TW201420254A - Solder ball repair apparatus - Google Patents

Solder ball repair apparatus Download PDF

Info

Publication number
TW201420254A
TW201420254A TW102130879A TW102130879A TW201420254A TW 201420254 A TW201420254 A TW 201420254A TW 102130879 A TW102130879 A TW 102130879A TW 102130879 A TW102130879 A TW 102130879A TW 201420254 A TW201420254 A TW 201420254A
Authority
TW
Taiwan
Prior art keywords
solder ball
unit
flux
head
substrate
Prior art date
Application number
TW102130879A
Other languages
Chinese (zh)
Inventor
Jin-Won Choi
Noriaki Mukai
Ki-Ju Lee
Yon-Ho You
Seung-Wan Kim
Original Assignee
Samsung Electro Mech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mech filed Critical Samsung Electro Mech
Publication of TW201420254A publication Critical patent/TW201420254A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/98Methods for disconnecting semiconductor or solid-state bodies
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/11Manufacturing methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

The present invention relates to a solder ball repair apparatus. The solder ball repair apparatus of the present invention includes: a head transfer unit horizontally transferred along a support above a substrate; and a head unit installed under the head transfer unit to be rotated by a rotation axis and picking up a solder ball from the head transfer unit during rotation of the rotation axis to inject the solder ball in a solder ball loss position on the substrate.

Description

焊錫球修復裝置 Solder ball repairing device

本發明是有關於一種焊錫球修復之裝置,且特別是有關於一種能夠藉由一圓柱頭的旋轉以額外射出遺失的焊錫球之焊錫球修復裝置。 BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a solder ball repair apparatus, and more particularly to a solder ball repair apparatus capable of additionally emitting a lost solder ball by rotation of a cylindrical head.

近年來,在製造電子產品方面,主要使用一覆晶型式元件安裝方法(flip-chip type component mounting method)做為安裝電子元件在基板上的方法。覆晶型式元件安裝方法會形成焊錫凸塊(solder bumps)於一基板上,並且電性連接電子元件,例如將積體電路晶片設置於焊錫凸塊上。 In recent years, in the manufacture of electronic products, a flip-chip type component mounting method has been mainly used as a method of mounting electronic components on a substrate. The flip chip type component mounting method forms solder bumps on a substrate and electrically connects the electronic components, for example, the integrated circuit wafers are disposed on the solder bumps.

尤其是,中央處理器(CPUs)以及圖像處理單元(graphics processing units)的例子中需要處理大量資料,迅速增加覆晶連接方法的使用,而非傳統的焊線方法(wire bonding method)。覆晶連接方法(flip-chip connection method)藉由焊錫凸塊直接連接一基板與電子元件以改善接觸電阻。 In particular, examples of central processing units (CPUs) and graphics processing units require processing a large amount of data, rapidly increasing the use of flip chip bonding methods, rather than the conventional wire bonding method. A flip-chip connection method directly connects a substrate and an electronic component by solder bumps to improve contact resistance.

類似地,用以直接電性連接一電子元件(例如中央處理器)以及一基板的一焊錫凸塊可以透過一遮罩以在一基板上印刷錫膏(solder paste)等等的方式形成,以及進行一迴焊製程 (reflow process);形成一焊錫凸塊的方法係藉由安裝一焊錫球於基板上,或者,直接塗佈熔融錫膏於基板上,或者藉由射出熔融錫膏至遮罩之一暴露的空間中並且進行一迴焊製程。從基板突出之焊錫凸塊會與一襯墊連接以形成電性連接,其中襯墊係形成於電子元件(例如中央處理器)之下表面。 Similarly, a solder bump for directly electrically connecting an electronic component (such as a central processing unit) and a substrate may be formed by printing a solder paste or the like on a substrate through a mask, and Perform a reflow process Reflow process; a method of forming a solder bump by mounting a solder ball on a substrate, or directly applying a molten solder paste on a substrate, or by injecting a molten solder paste to an exposed space of a mask And carry out a reflow process. The solder bumps protruding from the substrate are connected to a pad to form an electrical connection, wherein the pad is formed on a lower surface of the electronic component (eg, a central processing unit).

同時,在上述的方法中,藉由射出一焊錫球至一基板或是將焊錫球安裝於基板上的一遮罩之開口中以形成一焊錫凸塊時,在某些情況中,焊錫球並沒有被射出至基板。而在焊錫球並沒有被射出至基板的狀態下,透過一迴焊製程以形成焊錫凸塊時會有問題,因而使基板是在遺失焊錫凸塊的狀態下被製造。 Meanwhile, in the above method, when a solder ball is ejected to a substrate or a solder ball is mounted on a mask opening in the substrate to form a solder bump, in some cases, the solder ball is Not being ejected to the substrate. On the other hand, in a state where the solder ball is not emitted to the substrate, there is a problem in that a solder bump is formed through a reflow process, so that the substrate is manufactured in a state in which the solder bump is lost.

為了克服這些問題,用以自動額外射出一焊錫球的裝置已經被開發,但是此些裝置的效率可能很差而且對於額外射出焊錫球至正確的位置可能有困難。 In order to overcome these problems, devices for automatically additionally projecting a solder ball have been developed, but such devices may be inefficient and may have difficulty in additionally emitting solder balls to the correct position.

先前技術:美國專利申請號6,911,388。 Prior Art: U.S. Patent Application No. 6,911,388.

本發明已經被研發以克服上述問題,因此,本發明的目的為提供一種焊錫球修復裝置。而此焊錫球修復裝置藉由旋轉一圓柱頭(cylindrical head)以促成額外射出一焊錫球至一基板,以使沒有被射出或是遺失的焊錫球被射出至基板,其中圓柱頭的兩側具有一焊錫球拾取單元(solder ball pick-up unit)以及一助焊劑沾附單元(flux dotting unit)。 The present invention has been developed to overcome the above problems, and therefore, it is an object of the present invention to provide a solder ball repairing apparatus. The solder ball repairing device causes an additional shot of a solder ball to a substrate by rotating a cylindrical head so that solder balls that are not ejected or lost are ejected to the substrate, wherein both sides of the cylindrical head have A solder ball pick-up unit and a flux dotting unit.

再者,本發明的另一目的為提供一焊錫球修復裝 置,而此焊錫球修復裝置能夠藉由安裝一攝影機於一圓柱頭之下以精準的進行一焊錫球的額外射出及形成助焊劑(flux)於一凸塊之形成位置上。 Furthermore, another object of the present invention is to provide a solder ball repair device. The solder ball repairing device can accurately perform a special injection of a solder ball and form a flux at a position where a bump is formed by mounting a camera under a cylindrical head.

根據本發明之第一方面以達到目的,提供一焊錫球修復裝置,包括:一吸取頭傳遞單元(head transfer unit)沿著一支撐部(support)被水平傳遞,而支撐部在一基板之上;以及一吸取頭單元(head unit)設置於吸取頭傳遞單元之下以藉由一旋轉軸而旋轉,並且在旋轉軸的旋轉過程中吸取頭單元從吸取頭傳遞單元拾取一焊錫球,以向基板上一遺失焊錫球的位置射出焊錫球。 According to a first aspect of the present invention, a solder ball repairing apparatus is provided, comprising: a head transfer unit being horizontally transferred along a support, and the support portion is on a substrate And a head unit disposed under the suction head transfer unit to rotate by a rotating shaft, and during the rotation of the rotating shaft, the picking head unit picks up a solder ball from the picking head transfer unit to A solder ball is emitted from a position on the substrate where the solder ball is lost.

此時,吸取頭傳遞單元可具有一焊錫球存儲單元以及一助焊劑存儲單元在兩側,且吸取頭單元更可包括由一凸輪軸及一圓柱頭所組成的一旋轉軸;一焊錫球拾取單元及一助焊劑沾附單元,且焊錫球拾取單元及助焊劑沾附單元延伸至此圓柱頭的兩端;以及附加於圓柱頭之下的一攝影機。 At this time, the suction head transfer unit may have a solder ball storage unit and a flux storage unit on both sides, and the pickup head unit may further include a rotating shaft composed of a cam shaft and a cylindrical head; a solder ball picking unit And a flux adhering unit, and the solder ball picking unit and the flux adhering unit extend to both ends of the cylindrical head; and a camera attached to the under the cylindrical head.

