TW201416648A - Spectrometer and optical module thereof - Google Patents

Abstract

A spectrometer includes an optical module and a photo sensor. The optical module includes a base, a first waveguide, a second waveguide, and a diffraction grating. The base includes a carrying part and a plurality of spacing parts connected to the carrying part. The carrying part has a bearing surface. The spacing parts are located around the carrying part. The first waveguide is disposed between the second waveguide and the bearing surface, and the spacing parts support the second waveguide to form a gap passage for transporting a signal light. The diffraction grating is located above the bear surface and disperses the signal light. The photo sensor receives spectrum light.

Description

Spectrometer and its optical machine

This invention relates to an optical device, and more particularly to a spectrometer and its optomechanical machine.

A spectrometer is a scientific instrument that can disperse light. Currently, some spectrometers include two optical waveguides that reflect light and a grating with spectroscopic function. After the signal light to be measured enters the spectrometer, the signal light is reflected between the optical waveguides and transmitted to the grating so that the grating can split the signal light.

1 is a schematic cross-sectional view of a conventional spectrometer. Referring to FIG. 1, a conventional spectrometer 100 includes a pair of optical waveguides 140, 160, a plurality of screws 110, and a plurality of screw spacers 130. These optical waveguides 140 and 160 are assembled by these screws 110, and these screw spacers 130 are disposed between the optical waveguides 140 and 160 and are respectively penetrated by the screws 110.

These screw spacers 130 support the upper optical waveguide 160 to form a slit 150 between these optical waveguides 140 and 160. The optical waveguides 140 and 160 have reflective planes 140a and 160a, respectively, wherein the reflective planes 140a and 160a are capable of reflecting light and face each other, and the slits 150 are formed between the reflective planes 140a and 160a. In this way, the reflection planes 140a and 160a can reflect the signal light and the spectral line light after the splitting, so that the signal light and the spectral line light can be transmitted in the slit 150.

Ideally, these screw shim 130 have the same thickness, but in practice, they are limited by the inevitable variables in the manufacturing process, so that the true thickness of these screw shim 130 is not the same. This may increase the degree of unevenness of the width G1 of the slit 150, that is, it may increase the difference between the maximum value and the minimum value of the width G1, resulting in a decrease in the resolution of the spectrometer.

Further, when these optical waveguides 140, 160 are assembled by these screws 110, the degree of unevenness of the width G1 may increase due to an erroneous assembly method. For example, the torque applied to the screw 110 is so large that the screw washer 130 may be deformed, so that it is also possible to increase the difference between the maximum value and the minimum value of the width G1. Thus, the degree of unevenness of the width G1 of the slit 150 is increased.

The invention provides an optical machine of a spectrometer, which uses a pedestal to support one of the optical waveguides, and forms a gap channel between the two optical waveguides for transmitting light.

The invention further provides a spectrometer comprising the above described optical machine.

The invention provides a spectrometer comprising a light machine and a light sensing element. The optical machine includes a base, a first optical waveguide, a second optical waveguide, and a diffraction grating. The base includes a stage and at least one support. The stage has a bearing surface, and the supporting portion is connected to the loading platform and positioned around the bearing surface, wherein the bearing surface is located between at least two of the supporting portions. The first optical waveguide has a first reflective plane, and the second optical waveguide has a second reflective plane, wherein the first optical waveguide is disposed between the second optical waveguide and the bearing surface, and the first reflective plane and the second reflective plane Face to face with each other. The support portion protrudes from the bearing surface and the first reflective plane, and supports the second optical waveguide such that a gap channel is formed between the first reflective plane and the second reflective plane, and the gap channel is used for transmitting a signal light. The diffraction grating is disposed above the carrying surface and is used to split the signal light transmitted in the gap channel to form multi-line light. The light sensing element receives these spectral lines.

In one embodiment, the light sensing element is disposed in a focus range of the line light.

The invention further provides an optical machine of a spectrometer comprising a base, a first optical waveguide and a second optical waveguide. The base includes a stage and at least one support. The stage has a bearing surface, and the support portion is connected to the stage. The first optical waveguide has a The first reflecting plane. The second optical waveguide has a second reflective plane, wherein the first optical waveguide is disposed between the second optical waveguide and the bearing surface, and the first reflective plane and the second reflective plane face each other. The support portion protrudes from the bearing surface and the first reflecting plane, and supports the second optical waveguide to form a gap channel between the first reflecting plane and the second reflecting plane, wherein the gap channel is used to transmit a signal light and more Road line light.

In an embodiment, the support portion is around the bearing surface, and the bearing surface is located between at least two of the support portions. In another embodiment, the support portion has a support surface and a light guiding slope connected to the support surface, and the second optical waveguide is disposed on the support surface. The loading platform further has at least one groove, and the groove has a bottom surface and a side wall inclined surface. The side wall inclined surface is connected to the bottom surface, the bearing surface and the light guiding inclined surface, and the bearing surface does not overlap the bottom surface. The number of the grooves is plural, and the bearing surface is located between the two grooves. In still another embodiment, the first optical waveguide protrudes from an edge of the slope of the sidewall.

