R 10 and R 11 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, and n is an integer of 1 to 5). It contains at least one selected from the group consisting of compounds.
(A)成分としては、樹脂組成物をアンダーフィル材として使用する場合には、液状エポキシ樹脂が好ましく、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状ナフタレン型エポキシ樹脂、液状アミノフェノール型エポキシ樹脂、液状水添ビスフェノール型エポキシ樹脂、液状脂環式エポキシ樹脂、液状アルコールエーテル型エポキシ樹脂、液状環状脂肪族型エポキシ樹脂、液状フルオレン型エポキシ樹脂、液状シロキサン系エポキシ樹脂等が挙げられ、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状アミノフェノール型エポキシ樹脂、液状シロキサン系エポキシ樹脂が、硬化性、耐熱性、接着性、耐久性の観点から好ましい。なお、樹脂組成物をフィルム状等の固体で使用する場合には、(A)成分は、固体のエポキシ樹脂であると好ましく、固体のエポキシ樹脂としては、液状エポキシ樹脂として挙げたものの固体が挙げられ、フィルム成型性の観点から、フェノキシ樹脂が好ましい。また、エポキシ当量は、粘度調整の観点から、80〜250g/eqが好ましい。市販品としては、新日鐵化学製ビスフェノールF型エポキシ樹脂(品名:YDF8170)、新日鐵化学製ビスフェノールF型エポキシ樹脂(品名:YDF870GS)、三菱化学製アミノフェノール型エポキシ樹脂(グレード:JER630、JER630LSD)、DIC製ナフタレン型エポキシ樹脂(品名:HP4032D)、モメンティブ・パフォーマンス製シロキサン系エポキシ樹脂(品名:TSL9906)、新日鐵化学株式会社製1,4−シクロヘキサンジメタノールジグリシジルエーテル(品名:ZX1658GS)等が挙げられる。(A)成分は、単独でも2種以上を併用してもよい。 As the component (A), when the resin composition is used as an underfill material, a liquid epoxy resin is preferable, a liquid bisphenol A type epoxy resin, a liquid bisphenol F type epoxy resin, a liquid naphthalene type epoxy resin, a liquid aminophenol. Type epoxy resin, liquid hydrogenated bisphenol type epoxy resin, liquid alicyclic epoxy resin, liquid alcohol ether type epoxy resin, liquid cyclic aliphatic type epoxy resin, liquid fluorene type epoxy resin, liquid siloxane type epoxy resin, etc. Liquid bisphenol A type epoxy resin, liquid bisphenol F type epoxy resin, liquid aminophenol type epoxy resin, and liquid siloxane type epoxy resin are preferable from the viewpoints of curability, heat resistance, adhesiveness, and durability. In addition, when using a resin composition by solid, such as a film form, (A) component is preferable in it being a solid epoxy resin, and the solid of what was mentioned as a liquid epoxy resin as a solid epoxy resin is mentioned. From the viewpoint of film moldability, a phenoxy resin is preferable. The epoxy equivalent is preferably 80 to 250 g / eq from the viewpoint of adjusting the viscosity. Commercially available products include Nippon Steel Chemical's bisphenol F type epoxy resin (product name: YDF8170), Nippon Steel Chemical's bisphenol F type epoxy resin (product name: YDF870GS), Mitsubishi Chemical's aminophenol type epoxy resin (grade: JER630, JER630LSD), DIC naphthalene type epoxy resin (product name: HP4032D), Momentive Performance siloxane epoxy resin (product name: TSL9906), Nippon Steel Chemical Co., Ltd. 1,4-cyclohexanedimethanol diglycidyl ether (product name: ZX1658GS) ) And the like. (A) A component may be individual or may use 2 or more types together.
(B)成分としては、酸無水物、アミン系硬化剤、フェノール系硬化剤が挙げられる。酸無水物としては、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、メチルナジック酸無水物、水素化メチルナジック酸無水物、トリアルキルテトラヒドロ無水フタル酸、メチルシクロヘキセンテトラカルボン酸二無水物、無水フタル酸、無水トリメリット酸、無水ピロメリット酸、ベンゾフェノンテトラカルボン酸二無水物、エチレングリコールビスアンヒドロトリメリテート、グリセリンビス(アンヒドロトリメリテート)モノアセテート、ドデセニル無水コハク酸、脂肪族二塩基酸ポリ無水物、クロレンド酸無水物、メチルブテニルテトラヒドロフタル酸無水物、アルキル化テトラヒドロフタル酸無水物、メチルハイミック酸無水物、アルケニル基で置換されたコハク酸無水物、グルタル酸無水物等が挙げられ、メチルブテニルテトラヒドロフタル酸無水物が好ましい。アミン系硬化剤としては、鎖状脂肪族アミン、環状脂肪族アミン、脂肪芳香族アミン、芳香族アミン等が挙げられ、芳香族アミンが好ましい。フェノール系硬化剤としては、フェノールノボラック、クレゾールノボラック等が挙げられ、フェノールノボラックが好ましい。市販品としては、三菱化学製酸無水物(グレード:YH306、YH307)、日立化成工業製3 or 4−メチル−ヘキサヒドロ無水フタル酸(品名:HN−5500)、日本化薬製アミン硬化剤(品名:カヤハードA−A)、明和化成製フェノール硬化剤(品名:MEH8005)等が挙げられる。(B)成分は、単独でも2種以上を併用してもよい。 Examples of the component (B) include acid anhydrides, amine-based curing agents, and phenol-based curing agents. Acid anhydrides include tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, methylnadic acid anhydride, hydrogenated methylnadic acid anhydride, trialkyltetrahydrophthalic anhydride, Methylcyclohexene tetracarboxylic dianhydride, phthalic anhydride, trimellitic anhydride, pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, ethylene glycol bisanhydro trimellitate, glycerin bis (anhydro trimellitate) mono Substituted with acetate, dodecenyl succinic anhydride, aliphatic dibasic polyanhydride, chlorendic anhydride, methylbutenyl tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, methyl hymic anhydride, alkenyl group Succinic anhydride was, glutaric anhydride and the like, methyl butenyl tetrahydrophthalic acid anhydride are preferred. Examples of amine-based curing agents include chain aliphatic amines, cycloaliphatic amines, aliphatic aromatic amines, aromatic amines, and the like, and aromatic amines are preferred. Examples of the phenolic curing agent include phenol novolak and cresol novolak, and phenol novolak is preferable. Commercially available products include Mitsubishi Chemical acid anhydrides (grade: YH306, YH307), Hitachi Chemical 3 or 4-methyl-hexahydrophthalic anhydride (product name: HN-5500), Nippon Kayaku amine curing agent (product name). : Kayahard A-A), Meiwa Kasei phenol curing agent (product name: MEH8005), and the like. (B) A component may be individual or may use 2 or more types together.