吸取頭傳遞單元更可包括一控制單元,當攝影機拍攝到基板的一襯墊的一暴露表面,控制單元便產生一停止訊號;而當攝影機拍攝到焊錫球安裝於基板的襯墊,控制單元便產生一移動訊號。 The suction head transfer unit may further comprise a control unit, and when the camera captures an exposed surface of a pad of the substrate, the control unit generates a stop signal; and when the camera captures the pad of the solder ball mounted on the substrate, the control unit Generate a mobile signal.

而且,焊錫球拾取單元及助焊劑沾附單元在吸取頭傳遞單元停止時維持水平狀態,因此,焊錫球拾取單元及助焊劑沾附單元的延伸端點可與焊錫球存儲單元以及助焊劑存儲單元接觸。此時,助焊劑沾附單元可藉由一旋轉軸的順時針旋轉將儲 存在一助焊劑存儲單元中的助焊劑塗佈在基板的襯墊上;而且焊錫球拾取單元可藉由此旋轉軸的逆時針旋轉將儲存於焊錫球存儲單元中的焊錫球固定在基板的襯墊上。 Moreover, the solder ball picking unit and the flux sticking unit are maintained in a horizontal state when the picking head transfer unit is stopped, and therefore, the extended end points of the solder ball picking unit and the flux sticking unit can be combined with the solder ball storage unit and the flux storage unit. contact. At this time, the flux adhering unit can be stored by clockwise rotation of a rotating shaft. There is a flux in the flux storage unit coated on the pad of the substrate; and the solder ball pick-up unit can fix the solder ball stored in the solder ball storage unit to the pad of the substrate by counterclockwise rotation of the rotating shaft on.

再者,焊錫球拾取單元可包括一殼體;由彈性驅動的一推動器(pusher),且此推動器位於殼體內;一成對彈性構件(elastic members),且此成對彈性構件與推動器的內端連結;以及一成對板件用以各自壓縮成對彈性構件。 Furthermore, the solder ball picking unit may comprise a housing; a pusher driven by the elastic, and the pusher is located in the housing; a pair of elastic members, and the pair of elastic members and the push The inner end of the device is coupled; and a pair of plates are used to compress the pair of elastic members, respectively.

而且,焊錫球拾取單元可在推動器周圍注入以及吸取空氣,其中推動器設置於殼體內;且焊錫球拾取單元藉由驅動馬達以提供或吸取殼體內的空氣,其中馬達設置於圓柱頭內或圓柱頭外而殼體配置於圓柱頭上。 Moreover, the solder ball pick-up unit can inject and draw air around the pusher, wherein the pusher is disposed in the housing; and the solder ball pick-up unit provides or draws air in the housing by driving the motor, wherein the motor is disposed in the cylindrical head or The cylindrical head is externally and the housing is disposed on the cylindrical head.

同時,焊錫球拾取單元之成對板件的一第一板件可與凸輪軸的一凸出部分接觸,以維持一第二彈性構件在被壓縮的狀態下與一第二板件接觸,並且維持一第一彈性構件在不被壓縮的狀態下安插於第一板件與第二板件之間。此時,第一彈性構件的剛性較佳比第二彈性構件的剛性(rigidity)高。 At the same time, a first plate member of the pair of plate members of the solder ball pick-up unit may be in contact with a protruding portion of the cam shaft to maintain a second elastic member in contact with a second plate member in a compressed state, and A first elastic member is maintained between the first plate member and the second plate member without being compressed. At this time, the rigidity of the first elastic member is preferably higher than the rigidity of the second elastic member.

為了對本發明之上述及其他方面有更佳的瞭解,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下: In order to better understand the above and other aspects of the present invention, the preferred embodiments are described below, and in conjunction with the drawings, the detailed description is as follows:

100‧‧‧焊錫球修復裝置 100‧‧‧ solder ball repairing device

110‧‧‧吸取頭傳遞單元 110‧‧‧Sucking head transfer unit

111‧‧‧焊錫球存儲單元 111‧‧‧ solder ball storage unit

111a‧‧‧射出孔 111a‧‧‧ shot hole

112‧‧‧助焊劑存儲單元 112‧‧‧ Flux storage unit

112a‧‧‧沾附槽 112a‧‧‧Stained trough

120‧‧‧吸取頭單元 120‧‧‧Sucking head unit

130‧‧‧旋轉軸 130‧‧‧Rotary axis

131‧‧‧圓柱頭 131‧‧‧Cylindrical head

132‧‧‧凸輪軸 132‧‧‧Camshaft

132a‧‧‧凸出部分 132a‧‧‧ protruding parts

140‧‧‧焊錫球拾取單元 140‧‧‧ solder ball picking unit

141‧‧‧殼體 141‧‧‧Shell

142‧‧‧推動器 142‧‧‧ Pusher

143‧‧‧彈性構件 143‧‧‧Flexible components

143a‧‧‧第一彈性構件 143a‧‧‧First elastic member

143b‧‧‧第二彈性構件 143b‧‧‧Second elastic member

144‧‧‧成對板件 144‧‧‧paired boards

144a‧‧‧第一板件 144a‧‧‧First board

144b‧‧‧第二板件 144b‧‧‧second board

150‧‧‧助焊劑沾附單元 150‧‧‧flux adhesion unit

160‧‧‧攝影機 160‧‧‧ camera

200‧‧‧基板 200‧‧‧Substrate

201‧‧‧襯墊 201‧‧‧ cushion

202‧‧‧阻焊層 202‧‧‧solder layer

210‧‧‧焊錫球 210‧‧‧ solder balls

300‧‧‧支撐部 300‧‧‧Support

第1圖繪示依照本發明之焊錫球修復裝置的整體組態圖。 Figure 1 is a diagram showing the overall configuration of a solder ball repairing apparatus in accordance with the present invention.

第2A-2C圖繪示依照本發明之焊錫球修復裝置的作業組態 圖。 2A-2C are diagrams showing the job configuration of the solder ball repairing device according to the present invention Figure.

第3圖繪示依照本發明之焊錫球修復裝置的剖視圖。 Figure 3 is a cross-sectional view showing a solder ball repairing apparatus in accordance with the present invention.

第4A-4B圖繪示依照本發明之焊錫球修復裝置沾附一助焊劑時的剖視圖。 4A-4B are cross-sectional views showing the solder ball repairing apparatus according to the present invention with a flux attached thereto.

第5A-5B圖繪示依照本發明之焊錫球修復裝置射出一焊錫球時的剖視圖。 5A-5B are cross-sectional views showing a solder ball repairing apparatus according to the present invention when a solder ball is ejected.

第6圖繪示依照本發明之焊錫球修復裝置之焊錫球拾取單元應用時的剖視圖。 Fig. 6 is a cross-sectional view showing the application of the solder ball picking unit of the solder ball repairing apparatus according to the present invention.

第7A-7D圖繪示依照本發明之焊錫球修復裝置之焊錫球拾取單元應用時的運作狀態圖。 7A-7D are diagrams showing the operational state of the solder ball picking unit of the solder ball repairing apparatus according to the present invention.

第8A-8B圖繪示依照本發明實施例之設置於吸取頭單元中之焊錫球拾取單元拾取銲錫球以及助焊劑沾附單元沾附助焊劑的示意圖。 8A-8B are schematic diagrams showing the solder ball pick-up unit disposed in the pick-up head unit picking up the solder ball and the flux adhering unit adhering the flux according to an embodiment of the invention.

首先,第1圖是依照本發明之焊錫球修復裝置的整體組態圖。 First, Fig. 1 is an overall configuration diagram of a solder ball repairing apparatus in accordance with the present invention.

如圖所示,根據本發明之焊錫球修復裝置100可包括位於被水平傳遞於一基板200之上的一吸取頭傳遞單元110以及一吸取頭單元120,其中吸取頭單元120位於吸取頭傳遞單元110內且可旋轉地接合。 As shown, the solder ball repairing apparatus 100 according to the present invention may include a pick-up head transfer unit 110 and a pick-up head unit 120 that are horizontally transferred over a substrate 200, wherein the pick-up head unit 120 is located at the pick-up head transfer unit. The inner portion 110 is rotatably coupled.

