TW201421754A - Package of optoelectronic device - Google Patents

Package of optoelectronic device Download PDF

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TW201421754A
TW201421754A TW101145182A TW101145182A TW201421754A TW 201421754 A TW201421754 A TW 201421754A TW 101145182 A TW101145182 A TW 101145182A TW 101145182 A TW101145182 A TW 101145182A TW 201421754 A TW201421754 A TW 201421754A
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Taiwan
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conductive layer
device package
patterned conductive
transparent substrate
conductive
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TW101145182A
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Chinese (zh)
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TWI562411B (en
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Ming-Ji Dai
Ra-Min Tain
li-ling Liao
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Ind Tech Res Inst
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Abstract

A package of optoelectronic device including a transparent optical substrate, a semiconductor optoelectronic chip, a first patterned conductive layer, a second patterned conductive layer and a dielectric material is provided. The transparent optical substrate has a first surface, a second surface, an accommodating space and a conductive via. The accommodating space extends from the first surface towards the second surface, and the first conductive via extends from the first surface to the second surface. The semiconductor optoelectronic chip is disposed in the accommodating space and has a plurality of terminals. The first patterned conductive layer and the second patterned conductive layer are disposed over the first surface and the second surface respectively. The first patterned conductive layer is electrically connected to the second patterned conductive layer through the first conductive via, and the terminals are electrically connected to the first patterned conductive layer and the second patterned conductive layer.

Description

光電元件封裝體 Photoelectric device package

本揭露是有關於一種半導體封裝體(semiconductor package),且特別是有關於一種光電元件封裝體(package of optoelectronic device)。 The present disclosure relates to a semiconductor package, and more particularly to a package of optoelectronic device.

由於發光二極體具有壽命長、反應速度快、體積小、用電省、污染低、高可靠度、適合量產等優點,因此發光二極體所能應用的領域十分廣泛,如大型看板、交通號誌燈、手機、掃描器、傳真機之光源以及照明裝置等。不論是在何種領域方面的應用,發光二極體都必須經過適當的封裝才能夠使用。通常,發光二極體封裝必須同時考慮散熱特性以及光學表現。 Since the light-emitting diode has the advantages of long life, fast reaction speed, small volume, low power consumption, low pollution, high reliability, and suitable mass production, the light-emitting diode can be applied in a wide range of fields, such as large billboards. Traffic lights, mobile phones, scanners, fax machine light sources and lighting devices. Regardless of the field of application, the LEDs must be properly packaged before they can be used. In general, a light-emitting diode package must take into account both heat dissipation characteristics and optical performance.

為了有效改善發光二極體封裝的散熱效能,已有習知技術採用高導熱特性之封裝基板,如金屬核心印刷電路板、陶瓷(氧化鋁)基板、矽基板等,來承載發光二極體晶片。上述之封裝基板雖可提供發光二極體晶片良好的散熱效能,但這些封裝基板僅具備承載發光二極體晶片以及提供電性連接之功能,對於發光二極體封裝本身的光學表現幫助不大。 In order to effectively improve the heat dissipation performance of the LED package, the conventional technology uses a package substrate with high thermal conductivity, such as a metal core printed circuit board, a ceramic (alumina) substrate, a germanium substrate, etc., to carry the light emitting diode chip. . Although the above-mentioned package substrate can provide good heat dissipation performance of the LED chip, these package substrates only have the functions of carrying the LED chip and providing electrical connection, and the optical performance of the LED package itself is not helpful. .

本揭露提供一種光電元件封裝體,其採用透明基板作 為承載器對光電元件進行封裝。 The present disclosure provides a photovoltaic device package using a transparent substrate The optoelectronic component is packaged for the carrier.

本揭露提出一種光電元件封裝體,其包括一透明基板、一光電元件、一第一圖案化導電層、一第二圖案化導電層以及一介電材料。透明基板具有一第一表面以及一第二表面,且透明基板包含一凹槽以及至少一第一導電通孔,其中凹槽包含一底表面,且第一導電通孔從第一表面延伸至第二表面。光電元件配置於凹槽內,且光電元件具有多個導電端子。第一圖案化導電層配置於第一表面之上,且第一圖案化導電層電性連接至導電端子。第二圖案化導電層配置於第二表面之上,其中第二圖案化導電層透過第一導電通孔電性連接至第一圖案化導電層。此外,介電材料填入凹槽中以包覆光電元件。 The present disclosure provides a photovoltaic device package including a transparent substrate, a photovoltaic element, a first patterned conductive layer, a second patterned conductive layer, and a dielectric material. The transparent substrate has a first surface and a second surface, and the transparent substrate includes a recess and at least one first conductive via, wherein the recess includes a bottom surface, and the first conductive via extends from the first surface to the first surface Two surfaces. The photovoltaic element is disposed in the recess, and the optoelectronic component has a plurality of conductive terminals. The first patterned conductive layer is disposed on the first surface, and the first patterned conductive layer is electrically connected to the conductive terminal. The second patterned conductive layer is disposed on the second surface, wherein the second patterned conductive layer is electrically connected to the first patterned conductive layer through the first conductive via. In addition, a dielectric material is filled into the recess to encapsulate the photovoltaic element.

為讓本揭露之上述和其他目的和特徵能更明顯易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下。 The above and other objects and features of the present invention will become more apparent from the following description.

