TW201424906A - Apparatus and method for laser processing - Google Patents

Abstract

An apparatus for laser processing is used to trim an end surface of a glass sheet. The apparatus for laser processing includes a laser-outputting module, a laser-controlling module, and a moving control module. The laser-outputting module output a laser beam to the laser-controlling module, and the laser-controlling module adjusts an energy density of the laser beam and then makes the laser beam irradiate on the end surface, wherein a diameter of the laser beam on the end surface is greater than or equal to a width of the end surface. The moving control module carries and rotates the glass sheet at a first speed to make the laser beam irradiate on the end surface in a surround manner to generate a peeling. The energy density corresponds to the first speed. Thus, the apparatus for laser processing can use the laser beam to remove the defects of the end surface.

Description

Laser processing device and method thereof

This proposal relates to a laser processing apparatus and method therefor, and more particularly to a laser processing apparatus and method for removing defects on the end faces of glass sheets using laser beams.

Due to the hard and brittle physical properties of the glass sheet, after the glass sheet is processed by a wheel cutter or a laser cutting or a breaking, the section of the glass sheet (hereinafter referred to as the end surface) may be produced by processing the glass sheet. Micro-crack, these micro-cracks will reduce the strength of the glass plate, which will cause the glass plate to be brittle.

In order to remove the microcracks on the end faces of the glass sheets to increase the strength of the glass sheets, it is proposed to trim the end faces of the glass sheets by mechanical grinding so that the end faces of the glass sheets are smooth. However, since the glass plate is trimmed by mechanical edging, there is a problem that the processing speed is too slow (the speed is about 10 to 80 mm/s), the processing time is too long, and the end face still has microcracks, and when the thickness of the glass plate is too thin, (ie thickness ≦ 0.1mm), mechanical edging is easy to cause fragmentation.

The present invention is to provide a laser processing apparatus and a method thereof, which solve the prior art that the processing speed is too slow due to the use of mechanical edging to trim the glass sheet, the end surface still has micro cracks, and when the thickness of the glass sheet is too thin (ie, thickness ≦ 0.1mm), mechanical edging is easy to cause fragmentation problems.

An embodiment of the laser processing apparatus disclosed in the present proposal is for trimming an end surface of a glass plate, the laser processing device comprising a laser output module and a laser control module Group with a mobile control module. The mobile control module is configured to carry the glass plate and rotate the glass plate at a first speed. The laser output module is configured to output a laser beam to the end surface to split a glass shaving layer, wherein the laser beam has an illumination diameter corresponding to the end surface, and the illumination diameter is greater than or equal to a width of the end surface. The laser control module is used to adjust an energy density of the laser beam, and the energy density corresponds to the first speed.

Another embodiment of the laser processing apparatus disclosed in the present proposal is for trimming an end surface of a glass plate. The laser processing apparatus comprises a laser output module, a laser control module and a carrier module. The carrying module is used to carry and fix the glass plate. The laser output module is configured to output a laser beam, and the laser beam surrounds the illumination end surface at a second speed to split a glass shaving layer, wherein the laser beam has an illumination diameter on the end surface, and the illumination diameter Greater than or equal to a width of the end face. The laser control module is configured to adjust an energy density of the laser beam, and the energy density corresponds to the second speed.

An embodiment of the laser processing method disclosed in the present proposal includes the steps of rotating a glass sheet at a first speed, wherein the glass sheet includes an end surface. An energy density of a laser beam is adjusted according to the first speed. The end face is irradiated with a laser beam to split a glass shaving layer, wherein the laser beam has an illumination diameter on the end surface, and the illumination diameter is greater than or equal to a width of the end surface.

Another embodiment of the laser processing method disclosed in the present proposal includes the steps of causing a laser control module to surround an end surface of a glass sheet at a second speed. An energy density of a laser beam is adjusted according to the second speed. The laser beam surrounds the illumination end surface, and a glass shaving layer is cracked. The laser beam has an illumination diameter on the end surface, and the illumination diameter is greater than or equal to a width of the end surface.

According to the embodiment of the laser processing apparatus and method thereof disclosed in the above proposal, The laser beam is used to remove defects on the end faces of the glass sheets. The surface of the laser beam can be moved by rotating the glass plate, or the glass plate is not moved around the end surface of the glass plate, so as to solve the prior art, the processing speed is too slow due to the mechanical edging of the glass plate. There are still microcracks and when the thickness of the glass plate is too thin (i.e., thickness ≦ 0.1 mm), mechanical edging is liable to cause a problem of fragmentation. The energy of the laser beam irradiated to the end face can be made nearly the same by the energy density of the laser beam corresponding to the first speed or the second speed.

The features, implementation and efficacy of this proposal are described in detail below with reference to the preferred embodiment of the drawings.

Please refer to FIG. 1 and FIG. 2A for a schematic arrangement of a laser processing apparatus and a circular glass plate according to an embodiment of the present invention and a laser beam irradiation according to FIG. A perspective view of a first embodiment of a glass sheet. The space in which the laser processing apparatus 100 is located has a first direction x, a second direction y, and a third direction z, and the first direction x, the second direction y, and the third direction z are perpendicular to each other. The glass plate 50 includes an end surface 52 and a first surface 54 and a second surface 56 opposite to each other. The end surface 52 connects the first surface 54 and the second surface 56. The end surface 52 has a width t ₁ and the width t ₁ may be between Between ten micrometers (um) and fifty millimeters (millimeter, mm). In this embodiment, the glass plate 50 may be a circular plate, and both the first surface 54 and the second surface 56 may be circular surfaces, the end surface 52 may be an annular side surface surrounding the glass plate 50, and the width t ₁ is a glass plate. 50 thickness.