吸取頭傳遞單元110可沿著一支撐部300被水平傳遞,而支撐部300設置於基板200之上。此時,一移動構件,例如一軌道可被提供於支撐部300之上以使吸取頭傳遞單元110能 夠沿著支撐部300之軌道移動至左方及右方。而一焊錫球存儲單元110以及一助焊劑存儲單元115可被提供於吸取頭傳遞單元110之兩側上,以分別儲存多個焊錫球以及助焊劑。 The suction head transfer unit 110 can be horizontally transferred along a support portion 300, and the support portion 300 is disposed above the substrate 200. At this time, a moving member, such as a track, may be provided on the support portion 300 to enable the suction head transfer unit 110 to It is enough to move to the left and right along the track of the support portion 300. A solder ball storage unit 110 and a flux storage unit 115 may be provided on both sides of the pickup transfer unit 110 to store a plurality of solder balls and fluxes, respectively.

吸取頭單元120繞著一旋轉軸130旋轉,其中旋轉軸130位於吸取頭傳遞單元110內,且吸取頭單元可包括旋轉軸130。一焊錫球拾取單元140以及一助焊劑沾附單元150延伸至旋轉軸130的兩側,且一攝影機160附加在旋轉軸130之下。此時,旋轉軸130可包括一圓柱頭131以及一凸輪軸132使得圓柱頭131能夠繞著凸輪軸132旋轉。 The pickup head unit 120 rotates about a rotation axis 130, wherein the rotation shaft 130 is located in the suction head transfer unit 110, and the suction head unit may include the rotation shaft 130. A solder ball picking unit 140 and a flux adhering unit 150 extend to both sides of the rotating shaft 130, and a camera 160 is attached below the rotating shaft 130. At this time, the rotating shaft 130 may include a cylindrical head 131 and a cam shaft 132 such that the cylindrical head 131 can rotate about the cam shaft 132.

吸取頭單元120跟吸取頭傳遞單元110被整體傳遞於支撐部300之上,而透過吸取頭傳遞單元110之傳遞以及位於吸取頭傳遞單元110之旋轉也同時在進行。此時,位於吸取頭單元120內的圓柱頭130可以90度、180度以及360度的角度向左方或右方旋轉。 The suction head unit 120 and the suction head transfer unit 110 are integrally transmitted over the support portion 300, and the transmission through the suction head transfer unit 110 and the rotation of the suction head transfer unit 110 are simultaneously performed. At this time, the cylindrical head 130 located in the suction head unit 120 can be rotated to the left or right at an angle of 90 degrees, 180 degrees, and 360 degrees.

再者,安裝於吸取頭單元120之攝影機160拍攝位於下方之基板200的一上表面。此時,攝影機160根據吸取頭單元120的移動而水平移動於基板200之上,且藉由此水平移動,攝影機160可拍攝基板200之上表面。 Furthermore, the camera 160 mounted to the pick-up head unit 120 captures an upper surface of the substrate 200 located below. At this time, the camera 160 is horizontally moved above the substrate 200 according to the movement of the pickup head unit 120, and by this horizontal movement, the camera 160 can photograph the upper surface of the substrate 200.

在一迴焊製程之後,焊錫球210固定間隔地安裝於基板200之上表面,且組成相對應位置的焊錫凸塊,並且電性連接至安裝於基板200之上的電子元件之襯墊,其中迴焊製程係處於安裝在基板之上表面的狀態。 After a reflow process, the solder balls 210 are mounted on the upper surface of the substrate 200 at regular intervals, and constitute solder bumps corresponding to the positions, and are electrically connected to the pads of the electronic components mounted on the substrate 200, wherein The reflow process is in a state of being mounted on the upper surface of the substrate.

在此同時,經由上述先前技術所描述的各種方法可將多個焊錫球210安裝於基板200之上。其中,焊錫球210主要可透過下列方法安裝,設置一遮罩於基板之上或透過一開口射出焊錫球,其中此開口係形成於阻焊層(solder resist,SR)中。 At the same time, a plurality of solder balls 210 may be mounted on the substrate 200 via various methods described in the prior art described above. The solder ball 210 is mainly installed by the following method, and a mask is placed on the substrate or the solder ball is emitted through an opening, wherein the opening is formed in a solder resist (SR).

再者,為了在安裝焊錫球之後透過迴焊製程形成固定間隔的焊錫凸塊,焊錫球應該被射出至基板且無遺失。但是在某些情形中,一些焊錫球會在射出焊錫球的過程中遺失,且當遺失焊錫球的基板通過迴焊製程時,基板的缺陷便可能產生。 Furthermore, in order to form fixed-spaced solder bumps through the reflow process after the solder balls are mounted, the solder balls should be ejected to the substrate without loss. However, in some cases, some of the solder balls may be lost during the process of injecting the solder balls, and when the substrate of the solder balls is lost through the reflow process, defects of the substrate may occur.

因此,對於遺失於基板200上的焊錫球210,會檢查焊錫球是否有被射出,且在此同時會透過根據本發明之焊錫球修復裝置100額外射出焊錫球至遺失焊錫球的位置。 Therefore, for the solder ball 210 lost on the substrate 200, it is checked whether or not the solder ball is ejected, and at the same time, the solder ball is additionally ejected to the position where the solder ball is lost through the solder ball repairing apparatus 100 according to the present invention.

類似地,配合第2A-2C圖之一運作組態圖以及第1圖之一組態圖,下文描述本發明之焊錫球修復裝置的運作結構,而焊錫球修復裝置係用以額外射出焊錫球210至基板200。 Similarly, with the operation configuration diagram of one of FIG. 2A-2C and the configuration diagram of FIG. 1, the operation structure of the solder ball repairing apparatus of the present invention is described below, and the solder ball repairing apparatus is used for additionally projecting solder balls. 210 to the substrate 200.

第2A-2C圖是依照本發明之焊錫球修復裝置的作業組態圖。首先,焊錫球210被射出至基板200之上,且基板200在一迴焊製程之前被設置在焊錫球修復裝置100之下。焊錫球修復裝置100用以檢查焊錫球210是否遺失在基板200之上或者焊錫球210有缺陷。 2A-2C is a job configuration diagram of the solder ball repairing apparatus in accordance with the present invention. First, the solder ball 210 is ejected onto the substrate 200, and the substrate 200 is disposed under the solder ball repairing device 100 before a reflow process. The solder ball repairing device 100 is used to check whether the solder ball 210 is lost on the substrate 200 or the solder ball 210 is defective.

此時,焊錫球修復裝置100在基板200上方滑動至左方以及右方以尋找焊錫球210的遺失位置,並且透過設置在圓柱頭131下方的攝影機160檢查焊錫球210的遺失位置。在此之 後,當焊錫球210的遺失位置被確定,沿著支撐部300移動的吸取頭傳遞單元110會停下,而吸取頭單元120會在吸取頭傳遞單元110內旋轉以射出焊錫球210至遺失的位置。 At this time, the solder ball repairing apparatus 100 slides over the substrate 200 to the left and right to find the lost position of the solder ball 210, and the lost position of the solder ball 210 is inspected through the camera 160 disposed under the cylindrical head 131. Here Thereafter, when the lost position of the solder ball 210 is determined, the pick-up head transfer unit 110 moving along the support portion 300 is stopped, and the pick-up head unit 120 is rotated in the pick-up head transfer unit 110 to project the solder ball 210 to the lost position.

同時,藉由旋轉旋轉軸130的圓柱頭131以提供位於圓柱頭131兩側的焊錫球拾取單元140以及助焊劑沾附單元150。而吸取頭單元120使用焊錫球拾取單元140以及助焊劑沾附單元150以額外射出助焊劑以及焊錫球210至遺失焊錫球210的位置,其中吸取頭單元120係設置於吸取頭傳遞單元110內。 At the same time, the solder ball picking unit 140 and the flux adhering unit 150 on both sides of the cylindrical head 131 are provided by rotating the cylindrical head 131 of the rotating shaft 130. The pick-up head unit 120 uses the solder ball pick-up unit 140 and the flux-adhering unit 150 to additionally inject the flux and the solder balls 210 to the position where the solder balls 210 are lost, wherein the pick-up head unit 120 is disposed in the pick-up head transfer unit 110.

也就是說,位於吸取頭傳遞單元110內的吸取頭單元120提供圓柱頭131。圓柱頭131向左方或右方旋轉以透過助焊劑沾附單元150施加助焊劑於基板200之上表面,且圓柱頭131透過焊錫球拾取單元140額外射出焊錫球210至已被施加助焊劑的基板。 That is, the suction head unit 120 located in the suction head transfer unit 110 provides the cylindrical head 131. The cylindrical head 131 is rotated to the left or right to apply flux to the upper surface of the substrate 200 through the flux adhering unit 150, and the cylindrical head 131 additionally emits the solder ball 210 through the solder ball picking unit 140 to the flux which has been applied with the flux. Substrate.