In an embodiment, the first optical waveguide has a pair of notches, and wherein the support portion extends into the notch. In another embodiment, the first optical waveguide is disposed on the bearing surface. In still another embodiment, the first reflective plane has a grating arrangement area, and the diffraction grating is disposed on the first reflection plane and is located in the grating arrangement area. In a further embodiment, the pedestal further includes a grating carrying portion connecting the loading platform, the grating bearing portion is around the bearing surface, and protrudes from the bearing surface and the first reflecting plane, and the grating The bearing portion is below the second optical waveguide, and the diffraction grating is disposed on the grating carrying portion. The grating carrying portion has a supporting surface and a light guiding inclined surface connected to the supporting surface, wherein the diffraction grating is disposed on the supporting surface, and the light guiding inclined surface faces the first optical waveguide, the bearing surface and the supporting surface Formed by the same process.

In an embodiment, the gap channel has an optical entrance and an optical outlet. The signal light enters the gap channel from the light entrance port, and the diffraction grating splits the signal light from the light entrance port to form the line light, and the line light is directed from the diffraction grating toward the light exiting The port is transferred, and the support portion is not located on the transmission path of the signal light and the transmission path of the spectral line light. The spectrometer further includes an light incident component, wherein the light incident component is located at the light entrance port, and the signal light passes through the light incident component and the light entrance port in sequence. The light incident component includes a connector and a slit member. The connector is disposed on the base. The slit member is disposed between the connecting head and the light entrance opening.

In an embodiment, the light entrance opening and the light exit opening are formed between the first reflective plane and the second reflective plane. In another embodiment, the support portion has a support surface, and the bearing surface and the support surface are formed by the same process.

Since the support portion protrudes from the bearing surface of the stage and the first reflection plane and supports the second optical waveguide, a gap passage capable of transmitting light is formed between the first optical waveguide and the second optical waveguide.

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying claims limits.

2A is a perspective view showing the appearance of a spectrometer according to an embodiment of the present invention, and FIG. 2B is a perspective view showing the internal structure of the spectrometer of FIG. 2A. Referring to FIG. 2A and FIG. 2B, the spectrometer 20 includes a light machine 22, and the light machine 22 includes a base 200, a first optical waveguide 240, a second optical waveguide 260, and a diffraction grating 270, wherein the first light The waveguide 240 is disposed on the susceptor 200, and the second optical waveguide 260 is disposed above the first optical waveguide 240. Therefore, the first optical waveguide 240 is located between the second optical waveguide 260 and the susceptor 200. The diffraction grating 270 can then be disposed on the first optical waveguide 240.

The spectrometer 20 can receive the signal light L1, and the signal light L1 can be in the first optical waveguide 240. It is transmitted between the second optical waveguide 260 and is incident on the diffraction grating 270. When the signal light L1 is transmitted to the diffraction grating 270, the diffraction grating 270 can split the signal light L1 to form the multi-line light L1a according to the principle of diffraction.

The spectrometer 20 can further include a photo-sensing element 290, such as a Charge-Coupled Device (CCD) or a CMOS Image Sensor (CIS). The light sensing element 290 can be disposed on the susceptor 200 and can receive the spectral line light L1a for spectral analysis. In more detail, the light sensing element 290 can be disposed in the focus range of the above-described spectral line light L1a. Specifically, the light sensing component 290 can convert the spectral line light L1a into an electrical signal and transmit the electrical signal to the spectral analysis device, and the spectral analysis device can perform signal processing on the electrical signal. Thus, these spectral line lights L1a are subjected to spectral analysis.

The spectrometer 20 can further include at least one transmission line 206, and the transmission line 206 can be electrically coupled to the photo sensing element 290 and the spectroscopic analysis device to enable electrical signals to be transmitted from the photo sensing element 290 to the spectroscopic analysis device. The above-described spectral analysis device is, for example, a computer, a microprocessor, or an arithmetic unit. In the present embodiment, a computer is taken as an example for description. The transmission line 206 can have a port-specific plug, wherein the port is, for example, a Universal Serial Bus (USB), and other transmission interfaces can be used in other embodiments.

It should be noted that, depending on the user's demand for the spectrometer 20, the light sensing element 290 can also have a spectral analysis function, so that it is not necessary to electrically connect the spectral analysis device. For example, light sensing element 290 can be provided with a simple spectral analysis function to satisfy some consumers who require only basic spectral analysis functions for spectrometer 20. Therefore, the light sensing element 290 may not necessarily have to be additionally connected to the spectral analysis device, and the spectrometer 20 may not include the transmission line 206. Therefore, the transmission line 206 in Figures 2A and 2B is for illustrative purposes only.

Spectrometer 20 can further include a filter 280. The filter 280 is disposed on the susceptor 200 and is located between the first optical waveguide 240 and the photo sensing element 290, wherein the spectra The line light L1a penetrates the filter 280. The filter 280 can pass light having a wavelength within a specific range and absorb or reflect light having a wavelength outside the above specific range, so that the filter 280 can filter the line light L1a according to the wavelength of the line light L1a. The light that is stray light is, for example, a light of a second order or more.