In the present embodiment, the laser processing apparatus 100 is used to trim the end face 52 of the glass sheet 50. The laser processing apparatus 100 includes a laser output module 200, a laser control module 300, and a motion control module 400. The laser output module 200 is configured to output a laser beam 60, wherein the wavelength of the laser beam 60 can be between ten nanometers (nm) and twelve micrometers. The laser control module 300 receives the laser beam 60 and adjusts the energy density of the laser beam 60 to illuminate the laser beam 60 to the end face 52. The energy density of the laser beam 60 can be between one joule and five centimeters per square centimeter. Between the hundred joules, and the laser beam 60 has an illumination diameter D ₁ on the end face 52, the illumination diameter D _{1 being} greater than or equal to the width t ₁ . The motion control module 400 is used to carry and rotate the glass plate 50 at a first speed such that the laser beam 60 surrounds the illumination end face 52. The mobile control module 400 is coupled to the laser control module 300 such that the energy density of the laser beam 60 corresponds to the first speed.

On the end face 52 of the glass plate 50, due to the temperature gradient between the irradiated area and the unirradiated area of the laser beam 60, when the tensile stress generated by the temperature gradient is greater than the tensile strength of the glass material, the end face 52 is caused by 劈The crack produces a layer of glass shavings 70 which in turn causes the end surface 52 to be a smooth surface to remove defects in the end surface 52. Wherein, the thickness G of the glass shaving layer 70 may be between one micrometer and one millimeter.

In the present embodiment, the irradiation diameter D ₁ is equal to the width t ₁ , and the movement control module 400 rotates the glass sheet 50 in the P direction (ie, the counterclockwise direction), but this embodiment is not intended to limit the proposal. For example, the illumination diameter D ₁ can be greater than the width t ₁ , and the movement control module 400 can rotate the glass plate 50 clockwise, which can be adjusted according to actual needs. In addition, the laser control module 300 may further include an optical path guiding unit 302 to guide the laser beam 60 to the end surface 52. The optical path guiding unit 302 may further include a scanning device. The mobile control module 400 further includes a central fixing unit 40. The central fixing unit 40 can fix the center point of the glass plate 50 to the mobile control module 400, so that the mobile control module 400 can rotate the glass in a manner similar to the constant speed. Board 50.

Please refer to "2B" and "2C", which are schematic perspective views of a second embodiment and a third embodiment in which a laser beam according to "Fig. 1" is irradiated onto a glass sheet. The laser processing apparatus 100 may further include a blowing nozzle 88 that outputs the cooling gas 89 to the glass sheet 50 or the end surface 52 that is illuminated by the laser beam 60 to increase the illuminated area and the unirradiated area of the laser beam 60. Temperature gradient between.

Please refer to "FIG. 1", "2A" and "3A", and "3A" is a flow chart of the first embodiment of the laser processing method according to the present proposal. Laser processing methods include:

Step S500: rotating the glass plate at a first speed, wherein the glass plate includes an end surface.

Step S502: Adjust the energy density of the laser beam according to the first speed.

Step S504: irradiating the end surface with the laser beam to split the glass shaving layer, wherein the laser beam has an irradiation diameter on the end surface, and the irradiation diameter is greater than or equal to the width of the end surface.

In step S500, the mobile control module 400 carries the glass plate 50 and rotates the glass plate 50 at a first speed, wherein the rate of change of the first speed is less than or equal to 20% (ie, the mobile control module 400 approaches, etc. Rotate the glass plate 50) in a quick manner. Next, in step S502, since the motion control module 400 is coupled to the laser control module 300, the energy density of the laser beam 60 corresponds to the first speed (ie, the energy density change rate of the laser beam 60 is less than or equal to the percentage). Twenty)) so that the energy of the laser beam 60 irradiated to the end face 52 when the step S504 is performed approaches the same. It should be noted that the illumination diameter D _{1 of the} laser beam 60 on the end face 52 is greater than or equal to the width t _{1 of the} end face 52.

In addition, step S500 can include the mobile control module controlling the glass at a time interval The plate rotates continuously. In the present embodiment, the mobile control module 400 carries the glass plate 50 and continuously rotates the glass plate 50 at a first speed for a predetermined time interval until the end faces 52 of the glass plate 50 are all cracked out of the glass shaving layer 70. However, this embodiment is not intended to limit the proposal.

For example, step S500 can include the mobile control module controlling the multi-segment rotation of the glass sheet at a time interval. In the present example, the glass sheet 50 may be a square glass sheet, and the end surface 52 may be four side surfaces surrounding the glass sheet 50. The motion control module 400 can move the square glass plate 50 linearly displaced such that a portion of the end face 52 surrounding the glass plate 50 is split by the laser beam 60 out of the glass chip layer 70. Then, the mobile control module 400 can move the glass plate 50 back to the displacement, and then control the glass plate 50 to rotate at least one angle. Next, the movement control module 400 can repeat the above steps to cause the end faces 52 of the glass sheets 50 to be completely split out of the glass shaving layer 70.

In more detail, since the glass plate 50 can be a square glass plate, the movement control module 400 can move the glass plate 50 linearly displaced so as to surround the partial end faces 52 of the glass plate 50 (ie, the four side surfaces surrounding the glass plate 50). a) being deflected by the laser beam 60 out of the glass shaving layer 70, then repositioning the glass sheet 50, and controlling the glass sheet 50 to rotate by ninety degrees, repeating the above steps until the entire end surface 52 of the surrounding glass 50 (ie, surrounding the glass sheet) The four side surfaces of 50) rupture the glass shaving layer 70. In addition, in the present example (ie, the glass plate 50 may be a square glass plate, and the end surface 52 may be four side surfaces surrounding the glass plate 50), the movement control module 400 controls the plurality of rotations of the glass plate 50 at a time interval. The method comprises: forming at least one lead angle at at least one end angle of the glass plate 50, and the radius of curvature of the lead angle is between 0.1 mm and 20 mm. That is, the glass plate 50 is at least one after trimming the end faces 52 (ie, surrounding the four side surfaces of the glass plate 50) The corners form a guide angle having a radius of curvature of between 0.1 mm and 20 mm.

