TW201434568A - Method for cutting plate glass - Google Patents

Method for cutting plate glass Download PDF

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Publication number
TW201434568A
TW201434568A TW102148322A TW102148322A TW201434568A TW 201434568 A TW201434568 A TW 201434568A TW 102148322 A TW102148322 A TW 102148322A TW 102148322 A TW102148322 A TW 102148322A TW 201434568 A TW201434568 A TW 201434568A
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Taiwan
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cutting
sheet glass
laser
cut
glass
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TW102148322A
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Chinese (zh)
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Takahide Fujii
Naotoshi INAYAMA
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Nippon Electric Glass Co
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Publication of TW201434568A publication Critical patent/TW201434568A/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/0235Ribbons
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/08Severing cooled glass by fusing, i.e. by melting through the glass
    • C03B33/082Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/09Severing cooled glass by thermal shock
    • C03B33/091Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thermal Sciences (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention includes a fusion cutting process, which cuts a plate glass G in the vicinity of a cutting schedule line X of the plate glass G by laser fusion cutting in parallel with the cutting schedule line X, and forms a tensile stress area W in a position along said cutting schedule line X; and an initial crack forming process, which forms an initial crack C at a point of intersection of the cutting schedule line X and an end part Gs of the plate glass G. Before the fusion cutting process, a processing process is executed to the end part Gs of the plate glass G including the cutting schedule line X, which prevents naturally occurring cutting accompanying tensile stress of laser fusion cutting.

Description

板玻璃的切斷方法 Cutting method of plate glass

本發明是有關於一種以板玻璃作為切斷的對象的雷射熔斷(laser fusion cutting)的改良技術。 The present invention relates to an improved technique for laser fusion cutting using sheet glass as a target for cutting.

眾所周知,在使用於液晶顯示器、電漿顯示器、電致發光(electroluminescence,EL)顯示器、有機EL(有機電致發光)顯示器等的平板顯示器(flat panel displayer,FPD)或太陽電池、其它的電子裝置等的板玻璃製品的製造步驟中,由大面積的板玻璃(mother glass)切割出小面積的板玻璃,或是沿著板玻璃的邊修剪緣部。 As is well known, flat panel display (FPD) or solar cells, other electronic devices used in liquid crystal displays, plasma displays, electroluminescence (EL) displays, organic EL (organic electroluminescence) displays, and the like. In the manufacturing step of the plate glass product, a small area of the plate glass is cut by a large area of the mother glass, or the edge is trimmed along the side of the plate glass.

作為一個為了如此切斷板玻璃的手法,雷射熔斷已為公眾所知。此雷射熔斷是如下的方法:沿著在作為切斷的對象的被加工物的面所延伸的切斷預定線而照射雷射,同時藉由去除因雷射的加熱而熔融的部位來熔斷(切斷)被加工物。 As a means of cutting the sheet glass in this way, laser fusing has been known to the public. This laser fusing is a method of irradiating a laser along a line to cut extending on a surface of a workpiece to be cut, and fusing by removing a portion melted by heating of the laser. (cutting) the workpiece.

可是,此雷射熔斷有如以下的困難點。也就是,在熔斷的進行中,受到雷射照射的部位因該雷射的加熱而熱膨脹,其周邊部位被擴張而壓縮。起因於此作用,在熔斷後的被加工物的端部會處於扭曲殘留的狀態下。 However, this laser blow has the following difficulties. That is, in the progress of the fuse, the portion irradiated with the laser thermally expands due to the heating of the laser, and the peripheral portion thereof is expanded and compressed. Due to this action, the end portion of the workpiece after the fuse is in a state of being twisted and remaining.

由於,在將此雷射熔斷應用於板玻璃的切斷的情況下,殘留的扭曲誘發板玻璃的裂痕等,從對最終所製造的板玻璃製品的品質造成壞影響的觀點來看,產生對於熔斷後的板玻璃一片一片地實施扭曲的去除的必要。因此,有熔斷後的板玻璃製品的製造效率惡化的問題。 In the case where the laser blow is applied to the cutting of the sheet glass, the residual twist-induced cracking of the sheet glass or the like is generated from the viewpoint of adversely affecting the quality of the finally produced sheet glass product. It is necessary to perform the twist removal one by one after the blown plate glass. Therefore, there is a problem that the manufacturing efficiency of the plate glass product after the melting is deteriorated.

於是,作為能夠消除這樣的雷射熔斷的問題點的技術,而提案了如專利文獻1所揭示的方法。具體來說,在同一文獻中揭示了如圖7所示的方法:在板玻璃G的切斷預定線X附近與前述切斷預定線X平行地雷射熔斷前述板玻璃G,在沿著該切斷預定線X的位置,依序形成被施加拉伸應力(tensile stress)的拉伸應力區域W,同時伴隨著該拉伸應力區域W的形成,自含有雷射熔斷的開始位置的板玻璃G的端部Gs,藉由沿著切斷預定線X而自然地使切斷部CU發展,而使藉由熔斷而形成於板玻璃G的端部Ga(以下稱為熔斷端部Ga)依序地自前述板玻璃G分離。 Then, as a technique capable of eliminating such a problem of laser fusing, a method disclosed in Patent Document 1 has been proposed. Specifically, in the same document, a method as shown in FIG. 7 is disclosed in which a laser beam is blown in parallel with the predetermined line X in the vicinity of the line to cut X of the sheet glass G, along which the sheet glass G is cut. The position of the predetermined line X is broken, and a tensile stress region W to which tensile stress is applied is sequentially formed, accompanied by the formation of the tensile stress region W, from the sheet glass G containing the start position of the laser fusing. The end portion Gs naturally develops the cut portion CU along the line to cut X, and the end portion Ga (hereinafter referred to as the fuse end portion Ga) formed by the fuse on the sheet glass G is sequentially The ground is separated from the aforementioned sheet glass G.

先行技術文獻 Advanced technical literature 專利文獻 Patent literature

專利文獻1:特表2012-526721號公報 Patent Document 1: Special Table 2012-526721

依據專利文獻1所揭示的方法,伴隨著切斷部CU的發展(熔斷端部Ga由板玻璃G分離),由於所施加的拉伸應力被釋放(拉伸應力區域W消失),而能以良好的效率去除前述殘留於板玻璃G 的扭曲。此結果,對於熔斷後的板玻璃G,作為除去扭曲的目的而言,能夠省去執行再次退火(徐冷,annealing)等的麻煩,並可以合適地消除前述的製造效率的問題。 According to the method disclosed in Patent Document 1, with the development of the cut portion CU (the fuse end Ga is separated by the sheet glass G), since the applied tensile stress is released (the tensile stress region W disappears), Good efficiency to remove the aforementioned residue in the sheet glass G Distorted. As a result, it is possible to eliminate the trouble of performing re-annealing or the like for the purpose of removing the distortion of the sheet glass G after the melting, and it is possible to appropriately eliminate the above-described problem of manufacturing efficiency.

然而,即使依據同一文獻所揭示的方法,到目前為止依然存在著尚待解決的問題。也就是,在沿著切斷預定線X的位置形成的拉伸應力區域W,自與該切斷預定線X平行進行的雷射熔斷的開始位置側朝向結束位置側,以與熔融玻璃部(指藉由雷射加熱而使玻璃熔融的部位)M平行進行的方式依序形成。而且,切斷部CU是以追隨此拉伸應力區域W的方式而發展。 However, even with the methods disclosed in the same document, there are still problems to be solved so far. In other words, the tensile stress region W formed at a position along the line to cut X is from the start position side of the laser fusing parallel to the line to cut X toward the end position side, and the molten glass portion ( It means that the portion where the glass is melted by laser heating is sequentially formed in parallel. Further, the cutting portion CU is developed to follow the tensile stress region W.

此時,由於熔融玻璃部M與切斷部CU為在附近的位置關係,有時候會有藉由切斷部CU的發展而分離的熔斷端部Ga及其碎片K橫跨了熔融玻璃部M而遮住了對板玻璃G的雷射的照射的情況。若發生如此的狀況,就不能夠以雷射光熔融玻璃,而發生熔斷在途中停止等的不良狀況,穩定板玻璃G的熔斷會變得困難或是不可能。 At this time, the molten glass portion M and the cut portion CU are in a positional relationship in the vicinity, and sometimes the melted end portion Ga separated by the development of the cut portion CU and the fragment K thereof straddle the molten glass portion M. The case of the irradiation of the laser beam to the sheet glass G is blocked. When such a situation occurs, it is impossible to melt the glass by laser light, and a problem such as a stop in the middle of the fuse is generated, and it is difficult or impossible to stabilize the melting of the sheet glass G.

