TW201433768A - Heat treatment furnace - Google Patents

Abstract

The present invention aims to suppress temperature deviation in a heat treatment region in a heat treatment furnace that supplies gas from gas feed pipes, while conducting a thermal treatment on a target object for heat treatment. In a heat treatment furnace 10, where a target object 15 for heat treatment is subjected to a continuous heat treatment by having the target object for heat treatment conveyed in a particular conveyance direction in a heat treatment region 12 of a furnace interior 2, feed pipes 4 are inserted, at plural locations in the conveying direction, into the furnace interior to be orthogonal to the conveyance direction to serve as gas-feeding pipes and the gas-feeding pipes are used in such a way that front ends 14a that are inserted into the furnace interior are closed; gas outlets 24 are arranged at plural locations in a length direction of circumferential walls 14b to jet gas to the furnace interior; and gas is supplied from open ends 14c opposite to the front ends. When a pair of gas feed pipes of the plural gas feed pipes inserted into the furnace interior that is adjacent to each other in the conveyance direction is observed, one gas feed pipe 4a and the other one gas feed pipe 4b are inserted into the furnace interior from the two sides that are opposite to each other.

Description

Heat treatment furnace

The present invention relates to a heat treatment furnace used for, for example, a manufacturing step of a ceramic electronic component, and more particularly to a heat treatment furnace for continuously heat-treating a heat-treated object while supplying gas (ambient gas) from a gas supply pipe.

For example, a ceramic electronic component such as a laminated ceramic capacitor is usually produced by heat-treating an uncalcined ceramic laminate (ceramic molded body) to remove a binder, and then a calcination step of performing a final calcination. The step or the calcination step is carried out using a heat treatment furnace configured to be able to control the atmosphere or temperature.

Regarding such a heat treatment furnace, a heat treatment furnace as shown in Fig. 13 has been proposed. The heat treatment furnace is a calcining furnace in which a plurality of rolls 103 are arranged along the longitudinal direction of the furnace body 101, and the calcined material M is transferred into the calcining chamber 102 by the rotation of the rolls 103, wherein the rolls 103 are hollow tubes. In the shape of the cylinder wall, a plurality of gas injection holes 105 are formed, and the gas supply source 106 is connected and connected to the outer open end 103a of the rolls 103.

In the heat treatment furnace, the atmosphere system is supplied from the end portion on one side of the roll 103, that is, the outer open end 103a, and therefore, the gas supplied from the gas injection hole 105 existing at a position close to the outer open end 103a is open to the outside. There is a large temperature difference between the gases supplied by the gas jet holes 105 at the end 103a. That is, the temperature of the gas supplied from the gas injection hole 105 close to the outer open end 103a is low, but since the roller 103 is heated in the combustion chamber, the temperature of the gas supplied from the gas injection hole 105 far from the outer open end 103a becomes high. .

As a result, there is a problem in that a temperature distribution is formed in the calcining chamber 102, which is difficult. A uniform calcination is achieved, resulting in uneven calcination.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 6-3070

The present invention has been made to solve the above problems, and an object of the invention is to provide a heat treatment furnace which supplies gas from a gas supply pipe and continuously heat-treating the object to be heat-treated, and the temperature deviation in the heat treatment zone is small, and stable calcination can be performed.

In order to solve the above problem, the heat treatment furnace of the present invention is characterized in that the heat treatment object is continuously heat-treated by the heat treatment object to be heat-treated in the heat transfer region in the heat transfer region in the specific heat transfer region, and The plurality of positions in the transport direction are inserted into the furnace body so as to be orthogonal to the transport direction, and the air supply duct is used as the air supply duct, and is attached to a plurality of positions along the longitudinal direction of the peripheral wall. Providing a gas discharge port for discharging a gas to the inside of the furnace body, and configured to supply gas from an open end located outside the furnace body, and observing a plurality of adjacent pairs of the gas supply pipes in the transport direction In the case of a gas pipe, one of the above-mentioned gas supply pipes and the other of the gas supply pipes are inserted into the inside of the furnace body from opposite sides.

