TW201435373A - Circuit pattern inspection apparatus - Google Patents

Abstract

A circuit pattern inspection apparatus is arranged with a plurality of arc extinguishing electrodes adjacent to or close to the two sides of a power supply electrode of the inspection unit. The phase-shifted AC arc extinguishing signal relative to the inspection signal imposed on the conductor patterns of the inspected object is applied to each extinguishing electrode to form an electric field distribution, which is opposite to the direction of the electric field generated by the inspection signal, and the lower portion of the electric field distribution generated by the inspection signal is eliminated to form a sharpened synthesized electric field distribution. Electricity is selectively supplied to the conductor patterns of the inspected object, thereby to carry out correct judgment on the non-defect or defect of the conductor patterns based on the obtained inspection signal.

Description

Circuit pattern inspection device

The present invention relates to a circuit pattern inspection apparatus capable of non-contactly inspecting defects of a conductor pattern formed on a substrate.

In recent years, display devices have been mainly used as liquid crystal display devices using liquid crystals or plasma display devices using plasma. In the manufacturing steps of these display devices, the presence or absence of disconnection and short-circuit defect inspection of the conductor pattern as the circuit wiring formed on the glass substrate is performed.

In the method of inspecting the conductor pattern, for example, in the case where at least two inspection probes are brought close to the conductor pattern, the conductor pattern is moved in a state of being in contact with the conductor pattern without being in contact with the conductor pattern. The inspection probe applies an AC inspection signal, and the other inspection probe detects the AC inspection signal transmitted to the conductor pattern. By detecting the waveform change of the signal, it is checked whether there is a disconnection or a short circuit in the conductor pattern.

The apparatus used for the aforementioned inspection method uses an inspection electrode that is non-contact and capacitively coupled to a conductor pattern. The inspection electrode is opposed to the conductor pattern, and an AC test signal having the same waveform as the sine wave is applied. As a display device to be inspected, in order to realize display of a high-quality image, there has been a strong demand for miniaturization of pixels of a display panel, and the thinning and narrowing of the conductor pattern to be inspected has been carried out and advanced. Spacing.

In the case of using a conventional contact type sensor terminal, it can be utilized The front end is sharpened to cope with the thinning of the pattern. However, in the non-contact sensor in which the AC signal is used as the inspection signal, the application of the potential (voltage) generated by the capacitive coupling of air as an insulator, that is, by an electric field is performed. Therefore, the shape of the electric field distribution formed by the power supply electrode affects the detection signal.

In order to utilize capacitive coupling when the pattern width of the conductor pattern is narrow Obtaining a sufficient detection signal and checking for a larger change in the voltage of the signal is a necessary condition. In general, in the distribution characteristics of an electric field generated by an alternating current signal whose analogy changes in voltage, there is a tendency that the higher the peak value, the higher the overall height is, and the lower end side of the waveform is enlarged, around the peak. The potential is also increased.

The plurality of conductor patterns are narrowly spaced and the distance between the patterns is When the pattern width is narrowed together, when the self-power supply electrode also has an electric field distribution for the conductor pattern adjacent to or close to the non-inspection target of the conductor pattern to be inspected, the conductor patterns are also The check signal is powered.

Sensing electrode and conductor pattern even if inspection signal is detected The conductor patterns that are formed to have the same width and are still in the oblique direction from the non-inspection object are output signals toward the sensing electrodes. Therefore, these signals are included in the signal detected in the conductor pattern of the self-inspection object, thereby affecting the inspection accuracy. Therefore, when the value of the sensed signal obtained by the thinned conductor pattern is increased and the signal value of the inspection signal applied to the power supply electrode is increased, the influence on the inspection accuracy is also increased.

The present invention provides a circuit pattern inspection apparatus which simultaneously applies a phase by arranging a plurality of arc extinguishing electrodes on both sides with an inspection electrode as a center An arc-extinguishing signal whose phase is shifted by the phase of the AC inspection signal, and the lower end portion of the electric field distribution generated by the inspection signal is cut off to form a sharpened electric field distribution and supplied as an inspection signal to the inspection object. Conductor pattern.