以上,自板玻璃G分離的熔斷端部Ga,由於是伴隨著切斷部CU的發展而依序地自板玻璃G分離的態樣,分離途中的熔斷端部Ga會與藉由此分離而於板玻璃G形成的端部Gb(以下稱為切斷端部Gb)碰撞、摩擦,有時會有切斷端部Gb發生裂痕的狀況。因此,導致切斷端部Gb的品質低落,甚至更導致了板玻璃G的品質低落的結果。 As described above, the melted end portion Ga separated from the plate glass G is sequentially separated from the sheet glass G by the development of the cut portion CU, and the melted end portion Ga in the middle of the separation is separated therefrom. The end portion Gb (hereinafter referred to as the cut end portion Gb) formed in the sheet glass G collides and rubs, and the cut end portion Gb may be cracked. Therefore, the quality of the cut end portion Gb is lowered, and the result is that the quality of the sheet glass G is lowered.

有鑑於前述事情,本發明的目的在於提供隨著執行板玻 璃的雷射熔斷,在熔斷端部自該板玻璃分離的情況下,不但可以穩定熔斷的執行,且能夠避免在分離後的板玻璃方面品質的低落的改良技術。 In view of the foregoing, it is an object of the present invention to provide a glass plate with the implementation The laser of the glass is blown, and when the fusing end is separated from the plate glass, not only the execution of the fusing can be stabilized, but also the improvement technique of the quality of the plate glass after the separation can be avoided.

關於為了達成前述目的而提案的本發明的板玻璃的切斷方法,其特徵為,包括:熔斷步驟,藉由在板玻璃的切斷預定線附近與前述切斷預定線平行地雷射熔斷前述板玻璃,而在沿著前述切斷預定線的位置形成拉伸應力區域;以及初期裂紋形成步驟,在前述切斷預定線與前述板玻璃的端部的交點形成初期裂紋,於執行前述熔斷步驟之前,對於含有前述切斷預定線的前述板玻璃的端部執行加工步驟,前述加工步驟中進行防止伴隨著前述雷射熔斷因拉伸應力所引起而自然發生的切斷的加工。 A method of cutting a sheet glass according to the present invention, which is proposed to achieve the above object, comprising: a fusing step of laser melting the sheet in parallel with the line to cut in the vicinity of a line to cut of the sheet glass a glass, wherein a tensile stress region is formed at a position along the line to cut; and an initial crack forming step of forming an initial crack at an intersection of the line to cut and an end portion of the sheet glass, before performing the fusing step A processing step is performed on an end portion of the sheet glass including the predetermined cutting line, and in the processing step, processing for preventing cutting which is naturally caused by tensile stress due to the laser melting is performed.

依據此種方法,在執行熔斷步驟之前執行加工步驟,而在熔斷步驟中,當自板玻璃的端部進行熔斷的時候,藉由沿著切斷預定線依序形成拉伸應力區域,而能夠防止與熔融玻璃部(指藉由雷射的加熱而使玻璃熔融的部位)平行進行的切斷部(指以在拉伸應力區域施加的拉伸應力使板玻璃沿著切斷預定線而被切斷的部位)自然地發展的類似狀況的發生。藉此,在切斷部完全沒有發展的狀態下,可以形成遍及於切斷預定線的全長的拉伸應力區域。並且,在切斷預定線與板玻璃的端部的交點,在初期裂紋的形成結束的最初,以初期裂紋作為起點,而開始了使自板玻璃的熔斷端部的分離(切斷部的發展)。其結果是能夠使雷射熔斷的進行 與熔斷端部的分離各別執行,由於防止像是因切斷部的發展而分離的熔斷端部以及其碎片橫跨熔融玻璃部而遮住了對板玻璃的雷射的照射的狀況的發生,而能夠穩定熔斷板玻璃。並且,當使熔斷端部分離的時候,由於能藉由遍及於切斷預定線的全長而形成的拉伸應力區域使切斷部在同一時間發展,使熔融端部自板玻璃在同一時間分離,而能夠防止熔斷端部與切斷端部的碰撞、擦撞及避免分離後的板玻璃的品質的低落。 According to this method, the processing step is performed before the fusing step is performed, and in the fusing step, when the end portion of the sheet glass is melted, the tensile stress region is sequentially formed along the line to cut. A cutting portion that prevents parallel operation with a molten glass portion (a portion where the glass is melted by heating by laser) (refers to a tensile stress applied in a tensile stress region to cause the sheet glass to be along a line to cut The occurrence of a similar condition that naturally develops. Thereby, in the state in which the cutting portion is not developed at all, the tensile stress region over the entire length of the cutting planned line can be formed. In addition, at the intersection of the cutting line and the end of the sheet glass, the initial crack is used as the starting point, and the melting end of the sheet glass is separated (the development of the cutting portion) is started at the end of the formation of the initial crack. ). The result is that the laser can be blown The separation from the fuse end is performed separately, and the occurrence of a situation in which the melted end portion separated by the development of the cut portion and the debris thereof traverses the molten glass portion and shields the laser beam from the plate glass is prevented. , and can stabilize the frit glass. Further, when the fuse end portion is separated, since the cut portion can be developed at the same time by the tensile stress region formed over the entire length of the cut predetermined line, the melt end portion is separated from the sheet glass at the same time. Further, it is possible to prevent collision and rubbing of the melted end portion and the cut end portion, and to prevent deterioration of the quality of the plate glass after the separation.

在上述的方法中,前述的加工步驟較佳的是對前述板玻璃進行朝向與前述切斷預定線交叉方向的雷射割斷、雷射熔斷或是彎曲應力破裂(stress cracking)。在此,所謂的「雷射割斷」是意謂著對板玻璃照射雷射,在該板玻璃形成加熱部,並藉由追隨雷射的冷媒(refrigerant)來冷卻加熱部,藉由起因於此而發生的熱應力,以在板玻璃形成的初期裂紋作為起點,使割斷部發展而切斷該板玻璃,或是於割斷部發展的切割線(scribe line)形成後,例如是經由施加彎曲應力而折斷的態樣。並且,所謂的「雷射熔斷」是意謂隨著對板玻璃照射雷射,經由以雷射熱將熔融的熔融玻璃部除去而切斷該板玻璃的態樣。並且,所謂的「彎曲應力破裂」是意謂著使板玻璃彎曲,隨著彎曲應力作用,以形成於前述板玻璃的初期裂紋作為起點,藉由彎曲應力而使割斷部發展並切斷的態樣。 In the above method, it is preferable that the processing step is to perform laser cutting, laser fusing, or stress cracking in a direction in which the sheet glass crosses the line to cut. Here, the term "laser cutting" means irradiating a plate glass with a laser, forming a heating portion in the plate glass, and cooling the heating portion by a refrigerant that follows the laser. The thermal stress that occurs is caused by the initial crack formed in the sheet glass as a starting point, and the cut portion is developed to cut the sheet glass, or after the scribe line developed by the cut portion is formed, for example, by applying a bending stress. And the broken state. In addition, the term "laser blowing" means that the plate glass is irradiated with laser light, and the molten glass portion is removed by laser heat to cut the plate glass. In addition, the term "bending stress cracking" means a state in which the plate glass is bent, and the initial crack formed in the plate glass is used as a starting point, and the cut portion is developed and cut by bending stress. kind.

依此方式,能夠使含有成為初期裂紋形成位置的切斷預定線的一端的板玻璃的端部處於微小裂紋(crack)等的缺陷儘可能 不存在的狀態下。因此,當自板玻璃的端部進行雷射熔斷的時候,藉由沿著切斷預定線依序形成的拉伸應力區域,而可以更有效果地防止與熔融玻璃部平行進行並以缺陷作為起點的切斷部自然地發展的類似狀況的發生。 In this way, it is possible to make the end portion of the sheet glass including one end of the planned cutting line which is the initial crack formation position in the case of a crack or the like as much as possible. In a state that does not exist. Therefore, when the laser is blown from the end portion of the sheet glass, the tensile stress region sequentially formed along the line to cut can be more effectively prevented from being parallel to the molten glass portion and treated as a defect. The occurrence of a similar situation in which the cutting portion of the starting point naturally develops.