In the present invention, the gas supply pipe is inserted into the inside of the furnace body so as to be orthogonal to the conveying direction of the heat-treated object, that is, the conveying direction of the air supply pipe and the heat-treated object is not limited to the literal meaning. The case of orthogonal insertion also allows deviation of the insertion direction, etc., which is generated in an actual device.

Further, in the heat treatment furnace of the present invention, preferably, the plurality of the gas outlets of the one gas supply pipe and the plurality of the gas supply pipes of the other gas supply pipe are viewed in a direction along the conveying direction The discharge ports are disposed to correspond to each other and to the above-mentioned transfer side To the position on the same line in parallel.

In the case where the gas ejection ports are disposed at positions corresponding to each other (that is, on the same line parallel to the conveying direction) when viewed in the direction along the conveying direction, the gases ejected from the gas ejection ports are mutually Collisions can occur, so the atmosphere inside the furnace can be stirred to suppress temperature deviation inside the furnace.

Further, in the heat treatment furnace of the present invention, a plurality of the gas discharge ports of the one gas supply pipe and the plurality of the other gas supply pipes may be formed in a state of being observed along the direction of the conveyance direction. The gas discharge ports are provided at positions on the same line that do not correspond to each other and are not parallel to the conveyance direction.

When the gas ejection ports are disposed at positions that do not correspond to each other as viewed in the direction along the conveying direction (that is, not on the same line parallel to the conveying direction), they are not self-set in the corresponding positions. The influence of the gas ejected from the gas discharge port can suppress the temperature deviation inside the furnace body.

Further, in the present invention, the gas discharge port of one air supply pipe and the gas discharge port of the other air supply pipe are disposed at positions that do not correspond to each other, that is, the gas discharge port is not located on the same line parallel to the conveyance direction, as an example. For example, a gas discharge port may be arranged in a zigzag manner on the air supply pipe adjacent to each other in the transport direction. Further, when viewed in the direction along the transport direction, the gas ejection ports are configured to be disposed at positions corresponding to each other or configured to be disposed at positions that do not correspond to each other, and are to be observed based on the interval of the gas ejection ports, and the like. The composition is more suitable for suppressing the temperature deviation inside the furnace body.

Moreover, it is preferable that the gas discharge ports of the pair of air supply pipes are disposed only in a region in which the air supply pipe is located in a region orthogonal to the conveyance direction in the region inside the furnace body. The center of the inside of the body is located on the front side of the gas supply pipe at the inner side.

In the gas supply port, the air supply pipe is disposed on the inner side of the inner side of the furnace body in a direction orthogonal to the conveying direction in the region of the air supply pipe located in the inner portion of the air supply pipe. In the case of the configuration of the front end side region, the supplied gas is sufficiently heated during the process before the gas supply pipe reaches the region passing through the center of the inner portion of the furnace body, so that the temperature of the gas supplied to the inside of the furnace body is increased, thereby suppressing and preventing the gas. Temperature deviation inside the furnace body.

Further, another heat treatment furnace according to the present invention is characterized in that the heat treatment target is continuously heat-treated by transporting the heat treatment target in a specific conveyance direction in the heat treatment region inside the furnace body, and the axial center is positioned and transported. The two gas supply pipes on the same line orthogonal to each other are opposite to each other so that the front end reaches the center of the inside of the furnace body in a direction orthogonal to the transfer direction, and the front ends are inserted in a direction opposite to each other. To each of a plurality of positions along the transport direction, and as the air supply pipe, an air supply pipe is provided which is provided with a gas for ejecting gas into the inside of the furnace body at a plurality of positions along the longitudinal direction of the peripheral wall. The discharge port is configured to supply gas from an open end located outside the furnace body.