Circuit pattern inspection device according to an embodiment of the present invention And a power supply unit, wherein the inspection electrode and the plurality of arc extinguishing electrodes are formed on the same substrate, and the inspection electrode is formed by arranging a plurality of substrates having a plurality of conductor patterns in a row as an inspection object, for one of the electrical conductors The pattern is oppositely coupled and capacitively coupled, and a predetermined alternating current inspection signal is applied, and the plurality of arc extinguishing electrodes are arranged in a continuous manner in a direction intersecting the arrangement direction by the same interval. On both sides of the inspection electrode; an inspection signal supply unit that supplies an AC test signal to the inspection electrode; and an arc suppression signal supply unit that simultaneously supplies the phase to the in-phase and inversion phases simultaneously with respect to the inspection signal An arc extinguishing signal; a sensor portion formed with a sensing electrode, wherein the sensing electrode is disposed opposite to and electrically coupled to a conductor pattern opposite to the inspection electrode, and is detected from the power supply portion The inspection signal applied; the moving portion holding the power supply portion and the sensor portion integrally, and conducting the conductive The pattern is separated by a certain distance and moved in a direction intersecting the arrangement direction of the conductor pattern; and the defect determination unit is configured by combining the first determination and the second determination or using either one. Performing a failure determination, and the first determination unit compares the detection signal acquired by the sensor unit in a time series with a predetermined determination reference value to determine whether or not there is a defect, and the second determination system When the timing change of the detection signal value exceeds a predetermined range in the set period for the detection signal obtained by the above-described timing, the conductor pattern to which the detection signal exceeding the range is sent is judged to be defective; The power supply unit that is moving by the moving portion is sequentially The conductor pattern simultaneously applies the inspection signal and the plurality of arc suppression signals, and forms an electric field distribution formed by the arc suppression signal in a reverse manner with respect to the electric field distribution generated by the inspection signal. The lower end portion of the electric field distribution generated by the inspection signal is removed, and the inspection signal is supplied by touching the peak portion of the sharpened composite electric field distribution to the conductor pattern of the inspection object.

1‧‧‧Circuit pattern inspection device

2‧‧‧Power Supply Department

3‧‧‧Sensor Department

4‧‧‧Mobile agencies

5‧‧‧Drive Control Department

6‧‧‧Detection Signal Processing Department

7‧‧‧Defect Determination Department

8‧‧‧Central Processing Department (CPU)

9‧‧‧Control Department

10‧‧‧Display Department

11‧‧‧ Input Department

21‧‧‧Power supply substrate

22‧‧‧Check signal supply department

23‧‧‧Check electrodes

24, 24a, 24b, 24c, 24d‧‧‧ arc-extinguishing electrodes

25‧‧‧Arc Suppression Signal Supply Department

26‧‧‧Sensor substrate

27‧‧‧Sensing electrode

31, 31a~31d‧‧‧ voltage adjustment circuit

32, 32a~32d‧‧‧ phase shift circuit

Ch1‧‧‧Check signal

Ch2, ch3‧‧‧ arc suppression signal

100‧‧‧Substrate

101‧‧‧Electrical pattern

L‧‧‧electrode spacing

m‧‧‧Orientation

Fig. 1 is a schematic block diagram showing a circuit pattern inspection device according to an embodiment of the present invention.

Fig. 2 is a view showing a configuration of a power supply unit and a power supply unit;

Fig. 3 is a view showing the characteristics of the electric field distribution ch1 generated by the inspection signal output from the inspection electrode.

Fig. 4 is a graph showing the characteristics of the electric field distribution ch2 generated by the arc extinguishing signal outputted from the arc extinguishing electrode.