(C)成分としては、コロイダルシリカ、疎水性シリカ、微細シリカ、ナノシリカ等のシリカ、アクリルビーズ、ガラスビーズ、ウレタンビーズ、ベントナイト、アセチレンブラック、ケッチェンブラック等が挙げられる。また、(C)成分の平均粒径(粒状でない場合は、その平均最大径)は、特に限定されないが、0.01〜50μmであることが、樹脂組成物中に充填剤を均一に分散させるうえで好ましく、また、樹脂組成物をアンダーフィル材として使用した際の注入性に優れる等の理由から好ましい。0.01μm未満だと、樹脂組成物の粘度が上昇して、アンダーフィル材として使用した際に注入性が悪化するおそれがある。50μm超だと、樹脂組成物中に充填剤を均一に分散させることが困難になるおそれがある。また、硬化後の樹脂組成物の熱ストレスから、銅製ワイヤーを保護する観点から、(C)成分の平均粒径は、0.6〜10μmであると、より好ましい。市販品としては、アドマテックス製高純度合成球状シリカ(品名:SO−E5、平均粒径:2μm;品名:SE−2300、平均粒径:0.6μm)、龍森製シリカ(品名:FB7SDX、平均粒径:10μm)、マイクロン製シリカ(品名:TS−10−034P、平均粒径:20μm)等が挙げられる。ここで、充填剤の平均粒径は、動的光散乱式ナノトラック粒度分析計により測定する。(C)成分は、単独でも2種以上を併用してもよい。 Examples of the component (C) include silica such as colloidal silica, hydrophobic silica, fine silica, and nano silica, acrylic beads, glass beads, urethane beads, bentonite, acetylene black, and ketjen black. Moreover, the average particle diameter of the component (C) (if it is not granular, the average maximum diameter) is not particularly limited, but is 0.01 to 50 μm to uniformly disperse the filler in the resin composition. Moreover, it is preferable for reasons such as excellent injectability when the resin composition is used as an underfill material. When it is less than 0.01 μm, the viscosity of the resin composition increases, and the injectability may deteriorate when used as an underfill material. If it exceeds 50 μm, it may be difficult to uniformly disperse the filler in the resin composition. Moreover, from a viewpoint of protecting a copper wire from the heat stress of the cured resin composition, the average particle size of the component (C) is more preferably 0.6 to 10 μm. Commercially available products include high purity synthetic spherical silica manufactured by Admatechs (product name: SO-E5, average particle size: 2 μm; product name: SE-2300, average particle size: 0.6 μm), silica manufactured by Tatsumori (product name: FB7SDX, Average particle size: 10 μm), Micron silica (product name: TS-10-034P, average particle size: 20 μm), and the like. Here, the average particle diameter of the filler is measured by a dynamic light scattering nanotrack particle size analyzer. (C) A component may be individual or may use 2 or more types together.
また、(C)成分は、平均粒径が0.5〜3μmの第1の充填剤と、平均粒径が8〜20μmの第2の充填剤と、を含むと、流動性の観点から、好ましい。また、第1の充填剤は、第1の充填剤と第2の充填剤の合計:100質量部に対して、10〜80質量部であると、流動性の観点から、より好ましい。 In addition, when the component (C) includes a first filler having an average particle diameter of 0.5 to 3 μm and a second filler having an average particle diameter of 8 to 20 μm, from the viewpoint of fluidity, preferable. Moreover, it is more preferable from a fluid viewpoint that a 1st filler is 10-80 mass parts with respect to the sum total: 100 mass parts of a 1st filler and a 2nd filler.
(D)成分は、樹脂組成物の保存時の硬化反応を抑制、具体的には、樹脂組成物を液状で使用する場合の保存時の増粘を抑制し、かつ硬化後の耐マイグレーション性を向上させる。(D)成分は、一般式(1): The component (D) suppresses the curing reaction during storage of the resin composition, specifically, suppresses thickening during storage when the resin composition is used in a liquid state, and improves the migration resistance after curing. Improve. The component (D) is represented by the general formula (1):
(式中、R1、R2およびR3は、それぞれ独立して、水素または炭素数1〜3のアルキル基である)で表されるキサンチン類である場合には、通常、固体である。(D)成分が、一般式(1)で表される場合に、硬化した樹脂組成物の耐マイグレーション性を向上させる理由としては、2個のカルボニル基の酸素と、イミダゾール環中で炭素との二重結合を有する窒素とが、金属銅やCu(OH)等のCuイオンに配位結合するためである、と考えられる。 When X 1 is represented by the formula (wherein R 1 , R 2 and R 3 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms), it is usually a solid. When the component (D) is represented by the general formula (1), the reason for improving the migration resistance of the cured resin composition is that there are two carbonyl group oxygens and carbon in the imidazole ring. It is thought that this is because nitrogen having a double bond is coordinated to Cu ions such as metallic copper and Cu (OH).
