TW201418127A - Apparatus for transfering substrate - Google Patents

Abstract

An apparatus for transferring a substrate is provided. The apparatus for transferring a substrate in accordance with an embodiment of the present invention includes: a base; a first transferring magnet, installed on the base; a table, having a substrate received on a top face thereof, arranged to be separated upwardly from the base, and installed to be movable forward-and-backward or upward-and-downward about the base; and a second transferring magnet, installed on the table to correspond to a position of the first transferring magnet and configured to move the table using a magnetic force generated by an interaction with the first transferring magnet.

Description

Equipment for transferring substrates

The present invention relates to an apparatus for transferring a substrate.

Components such as semiconductor wafers, printed circuit boards, and semiconductor modules have important functions for the final product. The reliability of the components is very important, and therefore these components are subject to strict quality inspection before shipment.

At the same time, not only semiconductor wafers and semiconductor modules, but also printed circuit boards are increasingly manufactured with a higher density and a smaller number of embedded wafers in a smaller thickness. Use AFVI (Automatic Final Visual Inspection) equipment to visually inspect and detect damage, contamination, dents, and stains on high-density semiconductor wafers, semiconductor modules, and printed circuit board surfaces.

When the printed circuit board is inspected with AFVI equipment, the printed circuit board is transferred using a variety of transfer equipment. In some examples of such various transfer devices, the printed circuit board is directly adsorbed and transferred by a vacuum pad, or the printed circuit board is transferred in a track.

However, in the case of using a vacuum pad as a transfer device, if the vacuum pad is contaminated with organic substances, the printed circuit board may also be contaminated, and if the suction power of the vacuum pad is problematic, the printed circuit board may fall. and Damage to the product that cannot be repaired.

Further, in the case of using the track as the transfer device, if the printed circuit board is not discharged, it is necessary to manually discharge the printed circuit board or do it again, which may cause scratches on the surface of the printed circuit board.

The related art of the present invention is disclosed in Korean Patent Publication No. 10-2008-0113711 (unit for transferring a substrate and a die attaching device; disclosed on December 31, 2008).

The present invention provides an apparatus for transferring a substrate that minimizes contamination or damage to the printed circuit board.

An aspect of the present invention provides an apparatus for transferring a substrate, comprising: a base; a first transfer magnet, the first transfer magnet being mounted on the base; and a work table receiving the substrate on a top surface thereof, the substrate It is configured to be separated upward from the base and installed near the base to move back and forth or up and down; and a second transfer magnet, the second transfer magnet is mounted on the table corresponding to the position of the first transfer magnet, and is configured In order to interact with the first transfer magnet, a magnetic force is generated to move the table.

The apparatus for transferring the base station can also include a position aligning unit configured to adjust the position of the substrate on the work table to align the substrate received at the top surface of the table to the reference position.

The position aligning unit may also include: an adjustment device movably mounted on the table and configured to provide a position adjustment external force to the substrate; and a driver configured to provide a movement adjustment device power.

The driver may include a pair of alignment magnets that are respectively mounted on the adjustment device and the table and that generate magnetic forces by their interaction.

At least one of the pair of alignment magnets is an electromagnet.

The adjustment device can include: a lateral adjustment device configured to adjust a lateral position of the substrate; and a longitudinal adjustment device configured to adjust a longitudinal position of the substrate.

The apparatus for transferring the substrate may also include a reference frame mounted on the top surface of the table and configured to provide a reference position for positioning the substrate by the position alignment unit.

The reference frame can include: a lateral reference frame configured to provide a reference position of the substrate in a lateral direction; and a longitudinal reference frame configured to provide a reference position of the substrate in the longitudinal direction.

The apparatus for transferring the substrate may also include a suction device configured to provide suction to the suction space. The table may have a plurality of suction holes formed on a top surface thereof to support the substrate by suction, and the table may have a suction space formed therein, the suction space being connected to the plurality of suction holes.

A plurality of second transfer magnets may be provided, and the plurality of second transfer magnets may be arranged in a row along either side boundary of the bottom surface of the table. A plurality of first transfer magnets may be provided, and a plurality of first transfer magnets may be disposed on opposite sides of the plurality of second transfer magnets.