Fig. 5 is a graph showing the characteristics of the electric field distribution ch3 generated by the arc extinguishing signal outputted from the arc extinguishing electrode.

Fig. 6 is a view showing characteristics of an electric field distribution (ch2+ch3) obtained by synthesizing an electric field distribution generated by an arc extinguishing signal outputted from a self-extinguishing electrode.

Fig. 7 is a view showing the characteristics of the electric field distribution A1 generated by the inspection signal and the crowbar signal.

Fig. 8 is a view for comparing the waveform shape of the electric field distribution A1 generated by the inspection signal and the electric field distribution ch1 generated by the inspection electrode.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

The circuit pattern inspection device of the present invention is a manufacturing step of the display device In the step, for example, the defects of the disconnection and the short circuit which are causes of defects in the plurality of rows of the conductor patterns (wiring patterns) formed on the glass substrate are detected. The conductor pattern to be inspected is, for example, a wiring formed on a liquid crystal display panel or a touch panel, and is usually a conductor pattern which is arranged in parallel in a plurality of rows and electrically separated, or which is connected by a shorting bar. A tooth-like conductor pattern on one end side of the body pattern. Further, each of the conductor patterns formed on the substrate can be inspected even if it is not arranged in parallel or at equal intervals as long as the position of the pattern can be determined.

Also, when the power supply portion to which the inspection signal is applied is moved, the same conductor In the pattern, as long as it is a pattern in which the inspection electrode and the sensing electrode can face each other, even if there is a change in curvature or width in the middle of the conductor pattern, the inspection can be performed equally. In the following description, for convenience of understanding, a conductor pattern formed in a straight line shape at regular intervals will be described as an inspection target. In addition, in the following description, "arc elimination" refers to the removal of the waveform of the AC signal to cause the signal value to disappear or decrease, that is, to partially erase the signal value from the waveform.

1 is a circuit pattern inspection device showing an embodiment of the present invention; A schematic diagram of one of the constituent examples. FIG. 2 is a view showing a configuration example of a power supply unit and a power supply unit.

The circuit pattern inspection device 1 of the present embodiment is formed in a glass A device for detecting disconnection and short-circuit of the plurality of rows of the conductor patterns 101 on the insulating substrate 100 such as a substrate.

As shown in FIG. 1, the power supply unit 2 includes a predetermined distance interval. An inspection signal is applied over the conductor pattern 101; the sensor portion 3 is equally separated above the conductor pattern 101, and the inspection signal applied to the conductor pattern 101 is advanced. Row detection; the moving mechanism 4 maintains the separated (non-contact) state of the power supply portion 2 and the sensor portion 3, and moves integrally with the alignment direction m of the intersection to move over the same conductor pattern 101; the drive control portion 5. The drive control moving mechanism 4; the inspection signal supply unit 22 supplies an inspection signal ch1 including an alternating current to the power supply unit 2, and an arc extinguishing signal supply unit 25 that supplies an arc extinguishing signal ch2 of an alternating current to be described later to the power supply unit 2. Ch3; the detection signal processing unit 6 performs signal processing to be described later on the detection signal detected by the sensor unit 3; the control unit 9 controls the entire device; and the display unit 10 displays inspection information including the inspection result; And the input unit 11 includes a keyboard, a touch panel, and the like for inputting an operation instruction, various materials, and the like.

Sensing of the power supply substrate 21 and the sensor portion 3 described later in the power supply unit 2 The substrate 26 is integrally coupled by, for example, a horizontal joint type robot and simultaneously moved. In Fig. 1, an example of being disposed at both ends of a conductor pattern is shown. Of course, the position of the arrangement is not limited to the both ends, and either or both of them may be disposed on the center side of the conductor pattern. That is, if the conductor pattern and the power supply electrode and the sensing electrode are opposed to each other, they may be separated on the substrate to be inspected (for example, both ends of the conductor pattern), and conversely, may be disposed close to the conductor pattern. position. This is because the sensor unit 3 detects the detection signal by capacitive coupling, and if the capacitance in the conductor pattern changes due to the disconnection, it becomes different from the normal pattern, and thus a change in the peak value of the detection signal occurs. Thereby, a bad judgment can be made.