Furthermore, the heat treatment furnace of the present invention is characterized in that the heat treatment target is continuously heat-treated by transporting the heat-treated object in a specific conveyance direction in the heat treatment region inside the furnace body, and from the conveyance direction Each of the plurality of positions is inserted into the furnace body so as to be perpendicular to the conveyance direction and penetrates the inside of the furnace body, and an air supply pipe is used as the air supply pipe, and both ends are opened. The end portion is blocked in communication at the central portion, and a gas discharge port for discharging gas to the inside of the furnace body is provided at a plurality of positions along the longitudinal direction of the peripheral wall, and is configured to supply gas from the respective open ends of the both ends. The gas is supplied to the inside of the furnace through the gas discharge port.

As described above, the heat treatment furnace of the present invention inserts the gas supply pipe into the inside of the furnace body at a plurality of positions along the conveyance direction so as to be orthogonal to the conveyance direction, and uses the following gas supply pipe as the gas supply pipe system. a gas discharge port for discharging gas into the inside of the furnace body at a plurality of positions in the longitudinal direction of the peripheral wall, and is configured to open from the outside of the furnace body When the gas is supplied to the gas supply, and in the case where one of the plurality of gas supply pipes inserted into the inside of the furnace body is adjacent to the gas supply pipe in the conveying direction, one gas supply pipe and the other gas supply pipe are opposite each other. Both sides are inserted into the inside of the furnace. Therefore, the temperature of one gas supply pipe system gradually rises toward the front end side, and the other gas supply pipe gradually rises toward the front end side on the side opposite to the above-mentioned one gas supply pipe. In other words, since the temperature distribution in the direction orthogonal to the direction in which the gas is supplied from the one gas supply pipe and the other gas supply pipe is symmetrical with each other, the inside of the furnace body can be mixed by mixing them. The temperature deviation is reduced so that a good heat treatment can be performed in a stable atmosphere.

Further, in another heat treatment furnace according to the present invention (the second heat treatment furnace of the present invention), the two air supply pipes whose axial centers are located on the same line orthogonal to the conveyance direction reach the opposite ends from the opposite sides The center of the inside of the furnace body in the direction orthogonal to the conveying direction, and the front ends are inserted into the respective positions at a plurality of positions along the conveying direction. Therefore, the position of the gas discharge port of the air supply pipe inserted from one side is point-symmetric with the position of the gas discharge port of the air supply pipe inserted from the other side, and therefore the temperature distribution is also substantially symmetrical. Further, by mixing the gas ejected from the gas discharge port, the temperature deviation inside the furnace body can be reduced, and a good heat treatment can be performed in a stable atmosphere.

Further, in another heat treatment furnace according to the present invention (the third heat treatment furnace according to the present invention), each of the plurality of positions along the conveyance direction is orthogonal to the conveyance direction and penetrates from the respective positions of the furnace body. An air supply pipe is inserted into the inside of the furnace body, and both ends of the air supply pipe are open ends, and are blocked at the central portion, and are disposed at a plurality of positions along the longitudinal direction of the peripheral wall to discharge gas into the furnace body. The gas discharge port is configured such that gas supplied from each open end of both ends is supplied to the inside of the furnace through the gas discharge port. Therefore, the gas can be supplied from both sides to the inside of the furnace by inserting one of the gas supply pipes so as to penetrate the inside of the furnace body, thereby obtaining the effect of the second heat treatment furnace according to the present invention.

1‧‧‧ furnace body

2‧‧‧ Inside the furnace

3‧‧‧heating components (heaters)

4‧‧‧ gas supply pipe

4a‧‧‧One of the air supply pipes

4b‧‧‧Another air supply pipe in a pair of air supply pipes

4c, 4d‧‧‧Two air supply pipes on the same axis

6‧‧‧ Roll

7‧‧‧Transportation agency

8‧‧‧Baffle

10‧‧‧heat treatment furnace

10a‧‧‧Comparative heat treatment furnace

12‧‧‧ Heat treatment area

14a‧‧‧ front end of gas supply pipe

14b‧‧‧The wall of the gas supply pipe

14c‧‧‧ open end of gas supply pipe

15‧‧‧ Heat-treated objects (boxes containing uncalcined ceramic shaped bodies)

24‧‧‧ gas outlet

44‧‧‧ Both ends become open air supply pipes

44a‧‧‧ Both ends become the open end of the open end of the gas supply pipe

44b‧‧‧ Both ends become the open wall of the gas supply pipe

44c‧‧‧ Both ends become the central part of the open air supply pipe

101‧‧‧ furnace body

102‧‧‧calcining room

103‧‧‧ Roll

103a‧‧‧External open end

105‧‧‧jet holes

106‧‧‧ gas supply

A‧‧‧Transfer direction

M‧‧‧ burned

Fig. 1 is a side sectional view showing the configuration of a heat treatment furnace according to an embodiment (Embodiment 1) of the present invention.