【第一實施例】 [First Embodiment]

圖1為本申請案第一實施例之光電元件封裝體的剖面示意圖。請參照圖1,本實施例之光電元件封裝體100包括透明基板110、光電元件120、第一圖案化導電層130、第二圖案化導電層140以及介電材料150。透明基板110具有第一表面110a、第二表面110b以及位於透明基板110中之凹槽112,且透明基板110包含一個或多個第一導電通孔114,其中凹槽112從第一表面110a朝向第二表面 110b延伸,而第一導電通孔114從第一表面110a延伸至第二表面110b。光電元件120配置於凹槽112內,且光電元件120具有多個導電端子122。第一圖案化導電層130配置於第一表面110a上,而第二圖案化導電層140配置於第二表面110b上,其中第一圖案化導電層130透過第一導電通孔114與第二圖案化導電層140電性連接,且導電端子122與第一圖案化導電層130以及第二圖案化導電層140電性連接。此外,介電材料150填入凹槽112中以包覆光電元件120。在本實施例中,透明基板110例如為玻璃基板、藍寶石基板或者其他具有透光性之光學基板。 1 is a schematic cross-sectional view showing a photovoltaic element package of a first embodiment of the present application. Referring to FIG. 1 , the photovoltaic device package 100 of the present embodiment includes a transparent substrate 110 , a photovoltaic element 120 , a first patterned conductive layer 130 , a second patterned conductive layer 140 , and a dielectric material 150 . The transparent substrate 110 has a first surface 110a, a second surface 110b, and a recess 112 in the transparent substrate 110, and the transparent substrate 110 includes one or more first conductive vias 114, wherein the recess 112 is oriented from the first surface 110a Second surface The 110b extends and the first conductive via 114 extends from the first surface 110a to the second surface 110b. The optoelectronic component 120 is disposed within the recess 112 and the optoelectronic component 120 has a plurality of conductive terminals 122. The first patterned conductive layer 130 is disposed on the first surface 110a, and the second patterned conductive layer 140 is disposed on the second surface 110b, wherein the first patterned conductive layer 130 passes through the first conductive via 114 and the second pattern The conductive layer 140 is electrically connected, and the conductive terminal 122 is electrically connected to the first patterned conductive layer 130 and the second patterned conductive layer 140. In addition, a dielectric material 150 is filled into the recess 112 to encapsulate the optoelectronic component 120. In the present embodiment, the transparent substrate 110 is, for example, a glass substrate, a sapphire substrate, or other optical substrate having light transmissivity.

如圖1所示,本實施例之凹槽112具有一底表面112a,而凹槽112的深度d1小於第一表面110a與第二表面110b的最短距離d2。舉例而言,深度d1約為最短距離d2的50%至80%。值得注意的是,凹槽112之側壁112b可以是垂直於底面112a之垂直面,亦可以是與底面112a夾銳角或鈍角之傾斜面。此外,側壁112b與底面112a的夾角可以視光電元件封裝體100的光學設計而作適當的更動。 As shown in FIG. 1, the groove 112 of the present embodiment has a bottom surface 112a, and the depth d1 of the groove 112 is smaller than the shortest distance d2 between the first surface 110a and the second surface 110b. For example, the depth d1 is about 50% to 80% of the shortest distance d2. It should be noted that the side wall 112b of the groove 112 may be a vertical surface perpendicular to the bottom surface 112a, or may be an inclined surface having an acute or obtuse angle with the bottom surface 112a. In addition, the angle between the side wall 112b and the bottom surface 112a can be appropriately changed depending on the optical design of the photovoltaic element package 100.

當光電元件120為發光二極體晶片(LED chip),且光電元件封裝體100設計為向上發光時,則側壁112b與底面112a的夾角可以設計為銳角,以使側壁112b能夠將光電元件120所發出的側向光線向上反射;當光電元件120為發光二極體晶片,且光電元件封裝體100設計為向下發光時,則側壁112b與底面112a的夾角可以設計為鈍角,以 使側壁112b能夠將光電元件120所發出的側向光線向下反射;當光電元件120為光感測晶片(photo-sensing chip),且光電元件封裝體100適於接收來自於上方的光線時,則側壁112b與底面112a的夾角可以設計為銳角,以使側壁112b能夠來自於上方的光線反射至光電元件120,進而被光電元件120所吸收。當光電元件120為光感測晶片,且光電元件封裝體100適於接收來自於下方的光線時,則側壁112b與底面112a的夾角可以設計為銳角,以使側壁112b能夠來自於下方的光線反射至光電元件120,進而被光電元件120所吸收。 When the photo-electric component 120 is a LED chip, and the optoelectronic device package 100 is designed to emit light upward, the angle between the sidewall 112b and the bottom surface 112a can be designed to be an acute angle, so that the sidewall 112b can be used for the photo-electric component 120. The emitted lateral light is reflected upward; when the photovoltaic element 120 is a light-emitting diode wafer, and the photovoltaic device package 100 is designed to emit light downward, the angle between the sidewall 112b and the bottom surface 112a can be designed as an obtuse angle to The side wall 112b is configured to reflect the lateral light emitted by the photovoltaic element 120 downward; when the photovoltaic element 120 is a photo-sensing chip, and the photovoltaic element package 100 is adapted to receive light from above, The angle between the sidewall 112b and the bottom surface 112a can be designed to be an acute angle so that the light from the upper side of the sidewall 112b can be reflected to the photovoltaic element 120 and absorbed by the photovoltaic element 120. When the photo-electric component 120 is a photo-sensing wafer, and the optoelectronic component package 100 is adapted to receive light from below, the angle between the sidewall 112b and the bottom surface 112a can be designed to be an acute angle so that the sidewall 112b can be reflected from the light below. The photovoltaic element 120 is further absorbed by the photovoltaic element 120.

此外,為了增加側壁112b對光線的反射能力,本實施例可以選擇性地於側壁112b上製作反射鍍膜(reflective coating)或者貼附反射片(reflective sheet)。 In addition, in order to increase the ability of the sidewall 112b to reflect light, the embodiment may selectively form a reflective coating or a reflective sheet on the sidewall 112b.

如圖1所示,第一導電通孔114的高度實質上相同於第一表面110a與第二表面110b的最短距離d2。在本實施例中,第一導電通孔114為貫穿透明基板110之實心導電柱體(solid conductive posts)。在另一實施例中,第一導電通孔114為貫穿透明基板110之空心導電柱體(hollow conductive posts),如圖2所示之光電元件封裝體100a。 As shown in FIG. 1, the height of the first conductive via 114 is substantially the same as the shortest distance d2 of the first surface 110a and the second surface 110b. In the embodiment, the first conductive vias 114 are solid conductive posts penetrating the transparent substrate 110. In another embodiment, the first conductive vias 114 are hollow conductive posts extending through the transparent substrate 110, such as the photovoltaic device package 100a shown in FIG.