The sensing electrode 27 of the sensor unit 3 of the present embodiment has a comparable The width of the width of the conductor pattern to be inspected is determined according to the design of the detected detection signal, and is appropriately set. Moreover, since the detection of the short-circuit defect of the conductor pattern opposite to the sensing electrode 27 is difficult, the second sensing electrode for detecting the opposite portion may be in the same conductor pattern. The above method is additionally set.

Although not shown, the detection signal processing unit 6 includes an amplification unit that will be The micro analog detection signal detected by the sensor unit 3 is amplified to a predetermined voltage level (a level at which good or bad can be determined); and a band pass filter unit that removes the noise component of the amplified detection signal and causes The signal of the necessary band zone passes; the rectifying section performs full-wave rectification on the filtered detection signal; and a smoothing section or the like, which smoothes the detected signal of the full-wave rectification.

The control unit 9 includes a defect determination unit 7 based on signal processing The characteristic signal (change in signal level or signal waveform) included in the detection signal is determined to determine whether or not the conductor pattern is defective; and the central processing unit (CPU) 8 performs arithmetic processing based on the setting conditions of the user and the inspection program. This control unit 9 can also utilize a general-purpose personal computer.

The determination by the defect determination unit 7 determines the plural number The process is carried out in the form of monomers or combinations thereof. For example, as a defect determination using a threshold, first sampling (preparatory inspection) is performed to obtain a signal level of a good product and a signal level of a defective product, and based on the signal levels, a signal bit exceeding the defective product is set. The threshold value of the quasi-standard level is used as the benchmark for good products. Using this determination criterion, the conductor pattern that has been sent out of the detection signal exceeding the determination criterion is judged to be defective for the detection signal detected in accordance with the timing. This criterion can also be sampled again and the threshold value can be updated if the number of inspection processes or the inspection execution time is arbitrarily set.

In addition, as another determination method, the time is dependent on the sensor unit 3 The detection signal obtained in sequence is compared with the detection result detected by the immediately preceding conductor pattern (normal) and the currently detected inspection signal during a predetermined period (sampling time). Electricity exceeding the preset difference (setting range) In the case of a pressure difference, the conductor pattern to be inspected at this time is judged to be defective.

Next, the power supply unit 2 will be described in detail.

As shown in FIGS. 1 and 2, the power supply unit 2 includes a power supply substrate 21, An inspection electrode 23 and a plurality of arc extinguishing electrodes 24 are provided; an inspection signal supply unit 22 that applies an alternating current inspection signal to the inspection electrode 23; and an arc suppression signal supply unit 25 that applies the same phase to the arc suppression electrode 24 and The arc-extinguishing signal of the phase shifted AC.

The inspection electrode 23 disposed on the power supply substrate 21 covers an electric conductor The pattern has a width that does not involve adjacent conductor patterns. Here, in the arrangement direction m of the inspection electrodes 23, a plurality of arc extinguishing electrodes 24a, 24b, 24c, and 24d are disposed at equal intervals on the both sides with the electrode pitch L, that is, the separation distance. This electrode pitch L is suitably designed by the frequency of the inspection signal set in accordance with the conductor pattern design specifications of the inspection object. Although it is to be described later, in order to sharpen the waveform of the inspection signal evenly, it is necessary to arrange the inspection electrode 23 in the center of the plurality of arc suppression electrodes arranged, and to arrange the arc extinguishing electrodes equally on both sides.