Please refer to "2B" and "3B", and "3B" is a flow chart of the second embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the above steps S500, S502, and S504, the method further includes:

Step S390: pre-engraving a mark on the end face to serve as a starting point of the end face of the split glass plate.

Step S506: The cooling gas is applied to the glass plate.

Wherein, before step S390 is performed in step S500, the score 51 can be engraved by using a mechanical cutter or a laser beam. Step S506 can be implemented synchronously when performing step S504 to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed, but this embodiment is not intended to limit the proposal. For example, step S506 may also be performed before step S504, before step S502, step S502, before step S500, or at step S500.

Please refer to "2C" and "3C", and "3C" is a flow chart of the third embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the above steps S390, S500, S502, and S504, the method further includes:

Step S508: applying a cooling gas to the end surface after being irradiated by the laser beam.

The step S508 can be performed after the step S504 is performed to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed.

In the above embodiment, since the distance between the laser control module 300 and the end surface 52 of the circular glass plate (ie, the glass plate 50) in the third direction z is constant, the laser beam 60 is irradiated to the end face 52. The energy is not affected by the above-described distance in the third direction z, so that the splitting of the end face 52 of the glass plate 50 can be directly performed without stopping the output of the laser beam 60 by the laser output module 200, but when the glass is When the plate 90 is a non-circular glass plate (that is, when the distance between the laser control module 300 and the end surface 92 of the glass plate 90 in the third direction is not constant, such as "4A" and "4B" The distance between the laser control module 300 and the end surface 92 of the glass plate 90 in the third direction z is not constant, so that the energy of the laser beam 60 irradiated to the end surface 92 is affected by the third direction. The effect of the distance on z. Therefore, in the following embodiments, the laser control module 300 further includes a zoom unit 304 to change the focal length of the laser beam 60. The energy of the laser beam 60 irradiated to the end surface 92 is not affected by the laser control module 300 and the end surface 92. For the influence of the distance between the third direction z, please refer to the following description for a detailed description.

Please refer to "4A", "4B" and "5A", which are schematic diagrams of a laser processing apparatus according to another embodiment of the present proposal and a square glass plate rotated in a first position, according to A schematic view of a laser processing apparatus of "Ath 4A" and a square glass plate rotated at a second position, and a first embodiment of a laser beam irradiated to a glass plate according to "Ath 4A". The space in which the laser processing apparatus 100 is located has a first direction x, a second direction y, and a third direction z, and the first direction x, the second direction y, and the third direction z are perpendicular to each other. The glass plate 90 includes an end surface 92 and a first surface 94 and a second surface 96 opposite to each other. The end surface 92 connects the first surface 94 and the second surface 96. The end surface 92 has a width t ₂ , and the width t ₂ may be between Between ten micrometers (um) and fifty millimeters (millimeter, mm). In this embodiment, the glass plate 90 can be a square glass plate, and the first surface 94 and the second surface 96 can both be square surfaces, but not limited thereto (for example, a glass plate having round or chamfered angles) Or a glass plate having a combination of curved or irregular arbitrary curves, the end faces 92 may be four side surfaces surrounding the glass plate 90, and the width t ₂ is the thickness of the glass plate 90.

In the present embodiment, the laser processing apparatus 100 is used to trim the end face 92 of the glass sheet 90. The laser processing apparatus 100 includes a laser output module 200, a laser control module 300, and a motion control module 400. The laser output module 200 is configured to output a laser beam 60, wherein the wavelength of the laser beam 60 can be between ten nanometers (nm) and twelve micrometers. The laser control module 300 receives the laser beam 60 and adjusts the energy density of the laser beam 60 to illuminate the laser beam 60 to the end face 92. The energy density of the laser beam 60 can be between one joule and five centimeters per square centimeter. Between the hundred joules, and the laser beam 60 has an illumination diameter D ₂ on the end face 92, the illumination diameter D _{2 being} greater than or equal to the width t ₂ . The motion control module 400 is configured to carry and rotate the glass plate 90 at a first speed such that the laser beam 60 surrounds the illumination end face 92. The mobile control module 400 is coupled to the laser control module 300 such that the energy density of the laser beam 60 corresponds to the first speed.

On the end face 92 of the glass plate 90, due to the temperature gradient between the irradiated area and the unirradiated area of the laser beam 60, the end face 92 generates a glass shaving layer 72 due to the splitting, thereby making the end face 92 smooth. Surface to remove defects of end face 92. The thickness H of the glass shaving layer 72 may be between one micrometer and one millimeter.

In the present embodiment, the irradiation diameter D ₂ is equal to the width t ₂ , and the movement control module 400 rotates the glass sheet 90 in the Q direction (ie, the counterclockwise direction), but this embodiment is not intended to limit the present proposal. For example, the illumination diameter D ₂ can be greater than the width t ₂ , and the movement control module 400 can rotate the glass plate 90 clockwise, which can be adjusted according to actual needs. In addition, the laser control module 300 can further include an optical path guiding unit 302 for guiding the laser beam 60 to illuminate the end surface 92, and a zooming unit 304 for adjusting the focal length of the laser beam 60. . The optical path guiding unit 302 may further include a scanning device. The mobile control module 400 further includes a central fixing unit 40. The central fixing unit 40 can fix the center point of the glass plate 90 to the mobile control module 400, so that the mobile control module 400 can rotate the glass in a manner similar to the constant speed. Board 90.

Please refer to "Fig. 5B" and "5C" for the second embodiment and the third embodiment of the laser beam irradiated to the glass plate according to "Fig. 4A". The laser processing apparatus 100 may further include a blowing nozzle 88 that outputs the cooling gas 89 to the glass sheet 90 or the rear end surface 92 illuminated by the laser beam 90 to increase the irradiation area and the unirradiated area of the laser beam 60. Temperature gradient between.