在上述的方法中,當在前述熔斷步驟的時候,較佳的是對經由雷射的加熱而熔融的熔融玻璃部噴射輔助氣體(assist gas)。 In the above method, at the time of the aforementioned fusing step, it is preferable to spray an assist gas to the molten glass portion which is melted by the heating of the laser.

依此方式,當在雷射熔斷(熔斷步驟)的時候,能夠藉由輔助氣體的壓力而使熔融的玻璃順利地飛散。因此,能夠以高速去除熔融玻璃部,並能夠縮短雷射熔斷所需要的時間。其結果是能夠提升板玻璃的製造效率。並且,可以發現的是經由噴射輔助氣體,能夠使施加在拉伸應力區域的拉伸應力的值變的更大。 In this way, when the laser is blown (fuse step), the molten glass can be smoothly scattered by the pressure of the assist gas. Therefore, the molten glass portion can be removed at a high speed, and the time required for the laser fusing can be shortened. As a result, the manufacturing efficiency of the sheet glass can be improved. Further, it can be found that the value of the tensile stress applied to the tensile stress region can be made larger by the injection assisting gas.

在上述的方法中,前述初期裂紋形成步驟也可以是藉由使經由前述熔斷步驟所熔斷的兩板玻璃的對向端部互相碰撞或滑動而執行。 In the above method, the initial crack forming step may be performed by causing the opposite ends of the two sheets of glass melted through the fusing step to collide or slide each other.

依此方式,起因於兩板玻璃的對向端部的碰撞或滑動,在兩板玻璃的雙方中,由於在切斷預定線與板玻璃的端部的交點形成初期裂紋,同時以前述初期裂紋作為起點,切斷部是自切斷預定線的一端直到另一端為止而在同一時間發展,因此可以使自板玻璃的熔斷端部的分離在熔斷後的兩板玻璃間同時執行,而能進一步提升板玻璃的製造效率。另外,在此狀態,依以下的(i)、(ii)方式可以促進對向的熔斷端部的碰撞或是滑動。(i)對於在對向的熔斷端部的雷射入射側的面、或出射側的面噴射氣體。(ii)使熔 斷後的兩板玻璃通過發生上下振動或超音波震動的區域。 In this manner, due to the collision or sliding of the opposite ends of the two sheets of glass, in both of the two sheets of glass, initial cracks are formed at the intersection of the cut line and the end portion of the sheet glass, and the initial crack is formed. As the starting point, the cutting portion is developed at the same time from one end to the other end of the cutting planned line, so that the separation of the fusing end portions of the sheet glass can be simultaneously performed between the two sheets of glass after the melting, and further can be performed. The manufacturing efficiency of the lifting plate glass. Further, in this state, collision or sliding of the opposing fuse end portion can be promoted in the following modes (i) and (ii). (i) The gas is ejected to the surface on the laser incident side of the opposite fusing end portion or the surface on the exit side. (ii) making the melt The broken two sheets of glass pass through an area where vibrations up and down or ultrasonic vibrations occur.

在上述的方法中,藉由前述熔斷步驟,較佳的是使施加在前述拉伸應力區域鄰接形成的壓縮應力區域的壓縮應力的值在20MPa以上、且在1Gpa以下。 In the above method, it is preferable that the value of the compressive stress applied to the compressive stress region formed adjacent to the tensile stress region is 20 MPa or more and 1 Gpa or less by the fusing step.

依此方式,其是藉由在壓縮應力區域施加壓縮應力,而能夠避免板玻璃的破損。而且,能夠在熔斷端部分離時,當以初期裂紋作為起點的切斷部沿著切斷預定線發展的時候,防止前述切斷部自切斷預定線逸脫的狀態下而發展。也就是說,若在壓縮應力區域施加的壓縮應力的值超過1Gpa,則在拉伸應力區域施加的拉伸應力會變得過大,由於切斷部的發展速度過剩地變快,而變得易於自切斷預定線逸脫。另一方面,若壓縮應力的值為小於20Mpa,則拉伸應力會變得過小,由於使切斷部發展本身變得困難,而有不能使熔斷端部自板玻璃分離的風險。而且,壓縮應力的值更佳的是在50Mpa以上、且在1Gpa以下,依此方式,將拉伸應力的值設在更合適的範圍,能夠使藉由前述拉伸應力而發展的切斷部的發展速度進一步地變為合適的發展速度。 In this way, it is possible to avoid breakage of the sheet glass by applying a compressive stress in the region of the compressive stress. In addition, when the cutting portion having the initial crack as the starting point is developed along the line to cut, the cutting portion can be prevented from moving out of the cutting line. In other words, if the value of the compressive stress applied in the region of the compressive stress exceeds 1 GPa, the tensile stress applied in the tensile stress region becomes excessively large, and the development speed of the cut portion becomes excessive and becomes easy. The cut-off line is detached. On the other hand, when the value of the compressive stress is less than 20 MPa, the tensile stress becomes too small, and it becomes difficult to develop the cut portion itself, and there is a risk that the melted end portion cannot be separated from the sheet glass. Further, the value of the compressive stress is more preferably 50 MPa or more and 1 MPa or less. In this manner, the value of the tensile stress is set to a more appropriate range, and the cut portion developed by the tensile stress can be obtained. The pace of development has further turned into a suitable rate of development.

在上述的方法中,較佳的是前述板玻璃的厚度為500μm以下。 In the above method, it is preferable that the thickness of the sheet glass is 500 μm or less.

依此方式,則藉由薄的板玻璃的厚度,並藉由伴隨著板玻璃的熔斷(熔斷步驟)而形成的拉伸應力區域,而能夠容易地進行自板玻璃的熔斷端部的分離。 In this manner, the separation from the fusing end portion of the sheet glass can be easily performed by the thickness of the thin sheet glass and the tensile stress region formed by the melting (fusing step) of the sheet glass.

在上述的方法中,較佳的是在前述加工步驟的執行後, 且在前述熔斷步驟的執行前,對含有前述切斷預定線的前述板玻璃的端部執行加熱至徐冷點以上的加熱處理步驟。 In the above method, preferably after the execution of the aforementioned processing steps, Before the execution of the fusing step, the end portion of the sheet glass including the cut line to be cut is subjected to a heat treatment step of heating to a freezing point or higher.

依此方式,則能夠在熔斷步驟的執行前儘可能地去除當在執行加工步驟的時候或在其後在板玻璃的端部發生的缺陷。因此,而能夠更有效果地防止當自板玻璃的端部進行雷射熔斷的時候,藉由沿著切斷預定線依序地形成拉伸應力區域,與熔融玻璃部平行進行並以缺陷作為起點的切斷部自然地發展的類似狀況的發生。 In this way, it is then possible to remove as much as possible the defects occurring at the end of the sheet glass at the time of performing the processing step or after the execution of the fusing step. Therefore, it is possible to more effectively prevent the tensile stress region from being sequentially formed along the line to cut when the laser is blown from the end portion of the sheet glass, in parallel with the molten glass portion and with the defect as The occurrence of a similar situation in which the cutting portion of the starting point naturally develops.

如上述,依據本發明,隨著執行板玻璃的雷射熔斷使熔斷端部自前述板玻璃分離的情況下,能夠穩定熔斷的執行,且能夠避免板玻璃品質的低落。 As described above, according to the present invention, when the fusing end portion is separated from the plate glass by the laser fusing of the plate glass, the execution of the fusing can be stabilized, and the deterioration of the quality of the plate glass can be avoided.