一般式(1)で表される(D)成分としては、R1、R2およびR3が、それぞれ独立して、水素または炭素数1のアルキル基であると好ましく、式(4): As the component (D) represented by the general formula (1), R 1 , R 2 and R 3 are preferably each independently hydrogen or an alkyl group having 1 carbon atom, and the formula (4):
のカフェイン、式(5): Caffeine, formula (5):
のテオフィリン、式(6): Theophylline of formula (6):
のテオブロミンおよび式(7): Theobromine and formula (7):
のパラキサンチンからなる群より選択される少なくとも1種であると、より好ましい。 It is more preferable that it is at least one selected from the group consisting of paraxanthines.
(D)成分が、一般式(2): The component (D) is represented by the general formula (2):
(式中、R4、R5、R6およびR7は、それぞれ独立して、水素または炭素数1〜3のアルキル基、好ましくは水素または炭素数1のアルキル基であり、mは1〜5の整数、好ましくは3である)で表される化合物、または一般式(3): (Wherein R 4 , R 5 , R 6 and R 7 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, preferably hydrogen or an alkyl group having 1 carbon atom, A compound represented by an integer of 5, preferably 3, or a general formula (3):
(式中、R8、R9、R10およびR11は、それぞれ独立して、水素または炭素数1〜3のアルキル基、好ましくは水素または炭素数1のアルキル基であり、nは、1〜5の整数、好ましくは3である)で表される化合物である場合には、通常、液体である。(D)成分が、一般式(2)または一般式(3)で表される場合に、硬化した樹脂組成物の耐マイグレーション性を向上させる理由としては、一般式(2)または一般式(3)中のオキサン環(テトラヒドロピラン環)が、金属銅やCu(OH)等のCuイオンに配位結合するためである、と考えられる。なお、オキサン環は、あまり大きな電子供与性を持たないため、例えば、アゾ基やアジ基を含む環状構造を含む化合物とは異なり、樹脂組成物の保存中の硬化反応による増粘を抑制することができる。また、オキサン環と結合する炭化水素(一般式(2)または一般式(3)のカッコ内)は、(D)成分の液体化に寄与している、と考えられる。 (Wherein R 8 , R 9 , R 10 and R 11 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, preferably hydrogen or an alkyl group having 1 carbon atom, and n is 1 In the case of a compound represented by an integer of ˜5, preferably 3, it is usually a liquid. When the component (D) is represented by the general formula (2) or the general formula (3), the reason why the migration resistance of the cured resin composition is improved is the general formula (2) or the general formula (3). It is considered that the oxane ring (tetrahydropyran ring) in () is coordinated to Cu ions such as metallic copper and Cu (OH). In addition, since an oxan ring does not have a large electron donating property, for example, unlike a compound containing a cyclic structure containing an azo group or an azide group, it suppresses thickening due to a curing reaction during storage of the resin composition. Can do. Moreover, it is thought that the hydrocarbon couple | bonded with an oxane ring (in the parenthesis of General formula (2) or General formula (3)) has contributed to liquefaction of (D) component.
さらに、一般式(2)または一般式(3)で表される(D)成分は、液体であるため、(A)成分に所望の量を含有させることができる。詳細に説明すると、一般に、樹脂組成物を製造する場合、(A)成分と(D)成分を混合した後、(B)成分を混合する。ここで、(A)成分に固体の粉体材料を混合する場合には、予め(A)成分と粉体材料を混合してマスターバッチを作製しないと、均一な樹脂組成物を得ることが難しいため、マスターバッチ作製工程が必要になる上に、均一なマスターバッチが得られる(A)成分と粉体材料との比率が限定される。これに対して、(D)成分は、液体であるため、マスターバッチを作製する必要がなく、(A)成分に所望の量を含有させることができる。 Furthermore, since the component (D) represented by the general formula (2) or the general formula (3) is a liquid, the component (A) can contain a desired amount. If it demonstrates in detail, generally when manufacturing a resin composition, after mixing (A) component and (D) component, (B) component is mixed. Here, in the case of mixing a solid powder material with the component (A), it is difficult to obtain a uniform resin composition unless a master batch is prepared by previously mixing the component (A) and the powder material. For this reason, a master batch production step is required, and the ratio of the component (A) and the powder material that can obtain a uniform master batch is limited. On the other hand, since the component (D) is a liquid, it is not necessary to prepare a master batch, and the component (A) can contain a desired amount.