類似地,當遺失焊錫球210的位置之焊錫球的修復已完成,吸取頭傳遞單元110會再度沿著一個方向移動,請參照第2c圖,以透過攝影機160檢查另一個遺失焊錫球的位置,其中攝影機160係位於吸取頭單元120內。並且,當遺失焊錫球的位置再度被尋找到,吸取頭傳遞單元110會在相對應的位置停下,並重複上述透過吸取頭單元120之旋轉所進行的焊錫球修復流程。再者,當有缺陷的焊錫球被射出至基板上,藉由吸取頭單元120的旋轉以移除有缺陷的焊錫球,接著額外射出良好的焊錫球至已移除焊錫球的位置上。 Similarly, when the repair of the solder ball at the position where the solder ball 210 is lost is completed, the pick-up head transfer unit 110 is again moved in one direction, please refer to FIG. 2c to check the position of the other lost solder ball through the camera 160. The camera 160 is located in the pickup unit 120. Moreover, when the position where the solder ball is lost is found again, the suction head transfer unit 110 stops at the corresponding position, and the above-described solder ball repair process by the rotation of the suction head unit 120 is repeated. Further, when the defective solder ball is ejected onto the substrate, the defective solder ball is removed by the rotation of the suction head unit 120, and then a good solder ball is additionally injected to the position where the solder ball has been removed.

使用焊錫球修復裝置的一焊錫球修復方法將在下文中被敘述,並配合第3圖至第5A-5B圖,以明確說明焊錫球射出過程。 A solder ball repair method using a solder ball repairing device will be described below, together with Figures 3 through 5A-5B, to clearly illustrate the solder ball firing process.

第3圖是依照本發明之焊錫球修復裝置的剖視圖。第4A-4B圖是依照本發明之焊錫球修復裝置沾附一助焊劑時的剖視圖。第5A-5B圖是依照本發明之焊錫球修復裝置射出一焊錫球時的剖視圖。 Figure 3 is a cross-sectional view of a solder ball repairing apparatus in accordance with the present invention. 4A-4B is a cross-sectional view showing a solder ball repairing apparatus according to the present invention when a flux is adhered thereto. 5A-5B is a cross-sectional view of the solder ball repairing apparatus according to the present invention when a solder ball is ejected.

如第3圖至第5A-5B圖所示,一襯墊201形成於基板200之上,阻焊層(SR)202被提供於襯墊201之上使得襯墊201的中心部份暴露出來,而焊錫球210被射出於襯墊201之暴露部分。並且,被射出焊錫球210之基板200係設置在焊錫球修復裝置100下方,以使焊錫球修復裝置100有可能尋找到基板200上遺失焊錫球的位置。 As shown in FIGS. 3 to 5A-5B, a spacer 201 is formed over the substrate 200, and a solder resist layer (SR) 202 is provided over the spacer 201 such that a central portion of the spacer 201 is exposed. The solder ball 210 is projected out of the exposed portion of the liner 201. Further, the substrate 200 from which the solder balls 210 are ejected is disposed under the solder ball repairing apparatus 100, so that the solder ball repairing apparatus 100 may find a position where the solder balls are lost on the substrate 200.

第3圖是一剖視圖,繪示當位於基板上之遺失焊錫球的位置被尋找到的時候,焊錫球修復裝置處於停止的狀態。如圖所示,焊錫球修復裝置100能夠透過攝影機160拍攝基板200之上表面以尋找焊錫球210的遺失位置,其中攝影機160由吸取頭單元120所提供,而吸取頭單元120位於吸取頭傳遞單元110內。 Figure 3 is a cross-sectional view showing the solder ball repairing device in a stopped state when the position of the missing solder ball on the substrate is found. As shown, the solder ball repairing apparatus 100 is capable of photographing the upper surface of the substrate 200 through the camera 160 to find the missing position of the solder ball 210, wherein the camera 160 is provided by the pick-up head unit 120, and the pick-up head unit 120 is located at the pick-up head transfer unit. Within 110.

當攝影機160拍攝到在阻焊層202間暴露出來的是襯墊201的表面而不是焊錫球時,沿著支撐部300水平移動的吸取頭傳遞單元110會在上方相對應位置停下。此時,吸取頭傳遞 單元110的移動或停止可藉由一控制單元(並未顯示於圖中)進行,當攝影機160拍攝到襯墊201之暴露表面的影像,控制單元便產生一停止訊號;當攝影機160拍攝到焊錫球,則控制單元便產生一移動訊號。 When the camera 160 photographs that the surface of the liner 201 is exposed between the solder resist layers 202 instead of the solder balls, the pickup transfer unit 110 that moves horizontally along the support portion 300 stops at the corresponding upper position. At this point, the suction head passes The movement or stopping of the unit 110 can be performed by a control unit (not shown). When the camera 160 captures an image of the exposed surface of the pad 201, the control unit generates a stop signal; when the camera 160 captures the solder The ball, the control unit generates a mobile signal.

同時,如第3圖所示當吸取頭傳遞單元110停留在基板200之上表面的上方時,焊錫球拾取單元140及助焊劑沾附單元150維持水平狀態,其中焊錫球拾取單元140及助焊劑沾附單元150延伸至吸取頭單元120之圓柱頭131的兩側,而攝影機160位於圓柱頭131之下。此時,焊錫球拾取單元140及助焊劑沾附單元150的延伸端點會維持分別與焊錫球存儲單元111以及助焊劑存儲單元112接觸,其中焊錫球存儲單元111以及助焊劑存儲單元112是由吸取頭傳遞單元110的兩側所提供。 Meanwhile, as shown in FIG. 3, when the pickup transfer unit 110 stays above the upper surface of the substrate 200, the solder ball picking unit 140 and the flux adhering unit 150 are maintained in a horizontal state, wherein the solder ball picking unit 140 and the flux The adhering unit 150 extends to both sides of the cylindrical head 131 of the pickup head unit 120, and the camera 160 is positioned below the cylindrical head 131. At this time, the extended end points of the solder ball picking unit 140 and the flux adhering unit 150 are maintained in contact with the solder ball storage unit 111 and the flux storage unit 112, respectively, wherein the solder ball storage unit 111 and the flux storage unit 112 are Both sides of the suction head transfer unit 110 are provided.

在那之後,如第4A-4B圖所示,透過圓柱頭131的旋轉,助焊劑沾附單元150能夠旋轉至基板200的上表面側;且藉由圓柱頭131的旋轉以塗佈助焊劑於襯墊201,而襯墊201暴露於基板200之上表面。助焊劑沾附單元150的延伸端點會與助焊劑存儲單元112相連接以吸取或吸收特定量的助焊劑,而助焊劑沾附單元150的延伸端點會藉由圓柱頭131的旋轉以旋轉至基板200之襯墊201的上表面,使得黏在助焊劑沾附單元150之延伸端點的助焊劑能夠被塗佈於襯墊201的上表面。此時,圓柱頭131可以順時針方向旋轉以使助焊劑沾附單元150能旋轉至襯墊201的上表面,然而用以定位助焊劑沾附單元150於襯墊201上 的旋轉方向並非限定於順時針方向沾附。 After that, as shown in FIGS. 4A-4B, the flux adhering unit 150 can be rotated to the upper surface side of the substrate 200 by the rotation of the cylindrical head 131; and the flux is applied by the rotation of the cylindrical head 131 to The liner 201 is exposed while the liner 201 is exposed on the upper surface of the substrate 200. The extended end of the flux adhering unit 150 is connected to the flux storage unit 112 to absorb or absorb a specific amount of flux, and the extended end of the flux adhering unit 150 is rotated by the rotation of the cylindrical head 131. To the upper surface of the liner 201 of the substrate 200, the flux adhered to the extended end of the flux adhering unit 150 can be applied to the upper surface of the liner 201. At this time, the cylindrical head 131 can be rotated clockwise to enable the flux adhering unit 150 to be rotated to the upper surface of the liner 201, but to position the flux adhering unit 150 on the liner 201. The direction of rotation is not limited to sticking in a clockwise direction.