如圖1所示,光電元件120的多個導電端子122係分佈於其單一表面上。為了使光電元件120之導電端子122能夠與第二圖案化導電層140電性連接,本實施例之透明基板110具有多個第二導電通孔116,其中第二導電通孔116對應於導電端子122分佈,且各個第二導電通孔116 從底表面112a延伸至第二表面110b,以使各個導電端子122分別透過對應之第二導電通孔116與第二表面110b上之第二圖案化導電層140電性連接。此外,第二導電通孔116的高度實質上相同於底表面112a與第二表面110b的最短距離d3。在本實施例中,最短距離d3約為最短距離d2的50%至80%。 As shown in FIG. 1, a plurality of conductive terminals 122 of the photovoltaic element 120 are distributed over a single surface thereof. In order to enable the conductive terminal 122 of the photovoltaic element 120 to be electrically connected to the second patterned conductive layer 140, the transparent substrate 110 of the embodiment has a plurality of second conductive vias 116, wherein the second conductive vias 116 correspond to the conductive terminals. 122 distribution, and each of the second conductive vias 116 The bottom surface 112a extends from the bottom surface 112a to the second surface 110b, so that the respective conductive terminals 122 are electrically connected to the second patterned conductive layer 140 on the second surface 110b through the corresponding second conductive vias 116, respectively. Further, the height of the second conductive via 116 is substantially the same as the shortest distance d3 between the bottom surface 112a and the second surface 110b. In the present embodiment, the shortest distance d3 is about 50% to 80% of the shortest distance d2.

在本實施例中,第一圖案化導電層130以及第二圖案化導電層140之材質例如皆為金屬,且第一圖案化導電層130以及第二圖案化導電層140之材質可與第一導電通孔114之材質相同或不同。此外,由於導電端子122跟第一圖案化導電層130、第二圖案化導電層140以及第一導電通孔114電性連接,因此欲輸入至導電端子122的電訊號可直接透過第二圖案化導電層140提供,或者是透過第一圖案化導電層130、第一導電通孔114及第二圖案化導電層140提供。 In this embodiment, the materials of the first patterned conductive layer 130 and the second patterned conductive layer 140 are both metal, and the materials of the first patterned conductive layer 130 and the second patterned conductive layer 140 are the same as the first The conductive vias 114 are made of the same or different materials. In addition, since the conductive terminal 122 is electrically connected to the first patterned conductive layer 130, the second patterned conductive layer 140, and the first conductive via 114, the electrical signal to be input to the conductive terminal 122 can directly pass through the second patterning. The conductive layer 140 is provided or provided through the first patterned conductive layer 130, the first conductive vias 114, and the second patterned conductive layer 140.

在本實施例中,介電材料150例如是透明之介電材料,而介電材料150主要是用以將光電元件120固定於凹槽112中。 In the present embodiment, the dielectric material 150 is, for example, a transparent dielectric material, and the dielectric material 150 is mainly used to fix the photovoltaic element 120 in the recess 112.

值得注意的是,由於透明基板110採用凹槽112之設計,因此本實施例之光電元件封裝體100可以不需要進一步於透明基板110上設置透鏡部。當然,若要更進一步優化光電元件封裝體100的光學表現,本實施例仍然可於透明基板110上設置適當的透鏡部。 It is to be noted that since the transparent substrate 110 is designed with the recess 112, the photovoltaic device package 100 of the present embodiment does not need to further provide a lens portion on the transparent substrate 110. Of course, in order to further optimize the optical performance of the photovoltaic device package 100, the present embodiment can still provide an appropriate lens portion on the transparent substrate 110.

如圖1所示,本實施例之光電元件封裝體100可進一 步包括一配置於凹槽112內之螢光層160,其中螢光層160配置底表面112a上,且螢光層160位於光電元件120與底表面112a之間。在本實施例中,光電元件120例如為藍光發光二極體晶片,而螢光層160例如為黃色螢光層。在其他實施例中,光電元件120例如為紫外光發光二極體晶片,而螢光層160例如為紅色、綠色及/或藍色螢光層。 As shown in FIG. 1, the photovoltaic device package 100 of the present embodiment can be further The step includes a phosphor layer 160 disposed in the recess 112, wherein the phosphor layer 160 is disposed on the bottom surface 112a, and the phosphor layer 160 is disposed between the photovoltaic element 120 and the bottom surface 112a. In the present embodiment, the photo-electric element 120 is, for example, a blue light-emitting diode wafer, and the phosphor layer 160 is, for example, a yellow phosphor layer. In other embodiments, the photovoltaic element 120 is, for example, an ultraviolet light emitting diode wafer, and the phosphor layer 160 is, for example, a red, green, and/or blue phosphor layer.

值得注意的是,雖然圖1中的螢光層160係分佈於光電元件120與底表面112a之間,但本實施例不限定螢光材料的分佈位置。在一可行之實施例中,螢光材料(第一螢光材料)可以分佈在透明基板110之第二表面110b上,且位於光電元件120上方。在其他實施例中,螢光材料(第二螢光材料)可以分佈於介電材料150之中。 It should be noted that although the phosphor layer 160 in FIG. 1 is distributed between the photovoltaic element 120 and the bottom surface 112a, the present embodiment does not limit the distribution position of the phosphor material. In a possible embodiment, the phosphor material (first phosphor material) may be distributed on the second surface 110b of the transparent substrate 110 and above the photovoltaic element 120. In other embodiments, the phosphor material (second phosphor material) may be distributed among the dielectric material 150.

以下將搭配圖3A至圖3F,針對本實施例之光電元件封裝體的製作流程說明如下。 The fabrication flow of the photovoltaic device package of the present embodiment will be described below with reference to FIGS. 3A to 3F.