Fig. 2 is a plan sectional view showing the structure of a heat treatment furnace according to Embodiment 1 of the present invention.

Fig. 3 is a front cross-sectional view showing the structure of a heat treatment furnace according to Embodiment 1 of the present invention.

Fig. 4 is a view schematically showing an arrangement of an air supply pipe of the heat treatment furnace according to the first embodiment of the present invention.

Fig. 5 is a view schematically showing the arrangement of the air supply pipes in the heat treatment furnace for comparison.

Fig. 6 is a view showing the temperature deviation inside the furnace body obtained by the heat treatment furnace of the first embodiment and the comparison.

Fig. 7 is a view schematically showing an arrangement of an air supply pipe of a heat treatment furnace according to a second embodiment of the present invention.

Fig. 8 is a view schematically showing an arrangement of an air supply pipe of a heat treatment furnace according to a third embodiment of the present invention.

Fig. 9 is a view schematically showing an arrangement of an air supply pipe of a heat treatment furnace according to a fourth embodiment of the present invention.

Fig. 10 is a view schematically showing an arrangement of an air supply pipe of a heat treatment furnace according to a fifth embodiment of the present invention.

Fig. 11 is a view schematically showing an arrangement of an air supply pipe of a heat treatment furnace according to a sixth embodiment of the present invention.

Fig. 12 is a view schematically showing an arrangement of an air supply pipe of the heat treatment furnace according to Embodiment 7 of the present invention.

Fig. 13 is a cross-sectional view schematically showing the configuration of a prior heat treatment furnace.

Hereinafter, the present invention will be described in further detail with reference to the embodiments of the present invention.

Further, in the following embodiments, a heat treatment furnace used for heat-treating an unfired ceramic formed body in the case of manufacturing a ceramic electronic component will be described as an example.

[Embodiment 1]

1 is a side cross-sectional view showing a configuration of a heat treatment furnace 10 according to an embodiment (Embodiment 1) of the present invention, FIG. 2 is a plan cross-sectional view thereof, and FIG. 3 is a front cross-sectional view.

As shown in FIGS. 1, 2, and 3, the heat treatment furnace 10 is provided inside the furnace body 1 (inside the furnace body) 2: a heating member (heater) 3; and an air supply pipe 4 that supplies a gas for adjusting the atmosphere; The transport mechanism 7 is provided with a roller 6 or the like for transporting a heat-treated object (a cassette containing an unfired ceramic formed body) 15 in a specific transport direction (direction indicated by an arrow A in FIGS. 1 and 2). .

Further, a partition 8 that functions to control the amount of gas and temperature in each zone is provided inside the furnace body 2.

The heat treatment furnace 10 is configured to continuously perform heat treatment by sequentially passing a plurality of heat treatment objects 15 through the heat treatment region 12 of the furnace interior 2 (passing in the direction of arrow A (Fig. 1, 2)).

Further, in the heat treatment furnace 10 of the first embodiment, as shown in Figs. 1, 2, and 3, a plurality of air supply pipes 4 are inserted in a plurality of positions along the conveyance direction A so as to be orthogonal to the conveyance direction A. The inside of the furnace body 2.

Further, when observing a pair of adjacent air supply pipes (for example, 4a, 4b of FIG. 2) in the conveying direction of the plurality of air supply pipes 4 inserted into the inside 2 of the furnace body, an air supply pipe 4 (4a) The other air supply pipe 4 (4b) is inserted into the furnace interior 2 from opposite sides of each other.