G‧‧‧板玻璃 G‧‧‧ plate glass

Gs‧‧‧含有雷射熔斷的開始位置的板玻璃的端部 Gs‧‧ End of the plate glass containing the starting position of the laser blow

Ge‧‧‧含有雷射熔斷的結束位置的板玻璃的端部 Ge‧‧‧End of the plate glass containing the end position of the laser blow

X‧‧‧切斷預定線 X‧‧‧ cut-off line

Xs‧‧‧切斷預定線與板玻璃的端部的交點 Xs‧‧‧ cut off the intersection of the planned line and the end of the plate glass

Xe‧‧‧切斷預定線與板玻璃的端部的交點 Xe‧‧‧ cut off the intersection of the planned line and the end of the plate glass

XX‧‧‧路徑 XX‧‧‧ path

S‧‧‧雷射熔斷的開始位置 S‧‧‧The starting position of the laser fuse

E‧‧‧雷射熔斷的結束位置 E‧‧‧End of the laser blow

H‧‧‧加熱部 H‧‧‧Heating Department

I‧‧‧冷卻部 I‧‧‧The Ministry of Cooling

1‧‧‧雷射照射器 1‧‧‧Laser illuminator

L‧‧‧雷射 L‧‧‧Laser

2‧‧‧冷卻水噴射器 2‧‧‧Cooling water jet

F‧‧‧冷卻水 F‧‧‧Cooling water

3‧‧‧輔助氣體噴射噴嘴 3‧‧‧Auxiliary gas injection nozzle

A‧‧‧輔助氣體 A‧‧‧Auxiliary gas

M‧‧‧熔融玻璃部 M‧‧‧Metal Glass Division

Ga‧‧‧板玻璃的熔斷端部 The fuse end of the Ga‧‧‧ plate glass

Gb‧‧‧板玻璃的切斷端部 Cut-off end of Gb‧‧‧ plate glass

V‧‧‧壓縮應力區域 V‧‧‧Compressive stress region

W‧‧‧拉伸應力區域 W‧‧‧ tensile stress region

D‧‧‧熔渣 D‧‧‧ slag

C‧‧‧初期裂紋 C‧‧‧ initial crack

CU‧‧‧切斷部 CU‧‧‧cutting department

K‧‧‧碎片 K‧‧‧Shard

圖1表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 1 is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖2a表示關於本發明的實施形態的板玻璃的切斷方法的縱斷前視圖。 Fig. 2a is a longitudinal sectional front view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖2b表示關於本發明的實施形態的板玻璃的切斷方法的縱斷前視圖。 Fig. 2b is a longitudinal front view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖2c表示關於本發明的實施形態的板玻璃的切斷方法的縱斷前視圖。 Fig. 2c is a longitudinal front view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖3a表示關於本發明的實施形態的板玻璃的切斷方法的縱斷前視圖。 Fig. 3a is a longitudinal sectional front view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖3b表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 3b is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖4a表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 4a is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖4b表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 4b is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖5表示關於本發明的實施形態的板玻璃的切斷方法的縱斷前視圖。 Fig. 5 is a longitudinal sectional front view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖6a表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 6a is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖6b表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 6b is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖6c表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 6c is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖6d表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。 Fig. 6d is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention.

圖7表示以往板玻璃的切斷方法的平面圖。 Fig. 7 is a plan view showing a conventional method of cutting a sheet glass.

以下,參照所附加的圖來說明本發明的實施形態。另外,在本實施形態中,較佳的是作為切斷的對象的板玻璃的厚度在500μm以下、更佳的是在300μm以下、進一步較佳的是在200μm以下、而最佳是在100μm以下。 Hereinafter, embodiments of the present invention will be described with reference to the attached drawings. Further, in the present embodiment, the thickness of the sheet glass to be cut is preferably 500 μm or less, more preferably 300 μm or less, still more preferably 200 μm or less, and most preferably 100 μm or less. .

圖1為表示關於本發明的實施形態的板玻璃的切斷方法的平面圖。在本實施形態中,首先,對於板玻璃G執行如在同圖 所示的加工步驟。更詳細的說,沿著與在板玻璃G的長方向延伸的兩條的切斷預定線X正交的兩個的路徑XX(切斷預定線X的一端側,及另一端側的路徑XX)依序形成藉由雷射L的照射而加熱的加熱部H、及藉由作為追隨雷射L的冷媒的冷卻水F而使加熱部H的一部分冷卻的冷卻部I。 Fig. 1 is a plan view showing a method of cutting a sheet glass according to an embodiment of the present invention. In the present embodiment, first, the same as the sheet glass G is performed in the same figure. The processing steps shown. More specifically, the two paths XX orthogonal to the two planned cutting lines X extending in the longitudinal direction of the sheet glass G (one end side of the cutting planned line X, and the other end side path XX) The heating unit H heated by the irradiation of the laser light L and the cooling unit 1 that cools a part of the heating unit H by the cooling water F that is the refrigerant that follows the laser light L are sequentially formed.

然後,藉由起因於前述加熱部H與冷卻部I的溫度差而發生的熱應力,在板玻璃G的寬方向(與長方向正交的方向)的端部(在同圖中,與切斷預定線X平行延伸的兩個的端部之中的左側的端部)以預先形成的初期裂紋作為起點而發展割斷部,並雷射割斷前述該板玻璃G。從而,下述的雷射熔斷(熔斷步驟)的開始位置S,結束位置E,含有切斷預定線X與路徑XX的交點Xs、Xe的板玻璃G的端部Gs、Ge形成於切斷預定線X的一端側及另一端側。上述一端側及另一端側形成的端部Gs、Ge能夠處於微小裂紋等的缺陷儘可能地不存在的狀態下。 Then, the thermal stress generated by the temperature difference between the heating portion H and the cooling portion I is at the end portion of the sheet glass G in the width direction (direction orthogonal to the longitudinal direction) (in the same figure, The left end portion of the two end portions in which the predetermined line X is extended in parallel is developed with the preliminary crack formed in advance as a starting point, and the plate glass G is cut by the laser. Therefore, the start position S of the laser fusing (fuse step) described below, the end position E, and the end portions Gs and Ge of the sheet glass G including the intersections Xs and Xe of the cut line X and the path XX are formed in the cutting schedule. One end side and the other end side of the line X. The end portions Gs and Ge formed on the one end side and the other end side can be in a state in which defects such as micro cracks are not present as much as possible.

在此,上述的加工步驟(雷射割斷)能用例如是如圖2a中所示的裝置來執行。如同圖所示,此裝置是由一邊在板玻璃G的寬方向(如在同圖中,垂直於紙面的方向)移動,一邊沿著在前述板玻璃G延伸的路徑XX而照射雷射L的雷射照射器1;以及一邊噴射作為冷媒的冷卻水F,一邊追隨雷射照射器1而移動的冷卻水噴射器2所構成。 Here, the above-described processing steps (laser cutting) can be performed by, for example, a device as shown in Fig. 2a. As shown in the figure, the device is irradiated with a laser beam L along the path XX extending in the plate glass G in the width direction of the plate glass G (as in the same figure, perpendicular to the paper surface). The laser illuminator 1 and the cooling water ejector 2 that moves along the laser illuminator 1 while ejecting the cooling water F as a refrigerant.

而且,作為形成缺陷儘可能不存在的板玻璃G的端部Gs、Ge的加工步驟,除了前述的雷射割斷以外,也可以對於前述 板玻璃G執行雷射熔斷或彎曲應力破裂。此外,也可以是在板玻璃G形成切割線,在該板玻璃G折斷後經由進行蝕刻(etching)處理等而形成缺陷儘可能不存在的端部Gs、Ge。 Further, as a processing step of forming the end portions Gs and Ge of the sheet glass G in which defects are not present as much as possible, in addition to the aforementioned laser cutting, the foregoing may be The plate glass G performs laser fusing or bending stress cracking. Further, a cut line may be formed in the sheet glass G, and after the sheet glass G is broken, an end portion Gs or Ge in which defects are not present as possible may be formed by performing an etching process or the like.

雷射熔斷,例如是可以使用如圖2b所示的裝置而執行。如同圖所示,此裝置是由一邊在板玻璃G的寬方向(在同圖中,對紙面垂直的方向)移動,一邊由沿著在該板玻璃G延伸的路徑XX而照射雷射L的雷射照射器1;以及對經由雷射L的照射而熔融的熔融玻璃部M噴射輔助氣體A,使該熔融玻璃部M飛散而去除的輔助氣體噴射噴嘴3所構成。輔助氣體噴射噴嘴3是與雷射照射器1平行進行而移動,並對於板玻璃G的表背面採取傾斜的姿態。然而,也可以是不一定要設置此輔助氣體噴射器3。 The laser blow can be performed, for example, using a device as shown in Figure 2b. As shown in the figure, the device is moved by one side in the width direction of the sheet glass G (in the same figure, in the direction perpendicular to the plane of the paper), while the laser beam L is irradiated along the path XX extending on the sheet glass G. The laser illuminator 1 and the auxiliary gas injection nozzle 3 which sprays the auxiliary gas A to the molten glass portion M which is melted by the irradiation of the laser light L to scatter the molten glass portion M. The auxiliary gas injection nozzle 3 moves in parallel with the laser illuminator 1 and assumes an inclined posture with respect to the front and back surfaces of the sheet glass G. However, it is also possible that the auxiliary gas injector 3 is not necessarily provided.