Please refer to "4A", "4B", "5A" and "6A", and "6A" is a flow chart of the fourth embodiment of the laser processing method according to the present proposal. Laser processing methods include:

Step S600: rotating the glass plate at a first speed, wherein the glass plate includes an end surface.

Step S602: Adjust the energy density of the laser beam according to the first speed.

Step S603: Adjust the focal length of the laser beam according to the distance between the optical path guiding unit and the end surface.

Step S604: irradiating the end surface with the laser beam to crack the glass shaving layer, The medium laser beam has an illumination diameter on the end surface, and the illumination diameter is greater than or equal to the width of the end surface.

In step S600, the mobile control module 400 carries the glass plate 90 and rotates the glass plate 90 at a first speed, wherein the rate of change of the first speed is less than or equal to 20% (ie, the mobile control module 400 approaches, etc. Rotate the glass plate 90) in a quick manner. Next, in step S602, since the motion control module 400 is coupled to the laser control module 300, the energy density of the laser beam 60 corresponds to the first speed (ie, the energy density change rate of the laser beam 60 is less than or equal to the percentage). Twenty). It is noted that, since the distance between the laser 92 and the control module 300 of end surface glass plate 90 an undefined value (e.g. the first glass plate 90 at ₁ position F, the laser control module 300 with the glass plate 90 The distance between the end faces 92 is S ₁ ; when the glass plate 90 is at the second position F ₂ , the distance between the laser control module 300 and the end face 92 of the glass plate 90 is S ₂ , where S ₁ >S ₂ ) The energy that causes the laser beam 60 to illuminate the end face 92 will be different. Therefore, in order for the energy of the laser beam 60 to be irradiated to the end surface 92 to be nearly the same, the laser control module 300 adjusts the zoom unit 304 according to the distance between the light path guiding unit 302 and the end surface 92 to change the focal length of the laser beam 60 (ie, the steps) S603). Next, step 604 is performed such that the end face 92 produces a glass shaving layer 72 due to the splitting, thereby making the end face 92 a smooth surface to remove the defects of the end face 92.

Please refer to "5B" and "6B", and "6B" is a flow chart of the fifth embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the foregoing steps S600, S602, S603, and S604, the method further includes:

Step S380: pre-engraving a mark on the end surface as a starting point of the end face of the split glass plate.

Step S606: applying a cooling gas to the glass plate.

Wherein, before step S380 is performed before step S600, the score 91 can be engraved by using a mechanical cutter or a laser beam. Step 606 can be implemented synchronously when performing step S604 to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed, but this embodiment is not intended to limit the proposal. For example, step S606 may also be performed before step S604, before step S602, step S602, before step S600, or at step S600.

Please refer to "5C" and "6C", and "6C" is a flow chart of the sixth embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the foregoing steps S380, S600, S602, S603, and S604, the method further includes:

Step S608: applying a cooling gas to the end surface after being irradiated by the laser beam.

The step S608 can be performed after the step S604 is performed to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed.

In addition, in the above embodiment, the mobile control module 400 can be coupled to the laser output module 200. When the motion control module 400 outputs the activation signal to the laser output module 200, the laser output module 200 outputs the laser beam 60. When the motion control module 400 outputs a stop signal to the laser output module 200, the laser output module 200 stops outputting the laser beam 60.

In the above embodiment, the position of the laser beam 60 is fixed (ie, the position of the laser control module 300 is fixed), but the glass plate 50 is rotated, so that the position is not stopped. In the case where the laser output module 200 outputs the laser beam 60, the splitting of the end face 52 is directly performed, but the above embodiment is not intended to limit the proposal. For example, the laser beam 50 can be fixed by the glass plate 50 and the laser beam 60 surrounds the end surface 52 of the illumination glass plate 50 (ie, the laser control module 300 surrounds the end surface 52 of the glass plate 50), so that the lightning is not stopped. When the output module 200 outputs the laser beam 60, the splitting of the end surface 52 is directly performed. For details, please refer to the following description.

Please refer to "7A", "7B" and "8A", which are schematic diagrams of a laser processing apparatus according to still another embodiment of the present proposal and a square glass plate rotated in a first position, according to A schematic view of a laser processing apparatus of "Fig. 7A" and a schematic view of a square glass plate rotated at a second position and a laser beam irradiated to a glass plate according to "Fig. 7A". The space in which the laser processing apparatus 700 is located has a first direction x, a second direction y and a third direction z, and the first direction x, the second direction y and the third direction z are perpendicular to each other. In the present embodiment, the glass sheet 50 may be a circular plate, the end surface 52 may be an annular side surface surrounding the glass sheet 50, and the width t ₁ is the thickness of the glass sheet 50.

In the present embodiment, the laser processing apparatus 700 is used to trim the end face 52 of the glass sheet 50. The laser processing apparatus 700 includes a laser output module 200, a laser control module 300, and a carrier module 450. The carrying module 450 is used to carry and fix the glass plate 50. The laser output module 200 is configured to output a laser beam 60, wherein the wavelength of the laser beam 60 can be between ten nanometers (nm) and twelve micrometers. The laser control module 300 receives the laser beam 60 and adjusts the energy density of the laser beam 60 to cause the laser beam 60 to surround the illumination end face 52 at a second speed, wherein the energy density of the laser beam 60 can be between each square centimeter. Between one joule and five hundred joules, the laser beam 60 has an illumination diameter D ₁ on the end face 52, the illumination diameter D _{1 is} greater than or equal to the width t ₁ , and the energy density of the laser beam 60 corresponds to the second velocity.