Further, each of the air supply pipes 4 (4a, 4b) is configured to be inserted into the furnace body 2 from either of the furnace wall sides, and the front end side is supported by the other furnace wall, thereby stably supporting the furnace body 1.

Further, as the air supply pipe 4, it is generally used to have heat resistance such as ceramic or heat resistant metal. Material composition of sex.

Further, in order to facilitate the understanding of the invention, FIG. 4 schematically shows an arrangement of the air supply pipes focusing on the pair of air supply pipes 4 (4a, 4b).

The air supply pipe 4 (4a, 4b) is configured such that, as shown in Fig. 2, Fig. 3, Fig. 4, etc., the front end 14a is inserted into the furnace body interior 2, and as shown in Figs. 3 and 4, A gas discharge port 24 for discharging gas into the furnace interior 2 is provided at a plurality of positions in the longitudinal direction of the peripheral wall 14b, and gas is supplied from the gas supply pipe 4 to the gas supply pipe 4 from the open end 14c located outside the furnace body 1 on the opposite side of the front end 14a. The discharge port 24 is supplied to the inside 2 of the furnace body.

In the first embodiment and the following embodiments, the gas discharge port 24 may be configured to eject the gas directly downward, for example, or may be configured to eject the gas forward or backward at a certain angle.

There is a case where the control of the atmosphere can be performed efficiently by appropriately controlling the direction of the jet.

However, in the first embodiment and the following embodiments, the case where the gas is ejected directly from the gas ejection port 24 will be described as an example.

Further, in the first embodiment, the air supply pipe 4 is used for the air supply pipe 4 having about 20 gas discharge ports 24 along the longitudinal direction in the region of the furnace interior 2. However, there is no limitation on the number of the outlets 24 of the air outlet, and the number of the installations can be set in consideration of various conditions such as the actual structure and size of the heat treatment furnace.

Further, the size or specific shape of the air supply pipe 4, the pitch or the number of the arrangement, and the like are also not particularly limited.

Further, in the first embodiment, in the case where the air supply pipe 4 (4a) and the other air supply pipe 4 (4b) are viewed in the direction along the transport direction A, the gas discharge ports 24 are formed to correspond to each other. The position (that is, formed in the same line as the parallel direction to the transport direction A).

In the case of the heat treatment furnace 10 thus constituted, one of the air supply pipes 4 (4a) and the other air supply pipe 4 (4b) are opposite to each other in the air supply pipes 4 (4a, 4b) adjacent to each other. Inserted on both sides Into the inside of the furnace body 2, therefore, the temperature of the gas supplied to the gas supply pipe 4 (4a) from one side to the inside of the furnace body 2 gradually rises toward the front end side, and the other gas supply pipe inserted into the inside 2 of the furnace body from the opposite side 4 (4b) is also such that the temperature of the gas gradually rises toward the front end side opposite to the case of the above-described one air supply pipe 4 (4a). As a result, since the temperature distribution of the gas supplied from the pair of air supply pipes 4 (4a, 4b) in the direction orthogonal to the conveyance direction A is symmetrical with each other, the furnace body can be mixed by mixing them. The temperature deviation of the portion 2 is reduced, so that a good heat treatment can be performed in a stable atmosphere.

Further, for comparison, as shown schematically in Fig. 5, a heat treatment furnace in which all the gas supply pipes are inserted into the furnace interior 2 from the same direction, that is, adjacent ones of the pair of gas supply pipes 4 (4a, 4b) are produced from the same The heat treatment furnace (comparative heat treatment furnace) 10a inserted into the inside of the furnace body 2, together with the heat treatment furnace 10 of the first embodiment, is used to ascertain the magnitude of the positional deviation of the temperature inside the furnace body 2.

Further, other conditions of the heat treatment furnace 10a for comparison are the same as those of the heat treatment furnace 10 of the first embodiment.

When the magnitude of the positional deviation of the temperature inside the furnace body 2 is ascertained, the temperature inside the furnace body 2 is measured at five points indicated by reference numerals 1, 2, 3, 4, and 5 in Figs. 4 and 5 .