In addition, FIG. 2 is shown on both sides of the inspection electrode 23, respectively. An example of the arc extinguishing electrode is not particularly limited as long as a total of two or more arc extinguishing electrodes are disposed. However, if a large number of arc extinguishing signals are applied to at least the pattern other than the conductor pattern of the inspection object, the detection signal of the sensing electrode may have an influence rather than the most appropriate, and thus it is necessary to obtain the effect described later. It is suitably designed within the scope. Further, in FIG. 2, the arc extinguishing electrodes 24a to 24d are shorter than the length of the inspection electrode 23, but only the voltage value of the applied arc extinguishing signal is lower than the voltage value of the detection signal, or the inspection electrode is to be easily distinguished. 23 is shorter and there are no special restrictions.

The self-checking signal supply unit 22 is set at the inspection electrode 23, for example. The frequency is applied with an inspection signal containing an alternating current signal having a sine wave of the desired peak-to-peak value No. ch1. Further, the inspection signal ch1 is not limited to a sine wave, and a triangular wave may be used. In the following description, in order to distinguish the electric field distribution generated by each signal, the reference symbols (ch1, ch2, and ch3) of the signal are combined after the electric field distribution. For example, as the inspection signal ch1 and the electric field distribution (ch1) (shown as ch1 on the drawing), ch1 of the same reference symbol is used as a common flag.

The arc extinguishing signal supply unit 25 is configured to be applied to each of the arc extinguishing electrodes 24a to 24d. Voltage adjustment circuits 31a to 31d and phase shift circuits 32a to 32d are provided, respectively. The voltage adjustment circuit 31 outputs an arc extinguishing signal ch2, ch3 that lowers the signal value (voltage value) to about 1/2 to 1/3 with respect to the inspection signal ch1 output from the inspection signal supply unit 22. Since this voltage adjustment differs depending on the inspection signal ch1, it is adjusted at the time of inspection preparation. Further, the adjustment value may be stored in advance in the memory (not shown) of the control unit 9 as the set value of the inspection condition, and the inspection unit 1 may appropriately select the indicator value based on the set value of the inspection signal ch1 to quickly start the inspection. .

Further, the phase shift circuit 32 of the present embodiment is assumed to be used. A circuit such as a general operational amplifier uses an inspection signal as a reference (0 rad) to generate an arc-extinguishing signal whose phase is shifted by π rad (180 degrees) by the arc-extinguishing electrodes 24a to 24d. In the present embodiment, the configuration of the voltage adjustment circuit 31 and the phase shift circuit 32 is provided for each of the arc extinguishing electrodes 24a to 24d. However, the inspection signal ch1 may be used as the phase 0 rad, and the crowbar signal ch2 may be used as the phase 0. The rad is shifted by the phase π rad in the crowbar signal ch3, so that the common voltage adjustment circuit 31 and the phase shift circuit 32 are used for each of the crowbar signals ch to simplify the configuration.

In this embodiment, the power supply electrode is separated from the wiring of the conductor pattern. Opening the distance and capacitively coupling the supply of the AC test signal, so the check signal is not supplied as a direct current, but as a potential (voltage) generated by the electric field. The electric field distribution formed by the supply electrode thus affects the detection signal. As described in the subject, it is preferable to apply an inspection signal to the conductor pattern to be inspected in order to sharpen the electric field distribution.

FIG. 3 is a view showing an inspection signal ch1 outputted from the inspection electrode 23. A graph showing the characteristics of the electric field distribution (ch1). Fig. 4 is a graph showing the characteristics of the electric field distribution (ch2) generated by the crowbar signal ch2 outputted from the arc extinguishing electrodes 24b, 24c. Fig. 5 is a view showing the characteristics of the electric field distribution (ch3) generated by the crowbar signal ch3 outputted from the arc extinguishing electrodes 24a, 24d. Fig. 6 is a view showing the characteristics of the electric field distribution (ch2+ch3) generated by the combined signals of the arc extinguishing signals (ch2) and (ch3) outputted from the arc extinguishing electrodes 24a to 24d. Fig. 7 is a view showing the characteristics of the combined electric field distribution (A1) of the inspection signal ch1 and the crowbar signals ch2 and ch3. Fig. 8 is a view for comparing the waveform shapes of the electric field distribution ch1 and the combined electric field distribution (A1).