On the end face 52 of the glass plate 50, due to the temperature gradient between the irradiated area and the unirradiated area of the laser beam 60, when the tensile stress generated by the temperature gradient is greater than the tensile strength of the glass material, the end face 52 is caused by 劈The crack produces a layer of glass shavings 70 which in turn causes the end surface 52 to be a smooth surface to remove defects in the end surface 52. Wherein, the thickness K of the glass shaving layer 70 may be between one micrometer and one millimeter.

In this embodiment, the illumination diameter D ₁ is equal to the width t ₁ , and the laser control module 300 surrounds the end surface 52 at a second speed in the R direction (counterclockwise direction), thereby causing the laser beam 60 to surround the illumination end surface 52, but The examples are not intended to limit the proposal. For example, the illumination diameter D ₁ can be greater than the width t ₁ , and the laser control module 300 rotates relative to the end surface 52 at a second speed in the clockwise direction, which can be adjusted according to actual needs. In addition, the laser control module 300 may further include an optical path guiding unit 302 to guide the laser beam 60 to the end surface 52. The optical path guiding unit 302 may further include a scanning device. The carrying module 450 further includes a central fixing unit 43 that can fix the center point of the glass plate 50 to the carrying module 450.

Please refer to "8B" and "8C", which are schematic perspective views of a second embodiment and a third embodiment in which a laser beam according to "FIG. 7A" is irradiated onto a glass sheet. The laser processing apparatus 700 may further include a blowing nozzle 88 that outputs the cooling gas 89 to the glass sheet 50 or the end surface 52 that is illuminated by the laser beam 60 to increase the illuminated area and the unirradiated area of the laser beam 60. Temperature gradient between.

Please refer to "7A", "7B" and "9A", and "9A" is a flow chart of the seventh embodiment of the laser processing method according to the present proposal. Laser processing methods include:

Step S800: The laser control module is caused to surround the end surface of the glass plate at the second speed.

Step S802: Adjust the energy density of the laser beam according to the second speed.

Step S804: Surrounding the illumination end surface with the laser beam, the glass shaving layer is split, wherein the laser beam has an illumination diameter on the end surface, and the illumination diameter is greater than or equal to the width of the end surface.

In step S800, the laser control module 300 surrounds the end surface 52 at a second speed in the counterclockwise direction, wherein the rate of change of the second speed is less than or equal to twenty percent (ie, the laser control module 300 approaches, etc. The speed way surrounds the glass plate 50). Next, in step S802, the laser control module 300 can adjust the energy density of the laser beam 60 according to the second speed (ie, the energy density change rate of the laser beam 60 is less than or equal to 20%), so as to perform the steps. At S804, the energy of the laser beam 60 that illuminates the end face 52 approaches the same. It should be noted that the illumination diameter D _{1 of the} laser beam 60 on the end face 52 is greater than or equal to the width t _{1 of the} end face 52.

Please refer to "8B" and "9B", and "9B" is a flow chart of the eighth embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the above steps S800, S802 and S804, the method further comprises:

Step S410: pre-engraving a mark on the end face to serve as a starting point of the end face of the split glass plate.

Step S806: The cooling gas is applied to the glass plate.

Wherein, step S410 is performed before step S800, and the score 51 can be engraved by using a mechanical cutter or a laser beam. Step S806 can be synchronized when performing step S804. It is implemented to increase the temperature gradient between the irradiated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed, but this embodiment is not intended to limit the proposal. For example, step S806 may also be performed before step S804, before step S802, step S802, before step S800, or step S800.

Please refer to "8C" and "9C", and "9C" is a flow chart of the ninth embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the foregoing steps S410, S800, S802, and S804, the method further includes:

Step S808: applying a cooling gas to the end surface after being irradiated by the laser beam.

The step S808 can be performed after the step S804 is performed to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed.

Please refer to "10A", "10B" and "11A", which are schematic diagrams of a laser processing apparatus according to a further embodiment of the present invention and a square glass plate rotated in a first position, according to A schematic view of a laser processing apparatus of "10A" and a square glass plate rotated at a second position, and a perspective view of a first embodiment of a laser beam irradiated to the glass plate according to "Fig. 10A". The space in which the laser processing apparatus 700 is located has a first direction x, a second direction y and a third direction z, and the first direction x, the second direction y and the third direction z are perpendicular to each other. In this embodiment, the glass plate 90 may be a square glass plate, but not limited thereto (for example, a glass plate having round or chamfered angle or a glass plate having a combination of curved or irregular arbitrary curves) The end face 92 may be four side surfaces surrounding the glass sheet 90, and the width t ₂ is the thickness of the glass sheet 90.

In the present embodiment, the laser processing apparatus 700 is used to trim the end face 92 of the glass sheet 90. The laser processing apparatus 700 includes a laser output module 200, a laser control module 300, and a carrier module 450. The carrying module 450 is used to carry and fix the glass plate 90. The laser output module 200 is configured to output a laser beam 60, wherein the wavelength of the laser beam 60 can be between ten nanometers (nm) and twelve micrometers. The laser control module 300 receives the laser beam 60 and adjusts the energy density of the laser beam 60 to cause the laser beam 60 to surround the illumination end face 92 at a second speed. The energy density of the laser beam 60 can be between each square centimeter. Between one joule and five hundred joules, and the laser beam 60 has an illumination diameter D ₂ on the end face 92, the illumination diameter D _{2 is} greater than or equal to the width t ₂ , and the energy density of the laser beam 60 corresponds to the second velocity.

On the end face 92 of the glass plate 90, due to the temperature gradient between the irradiated area and the unirradiated area of the laser beam 60, the end face 92 generates a glass shaving layer 72 due to the splitting, thereby making the end face 92 smooth. Surface to remove defects of end face 92. The thickness J of the glass shaving layer 72 may be between one micrometer and one millimeter.