As a result, as shown in FIG. 6, when the gas supply pipe 4 was inserted from the same direction into the heat treatment furnace 10a for comparison in the furnace interior 2, the temperature deviation inside the furnace body 2 was large, and the temperature deviation was large. In the case of the heat treatment furnace 10 of the first embodiment in which one of the air supply pipes 4 (4a, 4b) and the other one of the air supply pipes 4 (4a, 4b) are mutually opposite each other and inserted into the furnace interior 2 The temperature deviation inside the furnace body 2 becomes small.

[Embodiment 2]

In the second embodiment, a heat treatment furnace different from the heat treatment furnace 10 of the first embodiment will be described.

Fig. 7 is a view schematically showing the configuration of the heat treatment furnace 10 according to the second embodiment of the present invention. In the heat treatment furnace 10 of the second embodiment, as the air supply pipe 4, the following length is used. Air supply pipe 4 (4a, 4b): when the air supply pipes 4 (4a, 4b) are adjacent to each other, one air supply pipe 4 (4a) and the other air supply pipe 4 (4b) are opposite to each other. Both sides reach the center of the interior 2 of the furnace body.

Further, the gas discharge port 24 formed in one air supply pipe 4 (4a) has a point symmetrical relationship with the gas discharge port 24 formed in the other air supply pipe 4 (4b).

Therefore, in the case of the heat treatment furnace 10 of the second embodiment, the temperature distribution in the direction orthogonal to the conveyance direction A of the gas supplied from one air supply pipe and the other air supply pipe is symmetrical with each other. The temperature distribution inside the furnace body can be reduced by mixing them, thereby suppressing the temperature deviation inside the furnace body.

[Embodiment 3]

Fig. 8 is a view schematically showing the configuration of a heat treatment furnace 10 according to still another embodiment (Embodiment 3) of the present invention. In the third embodiment, as the air supply pipe 4, the air supply pipes 4 (4a, 4b) having the following lengths are used: when the air supply pipes 4 (4a, 4b) are adjacent to each other, an air supply pipe 4 is used ( 4a) and the length of the other air supply pipe 4 (4b) is shorter than that of the air supply pipe 4 (4a, 4b) used in the second embodiment, and is inserted into the interior 2 of the furnace body from opposite sides of each other. Can not reach the center of the inside of the furnace body 2.

However, in the third embodiment, the gas discharge port 24 formed in the air supply pipe 4a and the gas discharge port 24 formed in the air supply pipe 4b are formed in point symmetry.

Therefore, in the case of the heat treatment furnace 10 of the third embodiment, the temperature of the gas supplied from one air supply pipe 4 (4a) and the other air supply pipe 4 (4b) in the direction orthogonal to the conveyance direction A is also distributed. Since they are mutually symmetrical, the temperature distribution inside the furnace body can be reduced by mixing them, and the temperature deviation inside the furnace body can be suppressed.

[Embodiment 4]

Fig. 9 is a view schematically showing the configuration of a heat treatment furnace 10 according to still another embodiment (Embodiment 4) of the present invention. In the above-described fourth embodiment, as the air supply pipe 4, the following air supply pipes 4 (4a, 4b) are used: as a case where the air supply pipes 4 (4a, 4b) are adjacent to each other. In the same manner as the air supply pipe used in the first embodiment, one of the air supply pipe 4 (4a) and the other air supply pipe 4 (4b) has a length from one end to the other end of the furnace interior 2, but the gas spray The positional relationship of the outlet 24 is different from that of the air supply pipe used in the first embodiment.

That is, in the fourth embodiment, in the case where the air supply pipe 4 (4a) and the other air supply pipe (4b) are viewed in the direction along the transport direction A, the gas discharge ports 24 are formed not to correspond to each other. The position (that is, it is arranged in a zigzag manner so as not to be on the same line parallel to the conveyance direction A).