(D)成分は、一般式(2)でmが3であるトコール類、または一般式(3)でnが3であるトコトリエノール類であると、より好ましい。トコール類としては、5,7,8−トリメチルトコール(α−トコフェロール)、5,8−ジメチルトコール(β−トコフェロール)、7,8−ジメチルトコール(γ−トコフェロール)、8−メチルトコール(δ−トコフェロール)が、トコトリエノール類としては、5,7,8−トリメチルトコトリエノール(α−トコトリエノール)、5,8−ジメチルトコトリエノール(β−トコトリエノール)、7,8−ジメチルトコトリエノール(γ−トコトリエノール)、8−メチルトコトリエノール(δ−トコトリエノール)が、樹脂組成物の保存特性や硬化後の樹脂組成物の耐マイグレーション性の観点から好ましい。 The component (D) is more preferably a tocol having m of 3 in the general formula (2) or a tocotrienol having n of 3 in the general formula (3). Tocols include 5,7,8-trimethyltocol (α-tocopherol), 5,8-dimethyltocol (β-tocopherol), 7,8-dimethyltocol (γ-tocopherol), 8-methyltocol (δ- Tocopherols include 5,7,8-trimethyltocotrienol (α-tocotrienol), 5,8-dimethyltocotrienol (β-tocotrienol), 7,8-dimethyltocotrienol (γ-tocotrienol), 8-methyl as tocotrienols. Tocotrienol (δ-tocotrienol) is preferable from the viewpoint of the storage characteristics of the resin composition and the migration resistance of the resin composition after curing.
樹脂組成物は、良好な反応性、信頼性の観点から、(A)成分のエポキシ当量:1に対して、(B)成分の酸無水当量が、好ましくは0.6〜1.2であり、より好ましくは0.65〜1.1である。0.6以上であると、反応性、硬化後の樹脂組成物のPCT試験(Pressure Cooker Test;121℃、2気圧、湿度:100%での耐久性試験)での耐湿信頼性、耐マイグレーション性が良好であり、一方、1.2以下であると、増粘倍率が高くなり過ぎず、ボイドの発生が抑制される。 From the viewpoint of good reactivity and reliability, the resin composition has an acid anhydride equivalent of component (B) preferably 0.6 to 1.2 with respect to epoxy equivalent of component (A): 1. More preferably, it is 0.65-1.1. When it is 0.6 or more, reactivity, moisture resistance reliability and migration resistance in the PCT test (Pressure Cooker Test; durability test at 121 ° C., 2 atm, humidity: 100%) of the cured resin composition On the other hand, when it is 1.2 or less, the thickening factor does not become too high, and the generation of voids is suppressed.
(C)成分は、樹脂組成物:100質量部に対して、好ましくは50〜92質量部、より好ましくは70〜80質量部含有される。50〜92質量部であると、線膨張係数を下げられ、かつ注入性の悪化をさけることができる。 The component (C) is preferably contained in an amount of 50 to 92 parts by mass, more preferably 70 to 80 parts by mass with respect to 100 parts by mass of the resin composition. A linear expansion coefficient can be lowered | hung as it is 50-92 mass parts, and deterioration of injectability can be avoided.
また、(C)成分は、樹脂組成物の硬化物:100質量部に対して、好ましくは50〜92質量部、より好ましくは70〜90質量部含有される。50〜92質量部であると、線膨張係数を下げられ、かつ注入性の悪化をさけることができる。ここで、樹脂組成物は、硬化時の質量減少が約1〜2質量%と少ないため、硬化物中での好ましい(C)成分の含有量は、樹脂組成物中での含有量と同様である。ここで、(C)成分の定量分析は、質量分析法で行う。 Moreover, (C) component is 50-92 mass parts preferably with respect to 100 mass parts of hardened | cured materials of a resin composition, More preferably, 70-90 mass parts is contained. A linear expansion coefficient can be lowered | hung as it is 50-92 mass parts, and deterioration of injectability can be avoided. Here, since the resin composition has a small mass loss of about 1 to 2% by mass when cured, the content of the preferred component (C) in the cured product is the same as the content in the resin composition. is there. Here, the quantitative analysis of the component (C) is performed by mass spectrometry.
(D)成分は、樹脂組成物:100質量部に対して、0.01〜12質量部含むと好ましく、0.05〜10.71質量部含むとより好ましく、0.99〜7.41質量部含むと、さらに好ましい。0.01質量部以上であると、耐リード腐食性が良好であり、12質量部以下であると、樹脂組成物の増粘率の上昇を抑制することができる。(D)成分は、例えば、和光純薬工業から市販されている試薬を使用すればよい。 The component (D) is preferably contained in an amount of 0.01 to 12 parts by mass, more preferably 0.05 to 10.71 parts by mass, and 0.99 to 7.41 parts by mass with respect to 100 parts by mass of the resin composition. It is more preferable to include a part. Lead corrosion resistance is favorable as it is 0.01 mass part or more, and the raise of the viscosity increase rate of a resin composition can be suppressed as it is 12 mass parts or less. As the component (D), for example, a reagent commercially available from Wako Pure Chemical Industries may be used.
また、(D)成分は、樹脂組成物の硬化物:100質量部に対して、0.01〜12質量部含むと好ましく、0.05〜10.71質量部含むと、より好ましく、0.99〜7.41質量部含むと、さらに好ましい。ここで、(D)成分の定量分析は、質量分析法で行う。 Moreover, (D) component is preferable when it contains 0.01-12 mass parts with respect to 100 mass parts of hardened | cured materials of a resin composition, It is more preferable when 0.05-10.71 mass parts is contained, More preferably, 99 to 7.41 parts by mass are included. Here, the quantitative analysis of the component (D) is performed by mass spectrometry.
樹脂組成物は、さらに、(E)成分である硬化促進剤を含有すると、適切な硬化性が得られるので好ましく、硬化促進剤は、エポキシ樹脂の硬化促進剤であれば、特に限定されず、公知のものを使用することができる。例えば、アミン系硬化促進剤、リン系硬化促進剤等が挙げられる。 When the resin composition further contains a curing accelerator as the component (E), an appropriate curability is obtained, and the curing accelerator is not particularly limited as long as the curing accelerator is an epoxy resin curing accelerator, A well-known thing can be used. For example, an amine hardening accelerator, a phosphorus hardening accelerator, etc. are mentioned.