In the present embodiment, the illumination diameter D ₂ is equal to the width t ₂ , and the laser control module 300 surrounds the end surface 92 at the second speed in the W direction (counterclockwise direction), but this embodiment is not intended to limit the present proposal. For example, the illumination diameter D ₂ may be greater than the width t ₂ , and the laser control module 300 surrounds the end surface 92 at a second speed in a clockwise direction, which may be adjusted according to actual needs. In addition, the laser control module 300 can further include an optical path guiding unit 302 for guiding the laser beam 60 to illuminate the end surface 92, and a zooming unit 304 for adjusting the focal length of the laser beam 60. . The optical path guiding unit 302 may further include a scanning device. The carrying module 450 further includes a central fixing unit 43 that can fix the center point of the glass plate 50 to the carrying module 450.

Please refer to "11B" and "11C" for the second embodiment and the third embodiment of the laser beam irradiated to the glass plate according to "Fig. 10A". The laser processing apparatus 700 may further include a blowing nozzle 88 that outputs the cooling gas 89 to the glass sheet 90 or the rear end surface 92 irradiated by the laser beam 60 to increase the illuminated area and the unirradiated area of the laser beam 60. Temperature gradient between.

Please refer to "10A", "10B", "11A" and "12A", and "12A" is a flow chart of the tenth embodiment of the laser processing method according to the present proposal. Laser processing methods include:

Step S900: The laser control module is caused to surround the end surface of the glass plate at the second speed.

Step S902: Adjust the energy density of the laser beam according to the second speed.

Step S903: Adjust the focal length of the laser beam according to the distance between the optical path guiding unit and the end surface.

Step S904: Surrounding the illumination end surface with the laser beam, the glass shaving layer is split, wherein the laser beam has an illumination diameter on the end surface, and the illumination diameter is greater than or equal to the width of the end surface.

In step S900, the laser control module 300 surrounds the end surface 92 at a second speed in the counterclockwise direction, wherein the rate of change of the second speed is less than or equal to twenty percent (ie, the laser control module 300 approaches, etc. The speed way surrounds the glass plate 90). Next, in step S902, the laser control module 300 can adjust the energy density of the laser beam 60 according to the second speed (ie, the energy density change rate of the laser beam 60 is less than or equal to twenty percent). It is noted that, since the distance between the end faces 300 and laser control module 92 of the glass plate 90 an undefined value (e.g., a glass plate 90 in a first position I _1, the laser control module 300 with the glass plate 90 The distance between the end faces 92 is N ₁ ; when the glass plate 90 is at the second position I ₂ , the distance between the laser control module 300 and the end face 92 of the glass plate 90 is N ₂ , where N ₁ >N ₂ ) The energy that causes the laser beam 60 to illuminate the end face 92 will be different. Therefore, in order to make the energy of the laser beam 60 circumscribing the end face 92 nearly the same, the laser control module 300 adjusts the zoom unit 304 according to the distance between the optical path guiding unit 302 and the end surface 92 to change the focal length of the laser beam 60 ( That is, step S903). Next, step 904 is performed such that the end face 92 produces a glass shaving layer 72 due to the splitting, thereby making the end face 92 a smooth surface to remove the defects of the end face 92.

Please refer to "11B" and "12B", and "12B" is a flow chart of the eleventh embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the above steps S900, S902, S903, and S904, the method further includes:

Step S420: pre-engraving a mark on the end surface as a starting point of the end face of the split glass plate.

Step S906: The cooling gas is applied to the glass plate.

Wherein, before step S420 is performed in step S900, the score 91 can be engraved by using a mechanical cutter or a laser beam. Step 906 can be implemented synchronously when performing step S904 to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed, but this embodiment is not intended to limit the proposal. For example, step S906 may also be performed before step S904 is performed, before step S902 is performed, step S902 is performed, before step S900 is performed, or step S900 is performed.

Please refer to "11C" and "12C". "12C" is the root. A flow chart of the steps of the twelfth embodiment of the laser processing method according to the present proposal. In this embodiment, the laser processing method includes: in addition to the above steps S420, S900, S902, S903, and S904, the method further includes:

Step S908: applying a cooling gas to the end surface after being irradiated by the laser beam.

The step S908 can be implemented after the step S904 is performed to increase the temperature gradient between the illuminated area and the unirradiated area of the laser beam 60, thereby increasing the splitting speed.

In the above embodiment, the laser control module 300 can be coupled to the laser output module 200. When the laser control module 300 outputs the start signal to the laser output module 200, the laser output module 200 outputs the laser beam 60. When the laser control module 300 outputs a stop signal to the laser output module 200, the laser output module 200 stops outputting the laser beam 60. In addition, in the above embodiment (as shown in FIG. 7B and FIG. 11B), the laser output module 200 may fluctuate with the change of the arrangement position of the laser control module 300, but the above embodiment It is not intended to limit this proposal.

According to the laser processing apparatus and method disclosed in the above proposal, the laser beam is used to remove defects on the end faces of the glass sheets. The surface of the laser beam can be rotated by the position of the laser beam, or the glass plate can be moved around the end surface of the glass plate to solve the problem. The prior art has a slow processing speed due to the use of mechanical edging to trim the glass plate. There are still microcracks and when the thickness of the glass plate is too thin (i.e., thickness ≦ 0.1 mm), mechanical edging is liable to cause a problem of fragmentation. The energy of the laser beam irradiated to the end face can be made nearly the same by the energy density of the laser beam corresponding to the first speed or the second speed. The focal length of the laser beam can be adjusted by the setting of the zoom unit so that the energy of the laser beam irradiated to the end face is not affected by the laser control module and the glass. The effect of the distance between the end faces of the plates. In addition, the center point of the glass plate can be fixed to the movement control module by the setting of the central fixing unit, so that the movement control module can rotate the glass plate in a manner similar to the constant speed. Furthermore, the temperature gradient between the irradiated area of the laser beam and the unirradiated area can be increased by the arrangement of the air blowing nozzle, thereby increasing the speed of the end surface of the trimmed glass sheet.