In the case of the heat treatment furnace 10 of the fourth embodiment, in the case where the pair of air supply pipes 4 (4a, 4b) are viewed in the direction along the conveyance direction A, the gas discharge ports 24 are formed not to correspond to each other. Therefore, the gas ejected from the gas ejection port 24 of one air supply pipe 4 (4a) and the gas ejected from the gas discharge port 24 of the other air supply pipe 4 (4b) do not interfere with each other, so that the inside of the furnace body can be suppressed. 2 temperature deviation.

[Embodiment 5]

Fig. 10 is a view schematically showing the configuration of a heat treatment furnace 10 according to still another embodiment (Embodiment 5) of the present invention. In the above-described fifth embodiment, as the air supply pipe 4, the following air supply pipes 4 (4a, 4b) are used as one of the air supply pipes 4 as one of the adjacent air supply pipes 4 (4a, 4b). (4a) and the other air supply pipe 4 (4b) have the length from one end portion to the other end portion of the furnace body 2 in the same manner as the air supply pipe used in the first embodiment, but the positional relationship between the gas discharge port 24 and The air supply pipe used in the first embodiment is different.

That is, in the fifth embodiment, the gas supply port 4 (4a) and the gas supply port 24 of the other air supply pipe 4 (4b) are disposed only in the area where the air supply pipe 4 (4a, 4b) is located in the furnace body. In the region of the portion 2, the front end side region of the gas supply pipe is located further inward than the center of the furnace interior 2 in the direction orthogonal to the conveying direction A.

In the case of the heat treatment furnace 10 of the fifth embodiment configured as described above, the gas discharge port 24 is disposed only in the center of the furnace interior 2 in the region of the gas supply pipe 4 (4a, 4b) located inside the furnace body 2. The area on the inside, therefore, the supplied gas will pass through the gas supply pipe 4 (4a, 4b) is sufficiently heated before reaching the region beyond the center of the inner portion 2 of the furnace body, and the temperature can be sufficiently supplied to the inside of the furnace body 2 from the gas discharge port 24 disposed only in the region closer to the inner side than the center. The rising gas can reliably suppress and prevent the temperature deviation inside the furnace body 2.

[Embodiment 6]

Fig. 11 is a view schematically showing the configuration of a heat treatment furnace 10 according to still another embodiment (Embodiment 6) of the present invention.

In the heat treatment furnace 10 of the above-described sixth embodiment, the two (a pair of) air supply pipes 4 (4a, 4b) located on the same axis orthogonal to the conveyance direction A are reached and transported from the opposite ends by the front end 14a. The center of the inside 2 of the furnace body in the direction orthogonal to the direction A, and the front ends 14a are inserted into each other at a plurality of positions along the transport direction A, and are configured to be open from the outside of the furnace body. End 14c supplies gas.

In the case of the heat treatment furnace 10 of the sixth embodiment thus constructed, the position of the gas discharge port 24 of the air supply pipe 4 (4c) inserted from one side and the gas discharge port of the air supply pipe 4 (4d) inserted from the other side. Since the position of 24 becomes a symmetrical relationship, the temperature distribution inside the furnace body 2 is also symmetric as described above, and the temperature deviation of the inside 2 of the furnace body can be suppressed and prevented. As a result, good heat treatment can be performed in a stable atmosphere.

[Embodiment 7]

Fig. 12 is a view schematically showing the configuration of a heat treatment furnace 10 according to still another embodiment (Embodiment 7) of the present invention.

In the seventh embodiment, the air supply pipe 44 is inserted into the furnace interior 2 at a plurality of positions along the conveyance direction A so as to be orthogonal to the conveyance direction A and penetrate the furnace interior 2. Further, as the air supply pipe 44, a configuration is adopted in which both ends are open ends 44a, and the central portion 44c is connected to be blocked, and is disposed at a plurality of positions along the longitudinal direction of the peripheral wall 44b on both sides of the central portion 44c. A gas discharge port 24 for discharging a gas to the inside 2 of the furnace body is provided.

Further, the gas supplied from the respective open ends 44a at both ends of the air supply pipe 44 is supplied to the furnace interior 2 via the gas discharge port 24.