アミン系硬化促進剤としては、2−メチルイミダゾール、2−ウンデシルイミダゾール、2−ヘプタデシルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、2−フェニル−4−メチルイミダゾール等のイミダゾール化合物、2,4−ジアミノ−6−〔2’―メチルイミダゾリル−(1’)〕エチル−s−トリアジン等のトリアジン化合物、1,8−ジアザビシクロ[5,4,0]ウンデセン−7(DBU)、トリエチレンジアミン、ベンジルジメチルアミン、トリエタノールアミン等の第三級アミン化合物が挙げられる。中でも、2,4−ジアミノ−6−〔2’―メチルイミダゾリル−(1’)〕エチル−s−トリアジン、2−フェニル−4−メチルイミダゾールが好ましい。また、リン系硬化促進剤としては、トリフェニルホスフィン、トリブチルホスフィン、トリ(p−メチルフェニル)ホスフィン、トリ(ノニルフェニル)ホスフィン等が挙げられる。(E)成分は、単独でも2種以上を併用してもよい。なお、(B)成分に酸無水物系硬化剤を使用する場合には、硬化性、保存安定性の点から、アミン系硬化促進剤を使用することが好ましい。 Examples of amine-based curing accelerators include imidazoles such as 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, and 2-phenyl-4-methylimidazole. Compounds, triazine compounds such as 2,4-diamino-6- [2′-methylimidazolyl- (1 ′)] ethyl-s-triazine, 1,8-diazabicyclo [5,4,0] undecene-7 (DBU) And tertiary amine compounds such as triethylenediamine, benzyldimethylamine, and triethanolamine. Of these, 2,4-diamino-6- [2'-methylimidazolyl- (1 ')] ethyl-s-triazine and 2-phenyl-4-methylimidazole are preferable. Examples of the phosphorus curing accelerator include triphenylphosphine, tributylphosphine, tri (p-methylphenyl) phosphine, tri (nonylphenyl) phosphine, and the like. (E) A component may be individual or may use 2 or more types together. In addition, when using an acid anhydride type hardening | curing agent for (B) component, it is preferable to use an amine hardening accelerator from the point of sclerosis | hardenability and storage stability.
(E)成分は、エポキシ樹脂等でアダクトされたアダクト型であっても、マイクロカプセル型であってもよい。マイクロカプセル型の市販品としては、旭化成イーマテリアルズ製マイクロカプセル化潜在性硬化剤(製品名:ノバキュアHX3088)等が挙げられる。 The component (E) may be an adduct type adducted with an epoxy resin or the like, or may be a microcapsule type. As a microcapsule type commercial product, a microencapsulated latent curing agent (product name: NovaCure HX3088) manufactured by Asahi Kasei E-Materials can be used.
樹脂組成物は、さらに、(F)成分であるカップリング剤を含有すると、密着性の観点から好ましく、(F)成分としては、3−グリシドキシプロピルトリメトキシシラン、3−アミノプロピルトリメトキシシラン、ビニルトリメトキシシラン、p−スチリルトリメトキシシラン、3−メタクリロキシプロピルメチルトリメトキシシラン、3−アクリロキシプロピルトリメトキシシラン、3−ウレイドプロピルトリエトキシシラン、3−メルカプトプロピルトリメトキシシラン、ビス(トリエトキシシリルプロピル)テトラスルフィド、3−イソシアネートプロピルトリエトキシシラン等が挙げられ、3−グリシドキシプロピルトリメトキシシラン、3−アミノプロピルトリメトキシシランが、密着性の観点から好ましい。市販品としては、信越化学工業製KBM403、KBE903、KBE9103等が挙げられる。(F)成分は、単独でも2種以上を併用してもよい。 When the resin composition further contains a coupling agent as component (F), it is preferable from the viewpoint of adhesion, and as component (F), 3-glycidoxypropyltrimethoxysilane, 3-aminopropyltrimethoxy are preferable. Silane, vinyltrimethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyltrimethoxysilane, 3-acryloxypropyltrimethoxysilane, 3-ureidopropyltriethoxysilane, 3-mercaptopropyltrimethoxysilane, bis (Triethoxysilylpropyl) tetrasulfide, 3-isocyanatopropyltriethoxysilane and the like can be mentioned, and 3-glycidoxypropyltrimethoxysilane and 3-aminopropyltrimethoxysilane are preferable from the viewpoint of adhesion. Examples of commercially available products include KBM403, KBE903, and KBE9103 manufactured by Shin-Etsu Chemical. (F) A component may be individual or may use 2 or more types together.
樹脂組成物は、さらに、(G)成分であるゴム成分を含有すると、樹脂組成物の硬化物の応力緩和の観点から好ましく、(G)成分としては、アクリルゴム、ウレタンゴム、シリコーンゴム、ブタジエンゴムが挙げられる。(G)成分は、固体のものを使用することができる。形態は特に限定されず、例えば粒子状、粉末状、ペレット状のものを使用することができ、粒子状の場合は、例えば平均粒径が10〜750nm、好ましくは30〜500nm、より好ましくは、50〜300nmである。(G)成分は、常温で液状のものも使用することもでき、例えば、平均分子量が比較的低いポリブタジエン、ブタジエン・アクリロニトリルコポリマー、ポリイソプレン、ポリプロピレンオキシド、ポリジオルガノシロキサンが挙げられる。また、(G)成分は、末端にエポキシ基と反応する基を有するものを使用することができ、これらは固体、液状いずれの形態であってもよい。市販品としては、宇部興産製ATBN1300−16、CTBN1008−SP等が挙げられる。(G)成分は、単独でも2種以上を併用してもよい。 When the resin composition further contains a rubber component as component (G), it is preferable from the viewpoint of stress relaxation of the cured product of the resin composition. As component (G), acrylic rubber, urethane rubber, silicone rubber, butadiene Rubber. (G) A solid thing can be used for a component. The form is not particularly limited, and for example, particles, powders, pellets can be used, and in the case of particles, for example, the average particle diameter is 10 to 750 nm, preferably 30 to 500 nm, more preferably, 50-300 nm. The component (G) can also be used at room temperature, and examples thereof include polybutadiene, butadiene / acrylonitrile copolymer, polyisoprene, polypropylene oxide, and polydiorganosiloxane having a relatively low average molecular weight. Moreover, what has a group which reacts with an epoxy group at the terminal can be used for (G) component, These may be a solid or liquid form. Examples of commercially available products include ATBN 1300-16, CTBN1008-SP, etc., manufactured by Ube Industries. (G) A component may be individual or may use 2 or more types together.