In each figure, in order to facilitate understanding of the intersection of the inspection signal and the arc suppression signal The stream signal is a signal of a sequential continuous waveform and is displayed as an electric field distribution of the electric field intensity (potential V) generated by one waveform at a certain time. Further, the reference position at which the distance 0 is opposite to the inspection electrode actually corresponds to the position of the conductor pattern to be inspected, and the distance is displayed in the direction of the surface of the inspection substrate, that is, the distance separating the horizontal direction of the pattern. .

Moreover, since the arc extinguishing signal ch3 shown in FIG. 5 and FIG. 6 are as shown in FIG. Since the arc suppression signal ch2+ch3 is in the opposite phase (π rad), the direction of the electric field is opposite to the inspection signal ch1 and the crowbar signal ch2, and when the inspection signal ch1 is in the positive direction, it becomes the horizontal direction in the figure. The negative direction of the axis reversal.

As shown in FIG. 3, the self-checking electrode 23 is output toward the conductor pattern. The waveform of the electric field distribution (ch1) generated by the inspection signal ch1 is used as a reference. In addition, the map 4 shows the waveform of the electric field distribution (ch2) output from the arc extinguishing electrode (first arc extinction electrode) 24b, 24c to which the arc extinguishing signal ch2 having the same phase is applied, to the inspection signal ch1. Further, Fig. 5 shows an arc-extinguishing electrode (second arc-extinguishing electrode) 24a, 24d which is applied to the arc-extinguishing signal ch2, which has a phase shifted by π rad (which is also shifted by π rad for the check signal ch1), to the arc-extinguishing signal ch2. The waveform of the electric field distribution (ch3). Further, the voltage values of the check signal ch1 and the crowbar signals ch2 and ch3 are designed to be appropriately set by the frequency of the alternating current or the like.

Here, referring to FIG. 6, the arc suppression signal (first extinction signal) ch2 and The composite signal of the arc suppression signal (second extinction signal) ch3 will be described. As described above, the crowbar signal ch2 and the crowbar signal ch3 have a phase difference of π rad, that is, since they are opposite to each other, they become opposite electric field strengths (potentials), so that the mutual electric field distribution is offset. From these differences, the characteristic of the combined electric field distribution (ch2+ch3) having two similar peaks is obtained centering on the distance 0 as shown in FIG.

In the synthetic electric field distribution (ch2+ch3), the crowbar signal ch3 is generated. The electric field strength is stronger than the arc suppression signal ch2, and thus becomes a negative electric field distribution. Further, at this time, if the electric field distribution (ch1) generated by the simultaneously applied inspection signal is added, as shown in FIG. 7, the lower end portion of the waveform of the electric field distribution (ch1) can be removed by the electric field distribution (ch2+ch3). And form a synthetic electric field distribution (A1) with a sharpened peak.

Figure 8 shows the electric field distribution (ch1) generated by the inspection signal ch1 and the same The combined electric field distribution (A1) generated when the inspection signal ch1 and the crowbar signal ch2+ch3 are applied. By comparing the characteristics of the electric field distributions, it is known that by narrowing the half-value width of the waveform by 50% or more, the peak value is not reduced and sharpened by about 1/3 according to the waveform itself, and the electric field intensity is obtained. The peak portion is in contact with the conductor pattern of the object to be inspected.

The point is that the above-mentioned power supply unit that is moving by the moving part is sequentially The conductor pattern applies an inspection signal. Simultaneously with the application, a first arc-extinguishing signal having the same phase as the inspection signal is applied to the first arc-extinguishing electrode adjacent to both outer sides of the inspection electrode, and a second arc adjacent to the outer side of the first arc-extinguishing electrode is applied The arc extinguishing electrode respectively applies a second arc extinguishing signal which is opposite to the check signal. The inspection signal is supplied by bringing the peak portion into contact with the conductor pattern of the inspection object. Moreover, the first arc-extinguishing signal is a signal whose voltage value is lower than the check signal and is in phase, and the second arc-extinguishing signal is a signal whose voltage value is lower than the check signal and whose voltage value is higher than the opposite phase of the first arc-extinguishing signal.