同時,完成塗佈助焊劑於基板200之襯墊201之後,如第5A-5B圖所示,焊錫球拾取單元140會藉由圓柱頭131的旋轉以旋轉至基板200之上表面側,使得焊錫球拾取單元140能夠施加焊錫球210於基板200之襯墊201之上。儲存於焊錫球存儲單元111的焊錫球210係藉由吸入壓力而附加在焊錫球拾取單元140的延伸端點,而附加有焊錫球210的焊錫球拾取單元140會藉由圓柱頭131的旋轉以旋轉至基板200之上表面,使得附加在焊錫球拾取單元140的焊錫球210能夠被射出至襯墊201之上表面。此時,圓柱頭131可以逆時針方向旋轉以使焊錫球拾取單元140能旋轉至襯墊201的上表面,然而此旋轉方向不需要限定於逆時針方向。 Meanwhile, after the flux is applied to the liner 201 of the substrate 200, as shown in FIGS. 5A-5B, the solder ball picking unit 140 is rotated by the rotation of the cylindrical head 131 to the upper surface side of the substrate 200, so that the solder is soldered. The ball picking unit 140 is capable of applying a solder ball 210 over the pad 201 of the substrate 200. The solder ball 210 stored in the solder ball storage unit 111 is attached to the extended end of the solder ball picking unit 140 by suction pressure, and the solder ball picking unit 140 to which the solder ball 210 is attached is rotated by the cylindrical head 131. The surface is rotated to the upper surface of the substrate 200 so that the solder ball 210 attached to the solder ball pick-up unit 140 can be ejected to the upper surface of the spacer 201. At this time, the cylindrical head 131 can be rotated counterclockwise to enable the solder ball picking unit 140 to be rotated to the upper surface of the spacer 201, however, this rotational direction need not be limited to the counterclockwise direction.

類似地,藉由旋轉焊錫球拾取單元140及助焊劑沾附單元150以完成基板200上之遺失焊錫球的位置的焊錫球修復過程,其中焊錫球拾取單元140及助焊劑沾附單元150延伸至吸取頭單元120的兩側,且吸取頭單元120藉由90度在基板200上以相反方向(順時針或逆時針方向)旋轉以額外射出助焊劑及焊錫球。在修復過程之後,焊錫球修復裝置100會水平移動於基板上,如第3圖所示,以透過攝影機160檢查下一個焊錫球的遺失位置。 Similarly, the solder ball repairing process is performed by rotating the solder ball picking unit 140 and the flux adhering unit 150 to complete the solder ball repairing process on the substrate 200, wherein the solder ball picking unit 140 and the flux adhering unit 150 extend to Both sides of the head unit 120 are sucked, and the pickup head unit 120 is rotated by 90 degrees on the substrate 200 in the opposite direction (clockwise or counterclockwise) to additionally inject flux and solder balls. After the repair process, the solder ball repairing device 100 is horizontally moved on the substrate, as shown in FIG. 3, to check the lost position of the next solder ball through the camera 160.

同時,焊錫球拾取單元140的結構與運作關係將會被描述,而焊錫球拾取單元140係根據本發明實施例焊錫球修復裝置100之吸取頭單元120的構成元件。首先,第6圖是依照本 發明實施例之焊錫球修復裝置之焊錫球拾取單元應用時的剖視圖,而第7A-7D圖是依照本發明實施例之焊錫球修復裝置之焊錫球拾取單元應用時的運作狀態圖。 Meanwhile, the structure and operational relationship of the solder ball picking unit 140 will be described, and the solder ball picking unit 140 is a constituent element of the picking head unit 120 of the solder ball repairing apparatus 100 according to the embodiment of the present invention. First of all, Figure 6 is in accordance with this A cross-sectional view of a solder ball pick-up unit of a solder ball repairing apparatus according to an embodiment of the invention is applied, and FIGS. 7A-7D are operational state diagrams of a solder ball pick-up unit of a solder ball repairing apparatus according to an embodiment of the present invention.

如圖所示,根據本發明實施例之焊錫球拾取單元140是在焊錫球修復裝置100之吸取頭單元120中運用,其中焊錫球拾取單元140可包括一殼體141;由彈性驅動的一推動器142,且此推動器位於殼體141內;一成對彈性構件143,且成對彈性構件與推動器142的內端連結;以及一成對板件144用以各自壓縮成對彈性構件143。 As shown, the solder ball picking unit 140 according to an embodiment of the present invention is utilized in the picking head unit 120 of the solder ball repairing apparatus 100, wherein the solder ball picking unit 140 may include a housing 141; The 142 is located in the housing 141; a pair of elastic members 143, and the pair of elastic members are coupled to the inner ends of the pushers 142; and a pair of plates 144 for compressing the pair of elastic members 143 .

此處,彈性構件143可經由一凸輪軸132被重複地壓縮及釋放(伸張),而凸輪軸132與位於殼體141內的成對板件144之第一板件144a接觸。 Here, the elastic member 143 may be repeatedly compressed and released (stretched) via a cam shaft 132, and the cam shaft 132 is in contact with the first plate member 144a of the pair of plates 144 located in the housing 141.

再者,在焊錫球拾取單元140內,空氣被注入或是被吸入推動器142周圍,而推動器142位於殼體141內。並且,一馬達(並未顯示於圖中)可被設置於圓柱頭131內或圓柱頭131外以提供空氣或吸取殼體141內的空氣,而殼體141設置於焊錫球拾取單元140。 Further, in the solder ball picking unit 140, air is injected or drawn into the pusher 142, and the pusher 142 is located in the housing 141. Also, a motor (not shown) may be disposed within the cylindrical head 131 or outside the cylindrical head 131 to provide air or to draw air within the housing 141, and the housing 141 is disposed to the solder ball picking unit 140.

於是,焊錫球拾取單元140沿著圓柱頭131旋轉以重覆進行殼體141內的空氣提供及吸取,使得基板上的焊錫球210之拾取及射出能夠被進行,其中圓柱頭131會與凸輪軸132接合。 Then, the solder ball picking unit 140 rotates along the cylindrical head 131 to repeatedly supply and suck air in the housing 141, so that the picking up and ejecting of the solder balls 210 on the substrate can be performed, wherein the cylindrical head 131 and the cam shaft 132 joints.

將此敘述的更詳細,如第7A圖至第7C圖所示,吸取頭單元120之焊錫球拾取單元140可以一水平狀態(第7A圖)旋 轉(第7B圖)以拾取來自焊錫球存儲單元的焊錫球,而移動至一垂直狀態(第7c圖)以安裝拾取的焊錫球於基板之襯墊。 More specifically, as shown in FIGS. 7A to 7C, the solder ball picking unit 140 of the pickup head unit 120 can be rotated in a horizontal state (Fig. 7A). Turn (Fig. 7B) to pick up the solder balls from the solder ball storage unit and move to a vertical state (Fig. 7c) to mount the picked solder balls on the substrate pads.

第7A圖所示焊錫球拾取單元140之水平狀態,位於殼體141內的一第一板件144a與凸輪軸132之外部周圍表面接觸,而在推動器142外面被吸取的空氣與設置於成對彈性構件143之間的第二板件144b接合,使得殼體141的內部維持在真空狀態。因此,焊錫球210能夠被焊錫球拾取單元140之末端所拾取。 In the horizontal state of the solder ball picking unit 140 shown in FIG. 7A, a first plate member 144a located in the housing 141 is in contact with the outer peripheral surface of the cam shaft 132, and the air sucked outside the pusher 142 is disposed in the air. The second plate member 144b between the elastic members 143 is engaged such that the inside of the housing 141 is maintained in a vacuum state. Therefore, the solder ball 210 can be picked up by the end of the solder ball picking unit 140.

此時,焊錫球拾取單元140之焊錫球210的拾取係藉由空氣的吸入以吸取儲存於焊錫球存儲單元111的焊錫球,而焊錫球存儲單元111是在吸取頭傳遞單元110內。 At this time, the solder ball 210 of the solder ball pick-up unit 140 picks up the solder balls stored in the solder ball storage unit 111 by the suction of air, and the solder ball storage unit 111 is in the pick-up head transfer unit 110.