樹脂組成物は、さらに、(H)成分であるイオン交換体を含有すると、樹脂組成物中に抽出されるイオン性不純物の量低減の観点から好ましく、イオン交換体としては、無機イオン交換体が、より好ましい。(H)成分としては、東亞合成製無機イオン交換体(品名:IXE−500)が挙げられる。 When the resin composition further contains an ion exchanger which is component (H), it is preferable from the viewpoint of reducing the amount of ionic impurities extracted into the resin composition. As the ion exchanger, an inorganic ion exchanger is used. More preferable. As the component (H), an inorganic ion exchanger (product name: IXE-500) manufactured by Toagosei Co., Ltd. may be mentioned.
(E)成分は、樹脂組成物:100質量部に対して、好ましくは0.1質量部より多く5質量部未満、より好ましくは0.2〜4質量部、さらに好ましくは0.3〜3.0質量部含有される。0.1質量部以上であると、反応性が良好であり、5質量部以下であると、耐湿信頼性が良好あり、更に増粘倍率が安定である。 Component (E) is preferably more than 0.1 parts by mass and less than 5 parts by mass, more preferably 0.2-4 parts by mass, and even more preferably 0.3-3 parts per 100 parts by mass of the resin composition. 0.0 part by mass is contained. When it is 0.1 parts by mass or more, the reactivity is good, and when it is 5 parts by mass or less, the moisture resistance reliability is good, and the thickening ratio is stable.
(F)成分は、樹脂組成物:100質量部に対して、好ましくは0.05〜15質量部、より好ましくは0.1〜10質量部含有される。0.05質量部以上であると、密着性が向上し、PCT試験での耐湿信頼性がより良好になり、15質量部以下であると、樹脂組成物の発泡が抑制される。 The component (F) is preferably contained in an amount of 0.05 to 15 parts by mass, more preferably 0.1 to 10 parts by mass with respect to 100 parts by mass of the resin composition. Adhesiveness improves that it is 0.05 mass part or more, moisture resistance reliability in a PCT test becomes more favorable, and foaming of a resin composition is suppressed as it is 15 mass parts or less.
(G)成分は、樹脂組成物:100質量部に対して、好ましくは0.1〜30質量部、より好ましくは0.5〜25質量部、さらに好ましくは1〜20質量部含有される。0.1質量部以上であると、樹脂組成物の硬化物の応力を緩和し、30質量部以下であると耐湿信頼性が低下しない。 The component (G) is preferably contained in an amount of 0.1 to 30 parts by mass, more preferably 0.5 to 25 parts by mass, and further preferably 1 to 20 parts by mass with respect to 100 parts by mass of the resin composition. When it is 0.1 part by mass or more, the stress of the cured product of the resin composition is relieved, and when it is 30 parts by mass or less, moisture resistance reliability does not decrease.
(H)成分は、樹脂組成物:100質量部に対して、好ましくは0.1〜3.0質量部、より好ましくは0.6〜1.1質量部含有される。3.0質量部以上であると、流動特性が損なわれ、0.1質量部以下であると、イオン性不純物の抽出量を抑制する効果が小さいためである。 The component (H) is preferably contained in an amount of 0.1 to 3.0 parts by mass, more preferably 0.6 to 1.1 parts by mass with respect to 100 parts by mass of the resin composition. This is because if 3.0 parts by mass or more, the flow characteristics are impaired, and if it is 0.1 parts by mass or less, the effect of suppressing the extraction amount of ionic impurities is small.
本発明の樹脂組成物には、本発明の目的を損なわない範囲で、更に必要に応じ、カーボンブラックなどの顔料、染料、消泡剤、酸化防止剤、応力緩和剤、その他の添加剤等を配合することができる。 In the resin composition of the present invention, a pigment such as carbon black, a dye, an antifoaming agent, an antioxidant, a stress relaxation agent, other additives, etc., as necessary, within a range that does not impair the purpose of the present invention. Can be blended.
本発明の樹脂組成物は、例えば、(A)成分〜(D)成分およびその他添加剤等を同時にまたは別々に、必要により加熱処理を加えながら、撹拌、溶融、混合、分散させることにより得ることができる。これらの混合、撹拌、分散等の装置としては、特に限定されるものではないが、撹拌、加熱装置を備えたライカイ機、3本ロールミル、ボールミル、プラネタリーミキサー、ビーズミル等を使用することができる。また、これら装置を適宜組み合わせて使用してもよい。 The resin composition of the present invention is obtained, for example, by stirring, melting, mixing, and dispersing the components (A) to (D) and other additives simultaneously or separately, with heat treatment as necessary. Can do. The mixing, stirring, dispersing and the like devices are not particularly limited, and a raikai machine equipped with a stirring and heating device, a three-roll mill, a ball mill, a planetary mixer, a bead mill and the like can be used. . Moreover, you may use combining these apparatuses suitably.