圖3A至圖3F為第一實施例之光電元件封裝體的製作流程示意圖。請參照圖3A,首先,提供一透明基板110,此透明基板110具有第一表面110a、第二表面110b以及位於透明基板110中之凹槽112,其中凹槽112從第一表面110a朝向第二表面110b延伸。在本實施例中,凹槽112例如是透過雷射加工、機械加工或者蝕刻等方式製作而成。此處,凹槽112具有底面112a以及側壁112b,其中凹槽112之側壁112b可以是垂直於底面112a之垂直面,亦可以是與底面112a夾銳角或鈍角之傾斜面。側壁112b與底面112a的夾角可以視光電元件封裝體100的光學設計 而作適當的更動。 3A to 3F are schematic views showing a manufacturing process of the photovoltaic device package of the first embodiment. Referring to FIG. 3A, first, a transparent substrate 110 is provided. The transparent substrate 110 has a first surface 110a, a second surface 110b, and a recess 112 in the transparent substrate 110. The recess 112 is from the first surface 110a toward the second surface. The surface 110b extends. In the present embodiment, the groove 112 is formed by, for example, laser processing, machining, or etching. Here, the groove 112 has a bottom surface 112a and a side wall 112b. The side wall 112b of the groove 112 may be a vertical surface perpendicular to the bottom surface 112a, or may be an inclined surface having an acute or obtuse angle with the bottom surface 112a. The angle between the sidewall 112b and the bottom surface 112a can be regarded as the optical design of the photovoltaic device package 100. And make appropriate changes.

接著請參照圖3B,於凹槽112之底面112a上塗佈螢光層160,此螢光層160例如為黃色螢光層、紅色螢光層、綠色螢光層及/或藍色螢光層。在其他實施例中,螢光層160的塗佈為可以省略的步驟。 Referring to FIG. 3B, a phosphor layer 160 is applied on the bottom surface 112a of the recess 112. The phosphor layer 160 is, for example, a yellow phosphor layer, a red phosphor layer, a green phosphor layer, and/or a blue phosphor layer. . In other embodiments, the coating of the phosphor layer 160 is a step that can be omitted.

接著請參照圖3C,提供光電元件120,此光電元件120的多個導電端子122係分佈於其單一表面上。接著,將光電元件120設置於凹槽112之底面112a上,以使螢光層160位於光電元件120與底表面112a之間,並使導電端子122與凹槽112之底面112a接觸。之後,將介電材料150填入凹槽112中以包覆光電元件120,以將光電元件120固定於凹槽112中。 Referring next to Figure 3C, a photovoltaic element 120 is provided having a plurality of conductive terminals 122 distributed over a single surface thereof. Next, the photovoltaic element 120 is disposed on the bottom surface 112a of the recess 112 such that the phosphor layer 160 is positioned between the photovoltaic element 120 and the bottom surface 112a, and the conductive terminal 122 is in contact with the bottom surface 112a of the recess 112. Thereafter, dielectric material 150 is filled into recess 112 to encapsulate photovoltaic element 120 to secure photovoltaic element 120 in recess 112.

接著請參照圖3D,將承載有光電元件120之透明基板110翻轉,並於透明基板110中形成多個第二導電通孔116,其中第二導電通孔116對應於導電端子122分佈,且各個第二導電通孔116從底表面112a延伸至第二表面110b以分別與對應之導電端子122電性連接。 Referring to FIG. 3D, the transparent substrate 110 carrying the photovoltaic element 120 is inverted, and a plurality of second conductive vias 116 are formed in the transparent substrate 110. The second conductive vias 116 are distributed corresponding to the conductive terminals 122, and each The second conductive vias 116 extend from the bottom surface 112a to the second surface 110b to be electrically connected to the corresponding conductive terminals 122, respectively.

接著請參照圖3E,於透明基板110中形成一個或多個貫孔TGV,其中貫孔TGV從第一表面110a延伸至第二表面110b。在本實施例中,貫孔TGV例如是透過雷射加工、機械加工或者蝕刻等方式製作而成。 Next, referring to FIG. 3E, one or more through holes TGV are formed in the transparent substrate 110, wherein the through holes TGV extend from the first surface 110a to the second surface 110b. In the present embodiment, the through hole TGV is formed by, for example, laser processing, machining, or etching.

接著請參照圖3F,接著透過電鍍(或其他導體沈積製程)以及微影蝕刻製程(或其他圖案化製程)形成第一導電通孔114、第一圖案化導電層130與第二圖案化導電層 140,其中第一導電通孔114位於貫孔TGV中,第一圖案化導電層130位於第一表面110a上,而第二圖案化導電層140位於第二表面110b上。如圖3F所示,導電端子122透過對應的第二導電通孔116、第二圖案化導電層140以及對應的第一導電通孔114而與第一圖案化導電層130電性連接。 Referring to FIG. 3F, the first conductive via 114, the first patterned conductive layer 130 and the second patterned conductive layer are formed through electroplating (or other conductor deposition processes) and a lithography process (or other patterning process). 140, wherein the first conductive via 114 is located in the through hole TGV, the first patterned conductive layer 130 is located on the first surface 110a, and the second patterned conductive layer 140 is located on the second surface 110b. As shown in FIG. 3F , the conductive terminals 122 are electrically connected to the first patterned conductive layer 130 through the corresponding second conductive vias 116 , the second patterned conductive layer 140 , and the corresponding first conductive vias 114 .

【第二實施例】 [Second embodiment]

圖4為本申請案第二實施例之光電元件封裝體的剖面示意圖。請同時參照圖1與圖4,本實施例之光電元件封裝體100’與第一實施例光電元件封裝體100之類似,惟二者主要差異之處在於:本實施例之透明基板110’中的凹槽112’係進一步延伸至第二表面110b以形成容納貫孔,而容納貫孔112’的深度實質上相同於第一表面110a與第二表面110b的最短距離d2。 4 is a cross-sectional view showing a photovoltaic element package of a second embodiment of the present application. Referring to FIG. 1 and FIG. 4 simultaneously, the photovoltaic device package 100' of the present embodiment is similar to the photovoltaic device package 100 of the first embodiment, but the main difference between the two is that the transparent substrate 110' of the embodiment is The groove 112' extends further to the second surface 110b to form a receiving through hole, and the depth of the receiving through hole 112' is substantially the same as the shortest distance d2 of the first surface 110a and the second surface 110b.