The signal light L1 is transmitted between the first optical waveguide 240 and the second optical waveguide 260 by means of reflection. In detail, the first optical waveguide 240 has a first reflective plane 240a, and the second optical waveguide 260 has a second reflective plane 260a, wherein the first reflective plane 240a and the second reflective plane 260a can reflect light, and the first The reflective plane 240a and the second reflective plane 260a face each other.

Therefore, the signal light L1 can be reflected by the first reflective plane 240a and the second reflective plane 260a, and can be transmitted between the first optical waveguide 240 and the second optical waveguide 260 in a reflective manner. In addition, both the first optical waveguide 240 and the second optical waveguide 260 may be rigid rigid plates, such as a metal plate or a glass plate coated with a reflective material, such as a stainless steel plate or an aluminum alloy plate, The first optical waveguide 240 and the second optical waveguide 260 are less susceptible to deformation by application of an external force.

Since the signal light L1 and L1a are transmitted by the reflection of both the first reflective plane 240a and the second reflective plane 260a, the surfaces of both the first reflective plane 240a and the second reflective plane 260a must be relatively smooth to reduce the signal. The case where the light L1 and L1a are scattered, wherein the flatness of both the first reflective plane 240a and the second reflective plane 260a may be below 50 nanometers (nm), and the flatness described herein refers to a plane. The difference between the highest and lowest points. Therefore, the difference between the highest and lowest points on the first reflecting plane 240a and the difference between the highest and lowest points on the second reflecting plane 260a are below 50 nm.

In addition, the spectrometer 20 can include a light incident component 208 disposed on the susceptor 200, and the light incident component 208 can direct the signal light L1 into a region between the first optical waveguide 240 and the second optical waveguide 260. In this embodiment, the signal light L1 may come from an optical fiber or other optical component, and the light incident component 208 may include a connector 208a. And a slit member 208b, wherein the slit member 208b has at least one slit, and the connector 208a can be provided for the optical fiber or other optical component, and can optically couple the signal light L1 to the slit member 208b. The slit. Therefore, the spectrometer 20 can be connected to an optical component such as an optical fiber.

The signal light L1 can penetrate the connector 208a and the slit member 208 to enable the signal light L1 to enter the region between the first optical waveguide 240 and the second optical waveguide 260 via the light incident element 208. Further, the slit member 208b is disposed between the first optical waveguide 240 and the connector 208a. When the signal light L1 enters the light entering element 208, the signal light L1 sequentially enters the area between the first optical waveguide 240 and the second optical waveguide 260 through the slits of the connecting head 208a and the slit member 208b, as shown in the figure. 2B is shown.

It should be noted that the spectrometer 20 may further include an upper cover 202, and the upper cover 202 may be fixed above the base 200, and the upper cover 202 may be a plastic cover or a metal cover, wherein the metal cover may be made of a rigid material with a rigid texture. For example, it is made of stainless steel or aluminum alloy. The upper cover 202 can completely cover a plurality of components on the susceptor 200, which can include a first optical waveguide 240, a second optical waveguide 260, a diffraction grating 270, and a light sensing element 290. As such, the upper cover 202 protects these components from foreign objects.

Secondly, the upper cover 202 can also reduce the dust dropped to these elements to prevent the resolution of the spectrometer 20 from being deteriorated by the influence of the signal light L1 and the spectral line light L1a. Further, the inner side color of the upper cover 202 may be a dark color, such as dark blue or black, so that the upper cover 202 has a function of absorbing stray light. In addition, the upper cover 202 can also serve as an exterior member of the spectrometer 20, i.e., the upper cover 202 will exhibit the overall appearance of the spectrometer 20.

The spectrometer 20 can further include at least one fixture 204. For example, in the present embodiment, the number of the fixing members 204 included in the spectrometer 20 is eight, but in other embodiments, the number of the fixing members 204 included in the spectrometer 20 may be only one. The upper cover 202 can be coupled to the base 200 by the fixing members 204 to enable the upper cover 202 to be fixed above the base 200.

In the present embodiment, the fixing member 204 may be a fastener such as a screw, so the upper cover 202 may be screwed to the base 200. However, in other embodiments, the upper cover 202 may also be combined with the base 200 by other means such as snapping or gluing. Therefore, the fixing member 204 shown in Fig. 2A is for illustrative purposes only.

2C is a perspective view of the base of FIG. 2B. Referring to FIGS. 2B and 2C , the base 200 includes a stage 210 and at least one support portion 220 . In the present embodiment, a plurality of support portions 220 will be described as an example. However, in other embodiments, it can also be implemented by a single support portion, for example, through a large-area annular support portion. The loading platform 210 has a bearing surface 212, and the supporting portions 220 are connected to the loading platform 210 and are located around the bearing surface 212. The supporting portion 220 can be integrally formed with the loading platform 210, that is, the supporting portion 220 can be directly connected to the loading platform 210. Or the support portion 220 can be indirectly connected to the stage 210 through glue, screws or other connecting elements. The bearing surface 212 may be located between at least two of the support portions 220, and the support portions 220 protrude from the bearing surface 212 and support the second optical waveguide 260.