並且,第4B圖所示之焊錫球拾取單元140之旋轉狀態,當第一板件144a與凸輪軸132外部周圍的表面接觸時,第一板件144a是以順時針方向旋轉,而第一板件144a位於焊錫球拾取單元140內。第7C圖所示之焊錫球拾取單元140之垂直狀態,位於焊錫球拾取單元140內的第一板件144a會與凸輪軸132之凸出部分132a接觸,使得彈性構件143能夠彈性地移動;而藉由彈性構件143的移動,推動器142會與射出至焊錫球拾取單元140前方的第二板件144b接合,使得焊錫球210能夠被安裝於基板200之襯墊201的暴露位置。 Further, in the rotated state of the solder ball picking unit 140 shown in FIG. 4B, when the first plate member 144a is in contact with the surface around the outside of the cam shaft 132, the first plate member 144a is rotated in the clockwise direction, and the first plate The piece 144a is located within the solder ball picking unit 140. In the vertical state of the solder ball pick-up unit 140 shown in FIG. 7C, the first plate member 144a located in the solder ball pick-up unit 140 is in contact with the convex portion 132a of the cam shaft 132, so that the elastic member 143 can be elastically moved; By the movement of the elastic member 143, the pusher 142 is engaged with the second plate member 144b that is ejected to the front of the solder ball picking unit 140, so that the solder ball 210 can be mounted to the exposed position of the pad 201 of the substrate 200.

此時,當空氣注入在位於殼體141內的推動器142,附加在殼體141末端的焊錫球210便能夠被輕易的分開。 At this time, when air is injected into the pusher 142 located in the casing 141, the solder balls 210 attached to the end of the casing 141 can be easily separated.

同時,第7D圖是用以解釋當基板200發生高度差 時,彈性構件143的壓縮關係,如第7C圖所示之焊錫球拾取單元140在垂直狀態時的高度差。 Meanwhile, the 7D figure is for explaining the difference in height when the substrate 200 occurs. At the time, the compression relationship of the elastic member 143 is as shown in Fig. 7C, and the height difference of the solder ball picking unit 140 in the vertical state.

如第7C圖及第7D圖所示之焊錫球拾取單元140在垂直狀態,安裝焊錫球210於基板200之襯墊201時,一第二彈性構件143b在維持被壓縮的狀態下與一第二板件144b接觸,並且維持一第一彈性構件143a在不被壓縮的狀態下,也就是釋放的狀態下安插於第一板件144a與第二板件144b之間。 When the solder ball pick-up unit 140 shown in FIGS. 7C and 7D is in a vertical state, when the solder ball 210 is mounted on the pad 201 of the substrate 200, a second elastic member 143b is maintained in a compressed state and a second state. The plate member 144b is in contact, and maintains a first elastic member 143a interposed between the first plate member 144a and the second plate member 144b in a state of being not compressed, that is, in a released state.

無論如何,當基板200的安裝高度差發生如圖7d所示時,也就是說,當焊錫球拾取單元140與基板200的上表面之間的距離小於設計時,可能會在焊錫球210被安裝於基板200之襯墊201時發生一震動在推動器142的末端,其中推動器142的末端抓住焊錫球210,而施加在推動器142之末端的此震動可被第一彈性構件143a的壓縮所吸收。 In any event, when the mounting height difference of the substrate 200 occurs as shown in FIG. 7d, that is, when the distance between the solder ball picking unit 140 and the upper surface of the substrate 200 is smaller than the design, the solder ball 210 may be mounted. A shock occurs at the end of the pusher 142 at the pad 201 of the substrate 200, wherein the end of the pusher 142 grasps the solder ball 210, and this shock applied to the end of the pusher 142 can be compressed by the first elastic member 143a. Absorbed.

此時,當焊錫球拾取單元140與基板200之間的距離維持在如第7C圖所示之典型設計位置時,只有第二彈性構件143b會被彈性驅動,而第一彈性構件143a不會發生形變。而當焊錫球拾取裝置140與基板200之間的距離縮短至設計位置會產生偏差時,除了第二彈性構件143b之外的第一彈性構件143a也會發生形變以在一震動發生的時候。施加在推動器142上之震動的量會被第一彈性構件143a所吸收以避免推動器142的彎曲或損害。 At this time, when the distance between the solder ball picking unit 140 and the substrate 200 is maintained at a typical design position as shown in FIG. 7C, only the second elastic member 143b is elastically driven, and the first elastic member 143a does not occur. deformation. When the distance between the solder ball picking device 140 and the substrate 200 is shortened to the design position, the first elastic member 143a other than the second elastic member 143b is deformed to occur at the time of a shock. The amount of shock applied to the pusher 142 is absorbed by the first resilient member 143a to avoid bending or damage to the pusher 142.

因此,藉由增加成對彈性構件之第一彈性構件143a 的剛性,使第一彈性構件143a的剛性大於第二彈性構件143b的剛性,能夠讓施加於推動器之震動的最終量被第一彈性構件143a所吸收,其中成對彈性構件係位於焊錫球拾取單元140內。 Therefore, by adding the first elastic member 143a of the pair of elastic members The rigidity of the first elastic member 143a is greater than the rigidity of the second elastic member 143b, so that the final amount of vibration applied to the pusher can be absorbed by the first elastic member 143a, wherein the pair of elastic members are located in the solder ball picking Within unit 140.

同時,第8A-8B圖繪示根據本發明實施例之設置於吸取頭單元中之焊錫球拾取單元拾取銲錫球以及助焊劑沾附單元沾附助焊劑的示意圖。如圖所示,透過焊錫球存儲單元111以及助焊劑存儲單元112,焊錫球拾取單元140以及助焊劑沾附單元150能夠提供焊錫球與助焊劑,其中焊錫球存儲單元111以及助焊劑存儲單元112被提供於吸取頭傳遞單元110的兩側,且是處於水平地與圓柱頭接合的狀態。 Meanwhile, FIGS. 8A-8B are schematic views showing that the solder ball pick-up unit provided in the pick-up head unit picks up the solder ball and the flux adhering unit adheres the flux according to an embodiment of the present invention. As shown, through the solder ball storage unit 111 and the flux storage unit 112, the solder ball picking unit 140 and the flux adhering unit 150 can provide a solder ball and a flux, wherein the solder ball storage unit 111 and the flux storage unit 112 It is provided on both sides of the suction head transfer unit 110, and is in a state of being horizontally engaged with the cylindrical head.

首先,透過焊錫球存儲單元111供應具有焊錫球的焊錫球拾取單元140。焊錫球存儲單元111可被提供於吸取頭傳遞單元110之一側的下方,而用以射出焊錫球之一射出孔111a可形成於焊錫球存儲單元111之內表面。多個焊錫球210可被儲存於焊錫球存儲單元111,而焊錫球210可透過射出孔111a逐一被射出。此時,焊錫球存儲單元111的一下表面、兩側表面以及一上表面中的至少一表面會被做成具有多個空氣入口孔的多孔表面,而採用此多孔表面通過,使得多個焊錫球漂浮地移動並且透過射出孔111a被射出。並且,焊錫球拾取單元140藉由真空壓力拾取通過射出孔111a被射出的焊錫球,其中真空壓力產生於焊錫球拾取單元140前面,起因為維持上述之殼體141內部的真空狀態。 First, the solder ball picking unit 140 having the solder balls is supplied through the solder ball storage unit 111. The solder ball storage unit 111 may be provided below one side of the pickup transfer unit 110, and an ejection hole 111a for emitting the solder ball may be formed on the inner surface of the solder ball storage unit 111. The plurality of solder balls 210 may be stored in the solder ball storage unit 111, and the solder balls 210 may be ejected one by one through the exit holes 111a. At this time, at least one of the lower surface, the both side surfaces, and an upper surface of the solder ball storage unit 111 is formed into a porous surface having a plurality of air inlet holes, and the porous surface is passed through to make the plurality of solder balls It moves floatingly and is emitted through the injection hole 111a. Further, the solder ball pick-up unit 140 picks up the solder ball that is ejected through the exit hole 111a by vacuum pressure, wherein the vacuum pressure is generated in front of the solder ball pick-up unit 140 because the vacuum state inside the casing 141 is maintained.