例如可以使用在如圖2c所示的裝置而執行彎曲應力破裂。如在同一圖所示,此裝置具備有使板玻璃G在長方向(在同圖中的左右方向)彎曲,能夠保持使彎曲應力作用的狀態而在圖示省略的保持器;以及在該板玻璃G的端部與路徑XX的交點形成初期裂紋C而在圖示省略的初期裂紋形成器。於是,以初期裂紋C作為起點的割斷部是在板玻璃G往厚度方向發展,而使該板玻璃G沿著路徑XX切斷的方式而構成。 For example, bending stress cracking can be performed using the device as shown in Fig. 2c. As shown in the same figure, the apparatus is provided with a retainer that bends the sheet glass G in the longitudinal direction (in the horizontal direction in the same drawing) and can maintain the bending stress, and is omitted in the drawing; An initial crack former, which is omitted from the drawing, forms an initial crack C at the intersection of the end of the glass G and the path XX. Then, the cut portion having the initial crack C as a starting point is formed such that the sheet glass G develops in the thickness direction and the sheet glass G is cut along the path XX.

藉由加工步驟的執行而形成於板玻璃G的端部Gs、Ge,在下述熔斷步驟執行前,作為加熱處理步驟也可以加熱至徐冷點以上。若依此方式,則能夠在雷射熔斷(熔斷步驟)的執行前儘可能 的去除在執行加工步驟的時候或在那之後於板玻璃G的端部Gs、Ge發生的缺陷。另外,前述加熱處理步驟不一定是要對端部Gs、Ge的雙方執行,也可以是僅對於端部Gs執行。 The end portions Gs and Ge formed on the sheet glass G by the execution of the processing step may be heated to a freezing point or higher as a heat treatment step before the execution of the fusing step described below. In this way, it is possible to be as far as possible before the execution of the laser blow (fuse step) The removal of defects occurring at the ends Gs, Ge of the sheet glass G at the time of performing the processing steps or after that. Further, the heat treatment step is not necessarily performed on both the end portions Gs and Ge, and may be performed only on the end portion Gs.

當加熱處理步驟結束,作為熔斷步驟,如圖3a、圖3b所示,其是自含有雷射熔斷的開始位置S的端部Gs朝向含有結束位置E的端部Ge而雷射熔斷板玻璃G。另外,此雷射熔斷能夠使用與如圖2b所示的裝置具有同樣的構成的裝置來執行。 When the heat treatment step is completed, as a fusing step, as shown in Figs. 3a and 3b, the end portion Gs from the start position S containing the laser fusing is directed toward the end Ge containing the end position E and the laser fusing plate glass G . In addition, this laser blow can be performed using a device having the same configuration as the device shown in Fig. 2b.

於是,藉由雷射熔斷(熔斷步驟)的執行,雷射L照射的部位不但會藉由雷射L加熱而熱膨脹,且在其周邊部位被擴張。因此,於熔斷的板玻璃G的對向的熔斷端部Ga,在板玻璃G的寬方向上鄰接形成了施加壓縮應力的壓縮應力區域V與施加作為壓縮應力的反作用的拉伸應力的拉伸應力區域W。 Thus, by the execution of the laser fusing (fusing step), the portion irradiated by the laser L is not only thermally expanded by the heating of the laser L but also expanded at the peripheral portion thereof. Therefore, in the opposite fusing end portion Ga of the blown sheet glass G, the compressive stress region V to which the compressive stress is applied and the tensile stress applied as the reaction of the compressive stress are formed adjacent to each other in the width direction of the sheet glass G. Stress area W.

此時,在執行熔斷步驟前,藉由執行加工步驟及加熱處理步驟,雷射熔斷的開始位置S或板玻璃G的端部Gs與切斷預定線X的交點Xs是處於儘量去除缺陷的狀態下。因此,在熔斷步驟中,當自端部Gs進行雷射熔斷的時候,藉由沿著切斷預定線X依序形成的拉伸應力區域W,而能夠防止與熔融玻璃部(藉由雷射L的加熱而使玻璃熔融的部位)平行進行並以在端部Gs存在的缺陷作為起點的切斷部(指在拉伸應力區域W施加拉伸應力而使板玻璃G沿著切斷預定線X而切斷的部位)自然地發展的類似狀況發生。從而,能夠在切斷部完全沒有發展的狀態下形成遍及於切斷預定線X的全長的拉伸應力區域W。 At this time, before the fusing step, by performing the processing step and the heat treatment step, the start position S of the laser fusing or the intersection Xs of the end portion Gs of the sheet glass G and the line to cut X is in a state where the defect is removed as much as possible. under. Therefore, in the fusing step, when the laser beam is blown from the end portion Gs, it is possible to prevent the molten glass portion (by laser) by the tensile stress region W sequentially formed along the cutting planned line X. a portion where the glass is melted and the portion where the glass is melted is parallel, and a cut portion having a defect existing at the end portion Gs is used as a starting point (a tensile stress is applied to the tensile stress region W to cause the sheet glass G to follow a line to cut A similar condition that naturally develops when X is cut off. Therefore, the tensile stress region W over the entire length of the cutting planned line X can be formed in a state where the cutting portion is not developed at all.

在此,於熔斷步驟中,自雷射L的焦點到切斷預定線X為止的距離較佳的是0.5~5mm。並且,輔助氣體A的噴射壓力較佳的是0.01~1.0Mpa。此外,輔助氣體A的噴射方向與板玻璃G的表背面所形成的夾角較佳的是0~60°,更佳的是0~30°。 Here, in the fusing step, the distance from the focus of the laser beam L to the cutting planned line X is preferably 0.5 to 5 mm. Further, the injection pressure of the assist gas A is preferably 0.01 to 1.0 MPa. Further, the angle formed by the ejection direction of the assist gas A and the front and back surfaces of the sheet glass G is preferably 0 to 60°, more preferably 0 to 30°.

於拉伸應力區域W施加的拉伸應力,在區域內的寬方向中,在靠近熔斷端部Ga的位置,其值變為最大。而且,此拉伸應力區域W與壓縮應力區域V相較下是廣區域的展開,直接量測所施加的拉伸應力的值有困難。因此,在決定應該施加熔斷端部Ga的拉伸應力的值的情況下,將與拉伸應力區域W鄰接,在該熔斷端部Ga是有限定地存在,且容易直接的量測的施加在壓縮應力區域V的壓縮應力的值來取代拉伸應力而決定。另外,此拉伸應力與壓縮應力具有比例關係 The tensile stress applied to the tensile stress region W is maximized in the width direction in the region at a position close to the fuse end Ga. Further, in the tensile stress region W and the compressive stress region V, the development of the wide region is difficult, and it is difficult to directly measure the value of the applied tensile stress. Therefore, in the case where it is determined that the value of the tensile stress of the fuse end portion Ga should be applied, it is adjacent to the tensile stress region W, and the fuse end portion Ga is present in a limited manner, and it is easy to directly measure the application. The value of the compressive stress in the compressive stress region V is determined in place of the tensile stress. In addition, this tensile stress is proportional to the compressive stress.

作為應施加在此壓縮應力區域V的壓縮應力的值,較佳的是在20MPa以上、且在1GPa以下。更佳的是在50MPa以上、且在1GPa以下。依此方式,藉由施加在壓縮應力區域V的壓縮應力,能夠避免板玻璃G的破損,同時能夠防止下述的切斷部CU沿著切斷預定線X發展的時候,在自切斷預定線X逸脫的狀態下發展。 The value of the compressive stress to be applied to the compressive stress region V is preferably 20 MPa or more and 1 GPa or less. More preferably, it is 50 MPa or more and 1 GPa or less. In this manner, by the compressive stress applied to the compressive stress region V, it is possible to prevent breakage of the sheet glass G, and at the same time, it is possible to prevent the cut portion CU described below from developing along the line to cut X, at the time of self-cutting The line X develops in a state of escape.