The second optical waveguide 260 is disposed on the support portion 220, and the first optical waveguide 240 is disposed on the bearing surface 212 and disposed between the second optical waveguide 260 and the bearing surface 212. The second optical waveguide 260 can be fixed. On these support portions 220, the first optical waveguide 240 can be fixed to the bearing surface 212. For example, the second optical waveguide 260 can be fixed to the support portions 220 by using a glue or a screw, and the first optical waveguide 240 can be fixed to the bearing surface 212. When the first optical waveguide 240 and the second optical waveguide 260 are respectively bonded and fixed to the supporting surface 212 and the supporting portions 220 by using a rubber material, the first optical waveguide 240 and the second optical waveguide 260 can be prevented from rotating.

In addition, the support portions 220 can also function to position the first optical waveguide 24 and the second optical waveguide 260 to help the first optical waveguide 24 and the second optical waveguide 260 can be assembled in the correct position. The sizes of the first optical waveguide 240 and the second optical waveguide 260 may be different from each other, and the first optical waveguide 240 and the second optical waveguide 260 may be assembled to the susceptor 200 in such a manner as to be misaligned with each other.

The diffraction grating 270 is disposed above the carrier surface 212 and can be disposed on the first reflective plane 240a, wherein the first reflective plane 240a can have a grating arrangement area 240b and the diffraction grating 270 is positioned within the grating arrangement area 240b. In addition, the second optical waveguide 260 further has a notch 260b corresponding to the grating arrangement area 240b. When the second optical waveguide 260 is disposed on the support portion 220 and covers the first reflective plane 240a, the diffraction grating 270 is positioned in the notch 260b without being covered by the second optical waveguide 260.

It should be noted that although in the present embodiment, the diffraction grating 270 is disposed on the first reflective plane 240a, in other embodiments, the diffraction grating 270 may be disposed on one of the support portions 220, or may be configured. At other locations on the stage 210. Therefore, the arrangement position of the diffraction grating 270 shown in FIG. 2B is for illustrative purposes only.

The susceptor 200 may further include at least two support portions 226, wherein the first optical waveguide 240 is located between the support portions 226. The support portion 226 not only has a function of supporting the second optical waveguide 260, but also limits the movement of the first optical waveguide 240. In detail, when the first optical waveguide 240 is moved by the spectrometer 20 due to moving or shaking, the supporting portions 226 can block the movement of the first optical waveguide 240 to reduce the transmission path of the signal light L1 and the spectral line light L1a. The situation of the change, in turn, maintains or increases the resolution of the spectrometer 20.

The first optical waveguide 240 can have a pair of notches 242 that extend into the notches 242, respectively. The support portion 226 has a low reflectance, and the color of the support portion 226 may be a low-brightness color such as black or dark blue. When the signal light L1 enters the region between the first optical waveguide 240 and the second optical waveguide 260 from the light entering element 208, the supporting portions 226 can shield part of the signal light L1 to make the signal light L1 enter the predetermined path as much as possible. The diffraction grating 270 is passed to reduce the formation of stray light.

However, it is still emphasized that although in the embodiment shown in FIG. 2B, the base 200 includes the support portion 226, in other embodiments than FIG. 2B, the base 200 may not include the support portion 226. The first optical waveguide 240 may also have no gap 242. Therefore, the support portion 226 shown in Fig. 2B is for illustrative purposes only.

In addition, in particular, the second optical waveguide 260 may have a function of positioning the optical elements such as the diffraction grating 270, the light incident element 208, and the second optical waveguide 260, and the size and position of the optical components may be integrated in On the second optical waveguide 260, that is, the entire optical path accuracy of the spectrometer 20, as long as the tolerance and processing accuracy of the second optical waveguide 260 are controlled, the assembly position of these optical components can be ensured.

2D is a schematic cross-sectional view taken along line B-B of FIG. 2C. Referring to FIG. 2C and FIG. 2D, the stage 210 further has at least one groove 230. For example, in the embodiment illustrated in FIG. 2C, the stage 210 has a plurality of grooves 230, but in other embodiments, the number of grooves 230 may be only one. Therefore, the number of grooves 230 shown in FIG. 2C is for illustrative purposes only. Additionally, the bearing surface 212 can be positioned between two of the grooves 230, as shown in Figure 2C.

Each groove 230 has a bottom surface 232 and a side wall slope 234, and the side wall slope 234 is connected to the bottom surface 232. The width of the groove 230 as a whole is increased from the bottom surface 232. Therefore, in the same groove 230, the area of the bottom surface 232 is smaller than the cross-sectional area of the opening of the groove 230, and the angle θ3 between the side wall slope 234 and the bottom surface 232 is greater than 90 degrees, so the bearing surface 212 and the bottom surface 232 do not overlap. That is, the bearing surface 212 does not lie directly above the bottom surface 232, i.e., the bottom surface 232 is not directly below the bearing surface 212, as shown in Figure 2D. In addition, the sidewall slope 234 of the recess 230 may have a ring shape as shown in FIG. 2C.

These support portions 220 and 226 have support faces 222, and second optical waveguides 260 are disposed above these support faces 222. In detail, in the embodiment, the second optical waveguide 260 may be disposed on the support surfaces 222 and contact the support surfaces 222. However, in other embodiments, a material such as a glue or a cushion may be disposed between the support surface 222 and the second optical waveguide 260 such that the second optical waveguide 260 is positioned above the support surfaces 222 without contacting these. Support surface 222.