And, the electric field distribution (ch2) generated by the first arc extinguishing signal And synthesizing by the electric field distribution (ch3) generated by the second arc-extinguishing signal to form a combined electric field distribution (ch2+ch3 of FIG. 6). The combined electric field distribution and the electric field distribution (ch1) generated by the inspection signal form an electric field distribution in the direction of the electric field in the opposite direction. Since each signal is applied to the inspection electrode and the first and second arc-extinguishing electrodes at the same time, the electric field distribution (ch1) and the electric field distribution (ch2+ch3) are combined. At the time of this synthesis, the lower end portion of the electric field distribution (ch1) generated by the inspection signal is cut off, thereby generating a composite electric field distribution (A1) for inspection of the peak portion sharpening.

As described above, the circuit pattern inspection device of the present embodiment is The power supply substrate 21 of the power supply unit 2 that supplies the inspection signal to the conductor pattern of the inspection object has a configuration in which a plurality of arc suppression electrodes 24 are disposed at equal intervals on both sides of the inspection electrode 23 in the direction across the pattern arrangement direction. And a plurality of arc suppression signals whose phases are displaced in the same phase and in opposite phase are simultaneously applied with respect to the inspection signal of the communication of the power supply. By simultaneously applying, the electric field distribution generated by the inspection signal is formed, and the electric field distribution formed by the reverse arcing signal is formed, and the lower end portion of the electric field distribution generated by the inspection signal is cut off to form a sharpened synthetic electric field distribution, and By making this peak portion contact the conductor pattern of the inspection object and supplying the inspection signal in a concentrated manner, it is possible to The occurrence of a situation in which the signal is supplied with power is suppressed by suppressing the conductor pattern of the adjacent non-inspection object.

Therefore, according to the circuit pattern inspection device of the present embodiment, even When the inspection target portion of the conductor pattern of the inspection object is thinned and narrowed, the inspection of each pattern as the inspection object can be performed non-contact and appropriately. Therefore, it is most suitable for determining whether or not the wiring pattern of the glass substrate for display having high resolution and the wiring pattern on the circuit board are required to be finer and integrated. In particular, since the inspection is carried out in a non-contact manner, damage to the conductor pattern is not caused at all, and since it is exposed to an electric field stronger than usual in the inspection, it may also be a defect in the future. Endurance test of wiring patterns including elements (breaking, peeling, etc.).

According to an embodiment of the present invention, a circuit pattern inspection device can be provided By setting a power supply portion centered on the inspection electrode and arranging a plurality of arc suppression electrodes on both sides, simultaneously applying an arc-extinguishing signal phase-shifted with respect to the phase of the AC detection signal, and by checking The lower end portion of the electric field distribution generated by the signal is cut off to form a sharpened electric field distribution, and is supplied as an inspection signal to the electric conductor pattern of the inspection object.

Ch2, Ch3‧‧‧ arc suppression signal

Claims (4)