另外,當執行雷射熔斷(熔斷步驟)的時候,藉由噴射輔助氣體A,而亦能夠得到如以下的效果。即藉由輔助氣體A的壓力,由於能使熔融的玻璃順利地飛散,並可以高速的去除熔融玻璃部。從而,由於縮短了雷射熔斷所需要的時間,而能提升板玻璃G 的製造效率。 Further, when the laser blow (fuse step) is performed, the following effects can be obtained by spraying the assist gas A. That is, by the pressure of the assist gas A, the molten glass can be smoothly scattered, and the molten glass portion can be removed at high speed. Thereby, the plate glass G can be lifted by shortening the time required for the laser fusing. Manufacturing efficiency.

並且,發現噴射輔助氣體A噴射會得到比施加在拉伸應力區域W的拉伸應力的值更大的拉伸應力。另外,藉由於熔斷時輔助氣體A的壓力而飛散的熔融玻璃,如圖3a所示,其作為熔渣D(dross)而易於附著在熔斷端部Ga。 Further, it is found that the injection assisting gas A injection gives a tensile stress larger than the value of the tensile stress applied to the tensile stress region W. In addition, as shown in FIG. 3a, the molten glass which is scattered by the pressure of the assist gas A at the time of the fuse is likely to adhere to the fuse end Ga as the slag D (dross).

當熔斷步驟結束,作為初期裂紋形成步驟,藉由鑽石尖端(diamond tip)、砂紙等刻設裂痕或藉由以超短脈衝雷射操作等,如圖4a所示,於切斷預定線X與板玻璃的端部Gs的交點Xs形成初期裂紋C。以此初期裂紋C作為起點的切斷部CU,藉由在遍及於切斷預定線X形成的全長的拉伸應力區域W施加的拉伸應力,而在同一時間發展。 When the fusing step is completed, as an initial crack forming step, a crack is cut by a diamond tip, sandpaper, or the like, or by an ultrashort pulse laser operation, as shown in FIG. 4a, at a predetermined line X and The intersection point Xs of the end portion Gs of the plate glass forms an initial crack C. The cut portion CU having the initial crack C as a starting point develops at the same time by the tensile stress applied to the tensile stress region W over the entire length of the line to cut X.

如此,於已經形成完畢的拉伸應力區域W,藉由初次形成初期裂紋C,使以初期裂紋C作為起點的切斷部CU發展,並開始了自板玻璃G的熔斷端部Ga的分離。因而能夠各別執行雷射熔斷的進行及熔斷端部Ga的分離,如圖4b所示,即使當在切斷部CU發展的時候,藉由該切斷部CU的發展而分離的熔斷端部Ga或其碎片K並沒有橫跨於熔融玻璃部並遮住對於板玻璃G的雷射L的照射,而能夠穩定板玻璃的熔斷。 In the tensile stress region W which has already been formed, the initial crack C is developed, and the cut portion CU having the initial crack C as a starting point is developed, and the separation of the fuse end Ga from the sheet glass G is started. Therefore, the progress of the laser fusing and the separation of the fusing end portion Ga can be performed separately, as shown in FIG. 4b, even when the cutting portion CU is developed, the fusing end portion separated by the development of the cutting portion CU Ga or its fragment K does not straddle the molten glass portion and shields the laser beam L from the sheet glass G, and can stabilize the melting of the sheet glass.

並且,當使熔斷端部Ga分離的時候,藉由遍及於切斷預定線X的全長形成的拉伸應力區域W而使切斷部CU在同一時間發展,由於能使熔斷端部Ga自板玻璃在同一時間分離,防止了熔斷端部Ga與伴隨前述熔斷端部Ga的分離於板玻璃G形成的切 斷端部Gb碰撞、摩擦,而可以避免板玻璃G的品質的低落。 Further, when the fuse end portion Ga is separated, the cut portion CU is developed at the same time by the tensile stress region W formed over the entire length of the cut planned line X, since the fuse end portion Ga can be self-applied The glass is separated at the same time, and the cut end Ga is prevented from being cut by the separation of the melted end Ga from the sheet glass G. The broken end portion Gb collides and rubs, and the deterioration of the quality of the sheet glass G can be avoided.

此外,藉由使施加於壓縮應力區域V的壓縮應力的值在上述的值的區域內,而能夠使切斷部CU在合適的狀態下發展。即,若施加於壓縮應力區域V的壓縮應力的值超過1GPa,則施加於拉伸應力區域W的拉伸應力會變得過大,由於切斷部CU的發展速度過剩地變快,而使切斷部CU容易自切斷預定線X逸脫。另一方面,若壓縮應力的值小於20Mpa,則拉伸應力會變得過小,由於使切斷部CU發展其自身變得困難,而有不能使熔斷端部Ga自板玻璃分離的風險。 Further, by setting the value of the compressive stress applied to the compressive stress region V within the above-described range of values, the cut portion CU can be developed in an appropriate state. In other words, when the value of the compressive stress applied to the compressive stress region V exceeds 1 GPa, the tensile stress applied to the tensile stress region W becomes excessively large, and the development speed of the cut portion CU becomes excessively high, so that the cut is made. The broken portion CU is easily detached from the cut line X. On the other hand, when the value of the compressive stress is less than 20 MPa, the tensile stress becomes too small, and it becomes difficult to develop the cut portion CU itself, and there is a risk that the melted end portion Ga cannot be separated from the sheet glass.

而且,熔斷端部Ga自板玻璃G依序分離,若前述熔斷端部Ga的分離結束,則板玻璃G的切斷結束。此時,如圖4b所示,施加於熔斷端部Ga的壓縮應力及拉伸應力是伴隨著熔斷端部Ga的分離(切斷部CU的發展)而被釋放,能夠較有效率地去除於板玻璃G產生的扭曲,同時使壓縮應力區域V及拉伸應力區域W依序地消失。此結果於圖5顯示,在切斷結束後的切斷端部Gb中,能夠儘可能地防止扭曲的殘留,對於切斷結束後的板玻璃G,能夠省去再次進行為了除去扭曲的退火的麻煩。 Further, the fuse end portion Ga is sequentially separated from the sheet glass G, and when the separation of the fuse end portion Ga is completed, the cutting of the sheet glass G is completed. At this time, as shown in FIG. 4b, the compressive stress and the tensile stress applied to the fusing end portion Ga are released along with the separation of the fusing end portion Ga (development of the cutting portion CU), and can be removed more efficiently. The distortion generated by the sheet glass G causes the compressive stress region V and the tensile stress region W to disappear sequentially. As a result, as shown in FIG. 5, in the cut end portion Gb after the end of the cutting, it is possible to prevent the distortion from remaining as much as possible, and it is possible to omit the annealing of the sheet glass G after the cutting is completed again to remove the distortion. trouble.

另外,初期裂紋C也可以不形成於如圖4a所示的切斷預定線X與板玻璃G的端部Gs的交點Xs,而形成於切斷預定線X與端部Ge的交點Xe。此外,在形成了如此的初期裂紋C的情況中,如圖6a、圖6b所示,能夠在執行加工步驟後,執行熔斷步驟前執行初期裂紋形成步驟。在此情況下,以在端部 Ge形成的初期裂紋C作為起點的切斷部CU如圖6c所示,自藉由熔斷步驟的端部Gs側向端部Ge側依序形成的拉伸應力區域W直至到達端部Ge為止,也就是在形成遍及於切斷預定線X的全長的拉伸應力區域W的最初,如圖6d所示,而自此開始發展。此外,根據同樣的理由,也能夠在執行熔斷步驟的中途執行初期裂紋形成步驟。 Further, the initial crack C may be formed not at the intersection Xs of the planned cutting line X and the end portion Gs of the sheet glass G as shown in FIG. 4a, but at the intersection Xe between the planned cutting line X and the end Ge. Further, in the case where such an initial crack C is formed, as shown in FIGS. 6a and 6b, the initial crack forming step can be performed before the fusing step is performed after the processing step is performed. In this case, at the end As shown in FIG. 6c, the cut portion CU from which the initial crack C formed by Ge is used as the starting point is from the tensile stress region W formed by the end portion Gs side of the fusing step toward the end portion Ge side until reaching the end portion Ge. That is, at the beginning of the formation of the tensile stress region W over the entire length of the cutting planned line X, as shown in Fig. 6d, it has been developed since then. Further, for the same reason, the initial crack forming step can be performed in the middle of performing the fusing step.