除了上述差異之外,本實施例之光電元件封裝體100’可進一步包括一介電層170,此介電層170位於透明基板110’與第二圖案化導電層140之間,其中介電層170具有多個第三導電通孔172,且導電端子122透過第三導電通孔172與第二圖案化導電層140電性連接。此外,本實施例之光電元件封裝體100’可進一步包括一透鏡部180,其中透鏡部180覆蓋透明基板110’之第二表面110b、第二圖案化導電層140以及光電元件120。 In addition to the above differences, the photovoltaic device package 100' of the present embodiment may further include a dielectric layer 170 between the transparent substrate 110' and the second patterned conductive layer 140, wherein the dielectric layer The 170 has a plurality of third conductive vias 172 , and the conductive terminals 122 are electrically connected to the second patterned conductive layer 140 through the third conductive vias 172 . Furthermore, the photovoltaic device package 100' of the present embodiment may further include a lens portion 180, wherein the lens portion 180 covers the second surface 110b of the transparent substrate 110', the second patterned conductive layer 140, and the photovoltaic element 120.

與第一實施例相似,容納貫孔112’之側壁112b’可以 是垂直於第一表面110a之垂直面,亦可以是與第一表面110a夾銳角或鈍角之傾斜面。此外,側壁112b’與第一表面110a的夾角可以視光電元件封裝體100’的光學設計而作適當的更動。 Similar to the first embodiment, the side wall 112b' of the receiving through hole 112' can be It is a vertical plane perpendicular to the first surface 110a, and may also be an inclined surface having an acute or obtuse angle with the first surface 110a. Further, the angle between the side wall 112b' and the first surface 110a can be appropriately changed depending on the optical design of the photovoltaic element package 100'.

此外,第一導電通孔114可以是貫穿透明基板110之實心導電柱體(如圖4所示),或者是貫穿透明基板110之空心導電柱體(如圖5所示之光電元件封裝體100a’)。 In addition, the first conductive via 114 may be a solid conductive pillar penetrating through the transparent substrate 110 (as shown in FIG. 4 ) or a hollow conductive pillar penetrating through the transparent substrate 110 (the photovoltaic device package 100 a as shown in FIG. 5 ) ').

以下將搭配圖6A至圖6F,針對本實施例之光電元件封裝體的製作流程說明如下。 The fabrication flow of the photovoltaic device package of the present embodiment will be described below with reference to FIGS. 6A to 6F.

圖6A至圖6G為第二實施例之光電元件封裝體的製作流程示意圖。請參照圖6A,首先,提供一透明基板110’,此透明基板110’具有第一表面110a、第二表面110b以及位於透明基板110中之容納貫孔112’。在本實施例中,容納貫孔112’例如是透過雷射加工、機械加工或者蝕刻等方式製作而成。此處,容納貫孔112’具有側壁112b’,其中容納貫孔112’之側壁112b’可以是垂直於底面112a之垂直面,亦可以是與第一表面110a夾銳角或鈍角之傾斜面。側壁112b’與第一表面110a的夾角可以視光電元件封裝體100’的光學設計而作適當的更動。 6A to 6G are schematic views showing the manufacturing process of the photovoltaic device package of the second embodiment. Referring to FIG. 6A, first, a transparent substrate 110' having a first surface 110a, a second surface 110b, and a receiving through hole 112' in the transparent substrate 110 is provided. In the present embodiment, the receiving through hole 112' is formed by, for example, laser processing, machining, or etching. Here, the receiving through hole 112' has a side wall 112b', wherein the side wall 112b' of the receiving through hole 112' may be a vertical surface perpendicular to the bottom surface 112a, or may be an inclined surface having an acute or obtuse angle with the first surface 110a. The angle between the side wall 112b' and the first surface 110a can be appropriately changed depending on the optical design of the photovoltaic element package 100'.

接著,將具有容納貫孔112’之透明基板110’設置於一載體C上,其中透明基板110’的第二表面110b與載體C接觸。在本實施例中,載體C例如是基板、離形膜或其他合適之載體。 Next, the transparent substrate 110' having the through-holes 112' is disposed on a carrier C, wherein the second surface 110b of the transparent substrate 110' is in contact with the carrier C. In this embodiment, the carrier C is, for example, a substrate, a release film or other suitable carrier.

接著請參照圖6B,提供光電元件120,此光電元件120 的多個導電端子122係分佈於其單一表面上。接著,將光電元件120設置於容納貫孔112’中,以使光電元件120被載體C所承載。然後,將介電材料150填入容納貫孔112’中以包覆光電元件120,以將光電元件120固定於容納貫孔112’中。在本實施例中,介電材料150的填充以不覆蓋住導電端子122為原則。之後,移除載體C以使透明基板110’的第二表面110b暴露。 Referring next to FIG. 6B, a photovoltaic element 120 is provided. The photovoltaic element 120 The plurality of conductive terminals 122 are distributed over a single surface thereof. Next, the photovoltaic element 120 is placed in the receiving through hole 112' so that the photovoltaic element 120 is carried by the carrier C. Then, a dielectric material 150 is filled into the receiving through hole 112' to cover the photovoltaic element 120 to fix the photovoltaic element 120 in the receiving through hole 112'. In the present embodiment, the filling of the dielectric material 150 is based on the principle of not covering the conductive terminals 122. Thereafter, the carrier C is removed to expose the second surface 110b of the transparent substrate 110'.

接著請參照圖6C與圖6D,於透明基板110’的第一表面110a’上形成一介電層170,並於介電層170中形成多個第三導電通孔172,其中導電端子122與對應之第三導電通孔172電性連接。 Referring to FIG. 6C and FIG. 6D, a dielectric layer 170 is formed on the first surface 110a' of the transparent substrate 110', and a plurality of third conductive vias 172 are formed in the dielectric layer 170, wherein the conductive terminals 122 are Corresponding third conductive vias 172 are electrically connected.

接著請參照圖6E,於透明基板110中形成一個或多個貫孔TGV,其中貫孔TGV從第一表面110a延伸至第二表面110b。在本實施例中,貫孔TGV例如是透過雷射加工、機械加工或者蝕刻等方式製作而成。 Next, referring to FIG. 6E, one or more through holes TGV are formed in the transparent substrate 110, wherein the through holes TGV extend from the first surface 110a to the second surface 110b. In the present embodiment, the through hole TGV is formed by, for example, laser processing, machining, or etching.