In the case of the heat treatment furnace 10 of the seventh embodiment configured as described above, by inserting one of the air supply pipes 44 so as to penetrate the inside of the furnace body 2, gas can be supplied from the open ends 44a of the both sides to the furnace interior 2, whereby The same effects as those of the heat treatment furnace of the sixth embodiment were obtained.

Furthermore, the present invention is not limited to the above-described embodiment, and various applications, changes, and the like can be added to the scope of the invention for the structure inside the furnace body, the specific configuration of the conveying mechanism or the heating member, and the like.

1‧‧‧ furnace body

2‧‧‧ Inside the furnace

3‧‧‧heating components (heaters)

4‧‧‧ gas supply pipe

4a‧‧‧One of the air supply pipes

4b‧‧‧Another air supply pipe in a pair of air supply pipes

6‧‧‧ Roll

7‧‧‧Transportation agency

8‧‧‧Baffle

10‧‧‧heat treatment furnace

12‧‧‧ Heat treatment area

15‧‧‧ Heat-treated objects (boxes containing uncalcined ceramic shaped bodies)

A‧‧‧Transfer direction

Claims (6)

A heat treatment furnace in which a heat treatment target is continuously heat-treated by a heat treatment target in a heat transfer region in a furnace body in a specific conveyance direction, and at a plurality of positions along the conveyance direction, An air supply pipe is inserted into the furnace body so as to be orthogonal to the conveyance direction, and an air supply pipe is provided as the air supply pipe, and is provided at a plurality of positions along the longitudinal direction of the peripheral wall for the inside of the furnace body a gas discharge port for ejecting a gas, and configured to supply a gas from an open end located outside the furnace body, and to observe one of the plurality of gas supply pipes adjacent to each other in the conveying direction in the conveying direction, The gas supply pipe and the other gas supply pipe are inserted into the inside of the furnace body from opposite sides of each other. The heat treatment furnace of claim 1, wherein the plurality of gas discharge ports of the one gas supply pipe and the plurality of gas discharge ports of the other gas supply pipe are disposed at each other when viewed in a direction along the conveying direction Corresponding to the position on the same line parallel to the above-described transport direction. The heat treatment furnace of claim 1, wherein the plurality of gas discharge ports of the one gas supply pipe and the plurality of gas discharge ports of the other gas supply pipe are disposed at a position when viewed in a direction along the conveying direction Corresponding to each other and not on the same line as the above-described transport direction. The heat treatment furnace according to any one of claims 1 to 3, wherein the gas discharge ports of the pair of gas supply pipes are disposed only in an area in which the gas supply pipe is located in an area inside the furnace body The front end side region of the air supply pipe at a portion on the inner side of the center of the inside of the furnace body in the direction orthogonal to the direction. A heat treatment furnace characterized in that it is due to a heat treatment zone inside the furnace body The heat-treated object is conveyed in a specific transport direction in the domain, and the heat-treated object is continuously heat-treated, and the two air supply pipes whose axial centers are located on the same line orthogonal to the transport direction are reached at the opposite ends from each other. The center of the inside of the furnace body in the direction orthogonal to the conveyance direction, and the front ends are inserted into a plurality of positions along the conveyance direction, and the air supply pipe is used as follows. The air pipe is provided with a gas discharge port for discharging a gas into the furnace body at a plurality of positions along the longitudinal direction of the peripheral wall, and is configured to supply gas from an open end located outside the furnace body. A heat treatment furnace in which a heat treatment target is continuously heat-treated by transporting a heat-treated object in a specific conveyance direction in a heat treatment region inside the furnace body, and from a plurality of positions along the conveyance direction Each of the furnaces has an air supply pipe inserted into the furnace body so as to be perpendicular to the conveyance direction and penetrates the inside of the furnace body. As the air supply pipe, the following air supply pipe is used, and both ends thereof are open ends at the center. The communication is blocked, and a gas discharge port for discharging gas into the furnace body is provided at a plurality of positions along the longitudinal direction of the peripheral wall, and the gas supplied from each of the open ends of the both ends is configured to pass through the gas discharge port. It is supplied to the inside of the above furnace body.