While the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to limit the present invention. Any skilled person skilled in the art can make some changes and refinements without departing from the spirit and scope of the present proposal. The scope of patent protection of the proposal shall be subject to the definition of the scope of the patent application attached to this specification.

40, 43‧‧‧ center fixed unit

50, 90‧‧‧ glass plates

51, 91‧‧‧ nicks

52, 92‧‧‧ end face

54, 94‧‧‧ first surface

56, 96‧‧‧ second surface

60‧‧‧Laser beam

70, 72‧‧‧ glass shaving layer

88‧‧‧Air supply nozzle

89‧‧‧Cooling gas

100, 700‧‧ ‧ laser processing equipment

200‧‧‧Laser output module

300‧‧‧Laser Control Module

302‧‧‧Light path guiding unit

304‧‧‧Zoom unit

400‧‧‧Mobile Control Module

450‧‧‧ Carrying Module

D ₁ , D ₂ ‧‧‧irradiation diameter

t ₁ , t ₂ ‧‧‧width

G, H, K, J‧‧ thickness

F ₁ , I ₁ ‧‧‧ first position

F ₂ , I ₂ ‧‧‧ second position

S ₁ , S ₂ ‧‧‧ distance

N ₁ , N ₂ ‧‧‧ distance

x‧‧‧First direction

Y‧‧‧second direction

z‧‧‧The third direction

Fig. 1 is a schematic view showing the arrangement position of a laser processing apparatus and a circular glass plate according to an embodiment of the present proposal.

Fig. 2A is a perspective view showing a first embodiment in which a laser beam according to Fig. 1 is irradiated onto a glass plate.

Fig. 2B is a perspective view showing a second embodiment of the laser beam irradiated to the glass plate according to Fig. 1.

Fig. 2C is a perspective view showing a third embodiment in which the laser beam according to Fig. 1 is irradiated onto the glass plate.

Figure 3A is a flow chart of the first embodiment of the laser processing method according to the present proposal.

Figure 3B is a flow chart of the second embodiment of the laser processing method according to the present proposal.

Figure 3C is a third embodiment step of the laser processing method according to the present proposal flow chart.

Figure 4A is a schematic illustration of a laser processing apparatus and a square glass plate rotated in a first position in accordance with another embodiment of the present proposal.

Figure 4B is a schematic illustration of a laser processing apparatus according to Figure 4A and a square glass plate rotated in a second position.

Fig. 5A is a perspective view showing a first embodiment in which a laser beam according to Fig. 4A is irradiated onto a glass plate.

Fig. 5B is a perspective view showing a second embodiment of the laser beam irradiated to the glass plate according to Fig. 4A.

Fig. 5C is a perspective view showing a third embodiment in which a laser beam according to Fig. 4A is irradiated onto a glass plate.

Figure 6A is a flow chart showing the steps of a fourth embodiment of the laser processing method according to the present proposal.

Figure 6B is a flow chart showing the steps of the fifth embodiment of the laser processing method according to the present proposal.

Figure 6C is a flow chart showing the steps of the sixth embodiment of the laser processing method according to the present proposal.

Figure 7A is a schematic illustration of a laser processing apparatus and a square glass plate rotated in a first position in accordance with yet another embodiment of the present proposal.

Fig. 7B is a schematic view of the laser processing apparatus according to Fig. 7A and a square glass plate rotated in the second position.

Fig. 8A is a perspective view showing a first embodiment in which a laser beam according to Fig. 7A is irradiated onto a glass plate.

Fig. 8B is a perspective view showing a second embodiment of the laser beam irradiated to the glass plate according to Fig. 7A.

Fig. 8C is a perspective view showing a third embodiment in which a laser beam according to Fig. 7A is irradiated onto a glass plate.

Figure 9A is a flow chart showing the steps of the seventh embodiment of the laser processing method according to the present proposal.

Figure 9B is a flow chart showing the steps of the eighth embodiment of the laser processing method according to the present proposal.

Figure 9C is a flow chart showing the steps of the ninth embodiment of the laser processing method according to the present proposal.

Figure 10A is a schematic illustration of a laser processing apparatus and a square glass plate rotated in a first position in accordance with a further embodiment of the present proposal.

Figure 10B is a schematic illustration of a laser processing apparatus according to Figure 10A and a square glass plate rotated in a second position.

Fig. 11A is a perspective view showing a first embodiment in which a laser beam according to Fig. 10A is irradiated onto a glass plate.

Fig. 11B is a perspective view showing a second embodiment in which a laser beam according to Fig. 10A is irradiated onto a glass plate.

Fig. 11C is a perspective view showing a third embodiment in which a laser beam according to Fig. 10A is irradiated onto a glass plate.

Figure 12A is a flow chart showing the steps of a tenth embodiment of the laser processing method according to the present proposal.

Figure 12B is an eleventh embodiment of the laser processing method according to the present proposal Flow chart.

Figure 12C is a flow chart showing the steps of the twelfth embodiment of the laser processing method according to the present proposal.