本発明の樹脂組成物は、温度:25℃での粘度が50〜2000mPa・sであると、注入性の観点から好ましい。ここで、粘度は、東機産業社製E型粘度計(型番:TVE−22H)で測定する。 The viscosity of the resin composition of the present invention at a temperature of 25 ° C. is preferably 50 to 2000 mPa · s from the viewpoint of injectability. Here, the viscosity is measured with an E-type viscometer (model number: TVE-22H) manufactured by Toki Sangyo Co., Ltd.
本発明の樹脂組成物は、ディスペンサー、印刷等で基板の所望の位置に形成・塗布される。ここで、樹脂組成物は、フレキシブル配線基板等の基板と半導体素子との間に、少なくとも一部が基板の配線上に接するように形成する。 The resin composition of the present invention is formed and applied at a desired position on the substrate by a dispenser, printing or the like. Here, the resin composition is formed between a substrate such as a flexible wiring substrate and the semiconductor element so that at least a part thereof is in contact with the wiring of the substrate.
本発明の樹脂組成物の硬化は、80〜300℃が好ましく、また、200秒以内で硬化させると、生産性向上の観点から好ましい。 As for hardening of the resin composition of this invention, 80-300 degreeC is preferable, and when it hardens within 200 second, it is preferable from a viewpoint of productivity improvement.
なお、半導体素子、基板は、所望のものを使用することができるが、銅線ワイヤーによるワイヤーボンディングに適した半導体素子と基板の組合せが好ましい。 In addition, although a semiconductor element and a board | substrate can use a desired thing, the combination of the semiconductor element and board | substrate suitable for the wire bonding by a copper wire is preferable.
このように、本発明の樹脂組成物は、液状半導体封止剤に非常に適しており、この液状半導体封止剤を用いて封止された半導体素子を有する半導体装置は、耐マイグレーション性、および耐リード腐食性に優れ、高信頼性である。 Thus, the resin composition of the present invention is very suitable for a liquid semiconductor encapsulant, and a semiconductor device having a semiconductor element encapsulated with this liquid semiconductor encapsulant has migration resistance, and Excellent lead corrosion resistance and high reliability.
本発明について、実施例により説明するが、本発明はこれらに限定されるものではない。なお、以下の実施例において、部、%はことわりのない限り、質量部、質量%を示す。 The present invention will be described with reference to examples, but the present invention is not limited thereto. In the following examples, parts and% indicate parts by mass and mass% unless otherwise specified.
〔実施例1〜16、比較例1〕
表1〜表3に示す配合で、樹脂組成物を作製した。作製した樹脂組成物は、すべて液状であった。また、〔(B)成分の酸無水、フェノールまたはアミン当量〕/〔(A)成分のエポキシ当量〕は、実施例1〜27、比較例1、2のすべてで0.82にした。
[Examples 1 to 16, Comparative Example 1]
Resin compositions were prepared with the formulations shown in Tables 1 to 3. The prepared resin compositions were all liquid. Further, [acid anhydride of component (B), phenol or amine equivalent] / [epoxy equivalent of component (A)] was set to 0.82 in all of Examples 1 to 27 and Comparative Examples 1 and 2.
〔粘度の評価〕
作製した直後の樹脂組成物の粘度(単位:mPa・s)を、東機産業社製E型粘度計(型番:TVE−22H)を用い、毎分50回転の条件で測定した。表1〜表3に、測定結果を示す。
[Evaluation of viscosity]
The viscosity (unit: mPa · s) of the resin composition immediately after production was measured under the condition of 50 revolutions per minute using an E-type viscometer (model number: TVE-22H) manufactured by Toki Sangyo Co., Ltd. Tables 1 to 3 show the measurement results.
〔ゲルタイムの評価〕
樹脂組成物のゲルタイムは、150℃に熱した熱板上に、樹脂組成物:5±1mgを供給し、攪拌棒によって円を描くようにして攪拌しながら攪拌棒を持ち上げて引き離した場合に、糸引きが5mm以下となるまでの時間を測定することによって得た。ゲルタイムの適正範囲は、10〜100秒である。表1〜表3に、測定結果を示す。
[Evaluation of gel time]
The gel time of the resin composition is when the resin composition: 5 ± 1 mg is supplied on a hot plate heated to 150 ° C., and the stirring bar is lifted and pulled away while stirring in a circle with the stirring bar. It was obtained by measuring the time until the stringing became 5 mm or less. The proper range of gel time is 10 to 100 seconds. Tables 1 to 3 show the measurement results.
〔揺変指数の評価〕
樹脂組成物の揺変指数を、東機産業社製E型粘度計(型番:TVE−22H)を用いて測定した。揺変指数は、毎分5回転の条件で求められた測定値を、毎分50回転の条件で求められた測定値で除した比率、すなわち、(毎分5回転での粘度)/(毎分50回転での粘度)がから求めた。揺変指数の適正範囲は、0.8〜3.0である。表1〜表3に、測定結果を示す。
[Evaluation of tremor index]
The variation index of the resin composition was measured using an E-type viscometer (model number: TVE-22H) manufactured by Toki Sangyo Co., Ltd. The tremor index is a ratio obtained by dividing the measured value obtained under the condition of 5 revolutions per minute by the measured value obtained under the condition of 50 revolutions per minute, that is, (viscosity at 5 revolutions per minute) / (every time. (Viscosity at 50 rpm). An appropriate range of the thymometric index is 0.8 to 3.0. Tables 1 to 3 show the measurement results.