接著請參照圖6F,接著透過電鍍(或其他導體沈積製程)以及微影蝕刻製程(或其他圖案化製程)形成第一導電通孔114、第一圖案化導電層130與第二圖案化導電層140,其中第一導電通孔114位於貫孔TGV中,第一圖案化導電層130位於第一表面110a上,而第二圖案化導電層140位於第二表面110b上。如圖6F所示,導電端子122透過對應的第二導電通孔116、第二圖案化導電層140以及對應的第一導電通孔114而與第一圖案化導電層130電性連接。 Referring to FIG. 6F, the first conductive via 114, the first patterned conductive layer 130 and the second patterned conductive layer are formed through electroplating (or other conductor deposition processes) and a lithography process (or other patterning process). 140, wherein the first conductive via 114 is located in the through hole TGV, the first patterned conductive layer 130 is located on the first surface 110a, and the second patterned conductive layer 140 is located on the second surface 110b. As shown in FIG. 6F , the conductive terminals 122 are electrically connected to the first patterned conductive layer 130 through the corresponding second conductive vias 116 , the second patterned conductive layer 140 , and the corresponding first conductive vias 114 .

請參照圖6G,接著於透明基板110’之第二表面110b上形成透鏡部180,以使透鏡部180覆蓋介電層170、第二圖案化導電層140以及光電元件120。 Referring to FIG. 6G, a lens portion 180 is formed on the second surface 110b of the transparent substrate 110' such that the lens portion 180 covers the dielectric layer 170, the second patterned conductive layer 140, and the photovoltaic element 120.

【第三實施例】 [Third embodiment]

圖7為本申請案第三實施例之光電元件封裝體的剖面示意圖。請參照圖7,本實施例之光電元件封裝體200與第二實施例之光電元件封裝體100’相似,惟二者主要差異之處在於:光電元件封裝體200中的光電元件220具有多個導電端子222a、222b,且導電端子222a、222b分別位於光電元件220的二相對表面上,其中導電端子222a透過第三導電通孔172與第二圖案化導電層140電性連接,而導電端子222b例如係與第一圖案化導電層130電性連接。 Figure 7 is a cross-sectional view showing a photovoltaic element package of a third embodiment of the present application. Referring to FIG. 7, the photovoltaic device package 200 of the present embodiment is similar to the photovoltaic device package 100' of the second embodiment, but the main difference is that the photovoltaic device 220 in the photovoltaic device package 200 has multiple The conductive terminals 222a, 222b, and the conductive terminals 222a, 222b are respectively located on the opposite surfaces of the photovoltaic element 220, wherein the conductive terminal 222a is electrically connected to the second patterned conductive layer 140 through the third conductive via 172, and the conductive terminal 222b For example, it is electrically connected to the first patterned conductive layer 130.

【第四實施例】 Fourth Embodiment

圖8為本申請案第四實施例之光電元件封裝體的剖面示意圖。請參照圖8,本實施例之光電元件封裝體300與第二實施例之光電元件封裝體100’相似,惟二者主要差異之處在於:光電元件封裝體300中的光電元件320具有多個導電端子322a、322b,且導電端子222a、222b分別位於光電元件220的單一表面上,其中導電端子322a以及導電端子322b皆與第一圖案化導電層130電性連接。在本實施例中,導電端子322a以及導電端子322b例如為導電凸塊(bumps)。 Figure 8 is a cross-sectional view showing a photovoltaic element package of a fourth embodiment of the present application. Referring to FIG. 8, the photovoltaic device package 300 of the present embodiment is similar to the photovoltaic device package 100' of the second embodiment, but the main difference is that the photovoltaic device 320 in the photovoltaic device package 300 has a plurality of The conductive terminals 322a, 322b, and the conductive terminals 222a, 222b are respectively located on a single surface of the photovoltaic element 220, wherein the conductive terminal 322a and the conductive terminal 322b are electrically connected to the first patterned conductive layer 130. In this embodiment, the conductive terminals 322a and the conductive terminals 322b are, for example, conductive bumps.

此外,本實施例之光電元件封裝體300可進一步包括一螢光材料190,其中螢光材料190分佈於介電層170之表面上。然而,本實施例並不限定螢光材料的分佈位置,螢光材料亦可分佈於介電材料150或者透鏡部180中。 In addition, the photovoltaic device package 300 of the present embodiment may further include a phosphor material 190, wherein the phosphor material 190 is distributed on the surface of the dielectric layer 170. However, the present embodiment does not limit the distribution position of the fluorescent material, and the fluorescent material may be distributed in the dielectric material 150 or the lens portion 180.

【第五實施例】 [Fifth Embodiment]

圖9為本申請案第五實施例之光電元件封裝體的剖面示意圖。請參照圖9,本實施例之光電元件封裝體400與第三實施例之光電元件封裝體200相似,惟二者主要差異之處在於:光電元件封裝體400可進一步包括一配置於凹槽112內之散熱塊HS,其中光電元件220配置於散熱塊HS上。在本實施例中,光電元件220例如是透過導熱膠AD黏著於散熱塊HS上。舉例而言,前述之導熱膠AD例如為具有良好導電導熱特性之銀膠(silver paste)。 Figure 9 is a cross-sectional view showing a photovoltaic element package of a fifth embodiment of the present application. Referring to FIG. 9 , the photovoltaic device package 400 of the present embodiment is similar to the photovoltaic device package 200 of the third embodiment, but the main difference between the two is that the photovoltaic device package 400 further includes a recess 112. The heat sink block HS is disposed on the heat sink block HS. In this embodiment, the photovoltaic element 220 is adhered to the heat sink block HS through the thermal conductive adhesive AD, for example. For example, the aforementioned thermal conductive adhesive AD is, for example, a silver paste having good electrical and thermal conductivity properties.