At least one of the support portions 220 may have a light guiding bevel 224, wherein the light guiding slope 224 is connected to the supporting surface 222 and the sidewall slope 234 of the groove 230. Therefore, the support portion 220 can be positioned around the groove 230 as shown in FIG. 2D. In addition, as can be seen from FIG. 2D, the angle θ1 of the support portion 220 between the light guiding slope 224 and the support surface 222 is less than 90 degrees, for example, the angle θ1 may be less than or equal to 45 degrees, that is, the angle θ1 is an acute angle.

It should be noted that although the shapes of the grooves 230 are not identical, and the shapes of the support portions 220 are not identical, the structures of the grooves 230 are substantially identical to each other, and the support portions are substantially identical to each other. The structures of 220 are also substantially identical to each other. Further, these grooves 230 and the support portion 220 can be formed by the same manufacturing method. For example, the grooves 230 and the support portion 220 may be formed by the same processing process, wherein the processing process is, for example, milling, punching, injection molding, or electroforming. )...Wait. In this way, the tolerance of the groove 230 and the support portion 220 can be effectively controlled to make the size of the groove 230 and the support portion 220 more accurate.

2E is a schematic cross-sectional view taken along line A-A of FIG. 2B. Referring to FIG. 2B and FIG. 2E, the support portions 220 protrude not only from the bearing surface 212 but also from the first reflective plane 240a to form a gap between the first reflective plane 240a and the second reflective plane 260a. Channel 250, so first optical waveguide 240 does not contact second optical waveguide 260. The width T2 of the gap channel 250 may be between 100 micrometers (μm) and 150 micrometers, and the gap channel 250 is used to transmit the signal light L1. In other embodiments, the gap channels 250 of different widths T2 can also be formed in the same manner.

The gap channel 250 has a light entrance 250a and a light exit 250b, wherein the light entrance 250a and the light exit 250b are formed between the first reflective plane 240a and the second reflective plane 260a. The light incident element 208 is located at the light entrance 250a, and the light sensing element 290 is located at the light exit 250b. The slit member 208b is disposed between the connector 208a and the light entrance 250a, and the signal light L1 sequentially passes through the light entering component 208 and the light inlet 250a, and enters the gap channel 250 from the light inlet 250a, as shown in FIG. 2B. . Diffraction grating 270 The signal light L1 from the light entrance port 250a can be split to form the line light L1a, and the line light L1a is transmitted from the diffraction grating 270 toward the light exit port 250b.

In particular, the support portions 220 are not located on the transmission path of the signal light L1 and the transmission paths of the spectral line lights L1a. Therefore, the substantially received line light L1a of the light sensing element 290 is not reflected or scattered by the support portion 220 to reduce the adverse effect of the support portion 220 on the line light L1a, thereby maintaining or improving the spectrometer 20. Resolution and sensitivity.

Further, when the signal light L1 is split by the diffraction grating 270 to form the line light L1a, some stray light L2 is inevitably formed as shown in Figs. 2B and 2E. When the stray light L2 leaves the gap channel 250 for the first time, the stray light L2 mostly leaves the gap channel 250 from the place other than the light exit port 250b, and some stray light L2 that has just left the gap channel 250 enters the groove. 230, as shown in Figure 2E.

Referring to FIG. 2E , the light guiding slope 224 of the supporting portion 220 faces the first optical waveguide 240 , and the angle θ1 of the supporting portion 220 between the light guiding inclined surface 224 and the supporting surface 222 is less than 90 degrees. Therefore, when the stray light L2 enters the groove 230, the stray light L2 is usually incident on the light guiding slope 224 first and is reflected by the light guiding slope 224. Thereafter, the light guiding ramp 224 reflects the stray light L2 to the bottom surface 232 or the sidewall slope 234 of the recess 230. Once the stray light L2 is reflected by the light guiding ramp 224 into the recess 230, the stray light L2 will reflect back and forth in the recess 230, making it difficult to re-enter the gap channel 250. The stray light L2 decays and disappears after multiple reflections. It should be noted that the light guiding ramp 224 facing the first optical waveguide 240 is only an alternative embodiment. In other embodiments, the light guiding ramp 224 can also direct stray light elsewhere, and can be combined with a light attenuation structure or a light trapping structure to improve the problem of stray light returning to the optical waveguide.

Moreover, in the embodiment illustrated in FIG. 2E, the first optical waveguide 240 may protrude from the edge 234e of the sidewall bevel 234 such that the first reflective plane 240a partially overlaps the bottom surface 232 of the recess 230. After the stray light L2 enters the groove 230, the stray light L2 It will be reflected by the bottom surface 232 or the sidewall slope 234 to enter the space between the first optical waveguide 240 and the sidewall slope 234 below it. After that, the stray light L2 will be reflected back and forth in this space and the groove 230.

It can be seen that the light guiding slope 224 can guide the stray light L2 into the lower groove 230 so that the groove 230 can trap the stray light L2. In this way, the probability of occurrence of the stray light L2 returning to the gap channel 250 can be reduced, and the stray light L2 received by the light sensing element 290 can also be reduced, thereby improving the resolution of the spectrometer 20.