同時,助焊劑存儲單元112可被提供於吸取頭傳遞單元110之另一側的下方;而助焊劑沾附單元150之端點通過一沾附槽112a(dotting groove),此沾附槽112a可被形成於助焊劑存儲單元112的內表面。膏狀之助焊劑可被儲存於助焊劑存儲單元112內,且此助焊劑可透過沾附槽112a被暴露出來。此時,助焊劑存儲單元112之沾附槽112a可被形成為多孔槽的一部分或者可用液體吸收材料例如海綿製作,使得特性量的助焊劑能夠存在於沾附槽112a之表面。且當助焊劑沾附單元150的末端旋轉以通過沾附槽112a時,特定量的助焊劑會黏在助焊劑沾附單元150的末端,使得助焊劑能夠被施加在基板200之襯墊201的上表面。 Meanwhile, the flux storage unit 112 may be provided under the other side of the suction head transfer unit 110; and the end of the flux adhering unit 150 passes through a dotting groove 112a, the adhesion groove 112a may be It is formed on the inner surface of the flux storage unit 112. The paste flux can be stored in the flux storage unit 112, and the flux can be exposed through the adhesion groove 112a. At this time, the adhesion groove 112a of the flux storage unit 112 may be formed as a part of the porous groove or may be made of a liquid absorbing material such as a sponge, so that a characteristic amount of the flux can exist on the surface of the adhesion groove 112a. And when the end of the flux adhering unit 150 is rotated to pass through the sinking groove 112a, a certain amount of flux may adhere to the end of the flux adhering unit 150, so that the flux can be applied to the pad 201 of the substrate 200. Upper surface.

此時,焊錫球存儲單元111的焊錫球射出結構以及助焊劑存儲單元112的助焊劑射出結構顯示在圖中做為一範例,當焊錫球拾取單元140以及助焊劑沾附單元150之實施例變動時,射出結構可以改變而不須限制於此。 At this time, the solder ball ejection structure of the solder ball storage unit 111 and the flux ejection structure of the flux storage unit 112 are shown as an example in the figure, and the embodiment of the solder ball picking unit 140 and the flux adhering unit 150 are changed. The injection structure can be changed without being limited thereto.

如上述,為形成一焊錫凸塊於基板上而射出焊錫球時,根據本發明之焊錫球修復裝置能夠輕易地額外射出焊錫球至遺失焊錫球的基板,因此,本發明可以阻止因為未充填焊錫球所造成的基板缺陷。 As described above, in order to form a solder bump on the substrate to emit the solder ball, the solder ball repairing apparatus according to the present invention can easily additionally project the solder ball to the substrate on which the solder ball is lost. Therefore, the present invention can prevent the solder from being unfilled. Substrate defects caused by the ball.

再者,因為當本發明之焊錫球修復裝置朝一方向移動時會尋找基板尚未被充填的焊錫球,並且藉由吸取頭單元的旋轉以連續地進行施加助焊劑及充填焊錫球,其中吸取頭單元是在吸取頭傳遞單元中旋轉,所以本發明可能降低焊錫球的修復時 間。 Furthermore, since the solder ball repairing device of the present invention moves in one direction, it searches for a solder ball whose substrate has not been filled, and continuously applies flux and fills the solder ball by the rotation of the pick-up head unit, wherein the pick-up head unit Is rotating in the suction head transfer unit, so the present invention may reduce the repair of the solder ball between.

並且,因為藉由在焊錫球拾取單元中安裝成對板件以及彈性構件使得本發明之焊錫球修復裝置能夠吸收施加於推動器的外來震動,其中外來震動是來自與推動器末端接合的焊錫球,所以本發明可能預防推動器的損害或彎曲。 And, since the solder ball repairing apparatus of the present invention can absorb the external shock applied to the pusher by mounting the pair of plates and the elastic member in the solder ball picking unit, the external shock is from the solder ball engaged with the end of the pusher. Therefore, the present invention may prevent damage or bending of the pusher.

綜上所述,雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。 In conclusion, the present invention has been disclosed in the above preferred embodiments, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧焊錫球修復裝置 100‧‧‧ solder ball repairing device

110‧‧‧吸取頭傳遞單元 110‧‧‧Sucking head transfer unit

111‧‧‧焊錫球存儲單元 111‧‧‧ solder ball storage unit

112‧‧‧助焊劑存儲單元 112‧‧‧ Flux storage unit

120‧‧‧吸取頭單元 120‧‧‧Sucking head unit

130‧‧‧旋轉軸 130‧‧‧Rotary axis

131‧‧‧圓柱頭 131‧‧‧Cylindrical head

132‧‧‧凸輪軸 132‧‧‧Camshaft

140‧‧‧焊錫球拾取單元 140‧‧‧ solder ball picking unit

150‧‧‧助焊劑沾附單元 150‧‧‧flux adhesion unit

160‧‧‧攝影機 160‧‧‧ camera

200‧‧‧基板 200‧‧‧Substrate

210‧‧‧焊錫球 210‧‧‧ solder balls

300‧‧‧支撐部 300‧‧‧Support

Claims (17)