【第六實施例】 [Sixth embodiment]

圖10為本申請案第六實施例之光電元件封裝體的剖面示意圖。請參照圖10,本實施例之光電元件封裝體500與第二實施例之光電元件封裝體100’相似,惟二者主要差異之處在於:光電元件封裝體500可進一步包括一配置於凹槽112內之散熱塊HS,其中光電元件120配置於散熱塊HS上。在本實施例中,光電元件120例如是透過導熱膠AD黏著於散熱塊HS上。舉例而言,前述之導熱膠AD例如為銀膠或是其他具有良好導熱特性的膠材。 Figure 10 is a cross-sectional view showing a photovoltaic element package of a sixth embodiment of the present application. Referring to FIG. 10, the photovoltaic device package 500 of the present embodiment is similar to the photovoltaic device package 100' of the second embodiment, but the main difference between the two is that the photovoltaic device package 500 further includes a recess disposed in the recess. The heat sink block HS in the 112, wherein the photovoltaic element 120 is disposed on the heat sink block HS. In this embodiment, the photovoltaic element 120 is adhered to the heat sink block HS through the thermal conductive adhesive AD, for example. For example, the aforementioned thermal conductive adhesive AD is, for example, silver paste or other adhesive material having good thermal conductivity.

基於上述,由於本揭露之光電元件封裝體採用透明基板作為承載器對光電元件進行封裝,因此本揭露之光電元件封裝體能夠具有良好的信賴性(reliability)以及散熱特性。 Based on the above, since the photovoltaic device package of the present invention encapsulates the photovoltaic element using the transparent substrate as a carrier, the photovoltaic device package of the present disclosure can have good reliability and heat dissipation characteristics.

雖然本揭露已以多個實施例揭露如上,然其並非用以限定本揭露,任何熟習此技藝者,在不脫離本揭露之精神和範圍內,當可作些許之更動與潤飾,因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。 The present disclosure has been disclosed in the above embodiments, and is not intended to limit the scope of the disclosure, and the present disclosure may be modified and modified without departing from the spirit and scope of the disclosure. The scope of protection is subject to the definition of the scope of the patent application.

100、100a、100’、100a’、200‧‧‧光電元件封裝體 100, 100a, 100', 100a', 200‧‧‧ photoelectric component package

110、110’‧‧‧透明基板 110, 110'‧‧‧ Transparent substrate

110a‧‧‧第一表面 110a‧‧‧ first surface

110b‧‧‧第二表面 110b‧‧‧ second surface

112‧‧‧凹槽 112‧‧‧ Groove

112’‧‧‧容納貫孔 112’‧‧‧ accommodated through holes

112a‧‧‧底面 112a‧‧‧ bottom

112b、112b’‧‧‧側壁 112b, 112b’‧‧‧ side wall

114‧‧‧第一導電通孔 114‧‧‧First conductive via

116‧‧‧第二導電通孔 116‧‧‧Second conductive via

120、220‧‧‧光電元件 120, 220‧‧‧Optoelectronic components

122、222a、222b‧‧‧導電端子 122, 222a, 222b‧‧‧ conductive terminals

130‧‧‧第一圖案化導電層 130‧‧‧First patterned conductive layer

140‧‧‧第二圖案化導電層 140‧‧‧Second patterned conductive layer

150‧‧‧介電材料 150‧‧‧ dielectric materials

160‧‧‧螢光層 160‧‧‧Fluorescent layer

170‧‧‧介電層 170‧‧‧ dielectric layer

172‧‧‧第三導電通孔 172‧‧‧ Third conductive via

180‧‧‧透鏡部 180‧‧‧Lens Department

190‧‧‧螢光材料 190‧‧‧Fluorescent materials

d1‧‧‧深度 D1‧‧ depth

d2、d3‧‧‧距離 D2, d3‧‧‧ distance

TGV‧‧‧貫孔 TGV‧‧‧through hole

C‧‧‧載體 C‧‧‧ Carrier

HS‧‧‧散熱塊 HS‧‧‧Heat block

AD‧‧‧導熱膠 AD‧‧‧thermal adhesive

圖1為本申請案第一實施例之光電元件封裝體的剖面示意圖。 1 is a schematic cross-sectional view showing a photovoltaic element package of a first embodiment of the present application.

圖2為本申請案第一實施例之另一種光電元件封裝體的剖面示意圖。 2 is a cross-sectional view showing another photovoltaic element package of the first embodiment of the present application.

圖3A至圖3F為第一實施例之光電元件封裝體的製作流程示意圖。 3A to 3F are schematic views showing a manufacturing process of the photovoltaic device package of the first embodiment.

圖4為本申請案第二實施例之光電元件封裝體的剖面示意圖。 4 is a cross-sectional view showing a photovoltaic element package of a second embodiment of the present application.

圖5為本申請案第二實施例之另一種光電元件封裝體的剖面示意圖。 FIG. 5 is a cross-sectional view showing another photovoltaic element package according to a second embodiment of the present application.

圖6A至圖6G為第二實施例之光電元件封裝體的製作流程示意圖。 6A to 6G are schematic views showing the manufacturing process of the photovoltaic device package of the second embodiment.

圖7為本申請案第三實施例之光電元件封裝體的剖面示意圖。 Figure 7 is a cross-sectional view showing a photovoltaic element package of a third embodiment of the present application.

圖8為本申請案第四實施例之光電元件封裝體的剖面示意圖。 Figure 8 is a cross-sectional view showing a photovoltaic element package of a fourth embodiment of the present application.

圖9為本申請案第五實施例之光電元件封裝體的剖面示意圖。 Figure 9 is a cross-sectional view showing a photovoltaic element package of a fifth embodiment of the present application.

圖10為本申請案第六實施例之光電元件封裝體的剖面示意圖。 Figure 10 is a cross-sectional view showing a photovoltaic element package of a sixth embodiment of the present application.