2F is a perspective view of the diffraction grating of FIG. 2B, and FIG. 2G is a bottom view of the diffraction grating of FIG. 2F. Referring to Figures 2F and 2G, the diffraction grating has various embodiments, and the diffraction grating 270 shown in Figures 2F and 2G is one of the various embodiments described above. Therefore, it is previously stated that the diffraction grating 270 shown in FIGS. 2F and 2G is for illustrative purposes only. In the present embodiment, the diffraction grating 270 is described by taking a reflective diffraction grating as an example. In other embodiments, those skilled in the art can also implement the transmissive diffraction grating according to their needs.

The diffraction grating 270 has a side plane 272, a recess 274 exposed to the side plane 272, and a plurality of diffractive structures 276 located within the recess 274, wherein the recess 274 has a wall 278 connected to the side plane 272, and these diffractions Structure 276 extends to wall 278 (shown in Figure 2F). Moreover, the diffractive structures 276 are distributed within the recesses 274 along a curved surface 270a, and the curved surface 270a can be any curved surface, such as an aspherical free curved surface.

As described above, the diffraction structures 276 distributed along the curved surface 270a can not only divide the signal light L1 into a plurality of spectral line lights L1a, but also focus the spectral line light L1a on the light sensing element 290. Therefore, with the design of the distribution of these diffractive structures 276 along the curved surface 270a, the number of optical components (e.g., collimating or focusing mirrors) used by the spectrometer 20 can be reduced to simplify the optical design of the spectrometer 20.

Moreover, these diffractive structures 276 may be via a microelectromechanical process Formed by (Micro-Electromechanical System Process, MENS Process). For example, the material constituting the diffraction grating 270 may be tantalum, and the method of forming the diffraction structures 276 may be photolithography and etching of the tantalum material, such as a tantalum wafer. In addition, in other embodiments, the diffraction structure may also be formed by processes such as electroforming, Holography, or machining, such as tool cutting.

It should be noted that when the diffraction structures 276 are formed by lithography and etching of the germanium material, the diffraction structure 276 is superior to the end of the wall surface 278 at the end away from the wall surface 278 in terms of the contour of the structure. In the diffractive structures 276 of Figure 2F, the better the contour of the diffractive structure 276, the better the spectral splitting function.

2H is a schematic cross-sectional view of the spectrometer of FIG. 2A at a diffraction grating. Please refer to FIG. 2H, in which FIG. 2H illustrates the configuration of the diffraction grating 270 with respect to the first optical waveguide 240 and the second optical waveguide 260. The diffraction grating 270 can be disposed within the grating arrangement region 240b of the first reflective plane 240a, and one end of the second optical waveguide 260 can abut against the side plane 272 of the diffraction grating 270, as shown in Figure 2H.

Further, the width T2 of the gap passage 250 is greater than the height T1 of the diffraction structure 276. In the present embodiment, the height T1 of the diffractive structure 276 may be above 25 microns, such as 50 microns, and the width T2 of the gap channel 250 may be between 100 microns and 150 microns. Therefore, the second optical waveguide 260 does not protrude from the wall surface 278 of the diffraction grating 270.

3 is a schematic cross-sectional view of a spectrometer at a diffraction grating according to another embodiment of the present invention. Referring to FIG. 3, the spectrometer 30 of the present embodiment is substantially identical in structure to the spectrometer 20 of the previous embodiment, except that the main difference between the spectrometers 20 and 30 is that the spectrometers 20 and 30 are arranged in a diffraction grating 270. The location is different. Since the spectrometers 20 and 30 are substantially identical in structure, only the main differences described above will be described below. As for the same features of the spectrometers 20 and 30, the description will not be repeated in principle.

Specifically, in addition to the diffraction grating 270, the spectrometer 30 further includes a susceptor 300, a first optical waveguide 340, and a second optical waveguide 360, wherein the diffraction grating 270 It is disposed on the base 300. In detail, the susceptor 300 includes a plurality of supporting portions 220 (not shown in FIG. 3 ), a loading stage 210 and a grating carrying portion 320 connecting the stages 210 , and the grating carrying portion 320 is located on the bearing surface of the stage 210 . Surrounding 212, and protruding from the bearing surface 212 and the first reflective plane 340a of the first optical waveguide 340.

In the above, the diffraction grating 270 is disposed on the grating carrying portion 320, and the grating carrying portion 320 has a supporting surface 322 and a light guiding inclined surface 324 connected to the supporting surface 322, wherein the diffraction grating 270 is disposed on the supporting surface 322. The light guiding ramp 324 faces the first optical waveguide 340, and the angle θ5 of the grating carrying portion 320 between the light guiding slope 324 and the supporting surface 322 is less than 90 degrees, as shown in FIG.

The distance T3 between the wall surface 278 of the diffraction grating 270 and the first reflection plane 340a may be greater than the distance T4 between the first reflection plane 340a and the second reflection plane 360a of the second optical waveguide 360, wherein the distance T4 is equivalent to the first The width of the gap channel formed between the reflective plane 340a and the second reflective plane 360a, and the distance T4 may be equal to the width T2 of the gap channel 250 in the previous embodiment. In other embodiments, the distance T3 between the wall surface 278 of the diffraction grating 270 and the first reflective plane 340a may also be less than the distance T4 between the first reflective plane 340a and the second reflective plane 360a of the second optical waveguide 360.