一種焊錫球修復裝置,包括:一吸取頭傳遞單元,沿著一支撐部被水平傳遞,而該支撐部係在一基板之上;以及一吸取頭單元,設置於該吸取頭傳遞單元之下,以藉由一旋轉軸而旋轉,並且在該旋轉軸旋轉過程中該吸取頭單元從該吸取頭傳遞單元拾取一焊錫球,以向該基板上一遺失該焊錫球的位置射出該焊錫球。 A solder ball repairing device comprising: a suction head transfer unit horizontally transferred along a support portion, wherein the support portion is attached to a substrate; and a suction head unit disposed under the suction head transfer unit Rotating by a rotating shaft, and during the rotation of the rotating shaft, the pick-up head unit picks up a solder ball from the pick-up head transfer unit to eject the solder ball to a position on the substrate where the solder ball is lost. 如申請專利範圍第1項所述之焊錫球修復裝置,其中該吸取頭傳遞單元的兩側具有一焊錫球存儲單元以及一助焊劑存儲單元。 The solder ball repairing device of claim 1, wherein the suction head transfer unit has a solder ball storage unit and a flux storage unit on both sides. 如申請專利範圍第2項所述之焊錫球修復裝置,其中該吸取頭單元包括:一旋轉軸,由一凸輪軸及一圓柱頭所組成;以及一焊錫球拾取單元及一助焊劑沾附單元,該焊錫球拾取單元及該助焊劑沾附單元延伸至該圓柱頭的兩端;以及一攝影機,安裝於該圓柱頭以拍攝該基板的上表面。 The solder ball repairing device of claim 2, wherein the suction head unit comprises: a rotating shaft composed of a cam shaft and a cylindrical head; and a solder ball picking unit and a flux adhering unit, The solder ball picking unit and the flux adhering unit extend to both ends of the cylindrical head; and a camera mounted to the cylindrical head to photograph the upper surface of the substrate. 如申請專利範圍第3項所述之焊錫球修復裝置,其中該圓柱頭以90度、180度或360度向右方或左方繞該凸輪軸旋轉。 The solder ball repairing device of claim 3, wherein the cylindrical head rotates about the cam shaft to the right or left at 90 degrees, 180 degrees or 360 degrees. 如申請專利範圍第3項所述之焊錫球修復裝置,其中該吸取頭傳遞單元更包括一控制單元,當該攝影機拍攝到該基板的一襯墊的一暴露表面,該控制單元便產生一停止訊號;當該攝影機 拍攝到該焊錫球安裝於該基板的該襯墊,該控制單元產生一移動訊號。 The solder ball repairing device of claim 3, wherein the picking head transfer unit further comprises a control unit, wherein the control unit generates a stop when the camera captures an exposed surface of a pad of the substrate Signal; when the camera The pad is mounted on the substrate, and the control unit generates a movement signal. 如申請專利範圍第3項所述之焊錫球修復裝置,其中該焊錫球拾取單元及該助焊劑沾附單元為在該吸取頭傳遞單元停止時維持水平狀態,且該焊錫球拾取單元及該助焊劑沾附單元的延伸端點與該焊錫球存儲單元以及該助焊劑存儲單元接觸。 The solder ball repairing device according to claim 3, wherein the solder ball picking unit and the flux adhering unit maintain a horizontal state when the picking head transfer unit is stopped, and the solder ball picking unit and the assisting An extended end of the flux adhering unit is in contact with the solder ball storage unit and the flux storage unit. 如申請專利範圍第5項所述之焊錫球修復裝置,其中該助焊劑沾附單元藉由一旋轉軸的順時針旋轉將該助焊劑施加於該基板的該襯墊上,其中該助焊劑係儲存於該助焊劑存儲單元。 The solder ball repairing device of claim 5, wherein the flux adhering unit applies the flux to the spacer of the substrate by a clockwise rotation of a rotating shaft, wherein the flux is Stored in the flux storage unit. 如申請專利範圍第5項所述之焊錫球修復裝置,其中該焊錫球拾取單元藉由該旋轉軸的逆時針旋轉將該焊錫球安裝於該基板的該襯墊上,其中該焊錫球儲存於該焊錫球存儲單元。 The solder ball repairing device of claim 5, wherein the solder ball picking unit mounts the solder ball on the pad of the substrate by counterclockwise rotation of the rotating shaft, wherein the solder ball is stored in The solder ball storage unit. 如申請專利範圍第3項所述之焊錫球修復裝置,其中該焊錫球拾取單元包括:一殼體;以及一推動器,該推動器係由彈性驅動且該推動器位於該殼體內;以及一成對彈性構件,且該成對彈性構件與該推動器的內端連結;以及一成對板件用以各自壓縮該成對彈性構件。 The solder ball repairing device of claim 3, wherein the solder ball picking unit comprises: a housing; and a pusher that is elastically driven and the pusher is located in the housing; And a pair of elastic members coupled to the inner ends of the pusher; and a pair of plates for compressing the pair of elastic members, respectively. 如申請專利範圍第9項所述之焊錫球修復裝置,其中該焊錫球拾取單元在該推動器周圍注入以及吸取空氣,其中該推動 器設置於該殼體內;該焊錫球拾取單元藉由驅動設置於該圓柱頭內或該圓柱頭外的一馬達以提供空氣至該殼體或吸取該殼體內的空氣,而該殼體配置於該圓柱頭上。 The solder ball repairing device of claim 9, wherein the solder ball picking unit injects and draws air around the pusher, wherein the pushing The solder ball pick-up unit is configured to drive air to the housing or to suck air in the housing by driving a motor disposed in the cylinder head or outside the cylinder head, and the housing is disposed on the housing On the cylinder head. 如申請專利範圍第9項所述之焊錫球修復裝置,其中該焊錫球拾取單元之該成對板件的一第一板件與該凸輪軸的一凸出部分接觸,以維持一第二彈性構件在被壓縮的狀態下與一第二板件接觸,並且維持一第一彈性構件在不被壓縮的狀態下安插於該第一板件與該第二板件之間。 The solder ball repairing device of claim 9, wherein a first plate member of the pair of plate members of the solder ball picking unit is in contact with a protruding portion of the cam shaft to maintain a second elasticity The member is in contact with a second plate member in a compressed state, and maintains a first elastic member interposed between the first plate member and the second plate member without being compressed. 如申請專利範圍第11項所述之焊錫球修復裝置,其中該第一彈性構件的剛性較第二彈性構件的剛性高。 The solder ball repairing device of claim 11, wherein the first elastic member has a higher rigidity than the second elastic member. 如申請專利範圍第2項所述之焊錫球修復裝置,其中該焊錫球存儲單元被提供於該吸取頭傳遞單元的一側下方,並且該焊錫球存儲單元在一內表面具有一射出孔以射出該焊錫球。 The solder ball repairing device of claim 2, wherein the solder ball storage unit is provided below a side of the suction head transfer unit, and the solder ball storage unit has an exit hole on an inner surface to emit The solder ball. 如申請專利範圍第13項所述之焊錫球修復裝置,其中該焊錫球存儲單元之一下表面以及兩側表面或一上表面中,至少一表面是具有複數個空氣入口孔的一多孔表面。 The solder ball repairing device of claim 13, wherein at least one of the lower surface and the two side surfaces or an upper surface of the solder ball storage unit is a porous surface having a plurality of air inlet holes. 如申請專利範圍第3項所述之焊錫球修復裝置,其中該助焊劑存儲單元被提供於該吸取頭傳遞單元的一另一側下方,並且該助焊劑存儲單元具有位於內表面的一沾附槽,使該助焊劑沾附單元的末端通過該沾附槽。 The solder ball repairing device of claim 3, wherein the flux storage unit is provided under one other side of the suction head transfer unit, and the flux storage unit has an attached surface on the inner surface. a groove through which the end of the flux adhering unit passes. 如申請專利範圍第15項所述之焊錫球修復裝置,其中該沾附槽以一多孔槽部的形式形成或是由一液體吸收材料所製成。 The solder ball repairing device of claim 15, wherein the dipping groove is formed in the form of a porous groove or is made of a liquid absorbing material. 如申請專利範圍第3項所述之焊錫球修復裝置,其中該吸取頭單元被設置於該吸取頭傳遞單元之下,且被設置於該吸取頭單元內的該攝影機是直接被設置於該圓柱頭之下。 The solder ball repairing device of claim 3, wherein the pick-up head unit is disposed under the pick-up head transfer unit, and the camera disposed in the pick-up head unit is directly disposed on the cylinder Below the head.
TW102130879A 2012-11-22 2013-08-28 Solder ball repair apparatus TW201420254A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120133032A KR101442350B1 (en) 2012-11-22 2012-11-22 Solderball repair apparatus

Publications (1)

Publication Number Publication Date
TW201420254A true TW201420254A (en) 2014-06-01

Family

ID=50892680

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102130879A TW201420254A (en) 2012-11-22 2013-08-28 Solder ball repair apparatus

Country Status (3)

Country Link
JP (1) JP5680723B2 (en)
KR (1) KR101442350B1 (en)
TW (1) TW201420254A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101708594B1 (en) * 2016-07-05 2017-02-20 변도영 Apparatus for repairing defect of substrate
CN111515604B (en) * 2020-05-13 2021-10-12 瑞安市异想天开科技有限公司 Transferring and overturning machine for welding engine hood and using method thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3232824B2 (en) * 1993-10-22 2001-11-26 ソニー株式会社 Thermocompression bonding tool, bump forming method and lead bonding method
JPH09314324A (en) * 1996-05-30 1997-12-09 Sony Corp Fine sphere feeding device
KR100277312B1 (en) 1998-02-27 2001-02-01 김종배 Rotary Tilting Solder Ball Feeder
KR100399894B1 (en) 2000-12-30 2003-09-29 주식회사 하이닉스반도체 An apparatus for flux dotting
JP3854859B2 (en) * 2001-12-11 2006-12-06 日立ビアメカニクス株式会社 Conductive ball mounting device
JP2006135014A (en) * 2004-11-04 2006-05-25 Waida Seisakusho:Kk Solder ball discharging device and solder ball loading system
JP4338714B2 (en) * 2006-03-14 2009-10-07 株式会社和井田製作所 Solder ball mounting apparatus, solder ball mounting method, and solder ball mounting system
JP5098434B2 (en) * 2007-05-21 2012-12-12 株式会社日立プラントテクノロジー Solder ball printing device
KR101146689B1 (en) 2011-04-13 2012-05-22 (주) 에스에스피 Solder ball supply device

Also Published As

Publication number Publication date
KR101442350B1 (en) 2014-09-17
KR20140065940A (en) 2014-05-30
JP5680723B2 (en) 2015-03-04
JP2014104511A (en) 2014-06-09

Similar Documents

Publication Publication Date Title
TWI610377B (en) Electronic component mounting device
TWI357381B (en)
JP2002289635A (en) Ball transcriber and ball alignment apparatus
TW201017786A (en) Solder ball check and repair device and solder ball check and repair method
US20050268457A1 (en) Apparatus and method for mounting electronic components
JP2014179561A (en) Bonding head and die bonder equipped with the same
TW201420254A (en) Solder ball repair apparatus
JP5245571B2 (en) Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, and pin
KR101687022B1 (en) Die suction device
TWI581347B (en) Flip-chip mounter and mounting method using it
JP6499768B2 (en) Component mounter, component holding member imaging method
JP4313814B2 (en) Solder ball mounting method and solder ball mounting apparatus
JP6047239B2 (en) Component suction nozzle and component mounting device
JP2005251978A (en) Electronic component mounting apparatus and method therefor
JP7451259B2 (en) Electronic component mounting equipment
JP7450429B2 (en) Electronic component mounting equipment
JP2006286989A (en) Printing method and system thereof
JP2005251979A (en) Electronic component recovery apparatus and method therefor, and electronic component mounting apparatus
KR101106550B1 (en) Lid sealing apparatus using ultrasonic wave
JP5099098B2 (en) Component mounting apparatus and component mounting method
KR101575232B1 (en) Apparatus for laser soldering
KR102280054B1 (en) Solder Ball Attachment Apparatus and Method
CN107887315B (en) Chip picking and handing-over device
JP6019983B2 (en) Semiconductor package inspection method and mounting method and mounting structure using the same
KR20240149241A (en) Thermocompression Bonding Apparatus