At least one of the first transfer magnet and the second transfer magnet is an electromagnet.

10‧‧‧Substrate

100‧‧‧ Equipment

110‧‧‧Base

120‧‧‧First transfer magnet

130‧‧‧Workbench

132‧‧‧ suction hole

134‧‧‧ suction space

140‧‧‧Second transfer magnet

150‧‧‧ Position Alignment Unit

151‧‧‧Adjustment device

152‧‧‧Horizontal adjustment device

153‧‧‧Longitudinal adjustment device

154‧‧‧ drive

155‧‧‧Aligning magnets

160‧‧‧ reference frame

162‧‧‧Horizontal reference frame

164‧‧‧Vertical reference frame

170‧‧‧Attraction device

Figure 1 is an apparatus for transferring a substrate in accordance with an embodiment of the present invention.

Figure 2 is a top plan view of an apparatus for transferring a substrate in accordance with an embodiment of the present invention.

Figure 3 is a bottom plan view of the underside of the table of the apparatus for transferring substrates in accordance with an embodiment of the present invention.

Hereinafter, an apparatus for transferring a substrate will be described in detail with reference to the accompanying drawings in accordance with an embodiment of the present invention. In the description of the present invention, the same or corresponding elements will be assigned to the same reference numerals, and will not be repeatedly described.

1 shows an apparatus 100 for transferring a substrate according to an embodiment of the present invention, and FIG. 2 is a top view of an apparatus 100 for transferring a substrate according to an embodiment of the present invention. Further, Fig. 3 is a bottom view of the bottom surface of the table 130 of the apparatus 100 for transferring a substrate in accordance with an embodiment of the present invention.

As illustrated in FIGS. 1 to 3, the apparatus 100 for transferring a substrate according to the present embodiment can be installed in, for example, an AFVI (Automatic Final Visual Inspection) apparatus that needs to transfer a printed circuit board, and The susceptor 110, the first transfer magnet 120, the table 130, the second transfer magnet 140, the alignment unit 150, the adjustment device 151, the driver 154, the reference frame 160, and the suction device 170 are included.

According to the present embodiment, when the substrate 10 is received on the table 130, the table 130 is transferred by using a magnetic force, and the substrate 10 can be stably transferred and any possible contamination or damage of the substrate 10 can be prevented.

Hereinafter, according to the present embodiment, elements of the apparatus 100 for transferring a substrate will be described in detail with reference to FIGS. 1 to 3.

The susceptor 110 is an element corresponding to a fastening unit of the apparatus 100 for transferring a substrate, and as shown in Fig. 1, the susceptor 110 may have a first transfer magnet 120 mounted on an upper surface thereof.

The table 130 is an element corresponding to the mobile unit of the device 100 for transferring the pedestal. As shown in FIG. 1 , the table 130 is configured to be separated upward from the susceptor 110 and can be installed near the susceptor 110. Move back and forth or up and down.

The device 100 for transferring the pedestal can have guidance of the mobile workbench 130 even if not shown. For example, the apparatus 100 for transferring a pedestal may have built-in horizontal guidance to guide movement in the front-rear direction, and vertical guidance to guide movement in the up-and-down direction.

As illustrated in Figure 2, the table 130 receives the substrate 10 on its top surface. As shown in FIGS. 1 and 2, a plurality of suction holes 132 may be formed in a region with respect to a position at which the substrate 10 is received, and a suction space 134 connected to the plurality of suction holes 132 may be inside the table 130. form.

The suction space 134 is connected to the suction device 170 (such as a vacuum pump), sucks air to provide a negative pressure, and provides suction to the substrate 10 via the suction space 134 and the suction hole 132.

Therefore, the suction hole 132 and the suction space 134 are formed in the table 130 and the mounting suction device 170 is coupled thereto, at the table 130. The substrate 10 received thereon can be stably supported on the table 130 by the suction force of the suction device 170.

As shown in FIG. 1, the second transfer magnet 140 is mounted on the table 130 according to the position of the first transfer magnet 120 to move by a magnetic force (for example, gravity and repulsive force) generated by interaction with the first transfer magnet 120. Workbench 130.