It can be seen from FIG. 3 that in the diffraction grating 270, the bottom end portion of the diffraction structure 276 is positioned above the first reflection plane 340a. When these diffraction structures 276 are formed by lithography and etching of the germanium material, the bottom end portion of the diffraction structure 276 has an excellent structure, and therefore, when the bottom end portion of the diffraction structure 276 is at the first reflection plane 340a When it is above, most of the signal light L1 can be incident on the bottom end portion of the diffraction structure 276. As such, the diffraction grating 270 can provide a good splitting function to increase the resolution and sensitivity of the spectrometer 30.

In addition, the grating carrier 320 can be positioned around the recess 230 of the stage 210, wherein the light guiding ramp 324 connects the support surface 322 with the sidewall slope 234 of the recess 230, as shown in FIG. It can be seen that the structure of the grating carrying portion 320 is substantially opposite to the supporting portion 220. The structure is the same, and the light guiding slope 324 can also guide the stray light L2 into the lower groove 230 so that the groove 230 can capture the stray light L2 to avoid affecting the resolution of the spectrometer 20.

In addition, due to the configuration of the diffraction grating 270, the first optical waveguides 340, 240 are different in appearance from each other, and the second optical waveguides 360, 260 are different in appearance from each other. For example, the first optical waveguide 340 does not have the grating arrangement area 240b, and the second optical waveguide 260 does not have the gap 260b. However, although the appearance is different, the materials, functions, and substantial structures of the first optical waveguide 340 and the second optical waveguide 360 are the same as those of the first optical waveguide 240 and the second optical waveguide 260 in the foregoing embodiment, and thus Repeat it again.

In summary, in the spectrometer of the above embodiment, since the support portions protrude from the bearing surface of the stage and the first reflection plane of the first optical waveguide, and support the second optical waveguide, the first optical waveguide and the first optical waveguide A gap channel is formed between the two optical waveguides to transmit light. Compared with the prior art, the width of the gap passage of the above embodiment is not affected by the different thicknesses or deformations of the screw washers, and there is no problem of screw twisting, thereby having a low degree of unevenness. In this way, the resolution of the spectrometer is maintained or increased.

Secondly, a plurality of diffraction structures of the diffraction grating can be distributed along the curved surface to reduce the number of optical components, thereby achieving the effect of simplifying the optical design. In addition, the support portion may further have a function of assembling and positioning the first optical waveguide and the second optical waveguide to help the first optical waveguide and the second optical waveguide are assembled at the correct position, and the second optical waveguide may further have The functions of the optical element positioning reference such as the diffraction grating, the light incident element and the second optical waveguide are such that the size and position of the optical element are integrated on the second optical waveguide. From this, it is understood that the spectrometer of the above embodiment also has the advantage of simplifying the assembly process.

The above is only the embodiment of the present invention, and it is still within the scope of patent protection of the present invention to make the equivalent replacement of the modification and retouching without departing from the spirit and scope of the present invention.

20, 30, 100‧ ‧ spectrometer

22‧‧‧Optical machine

110‧‧‧ screws

130‧‧‧Screw gasket

140, 160‧‧‧ optical waveguide

140a, 160a‧‧‧reflection plane

150‧‧‧slit

200, 300‧‧‧ base

202‧‧‧上盖

204‧‧‧Fixed parts

206‧‧‧ transmission line

208‧‧‧ light-in components

208a‧‧‧Connecting head

208b‧‧‧slit parts

210‧‧‧Package

212‧‧‧ bearing surface

220, 226‧‧ ‧ support

222, 322‧‧‧ support surface

224, 324‧‧‧Light guiding bevel

230‧‧‧ Groove

232‧‧‧ bottom

234‧‧‧ sidewall bevel

234e‧‧‧ edge

240, 340‧‧‧First optical waveguide

240a, 340a‧‧‧ first reflection plane

240b‧‧‧Grating configuration area

242, 260b‧‧ ‧ gap

250‧‧‧ clearance channel

250a‧‧‧Into the light port

250b‧‧‧Light outlet

260, 360‧‧‧Second optical waveguide

260a, 360a‧‧‧second reflection plane

270‧‧‧Diffraction grating

270a‧‧‧ surface

272‧‧‧Side plane

274‧‧‧ dent

276‧‧‧Diffraction structure

278‧‧‧ wall

280‧‧‧Filter

290‧‧‧Light sensing components

320‧‧‧Grating carrier

Θ1, θ5‧‧‧ angle

Θ3‧‧‧ angle

G1, T2‧‧‧ width

L1‧‧‧ Signal Light

L1a‧‧‧ line light

L2‧‧‧ stray light

T1‧‧‧ height

T3, T4‧‧‧ distance

1 is a schematic cross-sectional view of a conventional spectrometer.

2A is a perspective view showing the appearance of a spectrometer according to an embodiment of the present invention.

2B is a perspective view showing the internal structure of the spectrometer of FIG. 2A.

2C is a perspective view of the base of FIG. 2B.

2D is a schematic cross-sectional view taken along line B-B of FIG. 2C.