A circuit pattern inspection device, comprising: a power supply portion, wherein an inspection electrode and a plurality of arc extinguishing electrodes are formed on a same substrate, and the inspection electrode is a substrate in which a plurality of conductor patterns are arranged in a row manner As an inspection object, one of the conductor patterns is opposed to the upper side and capacitively coupled, and a predetermined alternating current inspection signal is applied, and the plurality of arc extinguishing electrodes are arranged in a direction intersecting the arrangement direction. The same interval is provided on both sides of the inspection electrode in a continuous manner; the signal supply portion is supplied to supply an AC test signal to the inspection electrode; and the arc suppression signal supply portion is simultaneously biased with respect to the inspection signal. Moving to a plurality of arc suppression signals in phase and inversion; the sensor portion is formed with a sensing electrode, and the sensing electrode is oppositely disposed above the conductor pattern opposite to the inspection electrode Capacitively coupled to detect the inspection signal applied from the power supply unit; and a moving unit that connects the power supply unit and the sensor unit And being held in an integrated manner, and separated at a certain distance above the conductor pattern, and moved in a direction intersecting the arrangement direction of the conductor pattern; and the defect determining unit uses the first determination and the first The second determination is combined or used to perform a bad determination, and the first determination compares the detection signal obtained by the sensor unit in a time series with a predetermined determination reference value. Determining whether there is a defect, and the second determination is for the detection signal obtained by the above-mentioned timing, when the timing change of the detection signal value exceeds the predetermined range within the set period, the detection signal exceeding the range The conductor pattern sent out is badly judged; The electric power supply unit that is moved by the moving unit sequentially applies the inspection signal and the plurality of crowbar signals to the conductor pattern in sequence, and forms an electric field distribution generated by the inspection signal. The arc extinguishing signal is formed by an electric field formed in an opposite manner, and the lower end portion of the electric field distribution generated by the above-mentioned inspection signal is removed, and the peak portion of the sharpened synthetic electric field distribution is touched by the inspection object. The electric conductor pattern is used to supply the above-mentioned inspection signal. The circuit pattern inspection device according to the first aspect of the invention, wherein the inspection electrode of the power supply unit and the plurality of arc suppression electrodes are provided with at least two first and second arc extinguishing electrodes, and the first And the second arc-extinguishing electrode is located at the center of the arrangement of the plurality of arc-extinguishing electrodes, and is spaced apart at equal intervals by extending to both sides. The circuit pattern inspection device of claim 2, wherein a first arc extinguishing signal having a lower voltage value and a same phase as the inspection signal is applied to the first arc extinguishing electrode adjacent to the inspection electrode, and And applying, to the second arc extinguishing electrode adjacent to the first arc extinguishing electrode, a second arc extinguishing signal having a voltage value lower than the check signal and higher than the first arc extinguishing electrode voltage value and opposite phase, When the electric field distribution generated by the inspection signal is formed, the first crowbar signal and the second crowbar signal form an electric field direction opposite to the direction of the electric field generated by the inspection signal. The electric field is distributed, and the lower end portion of the electric field distribution generated by the above-mentioned inspection signal is removed to form a sharpened composite electric field distribution. A circuit pattern inspection device, comprising: The power supply unit has one inspection electrode and a plurality of arc extinguishing electrodes disposed on both sides of the inspection electrode; the inspection signal supply unit supplies an AC detection signal to the inspection electrode, and forms the inspection signal by the inspection signal a first electric field distribution is generated; an arc extinguishing signal supply unit simultaneously supplies a plurality of arc extinguishing signals whose phases are shifted to the same phase and the opposite phase with respect to the inspection signal; and a sensor portion formed with the power supply from the power supply a sensing electrode that is detected by the portion of the inspection signal that is detected in a non-contact manner; and has an inspection portion that applies the first arc-extinguishing electrode adjacent to the inspection electrode simultaneously with the application of the inspection signal Detecting that the signal is in the same phase as the first arc extinguishing signal, and applying a second arc extinguishing signal opposite to the detecting signal to the second arc extinguishing electrode adjacent to the first arc extinguishing electrode, forming the above The first electric field distribution electric field direction is opposite to the opposite direction, and the second electric field distribution synthesized by the first crowbar signal and the second crowbar signal is The lower end portion of the first electric field distribution generated by the inspection signal is removed, and the inspection signal of the sharpened synthetic electric field distribution is supplied in a non-contact manner to a circuit pattern of an arbitrary inspection object which is separated from the power supply portion. .