That is, the second transfer magnet 140 is an element that interacts with the first transfer magnet 120, and together with the first transfer magnet 120 serves as a drive unit for the apparatus 100 for transferring the substrate, and the second transfer magnet 140 can be similar. The principle of the electric motor is driven according to Fleming's left-hand rule, and the table 130 is moved in the front-rear direction on the base 110.

The magnetic characteristics of the electromagnet may vary depending on the direction and magnitude of the current, in which case the electromagnet may be used for the first transfer magnet 120. In other words, the electromagnetic force of the first transfer magnet 120 may have a change in polarity depending on a change in the direction of the current, or a change in the magnitude of the magnetic field depending on a change in the magnitude of the current.

Thus, since the polarity of the first transfer magnet 120 can be reversely changed by using the electromagnet as the first transfer magnet 120, the attractive force and the repulsive force are repeatedly applied to the second transfer magnet 140, and the second transfer magnet 140 In interaction with the first transfer magnet 120, since the polarity of the first transfer magnet 120 is changed, the table 130 having the second transfer magnet 140 mounted thereon can be moved in the front-rear direction on the susceptor 110.

In addition, when the polarities of the first transfer magnet 120 and the second transfer magnet 140 match each other, the intensity of the first transfer magnet can be adjusted by adjusting the magnitude of the current applied to the first transfer magnet 120, and can be converted by the first Transfer The magnitude of the magnetic force generated by the interaction of the magnet 120 and the second transfer magnet 140. As a result, the table 130 having the second transfer magnet 140 mounted thereon can be moved in the front-rear direction on the susceptor 110.

A permanent magnet can be used for the second transfer magnet 140, and it should be understood that the electromagnet can also be used for the second transfer magnet 140.

As shown in FIGS. 1 and 3, the first transfer magnet 120 and the second transfer magnet 140 may be provided in plurality, and the plurality of second transfer magnets 140 may be along any of the bottom faces of the table 130. The side boundaries are arranged in a row. Further, the first transfer magnet 120 may be mounted on the top surface of the susceptor 110 and the opposite side of the second transfer magnet 140.

As illustrated in FIG. 2, the alignment unit 150 can adjust the position of the substrate 10 on the table 130 to align the substrate 10 received on the top surface to the reference position.

By mounting the position aligning unit 150 on the table 130, when the substrate 10 is received at the table 130 using external equipment, the positioning of the substrate 10 need not be too precise. Further, the substrate 10 is on the table 130. It is more accurate than positioning by external equipment. The alignment unit 150 can be composed of an adjustment device 151 and a driver 154.

As illustrated in Fig. 2, the adjustment device 151 is movably mounted on the table 130 to apply an external force to the substrate 10 to adjust the position. That is, the adjusting device 151 is linearly movably mounted on the top surface of the table 130, and the substrate 10 can be repositioned in the moving direction of the adjusting device 151.

The driver 154 can provide a driving force to the adjusting device 151 to perform the movement of the adjusting device 151. For example, as illustrated in FIG. 2, the driver 154 can It is composed of a pair of alignment magnets 155 which are respectively mounted on the adjustment device 151 and the work table 130, and which generate a magnetic force (gravitational force and repulsive force) by their interaction.

In this case, at least one of the pair of alignment magnets 155 may be an electromagnet, and as described above, the polarity direction or magnitude of the alignment magnet 155 may be changed by adjusting the current supplied to the alignment magnet 155. Therefore, the adjusting device 151 can move the table 130 and adjust the position of the substrate 10.

The adjustment device 151 can be constituted by a lateral adjustment device 152 and a longitudinal adjustment device 153. That is, as illustrated in Fig. 2, the lateral adjustment means 152 can laterally move the substrate 10 by applying an external force laterally, and the longitudinal adjustment means 153 can longitudinally move the substrate 10 by applying an external force in the longitudinal direction.

Although three longitudinal adjustment devices 153 are installed in the present embodiment, the number of lateral adjustment devices 152 and longitudinal adjustment devices 153 are not limited to the present embodiment.