40‧‧‧Center fixed unit

50‧‧‧ glass plate

52‧‧‧ end face

60‧‧‧Laser beam

100‧‧‧ Laser processing equipment

200‧‧‧Laser output module

300‧‧‧Laser Control Module

302‧‧‧Light path guiding unit

400‧‧‧Mobile Control Module

x‧‧‧First direction

Y‧‧‧second direction

z‧‧‧The third direction

Claims (35)

A laser processing apparatus for trimming an end surface of a glass plate, the laser processing apparatus comprising: a movement control module for carrying the glass plate and rotating the glass plate at a first speed; a laser output a module for outputting a laser beam to the end surface to split a glass shaving layer, wherein the laser beam has an illumination diameter corresponding to the end surface, the illumination diameter being greater than or equal to a width of the end surface; A laser control module is configured to adjust an energy density of the laser beam, the energy density corresponding to the first speed. The laser processing apparatus of claim 1, wherein a wavelength of the laser beam is between ten nanometers (nm) and twelve micrometers (um). The laser processing apparatus of claim 1, wherein a thickness of the glass shaving layer is between one micron and one millimeter (mm). The laser processing apparatus of claim 1, wherein the laser control module further comprises an optical path guiding unit for guiding the laser beam to the end surface. The laser processing apparatus of claim 4, wherein the optical path guiding unit further comprises a scanning device. The laser processing device of claim 4, wherein the laser control module further comprises a zoom unit, the laser control module adjusting the zoom unit according to a distance between the optical path guiding unit and the end surface to change the zoom unit A focal length of the laser beam. The laser processing apparatus of claim 1, wherein the energy density is between one joule and five hundred joules per square centimeter. The laser processing apparatus of claim 1, wherein the mobile control module comprises a central fixing unit for fixing the glass plate to the mobile control module. The laser processing apparatus of claim 1, wherein the laser processing apparatus further comprises a blowing nozzle that outputs a cooling gas to the glass sheet. The laser processing apparatus of claim 1, wherein the laser processing apparatus further comprises a blow nozzle that outputs a cooling gas to the end face after being irradiated by the laser beam. The laser processing apparatus of claim 1, wherein the movement control module carries the glass plate to reciprocate displacement. A laser processing device for trimming an end surface of a glass plate, the laser processing device comprising: a carrying module for carrying and fixing the glass plate; and a laser output module for outputting a laser a beam of light that circulates the end face at a second speed to split a layer of glass shavings, wherein the laser beam has an illumination diameter on the end surface, the illumination diameter being greater than or equal to one of the end faces a width; and a laser control module for adjusting an energy density of the laser beam, the energy density corresponding to the second speed. The laser processing apparatus of claim 12, wherein a wavelength of the laser beam is between ten nanometers (nm) and twelve micrometers (um). The laser processing apparatus of claim 12, wherein a thickness of the glass shaving layer is between one micron and one millimeter (mm). The laser processing apparatus of claim 12, wherein the laser control module further comprises An optical path guiding unit guides the laser beam to the end surface. The laser processing apparatus of claim 15, wherein the optical path guiding unit further comprises a scanning device. The laser processing device of claim 15, wherein the laser control module further comprises a zoom unit, the laser control module adjusting the zoom unit according to a distance between the optical path guiding unit and the end surface to change the zoom unit A focal length of the laser beam. The laser processing apparatus of claim 12, wherein the energy density is between one joule and five hundred joules per square centimeter. The laser processing apparatus of claim 12, wherein the carrying module comprises a central fixing unit for fixing the glass plate to the carrying module. The laser processing apparatus of claim 12, wherein the laser processing apparatus further comprises a blow nozzle that outputs a cooling gas to the glass sheet. The laser processing apparatus of claim 12, wherein the laser processing apparatus further comprises a blow nozzle that outputs a cooling gas to the end face after being irradiated by the laser beam. A laser processing method, the method comprising: rotating a glass plate at a first speed, wherein the glass plate comprises an end surface; adjusting an energy density of a laser beam according to the first speed; and illuminating with the laser beam The end surface is split with a glass shaving layer, wherein the laser beam has an illumination diameter on the end surface, and the illumination diameter is greater than or equal to a width of the end surface. The laser processing method of claim 22, wherein the laser processing method further comprises applying a cooling gas to the glass sheet. The laser processing method of claim 22, wherein after the step of irradiating the laser beam to the end face of the glass sheet, a cooling gas is applied to the end surface after being irradiated by the laser beam. The laser processing method of claim 22, wherein before the step of rotating the glass sheet at the first speed, a pre-marking of the end surface is further included. The laser processing method of claim 22, wherein the laser processing method further comprises adjusting a focal length of the laser beam according to a distance of an optical path guiding unit from the end surface. The laser processing method of claim 22, wherein the step of rotating the glass plate at the first speed further comprises: the movement control module controlling the continuous rotation of the glass plate at a time interval. The laser processing method of claim 22, wherein the step of rotating the glass sheet at the first speed further comprises: the movement control module controlling the plurality of rotations of the glass sheet at a time interval. The laser processing method of claim 28, wherein the step of controlling the multi-stage rotation of the glass sheet further comprises: moving the linear displacement of the glass sheet such that a portion of the end surface of the glass sheet is cleaved by the laser beam to the glass shavings a layer; moving the glass plate to reset the displacement, and then controlling the glass plate to rotate at least one angle; and repeating the above steps, so that the end surface of the glass plate is completely cleaved out of the glass shaving layer. A laser processing method according to claim 28, wherein the plurality of stages of rotation of the glass sheet are controlled The step further includes forming at least one lead angle at at least one end angle of the glass sheet, the angle of curvature of the lead angle being between 0.1 mm and 20 mm. A laser processing method, the method comprising: causing a laser control module to surround an end surface of a glass plate at a second speed; adjusting an energy density of a laser beam according to the second speed; and using the laser A beam of light surrounds the end surface, and a layer of glass shavings is cracked, wherein the laser beam has an illumination diameter on the end surface, the illumination diameter being greater than or equal to a width of the end surface. The laser processing method of claim 31, wherein the laser processing method further comprises applying a cooling gas to the glass sheet. The laser processing method of claim 31, wherein after the step of irradiating the laser beam around the end face of the glass plate, a cooling gas is applied to the end face after being irradiated by the laser beam. The laser processing method of claim 31, wherein before the step of causing the laser control module to surround the end surface of the glass sheet at the second speed, a pre-marking of the end surface is further included. The laser processing method of claim 31, wherein the laser processing method further comprises adjusting a focal length of the laser beam according to a distance between the optical path guiding unit and the end surface.