另外,依據上述說明的板玻璃的切斷方法,由於將雷射熔斷時飛散的熔融玻璃作為熔渣D與易於附著的熔斷端部Ga分離,而能夠抑制在切斷結束後的板玻璃G、特別是在切斷端部Gb殘留有熔渣D類似狀況的發生而得到次要效果。此外,藉由將熔斷端部Ga藉由拉伸張力而分離,而能夠儘可能的避免在切斷端部Gb產生缺陷。 In addition, according to the cutting method of the sheet glass described above, the molten glass which is scattered at the time of the laser melting is separated from the melted end portion Ga which is easy to adhere, and the sheet glass G after the cutting is completed can be suppressed. In particular, the occurrence of a similar situation in which the slag D remains in the cut end portion Gb gives a secondary effect. Further, by separating the melted end portion Ga by the tensile tension, it is possible to avoid occurrence of defects at the cut end portion Gb as much as possible.

在此,關於本發明的板玻璃的切斷方法,並未限定於上述的實施形態中說明的態樣。例如是在上述的實施形態中,雖然是成為沿著切斷預定線的一端側與另一端側的雙方存在的路徑執行加工步驟(在上述的實施形態中為雷射割斷、雷射熔斷或彎曲應力破裂)的態樣,但也可以是僅對一端側執行加工步驟,並以藉由該加工步驟形成的板玻璃的端部作為開始位置執行熔斷步驟(雷射熔斷)的態樣。即使在這種情況下也能夠得到關於本發明的板玻璃的切斷方法的效果。並且,在上述的實施形態中,雖於切斷預定線的一端側及另一端側存在的路徑與該切斷預定線為正交的態樣,但並不限於此,也可以是至少使該路徑與切斷預定線交叉的 態樣。 Here, the method of cutting the sheet glass of the present invention is not limited to the one described in the above embodiment. For example, in the above-described embodiment, the processing step is performed on the path along both the one end side and the other end side along the line to cut (in the above embodiment, the laser cut, the laser blow, or the bend) The state of the stress cracking, but it is also possible to perform the fusing step (laser fusing) by performing the fusing step (laser fusing) only on the one end side and using the end portion of the plate glass formed by the processing step as the starting position. Even in this case, the effect of the cutting method of the sheet glass of the present invention can be obtained. Further, in the above-described embodiment, the path existing on one end side and the other end side of the line to cut is orthogonal to the line to cut, but the invention is not limited thereto, and at least the The path intersects the cut line Aspect.

並且,在上述的實施形態中,其態樣是作為加工步驟而對於板玻璃執行雷射割斷、雷射熔斷或是彎曲應力破裂。換言之,就是藉由切斷板玻璃而形成含有雷射熔斷的開始位置的端部。然而,這些以外,能夠是作為加工步驟,並不伴隨著切斷而對含有雷射熔斷的開始位置的端部執行蝕刻等態樣。即使如此做,也能夠防止因拉伸應力而自然地發生切斷。 Further, in the above-described embodiment, the laser cutting, the laser fusing, or the bending stress cracking is performed on the sheet glass as a processing step. In other words, the end portion including the start position of the laser blow is formed by cutting the plate glass. However, in addition to these, it is possible to perform etching as an etching step on the end portion including the start position of the laser fuse without being cut. Even in this case, it is possible to prevent the cutting from occurring naturally due to the tensile stress.

此外,在不伴隨著如上述的蝕刻等的板玻璃的切斷的加工步驟執行的情況下,也能夠是與上述的實施形態不同,而在執行加工步驟更早之前執行初期裂紋形成步驟。在此情況下,若在含有雷射熔斷的結束位置的板玻璃的端部與切斷預定線的交點形成有初期裂紋,則加工步驟的執行後,當熔斷步驟執行時依序形成的拉伸應力區域,到達直至含有雷射熔斷的結束位置的板玻璃的端部,即,形成遍及於切斷預定線的全長的拉伸應力區域的最初,自此而開始切斷部的發展。並且,在此情況下,藉由同樣的理由,初期裂紋形成步驟雖然可以是在加工步驟的執行後,較熔斷步驟執行更早之前來執行,但也可以於熔斷步驟執行的中途執行。 Further, in the case where the processing step of cutting the sheet glass such as the etching described above is performed, the initial crack forming step may be performed before the processing step is performed, unlike the above-described embodiment. In this case, if an initial crack is formed at the intersection of the end portion of the sheet glass at the end position including the laser blow and the line to cut, the stretching is sequentially formed when the fusing step is performed after the execution of the processing step. In the stress region, the end portion of the sheet glass that has reached the end position of the laser fusing, that is, the first stretch stress region that extends over the entire length of the line to be cut is formed, and the development of the cut portion is started. Further, in this case, for the same reason, the initial crack forming step may be performed earlier than the execution of the fusing step after the execution of the processing step, but may be performed in the middle of the fusing step.

而且,在上述的實施形態中,對於熔斷後的兩板玻璃,雖經由透過鑽石尖端(diamond tip)等刻設裂痕而形成初期裂紋,但也可以藉由使熔斷後的兩板玻璃的對向端部碰撞或滑動而作為執行初期裂紋形成步驟的態樣。依此方式,起因於兩板玻璃的對向 端部的碰撞或滑動,而在兩板玻璃的雙方中,由於在切斷預定線與板玻璃的端部的交點形成初期裂紋,同時以前述初期裂紋作為起點,切斷部是自切斷預定線的一端直到另一端為止而在同一時間發展,而能夠使自板玻璃的熔斷端部的分離在熔斷後的兩板玻璃間同時執行,而能夠進一步提升板玻璃的製造效率。 Further, in the above-described embodiment, the initial cracks are formed by the cracks being formed by the diamond tips or the like after the melted two sheets of glass, but the two sheets of glass after the melting may be opposed. The end portion collides or slides as an aspect of performing the initial crack forming step. In this way, it is caused by the opposite direction of the two plates of glass. In the collision between the ends of the two sheets of glass, the initial crack is formed at the intersection of the cut line and the end of the sheet glass, and the cut portion is the self-cutting schedule. The one end of the wire develops at the same time until the other end, and the separation of the melted end portion of the plate glass can be simultaneously performed between the two plates after the fusing, and the manufacturing efficiency of the plate glass can be further improved.

以下,舉例說明為了經由熔斷後的兩板玻璃的對向熔斷端部互相碰撞或滑動而形成初期裂紋的裝置的構成。作為用於使熔斷端部碰撞的構成,可列舉出例如是將與切斷預定線平行延伸且將前述切斷預定線設置於其間的一對的板玻璃的支持台,成為能夠互相接近及遠離的構成。依據此種構成,能夠使熔斷後的對向熔斷端部,伴隨著兩支持台的接近而碰撞。並且,作為用於使熔斷端部滑動的構成,可列舉為使兩支持台能夠互相接近或互相遠離,同時能夠在與熔斷端部延伸的方向平行的方向互相往相反方向移動的構成。依據如此的構成,熔斷後的對向熔斷端部,能夠伴隨於兩支持台的接近而接觸,同時能夠互相往相反的方向移動、滑動。另外,如上述的實施形態,在作為噴射輔助氣體的構成的情況下,能夠使熔斷後的板玻璃或其熔斷端部震動,藉由此震動而能夠促進對向端部彼此的碰撞或滑動。 Hereinafter, a configuration of an apparatus for forming initial cracks by colliding or sliding the opposing fuse ends of the two plate glasses after the fuses will be exemplified. The configuration for colliding the fuse end portion is, for example, a support table for a pair of sheet glass extending in parallel with the line to cut and having the line to cut therebetween interposed therebetween, so as to be able to approach and move away from each other. Composition. According to this configuration, it is possible to cause the opposing melted end portion after the blow to collide with the approach of the two support tables. Further, as a configuration for sliding the fuse end portion, the two support tables can be moved toward each other in the opposite direction to each other in the direction parallel to the direction in which the fuse end portion extends, as long as they can approach each other or move away from each other. According to such a configuration, the opposing fuse end portions after the fuse can be brought into contact with each other in the opposite direction, and can be moved and slid in the opposite directions. Further, in the above-described embodiment, in the case of the configuration as the injection assisting gas, the blown plate glass or the fusing end portion thereof can be vibrated, and the collision or the sliding of the opposite end portions can be promoted by the vibration.