As shown in FIGS. 1 and 2, the reference frame 160 can be mounted on the top surface of the table 130 and provides a reference position for positioning the substrate 10 by the alignment unit 150. Therefore, by predetermining the alignment position of the substrate 10 on the table 130 by using the reference frame 160, the alignment unit 150 does not need to be too precisely controlled in order to adjust the substrate 10 to the precise position, and thus the substrate 10 can be received in the right place more easily and efficiently.

The reference frame 160 may be comprised of a lateral reference frame 162 and a longitudinal reference frame 164 that provides a reference position of the substrate 10 in the lateral direction, the longitudinal reference frame 164 providing a reference position of the substrate 10 in the longitudinal direction.

Moving the substrate 10 laterally by using the lateral adjustment device 152 The left side of the second figure), the lateral reference frame 162 acts as a lateral braking device to prevent the substrate 10 from moving away from the reference point and more laterally (i.e., moving to the left). In addition, by using the longitudinal adjustment device 153 to longitudinally move the substrate 10 (toward the lower portion of FIG. 2), the longitudinal reference frame 164 acts as a longitudinal braking device to prevent the substrate 10 from moving away from the reference point and more longitudinally (ie, moving to Below).

While a few embodiments of the invention have been described, it will be understood by those of ordinary skill in the art that the invention Patent scope.

In addition to the above-described embodiments, many other embodiments are also understood to be included in the scope of the present invention.

100‧‧‧ Equipment

110‧‧‧Base

120‧‧‧First transfer magnet

130‧‧‧Workbench

132‧‧‧ suction hole

134‧‧‧ suction space

140‧‧‧Second transfer magnet

160‧‧‧ reference frame

162‧‧‧Horizontal reference frame

164‧‧‧Vertical reference frame

170‧‧‧Attraction device

Claims (11)

An apparatus for transferring a substrate, comprising: a base; a first transfer magnet, the first transfer magnet being mounted on the base; and a work table receiving a substrate on a top surface thereof The substrate is configured to be separated upward from the base and mounted adjacent to the base for movement back and forth or up and down; and a second transfer magnet, the second transfer magnet being mounted at a position corresponding to the first transfer magnet The table is configured to interact with the first transfer magnet to generate a magnetic force to move the table. The apparatus of claim 1 further comprising a position aligning unit configured to adjust a position of the substrate on the table to align the top surface of the table The substrate received is brought to a reference position. The device of claim 2, wherein the position aligning unit comprises: an adjusting device movably mounted on the table and configured to provide an external force of position adjustment to the substrate; A driver configured to provide a driving force for moving the adjustment device. The device of claim 3, wherein the driver comprises a pair of alignment magnets respectively mounted on the adjustment device and the table, and a magnetic force is generated by the interaction thereof. The device of claim 4, wherein at least one of the pair of alignment magnets is an electromagnet. The device of claim 3, wherein the adjusting device comprises: a lateral adjustment device configured to adjust a lateral position of the substrate; and a longitudinal adjustment device configured to adjust a longitudinal position of the substrate. The device of claim 2, further comprising a reference frame mounted on the top surface of the table and configured to provide a reference position for positioning the substrate by the position alignment unit . The apparatus of claim 7, wherein the reference frame comprises: a lateral reference frame configured to provide a reference position of the substrate in a lateral direction; and a longitudinal reference frame, the longitudinal reference frame being It is configured to provide a reference position of the substrate in the longitudinal direction. The apparatus of claim 1, further comprising a suction device configured to provide suction to one of the suction spaces, wherein the table has a plurality of suction holes formed on a top surface thereof by the The suction supports the substrate, and wherein the table has the suction space formed therein, the suction space being connected to the plurality of suction holes. The device of claim 1, wherein the second transfer magnet is provided in plurality, and the plurality of second transfer magnets are arranged in a column along either side boundary of the bottom surface of the table, and wherein the plurality A plurality of transfer magnets are provided, and the plurality of first transfer magnets may be disposed on opposite sides of the plurality of second transfer magnets. The device of claim 1, wherein the first transfer magnet and the second At least one of the transfer magnets is an electromagnet.