〔熱膨張係数の評価〕
各樹脂組成物を、硬化後の寸法が5mmφ×3mmになるように、150℃で30分間硬化させた。これを、ブルカーASX社製熱機械分析装置(型番:TMA4000SAシリーズ)を用いてTMA法圧縮モードで測定し、熱膨張係数を求めた。熱膨張係数の適正範囲は、3〜20ppm/℃である。
[Evaluation of thermal expansion coefficient]
Each resin composition was cured at 150 ° C. for 30 minutes so that the dimension after curing was 5 mmφ × 3 mm. This was measured in the TMA method compression mode using a thermomechanical analyzer (model number: TMA4000SA series) manufactured by Bruker ASX, and the thermal expansion coefficient was determined. An appropriate range of the thermal expansion coefficient is 3 to 20 ppm / ° C.
〔THB試験(Thermal Humidity Bias 試験)〕
樹脂組成物のマイグレーション特性を評価するために、THB試験を行った。ここで、銅製ワイヤーを使用するパターンでは、ワイヤーピッチが約100μmであったので、加速試験として、ラインピッチが10μmの櫛歯電極を使用した。ポリイミド(東レ・デュポン製カプトン)基板上に形成された櫛歯電極(ライン/スペース=10μm/10μm、SnメッキしたCu電極)上へ、各樹脂組成物を塗布し、硬化(150℃×30分)させ、評価サンプルを作製した(n=3)。評価サンプルを、温度85℃、湿度85%の恒温層へ入れ、櫛歯電極へ60Vの電圧を印加させながら、抵抗値を測定し、109Ω以下になるまでの時間を評価した。なお、THB試験は、500時間までの評価を行った。THB試験は、80時間以上であると好ましく、500時間以上であると、より好ましい。表1〜表3に、測定結果を示す。
[THB test (Thermal Humidity Bias test)]
In order to evaluate the migration characteristics of the resin composition, a THB test was conducted. Here, in the pattern using a copper wire, since the wire pitch was about 100 μm, a comb electrode having a line pitch of 10 μm was used as an acceleration test. Each resin composition was applied onto a comb-like electrode (line / space = 10 μm / 10 μm, Sn-plated Cu electrode) formed on a polyimide (Kapton made by Toray DuPont) substrate and cured (150 ° C. × 30 minutes) To prepare an evaluation sample (n = 3). The evaluation sample was put into a constant temperature layer having a temperature of 85 ° C. and a humidity of 85%, and the resistance value was measured while applying a voltage of 60 V to the comb electrode, and the time until it became 10 9 Ω or less was evaluated. The THB test was evaluated for up to 500 hours. The THB test is preferably 80 hours or longer, and more preferably 500 hours or longer. Tables 1 to 3 show the measurement results.
〔温度サイクル試験〕
温度サイクル試験(―55℃/125℃(30分/30分))を行い、温度サイクル試験後の抵抗値の変化を評価した。温度サイクル試験では、抵抗値の変化がない状態が100回以上であると好ましく、500回以上であると、より好ましい。
[Temperature cycle test]
A temperature cycle test (−55 ° C./125° C. (30 minutes / 30 minutes)) was performed, and the change in resistance value after the temperature cycle test was evaluated. In the temperature cycle test, the state where the resistance value does not change is preferably 100 times or more, and more preferably 500 times or more.
表1〜表3からわかるように、実施例1〜27の全てで、樹脂組成物のゲルタイムが長い、すなわち樹脂組成物の粘度上昇率が低く、揺変指数が適正範囲内であった。また、熱膨張係数が、揺変指数が適正範囲内であるので、温度サイクル試験の結果も良好であった。さらに、THB試験の結果も良好であり、銅のマイグレーションが発生していないことがわかった。これに対して、(D)成分を含有しない比較例1は、THB試験の結果が、50時間未満であり、銅のマイグレーションが発生していた。また、(C)成分を含有しない比較例2は、熱膨張係数が大きく、温度サイクル試験の結果が100回と少なかった。 As can be seen from Tables 1 to 3, in all of Examples 1 to 27, the gel time of the resin composition was long, that is, the rate of increase in the viscosity of the resin composition was low, and the variation index was within an appropriate range. Moreover, since the coefficient of thermal expansion was within the proper range, the results of the temperature cycle test were good. Furthermore, the result of the THB test was also good, and it was found that no copper migration occurred. On the other hand, in Comparative Example 1 containing no component (D), the result of the THB test was less than 50 hours, and copper migration occurred. Moreover, the comparative example 2 which does not contain (C) component had a large thermal expansion coefficient, and the result of the temperature cycle test was as few as 100 times.
上記のように、本発明の樹脂組成物は、樹脂組成物の保存時の増粘を抑制し、かつ硬化後の樹脂組成物の耐マイグレーション性を高くすることができる。 As mentioned above, the resin composition of this invention can suppress the viscosity increase at the time of the preservation | save of a resin composition, and can make the migration resistance of the resin composition after hardening high.
1 基板
2 陽極
3 陰極
10、11 樹脂組成物
20 基板
30 ガラス板
40 ギャップ
DESCRIPTION OF SYMBOLS 1 Substrate 2 Anode 3 Cathode 10, 11 Resin composition 20 Substrate 30 Glass plate 40 Gap
Claims (12)
(B)硬化剤、
(C)充填剤、ならびに
(D)一般式(1):
を含有し、フェノール樹脂を含有しないことを特徴とする、液状樹脂組成物。 (A) epoxy resin,
(B) a curing agent,
(C) filler, and (D) general formula (1):
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