100‧‧‧光電元件封裝體 100‧‧‧Photoelectric component package

110‧‧‧透明基板 110‧‧‧Transparent substrate

110a‧‧‧第一表面 110a‧‧‧ first surface

110b‧‧‧第二表面 110b‧‧‧ second surface

112‧‧‧凹槽 112‧‧‧ Groove

112a‧‧‧底面 112a‧‧‧ bottom

112b‧‧‧側壁 112b‧‧‧ Sidewall

114‧‧‧第一導電通孔 114‧‧‧First conductive via

116‧‧‧第二導電通孔 116‧‧‧Second conductive via

120‧‧‧光電元件 120‧‧‧Optoelectronic components

122‧‧‧導電端子 122‧‧‧Electrical terminals

130‧‧‧第一圖案化導電層 130‧‧‧First patterned conductive layer

140‧‧‧第二圖案化導電層 140‧‧‧Second patterned conductive layer

150‧‧‧介電材料 150‧‧‧ dielectric materials

160‧‧‧螢光層 160‧‧‧Fluorescent layer

d1‧‧‧深度 D1‧‧ depth

d2、d3‧‧‧距離 D2, d3‧‧‧ distance

Claims (11)

一種光電元件封裝體,包括:一透明基板,具有一第一表面與一第二表面,其中該第一表面上具有一凹槽,該透明基板包含:至少一第一導電通孔,從該第一表面延伸至該第二表面;一光電元件,配置於該凹槽內,該光電元件具有多個導電端子;一第一圖案化導電層,配置於該第一表面之上,該第一圖案化導電層電性連接至該些導電端子;一第二圖案化導電層,配置於該第二表面之上,該第二圖案化導電層透過該第一導電通孔電性連接至該第一圖案化導電層;以及一介電材料,位於該凹槽中以包覆該光電元件。 A photovoltaic device package comprising: a transparent substrate having a first surface and a second surface, wherein the first surface has a recess, the transparent substrate comprising: at least one first conductive via, from the first a surface extending to the second surface; a photovoltaic element disposed in the recess, the photovoltaic element having a plurality of conductive terminals; a first patterned conductive layer disposed on the first surface, the first pattern The conductive layer is electrically connected to the conductive terminals; a second patterned conductive layer is disposed on the second surface, and the second patterned conductive layer is electrically connected to the first through the first conductive via A patterned conductive layer; and a dielectric material positioned in the recess to encapsulate the photovoltaic element. 如申請專利範圍第1項所述之光電元件封裝體,其中該透明基板為玻璃基板或藍寶石基板。 The photovoltaic device package according to claim 1, wherein the transparent substrate is a glass substrate or a sapphire substrate. 如申請專利範圍第1項所述之光電元件封裝體,其中該透明基板更包含一螢光層配置於該凹槽之底表面上。 The photovoltaic device package of claim 1, wherein the transparent substrate further comprises a phosphor layer disposed on a bottom surface of the recess. 如申請專利範圍第1項所述之光電元件封裝體,其中該透明基板具有多個第二導電通孔,該些第二導電通孔從該底表面延伸至該第二表面,且至少部分之該些導電端子透過該些第二導電通孔與該第二圖案化導電層電性連接。 The photovoltaic device package of claim 1, wherein the transparent substrate has a plurality of second conductive vias extending from the bottom surface to the second surface, and at least a portion thereof The conductive terminals are electrically connected to the second patterned conductive layer through the second conductive vias. 如申請專利範圍第1項所述之光電元件封裝體,其 中該凹槽更延伸貫穿至該第二表面,以形成一容納貫孔,且該介電材料位於該容納貫孔中以包覆並固定該光電元件。 The photovoltaic device package according to claim 1, wherein The recess extends further through the second surface to form a receiving through hole, and the dielectric material is located in the receiving through hole to cover and fix the photovoltaic element. 如申請專利範圍第5項所述之光電元件封裝體,更包括一介電層,位於該透明基板與該第二圖案化導電層之間,該介電層具有多個第三導電通孔,且至少部分之該些導電端子透過該些第三導電通孔與該第二圖案化導電層電性連接。 The photovoltaic device package of claim 5, further comprising a dielectric layer between the transparent substrate and the second patterned conductive layer, the dielectric layer having a plurality of third conductive vias, And at least a portion of the conductive terminals are electrically connected to the second patterned conductive layer through the third conductive vias. 如申請專利範圍第6項所述之光電元件封裝體,更包括一第一螢光材料,其中該第一螢光材料分佈於該介電層之表面上。 The photovoltaic device package of claim 6, further comprising a first phosphor material, wherein the first phosphor material is distributed on a surface of the dielectric layer. 如申請專利範圍第1項所述之光電元件封裝體,其中該光電元件包括發光二極體晶片或光感測晶片。 The photovoltaic element package of claim 1, wherein the photovoltaic element comprises a light emitting diode chip or a light sensing wafer. 如申請專利範圍第1項所述之光電元件封裝體,更包括一第二螢光材料,其中該第二螢光材料分佈於該介電材料中。 The photovoltaic device package of claim 1, further comprising a second phosphor material, wherein the second phosphor material is distributed in the dielectric material. 如申請專利範圍第1項所述之光電元件封裝體,更包括一透鏡部,其中該透鏡部覆蓋該透明基板之該第二表面、該第二圖案化導電層以及該光電元件。 The photovoltaic device package of claim 1, further comprising a lens portion, wherein the lens portion covers the second surface of the transparent substrate, the second patterned conductive layer, and the photovoltaic element. 如申請專利範圍第1項所述之光電元件封裝體,更包括一散熱塊,其中該散熱塊配置於該凹槽內,且該光電元件配置於該散熱塊上。 The photovoltaic device package of claim 1, further comprising a heat dissipating block, wherein the heat dissipating block is disposed in the recess, and the photo component is disposed on the heat dissipating block.
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TWI611544B (en) * 2015-01-16 2018-01-11 恆勁科技股份有限公司 Electronic package structure
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TWI611544B (en) * 2015-01-16 2018-01-11 恆勁科技股份有限公司 Electronic package structure
US10784205B2 (en) 2015-01-16 2020-09-22 Phoenix Pioneer Technology Co., Ltd. Electronic package
CN107133556A (en) * 2016-02-26 2017-09-05 台湾积体电路制造股份有限公司 Manufacture the method and semiconductor device of semiconductor device
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