2E is a schematic cross-sectional view taken along line A-A of FIG. 2B.

2F is a perspective view of the diffraction grating of FIG. 2B.

2G is a bottom view of the diffraction grating of FIG. 2F.

2H is a schematic cross-sectional view of the spectrometer of FIG. 2A at a diffraction grating.

3 is a schematic cross-sectional view of a spectrometer at a diffraction grating according to another embodiment of the present invention.

20‧‧‧ Spectrometer

22‧‧‧Optical machine

200‧‧‧Base

206‧‧‧ transmission line

208‧‧‧ light-in components

208a‧‧‧Connecting head

208b‧‧‧slit parts

210‧‧‧Package

220, 226‧‧ ‧ support

230‧‧‧ Groove

240‧‧‧First optical waveguide

240a‧‧‧First reflection plane

240b‧‧‧Grating configuration area

242, 260b‧‧ ‧ gap

250a‧‧‧Into the light port

250b‧‧‧Light outlet

260‧‧‧Second optical waveguide

260a‧‧‧second reflection plane

270‧‧‧Diffraction grating

280‧‧‧Filter

290‧‧‧Light sensing components

L1‧‧‧ Signal Light

L1a‧‧‧ line light

L2‧‧‧ stray light

Claims (18)

A spectrometer comprising: a light machine comprising: a base comprising a stage and at least one support portion, the stage having a bearing surface, wherein the support portion is coupled to the stage; a first optical waveguide having a a first reflective plane; a second optical waveguide having a second reflective plane, wherein the first optical waveguide is disposed between the second optical waveguide and the carrying surface, and the first reflective plane and the second reflective plane Facing face to face, the support portion protrudes from the bearing surface and the first reflection plane, and supports the second optical waveguide to form a gap channel between the first reflection plane and the second reflection plane; and a winding A grating is disposed above the carrying surface and configured to split a signal light transmitted in the gap channel to form a plurality of spectral lines of light; and a light sensing component to receive the spectral lines. The spectrometer of claim 1, wherein the support portion is around the bearing surface, and the bearing surface is located between at least two of the support portions. The spectrometer of claim 1, wherein the support portion has a support surface and a light guiding slope connected to the support surface, and the second optical waveguide is disposed on the support surface. The spectrometer of claim 3, wherein the stage further has at least one groove, and the groove has a bottom surface and a side wall inclined surface, the side wall inclined surface connecting the bottom surface, the bearing surface and the light guiding slope The bearing surface does not overlap the bottom surface. The spectrometer of claim 4, wherein the number of the grooves is plural, and the bearing surface is located between the two grooves. The spectrometer of claim 4, wherein the first optical waveguide protrudes from an edge of the bevel of the sidewall. The spectrometer of claim 1, wherein the first optical waveguide has a pair of notches, and wherein the support portion extends into the notches. The spectrometer of claim 1, wherein the first optical waveguide is disposed on the carrying surface. The spectrometer of claim 1, wherein the first reflecting plane has a grating arrangement area, and the diffraction grating is disposed on the first reflection plane and is located in the grating arrangement area. The spectrometer of claim 1, wherein the base further comprises a grating carrying portion connecting the loading platform, the grating carrying portion is around the carrying surface, and protrudes from the carrying surface and the first a plane of reflection, and the grating carrying portion is below the second optical waveguide, and the diffraction grating is disposed on the grating carrying portion. The spectrometer of claim 10, wherein the grating carrying portion has a supporting surface and a light guiding inclined surface connected to the supporting surface, the diffraction grating is disposed on the supporting surface, and the light guiding inclined surface faces In the first optical waveguide, the bearing surface and the supporting surface are formed by the same process. The spectrometer of claim 1, wherein the gap channel has an light entrance port and an light exit port, and the signal light enters the gap channel from the light entrance port, and the diffraction grating will be from the light entrance port The signal light is split to form the line light, and the line light is transmitted from the diffraction grating toward the light exit port, and the support portion is not located on the signal path of the signal light and the line light On the delivery path. The spectrometer of claim 12, further comprising an optical component, wherein the optical component is located at the optical port, and the signal light sequentially passes through the optical component and the optical port. The spectrometer of claim 13, wherein the light-receiving element comprises: a connector disposed on the base; and a slit member disposed between the connector and the light entrance. The spectrometer of claim 12, wherein the light entrance and the light exit are formed between the first reflective plane and the second reflective plane. The spectrometer of claim 1, wherein the support portion has a support surface, and the support surface and the support surface are formed by the same process. The spectrometer of claim 1, wherein the photo sensing element is disposed in a focus range of the line light. An optical machine of a spectrometer comprising: a base comprising a stage and at least one support portion, the stage having a bearing surface, wherein the support portion is coupled to the stage; a first optical waveguide having a first reflection And a second optical waveguide having a second reflective plane, wherein the first optical waveguide is disposed between the second optical waveguide and the carrying surface, and the first reflective plane and the second reflective plane face each other The support portion protrudes from the bearing surface and the first reflection plane, and supports the second optical waveguide to form a gap channel between the first reflection plane and the second reflection plane, wherein the gap channel is used Passing a signal light and multiple lines of light.