並且,初期裂紋形成步驟可以是將於熔斷的時候飛散的熔渣的一部分,使其附著於切斷預定線與板玻璃的端部的交點而作為執行態樣。在此情況下,例如,預先明瞭使熔渣易於飛散的熔斷的條件,而當對板玻璃熔斷的結束位置熔斷的時候,在此條 件之下執行熔斷。依此方式,則飛散熔渣的一部分,會附著於切斷預定線與板玻璃的端部的交點,藉由那時的熱衝擊或物理衝擊而形成初期裂紋。 Further, the initial crack forming step may be a part of the slag which is scattered at the time of melting, and is attached to the intersection of the line to cut and the end of the sheet glass as an execution state. In this case, for example, the condition for melting the slag to be easily scattered is known in advance, and when the end position of the sheet glass is blown, the strip is broken. The fuse is executed under the piece. In this manner, a part of the scattered slag adheres to the intersection of the cut line and the end of the sheet glass, and an initial crack is formed by thermal shock or physical impact at that time.

此外,作為初期裂紋形成步驟,也能夠藉由如以下的態樣執行。也就是,藉由熔斷時的熱而熔接位於雷射熔斷的結束位置的熔斷端部,在形成熔接部後,拉斷熔斷端部彼此,經由使熔接部破損,而能夠在切斷預定線與板玻璃的交點形成初期裂紋。 Further, the initial crack forming step can also be carried out as follows. That is, the fusing end portion at the end position of the laser fusing is welded by the heat at the time of fusing, and after the fusing portion is formed, the fusing end portions are pulled apart, and the welded portion is broken, whereby the planned line can be cut and The intersection of the plate glass forms an initial crack.

此外,在上述的實施形態中,作為能夠使用於雷射熔斷而執行加工步驟的裝置的構成,雖然對於板玻璃的表背面以傾斜的姿態而設置輔助氣體噴射噴嘴,但也可以是使此輔助氣體噴射噴嘴對於板玻璃的表背面採取垂直的姿勢的方式設置。 Further, in the above-described embodiment, the configuration of the apparatus that can perform the processing step for the laser fusing is that the auxiliary gas injection nozzle is provided in an inclined posture on the front and back surfaces of the plate glass, but the auxiliary gas injection nozzle may be provided. The gas jet nozzle is disposed in a vertical posture with respect to the front and back surfaces of the plate glass.

而且,關於本發明的板玻璃的切斷方法,例如可以適用於連續切斷藉由溢流法(overflow)或浮式法(float)成形的玻璃帶(glass ribbon)的情況;或是使用將玻璃帶捲撓成捲筒(roll)狀的玻璃捲筒,藉由卷對卷(roll-to-roll)(將來自玻璃捲筒的玻璃帶捲開而施以預定的加工後,將加工後的玻璃帶再捲為玻璃捲筒的態樣)執行切斷的情況。在此情況下,初期裂紋作為起點的切斷部的發展,追上先行的熔融玻璃部(雷射熔斷的進行),而需要以不使這些平行進行的方式,來注意執行初期裂紋形成步驟的時機。 Further, the method for cutting the sheet glass of the present invention can be applied, for example, to continuously cutting a glass ribbon formed by an overflow or a float; or The glass ribbon is wound into a roll-shaped glass roll, which is processed by roll-to-roll (rolling the glass ribbon from the glass roll and applying predetermined processing) The glass ribbon is re-rolled into the glass reel) and the cutting is performed. In this case, the development of the cut portion in which the initial crack is used as the starting point catches up with the preceding molten glass portion (the progress of the laser blow), and it is necessary to pay attention to the step of performing the initial crack formation without performing these parallel operations. opportunity.

G‧‧‧板玻璃 G‧‧‧ plate glass

Gs‧‧‧含有雷射熔斷的開始位置的板玻璃的端部 Gs‧‧ End of the plate glass containing the starting position of the laser blow

Ge‧‧‧含有雷射熔斷的結束位置的板玻璃的端部 Ge‧‧‧End of the plate glass containing the end position of the laser blow

X‧‧‧切斷預定線 X‧‧‧ cut-off line

Xs‧‧‧切斷預定線與板玻璃的端部的交點 Xs‧‧‧ cut off the intersection of the planned line and the end of the plate glass

Xe‧‧‧切斷預定線與板玻璃的端部的交點 Xe‧‧‧ cut off the intersection of the planned line and the end of the plate glass

XX‧‧‧路徑 XX‧‧‧ path

S‧‧‧雷射熔斷的開始位置 S‧‧‧The starting position of the laser fuse

E‧‧‧雷射熔斷的結束位置 E‧‧‧End of the laser blow

H‧‧‧加熱部 H‧‧‧Heating Department

I‧‧‧冷卻部 I‧‧‧The Ministry of Cooling

Claims (7)

一種板玻璃的切斷方法,其特徵在於,包括:熔斷步驟,藉由在板玻璃的切斷預定線附近與前述切斷預定線平行地雷射熔斷前述板玻璃,而在沿著前述切斷預定線的位置形成拉伸應力區域;以及初期裂紋形成步驟,在前述切斷預定線與前述板玻璃的端部的交點形成初期裂紋,於執行前述熔斷步驟之前,對於含有前述切斷預定線的前述板玻璃的端部執行加工步驟,前述加工步驟中進行防止伴隨著前述雷射熔斷因拉伸應力所引起而自然發生的切斷的加工。 A method for cutting a sheet glass, comprising: a fusing step of laser melting the sheet glass in parallel with the line to cut in the vicinity of a line to cut of the sheet glass, and cutting along the foregoing cutting line a position of the line forming a tensile stress region; and an initial crack forming step of forming an initial crack at an intersection of the planned cutting line and the end portion of the sheet glass, and performing the aforementioned cutting line before performing the fusing step The processing step is performed at the end portion of the plate glass, and in the above-described processing step, processing for preventing the cutting which naturally occurs due to the tensile stress caused by the above-described laser fusing is performed. 如申請專利範圍第1項所述的板玻璃的切斷方法,其中前述加工步驟是對前述板玻璃進行朝向與前述切斷預定線交叉方向的雷射割斷、雷射熔斷或彎曲應力破裂。 The method for cutting a sheet glass according to claim 1, wherein the processing step is to perform laser cutting, laser fusing, or bending stress cracking in a direction in which the sheet glass crosses the line to cut. 如申請專利範圍第1項或第2項所述的板玻璃的切斷方法,其中在前述熔斷步驟時,對經由雷射的加熱而熔融的熔融玻璃部噴射輔助氣體。 The method for cutting a sheet glass according to the first or second aspect of the invention, wherein, in the blowing step, the auxiliary gas is sprayed on the molten glass portion which is melted by the heating of the laser. 如申請專利範圍第1項至第3項中任一項所述的板玻璃的切斷方法,其中前述初期裂紋形成步驟是藉由使經由前述熔斷步驟所熔斷的兩板玻璃的對向端部互相碰撞或滑動而執行。 The method for cutting a sheet glass according to any one of the preceding claims, wherein the initial crack forming step is an opposite end portion of the two sheets of glass melted through the fusing step. Execute by colliding with each other or sliding. 如申請專利範圍第1項至第4項中任一項所述的板玻璃的切斷方法,其中經由前述熔斷步驟施加在前述拉伸應力區域鄰接 形成的壓縮應力區域的壓縮應力的值是在20MPa以上、且在1Gpa以下。 The method for cutting a sheet glass according to any one of the preceding claims, wherein the tensile stress region is adjacent to the tensile stress region. The value of the compressive stress in the formed compressive stress region is 20 MPa or more and 1 GPa or less. 如申請專利範圍第1項至第5項中任一項所述的板玻璃的切斷方法,其中前述板玻璃的厚度為500μm以下。 The method for cutting a sheet glass according to any one of the items 1 to 5, wherein the sheet glass has a thickness of 500 μm or less. 如申請專利範圍第1項至第6項中任一項所述的板玻璃的切斷方法,其中在前述加工步驟之執行後,且在前述熔斷步驟之執行前,對含有前述切斷預定線的前述板玻璃的端部執行加熱至徐冷點以上的加熱處理步驟。 The method for cutting a sheet glass according to any one of the preceding claims, wherein, after the execution of the processing step, and before the execution of the melting step, the cutting line is included The end portion of the aforementioned plate glass is subjected to a heat treatment step of heating to a point above the freezing point.
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